CyberOptics 001 WaferSense ALS User Manual WaferSense TM ALS150 200 300 User s Guide

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Date Submitted	2005-02-02 00:00:00
Date Available	2005-02-02 00:00:00
Creation Date	2004-10-28 09:36:05
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Document Lastmod	2004-11-10 13:55:08
Document Title	WaferSense(TM) ALS150/200/300 User’s Guide
Document Creator	FrameMaker 7.0
Document Author:	Bruce Foster for CyberOptics Semiconductor, Inc.

CyberOptics
Semiconductor
WaferSense™
ALS150/200/300
User’s Guide
General
Information
Technical support is available from CyberOptics Semiconductor Monday through Friday,
8:00am to 5:00pm Pacific Time.
E-mail:
CSsupport@cyberoptics.com
Phone:
(503) 495-2200
800-366-9131 (US and Canada only)
Fax:
(503) 495-2201
WaferSense and LevelView are trademarks of CyberOptics Semiconductor, Inc.
Third-party brands and names are the property of their respective owners.
Copyright © 2003-2004, CyberOptics Semiconductor, Inc. All rights reserved.
CyberOptics Semiconductor, Inc.
13555 S.W. Millikan Way
Beaverton, OR 97005
P/N 920-0026-02
ii
Table of
Contents
General Information ......................................................ii
Chapter 1
Introduction....................................................................................1.1
Chapter 2
Installing Your ALS ....................................................................... 2.1
Installing the Software....................................................................2.1
Installing the Wireless Link............................................................2.3
Checking the Link to the Sensor ....................................................2.4
Registering Your Sensor for Calibration Service............................2.4
Running the LevelView Application ..............................................2.5
Technical Support ..........................................................................2.6
Chapter 3
Using Your ALS ............................................................................. 3.1
Using the ALS Sensor Buttons and Status Lights..........................3.2
Performing a Basic Inclination Measurement ...............................3.3
Alignment Marks ...................................................................................... 3.6
Setting the Stabilization Criteria ....................................................3.7
Setting the Go/No Go Tolerance...................................................3.8
Specifying a Reference Plane ....................................................... 3.10
Monitoring the Operating Temperature ...................................... 3.12
Logging Your Readings ............................................................... 3.13
Automatic and Manual Logging........................................................... 3.14
Including User-Specified Information in the Log File ..................... 3.15
Working in a Different Time Zone ..................................................... 3.15
Changing the Log File............................................................................ 3.15
Displaying Readings from a Log File .................................................. 3.16
iii
Table of Contents
Printing the LevelView Window................................................... 3.17
Using the Rechargeable Battery................................................... 3.18
Monitoring the Battery Level................................................................ 3.18
Charging the Battery .............................................................................. 3.18
Monitoring the Wireless Connection to the Sensor ..................... 3.19
Changing the Pairing Between the Sensor and Link ...................3.20
Saving Your Settings.....................................................................3.20
Loading Settings from a File................................................................. 3.21
Chapter 4
Maintaining Your ALS................................................................... 4.1
Annual Factory Calibration and Battery Replacement ..................4.1
Battery Use and Disposal ...............................................................4.2
Optional Calibration for Zero-Point Drift ......................................4.3
Chapter 5
Specifications................................................................................. 5.1
System Requirements .....................................................................5.1
ALS Hardware ................................................................................5.1
Environmental .......................................................................................... 5.1
Power.......................................................................................................... 5.1
Precision and Accuracy............................................................................ 5.1
Index.....................................................................Index.1
iv
List of
Illustrations
Chapter 2
Figure 2.1: The InstallShield Wizard.......................................................2.2
Figure 2.2: Found New Hardware Wizard..............................................2.3
Figure 2.3: Starting the LevelView Application ......................................2.5
Figure 2.4: The About LevelView Dialog ...............................................2.6
Chapter 3
Figure 3.1: The LevelView Application...................................................3.3
Figure 3.2: Stabilizing the Reading.........................................................3.4
Figure 3.3: Numeric Pitch and Roll Readouts........................................3.5
Figure 3.4: Bubble Level Displays ..........................................................3.6
Figure 3.5: Set Stabilization Criteria Dialog ...........................................3.7
Figure 3.6: The Go/No Go Tolerance ....................................................3.8
Figure 3.7: Set Go/No Go Tolerance Dialog..........................................3.8
Figure 3.8: Specifying a Reference Plane.............................................. 3.10
Figure 3.9: Left bubble Display with a Reference Plane ...................... 3.11
Figure 3.10: Temperature Monitoring Gauge ....................................... 3.12
Figure 3.11: Logging Controls ............................................................... 3.14
Figure 3.12: Displaying a Reading from a Log File .............................. 3.16
Figure 3.13: Battery Monitor ................................................................. 3.18
Figure 3.14: Wireless Connection Monitor............................................ 3.19
Chapter 4
Figure 4.1: Sensor Calibration Status Dialog ..........................................4.2
Figure 4.2: 1 of 4 Start Calibration Dialog...............................................4.4
Figure 4.3: 2 of 4 First Calibration Reading Dialog................................4.4
Figure 4.4: Marking the Sensor’s Position ..............................................4.5
Figure 4.5: 3 of 4 Second Calibration Reading Dialog............................4.6
Figure 4.6: Extending the Marks for the ALS150....................................4.6
Figure 4.7: Rotate and Align the Sensor .................................................4.7
Figure 4.8: 4 of 4 Finish Calibration Dialog............................................4.8
Chapter 1
Introduction
The CyberOptics Semiconductor WaferSense™ Auto Leveling Sensor (ALS) uses electronic
inclinometer technology, with accuracy equal to or better than ± 0.03 degree, over a range of
-4° to +4°, permitting more precise and efficient leveling adjustments than possible with the
human eye or traditional bubble levels. The two-dimensional bubble-level display in the
LevelView™ software application makes it easy to precisely adjust equipment. The large display
and wireless link let you place the computer at a convenient distance from the sensor.
ALS consists of the following components:
• Leveling sensor. The sensor is designed with a wafer-like form factor, so it can fit in
most wafer-handling equipment. The sensor package is also vacuum compatible.
• LevelView software. The LevelView software application monitors the sensor and
displays inclination angle and other status information in real time. LevelView runs on
most personal computers that use the Microsoft Windows operating system.
• Wireless link. The LevelView software communicates with the sensor by using a
Bluetooth (certification pending) wireless link that attaches to a USB port on a
personal computer.
• Sensor charging case. The sensor is powered by an internal rechargeable battery,
which you recharge by placing the sensor into the charging case.
• Carrying case. The carrying case makes it easy to take your complete ALS system
with you in the plant or on the road.
The following chapter gives you instructions for installing your ALS system.
1.1
Chapter 2
Installing Your ALS
This chapter describes the procedures you need to perform to install your ALS and get it ready
for use. For best results, perform the procedures in the order they are presented in this chapter:
1. Installing the software
2. Installing the wireless link on the USB port
3. Checking the link to the sensor
4. Registering your sensor
5. Running the LevelView application
Caution
Dropping the sensor or hitting it against a hard object can bend it, damage the internal
components, or knock it out of calibration. While it is not as fragile as an actual silicon
wafer, handle the sensor with care, as you would any precision instrument. If the sensor is
damaged or in need of calibration, see Chapter 4, “Maintaining Your ALS.”
Installing the Software
To run the WaferSense ALS software, your computer must have the following:
• Windows 98 Second Edition, Windows 2000, Windows Me, or Windows XP
operating system
• One free high-power USB 1.1 or USB 2.0 port
To install the WaferSense ALS software:
1. Log on using an account with Administrator privileges. (If you are using Windows 98 or
Windows Me, there is no separate Administrator account, and you can install as any user.)
2.1
Chapter 2 Installing Your ALS
2. Insert the WaferSense ALS Installation Disk into the CD Drive.
The InstallShield Wizard starts automatically, as shown in Figure 2.1. If the wizard doesn’t
start automatically, use Windows Explorer to view the contents of the CD and doubleclick the setup.exe program.
Figure 2.1: The InstallShield Wizard
3. Follow the instructions provided by the wizard to install the software.
4. After you complete the instructions for all of the wizard screens, click Finish. If
Windows notifies you that the drivers have not passed Windows logo testing, just click
Continue Anyway to complete the installation.
By default, the Setup program installs the LevelView application in a new program group called
WaferSense ALS. Setup also installs an online copy of this user’s guide, which is available from
the LevelView Help menu and in the WaferSense ALS program group in the Windows
Start menu.
2.2
Installing Your ALS Chapter 2
Installing the Wireless Link
To install the wireless link:
1. Turn on your computer.
2. Locate an unused, high-power USB port on your computer. The ALS wireless link
module requires a high-power USB port, such as the built-in ports on your computer and
ports on USB hubs that have power cords. Unpowered USB hubs won’t work.
3. The USB cable provided with your ALS has a different plug on each end. Locate the end
with the plug that matches the USB port on your computer and plug the cable into
the port.
4. Plug the other end of the cable into the link module.
The Windows operating system recognizes the new link module hardware and displays
the Found New Hardware Wizard, as shown in Figure 2.2.
Figure 2.2: Found New Hardware Wizard
5. Click Install the software automatically and click Next.
If you already installed the WaferSense ALS software (see “Installing the Software,” on
page 2.1), Windows will automatically find the drivers. If not, the drivers are located in the
Utilities folder on the installation CD-ROM.
6. After you complete the instructions for all of the wizard screens, click Finish.
The Power light on the module turns on indicating that the module is getting power from
the USB port. Ignore the Pair Status and Connection Status lights for now.
2.3
Chapter 2 Installing Your ALS
Checking the Link to the Sensor
To complete the installation, verify that the sensor and link can communicate as follows:
1. The sensor operates from an internal rechargeable battery. Before using the sensor for the
first time, charge it for two hours. For information on checking the charge on the battery
and the procedure for recharging, see “Using the Rechargeable Battery,” on page 3.18.
2. Remove the sensor from the charging case and press the ON OFF button to turn on
the sensor.
The Power light on the sensor turns on.
3. Verify that the Pair Status lights on both the sensor and link module are on. If either
light is not on, your sensor and link might not be paired with each other. To reset the
pairing, see “Changing the Pairing Between the Sensor and Link,” on page 3.20.
4. Immediately after turning on the sensor, the Connection Status lights on the sensor and
link will blink slowly. After a few seconds the sensor and link will connect and both lights
will be on and no longer blinking. If the lights continue to blink, see “Monitoring the
Wireless Connection to the Sensor,” on page 3.19.
5. After starting the LevelView application (see “Running the LevelView Application,” on
page 2.5), you can verify the connection to the sensor by comparing the serial number
printed on the sensor to the serial number shown in the About LevelView dialog, which is
available in the LevelView application by choosing the Help > About menu item.
That completes the installation of your ALS.
Registering Your Sensor for Calibration Service
Your WaferSense ALS needs to be returned to CyberOptics Semiconductor for calibration and
battery replacement every 12 months to perform at specified accuracy. The battery is not user
replaceable; replacement must be performed at the factory. The LevelView application (see
“Running the LevelView Application,” on page 2.5), prompts you to register your sensor for
calibration. Registering allows you to schedule your sensor’s calibration at a time that is most
convenient for you and to expedite its return. You must have a valid service contract for
calibration and service.
You can register your sensor in any of the following ways:
• On the Internet: www.CyberopticsSemi.com/calibrate
• By phone: 800-366-9131 (US and Canada only)
• By faxing the WaferSense ALS Calibration Registration to: (503) 495-2201
• By sending an e-mail message containing the information specified on the WaferSense
ALS Calibration Registration to: ALScalibrate@cyberoptics.com.
2.4
Installing Your ALS Chapter 2
Running the LevelView Application
To start the LevelView application:
•
From the Windows Start menu, choose WaferSense ALS > LevelView.
The LevelView application starts, and the sensor and PC exchange information, as
shown in Figure 2.3.
Figure 2.3: Starting the LevelView Application
Initializing communications usually takes less than 10 seconds. For information on using
LevelView, see “Chapter 3, Using Your ALS.”
2.5
Chapter 2 Installing Your ALS
Technical Support
CyberOptics Semiconductor offers free technical support to customers. If the ALS hardware or
the LevelView software appear to be malfunctioning, please contact us, and we’ll be happy to
assist you.
When you contact us, please make sure that you have the following information available:
• A detailed description of the problem you are having, including the exact text of any
error messages and a list of steps to reproduce the problem.
• The operating system running on your computer.
• Information about your computer, including manufacturer, CPU type, and
memory size.
• The serial number of your sensor and the version of the LevelView application. The
serial number of the sensor is printed on a label on the top of the sensor. The
software version (and the sensor serial number) are available in the LevelView
application by choosing the Help > About menu item.
Figure 2.4: The About LevelView Dialog
Technical support is available Monday through Friday, 8:00 A.M. to 5:00 P.M. Pacific Time.
• Voice: (503) 495-2200
• Toll free: 800-366-9131 (US and Canada only)
• Fax: (503) 495-2201
• E-mail: CSsupport@cyberoptics.com
• Internet: www.CyberopticsSemi.com
2.6
Chapter 3
Using Your ALS
This chapter gives you instructions for performing the following tasks with the ALS:
• Using the ALS sensor buttons and indicators
• Performing a basic inclination measurement
• Setting the stabilization criteria for inclination readings
• Setting the Go/No Go tolerance
• Specifying a reference plane
• Monitoring the operating temperature
• Logging your readings
• Printing the LevelView window
• Using the rechargeable battery
• Monitoring the connection between the sensor and link module
• Changing the pairing between the sensor and link module.
• Saving your settings
3.1
Chapter 3 Using Your ALS
Using the ALS Sensor Buttons and Status
Lights
ALS sensors have two buttons:
• ON OFF. Turns the sensor on and off. If the sensor suffers an electrostatic
discharge at the center charging contact, the sensor might stop responding, even
though it is turned on. To restore the sensor to normal operation, turn the sensor off
and then on again.
• NEW PAIR. Changes the pairing between a sensor and a link (see “Changing the
Pairing Between the Sensor and Link,” on page 3.20).
ALS sensors also have the following status lights:
• Power. Glows red while the sensor is turned on. Blinks slowly when the battery
power is at approximately 10% or less.
• Charging. Glows red when the sensor is being charged in the charging case.
• Charging Done. Glows red when the battery has reached at least 90% of full charge.
• Connection Status. Glows red when the sensor has established communication with
the link. Blinks slowly while the sensor is trying to establish a connection with the
link.
• Pair Status. Glows red when the sensor is paired with a link (see “Changing the
Pairing Between the Sensor and Link,” on page 3.20).
3.2
Using Your ALS Chapter 3
Performing a Basic Inclination Measurement
LevelView shows the angle of inclination of the sensor using two types of readouts
(see Figure 3.1):
• Graphical readouts that mimic bubble levels
• Numeric readouts that show inclination in two dimensions
LevelView updates the readings several times per second, so you see any changes in real time.
Numeric Roll and
Pitch Readouts
Left Bubble Display
Right Bubble Display
Figure 3.1: The LevelView Application
To perform a basic inclination measurement:
1. Make sure the computer running the LevelView application is within the range of the link
module, about 30 ft (10 m).
3.3
Chapter 3 Using Your ALS
2. The ALS200 and ALS300 sensors have an alignment notch in the edge similar to the
notch in the edge of a wafer. The ALS150 sensor has a flat side for alignment. Place the
sensor on the equipment you want to check, noting the alignment of the notch or
flat side.
When you move the sensor, the roll and pitch readings typically need a few seconds to
stabilize. The bubble displays and Roll and Pitch readouts are shaded during this
stabilization period, and a message in the left bubble display counts down the seconds, as
shown in Figure 3.2. Whenever the sensor detects pitch or roll movement, LevelView
restarts the stabilization countdown. You can set the length of the stabilization period and
the sensitivity that triggers the countdown (see “Setting the Stabilization Criteria,” on
page 3.7).
Countdown for
stabilizing the readings
Figure 3.2: Stabilizing the Reading
3.4
Using Your ALS Chapter 3
3. The Roll and Pitch readouts and bubble displays indicate the inclination of the sensor:
• The Roll and Pitch readouts (see Figure 3.3) indicate the number of degrees of
inclination, to 100ths of a degree, in two dimensions. Assuming the notch (flat side on
the ALS150) is in the edge of the sensor closest to you, Roll indicates side-to-side tilt,
and Pitch indicates front-to-back tilt. If the front edge is higher than the back or the
right edge is higher than the left, the readings are positive. Readings outside the
working range of the sensor are displayed as ####.
Roll
Pitch
Figure 3.3: Numeric Pitch and Roll Readouts
For information on the accuracy of the readings, see “Precision and Accuracy,” on page 5.1.
3.5
Chapter 3 Using Your ALS
•
The bubble level displays (see Figure 3.4) show the inclination graphically in real
time. In both bubble displays, the solid green circle represents the bubble. The red
circle indicates the Go/No Go setting, which you can adjust (see “Setting the Go/No
Go Tolerance,” on page 3.8). In the left bubble display, the outside edge of the display
area represents the maximum inclination reading, which is four degrees in all
directions. The bubble level display on the right is a magnified view showing just the
area within the dashed square of the left bubble display.
Go/No Go Circles
Alignment Notch
Bubbles
Figure 3.4: Bubble Level Displays
Alignment Marks
The notch in the edge of the ALS200 and ALS300 sensors and the flat side on the ALS150
sensor serve as alignment marks for placing the sensors into wafer-handling equipment. These
alignment marks also help you relate the bubble level displays to the orientation of the sensor.
In some cases you might need to place the sensor into equipment with the notch or flat side
turned away from you. This can make it more difficult to relate the bubble level displays to the
orientation of the sensor. For this reason, the sensors have additional alignment marks on the
vertical surface of the sensor near the edge. These marks consist of one to four vertical lines (|,
||, |||, or ||||) located at 0°, 90°, 180°, and 270° relative to the notch or flat side.
3.6
Using Your ALS Chapter 3
Setting the Stabilization Criteria
When the sensor detects motion in pitch or roll, the LevelView application displays a
countdown timer to indicate that the readings need time to stabilize (see Figure 3.2 on
page 3.4). The length of time that the readings need to stabilize depends on the operating
conditions and your required tolerance for stability. The default stabilization time (20 seconds)
and stabilization sensitivity (0.01 degrees) provide for the maximum stability. When making
rough measurements and adjustments, adjusting these settings lets you work more quickly.
To specify the stabilization criteria:
1. Choose the menu item Settings > Set Stabilization Criteria. This menu item is
unavailable when LevelView is set to display readings from a log file (see “Displaying
Readings from a Log File,” on page 3.16).
The Set Stabilization Criteria dialog is displayed, as shown in Figure 3.5.
Figure 3.5: Set Stabilization Criteria Dialog
2. In the Stabilization time list, choose the number of seconds you want LevelView to
pause to allow readings to stabilize, or click Use Default to reset the time to the default
20 seconds.
3. In the Stabilization sensitivity list, choose the fraction of a degree in pitch or roll
movement that you want to trigger LevelView to restart the stabilization counter. To reset
the value to the default, click Use Default to reset the sensitivity to 0.01 degree.
4. Click OK.
3.7
Chapter 3 Using Your ALS
Setting the Go/No Go Tolerance
The Go/No Go tolerance sets the diameter of the red circle in the bubble displays. This circle
makes it easy to see when you have leveled a piece of equipment to within an acceptable
tolerance. When the center of the bubble is within the Go/No Go circle, the bubble is green,
indicating that the reading is within your specified tolerance. When the center of the bubble
reaches or passes the edge of the Go/No Go circle, the bubble changes to red to indicate the
reading exceeds your specified tolerance.
Out of Tolerance
In Tolerance
Go/No Go Circle
Figure 3.6: The Go/No Go Tolerance
To change the Go/No Go value:
1. Choose the menu item Settings > Set Go/No Go Tolerance.
The Set Go/No Go Tolerance dialog is displayed, as shown in Figure 3.7.
Figure 3.7: Set Go/No Go Tolerance Dialog
3.8
Using Your ALS Chapter 3
2. Specify the New Go/No Go tolerance and click OK.
You can set the tolerance to any value in the range 0.05 to 3.9 degrees. However, if you are
using a reference plane (see “Specifying a Reference Plane,” on page 3.10), the maximum value
is less than 3.9 degrees. You can’t set a tolerance that would extend the Go/No Go circle
beyond the edge of the left bubble display area. If you try to set a value that is too large,
LevelView will change the value to the maximum.
Note
The radius of the bubble in the left bubble display is about 0.25 degree. If you set
the Go/No Go tolerance to less than this amount the red circle in the left bubble
display will be completely covered by the bubble when the bubble is centered.
The right bubble display will still show the bubble and the Go/No Go circle.
3.9
Chapter 3 Using Your ALS
Specifying a Reference Plane
By default, the sensor indicates absolute degrees of inclination, which is relative to a plane
perpendicular to the direction of the earth’s gravitational force. You can specify a different
reference plane, and the sensor will indicate degrees of inclination relative to that plane.
To specify a reference plane:
1. Place the sensor on the surface that you want to use as your reference plane.
2. Choose the menu item Settings > Set Reference Plane. This menu item is unavailable
when LevelView is set to display readings from a log file (see “Displaying Readings from a
Log File,” on page 3.16).
The sensor takes the current absolute inclination readings as offsets to the new
relative plane. The offsets are displayed in the Reference Plane readouts
(see Figure 3.8).
Figure 3.8: Specifying a Reference Plane
3. Select the Relative to option above the Reference Plane readouts.
You can switch the sensor between indicating absolute and relative inclination by clicking the
corresponding option button (see Figure 3.8). Switching between Absolute and Relative to
does not affect the current offsets for the reference plane inclination angles; LevelView retains
the last offsets until you change them.
3.10
Using Your ALS Chapter 3
When you specify a reference plane and set LevelView to display Relative to that plane, the
coordinate axes of the left bubble display shift within the display area, as shown in Figure 3.9.
Figure 3.9: Left bubble Display with a Reference Plane
This shift in the axes reflects the fixed range of the sensor relative to absolute level. The sensor
has a range of -4° to +4° from absolute level. If you set a reference plane at
-2° absolute pitch, the range of the sensor relative to that reference plane is -2° to +6° pitch.
Shifting the center of the bubble display to the left accurately represents the new range of the
sensor relative to the reference plane.
3.11
Chapter 3 Using Your ALS
Monitoring the Operating Temperature
The operating range for the sensor to achieve the specified accuracy for inclination readings is
20 °C - 30 °C. The Temperature monitor in the LevelView window (see Figure 3.10) shows
the current operating temperature with a numeric readout and a thermometer graphic.
Low
< 20 °C
OK
20-30 °C
High
>30-60 °C
Too High
>60 °C
Figure 3.10: Temperature Monitoring Gauge
The thermometer indicates the upper and lower limits of the operating temperature range. The
bar changes color as an additional indication of where the current temperature is relative to the
accurate operating range:
• Blue. Less than 20 °C the sensor is operating below the range where it produces
accurate readings.
• Green. 20 °C to 30 °C the sensor is operating in its normal temperature range, where
it produces readings meeting the specified accuracy.
• Orange. Greater than 30 °C to 60 °C the sensor is operating above the range where it
produces accurate readings, but not so hot that the sensor will be damaged.
• Red. Greater than 60 °C the sensor is operating at a temperature so high that it might
be damaged.
3.12
Using Your ALS Chapter 3
Logging Your Readings
LevelView can keep a record of your activities as you use the sensor to check the inclination of
various pieces of equipment. LevelView keeps the record in a log file, using a comma-separated
values (CSV) text format. Files in CSV text format are easy to import into spreadsheet and
word processing programs. You can specify the log file path (see “Changing the Log File,” on
page 3.15). The log file contains the following information for each log file entry:
• Date and Time. The date and time of the log file entry (see “Working in a Different
Time Zone,” on page 3.15).
• Displayed Roll and Pitch. The roll and pitch values displayed in the Readings text
boxes (see “Performing a Basic Inclination Measurement,” on page 3.3). These values
can be either absolute or relative to a reference plane (see Absolute/Relative below).
• Roll and Pitch Reading. The absolute roll and pitch values. When the reference
plane is set to Absolute, these values are identical to the Displayed Roll and
Pitch values.
• Roll and Pitch Reference. Current offsets for the reference plane (see “Specifying a
Reference Plane,” on page 3.10).
• Roll and Pitch Stable. Whether the roll and pitch readings were Stable or Unstable
when logged (“Setting the Stabilization Criteria,” on page 3.7). Readings are logged as
Unstable when they are logged while the stabilization countdown timer is still
counting down.
• Stabilization Time. The current setting for stabilization time (“Setting the
Stabilization Criteria,” on page 3.7).
• Roll and Pitch Stable Time. Elapsed time since the last stabilization countdown
started (“Setting the Stabilization Criteria,” on page 3.7). If a logged reading is Stable,
this number will be equal to the value for stabilization time.
• Go/No Go Value. The tolerance setting for the bubble displays (see “Setting the
Go/No Go Tolerance,” on page 3.8).
• Absolute/Relative. The current selection for the reference plane (see “Specifying a
Reference Plane,” on page 3.10).
• Temperature Reading. The current operating temperature (see “Monitoring the
Operating Temperature,” on page 3.12).
• Battery Time. The percentage of time remaining before the battery must be
recharged (see “Using the Rechargeable Battery,” on page 3.18).
• Serial Number. The serial number of the sensor.
•
Operator, Tool, Station, and Comment. Text fields you can use to record your own
information with each log entry (see “Including User-Specified Information in the
Log File,” on page 3.15).
3.13
Chapter 3 Using Your ALS
The values for all roll and pitch readings and the Go/No Go setting are displayed to
two decimal places but written to the log file to three decimal places.
Figure 3.11 shows the logging controls in the LevelView window.
Manual Logging
View Sensor or Log
Log File Name
Total Log Entries
Automatic Logging
User-Specified
Figure 3.11: Logging Controls
The remainder of this section tells you how to:
• Use automatic or manual logging
• Adjust the date and time for working in different time zones
• Specify a different location or file name for the log file
• Display a past reading from a log file
Automatic and Manual Logging
LevelView can post entries to the log file both automatically and on your command.
To post an entry to the log file manually:
• In the main LevelView window, click Log a Reading Now (see Figure 3.11).
LevelView immediately writes a log entry each time you click the button.
To have LevelView post log entries automatically:
1. Using the automatic logging controls in the main LevelView window (see Figure 3.11),
specify a logging interval.
2. Check the box to activate automatic logging.
LevelView automatically writes a log entry at the end of each time interval. To turn off
automatic logging, clear the check box.
3.14
Using Your ALS Chapter 3
You can use either automatic or manual logging, or both at the same time. If you have
automatic logging turned on, clicking Log a Reading Now immediately adds an entry to the
log file, in addition to the entries being logged automatically.
Including User-Specified Information in the Log File
Operator, Tool, Station, and Comment are text fields you can use to record your own
information with each log entry to help identify the inclination test you are running. You can fill
in any text information you want in these fields.
To include user-specified information for logging:
• Type your text into the Operator, Tool, Station, and Comment text fields.
You can change or delete this information at any time for future log entries. To quickly clear all
of the fields, click Clear All.
Working in a Different Time Zone
The main LevelView window shows the current date and time, which are used to timestamp
entries for the log file. The date and time values are taken from the system clock of the
computer. If you need to work in a different time zone temporarily, you don’t need to change
your system clock. You can have LevelView log the correct local time for the new location, by
specifying a time offset. LevelView adds your time offset to the time from the system clock and
uses the result in the Date and Time fields in the main window and for the timestamp in the
log file.
To set a time offset:
1. Choose the Settings > Set Time Offset menu item. This menu item is unavailable when
LevelView is set to display readings from a log file (see “Displaying Readings from a Log
File,” on page 3.16).
2. In the Set Time Offset dialog, enter the time difference between your normal location
and your temporary location in hours and minutes using the corresponding list boxes, and
click OK.
Changing the Log File
By default, LevelView writes log entries to the file My Documents\ALS Files\ALS
Readings.csv. If you prefer, you can specify a different log file.
To change the log file:
1. Choose the File > Select Log File menu item.
2. In the ALS Log File dialog, specify the folder and file name for the log file, and
click Save.
3.15
Chapter 3 Using Your ALS
Displaying Readings from a Log File
Normally, LevelView displays real-time readings transmitted from the sensor. However, you
can also have LevelView display a previous entry from a log file.
To display a reading from a log file:
1. Click View Entries in Log File (see Figure 3.12).
The label on the button you just clicked changes to Display Readings from Sensor, the
Connection indicator changes to an icon of a page and now says Viewing log file, and
the controls for automatic and manual logging are replaced by a list of the entries in the
log file.
View Sensor or Log
Log File Name
List of Log File Entries
Figure 3.12: Displaying a Reading from a Log File
2. From the list of entries in the log file, choose the entry you want to display.
LevelView displays the readings for the selected entry from the log file, except for the
Go/No Go reading. The Go/No Go control remains active, so that you can view the
reading from the log file using different go/no go tolerances. Automatic logging is
suspended while you are displaying readings from a log file.
3. When you are done viewing past readings from the log file, click Display Readings from
Sensor, so that LevelView returns to displaying sensor readings in real time.
To display a reading from a different log file, see “Changing the Log File,” on page 3.15.
3.16
Using Your ALS Chapter 3
Printing the LevelView Window
You can print an image of the LevelView window to have a graphical record of the session.
To print an image of the LevelView window:
1. Choose File > Print.
2. In the Print dialog, click OK.
You can also select a printer other than the default and change the printer setup, or see a
preview of what LevelView will print:
• To select a different printer, change the paper selection or print orientation, or set
printer properties, choose the File > Print Setup menu item.
•
To see a preview of what LevelView will print, choose the File > Print Preview
menu item.
3.17
Chapter 3 Using Your ALS
Using the Rechargeable Battery
The sensor operates from an internal rechargeable battery. From a full charge, the battery
provides about six hours of continuous use. Before using your sensor for the first time, charge
it for two hours.
The battery can be recharged about 500 times before the charge life starts to degrade
significantly. The battery is not user replaceable. For information on replacing the battery, see
“Annual Factory Calibration and Battery Replacement,” on page 4.1.
Monitoring the Battery Level
LevelView receives frequent updates from the sensor on the state of the sensor’s battery. The
Battery indicator in the LevelView window shows the approximate percentage of operating
time remaining before you must charge the battery.
Figure 3.13: Battery Monitor
Charging the Battery
To charge the sensor’s battery:
1. Place the sensor in the charging case and close the lid. You don’t need to align the sensor
in any particular orientation in the case.
2. Plug the charger line adapter into a 100 VAC to 240 VAC supply and plug the other end
into the charging case.
The Charging light is on while the sensor is charging.
3. Charge the sensor until the Charging Done light turns on or until you need to use the
sensor (you don’t need to wait until the sensor is fully charged).
Fully charging the battery takes about two hours. Charging for one hour charges the
battery to about 80% of its capacity. You can leave the sensor in the charging case when
not in use; the battery won’t overcharge.
3.18
Using Your ALS Chapter 3
Monitoring the Wireless Connection to
the Sensor
The LevelView application communicates with the sensor by using a Bluetooth wireless link.
The wireless link has a range of about 30 ft (10 m).
The Connection indicator in the LevelView window shows the quality of the wireless
connection between the sensor and the link module. In the traffic signal graphic indicator, the
large colored circle shows the current signal quality (see Figure 3.14):
• Green. The connection between the link and sensor is good. With a good
connection, the sensor is sending the maximum number of readings per second to the
link module (about 6 readings per second).
• Yellow. There is some interference or other problem with the signal that is preventing
the link and sensor from communicating at their maximum rate. When the indicator is
yellow, the readings are still accurate but aren’t being updated as frequently.
• Red. Indicates that there is no connection between the sensor and link module. The
values in the display (Pitch and Roll, temperature, battery level, and so on) do not
update when the indicator is red.
Figure 3.14: Wireless Connection Monitor
The Bluetooth wireless link technology used in the ALS is a low-power technology that
operates in the 2.4 GHz radio frequency band. This unlicensed band is also used by many other
types of devices, such as cordless phones and microwave ovens. Another 2.4 GHz device
operating in close proximity could interfere with the ALS system. When this happens,
separating the devices by at least 6 ft (2 m) usually solves the problem.
Other factors can also affect the wireless link, such as the distance between the sensor and link
and obstacles between the sensor and link that block the signal. If LevelView indicates that the
connection isn’t good, try moving the computer a few feet closer to the sensor.
3.19
Chapter 3 Using Your ALS
Changing the Pairing Between the Sensor
and Link
Each sensor is paired with a specific link module at the factory and will operate with only that
particular link module. However, you can change this pairing, so that you can use your sensor
with a different link module, or vice versa.
To pair a sensor and link module:
1. If you are changing the pairing of a sensor that is already paired with a link module, first
unplug the currently paired link module. You can’t pair a sensor with a new link module
while the currently paired link module is powered on.
2. Make sure the Power lights are illuminated on both the sensor and link module you want
to pair.
3. On the link module, press and hold the NEW PAIR button until the Pair Status and
Connection Status lights start to blink rapidly (about four times per second).
4. On the sensor, press and hold the NEW PAIR button until the Pair Status and
Connection Status lights start to blink rapidly (about four times per second). Then
release both buttons.
The Pair Status and Connection Status lights will continue to blink until the sensor and
link have established a new pairing, after which the lights will be on and no longer
blinking.
Saving Your Settings
Each time you exit the LevelView application, it saves your current settings for the log file,
automatic logging, reference plane, go/no go tolerance, stabilization criteria, time offsets, and
user-specified entries in the Windows registry. The next time you start LevelView, it restores
those saved settings. You can also tell LevelView to save your settings to a file you specify, and
you can have LevelView read those settings back at any time. This lets you have several
different configurations for LevelView and be able to switch between them easily, without
having to reenter the settings.
To save your settings in a file you specify:
1. Choose the File > Save Settings As menu item. This menu item is unavailable when
LevelView is set to display readings from a log file (see “Displaying Readings from a Log
File,” on page 3.16).
2. In the ALS Settings File dialog, specify the directory and file name and click Save.
LevelView saves your settings, and the file you specified becomes the current settings file.
3.20
Using Your ALS Chapter 3
To save your settings in the current settings file:
• Choose the File > Save Settings menu item. This menu item is unavailable when
LevelView is set to display readings from a log file (see “Displaying Readings from a
Log File,” on page 3.16).
Each time you start LevelView, the application automatically reads in the most recent settings
from the Windows registry, including the last settings file you specified, if any.
Loading Settings from a File
To load settings from a file:
1. Choose the File > Open Settings menu item. This menu item is unavailable when
LevelView is set to display readings from a log file (see “Displaying Readings from a Log
File,” on page 3.16).
2. In the ALS Settings File dialog, specify the directory and file name and click Open.
LevelView reads the settings from the specified file and applies the settings. These
settings are also written to the Windows registry and will be loaded the next time you start
the LevelView application.
3.21
Chapter 4
Maintaining Your ALS
Periodic calibration and battery replacement is the only regular maintenance your ALS requires:
• Annual Calibration and Battery Replacement. Once a year, you should have your
sensor calibrated and the internal rechargeable battery replaced by returning the
sensor to the CyberOptics Semiconductor factory.
• Optional Calibration for zero-point drift. If you use absolute level as your
reference plane, you should calibrate your sensor for zero-point drift at least once
every two months. You can perform this calibration yourself at your facility.
Annual Factory Calibration and Battery
Replacement
Every 12 months, you should return your sensor to the CyberOptics Semiconductor factory,
where we will calibrate the sensor and replace the internal rechargeable battery. You can find
the date when the sensor was last calibrated at the factory by choosing the Help > About
LevelView menu item in the LevelView application.
When the date for calibration approaches, the LevelView application will occasionally notify
you by displaying the Sensor Calibration Status dialog, as shown in Figure 4.1 on page 4.2.
4.1
Chapter 4 Maintaining Your ALS
Figure 4.1: Sensor Calibration Status Dialog
If you drop the sensor or suspect that it is no longer in calibration, contact CyberOptics
Semiconductor technical support (see “Technical Support,” on page 2.6).
Battery Use and Disposal
Your ALS sensor contains a lithium-polymer battery. To avoid damage to the sensor, use the
supplied charger only. Do not charge the sensor at temperatures outside the specified range
(0 °C to 45 °C). Do not incinerate or dispose of the sensor into fire. Do not immerse the sensor
when cleaning or spill liquids on the sensor.
For proper battery disposal, please return the sensor to CyberOptics Semiconductor, Inc.:
CyberOptics Semiconductor, Inc.
13555 S.W. Millikan Way
Beaverton, OR 97005
or contact customer support:
• Voice: (503) 495-2200
• Toll free: 800-366-9131 (US and Canada only)
• E-mail: CSsupport@cyberoptics.com
4.2
Maintaining Your ALS Chapter 4
Optional Calibration for Zero-Point Drift
The zero point of the electronic inclinometers used in the sensor can drift slightly over time. If
you use absolute level (see “Specifying a Reference Plane,” on page 3.10) as your reference
plane, you might need to calibrate your sensor for zero-point drift occasionally. You can
perform this calibration in your own facility by using the calibration routine built into the
LevelView application. If you work relative to a reference plane other than absolute level, zeropoint drift won’t affect your measurements, and you don’t need to perform this calibration
procedure.
Caution
Performing a zero-point calibration improperly can actually cause the sensor to produce
absolute level readings that are less accurate than readings from the sensor prior to the
zero-point calibration. This is likely to be true if the surface used for the calibration is not
sufficiently stable and flat. To remove a zero-point calibration, run the zero-point
calibration procedure again and click Reset to Factory Default in the first step of the
procedure.
In the following procedure for calibrating the zero point of the sensor, the software instructs
you to place the sensor on a flat, level surface. The software takes an inclination reading,
instructs you to rotate the sensor in place 180 degrees, and then takes a second reading. The
two readings are used to set the new zero point. It is important that the center of the sensor is
in the same position on the surface before and after you rotate the sensor. Most surfaces are
not perfectly flat, so moving the sensor while rotating it can affect the accuracy of the
calibration. The procedure, therefore, instructs you to place marks on the surface at four points
around the outside edge of the sensor. You can use these marks to rotate the sensor without
moving it off center relative to the first calibration reading.
To calibrate your sensor using LevelView:
1. Locate a surface large enough to hold the sensor and having the following characteristics:
• Level to within about 1 degree.
• Stable enough to ensure that the inclination of the surface does not change during the
procedure.
• Sufficiently smooth and flat that the inclination readings of the sensor don’t change if
you move the sensor slightly in any direction.
If the surface doesn’t meet these requirements, it might introduce an error in the
calibration results.
2. Choose the menu item Settings > Calibrate. This menu item is unavailable when
LevelView is set to display readings from a log file (see “Displaying Readings from a Log
File,” on page 3.16).
4.3
Chapter 4 Maintaining Your ALS
The Calibration wizard is displayed showing the 1 of 4 Start Calibration dialog, as shown
in Figure 4.2 on page 4.4.
Figure 4.2: 1 of 4 Start Calibration Dialog
This dialog displays the current calibration values. If you haven’t calibrated the sensor
since the last factory calibration, both values are zero. Clicking Reset to Factory Default
changes the calibration values to the values set when the sensor was last calibrated at
the factory.
3. Click Next to continue with the calibration procedure.
The wizard now displays the 2 of 4 First Calibration Reading dialog, as shown in
Figure 4.3.
Figure 4.3: 2 of 4 First Calibration Reading Dialog
4.4
Maintaining Your ALS Chapter 4
4. This step calls for marking the position of the sensor on the surface. Place a mark on the
surface next to the edge of the sensor at the notch for the ALS200 or ALS300. For the
ALS150, place the mark at the scribe mark in the center of the flat side, as shown in
Figure 4.4.
✍
WAFERSENSE™ ALS150
✍
✍
✍
✍
WAFERSENSE™ ALS200
✍
✍
✍
Figure 4.4: Marking the Sensor’s Position
5. Place three additional marks on the surface next to the edge of the sensor at the scribe
marks that are 90°, 180°, and 270° from the notch or flat side. Always mark all
four positions.
6. Wait for the sensor readings to stabilize and then click Next to take the first
calibration reading.
After a few seconds, the wizard displays the 3 of 4 Second Calibration Reading dialog, as
shown in Figure 4.5 on page 4.6.
4.5
Chapter 4 Maintaining Your ALS
Figure 4.5: 3 of 4 Second Calibration Reading Dialog
7. This step applies to the ALS150 only. Set the ALS150 sensor aside. Using a straight-edge,
extend the top and bottom marks down, as shown in Figure 4.6. This keeps the marks
visible when you rotate the sensor, as instructed in the next step.
Extend both
lines down
✍
✍
Figure 4.6: Extending the Marks for the ALS150
4.6
Maintaining Your ALS Chapter 4
8. Rotate the sensor 180° and align the sensor with the four marks you made in the earlier
steps, as shown in Figure 4.7. Be sure to line up all four marks, so that the rotated sensor
is as close as possible to the same position it was in when you took the first calibration
reading in Step 4.
WAFERSENSE™ ALS200
WAFERSENSE™ ALS150
Figure 4.7: Rotate and Align the Sensor
9. Click Next to take the second calibration reading.
If the new calibration offsets are too large (> 0.5 degrees) for your ALS sensor to operate
reliably, a dialog displays telling you to contact customer support at CyberOptics
Semiconductor. Write down the Roll and Pitch offsets displayed in the dialog and click
OK. For information on contacting customer support, see “Technical Support,” on
page 2.6.
4.7
Chapter 4 Maintaining Your ALS
If the new calibration offsets are within the allowed limits, the wizard displays the 4 of 4
Finish Calibration dialog, as shown in Figure 4.8.
Figure 4.8: 4 of 4 Finish Calibration Dialog
10. Click Save to save the new calibration values.
That completes the zero-point calibration.
4.8
Chapter 5
Specifications
System Requirements
To run the WaferSense ALS software and link, your computer must have:
• Windows 98 Second Edition, Windows 2000, Windows Me, or Windows XP
operating system
• One free high-power USB 1.1 or USB 2.0 port
ALS Hardware
Environmental
Operating pressure range: High vacuum to atmospheric.
Storage temperature range: -20 °C to 60 °C.
Charging temperature range: 0 °C to 45 °C
Maximum operating temperature range: 10 °C to 60 °C.
Temperature range for specified inclination measurement repeatability: 20 °C to 30 °C.
Power
Battery usage on a full charge: approximately 6 hours.
Maximum battery recharge cycles: approximately 500.
Precision and Accuracy
Inclination precision: ± 0.003 degree over a range of -4° to +4° from absolute level for one year
from date of last calibration.
Table 5.1 on page 5.2 shows the maximum and root-mean-square (rms) errors for ALS readings
relative to absolute level using a sensor that has been factory calibrated within the last year.
5.1
Chapter 5 Specifications
Error values vary with the magnitude of the reading. Values are shown for readings of 0, ±2,
and ±4 degrees.
Reading
(degrees)
±2
±4
ALS150 and ALS200
Max Error
(degrees)
0.04
0.10
0.17
RMS Error
(degrees)
0.03
0.07
0.13
ALS300
Max Error
(degrees)
0.05
0.11
0.18
RMS Error
(degrees)
0.03
0.07
0.13
Table 5.1: Error for Absolute Measurements
Table 5.2 shows the maximum and root-mean-square (rms) error for ALS readings relative to a
user-specified reference plane (see “Specifying a Reference Plane,” on page 3.10) using a sensor
that has been factory calibrated within the last year.
Reading
(degrees)
ALS150 and ALS200
Max Error
RMS Error
(degrees)
(degrees)
0.02
0.02
ALS300
Max Error
RMS Error
(degrees)
(degrees)
0.03
0.03
Table 5.2: Error for Relative Measurements
5.2
Index
About LevelView dialog 2.6
absolute inclination 3.10
absolute level 4.3
accuracy of measurements 4.1, 5.1
alignment marks 3.4, 3.6
ALS
installing 2.1
specifications 5.1
system components 1.1
automatic logging 3.14
battery 3.18
care and disposal 4.2
recharging 3.18
replacement 4.1
Bluetooth wireless link 1.1, 3.19
bubble levels 3.3, 3.6
Go/No Go tolerance 3.8
stabilizing readings 3.4
buttons on sensor 3.2
calibration 4.1
date of last 2.6
Charging Done status light 3.2
Charging status light 3.2
Comment, including in log file 3.15
communications, initializing 2.5
components, ALS 1.1
Connection Status light 3.2
displaying log entries 3.16
electronic inclinometers 4.3
Go/No Go tolerance 3.8
hardware specifications 5.1
inclination measurement 3.3
installation
ALS 2.1
link module 2.3
software 2.1
system requirements 2.1
LevelView
main window 3.3
software installation 2.1
starting the application 2.5
version 2.6
link module
changing pairing with sensor 3.20
installation 2.3
monitoring the connection 3.19
NEW PAIR button 3.20
status lights 2.3, 2.4, 3.20
Index.1
Index
link module (cont.)
USB port 2.1
log file 3.15
Log Reading Now button 3.14
logging readings 3.13
automatic logging 3.14
Comment 3.15
displaying log entries 3.16
log file 3.15
manual logging 3.14
Operator 3.15
Station 3.15
time offset 3.15
Tool 3.15
user-specified information 3.15
maintaining the sensor 4.1
manual logging 3.14
monitoring the wireless connection 3.19
NEW PAIR button 3.2, 3.20
ON OFF button 2.4, 3.2
operating temperature, monitoring 3.12
Operator, including in log file 3.15
Pair Status light 3.2
pairing of sensor and link module, changing
3.20
pitch readout 3.5
Power status light 3.2
precision of measurements 5.1
preferences, see settings
printing 3.17
Index.2
rechargeable battery 3.18
recharging 3.18
replacement 4.1
reference plane 3.10
registering your sensor 2.4
relative inclination 3.10
roll readout 3.5
saving settings 3.20
sensor
battery replacement 4.1
buttons 3.2
calibration 4.1, 4.3
changing pairing with link module 3.20
maintenance 4.1
monitoring the connection 3.19
NEW PAIR button 3.20
recharging the battery 3.18
registering 2.4
serial number 2.6
stabilizing the readings 3.7
status lights 2.4, 3.2, 3.20
serial number, sensor 2.6
settings
automatic logging 3.14
Go/No Go tolerance 3.8
log file 3.15
reference plane 3.10
saving 3.20
stabilization criteria 3.7
time offset 3.15
software installation 2.1
software version 2.6
specifications 5.1
stabilizing the roll and pitch readings 3.4, 3.7
starting LevelView 2.5
Station, including in log file 3.15
Index
status lights
link module 2.3, 2.4, 3.20
sensor 2.4, 3.2, 3.20
technical support 2.6
temperature, monitoring 3.12
time offset 3.15
time zones 3.15
Tool, including in log file 3.15
USB port 2.1
version of software 2.6
Windows operating system 2.1
wireless link, see link module
wireless technology 3.19
Index.3

---

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Title                           : WaferSense(TM) ALS150/200/300 User’s Guide
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