Series 307 Granville Phillips Vacuum Gauge Controller 307024 02
User Manual: 307024-02
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Series 307 1Granville-Phillips Vacuum Gauge Controller Installation, Operation, and Maintenance Instructions Instruction Manual Catalog No. 307024-02 This manual is for use only with the following catalog numbers: 307001 307012 307026 307083 307095 307131 307187 307213 307002 307013 307059 307086 307100 307132 307188 307215 307004 307014 307060 307087 307104 307133 307193 307217 307005 307015 307062 307088 307106 307138 307194 307218 307006 307016 307063 307089 307110 307140 307195 307219 307007 307017 307065 307090 307111 307141 307196 307223 307008 307018 307066 307091 307117 307142 307204 307234 307009 307019 307078 307092 307123 307146 307209 307010 307020 307079 307093 307124 307179 307211 307011 307021 307082 307094 307130 307186 307212 For assistance in using or servicing this instrument contact: Helix Technology Corporation Colorado Operations Customer Service Department 6450 Dry Creek Pkwy Longmont, Colorado 80503-9501 USA Telephone (303) 652-4400 FAX (303) 652-2844 email: salesco@helixtechnology.com Any comments or questions? Call Us! Your comments on how these instructions could be made more useful to you will help us to improve our capabilities for satisfying your requirements. Call 1-303-652-4400 (1-800776-6543 toll-free in the U.S.A.) or email us at salesco@helixtechnology.com GRANVILLE-PHILLIPS © Copyright Helix Technology Corporation 1998-2001 All Rights Reserved Revised: November 2001 Convectron® is a registered trademark of Helix Technology Corporation. Granville-Phillips is a trademark of Helix Technology Corporation. Table of Contents Safety . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . v Safety Instructions . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . v Damage Requiring Service . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . v Certification . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .viii Extended Warranty . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .viii Service Guidelines . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .viii FCC Verification . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .viii UL Listed . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .viii Chapter 1 The 307 VGC Control Unit . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-1 1.1 Introduction . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-1 1.1.1 General Description . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-1 1.1.2 Available Configurations . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-1 1.1.2.1 Power Supply Module . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-1 1.1.2.2 Ion Gauge (IG) Electrometer Module . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-1 1.1.2.3 Remote Input/Output Module . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-1 1.1.2.4 Convectron Gauge (CG) Module . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-1 1.1.2.5 Thermocouple Gauge (TC) Module . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-2 1.1.2.6 Process Control Module . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-2 1.1.2.7 RS-232 Computer Interface Module . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-2 1.1.2.8 IEEE-488 Computer Interface Module . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-2 1.1.2.9 Capacitance Manometer Module . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-2 1.1.2.10 Bargraph Display Module . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-2 1.2 Installation . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-3 1.2.1 Line Voltage Selection . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-3 1.2.2 Module Installation . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-3 1.2.2.1 Remote Input/Output Module Installation . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-5 1.2.2.2 Single Digit Display . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-5 1.2.3 Bargraph Display (307094/95) Installation . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-6 1.2.4 Mounting Configurations . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-6 1.2.5 Ionization Gauge Types and Installation . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-8 1.2.6 Cable Connections . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-9 1.2.7 System Ground Test Procedure . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-10 1.2.7.1 Procedure . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-10 1.2.8 Grounding The System . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-11 1.3 Operation . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-13 1.3.1 Summary of Controls and Indicators . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-13 1.3.2 Units of Measure . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-13 1.3.3 Ion Gauge On/Off . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-13 1.3.4 Degas On/Off . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-14 1.3.5 Available Remote Input/Output Option . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-14 1.4 Theory of Operation . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-15 1.4.1 Ion Gauge Theory . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-15 1.4.2 Microcontrollers and Bus Structure . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-16 1.5 Calibration . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-16 1.6 Troubleshooting, Basic 307 VGC . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-17 1.6.1 Guidelines . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-17 1.6.2 Fault Indications . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-18 1.6.3 Repair Ordering . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-19 1.7 Specifications . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-20 1.8 307 Extended Capability VGC . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-21 1.8.1 Gauges . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-21 1.8.2 Process Control (C, D and E) . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-21 1.8.3 Computer Interface . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-21 i Series 307 Vacuum Gauge Controller November, 2001 Table of Contents Chapter 2 The Ion Gauge Electrometer Module . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2.1 Introduction . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2.2 Installation . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2.2.1 Units of Measure . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2.3 Operation . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2.3.1 Ion Gauge On/Off and Degas On/Off . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2.3.2 Relative Gas Sensitivities . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2.4 Electrometer Calibration . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2.5 Electrometer Troubleshooting . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2.6 Electrometer Module Specifications . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-1 2-1 2-1 2-1 2-2 2-2 2-3 2-6 2-7 2-7 Chapter 3 The Convectron Gauge Module . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-1 SAFETY INSTRUCTIONS . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-1 Explosive Gases . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-1 Limitation on Use of Compression Mounts . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-1 Tube Mounting Position . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-1 Overpressure . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-1 High Indicated Pressure . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-2 Chemical . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-2 Sensor Failure . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-2 Tube Contamination . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-2 3.1 Convectron Module, Introduction . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-2 3.2 Convectron Installation . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-3 3.2.1 Units of Measure . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-3 3.2.2 Convectron Gauge Tube Installation . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-4 3.2.2.1 Important Precautions for Gauge Tube Installation . . . . . . . . . . . . . . . . . . . . . . . . . . 3-4 IMPORTANT . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-4 3.2.3 Gauge Tube Orientation . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-5 3.2.3.1 Compression Mount (Quick Connect) . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-5 3.2.3.2 1/8 NPT Mount . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-6 3.2.3.3 NW16KF Flange Mount . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-6 3.3 Convectron Operation . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-6 3.3.1 Reading Pressure . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-6 3.3.2 Special Considerations for Use Below 10-3 Torr . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-6 3.3.3 Use With Gases Other Than N2 and Air . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-7 3.3.4 Indicated vs. True Pressure Curves . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-7 3.3.5 Analog Output . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-15 3.4 Convectron Calibration and Maintenance . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-16 3.4.1 Cleaning the Gauge Tube . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-17 3.5 Theory of Operation . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-18 3.6 Convectron Troubleshooting . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-19 3.6.1 Transducer Test Procedure . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-19 3.7 Convectron Specifications . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-20 Chapter 4 The Thermocouple Gauge Module . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4.1 Introduction . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4.2 Thermocouple Gauge Module Installation . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4.2.1 Units of Measure . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4.2.2 Thermocouple Gauge Tube Installation . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4.3 Thermocouple Gauge Operation . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4.3.1 Reading Pressure . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4.3.2 Analog Output . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4.3.3 Filament Auto Turn-On . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4.4 Thermocouple Gauge Calibration . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4.5 Thermocouple Gauge Troubleshooting . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4.6 Thermocouple Gauge Specifications . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-1 4-1 4-1 4-1 4-2 4-2 4-2 4-2 4-3 4-4 4-5 4-6 ii Series 307 Vacuum Gauge Controller November, 2001 Table of Contents Chapter 5 The Process Control Module . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5.1 Introduction to the Process Control Module . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5.2 Process Control Module Installation . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5.2.1 Process Control System Connections . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5.3 Process Control Operation . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5.3.1 Setpoint Display and Adjustment . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5.3.2 Points to Consider in Using the Process Control Module . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5.3.3 Relay Polarity Setting . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5.3.4 Ion Gauge Assignment . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5.4 Process Control Theory of Operation . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5.5 Process Control Troubleshooting . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5.6 Process Control Specifications . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-1 5-1 5-1 5-1 5-2 5-2 5-3 5-4 5-4 5-5 5-6 5-6 Chapter 6 The RS-232 Module . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6.1 Introduction . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6.2 RS-232 Installation . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6.2.1 Selecting the Byte Format . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6.2.1.1 Baud Rate . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6.2.1.2 Character Framing . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6.2.1.3 Talk-Only Mode . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6.2.1.4 Handshake Line Control Switches . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6.2.1.5 Invert RTS Switch . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6.3 Operation . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6.3.1 Command Syntax . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6.3.2 Error Messages . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6.4 RS-232 Theory of Operation . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6.4.1 Handshaking . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6.5 RS-232 Troubleshooting . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6.6 RS-232 Specifications . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-1 6-1 6-1 6-1 6-1 6-2 6-2 6-2 6-3 6-3 6-3 6-5 6-6 6-6 6-7 6-8 Chapter 7 The IEEE-488 Module . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7.1 Introduction . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7.2 IEEE-488 Installation . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7.2.1 Selecting the Interface Bus Address . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7.2.2 Talk-only Mode . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7.2.3 SRQ Mode . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7.3 IEEE-488 Operation . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7.3.1 Command Syntax . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7.3.2 Error Messages . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7.4 IEEE-488 Troubleshooting . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7.5 IEEE-488 Specifications . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7-1 7-1 7-1 7-1 7-1 7-1 7-2 7-2 7-4 7-4 7-5 Chapter 8 The Convectron/Capacitance Manometer Module . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 8.1 Introduction . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 8.2 Installation . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 8.2.1 Units of Measure . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 8.2.2 Capacitance Manometer Cable Installation . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 8.3 Operation . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 8.3.1 Reading Pressure . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 8.3.2 Analog Output . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 8.4 Calibration . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 8.4.1 Initial Transducer Calibration . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 8.5 Theory of Operation . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 8.6 Capacitance Manometer Troubleshooting . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 8.7 Specifications . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 8-1 8-1 8-1 8-1 8-2 8-3 8-3 8-3 8-4 8-4 8-5 8-5 8-6 iii Series 307 Vacuum Gauge Controller November, 2001 Table of Contents Chapter 9 Linear Analog Output Module . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 9.1 Introduction . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 9.2 Installation . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 9.2.1 Electrometer (IG) Range Selection . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 9.2.2 Cable Connections . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 9.2.3 Pin Assignment . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 9.3 Operation . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 9.4 Calibration . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 9.4.1 IG Zero Adjust . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 9.4.2 IG Full Scale Adjust . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 9.4.3 TC Zero Adjust . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 9.4.4 TC Full Scale Adjust . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 9.5 Theory of Operation . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 9.6 Troubleshooting . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 9.7 Specifications . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 9.7.1 Thermocouple Output . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 9.7.2 Electrometer (IG) Output . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . Service Form . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 9-1 9-1 9-1 9-1 9-2 9-2 9-2 9-3 9-3 9-3 9-3 9-3 9-3 9-4 9-4 9-4 9-5 9-6 Appendix A . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . A-1 Index . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . Index-1 iv Series 307 Vacuum Gauge Controller November, 2001 Safety Safety Instructions START BY READING THESE IMPORTANT SAFETY INSTRUCTIONS AND NOTES collected here for your convenience and repeated with additional information at appropriate points in these instructions. These safety alert symbols mean caution - personal safety, property damage or danger from electric shock. Read these instructions carefully. In these instructions the word “product” refers to the 307 Convectron ® Vacuum Measurement System and all of its approved parts and accessories. NOTE: These instructions do not and cannot provide for every contingency that may arise in connection with the installation, operation, or maintenance of this product. If you require further assistance, contact Helix Technology at the address on the title page of this manual. This product has been designed and tested to offer reasonably safe service provided it is installed, operated, and serviced in strict accordance with these safety instructions. These safety precautions must be observed during all phases of operation, installation, and service of this product. Failure to comply with these precautions or with specific warnings elsewhere in this manual violates safety standards of design, manufacture, and intended use of the instrument. Helix Technology disclaims all liability for the customer's failure to comply with these requirements. The service and repair information in this manual is for the use of Qualified Service Personnel. To avoid shock, do not perform any procedures in this manual or perform any servicing on this product unless you are qualified to do so. ■ ■ ■ ■ ■ Read Instructions – Read all safety and operating instructions before operating the product. Retain Instructions – Retain the Safety and Operating Instructions for future reference. Heed Warnings – Adhere to all warnings on the product and in the operating instructions. Follow Instructions – Follow all operating and maintenance instructions. Accessories – Do not use accessories not recommended in this manual as they may be hazardous. To reduce the risk of fire or electric shock, do not expose this product to rain or moisture. Damage Requiring Service Disconnect the product from the wall outlet and all power sources and refer servicing to Qualified Service Personnel under the following conditions: a. When any cable or plug is damaged. b. If the product has been exposed to rain or water. v Series 307 Vacuum Gauge Controller November, 2001 Safety c. If the product does not operate normally even if you follow the operating instructions. Adjust only those controls that are covered by the operation instructions. Improper adjustment of other controls may result in damage and will often require extensive work by a qualified technician to restore the product to its normal operation. d. If the product has been dropped or the enclosure has been damaged. e. When the product exhibits a distinct change in performance. This indicates a need for service. All conductors in, on, or around the vacuum system that are exposed to potential high voltage electrical discharges must either be shielded at all times to protect personnel or must be connected to earth ground at all times. Replacement Parts - When replacement parts are required, be certain to use the replacement parts that are specified by Helix Technology, or that have the same characteristics as the original parts. Unauthorized substitutions may result in fire, electric shock or other hazards. Safety Check - Upon completion of any service or repairs to this product, ask the Qualified Service Person to perform safety checks to determine that the product is in safe operating order. Finite Lifetime - After ten years of normal use or even non-use, the electrical insulation in this product may become less effective at preventing electrical shock. Under certain environmental conditions which are beyond the manufacturer’s control, some insulation material may deteriorate sooner. Therefore, periodically inspect all electrical insulation for cracks, crazing, or other signs of deterioration. Do not use if the electrical insulation has become unsafe. Danger, High Voltage – The high voltages present within the Power Supply are capable of causing injury or death. To avoid electric shock, wait 3 minutes after power is removed before touching any component within the Power Supply. This will permit charged capacitors to discharge. Be aware that an electrical discharge through a gas may couple dangerous high voltage directly to an ungrounded conductor almost as effectively as would a copper wire connection. A person may be seriously injured or even killed by merely touching an exposed ungrounded conductor at high potential. This hazard is not unique to this product. Install suitable devices that will limit the pressure to the level that the vacuum system can safely withstand. In addition, install suitable pressure relief valves or rupture disks that will release pressure at a level considerably below the pressure that the system can safely withstand. Suppliers of pressure relief valves and pressure relief disks are listed in the Thomas Register under “Valves, Relief”, and “Discs, Rupture”. Confirm that these safety devices are properly installed before installing the product. In addition, check that (1) the proper gas cylinders are installed, (2) gas cylinder valve positions are correct on manual systems, and (3) the automation is correct on automated gas delivery systems. vi Series 307 Vacuum Gauge Controller November, 2001 Safety Proper Grounding: All components of a vacuum system used with this or any similar high voltage product must be maintained at earth ground for safe operation. The power cord of this product shall be connected only to a properly grounded outlet. Be aware, however, that grounding this product does not guarantee that other components of the vacuum system are maintained at earth ground. Complying with the usual warning to connect the power cable only to a properly grounded outlet is necessary but not sufficient for safe operation of a vacuum system with this or any similar high voltage producing product. Verify that the vacuum port to which the gauges are mounted is electrically grounded. It is essential for personnel safety as well as proper operation that the envelope of the gauge be connected to a facility ground. Use a ground lug on a flange bolt if necessary. Vacuum gauges with compression fittings may be forcefully ejected if the vacuum system is pressurized. Using the N2 calibration to pressurize a vacuum system above about 1 Torr with certain other gases can cause dangerously high pressures which may cause explosion of the system. See Section 3.3 on page 3-6 before using with other gases. Warning - If used improperly, Convectron Gauges can supply misleading pressure indications that can result in dangerous overpressure conditions within the system. For use with gases other than air or N2, consult the gas type correction charts in Section 3.3 on page 3-6. Do not operate in an explosive atmosphere. Do not operate the product in the presence of flammable gases or fumes. Operation of any electrical instrument in such an environment constitutes a definite safety hazard. Do not use the product to measure the pressure of explosive or combustible gases or gas mixtures. The sensor wire of the Convectron Gauge normally operates at only 125 °C, but it is possible that Controller malfunction can raise the sensor temperature above the ignition temperature of combustible mixtures. Danger of explosion or inadvertent venting to atmosphere exists on all vacuum systems which incorporate gas sources or involve processes capable of pressurizing the system above safe limits. It is the installer's responsibility to ensure that the automatic signals provided by the product are always used in a safe manner. Carefully check manual operation of the system and the set point programming before switching to automatic operation. Where an equipment malfunction could cause a hazardous situation, always provide for fail-safe operation. As an example, in an automatic backfill operation where a malfunction might cause high internal pressures, provide an appropriate pressure relief device. vii Series 307 Vacuum Gauge Controller November, 2001 Safety The fumes from solvents such as trichloroethylene, perchloroethylene, toluene, and acetone can be dangerous to health if inhaled. Use only in well ventilated areas exhausted to the outdoors. Acetone and toluene are highly flammable and should not be used near an open flame or energized electrical equipment. Certification Helix Technology certifies that this product met its published specifications at the time of shipment from the factory. Helix Technology further certifies that its calibration measurements are traceable to the National Institute of Standards and Technology to the extent allowed by the Institute's calibration facility. Extended Warranty Helix Technology Corporation provides an extended warranty period to five (5) years from the date of shipment for the Granville-Phillips Series 307 Controllers. The Helix Technology Corporation General Terms and Conditions of Sale provide the complete and exclusive warranty for Helix Technology Corporation's products. This document is located on our web site at www.helixtechnology.com, or may be obtained by contacting Helix Technology Corporation's Customer Service Representative. Service Guidelines Some minor problems are readily corrected on site. If the product requires service, please contact our Customer Service Department at 1-303-652-4400 for troubleshooting help over the phone. If the product must be returned for service, request a Return Authorization (RA) from Helix Technology (see the Service Form on page 9-6). Do not return products without first obtaining an RA. Shipping damage on returned products as a result of inadequate packaging is the Buyer's responsibility. When returning equipment to Helix Technology, please use the original packing material whenever possible. Otherwise, contact your shipper or Helix Technology for safe packaging guidelines. Circuit boards and modules separated from the controller chassis must be handled using proper anti-static protection methods and must be packaged in anti-static packaging. Helix Technology will supply return packaging materials at no charge upon request. FCC Verification NOTE: This equipment has been tested and found to comply with the limits for a Class A digital device, pursuant to Part 15 of the FCC Rules. These limits are designed to provide reasonable protection against harmful interference when the equipment is operated in a commercial environment. This equipment generates, uses, and can radiate radio frequency energy and, if not installed and used in accordance with this instruction manua, may cause harmful interference to radio communications. However, there is no guarantee that interference will not occur in a particular installation. Operation of this equipment in a residential area is likely to cause harmful interference in which case the user will be required to correct the interference at his own expense. If this equipment does cause harmful interference to radio or television reception, which can be determined by turning the equipment off and on, the user is encouraged to try to correct the interference by one or more of the following measures: ■ Reorient or relocate the receiving antenna. ■ Increase the separation between the equipment and the receiver. ■ Connect the equipment into an outlet on a circuit different from that to which the receiver is connected. ■ Consult the dealer or an experienced radio or television technician for help. UL Listed This product is Listed to UL 1262 Standard for Safety, Laboratory Equipment by Underwriters Laboratories Inc. (UL). viii Series 307 Vacuum Gauge Controller November, 2001 Chapter 1 1 The 307 VGC Control Unit 1.1 Introduction 1.1.1 General Description The 307 Vacuum Gauge Controller (VGC) measures pressures from 5 x 10-12 Torr (6.6 x 10-12 mbar or 6.6 x 10-10 Pa) to atmosphere, depending on modules and transducers used. The 307 VGC can operate two ion gauges (IG) sequentially, along with two Convectron gauges (CG) (or two thermocouple gauges (TC)) simultaneously. Pressure readout is via 3 front panel displays, analog output, and available computer interface. The 307 VGC is a modular instrument which can be easily customized to fit most user's exact needs. Infrequently used controls are housed behind a hinged front panel, reducing front panel clutter and allowing the control unit to reside in a half-rack space. The power supply is housed in a separate enclosure and may be rack-mounted alongside the control unit, or mounted separately. Reliability is increased by removing power dissipation from the control unit enclosure, which needs no ventilation. Remote mounting of the power supply minimizes heat generated in the user's instrument rack and thus increases reliability of components. 1.1.2 Available Configurations 1.1.2.1 Power Supply Module Choice of one or two ion gauges, available with electron bombardment degas, resistance heating degas, or no degas. Line voltage ranges are 90-130 volts ac or 180-260 volts ac. 1.1.2.2 Ion Gauge (IG) Electrometer Module Standard IG Electrometer Module: IG pressure readout from 1 x10-10 Torr (readable to 10-11 Torr) to 1 x 10-1 Torr, depending on IG type and emission current used. Reads either of two gauges sequentially. Adjustments for gauge sensitivity and emission current affect both tubes. Analog recorder output is also provided. Ultra-high Vacuum IG Electrometer Module: Extends lower pressure limit to 5 x 10-12 Torr, and allows separate sensitivity and emission level adjustments for each ion gauge. Degas power is adjustable when used with the electron bombardment degas power supply. 1.1.2.3 Remote Input/Output Module Provides IG status outputs, remote filament on/off, degas on/off, front panel lockout capability, and fault indication relay. 1.1.2.4 Convectron Gauge (CG) Module Permits pressure measurements from 1 x 10-4 to 990 Torr (N2 equivalent) from two Granville-Phillips Series 275 Convectron Gauges simultaneously. Two channel (A/B) modules allow for automatic turn-on and shut-off of ion gauges based on Convectron pressure. Also provides analog output of each indicated pressure. 1-1 Series 307 Vacuum Gauge Controller November, 2001 1 The 307 VGC Control Unit 1.1.2.5 Thermocouple Gauge (TC) Module Provides the same functions as the Convectron module, but pressure measurement range is 1 x 10-3 Torr to 1 Torr. 1.1.2.6 Process Control Module Provides 2, 6 or 1 to 4 (user selectable) single pole, double throw relays: Two channels are associated with each display line. Digital setpoints have switch-setable polarity for relay activation above or below setpoint. Manual override switches are built-in. 1.1.2.7 RS-232 Computer Interface Module Provides readout of pressure and process control relay status, and ion gauge control. 1.1.2.8 IEEE-488 Computer Interface Module Provides readout of pressure and process control relay status, and ion gauge control. 1.1.2.9 Capacitance Manometer Module Provides gas-type independent pressure measurement from 1 x 10-4 to 999 Torr depending on the manometer head being used. Allows local range, zero and full scale adjustments and provides power to the transducer. Readout for one Convectron gauge with features as described above is included along with analog outputs for both gauges. 1.1.2.10 Bargraph Display Module Permits display of thermocouple pressures with two 27 segment LED bargraph displays. Ion gauge is displayed in standard format. Direct replacement for the existing display board. 1-2 Series 307 Vacuum Gauge Controller November, 2001 1 The 307 VGC Control Unit 1.2 Installation 1.2.1 Line Voltage Selection Line voltages of 90-130 or 180-260 Vac are user selectable via jumpers internal to the power supply. Compare your unit to Figure 1-1 to determine if it is configured for your requirements. Do not apply power until the correct configuration is achieved. Figure 1-1 Line Voltage Select Jumpers, Power Supply PC Board. 1.2.2 Module Installation Only a Phillips screwdriver is necessary for module installation. Since the 307 modules contain static sensitive devices, follow the anti-static procedures outlined in Section 1.6 Troubleshooting, Basic 307 VGC on page 1-17 when handling printed circuit boards. The modules for the 307 VGC have metal brackets which interlock to form the front and rear sections of the chassis. Modules must be installed in their proper positions within the chassis (see Figure 1-2 on page 1-4). 1-3 Series 307 Vacuum Gauge Controller November, 2001 1 The 307 VGC Control Unit Figure 1-2 Module Positions. 1 — Position for Computer Interface Module 2 — Blank Module 3 — Position for IG Electrometer Module 4 — Position for Convectron, Thermocouple or Capacitance Manometer Gauge Module 5 — Position for Process Control Module To install a module: 1. Turn off the power and remove all cabling from rear panel. 2. Remove the top cover of the control unit by removing the upper front screw and the rear screw on each side. It is not necessary to remove the lower front screw. 3. Remove the connectors holding the bus ribbon cable from all boards to the right (when viewed from the front) of the position in which the new module is to be installed. Or, remove the display panel and all connectors to the left. 4. Remove the blank filler module in the position in which the board is to be installed. 5. Install the new module in its proper position. Position all modules so that the chassis segments interlock properly. 6. Re-connect the bus ribbon cable connectors. 7. Install the top cover, making sure the door hinge pin is correctly located. 1-4 Series 307 Vacuum Gauge Controller November, 2001 1 The 307 VGC Control Unit 1.2.2.1 Remote Input/Output Module Installation The Remote Input/Output Module (Figure 1-3) is a small printed circuit board assembly, 7 , which attaches within the right-rear section of the control unit. Mechanical attachment to the rear panel is via the two jackposts 6 , which fasten the connector to the panel in the same manner as the connector on the larger board is fastened. Electrical connection is via a short ribbon cable 8 , terminated with a 14-pin dual-in-line plug. The components of the two printed circuit boards should end up facing each other. Figure 1-3 Remote Input/Output Option. 1.2.2.2 Single Digit Display It is possible to blank the second digit in one or more lines of the display by cutting jumpers on the display printed circuit board. The second digit is retained internally, is used by the process control logic, and will be output via the computer interface. The decimal point will still be displayed even though the second digit is blanked. To disable the second digit: 1. Remove power from the control unit. 2. Open the hinged door. On the back of the door is a metal plate labeled with operating instructions. This plate is held in place by plastic retainers which may be flexed out of position allowing removal of the plate. 3. With the plate removed you will see the display printed circuit board (Figure 1-4). Locate 9 , jumpers J1, J2, and J3. 4. Cut the jumper for the display line(s) for which you wish to disable the second digit; J1,J2, and J3 for the first, second, and third lines respectively. 5. Snap the backplate back into its retainers. Figure 1-4 Display Printed Circuit Board. 1-5 Series 307 Vacuum Gauge Controller November, 2001 1 The 307 VGC Control Unit 1.2.3 Bargraph Display (307094/95) Installation The 307 modules contain static sensitive devices. Follow the procedures outlined in Section 1.6 Troubleshooting, Basic 307 VGC on page 1-17 when handling printed circuit boards. 1. Turn off the power and remove all cables from the rear panel. 2. Remove the top cover of the control unit by removing the upper front screw and the rear screws on each side. 3. Remove the front panel door assembly and slide its rear cover out. 4. Note the orientation of the ribbon cable connector. Lift the connector end of the display board and disconnect the ribbon cable connector. 5. Slide the rear cover of the new assembly out. 6. Re-connect the bus ribbon cable connector to the new board being careful to install the connector in the same orientation as noted in Step 4. 7. Replace the rear cover on the door assembly with the instruction side facing out and the tape insulator over the connector end. 8. Install the new front panel door assembly in its proper position, making sure the ribbon cable is routed correctly. 9. Install the top cover, making sure the door hinge pin is correctly located. 1.2.4 Mounting Configurations Figure 1-5 on page 1-7 illustrates the various configurations available for mounting the 307 control unit and power supply. Note that when installing a mounting ear 10 into the left side of the control unit, the door should be open. The bracket 13 used to connect two control units for side by side rack mounting is not symmetrical. Install as shown. The rear support bracket assembly consists of a U-shaped bracket 12 which bolts directly to the power supply, and spring clamps 11 which grip into grooves in the side of the control unit. When purchased separately the assembly is provided with two clamps. Remove one or both as necessary when attaching to power supply enclosures rather than control units. For configurations other than rack mounting, four brackets 14 are provided for attachment to the power supply. 1-6 Series 307 Vacuum Gauge Controller November, 2001 1 The 307 VGC Control Unit Figure 1-5 Mounting Methods. 1-7 Series 307 Vacuum Gauge Controller November, 2001 1 The 307 VGC Control Unit 1.2.5 Ionization Gauge Types and Installation WARNING - Do not attach cables to glass gauge pins while the gauge is under vacuum. Accidental bending of the pins may cause the glass to break and implode. Cables once installed should be secured to the system to provide strain relief for the gauge tube pin. WARNING - Ionization gauges are safe for use only if all exposed conductors on the gauge and on controller and on vacuum system are grounded. Verify that the vacuum port to which the Ion Gauge is mounted is electrically grounded. It is essential for personnel safety as well as proper operation that the envelope of the gauge be connected to a facility ground. Use a ground lug on a flange bolt if necessary. The 307 VGC is designed to operate 1 or 2 Bayard-Alpert type or equivalent ionization gauges. Coated Iridium filament type gauges are recommended if the filament auto-on feature is to be used. At higher pressures iridium filaments provide longer operating life and greater burnout resistance. When installing your ion gauge, note that if placed near the pump, the pressure in the gauge may be considerably lower than in the rest of the system. If placed near a gas inlet or source of contamination, the pressure in the gauge may be higher. If an unshielded gauge is placed near an electron beam evaporation source or used in a sputtering system, spurious electrons or ions may disturb the measurement. Screens or other shielding should be placed between the gauge and the system if spurious charged particles or severe electromagnetic interference is present. Consideration should also be given to electrostatic shielding of glass tubulated gauges when measuring pressures near their x-ray limits. Helix Technology offers 3 cable types for ion gauges. One has a standard connector for the series 274 tubulated gauge tubes. One has individual pin sockets for use with non-standard pin configurations as well as with Helix Technology “nude” tubes. The third is for use with the Varian 564 wide range tube. Figure 1-6 shows typical tube base configurations used with the standard connector cable. See Appendix A for detailed cable diagrams. Figure 1-6 Standard Tube Base Configurations. 1-8 Series 307 Vacuum Gauge Controller November, 2001 1 The 307 VGC Control Unit When connecting an individual pin socket type IG cable to an IG tube where electron beam degas will be employed using only one grid connection, the red socket lead should be used, not the brown one. 1.2.6 Cable Connections The 307 VGC power supply is housed separately from the control unit, and feeds power to it via the supplied interconnecting cable. See Figure 1-7 for cable connections. Tighten screws to secure connectors. Figure 1-7 307 VGC Cable Connections. The collector cable should be routed along the control cables for best noise immunity. See Figure 1-8. Figure 1-8 Collector Cable Routing. 1-9 Series 307 Vacuum Gauge Controller November, 2001 1 The 307 VGC Control Unit 1.2.7 System Ground Test Procedure (Refer to the Safety Instructions Proper Grounding: on page vii for further information) 1.2.7.1 Procedure Physically examine the grounding of both the 307 power supply and the vacuum chamber. Is there an intentional heavy duty ground connection to all exposed conductors on the vacuum chamber? There should be. Note that a horizontal “O” ring or “L” ring gasket, without metal clamps, can leave the chamber above it electrically isolated. Power can be delivered to mechanical and diffusion pumps without any ground connections to the system frame or chamber. Water line grounds can be lost by a plastic or rubber tube interconnection. What was once a carefully grounded vacuum system can, by innocent failure to reconnect all ground connections, become a very dangerous device. Use the following procedure to test each of your vacuum systems which incorporates an ionization gauge. This procedure uses a conventional Volt-Ohm Meter (VOM) and Resistor (10 ohm, 10 watt). 1. With the gauge controller turned off, test for both dc and ac voltages between the metal parts of the vacuum chamber and the power supply chassis. 2. If no voltages exist, measure resistance. The resistance should not exceed 2 ohms. Two ohms, or less, implies commonality of these grounds that should prevent the plasma from creating a dangerous voltage between them. This test does not prove that either connection is earth ground, only that they are the same. If more than 2 ohms is indicated, check with your electrician. 3. If ac or dc voltages exist and are less than 10 volts, shunt the meter with a 10 ohm, 10 watt resistor. Repeat the voltage measurement. With the shunt in place across the meter, if the voltage remains at 83% or more of the unshunted value, commonality of the grounds is implied. Repeat the measurements several times to be sure that the voltage ratio is not changing with time. If Voltage (shunted) Voltage (unshunted) = .83 or more, this should prevent the plasma from creating a dangerous voltage between these grounds. If more than 10 volts exists between grounds, check with your electrician. 4. If the voltage change in Step 3 is greater than 17% due to the placement of the shunt, it complicates the measurement. The commonality of the grounds may be satisfactory and the coupling poor, or the commonality could be poor! Your electrician should be asked to check the electrical continuity between these two ground systems. The placement of a second ground wire (dashed line in Figure 1-9 on page 1-12) between the vacuum chamber and the power supply chassis is NOT a safe answer, for large currents could flow through it. Professional help is recommended. 1-10 Series 307 Vacuum Gauge Controller November, 2001 1 The 307 VGC Control Unit 1.2.8 Grounding The System 1. Connect a heavy duty ground wire #12 AWG or larger from the ground lugs on the backs of the Power Supply and the Control Unit to your facility grounding electrode system. This will provide an earth ground for the Power Supply and for the Control Unit in the event either the interconnect cable or power cable are not in place. Do not connect the ground lug to the vacuum system or other component. Connect it directly to the facility grounding system such as a grounded outlet box or a grounded copper water supply pipe. Do not rely on small metal water lines to ground a component. Later on someone may replace the metal tubing with plastic tubing thus unwittingly causing a potentially dangerous situation. 2. Provide a connection to ground for other instruments with electrodes in the vacuum system possibly exposed to high voltage electrical discharges. 3. Provide a connection to ground for each ungrounded metal component in, on or around the vacuum system, including the gauge envelopes, which personnel may touch and which can potentially be exposed to high voltage electrical discharges within the vacuum system. For example, a metal bell jar resting on an organic O-ring must be connected to ground if an ionization gauge is to be used or if other high voltage sources are present in the vacuum system. Compliance with the usual warning to connect the power cable only to a properly grounded outlet is necessary but not sufficient for safe operation of a vacuum system with this or any similar high voltage producing product. Grounding this product does not and cannot guarantee that other components of the vacuum system are all maintained at earth ground. All conductors in, on, or around the vacuum system that are exposed to potential high voltage electrical discharges must either be shielded at all times to protect personnel or must be connected to earth ground at all times. After each maintenance/service procedure and before operating the controller and vacuum system make sure that your vacuum system and controller are grounded as shown in the following schematic diagram. FAILURE TO DO SO COULD BE FATAL. 1-11 Series 307 Vacuum Gauge Controller November, 2001 1 The 307 VGC Control Unit Figure 1-9 Correct System Grounding. Be aware that an electrical discharge through a gas may couple dangerous high voltage directly to an ungrounded conductor almost as effectively as would a copper wire connection. A person may be seriously injured or even killed by merely touching an exposed ungrounded conductor at high potential. This hazard is not unique to this product. 1-12 Series 307 Vacuum Gauge Controller November, 2001 1 The 307 VGC Control Unit 1.3 Operation 1.3.1 Summary of Controls and Indicators A description of the controls and indicators found on a basic 307 VGC is given in this section. For detailed instructions pertaining to particular modules, please consult the chapter for that module. Figure 1-10 307 VGC Control Unit Front Panel. 1.3.2 Units of Measure The units of measure displayed is selectable via switches on the electrometer, Convectron, and thermocouple modules. These units will be indicated on the front panel label when shipped from the factory. See the chapters for the specific module for instructions on changing units. For the bargraph display, the units must be set to torr in order for the bargraph to display in millitorr. The pressure units label 18 is part of the process control channel label and can be changed by the user if the system of units is changed. Slide the label out from the top. WARNING - Since display units are set separately on the electrometer and Convectron or thermocouple gauge modules, adjustments must be made to both modules to avoid confusion. Be certain to update the label to reflect any change of units. 16 — Power On/Off Toggle Key 1.3.3 Ion Gauge On/Off Ion gauges may be turned on or off in four ways; front panel keys, 15 , remote control (if Remote Input/Output option is installed), auto-on function of Convectron or thermocouple gauge module, or via the RS-232 or IEEE-488 computer interfaces. Two ion gauges can only be operated sequentially and not simultaneously. For use of the available Remote Input/Output option, see below. For use of the IG auto-on function of the Convectron or thermocouple gauge modules, see the instruction manual sections for those modules. To turn on IG1 from the front panel, press the IG1 on/off button. To turn it off, press again. Note that if you attempt to turn on IG2 while IG1 is already on, IG1 will turn off automatically (and vice versa). 1-13 Series 307 Vacuum Gauge Controller November, 2001 1 The 307 VGC Control Unit 1.3.4 Degas On/Off Degas may be turned on/off by either the front panel key, 17 , the available remote input (see below), or the RS-232 or IEEE-488 computer interface modules. To turn degas on, press the degas on/off key. To turn it off, press again. Degas can not be activated unless the IG pressure is below 5 x 10-5 in torr/mbar units, or 6.6 x 10-3 in pascal units. Degassing a gauge above this pressure is of little value and may cause sudden pressure bursts that can damage the gauge and create plasma which couples grid voltages to the vacuum system hardware. 1.3.5 Available Remote Input/Output Option Five inputs are provided through the rear panel allowing control of the ion gauges, degas, and lock-out of front panel keys (see Figure 1-11 on page 1-15). The function of the front panel keys is reproduced by either a contact closure or an active low logic state on these inputs. For DEGAS REMOTE and IG REMOTE inputs this low state must be held continuously for at least 25 milliseconds. After this, the input must be allowed to float high for at least 105 milliseconds before another low will be accepted. Front panel keys, other than the power key, will not function if the KEY DISABLE input is held continuously low. If IG LOCKOUT (asserted low) is pulled to a low voltage level and maintained low, the IG's cannot be turned on either from the front panel or through the computer interface. If the IG is on it will turn off when IG lockout is asserted. Three single-pole, double-throw relays are provided: Two filament status relays (normally open = filament off), and status of the FAULT line (normally open = FAULT indication). See Section 1.6.2 Fault Indications on page 1-18 for a summary of possible sources of the FAULT indication. The FAULT line can be configured to output DEGAS status by changing the location of JP1 on the remote I/O option board. Table 1-1 Pin No. Pin Assignments. Function Pin No. Function 1 Key Disable* 9 IG1 Remote* 2 Degas Remote* 10 IG2 Remote* 3 Fault N.C. 11 IG lockout* 4 Fault N.O. 12 Ground 5 Fault Com. 13 IG1 Com. 6 IG2 N.C. 14 IG1 N.O. 7 IG2 N.O. 15 IG1 N.C 8 IG2 Com. * Asserted low inputs 1-14 Series 307 Vacuum Gauge Controller November, 2001 1 The 307 VGC Control Unit Figure 1-11 Remote Control Connector. 1.4 Theory of Operation 1.4.1 Ion Gauge Theory The functional parts of a typical ionization gauge are the filament (cathode), grid (anode) and ion collector, shown schematically in Figure 1-12. These electrodes are maintained by the gauge controller at +30, +180, and 0 Vdc, relative to ground, respectively. The filament is heated by direct current to such a temperature that electrons are emitted, and accelerated toward the grid by the potential difference between the grid and filament. All the electrons eventually collide with the grid, but many first traverse the region inside the grid one or more times. Figure 1-12 Ion Gauge Schematic. When an energetic electron collides with a gas molecule, an electron may be dislodged from the molecule, leaving it with a positive charge. Most ions are then accelerated to the collector. The rate at which electron collisions with molecules occur is proportional to the density of gas molecules, and hence the ion current is proportional to the gas density (or pressure, at constant temperature). The amount of ion current for a given emission current and pressure depends on the ion gauge design. This gives rise to the definition of ion gauge “sensitivity”, frequently denoted by “K”: K = ion current / (emission current x pressure) Bayard-Alpert type gauges typically have sensitivities of 10/Torr when used with nitrogen or atmosphere. Sensitivities for other gases are given in Section 2.3 Operation on page 2-2. The ion gauge controller varies the heating current to the filament to maintain a constant electron emission, and measures the ion current to the collector. The pressure is then calculated from these data. 1-15 Series 307 Vacuum Gauge Controller November, 2001 1 The 307 VGC Control Unit Ion gauge degas is accomplished by either electron bombardment (EB) or resistance heating (I2R) depending on which, if either, you have selected. During EB degas, the grid voltage is raised to 500 volts and the electron current is increased. The electrons acquire a high energy when accelerated through this potential difference and strike the grid, heating it to a temperature sufficient to free it of contamination. During I2R degas, a large current is passed through the grid structure, raising its temperature and driving off contaminants. Note that some ion gauge designs don't allow I2R degas. In either case, pressure measurement is possible during degas, but large fluctuations may be seen as contaminants are driven off the IG components. 1.4.2 Microcontrollers and Bus Structure Each module in the 307 has a dedicated microcontroller with internal ROM, RAM, timing, and interrupt management functions. This architecture provides high-performance at low cost with greater reliability and noise immunity than more complicated microprocessor systems using external buses and memory hardware. Each microcontroller is equipped with a watchdog timer, which automatically generates a reset if the processor fails to fulfill timing “checkpoints” within its code. Inter-processor communication is accomplished via the display bus. These lines carry BCD-format pressure data which is used to generate the 307 display. The bus is updated once per millisecond. Out of every sixteen cycles, fifteen cycles are used for display data, and one is reserved for inter-processor communication. Modules that require pressure data, such as process control and computer interface, take it directly from the display update cycles. 1.5 Calibration Calibration instructions for each module, where relevant, may be found in the chapters for individual modules. Adjustments found within the power supply are: 19 — Filament Current Limit Do not adjust. 20 — Grid Bias Potential Adjustment The grid bias for the ion gauges is factory set to 180 ±10 Vdc, as required by the vast majority of gauges. This can be adjusted via the grid bias potentiometer. The range is approx. 120-220 Vdc. Figure 1-13 Grid Voltage Adjustment, Power Supply PC Board. 1-16 Series 307 Vacuum Gauge Controller November, 2001 1 The 307 VGC Control Unit 1.6 Troubleshooting, Basic 307 VGC 1.6.1 Guidelines Further troubleshooting information is located in the chapters for specific modules. The 307 VGC has been designed for easy repair by replacement of modules. If the user elects to perform repairs at the component level, repairs properly made with equivalent electronic parts and rosin core solder do not represent a violation of the warranty. Some minor difficulties are user-correctable, and the built-in diagnostic aids described here may be helpful. Each module has status LEDs which will aid in localizing failures. These are described in the troubleshooting section of the chapters for each module. Shown in Figure 1-15 on page 1-19 are those LEDs found on the 307 VGC control board. This is the PC board on the right side (when viewed from the front) of the 307 control unit, which attaches to the front panel keys via a short ribbon connector. Since the 307 VGC contains static-sensitive electronic parts, the following precautions must be followed when troubleshooting: a. Use a grounded, conductive work surface. b. Use conductive envelopes to store or ship MOS devices or printed circuit boards. c. Do not operate the 307 VGC with MOS devices removed from the unit. d. Do not handle MOS devices more than absolutely necessary, and only when wearing a ground strap. e. Do not use an ohmmeter for troubleshooting. Rely on voltage measurements. f. Use grounded-type soldering irons only. Danger, High Voltage High voltages are present within the power supply, capable of causing injury or death. Do not touch cable connections or inside of the power supply when power is applied. 1-17 Series 307 Vacuum Gauge Controller November, 2001 1 The 307 VGC Control Unit 1.6.2 Fault Indications When supplied with the Remote Control Module, the 307 VGC is also equipped with a “fault” relay (see Figure 1-11 on page 1-15). The relay is energized when no fault conditions are detected. It releases under a number of conditions described in Troubleshooting Guide. Table 1-2 Troubleshooting Guide, Basic 307 VGC. Symptom Possible Cause Unit won't power-up, no response to power switch. Power fuse 21 blown. Wrong line voltage selection, see Figure 1-1 on page 1-3. Power fuse 21 Wrong fuse rating. Wrong line voltage selection, see Figure 1-1 on page 1-3. blows repeatedly. Fault relay released. Collector input from IG unplugged. Watchdog reset occurring on some module (probable circuit failure). Unplugged Convectron gauge or sensor broken in Convectron gauge. Convectron gauge zero badly out of calibration. Checksum failure on process control board. Cycle power and check all setpoints. IG won't come on, or comes on briefly then shuts off. Broken filament in IG. System pressure above overpressure shutoff point. Badly contaminated IG. Electrostatic charge buildup on glass wall of IG. Short between IG electrodes. Improper IG connector hookup. Ion gauge is a low-maximum emission gauge and Ie switch is on 10 mA. Degas won't come on. System pressure above 5 x 10-5 Torr. Degas fuse blown, 22 . IG not turned on. Badly contaminated IG. IG pressure reads extremely low. Collector unplugged. IG pressure very noisy. IG badly contaminated. Bad collector cable. LED 23 15 volt power to relays bad. out on control board. LED out, 24 . +12 volt supply bad (power to analog circuitry and RS232). LED out, 25 . -12 volt supply bad (power to analog circuitry and RS232). LED out, 26 . 5 volt power to display LED's bad. LED out, 27 . 5 volt logic supply bad. 1-18 Series 307 Vacuum Gauge Controller November, 2001 1 The 307 VGC Control Unit Figure 1-14 Power Supply Rear Panel. Figure 1-15 Control Board Top View. 1.6.3 Repair Ordering Please telephone Helix Technology to obtain a return authorization prior to returning your unit for repairs. A repair order should accompany returned equipment even when the equipment is being returned for a warranty repair at no charge. This should include a detailed description of the problem in addition to your name, telephone number and address where we may contact you. Equipment returned for repair should be carefully and strongly packaged to withstand shipping abuse. Components or printed circuit boards to be returned separately should be protected against static damage by wrapping them in static proof containers or in aluminum foil prior to packaging them for shipment. Address replacement/repair orders and correspondence to the address given on the title page of this manual. If a replacement module is desired, it is important that you give our Service Department the complete catalog number of the module. This will help ensure that you receive the correct replacement. NOTE: Under no circumstances will Helix Technology be liable for shipping damages due to rough handling, improper packaging, or other circumstances beyond its control. All return shipments must be freight prepaid. 1-19 Series 307 Vacuum Gauge Controller November, 2001 1 The 307 VGC Control Unit 1.7 Specifications See the chapters for each module for additional specifications relating to that module. Table 1-3 Specifications, Basic 307 VGC. Physical Control Unit Width Height Depth Weight 241 mm (9.5 in.) with 1/2 rack mounting ears 89 mm (3.5 in.) 356 mm (14 in.) includes 76 mm (3 in.) for connectors and cables 3 kg (6.5 lb.) Power Units Width Height Depth Weight 203 mm (8 in.) 89 mm (3.5 in.) 330 mm (13 in.) includes 89 mm (3.5 in.) for connectors and cables 4 kg (8.5 lb.) Electrical Voltage Frequency Power 90-130 Vac or 180-260 Vac 50 or 60 Hz 250 watts max. Fuse Ratings -Line fuse -Degas fuse 3 A (90-130 V), 1.5 A (180-260 V), 250 Vac 2 A (90-130 V), 1 A (180-260 V) 250 Vac Environmental Operating Temperature 0 °C to 40 °C Electronic Accuracy Typical ±3% of reading at ambient temperature = 25 ± 5 °C Display Resolution Scientific notation, 2 significant digits, (1/2 segment bargraph) Display Update Time 0.5 sec typical Filament Status Relay Contact Rating 4 A, 250 Vac resistive load or 30 Vdc 1-20 Series 307 Vacuum Gauge Controller November, 2001 1 The 307 VGC Control Unit 1.8 307 Extended Capability VGC In the extended configuration the 307 VGC is a full-rack instrument (with separately mounted power supply) that provides up to 6 displays, 7 transducers, and 12 process control channels. The extra capacity is provided in a second chassis mounted side by side, to the right of the 307 VGC control unit. The power supply is mounted separately. The second control chassis may be equipped with 3 Convectron (CG) or thermocouple (TC) gauges, and an additional process control board with either 2, 6 or 1-4 user selectable relays. A single-gauge (CG or TC) module drives the fourth display line (the first display line of the second chassis), and a dual-gauge (CG or TC) module drives the second two displays of the second chassis. Please refer to chapters 3, 4, 5, 6 and 7 for information on the use of Convectron gauges, thermocouple gauges, 307 process control modules, and computer interfaces, respectively. All the information in these chapters applies to the extended configuration, with the following exceptions: 1.8.1 Gauges The extended chassis adds additional Convectron or thermocouple gauges only, not additional ion gauges. The 3 additional gauges in the second chassis cannot be used to automatically turn on the ion gauges. 1.8.2 Process Control (C, D and E) This additional process control module provides relays in pairs that are associated with each display line. The 3 additional displays are labeled “C”, “D”, and “E”, and are associated with process control channels 1 and 2, 3 and 4, 5 and 6, respectively. The ion gauge assignment DIP switches on the process control module will be factory set as if to assign channels 1 and 2 to IG1. This does not cause these 2 relays to be activated by IG1, but rather enables these channels to accept data from display line “C” of the extended chassis. These switch settings should not be changed. 1.8.3 Computer Interface All of the pressure and process control status data from up to 6 displays and 12 process control channels is accessible via a single computer interface module (RS-232 or IEEE-488). The 307 extended capability computer interface no longer supports the talk-only mode. If this mode is necessary for your application, contact a Helix Technology application engineer. The extended capability computer interface has the same command syntax as the standard 307 interface, with the following additions: ■ The DS command has additional modifiers CG3, CG4 and CG5 which return the pressure from the 3 gauges in the second expansion chassis. Example 1 – Display pressure from display line “D”, the fourth low-vacuum transducer and the fifth display line in the extended configuration: From computer: DS CG4 CRLF From 307: 3.70E-1CRLF indicates this transducer is reading a pressure of 3.7 x 10-1. 1-21 Series 307 Vacuum Gauge Controller November, 2001 1 The 307 VGC Control Unit ■ The DS command allows as modifiers the numbers 1 through 6 to display the contents of display lines 1 through 6. Example 2 – Display pressure from display line “D”, which is the fifth display in the extended configuration: From computer: DS 5 CRLF From 307: 3.70E-1CRLF thus, the modifiers 1-6 perform exactly as the modifiers “IG”, “CG1” through “CG5”, but have been added to provide a simpler command syntax. ■ A new command PC2S has been added. This command functions in the same way as the PCS command, but refers to the process control channels residing in the second chassis, if installed. Example 3 – Assume that channels 1-3 in the second chassis are active, and 4-6 are inactive: Interrogate the status of the third channel in the second chassis: From computer: PC2S 3 CRLF From 307: 1CRLF return a string giving the status of all 6 channels in the second chassis: From computer: PC2S CRLF From 307: 1,1,1,0,0,0CRLF 1-22 Series 307 Vacuum Gauge Controller November, 2001 Chapter 2 2 The Ion Gauge Electrometer Module 2.1 Introduction This chapter covers both the standard and Ultra-High Vacuum (UHV) electrometers. Information which applies only to the UHV module will be shown in boldface. The standard ion gauge (IG) Electrometer Module provides ion gauge pressure readout from 1 x 10-10 Torr (1.3 x 10-10 mbar or 1.3 x 10-8 Pascal) to 1 x 10-1 Torr, air equivalent, depending on the transducer and emission current used. The control unit sequentially operates 1 or 2 ion gauges, depending on power supply configuration. Adjustments are provided for gauge sensitivity and emission current. Internal switches allow change to Pascal pressure units, and a user selectable "slow update" feature triggers measurement averaging, resulting in a display update frequency of about once every three seconds. The overpressure shutdown threshold is internally adjustable. Internal failure-indicator LEDs aid diagnosis of problems by indicating certain out-of-bounds electronic conditions. The UHV module provides pressure measurement to 5 x 10-12 Torr. This module also offers independent sensitivity and emission current control for each ion gauge, and adjustable degas power when used with electron-bombardment (EB) degas. 2.2 Installation 2.2.1 Units of Measure Your unit will have been shipped from the factory pre-set to display the units of measure, Torr/millibar or Pascal, that you requested. If you wish to change units, proceed as follows: 1. Shut off power to the control unit. 2. Remove the top cover. Locate the IG Electrometer Module. 3. Locate 28 , display units control switch. 4. Set switch to desired position, OFF = Torr/mbar units, ON = Pascal units. 5. Change the units of measure on the Convectron or thermocouple gauge module, if installed. 6. Slip the label card out of the top of the front panel and apply the appropriate pressure units label. Selection between Torr and mbar units is done by adjusting the IG tube sensitivity to the appropriate units. For example, a typical Bayard-Alpert tube has a sensitivity of 10/Torr or 7.5/mbar. Thus, for this tube, adjusting the sensitivity to 10 will result in display of pressure in Torr. Adjusting to 7.5 will result in display in mbar. Figure 2-1 Ion Gauge Electrometer Module, Top View. 2-1 Series 307 Vacuum Gauge Controller November, 2001 2 The Ion Gauge Electrometer Module 29 — Display Update Rate Switch Setting this switch "ON" will enable pressure averaging. The display will update about every 3 seconds rather than the normal 0.5 sec typical period. 2.3 Operation 2.3.1 Ion Gauge On/Off and Degas On/Off See Section 1.3 Operation on page 1-13 for instructions on turning ion gauges on and off, and turning degas on and off. Figure 2-2 30 Electrometer Module Front Panel. — Displaying Sensitivity and Emission With the Calibration Switch This switch is used for displaying gauge sensitivity, emission current, and (when used with EB degas) degas power when these parameters must be checked or adjusted. This switch is activated by setting either to the left or right. On the UHV module, setting to the left invokes the function for IG1, and to the right for IG2. The function depends on the state of the ion gauge tube: ■ If the tube is off, setting the switch displays the tube sensitivity in the top display. ■ If the tube is on but not degassing, the switch displays emission current in amperes. ■ If the tube is degassing with electron-bombardment degas, the switch displays degas power in watts. ■ If the tube is degassing with resistance-degas, the switch displays emission current in amperes. WARNING - Do not leave the calibration switch set after you are done viewing sensitivity, emission, or EB degas power. There is no indication on the front panel that the display holds data other than pressure. Since the process control and computer interface modules take their pressure data directly from the display, pressure data is periodically substituted for emission data when the tube is on and emission or EB degas power is being displayed. This results in some flicker in the display. 2-2 Series 307 Vacuum Gauge Controller November, 2001 2 The Ion Gauge Electrometer Module 31 — Emission Range Switch This switch selects between three emission ranges; 0.1 milliampere, 1.0 milliampere, or 10.0 milliampere. Adjustment within each range is achieved with the emission adjustment pot (see below). On the UHV module, 2 independent emission range switches are provided, one for each gauge. In general, higher emissions are used at lower pressures. If, for example, you are using a broad range IG tube and wish to measure to its upper pressure limit, the 0.1 mA range is recommended. If you are measuring very low pressures or have a low-sensitivity IG tube, the 10.0 mA range is better. In general, lower emissions will increase tube life. NOTE: Changing the emission range by one decade will also change the overpressure shutdown point by one decade. See Section 2.4 on page 2-6 for details of the overpressure shutdown adjustment. Adjustment of emission within a range (see below) will not affect the overpressure shutdown point. 32 — Emission Adjustment This potentiometer provides control of the emission within the decade value selected by the emission range switch. The calibration switch must be set with the IG tube turned on to view emission during adjustment. The span of adjustment is from approximately 10% to 120% of the range value. On the UHV module, 2 independent potentiometers are provided, one for each IG. Please note that on some earlier generation IG controllers, the emission current adjustment was used to correct for varying tube sensitivities. This is not appropriate on the 307 controller, as an independent sensitivity adjustment is provided (see below). 33 — Sensitivity Adjustment This adjustment is used to match tubes of different sensitivities. The calibration switch 30 must be set with the IG off to view sensitivity during the adjustment. The control unit is shipped from the factory set for a tube sensitivity of 10/Torr, as is typical for glass tubulated Bayard-Alpert type tubes such as the Granville-Phillips 274. UHV nude gauge tubes such as the 274022, 274023 and Varian UHV-24 typically have a sensitivity of about 25/Torr. If an ionization gauge tube of this type is being used, the sensitivity potentiometer should be adjusted for the proper sensitivity (25/Torr). Otherwise, measurement error will result. The approximate range of the adjustment is 3 to 50/Torr. 2.3.2 Relative Gas Sensitivities Sensitivity depends on the gas being measured as well as the type of IG tube. Table 2-1 on page 2-4lists the relative gauge sensitivities for common gases. These values are from NASA Technical Note TND 5285, "Ionization Gauge Sensitivities as Reported in the Literature", by Robert L. Summers, Lewis Research Center, National Aeronautics and Space Administration. Refer to this technical note for further definition of these average values and for the gauge sensitivities of other gases. To adjust the 307 VGC to be direct reading for gases other than air or N2, calculate the sensitivity Kx for gas type x as follows: KX = (RX) (KN2) Where KN2 is the gauge sensitivity for N2 and RX is found from Table 2-1 on page 2-4. 2-3 Series 307 Vacuum Gauge Controller November, 2001 2 The Ion Gauge Electrometer Module Table 2-1 34 Relative Gas Sensitivities. Gas Rx Gas Rx He 0.18 H2O 1.12 Ne 0.30 NO 1.16 D2 0.35 Ar 1.29 H2 0.46 CO2 1.42 N2 1.00 Kr 1.94 Air 1.00 SF6 2.5 O2 1.01 Xe 2.87 — Degas Power Adjustment The UHV module allows adjustment of degas power, when used with EB degas, from approximately 10 watts to 40 watts. 35 — Analog Output This voltage output signal is proportional to the common logarithm of pressure. If graphed on “loglinear” axes the output voltage is linear with respect to the log of pressure. The analog output is 1 volt per decade of pressure with 0 volts out at 1.0 x 1012 Torr when the emission current range is set to 10 mA. Note that the emission current range setting affects the scaling of the analog output (see Figure 2-4 on page 2-5). When the IG is turned off, the output will switch to slightly greater than +10 Vdc. Figure 2-3 Electrometer Module Back Panel. 2-4 Series 307 Vacuum Gauge Controller November, 2001 2 The Ion Gauge Electrometer Module The UHV electrometer option (307016) switches in a preamplifier as pressure decreases at an ion (collector) current of 10-10 A. For example, this corresponds to a pressure of 10-9 Torr with 10 mA emission current. When this switching occurs, there will be a brief (about 2 s duration) drop in the analog output signal. After the electrometer has settled out, the signal is, again, proportional to the common logarithm of pressure as shown by the UHV ONLY area of Figure 2-4. Figure 2-4 Ion Gauge Pressure Analog Output. A standard 1/8 in. miniature phono jack connector and plug are supplied. The characteristics of this type of analog output voltage are ideal for applications requiring closed loop control. The voltage signal is smooth and continuous throughout all the decades of pressure measurement. This format is useful for computerized data acquisition because a simple equation (finding the common antilogarithm) may be programmed to calculate pressure from the voltage output. The equation is: P = 10(V-n) Where V = analog output voltage; n = 12 for the 10 mA emission current range; n = 11 for the 1 mA emission current range; n = 10 for the 0.1 mA emission current range. For example, if emission current is set to the 1 mA range and the analog output voltage is 3.25 volts, the pressure (in units selected) may be determined by raising 10 to the power (V-11) or P = 10(3.25-11) = 1.8 x 10-8 (Torr, for example) 2-5 Series 307 Vacuum Gauge Controller November, 2001 2 The Ion Gauge Electrometer Module 2.4 Electrometer Calibration Refer to Section 2.3 for instructions on calibrating ion gauge sensitivity and emission current. Note that the two ion gauge collector inputs are in common so calibration inputs may be applied to either. 37 — 1 x 10-9 Calibration Adjustment This potentiometer calibrates the electrometer for very low inputs. Factory set, do not adjust. Contact a Helix Technology application engineer for further information. 38 — Electrometer Scale Adjustment This is a factory calibration point and should not normally be changed by the user. 39 — Overpressure Shutdown Adjustment This control is factory set so the ion gauge will shut down when the pressure rises above the following levels: Emission Current (milliamperes) Overpressure Point (Torr) 0.1 range 1 x 10-2 1.0 range 1 x 10-3 10.0 range 1 x 10-4 The overpressure shutoff point does not depend on the adjustment of the emission level within a range. To adjust the overpressure shutoff point to a different level: 1. Maintain system pressure at the desired shutoff point. 2. Rotate the overpressure adjustment potentiometer fully counter-clockwise. 3. Turn on the ion gauge. 4. Rotate the adjustment pot clockwise slowly until the IG turns off. 42 — A/D Calibration Factory set, do not adjust. Figure 2-5 Ion Gauge Electrometer Module, Top View. 2-6 Series 307 Vacuum Gauge Controller November, 2001 2 The Ion Gauge Electrometer Module 2.5 Electrometer Troubleshooting Symptom Possible Cause Electrometer underrange indicator 40 Electrometer overrange indicator 41 lit. lit. Ion gauge collector unplugged. Collector cable defective. Failure of electrometer electronics. Failure of electrometer electronics. LED 43 or 44 emission under/over current indicator lit. Failure of emission control under/over current indicator circuitry. Not necessarily a failure on the electrometer board, unless lit continuously. Other possibilities include: short circuit in IG cable, IG tube failure, IG power supply failure. Microprocessor reset LED 45 flashing. lit or Microprocessor failure. lit. IG collector unplugged. A/D integration failure LED 46 2.6 Electrometer Module Specifications Gauge Type Bayard-Alpert or compatible hot filament I.G. Pressure Range Emission Range .01 to .1 mA .1 mA to 1 mA 1 mA to 10 mA Readable to: Standard Electrometer 1x10-8 to 1x10-1 Torr 1x10-9 Torr 1x10-9 to 1x10-2 Torr 1x10-10 Torr 1x10-10 to 1x10-3 Torr 1x10-11 Torr Readable to: UHV Electrometer 5x10-10 to 1x10-1 Torr 5x10-11 to 1x10-2 Torr 5x10-12 to 1x10-3 Torr Gas Type N/A Electronic Accuracy Typically ± 3% of reading at ambient temperature = 25 ± 5 °C. Resolution of IG Readout Scientific notation, 2 significant digits. Display Update Time 0.5 sec typical Switch selectable to 3 sec/reading, averaged. IG Tube Sensitivities 3/Torr to 50/Torr (factory setting is 10/Torr). Emission Current 10 µA to 10 mA in 3 decade ranges (factory setting is 1 mA) Collector Potential 0V Grid Potential +180 V 2-7 Series 307 Vacuum Gauge Controller November, 2001 2 The Ion Gauge Electrometer Module Filament Potential +30 V Filament Current 0-6A Degas EB: 10-40 watts (derate to 35 watts at 100 V line). I2R: 8 V, 10 A maximum (derate to 7V at 100V line). Power to gauge a function of cable length. Not recommended for standard cable lengths over 50 ft. Consult factory. Analog Output 0-10 V; Logarithmic; 1 V/decade. NOTE: Internal overpressure limiter is factory adjusted to trip at 1-decade below the upper limits specified above. See page 2.6 for readjustment instructions. 2-8 Series 307 Vacuum Gauge Controller November, 2001 Chapter 3 3 The Convectron Gauge Module SAFETY INSTRUCTIONS SAFETY PAYS. THINK BEFORE YOU ACT. UNDERSTAND WHAT YOU ARE GOING TO DO BEFORE YOU DO IT. READ THIS INSTRUCTION MANUAL BEFORE INSTALLING, USING, OR SERVICING THIS EQUIPMENT. IF YOU HAVE ANY DOUBTS ABOUT HOW TO USE THIS EQUIPMENT SAFELY, CONTACT THE GRANVILLE-PHILLIPS PRODUCT MANAGER FOR THIS EQUIPMENT AT THE ADDRESS LISTED ON THIS MANUAL. Explosive Gases Do not use the gauge tube to measure the pressure of combustible gas mixtures. The sensing element normally operates at only 125 °C but it is possible that momentary transients or controller malfunction can raise the sensor above the ignition temperature of combustible mixtures which might then explode causing damage to equipment and injuring personnel. Limitation on Use of Compression Mounts Do not use a compression mount (quick connect) for attaching the gauge tube to the system in applications resulting in positive pressures in the gauge tube. Positive pressures might blow the tube out of a compression fitting and damage equipment and injure personnel. The Convectron gauge should not be used above 1000 Torr (1333 mbar or 1.33 x 105 Pa). Tube Mounting Position If the gauge tube will be used to measure pressures greater than 1 Torr or 1 mbar, the tube must be mounted with its axis horizontal. Although the gauge tube will read correctly below 1 Torr when mounted in any position, erroneous readings will result at pressures above 1 Torr if the tube axis is not horizontal. Erroneous readings can result in over or underpressure conditions which may damage equipment and injure personnel. Overpressure Convectron gauges should not be used above 1000 Torr true pressure. Do not use above 1000 Torr true pressure. Series 307 instruments are furnished calibrated for N2. They also measure the pressure of air correctly within the accuracy of the instrument. Do not attempt to use a Convectron gauge calibrated for N2 to measure or control the pressure of other gases such as argon or CO2, unless accurate conversion data for N2 to the other gas is properly used. If accurate conversion data is not used or improperly used, a potential overpressure explosion hazard can be created under certain conditions. For example, at 760 Torr of argon gas pressure, the indicated pressure on a Convectron gauge calibrated for N2 is 24 Torr. At an indicated pressure of 50 Torr, the true pressure of argon is considerably above atmospheric pressure. Thus if the indicated pressure is not accurately converted to true pressure, it is possible to overpressure your system. Overpressure may cause glassware such as ionization gauges to shatter dangerously, and if high enough may cause metal parts to rupture thus damaging the system and possibly injuring personnel. See Section 3.3 Convectron Operation on page 3-6 for proper use of conversion data. A pressure relief valve should be installed in the system should the possibility of exceeding 1000 Torr exist. 3-1 Series 307 Vacuum Gauge Controller November, 2001 3 The Convectron Gauge Module High Indicated Pressure For some gases, be aware the indicated pressure will be higher than the true pressure. For example, at a true pressure of 9 Torr for helium the indicated pressure on a Convectron gauge calibrated for N2 is 760 Torr. The safe way to operate the gauge is to properly use accurate conversion data. See Section 3.3 Convectron Operation on page 3-6 for proper use of conversion data. Chemical Cleaning solvents, such as trichloroethylene, perchloroethylene, toluene and acetone, produce fumes that are toxic and/or flammable. Use only in areas well ventilated to the outdoors and away from electronic equipment, open flames, or other potential ignition sources. Sensor Failure If the gauge tube becomes disconnected from the controller or if the sensor wire in the gauge tube fails, the controller will indicate 9.9E+9. If the tube is unplugged from a powered controller, there may be an instantaneous (0 to 0.2 seconds) drop in the pressure indication and the process control relays could activate for this brief time, depending on the order in which the tube pins break contact. Tube Contamination The calibration of the gauge will be seriously affected by any gas which will attack the gold plated sensor, and could result in overpressurizing the system. Two primary gases in this category are mercury vapor and fluorine. 3.1 Convectron Module, Introduction The Convectron Gauge (CG) Module provides pressure measurement from 1.0 x 10-3 Torr (1.3 x 10-3 mbar or 1.3 x 10-1 Pa) to 1000 Torr, and one meaningful digit pressure indication down to 1 x 10-4 Torr, air equivalent. Two transducers are displayed simultaneously in the second and third display lines, and are denoted here by “CGA” and “CGB” respectively. Analog output (logarithmic in pressure, 1 volt per decade) is also provided. The Convectron can also be used to automatically turn on or off an ion gauge. When used with the Process Control Module, the two gauges control four setpoints, in addition to the ion gauge turn-on setpoints. 3-2 Series 307 Vacuum Gauge Controller November, 2001 3 The Convectron Gauge Module 3.2 Convectron Installation 3.2.1 Units of Measure Your instrument will have been shipped from the factory pre-set to display the units of measure, torr, millibar, or pascal, that you requested. If you wish to change units, proceed as follows: 1. Shut off power to the control unit. 2. Remove the top cover. Locate the Convectron Module. 3. Locate 47 the millibar and 48 pascal units switches. 4. Leave both switches open for Torr units. Close the appropriate switch for either millibar pascal units. 5. Modify the units of measure of the electrometer to be consistent with the Convectron. 6. Slip the label card out of the top of the front panel and apply the appropriate pressure units label. Figure 3-1 49 Convectron Module, Top View. — Display Update Rate Switch When “ON”, this switch enables pressure averaging. The display will be updated approximately every 3 seconds. When “OFF”, the update period is approximately 0.5 sec. 50 — Not used. 3-3 Series 307 Vacuum Gauge Controller November, 2001 3 The Convectron Gauge Module 3.2.2 Convectron Gauge Tube Installation 3.2.2.1 Important Precautions for Gauge Tube Installation The following precautions in the use and installation of the Convectron gauge tube must be observed. When high voltage is present, all exposed conductors of a vacuum must be maintained at earth ground. WARNING - Under certain conditions, dangerous high voltage can be coupled directly to an ungrounded conductor through a gas almost as effectively as through a copper wire connection. This hazard, which is not peculiar to this product, is a consequence of the ability of an electric current to flow through a gas under certain circumstances. A person may be seriously injured, or even killed by merely touching an exposed ungrounded conductor at high potential. When high voltages are used within the vacuum system and the Convectron Gauge envelope is not reliably grounded through its vacuum connection, either a separate ground wire must be added, or the envelope must be shielded to positively prevent human contact. The gauge envelope may be grounded by using a metal hose clamp on the gauge connected by a #12 AWG copper wire to the grounded vacuum chamber. High voltage can couple through a gas to the internal electrodes of a gauge. Do not touch the exposed pins on any gauge installed on a vacuum system where high voltage is present. IMPORTANT 1. Observe the precautions at the front of this chapter regarding tube mounting position and high pressure operation. 2. The gauge tube should be installed with the port oriented vertically downward to ensure that no system condensates or other liquids collect in the gauge tube. 3. Keep the tube clean. Do not remove the mounting port cover until you are ready to install the tube. 4. Do not mount the gauge tube in a manner such that deposition of process vapors upon the internal surfaces of the tube may occur through line-of-sight access to the interior of the gauge tube. 5. Do not install the tube where high amplitudes of vibration are present. Excessive vibration will cause forced convection at high pressure giving erroneous readings. 6. Do not bake the tube to temperatures above 150 °C. 7. Do not install the gauge tubes where they will be exposed to corrosive gases such as mercury vapor, chlorine, or fluorine, which will attack the gold plated sensor. 8. For greatest accuracy and repeatability the gauge tube should be located in a stable room temperature environment. 3-4 Series 307 Vacuum Gauge Controller November, 2001 3 The Convectron Gauge Module 3.2.3 Gauge Tube Orientation It is important to consider the orientation of the gauge tube if accurate readings above 1 Torr are desired. Below 1 Torr: The gauge tube will operate and accurately read pressures below 1 Torr when mounted in any orientation. Above 1 Torr: The gauge tube will accurately read pressures above 1 Torr only when mounted with its axis horizontal, preferably with the port pointing vertically downward, as shown in Figure 3-2. It is valuable to point the port downward to facilitate the removal of condensation and other contaminants. Furthermore, the gauge is factory calibrated with the port pointing vertically downward. Installation of the gauge with the port in other orientations may affect the accuracy of the indicated pressure. Mounting clearance dimensions are shown in Figure 3-2. Figure 3-2 Convectron Gauge Mounting. 3.2.3.1 Compression Mount (Quick Connect) Do not use for positive pressure applications. The gauge tube port is designed to fit a standard 1/2 in. compression (quick connect) mount such as the Cajon Co. Ultra-Torr® fittings. 3-5 Series 307 Vacuum Gauge Controller November, 2001 3 The Convectron Gauge Module Remove the caplug from the gauge tube port, insert the gauge tube port into the compression fitting and finger tighten the press ring. If a seal is not achieved it may be due to extreme cleanliness of the O-ring. A light film of vacuum grease such as Apiezon1 will insure sealing and is normally preferable to the use of pliers or pipe wrench to further tighten the press ring. You may point the electrical pins of the gauge tube anywhere you wish in a 360 degree horizontal circle for optimum routing of the gauge tube cable. 3.2.3.2 1/8 NPT Mount The threads on the gauge tube port will fit a standard 1/8 NPT female fitting. Wrap the threads of the gauge tube port with Teflon® tape and screw these threads into the system fitting hand tight. Do not use any wrench or tool. The gauge tube body functions adequately as its own wrench. Tighten only sufficiently to achieve a seal. When the threads have been tightened to the point where a seal is just achieved, about one-half turn additional tightening is all that can be gained without overstressing the tube port. Be very careful in tightening so as not to damage the feedthrough pins projecting from the blue trim cover. 3.2.3.3 NW16KF Flange Mount The KF mounting system requires an O-ring and centering ring to be placed between the mating flanges. The flanges are then held together with the aluminum flange clamp by tightening the wing nut. Maximum pressure for this style mounting system is 1000 Torr absolute. 3.3 Convectron Operation 3.3.1 Reading Pressure WARNING - IF USED WITHOUT PROPER CALIBRATION OR WITHOUT REFERENCE TO PROPER CALIBRATION TABLES, Convectron gauges can supply misleading pressure indications. This may result in dangerous overpressure conditions within the system. As supplied from the factory, the controller is designed to read pressure for nitrogen. For use with any other gases, consult the gas type correction charts found later in this manual. The Convectron pressures are read in displays A and B of the 307 control unit. These pressures are displayed to 2 digits, except in the 10-4 Torr range, where only 1 meaningful digit is displayed. 3.3.2 Special Considerations for Use Below 10-3 Torr During a fast pumpdown from atmosphere, thermal effects will prevent the Convectron from tracking pressure rapidly below 10-3 Torr. After about 15 minutes readings in the 10-4 range will be valid and response will be rapid. Calibration at vacuum may be performed at this time, or sooner if readings in the 10-4 range are not needed. The 10-4 Torr range is accurate to about 0.1 milliTorr provided the instrument has been carefully zeroed at vacuum. See Section 3.4 Convectron Calibration and Maintenance on page 3-16 for vacuum and atmosphere calibration procedures. For accurate use in the 10-4 Torr range, zeroing should be repeated frequently. Pressure readings in the 10-4 Torr range may differ from those found from ion gauges, since ion gauges usually lose sensitivity near their upper pressure limits. 1. Trademark of James G. Biddle Co. 3-6 Series 307 Vacuum Gauge Controller November, 2001 3 The Convectron Gauge Module 3.3.3 Use With Gases Other Than N2 and Air Before using the Convectron gauge to measure the pressure of other gases make certain the ATM adjustment is correctly set for air. See Section 3.4 Convectron Calibration and Maintenance on page 3-16. It is important to understand that the indicated pressure on a Convectron gauge depends on the type of gas in the tube, and on the orientation of the tube axis as well as on the gas pressure in the tube. Convectron gauges are supplied calibrated for N2 within the accuracy of the instrument. With certain safety precautions, the Convectron gauge may be used to measure pressure of other gases. Convectron gauge tubes are thermal conductivity gauges of the Pirani type. These gauges transduce gas pressure by measuring the heat loss from a heated sensor wire maintained at constant temperature. For gases other than N2 and air the heat loss is different at any given true pressure and thus the indicated reading will be different. 3.3.4 Indicated vs. True Pressure Curves Figures 3-3 through 3-8 show the true pressure vs indicated pressure on Series 275 instruments for eleven commonly used gases. Table 3-1 will help to locate the proper graph for a specific application. Table 3-1 Pressure vs. Indicated N2 Pressure Curve. Fig. No. Range and Units Gases 3-3 1 to 100 mTorr All 3-4 0.1 to 1000 Torr Ar, C02, CH4, Freon 12, He 3-5 0.1 to 1000 Torr D2, Freon 22, Kr, Ne, 02 3-6 10-3 to 10-1 mbar All 3-7 0.1 to 1000 mbar Ar, C02, CH4, Freon 12, He 3-8 0.1 to 1000 mbar D2, Freon 22, Kr, Ne, 02 Note that 1 mbar = 100 Pa, so the mbar charts may be used for pascal units by multiplying the values on the axes by 100. A useful interpretation of these curves is, for example, that at a true pressure of 2 x 10-2 Torr of CH4 the heat loss from the sensor is the same as at a pressure of 3 x 10-2 Torr of N2 (see Figure 3-3 on page 3-9). The curves at higher pressure vary widely from gas to gas because the thermal losses at higher pressures are greatly different for different gases. The Convectron gauge tube utilizes convection cooling to provide resolution superior to any other thermal conductivity gauge near atmospheric pressure of N2 and air. Because convection effects are geometry dependent, the true pressure vs indicated pressure curves for the Convectron gauge tube are likely to be much different from curves for heat loss tubes made by others. Therefore, it is not 3-7 Series 307 Vacuum Gauge Controller November, 2001 3 The Convectron Gauge Module safe to attempt to use calibration curves supplied by other manufacturers for their gauges with the Convectron nor is it safe to use curves for the Convectron gauge with gauges supplied by other manufacturers. If you must measure the pressure of gases other than N2 or air, use Figures 3-3 through 3-8 to determine the maximum safe indicated pressure for the other gas as explained below. Example 1 – Maximum safe indicated pressure. Assume a certain system will withstand an internal pressure of 2000 Torr or 38.7 psia. For safety you wish to limit the maximum internal pressure to 760 Torr during backfilling. Assume you wish to measure the pressure of argon. On Figure 3-4 on page 3-10 locate 760 Torr on the left hand scale, travel to the right to the intersection with the argon (Ar) curve and then down to an indicated pressure of 24 Torr (N2 equivalent). Thus in this hypothetical situation the maximum safe indicated pressure for argon is 24 Torr. For safety, it is prudent to place a warning label on the instrument face which under the assumed conditions would read “DO NOT EXCEED 24 TORR FOR ARGON.” Example 2 – Indicated to true pressure conversion. Assume you wish to determine the true pressure of argon in a system when the Convectron is indicating 10 Torr. On Figure 3-4 on page 3-10, read up from 10 Torr (N2 equivalent) indicated pressure to the argon curve and then horizontally to the left to a true pressure of 250 Torr. Thus 250 Torr argon pressure produces an indication of 10 Torr (N2 equivalent). Example 3 – True to indicated pressure conversion. Assume you wish to set a process control set point at a true pressure of 20 Torr of CO2. On Figure 3-4 on page 3-10, locate 20 Torr on the true pressure scale, travel horizontally to the right to the CO2 curve and then down to an indicated pressure of 6 Torr (N2 equivalent). Thus the correct process control setting for 20 Torr of C02 is 6 Torr (N2 equivalent). Example 4 – True to indicated pressure conversion. Assume you wish to obtain a helium pressure of 100 Torr in the system. On Figure 3-4 on page 3-10, locate 100 Torr on the left hand scale, travel horizontally to the right to attempt to intersect the He curve. Because the intersection is off scale it is apparent that this true pressure measurement requirement for helium exceeds the capability of the instrument. For gases other than those listed, the user must provide accurate conversion data for safe operation. The Convectron gauge is not intended for use above 1000 Torr true pressure. 3-8 Series 307 Vacuum Gauge Controller November, 2001 3 The Convectron Gauge Module 1 10-1 10-2 Kr N2, air True Pressure (Torr) Ar Ne freon 22 He freon 12 O2 10-3 CO2 D2 CH4 Do not use this data with transducers other than the G-P Series 275 Convectron® Gauge. Pressure units equivalence: 1 µm Hg = 1 mTorr = 1 x 10-3 Torr 1000 µm Hg = 1 Torr 10-4 10-3 10-4 10-1 10-2 Indicated Pressure (Torr) (nitrogen equivalent) Figure 3-3 Convectron Gauge Indicated vs. True Pressure Curve; 10 -4 to 10 -1 Torr. 3-9 Series 307 Vacuum Gauge Controller November, 2001 3 The Convectron Gauge Module 1000 Ar freon 12 CO2 N2, air 100 CH4 10 True Pressure (Torr) He 1 Use only when gauge axis is horizontal Do not use this data with transducers other than the G-P Series 275 Convectron® Gauge. 10-1 Pressure units equivalence: 1 µm Hg = 1 mTorr = 1 x 10-3 Torr 1000 µm Hg = 1 Torr 10-2 10-1 1 100 10 1000 Indicated Pressure (Torr) (nitrogen equivalent) Figure 3-4 Convectron Gauge Indicated vs. True Pressure Curve; 10 -1 to 1000 Torr. 3-10 Series 307 Vacuum Gauge Controller November, 2001 3 The Convectron Gauge Module 1000 Kr N2, air freon 22 O2 100 Ne 10 True Pressure (Torr) D2 Use only when gauge axis is horizontal 1 Do not use this data with transducers other than the G-P Series 275 Convectron® Gauge. Pressure units equivalence: 1 µm Hg = 1 mTorr = 1 x 10-3 Torr 1000 µm Hg = 1 Torr 10-1 10-2 10-1 10 1 100 1000 Indicated Pressure (Torr) (nitrogen equivalent) Figure 3-5 Convectron Gauge Indicated vs. True Pressure Curve; 10 -1 to 1000 Torr. 3-11 Series 307 Vacuum Gauge Controller November, 2001 3 The Convectron Gauge Module 1 10-1 10-2 Kr N2, air CO2 True Pressure (mbar) Ar D2 Ne freon 22 He freon 12 O2 10-3 CH4 Do not use this data with transducers other than the G-P Series 275 Convectron® Gauge. Pressure units equivalence: 1 mbar = 100 pascal 10-4 10-4 10-3 10-1 10-2 Indicated Pressure (mbar) (nitrogen equivalent) Figure 3-6 Convectron Gauge Indicated vs. True Pressure Curve; 10 -4 to 10 -1 mbar. 3-12 Series 307 Vacuum Gauge Controller November, 2001 3 The Convectron Gauge Module 1000 Ar freon 12 CO2 N2, air 100 CH4 10 True Pressure (mbar) He 1 Use only when gauge axis is horizontal Do not use this data with transducers other than the G-P Series 275 Convectron® Gauge. -1 10 Pressure units equivalence: 1 mbar = 100 pascal 10-2 10-1 100 10 1 1000 Indicated Pressure (mbar) (nitrogen equivalent) Figure 3-7 Convectron Gauge Indicated vs. True Pressure Curve; 10 -1 to 1000 mbar. 3-13 Series 307 Vacuum Gauge Controller November, 2001 3 The Convectron Gauge Module 1000 Kr N2, air O2 freon 22 100 Ne 10 True Pressure (mbar) D2 Use only when gauge axis is horizontal 1 Do not use this data with transducers other than the G-P Series 275 Convectron® Gauge. Pressure units equivalence: 1 mbar = 100 pascal 10-1 10-2 10-1 1 100 10 1000 Indicated Pressure (mbar) (nitrogen equivalent) Figure 3-8 Convectron Gauge Indicated vs. True Pressure Curve; 10 -1 to 1000 mbar. 3-14 Series 307 Vacuum Gauge Controller November, 2001 3 The Convectron Gauge Module 3.3.5 Analog Output On the rear panel are provided analog outputs for both gauges, see Refs. 51 and 52 . These are dc voltages proportional to the logarithm of the pressure, scaled to 1 volt per decade: 0 volts = 1 x 10-4 or less, Torr or mbar, 1 volt = 1 x 10-3, etc. For pascal units, the analog output will be scaled to 0 volts = 1 x 10-2 Pa. Internal offset adjustments are provided which allow a shift in the analog output at 10-4 Torr away from 0 volts to anywhere in the range -7 to +1 Vdc. This adjustment does not affect the slope of the analog output vs pressure curve. See Section 3.4 on page 3-16 for adjustment. Standard 1/8” miniature phono jack connectors are provided for the analog output. Figure 3-9 Figure 3-10 Convectron Module Rear panel. Convectron Gauge Pressure Analog Output. 3-15 Series 307 Vacuum Gauge Controller November, 2001 3 The Convectron Gauge Module 55 and 58 — Filament Auto Turn-On CGA may be used to automatically turn on IG1, and CGB to turn on IG2. Auto turn-on occurs when the CG pressure drops below the setpoint defined by the auto turn-on adjustment potentiometers. The IG will also automatically be turned off when the pressure rises above this point. The automatic off/on function will execute only once per setpoint crossing. For example, the IG may be turned off manually when below the setpoint, and the auto-on function will not turn it back on again until CG pressure has risen above the setpoint and once again dropped below. The auto turn-on potentiometer is marked with rough pressure calibration markings. To set the pressure at which the IG will turn on with falling CG pressure, and off with rising pressure, simply adjust the pot to point to the desired pressure. More precise control may be achieved by fixing the system pressure at the desired auto turn-on pressure, and adjusting the potentiometer slowly until the gauge comes on. To disable the auto turn on function, adjust the CG auto turn-on pot 55 or 58 completely counter-clockwise (“off”). Figure 3-11 Convectron Module Front Panel. 3.4 Convectron Calibration and Maintenance Each gauge tube is individually calibrated for N2 and air prior to leaving the factory. The Convectron gauge tube itself has a temperature compensated design. Each controller is also individually calibrated to provide accurate readout of N2 and air pressure with any calibrated tube. Therefore, initial calibration should not be necessary. See Table 3-1 on page 3-7 for use with gases other than N2 or air. Calibration should be performed if accurate readings in the 10-4 Torr range are desired, if the tube becomes contaminated, does not read correctly, or to readjust for use with long cables. For accurate calibration, the vacuum and atmosphere adjustments must be made in the following order. The gauge and controller can be calibrated as a system by performing the following steps: 1. 2. 54 and 57 — Zero Adjustment a. Evacuate the system to a pressure less than 1 x 10-4 Torr. b. With the gauge tube operating, adjust the VAC pot until 0.0 0 shows in the display. Note that if the adjustment is turned too far below zero, a minus sign will appear before the exponent (0.0 -0). Thus proper zero calibration is achieved when only 0.0 0 appears. 53 a. and 56 — Atmosphere Adjustment Allow the system pressure to rise to atmospheric pressure of N2 or air. 3-16 Series 307 Vacuum Gauge Controller November, 2001 3 The Convectron Gauge Module b. Adjust the ATM pot until the pressure displayed agrees with the absolute pressure as read on an accurate barometer. Use absolute pressure, not corrected to sea level. NOTE: 1 atmosphere normal at sea level = 7.6 x 10 2 Torr = 1.0 x 10 3 mbar = 1.0 x 10 5 Pa. 59 — Analog Output Full Scale Adjustment This potentiometer may be adjusted to calibrate the span of the analog output voltage to the factory setting of 1 volt per decade. This adjustment is common to both outputs. 60 and 61 — Analog Output Offset; gauges A and B These potentiometers provide adjustable offset voltages to each analog output. The range of this adjustment allows setting the analog output at vacuum (P = 1 x 10-4 Torr) anywhere in the range -7 to +1 Vdc. The factory calibration is established by adjusting 60 and 61 to yield 0-volt outputs when both gauges are at vacuum (pressure less than 1 x 10-4 Torr), then adjusting 59 to increase 1 volt for each decade the pressure increases. Figure 3-12 Convectron Module Top View. 3.4.1 Cleaning the Gauge Tube The Convectron gauge may be baked to 150 °C. See Section 3.5 on page 3-18 for a list of materials exposed to vacuum. When the fine sensor wire is so contaminated with oil or other films that its emissivity or its diameter is appreciably altered, a change of calibration will result. Cleaning with trichloroethylene, perchloroethylene, toluene, or acetone is possible but it must be done very carefully so as not to damage the sensor. CAUTION: The fumes from any of these solvents can be dangerous to your health if inhaled and they should be used in well ventilated areas exhausted to the outdoors. Acetone and toluene are highly flammable and should be used away from open flame or electrical equipment. Hold the tube with the main body horizontal and the port projecting upward at an angle of 45o and slowly fill it with solvent using a standard wash bottle with the spout inserted in the port to where it touches the screen. Let the solvent stand in the tube for at least ten minutes. Do not shake the tube if the tube is only partially filled as liquid forces on the sensor can become large enough to affect the transducer calibration. If the tube is completely filled, shaking is not helpful. To drain the tube, position it horizontally with the port facing downward. By slightly warming the tube, a positive pressure will build up internally forcing the solvent out past the screen. Then allow tube to dry overnight with port vertically downward and uncapped. Be certain no solvent odor remains before reinstalling tube on system. 3-17 Series 307 Vacuum Gauge Controller November, 2001 3 The Convectron Gauge Module 3.5 Theory of Operation The Convectron transducer is represented in Figure 3-13 as R1, R2, R3, and R4. These four resistances form the legs of a bridge circuit, with R1 designating the sensor wire of the transducer. R2 is a resistive network in the tube which compensates for changes in the ambient temperature. At bridge null, R1=R2xR3/R4. If there are no changes in ambient temperature, the value of R1 is a constant and the bridge is balanced. Figure 3-13 Simplified Schematic Convectron Gauge Module. As the vacuum system pressure is decreased, there are fewer molecules in the system to conduct the heat away from the sensor wire causing the temperature and resistance of R1 to increase. The increased resistance of R1 causes the bridge to unbalance and a voltage is developed across the null terminals. The bridge control circuit senses the null voltage and decreases the voltage across the bridge until the null voltage is again zero. When the bridge voltage is decreased, the power dissipated in the sensor wire is decreased causing the resistance of R1 to decrease to its previous value. The opposite events happen for a pressure increase. The bridge voltage is a non-linear function of pressure. All materials have been chosen for ultra high vacuum service, corrosion resistance and bakeability to 150 °C. The gauge tube envelope is type 304 stainless steel. All metallic joints in the envelope are TIG welded. No solder is used within the envelope. The following materials are exposed to the vacuum: Type 304 stainless steel, Carpenter Alloy 52, Kovar1, Kapton gold plated tungsten, and borosilicate glass and Dow-Corning 9015 glass. The blue trim cover is molded of polysulfone thermoplastic suitable for service to 150 °C. 1. Trademark of Carpenter Technology 3-18 Series 307 Vacuum Gauge Controller November, 2001 3 The Convectron Gauge Module 3.6 Convectron Troubleshooting 3.6.1 Transducer Test Procedure Do not perform electrical continuity tests with instruments applying in excess of 1 volt when the tube is at vacuum, or 5 volts when at atmospheric pressure. The 275 transducer should show the following resistances (pin numbers are embossed on the transducer cap): Pins 1 to 2 20 to 25 ohms Pins 2 to 3 50 to 60 ohms Pins 1 to 5 175 to 190 ohms Any pin to envelope open circuit If the resistance from pin 1 to 2 is about 800 ohms, the sensor wire is broken. Figure 3-14 Convectron Module, Top view. 3-19 Series 307 Vacuum Gauge Controller November, 2001 3 The Convectron Gauge Module Table 3-2 Convectron Troubleshooting Guide. Symptom Possible Cause CGA overcurrent indicator 62 lit. Cable short, pins 1-3. CGB overcurrent indicator 63 lit. Cable short, pins 1-3. Indicators 64 or 65 lit. Circuit failure. Indicator 66 lit. CGB unplugged; broken sensor wire. Indicator 67 lit. CGB unplugged; broken sensor wire. Microprocessor reset LED 68 lit or flashing. A/D integration failure indicator 69 flashing. Display reads 9.9 lit or +9. Microprocessor failure. Circuit failure. Broken sensor wire. Display reads - Tube or cable at controller unplugged. Pressure reading very inaccurate. Controller out of calibration, unknown gas type, tube mounted in the wrong orientation, sensor damaged (e.g., by reactive gas), tube very dirty, extremes of temperature or mechanical vibration. 3.7 Convectron Specifications Gauge Type G-P Series 275 Pressure Range 1 x 10-4 Torr to 990 Torr, N2 equivalent. Display Resolution 2 significant digits, except for 1 significant digit in 10-4 Torr decade. Gas Type N2, Air Display Update Time 0.5 sec typical. Switch selectable to 3 sec/reading, averaged. Analog Output Logarithmic, 1V/decade, Factory set to 0-7 Vdc. Adjustable offset +1 Vdc to -7 Vdc. 10 mA maximum current. 3-20 Series 307 Vacuum Gauge Controller November, 2001 Chapter 4 4 The Thermocouple Gauge Module 4.1 Introduction The Thermocouple Gauge (TC) Module for the Granville-Phillips 307 Vacuum Gauge Controller provides pressure measurement from 1 X 10-3 Torr (1.3 X 10-3 mbar or 1.33 x 10-1 Pascal) to 1 Torr. Two transducers are displayed simultaneously in the second and third display lines, and are denoted here by “TCA” and “TCB” respectively. Analog output is also provided. The thermocouple gauge can also be used to automatically turn on or off an ion gauge. When used with the process control, the two gauges control four setpoints, in addition to the ion gauge turn-on setpoints. 4.2 Thermocouple Gauge Module Installation 4.2.1 Units of Measure Your instrument will have been shipped from the factory pre-set to display the units of measure; Torr, millibar or Pascal, that you requested. If you wish to change units, proceed as follows: 1. Shut off power to the control unit. 2. Remove the top cover. Locate the thermocouple gauge pc board 3. Locate 70 , the millibar, and 71 , the Pascal, units switches. 4. Leave both switches open for Torr units. Close the appropriate switch for either millibar or Pascal units. 5. Modify the units of measure of the electrometer to be consistent with the thermocouple gauge module. 6. Slip the label card out of the top of the front panel and apply the appropriate pressure units label. Figure 4-1 72 Thermocouple Module, Top View. — Display Update Rate Switch When “ON”, this switch enables pressure averaging. The display will be updated approximately every 3 seconds. 73 — Not used. 4-1 Series 307 Vacuum Gauge Controller November, 2001 4 The Thermocouple Gauge Module 4.2.2 Thermocouple Gauge Tube Installation The 307 VGC thermocouple gauge module is designed to operate with Granville-Phillips 270006 or comparable transducers. (See Section 4.6 Thermocouple Gauge Specifications on page 4-6 for other compatible transducers). The thermocouple gauge tubes may be installed anywhere in the system using a 1/8 NPT or .410 in. compression connection, or may be welded directly. Do not use compression fittings for positive pressure applications. If installed in an area where condensable vapors are present, mount with the open end pointing down to allow drainage. 4.3 Thermocouple Gauge Operation 4.3.1 Reading Pressure The thermocouple gauge pressures are read in displays A and B, the second and third display lines, of the 307 control unit. Since thermocouple gauges have negligible resolution at pressures above 1 Torr, the instrument overflows to a pressure of 9.9 +9 at pressures above 1 Torr. If the gauge is reading “above atmosphere” the display will read 99 +9, that is, the decimal point disappears. For the bargraph display, the last 2 elements on the right will blink for the “above atmosphere” condition. This can be used in the atmosphere calibration procedure (see Section 4.4 Thermocouple Gauge Calibration on page 4-4). 4.3.2 Analog Output On the rear panel are provided analog outputs for both gauges, 74 and 75 . The voltage is 0 to 10 volts dc, non-linear. See Figure 4-2. Standard 1/8” miniature phono jack connectors are provided for the analog output. Figure 4-2 Thermocouple Gauge Module, Rear Panel. 4-2 Series 307 Vacuum Gauge Controller November, 2001 4 The Thermocouple Gauge Module Figure 4-3 Thermocouple Gauge Pressure Analog Output. 4.3.3 Filament Auto Turn-On TCA may be used to automatically turn on IG1, and TCB to turn on IG2. Auto turn on occurs when the TC pressure drops below the setpoint defined by the auto turn-on adjustment potentiometers, 77 and 79 . The IG will also automatically be turned off when the pressure rises above this point. The automatic on/off function will execute only once per setpoint crossing. For example, the IG may be turned off manually when below the setpoint, and the auto-on function will not turn it back on again until TC pressure has risen above the setpoint and once again dropped below. The auto turn-on pot is marked with rough pressure calibration markings. To set the pressure at which the IG will turn on with falling TC pressure, and off with rising pressure, simply adjust the pot to point to the desired pressure. Figure 4-4 Thermocouple Gauge Module, Front Panel. 4-3 Series 307 Vacuum Gauge Controller November, 2001 4 The Thermocouple Gauge Module More precise control may be achieved by fixing the system pressure at the desired auto turn-on pressure, and adjusting the potentiometer slowly until the gauge comes on. To disable the auto turn on function, adjust the auto turn-on pot completely counter-clockwise (“OFF”). 4.4 Thermocouple Gauge Calibration 76 and 78 — Zero Adjustment 1. Evacuate the system to a pressure less than 1 x 10-3 Torr (if bargraph display proceed to Step 2.b). 2. With the gauge tube operating, a. adjust the VAC pot until a single “0” shows in the display. Note that if the adjustment is turned too far below zero, a minus sign will appear in the display. Thus proper zero calibration is achieved when only the “0” appears. b. adjust the VAC pot until all bargraph segments are turned off. Note that if the adjustment is turned too far below zero, the last two display elements on the left will blink on the display being zeroed. Thus proper zero calibration is achieved when all lights are out. 88 and 89 — Atmosphere Adjustment Calibration at atmosphere is performed at the factory and should not normally be attempted by the user. However, if necessary, proceed as follows: 1. Allow the system pressure to rise to atmospheric pressure. 2. Remove the top of the control unit (if bargraph display proceed to Step 3.b). 3. Adjust the atmosphere potentiometer, 88 for TCA or 89 for TCB, a. until the pressure display is 9.9 x 10+9. Note that when adjusted beyond this point, the decimal point of the display will disappear, “perfect” calibration is achieved when the decimal point just disappears. However, the resolution of the gauge at this point is very poor, and the appearance or disappearance of the decimal point during normal operation when the gauge is at atmosphere is no cause for concern. b. until the pressure display is totally lit. Note that when adjusted beyond this point, the last two display elements on the right will blink on the display being adjusted. “Perfect” calibration is achieved when the blinking just stops. The resolution of the gauge at this pressure point is very poor, and the blinking of the two elements during normal operation when the gauge is at atmosphere is no cause for concern. 4-4 Series 307 Vacuum Gauge Controller November, 2001 4 The Thermocouple Gauge Module 4.5 Thermocouple Gauge Troubleshooting Refer to Figure 4-5 to find the indicator LEDs on the thermocouple printed circuit board. Table 4-1 Troubleshooting Guide. Symptom Possible Cause Indicator LED 80 Indicator 81 lit. Cable short or circuit failure (TCB). lit. Cable short or circuit failure (TCA). Indicators 82 or 83 lit. Circuit failure or TCB out of calibration. Indicators 84 or 85 lit. Circuit failure or TCA out of calibration. Indicator 86 lit. Microprocessor failure. Indicator 87 lit. Circuit failure. Display reads 9.9 +9. Tube unplugged. Pressure reading very inaccurate. Tube out of calibration or contaminated. Controller out of calibration. Tube reads at or below zero, or above atmosphere at all times. Controller out of calibration. Figure 4-5 Thermocouple Gauge Module, Top View. 4-5 Series 307 Vacuum Gauge Controller November, 2001 4 The Thermocouple Gauge Module 4.6 Thermocouple Gauge Specifications Gauge Type G-P 270006, Comptech TVT-6000, or Teledyne-Hastings DV-6M, DV-6R, DV-36, DV-20, or equivalent. Pressure Range 10-3 Torr to 1 Torr Nitrogen or air equivalent. Display Resolution 2 significant digits Gas Type N2 or Air. Display Update Time 0.5 sec typical, switch selectable to 3 sec/reading, averaged. Analog Output Voltage Maximum Current 0-10 Vdc nonlinear. 5 mA. 4-6 Series 307 Vacuum Gauge Controller November, 2001 Chapter 5 5 The Process Control Module It is the installer's responsibility to ensure that the automatic signals provided by the product are always used in a safe manner. Carefully check the system programming before switching to automatic operation. Where an equipment malfunction could cause a hazardous situation, always provide for fail-safe operation. As an example, in an automatic backfill operation where a malfunction might cause high internal pressures, provide an appropriate pressure relief device. 5.1 Introduction to the Process Control Module A Process Control Module provides the 307 Vacuum Gauge Controller with single-pole, double-throw relays that may be controlled either by digital setpoints or by the built-in manual override switches. The Process Control Module may be purchased with 2, 6 or 1-4 user selectable channels. The first 2 channels are assigned to the ion gauges. If present, channels 3 and 4 are assigned to CGA or TCA; and 5 and 6 to CGB, TCB, or CMB. Switches are provided to assign channel 1 to IG1, IG2, or both; and likewise for channel 2. All six channels have selectable polarity for activation above or below the setpoint. 5.2 Process Control Module Installation 5.2.1 Process Control System Connections Prior to connecting the process controls to the system, it is recommended that the following steps be followed. If application assistance is desired, contact a Helix Technology application engineer. a. Unless the control logic is simple and obvious, develop a logic diagram of the process control function. b. Prepare a specification table which lists the proposed pressure setting, system measurement point, and polarity for each PC channel. c. Draw a circuit schematic which specifies exactly how each piece of system hardware will be connected to the 307 process control relays. d. With the Process Control Module connector disconnected, connect the process control cable to the devices to be controlled. e. Ensure that all devices are under manual control before connecting to the Process Control Module. f. Attach a copy of the process control circuit diagram to this manual for future reference and troubleshooting. 5-1 Series 307 Vacuum Gauge Controller November, 2001 5 The Process Control Module The process control connector is embossed with letters identifying each pin. The following table shows the letters designating the 3 pins assigned to each of the 6 channels: Figure 5-1 Pin Assignments/Connector. 5.3 Process Control Operation At all times the status of the 6 relays are displayed in the relay status LEDs on the 307 front panel 90 . Note that these LEDs do not indicate whether the gauge pressure is above or below the programmed setpoint, since setpoint polarity and manual override status may result in activation above or below the setpoint. Figure 5-2 Process Control Relay Status Lights. 5.3.1 Setpoint Display and Adjustment Setpoints are stored in non-volatile memory, and are specified by a 1-digit mantissa and 2-digit exponent. They may be set anywhere in the range 1 x 10-12 to 9 x 10+5. This allows for the entire pressure range of all supported transducer types and systems of units. The setpoint is compared directly to the display data, so units of measure are implicit. Changing the units switch on the gauge control modules will not change the stored setpoints. They must be re-programmed in the new system of units. If a setpoint is set to “above atmosphere” then the relay will always be activated (unless its polarity is reversed, see Section 5.3.3 Relay Polarity Setting on page 5-4), except during overflow conditions that occur, e.g. when an ion gauge is first powered up, or a Convectron gauge is disconnected. If it is desired that a process control be held in one state, the manual override switch should be used. If the setpoint is adjusted below 1 x 10-12 to 0 then it will always be deactivated (unless polarity is reversed). 5-2 Series 307 Vacuum Gauge Controller November, 2001 5 The Process Control Module To Display a Setpoint 1. Be sure the “CAL” switch of the electrometer is in its center position, or the calibration data in display line 1 will conflict with the display of setpoints 1 and 2. 2. Adjust the thumbwheel 94 to the number of the channel you wish to display. 3. Press either setpoint display/set button, 92 or 93 and release. The setpoint will appear for 2 seconds in the same display line as the associated transducer; Setpoints 1 and 2 appear in display 1. Setpoints 3 and 4 appear in display 2. Setpoints 5 and 6 appear in display 3. To Modify a Setpoint 1. Adjust the thumbwheel 94 to the number of the channel you wish to modify. 2. Press and hold the setpoint SET button for the direction you wish the setpoint to change, up, 92 , to raise the setpoint, down, 93 , to lower it. 3. The setpoint will scroll until the button is released. It will scroll slowly until a decade boundary is crossed and then will speed up to facilitate rapid changes across many decades. Release the button when you have entered the desired decade, and then re-depress it to scroll slowly within the decade to reach the exact setpoint needed. Figure 5-3 Process Control Module, Front Panel. After the setpoint button is released, the display will return to pressure data after two seconds. At this time the new setpoint will be deposited in non-volatile memory. 5.3.2 Points to Consider in Using the Process Control Module ■ If the ion gauges are both off, PC relays 1 and 2 will deactivate, regardless of polarity setting. ■ If neither the Convectron nor the Thermocouple Gauge Module are present, channels 3-6, if present, will always be deactivated. ■ No change in status of relays 1 and 2 will occur during degas. They will function as if the pressure was frozen at the instant degas was initiated. This is because large pressure variations may occur in an ion gauge tube under degas. ■ There is a programmed 10% hysteresis on each process control setpoint. For example, with a pressure setpoint of 6.3 Torr the relay will activate when the display reaches 6.2 Torr (for falling pressure) and will deactivate when the pressure rises to one significant digit above the setpoint plus 10%, i.e., 6.3 + 0.6 + 0.1 or 7 Torr. For setpoints where the second digit is 0.5 or greater the 10% value is rounded up. For example, if the setpoint is programmed to 6.6 Torr the relay will activate at 6.5 Torr (on falling pressure) and will deactivate when the pressure rises to 6.6 + 0.7 + 0.1 or 7.4 Torr. 5-3 Series 307 Vacuum Gauge Controller November, 2001 5 The Process Control Module ■ Since the process control and computer interface modules derive their pressure data directly from the display bus, they will be unable to update their pressure data while setpoints are being displayed. They will not mistakenly interpret setpoint data as pressure data, but will simply retain the last displayed pressure data until the SET key is released. ■ If the thumbwheel setting is changed while a setpoint is being displayed, this change will not take affect until the display has been released and the SET key depressed another time. 5.3.3 Relay Polarity Setting The relays can be set to activate with pressure either above or below the setpoint. A switch is provided for each channel. For activation below the setpoint, the switch should be in the OFF position. This is the factory setting. Refer to the numbers on the printed circuit board--not on the switch body itself--for the channel number. Note 96 is the switch for channel 6. Figure 5-4 Process Control Module, Top View. 5.3.4 Ion Gauge Assignment Process Control channels 1 and 2 are controlled by the ionization gauge. Process Control channel 1 (PC1) operates relay K1 and Process Control channel 2 (PC2) operates relay K2. Ion Gauge 1 (IG1), Ion Gauge 2 (IG2), or both can be assigned to operate either PC1 or PC2. Switches 100 and 99 are used to assign IG1 and IG2 to PC1 (K1). Switches 98 and 97 are used to assign IG1 and IG2 to PC2 (K2). The following tables define the process control operation for each combination of switch settings. Table 5-1 K1 (PC1) Relay. Switch IG1 100 Switch IG2 99 Function OFF OFF Relay K1 can turn on when IG1 is ON or when IG2 is ON. OFF ON Relay K1 can turn on when IG1 is ON and will turn off when IG2 is ON. ON OFF Relay K1 will turn off when IG1 is ON and can turn on when IG2 is ON. ON ON Relay K1 will always be off. 5-4 Series 307 Vacuum Gauge Controller November, 2001 5 The Process Control Module Table 5-2 Switch IG1 K2 (PC2) Relay. 98 Switch IG2 97 Function OFF OFF Relay K2 can turn on when IG1 is ON or when IG2 is ON. OFF ON Relay K2 can turn on when IG1 is ON and will turn off when IG2 is ON. ON OFF Relay K2 will turn off when IG1 is ON and can turn on when IG2 is ON. ON ON Relay K2 will always be off. The Figure 5-5 shows the status of the process control relay contacts for the ON and OFF conditions. NC Relay ON Pole NO NC Relay OFF Pole NO Figure 5-5 Process Control Relay Contacts Status. See Figure 5-1 on page 5-2 for Process Control connector relay contact/pin assignments. 91 — Manual Override These six three-position switches on the front of the process control module allow override of the programmed setpoints at any time. When moved to the right, the relay is activated. When moved to the left, the relay is deactivated. When left in the center position, the relay is controlled automatically. 5.4 Process Control Theory of Operation The process control module contains a dedicated microcontroller and a nonvolatile memory chip for storage of the setpoints. This chip has a rated life of 10,000 erase/write cycles for each setpoint, and will retain data for 10 years. Since data is read/written to this chip serially, it is necessary to store working copies of the setpoints in internal RAM memory. The microcontroller compares the setpoints with the pressure display data on the display bus and makes a decision as to whether or not to activate a channel's relay. The manual override switches, when thrown in one direction or the other, take precedence over the microcontroller's decision. 5-5 Series 307 Vacuum Gauge Controller November, 2001 5 The Process Control Module 5.5 Process Control Troubleshooting If LED 95 is lit or flashing, there is a probable circuit failure. The setpoints are read from non-volatile memory into RAM when the unit powers up. On power up, a checksum is computed and stored in RAM, and is updated whenever a setpoint is changed. It is then periodically re-computed from the existing setpoints and checked against the pre-existing value. If for any reason (such as a power fluctuation or electrical transient in the system) a setpoint becomes corrupted, this method will usually trap the error. If this occurs the fault relay will be activated, if the Remote Input/Output Module is installed, and will remain activated until power is cycled on the 307 control unit. If a setpoint is found to contain garbled data which cannot be interpreted as a valid setpoint, it will be set to 0, and the fault relay, if present, activated. 5.6 Process Control Specifications Number of channels 2, 6, or 1-4 user selectable. Pressure range 1.0 x 10-12 to 9.9 x 10+5. Setpoints are compared directly to display data and must be reprogrammed if the measurement units, Torr, mbar, or Pascal, are changed. Hysteresis 10% Setpoint adjustment Digital, 2 significant digits plus exponent. Output relays Contact rating Contact style 5A @ 120 Vac, 4A @ 240 Vac resistive or 5A @ 30 Vdc. SPDT. Polarity Switch selectable for activation with pressure above or below setpoint. Factory set for activation below. 5-6 Series 307 Vacuum Gauge Controller November, 2001 Chapter 6 6 The RS-232 Module 6.1 Introduction The RS-232 Interface Module for the 307 Vacuum Gauge Controller allows data output to, and ion gauge control by, a host computer. Output is either by a command-response mechanism or by a talk-only mode which is invoked via a switch on the RS-232 board. A variety of baud rates and byte framing options are available, as well as switches to force the handshake lines to an “always true” condition. 6.2 RS-232 Installation 307 RS-232 factory defaults are: 300 BAUD, 7 data bits, no parity, 2 stop bits; DCD, CTS, DSR forced “true”. The interface protocol is set using 8 switches. Reference 101 in Figure 6-1 on page 6-2 designates switch number 1. 6.2.1 Selecting the Byte Format 6.2.1.1 Baud Rate Dip switches 6-8 are used to control the baud rate. The settings are shown in Table 6-1: Table 6-1 Dip Switches for Controlling Baud Rate. S6 S7 S8 On On On 9600 On On Off 4800 On Off On 2400 On Off Off 1200 Off On On 600 Off On Off 300 Off Off On 150 Off Off Off 75 Baud Rate 6-1 Series 307 Vacuum Gauge Controller November, 2001 6 The RS-232 Module 6.2.1.2 Character Framing Switches 3-5 control number of characters, parity, and number of stop bits: Table 6-2 Dip Switches for Number of Characters, Parity and Number of Stop Bits. S3 S4 S5 On On On 8 None 2 On On Off 8 Even 1 On Off On 8 Odd 1 On Off Off 7 None 2 Off On On 7 Even 1 Off On Off 7 Odd 1 Off Off On 7 Even 2 Off Off Off 7 Odd 2 CHARACTER BITS PARITY STOP BITS 6.2.1.3 Talk-Only Mode Switch S1, 101 , if off at power-up, puts the interface in talk-only mode. The pressure data from all three displays will be output in a single message string, separated by commas, approximately every 5 seconds. If neither the Convectron nor Thermocouple Gauge Modules are present, only the ion gauge pressure will be output. 6.2.1.4 Handshake Line Control Switches Refer to Section 6.4 RS-232 Theory of Operation on page 6-6 for more detailed information on the handshaking mechanism. Switches 102 , 103 , and 104 , when in the “up” position, force the handshake lines data-carrier-detect (DCD), clear-to-send (CTS), and data-set-ready (DSR), respectively, to a logic true condition. As shipped from the factory, these lines are forced true. Figure 6-1 RS-232 Module, Top View. 6-2 Series 307 Vacuum Gauge Controller November, 2001 6 The RS-232 Module 6.2.1.5 Invert RTS Switch As shipped from the factory, the request-to-send (RTS) control line is set to operate as a modem line per the RS-232 standard. In some implementations it is necessary to invert this line and hook it directly to the clear-to-send (CTS) line of the host computer. Switch S2, if OFF when the 307 goes through its power-up sequence, tells the RS-232 interface to invert the polarity of the RTS line. See Section 6.4 RS-232 Theory of Operation on page 6-6, for more details. 6.3 Operation Consult the user's manual for the host computer to be sure the protocol used is in accord with that established via the switch configuration you have chosen for the 307 RS-232 module. Communication with the 307 VGC is via ASCII strings. A message to 307 consists of a command and a command modifier, followed by a terminator. The message may contain leading spaces, and the command and modifier may optionally be separated by spaces or commas. No spaces may appear within the command or the modifier, only between them. The terminator expected by 307 is an ASCII carriage-return line-feed, denoted here by CRLF. The carriage-return is optional, and messages terminated with only the line-feed will be accepted. Note that the CRLF terminator is in general appended automatically, by the host computer's interface software, to the message string supplied by the user. If extra characters are found in the message after it has been successfully interpreted but before the terminator, they will be ignored. All characters should be upper-case. All messages to 307 will receive a reply, consisting of an ASCII string terminated with CRLF. Numbers will be returned in the format X.XXE±XX. 6.3.1 Command Syntax DG Definition: Turn degas on or off Modifiers: ON or OFF Response: OK if command accepted, or INVALID if rejected. Example: From computer: DG ON CRLF From 307: OKCRLF NOTES 1. Command is INVALID if neither IG is on. 2. A response to the DG ON command of OK indicates only that a signal requesting degas has been sent to the electrometer. Degas may fail to activate, e.g., if the pressure is above 5 x 10-5 Torr, or if your 307 does not have degas capability. Use the DGS command (see below) to verify that degas has been successfully initiated. 6-3 Series 307 Vacuum Gauge Controller November, 2001 6 The RS-232 Module DGS Definition: Display degas status Modifiers: None Response: ASCII 1 if degas is on, 0 if degas is off Example: From computer: DGSCRLF (Note: Spaces may be omitted) From 307: 1CRLF (Indicating degas is on) DS Definition: Display pressure reading Modifiers: IG1 or IG2 or IG or CG1 or CG2 Response: ASCII string representing the pressure for the selected gauge Example: From computer: DS CG1 CRLF From 307: 1.20E-03CRLF NOTES 1. The DS CG1 and DS CG2 commands are used to display the pressures from the second 2 display lines, with either the Convectron, Thermocouple, or Capacitance Manometer Gauge Module installed. 2. If the requested ion gauge is turned off, or is in its first few seconds of operation, or data is requested from a Convectron, Thermocouple, or Capacitance Manometer Gauge when none is installed, the 307 will return 9.90E+09. 3. The DS IG command will return pressure from whichever gauge is on, and 9.90E+09 if neither is on. IG1 Definition: Turn IG1 on or off Modifiers: ON or OFF Response: OK if command accepted, INVALID if rejected Example: From computer: IG1 ON CRLF From 307: OKCRLF NOTES 1. The IG1 ON command will be rejected as INVALID if IG1 is already on, and IG1 OFF will be rejected if IG1 is already off. 2. A response to the IG1 ON command of OK indicates only that a signal requesting that IG1 be turned on has been sent to the electrometer. The tube may fail to come on, e.g., if the system pressure is too high or if the tube is disconnected. To verify that IG1 is on, use the DS IG1 command. If the tube is off (or in its first few seconds of operation after being turned on) a pressure of 9.90E+9 will be returned. 6-4 Series 307 Vacuum Gauge Controller November, 2001 6 The RS-232 Module IG2 Identical to IG1, but applies to IG2. PCS Definition: Display process control channel status Modifiers: 1 or 2 or 3 or 4 or 5 or 6 or B or none. Response: Depends on modifier: Modifier = single digit (1 through 6); response = single ASCII digit, 0 if the corresponding relay is inactive, 1 if active. Modifier = B; response = a byte of data with bits 0 through 5 set/clear according to whether the corresponding relay is active/inactive. Bit 6 will always be set to guarantee that the returned byte will not appear as a terminator byte. Modifier absent; response will be a string of 6 ASCII 0's and 1's separated by commas giving the status of all six channels. Examples: Assume that channels 1 - 3 are active, and 4 - 6 are inactive. From computer: PCS 1 CRLF From 307: 1CRLF From computer: PCS B CRLF From 307: GCRLF NOTE: Note that ASCII “G” corresponds to the bit pattern 01000111 and represents the status of the PC channels. From computer: PCS CRLF From 307: 1,1,1,0,0,0CRLF 6.3.2 Error Messages If an error is found in the incoming message, the following messages will be returned in place of the normal response: OVERRUN ERROR Returned if the incoming message overflows 307's buffer. This may indicate a flaw in the host software. PARITY ERROR Returned if the parity of a byte in the incoming message does not match that programmed by the switches. SYNTAX ERROR Returned if the message fails to parse as a valid 307 command. Could also result from failure to assert DCD during transmission to 307. 6-5 Series 307 Vacuum Gauge Controller November, 2001 6 The RS-232 Module 6.4 RS-232 Theory of Operation 6.4.1 Handshaking The 307 RS-232 interface implements the signals given in Table 6-3. Table 6-3 RS-232 Control Lines. Signal Pin # Direction Protective Ground 1 - Transmitted Data 2 To Computer Received Data 3 To 307 Request to Send (RTS) 4 To Computer Clear to Send (CTS) 5 To 307 Data Set Ready (DSR) 6 To 307 Signal Ground (common return) 7 - Data Carrier Detect (DCD) 8 To 307 Data Terminal Ready (DTR) 20 To Computer The DTR line is set true by 307 on power up to indicate it is on line. When 307 receives a start bit on the received data line it will input and buffer a character. The DCD line must be true at the time each character is received or that character will be ignored. 307 will continue to receive and buffer characters until the terminator (LF) is received. Upon receiving the terminator, 307 will assert the RTS line as a holdoff, to prevent the host computer from attempting to transmit further data until the message just received has been parsed and a reply has been output. During output of the reply, the incoming handshake lines CTS, and DSR are tested prior to beginning transmission of each character. 307 will wait until both are true before beginning transmission of a character, and will not test them again until ready to begin transmitting the next. After transmitting the terminator, 307 will negate RTS and wait for the next incoming message. To summarize: CTS, DSR Set by the computer to indicate that 307 may output the next byte in its message. As shipped from the factory these lines are forced “TRUE” by the switch settings of the 307 RS-232 printed circuit board, thus 307 will automatically assume the host is ready to receive. See Figure 6-1 on page 6-2 for the location of these switches. 6-6 Series 307 Vacuum Gauge Controller November, 2001 6 The RS-232 Module DCD Tested by 307 when a character is received. The character will be ignored unless DCD is “TRUE”. As shipped from the factory this line is forced “TRUE” by the switch settings. DTR Always asserted by 307. A “power on” indication. RTS Negated by 307 on power-up. Asserted by 307 upon receipt of a message terminator. Negated after transmitting the terminator of 307's response to that message. Reversing the Polarity of RTS If switch 2, 105 , is open on power-up, 307 will apply the opposite polarity to RTS from that described above. When used in this mode RTS may be connected to the CTS input of the host computer. This violates the RS-232 standard, but is a commonly used implementation. Figure 6-2 RS-232 Module, Top View. 6.5 RS-232 Troubleshooting Because the RS-232 “standard” is found in a bewildering array of configurations, the first thing to do if trouble arises is check the following configuration options: 1. Check switch settings. Be sure baud rate, character format and framing, and interface protocol are matched to your host computer or terminal's requirements. Note that there may be several mismatched parameters. Check to see if your computer requires the reversed-polarity RTS convention. 2. Check interface wiring. The pin designations for the RS-232 connector are shown in Figure 6-2. Note that the “received” and “transmitted” data lines are defined as seen by the 307. Many companies supply “null modems” or switch boxes for the purpose of reconfiguring the control lines for particular applications. 3. Check command format. Be sure the strings you output to the 307 are in accord with the syntax defined in Section 6.3 Operation on page 6-3. 6-7 Series 307 Vacuum Gauge Controller November, 2001 6 The RS-232 Module Table 6-4 RS-232 Troubleshooting Guide. Symptom Possible Cause Microcontroller reset LED 106 lit or flashing. Microcontroller failure. No response or garbled output. Baud rate incorrect. Character length incorrect or stop bit(s) incorrect. OVERRUN ERROR message. Stop bit(s) incorrect, host software failure. PARITY ERROR message. Parity incorrect. SYNTAX ERROR message. Message to 307 not in accord with specified syntax. Could also result from failure to assert DCD handshake line. 6.6 RS-232 Specifications Format EIA standard RS-232-C, half duplex, asynchronous. Data Rates 75,150,300,600,1200,2400,4800,9600 baud. Character length 7 or 8 bit ASCII, switch selectable. Parity Odd, even, or none, switch selectable. Stop bits 1 or 2. 8 character bits plus parity allows only 1 stop bit. Handshake Outputs: DTR, RTS. RTS polarity selectable. Inputs: DSR, CTS, DCD. May be forced to logic “TRUE” with switches. Logic levels Inputs: Logic 1 2.0 Vdc min., 15 Vdc max. Logic 0 -15 Vdc min., 0.75 Vdc max. Input Current: 4.0 mA max @ Vin = +15 Vdc -4.0 mA max @ Vin = -15 Vdc. 6-8 Series 307 Vacuum Gauge Controller November, 2001 Chapter 7 7 The IEEE-488 Module 7.1 Introduction The IEEE-488 Module for the 307 Vacuum Gauge Controller allows data output to, and ion gauge control by, a host computer. Output is either by a command-response mechanism or by a talk-only mode which is invoked via a switch on the IEEE-488 board. For those who wish to configure the 488 bus to operate via SRQ interrupts, a switch is provided which will cause the 307 to generate an SRQ and wait for a serial poll before outputting each message. 7.2 IEEE-488 Installation 7.2.1 Selecting the Interface Bus Address Refer to Figure 7-1, switch No. 1 is shown by 107 . Each instrument on the IEEE-488 bus has an address from 0 to 30. The address is set at the factory to 8. The user must ensure that every device on his bus has a unique address. To select an address, switches 1 through 5 are adjusted according to binary weights: Switch Number: 5 4 3 2 1 Value: 16 8 4 2 1 Examples: Setting On Off On On Off = Address 9 On On Off Off Off = Address 7 Off Off Off On On = Address 28 Figure 7-1 IEEE-488 Module, Top View. 7.2.2 Talk-only Mode Switch 8, 109 , if set to off on power-up, puts the interface in talk-only mode. The pressure data from all three displays will be output in a single message string, separated by commas, approximately every 5 seconds. If neither the Convectron nor Thermocouple Gauge Modules are present, only the ion gauge pressure will be output. The factory default is talk-only disabled. 7.2.3 SRQ Mode Switch 7, 108 , if set to off on power-up, tells the interface to generate an SRQ interrupt and expect a serial poll before every message output. Currently, the factory default is SRQ mode disabled (switch 7 “ON”), but early 307's were shipped with SRQ enabled. The serial poll response byte will contain a 1 in bit 6 (the second-highest bit). Bit 5 will be set if an error has occurred. In this case the pending message will be an error message. 7-1 Series 307 Vacuum Gauge Controller November, 2001 7 The IEEE-488 Module 7.3 IEEE-488 Operation Communication with 307 is via ASCII strings. A message to 307 consists of a command and a command modifier, followed by a terminator. The message may contain leading spaces, and the command and modifier may optionally be separated by spaces or commas. No spaces may appear within the command or the modifier, only between them. The terminator accepted by 307 is an ASCII carriage-return line-feed, denoted here by CRLF. The carriage-return is optional, and messages terminated with only the line-feed will be accepted. Note that the CRLF terminator is in general appended automatically, by the host computer's interface software, to the message string supplied by the user. A terminator is not required, if the last character of the message to the 307 VGC is accompanied by the EOI bus signal. If extra characters are found in the message after it has been successfully interpreted but before the terminator, they will be ignored. All characters should be upper-case. All messages to 307 will receive a reply, consisting of an ASCII string terminated with CRLF, the LF being accompanied by EOI. Numbers will be returned in the format X.XXE+/-XX. 7.3.1 Command Syntax DG Definition: Turn degas on or off Modifiers: ON or OFF Response: OK if command accepted, or INVALID if rejected. Example: From computer: DG ON CRLF From 307: OKCRLF NOTES 1. Command is INVALID if neither IG is on. 2. A response to the DG ON command of OK indicates only that a signal requesting degas has been sent to the electrometer. Degas may fail to activate, e.g., if the pressure is above 5 x 10-5 Torr, or if your 307 does not have degas capability. Use the DGS command (see below) to verify that degas has been successfully initiated. DGS Definition: Display degas status Modifiers: None Response: ASCII 1 if degas is on, 0 if degas is off Example: From computer: DGSCRLF (Note: Spaces may be omitted) From 307: 1CRLF (Indicating degas is on) DS Definition: Display pressure reading. Modifiers: IG1 or IG2 or IG or CG1 or CG2. Response: ASCII string representing the pressure for the selected gauge. 7-2 Series 307 Vacuum Gauge Controller November, 2001 7 The IEEE-488 Module Example: From computer: DS CG1 CRLF From 307: 1.20E-03CRLF NOTES 1. The DS CG1 and DS CG2 commands are used to display the pressures from the second 2 display lines, with either the Convectron, Thermocouple, or Capacitance Manometer Gauge Module installed. 2. If the requested ion gauge is turned off, or is in it's first few seconds of operation, or data is requested from a Convectron, Thermocouple, or Capacitance Manometer Gauge when none is installed, the 307 will return 9.90E+09. 3. The DS IG command will return pressure from whichever gauge is on, and 9.90E+09 if neither is on. IG1 Definition: Turn IG1 on or off Modifiers: ON or OFF Response: OK if command accepted, INVALID if rejected Example: From computer: IG1 ONCRLF From 307: OKCRLF NOTES 1. The IG1 ON command will be rejected as INVALID if IG1 is already on, and IG1 OFF will be rejected if IG1 is already off. 2. A response to the IG1 ON command of OK indicates only that a signal requesting that IG1 be turned on has been sent to the electrometer. The tube may fail to come on, e.g., if the system pressure is too high or if the tube is disconnected. To verify that IG1 is on, use the DS IG1 command. If the tube is off (or in its first few seconds of operation after being turned on) a pressure of 9.90E+9 will be returned. IG2 Identical to IG1, but applies to IG2. PCS Definition: Display process control channel status. Modifiers: 1 or 2 or 3 or 4 or 5 or 6 or B or none. Response: Depends on modifier: Modifier = single digit (1 through 6); response = single ASCII digit, 0 if the corresponding relay is inactive, 1 if active. Modifier = B; response = a byte of data with bits 0 through 5 set/clear according to whether the corresponding relay is active/inactive. Bit 6 will always be set to guarantee that the returned byte will not appear as a terminator byte. Modifier absent; response will be a string of 6 ASCII 0's and 1's separated by commas giving the status of all six channels. 7-3 Series 307 Vacuum Gauge Controller November, 2001 7 The IEEE-488 Module Examples: Assume that channels 1 - 3 are active, and 4 - 6 are inactive: From computer: PCS 1 CRLF From 307: 1CRLF From computer: PCS B CRLF From 307: GCRLF (Note that ASCII “G” corresponds to the bit pattern 01000111 and represents the status of the PC channels in bits 0 through 5). From computer: PCS CRLF From 307: 1,1,1,0,0,0CRLF 7.3.2 Error Messages If an error is found in the incoming message, the following messages will be returned in place of the normal response, and if the SRQ mode is used, bit 5 in the serial poll response byte will be set. OVERRUN ERROR Returned if the incoming message overflows 307's buffer. SYNTAX ERROR Returned if the message fails to parse as a valid 307 command. 7.4 IEEE-488 Troubleshooting If your interface fails to function, first verify the following: 1. Switch settings. Be sure the controller knows the address of the 307 as set by the dip switches. Be sure the system controller does not reserve certain addresses for system devices, e.g., a printer. Be sure the 307 is not in the talk-only mode unless desired for data logging. Be sure, if the SRQ mode is set, that your controller performs a serial poll in response to the SRQ from the 307 VGC. 2. Check interface wiring. Be sure the cable is good; try swapping in a known good cable (IEEE-488 cables are available from Helix Technology). Check for too many devices on the bus or too great a total bus length (> 20 meters). Too many devices could cause problems due to capacitive loading. 3. Check command syntax. Be sure you are following the syntax specified in Section 7.3 IEEE-488 Operation on page 7-2. Figure 7-2 IEEE-488 Module, Top View. 7-4 Series 307 Vacuum Gauge Controller November, 2001 7 The IEEE-488 Module Table 7-1 IEEE-488 Troubleshooting Guide. Symptom Possible Cause Microcontroller reset LED 110 lit. Microcontroller failure. OVERRUN ERROR message. Host software failure. SYNTAX ERROR message. Message to 307 not in accord with specified syntax. 7.5 IEEE-488 Specifications Capability codes SH1, AH1, T5, L4, SR1, RL0, PP0, DC0, E1, OT0, C0 7-5 Series 307 Vacuum Gauge Controller November, 2001 NOTES 7-6 Series 307 Vacuum Gauge Controller November, 2001 Chapter 8 8 The Convectron/Capacitance Manometer Module 8.1 Introduction The capacitance manometer module allows pressure measurement from 1.0 x 10-4 Torr to 1000 Torr, depending on transducer pressure range. Up to 250 mA of power supply current is available for temperature-compensated transducers. See Section 8.7 Specifications on page 8-6 for a partial list of compatible transducers. The module also operates one Convectron gauge. Please see Chapter 3 The Convectron Gauge Module, in this manual for information on the use of the Convectron gauge. When a six channel process control module is installed, the capacitance manometer can be used to control the two channels associated with display line "B", channels 5 and 6. The associated "A" Convectron gauge controls channels 3 and 4. Analog output is provided for both gauges; the output is linear with pressure for the manometer, and logarithmic for the Convectron. 8.2 Installation 8.2.1 Units of Measure NOTE: In order for the module to work, the model numbers on the 307 controller and power supply need to be 01 or higher. If they are not, contact the Customer Service Department at Helix Technology for further assistance. Your instrument will have been shipped from the factory pre-set to display the unit of measure; torr, millibar, or pascal, that you requested. If you wish to change units, proceed as follows: 1. Shut off power to the control unit. 2. Remove the top cover. Locate the capacitance manometer pc board. 3. Locate 111 , the millibar, and 112 the pascal, units switches. 4. Leave both switch open for torr units. Close the appropriate switch for millibar or pascal units. Figure 8-1 Convectron/Capacitance Manometer, Top View. 8-1 Series 307 Vacuum Gauge Controller November, 2001 8 The Convectron/Capacitance Manometer Module 5. Modify the units of measure of the electrometer module to be consistent with the capacitance manometer module. 6. Slip the label card out of the top of the front panel and apply the appropriate pressure units label. 113 — Display Update Rate Switch When "on" this switch enables filtering which will stabilize a "jumpy" display. The display wills be updated approximately every 3 seconds. 114 — Not used. 115 —Convectron Gauge Controls See Chapter 2 The Ion Gauge Electrometer Module for information on use of Convectron controls. Figure 8-2 Capacitance Manometer Module, Front Panel. 116 — Capacitance Manometer Vacuum Calibration See Section 8.4 Calibration on page 8-4. 117 — Capacitance Manometer Range Switch Your capacitance manometer transducer has a maximum pressure indication of 1, 10, 100, or 1000 Torr. Set this switch accordingly. 8.2.2 Capacitance Manometer Cable Installation The cable supplied by Helix Technology for this module connects to both a Convectron gauge and a capacitance manometer. Since electrical connectors to capacitance manometers are not standardized, Helix Technology provides cables terminated with tinned wire leads. Figure 8-3 on page 8-3 shows the color-coded functions of the wires. Please consult the manual for your capacitance manometer transducer for information on electrical connection, and installation of the transducer in your vacuum system. The 307 VGC will display pressures from capacitance manometer transducers with 0 to 10 Vdc outputs and provide power to transducers requiring ± 15 Vdc inputs. The 307 VGC may also be used as a readout device for capacitance manometers which require 115 Vdc power input, such as the MKS 220B. To wire the 307 to such a transducer, connect the white (+ signal), and brown (signal ground) wires to the manometer as directed in the transducer instruction manual. Insulate the remaining red (+15 V), black (power ground) and blue (-15 V) wires at the manometer end of the 307 cable. Connect the transducer to a 115 Vac power source as directed in your capacitance manometer instruction manual. 8-2 Series 307 Vacuum Gauge Controller November, 2001 8 The Convectron/Capacitance Manometer Module Figure 8-3 Capacitance Manometer Module, Cable. 8.3 Operation 8.3.1 Reading Pressure The capacitance manometer pressure is read in the third display line of the 307 controller. The accompanying Convectron gauge is read in the second display line. If the cable is disconnected, the manometer will read 0 pressure. 8.3.2 Analog Output On the rear panel are provided analog outputs for both the Convectron gauge, 118 and capacitance manometer, 119 . Standard 1/8 inch miniature phono jack connectors are provided for the analog output. The analog output for the capacitance manometer is a dc voltage proportional to the pressure with a range of 0 to 10 volts, proportional to the transducer output. See the documentation for your transducer for a description of this output. Internal adjustments are provided for zero offset and full-scale (gain) control. See Section 8.4 Calibration on page 8-4 for adjustment. Figure 8-4 Capacitance Manometer Module, Rear Panel. 8-3 Series 307 Vacuum Gauge Controller November, 2001 8 The Convectron/Capacitance Manometer Module 8.4 Calibration 8.4.1 Initial Transducer Calibration When first installed, your transducer zero-adjust should be set using a voltmeter to read zero when at a system pressure below the minimum pressure range of the transducer. Please refer to the documentation accompanying your capacitance manometer transducer for instructions on this procedure. You should also at this time adjust the VAC on the 307 controller 116 , with the gauge not attached to the controller, per the instructions below. After this initial setup has been performed, the routine fine-tuning of the transducer zero may be performed with the module front panel zero adjust potentiometer. The zero can be adjusted to 0 ± 200 mV. To Set The Controller Zero (Initial Controller Setup): 1. Disconnect the capacitance manometer cable either at the gauge head or at the controller. 2. Adjust the vacuum potentiometer 116 until the third display line shows a single "0". If the adjustment is turned too far, a minus sign will appear in the display. This proper calibration is achieved when only the "0" appears. To Zero The 307 VGC with the Transducer: 1. Be sure the transducer was zeroed properly on initial installation, see your transducer documentation. Connect the cable from the 307 VGC to the capacitance manometer transducer per Figure 8-3 on page 8-3. 2. Evacuate your system to below the minimum rated pressure of your transducer. 3. Adjust the vacuum potentiometer 116 until the third display line shows a single "0". If the adjustment is turned too far, a minus sign will appear in the display. This proper calibration is achieved when only the "0" appears. 128 , 130 — Convectron Controls See Section 4.4 on page 4-4 of this manual. 129 — Capacitance Manometer Analog Output Offset Adjust This potentiometer is used to set analog output 2 at zero pressure. This value is affected by the vacuum adjust potentiometer 116 . The output can be adjusted to between -0.02 and +0.02 volts at zero pressure. Figure 8-5 Capacitance Manometer Module, Top View. 131 — Capacitance Manometer Analog Output Full-Scale Adjust This is a span or gain control, with a range of 0.93 to 1.3. Factory setting is for a gain of 1.0, thus 10 volts in from the transducer (maximum readable pressure) = 10 volts out from 307 at the factory setting. 8-4 Series 307 Vacuum Gauge Controller November, 2001 8 The Convectron/Capacitance Manometer Module 132 — Capacitance Manometer Full-Scale Adjust This potentiometer controls the full-scale readout of the 307 capacitance manometer display. The control is adjusted at the factory for a full-scale display with an input of 10.0 volts. After zeroing the controller as described above, the 307 may be calibrated to the transducer by adjusting the full-scale adjust pot so the 307 display corresponds to the pressure of the manometer at or near the maximum pressure. This reference pressure may be determined by a certified standard gauge, a dead weight calibration system, or a standard voltage reference. The full-scale adjust pot and the CM analog out full-scale pot do not interact and may be adjusted independently. 8.5 Theory of Operation Within the capacitance manometer, a diaphragm is distorted by the pressure of the gas in the system under measurement. This diaphragm forms part of a capacitor, and its deflection causes changes in capacitance. Thus, the electrically measured capacitance is a measure of pressure. The device is very sensitive to the elastic properties of the metal of the diaphragm. For this reason, large pressure excursions, such as occur when the system is raised to atmospheric pressure, can cause offsets to the pressure reading. The diaphragm is also extremely sensitive to temperature effects, and although it may be held in a temperature controlled chamber, this temperature control is never perfect, resulting in further perturbations to the devices theoretical accuracy. Note that these perturbations are inherent in the capacitance manometer design and are not a property of the electronic module used to operate the transducer. Capacitance manometers are capable of exceptional accuracy, and read pressure independent of gas type, but are also subject to zero-point drift, and must be calibrated at vacuum frequently if high accuracy is to be obtained. Refer to the manual for your transducer for instructions. 8.6 Capacitance Manometer Troubleshooting Refer to Figure 8-4 on page 8-3 to locate LEDs on the capacitance manometer printed circuit board. Table 8-1 RS-232 Troubleshooting Guide. Symptom Possible Cause Unstable reading Mechanical vibration of capacitance manometer, faulty system ground or cable ground. Display always reads 0. Capacitance manometer cable unplugged, no ±15 V power, faulty cable. Indicator LED 120 on. 15 V over-current. Defective cable, transducer, or circuit board. Indicator LED 121 on. Convectron gauge unplugged. Indicator LED 122 on. A/D failure. Defective A/D converter circuit. Indicator LED 123 on. +15 V overcurrent. Defective cable, transducer, or circuit board. Indicator LED 124 . Not used. Indicator LED 125 on. Defective PC board, Convectron bridge circuit. Indicator LED 126 on. Convectron over-current. Defective gauge or cable. Indicator LED 127 on. Microprocessor failure. 8-5 Series 307 Vacuum Gauge Controller November, 2001 8 The Convectron/Capacitance Manometer Module 8.7 Specifications See Chapter 3 The Convectron Gauge Module for additional specifications. Gauge Type Any capacitance manometer transducer that requires ±15 Vdc power at ≤ 250 mA and outputs 0-10 Vdc proportional to pressure. For example: MKS Series 200 heads: 220B, 221A, 222 A/B (422B), 224, 227A/127A. Vacuum General: CML, CM, CMT, CMH, CMHS. Leybold-Inficon: CM100, CM140, CM150. Accuracy 0.01% of full-scale (as limited by display resolution). Display Resolution Highest 3 decades - 2 digits, lowest decade - 1 digit, scientific notation. Pressure Range 1, 10, 100, 1000 Torr max heads, 4 decades of pressure. Display Update Time Unfiltered: 0.5 sec. typical. Switch selectable filtering: 3 sec. (average of 6 readings). Output to Head ±15 V ±2% at 250 mA. Input from Head 0-10 Vdc into 100 Kohm. Analog Output 5 mA max. Analog Output Speed Limited by transducer speed. Cable Connection Cable termination is bare tinned wire, user terminates to transducer. 8-6 Series 307 Vacuum Gauge Controller November, 2001 Chapter 9 9 Linear Analog Output Module 9.1 Introduction The Linear Analog Output Module provides three, zero to +10 Vdc, linearized voltages that correspond to the displayed pressure readings of the 307 VGC. The source for these outputs is the digital data on the controller's internal bus to the Display Module. The analog output resolution is therefore dependent upon this data. The module is intended to be used in a 307 VGC configured with an ion gauge (top display) and two thermocouples (middle and bottom display). The pressure range for the IG linear output is selected by a front panel switch. Four separate ranges are available. 9.2 Installation The Module is installed in the controller in the slot normally assigned to the computer interface module. 9.2.1 Electrometer (IG) Range Selection The purpose of the electrometer linear analog output is to linearize a 3-decade segment of the 0-10 Vdc logarithmic output. The segment selected is determined by the position of the IG range switch on the front panel of the module. One of four ranges may be selected. The range selected will allow linear analog output for pressures from 1 x 10-n to 1 x 10-m. Set the IG range switch, shown in Figure 9-1, to the desired pressure range. Figure 9-1 Linear Analog Output Module, Front Panel. Figure 9-2 Linear Analog Output Module, Top View. 9-1 Series 307 Vacuum Gauge Controller November, 2001 9 Linear Analog Output Module 9.2.2 Cable Connections The output is via a “D” type 9-pin connector for which the mating parts have been supplied. The pin assignment for the output connector is defined in Table 9-1: 9.2.3 Pin Assignment Table 9-1 Pin Assignments. Pin(s) Function 1, 2, 4, 6 & 8 Ground (both signal and chassis) 3 IG log analog output 5 TC “A” output 7 IG linear output 9 TC “B” output NOTE: Pin 3 is the logarithmic analog output from the electrometer module. This voltage is proportional to the pressure determined by the IG. Refer to Section 2.3 Operation on page 2-2 for further details. 9.3 Operation The Linear Analog Output Module is in operation anytime power is “on”. There are no accessible controls or adjustments. NOTE: During periods where the front panel display is not showing pressure, the analog outputs will lock up at the last valid pressure reading. This includes the period when a process control setpoint is displayed and when emission current or sensitivity is being displayed for the IG channel. 9-2 Series 307 Vacuum Gauge Controller November, 2001 9 Linear Analog Output Module 9.4 Calibration Internal zero and full scale adjustment potentiometers are available for the three analog output channels. Adjustment should be rarely, if ever, required. Table 9-2 Figure 9-2 Reference Adjustment Potentiometers. Potentiometer Designator Function 138 R11 IG zero adjust 137 R12 IG full scale adjust 136 R21 TC “A” zero adjust 135 R22 TC “A” full scale adjust 134 R30 TC “B” zero adjust 133 R31 TC “B” full scale adjust 9.4.1 IG Zero Adjust To adjust the IG linear output, set the displayed pressure to read that which is equal to 0.1Vdc for the range selected. For example, on the 10-6 to 10-3 range set the display for a reading of 1.0 x 10-5 Torr. Adjust 138 for an output of exactly 0.100 Vdc. 9.4.2 IG Full Scale Adjust Set the display to read the maximum pressure for the range selected. For example, set the display to read 1.0 x 10-3 Torr for the 10-6 to 10-3 range. Adjust 137 for an output of exactly 10.0 Vdc. NOTE: It is not necessary to perform the above adjustments each time a new range is selected. Performing the calibration on any range will calibrate the IG linear analog output for all ranges. 9.4.3 TC Zero Adjust Set the thermocouple display to read “0” (zero). Adjust T. C. Zero. ( 136 for channel A or 134 for channel B) for exactly 0.00 Vdc on the appropriate TC output. 9.4.4 TC Full Scale Adjust Set the thermocouple display to read 1.0 torr. Adjust T.C. Full Scale ( 135 for channel A or 133 for channel B) for exactly 10.0 Vdc on the appropriate TC output. 9.5 Theory of Operation The Linear Analog Output Module circuit consists of an 83C751 embedded microcontroller and associated circuitry. The microcontroller picks off display data to the display module during the appropriate bus timing cycles and performs a digital-to-analog conversion by using the external associated circuitry. 9-3 Series 307 Vacuum Gauge Controller November, 2001 9 Linear Analog Output Module 9.6 Troubleshooting Refer to Figure 9-2 on page 9-1. Table 9-3 Troubleshooting Linear Analog Output Module. Symptom Possible Cause Microcontroller reset LED 139 lit or flashing. Microcontroller failure. There are no other user troubleshooting procedures associated with the Linear Analog Output Module. If you are having difficulty with this module, contact Helix Technology Customer Service. 9.7 Specifications Analog output loading: ± 2mA max. 9.7.1 Thermocouple Output Table 9-4 Thermocouple Output. Pressure Decade Range (torr) Output Voltage Smallest Increment Comment < 10-3 Torr 0 Vdc - Zero Vdc output below 1 mT 10-3 Torr 10 - 99 mV 1 mV 1 mV = .1 mTorr 10-2 Torr .1 V - .99 V 10 mV 10 mV = 1 mTorr 10-1 Torr 1.0 V - 9.9 V 100 mV 100 mV = 10 mTorr ≥ 1 Torr 10.0 V - 9-4 Series 307 Vacuum Gauge Controller November, 2001 9 Linear Analog Output Module 9.7.2 Electrometer (IG) Output Table 9-5 Electrometer (IG) Output. Pressure Decade Range (torr) Output Voltage Smallest Increment < 10-3 10-3 10-2 10-1 ≥ 100 < 10.0 mV 10.0 mV - 99 mV 0.1 V - 0.99 V 1.0 V - 9.9 V 10.0 V — 1.0 mV 10.0 mV 0.1 V — < 10-6 10-6 10-5 10-4 ≥ 10-3 < 10.0 mV 10.0 mV - 99 mV 0.1 V - 0.99 V 1.0 V - 9.9 V 10.0 V — 1.0 mV 10.0 mV 0.1 V — < 10-7 10-7 10-6 10-5 ≥ 10-4 < 10.0 mV 10.0 mV - 99 mV 0.1 V - 0.99 V 1.0 V - 9.9 V 10.0 V — 1.0 mV 10.0 mV 0.1 V — < 10-8 10-8 10-7 10-6 ≥ 10-5 < 10.0 mV 10.0 mV - 99 mV 0.1 V - 0.99 V 1.0 V - 9.9 V 10.0 V — 1.0 mV 10.0 mV 0.1 V — 9-5 Series 307 Vacuum Gauge Controller November, 2001 9 Linear Analog Output Module Service Form Please photocopy this form, fill it out, and return it with your equipment: RA No. Model No. Contact Helix Technology Customer Service at 1-303-652-4400, or 1-800-776-6543 in the USA; FAX: 1-303-652-2844, or email: salesco@helixtechnology.com Serial No. Date Name Phone No. Company Address City State Zip Please help Helix Technology continue to provide the best possible service by furnishing information that will help us determine the cause of the problem, as well as protect our analysis and calibration equipment from contamination. Problem description: Application description: Has this product been used with high vapor pressure or hazardous materials? ❏ Yes ❏ No If Yes, please list the types of gas, chemicals (common names, specific chemical,) biological materials, or other potentially contaminating or harmful materials exposed to the product during its use. NOTE: PRODUCTS EXPOSED TO RADIOACTIVE MATERIAL CANNOT BE ACCEPTED BY HELIX TECHNOLOGY UNDER ANY CIRCUMSTANCES. Signature: Printed Name Phone No. _______________________ 9-6 Series 307 Vacuum Gauge Controller November, 2001 Appendix A Figure A-1 Standard Ion Gauge Cable. (See also Figure 1-6 on page 1-8.) PIN COVER IS USED TO COVER UNUSED PIN ON NUDE GAUGE. Figure A-2 Nude Ion Gauge Cable. A-1 Series 307 Vacuum Gauge Controller November, 2001 Appendix A Figure A-3 Cable for Varian 564 Ion Gauge. Figure A-4 Ion Gauge Cable Cross Section. A-2 Series 307 Vacuum Gauge Controller November, 2001 Appendix A Figure A-5 Convectron Cable. Figure A-6 Thermocouple Gauge Cable. A-3 Series 307 Vacuum Gauge Controller November, 2001 Appendix A Figure A-7 Capacitance Manometer Module Cable. A-4 Series 307 Vacuum Gauge Controller November, 2001 Appendix A Figure A-8 Overlay Top Cover. A-5 Series 307 Vacuum Gauge Controller November, 2001 NOTES A-6 Series 307 Vacuum Gauge Controller November, 2001 Index A analog output 4-2 Convectron gauge module 3-15 Convectron/Capacitance manometer module 8-3 Convectron/Capacitance manometer module fullscale adjust 8-4 ion gauge electrometer module 2-4 Thermocouple gauge module 4-2 B bargraph display module 1-2, 1-6 baud rate RS-232 interface module 6-1 bus structure 1-16 byte format, RS-232 interface module 6-1 C cable collector cable routing, illustration 1-9 connections 1-9 connections, illustration 1-9 Convectron/Capacitance manometer module installation 8-2 ion gauge cross section, illustration A-2 Linear analog output module connection 9-2 nude ion gauge, illustration A-1 standard ion gauge, illustration 1-8, A-1 Varian 564 ion gauge, illustration A-2 calibration Convectron gauge module 3-16 Convectron/Capacitance manometer module 8-2, 8-4 general 1-16 ion gauge electrometer module 2-6 Linear analog output module 9-3 Thermocouple gauge module 4-4 capacitance manometer module 1-2 cable, illustration A-4 catalog numbers 1 certification, product viii character framing RS-232 interface module 6-2 cleaning Convectron gauge module gauge tube 3-17 command syntax IEEE-488 module 7-2 RS-232 interface module 6-3 computer interface 1-21 example 1-21, 1-22 configuration bargraph display module 1-2 capacitance manometer module 1-2 Convectron gauge module 1-1 IEEE-488 computer interface module 1-2 ion gauge (IG) electrometer module 1-1 process control module 1-2 remote input/output module 1-1 RS-232 computer interface module 1-2 Thermocouple gauge (TC) module 1-2 connections, cable 1-9 control board, illustration 1-19 control unit front panel, illustration rear panel illustration 3-15 safety instructions 3-1 specifications 3-20 theory of operation 3-18 top view illustration 3-3, 3-19 transducer test procedure 3-19 troubleshooting 3-19, 3-20 tube installation 3-4 using below 10-3 Torr 3-6 using with gases other than N2 and air 3-7 Convectron gauge module front panel 3-16 Convectron/Capacitance manometer module analog output 8-3 analog output full-scale adjust 8-4 cable illustration 8-3 cable installation 8-2 calibration 8-4 description 8-1 display update rate switch 8-2 front panel illustration 8-2 full-scale adjust 8-5 installation 8-1 operation 8-3, 8-5 range switch 8-2 reading pressure 8-3 rear panel illustration 8-3 specifications 8-6 top view illustration 8-1, 8-4 troubleshooting 8-5 units of measure 8-1 vacuum calibration 8-2 1-13 Convectron cable, illustration A-3 Convectron gauge module 1-1 1/8 NPT mount 3-6 analog output 3-15 calibration 3-16 cleaning gauge tube 3-17 description 3-2 display update rate switch 3-3 filament auto turn-on 3-16 front panel, illustration 3-16 gauge tube orientation 3-5 illustration, indicated vs. true pressure curve 3-9–3-14 indicated vs. true pressure curves 3-7 installation 3-3 installation, precautions 3-4 maintenance 3-16 mounting illustration 3-5 NW16KF flange mount 3-6 operation 3-6 pressure analog output 3-15 reading pressure 3-6 D damage requiring service safety v degas ion gauge electrometer module power adjustment 2-4 on/off 1-14 dip switches RS-232 interface module 6-1 display bargraph, installation 1-6 printed circuit board, illustration 1-5 Process control module 5-2 single digit, installation 1-5 Index-1 Series 307 Vacuum Gauge Controller November, 2001 Index display update rate switch Convectron gauge module 3-3 Convectron/Capacitance manometer module 8-2 ion gauge electrometer module 2-2 Thermocouple gauge module 4-1 G gauge tube orientation Convectron gauge module 3-5 grid bias potential adjustment 1-16 voltage adjustment, illustration 1-16 ground test vii, 1-10 E electrometer output Linear analog output module IG 9-5 emission adjustment ion gauge electrometer module 2-3 emission range ion gauge electrometer module 2-3 error messages IEEE-488 module 7-4 RS-232 interface module 6-5 examples Convectron gauge module, indicated/true pressure 3-8 display pressure 1-21 extended capability VGC 1-21 F fault indication 1-18 filament auto turn-on Convectron gauge module 3-16 Thermocouple gauge module 4-3 filament current limit 1-16 front panel control unit, illustration 1-13 Convectron gauge module, illustration 3-16 Convectron/Capacitance manometer module, illustration 8-2 electrometer module, illustration 2-2 Linear analog output module, illustration 9-1 Process control module, illustration 5-3 Thermocouple gauge module, illustration 4-3 full-scale adjust Convectron/Capacitance manometer module 8-5 Linear analog output module IG 9-3 Linear analog output module TC 9-3 8-1, 8-4 H handshake line control switches, RS232 interface module 6-2 I IEEE-488 module command syntax 7-2 computer interface option 1-2 description 7-1 error messages 7-4 installation 7-1 interface bus address 7-1 operation 7-2 specifications 7-5 SRQ mode 7-1 talk-only mode 7-1 top view illustration 7-1, 7-4 troubleshooting 7-4, 7-5 IG zero adjust Linear analog output module 9-3 illustration 307 overlay top cover A-5 cable connections 1-9 cable for Varian 564 ion gauge A-2 capacitance manometer module cable A-4 collector cable routing 1-9 control board 1-19 control unit front panel 1-13 Convectron cable A-3 Convectron gauge module mounting 3-5 Convectron gauge module rear panel 3-15 Convectron gauge module schematic 3-18 Convectron gauge module top view 3-3, 3-19 Convectron gauge module, indicated vs. true pressure curve 3-9–3-14 Convectron/Capacitance manometer module cable 8-3 Convectron/Capacitance manometer module front panel 8-2 Convectron/Capacitance manometer module rear panel 8-3 Convectron/Capacitance manometer module top view correct system grounding 1-12 grid voltage adjustment 1-16 IEEE-488 module top view 7-1, 7-4 ion gauge cable cross section A-2 ion gauge electrometer module back panel 2-4 ion gauge electrometer module, front panel 2-2 ion gauge electrometer module, top view 2-1 ion gauge schematic 1-15 line voltage select jumpers, power supply PC board 1-3 Linear analog output module front panel 9-1 Linear analog output module top view 9-1 module positions 1-4 mounting methods 1-7 nude ion gauge cable A-1 power supply rear panel 1-19 printed circuit board 1-5 Process control module front panel 5-3 Process control module pin assignments 5-2 Process control module relay contacts status 5-5 Process control module relay status lights 5-2 Process control module top view 5-4 remote control connector 1-15 remote input/output option 1-5 RS-232 interface module top view 6-2, 6-7 standard ion gauge cable 1-8, A-1 thermocouple gauge cable A-3 Thermocouple gauge module front panel 4-3 Thermocouple gauge module pressure analog output 4-3 Thermocouple gauge module rear panel 4-2 Thermocouple gauge module top view 4-1, 4-5 Index-2 Series 307 Vacuum Gauge Controller November, 2001 Index installation 1-5 307 VGC control unit 1-3 bargraph display module 1-6 Convectron gauge module 3-3, 3-4 Convectron gauge module gauge tube orientation 3-5 Convectron gauge module precautions 3-4 Convectron/Capacitance manometer module 8-1 Convectron/Capacitance manometer module cable 8-2 display, bargraph 1-6 display, single digit 1-5 IEEE-488 module 7-1 ion gauge electrometer module 2-1 ionization gauge types 1-8 line voltage selection 1-3 Linear analog output module 9-1 module 1-3 mounting configuration 1-6 mounting methods, illustration operation 2-2 pressure analog output 2-5 relative gas sensitivities 2-3, 2-4 sensitivity adjustment 2-3 specifications 2-7 top view illustration 2-1 troubleshooting 2-7 units of measure 2-1 ionization gauge types installation 1-8 A-2 configuration 1-1 on/off 1-13 schematic, illustration 1-15 theory of operation 1-15 ion gauge electrometer module analog output 2-4 back panel illustration 2-4 calibration 2-6 degas on/off 2-2 degas power adjustment 2-4 display update rate switch 2-2 emission adjustment 2-3 emission range 2-3 front panel illustration 2-2 installation 2-1 on/off 2-2 2-2 toggle key 1-13 operation 307 VGC Control unit 1-13 Convectron gauge module 3-6 Convectron/Capacitance manometer module 8-3, 8-5 L IEEE-488 module 7-2 ion gauge electrometer module line voltage select jumpers, power supply PC board, illustration 1-3 selection 1-3 Linear analog output module cable connection 9-2 calibration 9-3 description 9-1 electrometer (IG) output 9-5 electrometer (IG) range selection 2-2 Linear analog output module 9-2 Linear analog output module theory 9-3 Process control module 5-2 Process control module theory 5-5 RS-232 interface module theory 6-6 theory of 307 VGC control unit 9-1 front panel illustration 9-1 IG full scale adjust 9-3 IG zero adjust 9-3 installation 9-1 operation 9-2 pin assignments 9-2 specifications 9-4 TC full scale adjust 9-3 TC zero adjust 9-3 theory of operation 9-3 thermocouple output 9-4 top view illustration 9-1 troubleshooting 9-4 1-7 Process control module 5-1 remote input/output module 1-5 RS-232 interface module 6-1 single digit display 1-5 Thermocouple gauge module 4-1 Thermocouple gauge module tube 4-2 interface bus address IEEE-488 module 7-1 invert RTS switch, RS-232 interface module 6-3 ion gauge assignment, Process control module 5-4 cable cross section, illustration on/off degas 1-14 ion gauge electrometer module M maintenance Convectron gauge module 3-16 microcontroller 1-16 module calibration 1-16 installation 1-3 positions, illustration 1-4 mounting configuration 1-6 mounts 1/8 NPT 3-6 NW16KF 3-6 N nude ion gauge cable, illustration A-1 NW16KF flange mount Convectron gauge module 3-6 O 1/8 NPT mount Convectron gauge module 3-6 1-15 theory of Convectron gauge module 3-18 Thermocouple gauge module 4-2 P part numbers 1 pin assignments 1-14 Linear analog output module 9-2 power on/off toggle key 1-13 power supply 307 VGC control unit configuration 1-1 rear panel, illustration 1-19 pressure Convectron gauge module, analog output 3-15 Convectron gauge module, indicated vs. true curves 3-7 Convectron/Capacitance manometer module, reading 8-3 reading, Convectron gauge module 3-6 Thermocouple gauge module, reading 4-2 pressure analog output ion gauge electrometer module 2-5 process control additional 1-21 Process control module description 5-1 front panel illustration 5-3 installation 5-1 Index-3 Series 307 Vacuum Gauge Controller November, 2001 Index ion gauge assignment 5-4 operation 5-2 option 1-2 pin assignments illustration 5-2 relay contacts status illustration 5-5 relay polarity setting 5-4 relay status lights illustration 5-2 setpoint display 5-2 specifications 5-6 theory of operation 5-5 top view illustration 5-4 troubleshooting 5-6 R range selection Linear analog output module 9-1 range switch Convectron/Capacitance manometer module 8-2 relative gas sensitivities ion gauge electrometer module 2-3, 2-4 relay contacts status, Process control module 5-5 relay polarity setting Process control module 5-4 relay status lights, Process control module 5-2 remote control connector, illustration 1-15 remote input/output option, illustration 1-5 remote input/output module 1-1, 1-5, 1-14 pin assignments 1-14 repair order 1-19, 9-6 RS-232 interface module baud rate 6-1 byte format 6-1 character framing 6-2 command syntax 6-3 description 6-1 dip switches 6-1 error messages 6-5 handshake line control switches 6-2 installation 6-1 invert RTS switch 6-3 option 1-2 specifications 6-8 talk-only mode 6-2 theory of operation 6-6 top view illustration 6-2, 6-7 troubleshooting 6-7 S thermocouple gauge cable, illustration safety Convectron gauge module instructions 3-1 damage requiring service v instructions v sensitivity adjustment ion gauge electrometer module Thermocouple gauge module 4-2 calibration 4-4 description 4-1 display update rate switch 4-1 filament auto turn-on 4-3 front panel illustration 4-3 installation 4-1 operation 4-2 option 1-2 pressure analog output illustration 2-3 service guidelines viii setpoint display Process control module 5-2 single digit display installation 1-5 specifications 307 VGC control unit 1-20 Convectron gauge module 3-20 Convectron/Capacitance manometer module 8-6 IEEE-488 module 7-5 ion gauge electrometer module 2-7 Linear analog output module 9-4 Process control module 5-6 RS-232 interface module 6-8 Thermocouple gauge module 4-6 SRQ mode IEEE-488 module 7-1 standard ion gauge cable, illustration A-3 4-3 reading pressure 4-2 rear panel illustration 4-2 specifications 4-6 top view illustration 4-1, 4-5 troubleshooting 4-5 tube installation 4-2 units of measure 4-1 thermocouple output Linear analog output module 9-4 transducer test procedure, Convectron gauge module 3-19 troubleshooting basic 307 VGC 1-17 Convectron gauge module 3-19, 3-20 Convectron/Capacitance manometer module 8-5 fault indication 1-18 IEEE-488 module 7-4, 7-5 ion gauge electrometer module 1-8, A-1 system ground vii system ground test procedure 1-10 system grounding, illustration 1-12 2-7 Linear analog output module 9-4 Process control module 5-6 RS-232 interface module 6-7 Thermocouple gauge module 4-5 T 307 VGC control unit configurations 1-1 description 1-1 installation 1-3 mounting configurations 1-6 operation 1-13 overlay top cover, illustration A-5 power supply module 1-1 specifications 1-20 troubleshooting 1-17 units of measure 1-13 talk-only mode IEEE-488 module 7-1 RS-232 interface module 6-2 TC zero adjust Linear analog output module 9-3 theory of operation 307 VGC control unit 1-15 Convectron gauge module 3-18 ion gauge 1-15 Process control module 5-5 U units of measure 307 VGC control unit 1-13 Convectron/Capacitance manometer module 8-1 ion gauge electrometer module 2-1 Thermocouple gauge module 4-1 W warranty viii Index-4 Series 307 Vacuum Gauge Controller November, 2001
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File Type : PDF File Type Extension : pdf MIME Type : application/pdf PDF Version : 1.4 Linearized : No Create Date : 2001:11:12 05:26:40Z Modify Date : 2002:01:16 16:21:53-07:00 Subject : 307024-02 Installation, Operation, and Maintenance Instructions Page Count : 108 Creation Date : 2001:11:12 05:26:40Z Mod Date : 2002:01:16 16:21:53-07:00 Producer : Acrobat Distiller 5.0 (Windows) Author : Helix Technology Corporation - November 11, 2001 Metadata Date : 2002:01:16 16:21:53-07:00 Creator : Helix Technology Corporation - November 11, 2001 Title : Series 307 Granville-Phillips Vacuum Gauge Controller Description : 307024-02 Installation, Operation, and Maintenance Instructions Page Mode : UseOutlines Has XFA : NoEXIF Metadata provided by EXIF.tools