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PROCEEDINGS OF SPIE SPIEDigitalLibrary.org/conference-proceedings-of-spie Front Matter: Volume 9440 , "Front Matter: Volume 9440," Proc. SPIE 9440, International Conference on Micro- and Nano-Electronics 2014, 944001 (22 December 2014); doi: 10.1117/12.2184083 Event: The International Conference on Micro- and Nano-Electronics 2014, 2014, Zvenigorod, Russian Federation Downloaded From: https://www.spiedigitallibrary.org/conference-proceedings-of-spie on 3/3/2018 Terms of Use: https://www.spiedigitallibrary.org/terms-of-use PROCEEDINGS OF SPIE International Conference on Micro- and Nano-Electronics 2014 Alexander A. Orlikovsky Editor 6–10 October 2014 Zvenigorod, Russian Federation Organized by Institute of Physics and Technology (Russian Federation) JSC Mikron (Russian Federation) Sponsored by Russian Foundation for Basic Researches (Russian Federation) Federal Agency of Scientific Organizations (Russian Federation) Russian Academy of Sciences (Russian Federation) TechnoInfo Ltd. (United Kingdom and Russian Federation) NIX Company (Russian Federation) Rohde & Schwarz (Germany and Russian Federation) JSC SemiTEq (Russian Federation) Published by SPIE Volume 9440 Proceedings of SPIE 0277-786-786X, V.9440 SPIE is an international society advancing an interdisciplinary approach to the science and application of light. International Conference on Micro- and Nano-Electronics 2014, edited by Alexander A. Orlikovsky, Proc. of SPIE Vol. 9440, 944001 · © 2014 SPIE CCC code: 0277-786X/14/$18 · doi: 10.1117/12.2184083 Proc. of SPIE Vol. 9440 944001-1 Downloaded From: https://www.spiedigitallibrary.org/conference-proceedings-of-spie on 3/3/2018 Terms of Use: https://www.spiedigitallibrary.org/terms-of-use The papers included in this volume were part of the technical conference cited on the cover and title page. Papers were selected and subject to review by the editors and conference program committee. Some conference presentations may not be available for publication. The papers published in these proceedings reflect the work and thoughts of the authors and are published herein as submitted. The publisher is not responsible for the validity of the information or for any outcomes resulting from reliance thereon. Please use the following format to cite material from this book: Author(s), "Title of Paper," in The International Conference on Micro- and Nano-Electronics 2014, edited by Alexander A. Orlikovsky, Proceedings of SPIE Vol. 9440 (SPIE, Bellingham, WA, 2014) Article CID Number. ISSN: 0277-786X ISBN: 9781628415551 Published by SPIE P.O. Box 10, Bellingham, Washington 98227-0010 USA Telephone +1 360 676 3290 (Pacific Time)· Fax +1 360 647 1445 SPIE.org Copyright © 2014, Society of Photo-Optical Instrumentation Engineers. Copying of material in this book for internal or personal use, or for the internal or personal use of specific clients, beyond the fair use provisions granted by the U.S. Copyright Law is authorized by SPIE subject to payment of copying fees. The Transactional Reporting Service base fee for this volume is $18.00 per article (or portion thereof), which should be paid directly to the Copyright Clearance Center (CCC), 222 Rosewood Drive, Danvers, MA 01923. Payment may also be made electronically through CCC Online at copyright.com. Other copying for republication, resale, advertising or promotion, or any form of systematic or multiple reproduction of any material in this book is prohibited except with permission in writing from the publisher. The CCC fee code is 0277-786X/14/$18.00. Printed in the United States of America. Publication of record for individual papers is online in the SPIE Digital Library. SPIEDigitalLibrary.org Paper Numbering: Proceedings of SPIE follow an e-First publication model, with papers published first online and then in print. Papers are published as they are submitted and meet publication criteria. A unique citation identifier (CID) number is assigned to each article at the time of the first publication. Utilization of CIDs allows articles to be fully citable as soon as they are published online, and connects the same identifier to all online, print, and electronic versions of the publication. SPIE uses a six-digit CID article numbering system in which: The first four digits correspond to the SPIE volume number. The last two digits indicate publication order within the volume using a Base 36 numbering system employing both numerals and letters. These two-number sets start with 00, 01, 02, 03, 04, 05, 06, 07, 08, 09, 0A, 0B … 0Z, followed by 10-1Z, 20-2Z, etc. The CID Number appears on each page of the manuscript. The complete citation is used on the first page, and an abbreviated version on subsequent pages. Proc. of SPIE Vol. 9440 944001-2 Downloaded From: https://www.spiedigitallibrary.org/conference-proceedings-of-spie on 3/3/2018 Terms of Use: https://www.spiedigitallibrary.org/terms-of-use Contents vii Author Index ix Conference Committees xv SESSION 1 Introduction MICRO- AND NANOELECTRONIC MATERIALS AND FILMS I 9440 02 The chemistry screening for ultra low-k dielectrics plasma etching [9440-70] 9440 03 Optically transparent fluoro-containing polyimide films with low dielectric permeability [9440-23] 9440 04 Electrical properties of ALD HfO2 (EOT 0.47 nm) [9440-69] 9440 05 Influence of doping on the crystallization kinetics of Ge-Sb-Te thin films for phase-change memory application [9440-79] 9440 06 Investigation of transport mechanisms in Bi doped Ge2Sb2Te5 thin films for phase change memory application [9440-66] 9440 07 Nanostructured chalcogenide materials for memory switching devices [9440-7] 9440 08 Electrochemical formation of Ag-Sn layers on copper plates [9440-50] 9440 09 TaNx and Ta/graded Ta(N)/TaN multilayer diffusion barriers [9440-59] 9440 0A Surface treatment of polyimide film for metal magnetron deposition in vacuum [9440-22] SESSION 2 MICRO- AND NANOELECTRONIC MATERIALS AND FILMS II 9440 0B Reversible and non-reversible changes in nanostructured Si in humid atmosphere [9440-63] 9440 0C Low-voltage field desorption in carbon nanotubes [9440-60] 9440 0D Study of growth kinetics of amorphous carbon nanopillars formed by PECVD [9440-15] 9440 0E Formation of gold and silver cluster arrays using vacuum-thermal evaporation on a nonheated substrate [9440-51] 9440 0F Formation of Si nanocrystals in SiOx, SiOx:C:H films and Si/SiO2 multilayer nanoheterostructures by pulse laser treatments [9440-6] iii Proc. of SPIE Vol. 9440 944001-3 Downloaded From: https://www.spiedigitallibrary.org/conference-proceedings-of-spie on 3/3/2018 Terms of Use: https://www.spiedigitallibrary.org/terms-of-use 9440 0G Study of hydrogen states in a-Si:H films, dehydrogenization treatments and influence of hydrogen on nanosecond pulse laser crystallization of a-Si:H [9440-5] 9440 0H New generation photoelectric converter structure optimization using nano-structured materials [9440-55] 9440 0I SESSION 3 Different methods of forming multicomponent metal sulfide by SILAR-techniques [9440-43] MICRO- AND NANOELECTRONIC TECHNOLOGIES AND EQUIPMENT 9440 0J Some peculiarities of the new method of a relief creating by the direct electron-beam etching of resist [9440-17] 9440 0K Formation of fast neutral beams and their using for selective etching [9440-26] 9440 0L Carbon and fluorine co-implantation for boron diffusion suppression in extremely ultra shallow junctions [9440-68] SESSION 4 DIAGNOSTICS AND METROLOGY 9440 0M Approaches to a dies decoupling during failure analysis of the 3D package integrated circuits [9440-78] 9440 0N Electrochemical recovery of damaged bonding area during failure analysis of the modern integrated circuits [9440-77] 9440 0O Modification of cantilevers for atomic-force microscopy using the method of exposure defocused ion beam [9440-3] SESSION 5 PHYSICS AND TECHNOLOGY OF MICRO- AND NANODEVICES 9440 0P High-temperature single-electron transistor based on a gold nanoparticle [9440-76] 9440 0R Photocurrent relaxations and gain in semiconductor nanowires [9440-57] 9440 0S Photoresponse beyond the red border of the internal photoeffect: designing problems of photon counting schemes in 10µm band [9440-40] 9440 0T Large scale (~25 m2) metal diffraction grating of submicron period as possible optoelectronic detector for short scalar gravitational waves [9440-42] 9440 0U Development of driving setup for micromechanical friction vacuum gauge [9440-56] 9440 0V The sensor of surface defects based on electrical impedance tomography technique [9440-28] 9440 0W Electrostatically actuated MEMS switch with resistive contact [9440-8] iv Proc. of SPIE Vol. 9440 944001-4 Downloaded From: https://www.spiedigitallibrary.org/conference-proceedings-of-spie on 3/3/2018 Terms of Use: https://www.spiedigitallibrary.org/terms-of-use SESSION 6 MODELING AND SIMULATION I 9440 0X SOI layout decomposition for double patterning lithography on high-performance computer platforms [9440-54] 9440 0Y Monte Carlo simulation of boron doping profile of fin and trench structures by plasma immersion ion implantation [9440-72] 9440 0Z Aluminum anodization process modeling approach [9440-2] 9440 10 Self-organization phenomena during electrochemical formation of nanoclusters in silicon [9440-29] SESSION 7 MODELING AND SIMULATION II 9440 11 Unified description of I-V characteristics in field-effect and bipolar transistors based on current density continuity equation solution [9440-34] 9440 12 A simplified analytical model of merged MOS [9440-10] 9440 13 Monte Carlo simulation of hot electron transport in deep submicron SOI MOSFET [9440-21] 9440 14 Numerical modeling of functionally integrated injection lasers-modulators [9440-18] 9440 15 Iterative approach as alternative to S-matrix in modal methods [9440-27] 9440 16 Conducting media with spatial dispersion in a microwave field: eigenvalue problem for permittivity operator [9440-38] 9440 17 Simulation of devices based on carbon nanotubes and graphene [9440-19] 9440 18 Modeling and simulation of nanoelectronics devices in cognitive nanoinformatics [9440-1] SESSION 8 MODELING AND SIMULATION III 9440 19 Radiation-induced mismatch enhancement in 65nm CMOS SRAM for space applications [9440-36] 9440 1A Estimation technique for SET-tolerance of combinational ICs [9440-35] 9440 1B Modeling of single event gate rupture in power MOSFETs under heavy ion irradiation [9440-47] 9440 1C Modeling and simulation of dose effects in bipolar analog integrated circuits [9440-48] v Proc. of SPIE Vol. 9440 944001-5 Downloaded From: https://www.spiedigitallibrary.org/conference-proceedings-of-spie on 3/3/2018 Terms of Use: https://www.spiedigitallibrary.org/terms-of-use SESSION 9 QUANTUM INFORMATICS 9440 1D Antiferromagnetic anisotropic XXZ chain of spins S= 1/2 in the presence of an inhomogeneous transverse magnetic field as a basis for the multiqubit quantum register simulation [9440-71] 9440 1E Quantum discord in central spin model [9440-44] 9440 1F Quantum key distribution over 300km [9440-45] 9440 1G Quantum diamond chip under network optical control [9440-20] 9440 1H Numerical and analytical research of the impact of decoherence on quantum circuits [9440-64] 9440 1I The study of amplitude and phase relaxation impact on the quality of quantum information technologies [9440-62] 9440 1J The study of classical dynamical systems using quantum theory [9440-73] 9440 1K Root approach for estimation of statistical distributions [9440-75] 9440 1L Finite frames constructed by solving Fekete problem and accuracy of quantum tomography protocols based on them [9440-61] 9440 1M Qubit model of Jaynes-Cammings-Hubbard with phonon environment for exciton transport in light-harvesting FMO complex [9440-46] 9440 1N Biologically inspired path to quantum computer [9440-32] vi Proc. of SPIE Vol. 9440 944001-6 Downloaded From: https://www.spiedigitallibrary.org/conference-proceedings-of-spie on 3/3/2018 Terms of Use: https://www.spiedigitallibrary.org/terms-of-use Authors Numbers in the index correspond to the last two digits of the six-digit citation identifier (CID) article numbering system used in Proceedings of SPIE. The first four digits reflect the volume number. Base 36 numbering is employed for the last two digits and indicates the order of articles within the volume. Numbers start with 00, 01, 02, 03, 04, 05, 06, 07, 08, 09, 0A, 0B...0Z, followed by 10-1Z, 20-2Z, etc. Abramov, Igor I., 17 Antonenko, A. H., 0F, 0G Antonov, Andrey A., 19 Antonov, S. P., 0O Arzhanova, Natalia A., 10 Babich, Alexey V., 05 Baklanov, Mikhail R., 02 Balbekov, A., 1A Bantysh, B. I., 1H, 1I Belinsky, L. V., 1L Belov, Alexey N., 07, 0Z Bogdanov, Yuri I., 1H, 1I, 1J, 1K, 1L Bogdanova, N. A., 1J, 1K Borgardt, N. I., 0D, 0E Borzdov, A. V., 13 Borzdov, V. M., 13 Boyko, Anton N., 0U Bruk, M. A., 0J Chaplygin, Yuri A., 0O Cherkov, A. G., 0F Chernyaev, A. P., 16 Chernyavskiy, A. Yu., 1H, 1I Dagesyan, S. A., 0P Danilov, I. A., 1C Dedkova, A., 0D Denisenko, Mark A., 14 Divochiy, A., 1F Dolotov, Pavel S., 19 Dresvyannikov, Maxim A., 0S, 16 Dronov, A., 0H, 0I Drosdetsky, M. G., 1C Dubkov, S. V., 0D, 0E Elezov, M., 1F Emelianov, A., 0C Emeliyanov, V. V., 1B Fastovets, D. V., 1H Galimov, A. M., 1C Galkov, M. S., 0G Gavrilin, I., 0H Gavrilov, Sergey A., 07, 0B, 0I, 0Z Gismatulin, A. A., 0F Goltsman, G., 1F Gorbunov, Maxim S., 19, 1A Grishina, Y. S., 0D, 0E Gromov, Dmitry G., 06, 0D, 0E Holevo, A. S., 1H Isaeva, Alina S., 0V Iskakov, R., 03 Kalnov, V. A., 09, 0J Kamaev, G. N., 0F, 0G Karuzskii, Aleksandr L., 0S, 16 Kateev, Igor Yu., 1G Kelm, E. A., 0M, 0N Khorin, I., 09 Kirilenko, E., 0D Kochubey, S. A., 0G Kokin, A. A., 1D Kokin, V. A., 1D Kolomejtseva, N. V., 17 Konoplev, Boris G., 14 Korobova, N., 03 Kovalyuk, V., 1F Kovyrkin, Pavel B., 0U Kozyukhin, Sergey A., 05, 06 Krasnoborodko, S. Yu., 0O Kravtsova, V., 03 Krishtab, M., 02 Kudrya, V. P., 0K Kukhtyaeva, V. R., 08 Kurochkin, V., 1F Kurochkin, Y., 1F Labunov, Vladimir A., 17 Lazarenko, Petr I., 06 Lazzarino, F., 02 Lebedev, Anatoly A., 19, 1C Lisovsky, I. P., 0F Litovchenko, Vladimir G., 0F Lukichev, Vladimir F., 0L, 1H, 1I Maidanchuk, I. Yu., 0F Maishev, Yu. P., 0K Makarchuk, Vladimir, 0X Miakonkikh, Andrey V., 0L, 0Y Mikhailova, M. S., 08 Milovanov, R. A., 0M, 0N Mironov, Rostislav E., 05 Mityagin, Yu. A., 16 Molchanova, A., 04 Molodtsova, G., 0M, 0N Naumov, Victor V., 0W Neizvestniy, Igor G., 0F Nersesyan, Suren, 0R Nikolaev, V., 0A Ogryzko, Vasily, 1N Orlikovsky, Alexander A., 1G, 1H, 1I Orlikovsky, Nikolay A., 09, 1G Ozhegov, R., 1F Ozhigov, Yuri I., 1M, 1N Pavlova, L. M., 0E vii Proc. of SPIE Vol. 9440 944001-7 Downloaded From: https://www.spiedigitallibrary.org/conference-proceedings-of-spie on 3/3/2018 Terms of Use: https://www.spiedigitallibrary.org/terms-of-use Perestoronin, Anatoly V., 0S, 16 Petrosyan, Stepan, 0R Petrov, V., 0A Petukhov, I. N., 08 Petukhov, V., 0C Popova, E., 0I Presnukhina, A., 0I Prikhodko, O., 03 Prokaznikov, Alexander V., 10 Prokaznikov, Michael A., 10 Pyatilova, O., 07, 0B Rakitin, A., 12 Rakitin, V., 12 Redichev, Evgeniy N., 06 Rezchikova, Elena V., 18 Rogozhin, Aleksander E., 04, 09, 0J, 0L Romanova, I. A., 17 Roschin, V. M., 08 Rozanov, R., 07 Rudakov, Valeriy I., 0L Rudenko, Konstantin V., 0L, 0Y Ryndin, Eugeny A., 0V, 14 Safronova, N. A., 0G Savitskiy, A. I., 0E Selyukov, Roman V., 0W Semenihin, I. A., 1H Semenikhin, Igor A., 15 Shahsenov, Izat S., 0Y Shakhnov, Vadim A., 18 Shalimov, Andrei S., 0U Sherchenkov, Alexey A., 05, 06 Shevchuk, S. L., 0K Shevyakov, Vasiliy I., 07, 0O, 0Z Shilyaeva, Yu. I., 08 Shnaider, Alexandra I., 19 Shtern, Maxim Y., 06 Shtern, Yuri I., 05 Skovoroda, Nikita A., 1M Smagulova, S. A., 0O Smirnov, K., 1F Soldatov, E. S., 0P Spirin, A. V., 0J Stepanov, A. S., 0P Streltsov, D. R., 0J Timoshenkov, Sergei P., 0U Timoshenkov, Sergey P., 06, 0A, 0B, 0C Trifonov, A. Y., 0E Tskhovrebov, Andrey M., 0S Tsukanov, Alexander V., 1G Turin, V. O., 1C Umersakova, M., 03 Useinov, R. G., 1B Uvarov, Ilya V., 0W Vachtomin, Y., 1F Vatuev, A. S., 1B Verstov, Vladimir, 0X Vertyanov, D., 0A Volchkov, N. A., 16 Volodin, V. A., 0F, 0G Vorobiev, Maksim I., 0Z V'yurkov, V. V., 13 Yesayan, Ashkhen, 0R Zanuccoli, Mauro, 15 Zebrev, Gennady I., 11, 19, 1B, 1C Zharik, G., 0P Zheleznyakova, A., 07, 0H, 0I Zherikhina, Larisa N., 0S Zhigalov, V., 0B, 0C Zhikharev, E. N., 0J Zhukov, Valery A., 0T Zinchenko, Lyudmila A., 0X, 18 Zobov, Vladimir Eu., 1E Zotovich, A., 02 Zubov, D. N., 0M, 0N viii Proc. of SPIE Vol. 9440 944001-8 Downloaded From: https://www.spiedigitallibrary.org/conference-proceedings-of-spie on 3/3/2018 Terms of Use: https://www.spiedigitallibrary.org/terms-of-use Conference Committees Conference Chair Evgeny P. Velikhov, Russian Scientific Center “Kurchatov Institute” (Russian Federation) Conference Co-chairs Alexander A. Orlikovsky, Institute of Physics and Technology (Russian Federation) Gennadiy Ya. Krasnikov, JSC Mikron, Zelenograd (Russian Federation) International Advisory Committee Alexander L. Aseev, Institute of Semiconductor Physics (Russian Federation) Dmitri V. Averin, Stony Brook University (United States) Mikhail R. Baklanov, International Microelectronic Center (Belgium) Rupert Chabicovsky, Technical University, Vienna (Austria) Yuri V. Gulyaev, Kotel'nikov Institute of Radioengineering and Electronics (Russian Federation) Huey-Liang Hwang, National Tsing Hua University (Taiwan) Vladimir A. Labunov, Belarusian State University of Informatics and Radioelectronics (Belarus) Konstantin K. Likharev, Stony Brook University (United States) Vladimir G. Litovchenko, Institute of Semiconductor Physics, NASU (Ukraine) Jun-ichi Nishizawa, Semiconductor Research Institute (Japan) Konstantin S. Novoselov, University of Manchester (United Kingdom) Juras Požela, Semiconductor Physics Institute (Lithuania) Iwo W. Rangelow, University of Ilmenau (Germany) Heiner Ryssel, Fraunhofer Institute of Integrated Systems and Devices Technology (Germany) Thomas Skotnicki, ST Microelectronics (France) Robert A. Suris, Ioffe Physical-Technical Institute (Russian Federation) Dorel Toma, Tokyo Electron Corporation, U.S. Technology Development Center (United States) Akira Toriumi, University of Tokyo (Japan) ix Proc. of SPIE Vol. 9440 944001-9 Downloaded From: https://www.spiedigitallibrary.org/conference-proceedings-of-spie on 3/3/2018 Terms of Use: https://www.spiedigitallibrary.org/terms-of-use Program Committee Alexander A. Orlikovsky, Chair, Institute of Physics and Technology (Russian Federation) Igor G. Neizvestnyi, Co-chair, Institute of Semiconductor Physics (Russian Federation) Vladimir F. Lukichev, Co-chair, Institute of Physics and Technology (Russian Federation) Program Committee Members Andrey F. Alexandrov, Lomonosov Moscow State University (Russian Federation) Vitaliy V. Aristov, Institute of Microelectronics Technology and High-Purity Materials (Russian Federation) Vladimir B. Betelin, Scientific Research Institute for System Analysis (Russian Federation) Yuri I. Bogdanov, Institute of Physics and Technology (Russian Federation) Yuri A. Chaplygin, National Research University of Electronic Technology (Russian Federation) Boris G. Gribov, Scientific Research Institute on Especially Pure Materials (Russian Federation) Fadey F. Komarov, Belarusian State University (Belarus) Peter S. Kop'ev, Ioffe Physical-Technical Institute (Russian Federation) Peter P. Maltsev, Institute on Ultra High Frequency Semiconductor Electronics (Russian Federation) Alexey N. Nazarov, Institute of Semiconductor Physics, NASU (Ukraine) Yuri I. Ozhigov, Lomonosov Moscow State University (Russian Federation) Vladislav Ya. Panchenko, Institute on Laser and Informatics Technologies (Russian Federation) Alexander S. Rudy, Yaroslavl Demidov State University (Russian Federation) Nikolay N. Salaschenko, Institute for Physics of Microstructures (Russian Federation) Kev M. Salikhov, Zavoisky Physical-Technical Institute (Russian Federation) Alexander S. Sigov, Moscow State Technical University of Radioengineering, Electronics, and Automation (Russian Federation) Pavel A. Todua, Moscow Institute of Physics and Technology (Russian Federation) Vladimir V. Vyurkov, Institute of Physics and Technology (Russian Federation) x Proc. of SPIE Vol. 9440 944001-10 Downloaded From: https://www.spiedigitallibrary.org/conference-proceedings-of-spie on 3/3/2018 Terms of Use: https://www.spiedigitallibrary.org/terms-of-use Organizing Committee Vladimir F. Lukichev, Chair, Institute of Physics and Technology (Russian Federation) Konstantin V. Rudenko, Co-chair, Institute of Physics and Technology (Russian Federation) Organizing Committee Members Igor I. Abramov, Belarusian State University of Informatics and Radioelectronics (Belarus) Ildar I. Amirov, Institute of Physics and Technology, Yaroslavl Branch (Russian Federation) Yuri I. Bogdanov, Institute of Physics and Technology (Russian Federation) Anastas A. Buharaev, Zavoisky Physical-Technical Institute (Russian Federation) Mikhail A. Chuev, Institute of Physics and Technology (Russian Federation) Alexander A. Gorbazevitch, Lebedev Physical Institute (Russian Federation) Eugeny S. Gornev, JSC Mikron, Zelenograd (Russian Federation) Mikhail A. Korolev, National Research University of Electronic Technology (Russian Federation) Sergey A. Nikitov, Kotel'nikov Institute of Radioengineering and Electronics (Russian Federation) Oleg P. Pchelyakov, Institute of Semiconductor Physics (Russian Federation) Vladislav Yu. Rubaev, NIX Company (Russian Federation) Local Organizing Committee Vladimir F. Lukichev, Chair of the ICMNE-2014 Organizing Committee Yuri I. Bogdanov, Chair of the Extended Session QI-2014 Vladimir P. Kudrya, Scientific Secretary of ICMNE-2014 Sergey I. Skalkin, Financial Director of ICMNE-2014 Alexander N. Astakhov, Administrator of ICMNE-2014 Alexey M. Dianov, PR-support of ICMNE-2014 Andrey Yu. Chernyavskiy Andrey V. Miakonkikh Alexander E. Rogozhin Igor A. Semenikhin Alexander V. Tsukanov Vladimir V. Vyurkov Lidiya M. Besschastnova Irina Yu. Lukianova Irina Novojilova xi Proc. of SPIE Vol. 9440 944001-11 Downloaded From: https://www.spiedigitallibrary.org/conference-proceedings-of-spie on 3/3/2018 Terms of Use: https://www.spiedigitallibrary.org/terms-of-use Session Chairs Plenary Session I Vladimir F. Lukichev, Institute of Physics and Technology (Russian Federation) Plenary Session II. Quantum Informatics I Yuri I. Bogdanov, Institute of Physics and Technology (Russian Federation) Plenary Session III Vladimir F. Lukichev, Institute of Physics and Technology (Russian Federation) 1 Materials and Films I Andrey V. Miakonkikh, Institute of Physics and Technology (Russian Federation) 2 Physics and Technology of Micro- and Nanodevices I Eugeny Danilkin, Crocus Nanoelectronics (Russian Federation) 3 Quantum Informatics II Sergey P. Kulik, Lomonosov Moscow State University (Russian Federation) 4 Materials and Films II Konstantin V. Rudenko, Institute of Physics and Technology (Russian Federation) 5 Physics and Technology of Micro- and Nanodevices II Vladimir F. Lukichev, Institute of Physics and Technology (Russian Federation) 6 Silicon-on-Insulator and Low-Dimensional Structures Vladimir V. Vyurkov, Institute of Physics and Technology (Russian Federation) 7 Materials and Films III Ildar I. Amirov, Institute of Physics and Technology, Yaroslavl Branch (Russian Federation) 8 Physics and Technology of Micro- and Nanodevices III Vladimir V. Vyurkov, Institute of Physics and Technology (Russian Federation) 9 Quantum Informatics III Vladimir Eu. Zobov, Kirensky Institute of Physics (Russian Federation) 10 Materials and Films IV Konstantin V. Rudenko, Institute of Physics and Technology (Russian Federation) xii Proc. of SPIE Vol. 9440 944001-12 Downloaded From: https://www.spiedigitallibrary.org/conference-proceedings-of-spie on 3/3/2018 Terms of Use: https://www.spiedigitallibrary.org/terms-of-use 11 Meeting of the International Association of the Academies of Sciences Alexander A. Orlikovsky, Institute of Physics and Technology (Russian Federation) 12 Quantum Informatics IV Sergey A. Moiseev, Kazan Physical-Technical Institute (Russian Federation) 13 Simulation and Modeling I Vladimir V. Vyurkov, Institute of Physics and Technology (Russian Federation) 14 Micro- and Nanoelectronics Technologies and Equipment Alexander E. Rogozhin, Institute of Physics and Technology (Russian Federation) 15 Quantum Informatics V Eduard B. Fel'dman, Institute of Problems of Chemical Physics (Russian Federation) 16 Simulation and Modeling II Boris G. Konoplev, Institute of Nanotechnology, Electronics and Electronic Equipment Engineering of Southern Federal University (Russian Federation) 17 Metrology and Characterization Andrey V. Miakonkikh, Institute of Physics and Technology (Russian Federation) 18 Quantum Informatics VI Farid M. Ablayev, Institute for Informatics (Russian Federation) 19 Simulation and Modeling III Mikhail A. Chuev, Institute of Physics and Technology (Russian Federation) xiii Proc. of SPIE Vol. 9440 944001-13 Downloaded From: https://www.spiedigitallibrary.org/conference-proceedings-of-spie on 3/3/2018 Terms of Use: https://www.spiedigitallibrary.org/terms-of-use Proc. of SPIE Vol. 9440 944001-14 Downloaded From: https://www.spiedigitallibrary.org/conference-proceedings-of-spie on 3/3/2018 Terms of Use: https://www.spiedigitallibrary.org/terms-of-use Introduction The volume contains selected papers presented at the International Conference "Micro- and Nano-Electronics 2014" (ICMNE-2014) which was held in Zvenigirod, Moscow Region, Russia 6–10 October 2014. ICMNE is a biannual conference covering the main fields of micro- and nano-electronic technologies and device physics. Since 1992, the Institute of Physics and Technology (Moscow, Russian Federation) has been the permanent organizer of ICMNE, and it became an SPIEaffiliated conference in 2003. ICMNE-2014 included an extended session, "Quantum Informatics 2014". The ICMNE-2014 scope contained such scientific and technological fields as microand nano-electronic materials and films; technologies and equipment; metrology, physics and technologies of micro- and nano-devices; simulation and modeling; silicon-on-insulator and low-dimensional structures; and quantum informatics. ICMNE-2014 included three plenary sessions and 19 topical sessions focusing on the following areas: • • • • • • • • Physics and Technology of Micro- and Nano-Devices Materials and Films Quantum Informatics Silicon-on-Insulator and Low-Dimensional Structures Simulation and Modeling Micro- and Nano-Electronics Technologies and Equipment Metrology and Characterization Superconducting Structures and Devices The scientific program was based on invited and contributed papers from the scientists employed at European and Siberian Regions of Russia, Armenia, Belarus, Belgium, Germany, France, United States, and Japan. The invited lectures on the current achievements and challenges in the contemporary microelectronics were delivered by the scientists from France, Belgium, Germany, France, Japan, and Russia. The session contributions were made by academic institutions and universities, as well as from industry. About 100 contributions were oral presentations and about 80 were presented as posters. We hope these sessions resulted in helpful discussions at the session and between attendees will promote continuing research activity in the microelectronic community. Additional information about ICMNE-2014 can be found at the conference website http://www. icmne.ftian.ru Alexander A. Orlikovsky xv Proc. of SPIE Vol. 9440 944001-15 Downloaded From: https://www.spiedigitallibrary.org/conference-proceedings-of-spie on 3/3/2018 Terms of Use: https://www.spiedigitallibrary.org/terms-of-use Proc. of SPIE Vol. 9440 944001-16 Downloaded From: https://www.spiedigitallibrary.org/conference-proceedings-of-spie on 3/3/2018 Terms of Use: https://www.spiedigitallibrary.org/terms-of-use
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