Parameter Analyzer Quick Start Guide HP 4155A,4156A
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Parameter Analyzer
Quick Start Guide
c Copyright Hewlett-Packard
Company 1993
Product Warranty
Limitation of Warranty
This Hewlett-Packard product is warranted against
The foregoing warranty shall not apply to defects
All Right Reserved.
defects in material and workmanship for a period of
resulting from improper or inadequate maintenance by
Reproduction, adaptation, or
one year from date of shipment. During the warranty Buyer, Buyer-supplied software or interfacing,
translation without prior written
period, Hewlett-Packard will, at its option, either repair unauthorized modi cations or misuse, operation outside
permission is prohibited, except as or replace products which prove to be defective.
of the environment speci cations for the products, or
allowed under the copyright laws.
improper site preparation or maintenance.
Warranty service of this product will be performed at
HP Part Number
Buyer's facility at no charge within Hewlett-Packard
No other warranty is expressed or implied.
04155-90200
service travel areas. Outside Hewlett-Packard service
Hewlett-Packard speci cally disclaims the implied
First edition, September 1993
travel areas, warranty service will be performed at
warranties of merchantability and tness for a
Printed in Japan
Buyer's facility only upon Hewlett-Packard's prior
particular purpose.
agreement and Buyer shall pay Hewlett-Packard's
round trip travel expenses. In all other cases, products
Exclusive Remedies
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Hewlett-Packard.
exclusive remedies. Hewlett-Packard shall not be liable
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and taxes for products returned to Hewlett-Packard
from another country.
Hewlett-Packard warrants that its software and
rmware designated by Hewlett-Packard for use with
an instrument will execute its programming
instructions when properly installed on that instrument.
Hewlett-Packard does not warrant that the operation
of the instrument, or software, or rmware will be
uninterrupted or error free.
for any direct, indirect, special, incidental, or
consequential damages, whether based on contract,
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Hewlett-Packard Company certi es that this product
met its published speci cations at the time of shipment
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that its calibration measurements are traceable to the
National Institute of Standards and Technology
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calibration facility, and to the calibration facilities of
other International Standards Organization members.
Yokogawa-Hewlett-Packard, Ltd.
9-1, Takakura-cho, Hachioji-shi, Tokyo 192 Japan
HP 4155A and HP 4156A
HP 4155A Semiconductor Parameter Analyzer and HP 4156A Precision
Semiconductor Parameter Analyzer are full automatic and high performance
instruments designed to measure, to display graphically, and to analyze the
dc parameters and characteristics of semiconductor devices such as diodes,
transistors, ICs, solar cells, and wafers during the fabrication process. So you
can evaluate device design, process design, fabrication environments, and so
on with the HP 4155A/4156A.
In semiconductor research and development laboratories, the HP
4155A/4156A provides precise characteristics evaluation, which is an
important step in the development of new high performance devices,
and gives design engineers an easy to use method of device parameter
acquisition|an essential element in computer aided design (CAD).
On the production line, the HP 4155A/4156A provides real-time feedback
on wafer evaluation to improve the semiconductor process and to increase
production yields.
For semiconductor end users, the HP 4155A/4156A is ideal for circuit design
applications and incoming inspection.
3
HP 4155A/4156A|At a Glance
Rotary
knob
Secondary softkeys
Primary softkeys
LINE switch
Flexible disk drive
Keyboard interface
LINE switch
Flexible disk drive
Keyboard interface
Primary softkeys
Secondary softkeys
Rotary knob
4
You use the LINE switch to apply electric power.
You can use 3.5-inch diskette as the mass storage,
which is inserted in this exible disk drive.
You can control the HP 4155A/4156A from keyboard,
which is connected to the keyboard interface, as well
as from the front-panel keys.
You use primary softkeys to move pages and to change
the secondary softkey menu.
You use secondary softkeys to select variable names,
alternatives, and changing items.
You use rotary knob to change the setting value and to
move a marker.
SMU terminals
Intlk interface
HP 4155A
SMU terminals
Intlk interface
HP 4156A
SMU terminals
Intlk interface
Either voltage or current output is forced from the
SMU terminals, and measurement signal is put to the
SMU terminals.
To prevent you from electric shock, the HP
4155A/4156A has interlock function. The signals for
the interlock function go through the Intlk interface.
5
In This Guide Book
This guide book is a quick start guide for HP 4155A and HP 4156A. It
introduces a basic measurement and its analysis without a lot of explanation
and details. You can perform the following measurement and analysis through
this guide book:
p
Measuring Vg{ Id characteristics of a MOS FET.
Analyzing its graph and nding threshold voltage (Vth).
You will nd quick instructions for starting measurements with an HP
4155A/4156A.
Key Conventions.
The following key conventions are used in this guide:
4Front-panel key5
Text shown like this represents a key physically located
on the HP 4155A/4156A.
Softkey
Text shown like this represents a softkey.
NNNNNNNNNNNNNNNNNNNNNNNNNNNNN
Screen Text
Bold
Italic
Text printed in this typeface indicates text displayed on
the HP 4155A/4156A.
Text shown like this indicates a term de ned in the
glossary.
Text shown like this referees to a related document, or is
used for emphasis.
Finding Further Information.
This guide book is written for beginners of HP 4155A/4156A. See the
following books for further information on the HP 4155A/4156A:
HP 4155A/4156A User's Guide (HP part number 04155-90000)
provides information on how to use the HP 4155A/4156A.
HP 4155A/4156A Programmer's Guide (HP part number 04155-90100)
provides information on how to control the HP 4155A/4156A with remote
commands.
HP Instrument BASIC Users Handbook (HP part number E2083-90000)
provides information on how to use HP Instrument BASIC, which is
programming language built-in the HP 4155A/4156A.
6
Getting Started
Getting Started
This guide introduces how to use HP 4155A Semiconductor Parameter
Analyzer and HP 4156A Precision Semiconductor Parameter Analyzer. Basic
operations of the HP 4155A/4156A are provided.
This guide consists of the following three sections:
Making a measurement: preparing for measurements and measuring a
sample device (MOS FET).
Analyzing a result: analyzing the results graphically and searching for the
threshold voltage (Vth) of the MOS FET.
If you have a problem: providing solutions to problems you may
encounter while using this guide.
Before going to the next page, make sure you have prepared the following:
HP 4155A or HP 4156A
HP 16442A test xture
Test device (n-channel MOS FET, enhancement type)
In this guide, the test device used is a Siliconix SD214DE.
This guide book assumes that you have already installed
your HP 4155A/4156A. If not, refer to \Installation" in the
HP 4155A/4156A User's Task Guide..
2
Making a Measurement
In this section, you learn how to execute the measurements with an
HP 4155A/4156A and to display the measurement results graphically.
Id-Vg measurement of a MOS FET is provided as an example. You learn
step-by-step how to perform this measurement.
You measure the device under test (DUT) by using the measurement circuit as
shown in the following diagram. SMU2 and SMU3 sweep the same voltage to
the gate and drain. SMU3 measures the drain current (Id). The source and
substrate are connected to circuit common.
You should get result similar to the following
gure. Gate voltage Vg (swept
p
fromp0 V to 2 V) is assigned to X axis, Id is assigned to Y1 axis, and
@
@V g Id is assigned to Y2 axis.
3
Getting Started
Making a Measurement
Step 1. Prepare for the measurement
Before executing measurement, con gure HP 4155A/4156A and accessories.
1. Make sure that the HP 4155A/4156A is o .
2. Connect the HP 16442A test xture to HP 4155A/4156A. See next gure.
3. If you use the keyboard, connect it to the HP 4155A/4156A.
When you use the HP 4155A, connect as follows:
HP 4155A
Intlk
SMU 1
SMU 2
SMU 3
SMU 4
(
(
(
(
(
cable
Interlock/LED
Triaxial
Triaxial
Triaxial
Triaxial
2
2
2
2
1
)
)
)
)
)
HP 16442A
HP 4155A
Intlk
VSU 1
SMU 1 (blue label)
VSU 2
SMU 2 (blue label)
VMU 1
SMU 3 (blue label)
VMU 2
(
(
(
(
cable
Coaxial
Coaxial
Coaxial
Coaxial
SMU 4 (blue label)
1
Interlock/LED cable: HP 16493J
2
Triaxial cable: HP 16493C. You do not need to connect SMU4 for this measurement.
3
Coaxial cable: HP 16493B. You do not need to connect VSUs and VMUs for this measurement.
Triaxial cable
3
3
3
3
)
)
)
)
HP 16442A
VSU 1
VSU 2
VMU 1
VMU 2
HP 16442A
Coaxial cable
Interlock/LED
cable
HP 4155A
Connecting HP 4155A to HP 16442A Test Fixture
4
Getting Started
Making a Measurement
When you use the HP 4156A, connect as follows:
HP 4156A
Intlk
SMU 1
SMU 2
SMU 3
(
(
(
(
cable
Interlock/LED
1
Kelvin triaxial
Kelvin triaxial
Kelvin triaxial
)
)
)
)
2
2
2
HP 16442A
HP 4156A
Intlk
VSU 1
SMU 1
VSU 2
SMU 2
VMU 1
SMU 3
VMU 2
(
(
(
(
cable
Coaxial
Coaxial
Coaxial
Coaxial
3
3
3
3
)
)
)
)
1
Interlock/LED cable: HP 16493J
2
Kelvin triaxial cable: HP part number 04155-61602
3
Coaxial cable: HP 16493B. You do not need to connect VSUs and VMUs for this measurement.
Kelvin triaxial cable
HP 16442A
VSU 1
VSU 2
VMU 1
VMU 2
HP 16442A
Coaxial cable
Interlock/LED
cable
HP 4156A
Connecting HP 4156A to HP 16442A Test Fixture
5
Getting Started
Making a Measurement
Step 2. Mount your DUT on the test xture
1. Select a suitable socket module for your DUT.
2. Mount the socket module on the test xture.
Socket module
HP 16442A Test Fixture
3. Mount your DUT on the socket module.
4. Make connections with four connection cables (miniature banana { pin
plug).
You make the following connections:
Source|SMU1
Gate|SMU2
Drain|SMU3
Substrate|SMU1
Both the source and substrate terminals are connected to SMU1.
5. After nishing connections, shut the lid of the test xture.
6
Getting Started
Making a Measurement
DUT
Connection cables
Gate
Drain
Source
Substrate
Wiring for HP 4155A
For this measurement by the HP 4156A, non-Kelvin connections are used. So,
connect only the force terminals as shown in the following gure:
DUT
Connection cables
Gate
Drain
Source
Substrate
Wiring for HP 4156A
7
Getting Started
Making a Measurement
Step 3. De ne the channel assignments
You set the connection information on the CHANNELS: CHANNEL
DEFINITION page.
1. Switch on the HP 4155A/4156A. Self-test starts.
2. After self-test is nished, make sure that CHANNELS: CHANNEL
DEFINITION page appears on the screen of the HP 4155A/4156A. If not,
press 4Chan5 front-panel key.
CHANNELS: CHANNEL DEFINITION page
MEASUREMENT MODE
Secondary
softkeys
Primary softkeys
3. Make sure that SWEEP is displayed in the MEASUREMENT MODE eld. If
not, select SWEEP secondary softkey in the MEASUREMENT MODE eld.
NNNNNNNNNNNNNNNNN
4. Set the connection information in the CHANNELS table as follows:
8
Getting Started
Making a Measurement
Action
To move the pointer,
on Front Panel
(5 4)5 4*5 4+5
use 4
area.
,
,
, or
(5 4)5
of MARKER/CURSOR
To move the cursor to edit in display area,
use 4
To enter \VS" in VNAME eld,
V
" S
press 4. 5 , 4+ 5 , then 4Enter5.
To enter \IS" in INAME eld,
press 4* 5 ,
To set \V" in the MODE eld,
To set \VAR1' " in FCTN eld,
To set \VAR1" in FCTN eld,
To disable a unit,
or
I
select
select
select
select
of Edit area.
? S4
+
FFFFFFFFFF
V
, then 4Enter5.
secondary softkey.
FFFFFFFFFFFFFFFF
VAR1'
FFFFFFFFFFFFF
VAR1
n
5n
secondary softkey.
secondary softkey.
FFFFFFFFFFFFFFFFFFFFFFFFFFFFFFFFFFF
DISABLE UNIT
secondary softkey.
on Keyboard
use 465, 475, 485, or 495.
use 4Backspace5 key.
type
VS, then
press 4Enter5.
type
IS, then
press 4Enter5.
press 4Shift5-4F15 keys.
press 4Shift5-4F45 keys.
press 4Shift5-4F25 keys.
press 4Shift5-4F75 keys.
9
Getting Started
Making a Measurement
Step 4. De ne the user functions
You de ne the user functions on the CHANNELS: USER FUNCTION
DEFINITION page.
1. Select USER FCTN primary softkey. The CHANNELS: USER FUNCTION
DEFINITION page appears.
2. Enter the user function information in the table as follows:
NNNNNNNNNNNNNNNNNNNNNNNNNNNNN
CHANNELS: USER FUNCTION DEFINITION page
You enter the following two user functions:
p
SQID = Id
DSQID =
@
@ Vg
SQID =
@
@ Vg
p
Id
Where, Id is drain current and Vg is gate voltage.
10
Getting Started
Making a Measurement
Action
on Front Panel
(5 4)5 4*5 4+5
use 4
To move the pointer,
area.
,
,
(5 4)5
To move the cursor to edit in display area,
use 4
To enter \SQID" in NAME eld,
press
or
S4
+
, or
on Keyboard
of MARKER/CURSOR
use 465, 475, 485, or 495.
use 4Backspace5 key.
of Edit area.
n
5 , Q 42 5' , I 4* 5? , D 4/ 5; , then
type
SQID, then
type
SQRT(ID), then
press 4Enter5.
4Enter5.
To enter \SQRT(ID)"
1
in DEFINITION
eld,
DEFINITION eld,
2
S4
+
j
n
D 4 5; , S 4 5 , Q 4 5' , I 4 5? , D 4 5; ,
/
+
2
*
/
then 4Enter5.
To enter \DSQID " in NAME eld,
To enter \DIFF(SQID,VG)"
n
5 , Q 42 5' , R 43 5 , T 4p 5% , 4 5
A
[ FFFFFFF B
]
(blue key), 4( 5 , ID , 4) 5 , then 4Enter5.
press
press
in
f
press
4Enter5.
type
DSQID, then
press 4Enter5.
f
D 4 5; , I 4 5? , F 4 5 , F 4 5 , 4 5 (blue type DIFF(SQID,VG), then press
/
*
7
7
A
[
S
Q
'
4Enter5.
key), 4( 5 , 4 5 (blue key), 4+ 5 , 42 5 ,
I 4 5? , D 4 5; , 4 5 (blue key), X 4 5 , FFFFFFF
VG ,
press
*
/
n
,
>
B 4 5] , then 4
)
Enter5.
To disable a user function,
select
FFFFFFFFFFFFFFFFFFFFFFFFFFFFFFFFFFFFFFFFFFFFFF
DISABLE FUNCTION
secondary softkey. press 4Shift5-4F75 key.
p ) is de ned by \SQRT" built-in function.
1
Square root operator (
2
Partial di erence ( @
@ ) is de ned by \DIFF" built-in function.
11
Getting Started
Making a Measurement
Step 5. Set up the measurement parameters
You set the output parameters on the MEASURE: SWEEP SETUP page.
1. Press 4Meas5 front-panel key. The MEASURE: SWEEP SETUP page appears.
MEASURE: SWEEP SETUP page
VAR1'
VAR1 information
2. Set the VAR1 information as follows:
12
information
Getting Started
Making a Measurement
Drain voltage sweeps from 0 V to 2 V with 10 mV step. The current
compliance is set to 100 mA.
Action
on Front Panel
(5 4)5 4*5 4+5
use 4
To move the pointer,
To set \SINGLE " in SWEEP MODE eld,
select
To set \LINEAR " in LIN/LOG eld,
select
To enter \2.000
press
To enter \10.00
V" in
STOP eld,
mV" in
STEP eld,
,
,
FFFFFFFFFFFFFFFFFF
SINGLE
FFFFFFFFFFFFFFFFFF
LINEAR
, or
.
on Keyboard
use 465, 475, 485, or 495.
secondary softkey.
press 4Shift5-4F15 keys.
secondary softkey.
press 4Shift5-4F15 keys.
Q 4 5' , then 4
2
Enter5.
type
P
$ U
# E
@
press 41 5 , 40 5 , 4m 5 , then 4Enter5. type
2,
then press 4Enter5.
10m, then
press 4Enter5.
3. Set the VAR1' information as follows:
To force the same voltage to the drain and gate, set RATIO = 1 and
OFFSET = 0. Because VAR1' is de ned as follows:
(V AR1 output) = RAT IO 2 (V AR1 output) + OF F SET
0
Action
To enter \0.000
V" in
on Front Panel
OFFSET eld,
To enter \1.000 " in RATIO eld,
on Keyboard
U
#
press 40 5 , then 4Enter5.
type
0,
then press 4Enter5.
P
$
press 41 5 , then 4Enter5.
type
1,
then press 4Enter5.
13
Getting Started
Making a Measurement
Step 6. Set up the results display
You set the results display information on the DISPLAY: DISPLAY SETUP page.
1. Press 4Display5 front-panel key. The DISPLAY: DISPLAY SETUP page
appears.
DISPLAY: DISPLAY SETUP page
DISPLAY MODE
2. Make sure GRAPHICS is displayed in the DISPLAY MODE eld. If not,
select GRAPHIC secondary softkey in the DISPLAY MODE eld.
NNNNNNNNNNNNNNNNNNNNNNN
3. Set the X-, Y1-, and Y2-axes information as follows:
14
Getting Started
Making a Measurement
Action
on Front Panel
To enter \VG" in NAME eld,
select
FFFFFFFFFF
VG
select
To enter \0.00000
in MIN eld,
press
in MAX eld,
Q
'
press 42 5 , then 4Enter5.
To enter \2.00000
V"
To enter \SQID" in NAME eld,
select
press 4Shift5-4F35 keys.
secondary softkey.
FFFFFFFFFFFFFFFFFF
To set \LINEAR " in SCALE eld,
V"
on Keyboard
LINEAR
press 4Shift5-4F15 keys.
secondary softkey.
U 4 5#, then 4
0
Enter5.
FFFFFFFFFFFFFFFFFFFFFFFF
MORE 1/2 ,
then
FFFFFFFFFFFFF
SQID
secondary
A"
in MIN eld,
press
U 4 5#, then 4
0
Enter5.
To enter \100.000mA" in MAX eld,
P
$ U
# U
# E
@
press 41 5 , 40 5 , 40 5 , 4m 5 , then
4Enter5.
To enter \DSQID " in NAME eld,
select
FFFFFFFFFFFFFFFFFFFFFFFF
MORE 1/2 ,
softkeys.
0,
then press 4Enter5.
type
2,
then press 4Enter5.
press 4Shift5-4F75 keys, then
4Shift5-4F35 keys.
softkeys.
To enter \0.00000
type
then
FFFFFFFFFFFFFFFF
DSQID
secondary
type
0,
type
100m, then
then press 4Enter5.
press 4Enter5.
press 4Shift5-4F75 keys, then
4Shift5-4F45 keys.
15
Getting Started
Making a Measurement
Step 7. Execute the measurement
Press 4Single5 front-panel key to execute the measurement.
[Single] key
You should get measurement results similar to the following gure.
16
Analyzing the Results
In the previous section, you measured the drain current (Id) while performing
a synchronous sweep of the gate voltage (Vg) and drain voltage (Vd). And the
measurement results were drawn graphically on the screen.
In this section, you analyze the measurement results on the graph and search
threshold voltage (Vth) of the DUT.
The basic algorithm to search for the threshold voltage is:
p
p
1. Assign gate voltage (Vg) to X-axis, Id to Y1-axis, and @V@ g Id to Y2-axis.
p
2. Search for the maximum value of @V@ g Id curve, which is also the point
p
where the gradient of Id curve is maximum.
p
3. Draw a tangent line to the point where the gradient of Id curve is
maximum.
4. Read the X-coordinate value where the tangent line crosses the X-axis.
This value is threshold value (Vth).
Tangent
Vth
17
Getting Started
Analyzing the Results
Find the threshold voltage
1. Make sure that MARKER/CURSOR primary softkey is highlighted. If not,
select the MARKER/CURSOR primary softkey.
NNNNNNNNNNNNNNNNNNNNNNNNNNNNNNNNNNNNNNNNN
NNNNNNNNNNNNNNNNNNNNNNNNNNNNNNNNNNNNNNNNN
MARKER/CURSOR primary softkey
18
Getting Started
Analyzing the Results
NNNNNNNNNNNNNNNNNNNN
2. Select MARKER secondary softkey so that ON appears on the softkey.
The MARKER softkey is highlighted, and the markers appears on the
measurement curve.
NNNNNNNNNNNNNNNNNNNN
MARKER
secondary
softkey
Marker
NNNNNNNNNNNNNN
3. Select AXIS primary softkey so that Y2 appears on the softkey. The Y2
axis is highlighted.
AXIS primary softkey
19
Getting Started
Analyzing the Results
NNNNNNNNNNNNNNNNNNNNNNNNNNNNNNNNNNNNNNNNNNNN
4. Select MARKER MIN/MAX secondary softkey until the * marker moves to
the maximum point on the Y2 curve. The o marker (on Y1 curve) also
moves to same X-axis point, which is maximum gradient of Y1 curve.
MARKER
MIN/MAX
secondary
softkey
Marker *
Marker o
NNNNNNNNNNNNNN
5. Select AXIS primary softkey so that Y1 appears on the softkey. The Y1
axis is highlighted.
Y1 axis
AXIS primary softkey
20
Getting Started
Analyzing the Results
NNNNNNNNNNNNNN
6. Select LINE primary softkey. The secondary softkey menu changes.
Secondary
softkeys
LINE primary softkey
NNNNNNNNNNNNNN
7. Select LINE secondary softkey so that ON appears on the softkey. The
LINE softkey is highlighted, and a vertical line appears in the center of
the plotting area.
NNNNNNNNNNNNNN
LINE
secondary
softkey
Line
21
Getting Started
Analyzing the Results
NNNNNNNNNNNNNNNNNNNNNNNNNNNNNNNNNNNNNN
8. Select TANGENT MODE secondary softkey. The line becomes tangent to the
o marker of the Y1 curve.
A tangent
TANGENT
MODE
Marker o
secondary
softkey
Threshold voltage (Vth)
Read the X-axis intercept value of the tangent line. This is the threshold
voltage (Vth). In the example above, Vth is 935 mV.
22
If You Have a Problem
This section describes how to solve the following unexpected problems:
If HP 4155A/4156A cannot be powered on
If display page does not appear after applying power
If HP 16442A test xture is not stable
23
Getting Started
If You Have a Problem
If HP 4155A/4156A cannot be powered on
Check that the power cable is rmly connected to HP 4155A/4156A and to
power outlet.
Check that the front-panel LINE switch is on.
Check that the voltage selector switch is set properly.
The voltage selector switch is located in the lower-right corner of the rear
panel. The following table shows the line voltage selector setting.
Line Voltage Position
84-124 Vac
left
200-248 Vac
right
Check that the fuse is good.
The fuse holders located in the lower-right corner of the rear panel.
1. Turn the HP 4155A/4156A o and disconnect the power cable from the
power outlet.
2. Unscrew the fuse holder on the rear panel.
3. Inspect that the correct fuse is installed, and wire inside the fuse is not
broken by using a rester.
Line
Fuse Type
HP Part Number
110/120 Vac Time-delay type 8A, 250 Vac
2110-0383
220/240 Vac Time-delay type 4A, 250 Vac
2110-0014
4. Replace the fuse, if necessary. Then, screw in the fuse holder.
5. Turn the HP 4155A/4156A on.
24
Getting Started
If You Have a Problem
If display page does not appear after applying power
If HP 41501 is installed, rst turn on the HP 41501, then turn on
HP 4155A/4156A.
If the self-test fails, see \If You Have a Problem" in the HP 4155A/4156A
User's Task Guide.
If HP 16442A test xture is not stable
Install stabilizers on the HP 16442A.
For this procedure, see \Installation" in the HP 4155A/4156A User's Task
Guide.
If you use the HP 16442A test xture with HP 16440A selector or
HP 16441A R-BOX, attach HP 16442A to HP 16440A or HP 16441A by
using plates and screws.
For this procedure, see \Installation" in the HP 4155A/4156A User's Task
Guide.
25
Getting Started
If You Have a Problem
Source Exif Data:
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