MEMS Sensors & Sensing Elements Catalog

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Cat.No.S47E-1
MEMS Sensors &
Sensing Elements
Accelerometers
Inclinometers
Murata is the global market leader in low-g acceleration sensors for automotive applications.
The extensive accelerometer product range includes high performance analog and digital
accelerometers for both safety critical automotive and industrial applications.
Murata accelerometers are based on the company’s proprietary 3D MEMS technology and offer a
number of excellent product features for the most demanding applications. The sensing element and
the measuring ASIC are assembled in a dual-in-line or dual fl at lead plastic package with pins for the
surface mount and re-fl ow soldering. They are environmentally protected with silicone gel, resulting in
excellent performance and reliability in humid environments and at temperature cycling. In addition, the
robust sensing element design with over damped frequency response enables excellent performance
even in harsh and vibrating environments.
Murata inclination sensors are an optimum choice for high accuracy leveling and inclination
measurement instruments. The highest accuracy is available with the SCA103T series which uses a
differential measurement principle to compensate for all common mode error and noise effects.
With the best shock durability available on the MEMS market, Murata inclinometers provide trouble-free
measurements in moving machines, vehicles, airplanes, construction machines and handheld devices.
Series
No.
of
Axes Range
Supply
Voltage
Temperature
Range Sensitivity
Signal
Bandwidth Output Type
Typical
Applications
SCA600 1 ±1.5 to ±12.3g 5V -40 to +125 °C 0.15 to 2V/g 50 to 400Hz Analog
Automotive safety critical
applications, IMU,
Industrial applications
SCA800 1 ±2g 3.3V -40 to +125 °C 900LSB/g 50Hz Digital/SPI
SCA1000 2 ±1.7g
±4g
5V -40 to +125 °C 1.2V/g
0.55V/g
50Hz
115Hz
Analog/Digital
SCA2100 2 ±2g 3.3V -40 to +125 °C 900LSB/g 45Hz Digital/SPI
SCA3100 3 ±2g
±6g
3.3V -40 to +125 °C 900LSB/g
650LSB/g
45Hz Digital/SPI
SCA100T 2 ±12g 5V -40 to +125 °C 0.17V/g 400Hz Analog/Digital Automotive security applications,
Industrial applications
For more information, please refer to the product datasheets available online at www.murata.com
Series
No.
of
Axes Range
Supply
Voltage
Temperature
Range Sensitivity
Signal
Bandwidth Output Type
Typical
Applications
SCA100T 2 ±30°,±0.5g
±90°,±1g
5V -40 to +125 °C 4V/g
2V/g
18Hz Analog/Digital
Levelling instruments
Moving machines
Rotating lasers
Construction levels
SCA103T 1 ±15°,±0.26g
±30°,±0.5g
5V -40 to +125 °C 16V/g
8V/g
18Hz Analog/Digital
SCA61T 1 ±30°,±0.5g
±90°,±1g
5V -40 to +125 °C 4V/g
2V/g
18Hz Analog/Digital
SCA830 1 ±90°, ±1g 3.3V -40 to +125 °C 32000 LSB/g 6.25Hz Digital/SPI
Murata Electronics Oy’s product range also includes inclination modules and sub-assemblies.
For more information, please refer to the product datasheets available online at www.murata.com
S47E.pdf
Jun.12,2015
!Note • Please read rating and !CAUTION (for storage, operating, rating, soldering, mounting and handling) in this catalog to prevent smoking and/or burning, etc.
• This catalog has only typical specifi cations. Therefore, please approve our product specifi cations or transact the approval sheet for product specifi cations before ordering.
Gyroscopes
Pressure Sensing Elements
Murata Electronics Oy develops and manufactures gyroscope components based on the company’s
proven 3D MEMS technology and highly integrated electronics.
Industrial gyros offer a performance level that typically has been available only for expensive module
products. The sensing elements and measuring circuitry are assembled into a pre-molded plastic dual-
in-line (DIL) package, protected with silicon gel and covered with a stainless steel lid. All products are
RoHS compatible and suitable for lead-free refl ow soldering.
Murata SCB10H capacitive absolute pressure sensing elements have been designed for applications
that require a small size and ultra low power consumption. The SCB10H pressure sensing elements are
ideal for implantable medical devices thanks to their inherent accuracy, reliability, small size and enabled
low power consumption.
The SCB10H pressure sensing element allows the possibility for volume OEM customers to integrate
pressure measurement functions in an optimal way into their products.
Series No. of Axes Range
Supply
Voltage
Temperature
Range Sensitivity
Signal
Banwidth Output Type
Typical
Applications
SCC1300 1-axis gyro
3-axis
accelerometer
±100°/s,±2.0g
±300°/s,±6.0g
5V analog
3.3V digital
-40 to +125 °C 50LSB/(°/s),
1800LSB/g
18LSB/(°/s),
650LSB/g
50Hz,45Hz Digital/SPI
Platform stabilization
Motion analysis and
control
Guidance and
navigation systems
SCR1100 1-axis gyro ±100°/s
±300°/s
5V analog
3.3V digital
-40 to +125 °C 50LSB/(°/s)
18LSB/(°/s)
50Hz Digital/SPI
For more information, please refer to the product datasheets available online at www.murata.com
Parameter Unit B012 B080 B250 Typical Applications
Measuring range kPa 30 to 120 100 to 800 100 to 2500
Medical devices
Flow meters
Barometers
Altimeters
Capacitance at min. pressure pF 7.8 7.5 7.3
Capacitance at max. pressure pF 11.8 13.4 13.9
Capacitance dynamics pF 4.0 5.9 6.6
Sensitivity fF/kPa 55 (@100 kPa) 6.2 (@350 kPa) 1.3 (@100 kPa)
6.5 (@2500 kPa)
For more information, please refer to the product datasheets available online at www.murata.com
EU RoHS Compliant
s All the products in this catalog comply with EU RoHS.
s EU RoHS is "the European Directive 2011/65/EU on the Restriction of the Use
of Certain Hazardous Substances in Electrical and Electronic Equipment."
s For more details, please refer to our website 'Murata's Approach for EU RoHS'
(http://www.murata.com/en-eu/support/compliance/rohs).
S47E.pdf
Jun.12,2015
!Note • Please read rating and !CAUTION (for storage, operating, rating, soldering, mounting and handling) in this catalog to prevent smoking and/or burning, etc.
• This catalog has only typical specifi cations. Therefore, please approve our product specifi cations or transact the approval sheet for product specifi cations before ordering.
Murata Manufacturing Co., Ltd.
www.murata.com
Note
1 Export Control
For customers outside Japan:
No Murata products should be used or
sold, through any channels, for use in the
design, development, production, utilization,
maintenance or operation of, or otherwise
contribution to (1) any weapons (Weapons of
Mass Destruction [nuclear, chemical or biological
weapons or missiles] or conventional weapons)
or (2) goods or systems specially designed or
intended for military end-use or utilization by
military end-users.
For customers in Japan:
For products which are controlled items subject
to the “Foreign Exchange and Foreign Trade Law”
of Japan, the export license specifi ed by the law
is required for export.
2 Please contact our sales representatives or
product engineers before using the products in
this catalog for the applications listed below,
which require especially high reliability for the
prevention of defects which might directly
damage a third party’s life, body or property, or
when one of our products is intended for use
in applications other than those specified in
this catalog.
1 Aircra equipment
2 Aerospace equipment
3 Undersea equipment
4 Power plant equipment
5 Medical equipment
6 Transportation equipment (vehicles, trains,
ships, etc.)
7 Tra c signal equipment
8 Disaster prevention / crime prevention
equipment
9 Data-processing equipment
10 Application of similar complexity and/or
reliability requirements to the applications
listed above
3 Product specifi cations in this catalog are as of
December 2013. They are subject to change or
our products in it may be discontinued without
advance notice. Please check with our sales
representatives or product engineers before
ordering. If there are any questions, please contact
our sales representatives or product engineers.
4 Please read rating and CAUTION (for storage,
operating, rating, soldering, mounting and
handling) in this catalog to prevent smoking
and/or burning, etc.
5 This catalog has only typical specifi cations.
Therefore, please approve our product
specifi cations or transact the approval sheet
for product specifi cations before ordering.
6 Please note that unless otherwise specifi ed, we
shall assume no responsibility whatsoever for any
confl ict or dispute that may occur in connection
with the e ect of our and/or a third party’s
intellectual property rights and other related
rights in consideration of your use of our products
and/or information described or contained in our
catalogs. In this connection, no representation
shall be made to the e ect that any third parties
are authorized to use the rights mentioned above
under licenses without our consent.
7 No ozone depleting substances (ODS) under the
Montreal Protocol are used in our manufacturing
process.
Global Locations
For details please visit www.murata.com

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