PM496BE_K Tmh521tmu

User Manual: tmh521tmu

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Turbomolecular Drag Pumps

With Electronic Drive Unit TC 600

PM 0496 BE/K (0503)

TMH 521 P

TMU 521 P

Betriebsanleitung • Operating Instructions

Index

Page Page

1. Safety Instructions .................................. 3

1.1. For Your Orientation........................................................... 3

1.2. Pictogram Definitions........................................................ 3

2. Understanding The Pumps

TMH 521 P/TMU 521 P ............................. 4

2.1. Main Features..................................................................... 4

Proper Use .......................................................................... 4

Improper Use ...................................................................... 5

2.2. Differences Between The Pump Types.......................... 5

2.3. Scope of Delivery............................................................... 5

3. Installation ............................................... 6

3.1. Preparations For Installation............................................ 6

3.2. Installing The Pump,

Connecting The High Vacuum Side ................................ 6

3.3. Connecting The Fore-Vacuum Side ................................ 9

3.4. Connecting The Cooling Unit.......................................... 10

3.5. Connecting The Venting Valve....................................... 10

3.6. Connecting The Casing Heating Unit............................ 10

3.7. Connecting The Sealing Gas Valve............................... 10

3.8. Connecting The Electronic Drive Unit TC 600.............. 11

3.9. Installing The Power Supply .......................................... 11

3.10. Connecting The Remote Control Unit ........................... 12

3.11. Connecting The Serial Interface RS 485 ...................... 13

Connection ........................................................................ 13

Connecting The RS 485 ................................................... 13

3.12. Connections Diagram...................................................... 14

4. Operations .............................................. 15

4.1. Before Switching ON....................................................... 15

4.2. Switching ON.................................................................... 15

4.3. Switching OFF And Venting............................................ 15

4.4. Gas Type Dependent Operations .................................. 16

4.5. Shutting Down For Longer Periods ............................... 16

4.6. Operations With The DCU 001, DCU 300

or HPU 001......................................................................... 17

4.7. Operations With The Remote Control Unit................... 17

Venting Release (Optional)............................................. 17

Motor, Turbopump ........................................................... 17

Pumping Station ............................................................... 17

Heating/Reset ................................................................... 17

Standby.............................................................................. 17

Rotation Speed Setting Mode Via

Input PWM ........................................................................ 18

Switching Outputs............................................................ 18

5. Monitoring Operations.......................... 19

5.1. Operations Display Via LED............................................ 19

5.2. Turbopump Temperature Management....................... 19

6. What To Do In Case Of

Breakdowns ? ........................................ 20

7. Maintenance/Replacement .................. 21

7.1. Replacing The Lubricant Reservoir............................... 21

7.2. Replacing The Electronic Drive Unit TC 600 .................22

8. Service .................................................... 23

9. Technical Data ....................................... 24

9.1. Dimensions Diagram ....................................................... 25

10. Spare Parts ............................................. 28

11. Accessories............................................ 29

Declaration of Contamination..................... 30

Manufacturer’s Declaration .......... (last page)

PPlleeaassee nnoottee::Current operating instructions are available via

www.pfeiffer-vacuum.net.

Warning, danger of burns from touching hot

parts.

Warning, danger of personal injury.

Caution, danger of damage to the pump or to

the system.

Warning, danger of injury from rotating parts.

Please note, attention to particularly important

information on the product, handling the

product or to a particular part of the

documentation.

☞

PLEASE NOTE

WARNING

CAUTION

WARNING

☞Read and follow all instructions in this manual.

☞Inform yourself regarding:

– Hazards which can be caused by the pump;

– Hazards which can be caused by your system.

– Hazards which can be caused by the media being

pumped.

☞Avoid exposing any part of the body to vacuum.

☞Observe the safety and accident prevention regulations.

☞Regularly check that all accident prevention measures are

being complied with.

☞Do not operate the turbopump with open high vacuum

flange.

☞Do not carry out any unauthorised conversions or

alterations to the turbopump with TC 600.

☞When returning the turbopump observe the shipping

instructions.

☞The turbopump must be anchored in accordance with the

installation instructions.

☞Do not disconnect the plug between the TC 600 and

accessory components during operations.

☞Disconnect the voltage supply for the TC 600 before

opening the turbopump.

☞When working on the turbopump, the high vacuum flange

should only be opened once the rotor is at rest.

☞When using sealing gas, the pressure in the hose connec-

tion should be limited to 2 bar via the overpressure valve.

☞If a heater is in use temperatures of up to 120 °C can be

present in the area of the high vacuum flange. Take care to

avoid burns !

☞During operations, temperatures of up to 65 °C can arise in

the lower part of the turbopump. Take care to avoid burns !

☞Keep leads and cables well away from hot

surfaces ( > 70 °C).

☞Operate the turbopump with TC 600 only in conjunction

with the relevant power supply (accessory).

☞Without the cover plate for the TC 600 the unit has been

accredited protection class IP 30. When the unit is

operated in environments which require other protection

classes, the necessary measures must be taken. When the

turbopump is water cooled a cover plate for the TC 600

must be installed by an electrical specialist, in order to

attain protection class IP 54 (Sec. 11 Accessories).

☞The mains connection must be subject to a safe

connection to the PE (protection class 1).

☞If the turbopump and the TC 600 are operated

independently of each other (only permissible with the

agreement of the manufacturer) the turbopump must be

connected to the PE.

☞The turbopump and the TC 600 must only be

disconnected from each other when the turbopump is

completely at rest and the TCP 600 has been disconnected

from the power supply.

☞The cause of any operating voltage leakage to earth

(red LED flashes) must be eliminated to avoid the danger of an

electric shock.

☞The housing screws do not loosen, pull tight,

remove or replace, since otherwise the guarantee for the

security of the turbopump expires.

Modifications reserved.

1. Safety Instructions

1.1. For Your Orientation

Instruction in the text

➡Working instruction: here, you have to do something.

Symbols used

The following symbols are used throughout in all illustrations.

High vacuum flange

Fore-vacuum flange

Venting connection

Air cooling

Electric connection

Sealing gas connection

Abbreviations used

DCU = Display and operating unit

HPU = Display and operating unit

TC = Electronic drive unit, turbopump

TPS = Power supply

Position numbers

The same pump and accessory parts have the same position

numbers in all illustrations.

1.2. Pictogram Definitions

2.1. Main Features

Turbopumps TMH 521 P/TMU 521 P with the TC 600 form an

unit. Voltage is supplied by the power supply (see Section 11.

Accessories).

On delivery, the pumps have been set up for

operations in remote mode. Remote plug 8d

should therefore be disconnected if operations

with the DCU 001, DCU 300 or HPU 001 are

required.

☞

PLEASE NOTE

Cooling

Water cooling or air cooling is required (”Accessories”).

Integrated protective measures against excess temperatures:

The Electronic Drive Unit TC 600 reduces

the rotor rotation speed.

Bearings

High vacuum side: wear free permanent magnetic bearing.

Fore-vacuum side: oil circulatory lubricated ball bearing

with ceramic balls.

2. Understanding The Pumps TMH 521 P/TMU 521 P

Ambient conditions

The turbomolecular pump needs to be installed in compliance

with the following ambient conditions:

Installation location: protected against the weather

(rooms within buildings)

Temperature: +5 °C to +40 °C

Relative humidity

of the air: max. 80 % at T ≤31 °C

up to max. 50% at T ≤40 °C

Air pressure: 77 kPa - 106 kPa

Installation altitude: 2000 m max.

Pollution degree: 2

Overvoltage category: II

Connection voltage: 72 VDC ±5%

Proper Use

– The Turbomolecular Pumps TMH 521 P/TMU 521 P may

only be used for the purpose of generating vacuum.

– The turbopumps may only be used to pump those media

against which they are chemically resistant. For other

media the operator is required to qualify the pumps for the

processes involved.

– If the process produces dust, the maintenance intervals

must be specified accordingly and sealing gas must be

used.

If the pump is to be operated with more than 50% of the

permissible gas load then sealing gas should be used to

ensure rotor cooling.

– The turbopump must be connected to a backing pump in

accordance with Section 3.3.

– Only Pfeiffer Vacuum power supplies may be used to

operate the TC 600. The use of other power supplies

requires the express agreement of the manufacturer and

equalisation with the valid specification.

– Without the cover plate for the TC 600 the pumps may only

be operated providing the ambient conditions in

compliance with Protection Type IP 30 are observed.

Turbomolecular Drag Pump TMH 521 P/TMU 521 P

1 High vacuum flange

2 Fore-vacuum flange

4 Venting screw

8 Electronic Drive Unit TC 600

8d Remote plug

248d 8

Feature TMH 521 P TMU 521 P

High vacuum flange ISO-K CF-F

High vacuum seal Elastomer Metal

Attainable final < 1 · 10-7 mbar < 5 · 10-10 mbar

pressure (without baking-out) (with baking-out)

Abbreviations on the type plate of the pump

Suffix ”P”: Pumps with the designation TMH/TMU 521 P

have been designed for the connection

of purge gas (see Section 3.7.).

Improper Use

The following is regarded, inter alia, as improper:

– The pumping of explosive or corrosive gases.

– Operating the pumps in areas where there is a danger of

explosion.

– Operating the pumps in areas where there is a danger of

radioactivity.

– The pumping of gases and vapours which attack the mate-

rials of the pumps.

– The pumping of corrosive gases without sealing gas.

– The pumping of condensating vapours.

– Operations involving impermissibly high levels of gas

loads.

– Operations with impermissibly high fore-vacuum pressure.

– Operations with improper gas modes.

– Operations involving too high levels of heat radiation

power (see Section 9. Technical Data).

– Venting with rates higher than in Section 4.3. stated.

– Operating the pump without the cover plate for the TC 600

in environments which require a protection class superior

to IP 30.

Installation of the pumps in systems where the turbomole-

cular pumps are subjected to impact-like stress and vibra-

tions or the effect of periodically occurring forces.

– The use of other power units or accessories which are not

named in this manual or which have not been agreed by

the manufacturer.

– The connection to power units with earthing of a direct

voltage pole.

The turbomolecular pumps and flange connections must not

be used to tread on when climbing onto the system.

Improper use will cause all claims for liability and guarantees

to be forfeited.

2.2. Differences Between The Pump Types

2.3. Scope Of Delivery

The turbopump scope of delivery includes:

– protective covering for the high vacuum flange and the

fore-vacuum flange.

The 4 screws at the High vacuum flange are not

sufficient for the attachment of the pump at a

recipient (see Section 3.).

CAUTION

3. Installation

3.1. Preparations For Installation

Do not carry out any unauthorised conversions

or alterations to the turbopump.

In case the rotor blocks suddenly, torque levels

up to 66669900 NNmm can occur which need to be

absorbed by the system and the high vacuum

flange.

– If the turbopump is to be operated with the DCU 001 or

HPU 001, the remote plug 8d (please see Section 2.1.) on

the TC 600 should be disconnected and then proceed in

accordance with the corresponding operating instructions.

– The maximum permissible rotor temperature of the pump is

90 °C. If the vacuum chamber or parts in the vacuum

chamber are heated, the values stated in the technical

data relating to the level of heat which may be radiated

into the pump must not be exceeded. If necessary, suitable

shielding must be fitted in the vacuum chamber before the

turbopump (constructional suggestions available on

request).

_ The temperature of the high vacuum flange must not

exceed 120 °C.

– Only remove the blank flange from the high and fore-

vacuum side immediately before connection.

– On Turbopumps TMH 521 P/TMU 521 P the lubricant

reservoir is already fitted and filled.

– Where magnetic fields of > 5.0 mT are involved suitable

shielding must be provided (available on request).

– If the pump is baked out, the heating sleeve and the body

of the pump must be insulated to prevent burns from

accidental contact.

– For operating the pump air or water cooling is necessary.

The person responsible for commissioning

must ensure that the installation is carried out

in accordance with the legal regulations and

the pertinent industrial standards.

☞

PLEASE NOTE

WARNING

3.2. Installing The Pump,

Connecting The High Vacuum Side

The utmost cleanliness must be observed when

fitting all high vacuum parts. Unclean

components prolong the pumping time.

All installations units for the flange must be with

installation grease-free, dust free and drying.

UUssee aa PPffeeiiffffeerr VVaaccuuuumm sspplliinntteerr sshhiieelldd oorr pprrootteeccttiivvee mmeesshh

The use of a Pfeiffer Vacuum splinter shield or protective

mesh in the high vacuum flange protects the turbopump

against foreign bodies coming from the vacuum chamber but

does reduce the volume flow rate as followed:

Connecting via bellows or Pfeiffer Vacuum vibration

compensator (Accessory)

The high vacuum side can be flanged onto the vacuum cham-

ber either directly or via a bellows or a vibration compensator

(please see Sec. 11. ”Accessories”).

When using a Pfeiffer Vacuum vibration compensator,

suitable securing needs to be introduced capable of

absorbing the energy of the rotor should it suddenly block,

since the vibration compensator itself alone cannot absorb

the occurring forces. Please consult the manufacturer.

The maximum permissible temperature at the

vibration compensator is 100 °C.

CAUTION

☞

PLEASE NOTE

Reduced volume flow rate in %

HH22HHeeNN22

Splinter shield DN 100 9 13 22

DN 160 5 7 16

Protective mesh DN 100 2 3 6

DN 160 1 2 4

Installing the high vacuum flange

– In case the rotor blocks suddenly, torque levels up to

66669900 NNmm can occur which need to be absorbed by the

system and the high vacuum flange.

– For installing the turbomolecular pumps to the high

vacuum flange, the components listed in the following

mmuussttbe used exclusively. Otherwise the turbomolecular

pump may twist or tear off. The components for installing

the turbomolecular pumps are special designs from

Pfeiffer Vacuum

– The minimum strength of 170 N/mm2of the flange material

needs to be observed.

Installation is done as follows.

To reliably prevent the pump from twisting if the

rotor suddenly blocks, it is absolutely prohibited

to secure a pump with an ISO-K flange on a

vacuum chamber with an ISO-F flange or vice

versa. Both flanges mmuusstt bbeeof the same type.

Installation with different flange types is carried

out at the user's own risk. Pfeiffer Vacuum shall

assume no liability whatsoever for any damage

or injuries resulting from this kind of

attachment.

WARNING

ISO-F to an ISO-F flange

For installing there exist three variants.

VVaarriiaanntt 11 -- HHeexxaaggoonn ssccrreeww wwiitthh bblliinndd hhoollee

CCoonnnneeccttiioonn nnoommiinnaall

--DDeessiiggnnaattiioonnOOrrddeerr--nnuummbbeerr

ddiiaammeetteerr

DN 100 ISO-K/ Centering ring (coated) PM 016 210 AU

DN 100 ISO-K

Centering ring (coated) PM 016 211 AU

with splinter shield

Centering ring (coated) PM 016 212 AU

with protective mesher

Bracket screws PF 300 110 -T

(1166pieces must be used)

DN 160 ISO-K/ Centering ring (coated) PM 016 216 AU

DN 160 ISO-K

Centering ring (coated) PM 016 217 AU

with splinter shield

Centering ring (coated) PM 016 218 AU

with protective mesher

Bracket screws PF 300 110 -T

(1144pieces must be used)

CCoonnnneeccttiioonn nnoommiinnaall

--DDeessiiggnnaattiioonnOOrrddeerr--nnuummbbeerr

ddiiaammeetteerr

DN 100 ISO-F Centering ring (coated) PM 016 210 AU

Centering ring (coated) PM 016 211 AU

with splinter shield

Centering ring (coated) PM 016 212 AU

with protective mesher

Hexagon screws with N 3024 428 1C

washer N 3502 422 4P

(88pieces each must be used)

DN 160 ISO-K/ Centering ring (coated) PM 016 216 AU

DN 160 ISO-K

Centering ring (coated) PM 016 217 AU

mit Splitterschutz

Centering ring (coated) PM 016 218 AU

mit Schutzgitter

Hexagon screws N 3024 479 1C

(88pieces must be used)

ISO-K to an ISO-K flange

For installation, the following components are available.

D oder/or E B

Bracket screw

A ISO-K flange

B Bracket screw

C Centering ring, coated

D Splinter shield

E Protective mesh

➡The clamps need to be tightened crosswise in three steps.

Tightening torque: 5 Nm, 15 Nm, 25 ±2 Nm

1) DN 100 ISO-F with washer

➡For a flange material having a strength of > 270 N/mm2and

with a blind hole the hexagon screw 1,5 d must be screwed

in. The hexagon screws must be tightened crosswise in

three steps.

Tightening torque:

DN 100 ISO-F: 5 Nm, 12 Nm, 22 ±2 Nm

DN 160 ISO-F: 10 Nm, 20 Nm, 38 ±3 Nm

D oder/or E

1.5d

Hexagon srew with blind hole

A ISO-F flange

B Hexagon screw1)

C Centering ring, coated

D Splinter shield

E Protective mesh

CCoonnnneeccttiioonn nnoommiinnaall

--DDeessiiggnnaattiioonnOOrrddeerr--nnuummbbeerr

ddiiaammeetteerr

DN 100 ISO-F Centering ring (coated) PM 016 210 AU

Centering ring (coated) PM 016 211 AU

with splinter shield

Centering ring (coated) PM 016 212 AU

with protective mesher

Stud screws N 3169 428 2C

(88pieces must be used)

Nuts N 3433 047 8P

with washer N 3502 422 4P

(88pieces each must be used)

DN 160 ISO-F Centering ring (coated) PM 016 216 AU

Centering ring (coated) PM 016 217 AU

with splinter shield

Centering ring (coated) PM 016 218 AU

with protective mesher

Stud screws N 3169 485 2C

(88pieces must be used)

Nuts (88pieces must be used) N 3433 051 8P

D oder/or E

2.5d

Stud screw with blind hole

A ISO-F flange

B Stud screw with nut

C Centering ring, coated

D Splinter shield

E Protective mesh

➡For a flange material having a strength of > 170 N/mm2and

a stud screw with clearance hole, the nuts must be

tightened crosswise in three steps.

Tightening torque:

DN 100 ISO-F: 5 Nm, 12 Nm, 22 ±2 Nm

DN 160 ISO-F: 10 Nm, 20 Nm, 38 ±3 Nm

D oder/or E

Stud screw and clearance hole

A ISO-F flange

B Stud screw with two nuts

C Centering ring, coated

D Splinter shield

E Protective mesh

1) DN 100 ISO-F with washer

➡For a flange material having a strength of 170-270 N/mm2

and a screw-in flange, the stud screw 2,5 d must be

screwed in. The nuts must be tightened crosswise in three

steps.

Tightening torque:

DN 100 ISO-F: 5 Nm, 12 Nm, 22 ±2 Nm

DN 160 ISO-F: 10 Nm, 20 Nm, 38 ±3 Nm

Variant 2 - Stud screw with blind hole Variant 3 - Stud screw and clearance hole

(components as for variant 2; 1166pieces of nuts must be used

CF-F flange

Applications for installing an CF-F to an CF-F flange:

Stud screw with blind hole

1166 ((DDNN 110000 CCFF--FF))or. 2200 ((DDNN 116600 CCFF--FF))pieces of stud screws

(M8) with washers and nuts must be used. The stud screws

need to be tightened revolving with a tightening torque of

22 ±2 Nm.

Stud screw with blind hole

A CF-F flange

B Stud screw with

washer and nut

C Copper seal

Hexagon screw and clearance hole

A CF-F-flange

B Hexagon screw

with washer and nut

C Copper seal

Hexagon screw and clearance hole

1166 ((DDNN 110000 CCFF--FF))or 2200 ((DDNN 116600 CCFF--FF))pieces of hexagon

screws (M8) with washers and nuts must be used. The hexa-

gon screws need to be tightened revolving with a tightening

torque of 22 ±2 Nm.

CCoonnnneeccttiioonn nnoommiinnaall

--DDeessiiggnnaattiioonnOOrrddeerr--nnuummbbeerr

ddiiaammeetteerr

DN 100 CF-F Hexagon screw M8 with PF 505 003 -T

DN 160 CF-F washer and nut

(25 pieces)1)

Stud screw M8 with

washer and nut

(22 pieces)1) PF 507 003 -T

DN 100 CF-F Copper seal (10 pieces)1) PF 501 410 -T

copper seal silvered PF 501 510 -T

(10 pieces)1)

Splinter shield2) PM 016 315

Protective mesh2) PM 016 336

DN 160 CF-F Copper seal (10 pieces)1) PF 501 416 -T

oder

copper seal silvered PF 501 516 -T

(10 pieces)1)

Splinter shield2) PM 016 318

Protective mesh2) PM 016 339

The components for installing to an CF-F flange are to be

ordered under the following numbers:

1) supplied pieces

2) Insert the splinter shield and protective mesh in the high vacuum flange with the clamping lugs

downward.

The maximum loading capacity of the high

vacuum flange is 1000 N (equivalent to 100 kg).

Assymetric loading on the high vacuum flange

must be avoided.

CAUTION

No forces from the piping system must be

allowed to act on the pump where turbopumps

are anchored.

Suspend or support all pipes to the turbopump.

CAUTION

Directly flanging the pump

The turbopump can be flanged onto the vacuum chamber

vertically (0°) up to an angle of 90° maximum.

The fore-vacuum flange must always point

downwards.

CAUTION

Permissible installation positions for the turbopump

11 Vacuum chamber

20°

Installation position with oil-sealed backing pump

11 Vacuum chamber

If the pump is being installed horizontally:

The fore-vacuum flange of the turbopump must be aligned

vertically downwards (maximum deviation ± 20°),

otherwise the turbopump could become dirty and the lubrica-

ting pump not properly function.

3.3. Connecting The Fore-Vacuum Side

Backing pump: Vacuum pressure ≤5 mbar

Recommendation: Oil-Free Diaphragm Pump or Rotary

Vane Vacuum Pumps from the Pfeiffer

Vacuum range (note installation position,

turbopump, see Section 3.2.).

Connecting the backing pump

All connections of the fore-vacuum line: with the usual small

flange components or hose screw connections.

Be sure to conduct away the exhaust gases

from the backing pump. Do not reduce the free

cross section of the fore-vacuum flange with

following components.

The exhausted process gases and vapours can

represent a health hazard and can also be

environmentally damaging.

Comply with all gas manufacture's safety

instructions.

➡With rigid pipe connections: fit a bellows in the connecting

line to reduce vibration.

➡The electrical connection of the backing pump is made via

a relay box whose control line is connected to ”FV PUMP”

on the TC 600.

Please refer to Operating Instructions PT 0030 BN for details

on the relay box, backing pump and its installation.

WARNING

CAUTION

3.4. Connecting The Cooling Unit

The Turbopumps TMH 521 P/TMU 521 P must be water or air

cooled.

Air cooling may only be used where the ambient temperature

is < 35 °C.

Use and installation:

– For water cooling please refer to Operating Instructions

PM 0152 BN.

– For air cooling please refer to Operating Instructions

PM 0543 BN.

3.5. Connecting The Venting Valve

The venting valve TVF 005 (see Section 11. Accessories)

provides automatic venting in the event of a power failure and

switching off.

Fitting the venting valve

➡Unscrew the venting screw from the venting connection 4

(please refer to Section 2.1.) of the turbopump.

➡Screw in venting valve 42 with seal (USIT ring) on hexago-

nal SW 14.

Electrical connection

➡Plug control lead 42a into the connection ”VENT” of the

TC 600 (8) on the turbopump.

The venting mode of the venting valve is selected via the DCU

or Serial Interface RS 485.

The maximum pressure at the venting valve is

1.5 bar absolute.

Please refer to Operating Instructions PM 0507 BN for details

on Venting Valve TVF 005.

CAUTION

3.6. Connecting The Casing Heating Unit

The attainment of final pressures is accelerated when

turbopumps and vacuum chambers are baked out.

The heating duration is dependent on the degree of dirt and

on the required final pressure level. The heating duration

should be at least 4 hours.

Where casing heating is involved the turbopump

must be water cooled.

High temperatures are generated when

turbopumps and vacuum chambers are baked

out. There is a danger of burns resulting from

touching hot parts, even after the casing heating

has been switched off.

Ideally, the heating sleeve, pump casing and

vacuum chamber should be insulated during

installation. Do not touch the heating sleeve,

pump casing and vacuum chamber during the

baking out process.

Please refer to Operating Instructions PM 0542 BN for details

on the casing heating unit and its installation.

3.7. Connecting The Sealing Gas Valve

To protect the pump, particularly where corrosive or dust

producing processes are involved, it is necessary to use

sealing gas.

Connection is made via the sealing gas valve (please see

Section. 11. Accessories).

WARNING

☞

PLEASE NOTE

Please refer to Operating Instructions PM 0229 BN for details

on installing the sealing gas valve and adjusting the sealing

gas flow.

VENT

42a

42b

Connecting the Venting Valve TVF 005

8 Electronic Drive Unit TC 600

8d Remote plug

42 Venting Valve TVF 005

42a Control lead venting valve/TC 600

42b Plug

66 66a

915

Connecting the sealing gas valve

9 Locking screw sealing gas connection

15 Seal

66 Sealing gas valve

66a Seal

3.9. Installing The Power Supply

Voltage may only be supplied with the Pfeiffer

Vacuum power supplies (Accessory). The use

of other power supplies requires the express

agreement of the manufacturer and

equalization with the valid specification (power

supply specifications available an request).

Please refer to Operating Instructions PM 0521 BN for details

on Power Supply TPS 300.

The mains connection must be freely

accessible at all times.

CAUTION

3.8. Connecting The Electronic Drive Unit TC 600

The turbopump and the Electronic Drive Unit

TC 600 are connected and together form a

single unit.

Connecting cable 8a has to be ordered in

wanted length separately (see Section 11.

Accessories).

➡Unscrew screw with tooth lock 8c from the TC 600 (above

the connection X4).1)

➡Plug the plug X4 on connecting cable 8a into the

connection X4 on the TC 600 and screw in screw 8b.

➡Secure plug X4 on the TC 600 with a screw and

tooth lock 8c.1)

➡Connect plug X2 on connecting cable 8a with Power

Supply TPS 300/DCU 300 (Accessories) on connection X2.

➡Using screws and tooth lock 8c, included with the cable

consigment) secure plug X2 to power supply 105.1)

1) Only with cable PM 051 843 -T

Once operations voltage has been supplied, the

TC 600 performs a self test on the supply volta-

ge. The supply voltage for Turbomolecular

Pumps TMH 521 P/TMU 521 P is 72 V DC ±5% in

accordance with EN 60 742.

If the turbopump is being operated with the Display And

Operating Unit DCU 001, DCU 300 or HPU 001, remote plug 8d

should be disconnected. Connection should be carried out in

accordance with the respective operating instructions.

CAUTION

☞

PLEASE NOTE

X4 8

105

Connecting the TC 600 with Power Supply TPS 300/DCU 300

X1 Mains connection

X2 Connection, power supply

X4 Connection TC 600

S1 ON/OFF switch

8 Electronic Drive Unit TC 600

8a Connecting cable, TC 600 – TPS/DCU

8b Screw

8c Screw with tooth lock

8d Remote plug

105 Power supply

3.10. Connecting The Remote Control Unit

Remote control options for various functions are provided with

the connection "REMOTE" on the TC 600 via the 15-pole D-Sub-

Connector. Shielded cable must be used. Shielding is on the

plug side of the TC 600 connected to the TC casing.

The inputs 2-6 are activated by connecting them to the + 24 V

on pin 1 (active high) (please see Section 3.12. Connections

Diagram).

Pin occupancy and remote plug functions

(please see following table).

When connecting supply voltage, the turbopump

is started.

On delivery:

Pin 1, Pin 2, Pin 3 and Pin 4 are bridged in the

mating plug.

CAUTION

Pin arrangement remote plug

Pin occupancy and remote plug functions

Pin nr. Input open (low) Input closed (high) on + 24V (pin 1)

1 +24 V

2 venting blocked (see Section 3.5.) venting released (see Section 3.5.)

3 motor, turbopump off motor, turbopump on:

the turbopump is driven, current flows through the motor coils

4 pumping station off pumping station on:

the turbopump is driven, backing pump is started via the relay box

5 heating off heating on:

the heating is switched on once the rotation speed switchpoint is attained and off

when the rotation speed switchpoint is unattained

optional: sealing gas valve off1) optional: sealing gas valve on1)

5 reset:

by supplying a pulse (T < 2s) with an amplitude of 24V a malfunction

acknowledgement can be processed

6 standby off standby on:

pump is accelerated to 66% of its nominal rotation speed

7 rotation speed setting mode off the rotation speed can be changed by feeding a PWM signal to this pin or

via Serial Interface RS 485 (see Section 4.7. Rotation Speed Setting Mode)

8Output (low) Output (high)

rotation speed switchpoint not attained rotation speed switchpoint attained; output can be loaded with 24 V/50 mA

9Output (low) Output (high)

Collective malfunction message malfunction-free operations;

output can be loaded with 24 V/50 mA

10 Mass (ground) _________

11 Contact contact2) between pin 11 and pin 12 closed

Output 1: Switchpoint attained if the turbopump is above the switchpoint

12 Contact

Output 1: Switchpoint attained

13 Contact contact2) between pin 13 and pin 14 open in the event of a collective malfunction

Output 2: Collective malfunction message

14 Contact

Output 2: Collective malfunction message

15 Analog output rotation speed proportional output voltage 0 - 10 VDC =

0 - 100 % * fend/load R ≥10 kΩ

1) The option must be set via the Serial Interface RS 485

(see Operating Instructions PM 0547 BN, Pumping Operating with DCU

2) The following technical data is applicable for the contacts: Umax = 50 VDC

Imax = 1 A

3.11. Connecting The Serial Interface RS 485

An external operating component (DCU 001, DCU 300 or

HPU 001) or an external computer can be connected via the

connection ”RS 485” on the TC 600 with the use of a shielded

8 pole modular connecting cable contained with the delivery.

All units connected to the bus must have differing serial

interface addresses (parameter 797).

The group address of the TC 600 is 960.

Only SELV may be connected to the Serial Inter-

face RS 485.

All switched on remote functions have priority over the serial

interface functions.

Please refer to Operating Instructions

PM 0488 BN for detailed operating

procedures and electrical data in respect of the

Serial Interface RS 485.

Profibus DP Gateway TIC 250 is available (accessory) for

connecting an Electronic Drive Unit TC 600 to a Profibus DP.

Please refer to the respective Operating Instructions

PM 0599 BN for detailed information on the operation of the

TIC 250.

☞

PLEASE NOTE

WARNING

Designation Value

Serial interface type: RS 485

Baud rate: 9600 Baud

Data file word length: 8 bit

Parity: no parity

Start bits: 1

Stop bits: 1..2

The electrical connections in the TC 600 are optically

decoupled.

Pin Occupancy

1 not connected

2 + 24 V output (loadable with ≤210 mA)

3 not connected

4 not connected

5 RS 485: D+ (DO / RI)

6 Gnd

7 RS 485: D- (DO / RI)

8 not connected

RS 485

1 ... 8

Connecting The RS 485

Connection to a fixed bus system

➡Connect all units with D+ (pin 5 / RS 485) and D- (pin 7 /

RS 485) to the bus.

➡The bus must be closed at both ends.

The connections should be made in accordance with the

specification of the Serial Interface RS 485.

5:D+, 7:D–

RTRT

Level Converter

TC TC

(View from

the plug side

of the TC 600)

It is possible to connect an RS 232 (e.g. PC) via a

level converter (please see Section 11. Accesso-

ries).

☞

PLEASE NOTE

The serial interface is galvanically and safely separated from

the maximum supply voltage from the TC 600.

Connection

DCU 300

with power

supply

DCU 001

without power supply

TC 600

external

computer

RS 485

HPU 001

RS 485

Connecting the Serial Interface RS 485

TC 600

TC 750

RS 485

REMOTE

n.c.

+24 VDC*/max. 200 mA (supply voltage, DCU)

n.c.

RS 485+/ (DO/RI)

GND* (mass connection, DCU)

RS 485- / (DO/RI)

+24 VDC*/max. 50 mA

Venting release

Motor, turbopump

Pumping station

Heating/Reset

Standby

PWM ON (touch relation 25 -75%)

Switching output 1 (24 VDC / max. 50 mA)

Switching output 2 (24 VDC / max. 50 mA)

GND*

HEAT/TMS

VENT

FV PUMP

Relay box

Heating

Mains input, heating

115/208/230 VAC

Mains input, pumping station

(115/208/230) VAC

Connection, pumping station

Relay box,

Pumping station (Imax=16A)

HEATING

VENTING VALVE

TVF 005

L

Contact output 1: switching point

Contact output 2: collective malfunction

Analog output 0-10 VDC = 0-100 % *fend/R ³ 10 ký

FAN

n.c.

Protection conducter (PE)

Supply voltage TC

GND

PE GY/YE

BK1

BK2

Contact current max.

6 mA / Contact

Mains input

power unit

(90-132/

185-265) VAC

TPS XXX/DCU XXX

3.12. Connections Diagram

4. Operations

4.1. Before Switching ON

Sections 4.1. to 4.3. refer only to operating the pump in its

condition on delivery, without the DCU operating unit. The

bridges ”venting release”, ”motor, TMP ON” and ”pumping

station ON” are fitted in the remote control plug.

Turbopump rotors rotate at high speed. When

the high vacuum flange is open there is a

danger of injury and of damage to the pump

caused by objects falling into the pump.

Therefore never operate the pump with open

high vacuum flange.

Take care when pumping hazardous gases and

observe the safety precautions of the gas manu-

facturer.

➡With sealing gas: Open the sealing gas supply.

➡With water cooling: Open cooling water supply and check

flow.

➡With connecting cable 8a (see Section 11. Accessories)

connect the TC 600 and Power Supply TPS 300 on X2

(please see Section 3.8.).

Please note:

The following pre-settings have been programmed:

– Running up time 8 min

– Rotation speed switchpoint 80%

– Automatic venting 50%

These settings can only be altered via Serial Interface RS 485

(DCU, HPU or PC); please refer to the respective operating

instructions.

CAUTION

WARNING

Rear panel, TPS 300

S1 ON/OFF switch

X1 Mains connection

X2 Connection TC 600

F1 Fuse

F2 Fuse

S1 X1

4.2. Switching ON

➡Switch on the turbopump with switch S1 on the power

supply.

– With air cooling the cooling fan is also switched on via

Electronic Drive Unit TC 600.

– Once the self test has been successfully completed on the

TC 600 (duration approximately 15 seconds), both the

turbopump and the backing pump (if connected) begin

operating.

4.3. Switching OFF And Venting

Before coming to rest after switching off, the turbopump must

be vented in order to prevent contamination.

➡Close the fore-vacuum.

➡Switch off both turbopump and backing pump with switch

S1 on the power supply.

➡Venting

There are three possibilities to vent turbopump:

–Manual venting with the use of the venting screw

(status on delivery).

–Venting with the venting valve which is selectable

via the remote control (please see Section 4.7.), or via

the DCU or HPU (see respective operating instructions).

–Venting in two stages when the vacuum chamber

should be vented as quickly as possible. First stage:

venting with a pressure increase rate of 15 mbar/s for

20 seconds.

Second stage: venting with an optionally large venting

valve.

The valve cross-section for a venting rate of 15 mbar/s

must be compatible with the size of the vacuum chamber.

Where small vacuum chambers are involved, the

Pfeiffer Vacuum Venting Valve TVF 005 can be used for

first stage venting.

➡Shut off water supply.

4.4. Gas Type Dependent Operations

Water cooling is required if the pumps are to be

operated with gas load.

Where high level gas loads and rotation speeds are involved,

the resulting friction subjects the rotor to the effect of great

heat. To avoid over-heating, a power rotation speed

characteristic line is implemented in the TC 600; this ensures

that where maximum gas loads are involved, the pump will

operate at any rotation speed without the danger of damage

arising.

The maximum power is dependent on the type of gas. Two

characteristic lines are available for any type of gas in order

to fully exploit the power potential of the pump:

– "Gas-Mode 0" for gases with molecular mass ≥40 as, for

example, Argon;

– "Gas-Mode 1" for all lighter gases.

Works setting: “Gas mode 0”

➡Set the applicable gas mode on the TC 600 via the

DCU/HPU (please refer to the respective operating instruc-

tions.

Pumping gases with molecular mass ≥ 40 with

the incorrect gas mode can cause damage to

the pump.When pumping noble gases heavier

then Argon it can come to the destruction of the

pump. Please contact the manufacturer before

using such gases.

For the vertex of the power characteristic line please refer to

Section 9. Technical Data.

Maximum power is applied when the pump starts in order to

limit the time required. Once the set rotation speed is

attained, switching to the selected power characteristic line

is automatic. If the gas dependent maximum power is excee-

ded, the rotation speed is reduced until equilibrium between

the permissible power and gas friction is attained.

The power limitation serves to protect the pump against ther-

mal over-loading. In order to avoid rotation speed fluctuations

it is recommended to set, in rotation speed setting mode, the

equilibrium frequency or a somewhat lower frequency.

There can be types of pump whereby there is no

differentiation between the two ”gas modes”

settings.

☞

PLEASE NOTE

WARNING

CAUTION

4.5. Shutting Down For Longer Periods

If aggressive or hazardous gases are pumped

there is a danger of personal injury resulting

from coming into contact with process gases.

Before removing a turbopump from the system,

first:

– Vent the turbopump with a neutral gas or

dry air.

– Ensure that there is no residual process gas in the system

nor in the feeder lines.

If the turbopump is to be shut down for more than a year:

➡Remove turbopump from the system.

➡Change the lubricant reservoir (see Section 7.1.).

Lubricant TL 011 should not be used when there

have been no operations for 33 yyeeaarrss..

➡Close the high vacuum flange and evacuate the turbopump

via the fore-vacuum flange.

➡Vent turbopump via the venting connection with nitrogen

or dry air.

➡Close fore-vacuum and venting connection by blank

flanging.

➡Place the pump vertically on its rubber feet.

➡The pump must be stored in buildings within a temperature

range of -25 °C to +55 °C.

➡In rooms with moist or aggressive atmospheres, the turbo-

pump must be air-sealed in a plastic bag together with a

bag of dessicant, e.g silicagel.

If the pump has been shut down for

3 years, the bearing must be changed (please

contact Pfeiffer Vacuum Service).

☞

PLEASE NOTE

CAUTION

WARNING

Power

Frequency

D-C = Gas mode «0»

B-A = Gas mode «1»

Run up

fnom

Gas type characteristic line

4.6. Operations With The

DCU 001, DCU 300 or HPU 001

Operations with the DCU 001, DCU 300 or HPU 001 should be

carried out in accordance with the relevant Operating

Instructions:

PM 0477 BN (DCU description)

PM 0547 BN (Operating the pump with the DCU)

PT 0101 BN (Display and Operating Unit HPU 001)

Where operations with the DCU or HPU are

involved, the remote plug 8d on the TC 600

(please refer to Section 2.1.) should be

disconnected.

4.7. Operations With The Remote Control Unit

Remote control operations can be performed via the connec-

tion with the designation “REMOTE” on the TC 600 via the 15-

pole D-Sub-Connector.

Pin occupancy and remote plug functions see Section 3.10.

Connecting The Remote Control Unit.

Inputs 2 - 6 are activated if they are connected with the +24 V

on pin 1 (active high; please see Section 3.12. Connections

Diagram).

On delivery there is a bridge between Pin 1,

Pin 2, Pin 3 and Pin 4 on the TC 600 mating plug.

Once operating voltage has been supplied and

on successful completion of the self-test on the

TC 600, the turbopump and any possible

connected backing pump is started.

Venting Release (Optional)

Automatic venting:

CAUTION

☞

PLEASE NOTE

Motor, Turbopump

When the pumping station is switched on and once the self test

has been successfully completed (duration approximately 15

seconds), the turbopump is set in operation.

During operations, the turbopump can be switched on and off

while the pumping station is switched on.

Thereby the turbopump will not be vented.

Pumping Station

Any connected pumping station components are started up

(e.g. backing pump, venting valve, air cooling) and with

simultaneous activation of the input ”motor, turbopump” the

turbopump is set in operation once the self test has been

successfully completed (duration approximately 15 seconds).

Heating/Reset

HHeeaattiinngg ((ooppttiioonnaall))

Once the rotation speed switchpoint is attained the heating

unit is switched on; when the rotation speed switchpoint is

fallen below the heating unit is switched off.

Reset

The heating input has two functions (please see

Section 3.10., point 5 ”Reset”).

Standby

The pump can be operated optionally at 66% of its nominal

rotation speed (standby ON) or at its nominal rotation speed

(standby OFF).

VVeennttiinnggSSwwiittcchh ooffff MMaaiinnss ppoowweerr ffaaiilluurree11))

ffrreeqquueennccyytthhee ppuummppiinngg ssttaattiioonn

< 415 Hz venting valve opens venting valve opens and

(correspond to 50% for 3600 s (1 h, closes on attainment

of the final rotation (works setting) of approximately 15 % of

speed) the final rotation speed

1) When mains power is restored the venting procedure is interrupted.

Venting blocked:

Venting does not take place.

Other venting modes:

Other venting modes can be selected via the DCU or HPU.

If no signal is present the pump accelerates up to its final

rotation speed. A PWM adapter box for rotation speed setting

operations for the turbopump is available as an option (please

see Section 11. Accessories).

Switching Outputs

Switching outputs 1 and 2 can be loaded with a maximum

24 V / 50 mA per output. The following functions are assigned

to the switching outputs:

Switching output 1: Active high when the rotation speed

switchpoint is attained. The switchpoint

for the turbopump is set at 80% of the

nominal rotation speed. It can be used,

for example, for a message ”pump

ready to operate”.

Switching output 2: Active low with a malfunction -

collective malfunction message

The connection of a relay is made between pin 10 (mass) and

the respective switching output pin 8 or pin 9 (see Section

3.12. Connections Diagram).

Rotation Speed Setting Mode Via Input PWM

The supply of pulse width modulated signals (PWM) with a

ground frequency of 100 Hz ±20% with an amplitude of maxi-

mum 24 V and a key ratio of 25-75% enables the rotation

speed to be set in the range 20-100% of the nominal rotation

speed.

U20%*f 100%*fend

max. +33V

min. +13V

max. +7V

min. -33V

PWM

*25% *75%

= 10ms (1±20%)

f=100Hz (1±20%)

end

PWM

5. Monitoring Operations

5.1. Operations Display Via LED

Certain operations modes of the turbopump and the TC 600

can be ascertained via the two integrated LEDs located on

the front panel of the TC 600.

The following operations modes are displayed:

5.2. Turbopump Temperature Management

Where impermissible motor temperatures are involved or the

temperature of the TC 600 casing is too high, the motor

current is reduced. This can lead to dipping below the set

rotation speed switchpoint and results in the turbomolecular

pump being switched off.

LED on the TC 600 glows red: Collective malfunction.

LED Cause

green red

Glows – power supply OK

– Function ”pumping station ON”

carried out

Flashes short – power supply OK

(1/12s active) – Pumping station OFF

Blinks – Mains power supply failure

(1/2s active)

Glows – Collective malfunction

(for example, run-up time error,

over-temperature, turbopump

or TC 600)

– Switching output 2 active (low)

Blinks – Warning

(1/2s active) (e.g. supply voltage short

circuit to earth, mains

power supply failure)

Differentiated malfunction and warning signals

are only possible with the use of the DCU or

HPU.

☞

PLEASE NOTE

6. What To Do In Case Of Breakdowns?

Problem Possible Causes Remedy

Pump doesn't start; • Power supply interrupted • Check fuse in the power supply

None of the integrated LEDs • Check plug contacts on the power supply

glow on the TC 600 • Check power supply feeder line

• Check voltage on the power supply

(72 V DC) at connection X2

• Incorrect operations voltage supplied • Supply correct operations voltage

• Pins 1-3 and 1-4 on the remote • Connect pins 1-3 and 1-4 on the

plug not connected remote plug

• No supply of operations voltage • Check plug contacts on the power

pack unit

• Defect TC 600 • Replace TC 600 (please see Sec. 7.2.)

• Reduction in the voltage in the cable • Use suitable cable

Pump doesn't attain nominal • Fore-vacuum pressure too high • Check backing pump function

rotation speed within the set • Leak or too much gas • Check seals

run-up time • Seek leak and repair

Pump cuts out during operations • Reduce supply of process gas

• Rotor sluggish caused by • Check bearing (noises?): Inform

defective bearing Pfeiffer Vacuum Service

• TC run-up time too short • Set longer start-up time with the DCU or PC

• Thermal overloading caused by

– Water flow insufficient • Ensure free flow

– Insufficient air supply • Ensure adequate air supply

– Fore-vacuum pressure too high • Reduce fore-vacuum pressure

– Ambient temperature too high • Reduce ambient temperature

Pump doesn't attain final pressure • Pump dirty • Bake out pump

• If seriously contaminated: Request

Pfeiffer Vacuum Service to clean

• Leak in vacuum chamber, • Seek leak starting with vacuum chamber

lines or pump • Repair leak

Unusual operating noises • Bearing damaged • Inform Pfeiffer Vacuum Service of need for

repair

• Rotor damaged • Inform Pfeiffer Vacuum Service of need for

repair

• Splinter shield (if fitted) • Check seat of splinter shield

not seated firmly

Red LED on the TC 600 glows • Collective malfunction • Reset via mains OFF/ON or remote pin 5

• Different malfunction display with the

DCU or HPU possible1)

Red LED on the TC 600 flashes • Warning through: • Different warning message with

the DCU or HPU possible1)

– Mains power failure • Check power supply voltage

• Check power supply mains

– Supply voltage short connection

circuit to earth • Check power supply voltage for short

circuit to earth

• Wrong setting for nominal rotation • Enter 833 Hz for parameter 777

speed (Parameter 777) (see operating instruction PM 0547 BN

“Pumping Operations With DCU”). If there is

no DCU/HPU available contact

Pfeiffer Vacuum Service .

1) Without a DCU or HPU inform Pfeiffer Vacuum Service to check the cause of trouble.

7. Maintenance/Replacement

No liability for personal injury nor material

damage will be accepted for damages and

operational interruptions which have been

caused by improper maintenance; in addition,

all guarantees become invalid.

The bearing should be changed every three years (request

Pfeiffer Vacuum Service to change).

Where extreme operating conditions or unclean processes

are involved, the replacement interval should be checked

with your Pfeiffer Vacuum Service Center.

You can replace the lubricant reservoir and the Electronic

Drive Unit TC 600 yourself.

Please contact your local Pfeiffer Vacuum Service for all

other maintenance and service work.

Ensure no mechanical forces act on the

Electronic Drive Unit TC 600.

7.1. Replacing The Lubricant Reservoir

Replace the lubricant reservoir at least every three years.

For extreme load conditions or impure processes: discuss the

replacement interval with Pfeiffer Vacuum Service.

➡Turn off turbopump, vent to atmospheric pressure and allow

to cool, if necessary.

➡If necessary, remove the turbopump from the system.

➡Use the installation tool E (Bestell-Nr. PV M40 569) to

unscrew the screw cap 90 on the base of the turbopump;

pay attention to the O-ring 91.

CAUTION

☞

PLEASE NOTE

➡Use two screwdrivers to lift the lubricant reservoir 92.

The lubricant reservoir can contain poisonous

substances from the pumped media. Dispose of

the lubricant reservoir in accordance with

regulations!

A safety data sheet is available upon request.

➡Remove impurities from the turbopump and screw cap

with a clean, lint-free cloth.

➡Slide new lubricant reservoir 92 up to the O-ring 93 in the

turbopump.

The lubricant reservoir comes pre-filled

with lubricant TL 011; do not add additional

lubricant.

➡Screw on screw cap 90 with O-ring 91.

The screw cap places the lubricant reservoir in the correct

axial position

CAUTION

WARNING

7.2. Replacing The Electronic Drive Unit

TC 600

The turbopump and the TC 600 must only be

disconnected from each other when the

turbopump is completely at rest and the TC 600

has been disconnected from the power supply.

➡Switch off the turbopump, vent to atmospheric pressure

(see Section 4.3 .) and allow to cool as necessary.

➡If necessary, remove the turbopump from the system.

Unsrew screws 8c (2 pieces) from the Electronic Drive

➡Unit TC 600 and remove the TC 600 from the turbopump.

CAUTION

➡Install the new Electronic Drive Unit TC 600 back onto the

turbopump and connect again.

Please take into account that after replacement

the standard operating parameters are always

pre-set.

If your application requires different

parameters, please modify accordingly.

CAUTION

Replacing the Electronic Drive Unit TC 600

8 Electronic Drive Unit TC 600

8c Screw (2 Stück)

8. Service

Do Make Use Of Our Service Facilities

In the event that repairs are necessary a number of options

are available to you to ensure any system down time is kept to

a minimum:

– Have the pump repaired on the spot by our Pfeiffer

Vacuum Service Engineers;

– Return the pump to the manufacturer for repairs;

– Replace the pump.

Local Pfeiffer Vacuum representatives can provide full

details.

Please take into account that where Pfeiffer

Vacuum Service replacement service is involved

the standard operating parameters are always

present.

If your application requires different parameters,

please modify accordingly.

The turbopump and the Electronic Drive Unit

TC 600 form a single unit and must therefore be

returned complete for repair purposes. Before

returning the unit it should be ensured that the

power supply is not the cause of the malfunction

(checking the power supply).

Before Returning:

➡Dismantle all accessories.

➡If the unit is free of harmful substances please attach a

clearly visible notice "Free of harmful substances" (both on

the unit and also on the delivery note and any accompany-

ing letters).

"Harmful substances" are substances and preparations as

defined in the current, local, dangerous substances

regulations; in the U.S.A. as

"materials in accordance with the Code of Federal

Regulations (CFR) 49 Part 173.240 Definition and Preparation".

We will carry out the decontamination and invoice this work

to you if you have not attached this note. This also applies

where the operator does not have the facilities to carry out

the decontamination work. Units which are contaminated

microbiologically, explosively or radioactively cannot be

accepted as a matter of principle.

Fill Out The Declaration Of Contamination

➡In every case the "Declaration of Contamination" must be

completed diligently and truthfully.

➡A copy of the completed declaration must accompany the

unit; any additional copies must be sent to your local

Pfeiffer Vacuum Service Center.

Please get in touch with your local Pfeiffer Vacuum represen-

tatives if there are any questions regarding contamination.

☞

PLEASE NOTE

CAUTION

Decontaminate units before returning or

possible disposal. Do not return any units which

are microbiologically, explosively or

radioactively contaminated.

Returning Contaminated Units

If contaminated have to be returned for maintenance/repair,

the following instructions concerning shipping must be

followed:

➡Neutralise the pump by flushing with nitrogen or dry air.

➡Seal all openings to the air.

➡Seal pump or unit in suitable protective foil.

➡Return equipment only in suitable, rugged shipping contai-

ners and by complying with the currently valid shipping

regulations.

Repair orders are carried out according to our

general conditions of sale and supply.

If repairs are necessary, please send the pump together with

a short damage description to your nearest Pfeiffer Vacuum

Service Center.

☞

PLEASE NOTE

WARNING

9. Technical Data

1) Distance from the pump 1 m

2) Measured at a helium concentration of 100 %, 10 s measurement time

3) Measured with a rotary vane pump 1.5 m3/h; higher throughputs with reduced rotation speed.

4) Rotation speed of pump may drop below the nominal rotation speed.

5) For gas characteristics line please refer to Section 4.4.

6) In accordance with German Industrial Standard 28428 the final pressure which is attained in a

measuring dome 48 hours after baking out.

7) Please see type plate.

8) At maximum gas throughput

9) Protection class IP 54 is afforded for the Electronic Drive Unit TC 600

by refro-fitting a cover plate (please refer to Section 11. Accessories).

Feature Unit TMH 521 P TMU 521 P

Connection nominal diameter

Inlet DN 100 ISO-K DN 160 ISO-K DN 100 CF-F DN 160 CF-F

DN 100 ISO-F DN 160 ISO-F

Outlet DN 25 ISO-KF/G 1/4“ DN 25 ISO-KF/G 1/4“

Venting connection G 1/8” G 1/8”

Nominal rotation speed Hz (1/min) 833 (50 000) 833 (50 000)

Standby rotation speed Hz (1/min) 550 (33 000) 550 (33 000)

Start-up time min 5,5 5,5

Maximum noise level1) dB (A) 50 50

Final pressure, backing pump mbar < 5 < 5

Integral leak rate (He)2) mbar l/s < 1 · 10-7 < 1 · 10-7

Maximum permissible rotor temperature °C 90 90

Permissible heat radiaten power W 14 14

Volum flow rate for:

Nitrogen N2l/s 290 510 290 510

Helium He l/s 400 520 400 520

Hydrogen H2l/s 380 450 380 450

Argon Ar l/s 260 500 260 500

Compression ration for:

N2> 1012 > 1012

He 5 · 1075 · 107

H26,5 · 1056,5 · 105

Ar > 1012 > 1012

Maximum fore-vacuum pressure

N2mbar 13,0 13,0

He mbar 12,5 12,5

H2mbar 9,0 9,0

Ar mbar 11,0 11,0

Maximum gas throughput3) with water cooling

N2mbar l/s 4,0 4,0

He mbar l/s 8,0 8,0

H2mbar l/s 9,5 9,5

Ar mbar l/s 2,0 2,0

Maximum gas throughput at

intake pressure of 0.1 mbar4)

N2mbar l/s 12,0 12,0

He mbar l/s 12,0 12,0

H2mbar l/s 8,0 8,0

Ar mbar l/s 12,0 12,0

Vertex power characteristics line5)

A W / Hz 185/833 185/833

B W / Hz 260/485 260/485

C W / Hz 160/833 160/833

D W / Hz 260/435 260/435

Final pressure6)

with rotary vane pumps mbar < 1 · 10-7 < 5 · 10-10

with diaphragm pumps mbar < 1 · 10-7 < 1 · 10-8

Lubricant TL 011 TL 011

Cooling water consumption

with water at 15 °C7) l/h 100 100

Cooling water temperature °C 5 - 25 5 - 25

Permissible ambient temperature

with air cooling °C 0 - 35 0 - 35

Heating power consumption W 100 100

Weight kg 14,5 (ISO-K)/ 13,5 (ISO-K)/ 15,0 14,5

kg 15,0 (ISO-F) 14,2 (ISO-F)

Permissible magnetic field mT 5,0 5,0

Operating voltage VDC 72 ±5% 72 ±5%

Duration8)- / max. current consumption A 3,2/4,2 3,2/4,2

Duration8)- / max. power W 230/300 230/300

Protection class9) IP 30 IP 30

Shipping and storage temperature °C -25 to +55 -25 to +55

Relative humidity % 5-85 non condensing 5-85 non condensing

9.1. Dimensions Diagram

110

106

126

121

139

166

184

123

53.5

99.5

120

224

242

DN 160 ISO-K

DN 100 ISO-K

DN 160 CF-F

DN 100 CF-F

97.1

147.5

158

2xM8

100

148.5

86.5

144

120

30°

ø85

4xM8

45°

40°

Ø170

Ø208

160

DN 25 ISO-KF

TMH 521 P/TMU 521 P

DN 100 ISO-K/DN 160 ISO-K

DN 100 CF-F/DN 160 CF-F

119

242

218

210

183.9

139

126

208

40˚

100

120

88.7

45˚

122.7

160

30˚

±0.1

DN 25 ISO-KF/G 1/4"

DN 100 ISO-F

TMH 521 P

DN 100 ISO-F

40˚

100

208

110.3

121

165.9

224

192

120

101

200

88.7

45˚

122.7

160

30˚

±0.1

DN 25 ISO-KF/G 1/4"

DN 160 ISO-F

TMH 521 P

DN 160 ISO-F

Pos. Description Pieces Size Number Comments Ordering Quantity

Spare Parts TMH 521 P/TMU 521 P

6 Blanking plug 4 P 4098 582 FA

8 Electronic Device Unit 1 PM C01 720 please see Sec. 7.2.

8d Remote plug 1 PM 051 793 -X

17 USIT ring 1 P 3529 133 -A

91 O-ring 1 38x3 P 4070 621 PV

92 Lubricant reservoir 1 PM 063 265-T

10.Spare Parts

Spare parts

Description Size Number Comments/ Order Quantity

Operating Instructions

Components for cooling

Dirt trap R 3/8” P 4161 300 2R

Recycled Water Cooling Unit TZK 400 230 V, 50 Hz PM Z01 245 PM 0369 BN

Air cooling 24 V DC PM Z01 251 PM 0543 BN

Water cooling PM 016 040 BT PT 0152 BN

Components for venting

Venting Valve TVF 005, without current closed 24 V DC PM Z01 135 PM 0507 BN

Drying Unit TTV 001 PM Z00 121 PM 0022 BN

(filled with zeolite)

Venting flange DN 10 ISO-KF PM 033 737 -T

Components for heating

Casing heating Water cooling required/

230 V, Schuko plug PM 051 096 -T PM 0542 BN

208 V, UL-plug PM 051 097 -T PM 0542 BN

115 V, UL-plug PM 051 098 -T PM 0542 BN

Other accessories

Connecting cable TC 600 – TPS/DCU 3 m PM 051 103 -T Other lengths on request

Connecting cable TC 600 – TPS/DCU, screened 3 m PM 051 843 -T Other lengths on request

Power supply

– TPS 300; for fitting to walls

or standard runners PM 041 814 -T PM 0521 BN

– TPS 300; 19” insert unit PM 041 820 -T PM 0521 BN

– DCU 300; 19” insert unit with

Display and Operating Unit DCU 300 PM C01 696 PM 0477 BN

Mains cable

Schuko plug 230 V P 4564 309 ZA

UL plug 208 V P 4564 309 ZF

UL plug 115 V P 4564 309 ZE

Display and Operating Unit DCU 001 PM 041 816 -T PM 0477 BN

Display and Operating Unit HPU 001 PM 051 510 -T PT 0101 BN

Relay box, backing pump 5 A PM 041 937 -T PT 0030 BN

20 A PM 041 938 -T PT 0030 BN

PWM adapter box PM 051 028 -U PM 0563 BN

Level Converter RS 232/485 PM 051 054 -T PM 0549 BN

Profibus DP Gateway TIC 250 PM 051 257 -T PM 0599 BN

Cover plate for TC 600 (IP 54) PM 051 327 -T PT 0024 BN

Vibration compensator

TMH DN 100 ISO-K PM 006 459-X

TMH DN 160 ISO-K PM 006 492 -X

TMU DN 100 CF-F PM 006 488-X

TMU DN 160 CF-F PM 006 493 -X

Sealing gas valve DN 10 ISO-KF PM Z01 142 PM 0229 BN

Hose nipple for the sealing gas valve DN 16 ISO-KF-10 PF 144 020

Fore-Vacuum Safety Valve TVV 001 115 V PM Z01 206 PM 0263 BN

230 V PM Z01 205

11.Accessories

When ordering accessories and spare parts please be sure to state the full part number. When ordering spare parts please

state additionally the unit type and unit number (see type plate). Please use this list as an order form (by taking a copy).

Tradename Chemical name Danger class Precautions associated Action if spillage or human

Product name (or Symbol) with substance contact

Manufacturer

5. Legally Binding Declaration

I hereby declare that the information supplied on this form is complete and accurate. The despatch of equipment will be in

accordance with the appropriate regulations covering Packaging, Transportation and Labelling of Dangerous Substances.

Name of Organisation: _______________________________________________________________________________

Address: _____________________________________ Post code: _____________________________________

Tel.: ______________________________________________________________________________________

Fax: _____________________________________ Telex: ________________________________________

Name: ______________________________________________________________________________________

Job title: ______________________________________________________________________________________

Date: _____________________________________ Company stamp: ________________________________

Legally binding signature: _____________________________________________________________________________

Declaration of Contamination of Vacuum Equipment and Components

The repair and/or service of vacuum components will only be

carried out if a correctly completed declaration has been

submitted. Non-completion will result in delay.

The manufacturer could refuse to accept any equipment

without a declaration.

This declaration can only be completed and signed by authorised and qualified staff:

1. Description of component:

- Equipment type/model: _________________________

- Code No.: __________________________

- Serial No.: __________________________

- Invoice No.: __________________________

- Delivery Date: __________________________

3. Equipment condition

- Has the equipment been used?

yes ❐no ❐

- What type of pump oil was used?

___________________________________________

- Is the equipment free from potentially harmful

substances?

yes ❐(go to section 5)

no ❐(go to section 4)

4. Process related contamination

of equipment

- toxic yes ❐no ❐

- corrosive yes ❐no ❐

- microbiological hazard*) yes ❐no ❐

- explosive*) yes ❐no ❐

- radioactive*) yes ❐ no ❐

- other harmful substances yes ❐no ❐

*) We will not accept delivery of any equipment that has been radioactively or microbiologically contaminated without written

evidence of decontamination!

2. Reason for return:

_____________________________________________

Please list all substances, gases and by-products which may have come into contact with the equipment:

im Sinne folgender EU-Richtlinien:

pursuant to the following EU directives:

- Maschinen/Machinery 98/37/EWG (Anhang/Annex II B)

- Elektromagnetische Verträglichkeit/Electromagnetic Compatibility

89/336/EWG

- Niederspannung/Low Voltage 73/23/EWG

Hiermit erklären wir, dass das unten aufgeführte Produkt zum Einbau in eine Maschine bestimmt ist und

dass deren Inbetriebnahme so lange untersagt ist, bis festgestellt wurde, dass das Endprodukt den

Bestimmungen der EU-Richtlinie 98/37/EWG entspricht.

Das unten aufgeführte Produkt entspricht den Anforderungen der EU-Richtlinien Maschinen

98/37EWG, Elektromagnetische Verträglichkeit 89/336/EWG und Niederspannung 73/23/EWG.

We hereby certify that the product specified below is intended for installation in a machine which is

forbidden to be put into operation until such time as it has been determined that the end product is in

accordance with the provision of EU Directive 98/37/EEC.

The product specified below is in correspondence to the EU directives Machinery 98/37/EEC, Electro-

magnetic Compatibility 89/336/EEC and EU Low Voltage 73/23/EEC.

Produkt/Product:

TMH 521 P

TMU 521 P

Angewendete Richtlinien, harmonisierte Normen und angewendete nationale Normen:

Guidelines, harmonised standards, national standards in which have been applied:

EN 12100-1, EN 12100-2, EN 294,

EN 1012-2, EN 61010

Unterschrift/Signature:

Unterschriften:

(W. Dondorf)

Geschäftsführer

Managing Director

Pfeiffer Vacuum GmbH

Berliner Str. 43

35614 Asslar

Germany

Herstellererklärung

Manufacturer´s Declaration

Herst.I/2003

Pfeiffer Vacuum Technology AG · Headquarters/Germany

Tel. +49-(0) 64 41-8 02-0 · Fax +49-(0) 64 41-8 02-2 02 · info@pfeiffer-vacuum.de · www.pfeiffer-vacuum.net

Vacuum is nothing, but everything to us!

Turbo Pumps

Rotary Vane Vacuum Pumps

Roots Pumps

Dry Vacuum Pumps

Leak Test Units

Valves

Flanges, Feedthroughs

Vacuum Measurement

Gas Analysis

System Technology

Service

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