T STATION 85 INSTRUCTION MANUAL Ts85

User Manual: ts85

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T-STATION 85 INSTRUCTION MANUAL
Publicaon Number: D395-94-880
Issue: A
Original Instrucons
edwardsvacuum.com
Copyright noce
©Edwards Limited 2017. All rights reserved.
Trademark credits
Edwards and the Edwards logo are trademarks of Edwards Limited.
Associated publicaons
A746-02-885 Diaphragm Pump - XDD1
A371-32-880 Rotary Vane Pump - E2M0.7 / E2M1.5
B8G0-00-880 Turbomolecular Pumps - nEXT85
D395-94-880A - Copyright noce
Page 2
Contents
Copyright noce.........................................................................................................2
Trademark credits...................................................................................................... 2
Associated publicaons..............................................................................................2
List of Figures............................................................................................................. 7
List of Tables.............................................................................................................. 8
Safety and compliance 9
Denion of Warnings and Cauons.................................................................................. 9
Safety symbols.................................................................................................................... 9
General descripon 10
Overview...........................................................................................................................10
Installaon 11
Installaon safety............................................................................................................. 11
Unpack and inspect.......................................................................................................... 11
Locate the T-Staon 85 .................................................................................................... 12
Bench top xing................................................................................................................ 12
Fill the pump with oil........................................................................................................ 12
Connect to the vacuum system........................................................................................ 13
Connect to the exhaust extracon system....................................................................... 13
Connect the electrical supply........................................................................................... 14
Congure the T-Staon 85 ...............................................................................................14
Turbo pump delay.................................................................................................. 14
Connect a vacuum gauge....................................................................................... 15
Commission the installaon............................................................................................. 15
Operaon 16
Control panel descripon................................................................................................. 16
Start up............................................................................................................................. 17
Menu structure................................................................................................................. 17
Turbo screen.......................................................................................................... 18
Gauge screen......................................................................................................... 19
Vent valve screen................................................................................................... 20
Turbo setpoint screen............................................................................................ 22
Calibrate gauge screen...........................................................................................23
Units screen........................................................................................................... 24
Gas ballast control (E2M1.5)............................................................................................ 25
Electrical supply failure.....................................................................................................25
Maintenance 26
Maintenance safety.......................................................................................................... 26
Maintenance plan.............................................................................................................26
Inspect the hoses, pipelines and connecons.................................................................. 27
Factory default sengs.................................................................................................... 27
D395-94-880A - Contents
Page 5
Fault nding 28
The T-Staon 85 has failed to start...................................................................................28
Ulmate pressure cannot be reached.............................................................................. 28
The backing pump is noisy................................................................................................28
The backing pump is leaking oil........................................................................................ 28
The turbo pump is very noisy or there is excessive vibraon or both.............................. 29
Error numbers...................................................................................................................29
Storage 31
Disposal 32
Service 33
Spares 34
Accessories 35
TAV vent valve and vent port adaptor (for nEXT85 turbo pump)..................................... 35
Outlet mist lter(for E2M1.5 rotary vacuum pump)........................................................ 35
Technical Reference 36
Operang and storage condions.................................................................................... 36
Mechanical data............................................................................................................... 36
Pump performance data...................................................................................................37
Pumped media................................................................................................................. 38
Venng gas specicaon and vent control data...............................................................39
Materials exposed to gases pumped................................................................................ 40
Electrical connecons....................................................................................................... 40
Electrical data................................................................................................................... 42
D395-94-880A - Contents
Page 6
List of Figures
Figure 1: General view of the T-Staon 85.................................................................................. 10
Figure 2: Turbomolecular pump start delay with XDD1 diaphragm pump.................................. 15
Figure 3: Front panel display....................................................................................................... 16
Figure 4: Menu structure.............................................................................................................18
Figure 5: Turbo screen................................................................................................................. 19
Figure 6: Gauge screen................................................................................................................ 20
Figure 7: Vent valve screen.......................................................................................................... 21
Figure 8: Turbo setpoint screen................................................................................................... 22
Figure 9: Turbo setpoint number entry mode............................................................................. 23
Figure 10: Calibrate gauge screen............................................................................................... 24
Figure 11: Units screen................................................................................................................ 24
Figure 12: Dimensions - T-Staon 85...........................................................................................37
Figure 13: Max allowed rate of pressure rise during venng: pressure against me (pump
inially at full speed).............................................................................................................. 40
Figure 14: Pin connecons for 15-way sub-miniature 'D' type socket.........................................41
Figure 15: Pin connecons for an 8-way RJ45............................................................................. 42
Figure 16: HS1 Form.................................................................................................................... 43
Figure 17: HS2 Form.................................................................................................................... 44
D395-94-880A - List of Figures
Page 7
List of Tables
Table 1: Checklist of items........................................................................................................... 11
Table 2: Front panel symbols and their funconsl.......................................................................16
Table 3: Menu items.................................................................................................................... 17
Table 4: Turbo screen key acons................................................................................................ 19
Table 5: Gauge screen key acons............................................................................................... 20
Table 6: Vent valve screen........................................................................................................... 21
Table 7: Vent valve screen key acons.........................................................................................21
Table 8: Turbo setpoint screen key acons..................................................................................23
Table 9: Calibrate gauge screen key acons................................................................................ 24
Table 10: Units screen key acons...............................................................................................24
Table 11: Error numbers.............................................................................................................. 29
Table 12: TAV vent valve kits and adaptor................................................................................... 35
Table 13: Outlet mist lter...........................................................................................................35
Table 14: Operang and storage condions................................................................................36
Table 15: Mechanical data........................................................................................................... 36
Table 16: Pump performance data - nEXT85H.............................................................................37
Table 17: Pump performance data - nEXT85D.............................................................................38
Table 18: Vent gas specicaon and vent control....................................................................... 39
Table 19: Electrical connecons.................................................................................................. 40
Table 20: Turbo pump connector pin-out....................................................................................41
Table 21: Acve gauge connector pin-out................................................................................... 42
Table 22: Electrical data...............................................................................................................42
D395-94-880A - List of Tables
Page 8
Safety and compliance
Denion of Warnings and Cauons
Important safety informaon is highlighted as WARNING and CAUTION instrucons; these
instrucons must be obeyed.
The use of WARNINGs and CAUTIONs is dened below.
WARNING:
Warnings are given where failure to observe the instrucon could result in injury or death
to people. The actual symbol shown varies according to the hazard.
CAUTION:
Cauons are given where failure to observe the instrucon could result in damage to the
equipment, associated equipment or process.
Safety symbols
The safety symbols on the products denote areas where care and aenon is required.
The following safety symbols may be used on the T-Staon 85 or throughout the product
documentaon.
Warning/Cauon
An appropriate safety instrucon should be followed or cauon to a potenal
hazard exists.
Warning - Dangerous Voltage
Indicates hazards arising from dangerous voltages.
Warning - Hot Surfaces
Indicates that the marked item may be hot and should not be touched
without taking precauons.
D395-94-880A - Safety and compliance
Page 9
General descripon
For the general descripon of the major components used on the T-Staon 85, select the
appropriate instrucon manual reference against each product type.
Diaphragm pump XDD1 A746-02-885
Rotary vane pumps E2M0.7 / E2M1.5 A371-32-880
Turbomolecular pumps nEXT85 B8G0-00-880
Overview
The T-Staon 85 is a small compact fully automac pumping system which is suitable for a
wide range of vacuum applicaons.
The T-Staon 85 can be supplied with either an XDD1 oil free diaphragm pump or an E2M1.5
rotary vane pump. Both system variants use a nEXT85 turbomolecular pump.
The T-Staon 85 is controlled by an easy to use touch pad control module. A single gauge input
included can be connected to a range of Edwards acve gauges allowing for pressure
measurement and/or control management of the turbomolecular pump.
The compact size of the T-Staon 85 is ideal for use on bench tops or suitable mobile
plaorms. The open system conguraon allows easy maintenance of the main pump
components.
Figure 1 General view of the T-Staon 85
A. Front view (T-Staon with E2M1.5 backing pump opon)
B. Rear view (T-Staon with XDD1 backing pump opon)
1. T-Staon control unit
2. E2M1.5 gas ballast control
3. Backing pump
4. Turbomolecular pump inlet
5. Turbomolecular pump connector
6. Vacuum gauge input
7. T-Staon xing points for bench top
mounng
8. T-Staon liing handles
9. Backing pump mains connector
10. Mains input
D395-94-880A - General descripon
Page 10
Installaon
Installaon safety
WARNING:
Risk of injury or damage to equipment. Follow the safety instrucons and take note of all
appropriate precauons.
•When referring to a manual supplied as a Supplementary Publicaon, all of the
WARNING and CAUTION instrucons in the manual must be obeyed.
•A suitably trained and supervised technician must install the T-Staon 85.
•Check that all the required parts are available and of the correct type before
commencing work.
•Ensure that the installaon technician is familiar with the safety procedures which
relate to the products pumped.
•Wear the appropriate safety clothing when coming into contact with contaminated
components.
•Isolate the other components in the system from the electrical supply so that they
cannot be operated accidentally.
•Do not reuse O-rings and co-seals if they are damaged.
•Dispose of components, grease and oil safely (refer to Disposal on page 32).
•Take care to protect sealing faces from damage.
•Leak tesng the system aer installaon is complete to ensure opmum vacuum
performance is recommended.
Unpack and inspect
1. Remove the outer cover and all packing materials, remove the protecve covers from
the inlet and outlet ports, inspect the system for any damage.
2. If the T-Staon 85 is damaged, nofy the supplier and the carrier in wring within
three days; state the item number of the T-Staon 85 together with the order number
and the supplier's invoice number. Retain all packing materials for inspecon. Do not
use the pump if it is damaged.
3. Check that the package contains the items listed in Table 1 on page 11. If any of
these items are missing, nofy the supplier in wring within three days.
4. If the pump is not to be used immediately, replace the protecve covers and store in
suitable condions as described in Storage on page 31.
Table 1 Checklist of items
Quanty Descripon Check
1T-Staon 85 ❏
1 CD instrucon manual P450-00-000 ❏
1 Ultragrade 15 oil 1 litre (supplied with E2M1.5 only) ❏
1 Inlet seal (either trapped O-ring, co-seal or copper
compression gasket suitable for the inlet ange type)
❏
D395-94-880A - Installaon
Page 11
Locate the T-Staon 85
WARNING:
Heavy objects can cause muscle strain or back injury. The mass of the T-Staon 85 will
dier depending on the model supplied.
WARNING:
The turbo pump used on the T-Staon 85 stores a large amount of kinec energy when it
is running at full speed. In the unlikely event of a malfuncon (rotor seizure), the stored
energy could cause a slight movement of the T-Staon 85 plaorm. If the T-Staon 85 is
operang on a bench top, taking the following steps is advised: (a) Posion the T-Staon
85 at least 10-15 cm away from the edge of the bench top and adjacent devices and/or (b)
Tether or x the T-Staon 85 to the bench top, see Bench top xing on page 12.
CAUTION:
When locang the T-Staon 85, care should be taken not to restrict the venlaon grid
located under the base of the system. Failing to observe this may result in overheang of
the turbomolecular pump.
Bench top xing
There are two M8 xing points located at the rear of the T-Staon 85 base (Figure 1 on page
10, item 7). Using suitable brackets or straps (not supplied), securing the T-Staon 85 to the
bench top is recommended to prevent excessive movement in the unlikely event of a pump
failure.
Note:
Straps or brackets cannot be provided as the best type xing for the customer bench top
locaon cannot be determined. Sourcing or fabricang these xings locally is recommended.
Fill the pump with oil
Procedure for lling the pump with the recommended oil.
If the T-Staon 85 uses an E2M1.5 rotary vane pump, it must be lled with the correct quanty
of oil (supplied) before operang the equipment. For further informaon refer to the EM
Rotary Vane Pump manual A371-32-880.
Fill the pump with oil as follows:
1. Remove the oil ller plug.
2. Pour oil into the pump unl the oil level just reaches the MAX mark on the bezel at the
top of the sight glass. If the oil level goes above the MAX mark, remove the drain plug
and drain the excess oil from the pump.
3. Aer a few minutes, recheck the oil level. If the oil level is now below the MAX mark,
pour more oil into the pump.
4. Ret the oil ller plug. Tighten the plug rmly by hand. Do not over ghten.
D395-94-880A - Installaon
Page 12
Connect to the vacuum system
WARNING:
Connect the turbo pump inlet to the vacuum system before applying power to the T-
Staon 85. This will ensure that the pump cannot operate accidentally causing injury.
WARNING:
If installing the vacuum system directly onto the T-Staon 85, the weight of the system
must be no more than 10 kg and the centre of gravity must be posioned laterally within
the bounds of the base plate. If this is not the case, the vacuum system must be supported
to ensure that the T-Staon 85 does not topple.
1. The turbo pump can be securely xed to the vacuum system via the inlet ange. Make
sure that the pump inlet and all components ed to the pump inlet are clean and
dust-free. If the pump inlet is not kept clean, the pump down me may be increased.
2. If the pump has a CF ange, use the copper compression gasket supplied with the
pump and use a full complement of bolts to connect the inlet ange of the pump to
the vacuum system.
3. If the pump has an ISO ange, use a minimum of four claw clamps (each torqued to
10 Nm) to connect the inlet ange of the pump to the vacuum system. Alternavely,
use a rotatable collar and the combined inlet screen and trapped O-ring supplied with
the pump to connect the inlet ange of the pump to the vacuum system; use a full
complement of bolts with the rotatable collar.
4. If the pump has an NW ange, use the centring ring supplied with the pump and a
metal NW clamp to connect the inlet ange of the pump to the vacuum system.
5. All inlet ange bolts must be re-ghtened once the system is under vacuum. Ensure
that no torques or other forces are transmied to the pump from the vacuum system
or the associated pipelines.
Connect to the exhaust extracon system
WARNING:
Vent dangerous gases and gas mixtures safely. Do not expose people to these gases. If
pumping hazardous gases or vapours, observe the safety recommendaons of the supplier
of the gas/vapour.
Note:
This secon applies to E2M1.5 versions only.
The exhaust system must be congured so that the maximum pressure at the pump outlet
does not exceed 0.5 bar gauge (1.5 bar absolute, 1.5 x 105 Pa) at full pump throughput.
1. Make sure that the exhaust pipeline cannot become blocked.
2. If using an exhaust isolaon valve, make sure the pump cannot be operated with the
valve closed.
D395-94-880A - Installaon
Page 13
Connect the electrical supply
WARNING:
Ensure that the electrical installaon of the pump conforms with all local and naonal
safety requirements. It must be connected to a suitably fused and protected electrical
supply with a suitable earth point.
CAUTION:
Always make the electrical connecons to the T-Staon 85 aer the equipment has been
installed on the vacuum system. Always disconnect the electrical supply from the T-Staon
85 before removing the equipment from the vacuum system.
Check that the electrical supply is suitable for this equipment. Refer to Table 22 on page 42
for the electrical requirements for this equipment.
Make the electrical connecon to the T-Staon 85 using a cable ed with an IEC60320
connector.
A range of suitable cables is available from the supplier.
Congure the T-Staon 85
As supplied from the factory, the T-Staon 85 will control the system as follows:
System start is selected:
•The TAV vent valve will close.
•The backing pump will turn on.
•The turbomolecular pump will start accelerang up to full rotaonal speed.
System o is selected:
•The backing pump will turn o.
•The turbomolecular pump drive will turn o and the pump will start to decelerate.
•The TAV vent valve will open fully from 50% of full rotaonal speed.
Turbo pump delay
The T-Staon 85 can be congured to delay the turbo pump aer the backing pump has
started.
Refer to Turbo setpoint screen on page 22. The delay is helpful to prevent the turbomolecular
pump from accelerang under high pressure for a prolonged period if the volume being
pumped is greater than 2 litres. This opon is especially useful if the T-Staon 85 uses an XDD1
diaphragm pump.
Figure 2 on page 15 shows the recommended delay period for a turbo / XDD1 pump
combinaon.
*This operaon refers to systems which have been ed with an Edwards TAV vent valve (oponal
accessory). For more vent opons refer to Vent valve screen on page 20.
D395-94-880A - Installaon
Page 14
Figure 2 Turbomolecular pump start delay with XDD1 diaphragm pump
Connect a vacuum gauge
A single compable acve gauge can be ed to the T-Staon 85.
Fit the gauge using an Edwards acve gauge cable into the gauge connector located on the side
of the controller housing (refer to Figure 1 on page 10, item 6). For acve gauge control and set
up refer to Gauge screen on page 19.
The following Edwards acve gauges are suitable for use with the T-Staon 85:
•APG100 Acve Pirani vacuum gauge
•APGX-H Acve Linear Convecon gauge
•AIM-X Acve Inverted Magnetron gauge
•ASG Acve Strain gauge
Commission the installaon
Aer installing the T-Staon 85, the system must be tested.
Use the following procedure to test the system:
1. Make sure that all the electrical connecons are secure.
2. Switch on the electrical supply and the exhaust extracon system (if available).
3. To operate the system press the START/STOP key. Check that the equipment operates
as described in .
4. Check that the turbo pump reaches normal speed. If the pump inlet is valved or
capped o, it should take approximately 100 - 150 seconds for the turbo to reach
normal speed. If a vacuum chamber is aached to the pump inlet, this me may take
longer.
5. To turn OFF the system, press the START/STOP key followed by the ENTER key to
conrm. Check that the equipment closes down as described in .
For full operaonal details and how to navigate using the front panel control key pad refer to
Menu structure on page 17.
D395-94-880A - Installaon
Page 15
Operaon
WARNING:
Do not aempt to move the T-Staon 85 while the turbo pump is rotang. Doing so may
cause severe damage to the pump and could cause injury.
CAUTION:
To familiarise yourself with the vacuum pumps installed on the T-Staon 85, it is advisable
to read the relevant instrucon manuals (refer to General descripon on page 10).
Control panel descripon
Figure 3 Front panel display
1. Start/ Stop
2. Enter
3. Next
Table 2 Front panel symbols and their funconsl
Key pad symbol Name Funcon
1START/STOP Turns the pumps on and o.
Returns to turbo menu screen.
2ENTER Selects or conrms current menu opon.
Controls acve gauges.
3NEXT Moves to next menu.
Scrolls through menu opons.
The LEDs along the top of the T-Staon 85 display indicate which menu screen is currently
being shown on the numeric display. To move to the next menu item press the NEXT key and to
return to the turbo menu screen press the START/STOP key. The available items are listed in
order in Table 3 on page 17.
D395-94-880A - Operaon
Page 16
Table 3 Menu items
Turbo screen
Gauge screen
Vent valve screen
Turbo setpoint (TSP) screen
Calibrate gauge screen
Units screen
Start up
When applying power to the T-Staon 85 all LEDs in the display will light for 2 seconds to
conrm operaon. The soware version will then be displayed for a further 2 seconds. If you
need to contact Edwards for support regarding the T-Staon 85, please have this soware
version number available.
Menu structure
Figure 4 on page 18 shows the view screen shortcuts and menu structure for the T-Staon 85
control display. They also give an indicaon as to where buons will take you within the menu
layout.
D395-94-880A - Operaon
Page 17
Figure 4 Menu structure
Turbo screen
When the turbo screen is selected, the turbo LED is lit and the speed of the turbomolecular
pump is displayed in percentage of full speed.
If no turbo pump is connected the display shows "---".
D395-94-880A - Operaon
Page 18
Figure 5 Turbo screen
Start the pump with the turbo screen
When the START/STOP key is pressed, both the turbo and backing pumps start. The display
shows the turbo pump is accelerang by ashing the top le poron of the percentage sign.
When the turbo pump reaches normal speed (>80% default) the percentage sign stops ashing
and remains steady.
If a turbo setpoint (TSP) has been set, only the backing pump starts when the START/STOP key
is pressed. The TSP LED ashes unl the setpoint has been reached. Once the setpoint has
been reached the turbo pump starts and the TSP LED turns OFF. If no turbo setpoint has been
set, the TSP LED remains OFF.
Stop the pump with the turbo screen
1. To stop the pumps press the START/STOP key; the display will show "Stop" for three
seconds.
2. Press the ENTER key within that me to stop the pumps. If the ENTER key has not been
pressed, or the START/STOP or NEXT keys are pressed, the display shows the turbo
pump speed and the pumps remain running.
When the turbo pump is decelerang the boom right poron of the percentage sign
ashes unl the pump has completely stopped.
Turbo screen key acons
Table 4 Turbo screen key acons
Keys Short press Long press
START START the turbo, or inialise turbo
STOP sequence, or cancel turbo
STOP, or force turbo STOP when in
error
-
ENTER Acknowledge turbo STOP Fault code display when in error
NEXT Go to gauge screen, or cancel turbo
STOP
Scroll through menu screens
Gauge screen
When the gauge screen is selected, the gauge LED is lit and the gauge pressure reading is
displayed in the selected units.
If no gauge is connected the display shows "---".
D395-94-880A - Operaon
Page 19
Connect a gauge
When a gauge is rst connected the display shows "ID" followed by a number to idenfy the
new gauge.
If the gauge is an Acve Strain Gauge (ASG), the display then goes to ASG range select,
otherwise the display reverts to showing the pressure reading. If the gauge type is not
supported the display shows "???". When no gauge is connected the display shows "---".
Figure 6 Gauge screen
ASG range select
When an ASG is connected the display changes to select the ASG range. 1000 mbar is assumed
by default, and the display ashes "1.03".
Press the NEXT key to select between 1000 and 2000 mbar, then press the ENTER key to
conrmed the selecon.
Gauge ON/OFF control
Gauges which support ON/OFF control (e.g. AIM gauges) can be turned ON and OFF using the
ENTER key.
When rst connected the gauge is in the OFF state and the display shows "OFF". When the
gauge is turned on the display will show "Str" whilst the gauge is starng up, and will then
display pressure.
Gauge screen key acons
Table 5 Gauge screen key acons
Keys Short press Long press
START Go to turbo screen -
ENTER ON/OFF control of supported gauge
or acknowledge error
-
NEXT Go to vent control screen Scroll through menu screens
Vent valve screen
If a TAV solenoid vent valve is connected to the turbo pump podule the operaon of the valve
is controlled by the vent valve screen.
When the vent valve screen is selected, the vent LED is lit and the current vent valve control
seng is displayed. The default is "50%". The vent valve screen is not available if the turbo
pump is running.
1. Select the appropriate seng for either normally open or normally closed vent valve.
D395-94-880A - Operaon
Page 20
2. To change the vent valve seng press the ENTER key, then use the NEXT key to choose
between 50%, Ctrld and FAN.
3. Press the ENTER key again to conrm the selecon.
Table 6 Vent valve screen
50
no
Normally open vent valves. Vent valve opens fully when the speed of the turbo pump
drops below 50% full rotaonal speed.
Ctl
no
Normally open vent valves. Controlled venng from 100% to 50% full rotaonal
speed; vent valve opens fully below 50%.
Fan Normally open vent valves. The vent valve connecon on the turbo pump is
permanently powered so that the vent valve will remain closed. This can also be used
to provide power to an air cooler (for example, ACX75).
O Normally closed vent valves. The vent valve connecon on the turbo pump is
permanently disabled so the vent valve will remain closed.
50
nc
Normally closed vent valves. The vent valve will open when the speed of the turbo
pump has dropped below 50% during stop but not fail condions.
Ctl
nc
Normally closed vent valves. Controlled venng from 100% to 50% full rotaonal
speed, vent valve opens fully below 50% during stop but not fail condions.
Figure 7 Vent valve screen
Vent valve screen key acons
Table 7 Vent valve screen key acons
Keys Short press Long press
START Go to turbo screen -
ENTER Enter edit mode, or conrm
selecon
-
NEXT Next vent opon, or go to TSP
control screen
Scroll through vent opons in edit
mode or scroll through menu
screens
D395-94-880A - Operaon
Page 21
Turbo setpoint screen
The turbo setpoint screen is used to congure the start delay of the turbo pump.
When the turbo setpoint screen is selected, the TSP LED is lit and the current setpoint is
displayed. The default is "OFF". The turbo setpoint menu is not available if the turbo pump is
running or the selected units are volts.
1. To change the turbo setpoint press the ENTER key, then use the NEXT key to choose
between o, me delay and pressure setpoint.
2. Press the ENTER key again to conrm the selecon.
3. When me delay is selected the display will show the delay me in seconds. The
default me is 120 s. This means that the turbo pump will start aer a delay of 120 s
from when the START key is pressed. To change the value of the delay me press and
hold the ENTER key to start number entry mode.
4. If an acve gauge is connected to the system the pressure setpoint can be used to start
the turbo pump once the pressure has fallen below the setpoint value. When pressure
is selected the display shows the setpoint pressure. The default pressure is "5.00" mbar
shown as an exponenal. To change the pressure setpoint, press and hold the ENTER
key to start number entry mode.
Note:
If the turbo setpoint is set to pressure but a gauge is not connected the turbo pump will not
start.
Figure 8 Turbo setpoint screen
Number entry mode
When the ENTER key is pressed and held on either the me or pressure opon, number entry
mode is entered. The rst digit starts ashing and the me or pressure can be edited.
1. Press the NEXT key to adjust the value, then press the ENTER key to conrm the digit
and then move on to the second digit, which is adjusted similarly. The ENTER key
conrms the digit and then moves to the nal digit of the me setpoint or the
exponent of the pressure setpoint. The exponent of the pressure setpoint is adjusted
as a single value in the range - 10 to + 6.
2. The nal press of ENTER conrms the complete number and returns to showing the
setpoint value. The TSP is set aer the complete number is entered.
D395-94-880A - Operaon
Page 22
Figure 9 Turbo setpoint number entry mode
Turbo setpoint screen key acons
Table 8 Turbo setpoint screen key acons
Keys Short press Long press
START Go to turbo screen -
ENTER Enter edit mode, or conrm
selecon
Enter number entry mode
NEXT Next TSP opon, next number or go
to gauge calibraon screen
Scroll through TSP opons in edit
mode, scroll through numbers in
number entry or scroll through
menu screens
Calibrate gauge screen
When the calibrate gauge screen is selected, the gauge LED and the CAL LED are lit together.
The numeric display is blank. The calibrate gauge menu is not available for gauges which do not
support calibraon.
When the ENTER key is pressed the acon depends on gauge type:
WRG or APGX: The calibraon command is sent to the gauge and the display shows "CALd" for
3 seconds.
ASG: The calibraon funcons as a zero oset adjustment. The pressure currently displayed is
saved as the zero oset and is subtracted from all future readings. The display shows "CALd"
for 3 seconds to conrm the acon. The oset adjustment can be cancelled by pressing the
ENTER key again. The display shows "OFF" for 3 seconds to conrm that the oset adjustment
has been removed.
D395-94-880A - Operaon
Page 23
Figure 10 Calibrate gauge screen
Calibrate gauge screen key acons
Table 9 Calibrate gauge screen key acons
Keys Short press Long press
START Go to turbo screen -
ENTER Calibrate gauge -
NEXT Go to units screen Scroll through menu screens
Units screen
When the units screen is selected, the menu LEDs are unlit and the currently selected units LED
is lit. The numeric display is blank.
To change the units press the ENTER key and use the NEXT key to choose between mbar, Torr,
Pa and voltage. Press the ENTER key again to conrm the selecon. Note that when voltage is
selected the display shows " 0.000".
When the units are changed, the setpoint values will be converted to the new units. For
example, if a setpoint threshold is entered as 1.0 x 10-3 mbar and the units are changed to
Torr, then the value will be displayed as 7.5 x 10-4 Torr.
Figure 11 Units screen
Units screen key acons
Table 10 Units screen key acons
Keys Short press Long press
START Go to turbo screen -
ENTER Enter edit mode, or conrm
selecon
-
NEXT Next units opon, or go to turbo
screen
Scroll through units in edit mode, or
scroll through menu screens
D395-94-880A - Operaon
Page 24
Gas ballast control (E2M1.5)
Use the gas ballast control to change the amount of air (or inert gas) introduced into the low
vacuum stage of the pump.
Use of the gas ballast will prevent the condensaon of vapours in the pump; the condensates
would contaminate the oil.
Use the gas ballast control (Figure 1 on page 10, item 2) closed:
•to achieve ulmate vacuum
•to pump dry gases.
Turn the gas ballast control six turns an-clockwise to open it fully.
Use the gas ballast control open:
•to pump high concentraons of condensable vapour
•to pump high concentraons of condensable vapour
When operang the pump with the gas ballast control open, there will be an increased rate of
oil loss from the pump.
Electrical supply failure
WARNING:
Risk of injury or death. If the power supply fails when the pump is running, the impeller
could connue to spin for approximately 10 minutes. The control circuit may not give any
indicaon that the impeller is sll running.
If the electrical supply to the T-Staon 85 fails when the turbo pump is rotang, the motor of
the turbo pump is used as a generator. The regenerated power is used to maintain the control
system and the display. The regenerated power is not used to maintain the T-Staon 85 control
system or the display.
When power to the control system is lost, no indicaon will be given about pump rotaonal
speed, yet the impeller may sll be turning.
The system will not restart when the power is reinstated.
D395-94-880A - Operaon
Page 25
Maintenance
Maintenance safety
WARNING:
Risk of injury or damage to equipment. Follow the safety instrucons and take note of all
appropriate precauons.
•When referring to a manual supplied as a Supplementary Publicaon, all of the
WARNING and CAUTION instrucons in the manual must be obeyed.
•A suitably trained and supervised technician must maintain the T-Staon 85.
•Allow the system to cool (so that it is at a safe temperature for skin contact) before
starng maintenance work. Make sure the system is switched o in case the thermal
overload device restarts the system.
•Check that all the required parts are available and of the correct type before starng
work.
•Ensure that the maintenance technician is familiar with the safety procedures which
relate to the pump oil and the products processed by the pumping system.
•Isolate the system and other components from the electrical supply so that they
cannot be operated accidentally.
•Do not reuse O-rings and seals if they are damaged.
•Dispose of components, grease and oil safely (refer to Disposal on page 32).
•Protect sealing faces from damage.
•Leak tesng the system is recommended aer maintenance. Seal any leaks found if any
vacuum or exhaust pipeline connecons have been disconnected.
Maintenance plan
WARNING:
If the turbo pump is removed from the T-Staon 85 plaorm, it is important to retain and
reuse the same xing screws. If any of these screws are lost or cannot be used, the
following type M5 x 12 mm CAP HD high tensile class 12.9 must be used. If this warning is
ignored and the turbo pump seizes, the stored energy in the turbo pump may cause some
or all of the screws to fail. This may result in the turbo pump being ejected from the T-
Staon 85 base.
List of instrucon manuals that state the minimum maintenance operaons necessary to
maintain the T-Staon 85 in normal use:
Diaphragm pump XDD1 A746-02-885
Rotary vane pumps E2M0.7 / E2M1.5 A371-32-880
Turbomolecular pumps nEXT85 B8G0-00-880
More frequent maintenance may be necessary if the T-Staon 85 has been used to pump
corrosive or abrasive gases and vapour. If necessary, adjust the maintenance plan according to
your experience.
D395-94-880A - Maintenance
Page 26
Inspect the hoses, pipelines and connecons
1. Inspect all of the electrical connecons and check that they are secure. Tighten any
loose connecons.
2. Inspect all of the electrical cables and check that they are not damaged and have not
overheated. Replace or repair any damaged or overheated cable.
3. Inspect all of the vacuum and exhaust connecons and check that they are secure.
Tighten any loose connecons.
4. Inspect all of the vacuum and exhaust pipelines and check that they are not corroded
or damaged and that they do not leak. Replace or repair any corroded or damaged
component and seal any leaks found.
Factory default sengs
Procedure to return the T-Staon 85 to the factory default sengs.
1. Remove the mains power from the T-Staon 85.
2. Press the NEXT key and hold it down whilst reapplying mains power. Connue holding
down the NEXT key unl "Err01" is displayed.
3. Remove and reapply mains power. The factory defaults will now be set.
D395-94-880A - Maintenance
Page 27
Fault nding
The T-Staon 85 has failed to start
Cause The electrical supply fuse has blown.
Remedy Replace the fuse. Refer to Table 19 on page 40.
Cause The operang voltage is incorrect.
Remedy Check the voltage supply matches the T-Staon 85 voltage requirements. Refer to the
electrical rang label located at the rear of the T-Staon 85.
Ulmate pressure cannot be reached
Cause Pressure is limited by water vapour.
Remedy Bake the chamber or run the system for a duraon unl the vacuum improves.
Cause The vacuum gauges are contaminated.
Remedy Clean or replace the vacuum gauges.
Cause Pumping speed is insucient due to poor conductance between the pump and the gauge or
the chamber is too large.
Remedy Increase the conductance or reduce the volume.
Cause The backing pressure is > 10 mbar (1x103 Pa).
Remedy The backing pressure may be too high. Check for backing pipeline leaks. If the throughput is
high, a larger backing pump may be required.
Cause The high vacuum area of the system is contaminated.
Remedy Clean the high vacuum system.
Cause Check the rest of the system for leaks and contaminaon.
Remedy If found, repair the leaks and clean the contaminaon.
Cause The inlet pressure is poor.
Remedy If inlet pressure is poor, check the turbo pump for contaminaon and refer to the
Troubleshoong secon of the turbo pump manual.
Leak test the pump. If the leak rate > 1x10-7 mbar l s-1 (1x10-5 Pa l s-1), contact the supplier or
Edwards.
The backing pump is noisy
Cause Listed in Fault Finding secon of the backing pump manual.
Remedy Refer to the Fault Finding secon of the backing pump manual. See General descripon on
page 10.
The backing pump is leaking oil
Cause Listed in Fault Finding secon of the backing pump manual.
Remedy Refer to the Fault Finding secon of the backing pump manual. See General descripon on
page 10.
D395-94-880A - Fault nding
Page 28
The turbo pump is very noisy or there is excessive vibraon or both
Cause Listed in Troubleshoong secon of the turbo pump manual.
Remedy Refer to the Troubleshoong secon of the turbo pump manual. See General descripon on
page 10.
Error numbers
If an error is detected by the controller the display will show "Err" followed by a number.
Refer to Table 11 on page 29 for a descripon of the error together with likely causes and
suggested remedies.
Table 11 Error numbers
Error
Number
Meaning Possible cause/remedy
Controller errors
1 EEPROM error The internal EEPROM checksum has failed. All user
sengs will revert to the factory default.
2 ID reference error The reference used for idenfying gauges is
incorrect. Please remove all connected gauges, turn
the electrical supply o and on, and wait for 30
seconds before reconnecng the gauges.
Gauge errors
11 Gauge voltage too high The voltage from a gauge is too high. The gauge may
be defecve.
12 Gauge voltage too low The voltage from a gauge is too low. The gauge may
be defecve.
21 WRG Pirani failure Errors specic to WRG. Refer to the WRG manual for
details. Press the ENTER key to clear the error from
the display once the fault has been corrected.
22 WRG magnetron short
23 WRG striker fail
24 WRG magnetron not
struck
25 APGX lament failure Errors specic to APGX. Refer to the APGX manual for
details. Press the ENTER key to clear the error from
the display once the fault has been corrected.
26 APGX cal err
27 APGXH tube not ed
D395-94-880A - Fault nding
Page 29
Error
Number
Meaning Possible cause/remedy
Pump errors
41 Turbo pump fault Inspect the LEDs on the turbo pump podule for
status informaon. For more detailed fault codes,
press and hold the ENTER key (whilst Err41 is
showing) to display the turbo pump system status
word. The lower 16 bits of the status word are
displayed in hexadecimal. Press the START / STOP key
to clear the error message. Refer to the instrucon
manual of the turbo pump for detailed fault nding.
D395-94-880A - Fault nding
Page 30
Storage
Use the following procedure to store the T-Staon 85.
1. Shut down the T-Staon 85 as described in Stop the pump with the turbo screen on
page 19.
2. Isolate the T-Staon 85 from the electrical supply and disconnect it from the vacuum
system.
3. Drain the oil from the backing pump (only applicable to the E2M1.5 rotary vane pump)
as described in the instrucon manual, (refer to General descripon on page 10).
4. Place protecve covers over the inlet and outlet anges.
5. For the fastest pump down aer the T-Staon 85 is reinstalled, seal the
turbomolecular pump inside a plasc bag together with a suitable desiccant.
6. Store the T-Staon 85 in cool, dry condions unl required for use.
D395-94-880A - Storage
Page 31
Disposal
Dispose of the T-Staon 85 and any components and accessories safely and in accordance with
all local and naonal safety and environmental requirements.
Parcular care must be taken with any components that have been contaminated with
dangerous process substances.
For instrucon on draining the oil from the E2M1.5 rotary vane pump refer to the instrucon
manual for the pump. Refer to General descripon on page 10.
D395-94-880A - Disposal
Page 32
Service
Note:
Edwards policy is to provide support for product aer obsolescence through various opons
including maintenance, repair, enhancement and replacement. Support will be available for
several years aer product obsolescence and in compliance with any applicable legislaon.
Edwards will always undertake appropriate acons to ensure support is maintained and,
where support is no longer possible, will ensure this is communicated to all aected
customers with a suitable noce period.
Edwards products, spares and accessories are available from Edwards companies in Belgium,
Brazil, China, France, Germany, Israel, Italy, Japan, Korea, Singapore, United Kingdom, U.S.A and
a world-wide network of distributors. The majority of these centres employ Service Engineers
who have undergone comprehensive Edwards training courses.
Order spare parts and accessories from the nearest Edwards company or distributor. When
ordering, state for each part required:
•Model and Item Number of the equipment
•Serial number
•Item Number and descripon of part.
Edwards products are supported by a world-wide network of Edwards Service Centres. Each
Service Centre oers a wide range of opons including: equipment decontaminaon; service
exchange; repair; rebuild and tesng to factory specicaons. Equipment which has been
serviced, repaired or rebuilt is returned with a full warranty.
Local Service Centres can also provide Edwards engineers to support on-site maintenance,
service or repair of equipment. For more informaon about service opons, contact the
nearest Service Centre or other Edwards company.
D395-94-880A - Service
Page 33
Spares
CAUTION:
Use of non-Edwards spares may result in reduced reliability and performance and will
invalidate product warranty.
The spares available for the turbo pump and backing pumps are listed in the CD instrucon
manuals supplied with your equipment. Refer to General descripon on page 10.
D395-94-880A - Spares
Page 34
Accessories
TAV vent valve and vent port adaptor (for nEXT85 turbo pump)
A solenoid operated vent valve is available for system venng.
The valve is a 24 V d.c., normally-open or normally-closed and can be driven by the turbo pump
podule. The solenoid valve is ed in place of the manual valve, or alternavely can be ed
with an adaptor (supplied with the valve) and can be used with any suitable NW10 anged port
on the vacuum system.
Table 12 TAV vent valve kits and adaptor
Descripon Item number
nEXT85 TAV5 kit N/C connector ed (0.3 m) B8G2-00-835
nEXT85 TAV5 kit N/C bare wire (3 m) B580-66-040
nEXT85 TAV5 kit N/O connector ed (0.3 m) B8G2-00-834
nEXT85 TAV5 kit N/O bare wire (3 m) B580-66-010
Vent port adaptor NW10 -1/8 inch BSP male B580-66-011
Outlet mist lter(for E2M1.5 rotary vacuum pump)
The outlet mist lter separates and traps oil droplets in the pump outlet to prevent oil mist
discharge.
For all other accessories such as gauges, acve cables and mains leads, refer to the T-Staon 85
ordering informaon in the Edwards product catalogue.
Table 13 Outlet mist lter
Descripon Item number
EMF3 outlet mist lter A462-20-000
D395-94-880A - Accessories
Page 35
Technical Reference
Note:
The operang, storage condions and performance of the T-Staon 85 may depend on the
type of backing pump ed to the T-Staon 85; refer to the technical data in the appropriate
supplementary publicaons as listed in General descripon on page 10.
Operang and storage condions
Table 14 Operang and storage condions
Parameter Value Units
Ambient operang temperature range 12 to +40 °C
Ambient storage temperature range -30 to +70 °C
Maximum operang humidity maximum 90
condensing at 40
% RH and °C
Maximum operang altude 2000 maximum m
Sound level 56 dB(A)
Polluon degree (EN61010) 2 -
Maximum outlet pressure
- XDD1 pump
- E2M1.5 pump
1.1 (1.1 x 105)
1.5 (1.5 x 105)
bar absolute (Pa)
Maximum permied external magnec eld
(nEXT85 turbo)
5 mT
Mechanical data
Table 15 Mechanical data
Parameter Data
Dimensions Refer to Figure 12 on page 37
Degree of protecon (to IEC34-5:1981) IP20
Mass:
- XDD1 combinaon
- E2M1.5 combinaon
17 kg max
21 kg max
D395-94-880A - Technical Reference
Page 36
Figure 12 Dimensions - T-Staon 85
All measurements indicated are shown in mm (inches)
Pump performance data
Table 16 Pump performance data - nEXT85H
Turbomolecular pump type nEXT85H ISO63 nEXT85H CF63 nEXT85H NW40
Inlet pumping speed:
Nitrogen 84 ls-1 84 ls-1 47 ls-1
Helium 78 ls-1 78 ls-1 61 ls-1
Hydrogen 54 ls-1 54 ls-1 49 ls-1
Argon 80 ls-1 80 ls-1 44 ls-1
Inlet compression rao:
Nitrogen > 1 E+11 > 1 E+11 > 1 E+11
Helium 2 E+07 2 E+07 2 E+07
Hydrogen 5 E+05 5 E+05 5 E+05
Argon > 1 E+11 > 1 E+11 > 1 E+11
Ulmate pressure:
with rotary vane backing pump *< 5 E-09 mbar < 5 E-10 mbar < 5 E-09 mbar
with diaphragm backing pump §< 5 E-08 mbar < 5 E-09 mbar < 5 E-08 mbar
*Ulmate pressure 48 hours aer bakeout with 2-stage rotary vane backing pump.
§Ulmate pressure 48 hours aer bakeout with backing pressure < 5 mbar (500 Pa).
D395-94-880A - Technical Reference
Page 37
Table 17 Pump performance data - nEXT85D
Turbomolecular pump type nEXT85D ISO63 nEXT85D CF63 nEXT85D NW40
Inlet pumping speed:
Nitrogen 84 ls-1 84 ls-1 47 ls-1
Helium 78 ls-1 78 ls-1 61 ls-1
Hydrogen 60 ls-1 60 ls-1 49 ls-1
Argon 80 ls-1 80 ls-1 44 ls-1
Inlet compression rao:
Nitrogen > 1 E+11 > 1 E+11 > 1 E+11
Helium 8 E+06 8 E+06 8 E+06
Hydrogen 2 E+05 2 E+05 2 E+05
Argon > 1 E+11 > 1 E+11 > 1 E+11
Ulmate pressure:
with rotary vane backing pump *< 5 E-09 mbar < 5 E-10 mbar < 5 E-09 mbar
with diaphragm pump §< 5 E-08 mbar < 5 E-09 mbar < 5 E-08 mbar
*Ulmate pressure 48 hours aer bakeout with 2-stage rotary vane backing pump.
§Ulmate pressure 48 hours aer bakeout with backing pressure < 5 mbar (500 Pa).
Pumped media
WARNING:
Vent dangerous gases and gas mixtures safely. Do not expose people to these gases. If
pumping hazardous gases or vapours, observe the safety recommendaons of the supplier
of the gas/vapour.
WARNING:
Do not use the pump to pump pyrophoric or explosive gas mixtures as it is not suitable for
this purpose. The pump and its connecons are not designed to contain an explosion.
WARNING:
Do not expose any part of the human body to the vacuum as this could result in injury to
or death of people.
CAUTION:
Do not use the pump to pump parculates or condensable media. Deposion may occur
within the pump which will degrade pump performance and reduce the pump life.
D395-94-880A - Technical Reference
Page 38
CAUTION:
Do not use the pump to pump gases containing more than 20% oxygen. This will cause the
lubricant to polymerise and the pump to fail prematurely.
Note:
Concentraons of gases may be modied by the compression of the pump.
The turbo pump is designed to pump the following residual gases normally used in high
vacuum systems:
•Air
•Carbon monoxide
•Neon
•Ethane
•Methane
•Nitrogen
•Krypton
•Argon
•Propane
•Carbon dioxide
•Helium
•Hydrogen
•Butane
The pump can be used to pump oxygen and water vapour, subject to the following condions:
•Oxygen - When the pump is purged by an inert gas, oxygen can be pumped at
concentraons above 20% by volume. Refer to the nEXT85 instrucon manual
(B8G0-00-880) for purge gas specicaon. However, if the pump is not purged, the
oxygen concentraon must be less than 20% by volume.
•Water vapour - Ensure that vapour does not condense inside the pump.
To pump a gas not in the list above, contact the supplier for advice. Failure to contact the
supplier may invalidate the warranty on the pump. The pump is not suitable for pumping
aggressive or corrosive gases.
Venng gas specicaon and vent control data
Although the pump may be vented to atmosphere, high relave humidity of the air may greatly
increase the subsequent pump down me. To reduce pump down mes the pump should be
vented with dry, clean gases.
Refer to the nEXT85 turbo pump manual (B8G0-00-880) for the vent valve connecon. Refer to
Vent valve screen on page 20 for conguring the venng opons.
Table 18 Vent gas specicaon and vent control
Vent gas specicaon and control Reference data
Vent gas Dry air, nitrogen, argon or other inert gases
Maximum dew point at atmospheric pressure -22 °C
Maximum size of parculates 1 μm
D395-94-880A - Technical Reference
Page 39
Vent gas specicaon and control Reference data
Maximum concentraon of oil 0.1 parts per million
Recommended me for rotaonal speed to
reach 50%
> 15 seconds
Maximum allowed rate of pressure rise Refer to
Maximum allowable vent gas supply pressure 1 bar (gauge); 14.5 psig, 2 x 105 Pa
Figure 13 Max allowed rate of pressure rise during venng: pressure against me (pump
inially at full speed)
Materials exposed to gases pumped
The following materials and component types are exposed to the gases pumped:
•aluminium alloys
•stainless steels
•uoroelastomer and nitrile O-rings
•hydrocarbon lubricant
•felt
•rare earth magnets
•silicon nitride
•carbon bre reinforced epoxy resin
•re retardant polypropylene
•polyamide
•PVC
Electrical connecons
Table 19 Electrical connecons
Parameter Value
Electrical supply (refer to Figure 1 on page 10, item 10)
Inlet plug type IEC60320
D395-94-880A - Technical Reference
Page 40
Parameter Value
Integral fuse rang 10 A Type T, 20 mm
Backing pump (refer to Figure 1 on page 10, item 9)
Outlet socket type IEC60320
Turbomolecular pump (refer to Figure 1 on page 10, item 5)
Connector type 15-way sub-miniature 'D' type socket
Power supply 24 V d.c. nominal
Maximum power rang 4 W
Acve gauge (refer to Figure 1 on page 10, item 6)
Connector type RJ45 8-way
Power supply 24 V d.c. nominal
Maximum power rang 4 W
Figure 14 Pin connecons for 15-way sub-miniature 'D' type socket
Table 20 Turbo pump connector pin-out
Pin Funcon
1 Power supply posive
2 Signal common
3 Start signal output
4 RS232 Tx
5 Serial enable output
6 Power supply posive
7 RS232 Rx
8 Power supply common
9 Speed signal input
10 Screen
11 Power supply posive
12 Screen
13 Power supply common
14 Power supply common
15 Normal signal input
D395-94-880A - Technical Reference
Page 41
Figure 15 Pin connecons for an 8-way RJ45
Table 21 Acve gauge connector pin-out
Pin Funcon
1 Power supply posive
2 Power supply common
3 Signal input
4Idencaon
5 Signal common
6 Control line 1
7 Control line 2
8 Not connected
Electrical data
If the T-Staon 85 uses an E2M1.5, the motor start up current is drawn for less than one
second, so slow-blow fuses must be used to prevent unnecessary fuse failure when the pump
starts. If using the pump at temperatures lower than 12 °C (53.6 °F), the start up current will be
drawn for longer; this may cause the motor thermal overload device to open.
Table 22 Electrical data
Supply Voltage
50/60 Hz
Current (A) Power (W)
Full load Start
XDD1 / nEXT85
100 3.1 - 310
120 2.6 - 310
200 1.6 - 310
230 1.35 - 310
E2M1.5 / nEXT85
100 4.7 13.6 470
120 3.92 12.0 470
200 2.2 6.4 430
230 1.9 5.7 430
D395-94-880A - Technical Reference
Page 42
Figure 16 HS1 Form
Return of Edwards Equipment - ProcedureForm HS1
INTRODUCTION
Before returning your equipment, you must warn Edwards if substances you used (and
produced) in the equipment can be hazardous. This information is fundamental to the safety
of our Service Centre employees and will determine the procedures employed to service your
equipment.
Complete the Declaration (HS2) and send it to Edwards before you dispatch the
equipment. It is important to note that this declaration is for Edwards internal use only, and
has no relationship to local, national or international transportation safety or environmental
requirements. As the person offering the equipment for shipment, it is your responsibility to
ensure compliance with applicable laws.
GUIDELINES
• Equipment is 'uncontaminated' if it has not been used, or if it has only been used with
substances that are not hazardous. Your equipment is 'contaminated' if it has been used
with any substances classified as hazardous under the UN Globally Harmonised System on
the classification and labelling of chemicals (GHS), EU Regulation No 1272/2008 on
classification, labelling and packaging (CLP) or US Occupational Safety and Health
regulations (29CFR1910.1200, Hazard Communication).
• If your equipment has been used with radioactive substances, biological or infectious
agents, mercury, polychlorinated biphenyls (PCB’s), dioxins or sodium azide, you must
decontaminate it before you return it to Edwards. You must send independent proof of
decontamination (for example a certificate of analysis) to Edwards with the Declaration
(HS2). Phone Edwards for advice.
• If your equipment is contaminated, you must either:
• Remove all traces of contamination (to the satisfaction of laws governing the
transportation of dangerous/hazardous substances).
• Or, properly classify the hazard, mark, manifest and ship the equipment in accordance
with applicable laws governing the shipment of hazardous materials.
Note: Some contaminated equipment may not be suitable for airfreight.
PROCEDURE
1. Contact Edwards and obtain a Return Authorisation Number* for your equipment.
2. Complete the Return of Edwards Equipment - Declaration (HS2).
3. If the equipment is contaminated, you must contact your transporter to ensure that you
properly classify the hazard, mark, manifest and ship the equipment, in accordance with
applicable laws governing the shipment of contaminated/hazardous materials. As the
person offering the equipment for shipment, it is your responsibility to ensure compliance
with applicable law. Note: Equipment contaminated with some hazardous materials,
such as semiconductor by-products, may not be suitable for airfreight - contact your
transporter for advice.
4. Remove all traces of hazardous gases: pass an inert gas through the equipment and any
accessories that will be returned to Edwards. Where possible, drain all fluids and
lubricants from the equipment and its accessories.
5. Seal up all of the equipment's inlets and outlets (including those where accessories were
attached) with blanking flanges or, for uncontaminated product, with heavy gauge tape.
6. Seal equipment in a thick polythene/polyethylene bag or sheet.
7. If the equipment is large, strap the equipment and its accessories to a wooden pallet. If
the equipment is too small to be strapped to a pallet, pack it in a suitable strong box.
8. E-mail via scan, fax or post a copy of the original with signature of the Declaration (HS2)
to Edwards. The Declaration must arrive before the equipment.
9. Give a copy of the Declaration (HS2) to the transporter. You must tell your transporter if
the equipment is contaminated.
10. Seal the original Declaration in a suitable envelope: attach the envelope securely to the
outside of the equipment package, in a clear weatherproof bag.
WRITE YOUR RETURN AUTHORISATION NUMBER* CLEARLY ON THE OUTSIDE OF THE
ENVELOPE OR ON THE OUTSIDE OF THE EQUIPMENT PACKAGE.
* not applicable in Japan
P900-70-000 Issue N
D395-94-880A - Technical Reference
Page 43
Figure 17 HS2 Form
Return of Edwards Equipment – Declaration
Form HS2
You must:
•Know about all of the substances which have been used and produced in the equipment before you complete this Declaration
• Read the Return of Edwards Equipment – Procedure (HS1) before you complete this Declaration
• Contact Edwards to obtain a Return Authorisation Number and to obtain advice if you have any questions
• Send this form to Edwards before you return your equipment as per the procedure in HS1
Return Authorisation Number:
Manufacturer's Product Name _________________________
Manufacturer's Part Number ___________________________
Manufacturer's Serial Number _________________________
Has the equipment been used, tested or operated?
YES, Used or operated Go to Section 2
YES, Tested, but not connected to any process or
production equipment, and only exposed to Nitrogen,
Helium or Air Go to Section 4
NO Go to Section 4
IF APPLICABLE:
Tool Identification Number ___________________________
Tool Manufacturer/OEM ______________________________
Tool Model _________________________________________
Process ___________________________________________
Installed Date ____________ De-installed Date ___________
Part Number of Replacement Equipment _______________
Serial Number of Replacement Equipment ______________
Pump datalog attached? YES NO
(Edwards Internal Use Only)
Are any substances used or produced in the equipment:
•
Radioactive, biological or infectious agents, mercury,
poly chlorinated biphenyls (PCBs), dioxins or
sodium azide? (if YES, see Note 1) YES
NO
•
Hazardous to human
health and safety? YES
NO
Note 1: Edwards will not accept delivery of any equipment
that is contaminated with radioactive substances, biological/
infectious agents, mercury, PCB’s, dioxins or sodium azide,
unless you:
• Decontaminate the equipment
• Provide proof of decontamination
YOU MUST CONTACT EDWARDS FOR ADVICE BEFORE YOU RETURN
SUCH EQUIPMENT
Print your name: _________________________________ Print your job title: ____________________________________
Print your organisation: ____________________________________________________________________________________
Print your address: _____________________________________________________________________________________
_____________________________________________________________________________________________________
Telephone number: ___________________________ Date of equipment delivery: ____________________________________
I have made reasonable enquiry and I have supplied accurate information in this Declaration. I have not withheld any
information, and I have followed the Return of Edwards Equipment – Procedure (HS1).
Signed: _____________________________________ Date: ____________________
• who did you buy the equipment from? ______________________________
____
_
____
_
__
•
give the supplier’s invoice number
_________
__________________
____
_
____
_
__
_
___
_
If you have a warranty claim:
Substance name Chemical
Symbol Precautions required (for example,
use protective gloves, etc.) Action required after a spill,
leak or exposure
Note: Please print out this
form, sign it and return the
signed form as hard copy.
SECTION 1: EQUIPMENT
SECTION 2: SUBSTANCES IN CONTACT WITH THE EQUIPMENT
SECTION 3: LIST OF SUBSTANCES IN CONTACT WITH THE EQUIPMENT
SECTION 4: RETURN INFORMATION
SECTION 5: DECLARATION
P900-71-000 Issue N
Reason for return and symptoms of malfunction: ________________________________________________________________
__________________________________________________________________________________________________________
For how many hours has the product run? ___________ Do you wish to purchase a full Failure Analysis report? YES
NO
D395-94-880A - Technical Reference
Page 44
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