KLA AF100 KLA Tencor SensArray Automation Foup User Manual KTAS UserManual
KLA-Tencor Corporation KLA Tencor SensArray Automation Foup KTAS UserManual
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Users Manual
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| Document ID | 3372429 |
| Application ID | 8ldaSv9/uAMr8DKDhTlgAA== |
| Document Description | Users Manual |
| Short Term Confidential | No |
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| Document Type | User Manual |
| Display Format | Adobe Acrobat PDF - pdf |
| Filesize | 221.28kB (2765975 bits) |
| Date Submitted | 2017-04-26 00:00:00 |
| Date Available | 2017-05-15 00:00:00 |
| Creation Date | 2017-02-16 08:08:37 |
| Producing Software | Acrobat Distiller 10.1.16 (Windows) |
| Document Lastmod | 2017-02-16 11:41:34 |
| Document Title | KTAS_UserManual.book |
| Document Creator | FrameMaker 10.0.2 |
| Document Author: | cbenari |
KT Automation User Guide Global SVQQPSU SFSWJDFT (GSS) Knowledge Services 9022549‐000 AB KLA-Tencor Confidential—Restricted Distribution KT Automation User Guide Page Intentionally Blank KLA-Tencor Confidential - Restricted Distribution 9022549-000 / AB KT Automation User Guide is preliminary document is not complete. This document contains significant omissions and inaccuracies. GSS Technical Publications distributes this preliminary draft for review purposes only. Customers and KLA- Customer Service Engineers should not use this document while installing, servicing, or using the KT Automation System. Any input regarding the accuracy of the content of this document is welcome and appreciated. KLA-Tencor Corporation One Technology Drive, Milpitas, CA. 95035 KLA-Tencor Technical Publications KLA-Tencor Confidential - Restricted Distribution Copyright Copyright © 2016-2017 by KLA-Tencor. All rights reserved worldwide. No part of this publication may be reproduced, modified, transmitted, transcribed, stored in retrieval systems, or translated into any human or computer language, in any form or by any means, electronic, mechanical, magnetic, chemical, manual, or otherwise, without the express written permission of KLA-Tencor, One Technology Drive, Milpitas, California 95035. KLA-Tencor may revise this document at any time without notice. Trademarks KT Automation™ System, SensArray® Temperature Wafers, and Automation Metrology™ Wafers are trademarks of KLA-Tencor Corporation. KLA-Tencor® and the KLA-Tencor logo are registered trademarks of the KLA-Tencor Corporation. All other brand and product names may be trademarks of their respective companies. Reprint Acknowledgements This document contains excerpts from the following SEMI® Standards and/or Safety Guidelines: SEMI S1-0708E, “Safety Guidelines for Equipment Safety Labels,” and SEMI S2-0709, “Environmental Health, and Safety Guidelines for Semiconductor Manufacturing Equipment,” Copyright © Semiconductor Equipment and Materials International 2009. All Rights Reserved. Used by Permission. SEMI is a registered trademark of Semiconductor Equipment and Materials International. www.semi.org Original Instructions. Send any comments to: GSS.ECMSAdmin@kla-tencor.com 9022549-000 / AB KLA-Tencor Confidential - Restricted Distribution Printed in Milpitas Table of Contents Preface . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1 Preface . 1.Introduction 1.1 KT Automation System Overview . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-1 1.2 KT Automation System Operation. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-2 1.3 KT Automation Missions . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-3 1.4 Regulatory Compliance Statements . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-4 1.4.1 Prohibitions on Modifications. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-4 1.4.2 Class A Digital Device . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-4 1.4.3 Special Accessory Installation: Manual Use Laptop/FOUP cable . . . . . . 1-4 . 2.KT Automation System Hardware Components 2.1 KT Automation Station . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-5 2.1.1 KT Automation Station Function . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-5 2.1.2 KT Automation Station Indicator Panel LEDs . . . . . . . . . . . . . . . . . . . . . 2-6 2.1.3 KT Automation Station Indicator Panel Manual/Auto Button . . . . . . . . . 2-7 2.2 KT Automation FOUP . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-7 2.2.1 KT Automation FOUP Function . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-7 2.2.2 KT Automation FOUP Indicators and Controls . . . . . . . . . . . . . . . . . . . . 2-8 2.2.3 KT Automation FOUP Data Storage and Transfer . . . . . . . . . . . . . . . . . . 2-9 2.2.4 KT Automation FOUP Battery . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-9 2.2.5 Option: Emulating Occupied KT Automation FOUP Slots . . . . . . . . . . 2-10 9022549-000/AB KLA-Tencor Confidential - Restricted Distribution TABLE OF CONTENTS . 3.KT Automation Web UI 3.1 Logging In . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-11 3.2 Logging Out. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-11 3.3 KT Automation Home Page . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .3-12 3.3.1 Equipment Coverage and Usage . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .3-13 3.3.2 Tool Mission Alarms . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .3-14 3.3.3 Connected FOUPs . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .3-15 3.4 Tools Page . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .3-16 3.5 Setup Page . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .3-17 3.5.1 Edit or Add Tool. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .3-17 3.5.2 Edit or Add Tool Type . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .3-18 3.5.3 Edit or Add Handler Type . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .3-23 3.5.4 Edit or Add Wafer Sequence . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .3-24 3.6 History Page . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .3-25 3.7 Administration Page . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .3-25 PRELIMINARY 3.8 Automation Metrology Wafer Functions. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .3-26 3.8.1 Edit or Add an Automation Metrology Wafer Mission Recipe . . . . . . . .3-26 3.8.2 Define and Execute an Automation Metrology Wafer User Mission. . . .3-29 Glossary Revision History vi KLA-Tencor Confidential - Restricted Distribution KT Automation User Guide Preface Manual Purpose This User Guide describes: • Hardware components of the KT Automation™ System for KLA-Tencor instrumented test wafers • Setting up the system for automatic missions • Managing inventory • Controlling the KT Automation System • Launching user missions using SensArray® Temperature Wafers and Automation Metrology™ Wafers Manual Structure This manual consists of this preface, 4 sections, and a glossary. Each section is briefly described below: Preface Introduces the manual. Section 1: Introduction This section provides an introduction to the KT Automation System. Section 2: KT Automation System Hardware Components This section describes the functions and controls of the KT Automation System hardware components. Section 3: KT Automation System Web UI This section describes how to use the Web UI of the KT Automation System. Glossary Defines abbreviations and terms used in the manual. 9022549-000/AB KLA-Tencor Confidential - Restricted Distribution Preface Reference Documentation The following table specifies documents referenced in this manual. Document Number Title 9022547-000 CPG KT Automation System Safety Manual 9022552-000 KT Automation System GEM/SECS Reference Manual Conventions Used in this Manual WARNING Indicates danger to personnel. Includes instructions needed to prevent any damage. CAUTION Indicates danger to Equipment. Includes instructions needed to prevent any damage. When either of the above symbols appear in this manual, follow the advice given. Failure to do so may endanger yourself or others, and can result in damage to the Equipment. IMPORTANT Indicates there is possibility for a failure. Includes the instruction needed to prevent the failure. NOTE Indicates there is additional information connected with the current subject. Includes that information. Special terms Special terms (dialog box names, button names and any other unique term) are in bold, as demonstrated in the example below: File menu, Start button. Hyperlinks Hyperlinks to references in this document appear in blue (on screen). Hyperlinks to web sites, or external documentation, are blue and underlined. KLA-Tencor Confidential - Restricted Distribution KT Automation User Guide 1. Introduction 1.1 KT Automation System Overview The KT Automation System provided by KLA-Tencor automates the use of instrumented wafers in a semiconductor wafer fab. The KT Automation System is used with SensArray temperature wafers and Automation Metrology motion analysis wafers to enable real-time measurement and monitoring of parameters that are critical to fab yield and productivity. The KT Automation hardware consists of the following components: 9022549-000/AB • Battery-powered, instrumented wafers that perform the actual measurements and reside in Automation FOUPs; examples are SensArray Temperature Wafers and Automation Metrology Wafers (to measure motion and humidity) • Battery-powered Automation FOUPs to transport and store instrumented wafers, and to provide wafer charging and data communications (see Section 2.2 for information about KT Automation FOUPs) • KT Automation Stations that charge Automation FOUPs and provide the communication between the FOUP and the fab host (see Section 2.1 for information about KT Automation Stations) • KT Automation Controller to control the system KLA-Tencor Confidential - Restricted Distribution 1. Introduction 1.2 KT Automation System Operation KT Automation System Operation The KT Automation System provided by KLA-Tencor is used to deploy and manage instrumented wafers in a semiconductor wafer fab to enable real-time measurement and monitoring of parameters that are critical to fab yield and productivity. Operation is completely automated (see Figure 1-1). Figure 1-1: KT Automation System Topology Measurement “missions” are executed automatically under control of the fab manufacturing execution system (MES). The instrumented wafers are transported by the fab OHT and automated material handling system (AMHS) to and from the tool under test. Tests are executed on process tools without removing them from full automated mode. Mission results are communicated directly to the MES, plus results can be automatically available to engineers inside and outside the fab through a web-based GUI and desktop analysis software system. Measurements are easy to accomplish without removing the process tools from production use and without manual handling or recipe execution in the fab. This enables KT metrology wafers to be used for in-line monitoring of process and mechanical system parameters, preventing excursions that can cause yield loss, and improving tool matching performance. Examples of instrumented metrology wafers from KT that are supported by this system are: the SensArray EtchTemp Wafer for monitoring etch temperature; and the KT Automation Metrology Wafer for monitoring AMHS FOUP and equipment front end wafer handling. To create and launch a new mission (see Figure 1-2), the MES system sends the instrumented wafer(s) in a KT Automation FOUP to the KT Automation Station (1). The MES communicates with the KT Automation Station to initiate the mission with a Control Job/Process Job (CJ/PC). If the correct wafers for the mission are present in the FOUP with sufficient charge, the CJ/PJ is completed (2). The FOUP is transported to the target tool under test by the standard fab AMHS (3). The MES host system initiates the correct test recipe on the target tool in full auto mode. When the test is complete, the Automation FOUP is returned to the Automation Station (5). When the Automation FOUP KLA-Tencor Confidential - Restricted Distribution KT Automation User Guide 1. Introduction KT Automation Missions arrives at the Automation Station, the host executes another CJ/PJ to process the data (6). The mission results are uploaded to the KT Automation Controller and the Go/No Go results are reported to the host from the Station, per the metrology recipe in effect (7). Figure 1-2: 1.3 KT Automation System Mission Sequence KT Automation Missions There are 3 ways to launch and control KT Automation missions: 1. Automatic missions: controlled by fab MES via Factory Automation (as described above); results are reported back to the MES (see 9022552-000, KT Automation System GEM/SECS Reference Manual) 2. User missions: initiated by an operator via the KT Automation Web UI; the Automation FOUP is carried manually to the target tool and back to the station 3. Manual missions: initiated through the SA Tools software installed on a laptop that is directly connected to the Automation FOUP and provides all the required parameters for starting a mission; the Automation FOUP is carried manually to the target tool and the mission is manually executed on that tool 9022549-000/AB KLA-Tencor Confidential - Restricted Distribution 1. Introduction 1.4 1.4.1 Regulatory Compliance Statements Regulatory Compliance Statements Prohibitions on Modifications Changes or modifications not expressly approved by KLA Tencor could void the user's authority to operate the equipment. 1.4.2 Class A Digital Device Note: This equipment has been tested and found to comply with the limits for a Class A digital device, pursuant to part 15 of the FCC Rules. These limits are designed to provide reasonable protection against harmful interference when the equipment is operated in a commercial environment. This equipment generates, uses, and can radiate radio frequency energy and, if not installed and used in accordance with the instruction manual, may cause harmful interference to radio communications. Operation of this equipment in a residential area is likely to cause harmful interference in which case the user will be required to correct the interference at his own expense. 1.4.3 Special Accessory Installation: Manual Use Laptop/FOUP cable 1. Verify SensArray Tools software is installed before connecting cable to ensure appropriate communication settings. 2. Connect power supply to barrel connector in middle of manual use case cable. 3. Connect manual use case RJ (Ethernet) connector to Ethernet port on laptop. 4. Connect manual use case cable to FOUP magnetic connector on the back of the FOUP to the left of the power switch. The factory provided ferrite must be installed on the magnetic connector side of the manual use case cable. KLA-Tencor Confidential - Restricted Distribution KT Automation User Guide 2. KT Automation System Hardware Components 2.1 2.1.1 KT Automation Station KT Automation Station Function The KT Automation Station communicates with the KT Automation FOUP to start missions and to extract the results after the missions are completed. The KT Automation Station also recharges the KT Automation FOUP between missions. Figure 2-1 shows the KT Automation Station (including the optional signal tower), with and without a KT Automation FOUP loaded on the station. Figure 2-1: KT Automation Station NOTE If your system uses the optional signal tower, the signal tower is installed and configured at the time the rest of the system is installed. 9022549-000/AB KLA-Tencor Confidential - Restricted Distribution 2. KT Automation System Hardware Components 2.1.2 KT Automation Station KT Automation Station Indicator Panel LEDs The indicator panel at the front of the top cover (see Figure 2-2) contains all the Automation Station LEDs, as well as the Manual/Auto control button. Figure 2-2: KT Automation Station Indicator Panel Table 2-1: KT Automation Station Indicator Panel LEDs LED Name Color Description ALARM Red Indicates a critical error (for example, application has stopped working) that requires the operator to recover the Automation Station LOAD READY Green Indicates the Automation Station is ready to receive a FOUP (there is currently no FOUP on the Automation Station) UNLOAD READY Green Indicates the FOUP can be unloaded from the Automation Station (there is currently a FOUP loaded on the Automation Station) RESERVED Green Indicates the Automation Station is reserved by the fab Host for a mission FOUP PRESENCE Green Indicates a FOUP is present on the Automation Station FOUP PLACEMENT Green Indicates a FOUP is fully placed on the Automation Station Important: When a FOUP is seated properly, both the FOUP PRESENCE and the FOUP PLACEMENT LEDs are on. N2 FLOW Indicates N2 is flowing from the Automation Station to the FOUP (in systems that include the N2 option) MANUAL Blinking MANUAL LED Indicates the Automation Station is in the process of initializing and is not yet ready for use Steady MANUAL LED Indicates the Automation Station is in Manual mode (user can manually place or remove a FOUP) AUTO Green Indicates the Automation Station is in Auto mode (controlled by the fab Host and the OHT delivery system) KLA-Tencor Confidential - Restricted Distribution KT Automation User Guide 2. KT Automation System Hardware Components 2.1.3 KT Automation FOUP KT Automation Station Indicator Panel Manual/Auto Button The Manual/Auto control button is located between the MANUAL and the AUTO LEDs on the KT Automation Station Indicator Panel (see Figure 2-2). The button has two functions: 1. Toggles between Auto mode and Manual mode Press and hold the Manual/Auto control button for 5 seconds to toggle the Automation Station between Auto mode and Manual mode, indicated by the AUTO and MANUAL LEDs. 2. Operates the Automation Station (when the Automation station is in Manual mode) 2.2 2.2.1 • When the FOUP is present on the Automation Station, press and release the button to unclamp the FOUP and switch it to the UNLOAD READY state (UNLOAD READY LED is green), which allows you to pick it up manually. • When the Automation Station is in the LOAD READY state (LOAD READY LED is green): • Manually place the FOUP on the Automation Station. • Press and release the Manual/Auto control button to lock the FOUP and connect it to the Automation Station. KT Automation FOUP KT Automation FOUP Function The KT Automation FOUP transports the instrumented wafer to the equipment during missions. It also charges the wafer, stores the wafer data, and communicates the wafer data to the Automation Controller. Figure 2-3: KT Automation FOUP NOTE The KT Automation FOUP configuration must be updated when: * The CID pill is written or replaced, or * The network configuration or server IP address has changed. 9022549-000/AB KLA-Tencor Confidential - Restricted Distribution 2. KT Automation System Hardware Components 2.2.2 KT Automation FOUP KT Automation FOUP Indicators and Controls All FOUP indicators and controls are on the rear of the KT Automation FOUP (see Figure 2-4). Figure 2-4: KT Automation FOUP Indicators and Controls Table 2-2: KT Automation FOUP Indicators and Controls Control or Indicator Color Comments Wafer Charging LED Green Blinks when the applicable Wafer is charging Steady when the applicable Wafer is present but not charging (Wafer is fully charged) FOUP Charging LED Orange Steady when the applicable Wafer is absent Green Blinks when the FOUP is charging Steady when the FOUP is powered On and at the Station but not charging (FOUP is fully charged) Reset button Orange Steady when the FOUP is powered On but is not at the Station n/a To press the Reset button, insert a thin stylus or pen tip into the hole Important: Reset the FOUP only if it is an error state. Manual power/ communication connector n/a Used to connect a laptop to the FOUP in order to perform manual missions, or provide power to a FOUP that has not been at the Station for a long time ON/OFF button n/a To power down the FOUP, press and hold the ON/OFF button until the FOUP Charging LED turns off KLA-Tencor Confidential - Restricted Distribution KT Automation User Guide 2. KT Automation System Hardware Components 2.2.3 2.2.4 KT Automation FOUP KT Automation FOUP Data Storage and Transfer • When the Wafer is back in the Automation FOUP, it automatically transmits the data it collected during the mission to the Automation FOUP. • When the Automation FOUP is placed on the Automation Station, the Automation FOUP automatically transmits the data to the Automation Controller to be stored in the centralized database. • An Automation FOUP can store up to 10 hours of data. KT Automation FOUP Battery • When an Automation FOUP’s charge level goes down to 35%, an alarm is sent to the host. • The Automation FOUP goes into power-save mode: • When the charge level goes down to 20% • If it is not on a mission and has not been charged for 30 minutes • When in power-save mode, the Automation FOUP can maintain its charge for 6 months. • To charge an Automation FOUP, place it on the FOUP Station and make sure it is clamped (not in LOAD READY state), or use the manual power/communication cable to connect it to a laptop. NOTE If the Automation FOUP was powered off, placing it on the Automation Station and clamping it will power it on automatically. • When powered off, the Automation FOUP can maintain its charge for 12 months. NOTE If the Automation FOUP loses its charge completely, please ask your KT service representative to change the battery. 9022549-000/AB KLA-Tencor Confidential - Restricted Distribution 2. KT Automation System Hardware Components 2.2.5 KT Automation FOUP Option: Emulating Occupied KT Automation FOUP Slots An available KT Automation FOUP option is a set of emulation fins for slots that contain any electronics boxes. The fins cause load port wafer mappers to identify those slots as occupied. Figure 2-5: KT Automation System Topology 10 KLA-Tencor Confidential - Restricted Distribution KT Automation User Guide 3. KT Automation Web UI 3.1 Logging In 1. At the KT Automation login page, select your role (in this example, Administrator is selected). 2. Enter your password. 3. Click Start to log in and go to the Home page (see Section 3.3). 3.2 Logging Out 1. From any page in the KT Automation Web UI, click Logout. The display returns to the KT Automation login page. 9022549-000/AB KLA-Tencor Confidential - Restricted Distribution 11 3. KT Automation Web UI 3.3 KT Automation Home Page KT Automation Home Page The Home page summarizes the current status of all KT Automation System components, usage, and recent mission alerts. It is the first page that you see after you log on. 1. To return to the Home page from any other KT Automation page, click Home. 12 KLA-Tencor Confidential - Restricted Distribution KT Automation User Guide 3. KT Automation Web UI 3.3.1 KT Automation Home Page Equipment Coverage and Usage The Equipment Coverage & Usage area allows you to view information about the Tools, KT Automation FOUPs, KT Wafers, and KT Automation Stations in the system. The color of the header for each equipment type shows the extent of usage: • Green:High usage (>80%) • Orange:Low usage • Red:Not used 1. To select the time period for which you want to see coverage and usage information, select the time period from the drop-down list in the top right-hand corner. 9022549-000/AB KLA-Tencor Confidential - Restricted Distribution 13 3. KT Automation Web UI KT Automation Home Page 2. To view the statistics for the equipment type, hover the cursor over the image. Equipment Statistics Provided Tools KT Automation FOUPs KT Automation Stations KT Wafers 3.3.2 • How many configured • How many online (as number) • How many online (as percentage) • How many hours purchased • How many hours used (as number) • How many hours used (as percentage) Tool Mission Alarms The Tool Mission Alarms area lists error messages and alerts received during recent missions. 14 KLA-Tencor Confidential - Restricted Distribution KT Automation User Guide 3. KT Automation Web UI 3.3.3 KT Automation Home Page Connected FOUPs The Connected FOUPs area displays all KT Automation FOUPs (carriers) in the system and their statuses. For each FOUP, the following information is displayed: 1. Carrier ID 2. Carrier status 3. Wafer IDs 4. Battery level of KT Automation FOUP 9022549-000/AB KLA-Tencor Confidential - Restricted Distribution 15 3. KT Automation Web UI 3.4 Tools Page Tools Page The Tools page displays information about all the tools that were set up in the system (as described in Section 3.5.1 through Section 3.5.4). To view the Tools page, click Tools. NOTE • shows that the last mission that ran on this tool was successful • shows that the last mission that ran on this tool indicated a problem 1. You can group tools by: 16 • Tool Type • Tool Location • Mission Time (mission run date and time) KLA-Tencor Confidential - Restricted Distribution KT Automation User Guide 3. KT Automation Web UI 3.5 Setup Page Setup Page Use the Setup page to add new or edit existing tools and mission recipes. IMPORTANT Mission recipes are added or edited for Automation Metrology Wafers only. See Section 3.8.1 for details of adding or editing recipes. 1. To view the Setup page, click Setup. 3.5.1 Edit or Add Tool IMPORTANT Before you can add a new tool, the applicable tool type and handler type must have been defined in the system (see Section 3.5.2 and Section 3.5.3). 1. In the Setup page, make sure Tools is selected (the default selection when the Setup page opens). 2. Continue as follows: • To edit an existing tool, click the Edit icon for the tool. • To add a new tool, click + New Tool. In either case, the Edit Tool window opens. 9022549-000/AB KLA-Tencor Confidential - Restricted Distribution 17 3. KT Automation Web UI Setup Page 3. In the Edit Tool window, enter or select a value for every field. NOTE If you are editing an existing tool, enter or select new values only for those fields that you need to update. 4. Click Save to save the values and close the Edit Tool window. 3.5.2 Edit or Add Tool Type 1. In the Setup page, click Tool Type. 2. Continue as follows: • To edit an existing tool type, click the Edit icon for the tool type. • To add a new tool, click + New Tool Type. In either case, the Tool Type Edit window opens. 18 KLA-Tencor Confidential - Restricted Distribution KT Automation User Guide 3. KT Automation Web UI Setup Page NOTE If you are editing an existing tool type, enter or select new values only for those fields that you need to update. 3. In the Tool Type Edit window, type a Tool Type Name. IMPORTANT Use an informative name that includes information that will be important for operators to know about the tool. 4. Select the Tool Type Recipe. 5. Continue as follows: 9022549-000/AB If you want to... Then continue with... Create a new Tool Type Sequence step 6 Modify an existing Tool Type Sequence step 11 KLA-Tencor Confidential - Restricted Distribution 19 3. KT Automation Web UI Setup Page 6. To create a new Tool Type Sequence from scratch, click + New. NOTE Each location that wafers visit within a tool is called a tool station. 7. From the list of available stations, select the first station in the sequence. 8. Continue clicking + New and selecting stations until you have selected every station in the sequence. 9. For the last station in the sequence (in this example, FOUP), click Finish here to select that station and remove the option to select from the other stations. 10. Click Save to save the new tool type and close the Tool Type Edit window. 20 KLA-Tencor Confidential - Restricted Distribution KT Automation User Guide 3. KT Automation Web UI Setup Page 11. You can modify an existing Tool Type Sequence in any of the following ways: • Change the station where the sequence finishes • Delete a station from the sequence or replace it with a different station • Add another station to the sequence 12. To change the station where the sequence finishes: • Click to deselect the station. Every station in the sequence then displays the option to select it. • 9022549-000/AB Click Finish here to select the new station where the sequence finishes. KLA-Tencor Confidential - Restricted Distribution 21 3. KT Automation Web UI Setup Page 13. To delete a station from the sequence or replace it with a different station: • Click for that station. • Click Replace station. • To delete the station, click Delete station. • To replace the station, click the station from the list of available station. NOTE The list contains those stations that are set up in the KT Automation System but are not currently used in this Tool Type Sequence. 14. When you have made all the required changes to the Tool Type Sequence, click Save to save the changes and close the Tool Type Edit window. 22 KLA-Tencor Confidential - Restricted Distribution KT Automation User Guide 3. KT Automation Web UI 3.5.3 Setup Page Edit or Add Handler Type NOTE The only parameter that is entered for a Handler Type is the Name. 1. In the Setup page, click Handler Types. 2. Continue as follows: • To edit an existing handler type, click the Edit icon for the handler type. • To add a new handler type, click + New. 3. Type the Name for the handler type. IMPORTANT Use an informative name that shows the robot type, the number of load ports, and any other information that will be important for operators to know about the handler type. 4. Click 9022549-000/AB to save. KLA-Tencor Confidential - Restricted Distribution 23 3. KT Automation Web UI 3.5.4 Setup Page Edit or Add Wafer Sequence NOTE The only parameter that is entered for a Chamber or Station is the Name. 1. In the Setup page, click Wafer Sequence. 2. Continue as follows: • To edit an existing chamber or station, click the Edit icon for the chamber or station. • To add a new chamber, click + New Chamber. • To add a new location, click + New Station. 3. Type the Name for the chamber or station. IMPORTANT Use an informative name that includes information that will be important for operators to know about the chamber or station. 4. Click 24 to save. KLA-Tencor Confidential - Restricted Distribution KT Automation User Guide 3. KT Automation Web UI 3.6 History Page History Page The History page displays information about missions that have run. 1. To view the History page, click History. NOTE 3.7 • shows that the mission ran successfully • shows that the mission did not run successfully Administration Page The Administration page allows those with Administrator-level privileges to remote-connect to KT Automation Stations to perform troubleshooting. IMPORTANT The Administration page is available only to those who log in with the role of Administrator. 1. To view the Administration page, click Administration. 9022549-000/AB KLA-Tencor Confidential - Restricted Distribution 25 3. KT Automation Web UI 3.8 3.8.1 Automation Metrology Wafer Functions Automation Metrology Wafer Functions Edit or Add an Automation Metrology Wafer Mission Recipe 1. In the Setup page, click Recipes. 2. Click the folder where the recipe you want to edit or add is located. 3. Continue as follows: If you want to... Then continue with... Add a new folder step 4 Edit an existing recipe or add a new recipe step 5 4. To add a new folder: 26 • Click Folder. • Type the Folder Name. • Click Save. KLA-Tencor Confidential - Restricted Distribution KT Automation User Guide 3. KT Automation Web UI Automation Metrology Wafer Functions 5. To edit an existing recipe or add a new recipe: • Click the Edit icon for the recipe, or • Click + New Recipe. NOTE If you are editing an existing recipe, enter or select new values only for those items that you need to update. 6. Type a Recipe Name. 7. Select a Recipe Type. 8. Select the recipe’s Start Trigger (the trigger to start data acquisition). The following are available start triggers: 9022549-000/AB Trigger Description Door Open FOUP door opens Delay Data acquisition begins after specified delay (in seconds) from start of mission Wafer Leaves FOUP Wafer is picked from the FOUP at the start of a tool mission KLA-Tencor Confidential - Restricted Distribution 27 3. KT Automation Web UI Automation Metrology Wafer Functions 9. If you selected Delay in the previous step, enter the Delay (seconds). 10. Select the recipe’s Stop Trigger (the trigger to stop data acquisition). The following are available stop triggers: Trigger Description Door Close FOUP door closes Duration Data acquisition ends after the specified duration (in seconds) of data acquisition Wafer Return to FOUP Wafer is returned to the FOUP at the end of a tool mission 11. If you selected Duration in the previous step, enter the Duration (seconds). 12. When you have entered all the values, click Save. 28 KLA-Tencor Confidential - Restricted Distribution KT Automation User Guide 3. KT Automation Web UI 3.8.2 Automation Metrology Wafer Functions Define and Execute an Automation Metrology Wafer User Mission The User Mission page allows you to define and execute an Automation Metrology Wafer user mission. IMPORTANT Before you can define a mission, the applicable recipes, tools, and carrier IDs must have been defined in the KT Automation system (see Section 3.5 and Section 3.8.1). 1. To view the User Mission page, click User Mission. 9022549-000/AB KLA-Tencor Confidential - Restricted Distribution 29 3. KT Automation Web UI Automation Metrology Wafer Functions 2. Select the following: • Tool ID of the target tool to be measured by the mission NOTE Tool Type is populated automatically once Tool ID is selected. 30 • Tool Recipe to be executed by the tool when the FOUP is placed on the tool • Carrier ID of the FOUP that will execute the mission • Wafer ID of the wafer that will execute the mission • Mission Recipe that defines the mission’s start and stop parameters • Analysis Recipe that defines the template used to analyze the raw data and provide the results (SensArray wafers only) • Chamber in which the recipe will be executed (optional) KLA-Tencor Confidential - Restricted Distribution KT Automation User Guide 3. KT Automation Web UI Automation Metrology Wafer Functions 3. If you want the results of the mission to be reported to the FA Host, click Report to FA Host. 4. Type the Load Port Number of the load port on which the FOUP will be loaded (if applicable to the selected recipe). 5. When you have set up all the mission parameters and loaded the FOUP on the load port, click Execute. Once the mission is completed and the FOUP has been returned to the station, mission data is automatically uploaded to the Automation Controller and is visible on the History page (see Section 3.6). 9022549-000/AB KLA-Tencor Confidential - Restricted Distribution 31 This page was intentionally left blank Glossary Term, acronym, abbreviation 9022549-000/AB Description CID Wafer Carrier ID (serial number contained in RF Pill of FOUP; might also be Lot ID, if written by fab) FA Factory Automation (software- and communications-based control of a semiconductor fab) FOUP Front-Opening Universal Pod (wafer container) GEM Generic Model for Communications and Control of SEMI Equipment GSS Global Support Services (KLA-Tencor Support organization). HWID Hardware ID (serial number of the specified hardware component such as SensArray Wafer) KT KLA-Tencor Corporation KTAF KT Automation FOUP (to charge, transport, and store KT in situ test wafers) KTAS KT Automation Station (charging and communication station for Automation FOUPs) MES Manufacturing Execution System (the fab Host) Mission Execution of a single KT Automation job/cycle OHT Overhead Transport system (fab automation system for FOUP transportation) UI User Interface WID Wafer ID (T7 Mark on the bottom of the wafer) KLA-Tencor Confidential - Restricted Distribution 33 This page was intentionally left blank Revision History Revision Date New Rev. Level 10/2016 Changes Made Reviewer Approver AA Initial Issue Avi Zaban Henry Lam AB DCR T35533: Add Regulatory Compliance Statements (Section 1.4); other minor edits Avi Zaban Henry Lam PRELIMINARY 9022549-000/AB KLA-Tencor Confidential - Restricted Distribution REV HISTORY-35 PRELIMINARY This page intentionally left blank. REV HISTORY-36 KLA-Tencor Confidential - Restricted Distribution KT Automation User Guide
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