Nikon L200A User Manual To The 707f1a37 D66f 4c30 8d38 Bed7e837ab0c
User Manual: Nikon L200A to the manual
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Automated IC Inspection Microscope L200A Automated IC Inspection Microscope The next generation in automated IC inspection microscopy The Eclipse L200A has scored major advances in the standardization of inspection and safeguards against contamination. In a new design that combines motorized control with automated operation, observation conditions can be programmed for each individual objective or for each substrate to be inspected. Focus position, objective magnification, illumination control and other microscope methods are fully programmable and can be recalled instantly. This eliminates deviation in inspection results that might occur due to different settings made by multiple users. To minimize the chance of contamination, the L200A's aperture control and other major operations are now motorized, enabling remote control for use on unattended IC production lines. Like other Eclipseseries microscopes from Nikon, the L200A features industry-acclaimed CFI60 infinity optics. Include an ergonomic design for comfortable viewing, a rigid, vibration resistant construction, and you have a microscope unsurpassed to meet the stringent requirements of the latest semiconductor fabs. The L200A is the next step upward in automated IC inspection microscopy. Standardized, contamination-free inspections Option keys Remote Controller Cursor keys Menu key Enter key LCD screen DIC adjustment knob* Lamp intensity Auto/ Manual changeover key Lamp intensity control knob Aperture keys AF-MF changeover key* Focus fine adjustment knob* (When AF is ON) Brightfield key Darkfield key Focus dial Objective selection keys Focus Coarse/Fine changeover key *Active when the respective optional module is attached. Motorized, remote control minimizes the chance of contamination, while enhancing productivity Frequently used operations such as aperture control, focusing, brightfielddarkfield changeover, nosepiece rotation, lamp intensity control, and DIC setting (option) are all motorized and can be controlled by the remote controller or a PC. In addition, there is virtually no operation that requires manual adjustment above the sample, therefore preventing particle contamination introduced from the operator. Free from deviations in inspection results, due to human errors and differences in microscope settings Optimum observation conditions including focus position, aperture, light intensity, as well as DIC prism and polarizer position can be preset objective-by-objective and recalled simply by selecting the objective. This eliminates the need to configure these settings each time the microscope is used, providing standardized observation regardless of who operates the microscope. 3 Easy configuration into an automated inspection system Programmed settings As an inspection process varies depending on substrate, layer, and even the operator, it has been necessary to readjust settings for each inspection process. The L200A's programming feature eliminates this process. You just select the settings-such as observation method, objective magnification, point to be checked, focus position, aperture, and light intensity-and save them by attaching appropriate file names. All you need do to begin your inspection is just to specify the file name. DART software (option) Communication System Diagram AF DIC Confocal DUV In combination with wafer loaders Of course, the L200A can be configured with Nikon's NWL-860 series of wafer loaders and manual or motorized scanning stages to create a wafer inspection system at a minimum cost. Local RS232C (Binary) Local Local L200A Local RS232C (Binary) Scanning stage (ISS) Local Wafer Loader NWL860 Other Euipment PC (DART Software) (Other Software) RS232C (Binary) RS232C (SECS) Host Computer Filing System Auto Inspection Machine L200A configured with NWL-860 INX DART Software is an integrated software package that can fully automate the inspection process. DART combined with an NWL860 wafer loader, ISS200 Motorized Stage and a L200A Auto Focus offers a complete automated wafer inspection station. DART software modules allow further upgrades with options such as image archiving, defect review, post probe review and online communications. 4 5 Top-notch basic performance facilitates inspections Optical System SEMI S2-93A, S8-95 compliant design ECLIPSE L200A Nikon's renowned CFI60 optics are the fusion of CF design and infinity optics. These new optics feature longer working distances and high N.A.'s. They also produce brighter images with more contrast and reduced flare. High-contrast darkfield images A new illumination system produces a Signal to Background (S/B) ratio that is nearly three times greater than former models. This improves sensitivity during darkfield observations, enabling the detection of minute scratches and surface irregularities within the sample, and provides exceptionally high contrast. Safeguards against contamination The body of this microscope is finished with electrostatic discharge (ESD) coatings to prevent foreign particles from adhering to it. Furthermore, the motorized nosepiece uses a shielded center-motor that traps foreign particles inside, preventing them from falling onto the sample. Conventional model A tilting trinocular eyepiece tube with a lower eyepoint designed to be closer to the operator allows you to sit in a more natural erect position. Microscope controls located comfortably up-front in the microscope base minimize hand movement, allowing you to concentrate on the inspection process. Accessories to enhance performance CFI LU/L Plan series objectives Type Magnifi- N.A. W.D. cation (mm) CFI L Plan Epi* 2.5X 0.075 8.80 CFI LU Plan Epi* 5X 0.15 23.50 10X 0.30 17.30 20X 0.45 4.50 50X 0.80 1.00 100X 0.90 1.00 CFI LU Plan Epi ELWD* 20X 0.40 13.00 50X 0.55 10.10 100X 0.80 3.50 CFI L Plan Epi SLWD* 20X 0.35 24.00 50X 0.45 17.00 100X 0.70 6.50 CFI LU Plan Apo Epi* 150X 0.95 0.30 CFI L Plan Apo Epi WI* 150X 1.25 0.25 CFI LU Plan BD 5X 0.15 18.00 10X 0.30 15.00 20X 0.45 4.50 50X 0.80 1.00 100X 0.90 1.00 CFI LU Plan BD ELWD 20X 0.40 13.00 50X 0.55 9.80 100X 0.80 3.50 CFI LU Plan Apo BD 150X 0.90 0.42 * A nosepiece adapter is needed to use these objectives. C-Mount/ENG-Mount TV Zooming Adapter •12V-100W halogen lamphouse •100W mercury lamphouse •150W metal halide lamphouse •75W xenon lamphouse The DXM1200 Digital Camera achieves ultrahigh-quality digital images equivalent to approximately 12 million output pixels, plus has a low-noise design for clear, low-light image capture. The camera's software can be set to automatically categorize the images taken, sort them and save them, all automatically—a powerful feature when you take a large number of photomicrographs. Stages and wafer holders •8x8 Stage •8-inch (200mm) wafer holder •6-inch (150mm) wafer holder •6-inch (150mm) mask holder •5-inch (125mm) mask holder •4-inch (100mm) mask holder Photomicrographic System FX-III Series C-Mount/ENG-Mount CCD Camera Digital Still Camera/ C-Mount CCD Camera TV Adapter TV Adapter CFI UW 10XM V-T Photo Adapter CFI 10X CFI 10XM L2-TT Trinocular Tilting Eyepiece Tube YM-TI Trinocular Eyepiece Tube CFI 12.5X Confocal Unit (Under development) CFI 15X Adapter Illumination Systems Double Port (Under development) Auto Focus Module Filter Sliders Mercury Lampsocket 100W Filar Micrometer 10XA Motorized DIC Module Pinhole Slider HMX-3 Lamphouse Adapter Mercury Lamphouse HMX-3B Breadth Shield Epi Collector Lens Xenon Lampsocket 75W Metal Halide Starter Liquid Fiber Guide LU Nosepiece Adapter CFI LU Plan BD Objectives CFI LU/L Plan Epi Objectives Stages Xenon Lamphouse HMX-4 L200A Remote Controller 8x8 Stage Fiber Guide Adapter Motorized Scanning Stage ISS200 ISS200 Remote Controller 12V-100W Halogen Lamphouse 6 Eyepieces CFI UW 10X CF Projection Lenses PLI 2X, 2.5X, 4X, 5X The sextuple motorized nosepiece not only has the same encoded positioning system offered on the Eclipse L200, but it also offers three adjustable objective positions that improve par-centricity even more. Thanks to Computer-Aided Engineering, the L200A is three times less susceptible to floor vibrations when compared with conventional models in this class. This reduces the chance of unwanted blur or image shifts even during highmagnification observations. DXM1200 digital camera System Diagram Centerable motorized nosepiece Vibration-isolation design Illumination systems 8" Wafer Holder 4-6-inch Wafer Holder 4-6-inch Mask Holder L Stage for NWL860 Wafer Loader 7 Dimensional diagram (When AF Module is mounted) 798-816 (31.4-32.1) 324-342 (12.8-13.5) 160 (6.3) 180 (7.1) 175 (6.9) 360 (14.2) 157 (6.2) 798-816 (31.4-32.1) 430 (16.9) 244 (9.6) 662 (26.1) 429-544 (16.9-21.4) E.P. 373 (14.7) 649 (25.6) 653 (25.7) max. 189 (7.4) 473 (18.6) max. Unit: mm (inch) Specifications Observation method Brightfield, darkfield, DIC, simple polarizing Main body Episcopic stand, Power supply built-in Focusing mechanism Stroke: 29mm, Coarse: 12.7mm per rotation (torque adjustable, focusing stop mechanism provided), Fine: 0.1mm per rotation (in 1µm increments), Guide: 4-guide (two roller-race, torque adjustable) Episcopic illuminator Motorized aperture diaphragm (centerable, pinhole slider incorporated ) Fixed field diaphragm (with focus target), Four ø25mm filters (NCB11/ND4,16) can be mounted; Polarizer, Analyzer Stage 8x8 Stage, Cross travel: 205 x 205 mm, Coarse/fine-movement changeover: manual, Wafer holders: 4-8 in., Mask holders: 4-6 in. Control Front panel: Nosepiece rotation buttons, Episcopic aperture diaphragm stop buttons, Light intensity control knob Remote control: LCD panel, Magnification changeover, Motorized Z-axis, Episcopic aperture diaphragm stop buttons, Light intensity control knob, Motorized bright/darkfield changeover key, DIC adjustment knob, Option keys Eyepieces CFI eyepiece lens series Objectives CFI LU/L Plan series Light sources 100W halogen, 150W metal halide, 100W mercury, 75W Xenon Auto focus unit Optional (LED) Eyepiece tube UW tilting trinocular eyepiece tube (tilt angle: 0˚30˚; erect images), F.O.V.: 25mm, Optical path changeover: 2-way (Bino: Photo 100:0/0:100) Automated function Recipe Programming Communication RS-232C Fixed-motorized sextuple universal nosepiece (centarable), Highly durable Weight Approx. 45kg (when 8x8 Stage and UW eyepiece tube are used.) Nosepiece Specifications and equipment are subject to change without any notice or obligation on the part of the manufacturer. September 2002. DART software is developed by Nikon Inc. ©2000-02 NIKON CORPORATION WARNING TO ENSURE CORRECT USAGE, READ THE CORRESPONDING MANUALS CAREFULLY BEFORE USING YOUR EQUIPMENT. ISO 9001 Accredited by the Dutch Council for Accreditation NIKON CORPORATION Instruments Company ISO 14001 NIKON CORPORATION Yokohama Plant NIKON INSTECH CO., LTD. NIKON INSTRUMENTS EUROPE B.V. NIKON INSTRUMENTS INC. Parale Mitsui Bldg., 8, Higashida-cho, Kawasaki-ku, Kawasaki, Kanagawa 210-0005, Japan phone: +81-44-223-2175 fax: +81-44-223-2182 http://www.ave.nikon.co.jp/inst/ P.O. Box 222, 1170 AE Badhoevedorp, The Netherlands phone: +31-20-44-96-222 fax: +31-20-44-96-298 http://www.nikon-instruments.com/ 1300 Walt Whitman Road, Melville, N.Y. 11747-3064, U.S.A. phone: +1-631-547-8500; +1-800-52-NIKON (within the U.S.A.only) fax: +1-631-547-0306 http://www.nikonusa.com/ NIKON FRANCE S.A. NIKON CANADA INC. 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