P 616 Datasheet
User Manual: Pdf P-616 NanoCube® Nanopositioner
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Compact Parallel-Kinematic Piezo System for Nanopositioning and Fiber Alignment
Parallel kinematics
In a parallel-kinematic multi-axis system, all actuators act directly on a single motion platform. This means that all axes can be
designed with identical dynamic properties, which reduces the moved mass considerably. Further advantages: It is possible
to make the parallel-kinematic system more compact than serial stacked or nested systems. The errors and masses of each
individual axis do not accumulate.
PICMA® piezo actuators
PICMA® actuators have all-ceramic insulation and their performance and lifetime are therefore far superior to conventional
actuators. The ceramic insulation layer protects the monolithic piezoceramic block against humidity or failure due to
increased leakage current. In this way, an especially high reliability is achieved even under extreme ambient conditions. In
contrast to motorized drives, there are no rotating parts or friction. The piezo actuators are therefore free of backlash,
maintenance, and wear.
Flexure guides
A flexure guide is an element which is free of static and sliding friction. It is based on the elastic deformation (bending) of a
solid (e.g., steel) and does not have any rolling or sliding parts. Flexure elements have a high stiffness and load capacity.
Flexure guides are maintenance and wear free. They are 100% vacuum compatible, function in a wide temperature range and
do not require any lubricants.
Capacitive sensors
Capacitive sensors measure the position directly on the motion platform (direct metrology) and work without contact.
Neither friction nor hysteresis interferes with the measurement, which allows excellent linearity values to be achieved in
combination with the high position resolution. Capacitive sensors achieve the best resolution, stability, and bandwidth.
ID chip
An ID chip is located in the Sub-D connector. When the stage is calibrated at the factory with digital electronics, the
calibration data is saved together with specific product information on the ID chip. When switched on, digital electronics read
the data from the ID chip of the connected stage. Stages, whose ID chip contains the calibration data, can therefore be
connected to any suitable digital electronics without renewed calibration.
P-616
NanoCube® Nanopositioner
Parallel-kinematic design for the highest
stiffness in all spatial directions
Highly dynamic motion due to high
resonant frequencies even with loads up
to 100 g
Innovative product design for flexible use
due to single mounting platform
Only nanopositioner available on the
market with ID chip functionality
Smallest and lightest NanoCube® with
100 µm travel range on the market
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Fields of application
Fiber alignment
Microscopy applications
2-photon polymerization
Nanotechnology and nanomanufacturing
Specifications
P-616.3C Unit Tolerance
Motion and positioning
Active axes X, Y, Z
Travel range at -20 to 120 V, open loop 110 / axis µm +20 % / -0 %
Closed-loop travel range 100 / axis µm +20 % / -0 %
Resolution, 1 σ, open loop* 0.3 nm typ.
Resolution, 1 σ, closed loop* 0.4 nm typ.
Linearity error, for the entire travel range, with digital
controller (E-727.3CD)
0.03 % typ.
Bidirectional repeatability, 1 σ, 10 % travel range <10 nm typ.
Bidirectional repeatability, 1 σ, 100 % travel range <15 nm typ.
Sensor
Sensor type Capacitive sensors
Mechanical properties
Stiffness 0.5 N/µm ±10 %
Resonant frequency X / Y / Z, no load 700 Hz ±10 %
Resonant frequency with 38 g load X / Y / Z 380 Hz ±20 %
Resonant frequency with 100 g load X / Y / Z 250 Hz ±20 %
Push/pull force capacity 15 N max.
Maximum permissible torque 0.4 Nm max.
Recommended maximum load 300 g max.
Drive properties
Ceramic type PICMA® P-885.50
Electrical capacitance 1.5 / axis µF ±20 %
Miscellaneous
Operating temperature range -20 to 80 °C
Material Aluminum, steel
Dimensions 40 × 40 × 40 mm
Moved mass without load 0.021 kg
Mass without cable 0.125 kg
Mass with cable 0.4 kg
Cable length 1.5 m ±10 mm
Connection Sub-D 25W3 (m)
Recommended electronics E-503, E-663, E-712, E-727
* The resolution of PI piezo nanopositioning systems is not limited by friction. Specification as position noise with E-727 controller.
All specifications based on room temperature (22 °C ±3 °C).
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Drawings and Images
P-616.3C, Dimensions in mm. Note that the decimal places are separated by a comma in the drawings.
Ordering Information
P-616.3C
Parallel-kinematic NanoCube® XYZ nanopositioner, 100 µm × 100 µm × 100 µm travel range, capacitive sensors
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