PT0031BE_H Tsh Tsu 071 261

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Betriebsanleitung • Operating Instructions

PT 0031 BE/H (0408)

Turbomolecular Drag Pumping
Stations

TSH 071 / TSU 071
TSH 261 / TSU 261
TSH 521 / TSU 521

Index
Page

Page

1. Safety Instructions .................................. 3

5. What To Do In Case
Of Breakedowns? .................................. 11

1.1. For Your Orientation........................................................... 3
1.2. Pictogram Definitions........................................................ 3

6. Maintenance .......................................... 12
2. Understanding The
Pumping Stations .................................. 4

6.1. Replacing The Lubricant Reservoir And
The Operating Fluid Change........................................... 12

2.1. Main Features..................................................................... 4

7. Service .................................................... 13

2.2. Pumping Station Control ................................................... 4
2.3. Pumping Station Components.......................................... 5

8. Technical Data ....................................... 14

3. Installation ............................................... 5

8.1. Dimensions........................................................................ 15

3.1. Preparations For Installation............................................ 5

9. Accessories ........................................... 16

3.2. Laying The Exhaust Line ................................................... 5
3.3. Venting Units....................................................................... 5

10. Spare Parts ............................................. 16

3.4. Electrical Connections ...................................................... 6
3.5. Connecting The Vacuum Unit .......................................... 6

Declaration Of Contamination .................... 17

Connecting The Pumping Station
Via A Bellows...................................................................... 6

Declaration OF Conformity............ (last page)

3.6. Cooling ................................................................................. 6
3.7. Pumping Station Connections Plan
General Schema................................................................. 7
Connection Involving
Rotary Vane Vacuum Pumps............................................ 8
Connection Involving Diaphragm Pumps....................... 9

4. Operations .............................................. 10
4.1. Transportation Protection .............................................. 10
42. Filling In The Lubricant.................................................... 10
4.3. Operational Behaviour With Gas Load......................... 10
4.4. Starting .............................................................................. 11
4.5. Switching OFF And Venting............................................ 11

Please note: Current operating instructions are available via
www.pfeiffer-vacuum.net.

1. Safety Instructions
☞ Read and follow all instructions in this manual.
– Inform yourself regarding:
– Hazards which can be caused by the pumping station;
– Hazards which can be caused by your system;
– Hazards which can be caused by the medium being
pumped.
☞ Avoid exposing any part of the body to vacuum.
☞ Observe the safety and accident prevention regulations.
☞ Regularly check that all accident prevention measures are
being complied with.
☞ Do not operate the turbo pumping station with open high
vacuum flange.
☞ Use at least 4 bracket screws to connect the high vacuum
flange.
☞ The unit has been accredited protection class IP 30. When
the unit is operated in environments which require other
protection classes, the necessary measures must be
taken.
☞ Do not carry out any unauthorised conversions or
alterations to the turbo pumping station.
☞ The control of turbopumping stations has been so
designed that the pumps re-start automatically following
an interruption to the mains power supply. For this reason,
access to the vacuum chambers (for example, via doors,
flanges, valves) may only be opened once the pumping
station has been switched off.
☞ When returning individual components please observe the
shipping instructions (refer to the operating instructions
for the pumping station components).

1.1. For Your Orientation
Instructions in the text
➡ Working instruction: here, you have to do something.
Symbols used
The following symbols are used throughout in illustrations.
High vacuum flange
Cooling water connection
Electric connection
Exhaust
Abbreviations used
DCU = Display and operating unit
TC = Electronic drive unit, turbopump
TPS = Power supply
Position numbers
The same pump and accessory parts have the same position
numbuers in all illustrations.

1.2. Pictogram Definitions
Warning, danger of personal injury.

WARNING

Caution, danger of damage to the pump or the
system.

CAUTION

WARNING

Warning, danger of burns from touching hot
parts.

Warning, danger of injury from rotating parts.

Modifications reserved.

☞

PLEASE NOTE

Please note, attention to particulary important
information on the product, handling the
product or to a particular part of the documentation.

2. Understanding The Pumping Stations
2.1. Main Features

CAUTION

Turbomolecular Drag Pumping Station TSH 521
1
2
3

High vacuum flange
Display And Operating Unit DCU
Carrying handle

1
2

PLEASE NOTE

Before first-time starting on pumping stations
equipped with a Diaphragm Pump MVP 055-3 or
a rotary vane vacuum pump, the transportation
protection must be removed (please see the
sticker an the pumping station).
For the procedure please refer to Section 4.1..

☞

Where the delivery of pumping stations include
a rotary vane vacuum pump it must be noted
that this rotary vane pump is supplied without a
filling of operating fluid.
Before first time starting, the rotary vane
vacuum pump must be filled with operating fluid.
The operating fluid is contained in a pack included with the delivery consignment.

Proper Use
– The turbomolecular pumping stations may only be used for
the purpose of generating vacuum.
– The turbomolecular pumping stations may only be
operated in the existing configuration.

Improper Use
The following is regarded, inter alia, as improper:
– The pumping of explosive or corrosive gases.
– Operating the pumping stations in areas where there is a
danger of explosion.
– The use of accessories which are not named in this
manual or which have not been agreed by the
manufacturer.
The plug and play type pumping stations are fully
automatically operating pumping units.

Improper use will cause all claims for liability and guarantees
to be forfeited.

The integrated power part with the Display And Operating
Unit DCU 001 serves to control and monitor the pumping
station and works in conjunction with the Electronic Drive
Unit TC 600.

2.2. Pumping Station Control

Cooling
Standard type:
Alternative:

☞

PLEASE NOTE

Air cooling integrated in the casing
(up to 35 °C ambient temperature).
Water cooling (please see Section 9.
Accessories).

Details regarding the pumping station
components can be found in the respective
operating instructions.
The possible pumping station variants and
their components are set out in Section 2.3. of
these operating instructions.

Transport
Lifting gear, which may only be attached to the ring screws,
can be used to transport the pumping stations.
The threaded holes for the ring screws are located in the high
vacuum flange.
The two carrying handles 3 (please see the illustration above)
are provided only for manual carrying.
4

Pumping Station

Pumping Station Control

TSH 071
TSU 071

TC 600 with
DCU 001 and TPS 100

TSH 261
TSU 261

TC 600 with
DCU 001 and TPS 200

TSH 521
TSU 521

TC 600 with
DCU 001 and TPS 300

Operating Instructions
for DCU/TPS

PM 0477 BN/
PM 0521 BN

2.3. Pumping Station Components
Pumping Station

TSH 071
TSU 071

TSH 261
TSU 261

TSH 521
TSU 521

Operating Instructions

Components
Turbomolecular Drag Pump

TMH 071
TMU 071

PM 0504 BN
TMH 261
TMU 261

PM 0470 BN
TMH 521
TMU 521

Diaphragm Pump

PM 0496 BN

MVP 015-2
MVP 035-2
MVP 055-3

MVP 035-2
MVP 055-3

MVP 055-3

PU 0012 BN
PU 0011 BN
PU 0011 BN

Rotary Vane Vacuum Pump

DUO 2.5
UNO 005 A
DUO 5
DUO 10

PK 0152 BN
PK 0152 BN
PK 0197 BN
PK 0170 BN

Venting Valve

TVF 005

PM 0 507 BN

For further accessories please refer to Section 9.

3. Installation
3.1. Preparations For Installation
WARNING

Do not carry out any unauthorised conversions
or alterations to the turbo pumping station.

– Only remove the blank flange from the high vacuum side
immediately before connection.
– The lubricant reservoir is already fitted to turbopumps and
filled.
– Where the use of rotary vane vacuum pumps is involved,
the operating fluid is included in the delivery consignment
and must be filled into the pump before first time operating.
– Diaphragm pumps do not require lubricant.
– Permissible magnetic fields:
TSH 071/TSU 071 ≤ 4 mT
TSH 261/TSU 261 ≤ 5.5 mT
TSH 521/TSU 521 ≤ 5 mT
– The pumping station should be erected on a horizontal
surface.
On delivery, the pumping station is provided with four elastic
buffers on the underside.
In addition, and to render the pumping station mobile, rollers
can be fitted (please see Section 9. Accessories).

3.2. Laying The Exhaust Line
CAUTION

Please observe the backing pump operating
instructions when laying the exhaust line.
Exhausted gases and vapours can be hazardous
to health and cause environmental pollution.

3.3. Venting Units
The pumping stations are equipped with Venting valve
TVF 005 as standard.
Control is effected via the pre-selected setting on Electronic
Drive Unit TC 600.
The venting mode of the TVF 005 is selected via the DCU.
Drying Unit TTV 001 (Accessory)
The drying unit keeps moisture away from the apparatus
when venting with atmospheric air.
➡ Secure Drying Unit TTV 001 to the rear side of the pumping
station casing using the two knurled screws.
Where the casing variant with additional cover for the
rotary vane vacuum pump is involved the drying unit must
be fitted within this cover.
➡ Make the connection to the venting valve with a PVC hose
(please refer to Section 9. Accessories).

3.4. Electrical Connections
CAUTION

The electrical connections must be effected in
accordance with local regulations. The voltage
requirements shown on the rating plate must
comply with the mains voltage.

Alternating current is required for operating the pumping
station.
The mains connection cable (length 2.5 m) is provided on the
pumping station.
➡ Plug in mains connection plug (the pumping station can
now be operated).
Accessory Connections:
For the electrical connections of accessories please refer to
Section 3.7. "Connections Plan".

3.5. Connecting The Vacuum Unit
CAUTION

There should be no unilateral loading on the high
vacuum flange.
The weight of a vacuum chamber freely flanged
on the vacuum flange must not exceed, with the
TSH/TSU 071 maximum 200 N (20 kg), with
TSH/TSU 261 maximum 500 N (50 kg), and with
TSH/TSU 521 maximum 1000 N (100 kg).

☞

PLEASE NOTE

The utmost cleanliness must be observed
when fitting all high vacuum parts. Unclean
components prolong the pumping time.

➡ Only remove the blank cover on the high vacuum flange
once the vacuum unit is ready for connection so that no
moisture, which would prolong the pumping time to
attainment of final vacuum, precipitates in the pump.
➡ The use of a splinter shield in the high vacuum flange
protects against foreign bodies (please see accessories
for the turbopump).

Connecting The Pumping Station Via A
Bellows
Advantage:

Reduced vibration transmission.

The pumping station must be mechanically anchored.
➡ Screw the pumping station to a holder with threaded
screws M10. The elastic buffers need not be removed.

CAUTION

Piping must be connected free of stress.
A bellows fitted in the piping will compensate
for any stress arising.

3.6. Cooling
The pumping stations have been designed to be air cooled as
standard where ambient temperatures of up to 35 °C are
involved.
If required, conversion to water cooling is possible (for water
cooling please refer to the "Accessories").
CAUTION

Water cooling is necessary where casing
heating is being used.

FEEDER

1X2

1S2

BACKING PUMP

1M7

POT.-EQUALIZATION
FRAME GROUNDING

1E8

FAN

FORE-VACUUM
SAFETY VALVE

OPTION

1Y8

TVV 001

TERMINAL STRIP X1

TSHU 071 / 261 / 521

HEAT/TMS

RELAY-BOX

OPTION
HEATER

1E5

PM 051 409 -X
FV-PUMP

TC 600

FAN

VENT.

VENT.-VALVE

OPTION

2Y6

TVF-005

MAINS

POWER SUPPLY

1G5

PM 051 101 -T

TERMINAL STRIP

REMOTE

RS 485

DCU

OPTION
VAC.-MEASURANCE

PM 051 406 -S

OPTION
TPG 251/252

1P6

3.7. Pumping Station Connections Plan
General Schema

Fit switch 1S2 in such a
way that terminal positions
1A and 4B point upwards.

1X2

grün

1S2

MAINS

1A 4B

2A 5B

Connection to Kl.21 and 22
with DUO sleeve 1.5 mm

/1.4

1K1

FV-PUMP

POT.-EQUALIZATION
FRAME GROUNDING

PM 051 409 -X

1K1

/1.2 14
/1.2 12

8
A

Bridge relay contacts 11 and 21
and also 14 and 24
(DU=-cable end sleeves)

X1
10

HEAT/TMS

OPTION
TURBO HEATER

1E5

TURBO

PE
N

OPTION

TPG 251
TPG 252

1P6

1G5

POWER SUPPLY

1G5

PE N

V
PE

FAN

V
PE

TVV 001

1E8

1Y8

PM 051 408 -S

BACKING-PUMP AS ROTARY-VANE-PUMP

BACKING PUMP

1M7

OPTION
FORE-VACUUM SAFETY VALVE

Connection Involving Rotary Vane Vacuum Pumps

Fuse-rating according to type-plate

Connection to Kl.21 and 22
with DUO sleeve 1.5 mm

Fit switch 1S2 in such a
way that terminal positions
1A and 4B point upwards.

1X2

MAINS

1A 4B

2A 5B

grün

1S2

240VAC/5A

SOLID-STATE-RELAY

FV-PUMP

POT.-EQUALIZATION
FRAME GROUNDING

PM 051 409 -X

X1
10

HEAT/TMS

OPTION
TURBO HEATER

1E5

TURBO

PE
N

OPTION

TPG 251
TPG 252

1P6

FAN

V
PE

PE N

1E8

1G5

POWER SUPPLY

1G5

V
PE

1Y8

TVV 001

PM 051 407 -S

BACKING-PUMP AS DIAPHRAGM-PUMP

BACKING PUMP

1M7

OPTION
FORE-VACUUM SAFETY VALVE

Connection Involving Diaphragm Pumps

Fuse-rating according to type-plate

4. Operations
4.1. Transportation Protection

4.2. Filling In The Lubricant

Pumping stations which contain a Diaphragm Pump
MVP 055-3 or a rotary vane vacuum pump are shipped with
transportation protection (please see also the sticker on the
pumping station).The following must be removed before
first-time starting:

– The turbomolecular drag pump bearing has been filled
with the required amount of lubricant in the works.

➡ Remove both side panels from the pumping station by
unscrewing each two screws.
➡ Disconnect the earthing cable from the side panels.
➡ Unscrew the Allan head screws 10 (M6) from both sides of
the pumping station base.

– The diaphragm pump is lubricated for the whole of its
working life.
– The rotary vane vacuum pump must be filled with
operating fluid P3 before first time starting. A filling of
operating fluid is included with the delivery consignment.
Procedure:
(please also refer to Section 6.1.).
➡ Unscrew two screws on the right-hand side panel. Slightly
lift the panel and remove.
➡ Unscrew operating fluid filler screw 8.
➡ Unscrew the locking screw on the operating fluid flask
(included) and screw on the filling hose (in the side panel).
➡ Insert the filling hose in the operating fluid filler opening
and allow operating fluid to flow in; the amount and type of
operating fluid is shown on the rating plate.
➡ Screw in operating fluid filler screw 8 and take care with
the O-ring.
➡ Re-secure the filling hose in the side panel.
➡ Fit the side panel back onto the pumping station.

4.3. Operational Behaviour With Gas Load
CAUTION

Water cooling is necessary if the pumping
station is to be operated with gas load.

Details regarding the operational behaviour with gas load can
be found in the respective turbopump operating instructions.

➡ The transportation protection is now removed. The side
panels can be re-fitted. Caution: Re-connect the earthing
cable.

4.4. Starting
WARNING

Turbopump rotors turn at great speed. When the
high vacuum flange is open there is a danger of
personal injury and of damage to the pump resulting from the falling in of objects.
Therefore, never operate the pump with an open
high vacuum flange.

➡ With water cooling: Open the cooling water supply and
check flow.
➡ Switch on the pumping station with the "Pumpstand
EIN/AUS" ("pumping station ON/OFF") key (6) on the front
panel.

– Once the self test has been successfully completed
(duration: TSH/TSU 071 approximately 10 s; TSH/TSU 261
approximately 10 s; TSH/TSU 521 approximately 15 s),
the pumping station begins to operate.
– If the vacuum pump does not start after being switched on
please refer to "What To Do In Case Of Breakdowns" In the
repective operating instructions for the turbopump.
– The turbomolecular drag pump starts up automatically.
The start up phase up to attainment of the rotation speed
switchpoint is dependent on the size of the vacuum
chamber. For start up times in respect of the turbopump
please refer to "Technical Data" in the relevant operating
instructions.

Pumping station front panel
1
2
3
4
5

6
7

LCD display
Status display
Malfunction
acknowledgment key
Key "left"
Key "right"

Pumping station ON/OFF key
Red illuminating diode for
malfunction status
Green illuminating diode for
operations status

☞

PLEASE NOTE

Where the incidence of water vapour is
anticipated, before starting the pumping
station it is recommended to open the gas
ballast valve on the backing pump by hand. If it
is ascertained that the intake pressure of the
pump increases or is unusually high, the valve
can be opened while the pumping station is
running. Once the final pressure has stabilized
the valve can be closed again.

4.5. Switching OFF And Venting
1

2
8
7

➡ The complete pumping station is switched off with the
key 6 "Pumpstand EIN/AUS" / "pumping station ON/OFF".
– Turbopump and vacuum chamber are vented via Venting
Valve TVF 005 which opens for 0.3 seconds when the
venting frequency does not attain 50% of the final rotation
speed. It then closes again for 10 seconds and is then
opened for the venting time of 3,600 seconds (1 hour).
– The venting mode can be changed via the DCU.
➡ Where water cooling is involved: Shut off water supply.

5. What To Do In Case Of Breakdowns?
Please refer to the operating instructions for the individual
components for information on the elimination of
malfunctions.

6. Maintenance
Maintenance on the individual components of
the pumping station should be carried out in
accordance with the instructions in the
respective sections of the relevant operating
instructions.

6.1. Replacing The Lubricant Reservoir And
The Operating Fluid
– The diaphragm pump bearings are lubricated for the whole
of their working life.
– The lubricant reservoir in respect of the turbopump should
be replaced at least once a year. Where extreme
operating conditions or unclean processes are involved,
the replacement interval should be shorter.
Procedure:
➡ Unscrew the four screws from the cover plate and remove.
➡ Unscrew four screws from the turbopump holding plate.
➡ Lift out the turbopump with the holding plate from the
pumping station.
➡ Carry out the change of the lubricant reservoir in
accordance with the turbopump operating instructions.
WARNING

➡ Screw back in operating fluid drain screw 7 taking care
with the O-ring.
➡ Fill in operating fluid as described in Section 4.1. of these
operating instructions.
➡ Re-fit the perforated plate and the side panel.
➡ Check the operating fluid daily where non-stop operations
are involved, otherwise each time the pumping station is
switched on.
PLEASE NOTE

☞

PLEASE NOTE

Further information regarding changes of
operating fluid can be found in the operating
instructions for the respective rotary vane
vacuum pump.

Changing the operating fluid on rotary vane vacuum pumps
4
5
6
7
8
9

Screws (2 pieces)
Perforated plate
Operating fluid duct
Operating fluid drain screw
Operating fluid filler screw
Sight glass

The Lubricant can contain toxic substances
from the medium pumped. Lubricant must be
disposed of in accordance with the respective
regulations.
Safety instructions data sheet for the lubricant
on request.

– The operating fluid for the rotary vane vacuum pump
should be changed at least once a year.
Procedure:
➡ Unscrew the two screws on the right hand side panel.
Slightly lift up the side panel and remove.
➡ Unscrew two screws 4 and pull out perforated plate 5 to
the right hand side.
➡ Exert slight downward pressure on operating fluid duct 6,
turn 90° and bring into the forward position.
➡ Unscrew operating fluid drain screw 7 and drain operating
fluid via operating fluid duct 6 into a suitable container.
WARNING

WARNING

The temperature of the operating fluid can be as
high as 80 °C.

Toxic gases and vapours can escape from the
operating fluid which can be enriched with
substances which represent a hazard to health.
Disposal must be carried out in accordance with
the relevant regulations.

Order numbers for the lubricant reservoir on turbopumps and
operating fluid on rotary vane vacuum pumps
Lubricant reservoir
on turbomolecular pumps

Order number

TMH/U 071
TMH/U 261
TMH/U 521

PM 073 073 -T
PM 063 265-T
PM 063 265 -T

Operating fluid for rotary
vane vacuum pumps

Pack size

Order number

P3
P3
P3

1l
5l
20 l

PK 001 106 -T
PK 001 107 -T
PK 001 108 -T

7. Service

Local Pfeiffer Vacuum representatives can provide full
details.

Before returning:
➡ Dismantle all accessories.
➡ Drain lubricant/operating fluid (please see Section 6.1.).
➡ If the units are free of harmful substances please attach a
clearly visible notice "Free of harmful substances" (both on
the unit and also on the delivery note and any accompanying letters).
"Harmful substances" are substances and preparations as
defined in the current, local, dangerous substances
regulations; in the U.S.A. as

WARNING

Decontaminate units before returning or
possible disposal. Do not return any units which
are microbiologically, explosively or
radioactively contaminated.

Returning contaminated units
If contaminated have to be returned for maintenance/repair,
the following instructions concerning shipping must be
followed:
➡ Neutralise the pump by flushing with nitrogen or dry air.
➡ Seal all openings to the air.
➡ Seal pump or unit in suitable protective foil.
➡ Ship units only in appropriate transport containers.
PLEASE NOTE

☞

Do make use of our service facilities
In the event that repairs are necessary on your pumping
station a number of options are available to you to ensure any
system down time is kept to a minimum:
– Have the pump repaired on the spot by our Pfeiffer
Vacuum Service Engineers,
– Return individual components to the manufacturer for
repairs,
– Replace individual components.

Repair orders are carried out according to our
general conditions of sale and supply.

If repairs are necessary, please send the unit together with a
short damage description to your nearest Pfeiffer Vacuum
Service Center.

"materials in accordance with the Code of Federal
Regulations (CFR) 49 Part 173.240 Definition and Preparation".
We will carry out the decontamination and invoice this work
to you if you have not attached this note. This also applies
where the operator does not have the facilities to carry out
the decontamination work. Units which are contaminated
microbiologically, explosively or radioactively cannot be
accepted as a matter of principle.

Contact addresses and telephone hotline
Contact addresses and telephone numbers can be found on
the back cover of these operating instructions.

Fill out the declaration of contamination
➡ In every case the "Declaration of Contamination" must be
completed diligently and truthfully.
➡ A copy of the completed declaration must accompany the
unit; any additional copies must be sent to your local Pfeiffer Vacuum Service Center.
Please get in touch with your local Pfeiffer Vacuum representatives if there are any questions regarding contamination.

DUO 2.5
UNO 5
DUO 5
DUO 10

1) Final pressure only reachable with metal sealing of the high vacuum flange

Rotary Vane Pump

Weight with
Diaphragm Pump

Rotary Vane Pump

DUO 2.5
UNO 5
DUO 5

MVP 015-2
MVP 035-2
MVP 055-3

DUO 2.5
UNO 5
DUO 5
DUO 10

Mains connectionpower consumption with
Diaphragm Pump
MVP 015-2
MVP 035-2
MVP 055-3

Rotary Vane Pump

kg
kg
kg

VA
VA
VA
VA

VA
VA
VA

32
32
44

28
32
37

230
230
470
650

140
280
300

2,5
5
5
10

m3/h
m3/h
m3/h
m3/h

32
32
44

28
32
37

230
230
470
650

140
280
300

2,5
5
5
10

0,9
2,1
3,3

< 1 · 10-7

0,9
2,1
3,3

< 1 · 10-7

DN 63 ISO-K

TSH 071

< 1 · 10-7

DN 40 ISO-KF

TSH 071

m3/h
m3/h
m3/h

mbar

diaphragm pumps

Pumping speed, backing pump
at a mains frequency of 50 Hz with
Diaphragm Pump
MVP 015-2
MVP 035-2
MVP 055-3

mbar

l/s

Unit

rotary vane vacuum pumps

Final pressure with

Pumping speed for
Nitrogen N2

Connection, nominal diameter

Pumping Station

32
32
44

28
32
37

230
230
470
650

140
280
300

2,5
5
5
10

0,9
2,1
3,3

< 1 · 10-8

< 5 · 10-10

DN 63 CF-F

TSU 071

42
42
54

—
42
47

330
330
570
750

—
380
400

2,5
5
5
10

—
2,1
3,3

< 1 · 10-7

210

DN 100 ISO-K

TSH 261

42
42
54

—
42
47

330
330
570
750

—
380
400

2,5
5
5
10

—
2,1
3,3

< 1 · 10-8

< 5 · 10-10

210

DN 100 CF-F

TSU 261

51
51
63

—
—
56

430
430
670
850

—
—
500

2,5
5
5
10

—
—
3,3

< 1 · 10-8 1)

< 5 · 10-10 1)

300

DN 100 ISO-K

TSH 521

51
51
63

—
—
56

430
430
670
850

—
—
500

2,5
5
5
10

—
—
3,3

< 1 · 10-8 1)

< 5 · 10-10 1)

510

DN 160 ISO-K

TSH 521

51
51
63

—
—
56

430
430
670
850

—
—
500

2,5
5
5
10

—
—
3,3

< 1 · 10-8

< 5 · 10-10

300

DN 100 CF-F

TSU 521

51
51
63

—
—
56

430
430
670
850

—
—
500

2,5
5
5
10

—
—
3,3

< 1 · 10-8

< 5 · 10-10

510

DN 160 CF-F

TSU 521

8. Technical Data

8.1. Dimensions

Schalter EIN/AUS
Switch ON/OFF
Netzanschluß/
Mains connection

472

7.5
12.5

542.5

Durchführung
Meßkabel/

Feedthrough
Measurement cable
Auspuff G1/2
Exhaust G1/2;
G1/4 innen/inside
Sperrgas/Flutgas;
Sealing gas/
Venting gas;
G1/8 innen/inside

66.5

Wasserkühlung/
Water cooling
G1/4 innen/inside

400

Nur mit
DUO 10 / 5

Betriebsmittelablaßrinne/
Operating fluid
duct

392

275

With DUO 10/5
only

350

145

150

9. Accessories
Description

Size

Drying Unit TTV 001
Zeolite filling for the drying unit
Set of rollers consist of:
2 wheels without brakes
2 wheels with brakes
4 screws
4 spring washers
Heating sleeve TMH/TMU 071

TMH/TMU 261

TMH/TMU 521

Water cooling

Number

Comments/
relevant operating instructions

PM Z00 121

filled with zeolite/
PM 0022 BN

approx. 260 cm3

PM006 786 -T

M10 x 16
10,2 x 2,5

P 0994 830
P 3885 259 EA
N 3059 469 8P
N 3535 913 SP

230 V; Schuko plug
208 V; UL plug
115 V; UL plug
230 V; Schuko plug
208 V; UL plug
115 V; UL plug
230 V; Schuko plug
208 V; UL plug
115 V; UL plug

PM 041 900 -T
PM 041 901 -T
PM 041 902 -T
PM 041 903 -T
PM 041 904 -T
PM 041 905 -T
PM 051 096 -T
PM 051 097 -T
PM 051 098 -T

for mobile pumping station

TSH/TSU 071
TSH/TSU 261
TSH/TSU 521

PM 0542 BN

PM 016 102 -T
PM 016 101 -T
PM 016 101 -T

Oil Mist Filter ONF 25
ONF 4-20
(for DUO 5 and DUO 10)

PM 015 399 -T
PM 015 400 -T

PK 0213 BN
PK 0169 BN

Oil Mist Filter ONF 16
(for DUO 2.5 and DUO 5

PM 015 401 -T

PK 0213 BN

Further accessories are listed in the operating instructions for
the individual components.
When ordering accessories please be sure to state the full
part number. Please use this list as an order form (by taking a
copy).

10. Spare Parts
Spare parts are listed in the relevant operating instructions
for the individual components

Ordering quantity

Declaration of Contamination of Vacuum Equipment and Components
The repair and/or service of vacuum components will only be
carried out if a correctly completed declaration has been
submitted. Non-completion will result in delay.

The manufacturer could refuse to accept any equipment
without a declaration.

This declaration can only be completed and signed by authorised and qualified staff:
1. Description of component:

2. Reason for return:

- Equipment type/model: _________________________

_____________________________________________

- Code No.:

__________________________

_____________________________________________

- Serial No.:

__________________________

_____________________________________________

- Invoice No.:

__________________________

_____________________________________________

- Delivery Date:

__________________________

_____________________________________________

3. Equipment condition

4. Process related contamination

- Has the equipment been used?
yes ❐
no ❐

of equipment
- toxic

yes ❐ no ❐

- What type of pump oil was used?
___________________________________________

- corrosive

yes ❐ no ❐

- microbiological hazard*)

yes ❐ no ❐

- Is the equipment free from potentially harmful
substances?
yes ❐
(go to section 5)
no ❐
(go to section 4)

- explosive*)

yes ❐ no ❐

- radioactive*)

yes ❐ no ❐

- other harmful substances yes ❐ no ❐

*) We will not accept delivery of any equipment that has been radioactively or microbiologically contaminated without written
evidence of decontamination!
Please list all substances, gases and by-products which may have come into contact with the equipment:
Tradename
Product name
Manufacturer

Chemical name
(or Symbol)

Danger class

Precautions associated
with substance

Action if spillage or human
contact

1.
2.
3.
4.
5.
5. Legally Binding Declaration
I hereby declare that the information supplied on this form is complete and accurate. The despatch of equipment will be in
accordance with the appropriate regulations covering Packaging, Transportation and Labelling of Dangerous Substances.
Name of Organisation: _______________________________________________________________________________
Address:

_____________________________________

Post code: _____________________________________

Tel.:

______________________________________________________________________________________

Fax:

_____________________________________

Name:

______________________________________________________________________________________

Job title:

______________________________________________________________________________________

Date:

_____________________________________

Telex: ________________________________________

Company stamp: ________________________________

Legally binding signature: _____________________________________________________________________________
17

Konformitätserklärung
Declaration of Conformity
im Sinne folgender EU-Richtlinien:
pursuant to the following EU directives:

- Maschinen/Machinery 98/37/EG (Anhang/Annex IIA)
- Elektromagnetische Verträglichkeit/Electromagnetic Compatibility
89/336/EWG
- Niederspannung/Low Voltage 73/23/EWG
Hiermit erklären wir, dass das unten aufgeführte Produkt den Bestimmungen der EU-Maschinenrichtlinie 98/37/EG, der EU-Richtlinie über Elektromagnetische Verträglichkeit 89/336/EWG
und der EU-Niederspannungsrichtlinie 73/23/EWG entspricht.
We hereby certify, that the product specified below is in accordance with the provision of EU Machinery
Directive 98/37/EEC, EU Electromagentic Compatibility Directive 89/336/EEC and EU Low
Voltage Directive 73/23/EEC.

Produkt/Product:
TSH/TSU 071
TSH/TSU 261
TSH/TSU 521
Angewendete Richtlinien, harmonisierte Normen und angewendete nationale Normen:
Guidelines, harmonised standards, national standards which have been applied:
EN
EN
EN
EN
EN

292-1
292-2
294
61 010
55 011

EN 50 081-1
EN 50 082-2
IEC 801 1-4
VDE 0843-6

Unterschrift/Signature:
Unterschriften:

Pfeiffer Vacuum GmbH
Berliner Str. 43
35614 Asslar
Germany

(W. Dondorf)
Geschäftsführer
Managing Director
Konf.I/2003

Adressen • Addresses
Argentina
ARO S.A., Av. Belgrano 369,
1092 Buenos Aires, Phone: +54 / 11 4331 5766,
Fax: +54 / 11 4331 3572, Email: info@aroline.com.ar
Australia
Scitek Australia Pty. Ltd., Suite 1B,
10-18 Cliff Street, Milsons Point, NSW 2061,
Phone: +61 / 2 9954 1925, Fax: +61 / 2 9954 1939,
Email: contact@scitek.com.au
Austria
Pfeiffer Vacuum Austria GmbH
Diefenbachgasse 35, A-1150 Wien,
Phone: +43 / 1 8941 704, Fax: +43 / 1 8941 707
Service Hotline: +43 / 1 8941704,
Email: office@pfeiffer-vacuum.at
Branch Office, Czech Republic
Pfeiffer Vacuum Austria GmbH, Branch Prague
Zvonarska 885, CZ-156 00 Praha 5
Phone: + 420/257 923 888, Fax: + 420/257 923 014
Email: office@pfeiffer-vacuum.cz
Belgium / Luxemburg
Pfeiffer Vacuum Belgium N.V./S.A.
Luxemburgstraat 5, B-9140 Temse
Phone: +32 / 3 710 5920, Fax: +32 / 3 710 5929
Service Hotline: +32 / 3 710 5922,
Email: Sales@pfeiffer-vacuum.be
Brazil
Elmi Tec
Assistencia Técnica e Representação S/C Ltda.
Rua Bernadino de Compos, 551-Brooklin
CEP 04620-002 São Paulo, SP - Brasil
Phone: +55 / 11 5532 0740, Fax: +55 / 11 5535 3598,
Email: elmi-tec@elmi-tec.com.br
Chile
BERMAT S.A., Coyancura 2283, Oficina 601
Providencia, P.O. Box 9781, Santiago
Phone: +56 / 2 231 8877, Fax: +56 / 2 231 4294,
Email: bermat@bermat.cl
Colombia
Arotec Colombiana S.A., Carrera 16 No. 36-95
Apartado 050 862, Santafe de Bogota / Colombia
Phone: +57 / 1 288 7799, Fax: +57 / 1 285 3604,
Email: arotec@arotec.net
Denmark
Pfeiffer Vacuum Scandinavia AB, Vesterengen 2,
DK-2630 Taastrup, Phone: +45 / 43 52 38 00,
Fax: +45 / 43 52 38 50, Email: sales@pfeiffer-vacuum.dk
France
Pfeiffer Vacuum France SAS 45, rue Senouque, BP 139
F-78531 BUC Cedex, Phone: +33 / (0)1 30 83 04 00,
Fax: +33 / (0)1 30 83 04 04, Email: info@pfeiffer-vacuum.fr
Germany
Pfeiffer Vacuum GmbH,
Berliner Strasse 43, D-35614 Asslar
Phone: +49 / 6441 802 400, Fax: +49 / 6441 802 399
Service Hotline: +49 / 6441 802 333,
Email: Info@pfeiffer-vacuum.de
Great Britain
Pfeiffer Vacuum Ltd.
2-4 Cromwell Business Centre
Howard Way, Interchange Park
Newport Pagnell, MK16 9QS, United Kingdom
Phone: +44 / 1 908 500615, Fax: +44 / 1 908 500616,
Email: sales@pfeiffer-vacuum.co.uk
Greece
Analytical Instruments S.A., 1 Mantzarou St.,
GR-15451 Athens, Phone: +30 / 210 674 8973-7,
Fax: +30 / 210 674 8978, Email: contact@analytical.gr

(03/04)

Hong Kong
Pfeiffer Vacuum Asia Ltd.
c/o Hakuto Enterprises Ltd.
8th Floor World Trade Center
No. 280 Gloucester Road
Causeway Bay
Hong Kong
Phone: +852 2578 4921, Fax: +852 2807 2498,
Email: sales@pfeiffer-vacuum.com.hk
India
Pfeiffer Vacuum India Ltd.
25-5 Nicholson Road, Tarbund
Secunderabad 500 009,
Phone: +91 / 40 2775 0014, Fax: +91 / 40 2775 7774,
Email: pfeiffer@vsnl.net
Israel
ODEM Scientific Applications Ltd.
9 Hamazmera St., P.O.B. 2001 Nes Ziona
Phone: +972 8 938 0333, Fax: +972 8 938 0334,
Email: odemltd@isdn.net.il
Italy
Pfeiffer Vacuum Italia S.p.a.
Via San Martino, 44 I-20017 RHO (Milano)
Phone: +39 / 2 93 99 051, Fax: +39 / 2 93 99 05 33,
Email: contact@pfeiffer-vacuum.it
Japan
Hakuto Co. Ltd., C.P.O. Box 25,
Vacuum Scientific Instruments Division
C.P.O. Box 25, Tokyo 100-91, Phone: +81 / 3 32 258 910,
Fax: +81 / 3 32 259 011, Email: pfeiffer@hakuto.co.jp
Korea
Pfeiffer Vacuum Korea Ltd.,
703 Ho, 853-1, Hankuk Mulru, Dongchonri, Suzi-Eup,
449-843 Yong-in City, Kyungkido,
Phone: +82 / 31 266 0741, Fax: +82 / 31 266 0747,
Email: sales@pfeiffer-vacuum.co.kr
Netherlands
Pfeiffer Vacuum Nederland BV
Veldzigt 30a, NL-3454 PW De Meern,
Phone: +31 / 30 6666050, Fax: +31 / 30 6662794,
Email: Sales@pfeiffer-vacuum.nl
Peru
Ing. E. Brammertz s.r.l., José Pardo 182,
Apartado 173, PE-18 Miraflores, Phone: +51 / 1 445 8178,
Fax: +51 / 1 445-1931, Email: braming@terra.com.pe
Poland
Softrade Sp.z.o.o, ul. Grunwaldzka 391,
PL-60-173 Poznan, Phone: +48 / 61 8677 168,
Fax: +48 / 61 8677 111, Email: softrade@softrade.com.pl
Portugal
Tecnovac
Tecnologia de Vacio S.L.,
Sector Literatos, 38 - Local 1,
ES-28760 Tres Cantos (Madrid)
Phone: +34 / 91 804 11 34, Fax: +34 / 91 804 30 91,
Email: tecnovac@tecnovac.es
Singapore
APP Systems Services Pte Ltd, 11, Toh Guan Road East,
#03-01 APP Enterprise Building, Singapore 608603,
Phone: +65 / 6425 6611, Fax +65 / 6560 6616,
Email: sales@appsystems.com.sg

Sweden
Pfeiffer Vacuum Scandinavia AB
Johanneslundsvägen 3
SE-194 61 Upplands Väsby, Phone: +46 / 8 590 748 10,
Fax: +46 /8 590 748 88, Email: sales@pfeiffer-vacuum.se
Switzerland
Pfeiffer Vacuum Schweiz S.A.
Förrlibuckstraße 30, CH-8005 Zürich
Phone: +41 / 1 444 2255, Fax: +41 / 1 444 2266
Email: info@pfeiffer-vacuum.ch
South Africa
Labotec Pty Ltd., P.O. Box 6553,
Halfway House, 1685 Midrand
Phone: +27 / 11 315 5434, Fax: +27 / 11 315 5882,
Email: sales@labotec.co.za
Taiwan
HAKUTO Taiwan Ltd. Hsinchu office No. 103,
Hsien Chen 11th Street, Chupei,
HsinChu County, Taiwan, R.O.C. (zip/postal code: 302)
Phone: +886 / 3 554 1020, Fax: +886 / 3 554 0867,
Email: leo-shih@hakuto.com.tw
Thailand
Hakuto (Thailand) Ltd.
18th Floor, Chokchail Intíl Bldg.
690 Sukhumvit Road, Klongton, Klongtoey, Bangkok 10110
Phone: +662 / 259 6244, Fax: +662 / 259 6243,
Email: tmgroup@hakutothailand.com
U.S.A.
Pfeiffer Vacuum, Inc.
24 Trafalgar Square
Nashua, NH 03063-1988, USA
Phone: +1/ 603 578 6500, Fax: +1/ 603 578 6550,
Email: contact@pfeiffer-vacuum.com
Venezuela
Secotec S.A., Apartado 3452, Caracas 1010-A,
Phone: +58 / 212 573 8687, Fax: +58 / 212 573 1932,
Email: secotec@cantv.net
Other countries
AVI - Applied Vacuum Industries GmbH
Leginglenstrasse 17A; CH-7320 Sargans
Switzerland
Phone: +41 / 81 710 03 80
Fax: +41 / 81 710 03 81
Email: avi@bluewin.ch
Scope of represented countries
Armenia, Azerbaijan, Bangladesh, Belarus, Bulgaria, Cambodia, Estonia, Georgia, Kazakhstan, Kingdom of Nepal, Kirghizia, Latvia, Lithuania, Maldavia, Philippines, P.R. China,
Rumania, Russia, Tajikistan, Turkmenistan, Ukraine, Uzbekistan, Vietnam
A.E.M.S.
Advanced Equipment Materials and Systems
P.O. Box 25
Föhrenweg 18
FL-9496 Balzers
Phone: +423/ 380 0550
Fax: +423/ 380 0551
Email: aems@adon.li
Scope of represented countries
Bahrain, Egypt, Iraq, Iran, Jordan, Kuwait, Lebanon, Lybia,
Oman, Pakistan, Saudi-Arabia, Sudan, Syria, Turkey, United
Arab Emirates, Yemen

Spain
Tecnovac
Tecnologia de Vacio S.L.,
Sector Literatos, 38 - Local 1,
ES-28760 Tres Cantos (Madrid)
Phone: +34 / 91 804 11 34, Fax: +34 / 91 804 30 91,
Email: tecnovac@tecnovac.es

Zentrale/Headquarters
Pfeiffer Vacuum GmbH
Berliner Strasse 43
D-35614 Asslar
Telefon 06441/802-0
Telefax 06441/802-202
Hotline 06441/802-333
www.pfeiffer-vacuum.net

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