Physik Instrumente PI TEC73 Parallel Kinematic Precision Positioning Systems
PI-TEC73-Parallel-Kinematic-Precision-Positioning-Systems Multi-Axis Positioners and Stewart Platforms
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Compact Positioning System
with Six Degrees of Freedom
Hexapod platforms are used for moving and
precision positioning, aligning and displacing
loads in all six degrees of freedom, i.e. three
linear and three rotational axes.
Hexapods have a parallel-kinematic struc-
ture, i.e. the six drives act together on a sin-
gle moving platform. The length of the single
drives can be changed so that the system
moves in all six degrees of freedom in space.
This special Hexapod design optimizes the
overall system stiffness and allows for a large
central aperture.
Precise Positioning Even of Heavy Loads
Depending on their design, Hexapods can
position loads from several kg up to several
tons in any spatial orientation, in other words
independently of the mounting orientation and
with submicrometer precision.
Parallel-Kinematic Precision
Positioning Systems
Six Axes of Motion with Hexapods and SpaceFAB
Advantages over Serial-Kinematic Design
Hexapods can be designed considerably more
compact than serially stacked multi-axis posi-
tioning systems. Since only a single platform,
most often provided with a large aperture, is
actuated, the moving mass of the Hexapod is
significantly smaller. This results in improved
dynamics with considerably faster response.
Furthermore, cabling is no issue, so that no
additional forces and torques reduce the accu-
racy.
In case of stacked systems, the lower axes
not only move the mass of the payload but
also the mass all other following drives. This
reduces the dynamic properties and the total
system stiffness. Moreover, the runouts of the
individual axes add up to a lower accuracy and
repeatability.
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Matching Components for High Precision
The basis is a zero-backlash structure and care-
fully selected and matching components. This
includes first of all the right material selection,
when e.g. thermal effects are to be expected
at the place of operation. The motor, if neces-
sary with gearhead, an integrated guiding, the
leadscrew/nut unit, as well as the joints for
the required load range up to high-resolution
position detection in every strut – all these ele-
ments determine the achievable precision.
Motors and Drives
PI Hexapods are based on electromechanical
drives and are much more accurate than the
hydraulic Hexapods known from flight or driv-
ing simulators. Precision leadscrew drives or
piezo linear motors are used. Most systems
are self-locking. Direct-drive Hexapods ensure
higher velocities; for industrial use, brushless
motors (BLDC) are particularly suitable.
The application determines the drive technolo-
gies: Hexapods with piezoelectric PiezoWalk®
stepping drives are suitable for ultrahigh vacu-
um applications and can also be operated in
very strong magnetic fields.
Joints
Hexapods for precision positioning often have
Cardanic joints with two orthogonally arranged
axes. This is the optimum combination of two
degrees of freedom and the stiffness of the
structure.
Ball-and-socket joints offer more degrees of
freedom in a relatively simple design. How-
ever, the overall stiffness and precision in
case of external loads and torque can suffer.
A compensating preload is recommended but
requires drives with high output forces such as
the NEXLINE® piezomotor drives.
If the highest precision and few linear bending
displacements and angles are required, flexure
joints are recommended. They exhibit neither
friction nor backlash and do not require lubri-
cants.
Cardanic joints of the H-840
Hexapod model
Ball-and-socket joints
The positioning accuracy of a precision H-824 Hexapod in Z direction over the complete travel range of 25 mm is a
few micrometers, and the repeatability is considerably below ±0.1 μm
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TEC73 Parallel-Kinematic Precision Positioning Systems 10/2017 Subject to change without notice. © Physik Instrumente (PI) GmbH & Co. KG 2017
© Physik Instrumente (PI) GmbH & Co. KG
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are subject to copyright and other protective laws. Any copying, modi-
fication or redistribution in whole or in parts is subject to a written
permission of PI.
Although the information in this document has been compiled with
the greatest care, errors cannot be ruled out completely. Therefore,
we cannot guarantee for the information being complete, correct and
up to date. Illustrations may differ from the original and are not bind-
ing. PI reserves the right to supplement or change the information
provided without prior notice.
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MOTION | POSITIONING
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