Asyst Technologies FALCON 300mm Load Port With AutoID User Manual Falcon Technical Manual

Asyst Technologies, Inc. 300mm Load Port With AutoID Falcon Technical Manual

manual

Tool PictureRev. Ax9 Date: 9/12/2008P/N: 2000-6698-05Copyright © 2008 Asyst Technologies, Inc.,All rights reserved.PreliminaryAsyst Falcon™ 300mm LoadportTechnical Manualwith Installation Instructions
Draft Ax9 2000-6698-05 Page iiiFalcon Technical ManualDisclaimersDisclaimersThis manual may not be reproduced, either wholly or in part, for any reason whatsoever, without prior written permission from Asyst Technologies, Inc. (“Asyst”). Material contained in this manual is provided for informational purposes and is subject to change without notice.If this manual is marked “Preliminary” or “Draft,” then Asyst has not yet released a final version of the manual and the manual is likely to be incomplete and will be revised. Contact Asyst at the address below to obtain a final copy of the manual.Manual InformationPCN: UnreleasedPart Number: 2000-6698-05Date: 9/12/2008Release: Ax9Asyst Technologies, Inc.46897 Bayside ParkwayFremont, California 94538Telephone: (510) 661-5000FAX: (510) 661-5166Technical Support: 1-800-342-SMIFTrademarksAsyst and the Asyst logo(s) are registered trademarks ® of Asyst Technologies, Inc.ADVAN-TAG and Falcon are trademarksTM of Asyst Technologies, Inc.All other product and company names mentioned herein may be trademarks and/or service marks of their respective owners.Equipment ModificationAny change, alteration, or modification to this equipment, as well as use of this equipment in a manner inconsistent with its intended use will void this equipment’s warranty and may render this equipment unsafe for use or unfit for its intended purposes.Training and LanguagesUser training for equipment operation and maintenance is conducted in English. Translators are available on an as needed basis. English versions of the manuals and other technical materials are provided and reviewed during the training. Please contact the Asyst Training department or http://www.asyst.com for the training schedule and signup requirements.WarrantyFor warranty information, see Asyst’s Standard Terms and Conditions.
Page iv 2000-6698-05 Draft Ax9Falcon Technical Manual Reader CommentsReader CommentsWe welcome your comments regarding this manual. Your comments and suggestions help us to improve our publications. Please send comments and suggestions to: Asyst Technologies, Inc.Technical Publications Manager46897 Bayside ParkwayFremont CA 94538Or fax: Attention—Tech Pubs Manager at 1-510-661-5185Or email: TechPubs@asyst.comInclude the following:Name:Company:Contact Phone # (in case we have questions):Email:Document Information (Name of document, Part Number, Revision):Location of comment (page number or other reference):Comments: (The more specific the comments, the more useful they are to us.)Thank you for helping to improve the manuals and to maintain accuracy.
Draft Ax9 2000-6698-05 Page vAcronym ListAGV Automated Guided VehicleAPHD Active Pod Hold DownASCII American Standard Coding for Information InterchangeCAN Control Area NetworkDSP Digital Signal ProcessorEMI Electromagnetic InterferenceEMO Emergency (Machine) OffESD Electrostatic DischargeFIMS Front-opening Interface Mechanical StandardFOUP Front Opening Unified PodK-Plate Kinematic Plate (also referred to as FOUP Advance Plate)MGV Manually Guided VehicleOEM Original Equipment ManufacturerOHS Overhead Hoist ShuttleOHT Overhead Transport or Overhead Hoist TransportPCB Printed Circuit BoardPN or P/N Part NumberRFID Radio Frequency IDentificationSEMI Semiconductor Equipment and Materials InternationalSMIF Standard Mechanical Interface
Page vi 2000-6698-05 Draft Ax9Falcon Technical Manual Acronym List
Draft Ax9 2000-6698-05 Page viiRevision HistoryThis section gives an overview of the change history for the document.Date Author Version Revision Information11/15/2007 Catherine Day Ax1 Created using 2000-2414-05 Rev. C as a base.1/10/2008 Catherine Day Ax2WIP WIP - Compiled for Mike F. Reference Only 3/21/2008 Catherine Day Ax2 Compiled for training class. Huge gaps in Installation, Overview, Interfaces and Comm SW which we will attempt to fill during training week 3/24-28.3/28/2008 Catherine Day Ax3WIP WIP - Compiled for Tou Vang. Reference Only 04/08/2008 Catherine Day Ax3 Added redlines from Training class. Updated some images with Beta images. Added verifications steps after Service procedures. Added 100-240VAC Option. Added removal of FOUP Advance under cover to affected Service procedures. Fleshed out Overview Chapter.04/18/2008 Catherine Day Ax4 Added redlines and new input from Tou Vang, Mike Fahkrabadhi, Selby Sondergaard, Chi Yeh, Gary Durham, Grant Imper, Pranav Desai. Updated more images.04/24/2008 Catherine Day Ax5 Added redlines and new input from Tou Vang, Mike Fahkrabadhi, Selby Sondergaard, Matt Hoang. Updated more images.5/30/2008 Catherine Day Ax6 Added Content from Tou Vang, Mike Fahkrabadhi and drawings7/11/2008 Catherine Day Ax7 Expanded Software upgrade procedure and made it part of the Service Chapter. Added input from John Green and Pranav Desai. Made changes to all chapters and appendices. Incorporated Beta 9 Software release notes, in many case replacing existing content with info from the release notes. Changed multiple illustrations. Updated all Assembly drawings and PCB drawings.
Page viii 2000-6698-05 Draft Ax9Falcon Technical Manual Revision History9/3/2008 Catherine Day Ax8 Added input from John Greene, Duc Le, Bob Carlson, and Pranav Desai. Made changes to all chapters and appendices. Incorporated Beta 10 Software release notes. Updated all Assembly drawings and PCB drawings.9/22/2008 Catherine Day Ax9 FINAL DRAFT -Removed information duplicated in the Software Communications Manual and just reference that document.Added Remove and Replace instructions for the E84 and AC Power Options. Edited all service procedures to show new front panel removal. Updated all Assembly drawings and PCB drawings.Added customer cable routing for the E84 and AC Option to the Installation Appendix. Added Details about the Vertical Brake.Added comments/corrections from Chris Lueders, John Greene, Duc Le, Bob Carlson and Tou Vang. Added Specifications from Engineering and Matt Hoang.Date Author Version Revision Information
Draft Ax9 2000-6698-05 Page ixFalcon Technical ManualTable of ContentsDisclaimers . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .iiiManual Information . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .iiiTrademarks. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .iiiEquipment Modification. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . iiiTraining and Languages . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . iiiWarranty . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .iiiReader Comments . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .ivAcronym List. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .vRevision History . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .viiPreface. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1About this Manual . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1Conventions . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2Chapter 1: Safety Information . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3Introduction . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3Chapter Summary . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3General Requirements . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4General Safety. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4Electrical Safety. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4Responsibility . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5Safety Tags. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6Safety Requirements. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7ESD / EMI Precautions . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7EMO & Electrical Power . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 8Lockout/Tagout . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 8Pinch Hazards . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 9During Installation. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 11Seismic . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 12Ergonomic . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 12Options . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 13Wafer Mapper Option . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 13100-240VAC Option. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 13E84/PIO/ Interlock Option . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 13
Page x 2000-6698-05 Draft Ax9Falcon Technical Manual Tilt and Go Wheels Option. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 13Agency Compliance . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 14FCC . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 14Definition . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 14Compliance . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 14CE Mark. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 14Safety Features. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 15DC Voltage . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 15AC Option . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 15Pinch Hazard . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 15Port Door . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 15FOUP Advance . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 15Moving and Handling . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 16Labeling. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 18Chapter 2: Product Overview . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 23Product Description. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 24Major Components . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 25Features. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 26Power. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 26Specifications . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 27FIMS Door. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 29Features. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 30Ball Joint with Clamping for Port Door Alignment. . . . . . . . . . . . . . . . . . . 30Simplified Twist and Pull Latch Key Drive . . . . . . . . . . . . . . . . . . . . . . . . 30Sensors . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 31Ground Path to FOUP Door . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 31Configurable Latch Key Over-Rotation. . . . . . . . . . . . . . . . . . . . . . . . . . . 31Vertical-Horizontal Door Drive. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 32Features. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 32Single Motor for Two Axes . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 32Upper Pulley/Brake/Encoder Assembly . . . . . . . . . . . . . . . . . . . . . . . . . . 33Fan Assembly. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 33FOUP Advance Subassembly. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 34Features. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 35Torque Tube with Cantilevered Supports. . . . . . . . . . . . . . . . . . . . . . . . . 35Manual Load/Unload Push Button Switch . . . . . . . . . . . . . . . . . . . . . . . . 35K-Plate Node PCB . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 36Cam Activated Pod Hold Down . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 36
Draft Ax9 2000-6698-05 Page xiFalcon Technical ManualSensors . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 36BOLTS Frame. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 38Main Components . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 38Light Display Node PCB. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 38Excessive Wafer Protrusion Sensor. . . . . . . . . . . . . . . . . . . . . . . . . . . . . 38Static Entry Node PCB. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 39Options . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 40Wafer Mapper Assembly Option . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 40100-240VAC Power Option . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 41E84/PIO/Interlock Option. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 43Components. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 43Tilt & Go Wheels Option . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 44Operation Sequence . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 45Chapter 3: Interfaces. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 49Introduction . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 49Chapter Summary . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 49Communication Interfaces . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 50Status Indicator Lights. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 51Command for LED Configuration. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 51Falcon Application Software . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 52Using the Falcon GUI . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 53Accessing the GUI. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 53Navigating Overview . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 55System Icon Details. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 55Wafer Status Screen . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 56Service Mode Commands Screen . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 56Motor Control Commands Screen . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 60E84 Status Screen . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 61LED Controls Screen . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 61System Info Screen . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 62Setup Icon Details . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 62Host Communications . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 63Users and Passwords . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 64Axes Parameters . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 65E84 Configuration. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 67Wafer Mapper Parameters. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 67DSP Firmware . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 68LED Setup . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 68
Page xii 2000-6698-05 Draft Ax9Falcon Technical Manual System Log Icon. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 69Alarms Icon . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 70Diagnostics Icon . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 70Chapter 4: Service. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 71Overview . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 71Safety Requirements. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 72General Safety. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 72Electrical Safety. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 72Mechanical Safety . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 73ESD Precautions . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 73Tool and Fixture Requirements. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 73Remove and Replace Falcon 74Corrective Service Procedures. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 81Introduction . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 81CSP1: Replace Falcon K-Plate Node PCB . . . . . . . . . . . . . . . . . . . . . . . . . . 82CSP2: Replace Falcon Door Node . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 89CSP3: Replace Vertical/Horizontal Drive Motor . . . . . . . . . . . . . . . . . . . . . . 95CSP4: Replace Pod Hold Down Motor Assembly . . . . . . . . . . . . . . . . . . . 106CSP5: Replace Wafer Mapper Assembly . . . . . . . . . . . . . . . . . . . . . . . . . . 112CSP6: Replace Display Node PCB . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 117CSP7: Replace Static Entry Node . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 121CSP8: Replace Link Manager/CPU . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 127CSP9: Replace Latch Key Motor Assembly . . . . . . . . . . . . . . . . . . . . . . . . 131CSP10: Replace V/H Drive Upper Pulley Assembly . . . . . . . . . . . . . . . . . . 137CSP11: Replace Vertical Drive Belt . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 147CSP12: Upgrade Falcon Software . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 155CSP13: Vertical Drive Belt Tensioning . . . . . . . . . . . . . . . . . . . . . . . . . . . . 161CSP14: Remove and Replace E84 Board . . . . . . . . . . . . . . . . . . . . . . . . . 168CSP15: Replace AC Power Supply . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 173Chapter 5: Troubleshooting. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 179Introduction . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 179Collecting Falcon Files . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 179Emergency Removal of Pod . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 182Application . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 182Procedure . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 182Remove Host Tool’s End-Effector . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 182Removal Using Falcon Application. . . . . . . . . . . . . . . . . . . . . . . . . . . . . 182Error Codes. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 185
Draft Ax9 2000-6698-05 Page xiiiFalcon Technical ManualFalcon Alarm Codes . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 186Auto Recovery . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 188About Alarm Codes . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 189Recovery Procedures. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 189About Alarm 1 “Position following error”. . . . . . . . . . . . . . . . . . . . . . . . . 190About Alarm 2 “Vertical drive is not home”. . . . . . . . . . . . . . . . . . . . . . . 190About Alarm 3 “Motion requested while already busy”. . . . . . . . . . . . . . 191About Alarm 4 & 30 “Pod is missing” . . . . . . . . . . . . . . . . . . . . . . . . . . . 191About Alarm 5 “Aborted by user” . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 192About alarm 14, 24, 82, 83, 84, 86 & 87. . . . . . . . . . . . . . . . . . . . . . . . . 192Abort/Failed Messages . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 194Troubleshooting . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 195Error Types . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 195Factory Default Settings . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 198Appendix A: Installation Instructions . . . . . . . . . . . . . . . . . . . . . . . . . 199Introduction . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 199Installing Falcon . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 200Handling Cautions . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 200Operating Caution . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 201Installation Summary . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 201Verify Asyst Supplied Materials. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 201Verify the OEM Supplied Materials . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 202BOLTS Interface Mounting . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 202Power Cable . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 202Grounding Cable . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 203Requirement. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 203Assembly . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 203Communications Cables . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 203Prepare for Mounting Falcon. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 204Mount Falcon to the Host Tool . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 212Verify Operation . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 213Adjust and Level Falcon . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 215Open Falcon . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 215Initial Height Adjustment . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 216Perform Final Adjustments . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 217Falcon Configuration . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 220Display Light Configuration . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 220
Page xiv 2000-6698-05 Draft Ax9Falcon Technical Manual Appendix B: Communications . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 221Overview . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 221Compact Flash Contents. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 222Communication with VxWorks Operating System. . . . . . . . . . . . . . . . . . . . . . . 223Communication with Falcon . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 225Ethernet . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 225Examples . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 225Serial Communication . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 226Examples . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 227Description of Falcon.ini . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 229Communication Protocol Settings . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 229System Configuration . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 229Without Wafer Arm Assembled: . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 229With Wafer Arm Assembled: . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 229Not Using 5mm Protrusion Sensor. . . . . . . . . . . . . . . . . . . . . . . . . . . . . 229Use 5mm Protrusion Sensor . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 229Set-up Hyperterminal for Ethernet Communication . . . . . . . . . . . . . . . . . . . . . 230Set-up Hyperterminal for Serial Communication. . . . . . . . . . . . . . . . . . . . . . . . 233Appendix C: Material Safety Data Sheet Information . . . . . . . . . . . . 237Appendix D: Wiring Diagrams . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2393400-6653-01 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 240Appendix E: PCB Assemblies . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2473200-4269-01 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2483200-4270-01 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2493200-4346-03 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2503200-4347-03 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2523200-4348-03 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2543200-4349-02 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2563200-4350-01 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 260Appendix F: Bills of Material and Assembly Drawings . . . . . . . . . . . 261Falcon Final Assembly, 9701-3995-01 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 262BOM. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2629701-3995-01 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 264Falcon Sub-Systems Assembly, 9701-4033-01 . . . . . . . . . . . . . . . . . . . . . . . . 268BOM. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 268
Draft Ax9 2000-6698-05 Page xvFalcon Technical Manual9701-4033-01 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 271FOUP Advance, 9701-3834-02. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 275BOM. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2759701-3834-02 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 276FIMS Door, 9701-3909-01 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 278BOM. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2789701-3909-01 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2802000-6803-01 Falcon Outline Drawing . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 284Index. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 287
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Draft Ax9 2000-6698-05 Page xviiFalcon Technical ManualList of FiguresList of FiguresFigure 1 Falcon Ground Point. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7Figure 2 Pinch Hazards During Service . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 9Figure 3 Shipping Bracket Securing FIMS Door. . . . . . . . . . . . . . . . . . . . . . . . . . 10Figure 4 Areas of Pinch/Crush Hazard. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .11Figure 5 Seismic Attachment Points. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 12Figure 6 Tool Side Corners. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 17Figure 7 Falcon Label Placement (Operator Side) . . . . . . . . . . . . . . . . . . . . . . . . 20Figure 8 Falcon Label Placement (Host Tool Side) . . . . . . . . . . . . . . . . . . . . . . . 21Figure 9 Falcon with AC Option Only . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 22Figure 10 Falcon Loadport . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 23Figure 11 Falcon Loadport . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 25Figure 12 Static Entry Node PCB Assembly with Link Manager/CPU . . . . . . . . . . 26Figure 13 Falcon Basic Outline. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 28Figure 14 FIMS Door, Front View . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 29Figure 15 FIMS Door, Rear View (without Cover) . . . . . . . . . . . . . . . . . . . . . . . . . 29Figure 16 Ball Joint Design. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 30Figure 17 Simplified Twist and Pull Latch Key Drive . . . . . . . . . . . . . . . . . . . . . . . 30Figure 18 Vertical/Horizontal Door Drive Components . . . . . . . . . . . . . . . . . . . . . . 32Figure 19 FOUP Advance Plate without Cover . . . . . . . . . . . . . . . . . . . . . . . . . . . 34Figure 20 FOUP Advance Load/ Unload Push Button Switch . . . . . . . . . . . . . . . . 35Figure 21 Light Display Node PCB. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 38Figure 22 Static Entry Node PCB . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 39Figure 23 Wafer Mapper Uninstalled . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 40Figure 24 Components of the 100-240VAC Option . . . . . . . . . . . . . . . . . . . . . . . . 41Figure 25 Tool Side View . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 41Figure 26 Wiring for the AC Option. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 42Figure 27 E84 Board. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 43Figure 28 Falcon Tilt & Go Wheels. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 44Figure 29 Diagram of Falcon Communication Paths . . . . . . . . . . . . . . . . . . . . . . . 50Figure 30 LED-IDs, Indicator Lights . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 51Figure 31 Falcon System Logon Screen . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 54Figure 32 System Overview Screen . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 55Figure 33 Wafer Status Screen. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 56Figure 34 Service Mode Commands . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 56Figure 35 Motor Drop-Down Menu . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 57Figure 36 Servo Control Drop-Down Menu . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 57Figure 37 Calibration Axes Drop-Down Menu . . . . . . . . . . . . . . . . . . . . . . . . . . . . 57Figure 38 Wafer Mapper Arm Drop-Down Menu . . . . . . . . . . . . . . . . . . . . . . . . . . 58Figure 39 Laser Drop-Down Menu . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 58Figure 40 FOUP Advance Drop-Down Menu . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 58Figure 41 Vertical Door Drop-Down Menu . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 58Figure 42 Latch Keys Drop-Down Menu. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 59Figure 43 Miscellaneous Drop-Down Menu . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 59Figure 44 Button Report Drop-Down Menu (Not Active) . . . . . . . . . . . . . . . . . . . . 59Figure 45 Motor Control Commands Screen . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 60Figure 46 E84 Status Page (Currently Inactive) . . . . . . . . . . . . . . . . . . . . . . . . . . . 61
Page xviii 2000-6698-05 Draft Ax9Falcon Technical Manual List of FiguresFigure 47 LED Controls Screen . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 61Figure 48 System Info Screen . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 62Figure 49 Host Communications Screen . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 63Figure 50 Users and Passwords Screen . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 64Figure 51 Axes Parameters . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 65Figure 52 E84 Configuration Screen . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 67Figure 53 Wafer Mapper Parameters Screen. . . . . . . . . . . . . . . . . . . . . . . . . . . . . 67Figure 54 DSP Firmware Screen . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 68Figure 55 LED Setup Screen . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 68Figure 56 Falcon System Log Screen . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 69Figure 57 Falcon Alarms Screen . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 70Figure 58 Falcon Front Cover. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 74Figure 59 Power and Communication Connections . . . . . . . . . . . . . . . . . . . . . . . . 75Figure 60 AC Power Input (on Falcons with AC Option Only) . . . . . . . . . . . . . . . . 75Figure 61 Shipping Bracket Securing FIMS Door. . . . . . . . . . . . . . . . . . . . . . . . . . 76Figure 62 Falcon Tilt and Go Wheels . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 77Figure 63 Falcon Mounting - Lower Pivot Mounting . . . . . . . . . . . . . . . . . . . . . . . . 78Figure 64 Guide Posts for Falcon Front Cover. . . . . . . . . . . . . . . . . . . . . . . . . . . . 80Figure 65 Falcon K-Plate Node PCB . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 82Figure 66 FOUP Advance Underside Cover. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 83Figure 67 K-Plate Cover . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 84Figure 68 The Underside of the FOUP Advance . . . . . . . . . . . . . . . . . . . . . . . . . . 85Figure 69 Screw Securing the K-Plate Node Board . . . . . . . . . . . . . . . . . . . . . . . . 86Figure 70 Falcon Door Node . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 89Figure 71 Falcon Door Cover and Cable Grommet . . . . . . . . . . . . . . . . . . . . . . . . 90Figure 72 Falcon Door Node PCB . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 90Figure 73 Cable Connections . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 91Figure 74 Attachment Screws - Falcon Door Node . . . . . . . . . . . . . . . . . . . . . . . . 92Figure 75 Vertical/Horizontal Drive Motor. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 95Figure 76 Shipping Bracket Securing FIMS Door. . . . . . . . . . . . . . . . . . . . . . . . . . 96Figure 77 AC Option Power Supply . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 97Figure 78 E84 Option . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 97Figure 79 Vertical Belt Cover/Fan Assembly . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 98Figure 80 Drive Belt Tension Adjust and Drive Motor Axle. . . . . . . . . . . . . . . . . . . 99Figure 81 Jam Nut . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 100Figure 82 Belt Tension Adjust. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 100Figure 83 Motor Cable Connection. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 101Figure 84 Vertical Drive Motor . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 102Figure 85 Drive Belt Teeth Engaged with the Gear Teeth. . . . . . . . . . . . . . . . . . . 103Figure 86 Active FOUP Hold Down Motor Assembly . . . . . . . . . . . . . . . . . . . . . . 106Figure 87 APHD Motor - Viewed from Underside of FOUP Advance. . . . . . . . . . 107Figure 88 Access Holes for Motor Assembly Screws. . . . . . . . . . . . . . . . . . . . . . 108Figure 89 Locator Guide Pins. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 109Figure 90 Motor Assembly Gear Wheel Engaged with Gear Rack. . . . . . . . . . . . 109Figure 91 Wafer Mapper Assembly . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .112Figure 92 Wafer Mapper and Screw Location . . . . . . . . . . . . . . . . . . . . . . . . . . . .113Figure 93 Wafer Mapper Cable Connections . . . . . . . . . . . . . . . . . . . . . . . . . . . . .114Figure 94 Wafer Mapping Assembly Approaching Guide Pins. . . . . . . . . . . . . . . .114Figure 95 Display Node PCB . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .117Figure 96 Bezel Over the Panel Display Board . . . . . . . . . . . . . . . . . . . . . . . . . . .118
Draft Ax9 2000-6698-05 Page xixFalcon Technical ManualList of FiguresFigure 97 Panel Display PCB . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .118Figure 98 Hardware Stack for Securing Hardware . . . . . . . . . . . . . . . . . . . . . . . . .119Figure 99 Static Entry Node . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 121Figure 100Belt Cover/Fan Assembly. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 122Figure 101Cable Connections and Link Manager/CPU Screws . . . . . . . . . . . . . . 123Figure 102Screws and Standoff Locations . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 124Figure 103Connections to Static Entry Node Board . . . . . . . . . . . . . . . . . . . . . . . 125Figure 104Link Manager/CPU . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 127Figure 105Belt Cover/Fan Assembly and Link Manager/CPU Location . . . . . . . . 128Figure 106Compact Flash Socket on the Link Manager/CPU. . . . . . . . . . . . . . . . 129Figure 107Latch Key Motor Assembly. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 131Figure 108Latch Key Motor and Latch Key Drive Plate Assemblies . . . . . . . . . . . 132Figure 109Cable Clamp and Cable Connections . . . . . . . . . . . . . . . . . . . . . . . . . 133Figure 110 Placement of the Latch Key Motor Assembly. . . . . . . . . . . . . . . . . . . . 134Figure 111 Motor Encoder Cable Connections. . . . . . . . . . . . . . . . . . . . . . . . . . . . 134Figure 112 Engaging the Lead Nut with the Lead Nut Retainer Pins . . . . . . . . . . . 135Figure 113 V/H Drive Upper Pulley/Brake/Encoder Assembly . . . . . . . . . . . . . . . . 137Figure 114 AC Option Power Supply . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 139Figure 115 E84 Option . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 139Figure 116 Vertical Belt Cover/Fan Assembly . . . . . . . . . . . . . . . . . . . . . . . . . . . . 140Figure 117 Encoder Cable . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 141Figure 118 Upper Pulley Cable Connection . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 141Figure 119 Encoder Cable Ground Wire on Upper Pulley Assembly . . . . . . . . . . . 142Figure 120Drive Belt Tension Adjust . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 142Figure 121Jam Nut on Drive Belt Tension Adjust . . . . . . . . . . . . . . . . . . . . . . . . . 143Figure 122Belt Tension Adjust. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 143Figure 123V/H Drive Upper Pulley Assembly Screws . . . . . . . . . . . . . . . . . . . . . . 144Figure 124Vertical Drive Belt . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 147Figure 125Vertical Belt Cover/Fan Assembly . . . . . . . . . . . . . . . . . . . . . . . . . . . . 149Figure 126Vertical/Horizontal Drive Upper Pulley Assembly Screws . . . . . . . . . . 150Figure 127Drive Belt Tension Adjust Bolt . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 150Figure 128Jam Nut on Drive Belt Tension Adjust . . . . . . . . . . . . . . . . . . . . . . . . . 151Figure 129Vertical/Horizontal Drive Motor Axle . . . . . . . . . . . . . . . . . . . . . . . . . . . 151Figure 130Lock Plate Securing the Drive Belt. . . . . . . . . . . . . . . . . . . . . . . . . . . . 152Figure 131Copy Zip File . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 155Figure 132Paste Zip File . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 156Figure 133Extract Zip Contents to Compact Flash . . . . . . . . . . . . . . . . . . . . . . . . 156Figure 134The Ensurehomesteps Value Below [VerticalDoor_1] . . . . . . . . . . . . . 158Figure 135Compact Flash on the Link Manager/CPU . . . . . . . . . . . . . . . . . . . . . . 159Figure 136Belt Tension Meter - Power Button. . . . . . . . . . . . . . . . . . . . . . . . . . . . 162Figure 137Meter Screen Settings . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 162Figure 138Buttons on Meter Screen . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 163Figure 139Sensor Positioning . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 164Figure 140Vertical Drive Upper Pulley/Brake/Encoder Assembly Screws. . . . . . . 165Figure 141Jam Nut . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 166Figure 142Belt Tension Adjust Nut . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 166Figure 143E84 PCB. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 168Figure 144Belt Cover/Fan Assembly with E84 Board and AC Option. . . . . . . . . . 169Figure 145Cable Connections and Screws . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 170Figure 146AC Power Supply . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 173
Page xx 2000-6698-05 Draft Ax9Falcon Technical Manual List of FiguresFigure 147Cable Wiring Going to the AC Option Power Supply . . . . . . . . . . . . . . 174Figure 148AC Option Power Supply . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 174Figure 149Power Supply Mounting Bracket . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 175Figure 150AC Power Supply Mounting Hardware. . . . . . . . . . . . . . . . . . . . . . . . . 175Figure 151AC Power Input . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 176Figure 152Run Pop-up Screen . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 179Figure 153Command Window . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 180Figure 154Logged On to Falcon FTP . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 180Figure 155Falcon.ini Opened in a Notepad Window . . . . . . . . . . . . . . . . . . . . . . . 181Figure 156Factory Default Settings . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 198Figure 157Falcon Handling Points. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 200Figure 158Falcon Ground Point. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 203Figure 159Interface Mounting Kit Components . . . . . . . . . . . . . . . . . . . . . . . . . . . 205Figure 160BOLTS Interface Kit Components Mounted on Host Tool. . . . . . . . . . . 206Figure 161Alignment Plates. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 206Figure 162FIMS Door Shipping Bracket . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 207Figure 163Foam for Securing Wafer Mapper Arms. . . . . . . . . . . . . . . . . . . . . . . . 208Figure 164Ground Connection and Cable Pass-Thru . . . . . . . . . . . . . . . . . . . . . . 209Figure 165Static Entry Node Connector Panel (selected connectors shown) . . . . 210Figure 166AC Power Input (on Falcons with AC Option Only) . . . . . . . . . . . . . . . .211Figure 167Falcon Mounting - Alignment Ball and Cam Adjustments . . . . . . . . . . 212Figure 168Hyperterminal with Connection Description . . . . . . . . . . . . . . . . . . . . . 230Figure 169Hyperterminal with Connect To. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 231Figure 170ASCII Setup Pop-up . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 232Figure 171Hyperterminal Window . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 232Figure 172Hyperterminal with Connection Description . . . . . . . . . . . . . . . . . . . . . 233Figure 173Connect To Pop-up. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 234Figure 174Com1 Properties Pop-up . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 234Figure 175ASCII Setup Pop-up . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 235
Draft Ax9 2000-6698-05 Page xxiFalcon Technical ManualList of TablesList of TablesTable 1 List of Falcon Labels. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 18Table 2 Falcon Product Specifications*. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 27Table 3 Static Entry Node Connections. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 39Table 4 Vertical Door Taught Positions (mm) . . . . . . . . . . . . . . . . . . . . . . . . . . . 65Table 5 Recommended Velocity and Acceleration Parameters for the Vertical Door . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 66Table 6 FOUP Positions (mm). . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 66Table 7 Latch Key Positions (mm). . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 66Table 8 Special Tools. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 73Table 9 Corrective Service Procedures. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 81Table 10 Falcon Error Codes . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 185Table 11 Alarm Codes with Descriptions. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 186Table 12 Alarm Codes. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 188Table 13 Abort/Failed Messages. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 194Table 14 General Problem Resolutions. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 195Table 15 Wafer Mapping Problem Resolution. . . . . . . . . . . . . . . . . . . . . . . . . . . 196Table 16 Falcon Wiring Diagrams . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 239Table 17 Falcon PCB Assembly Drawings . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 247Table 18 Assembly Drawings . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 261
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Draft Ax9 2000-6698-05 Page 1PrefaceAbout this ManualThe Falcon Technical Manual is organized as follows:Chapter 1, Safety Information, describes safety hazards related to operating and maintaining Falcon, as well as safety interlocks and. labeling.Chapter 2, Product Overview, describes the major subassemblies and components of the Falcon, and includes technical data, specifications and typical operation sequence.Chapter 3, Interfaces, includes a description of Falcon’s indicator lights, FOUP Advance Activator Button, and Falcon Application Software.Chapter 4, Service, provides detailed procedures to perform Preventive Maintenance, corrective service and software upgrade on the Falcon. Chapter 5, Troubleshooting, provides an emergency pod removal procedure, a procedure for data collection, lists of error and alarm codes and messages as well as error modes and recommended corrective actions. An illustration showing factory default settings is provided for reference.Appendix A, Installation Instructions, gives information related to installing Falcon to a Host Tool and initial set-up.Appendix B, Communications Software, provides detailed information on ASCII communication.Appendix C, Material Safety Data Sheet Information.Appendix D, Wiring Diagrams.Appendix E, PCB DrawingsAppendix F, Assembly Drawings. For Final Assembly and major subassemblies, such as the FIMS Door Drive and the FOUP Advance (Kinematic) Plate.An Index is also provided in the back of the manual.
Page 2 2000-6698-05 Draft Ax9Falcon Technical Manual ConventionsConventionsThe following keyboard conventions and terminology are used.Example MeaningBold User action on keyboard keys or other objects are bold.Choose The word choose is used for menu choices. Submenus are separated by a >.For example: Choose File > Import > File...Click Refers to mouse actions. For example: Click the hand icon.Courier New Font Text displayed on the screen uses Courier New.DOS and windows path names are displayed in Courier New. For example: Use the C:\Folder\SubFolder\SubFolder2 to access this file.Source code or DOS commands use courier new.Hexidecimal streams and examples.Double quotes Used when discussing or describing an action, functional word, or definition.Folder Used instead of Directory, unless discussing DOS movement commands.Italic Italics are used to show computer entry from the users keyboard or Teach Pendant.Press Shows action by a user on a key or physical button. For example: Press PF1, then type the file name.Select Used if the user is to pick from several choices. For example: Select the lot number from the list supplies.Type Shows entry. For example: Type the Product Name and Model Number at the top of the page. Press Enter.
Draft Ax9 2000-6698-05 Page 3Chapter 1: Safety InformationIntroductionBefore attempting any operation or service on the Falcon, it is essential that the information presented in this chapter be read and thoroughly understood. Important information is provided regarding safety hazards that may be encountered while working with these Loadports.Chapter SummaryThis chapter addresses the following:“ Safety Tags” on page 6— provides examples, with definitions, of warning labels used in this manual.“ Safety Requirements” on page 7— includes ESD/EMI precautions, lockout/tagout procedure, seismic data, and description of hazards.“ Options” on page 13 — includes“ Agency Compliance” on page 14 — includes information on FCC and CE Mark Compliance.“ Safety Features” on page 15 — includes information on the Safety Features of the Falcon Loadport“ Moving and Handling” on page 16— includes cautions on moving and handling the Falcon.“ Labeling” on page 18— description of labels, and their locations on the Falcon.
Page 4 2000-6698-05 Draft Ax9Falcon Technical ManualChapter 1: Safety InformationGeneral RequirementsGeneral RequirementsWarnings and cautions are used throughout this manual to identify potential hazards to personnel.All warnings and cautions immediately precede the step or operation in which the hazardous condition may be encountered. All personnel operating or performing service on Asyst equipment must fully understand warnings, cautions, and all general safety regulations associated with electromechanical equipment.Personnel should become thoroughly familiar with all aspects of safety for individuals and equipment prior to operating or performing service on this equipment.General Safety• Do not allow unauthorized or inexperienced personnel to operate the Falcon.• Service personnel should follow standard cleanroom protocols.• Ensure that another person in the area is aware that work is in progress on the tool, and can provide assistance in the event of injury.• The Host Tool manufacturer’s lockout/tagout procedures must be followed during installation or when service is performed on the Falcon to prevent injury or equip-ment damage. • Refer to the appropriate Material Safety Data Sheets; contact information for obtaining MSDSs is located in this manual.• Remove spilled materials immediately to prevent accidents.Electrical Safety• Do not bypass electrical interlocks or safety devices unless specifically required to within a procedure.• Remove power from Falcon prior to performing any service procedure, unless oth-erwise specified.• Remove power from Falcon prior to removing or inserting electrical connectors.• Remove metal jewelry such as rings, chains, and watches.• Stand on dry insulating mats when working with energized electrical equipment.• Ensure that all test equipment and accessory electrical units are grounded to facil-ity ground.
Draft Ax9 2000-6698-05 Page 5Falcon Technical ManualChapter 1: Safety InformationResponsibilityResponsibilityIt is the responsibility of the Customer to comply with all local, state, and federal ordinances, regulations, and laws applicable to the installation and operation of this equipment.Asyst Technologies, Inc. assumes no liability, whatsoever, for any personal injuries or damages resulting from the operation or service of this equipment in any manner inconsistent or contrary to the methods supplied in Asyst Technologies, Inc. literature including, but not limited to, manuals, instructions, bulletins, communications, and recommendations. For emergencies and for product safety related matters, contact:Asyst Technologies, Inc.46897 Bayside ParkwayFremont, California, 94538(510) 661-5000
Page 6 2000-6698-05 Draft Ax9Falcon Technical ManualChapter 1: Safety InformationSafety TagsSafety TagsThe manual includes the following alert categories. Note that the following are only examples; they do not indicate a specific hazard associated with the Falcon.DANGEREXPLOSION HAZARDDANGERS ALERT PERSONNEL TO POTENTIALLY HAZARDOUS SITUATIONS WHICH, IF NOT AVOIDED, WILL RESULT IN SERIOUS INJURY OR DEATH.WARNINGMECHANICAL HAZARDWARNINGS ALERT PERSONNEL TO POTENTIALLY HAZARDOUS SITUATIONS WHICH, IF NOT AVOIDED, MAY RESULT IN SERIOUS INJURY OR DEATH.CAUTIONLIFT HAZARDSTANDARD CAUTIONS—AS OPPOSED TO EQUIPMENT-DAMAGE CAUTIONS SHOWN BELOW—ALERT PERSONNEL TO POTENTIALLY HAZARDOUS SITUATIONS WHICH, IF NOT AVOIDED, MAY RESULT IN INJURY.CAUTIONTHESE CAUTIONS ALERT PERSONNEL TO SITUATIONS THAT MAY LEAD TO EQUIPMENT DAMAGE. FAILURE TO FOLLOW DIRECTIONS WILL RESULT IN DAMAGE TO THE EQUIPMENT AND/OR DAMAGE TO RELATED PRODUCTS (E.G., WAFERS) AND VOIDING OF WARRANTY.
Draft Ax9 2000-6698-05 Page 7Falcon Technical ManualChapter 1: Safety InformationSafety RequirementsSafety RequirementsESD / EMI PrecautionsThe Falcon with its integrated AdvanTag is a certified Radiated EMI Class A product.GENERAL HAZARDCAUTIONFOR ESD AND EMI CONSIDERATIONS AND POWER SUPPLY PROTECTION, THE GROUND CABLE MUST BE PROPERLY INSTALLED.The following instructions must be followed to provide ESD protection and reduced EMI emissions:• A braided copper ground wire (minimum 12 gauge) with ring-lug connectors (sized for M5 screw) MUST be connected between the Falcon ground connection and the Host Tool power supply earth ground point. NOTE . . .CHANGES OR MODIFICATIONS TO THE FALCON, NOT EXPRESSLY APPROVED BY ASYST, COULD VOID THE USER'S WARRANTY.FIGURE 1 Falcon Ground PointGround Point
Page 8 2000-6698-05 Draft Ax9Falcon Technical ManualChapter 1: Safety InformationSafety RequirementsEMO & Electrical PowerElectrical power for the Falcon is supplied by the Host Tool. The main electronics are enclosed in the main electronic area, located inside the front cover of the Falcon. Power to the Falcon should be connected through the Host Tool EMO circuitry, and in the event of an emergency all power can be removed from the Falcon by depressing the red mushroom shaped EMO switch mounted on the Host Tool.Lockout/Tagout As determined by the Host tool owner, Lockout/tagout may be required on the Host tool when service is performed on the Falcon or when the Falcon is removed /replaced to prevent injury or equipment damage. NOTE . . .LOCKOUT/TAGOUT OF THE HOST TOOL MUST BE PERFORMED BY THE HOST TOOL OWNER. ASYST SERVICE PERSONNEL ARE NOT PERMITTED TO PERFORM LOCKOUT/TAGOUT OF THE HOST TOOL.Where no company procedures exist, follow the guidelines below:_____1. Notify all affected employees and users that service is to be performed and that the Host tool needs to be shut down and locked out._____2. The circuit that provides power to the Host tool must be switched off. (This may require the Host Tool to be powered down.)Requirements for circuit breaker provided by the customer: The overcurrent device and disconnect device provided for the Falcon should be rated for at least 10,000 RMS symmetrical amperes interrupting capacity._____3. Lock out the circuit with an assigned lock._____4. Test to make sure the Host tool cannot be turned on accidentally._____5. Tag the locked circuit with a statement indicating:_____• Unauthorized operation of the equipment or removal of tag is prohibited_____• Date of service performed_____• Name(s) and contact information of the person(s) performing the service
Draft Ax9 2000-6698-05 Page 9Falcon Technical ManualChapter 1: Safety InformationSafety RequirementsPinch HazardsNormal OperationThere are no pinch hazards during Normal Operation of the Falcon.During ServiceWARNINGMECHANICAL HAZARDMAINTENANCE PERSONNEL MUST KEEP HANDS AND FINGERS AWAY FROM ALL MOVING PARTS DURING MOTION OF THE FOUP ADVANCE PLATE OR THE PORT DOOR. FAILURE TO COMPLY MAY RESULT IN INJURY.A pinch hazard exists during the opening/closing of the Port Door.FIGURE 2 Pinch Hazards During ServiceSee “ Safety Features” on page 15 for Safety Features designed to prevent Pinch Hazards.Pinch Hazard During Door Open/Close
Page 10 2000-6698-05 Draft Ax9Falcon Technical ManualChapter 1: Safety InformationSafety RequirementsMECHANICAL HAZARDWARNINGFIMS DOOR MUST BE SECURED WITH THE SHIPPING BRACKET EVERY TIME A COMPONENT OF THE VERTICAL/HORIZONTAL DRIVE IS SERVICED. FAILURE TO DO SO MAY RESULT IN SERIOUS INJURY.Install shipping bracket (Asyst P/N 4003-0842-01) to the FIMS Loadport Door and secure with 8 screws to both the FIMS door and the BOLTS Frame. See Figure 3.FIGURE 3 Shipping Bracket Securing FIMS DoorIf Vertical Drive Belt is disengaged or broken the Vertical Drive may free fall creating pinch/crush hazards. All service procedures affecting the belt must use the FIMS door shipping bracket (Asyst P/N 4003-0842-01) to assure the Vertical Drive is immobilized. See Figure 4 on page 11 for affected areas.Screws ScrewsScrews
Draft Ax9 2000-6698-05 Page 11Falcon Technical ManualChapter 1: Safety InformationSafety RequirementsFIGURE 4 Areas of Pinch/Crush HazardDuring Installation During installation, power to the Falcon must be off and the Host Tool in Lockout/Tagout so there are no electrical (current) or mechanical hazards.Host Tool SideOperator Side
Page 12 2000-6698-05 Draft Ax9Falcon Technical ManualChapter 1: Safety InformationSafety RequirementsSeismicThe position of the center of gravity (CG) will be shown in the forthcoming Outline Drawing. Figure 5 shows seismic attachment points for the Falcon. Follow all installation procedures to ensure compliance with SEMI S2: Safety Guidelines For Semiconductor Manufacturing Equipment, Seismic Requirements.FIGURE 5 Seismic Attachment PointsErgonomicA fully loaded FOUP exceeds recommended limits for handling by one operator. To conform with SEMI S8, use of AGV, MGV, or OHS is recommended.Seismic AttachmentPoints(regular)Seismic AttachmentPoints (top mount)M8 ScrewM8 Screw
Draft Ax9 2000-6698-05 Page 13Falcon Technical ManualChapter 1: Safety InformationOptionsOptionsWafer Mapper OptionSee “ Wafer Mapper Assembly Option” on page 40 for details.100-240VAC OptionSee “ 100-240VAC Power Option” on page 41 for detailsE84/PIO/ Interlock OptionSee “ E84/PIO/Interlock Option” on page 43 for details.Tilt and Go Wheels OptionSee “ Tilt & Go Wheels Option” on page 44 for details.
Page 14 2000-6698-05 Draft Ax9Falcon Technical ManualChapter 1: Safety InformationAgency ComplianceAgency ComplianceFCCDefinitionClass A digital deviceA digital device that is marketed for use in a commercial, industrial or business environment, exclusive of a device which is marketed for use by the general public or is intended to be used in the home.ComplianceThe Falcon with its integrated AdvanTag has been tested and found to comply with the limits for a Class A digital device, pursuant to Part 15 of the FCC Rules. These limits are designed to provide reasonable protection against harmful interference when the equipment is operated in a commercial environment. This equipment generates, uses, and can radiate radio frequency energy and, if not installed and used in accordance with the instruction manual, may cause harmful interference to radio communications. Operation of this equipment in a residential area is likely to cause harmful interference in which case the user will be required to correct the interference at his/her own expense.CAUTIONANY CHANGES OR MODIFICATIONS TO THE FALCON INTEGRATED RFID WITHOUT SPECIFIC WRITTEN APPROVAL FROM ASYST TECHNOLOGIES WILL VOID FCC COMPLIANCE.CE Mark The Falcon with its integrated AdvanTag complies with the following directives:• 2006/95/EC Low Voltage Directive• 2004/108/EC EMC Directive• 99/5/EC Radio & Telecommunication Terminal Equipment• 98/37/EC Machinery Directive
Draft Ax9 2000-6698-05 Page 15Falcon Technical ManualChapter 1: Safety InformationSafety FeaturesSafety FeaturesDC VoltageThe Falcon operating voltage is +24 VDC. This voltage is considered non-hazardous and requires no mechanical power interlocks.AC OptionIf equipped with the 100-240VAC Option, the front cover has an electrical warning label which alerts the user to an electrical hazard located behind the Front Cover. Shutdown and lockout/tagout must be performed before opening the Front Cover. Also the front cover is secured with a screw. Pinch HazardDuring normal operation there is no pinch hazard. During Service, a number of design points ensure that Service personnel in manual mode are not exposed to hazards as described below:Port Door• Pinch hazards due to opening and closing of the Port Door.The combination of the FOUP placement detection, and the FOUP-at-Port switch provide an interlock to prevent a Port Door pinch hazard.The FOUP must be in place on the FOUP advance and then must fully advance to the port, sealing the port opening, before the Port Door will open during normal operation in Auto Mode.During Home Calibration, the Port Door, can move without a FOUP, but the motion speed is slow and easily avoidable.FOUP Advance• Although there is no pinch hazard due to FOUP Advance motion, the following safety feature is present:Current Limiting Circuit limits the amount of force that can be exerted by the FOUP Advance motion to a safe level. When FOUP comes in contact with an object the FOUP Advance motion will stop.
Page 16 2000-6698-05 Draft Ax9Falcon Technical ManualChapter 1: Safety InformationMoving and HandlingMoving and HandlingTIP-OVER HAZARDWARNINGMOVING THE FALCON WITH A FOUP MOUNTED MAY CAUSE THE FALCON TO TIP AND FALL OR OTHERWISE BECOME UNSTABLE. INJURY AND/OR TOOL DAMAGE WILL OCCUR IF FALCON FALLS.NEVER move the Falcon with a FOUP mounted. Always remove the FOUP before removing the Falcon from the Host tool, moving or installing the unit.TIP-OVER HAZARDWARNINGMOVING THE FALCON ON UNEVEN OR NON-LEVEL SURFACES MAY CAUSE THE FALCON TO TIP AND FALL OR OTHERWISE BECOME UNSTABLE. INJURY AND/OR TOOL DAMAGE WILL OCCUR IF FALCON FALLS.The Falcon may have wheels; therefore, once it is removed from the shipping container it should be placed on a level surface. The extended portion of the shipping container base enables the Falcon to be removed from the shipping container in its vertical position.Store and Move the Falcon only in Vertical Position
Draft Ax9 2000-6698-05 Page 17Falcon Technical ManualChapter 1: Safety InformationMoving and HandlingCAUTIONHANDLING OR BUMPING CERTAIN AREAS OF THE FALCON MAY RESULT IN DAMAGE TO THE FOUP ADVANCE, DOOR DRIVE, AND PORT DOOR ASSEMBLIES, AS WELL AS THE FRONT COVER.When moving the Falcon Do NOT place hands on the top section of the FOUP advance assembly, the door drive assembly, or by the wafer mapper assembly.When moving the Falcon, PUSH from the Tool Side ONLY, placing hands on the corners on the Tool SIde of the Falcon. See Figure 6.FIGURE 6 Tool Side CornersThe Falcon is designed to be pushed from the Tool Side only. Do not pull from the Operator Side; do not push from the Operator Side except when mounting.When moving the Falcon, use both hands to push at all times and push evenly. Keep all four wheels on the ground at ALL times. Do not tilt or rock the Falcon while moving and turning. Doing so may cause the Falcon to tip and fall.Corners
Page 18 2000-6698-05 Draft Ax9Falcon Technical ManualChapter 1: Safety InformationLabelingLabelingSee Table 1 for a description of labels used on the Falcon. See Figure 7 on page 20, Figure 8 on page 21 and Figure 9 on page 22 for typical label locations.TABLE 1 List of Falcon LabelsLabel Description/LocationModel/Serial Number Label The model and serial number label for the Falcon provides FCC ID and unit specific information required when contacting Asyst Technologies for any matter concerning the equipment.Tip Over Hazard The Tip Over Hazard label is an alert to move the Falcon with caution. It is located above the port door on the Host Tool side. Mechanical Hazard The Mechanical Hazard label is an alert to moving parts located behind the Cover with the label. Shutdown and lockout/tagout must be performed before opening the Cover. Both Vertical and Horizontal styles are used.CE Label This label identifies equipment that conforms to testing and certification requirements of the European Community.
Draft Ax9 2000-6698-05 Page 19Falcon Technical ManualChapter 1: Safety InformationLabelingFCC Label The presence of the FCC label indicates compliance with FCC Rules and Regulations as specified on the Label.Handle Corners Label This label identifies where to handle equipment.Electrical Hazard Label The Electrical Hazard label is an alert to electrical hazard located behind the Front Cover when the Falcon is configured with the AC Power Option. Shutdown and lockout/tagout must be performed before opening the Front Cover. FOR AC OPTION ONLYPinch Hazard Label The Pinch Hazard label is an alert to moving parts located behind the Cover with the label.Shutdown and lockout/tagout must be performed before opening the Cover.Ground Point Label The Ground Point Label indicates the Falcon grounding point use to connect earth ground wires from the Host tool.TABLE 1 List of Falcon LabelsLabel Description/LocationAC DC
Page 20 2000-6698-05 Draft Ax9Falcon Technical ManualChapter 1: Safety InformationLabelingFIGURE 7 Falcon Label Placement (Operator Side)Ground LabelBeltCover Hazard LabelMechanicalHazard LabelPinch
Draft Ax9 2000-6698-05 Page 21Falcon Technical ManualChapter 1: Safety InformationLabelingFIGURE 8 Falcon Label Placement (Host Tool Side)Tip Over Hazard LabelCE LabelPinch Hazard LabelName PlateLabelHandle Corners LabelFCC ID LabelFCC Label
Page 22 2000-6698-05 Draft Ax9Falcon Technical ManualChapter 1: Safety InformationLabelingFIGURE 9 Falcon with AC Option OnlyElectrical Hazard Label
Draft Ax9 2000-6698-05 Page 23Chapter 2: Product OverviewThis chapter describes the operation of Falcon and the interrelation of all of its mechanical, electromechanical, and electronic subsystems.The product overview is divided into the following sections:“ Product Description” on page 24— an overall description of Falcon product.“ Specifications” on page 27— Technical Data for Falcon.Major Subassemblies with features, Options and Operational Descriptions:• “ FIMS Door” on page 29• “ Vertical-Horizontal Door Drive” on page 32• “ FOUP Advance Subassembly” on page 34• “ BOLTS Frame” on page 38• “ Options” on page 40• “ Operation Sequence”— describes Falcon’s typical operation sequence.FIGURE 10 Falcon Loadport
Page 24 2000-6698-05 Draft Ax9Falcon Technical ManualChapter 2: Product OverviewProduct DescriptionProduct DescriptionThe Falcon is an all-new loadport design based on Asyst’s many years of experience with loadports, incorporating input from a wide range of fabs & OEMs. This elegantly simple design anticipates the customer demand for synergy between AMHS and EFEM requiring seamless integration, faster hand-offs, more efficient buffering and improved productivity.Asyst is the only loadport supplier with both EFEM and AMHS capability. Falcon has the Best In Class performance for Speed and Cleanliness. Asyst’s patented Latch key Twist & Pull Technology to securely hold the FOUP Door during access, means no vacuum is required.The Falcon design improves reliability and speed of wafer handling, provides more robust alignment stability, and reduces Preventive Maintenance requirements; All reducing the overall cost of ownership. The modular design of the components shortens service times, while eliminating most service alignments. Falcon is a 300mm Loadport that maintains better than Class 1 environment for loading and unloading (opening and closing) SEMI standard 300mm FOUPs. The Front-Opening Unified Pod (FOUP), designed for 25 wafer capacity, is a sealed carrier pod that provides a sub-class 1 environment. Falcon is compatible with most SEMI standard compliant FOUPs.The Falcon interface to the Host tool complies with the SEMI 300mm Tool Loadport Specification (E15.1). It is designed to directly mount onto a Host Tool through a SEMI E63 (BOLTS) interface and can be quickly disconnected for ease of servicing.A system of sensors and use of stepper motors ensure safe operation of Falcon, preventing wafer breakage or errors in mechanical operation. Software provides for integrated self-tests and diagnostics.
Draft Ax9 2000-6698-05 Page 25Falcon Technical ManualChapter 2: Product OverviewProduct DescriptionMajor ComponentsThis section describes the major components of the Falcon loadport, with operational descriptions, subassemblies, and features.FIGURE 11 Falcon Loadport• “ FIMS Door” on page 29• “ Vertical-Horizontal Door Drive” on page 32• “ FOUP Advance Subassembly” on page 34• “ BOLTS Frame” on page 38Host Tool BOLTSMounting PlateFalcon BOLTS InterfaceDrive Belt CoverFOUP AdvanceFIMS Port DoorFalcon Indicator Display LightsStatic Entry NodeVert/HorizontalLink Manager(Under the Cover)Vertical/Horizontal Drive /CPUwith Fan
Page 26 2000-6698-05 Draft Ax9Falcon Technical ManualChapter 2: Product OverviewProduct DescriptionFeaturesThe following features contribute to Falcon’s easy adoption, ease of use and overall product robustness.• Protocol converters to emulate previous & competing loadports• Browser configurable• SW configurable indicator lights (no lenses)• No internal alignment once installed• Tilt-N-Go installation• Integrated Features:Manual Load/Unload Push Button SwitchAdvanTag RFID • Integrated Options:ABCD Mechanical Lockout PinABCD SensorWafer MappingPowerFalcon is powered by +24VDC (+10, -2%). The input power is applied through a CPC4 connector “+24VDC IN” (see Figure 12).FIGURE 12 Static Entry Node PCB Assembly with Link Manager/CPUCPC4 ConnectorLinkManager/CPU
Draft Ax9 2000-6698-05 Page 27Falcon Technical ManualChapter 2: Product OverviewSpecificationsSpecificationsTABLE 2 Falcon Product Specifications*Wafer Size: 300mm Height: 1351.1mm (53.19 in.)Width: 470mm (18.5in.)Depth: 485mm (19.1 in.) Note: from BOLTS PlaneWeight: 68Kg (150 lbs) with Tilt & Go Wheels installedMounting: Falcon is designed to directly mount onto a Host Tool having a SEMI E63 (BOLTS) interface.FOUP Load Height: Per SEMI Standards E15.1 and E63 ±10mm Height Adjustability on Host toolContamination Control Wafer Environment Airborne Particle Cleanliness Class 1 per ISO 14644-1Fab Environment Airborne Particle Cleanliness Class 5 per ISO 14644-1Defect Density < 0.01 PWP @ 0.15 Particle SizeFOUP Compatibility The Falcon is designed to operate with SEMI E47 compliant wafer carriers.Wafer Mapping Emitter Sensor - ± 1º beam angle Collimated IR LEDReceiver Sensor - Light-to-voltage photodiode with Door Speed (OPEN/CLOSE) 8 Seconds Open with Wafer Mapping8 Seconds Close with Wafer MappingPower: Requirement from Host tool: 24 VDC (+10, -2%) @ 7 amps peakFalcon Power Consumption:2 Amp standby (max)5 Amp operating (max)7 Amp peak (max)100-240VAC Option, the customer provides 100-240VAC, 50/60Hz.,3.5A AC Power module converts the power to the +24VDC (+10, -2%), 7A required for Falcon operation.Communications: Serial RS-232C (ASCII or SECS 2), Ethernet (ASCII), Parallel is optionalCarrier Types 300mm 25-Wafer FOUP (Front Opening Unified Pods)Vacuum NoneCompressed Air None
Page 28 2000-6698-05 Draft Ax9Falcon Technical ManualChapter 2: Product OverviewSpecificationsFalcon complies with content of SEMI S2, SEMI S8, and CE Marking.*Specifications subject to change without noticeFIGURE 13 Falcon Basic OutlineFor additional dimensions, interface points and datums see “ 2000-6803-01 Falcon Outline Drawing” on page 284.Noise 70-80dB RMS: Compliant to SEMI S8Environmental: Operating Temperature 10 to 40° C.Operating Humidity 10 to 75% non-condensingStorage Temperature -10 to +55°C.Storage Humidity 5 to 90% non-condensingTABLE 2 Falcon Product Specifications*580.1mm470mm1351.1mm485.0mm3.0mmBOLTSInterfacePlate
Draft Ax9 2000-6698-05 Page 29Falcon Technical ManualChapter 2: Product OverviewFIMS DoorFIMS Door The Falcon Front-Opening Interface Mechanical Standard (FIMS) door is used to open a 25-wafer FOUP. Two latch keys located on the FIMS door rotate to horizontal to unlock the FOUP door. Using Asyst’s patented Twist & Pull technology, both latch keys retract at the horizontal (unlocked) position to secure the FOUP door.FIGURE 14 FIMS Door, Front View FIGURE 15 FIMS Door, Rear View (without Cover)FOUP-at Port Sensors (2X)Latch Key (2X)Wafer Map EmitterWafer Map ReceiverRegistration Pins Wafer Mapper (option)Latch Key Home SensorLatch Key Motor AssyFOUP Lock/ Unlock Latch Key MechanismDoor Node PCB
Page 30 2000-6698-05 Draft Ax9Falcon Technical ManualChapter 2: Product OverviewFIMS DoorAfter the port door latch keys secure the FOUP door, it backs away from the FOUP, then lowers until the FOUP opening is cleared. Once the port door is lowered, the wafers are accessible for processing. For details on how the Port Door works in conjunction with the FOUP Advance plate, see “ Operation Sequence” on page 45.FeaturesBall Joint with Clamping for Port Door AlignmentThis feature enables roll, pitch and theta alignment of the port door with one fastener for all three adjustments. This permits setup and alignment to be done with 1 fixture and one tool. The reduced part count reduces the potential for error. See Figure 16.FIGURE 16 Ball Joint DesignSimplified Twist and Pull Latch Key Drive The Falcon design preserves Asyst’s proven and patented twist & pull latch key drive and door retention with no vacuum system needed to secure a FOUP door to a FIMS door. Each latch key provides 3-4 lbs of pulling force. This design uses a one piece cam drive plate, guided by a latch key shaft to move the 2 individual latch key mechanisms. The pull-in FOUP clamping feature is comprised on a spherical bushing and socket detent in the cam drive plate. A compression spring provide the clamping force. The Falcon latchkey are lubricated for the rate life of the unit and requires no preventive maintenance. See Figure 17.FIGURE 17 Simplified Twist and Pull Latch Key Drive
Draft Ax9 2000-6698-05 Page 31Falcon Technical ManualChapter 2: Product OverviewFIMS DoorSensorsThere are two FOUP-at-Port (FAP) Sensors that will detect the presence of a FOUP door when up against the FIMS door. Both FAP sensors detect the presence of a FOUP door at the docked position. Ground Path to FOUP DoorThe Falcon provides a path to ground from the FOUP door through the port door latch keys, when the FOUP door is removed from the FOUP.Configurable Latch Key Over-RotationThe Falcon rotates the latch key from the locked position at 90 degrees (FOUP Door locked position) to the unlocked position of 0 degrees. Falcon can be configured for over-rotation at the 90 degree position to 1,2, or 3 degrees over-rotate through the GUI Interface. The factory default setting for over-rotate is 2 degrees.
Page 32 2000-6698-05 Draft Ax9Falcon Technical ManualChapter 2: Product OverviewVertical-Horizontal Door DriveVertical-Horizontal Door DriveThe vertical and horizontal drive (V/H Drive) has two functions: To open and close the FOUP door. During opening of the FOUP door, the V/H Drive will move backward in horizontal movement to clear to the BOLTS plate and downward to give to host tool access to the wafers. See Figure 18.FIGURE 18 Vertical/Horizontal Door Drive ComponentsDuring closing, the V/H Drive will move upward and in to close the FOUP. When configured with the optional wafer mapper, mounted on the door module, the V/H Drive makes 2 stops to allow for wafer mapping during open and/or close cycle.The V/H Drive is designed to be maintenance free. There are no user serviceable components and no alignments are necessary. Major modules (Motor, Upper Pulley/Brake/Encoder Assembly, Belt) are designed for quick replacement if needed, with no changes to alignment.FeaturesSingle Motor for Two AxesThe design of the Vertical/Horizontal Drive Assembly incorporates a single stepper motor and Belt Drive to perform both Vertical & Horizontal Door Motions. The Motor mounts directly to the BOLTS plate frame so no machined brackets are required. The use of Top BottomUpperEncoderBelt Tension AdjustBeltMotorAxleDoor BumperGuide RailMountPulley/Brake Assy
Draft Ax9 2000-6698-05 Page 33Falcon Technical ManualChapter 2: Product OverviewVertical-Horizontal Door DriveDirect stepper drive eliminates the need for a speed reduction system. The integrated design means that fewer sensors, adjustments, and moving cables are required.Upper Pulley/Brake/Encoder AssemblyThe Upper Pulley/Brake/Encoder Assembly includes a 24V Brake used in the event of power loss to stop Z Movement of the FIMS Door. The fail-safe Brake keeps the vertical drive held in place when inactive or during loss of power.The Encoder, part of the Upper Pulley Assembly, is used to give position feedback and also to work with wafer mapper to detect wafer presence and slot positions in a FOUP.There is no hard stop for homing the Vertical/Horizontal Drive, the encoder with home sensor is used to determine home position. Home position of the Vertical/Horizontal Drive is at the top of the drive. The Brake, part of the Upper Pulley Assembly, stops all movement of the Vertical-Horizontal Door Drive:• anytime power is cut • at the end of motion (excluding Upper and Lower Mapping positions)• whenever a following error is larger than its limit (Important during upward movement to prevent the door from dropping)Vertical/Horizontal Drive components (Motor, Upper Pulley/Brake with encoder, and home sensors) all connect directly to the static entry node on the BOLTS frame. Fan AssemblyThe Fan Assembly is located on the bottom of the removable belt/drive cover. It provides a continuous air flow for airborne particle control for the vertical/horizontal drive mechanisms. This is done to insure no contamination to the Host Tool mini environment by this mechanism.
Page 34 2000-6698-05 Draft Ax9Falcon Technical ManualChapter 2: Product OverviewFOUP Advance SubassemblyFOUP Advance SubassemblyThe FOUP Advance Module is a component of the Falcon loadport which is required to position the FOUP on the loadport for processing by the Host Tool and AMHS system.FIGURE 19 FOUP Advance Plate without CoverThe FOUP Advance Module positions the carrier using kinematic pins in an orientation for AMHS transfers, positions the FOUP in an orientation for opening the FOUP door and positions the kinematic pins in an orientation using for wafer handling by a front end robot.The FOUP Advance Module also provides a means of latching the carrier to prevent removal of the carrier by operators with adequate holding force to allow door opening, resisting operator applied forces, and a means of reading and/or writing to the carrier RFID tag.The K-Plate is supported by 2 linear rails that are attached to the FOUP Advance Base.Falcon software uses two sensing systems, FOUP Placement and FOUP Presence, to ensure that the FOUP advance will not operate unless the FOUP is properly positioned. When the FOUP is placed on the Kinematic Pins of the FOUP Advance, the Presence sensor detects the presence of the FOUP and the Placement sensors detect that the FOUP has been properly placed. Kinematic PinsAdvanTag RFID Antenna Manual InfoPadsPlacement SensorsHold Down LatchFOUP AdvanceNodeLoad/Unload Push Button SwitchPresenceSensorEmitter RFID
Draft Ax9 2000-6698-05 Page 35Falcon Technical ManualChapter 2: Product OverviewFOUP Advance SubassemblyThe FOUP Advance controls horizontal movement of the FOUP and support plate. After both the FOUP placement and presence sensors are triggered, the Active Pod Hold Down (APHD) latches to hold the FOUP to the Kinematic Pins. This ensures the FOUP can not be removed from the Kinematic Pins. The plate then moves towards the port door to the configured FOUP docked position. The FIMS door moves to meet the FOUP door at the Docked position. FAP sensors are actuated by the FOUP door, confirming a FOUP Door is present. The latchkeys then unlock the FOUP door and hold the FOUP door in position on the port (FIMS) door.FeaturesTorque Tube with Cantilevered Supports• Provides major improvement in torsional rigidity/stability in the as-installed condition• Provides stable reference platform for the FOUP advance /K plate assembly• Enables one time factory setup/alignment for critical K plate dimensions. No field adjustment required.Manual Load/Unload Push Button SwitchThe FOUP Advance Plate features one push button switch that is end-user configured. It is a Programmable Function Manual Push button with Indicator LEDs. See Figure 20.FIGURE 20 FOUP Advance Load/ Unload Push Button Switch NOTE . . .THE BUTTON MUST BE PROGRAMMED BY THE USER BEFORE SUBSEQUENT ACTION IS PERFORMED BY THE FALCON AS A RESULT OF THE BUTTON EVENTS.
Page 36 2000-6698-05 Draft Ax9Falcon Technical ManualChapter 2: Product OverviewFOUP Advance SubassemblyK-Plate Node PCBThe K-Plate Node PCB, located on the top of K-Plate, has two controllers, both which communicate via CAN to the System Link Manager/CPU module.Ti-DSP: • Controls FOUP advance function using close loop Step motor and encoder. • Controls FOUP Hold Down function using an open loop DC motor, and position sensor. • Provides approximately 30 general purposes I/Os. • Monitor FOUP status through 7 on board sensors • Communicates with system CPU via CAN PIC-Controller: • Controls RFID communication and RF power; and communicate with System CPU via CAN.Integrated AdvanTag Circuitry. The main component of the integrated AdvanTag circuitry is a transmitter that generates radio waves through an antenna. This TIRIS compatible low-frequency (134.2kHz), low-power RF energy is used to read from or write to a transporter near the antenna. The 134.2kHz carrier from the RFID-ASIC is amplified to the proper levels to drive the dual MOSFET power amplifier. This provides a 12Vp-p low impedance drive to the antenna circuit. The antenna is a series resonant LC circuit resonated at 134.2kHz to achieve maximum voltage on the antenna.Cam Activated Pod Hold DownThe FOUP is held down and cannot be manually removed from the Falcon unless the APHD is released.– Very fast acting (0.40 seconds)– No adjustments necessarySensorsFOUP Presence Sensors. One Emitter/Receiver pair located in the Status Display board (emitter) and FOUP Advance Plate (receiver) to detect whether a FOUP is present on the Advance plate (the load/unload area).FOUP Placement Sensors. There are 3 FOUP placement sensors, incorporated into the FOUP Advance Plate; each sensor is located near a kinematic pin. The placement sensors work in parallel to provide accurate detection of a FOUP that is correctly placed on the FOUP Advance Plate/kinematic pins.
Draft Ax9 2000-6698-05 Page 37Falcon Technical ManualChapter 2: Product OverviewFOUP Advance SubassemblyInfoPad Sensors. The Falcon provides for InfoPad sensors and/or a mechanical interlock pin to be installed at four location on the FOUP Advance Plate. InfoPads Sensors are used to distinguish between FOUP identities based on info plugs installed on the underside of a FOUP. A mechanical lockout pin can be placed in any InfoPad position. If the pin is placed in the "A" location, then a FOUP with the "A" location blocked cannot be placed properly onto the loadport. This is to prevent wafers in certain FOUPs from entering a process tool.
Page 38 2000-6698-05 Draft Ax9Falcon Technical ManualChapter 2: Product OverviewBOLTS FrameBOLTS FrameThe BOLTS frame is the structure to which main subassemblies are mounted. It also provides the interface/mounting point for the Host Tool. In addition, the frame includes several key electronic circuits as well as the status indicators.Main ComponentsLight Display Node PCBThe Light Display Node PCB controls the indicator lights at the top of the Frame. The Display PCB can only be accessed from the Operator side of Falcon. Figure 21 shows the PCB (with the indicator light panel removed from the top of the Frame). FIGURE 21 Light Display Node PCBThe emitter of the FOUP Presence Sensor is located on the Display Node PCB. It works in conjuction with the receiver located on the FOUP Advance assembly to detect whether there is a FOUP on the FOUP Advance plate. NOTE . . .THE FOUP PRESENCE SWITCH DOES NOT INDICATE WHETHER THE FOUP IS PLACED CORRECTLY ON THE PLATE, ONLY THAT THERE IS A OBJECT PRESENT ON THE PLATE.Excessive Wafer Protrusion SensorThe Excessive Wafer Protrusion Sensor is located on the BOLTS frame assembly, this interlock sensor detects whether a wafer is positioned too far out of the FOUP. If sensed, all movement is halted to prevent damage to wafers and allow manual re-seating into the FOUP. The Excessive Wafer Protrusion sensor used on the Falcon is break-the-beam type optical sensor It provides an off/on signal via the digital I/O and an interrupt to the processor when actuated, V/H Door motion is stopped and a fatal error message is sent to the Host (Tool). FOUP Presence Sensor
Draft Ax9 2000-6698-05 Page 39Falcon Technical ManualChapter 2: Product OverviewBOLTS FrameStatic Entry Node PCBLocated on the Operator side of the BOLTS Frame Assembly, the Static Entry Node controls movement of the Horizontal/ Vertical Drive and FOUP Advance assemblies, and is able to communicate via CAN to the Link Manager/CPU, the Door Node, and the FOUP Advance Node.The Static Entry Node contains circuitry that monitors voltage and current. If the applied voltage becomes too low or too high the electronics will be shutdown until the correct voltage level is restored. Over current (over load) protection device rating is 9 amp. To recover the operation, power will have to be cycled off and then on again.FIGURE 22 Static Entry Node PCBTABLE 3 Static Entry Node ConnectionsSEN Connector Goes To Link Manager/CPUJ1 V/H Motor Encoder J1 EthernetJ3 V/H Drive Brake Comm1 RS232 SerialJ9 RJ45 cable goes to -------> J10 DB9J22 Main Power InJ23 V/H MotorJ25 FanJ27 V/H Home SensorJ36 Excessive Protrusion SensorCPC4 PowerConnectorLinkManager/CPU
Page 40 2000-6698-05 Draft Ax9Falcon Technical ManualChapter 2: Product OverviewOptionsOptionsCurrent options available for the Falcon are the Wafer Mapper, the 100-240VAC Power Option, the E84/PIO/Interlock Option and the Tilt & Go Wheel option.Wafer Mapper Assembly OptionAn optional wafer map system can be attached to the FIMS door, that consists of two arms, with sensors, operating during the vertical movement of the port door to determine the position of wafers and detect cross-slotting or double-slotting of wafers within a FOUP. See Figure 23.FIGURE 23 Wafer Mapper UninstalledThe wafer mapper assembly with protrusion module is comprised of a light source and a receiver. The light source/receiver pair is for detecting wafer presence, empty slots, cross-slotted and double-slotted wafers within the FOUP. This wafer map data is transmitted to the host tool. Two stepper motors are used to deploy and retract the arms.The Falcon wafer mapper is designed to be maintenance free. There are no user serviceable components and no alignments are necessary.
Draft Ax9 2000-6698-05 Page 41Falcon Technical ManualChapter 2: Product OverviewOptions100-240VAC Power OptionTypically the Falcon is powered by +24VDC (+10, -2%) provided by the Customer, via the Host Tool. Falcon loadports configured with the 100-240VAC 50/60 Hz, 3.5A Option, permit the customer to provide AC power to an AC Power Supply, within the Falcon, that converts the power to the +24VDC (+10, -2%), 7A required for Falcon operation. See Figure 24 for main view of components, see Figure 25 for tool side view and see Figure 26 on page 42 for wiring diagram.FIGURE 24 Components of the 100-240VAC OptionFIGURE 25 Tool Side ViewBelt Cover/Fan Assembly Static Entry Link Manager100-240VACPower InputNode100-240VACPower Supply /CPU24VDCPower Input100-240VACPower Input
Page 42 2000-6698-05 Draft Ax9Falcon Technical ManualChapter 2: Product OverviewOptionsFIGURE 26 Wiring for the AC OptionPin 1Pin 4LoadNeutralGroundGround
Draft Ax9 2000-6698-05 Page 43Falcon Technical ManualChapter 2: Product OverviewOptionsE84/PIO/Interlock OptionThe E84/PIO/Interlock Option provides communications interface with a variety of FOUP delivery systems including AGV, AMHS, or process tools.The E84/PIO/Interlock Option provides several functions for the Falcon loadport:• Provides E84 interface for communication with AMHS/AGV systems for FOUP delivery.• Provides PIO interface for communication with process tools for door close/open operation.• Provides an interlock to disable loadport operation.ComponentsThe E84/PIO/Interlock Option consist of the E84 Node PCB and connecting cables.FIGURE 27 E84 BoardJ6 ReceptacleJ10 ReceptacleJ15 PlugJ12J13 RJ45J14J16RJ45D-SubD-SubD-Sub25 Pin25 Pin15 Pin
Page 44 2000-6698-05 Draft Ax9Falcon Technical ManualChapter 2: Product OverviewOptionsTilt & Go Wheels OptionThe Tilt & Go wheels option allows a single operator to assemble and align the Falcon to the Host tool, as well as remove the Falcon from the Host tool. Also, one operator can move the Falcon to various parts of a fab (e.g., from tool to tool, to a repair area). See Figure 28 on page 44.GENERAL HAZARDCAUTIONFOR ONE PERSON REMOVAL FALCON MUST HAVE A BASE WHEEL ASSEMBLY ATTACHED BEFORE REMOVING THE FALCON FROM THE HOST TOOL. THE WHEEL ASSEMBLY MAY HAVE BEEN REMOVED AFTER INSTALLATION.FIGURE 28 Falcon Tilt & Go Wheels NOTE . . .WITHOUT THE TILT AND GO WHEEL OPTION THE FALCON MUST BE MOVED USING A TWO PERSON LIFT, TAKING CARE TO OBSERVE THE MOVING AND HANDLING REQUIREMENTS SPELLED OUT IN THIS CHAPTER. SEE “ Moving and Handling” on page 16.
Draft Ax9 2000-6698-05 Page 45Falcon Technical ManualChapter 2: Product OverviewOperation SequenceOperation SequenceStep 1 Undocked (Home) PositionThe operating sequence for Falcon always begins from the undocked (Home) position:• Vertical Drive is at Home position; Door is at Closed position• FOUP Advance Drive is at Undocked position• Latch Keys are in Vertical position• Wafer Map Arms are retracted• Active Pod Hold Down is in Open positionStep 2 Place FOUP on FOUP Advance Plate1. FOUP is properly placed onto the kinematic pins located on the FOUP advance plate. FOUP Presence sensors and FOUP Placement sensors are activated.2. Falcon reports to Host that the FOUP has arrived.Step 3 Advance FOUP to Port Door1. Host sends an Open command to open the FOUP.2. The FOUP Advance Module latches the carrier to prevent removal of the carrier while the door is open.3. Integrated AdvanTag reads and/or writes to the carrier RFID tag as initiated by the Host.4. The FOUP Advance moves the FOUP towards the FIMS door to the configured FOUP docked position. 5. The FIMS door moves to meet the FOUP door at the Docked position. 6. FAP sensors are actuated by the FOUP door confirming a FOUP Door is present.Step 4 Open and Lower the Port and FOUP Doors1. Latch Keys unlock the FOUP door and hold the FOUP door in position on the port (FIMS) door.2. FIMS door with FOUP door are moved horizontally and vertically away from the port to clear the opening.3. With Wafer Map Option present, vertical drive moves to Mapper Upper position.4. With Wafer Map Option present, Wafer Map Light Source (IR LED) activates.5. With Wafer Map Option present, Wafer Mapper arms extend, and the Wafer Map system activates.

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