Asyst Technologies FALCON 300mm Load Port With AutoID User Manual Falcon Technical Manual

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Date Submitted	2008-10-22 00:00:00
Date Available	2008-10-22 00:00:00
Creation Date	2008-10-08 14:31:37
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Document Lastmod	2008-10-08 15:29:31
Document Title	Falcon Technical Manual
Document Creator	FrameMaker 7.2
Document Author:	C. Day

Asyst Falcon™ 300mm Loadport
Technical Manual
with Installation Instructions
Tool Picture
Rev. Ax9 Date: 9/12/2008
P/N: 2000-6698-05
Copyright © 2008
Asyst Technologies, Inc.,
All rights reserved.
Falcon Technical Manual
Disclaimers
Disclaimers
This manual may not be reproduced, either wholly or in part, for any reason whatsoever, without prior written permission
from Asyst Technologies, Inc. (“Asyst”). Material contained in this manual is provided for informational purposes and is
subject to change without notice.
If this manual is marked “Preliminary” or “Draft,” then Asyst has not yet released a final version of the manual and the
manual is likely to be incomplete and will be revised. Contact Asyst at the address below to obtain a final copy of the
manual.
Manual Information
PCN: Unreleased
Part Number: 2000-6698-05
Date: 9/12/2008
Release: Ax9
Asyst Technologies, Inc.
46897 Bayside Parkway
Fremont, California 94538
Telephone: (510) 661-5000
FAX: (510) 661-5166
Technical Support: 1-800-342-SMIF
Trademarks
Asyst and the Asyst logo(s) are registered trademarks ® of Asyst Technologies, Inc.
ADVAN-TAG and Falcon are trademarksTM of Asyst Technologies, Inc.
All other product and company names mentioned herein may be trademarks and/or service marks of their respective
owners.
Equipment Modification
Any change, alteration, or modification to this equipment, as well as use of this equipment in a manner inconsistent with its
intended use will void this equipment’s warranty and may render this equipment unsafe for use or unfit for its intended
purposes.
Training and Languages
User training for equipment operation and maintenance is conducted in English. Translators are available on an as needed
basis. English versions of the manuals and other technical materials are provided and reviewed during the training. Please
contact the Asyst Training department or http://www.asyst.com for the training schedule and signup requirements.
Warranty
For warranty information, see Asyst’s Standard Terms and Conditions.
Draft Ax9
2000-6698-05
Page iii
Falcon Technical Manual
Reader Comments
Reader Comments
We welcome your comments regarding this manual. Your comments and suggestions
help us to improve our publications.
Please send comments and suggestions to:
Asyst Technologies, Inc.
Technical Publications Manager
46897 Bayside Parkway
Fremont CA 94538
Or fax: Attention—Tech Pubs Manager at 1-510-661-5185
Or email: TechPubs@asyst.com
Include the following:
Name:
Company:
Contact Phone # (in case we have questions):
Email:
Document Information (Name of document, Part Number, Revision):
Location of comment (page number or other reference):
Comments: (The more specific the comments, the more useful they are to us.)
Thank you for helping to improve the manuals and to maintain accuracy.
Page iv
2000-6698-05
Draft Ax9
Acronym List
AGV
Automated Guided Vehicle
APHD
Active Pod Hold Down
ASCII
American Standard Coding for Information Interchange
CAN
Control Area Network
DSP
Digital Signal Processor
EMI
Electromagnetic Interference
EMO
Emergency (Machine) Off
ESD
Electrostatic Discharge
FIMS
Front-opening Interface Mechanical Standard
FOUP
Front Opening Unified Pod
K-Plate
Kinematic Plate (also referred to as FOUP Advance Plate)
MGV
Manually Guided Vehicle
OEM
Original Equipment Manufacturer
OHS
Overhead Hoist Shuttle
OHT
Overhead Transport or Overhead Hoist Transport
PCB
Printed Circuit Board
PN or P/N
Part Number
RFID
Radio Frequency IDentification
SEMI
Semiconductor Equipment and Materials International
SMIF
Standard Mechanical Interface
Draft Ax9
2000-6698-05
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Falcon Technical Manual
Acronym List
Page vi
2000-6698-05
Draft Ax9
Revision History
This section gives an overview of the change history for the document.
Date
Author
Version
Revision Information
11/15/2007
Catherine Day
Ax1
Created using 2000-2414-05 Rev. C as a base.
1/10/2008
Catherine Day
Ax2WIP
WIP - Compiled for Mike F. Reference Only
3/21/2008
Catherine Day
Ax2
3/28/2008
Catherine Day
Ax3WIP
04/08/2008
Catherine Day
Ax3
Added redlines from Training class. Updated some images with
Beta images. Added verifications steps after Service procedures.
Added 100-240VAC Option. Added removal of FOUP Advance
under cover to affected Service procedures. Fleshed out
Overview Chapter.
04/18/2008
Catherine Day
Ax4
Added redlines and new input from Tou Vang, Mike
Fahkrabadhi, Selby Sondergaard, Chi Yeh, Gary Durham, Grant
Imper, Pranav Desai. Updated more images.
04/24/2008
Catherine Day
Ax5
Added redlines and new input from Tou Vang, Mike
Fahkrabadhi, Selby Sondergaard, Matt Hoang. Updated more
images.
5/30/2008
Catherine Day
Ax6
Added Content from Tou Vang, Mike Fahkrabadhi and drawings
7/11/2008
Catherine Day
Ax7
Expanded Software upgrade procedure and made it part of the
Service Chapter. Added input from John Green and Pranav
Desai. Made changes to all chapters and appendices.
Incorporated Beta 9 Software release notes, in many case
replacing existing content with info from the release notes.
Changed multiple illustrations. Updated all Assembly drawings
and PCB drawings.
Draft Ax9
Compiled for training class. Huge gaps in Installation,
Overview, Interfaces and Comm SW which we will attempt to
fill during training week 3/24-28.
WIP - Compiled for Tou Vang. Reference Only
2000-6698-05
Page vii
Falcon Technical Manual
Revision History
Date
Author
Version
Revision Information
9/3/2008
Catherine Day
Ax8
Added input from John Greene, Duc Le, Bob Carlson, and
Pranav Desai. Made changes to all chapters and appendices.
Incorporated Beta 10 Software release notes. Updated all
Assembly drawings and PCB drawings.
9/22/2008
Catherine Day
Ax9
FINAL DRAFT -Removed information duplicated in the
Software Communications Manual and just reference that
document.
Added Remove and Replace instructions for the E84 and AC
Power Options. Edited all service procedures to show new front
panel removal. Updated all Assembly drawings and PCB
drawings.
Added customer cable routing for the E84 and AC Option to the
Installation Appendix. Added Details about the Vertical Brake.
Added comments/corrections from Chris Lueders, John Greene,
Duc Le, Bob Carlson and Tou Vang. Added Specifications from
Engineering and Matt Hoang.
Page viii
2000-6698-05
Draft Ax9
Falcon Technical Manual
Table of Contents
Disclaimers . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . iii
Manual Information . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . iii
Trademarks . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . iii
Equipment Modification. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . iii
Training and Languages . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . iii
Warranty . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . iii
Reader Comments . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . iv
Acronym List. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .v
Revision History . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . vii
Preface . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1
About this Manual . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1
Conventions . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2
Chapter 1: Safety Information . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3
Introduction . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3
Chapter Summary . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3
General Requirements . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4
General Safety. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4
Electrical Safety . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4
Responsibility . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5
Safety Tags . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6
Safety Requirements. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7
ESD / EMI Precautions . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7
EMO & Electrical Power . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 8
Lockout/Tagout . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 8
Pinch Hazards . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 9
During Installation. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 11
Seismic . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 12
Ergonomic . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 12
Options . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 13
Wafer Mapper Option . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 13
100-240VAC Option. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 13
E84/PIO/ Interlock Option . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 13
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Falcon Technical Manual
Tilt and Go Wheels Option. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 13
Agency Compliance . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 14
FCC . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 14
Definition . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 14
Compliance . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 14
CE Mark. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 14
Safety Features. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 15
DC Voltage . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 15
AC Option . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 15
Pinch Hazard . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 15
Port Door . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 15
FOUP Advance . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 15
Moving and Handling . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 16
Labeling. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 18
Chapter 2: Product Overview . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 23
Product Description. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 24
Major Components . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 25
Features. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 26
Power. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 26
Specifications . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 27
FIMS Door. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 29
Features. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 30
Ball Joint with Clamping for Port Door Alignment. . . . . . . . . . . . . . . . . . . 30
Simplified Twist and Pull Latch Key Drive . . . . . . . . . . . . . . . . . . . . . . . . 30
Sensors . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 31
Ground Path to FOUP Door . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 31
Configurable Latch Key Over-Rotation. . . . . . . . . . . . . . . . . . . . . . . . . . . 31
Vertical-Horizontal Door Drive. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 32
Features. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 32
Single Motor for Two Axes . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 32
Upper Pulley/Brake/Encoder Assembly . . . . . . . . . . . . . . . . . . . . . . . . . . 33
Fan Assembly. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 33
FOUP Advance Subassembly. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 34
Features. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 35
Torque Tube with Cantilevered Supports. . . . . . . . . . . . . . . . . . . . . . . . . 35
Manual Load/Unload Push Button Switch . . . . . . . . . . . . . . . . . . . . . . . . 35
K-Plate Node PCB . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 36
Cam Activated Pod Hold Down . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 36
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Sensors . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 36
BOLTS Frame . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 38
Main Components . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 38
Light Display Node PCB. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 38
Excessive Wafer Protrusion Sensor. . . . . . . . . . . . . . . . . . . . . . . . . . . . . 38
Static Entry Node PCB . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 39
Options . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 40
Wafer Mapper Assembly Option . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 40
100-240VAC Power Option . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 41
E84/PIO/Interlock Option . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 43
Components . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 43
Tilt & Go Wheels Option . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 44
Operation Sequence . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 45
Chapter 3: Interfaces. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 49
Introduction . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 49
Chapter Summary . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 49
Communication Interfaces . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 50
Status Indicator Lights. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 51
Command for LED Configuration. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 51
Falcon Application Software . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 52
Using the Falcon GUI . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 53
Accessing the GUI . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 53
Navigating Overview . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 55
System Icon Details . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 55
Wafer Status Screen . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 56
Service Mode Commands Screen . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 56
Motor Control Commands Screen . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 60
E84 Status Screen . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 61
LED Controls Screen . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 61
System Info Screen . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 62
Setup Icon Details . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 62
Host Communications . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 63
Users and Passwords . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 64
Axes Parameters . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 65
E84 Configuration. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 67
Wafer Mapper Parameters . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 67
DSP Firmware . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 68
LED Setup . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 68
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System Log Icon. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 69
Alarms Icon . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 70
Diagnostics Icon . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 70
Chapter 4: Service. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 71
Overview . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 71
Safety Requirements. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 72
General Safety. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 72
Electrical Safety . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 72
Mechanical Safety . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 73
ESD Precautions . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 73
Tool and Fixture Requirements. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 73
Remove and Replace Falcon 74
Corrective Service Procedures. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 81
Introduction . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 81
CSP1: Replace Falcon K-Plate Node PCB . . . . . . . . . . . . . . . . . . . . . . . . . . 82
CSP2: Replace Falcon Door Node . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 89
CSP3: Replace Vertical/Horizontal Drive Motor . . . . . . . . . . . . . . . . . . . . . . 95
CSP4: Replace Pod Hold Down Motor Assembly . . . . . . . . . . . . . . . . . . . 106
CSP5: Replace Wafer Mapper Assembly . . . . . . . . . . . . . . . . . . . . . . . . . . 112
CSP6: Replace Display Node PCB . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 117
CSP7: Replace Static Entry Node . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 121
CSP8: Replace Link Manager/CPU . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 127
CSP9: Replace Latch Key Motor Assembly . . . . . . . . . . . . . . . . . . . . . . . . 131
CSP10: Replace V/H Drive Upper Pulley Assembly . . . . . . . . . . . . . . . . . . 137
CSP11: Replace Vertical Drive Belt . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 147
CSP12: Upgrade Falcon Software . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 155
CSP13: Vertical Drive Belt Tensioning . . . . . . . . . . . . . . . . . . . . . . . . . . . . 161
CSP14: Remove and Replace E84 Board . . . . . . . . . . . . . . . . . . . . . . . . . 168
CSP15: Replace AC Power Supply . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 173
Chapter 5: Troubleshooting. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 179
Introduction . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 179
Collecting Falcon Files . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 179
Emergency Removal of Pod . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 182
Application . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 182
Procedure . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 182
Remove Host Tool’s End-Effector . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 182
Removal Using Falcon Application. . . . . . . . . . . . . . . . . . . . . . . . . . . . . 182
Error Codes. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 185
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Falcon Alarm Codes . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 186
Auto Recovery . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 188
About Alarm Codes . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 189
Recovery Procedures. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 189
About Alarm 1 “Position following error”. . . . . . . . . . . . . . . . . . . . . . . . . 190
About Alarm 2 “Vertical drive is not home”. . . . . . . . . . . . . . . . . . . . . . . 190
About Alarm 3 “Motion requested while already busy”. . . . . . . . . . . . . . 191
About Alarm 4 & 30 “Pod is missing” . . . . . . . . . . . . . . . . . . . . . . . . . . . 191
About Alarm 5 “Aborted by user” . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 192
About alarm 14, 24, 82, 83, 84, 86 & 87. . . . . . . . . . . . . . . . . . . . . . . . . 192
Abort/Failed Messages . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 194
Troubleshooting . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 195
Error Types . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 195
Factory Default Settings . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 198
Appendix A: Installation Instructions . . . . . . . . . . . . . . . . . . . . . . . . . 199
Introduction . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 199
Installing Falcon . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 200
Handling Cautions . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 200
Operating Caution . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 201
Installation Summary . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 201
Verify Asyst Supplied Materials. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 201
Verify the OEM Supplied Materials . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 202
BOLTS Interface Mounting . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 202
Power Cable . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 202
Grounding Cable . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 203
Requirement. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 203
Assembly . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 203
Communications Cables . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 203
Prepare for Mounting Falcon. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 204
Mount Falcon to the Host Tool . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 212
Verify Operation . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 213
Adjust and Level Falcon . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 215
Open Falcon . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 215
Initial Height Adjustment . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 216
Perform Final Adjustments . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 217
Falcon Configuration . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 220
Display Light Configuration . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 220
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Appendix B: Communications . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 221
Overview . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 221
Compact Flash Contents. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 222
Communication with VxWorks Operating System. . . . . . . . . . . . . . . . . . . . . . . 223
Communication with Falcon . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 225
Ethernet . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 225
Examples . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 225
Serial Communication . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 226
Examples . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 227
Description of Falcon.ini . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 229
Communication Protocol Settings . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 229
System Configuration . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 229
Without Wafer Arm Assembled: . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 229
With Wafer Arm Assembled: . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 229
Not Using 5mm Protrusion Sensor. . . . . . . . . . . . . . . . . . . . . . . . . . . . . 229
Use 5mm Protrusion Sensor . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 229
Set-up Hyperterminal for Ethernet Communication . . . . . . . . . . . . . . . . . . . . . 230
Set-up Hyperterminal for Serial Communication. . . . . . . . . . . . . . . . . . . . . . . . 233
Appendix C: Material Safety Data Sheet Information . . . . . . . . . . . . 237
Appendix D: Wiring Diagrams . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 239
3400-6653-01 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 240
Appendix E: PCB Assemblies . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 247
3200-4269-01
3200-4270-01
3200-4346-03
3200-4347-03
3200-4348-03
3200-4349-02
3200-4350-01
. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 248
. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 249
. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 250
. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 252
. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 254
. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 256
. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 260
Appendix F: Bills of Material and Assembly Drawings . . . . . . . . . . . 261
Falcon Final Assembly, 9701-3995-01 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 262
BOM. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 262
9701-3995-01 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 264
Falcon Sub-Systems Assembly, 9701-4033-01 . . . . . . . . . . . . . . . . . . . . . . . . 268
BOM. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 268
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9701-4033-01 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 271
FOUP Advance, 9701-3834-02. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 275
BOM. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 275
9701-3834-02 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 276
FIMS Door, 9701-3909-01 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 278
BOM. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 278
9701-3909-01 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 280
2000-6803-01 Falcon Outline Drawing . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 284
Index. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 287
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List of Figures
List of Figures
Figure 1
Figure 2
Figure 3
Figure 4
Figure 5
Figure 6
Figure 7
Figure 8
Figure 9
Figure 10
Figure 11
Figure 12
Figure 13
Figure 14
Figure 15
Figure 16
Figure 17
Figure 18
Figure 19
Figure 20
Figure 21
Figure 22
Figure 23
Figure 24
Figure 25
Figure 26
Figure 27
Figure 28
Figure 29
Figure 30
Figure 31
Figure 32
Figure 33
Figure 34
Figure 35
Figure 36
Figure 37
Figure 38
Figure 39
Figure 40
Figure 41
Figure 42
Figure 43
Figure 44
Figure 45
Figure 46
Draft Ax9
Falcon Ground Point. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7
Pinch Hazards During Service . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 9
Shipping Bracket Securing FIMS Door. . . . . . . . . . . . . . . . . . . . . . . . . . 10
Areas of Pinch/Crush Hazard . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .11
Seismic Attachment Points . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 12
Tool Side Corners . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 17
Falcon Label Placement (Operator Side) . . . . . . . . . . . . . . . . . . . . . . . . 20
Falcon Label Placement (Host Tool Side) . . . . . . . . . . . . . . . . . . . . . . . 21
Falcon with AC Option Only . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 22
Falcon Loadport . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 23
Falcon Loadport . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 25
Static Entry Node PCB Assembly with Link Manager/CPU . . . . . . . . . . 26
Falcon Basic Outline. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 28
FIMS Door, Front View . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 29
FIMS Door, Rear View (without Cover) . . . . . . . . . . . . . . . . . . . . . . . . . 29
Ball Joint Design. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 30
Simplified Twist and Pull Latch Key Drive . . . . . . . . . . . . . . . . . . . . . . . 30
Vertical/Horizontal Door Drive Components . . . . . . . . . . . . . . . . . . . . . . 32
FOUP Advance Plate without Cover . . . . . . . . . . . . . . . . . . . . . . . . . . . 34
FOUP Advance Load/ Unload Push Button Switch . . . . . . . . . . . . . . . . 35
Light Display Node PCB . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 38
Static Entry Node PCB . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 39
Wafer Mapper Uninstalled . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 40
Components of the 100-240VAC Option . . . . . . . . . . . . . . . . . . . . . . . . 41
Tool Side View . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 41
Wiring for the AC Option. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 42
E84 Board. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 43
Falcon Tilt & Go Wheels . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 44
Diagram of Falcon Communication Paths . . . . . . . . . . . . . . . . . . . . . . . 50
LED-IDs, Indicator Lights . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 51
Falcon System Logon Screen . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 54
System Overview Screen . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 55
Wafer Status Screen. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 56
Service Mode Commands . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 56
Motor Drop-Down Menu . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 57
Servo Control Drop-Down Menu . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 57
Calibration Axes Drop-Down Menu . . . . . . . . . . . . . . . . . . . . . . . . . . . . 57
Wafer Mapper Arm Drop-Down Menu . . . . . . . . . . . . . . . . . . . . . . . . . . 58
Laser Drop-Down Menu . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 58
FOUP Advance Drop-Down Menu . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 58
Vertical Door Drop-Down Menu . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 58
Latch Keys Drop-Down Menu. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 59
Miscellaneous Drop-Down Menu . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 59
Button Report Drop-Down Menu (Not Active) . . . . . . . . . . . . . . . . . . . . 59
Motor Control Commands Screen . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 60
E84 Status Page (Currently Inactive) . . . . . . . . . . . . . . . . . . . . . . . . . . . 61
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List of Figures
Figure 47
Figure 48
Figure 49
Figure 50
Figure 51
Figure 52
Figure 53
Figure 54
Figure 55
Figure 56
Figure 57
Figure 58
Figure 59
Figure 60
Figure 61
Figure 62
Figure 63
Figure 64
Figure 65
Figure 66
Figure 67
Figure 68
Figure 69
Figure 70
Figure 71
Figure 72
Figure 73
Figure 74
Figure 75
Figure 76
Figure 77
Figure 78
Figure 79
Figure 80
Figure 81
Figure 82
Figure 83
Figure 84
Figure 85
Figure 86
Figure 87
Figure 88
Figure 89
Figure 90
Figure 91
Figure 92
Figure 93
Figure 94
Figure 95
Figure 96
Page xviii
LED Controls Screen . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 61
System Info Screen . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 62
Host Communications Screen . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 63
Users and Passwords Screen . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 64
Axes Parameters . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 65
E84 Configuration Screen . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 67
Wafer Mapper Parameters Screen . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 67
DSP Firmware Screen . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 68
LED Setup Screen . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 68
Falcon System Log Screen . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 69
Falcon Alarms Screen . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 70
Falcon Front Cover. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 74
Power and Communication Connections . . . . . . . . . . . . . . . . . . . . . . . . 75
AC Power Input (on Falcons with AC Option Only) . . . . . . . . . . . . . . . . 75
Shipping Bracket Securing FIMS Door. . . . . . . . . . . . . . . . . . . . . . . . . . 76
Falcon Tilt and Go Wheels . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 77
Falcon Mounting - Lower Pivot Mounting . . . . . . . . . . . . . . . . . . . . . . . . 78
Guide Posts for Falcon Front Cover . . . . . . . . . . . . . . . . . . . . . . . . . . . . 80
Falcon K-Plate Node PCB . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 82
FOUP Advance Underside Cover. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 83
K-Plate Cover . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 84
The Underside of the FOUP Advance . . . . . . . . . . . . . . . . . . . . . . . . . . 85
Screw Securing the K-Plate Node Board . . . . . . . . . . . . . . . . . . . . . . . . 86
Falcon Door Node . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 89
Falcon Door Cover and Cable Grommet . . . . . . . . . . . . . . . . . . . . . . . . 90
Falcon Door Node PCB . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 90
Cable Connections . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 91
Attachment Screws - Falcon Door Node . . . . . . . . . . . . . . . . . . . . . . . . 92
Vertical/Horizontal Drive Motor . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 95
Shipping Bracket Securing FIMS Door. . . . . . . . . . . . . . . . . . . . . . . . . . 96
AC Option Power Supply . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 97
E84 Option . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 97
Vertical Belt Cover/Fan Assembly . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 98
Drive Belt Tension Adjust and Drive Motor Axle . . . . . . . . . . . . . . . . . . . 99
Jam Nut . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 100
Belt Tension Adjust . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 100
Motor Cable Connection. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 101
Vertical Drive Motor . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 102
Drive Belt Teeth Engaged with the Gear Teeth. . . . . . . . . . . . . . . . . . . 103
Active FOUP Hold Down Motor Assembly . . . . . . . . . . . . . . . . . . . . . . 106
APHD Motor - Viewed from Underside of FOUP Advance. . . . . . . . . . 107
Access Holes for Motor Assembly Screws . . . . . . . . . . . . . . . . . . . . . . 108
Locator Guide Pins . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 109
Motor Assembly Gear Wheel Engaged with Gear Rack. . . . . . . . . . . . 109
Wafer Mapper Assembly . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .112
Wafer Mapper and Screw Location . . . . . . . . . . . . . . . . . . . . . . . . . . . .113
Wafer Mapper Cable Connections . . . . . . . . . . . . . . . . . . . . . . . . . . . . .114
Wafer Mapping Assembly Approaching Guide Pins . . . . . . . . . . . . . . . .114
Display Node PCB . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .117
Bezel Over the Panel Display Board . . . . . . . . . . . . . . . . . . . . . . . . . . .118
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Figure 97 Panel Display PCB . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .118
Figure 98 Hardware Stack for Securing Hardware . . . . . . . . . . . . . . . . . . . . . . . . .119
Figure 99 Static Entry Node . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 121
Figure 100 Belt Cover/Fan Assembly . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 122
Figure 101 Cable Connections and Link Manager/CPU Screws . . . . . . . . . . . . . . 123
Figure 102 Screws and Standoff Locations . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 124
Figure 103 Connections to Static Entry Node Board . . . . . . . . . . . . . . . . . . . . . . . 125
Figure 104 Link Manager/CPU . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 127
Figure 105 Belt Cover/Fan Assembly and Link Manager/CPU Location . . . . . . . . 128
Figure 106 Compact Flash Socket on the Link Manager/CPU . . . . . . . . . . . . . . . . 129
Figure 107 Latch Key Motor Assembly. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 131
Figure 108 Latch Key Motor and Latch Key Drive Plate Assemblies . . . . . . . . . . . 132
Figure 109 Cable Clamp and Cable Connections . . . . . . . . . . . . . . . . . . . . . . . . . 133
Figure 110 Placement of the Latch Key Motor Assembly. . . . . . . . . . . . . . . . . . . . 134
Figure 111 Motor Encoder Cable Connections. . . . . . . . . . . . . . . . . . . . . . . . . . . . 134
Figure 112 Engaging the Lead Nut with the Lead Nut Retainer Pins . . . . . . . . . . . 135
Figure 113 V/H Drive Upper Pulley/Brake/Encoder Assembly . . . . . . . . . . . . . . . . 137
Figure 114 AC Option Power Supply . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 139
Figure 115 E84 Option . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 139
Figure 116 Vertical Belt Cover/Fan Assembly . . . . . . . . . . . . . . . . . . . . . . . . . . . . 140
Figure 117 Encoder Cable . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 141
Figure 118 Upper Pulley Cable Connection . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 141
Figure 119 Encoder Cable Ground Wire on Upper Pulley Assembly . . . . . . . . . . . 142
Figure 120 Drive Belt Tension Adjust . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 142
Figure 121 Jam Nut on Drive Belt Tension Adjust . . . . . . . . . . . . . . . . . . . . . . . . . 143
Figure 122 Belt Tension Adjust . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 143
Figure 123 V/H Drive Upper Pulley Assembly Screws . . . . . . . . . . . . . . . . . . . . . . 144
Figure 124 Vertical Drive Belt . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 147
Figure 125 Vertical Belt Cover/Fan Assembly . . . . . . . . . . . . . . . . . . . . . . . . . . . . 149
Figure 126 Vertical/Horizontal Drive Upper Pulley Assembly Screws . . . . . . . . . . 150
Figure 127 Drive Belt Tension Adjust Bolt . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 150
Figure 128 Jam Nut on Drive Belt Tension Adjust . . . . . . . . . . . . . . . . . . . . . . . . . 151
Figure 129 Vertical/Horizontal Drive Motor Axle . . . . . . . . . . . . . . . . . . . . . . . . . . . 151
Figure 130 Lock Plate Securing the Drive Belt . . . . . . . . . . . . . . . . . . . . . . . . . . . . 152
Figure 131 Copy Zip File . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 155
Figure 132 Paste Zip File . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 156
Figure 133 Extract Zip Contents to Compact Flash . . . . . . . . . . . . . . . . . . . . . . . . 156
Figure 134 The Ensurehomesteps Value Below [VerticalDoor_1] . . . . . . . . . . . . . 158
Figure 135 Compact Flash on the Link Manager/CPU . . . . . . . . . . . . . . . . . . . . . . 159
Figure 136 Belt Tension Meter - Power Button . . . . . . . . . . . . . . . . . . . . . . . . . . . . 162
Figure 137 Meter Screen Settings . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 162
Figure 138 Buttons on Meter Screen . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 163
Figure 139 Sensor Positioning . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 164
Figure 140 Vertical Drive Upper Pulley/Brake/Encoder Assembly Screws. . . . . . . 165
Figure 141 Jam Nut . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 166
Figure 142 Belt Tension Adjust Nut . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 166
Figure 143 E84 PCB. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 168
Figure 144 Belt Cover/Fan Assembly with E84 Board and AC Option . . . . . . . . . . 169
Figure 145 Cable Connections and Screws . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 170
Figure 146 AC Power Supply . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 173
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List of Figures
Figure 147 Cable Wiring Going to the AC Option Power Supply . . . . . . . . . . . . . . 174
Figure 148 AC Option Power Supply . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 174
Figure 149 Power Supply Mounting Bracket . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 175
Figure 150 AC Power Supply Mounting Hardware . . . . . . . . . . . . . . . . . . . . . . . . . 175
Figure 151 AC Power Input . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 176
Figure 152 Run Pop-up Screen . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 179
Figure 153 Command Window . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 180
Figure 154 Logged On to Falcon FTP . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 180
Figure 155 Falcon.ini Opened in a Notepad Window . . . . . . . . . . . . . . . . . . . . . . . 181
Figure 156 Factory Default Settings . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 198
Figure 157 Falcon Handling Points. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 200
Figure 158 Falcon Ground Point. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 203
Figure 159 Interface Mounting Kit Components . . . . . . . . . . . . . . . . . . . . . . . . . . . 205
Figure 160 BOLTS Interface Kit Components Mounted on Host Tool. . . . . . . . . . . 206
Figure 161 Alignment Plates. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 206
Figure 162 FIMS Door Shipping Bracket . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 207
Figure 163 Foam for Securing Wafer Mapper Arms . . . . . . . . . . . . . . . . . . . . . . . . 208
Figure 164 Ground Connection and Cable Pass-Thru . . . . . . . . . . . . . . . . . . . . . . 209
Figure 165 Static Entry Node Connector Panel (selected connectors shown) . . . . 210
Figure 166 AC Power Input (on Falcons with AC Option Only) . . . . . . . . . . . . . . . .211
Figure 167 Falcon Mounting - Alignment Ball and Cam Adjustments . . . . . . . . . . 212
Figure 168 Hyperterminal with Connection Description . . . . . . . . . . . . . . . . . . . . . 230
Figure 169 Hyperterminal with Connect To. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 231
Figure 170 ASCII Setup Pop-up . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 232
Figure 171 Hyperterminal Window . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 232
Figure 172 Hyperterminal with Connection Description . . . . . . . . . . . . . . . . . . . . . 233
Figure 173 Connect To Pop-up. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 234
Figure 174 Com1 Properties Pop-up . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 234
Figure 175 ASCII Setup Pop-up . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 235
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Falcon Technical Manual
List of Tables
List of Tables
Table 1
Table 2
Table 3
Table 4
Table 5
Table 6
Table 7
Table 8
Table 9
Table 10
Table 11
Table 12
Table 13
Table 14
Table 15
Table 16
Table 17
Table 18
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List of Falcon Labels. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 18
Falcon Product Specifications* . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 27
Static Entry Node Connections. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 39
Vertical Door Taught Positions (mm) . . . . . . . . . . . . . . . . . . . . . . . . . . . 65
Recommended Velocity and Acceleration Parameters for the Vertical
Door . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 66
FOUP Positions (mm). . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 66
Latch Key Positions (mm). . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 66
Special Tools. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 73
Corrective Service Procedures. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 81
Falcon Error Codes . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 185
Alarm Codes with Descriptions. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 186
Alarm Codes. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 188
Abort/Failed Messages. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 194
General Problem Resolutions. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 195
Wafer Mapping Problem Resolution . . . . . . . . . . . . . . . . . . . . . . . . . . . 196
Falcon Wiring Diagrams . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 239
Falcon PCB Assembly Drawings . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 247
Assembly Drawings . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 261
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Falcon Technical Manual
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Preface
About this Manual
The Falcon Technical Manual is organized as follows:
Chapter 1, Safety Information, describes safety hazards related to operating and
maintaining Falcon, as well as safety interlocks and. labeling.
Chapter 2, Product Overview, describes the major subassemblies and components of the
Falcon, and includes technical data, specifications and typical operation sequence.
Chapter 3, Interfaces, includes a description of Falcon’s indicator lights, FOUP Advance
Activator Button, and Falcon Application Software.
Chapter 4, Service, provides detailed procedures to perform Preventive Maintenance,
corrective service and software upgrade on the Falcon.
Chapter 5, Troubleshooting, provides an emergency pod removal procedure, a procedure
for data collection, lists of error and alarm codes and messages as well as error modes
and recommended corrective actions. An illustration showing factory default settings is
provided for reference.
Appendix A, Installation Instructions, gives information related to installing Falcon to a
Host Tool and initial set-up.
Appendix B, Communications Software, provides detailed information on ASCII
communication.
Appendix C, Material Safety Data Sheet Information.
Appendix D, Wiring Diagrams.
Appendix E, PCB Drawings
Appendix F, Assembly Drawings. For Final Assembly and major subassemblies, such as
the FIMS Door Drive and the FOUP Advance (Kinematic) Plate.
An Index is also provided in the back of the manual.
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Falcon Technical Manual
Conventions
Conventions
The following keyboard conventions and terminology are used.
Example
Meaning
Bold
User action on keyboard keys or other objects are bold.
Choose
The word choose is used for menu choices. Submenus are separated by a
>.
For example: Choose File > Import > File...
Click
Refers to mouse actions.
For example: Click the hand icon.
Courier New Font
Text displayed on the screen uses Courier New.
DOS and windows path names are displayed in Courier New.
For example: Use the C:\Folder\SubFolder\SubFolder2 to access
this file.
Source code or DOS commands use courier new.
Hexidecimal streams and examples.
Double quotes
Used when discussing or describing an action, functional word, or definition.
Folder
Used instead of Directory, unless discussing DOS movement commands.
Italic
Italics are used to show computer entry from the users keyboard or Teach
Pendant.
Press
Shows action by a user on a key or physical button.
For example: Press PF1, then type the file name.
Select
Used if the user is to pick from several choices.
For example: Select the lot number from the list supplies.
Type
Shows entry.
For example: Type the Product Name and Model Number at the top of the
page. Press Enter.
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Chapter 1: Safety Information
Introduction
Before attempting any operation or service on the Falcon, it is essential that the
information presented in this chapter be read and thoroughly understood. Important
information is provided regarding safety hazards that may be encountered while working
with these Loadports.
Chapter Summary
This chapter addresses the following:
“ Safety Tags” on page 6— provides examples, with definitions, of warning labels used in
this manual.
“ Safety Requirements” on page 7— includes ESD/EMI precautions, lockout/tagout
procedure, seismic data, and description of hazards.
“ Options” on page 13 — includes
“ Agency Compliance” on page 14 — includes information on FCC and CE Mark
Compliance.
“ Safety Features” on page 15 — includes information on the Safety Features of the
Falcon Loadport
“ Moving and Handling” on page 16— includes cautions on moving and handling the
Falcon.
“ Labeling” on page 18— description of labels, and their locations on the Falcon.
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Falcon Technical Manual
Chapter 1: Safety Information
General Requirements
General Requirements
Warnings and cautions are used throughout this manual to identify potential hazards to
personnel.
All warnings and cautions immediately precede the step or operation in which the
hazardous condition may be encountered. All personnel operating or performing service
on Asyst equipment must fully understand warnings, cautions, and all general safety
regulations associated with electromechanical equipment.
Personnel should become thoroughly familiar with all aspects of safety for individuals and
equipment prior to operating or performing service on this equipment.
General Safety
•
Do not allow unauthorized or inexperienced personnel to operate the Falcon.
•
Service personnel should follow standard cleanroom protocols.
•
Ensure that another person in the area is aware that work is in progress on the
tool, and can provide assistance in the event of injury.
•
The Host Tool manufacturer’s lockout/tagout procedures must be followed during
installation or when service is performed on the Falcon to prevent injury or equipment damage.
•
Refer to the appropriate Material Safety Data Sheets; contact information for
obtaining MSDSs is located in this manual.
•
Remove spilled materials immediately to prevent accidents.
Electrical Safety
Page 4
•
Do not bypass electrical interlocks or safety devices unless specifically required to
within a procedure.
•
Remove power from Falcon prior to performing any service procedure, unless otherwise specified.
•
Remove power from Falcon prior to removing or inserting electrical connectors.
•
Remove metal jewelry such as rings, chains, and watches.
•
Stand on dry insulating mats when working with energized electrical equipment.
•
Ensure that all test equipment and accessory electrical units are grounded to facility ground.
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Falcon Technical Manual
Chapter 1: Safety Information
Responsibility
Responsibility
It is the responsibility of the Customer to comply with all local, state, and federal
ordinances, regulations, and laws applicable to the installation and operation of this
equipment.
Asyst Technologies, Inc. assumes no liability, whatsoever, for any personal injuries or
damages resulting from the operation or service of this equipment in any manner
inconsistent or contrary to the methods supplied in Asyst Technologies, Inc. literature
including, but not limited to, manuals, instructions, bulletins, communications, and
recommendations.
For emergencies and for product safety related matters, contact:
Asyst Technologies, Inc.
46897 Bayside Parkway
Fremont, California, 94538
(510) 661-5000
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Falcon Technical Manual
Chapter 1: Safety Information
Safety Tags
Safety Tags
The manual includes the following alert categories. Note that the following are only
examples; they do not indicate a specific hazard associated with the Falcon.
DANGER
EXPLOSION HAZARD
DANGERS ALERT PERSONNEL TO POTENTIALLY HAZARDOUS
SITUATIONS WHICH, IF NOT AVOIDED, WILL RESULT IN
SERIOUS INJURY OR DEATH.
WARNING
MECHANICAL HAZARD
WARNINGS ALERT PERSONNEL TO POTENTIALLY HAZARDOUS
SITUATIONS WHICH, IF NOT AVOIDED, MAY RESULT IN SERIOUS
INJURY OR DEATH.
CAUTION
LIFT HAZARD
STANDARD CAUTIONS—AS OPPOSED TO EQUIPMENT-DAMAGE
CAUTIONS SHOWN BELOW—ALERT PERSONNEL TO
POTENTIALLY HAZARDOUS SITUATIONS WHICH, IF NOT
AVOIDED, MAY RESULT IN INJURY.
CAUTION
THESE CAUTIONS ALERT PERSONNEL TO SITUATIONS THAT
MAY LEAD TO EQUIPMENT DAMAGE. FAILURE TO FOLLOW
DIRECTIONS WILL RESULT IN DAMAGE TO THE EQUIPMENT
AND/OR DAMAGE TO RELATED PRODUCTS (E.G., WAFERS)
AND VOIDING OF WARRANTY.
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Falcon Technical Manual
Chapter 1: Safety Information
Safety Requirements
Safety Requirements
ESD / EMI Precautions
The Falcon with its integrated AdvanTag is a certified Radiated EMI Class A product.
CAUTION
GENERAL HAZARD
FOR ESD AND EMI CONSIDERATIONS AND POWER SUPPLY
PROTECTION, THE GROUND CABLE MUST BE PROPERLY
INSTALLED.
The following instructions must be followed to provide ESD protection and reduced EMI
emissions:
•
A braided copper ground wire (minimum 12 gauge) with ring-lug connectors (sized
for M5 screw) MUST be connected between the Falcon ground connection and
the Host Tool power supply earth ground point.
NOTE . . .
CHANGES OR MODIFICATIONS TO THE FALCON, NOT EXPRESSLY APPROVED BY
ASYST, COULD VOID THE USER'S WARRANTY.
Ground Point
FIGURE 1
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Falcon Ground Point
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Falcon Technical Manual
Chapter 1: Safety Information
Safety Requirements
EMO & Electrical Power
Electrical power for the Falcon is supplied by the Host Tool. The main electronics are
enclosed in the main electronic area, located inside the front cover of the Falcon. Power
to the Falcon should be connected through the Host Tool EMO circuitry, and in the event
of an emergency all power can be removed from the Falcon by depressing the red
mushroom shaped EMO switch mounted on the Host Tool.
Lockout/Tagout
As determined by the Host tool owner, Lockout/tagout may be required on the Host tool
when service is performed on the Falcon or when the Falcon is removed /replaced to
prevent injury or equipment damage.
NOTE . . .
LOCKOUT/TAGOUT OF THE HOST TOOL MUST BE PERFORMED BY THE HOST
TOOL OWNER. ASYST SERVICE PERSONNEL ARE NOT PERMITTED TO PERFORM
LOCKOUT/TAGOUT OF THE HOST TOOL.
Where no company procedures exist, follow the guidelines below:
_____1. Notify all affected employees and users that service is to be performed and that
the Host tool needs to be shut down and locked out.
_____2. The circuit that provides power to the Host tool must be switched off. (This may
require the Host Tool to be powered down.)
Requirements for circuit breaker provided by the customer: The
overcurrent device and disconnect device provided for the Falcon should be
rated for at least 10,000 RMS symmetrical amperes interrupting capacity.
_____3. Lock out the circuit with an assigned lock.
_____4. Test to make sure the Host tool cannot be turned on accidentally.
_____5. Tag the locked circuit with a statement indicating:
_____• Unauthorized operation of the equipment or removal of tag is prohibited
_____• Date of service performed
_____• Name(s) and contact information of the person(s) performing the service
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Falcon Technical Manual
Chapter 1: Safety Information
Safety Requirements
Pinch Hazards
Normal Operation
There are no pinch hazards during Normal Operation of the Falcon.
During Service
WARNING
MECHANICAL HAZARD
MAINTENANCE PERSONNEL MUST KEEP HANDS AND FINGERS
AWAY FROM ALL MOVING PARTS DURING MOTION OF THE
FOUP ADVANCE PLATE OR THE PORT DOOR. FAILURE TO
COMPLY MAY RESULT IN INJURY.
A pinch hazard exists during the opening/closing of the Port Door.
Pinch Hazard
During Door
Open/Close
FIGURE 2
Pinch Hazards During Service
See “ Safety Features” on page 15 for Safety Features designed to prevent Pinch
Hazards.
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Safety Requirements
WARNING
MECHANICAL HAZARD
FIMS DOOR MUST BE SECURED WITH THE SHIPPING BRACKET
EVERY TIME A COMPONENT OF THE VERTICAL/HORIZONTAL
DRIVE IS SERVICED. FAILURE TO DO SO MAY RESULT IN
SERIOUS INJURY.
Install shipping bracket (Asyst P/N 4003-0842-01) to the FIMS Loadport Door and secure
with 8 screws to both the FIMS door and the BOLTS Frame. See Figure 3.
Screws
Screws
FIGURE 3
Screws
Shipping Bracket Securing FIMS Door
If Vertical Drive Belt is disengaged or broken the Vertical Drive may free fall creating
pinch/crush hazards. All service procedures affecting the belt must use the FIMS door
shipping bracket (Asyst P/N 4003-0842-01) to assure the Vertical Drive is immobilized.
See Figure 4 on page 11 for affected areas.
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Falcon Technical Manual
Chapter 1: Safety Information
Safety Requirements
Operator Side
FIGURE 4
Host Tool Side
Areas of Pinch/Crush Hazard
During Installation
During installation, power to the Falcon must be off and the Host Tool in Lockout/Tagout
so there are no electrical (current) or mechanical hazards.
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Falcon Technical Manual
Chapter 1: Safety Information
Safety Requirements
Seismic
The position of the center of gravity (CG) will be shown in the forthcoming Outline
Drawing. Figure 5 shows seismic attachment points for the Falcon. Follow all installation
procedures to ensure compliance with SEMI S2: Safety Guidelines For Semiconductor
Manufacturing Equipment, Seismic Requirements.
Seismic
Attachment
Points
(top mount)
M8 Screw
Seismic
Attachment
Points
(regular)
M8 Screw
FIGURE 5
Seismic Attachment Points
Ergonomic
A fully loaded FOUP exceeds recommended limits for handling by one operator. To
conform with SEMI S8, use of AGV, MGV, or OHS is recommended.
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Falcon Technical Manual
Chapter 1: Safety Information
Options
Options
Wafer Mapper Option
See “ Wafer Mapper Assembly Option” on page 40 for details.
100-240VAC Option
See “ 100-240VAC Power Option” on page 41 for details
E84/PIO/ Interlock Option
See “ E84/PIO/Interlock Option” on page 43 for details.
Tilt and Go Wheels Option
See “ Tilt & Go Wheels Option” on page 44 for details.
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Chapter 1: Safety Information
Agency Compliance
Agency Compliance
FCC
Definition
Class A digital device
A digital device that is marketed for use in a commercial, industrial or business
environment, exclusive of a device which is marketed for use by the general public or is
intended to be used in the home.
Compliance
The Falcon with its integrated AdvanTag has been tested and found to comply with the
limits for a Class A digital device, pursuant to Part 15 of the FCC Rules. These limits are
designed to provide reasonable protection against harmful interference when the
equipment is operated in a commercial environment. This equipment generates, uses,
and can radiate radio frequency energy and, if not installed and used in accordance with
the instruction manual, may cause harmful interference to radio communications.
Operation of this equipment in a residential area is likely to cause harmful interference in
which case the user will be required to correct the interference at his/her own expense.
CAUTION
ANY CHANGES OR MODIFICATIONS TO THE FALCON
INTEGRATED RFID WITHOUT SPECIFIC WRITTEN APPROVAL
FROM ASYST TECHNOLOGIES WILL VOID FCC COMPLIANCE.
CE Mark
The Falcon with its integrated AdvanTag complies with the following directives:
Page 14
•
2006/95/EC Low Voltage Directive
•
2004/108/EC EMC Directive
•
99/5/EC Radio & Telecommunication Terminal Equipment
•
98/37/EC Machinery Directive
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Falcon Technical Manual
Chapter 1: Safety Information
Safety Features
Safety Features
DC Voltage
The Falcon operating voltage is +24 VDC. This voltage is considered non-hazardous and
requires no mechanical power interlocks.
AC Option
If equipped with the 100-240VAC Option, the front cover has an electrical warning label
which alerts the user to an electrical hazard located behind the Front Cover. Shutdown
and lockout/tagout must be performed before opening the Front Cover. Also the front
cover is secured with a screw.
Pinch Hazard
During normal operation there is no pinch hazard.
During Service, a number of design points ensure that Service personnel in manual mode
are not exposed to hazards as described below:
Port Door
•
Pinch hazards due to opening and closing of the Port Door.
The combination of the FOUP placement detection, and the FOUP-at-Port switch
provide an interlock to prevent a Port Door pinch hazard.
The FOUP must be in place on the FOUP advance and then must fully advance to
the port, sealing the port opening, before the Port Door will open during normal
operation in Auto Mode.
During Home Calibration, the Port Door, can move without a FOUP, but the motion
speed is slow and easily avoidable.
FOUP Advance
•
Although there is no pinch hazard due to FOUP Advance motion, the following
safety feature is present:
Current Limiting Circuit limits the amount of force that can be exerted by the
FOUP Advance motion to a safe level. When FOUP comes in contact with an
object the FOUP Advance motion will stop.
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Falcon Technical Manual
Chapter 1: Safety Information
Moving and Handling
Moving and Handling
WARNING
TIP-OVER HAZARD
MOVING THE FALCON WITH A FOUP MOUNTED MAY CAUSE
THE FALCON TO TIP AND FALL OR OTHERWISE BECOME
UNSTABLE. INJURY AND/OR TOOL DAMAGE WILL OCCUR IF
FALCON FALLS.
NEVER move the Falcon with a FOUP mounted. Always remove the FOUP before
removing the Falcon from the Host tool, moving or installing the unit.
WARNING
TIP-OVER HAZARD
MOVING THE FALCON ON UNEVEN OR NON-LEVEL SURFACES
MAY CAUSE THE FALCON TO TIP AND FALL OR OTHERWISE
BECOME UNSTABLE. INJURY AND/OR TOOL DAMAGE WILL
OCCUR IF FALCON FALLS.
The Falcon may have wheels; therefore, once it is removed from the shipping container it
should be placed on a level surface. The extended portion of the shipping container base
enables the Falcon to be removed from the shipping container in its vertical position.
Store and Move the Falcon only in Vertical Position
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Falcon Technical Manual
Chapter 1: Safety Information
Moving and Handling
CAUTION
HANDLING OR BUMPING CERTAIN AREAS OF THE FALCON MAY
RESULT IN DAMAGE TO THE FOUP ADVANCE, DOOR DRIVE,
AND PORT DOOR ASSEMBLIES, AS WELL AS THE FRONT
COVER.
When moving the Falcon Do NOT place hands on the top section of the FOUP advance
assembly, the door drive assembly, or by the wafer mapper assembly.
When moving the Falcon, PUSH from the Tool Side ONLY, placing hands on the corners
on the Tool SIde of the Falcon. See Figure 6.
Corners
FIGURE 6
Tool Side Corners
The Falcon is designed to be pushed from the Tool Side only. Do not pull from the
Operator Side; do not push from the Operator Side except when mounting.
When moving the Falcon, use both hands to push at all times and push evenly. Keep all
four wheels on the ground at ALL times. Do not tilt or rock the Falcon while moving and
turning. Doing so may cause the Falcon to tip and fall.
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Chapter 1: Safety Information
Labeling
Labeling
See Table 1 for a description of labels used on the Falcon. See Figure 7 on page 20,
Figure 8 on page 21 and Figure 9 on page 22 for typical label locations.
TABLE 1
Page 18
List of Falcon Labels
Label
Description/Location
Model/Serial Number Label
The model and serial number label for the
Falcon provides FCC ID and unit specific
information required when contacting Asyst
Technologies for any matter concerning the
equipment.
Tip Over Hazard
The Tip Over Hazard label is an alert to move
the Falcon with caution. It is located above
the port door on the Host Tool side.
Mechanical Hazard
The Mechanical Hazard label is an alert to
moving parts located behind the Cover with
the label. Shutdown and lockout/tagout must
be performed before opening the Cover.
Both Vertical and Horizontal styles are used.
CE Label
This label identifies equipment that conforms
to testing and certification requirements of
the European Community.
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Falcon Technical Manual
Chapter 1: Safety Information
Labeling
TABLE 1
Label
Description/Location
FCC Label
The presence of the FCC label indicates
compliance with FCC Rules and Regulations
as specified on the Label.
Handle Corners Label
This label identifies where to handle
equipment.
Electrical Hazard Label
The Electrical Hazard label is an alert to
electrical hazard located behind the Front
Cover when the Falcon is configured with the
AC Power Option. Shutdown and
lockout/tagout must be performed before
opening the Front Cover.
FOR AC OPTION ONLY
Pinch Hazard Label
The Pinch Hazard label is an alert to moving
parts located behind the Cover with the
label.Shutdown and lockout/tagout must be
performed before opening the Cover.
Ground Point Label
The Ground Point Label indicates the Falcon
grounding point use to connect earth ground
wires from the Host tool.
AC
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List of Falcon Labels
DC
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Falcon Technical Manual
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Labeling
Mechanical
Hazard
Label
Pinch
Hazard
Label
Belt
Cover
Ground
Label
FIGURE 7
Page 20
Falcon Label Placement (Operator Side)
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Labeling
Handle
Corners
Label
Name Plate
Label
FCC ID Label
FCC Label
Tip Over
Hazard
Label
CE Label
Pinch
Hazard
Label
FIGURE 8
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Falcon Label Placement (Host Tool Side)
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Falcon Technical Manual
Chapter 1: Safety Information
Labeling
Electrical
Hazard Label
FIGURE 9
Page 22
Falcon with AC Option Only
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Chapter 2: Product Overview
This chapter describes the operation of Falcon and the interrelation of all of its
mechanical, electromechanical, and electronic subsystems.
The product overview is divided into the following sections:
“ Product Description” on page 24— an overall description of Falcon product.
“ Specifications” on page 27— Technical Data for Falcon.
Major Subassemblies with features, Options and Operational Descriptions:
•
“ FIMS Door” on page 29
•
“ Vertical-Horizontal Door Drive” on page 32
•
“ FOUP Advance Subassembly” on page 34
•
“ BOLTS Frame” on page 38
•
“ Options” on page 40
•
“ Operation Sequence”— describes Falcon’s typical operation sequence.
FIGURE 10
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Falcon Loadport
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Falcon Technical Manual
Chapter 2: Product Overview
Product Description
Product Description
The Falcon is an all-new loadport design based on Asyst’s many years of experience with
loadports, incorporating input from a wide range of fabs & OEMs. This elegantly simple
design anticipates the customer demand for synergy between AMHS and EFEM requiring
seamless integration, faster hand-offs, more efficient buffering and improved productivity.
Asyst is the only loadport supplier with both EFEM and AMHS capability. Falcon has the
Best In Class performance for Speed and Cleanliness. Asyst’s patented Latch key Twist &
Pull Technology to securely hold the FOUP Door during access, means no vacuum is
required.
The Falcon design improves reliability and speed of wafer handling, provides more robust
alignment stability, and reduces Preventive Maintenance requirements; All reducing the
overall cost of ownership. The modular design of the components shortens service times,
while eliminating most service alignments.
Falcon is a 300mm Loadport that maintains better than Class 1 environment for loading
and unloading (opening and closing) SEMI standard 300mm FOUPs. The Front-Opening
Unified Pod (FOUP), designed for 25 wafer capacity, is a sealed carrier pod that provides
a sub-class 1 environment. Falcon is compatible with most SEMI standard compliant
FOUPs.
The Falcon interface to the Host tool complies with the SEMI 300mm Tool Loadport
Specification (E15.1). It is designed to directly mount onto a Host Tool through a SEMI
E63 (BOLTS) interface and can be quickly disconnected for ease of servicing.
A system of sensors and use of stepper motors ensure safe operation of Falcon,
preventing wafer breakage or errors in mechanical operation. Software provides for
integrated self-tests and diagnostics.
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Falcon Technical Manual
Chapter 2: Product Overview
Product Description
Major Components
This section describes the major components of the Falcon loadport, with operational
descriptions, subassemblies, and features.
Falcon Indicator
Display Lights
FIMS Port Door
FOUP Advance
Vertical/Horizontal Drive
(Under the Cover)
Static Entry Node
Link Manager
/CPU
Vert/Horizontal
Drive Belt Cover
with Fan
Falcon BOLTS
Interface
Host Tool BOLTS
Mounting Plate
FIGURE 11
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Falcon Loadport
•
“ FIMS Door” on page 29
•
“ Vertical-Horizontal Door Drive” on page 32
•
“ FOUP Advance Subassembly” on page 34
•
“ BOLTS Frame” on page 38
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Falcon Technical Manual
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Product Description
Features
The following features contribute to Falcon’s easy adoption, ease of use and overall
product robustness.
•
Protocol converters to emulate previous & competing loadports
•
Browser configurable
•
SW configurable indicator lights (no lenses)
•
No internal alignment once installed
•
Tilt-N-Go installation
•
Integrated Features:
Manual Load/Unload Push Button Switch
AdvanTag RFID
•
Integrated Options:
ABCD Mechanical Lockout Pin
ABCD Sensor
Wafer Mapping
Power
Falcon is powered by +24VDC (+10, -2%). The input power is applied through a CPC4
connector “+24VDC IN” (see Figure 12).
CPC4
Connector
Link
Manager
/CPU
FIGURE 12
Page 26
Static Entry Node PCB Assembly with Link Manager/CPU
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Falcon Technical Manual
Chapter 2: Product Overview
Specifications
Specifications
TABLE 2
Falcon Product Specifications*
Wafer Size:
300mm
Height:
1351.1mm (53.19 in.)
Width:
470mm (18.5in.)
Depth:
485mm (19.1 in.) Note: from BOLTS Plane
Weight:
68Kg (150 lbs) with Tilt & Go Wheels installed
Mounting:
Falcon is designed to directly mount onto a Host Tool having a SEMI E63
(BOLTS) interface.
FOUP Load Height:
Per SEMI Standards E15.1 and E63 ±10mm Height Adjustability on Host
tool
Contamination Control
Wafer Environment Airborne
Particle Cleanliness
Class 1 per ISO 14644-1
Fab Environment Airborne
Particle Cleanliness
Class 5 per ISO 14644-1
Defect Density
< 0.01 PWP @ 0.15 Particle Size
FOUP Compatibility
The Falcon is designed to operate with SEMI E47 compliant wafer carriers.
Wafer Mapping
Emitter Sensor - ± 1º beam angle Collimated IR LED
Receiver Sensor - Light-to-voltage photodiode with
Door Speed
(OPEN/CLOSE)
8 Seconds Open with Wafer Mapping
8 Seconds Close with Wafer Mapping
Power:
Requirement from Host tool:
24 VDC (+10, -2%) @ 7 amps
peak
Falcon Power Consumption:
2 Amp standby (max)
5 Amp operating (max)
7 Amp peak (max)
100-240VAC Option, the customer provides 100-240VAC, 50/60Hz.,3.5A
AC Power module converts the power to the +24VDC (+10, -2%), 7A
required for Falcon operation.
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Communications:
Serial RS-232C (ASCII or SECS 2), Ethernet (ASCII), Parallel is optional
Carrier Types
300mm 25-Wafer FOUP (Front Opening Unified Pods)
Vacuum
None
Compressed Air
None
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Falcon Technical Manual
Chapter 2: Product Overview
Specifications
TABLE 2
Falcon Product Specifications*
Noise
70-80dB RMS: Compliant to SEMI S8
Environmental:
Operating Temperature
Operating Humidity
Storage Temperature
Storage Humidity
10 to 40° C.
10 to 75% non-condensing
-10 to +55°C.
5 to 90% non-condensing
Falcon complies with content of SEMI S2, SEMI S8, and CE Marking.
1351.1mm
*Specifications subject to change without notice
580.1mm
470mm
485.0mm
3.0mm
BOLTS
Interface
Plate
FIGURE 13
Falcon Basic Outline
For additional dimensions, interface points and datums see “ 2000-6803-01 Falcon
Outline Drawing” on page 284.
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Chapter 2: Product Overview
FIMS Door
FIMS Door
The Falcon Front-Opening Interface Mechanical Standard (FIMS) door is used to open a
25-wafer FOUP. Two latch keys located on the FIMS door rotate to horizontal to unlock
the FOUP door. Using Asyst’s patented Twist & Pull technology, both latch keys retract at
the horizontal (unlocked) position to secure the FOUP door.
Wafer Map
Receiver
Wafer Map
Emitter
Registration
Pins
Latch Key (2X)
FOUP-at
Port
Sensors
(2X)
FIGURE 14
FIMS Door, Front View
Wafer
Mapper
(option)
Door
Node
PCB
Latch
Key
Home
Sensor
FOUP Lock/
Unlock Latch
Key
Mechanism
Latch
Key
Motor
Assy
FIGURE 15
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FIMS Door, Rear View (without Cover)
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FIMS Door
After the port door latch keys secure the FOUP door, it backs away from the FOUP, then
lowers until the FOUP opening is cleared. Once the port door is lowered, the wafers are
accessible for processing. For details on how the Port Door works in conjunction with the
FOUP Advance plate, see “ Operation Sequence” on page 45.
Features
Ball Joint with Clamping for Port Door Alignment
This feature enables roll, pitch and theta alignment of the port door with one fastener for
all three adjustments. This permits setup and alignment to be done with 1 fixture and one
tool. The reduced part count reduces the potential for error. See Figure 16.
FIGURE 16
Ball Joint Design
Simplified Twist and Pull Latch Key Drive
The Falcon design preserves Asyst’s proven and patented twist & pull latch key drive and
door retention with no vacuum system needed to secure a FOUP door to a FIMS door.
Each latch key provides 3-4 lbs of pulling force. This design uses a one piece cam drive
plate, guided by a latch key shaft to move the 2 individual latch key mechanisms. The
pull-in FOUP clamping feature is comprised on a spherical bushing and socket detent in
the cam drive plate. A compression spring provide the clamping force. The Falcon
latchkey are lubricated for the rate life of the unit and requires no preventive
maintenance. See Figure 17.
FIGURE 17
Page 30
Simplified Twist and Pull Latch Key Drive
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FIMS Door
Sensors
There are two FOUP-at-Port (FAP) Sensors that will detect the presence of a FOUP door
when up against the FIMS door. Both FAP sensors detect the presence of a FOUP door
at the docked position.
Ground Path to FOUP Door
The Falcon provides a path to ground from the FOUP door through the port door latch
keys, when the FOUP door is removed from the FOUP.
Configurable Latch Key Over-Rotation
The Falcon rotates the latch key from the locked position at 90 degrees (FOUP Door
locked position) to the unlocked position of 0 degrees. Falcon can be configured for
over-rotation at the 90 degree position to 1,2, or 3 degrees over-rotate through the GUI
Interface. The factory default setting for over-rotate is 2 degrees.
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Vertical-Horizontal Door Drive
Vertical-Horizontal Door Drive
The vertical and horizontal drive (V/H Drive) has two functions: To open and close the
FOUP door. During opening of the FOUP door, the V/H Drive will move backward in
horizontal movement to clear to the BOLTS plate and downward to give to host tool
access to the wafers. See Figure 18.
Belt
Tension
Adjust
Door
Mount
Bumper
Upper
Pulley/
Encoder
Brake Assy
Belt
Motor
Axle
Guide Rail
Bottom
Top
FIGURE 18
Vertical/Horizontal Door Drive Components
During closing, the V/H Drive will move upward and in to close the FOUP.
When configured with the optional wafer mapper, mounted on the door module, the V/H
Drive makes 2 stops to allow for wafer mapping during open and/or close cycle.
The V/H Drive is designed to be maintenance free. There are no user serviceable
components and no alignments are necessary. Major modules (Motor, Upper
Pulley/Brake/Encoder Assembly, Belt) are designed for quick replacement if needed, with
no changes to alignment.
Features
Single Motor for Two Axes
The design of the Vertical/Horizontal Drive Assembly incorporates a single stepper motor
and Belt Drive to perform both Vertical & Horizontal Door Motions. The Motor mounts
directly to the BOLTS plate frame so no machined brackets are required. The use of
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Vertical-Horizontal Door Drive
Direct stepper drive eliminates the need for a speed reduction system. The integrated
design means that fewer sensors, adjustments, and moving cables are required.
Upper Pulley/Brake/Encoder Assembly
The Upper Pulley/Brake/Encoder Assembly includes a 24V Brake used in the event of
power loss to stop Z Movement of the FIMS Door. The fail-safe Brake keeps the vertical
drive held in place when inactive or during loss of power.
The Encoder, part of the Upper Pulley Assembly, is used to give position feedback and
also to work with wafer mapper to detect wafer presence and slot positions in a FOUP.
There is no hard stop for homing the Vertical/Horizontal Drive, the encoder with home
sensor is used to determine home position. Home position of the Vertical/Horizontal Drive
is at the top of the drive.
The Brake, part of the Upper Pulley Assembly, stops all movement of the
Vertical-Horizontal Door Drive:
•
anytime power is cut
•
at the end of motion (excluding Upper and Lower Mapping positions)
•
whenever a following error is larger than its limit (Important during upward
movement to prevent the door from dropping)
Vertical/Horizontal Drive components (Motor, Upper Pulley/Brake with encoder, and home
sensors) all connect directly to the static entry node on the BOLTS frame.
Fan Assembly
The Fan Assembly is located on the bottom of the removable belt/drive cover. It provides
a continuous air flow for airborne particle control for the vertical/horizontal drive
mechanisms. This is done to insure no contamination to the Host Tool mini environment
by this mechanism.
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FOUP Advance Subassembly
FOUP Advance Subassembly
The FOUP Advance Module is a component of the Falcon loadport which is required to
position the FOUP on the loadport for processing by the Host Tool and AMHS system.
Kinematic Pins
Hold
Down
Latch
Placement
Sensors
Presence
Sensor
Emitter
FOUP
Advance
Node
InfoPads
AdvanTag
RFID
FIGURE 19
RFID Antenna
Manual
Load/Unload
Push Button Switch
FOUP Advance Plate without Cover
The FOUP Advance Module positions the carrier using kinematic pins in an orientation for
AMHS transfers, positions the FOUP in an orientation for opening the FOUP door and
positions the kinematic pins in an orientation using for wafer handling by a front end robot.
The FOUP Advance Module also provides a means of latching the carrier to prevent
removal of the carrier by operators with adequate holding force to allow door opening,
resisting operator applied forces, and a means of reading and/or writing to the carrier
RFID tag.
The K-Plate is supported by 2 linear rails that are attached to the FOUP Advance Base.
Falcon software uses two sensing systems, FOUP Placement and FOUP Presence, to
ensure that the FOUP advance will not operate unless the FOUP is properly positioned.
When the FOUP is placed on the Kinematic Pins of the FOUP Advance, the Presence
sensor detects the presence of the FOUP and the Placement sensors detect that the
FOUP has been properly placed.
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FOUP Advance Subassembly
The FOUP Advance controls horizontal movement of the FOUP and support plate. After
both the FOUP placement and presence sensors are triggered, the Active Pod Hold
Down (APHD) latches to hold the FOUP to the Kinematic Pins. This ensures the FOUP
can not be removed from the Kinematic Pins. The plate then moves towards the port door
to the configured FOUP docked position. The FIMS door moves to meet the FOUP door
at the Docked position. FAP sensors are actuated by the FOUP door, confirming a FOUP
Door is present. The latchkeys then unlock the FOUP door and hold the FOUP door in
position on the port (FIMS) door.
Features
Torque Tube with Cantilevered Supports
•
Provides major improvement in torsional rigidity/stability in the as-installed
condition
•
Provides stable reference platform for the FOUP advance /K plate assembly
•
Enables one time factory setup/alignment for critical K plate dimensions. No field
adjustment required.
Manual Load/Unload Push Button Switch
The FOUP Advance Plate features one push button switch that is end-user configured. It
is a Programmable Function Manual Push button with Indicator LEDs. See Figure 20.
FIGURE 20
FOUP Advance Load/ Unload Push Button Switch
NOTE . . .
THE BUTTON MUST BE PROGRAMMED BY THE USER BEFORE SUBSEQUENT
ACTION IS PERFORMED BY THE FALCON AS A RESULT OF THE BUTTON EVENTS.
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FOUP Advance Subassembly
K-Plate Node PCB
The K-Plate Node PCB, located on the top of K-Plate, has two controllers, both which
communicate via CAN to the System Link Manager/CPU module.
Ti-DSP:
•
Controls FOUP advance function using close loop Step motor and encoder.
•
Controls FOUP Hold Down function using an open loop DC motor, and position
sensor.
•
Provides approximately 30 general purposes I/Os.
•
Monitor FOUP status through 7 on board sensors
•
Communicates with system CPU via CAN
PIC-Controller:
•
Controls RFID communication and RF power; and communicate with System
CPU via CAN.
Integrated AdvanTag Circuitry. The main component of the integrated AdvanTag
circuitry is a transmitter that generates radio waves through an antenna. This TIRIS
compatible low-frequency (134.2kHz), low-power RF energy is used to read from or write
to a transporter near the antenna. The 134.2kHz carrier from the RFID-ASIC is amplified
to the proper levels to drive the dual MOSFET power amplifier. This provides a 12Vp-p
low impedance drive to the antenna circuit. The antenna is a series resonant LC circuit
resonated at 134.2kHz to achieve maximum voltage on the antenna.
Cam Activated Pod Hold Down
The FOUP is held down and cannot be manually removed from the Falcon unless the
APHD is released.
– Very fast acting (0.40 seconds)
– No adjustments necessary
Sensors
FOUP Presence Sensors. One Emitter/Receiver pair located in the Status Display board
(emitter) and FOUP Advance Plate (receiver) to detect whether a FOUP is present on the
Advance plate (the load/unload area).
FOUP Placement Sensors. There are 3 FOUP placement sensors, incorporated into the
FOUP Advance Plate; each sensor is located near a kinematic pin. The placement
sensors work in parallel to provide accurate detection of a FOUP that is correctly placed
on the FOUP Advance Plate/kinematic pins.
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FOUP Advance Subassembly
InfoPad Sensors. The Falcon provides for InfoPad sensors and/or a mechanical
interlock pin to be installed at four location on the FOUP Advance Plate. InfoPads
Sensors are used to distinguish between FOUP identities based on info plugs installed on
the underside of a FOUP. A mechanical lockout pin can be placed in any InfoPad position.
If the pin is placed in the "A" location, then a FOUP with the "A" location blocked cannot
be placed properly onto the loadport. This is to prevent wafers in certain FOUPs from
entering a process tool.
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BOLTS Frame
BOLTS Frame
The BOLTS frame is the structure to which main subassemblies are mounted. It also
provides the interface/mounting point for the Host Tool. In addition, the frame includes
several key electronic circuits as well as the status indicators.
Main Components
Light Display Node PCB
The Light Display Node PCB controls the indicator lights at the top of the Frame. The
Display PCB can only be accessed from the Operator side of Falcon. Figure 21 shows
the PCB (with the indicator light panel removed from the top of the Frame).
FOUP Presence Sensor
FIGURE 21
Light Display Node PCB
The emitter of the FOUP Presence Sensor is located on the Display Node PCB. It works
in conjuction with the receiver located on the FOUP Advance assembly to detect whether
there is a FOUP on the FOUP Advance plate.
NOTE . . .
THE FOUP PRESENCE SWITCH DOES NOT INDICATE WHETHER THE FOUP IS
PLACED CORRECTLY ON THE PLATE, ONLY THAT THERE IS A OBJECT PRESENT
ON THE PLATE.
Excessive Wafer Protrusion Sensor
The Excessive Wafer Protrusion Sensor is located on the BOLTS frame assembly, this
interlock sensor detects whether a wafer is positioned too far out of the FOUP. If sensed,
all movement is halted to prevent damage to wafers and allow manual re-seating into the
FOUP.
The Excessive Wafer Protrusion sensor used on the Falcon is break-the-beam type
optical sensor It provides an off/on signal via the digital I/O and an interrupt to the
processor when actuated, V/H Door motion is stopped and a fatal error message is sent
to the Host (Tool).
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BOLTS Frame
Static Entry Node PCB
Located on the Operator side of the BOLTS Frame Assembly, the Static Entry Node
controls movement of the Horizontal/ Vertical Drive and FOUP Advance assemblies, and
is able to communicate via CAN to the Link Manager/CPU, the Door Node, and the FOUP
Advance Node.
The Static Entry Node contains circuitry that monitors voltage and current. If the applied
voltage becomes too low or too high the electronics will be shutdown until the correct
voltage level is restored. Over current (over load) protection device rating is 9 amp. To
recover the operation, power will have to be cycled off and then on again.
CPC4 Power
Connector
Link
Manager
/CPU
FIGURE 22
TABLE 3
Static Entry Node PCB
Static Entry Node Connections
SEN Connector
Goes To
Link
Manager/CPU
J1
V/H Motor Encoder
J1
Ethernet
J3
V/H Drive Brake
Comm1
RS232 Serial
J9
RJ45 cable goes to ------->
J10
DB9
J22
Main Power In
J23
V/H Motor
J25
Fan
J27
V/H Home Sensor
J36
Excessive Protrusion Sensor
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Options
Options
Current options available for the Falcon are the Wafer Mapper, the 100-240VAC Power
Option, the E84/PIO/Interlock Option and the Tilt & Go Wheel option.
Wafer Mapper Assembly Option
An optional wafer map system can be attached to the FIMS door, that consists of two
arms, with sensors, operating during the vertical movement of the port door to determine
the position of wafers and detect cross-slotting or double-slotting of wafers within a
FOUP. See Figure 23.
FIGURE 23
Wafer Mapper Uninstalled
The wafer mapper assembly with protrusion module is comprised of a light source and a
receiver. The light source/receiver pair is for detecting wafer presence, empty slots,
cross-slotted and double-slotted wafers within the FOUP. This wafer map data is
transmitted to the host tool. Two stepper motors are used to deploy and retract the arms.
The Falcon wafer mapper is designed to be maintenance free. There are no user
serviceable components and no alignments are necessary.
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Options
100-240VAC Power Option
Typically the Falcon is powered by +24VDC (+10, -2%) provided by the Customer, via the
Host Tool. Falcon loadports configured with the 100-240VAC 50/60 Hz, 3.5A Option,
permit the customer to provide AC power to an AC Power Supply, within the Falcon, that
converts the power to the +24VDC (+10, -2%), 7A required for Falcon operation. See
Figure 24 for main view of components, see Figure 25 for tool side view and see Figure
26 on page 42 for wiring diagram.
Belt Cover/Fan
Assembly
Static Entry
Node
24VDC
Power Input
100-240VAC
Power Supply
Link Manager
/CPU
100-240VAC
Power Input
FIGURE 24
Components of the 100-240VAC Option
100-240VAC
Power Input
FIGURE 25
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Options
Load
Ground
Neutral
Ground
Pin 4
Pin 1
FIGURE 26
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Options
E84/PIO/Interlock Option
The E84/PIO/Interlock Option provides communications interface with a variety of FOUP
delivery systems including AGV, AMHS, or process tools.
The E84/PIO/Interlock Option provides several functions for the Falcon loadport:
•
Provides E84 interface for communication with AMHS/AGV systems for FOUP
delivery.
•
Provides PIO interface for communication with process tools for door close/open
operation.
•
Provides an interlock to disable loadport operation.
Components
The E84/PIO/Interlock Option consist of the E84 Node PCB and connecting cables.
J6 Receptacle
D-Sub
25 Pin
J10 Receptacle
D-Sub
25 Pin
J15 Plug
D-Sub
15 Pin
J13 RJ45
J14
J12
RJ45
J16
FIGURE 27
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Options
Tilt & Go Wheels Option
The Tilt & Go wheels option allows a single operator to assemble and align the Falcon to
the Host tool, as well as remove the Falcon from the Host tool. Also, one operator can
move the Falcon to various parts of a fab (e.g., from tool to tool, to a repair area). See
Figure 28 on page 44.
CAUTION
GENERAL HAZARD
FOR ONE PERSON REMOVAL FALCON MUST HAVE A BASE
WHEEL ASSEMBLY ATTACHED BEFORE REMOVING THE
FALCON FROM THE HOST TOOL. THE WHEEL ASSEMBLY MAY
HAVE BEEN REMOVED AFTER INSTALLATION.
FIGURE 28
Falcon Tilt & Go Wheels
NOTE . . .
WITHOUT THE TILT AND GO WHEEL OPTION THE FALCON MUST BE MOVED
USING A TWO PERSON LIFT, TAKING CARE TO OBSERVE THE MOVING AND
HANDLING REQUIREMENTS SPELLED OUT IN THIS CHAPTER. SEE “ Moving and
Handling” on page 16.
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Operation Sequence
Operation Sequence
Step 1 Undocked (Home) Position
The operating sequence for Falcon always begins from the undocked (Home) position:
•
Vertical Drive is at Home position; Door is at Closed position
•
FOUP Advance Drive is at Undocked position
•
Latch Keys are in Vertical position
•
Wafer Map Arms are retracted
•
Active Pod Hold Down is in Open position
Step 2 Place FOUP on FOUP Advance Plate
1. FOUP is properly placed onto the kinematic pins located on the FOUP advance plate.
FOUP Presence sensors and FOUP Placement sensors are activated.
2. Falcon reports to Host that the FOUP has arrived.
Step 3 Advance FOUP to Port Door
1. Host sends an Open command to open the FOUP.
2. The FOUP Advance Module latches the carrier to prevent removal of the carrier while
the door is open.
3. Integrated AdvanTag reads and/or writes to the carrier RFID tag as initiated by the
Host.
4. The FOUP Advance moves the FOUP towards the FIMS door to the configured
FOUP docked position.
5. The FIMS door moves to meet the FOUP door at the Docked position.
6. FAP sensors are actuated by the FOUP door confirming a FOUP Door is present.
Step 4 Open and Lower the Port and FOUP Doors
1. Latch Keys unlock the FOUP door and hold the FOUP door in position on the port
(FIMS) door.
2. FIMS door with FOUP door are moved horizontally and vertically away from the port
to clear the opening.
3. With Wafer Map Option present, vertical drive moves to Mapper Upper position.
4. With Wafer Map Option present, Wafer Map Light Source (IR LED) activates.
5. With Wafer Map Option present, Wafer Mapper arms extend, and the Wafer Map
system activates.
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