75 19567 00 Rev. A Aspen 2 SLE SECS GEM Manual

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GEM Software Manual
Main Home
Page

Appendix B:
Equipment
Constants

Appendix H:
Formatted Process
Programs

Table of
Contents

Appendix C:
Event IDs

Appendix I:
Programming
Examples

SECS I
Hardware

Appendix D:
Variable IDs

Appendix J:
Event Report
File Structure

SECS II
Message
Summary

Appendix E:
Remote
Commands

Appendix K:
Material Handling
Diagram

SECS II
Messages

Appendix F:
Remote Control
Operation

Appendix L:
Aspen SECS II
Scenarios

State Diagrams
and Transition
Tables

Appendix G:
Process Program
Descriptions

Appendix M:
SML File

Appendix A:
Alarm IDs

Aspen II SLE SECS II/GEM
Manual
Integrated Syst

Operation an
Maintenanc
Procedu

175-19567-00 - Rev. A
21Sep02

Mattson Technology, Inc.
2800 Bayview Drive
Fremont, CA 94538

Aspen II SLE SECS II/GEM Manual

175-19567-00 – Rev. A
21Sep02

Aspen II SLE SECS II/GEM Manual

User Information

Service Information
Mattson’s Technical Support and Customer Support Departments are open 24 hours per
day, 7 days per week. Please have your model number, serial number, and phone number
ready when you call any of the numbers listed on this page.

Global Customer and Technical Support
Contact Customer Support for billing and shipping questions, field support for warranty
and installation questions. Customer support will direct your service call to the
appropriate department, such as Technical Support or Spare Parts.
Phone: 1 (800) 315-6607 (USA, toll-free, 24/7) or
(845) 575-6203 (International, 24/7)
FAX: (510) 226-8241

Plasma Products Global Technical Support
email: plasmaproductstechsupport@mattson.com

Spare Parts
Contact Spare Parts for spare parts orders.
Phone: 1 (800) 315-6607 (USA, toll-free, 24/7) or
(845) 575-6203 (International, 24/7)
FAX: (510) 492-6369 (USA/Asia)
(610) 280-8407 (Europe)
email: partssupport@mattson.com

Mattson Corporate Headquarters
2800 Bayview Drive
Fremont, CA 94538
Tel: (510) 657-5900
email: info@mattson.com
On the web at: www.mattson.com

About this Manual
Contact Mattson Technical Publications for additions or corrections to this Manual at
techpubs@mattson.com

175-19567-00 – Rev. A
21Sep02

User Information

Aspen II SLE SECS II/GEM Manual

Disclaimer
Mattson Technology, Inc. makes no representations or warranties with respect to this
manual, except as outlined in the product warranty. Further, Mattson reserves the right to
make changes in the specifications of the product described in the manual at any time,
without notice, and without obligation to Mattson Technology.
Copyright ©2002 by Mattson Technology Inc.
Copyright under International, Pan American, and Universal Copyright Conventions. All
rights reserved. This manual may not be reproduced, either wholly or in part, for any
reason whatsoever, without the prior written permission of Mattson Technology, Inc.

175-19567-00 – Rev. A
21Sep02

TABLE OF CONTENTS

1.0

SECS I Hardware

1.1
1.2
1.3
1.4
1.5
1.6

Applicable Equipment . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-1
SECS I Hardware . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .1-1
Loading The SIB . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-1
SIB Configuration . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-1
Equipment Monitoring of Host and Message Spooling . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-3
Software Revision . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-3

2.0

Support SECS II Message Summary . . . . . . . . . . . . . . . . . . . . . . . . . 2-1

3.0

Supported SECS II Messages . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-1

3.1

SxF0
. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-1
SxF0
Abort Transaction . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-1
S1Fx
. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-1
S1F1
Are You There Request (R) . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
3-1
S1F2
On Line Data (D) . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-1
S1F3
Selected Equipment Status Request (SSR) . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-1
S1F4
Selected Equipment Status Data (SSD) . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-2
S1F9
Material Transfer Status Request (TSR) . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-2
S1F10 Material Transfer Status Data (TSD) . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-2
S1F11 Status Variable Namelist (SVNR) . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-2
S1F12 Status Variable Namelist Reply (SVNRR) . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-3
S1F13 Establish Communication Request (ECR) . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-3
S1F14 Establish Communications Request Acknowledge (CRA) . . . . . . . . . . . . . . . . . . . . . . . . 3-3
S1F15 Request OFF-LINE (ROFL) . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-4
S1F16 OFF-LINE Acknowledge . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-4
S1F17 Request ON-LINE (RONL) . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-4
S1F18 ON-LINE Acknowledge (ONLA) . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-4
S2Fx
. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .3-4
S2F13 Equipment Constant Request (ECR) . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-4
S2F14 Equipment Constant Data (ECD) . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-5
S2F15 New Equipment Constant Send (ECS) . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-5
S2F16 New Equipment Constant Acknowledge (ECA) . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-5
S2F17 Date and Time Request (DTR) . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-5
S2F18 Date and Time Data (DTD) . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-6
S2F21 Remote Command Send (RCS) . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-6
S2F22 Remote Command Acknowledge (RCA) . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-6
S2F23 Trace Initialize Send (TIS) . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-6
S2F24 Trace Initialize Acknowledge (TIA) . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-7
S2F25 Loopback Diagnostic Request (LDR) . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-7
S2F26 Loopback Diagnostic Data (LDD) . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-7
S2F27 Initiate Processing Request (IPR) . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-7
S2F28 Initiate Processing Acknowledge (IPA) . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-8
S2F29 Equipment Constant Namelist Request (ECNR) . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-8

3.2

3.3

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3.4

3.5

3.6

3.7

iv

S2F30 Equipment Constant Namelist (ECN) . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-8
S2F31 Date and Time Set Request (DTS) . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-8
S2F32 Date and Time Set Acknowledge (DTA) . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-9
S2F33 Define Report (DR) . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-9
S2F34 Define Report Acknowledge (DRA) . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-10
S2F35 Link Event Report (LER) . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-10
S2F36 Link Event Report Acknowledge (LERA) . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-11
S2F37 Enable/Disable Event Report (EDER) . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-11
S2F38 Enable/Disable Event Report Acknowledge (EERA) . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-11
S2F39 Multi-Block Inquire (DMI) . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-11
S2F40 Multi-Block Grant (DMBG) . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-12
S2F41 Host Command Send (HCS) . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-12
S2F42 Host Command Acknowledge (HCA) . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-12
S2F43 Reset Spooling Streams and Functions . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-13
S2F44 Reset Spooling Acknowledge (RSA) . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-14
S2F45 Variable Limit Attribute Request (VLAR) . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-14
S2F46 Variable Limit Attribute Acknowledge (VLAA) . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-15
S2F47 Variable Limit Attribute Request (VLAR) . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-16
S2F48 Variable Limit Attributes Send (VLAS) . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-16
S3Fx
. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-17
S3F11 Material ID Request (MIDR) . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-17
S3F12 Material ID Request Acknowledge (MIRA) . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-17
S3F13 Material ID Send . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-17
S3F14 Material ID Acknowledge . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-18
S4Fx
. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-18
S4F1
Ready to Send Material (RSN) . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-18
S4F2
Ready to Send Acknowledge (RSA) . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-18
S4F3
Send Material (SMN) . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-18
S4F5
Handshake Complete (HCN) . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-19
S4F7
Not Ready to Send (ABN) . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-19
S4F9
Stuck in Sender (SSN) . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-19
S4F11 Stuck in Receiver (SRN) . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-19
S4F13 Send Incomplete Time-Out (SIN) . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-20
S4F15 Material Received (MRN) . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-20
S4F17 Request to Receive Material (RTR) . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-20
S4F18 Request to Receive Acknowledge (RRA) . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-20
S5Fx
. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-21
S5F1
Alarm Report Send (ARS) . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-21
S5F2
Alarm Report Acknowledge (ARA) . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-21
S5F3
Enable/Disable Alarm Send (EAS) . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-21
S5F4
Enable/Disable Acknowledge (EAA) . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-22
S5F5
List Alarms Request (LAR) . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-22
S5F6
List Alarm Data (LAD) . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-22
S5F7
List Enabled Alarm Request (LEAR) . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-22
S5F8
List Enabled Alarm Data (LEAD) . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-22
S6Fx
. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-23
S6F1
Trace Data Send (TDS) . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-23
S6F2
Trace Data Acknowledge (TDA) . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-23
S6F3
Discrete Variable Data Send (DVS) . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-23
S6F4
Discrete Variable Data Acknowledge (DVA) . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-24
S6F5
Multi-Block Data Send Inquire (MBI) . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-24
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3.8

3.9

S6F6
Multi-Block Grant (MBG) . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-24
S6F9
Formatted Variable Send (FVS) . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-25
S6F10 Formatted Variable Acknowledge (FVA) . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-25
S6F11 Event Report Send (ERS) . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-25
S6F12 Event Report Acknowledge (ERA) . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-26
S6F13 Annotated Event Report Send (AERS) . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-26
S6F14 Annotated Event Report Acknowledge (ERA) . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-27
S6F15 Event Report Request (ERR) . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-27
S6F16 Event Report Data (ERD) . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-27
S6F17 Annotated Event Report Request (AERR) . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-27
S6F18 Annotated Event Report Data (AERD) . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-27
S6F19 Individual Report Request (IRR) . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-28
S6F20 Individual Report Data (IRD) . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-28
S6F21 Annotated Individual Report Request (IRR) . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-28
S6F22 Individual Report Data (IRD) . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-28
S6F23 Request Spooled Data (RSD) . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-29
S6F24 Request Spooled Data Acknowledgment Send . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-29
S7Fx
. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-29
S7F1
Process Program Load Inquire (PPI) . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-29
S7F2
Process Program Load Grant (PPG) . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-29
S7F3
Process Program Send (PPS) . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-30
S7F4
Process Program Acknowledge (PPA) . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-30
S7F5
Process Program Request (PPR) . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-30
S7F6
Process Program Data (PPD) . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-30
S7F7
Process Program ID Request (PIR) . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-30
S7F8
Process Program ID Data (PID) . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-31
S7F17 Delete Process Program Send (DPS) . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-31
S7F18 Delete Process Program Acknowledge (DPA) . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-31
S7F19 Current EPPD Request (RER) . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-31
S7F20 Current EPPD Data (RED) . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-31
S7F23 Formatted Process Program Send (FPS) . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-32
S7F24 Formatted Process Program Acknowledge (FPA) . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-32
S7F25 Formatted Process Program Request (FPR) . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-32
S7F26 Formatted Process Program Data (FPD) . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-33
S7F65 Route Upload Request (RUR) . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-33
S7F66 Route Upload (RUP) . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-34
S7F67 Route Download (RDL) . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-34
S7F68 Route Download Acknowledge (RDA) . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-34
S7F71 Non-Route Process Program Load Inquire (NPPI) . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-35
S7F72 Non-Route Program Load Grant (NPPG) . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-35
S7F73 Non-Route Formatted Process Program Send (NFPS) . . . . . . . . . . . . . . . . . . . . . . . . . . 3-36
S7F74 Non-Route Formatted Process Program Acknowledge (NFPA) . . . . . . . . . . . . . . . . . . 3-36
S7F75 Non-Route Formatted Process Program Request (NFPR) . . . . . . . . . . . . . . . . . . . . . . . 3-36
S7F76 Non-Route Formatted Process Program Data (NFPD) . . . . . . . . . . . . . . . . . . . . . . . . . 3-37
S9Fx
. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-37
S9F1
Unrecognized Device ID (UDN) . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-37
S9F3
Unrecognized Stream Type (USN) . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-37
S9F5
Unrecognized Function Type (UFN) . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-37
S9F7
Illegal Data (IDN) . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-37
S9F9
Transaction Timer Time-Out (TTN) . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-38
S9F11 Data Too Long (DLN) . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-38

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3.10

S9F13 Conversation Time-Out (CTN) . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-38
S10Fx . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-38
S10F1 Terminal Request (TRN) . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-38
S10F2 Terminal Request Acknowledge (TRA) . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-38
S10F3 Terminal Display, Single (VTN) . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-38
S10F4 Terminal Display, Single Acknowledge (VTA) . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-39
S10F5 Terminal Display, Multi-Block (VTN) . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-39
S10F6 Terminal Display, Multi-Block Acknowledge (VMA) . . . . . . . . . . . . . . . . . . . . . . . . . . 3-39

4.0

State Diagrams and Transition Tables . . . . . . . . . . . . . . . . . . . . . . . . 4-1

4.1
4.2
4.3
4.4
4.5

Communication State . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
Control State . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
Processing State . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
Limit State . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
Alarm State . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .

Appendix A—Alarm IDs

4-1
4-3
4-5
4-7
4-8

. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . A-1

Appendix B—Equipment Constants . . . . . . . . . . . . . . . . . . . . . . . . . B-1
Appendix C—Event IDs . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . C-1
Appendix D—Variable IDs . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . D-1
Appendix E—Remote Commands . . . . . . . . . . . . . . . . . . . . . . . . . . . E-1
Appendix F—Remote Control Operation . . . . . . . . . . . . . . . . . . . . . F-1
Using S4 Functions to Remove Cassettes from the Aspen Equipment . . . . . . . . . . . . . . . . . . . . . . . .
Using S4 Functions to Insert Cassette into the Aspen Equipment . . . . . . . . . . . . . . . . . . . . . . . . . . .
Cassettes Transfer Without S4 Messages . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
Aspen Requests to Open Cassette Door . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
Wafer Location Requests . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .

Appendix G—Process Program Body Description
Appendix H—Formatted Process Program

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F-1
F-2
F-2
F-2
F-2

. . . . . . . . . . . . . G-1

. . . . . . . . . . . . . . . . . . . H-1

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Appendix I—Programming Examples
S2F15
S2F23
S2F23
S3F13
S2F33
S2F35
S2F37

. . . . . . . . . . . . . . . . . . . . . . . . I-1

New Equipment Constant Send . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
Trace Initialize Send . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
Delete Trace Send . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
Material ID Send . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
Define Report Send . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
Link Event Send . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
Enable All Events Send . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .

Appendix J—Event Report Configuration File Structure
Appendix K—Material Handling Diagram

I-1
I-1
I-1
I-2
I-2
I-2
I-2

. . . . . . . J-1

. . . . . . . . . . . . . . . . . . . K-1

Appendix L—Aspen SECS II Scenarios . . . . . . . . . . . . . . . . . . . . . . L-1
Scenario Semi-Auto Mode / Remote Mode . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . L-1
Scenario Full-Auto Mode/AGV Mode . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . L-5

Appendix M—SML File . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . M-1

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SECS I Hardware

1.1

Applicable Equipment
This document is applicable to the Aspen II Strip, ICPsm and Lite Etch semiconductor processing
equipment manufactured by Mattson Technology, Inc. It is not applicable to the Aspen II CVD or RTP
systems.

1.2

SECS I Hardware
The Aspen computer system is equipped with a GW Associates SECS I Interface Board (SIB301) which
handles communication between the Aspen equipment and the SECS host computer.
The SIB is linked to the system using a DB-25 female connector. Using RS232C, the SIB transmits on pin 2,
receives on pin 3, and uses pin 7 for common.
The SECS I Interface Board supports bi-directional communication with contention resolution by means of
using the ENQ, EOT, and ACK protocol. System bytes are used with the message transaction and are
represented by way of bytes 7 through 10 of the block header. Message interleaving and multi-open
transactions are supported by the SECS I protocol.

1.3

Loading The SIB
The SIB requires that software be loaded from a program file to the board each time the computer is coldstarted. To perform this loading manually, enter  and the program will load the SIB and give
diagnostic messages to the user. Each time the Aspen equipment control program is executed, the SIB
operation is automatically examined. If the SIB is found not to be operating, the software automatically
reloads the SIB and restarts its operation. If the SIB does not become operational during the restart
procedure, then a message stating that the SIB is unusable will be displayed. For automatic board loading,
the “loadsib” file must exist in the /user/qnx directory.

1.4

SIB Configuration
In order for the SIB to properly interface with the local SECS system, various parameters must be
configured on the SIB. The parameters are stored in a disk file called CFGSIB.DAT. Each time the Aspen
equipment control program is executed, the configuration file is read into the SIB. To create or edit the
configuration file, enter . The upper part of the display will show the current configuration. If the
configuration file does not exist, then the display will show the default parameter settings. When the editing
program is executed, the operation of the SIB is checked and the status of the SIB is displayed in the upper
right hand corner. If the SIB is found to be operating, then it will display “SIB is Running”; otherwise, “SIB
is down” will be displayed. The display will also show a customer identification number. This number is
used for software control and portability. The lower part of the display provides editing selections. To edit a
selected parameter, enter the first letter of the selection. If an out-of-range value is entered for the selection,
the default value will be automatically entered for that selection. The upper part of the display will reflect
the changes made by editing.
The configuration editor can be used to ascertain the type of problem the SIB may have if the SIB does not
become operational. When exiting the editor, the editor configures the SIB with the current data from the
editor and then checks the SIB status. If the check fails, the editor will display the errors to the user.

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SECS I Hardware

SIB Configuration

[C]ustomer ID:
Provides editing of the customer identification number. The customer number range is from 0 through
32767. Default is 0. The customer number is used to define the file name for the file used to configure the
S6F3 static report generation. Other customer specials in software may be enabled by their specific
Customer ID.

[D]evice ID:
The device number is the number that identifies the device to a node or a host. The device number range is
from 0 through 32767. Default is 0.

[P]rotocol:
Protocol describes the type of communication being used. SECS is the only standard protocol the Aspen
system supports. The system does allow the user to append additional sub-protocols to the fixed SECS
protocol. If AS1F2 is included, then the SIB will automatically reply to the host S1F1 primary message
without the Aspen application program operating. If AS2F26 is included, then the SIB will automatically
answer the host’s loopback S2F25 call without operation of the Aspen application program. To include or
exclude these protocols, enter the protocol selection and answer [Y]es or [N]o to the selection questions.

[B]aud Rate:
The available baud rates are: 19200, 9600, 4800, 2400, 1200, 600, 300, 150, and 110. The default baud rate
is 9600. Baud rate 19200 has been verified to work on current software.

[T]imers:
T1: Inter Character Time-out, accepts values from 0.1 through 25.5 seconds. Default value is 0.5 seconds.
T2: Block Protocol Time-out, accepts values from 0.1 through 25.5 seconds. Default value is 3.0 seconds.
T3: Reply Time-out, accepts values from 1.0 through 120 seconds. Default is 30.0 seconds.
T4: Inter Block, accepts values from 1.0 through 120 seconds. Default is 10.0 seconds.

[R]etry:
Retry parameter accepts values from 0 through 31. Default is 3.

[S]4 Cassette Transfer Message:
Use S4 Messages to do the cassette transfer in remote control mode. Default is No.

[I]dle Notification Timer:
Aspen will send the report to the host if the system is in idle longer than the specified time. Default is 0
hours and no report will be sent to the host. Units are hours.

[Q]uit:
Exits the configuration editor without saving the configuration data to disk along with not configuring the
SIB with the currently displayed parameters.

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Equipment Monitoring of Host and Message Spooling

SECS I Hardware

[E]xit:
Exits the configuration editor along with saving the currently displayed parameters and configuring the SIB
with the same parameter values.
1.5

Equipment Monitoring of Host and Message Spooling
The Aspen equipment supports establishing communications with the host. By default, the Aspen equipment
uses the S1F1 message. The host can change this to S1F13 by using the S2F15 New Equipment Constant
message. See details in the S2F15 description. The Equipment Constant, the defined reports, report
enabling, event linkage to report, spooling enabling and data constants received from the host will be stored
on disk and will be reloaded each time the Aspen equipment is rebooted.
Each time the Aspen operational control software is executed, the software will send a S1F1 (or S1F13)
formatted message to the host to determine if the host is online. If there is no reply from the host, the Aspen
will assume that the host is down and will not attempt to send any equipment-generated messages to the
host. Aspen will only resend the S1F1 (or S1F13) message once every minute until the host responds to the
Aspen equipment. If a reply or a back online message S1F1 (or S1F13) has been received by the equipment
in three pollings, any equipment-generated messages will be sent to the host. Otherwise, the equipmentgenerated messages will be moved to the spooling queue or be dropped, depending on whether the message
is being predefined as spooling enabled or disabled. Once the equipment has received a reply or a back
online message, the equipment changes its not-communicating status to communicating status and waits for
a S6F65 spool command message from the host to determine how to dispense the messages.
The host may preselect the streams and functions that are to be spooled by using the S2F65 message. The
default setup is with all messages disabled.
Anytime that a message sent to the host fails in the transaction, the host will be assumed to be down and the
equipment will again retry the host with a S1F1 (or S1F13) message once every minute until the host is
found to be online. During the time that the host is offline, the spooling scheme will be active.
If the equipment receives a primary message besides S1F1 and S1F13 from the host during the time that the
equipment sees the host condition as being down, the Aspen will ignore the message and will continue to
resend a S1F1 or S1F13 message to the host once every minute. When the communication line is
established, the equipment spooled messages will not be automatically sent but held in the spooler waiting
the S6F65 Spool Reset message from the host.
Each message generated by the equipment will automatically be placed into a message spool from which the
message is sent to the host. If the sending of the message to the host fails, the message will remain in the
spool. If the message is successfully sent to the host, the message will be removed form the spool. If the
equipment attempts to send the message more than twice and the host continues to reject that one message
while accepting the S1F1 (or S1F13) message, then the Aspen equipment will drop the message from the
spool. All spooled messages are sent first-in, first-out.
Approximately 250 messages can be stored in the message spool, depending on the size of the stored
messages.

1.6

Software Revision
This manual details all the functions available in the Aspen equipment SECS II SLE GEM software revision
S9.09g9h which is compatible with SLE software version 9.09, Rev. G9H.

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Software Revision

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2.0

Supported SECS II Message Summary
S/F

Description

SxF0

Abort Transaction

S1F1

Are You There Request

S1F2

On Line Data

S1F3

Selected Equipment Status Report

S1F4

Selected Equipment Status Data

S1F9

Material Transfer Status Request

S1F10

Material Transfer Status Data

S1F11

Status Variable Namelist Request

S1F12

Status Variable Namelist Reply

S1F13

Establish Communication Request

S1F14

Establish Communication Data

S1F15

Request OFF-LINE

S1F16

OFF-LINE Acknowledge

S1F17

Request ON-LINE

S1F18

ON-LINE Acknowledge

S2F13

Equipment Constant Request

S2F14

Equipment Constant Data

S2F15

New Equipment Constant Send

S2F16

New Equipment Constant Acknowledge

S2F17

Date and Time Request

S2F18

Date and Time Data

S2F21

Remote Command Send

S2F22

Remote Command Acknowledge

S2F23

Trace Initialize Send

S2F24

Trace Initialize Acknowledge

S2F25

Loopback Diagnostic Request

S2F26

Loopback Diagnostic Data

S2F27

Initiate Processing Request

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S/F

Description

S2F28

Initiate Processing Acknowledge

S2F29

Equipment Constant Namelist Request

S2F30

Equipment Constant Namelist

S2F31

Date and Time Set Request

S2F32

Date and Time Set Acknowledge

S2F33

Define Report

S2F34

Define Report Acknowledge

S2F35

Link Event Report

S2F36

Link Event Report Acknowledge

S2F37

Enable/Disable Event Report

S2F38

Enable/Disable Event Report Acknowledge

S2F39

Multi-block Inquire

S2F40

Multi-block Grant

S2F41

Host Command Send

S2F42

Host Command Acknowledge

S2F43

Reset Spooling Streams and Functions

S2F44

Reset Spooling Streams and Functions Acknowledge

S2F45

Define Variable Limit Attributes

S2F46

Variable Limit Attribute Acknowledge

S2F47

Variable Limit Attribute Request

S2F48

Variable Limit Attributes Send

S3F11

Material ID Request

S3F12

Material ID Request Acknowledge

S3F13

Material ID Send

S3F14

Material ID Acknowledge

S4F1

Ready to Send Material

S4F2

Ready to Send Acknowledge

S4F3

Send Material

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Supported SECS II Message Summary
S/F

Description

S4F5

Handshake Complete

S4F7

Not Ready to Send

S4F9

Stuck in Send

S4F11

Stuck in Receiver

S4F13

Send Incomplete Timeout

S4F15

Material Received

S4F17

Request to Receive Material

S4F18

Request to Receive Material Acknowledge

S5F1

Alarm Report Send

S5F2

Alarm Report Acknowledge

S5F3

Enable/Disable Alarm Send

S5F4

Enable/Disable Alarm Acknowledge

S5F5

List Alarm Request

S5F6

Alarm Data

S5F7

List Enabled Alarm Request

S5F8

List Enabled Alarm

S6F1

Trace Data Send

S6F2

Trace Data Acknowledge

S6F3

Discrete Variable Data Send

S6F4

Discrete Variable Data Acknowledge

S6F5

Multi-block Data Send Inquire

S6F6

Multi-block Grant

S6F9

Formatted Variable Send

S6F10

Formatted Variable Acknowledge

S6F11

Event Report Send

S6F12

Event Report Acknowledge

S6F13

Annotated Event Report Send

S6F14

Annotated Event Report Acknowledge

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Aspen II SLE SECS II/GEM Manual

2-3

Supported SECS II Message Summary

2-4

S/F

Description

S6F15

Event Report Request

S6F16

Event Report Data

S6F17

Annotated Event Report Request

S6F18

Annotated Event Report Data

S6F19

Individual Report Request

S6F20

Individual Report Data

S6F21

Annotated Individual Report Request

S6F22

Annotated Individual Report Data

S6F23

Request Spooled Data

S6F24

Request Spooled Data Acknowledge

S7F1

Process Program Load Inquire

S7F2

Process Program Load Grant

S7F3

Process Program Send

S7F4

Process Program Acknowledge

S7F5

Process Program Request

S7F6

Process Program Data

S7F7

Process Program ID Request

S7F8

Process Program ID Data

S7F17

Delete Process Program Send

S7F18

Delete Process Program Acknowledge

S7F19

Current EPPID Request

S7F20

Current EPPID Data

S7F23

Formatted Process Program Send

S7F24

Formatted Process Program Acknowledge

S7F25

Formatted Process Program Request

S7F26

Formatted Process Program Data

S7F27

Process Program Verification Send

S7F28

Process Program Verification Acknowledge

Aspen II SLE SECS II/GEM Manual

H ↔E

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175-19567-00, Rev. A

Supported SECS II Message Summary
H ↔E

S/F

Description

S7F65

Route Upload Request

S7F66

Route Upload

S7F67

Route Download

S7F68

Route Download Acknowledge

S7F71

Non-Route Process Program Load Inquire

S7F72

Non-Route Process Program Load Grant

S7F73

Non-Route Formatted Process Program Send

S7F74

Non-Route Formatted Process Program Acknowledge

S7F75

Non-Route Formatted Process Program Request

S7F76

Non-Route Formatted Process Program Data

S9F1

Unrecognized Device ID

S9F3

Unrecognized Stream Type

S9F5

Unrecognized Function Type

S9F7

Illegal Data

S9F9

Transaction Timer Timeout

S9F11

Data Too Long

S9F13

Conversation Timeout

S10F1

Terminal Request

S10F2

Terminal Request Acknowledge

S10F3

Terminal Display Single

S10F4

Terminal Display Single Acknowledge

175-19567-00, Rev. A

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Aspen II SLE SECS II/GEM Manual

2-5

Supported SECS II Message Summary

2-6

Aspen II SLE SECS II/GEM Manual

175-19567-00, Rev. A

3.0

Supported SECS II Messages

3.1

SxF0
SxF0

S,H→E

Abort Transaction

If the Aspen equipment receives a function zero message, it will drop the aborted spooled message.

3.2

S1Fx
S1F1

S,H↔E, reply

Are You There Request (R)

Establishes if the equipment is online.
Structure:
Header only
S1F2

S,H↔E

On Line Data (D)

Data signifying that the equipment is alive.
Structure:
L,2
1. 
(ASCII)
2.  (ASCII)
Exceptions:
1. The host sends a zero length list to Aspen.
2. If AS1F2 is included with the SECS protocol, the SIB will reply with a single-byte binary
message.
Note

SOFTREV is the SECS II module’s software revision, not the Aspen module.

S1F3

Selected Equipment Status Request (SSR)

S,H→E, reply

Request for the equipment to report selected status variable IDs. The SVID’s numbers are the same as the
VIDs shown in Appendix D.
Structure:
L,n
1. 
:
:
n. 

(2 byte unsigned)

Exception:
A zero length list (n = 0) means report all SVIDs.Aspen
Note

The SLE software cannot support reporting all SVIDs because the size of the message will exceed
the buffer storage in the SECS II card. Send for the SVIDs in groups of 100. There are over 250
SVIDs.

175-19567-00, Rev. A

Aspen II SLE SECS II/GEM Manual

3-1

Supported SECS II Messages
S1F4

S1Fx

Selected Equipment Status Data (SSD)

M,H←E

Aspen reports the value of each SVID requested in the order requested.
Structure:
L,n
1. 
:
:
n. 

(variable data type)

Exceptions:
If n = 0, no response can be made. A zero length return for SVIDi means that SVIDi does not exist.
S1F9

Material Transfer Status Request (TSR)

S,H→E, reply

Host requests a status report of the material transfer ports. The Aspen is equipped with two ports that handle
both the input and output material handling operations.
Structure:
Header Only.
S1F10 Material Transfer Status Data (TSD)

S,H←E

Aspen reports to the host the transfer status of its two material ports.
Structure:
L,2
1.  (1 byte binary)
2.  (1 byte binary)
TSIP:
1 = Empty State.
2 = Schedule State.
3 = Track on State.
4 = Stuck in Receiver State.
5 = Full State.
TSOP:
1 = Empty State.
2 = Scheduled State.
3 = Track on State.
4 = Stuck in Sender State.
5 = Full State.
S1F11 Status Variable Namelist (SVNR)

S,H→E, reply

A request to Aspen to identify certain status variables.
Structure:
L,n
1. 
:
:
n. 

3-2

(2 byte unsigned)

Aspen II SLE SECS II/GEM Manual

175-19567-00, Rev. A

S1Fx

Supported SECS II Messages
M,H←E

S1F12 Status Variable Namelist Reply (SVNRR)
Aspen reports to the host the name and units of the requested Status Variables.
Structure:
L,n
1. L,3
1. 
(2 byte unsigned)
2.  (ASCII)
3. 
(ASCII)
:
:
n. L,3
1. 
2. 
3. 
S1F13 Establish Communication Request (ECR)

S,H↔E, reply

To provide a formal means of initializing communications at a logical application level both on power-up
and following a break in communications.
Structure:
L,2
1. 
(ASCII)
2.  (ASCII)
Exception:
The host sends a zero length list to the equipment.
Note

Aspen can be switched between the S1F1/S1F13 messages by setting the equipment constant #7
flag. The default is S1F1. See S2F15 for details.

S1F14 Establish Communications Request Acknowledge (CRA)

S,H↔E

Accept or deny Establish Communications Request. MDLN and SOFTREV are on-line data and are valid
only if COMMACK = 0.
Structure:
L,2
1. 
(1 byte binary)
2. L,2
1. 
(ASCII)
2.  (ASCII)
COMMACK:
0 = Accepted.
1 = Denied, try again.
Exception:
The host sends a zero length list for item 2 to Aspen.

175-19567-00, Rev. A

Aspen II SLE SECS II/GEM Manual

3-3

Supported SECS II Messages

S2Fx

S1F15 Request OFF-LINE (ROFL)

S,H→E

The host requests that the equipment transition to the OFF-LINE state.
Structure:
Header only.
S1F16 OFF-LINE Acknowledge

S,H←E

Acknowledge or error.
Structure:
0 = OFF-LINE acknowledge.
S1F17 Request ON-LINE (RONL)

S,H→E

The host requests that the equipment transition to the ON-LINE state.
Structure:
Header only.
S1F18 ON-LINE Acknowledge (ONLA)

S,H←E

Acknowledge or error.
Structure:
0 = ON-LINE accepted.
1 = ON-LINE Not Allowed.
2 = Equipment Already ON-LINE.
3.3

S2Fx
S2F13 Equipment Constant Request (ECR)

S,H→E, reply

Host requests Aspen to send the current .
Structure:
L,n
1. 
:
:
n. 

(2 byte unsigned)

Aspen will also accept  (1 unsigned integer array) for compatibility with previous
implementations.
Exception:
A zero length list will cause Aspen to send all .

3-4

Aspen II SLE SECS II/GEM Manual

175-19567-00, Rev. A

S2Fx

Supported SECS II Messages
M,H←E

S2F14 Equipment Constant Data (ECD)
Data response to the host in the order requested.
Structure:
L,n
1. 
:
:
n. 

(Equipment Constant data type)

Exceptions:
If n = 0, then no response exists. A zero length ECVi means that ECIDi does not exist.
S,H→E, reply

S2F15 New Equipment Constant Send (ECS)

Changes to any of the equipment constant variables causes all of the variables in the Equipment Constant
disk file to be updated. The equipment constant IDs  and  on each Aspen are shown in Appendix E.
Structure:
L,n
1. L,2
1. 
2. 

(2 byte unsigned)
(ECV variable data type)

2. L,2
:
:
n. L,2
1. 
2. 
S,H←E

S2F16 New Equipment Constant Acknowledge (ECA)
Acknowledge or error of the requested changes of the new equipment constant.
Structure:


(1 byte binary)

0 = Accepted.
1 = Denied. At least one constant does not exist.
2 = Denied. Busy.
3 = Denied. Out of Range.
S2F17 Date and Time Request (DTR)

S,H↔E, reply

Useful to check equipment time base to synchronize with the host time base. Aspen will request the Host to
send the Date and Time when the communication status changed from Not Communicating to
Communicating.
Structure:
Header only.

175-19567-00, Rev. A

Aspen II SLE SECS II/GEM Manual

3-5

Supported SECS II Messages

S2Fx
S,H↔E

S2F18 Date and Time Data (DTD)
Actual time data.
Structure:
Source Exif Data: 
File Type                       : PDF
File Type Extension             : pdf
MIME Type                       : application/pdf
PDF Version                     : 1.4
Linearized                      : Yes
Encryption                      : Standard V2.3 (128-bit)
User Access                     : Print, Extract, Print high-res
Create Date                     : 2002:07:16 21:19:06Z
Modify Date                     : 2003:03:24 16:55:20-08:00
Page Count                      : 185
Creation Date                   : 2002:07:16 21:19:06Z
Producer                        : Acrobat Distiller 4.05 for Windows
Author                          : Earl Boggs
Mod Date                        : 2003:03:24 16:55:20-08:00
Metadata Date                   : 2003:03:24 16:55:20-08:00
Creator                         : Earl Boggs
Title                           : TitlePage.fm
Page Mode                       : UseOutlines
Page Layout                     : SinglePage
EXIF Metadata provided by EXIF.tools

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