CLS User Manual CHRocodile Compact
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CHRocodile%20Compact%20User%20Manual
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CHRocodile C Compact sensor for non-contact distance and thickness measurement Operation Manual 1 Imprint This documentation is under the copyright of Precitec Optronik GmbH. It may not be reproduced or used in a manner contrary to the company’s legal interests without prior written approval of Precitec Optronik GmbH. It is strictly intended for use in the context of service operations. Any other use is impermissible. Any sharing of this documentation with third parties requires the prior, expressed written approval of Precitec Optronik GmbH. Changes in the technical details from the descriptions, data and figures in this documentation are reserved. Printed in the Federal Republic of Germany. Responsible for Contents Original Edition Precitec Optronik GmbH Schleussnerstrasse 54 63263 Neu-Isenburg / Germany Telephone: 0049 (0)6102 / 36 76 – 100 Telefax: 0049 (0)6102 / 36 76 – 126 e-mail: info@precitec-optronik.de Website: http://www.precitec.de/en/precitec-group-start-page/ Representatives Please visit our website to know the current addresses of our representatives. PRECITEC OPTRONIK's regional contacts for the Optical Measuring Technology can be found here: http://www.precitec.de/en/contact/precitec-worldwide/ 2 Version Control Version – Manual 1.0.0.0 Date Type of Change 2016/09/20 Original edition 3 Table of Contents Table of Contents ........................................................................................................... 4 Basic Safety Instructions ................................................................................................ 7 1.1 Warranty and Liability ...................................................................................... 7 1.2 Safety Symbols .................................................................................................. 7 1.3 Proper Use ......................................................................................................... 8 1.4 Duty of Operator and Personnel....................................................................... 9 1.5 Safety Measurements in Normal Operation ..................................................... 9 1.5.1 Protection from Electronic Shock ............................................................................................ 9 1.5.2 Protection from Optic Radiation / Eye Safety ....................................................................... 9 1.5.3 Grounding the device ............................................................................................................. 10 1.6 Medical or safety-relevant usage ................................................................... 10 1.7 Storage and Transport .................................................................................... 10 1.8 Emergency Procedures ................................................................................... 10 Product Description ....................................................................................................... 11 2.2 General Description ......................................................................................... 11 2.3 Measuring principle ..........................................................................................12 2.3.1 Optical principle ..................................................................................................................... 12 2.4 Sensor Functionalities ......................................................................................14 2.5 Typical applications (Overview) ......................................................................16 2.6 List of Deliverables .......................................................................................... 17 2.7 Connections and Interfaces ............................................................................ 18 2.7.1 Power supply jack ................................................................................................................... 18 2.7.2 Ethernet connector ................................................................................................................. 18 4 2.7.3 Trigger Input/Output and RS422 serial communication ...................................................... 18 2.7.4 External analogue converter box connection .......................................................................20 2.7.5 Status LED ................................................................................................................................ 21 2.8 Sensor Characteristics .................................................................................... 22 2.8.1 Sensor unit characteristics ..................................................................................................... 22 2.8.2 Optical probes characteristics ............................................................................................... 23 2.9 Optical Head Specifications definitions ......................................................... 24 2.10 CHRocodile C performance specifications: ................................................... 26 Operational Start up ..................................................................................................... 28 3.1 Connections and Interfaces ............................................................................ 28 3.2 CHRocodile Explorer and Drivers installations .............................................. 30 3.3 Communication with CHRocodile C................................................................ 30 Measurements Start Up ................................................................................................ 32 4.1 Calibration Table ............................................................................................ 32 4.2 Dark Acquisition .............................................................................................. 32 4.3 Mechanical interfacing ................................................................................... 33 4.4 Basic Settings Configuration ........................................................................... 34 4.5 Data measurement Training ........................................................................... 35 Appendix 1: Advanced Configuration .......................................................................... 37 1. Commands List.................................................................................................... 37 2. Detailed Commands Description ........................................................................ 42 2.1 CTN Command ........................................................................................................................ 42 2.2 DRK Command ........................................................................................................................ 42 2.3 ENC Command ........................................................................................................................ 42 2.4 ETR Command ........................................................................................................................ 43 2.5 IPCN Command ....................................................................................................................... 52 5 2.6 LAI Command .......................................................................................................................... 52 2.7 NOP Command ........................................................................................................................ 53 2.8 SCA Command ......................................................................................................................... 53 2.9 SEN / SENX Command ............................................................................................................ 53 2.10 SHZ Command ......................................................................................................................... 54 2.11 SODX Command ...................................................................................................................... 55 2.12 SSU Command .........................................................................................................................60 2.13 STA Command .........................................................................................................................60 2.14 STO Command ........................................................................................................................ 61 2.15 THR Command ........................................................................................................................ 61 2.16 TRE Command ........................................................................................................................ 62 2.17 TRG Command ........................................................................................................................ 62 2.18 VER Command ........................................................................................................................ 63 Appendix 2: Mechanical Plans ...................................................................................... 64 1. Optical probe mechanical plans ........................................................................ 64 2. CHRocodile C unit mechanical plans ................................................................. 66 3. CHRocodile C unit mechanical interface plans ................................................. 67 Appendix 3: Trouble Shooting ...................................................................................... 68 1.1 Power off ............................................................................................................ 68 1.2 Communication error: ........................................................................................ 68 1.3 Distance Measurement: ...................................................................................... 68 1.4 Thickness measurement: ................................................................................... 69 Appendix 4: Technical support .................................................................................... 70 6 Basic Safety Instructions This operation manual contains the most important instructions for the safe operation of the product. Observe all instructions and guidelines in this documentation. Moreover, the locally applicable regulations and codes for accident prevention at the use site must be observed. 1.1 Warranty and Liability The general terms and conditions of delivery for products and services in the electronics industry along with the amendments and restrictions deriving from the general terms and conditions of delivery for Precitec Optronik GmbH apply to all of our products. We reserve the right to make any changes to the device’s construction for reasons of improving quality or expanding the possible applications as well as any made for production-related reasons. Dismantling the device voids all warranty claims. The exception to this is the replacement of parts that are subject to wear and tear and require maintenance or calibration, to the extent that these are expressly identified in this documentation. Changes made to the device on own authority render liability claims void. 1.2 Safety Symbols The following terms and symbols for hazards and instructions are used in the operation manual. WARNING This symbol indicates a possibly dangerous situation. Failure to heed these instructions can result in minor injuries or cause property damage. WARNING High voltage hazard – indicates a hazard from electrical shock and warns of immediate or impending danger to the life and health of persons or of extensive property damage. 7 WARNING Do not touch – indicates that touching the contact/optics surface can cause damage/destruction of the component. IMPORTANT Information which the user must pay attention to/ be aware of in order to avoid disruptions in the course of processing/ in product use. TIP Provides information that the user needs in order to achieve the intended result of an action most directly and without difficulty. PREREQUISITE Describes all components as well as all conditions that must be present/ be fulfilled in order to the action to be successfully completed. ADDITIONAL INFORMATION Informs the user whenever there is additional information about a context being described. 1.3 Proper Use The optical sensor is intended as a stand-alone device or as part of a measurement apparatus for measuring distance, thickness and surfaces for quality and dimensional control. Only use the optical sensor in a dry environment. The device may only be operated within the specifications given in the technical data. Any use deviating from the intended and proper use is considered improper. The user assumes liability for the consequences in these cases. Electromagnetic Compatibility (EMC) Both as an individual device and in combination with the devices designated in this documentation, the optical sensor fulfils the requirements of the standards DIN EN 61326-1:2013-07 and DIN EN 61010-1:2011-07, and therefore corresponds to the EU-Directive 2014/35/EU and 2014/30/EU. This declaration is valid for all units with the CE label on it, and it loses its validity if a modification is done on the product. When customer-supplied devices or cables are used this can mean that these Norms may not be fulfilled. For this reason, you should only 8 use the original devices and replacement parts and observe the instructions for EMC-compliant installation in the handbooks that come with them. If the optical sensor is operated inside a facility with other devices, the entire facility must comply with the provisions in the EC-Guidelines in the demands of the general operating permit. 1.4 Duty of Operator and Personnel The operator of the device is obligated only to allow persons to work on the device who: are familiar with the basic regulations concerning workplace safety and accident prevention and who have been instructed in the operation of the device have read and understood the safety chapter of this operation manual and have confirmed this with their signature. The personnel must be trained in compliance with the regulations and safety instructions and must have been informed of possible hazards. 1.5 Safety Measurements in Normal Operation When it is assumed that the device can no longer be operated safety, the device or the plant must be taken out of operation. The device must be secured against unintended use. Unauthorized interventions will void your rights to assert warranty claims. Any attempt to copy or analyze the software will lead without fail to the voiding of all rights to assert warranty claims. 1.5.1 Protection from Electronic Shock Please make sure that the live components are uncovered after opening the housing or removing components. Touching these components presents a potentially lethal hazard. When service- and repair work is performed on opened devices and modules, the main power supply must be reliably shut off (mains cable unplugged). 1.5.2 Protection from Optic Radiation / Eye Safety When performing service and maintenance work, make sure that you 9 do not look directly into the LED’s light. The light can harm your eyes. 1.5.3 Grounding the device Make sure that the device is grounded in compliance with regulations. Please make sure that the optical sensor is supplied with power via a grounded main power input line (cold device plug). 1.6 Medical or safety-relevant usage If the CHRocodile Line Sensor is used in medical or safety-relevant applications, the operator must ensure that the CHRocodile Line Sensor is qualified for the specific application. This includes the optical characteristics of the measured sample as well as the influence of temperature and vibrations to the CHRocodile sensor. Furthermore the user has to check the CHRocodile Line Sensor for correct measurements and for exceeding the specified measuring uncertainty. 1.7 Storage and Transport In order to avoid damages in storage and transport, the following ground rules are to be observed: Maintain the storage temperature range allowed in the technical specifications Take suitable measures to avoid any damage from humidity or moisture, vibrations or impact Do not store in or near magnetic fields (e.g. permanent magnet or alternating electrical field) 1.8 Emergency Procedures Disconnect the plant from the main power supply Extinguish any flames with a Class B fire extinguisher 10 Product Description 2.2 General Description The CHRocodile C is a single-point compact optical sensor dedicated to non-contact surface measurement. This sensor is based on confocal chromatic principle and offers high precision distance and thickness measurement. The CHRocodile C has an original architecture, with no optical fibers, which consists in all elements embedded in one optoelectronic unit. PRECITEC is the first company to propose this unique architecture for confocal chromatic sensor, which allows to overcome the device integrating constraints met in industrial environment. With its robust and integrated design, the CHRocodile C is ideally suited for industrial inline use and easily integrable into any kind of inspection machine. The CHRocodile C can accommodate different types of optical probes. The optical probes interchangeability is straight forward, as the operator just need to exchange optical probes and move to the right calibration table. Finally, data transmission is carried out by Ethernet communication up to 4000 measurements per seconds. CHRocodile C characterisctics are described in Section 2.7. The extraordinary high dynamic range and the outstanding signal-to-noise ratio of the CHRocodile sensors ensure the best measuring results on any kind of surfaces. Thanks to its compact dimensions and excellent performance/price ratio, CHRocodile C is the ideal alternative to classical laser triangulation sensors. Fig 2-1: CHRocodile C 3D view: 11 2.3 Measuring principle 2.3.1 Optical principle For most industrial applications the chromatically coded distance detection method turned out to be very well suited. CHRocodile C is based on this method and more precisely on the Confocal Chromatic principle. This principle combines the properties of confocality and axial chromatism. Axial Chromatism: That method takes advantage from a lens optical error commonly known as axial chromatic aberration: the axial position of the focal point depends on the wavelength (color) of the light to be focused. For example, in the visible spectral range, the focal distance for blue light is shorter than for red light. The focal points of intermediate wavelengths are located in between according to a continuous axial position variation. Thus, considering white light passing through an optical objective provided with axial chromatic aberration, a continuum of color along the optical axis is generated, as an axial rainbow. Confocality: That method also takes advantage from confocal opto-mechanical configuration. A confocal optical system uses illumination point source and a pinhole in an optically conjugate plane in front of the detecting system to eliminate out-of-focus signal. As only in focus light can be detected, the image's optical lateral and axial resolution is improved. Consequently the pinhole act as a spatial filter which block light which is out of focus or light which come from an external light source. Confocal Chromatic Imaging: Considering both confocality and axial chromatism properties, a white light illumination point is imaged through the chromatic objective on a target object. Depending on the distance of the target from the focusing chromatic objective, light of just a very narrow wavelength bandwidth is perfectly focused on the target’s surface. All other spectral components of the light source are out of focus. In the back path, from the target’s surface to the detector, the reflected light passes through the chromatic objective, the optically conjugate pinhole which is in front of the spectrometer. The pinhole filters all wavelengths except the narrow bandwidth which is in focus. The spectrometer analyses the spectrum of the light reflected back by the target’s surface, and only a chromatic peak is observed corresponding to the narrow wavelength bandwidth perfectly in focus. The analysis and the barycenter calculation of this chromatic peak allow to determine the distance of the target surface from the chromatic objective. (Cf. Fig. 2.2) 12 Fig. 2-2: Chromatic Confocal Imaging principle (point sensor) 13 2.4 Sensor Functionalities The CHRocodile C can transmit two different data: distance and thickness measurements. The principle of these two applications are explained hereafter. Chromatic distance measurement Application type 1 Topographic, profile or roughness measurements are performed with distance data measurement. With single-point sensors, i.e. CHRocodile C, one spot is focused on the surface of the measured object using an optic with a known chromatic aberration. The reflected light is more intense for the wavelength in focus on the surface. Reflected light is spectrally analyzed and the spectral response is a peak centered on focused wavelengths. The spectral peak positions determine the distance to the surface information. The distance is calculated and transmitted to host computer at up to 4KHz frequency See Fig. 2-3. Intensity Spectral signal Chromatic optical probe Target Fig. 2-3: Chromatic measurement principle, distance measurement 14 Chromatic thickness measurement Application type 2 Thickness measurements can be performed when thickness data is selected. If a transparent material is within the measurement volume of the chromatic optical probe, the white light spot is focused on both the two surfaces of the measured object. The reflected light is more intense for the two wavelengths in focus on the two surfaces. Reflected light is spectrally analyzed and the spectral response is constituted of two peaks centered on focused wavelengths. Considering the refractive index of the object, one can determine the thickness of the object at the spot light location. This thickness data is calculated and transmitted to host computer at up to 4KHz frequency. See Fig. 2-4. Intensity Spectral signal Chromatic optical probe Target Fig. 2-4: Chromatic measurement principle, thickness measurement 15 2.5 Typical applications (Overview) A broad range of possible applications is available to this highly precise sensor. The CHRocodile C is the most compact sensor based on confocal chromatic imaging principle. This sensor is perfectly suitable for demanding measuring tasks, like non-contact measurement of microtopography, layer thickness measurements. It could be used both on various reflecting and scattering surfaces. The PRECITEC confocal chromatic compact sensor is very well adapted to industrial environment, as no optical cable are connected to the CHRocodile C unit. The absence of optical cables, promotes robustness and compactness of the measuring device, and also facilitates the integration and use on a motorized moving system, such as a coordinate measuring machine (CMM). Then this new type of sensor overcomes the industrial constraints induced by fiber optic cables that are known to deteriorate when the measuring device is subject to high accelerations and / or rotational movements. The CHRocodile C offers the ability to perform fast and accurate metrological control of production, by being built on automatic or semi-automatic inspection machines, or by being directly integrated on production line for 100% inspection of manufactured parts. In this, this new technology fully meets the current needs of the industry as it is suitable for many applications: - The measurement of wafer in the field of semiconductor and generally microelectronics, The measurement and online control of mechanical or optical parts, Or even the measurement and control of glass or plastic film thickness. Other fields of applications exist, the common point is to seek a cost effective measurement system going, more and more compact, as flexible as possible, and highly accurate. It is the case in laboratory environment and even more in industrial environment. It appears clearly here that the CHRocodile C unit of measurement meet these different needs. Optical Head Application Electronics Probe Probe Probe Probe 200µm 1mm 4mm 10mm Flatness Roughness Plastic and glass thickness Thin film thickness Coating thickness Micro-Electronics Mechanics Micro-Mechanics Optics Micro-Optics Shape Table 2.1: Sensor applications 16 2.6 List of Deliverables - One operational confocal chromatic unit (see Fig. 2-5), One operational optical probe (see Fig. 2-6), Power Supply Adapter (100-240VAC to 24VDC +/-10%), Ethernet cable, A CD with DLL and firmware, Software user guide, Operation Manual, Calibration report. Fig 2-5: CHRocodile C unit 3D view: Fig 2-6: Optical Head 3D view: a- 0.2mm b- 1mm c- 4mm d- 10mm 17 2.7 Connections and Interfaces All of the connection ports for the sensor unit are located at the rear of the system (see Fig 2-7): 1. Power supply jack, 2. Ethernet interface, RJ45 port 3. 9-PINS Multipoint interface connector (Trigger / Serial communication) 4. 8-PINS round connector (analog converter module connection) Fig. 2-7: CHRocodile C rear panel: Connections 2.7.1 Power supply jack The CHRocodile C has two pluggable screw terminal for power supply with 24VDC +/-10%. Connect the set of power cable supply associated to the Power Supply Adapter (100-240VAC to 24VDC +/-10%) delivered with the CHRocodile C unit. 2.7.2 Ethernet connector The CHRocodile C has a RJ45 standard connector for Ethernet communication. Connect the isolated RJ45 standard connector from the CHRocodile C unit to an Ethernet network (PC). Ethernet supports the data transfer and can also be used for setting configuration by using $ command protocol (Cf. command SODX in Appendix 1), or for loading Calibration Table (Cf. command TABL in Appendix 1). Ethernet communication allows to transmit a maximum of 16 data values at 4 KHz. 2.7.3 Trigger Input/Output and RS422 serial communication The Trigger input/output use a multipoint connector interface (9 pins). This connector is used for trigger Input / Output and for RS422 serial communication (Cf. Table 2-2 and Table 2-3). The trigger options make the lighting cycle externally controllable and the synchronization between e.g. a scanning system cycle and the CHRocodile C measurement rate. This means that external triggering is possible for every measurement up to the full measurement rate of 4000Hz. 18 The interface contains the connection points for the synchronization and RS422 or RS232 serial communication. The serial RS232/RS422 is interfaced on the multipoint connector interface (9 pins). Serial communication are mostly used for sending command as a hyper-terminal, and can also support data transfer. The maximum transfer rate RS232/RS422 is 1843200 Bd. PIN SIGNAL 1 RS232 TX / RS422 TX- 2 RS232 RTS / RS422 TX+ 3 RS232 CTS / RS422 RX- 4 RS232 RX / RS422 RX+ 5 GND 6 Sync In 7 Sync Out 8 Reserve 9 GND Table 2.2: Multipoint connector PIN / Signal correspondence Signal Function Description RS422 RS422 Interface RS422 (differential signaling) Interface, internally terminated, no handshaking RS232 RS232 interface RS232 interface, RTS/CTS handshaking possible Sync In Sync. Input Positive slope from 0V to 5-24V causes according to the settings of the sensor: starts the continuous measurement, if the command wait for trigger was received first (TRG Command) starts the single measurement in mode trigger each (TRE Command) When in TRW mode, a positive slope starts continuous measuring, a negative slope stops the measurement the input has an internal 10 kΩ pullup-resistor to 5 V. Sync Out Sync. Output Sync Output Positive slope 0 V to 5 V with the start of each measurement. Table 2.3: Interface 19 Remark: As the Sync-input has a weak pull-up to 5V, your trigger source definitely needs to be able to sink that current in order to pull the input down to Gnd. So as a trigger source, you can use an open collector transistor output, that pulls to ground or a push pull output. The input can support 24V, but the trigger threshold is always at approximately 2V. The trigger occurs on the rising edge, that means when the external pulldown transistor releases the input or when the pushpull drives to 5V. Wait for trigger – signal characteristics to Analog Out The sensor stops after the current data telegram is transmitted and goes into a standby mode. The last transmitted analog value persists until the next exposure (also see TRG command). 2.7.4 External analogue converter box connection The 8 pins round connector is used for external analogue converter box connection. This option can be added to the CHRocodile C in order to obtain an analogue output. Also it is possible to add up to 2 encoder-input using this external analogue converter box connection. The incremental encoder-input makes it possible to precisely assign the measurement point and axis position without additional hardware. The CHRocodile C can manage with 2-axis encoders if the optional analogue converter box is connected to the CHRocodile C 8-pins mini-DIN connector. For an exact distance measurement it is necessary for every measurement value to be assigned to the exactly correct spatial coordinates. This data must be recorded in the system and transferred to the evaluation processing unit over the internal interface. To accomplish this, the sensor must be equipped with the analogue box accessory. 20 2.7.5 Status LED LED status / CHRocodile C Status Power OFF Power ON, Firmware boot failure Power ON, Firmware is configured / Continuous measurement (blink) Power ON, Triggering session (1) Power ON, Waiting for trigger (1) green when triggered at high frequency No signal (blink) Saturated intensity signal High intensity signal Optimal intensity signal Medium intensity signal Low intensity signal No signal (blink) Out of range : too far Far Range Mid Range Near Range (blink) Out of range : too close Table 2.4: Status LED during functioning 21 2.8 Sensor Characteristics 2.8.1 Sensor unit characteristics Optical sensor Measuring principle (1) Measuring data (1) Light source Dimensions (sensor unit) Weight Confocal Chromatic Distance, Thickness (1) LED 99.3 x 65 x 47 mm (L x W x H) (2) 425g Data Transmission Measurements / second Interfaces Transfer rate Synchronization with ext. devices Encoder-inputs SDK Up to 4000 Hz Ethernet, RS422, external analogue converter box as accessory Ethernet (100Mbits); RS422 (9600 – 921600 Baud) Trigger-input / Output (TTL) Optional: 2 encoders input available through analogue converter box accessory DLL written in C, C++ / SDK written in C# with .NET framework 4 OS Windows XP, Windows 7, Windows 8 Data processing / calculation Embedded processing unit Standard to be met Supply voltage Rated power Operating temperature Storage temperature 24VDC +/-10% with separate main supply unit 100 to 240VAC – 50Hz to 60Hz 4W 0 °C to +50 °C -20°C to +70°C CE marking / EMC Compliant with applicable regulation RoHS Compliant with applicable regulation Protection class IP50 (DIN 40050/ IEC 144) Metrological specifications Axial resolution / Repeatability (3) (4) 3x10-5 x Measuring Range Accuracy (4) 2x10-4 x Measuring Range Optical probes specifications Order number See Table 2.7 5009276 Table 2.6: Sensor Characteristics (1) See section 2-3: Sensor functionalities. With CHRocodile C, the transmitted data are limited to up to 4 Altitudes, up to 4 Intensities and up to 3 Thicknesses. (2) See Fig A2-2 Sensor unit mechanical plan in Appendix 2 CHRocodile C unit mechanical plan. 22 (3) See section 2.9: CHRocodile C performance Specifications. (4) Resolution / Repeatability is given for optimal conditions (with a high intensity signal). 2.8.2 Optical probes characteristics Optical probe Probe 200µm Probe 1mm Probe 4mm Probe 10mm 200µm 1mm 4mm 10mm 8nm 30nm 120nm 300nm Accuracy (4) (5) 50nm 200nm 0.8µm 2µm Min. measurable thickness (4) (7) 8µm 40µm 160µm 400µm Max. measurable thickness (4) (7) 300µm 1.5mm 6mm 15mm 20nm 75nm 300nm 750nm Specifications THICKNESS MODE DISTANCE MODE Measuring range (1) Axial resolution / Repeatability (Rmin)(4)(5)(6) Axial resolution / MECHANICAL DIMENSIONS GLOBAL SPECIFICATIONS Repeatability (4) Working distance (1) (2) 4.7mm +/- 0.3mm 15.7mm +/- 0.5mm 36.7mm +/- 0.7mm 68.7mm +/- 1mm Spot diameter (1) 3.4µm 5µm 8µm 16µm Lateral resolution 1.7µm 2.5µm 4µm 8µm Max object slope (1) (3) +/- 45deg +/- 28deg +/- 20deg +/- 14deg Length 17mm (8) 23.7mm (8) 26.6mm (8) 35.3mm (8) Diameter 28mm (8) 28mm (8) 33.8mm (8) 40mm (8) 33g 30g 44g 50g Weight Table 2.7: Optical Head Specifications (1) See section 2.9: Optical probe specifications definitions (2) Bottom of the optical probe to middle of the measuring range (3) Decreasing accuracy on the limits (4) See section 2.10: CHRocodile C performance Specifications (5) Measurement on perpendicular mirror at 20°C with optimal Signal to Noise ratio. (6) Axial Resolution varies with intensity signal in %. Axial Resolution = 10 x Rmin x I-0.5 (7) Refractive index n=1.5 (8) See Fig A2-1: Optical probes mechanical plan (9) See Fig A2-2: CHRocodile C unit mechanical plan 23 Optical probes are interchangeable: the same CHRocodile C unit can store up to 8 different calibration tables corresponding to different optical probes. The optical probe is totally passive, only the CHRocodile C unit has an internal light source and electronic board which can be considered as heat and electrical sources. However the optical probe is highly isolated from these heat and electrical sources in order to avoid any thermal expansion which could affect the accuracy of the sensor measuring process. Considering this opto-mechanical architecture the CHRocodile C unit has no visible optical cable and the user don’t need to take care with this particularly sensitive component. 2.9 Optical Head Specifications definitions Acceptance Angle: related to M.S W.D M.R S.D M.S W.D : Working Distance S.D: Spot Diameter (Size) M.R : Measuring Range M.S: Max Object Slope (specified for specular object. On diffuse object, it is possible to measure on slope up to 85°) Fig 2-8: Optical probes specification definition 24 2.10 CHRocodile C performance specifications: Axial Resolution / Repeatability: Axial resolution / Repeatability corresponds to the static noise (standard deviation 1) on altitude or thickness measurements. Axial resolution is measured on 1000 continuous points at different target positions inside the measuring range. By default axial resolution specification corresponds to the minimum value (Rmin) along the measuring range (See Fig. 2-9). The minimum value (Rmin) corresponds to the target position where the signal to noise ratio is maximum. Resolution is inversely proportional to the signal intensity. Channel p Axial Resolution (nm) Rmin 0 Position in the Measuring Range 0 Fig 2-9: Axial Resolution as a function of target position in measuring range. Accuracy: Accuracy corresponds to the altitude deviation between the CHRocodile C and a calibrated interferometric reference sensor as a function of target position in the measuring range. Consequently, accuracy is an experimental specification. By default accuracy specification corresponds to the maximum of absolute value (Amax) (See Fig. 2-10). Channel p Accuracy (nm) Amax 0 Position in the Measuring Range Fig 2-10: Accuracy as a function of target position in Measuring Range. 26 Minimum and Maximum Measurable Thicknesses: The minimum and maximum measurable thickness specification is given for n=1.5 refractive index. It is measured on a standard sample in the center of measuring range. T=n x (D1-D2) D1 D2 Tmin D1 Tmax D2 Fig 2-11: Minimum and maximum measurable thicknesses 27 Operational Start up 3.1 Connections and Interfaces All of the connection ports are located at the rear of the CHRocodile C (Cf. section 2.6 Connections and Interfaces): The power supply jack, The RJ45 standard connector for Ethernet communication, The multipoint connector interface (9 pins) for trigger input / output and RS422/RS232 serial communication, 3.1.1 CHRocodile C Stand Alone device: The device can be used as a stand-alone device in order to perform selective distance or thickness measurements. In this condition, only the power supply and Ethernet connector or multipoint connector are useful. Power supply The CHRocodile C has two pluggable screw terminal for power supply with 24VDC +/-10%. Connect the set of power cable supply associated to the Power Supply Adapter (100-240VAC to 24VDC +/-10%) delivered with the CHRocodile C unit. Ethernet connector Connect the isolated RJ45 standard connector from the CHRocodile C unit to an Ethernet network (PC). Use shielded cable for the data port connection (minimum category 5 cable). The default CHRocodile C IP address is: 192.168.170.4 Configure the PC Ethernet port to the following address: 192.168.170.X (X≠4) The CHRocodile C can also be configured to use auto-configuration of the IP-Address through a DHCP server. To configure the Ethernet port of your PC, you must open the ‘Network connection properties’ menu. After selecting the right Ethernet card (connected to the sensor), click on ‘network protocol (TCP/IPv4)’ and click ‘Properties’. Set the IP address of the PC and the mask. For a standard use the mask should be set to 255.255.255.0. If you need to configure the sensor to another IP address (different than 192.168.170.4), you need to use the $IPCN command (Cf. Appendix 1). This could be useful in case of multiple CHRocodile C connection on a single computer. 28 Multipoint connector interface Data transmission can be done through RS422/RS232 serial communication, using the so called $protocol. Two formats are available (ASCII/BIN) for sending the data from the optical sensor via the RS422. The data can thus be transferred to a computer as ASCII-symbols (telegram format) and e.g. viewed with a terminal program (e.g. Tera Term, Freeware). Output in BIN format, command: $BIN Output in ASCII format, command: $ASC The transfer rate for the serial interface port is selected under serial port baud rate. The standard Baud rates available for selection are 9600, 19200, 38400, 57600, 230400, 460800 , 921600 Baud and 1843200 Baud. Arbitrary nonstandard Baud rates can also be configured. 3.1.2 CHRocodile C integrated on measurement system: In addition to the Power supply and Ethernet connector or multipoint connector interface used for stand-alone device, the CHRocodile C needs to be connected to other interfaces to be integrated into complex measurement configuration systems. The other possible interfaces are described hereafter: - The multipoint connector interface for Trigger Input/Output and Serial interface RS422, - The 8 pins mini-DIN connector for external analogue converter box to add 2 encoder inputs. Encoder-input The incremental encoder-input makes it possible to precisely assign the measurement point and axis positions without additional hardware. The CHRocodile C can manage with 2-axis Encoders if the optional analogue converter box is connected to the CHRocodile C 8-pins mini-DIN connector. For an exact distance or thickness measurement it is necessary for every measurement value to be assigned to the exactly correct spatial coordinates. This data must be recorded in the system and transferred to the evaluation processing unit over the internal interface. To accomplish this, the sensor must be equipped with the analogue box accessory. Default are the encoder inputs not terminated. Tye Sw0t02 to GND to terminate with 120 Ohm channel 0 to 2 Tye Sw3t04 to GND to terminate with 120 Ohm channel 3 to 4 29 If the encoder-signals are fed through the sensor and additional other devices are connected (e.g. for axis control), the 120 Ohm termination can also be deactivated. Since the device has to be opened to do this, you should contact Precitec Optronik before beginning any work of this kind. Trigger Input/Output The trigger options make the lighting cycle externally controllable and the synchronization between e.g. a scanning system and the CHRocodile C measurement rate. This means that external triggering is possible for every measurement up to the full measurement rate of 4000Hz. The interface contains the connection points for the synchronization and RS422 serial communication. Data transmission / sensor configuration Data transmission and sensor configuration can be done through RS422 serial communication through the multipoint connector interface or through Ethernet port. 3.2 CHRocodile Explorer and Drivers installations 3.2.1 CHRocodile Explorer installation: CHRocodile Explorer is a Man-Machine interface which allows to configure, to visualize measurement, to save data etc… CHRocodile Explorer can manage with all PRECITEC CHRocodile point sensors. Refer to CHRocodile Explorer Manual to obtain more specifics information. 3.3 Communication with CHRocodile C There are three possible ways to communicate with the CHRocodile C: via Precitec CHRocodile Explorer software, via the CHRocodile C DLL and using the ASCII commands sent to the CHRocodile C through serial interface (RS 422) or Ethernet communication. Up to 10 CHRocodile C can be connected and controlled by a single computer (Windows XP, Windows 7 or Windows 8 OS, 32 and 64bits). CHRocodile C is automatically detected through Ethernet network (broadcast mode). 3.3.1 Via CHRocodile Explorer: CHRocodile Explorer software is delivered with the sensor and is useful to configure sensor, to visualize continuous measurements and to save data. In order to obtain further detailed on CHRocodile Explorer functionalities, please refer to CHREplorerManual. 30 3.3.2 Via CHRocodile C DLL: DLL is used to interface the sensor with a general-purpose user program. This CHRocodile C DLL is written in C, C++ language and is intended for .NET compatible language. This DLL allows to use whole CHRocodile C functionalities. In order to obtain further detailed refer to CHRocodile C DLL documentation. A CD containing the DLL, some code examples and the operating Manual is delivered with the CHRocodile C. 3.3.3 ASCII command communication The ASCII commands can be sent to the controller via the RS422 interface using a specific command structure described on Appendix 1. Serial interface communication can be used to configure the sensor and receive measurement data. As an example, the Windows™ « Hyper Terminal »™ utility can be used to send the commands and configure the sensor via the RS232 or RS422 communication port. 31 Measurements Start Up 4.1 Calibration Table The CHRocodile C unit can store up to 8 different calibration tables corresponding to different optical probes. In order to start measurement you need to download or select the calibration which corresponds to the used optical probe (Cf. command $SEN in Appendix 1). Calibration table consists in a look up table which gives the correspondence between the peak position (Barycenter data) and the Altitude data. The CHRocodile C is calibrated at factory with a certified calibration bench. The calibration table depends on both spectrometer and optical probe. Consequently a calibration table is specific to one set of CHRocodile C sensor (CHRocodile C unit + optical probe), it can’t be used on another set even if you are using the same optical probe type (i.e same measuring range). Fig 4-1: Example of calibration table for a single channel 4.2 Dark Acquisition Even when there is no surface in the probe’s measurement range, the signal on the detector is not zero. These non-zero values for each pixel on the detector is due to electronic dark and mostly to flare corresponding to unwanted back-reflected light on optical lenses surfaces. This Dark signal which limits the measurement dynamics of the sensor can be remove from the useful signal. In order to eliminate the influence of this undesirable light, a dark reference is performed on the sensor (Cf command DRK in Appendix 1). The Dark reference acquisition must be done when no object is in the measurement range. 32 4.3 Mechanical interfacing After completing the operational startup, i.e. connecting with the power supply, proceed with initializing, then communication is ready and mechanical interfacing should be done. Mechanical interfacing consists in: - Connecting the optical probe, which suits to your application, to the CHRocodile C unit. The optical probe is simply screwed on the CHRocodile C unit (Cf. Figure 4.2). Screw optical head on sensor unit Fig 4-2: Interchangeable optical heads - And, fixing the CHRocodile C on your system using the interface threaded M3 holes located on the soleplates and on the lateral surfaces of the CHRocodile C unit or using the ring surrounding the optical probe (Cf. Fig 4-3). 33 Possible fixture on the surrounding ring. a- b- c- Fig 4-3: CHRocodile C unit mechanical interface: fixture holes on: a- lateral surface 1 b- soleplate, c- lateral surface 2. 4.4 Basic Settings Configuration In order the CHRocodile C to be operational for startup some basic parameters should be set up. You can also refer to the CHRocodile C quick start guide documentation. Basic setting configuration consists in selection of: • Measuring Range: The CHRocodile C could accept up to 8 calibration tables. Each calibration table corresponds to a unique optical probe. Consequently, depending on the optical probe which is mounted on the CHRocodile C unit, the operator must select the right measuring range or calibration table. (Cf. command $SEN in Appendix 1) • Data transmission: The CHRocodile C can transmit different data: up to 4 Altitudes, up to 4 Intensities and up to 3 Thicknesses. Depending on the application, operator must select the right data. (Cf. command $SODX in Appendix 1) • LED intensity level: The LED intensity Level can be adjusted from 0 to 100%. As for measuring rate, this adjustment essentially depends on object reflectivity. Adjust LED intensity in order to obtain a high signal intensity, but avoid saturating the detector (intensity LED blinks orange). In order to adjust LED intensity, use the LAI command (Cf. Appendix 1). 34 • Measuring Rate: Instead of adjusting intensity or in addition to LED intensity adjustment, it is also possible to adjust the measuring rate. The measuring rate is related to data transmission frequency. The CHRocodile C maximum measuring rate is 4KHz. The higher the measuring rate is the lower the signal intensity is. Consequently, depending on the object reflectivity under measurement, the measuring rate (measuring frequency) must be adjusted in order to remove saturation or too low intensity signal. In order to adjust measuring frequency, use the SHZ command (Cf. Appendix 1). 4.5 Data measurement Training When mechanical interfacing is done, the object to be measured must be positioned inside the measuring range of the CHRocodile C optical probe. This procedure is valid for altitude and thickness measurement, i.e. to perform topographic measurement on reflecting object or to perform thickness measurement on transparent object. Measuring altitude procedure consists in: - Adjusting the axial position of the target in order the target is centered inside the optical sensor measuring range. To do this, one can move the optical probe or the target along the optical axis. Thus, it is recommended to fix the optical probe or the target on a translation plate. - Adjusting the spot on the area to be measured. Target Translation plate Target Translation plate Fig 4-5: Axial position adjustment When the target is correctly positioned in front of the optical head and basic configuration is correctly set, it is possible to collect the needed data using the SODX command (Cf. Appendix 1). 35 In order to record the data corresponding to the CHRocodile C unit, the Ethernet port or the RS422/RS232 communication port must be connected to the computer. It is now possible to perform an area scan: - In order to scan the target, one can move the optical probe or the target inside optical axis perpendicular plan. Thus, a 2 axis translation system is required. The altitude or thickness data is recorded during the scan. In order to synchronized the data acquisition with the moving session, one need to connect the trigger in/out to the translation system. The command TRG, enables an exact alignment of the sensors sampling intervals with the movement of a scanning axis. - However, if scan velocity is not constant, the pitch between each recorded point is not constant and the global topography will be distorted. To overcome this image deformation it is important to assign precisely each measured points and axis positions. To do so, one need to connect the incremental encoder-input. The CHRocodile C can manage with 2-axis Encoders using the analogue converter box accessory. 36 Appendix 1: Advanced Configuration 1. Commands List command arguments answer on query <0,1>/<0..100> or > <0,1><0 .. 500, ?> comments Auto Adapt Light source: First parameter: auto adapt on(1) or off(0, default) Second parameter, only needed in case first param is 1: desired detector level in % of saturation level (0-100), 33 is default. AAL The autoadapt mode is also disabled by the LAI command! Abbé number: Dispersion, only active, if SRT 0 selected (no preloaded Index table) 0 (default): no dispersion You should give as many Abbé numbers as there are layers to be measured, that is (number of Peaks - 1). ABE The first parameter describes the nearest Layer. AVD AVS <1 . . . 999, ?> Average Data <1 . . . 999, ?> Average Spectrum Baud rate> <0,1> <0,1> BDR CTN Continue (Measuring) <0 . . . 65535, ?> BauD Rate for serial port Command: “Baud rate” If 1st arg <= 8, then baudrate index is selected, otherwise free custom baudrate is given index of baud rate in [bit/s] 0: 9600; 1: 19200; 2: 38400; 3: 57600; 4: 115200; 5: 230400; 6: 460800; 7: 921600; 8: 1843200 2nd arg: HW Handshake on/off Response: 2nd arg: effective baudrate (may deviate) free running mode See also: TRE, TRG, TRW Continuously Refresh DarK 0 (default, no refresh)-65535 (full replacement with every spectrum) CRDK See also: DRK, FDK DRK ( ) n: Index of the lowest measuring rate x: lowest frequency in Hz, floating point “Dark reference” take and store dark reference The execution of this command takes approx. 0.8sec. The result will be valid and used for all exposure settings. Due to the storage to nonvolatile memory, the dark calibration will be restored on the next powerup. See also: FDK, CRDK 37 DWD <0..n1><0..n2> <0..n1><0..n2> [<0..n1><0..n2>] [<0..n1><0..n2>] … ... <0..4> [<0..3>] < -2147483648 .. 4294967295, ?> - Detection WinDow Up to 16 windows (window1left, window1right, window2left, window2right...), in micrometers See also: LMA ENCoder Position: $ENC -index of axis -optional: Function -position (treated modulo 2^32) Defined functions: • 0: Set / Read Pos. • 1: set count source (0..9: A0, B0, A1, B1, . . . ; 10: SyncIn; 11..14: n.a., 15: Quardr.) • 2: set preload value • 3: set preload event - Query currently supported for position only. ENC For detailed description see below ETR FDK - For detailed description see below [<1..300>] [<0..32767>] Fast Dark ( )” x being the (virtual) exposure The dark reference is taken with current exp. settings rate in Hz at which the CCD would and is not stored to nonvolatile memory. saturate When changing the exposure settings, the dark settings acquired by the last DRK command are restored. See also: DRK, CRDK IDEntification IDE IPCN <0,1>, [eight numbers <0..255>] <0…100, ?> LAI String with key-value pairs that enable identification of the device IP-Address change Configure TCP address and subnet mask. 1st arg: DHCP on/off, args 2.5: fixed IP addr. args 6..9: subnet mask (only if DHCP off, i.e. 1st arg = 0) LAmp Intensity Set on-time of LED between 1-100% of the exposure time. This command also disables the autoadapt mode! LaTenCy Experimental parameter, is not saved to nonvolatile. Determines the time after which a packet is closed and sent. Default 1ms. LTC <0,1, ?> <0,1> LMA LiMits Active Detection Limits active, 0(default) or 1. See also: DWD See also: DWD <0,1,127, ?> MOD Encoder TRigger either: 0 (confocal, 1 surface) or: 1 (confocal, 2 surfaces) or: 127 (more than 2 peaks) measurement MODe For compatibility: 0: one surface (default), 1: thickness, 127: different mode (detect more than 2 peaks) 38 <0,?> <0,?> <1..4> <1..4> Measuring MoDe MMD Only argument <0>, chromatic mode supported NOP > OPD <10 .. 90> Number Of Peaks 1(default)-MaxNOP. The MaxNOP value is a characteristic of the device and can be read back by the IDE command. In confocal mode, if less than NOP peaks are detected, all thickness signals will be invalidated because peak identification is not possible. Query command, must contain the query arg. First parameter 2: Operation time in seconds First parameter 3: number of powerups Peak Separation Minimum <10 .. 90> PSM The fraction in % of the height of the smaller peak that the signal must go below in order to separate 2 peaks. ReSeT device RST > SCA SCAle Query full scale value in micrometers of the currently selected probe. <0 .. 7, ?> Select SENsor (probe) 0(default) - 7 (depending on the existence of the calibration tables) SEN See also: SENX > <(probe index), SNr: (serial number Query details of SENsor (probe) of probe), Range: (measuring range)um> Without parameter: returns a string with serial number and measuring range of the currently selected probe in the following format: (probe index), SNr: (serial number of probe), Range: (measuring range)um When used with enum as string parameter, the device enumerates all available calibrated probes in one string, separated by ; - - SENX See also: SEN SFD <30 .. 4000, ?> SHZ SODX Set Factory Defaults Without parameter: reset the normal operation parameters. With parameter: reset also the communication parameters (IP). The parameter set is NOT automatically stored in nonvolatile memory. To do so, please issue the SSU command! Set measurement cycle frequency in HZ Hz x meaning the exact sample rate in 30 - 4000(default) Hz in floating point format See also: SRA <0..17> <0..17> <0..17> <0..17> … <0..17> (max 16 Set output data extended …<0..17> times) (max 16 times) Set the content of the output telegram or > 39 <3..17, ?> SRA <1..5> HZ at spectral d-line (587,567 nm) SRI <0..16> <0..16>:name of table [CR/LF] Compatibility command 3:32Hz, 4:100Hz, 5:320Hz, 6:1000Hz, 7:2000Hz, 8: 3200Hz, 9: 4000Hz(default) See also: SHZ Set/query Refractive Index Only active, if SRT 0 selected (no preloaded Index table) 1.0(default)-5.0 You should give as many indices as there are layers to be measured, that is (number of Peaks - 1). The _rst parameter describes the nearest Layer. See also: ABE, SRT Set Refractive index Table two binary bytes - Preloaded Tables can be used instead of SRI/ABE. SRI/ABE is active when table 0 is choosen (SRT 0) You should give as many table indices as there are layers to be measured, that is (number of Peaks - 1). The _rst parameter describes the nearest Layer. See also: SRI, ABE Synchronisation SeQuence - - 2 Byte sync sequence used only in $-protocol Save SetUp - Saves the current setting to nonvolatile memory. The Sensor will restart on the next power-up with this configuration. STArt data flow SRT SSQ set Sample Rate SSU STA (default) Sending of measurement data enabled. See also: STO - - STOp data flow Sending of measurement data disabled. Only Command responsesor updates are transmitted. STO See also: STA <0..4094, ?> detection THReshold threshold for peak detection in the confocal modes (0 and 1) THR 0-4095, default is 50 - - TRigger Each Mode Every exposure (or exposure burst in case of averaging) needs a trigger event (e.g. rising edge on Trigger input). All exposures will begin exactly at the trigger events as long as the previous exposure is ended. If the previous exposure is still ongoing, the trigger will be delayed. If the device receives a trigger event, while the precedent trigger still waits for execution, the trigger event will be lost and the trigger lost counter will be incremented. TRE See also: TRG, TRW, CTN TRG - TRiGger once Stops the free running measurement and waits for a trigger event. The trigger event restarts free running 40 mode. The first exposure start will occur immediately at the trigger. See also: TRE, TRW, CTN - - TRigger Window The device runs freely as long as the trigger condition is fulfilled. The first exposure start will occur immediately at the trigger TRW See also: TRG, TRE, CTN VER - VERsion Responds with a string containing several lines with Key-Value pairs See also: IDE Table A1.1: Commands list 41 2. Detailed Commands Description 2.1 CTN Command This command lets the sensor exit any of the above trigger modes and returns to freerun. No parameters are needed, so the syntax is just $CTN. 2.2 DRK Command This command lets the sensor acquire a background spectrum that the incoming spectra will be corrected for during normal operation. The acquisition of this background will take about one second. The resulting background spectrum will be saved in the internal non-volatile memory. This command does not take any parameters, so the syntax is just $DRK. It is important to remove any object within the measuring range before applying the command. The command response contains a number which is a measure of the background intensity. A high background intensity can be related to e. g. stray light. Command syntax: $DRK Command Description $DRK Execute a Dark reference Response: $DRK127 (63.2Hz)ready[CR/LF]. 2.3 ENC Command The encoder inputs and related commands ETR or ENC are available only with the analogue converter box accessory. This is an encoder control command. It has the following format: ENC where arg1 denotes a certain function and arg2 some parameter related to it. 42 The following functions are defined: Arg1 0 Function Arg2 Set / Read current encoder counter value Encoder counter value to set 1 Set count source 0: Pulse on A0, 1: Pulse on B0, 2: Pulse on A1 . . . 9: Pulse on B4 10: Pulse on SyncIn 11..14: not used 15: Quadrature A/B on encoder input 2 Set preload value Value to load into encoder counter on preload event 3 Set preload function See table below The preload function defines under which condition the value set with function 2 will be loaded into the encoder counter. The respective argument 2 is a bit field as defined below: Bit(s) 0 1 2 Preload function value calculation Function 0: Preload once, 1: Preload each time 0: preload event on raising edge or high level, 1: falling edge or low level 0: the preload event is triggered by an edge 1: it is triggered by the level 3 0: Preload function inactive, 1: active (in case of “preload once”, this bit will be automatically reset) 7 .. 4 0: Pulse on A0 1: Pulse on B0 2: Pulse on A1 … 9: Pulse on B4 10: Pulse on SyncIn 11..14: not used 15: Immediate preload 2.4 ETR Command The encoder inputs and related commands ETR or ENC are available only with the analogue converter box accessory. The settings will not be saved in the nonvolatile memory by the $SSU command. 43 This command groups several functions related to encoder triggering. The encoder trigger can work in two ways: 1. Roundtrip trigger (scanning application) 2. Endless trigger Roundtrip trigger (scanning application) The encoder trigger is implemented as a state machine (see figure below). In the idle state, it waits for the encoder counter of the selected axis to pass the start position (in either direction) where it generates the first trigger event. Then the trigger interval value is added to the current position and when this position is reached, the next trigger event is generated. This step is repeated until the stop position is encountered. The generation of trigger events is now stopped. If triggering during return movement is selected, the state machine waits for the stop position to be passed once again and generates trigger events similarly to the forward movement (the trigger interval is now subtracted instead of added) until the start position is reached. The state machine then goes back to the idle state. If no Trigger during return movement is selected, the state machine waits for the start position to be passed over (during return movement) and then passes to the idle state. Fig A1-1: Roundtrip Trigger 44 Endless trigger This mode is destined for applications where the encoder primarily moves in one direction as in production lines and where equidistant sampling is needed. In order to use this mode, only a trigger interval has to be parametrized. Fig A1-2: Endless Trigger Format The command has the following format: ETR where function is: 0: Set start position ((int) arg = start position to set, see figure) 1: Set stop position ((int) arg = stop position to set, see figure) 2: Set trigger interval ((float) arg = trigger interval, see figure) Note that the interval can be given in fractions of encoder counts. 3: Enable encoder (0: disabled, 1: enabled) 4: Enable triggering during return move, see figure. 0: disabled, 1: enabled. 5: Select encoder counter 6: reserved 7: Enable endless triggering (in this mode, start and stop positions are ignored, trigger events will be generated on the current position and the trigger interval) 0: disabled, 1: enabled. 45 2.5 IPCN Command Short description: This command allows to configure TCP/IP address and subnet mask. Command syntax: $IPCN Command Description $IPCN 1 Configured as DHCP client $IPCN $IPCN 0 192 168 170 4 255 255 255 0 0 Configured as static IP address $IPCN IP Address = 192.168.170.4 Subnet Mask = 255.255.255.0 MTU = 0 (no jumbo packets) MTU argument gives the maximum transferable unit which can be anything between 1500 and 9000 bytes per TCP packet (jumbo packets). 2.6 LAI Command Short description: This command allows to adjust LED intensity in order i.e. to remove saturation. Command syntax: $LAI Param: is Led intensity (0...100%) Command Description $LAI 95 Write Led intensity 95% Response: $LAI 95[CR]ready[CR/LF]. $LAI ? Response: $LAI ? Read Led Intensity 95ready[CR/LF]. 52 2.7 NOP Command Short description: This command allows to set the number of peak to evaluate. WARNING: In confocal mode, if less than NOP peaks are detected, all thicknesses signals will be invalidated because peak identification is not possible. Command syntax: $NOP Param: is Number of Peak from 1 to 4 Command Description $NOP 3 Write Number of Peak (3) Response: $NOP 3[CR]ready[CR/LF]. $NOP ? Response: $NOP ? Read Number of Peak 3ready[CR/LF]. 2.8 SCA Command Short description: The command Scale allows to query of Full Scale in micrometers. A distance value of 32768 on the serial interface would mean a distance in (Full Scale) micrometers. To convert the integer distance value (d) received from the serial interface to a value in micrometers (D), use the formula: D[µm] = d[integer] / 32768 * Full Scale. Command syntax: $SCA Command Description $SCA ? Read Full Scale Response: $SCA ? 3320ready[CR/LF]. 2.9 SEN / SENX Command Short description: The $SEN command is used to activate the chromatic—confocal calibration related to a specific sensor head. With the single channel device, up to sixteen calibrations can be uploaded and stored in the device. With the Chrocodile C device, up to eight calibrations are supported. 53 The format of the command is as follows: $SEN n where n is the calibration table index. As the possible measuring range of each probe is much higher than the range for which it is specified and guarateed to adhere to the specifications, there is a way to use the full range with degraded precision. This might be useful in applications where not the full precision is required. In order to enable the full range, send $SEN n 1. The currently active calibration table can also be queried: $SEN? (or query flag in case of packet protocol) – returns active calibration index and if the extended range is enabled (1) or not (0) $SENX? - returns more details of the active calibration, I. e. index, serial number of the related probe and the current range in micrometers: $SENX?0, SNr: 0, Range: 7999umready $SENX enum? - (“enum” as a string argument in case of packet protocol) returns complete list of calibrations. Command syntax: $SEN Command Description $SEN? Returns active calibration index and if extended range is selected Response: $SEN? 0 0ready[CR/LF]. $SEN1 1 Response: $SEN1 1ready[CR/LF]. Set calibration table n°1 with extended range 2.10 SHZ Command Short description: The command SHZ set sample rate in Hz It is possible with this command to realize any sample rates between 100Hz and 2000Hz. If the value is not accepted, the sensor responds with the string "not valid". Due to the nature of the internal time base, not every sample rate can be realized exactly. In order to give the user the possibility to know the exact frequency, to which the sample rate has been "rounded", the frequency can be queried with "?" and will be returned as ASCII floating point number with 6 decimals. Command syntax: $SHZ Param: is sample rate (32Hz…4000Hz) Command Description 54 $SHZ 1000 Write Sample Rate (1000 Hz) Response: $SHZ 1000[CR]ready[CR/LF]. $SHZ ? Read Sample Rate Response: $SHZ ? 1000ready[CR/LF]. 2.11 SODX Command Short description: Select Output Data (extended) SODX directly selects the data words that will be included in the output telegram by specifying their indices. For example SODX 83, 16640, 16641 will output the sample counter, the distance and the intensity. Command syntax: $SODX [A0] [A1]…[AN] [Ax] is optional parameters Signal ID's scheme CLS02 CLS1 CLS2,3 CLS0,5 CLS4 Grandissement 25,4 12,7 MR 15,9 0,2 15,9 5,1 1 2,3 0,5 4 Table A1.2: SODX command: Signal Identity’s scheme. Global Exposure Information: Definition: Bit 8 = 0 (Bit 8 to 15 = 0) Type: Float Command Description $SODX 64 Start of exposure Time (in nanoseconds) Response: $SODX 64[CR]ready[CR/LF]. $SODX 65 Response: $SODX 65[CR]ready[CR/LF]. $SODX 66 Start of exposure PositionX(X encoder position on beginning of exposure) Start of exposure PositionY(Y 55 Response: $SODX 66[CR]ready[CR/LF]. $SODX 67 Response: $SODX 67[CR]ready[CR/LF]. $SODX 68 Response: $SODX 68[CR]ready[CR/LF]. $SODX 69 Response: $SODX 69[CR]ready[CR/LF]. $SODX 70 Response: $SODX 70[CR]ready[CR/LF]. $SODX 71 Response: $SODX 71[CR]ready[CR/LF]. $SODX 72 Response: $SODX 72[CR]ready[CR/LF]. $SODX 73 Response: $SODX 73[CR]ready[CR/LF]. $SODX 74 encoder position on beginning of exposure) Start of exposure PositionZ(Z encoder position on beginning of exposure) Start of exposure PositionU(U encoder position on beginning of exposure) Start of exposure PositionV(V encoder position on beginning of exposure) End of exposure PositionX(X encoder position on end of exposure) End of exposure PositionY(Y encoder position on end of exposure) End of exposure PositionZ(Z encoder position on end of exposure) End of exposure PositionU(U encoder position on end of exposure) Response: $SODX 74[CR]ready[CR/LF]. End of exposure PositionV(V encoder position on end of exposure) $SODX 75 FirstExposureCount Response: $SODX 75[CR]ready[CR/LF]. $SODX 76 ExposureFlags Response: $SODX 76[CR]ready[CR/LF]. $SODX 77 Response: $SODX 77[CR]ready[CR/LF]. $SODX 78 Response: $SODX 78[CR]ready[CR/LF]. $SODX 79 Response: $SODX 79[CR]ready[CR/LF]. $SODX 80 Response: $SODX 80[CR]ready[CR/LF]. $SODX 83 RealExpTimeNs(Effective exposure period in nanoseconds) RealLightingTimeNs(Effective lighting period in nanoseconds) TriggerLostCounter (Accumulates trigger events that have occurred during exposure and therefore have been ignored. NumberOfValidPeaks (Number of peaks that have been found in the spectrum) SampleCounter Response: $SODX 83[CR]ready[CR/LF]. 56 Peak Signal: Definition: Bit 8 = 1 Type: • Value encoding (Bits 15, 14): For geometrical quantities like thickness or distance • 00: float in micrometers, including refractive index (geometrical thickness) • 01: integer 16bit, scaled as fraction of measurement range, without refractive index (optical thickness). Distance and thickness values are given as: d[µm] = value * $SCA[µm] / 32768. In order to get the geometrical thickness, the value has to be multiplied by the index of refraction of the material. • 10: 32bit integer value in nanometers, including refractive index (geometrical thickness) • 11: integer 32bit, scaled as fraction of measurement range, without refractive index (optical thickness) Distance and thickness values are given as: d[µm] = value * $SCA[µm] / (1 << 31). In order to get the geometrical thickness, the value has to be multiplied by the index of refraction of the material. This format yields the highest theoretical resolution. For non-geometrical quantities (like intensity) • Floating point values: • 00: float • 01: truncated 16bit integer value • 10: 32bit integer value in 16.16 format • 11: undefined • Integer Values: • 00: 32bit integer • 01: least significant 16 bit • 10: most significant 16 bit • 11: undefined 57 BIT Peak Signal 13 0 12 0 0 0 0 1 1 0 1 1 0 0 11 Statistics 0 Average 1 Std . Deviation 0 Number of valid values 1 Minimum 0 Maximum 1 Peak - to -peak difference 15 14 13 12 11 Value Statistics encoding ( max -min ) Statistics are not supported by CHRocodile C. Consequently the respective bit 11 to 13 are set to 0. 9 1 0 0 0 0 0 0 10 0 2 X 0 0 0 0 1 1 9 Measuring Mode 1 X 0 0 1 1 0 0 0 X 0 1 0 1 0 1 8 7 6 5 1 0 0 0 Measuring Mode 4 3 Peak Number 4 0 3 0 0 1 1 1 0 1 Peak Number 1st peak 2nd peak 3rd peak 4th peak Peak Signal Offset Thickness Altitude I ntensity (%) Intensity Level Barycenter Peak Value Median Peak Width Example: Value encoded in integer 16 bits Command Description $SODX 28840 Altitude, 2nd peak 2 1 0 Peak Signal Offset Response: $SODX 16648[CR]ready[CR/LF]. 58 Additional information: Peak Signal Offset (Bits 0 to 2) Signal ID Offset Signal Name Remarks 0 Peak Value Scaled peak distance 1 PeakIntensity Intensity of peak 2 CCDSaturation max. CCD illumination of related spectrum 3 PeakPos CCD pixel pos 4 reserved 5 PeakWidth 6 reserved 7 reserved confocal mode only: given in CCD pixels Peak Number (Bits 3 and 4) Bits 3 and 4 are used to define the Peak Number which will be processed to calculate the demanded data. The following quantities are available: Measuring Mode (Bit 9) Thickness: If bit 9 is set to 1, then the resulting value is thickness corresponding to the difference of the peak as defined in bits 3 and 4 and the next peak. This facility is used to request thicknesses directly. NOTE This difference value is not corrected for the index of refraction. Consequently, in order to obtain the real thickness data, one must divide the result by the refractive index. Altitude: If bit 9 is set to 0, then the resulting value is the Altitude corresponding to the peak number defined in bits 3 and 4. Statistics (Bit 11 to 13) Statistics are not supported by CHRocodile C. Consequently the respective bit 11 to 13 are set to 0. 59 2.12 SSU Command Short description: The command SSU saves Setup Saves current setup to non-volatile memory. The Setup will be restored upon next power up. Command syntax: $SSU Command Description $SSU Saves current setup Response: $SSU [CR]ready[CR/LF]. 2.13 STA Command Short description: The command STA starts serial data output This mode can be stored in the nonvolatile memory. If stored, the CHRocodile C will begin immediately to output data telegrams on the next power-up. Command syntax: $STA Command Description $STA Starts serial data output Response: $STA [CR]ready[CR/LF]. 60 2.14 STO Command Short description: The command STO stops serial data output This mode can be stored in the nonvolatile memory, so on the next power up the CHRocodile C will not begin to send measurement data until the output is restarted by the "STA" command. Command syntax: $STO Command Description $STO Stops serial data output Response: $STO [CR]ready[CR/LF]. 2.15 THR Command Short description: The command THR lets you specify an intensity threshold for the distance detection. It may be useful to specify a high threshold to reject all noise spikes during a measurement or to specify a low threshold to get a (noisy) result from very black surfaces. When the signal is below the threshold, 0 is output for distance and intensity. The threshold is in arbitrary units which may be subject to change in future software versions. At faster sample rates, lower settings for threshold can be used than at slower sampling rates. The reason is, that at slower sampling rates, the stray light of fiber and coupler is integrated longer on the detector. Even though this signal is automatically subtracted as "dark reference", the statistical variations of this signal are stronger, the higher the dark signal becomes. If a typical value for good noise suppression and maximum sensitivity at 2kHz sampling rate could be 20, at 100Hz 50 would be needed. If the sensor doesn’t detect a signal which passes the threshold, 0 is output for distance and intensity. Command syntax: $THR Param: is intensity threshold Command Description $THR 35 Write Intensity Threshold Response: $THR 35[CR]ready[CR/LF]. $THR ? Response: $THR ? Read Intensity Threshold 35ready[CR/LF]. 61 2.16 TRE Command Short description: This command lets the sensor enter a trigger mode where one trigger event will produce one sample. Trigger signals can be SyncIn or Encoder inputs, depending on $ETR settings, see $ETR description below. $TRE is particularly useful in conjunction with encoder based trigger generation as described in the $ETR section below. The encoder inputs and related commands ETR or ENC are available only with the analogue converter box accessory. The maximum frequency (or the shortest interval of two consecutive trigger events) is defined by the cycle frequency ($SHZ). Trigger events that occur while the sensor is idle will cause an immediate exposure. If a trigger event occurs during an ongoing acquisition cycle, then the respective exposure will be delayed until the current cycle is completed. In this case, the TriggerDelayed – Flag (Bit 2) is set in the flags signal of the delayed exposure. This flags signal is a global signal (ID = 76) that can be requested just like any other signal using $SODX. If more than one trigger event occurs during an ongoing exposure cycle, then only the first event will result in a delayed exposure cycle as described above, all consecutive trigger events will be ignored. In this case, the TriggerIgnored – Flag (Bit 1) will be set in the flags signal of the delayed exposure. Command syntax: $TRE Command Description $TRE Trigger each Response: $TRE[CR]ready[CR/LF]. 2.17 TRG Command Short description: The command TRG is a Wait For Trigger. The command enables an exact alignment of the sensors sampling intervals with the movement of a scanning axis. It stops the sensor after completion of the current data telegram and puts it in a waiting state. This state is left by a trigger event (rising edge on the Sync in, Encoder Trigger). Command syntax: $TRG Command Description $TRG Wait For Trigger Response: $TRG[CR]ready[CR/LF]. 62 2.18 VER Command Short description: The command VER give the Version of CHRocodile C. The command sends back an ASCII string which gives information on the serial number of the CHRocodile C (SN: ...), the DSP software (DSPsoft: ...) and the microcontroller software (C: ...). Command syntax: $VER Command Description $VER Read Versions Response: ChrocodileCompact[CR] device_serial_number = 201223[CR] firmware-version = 1.2.3[CR] build = 2016-09-29 427f188cbd[CR] ready[CR/LF]. >> 63 Appendix 2: Mechanical Plans 1. Optical probe mechanical plans a- Probe 0.2mm b- Probe 1mm 64 c- Probe 4mm d- Probe 10mm Fig A2-1: Optical Head Mechanical plans: a- 0.2mm b- 1mm c- 4mm d- 10mm 65 2. CHRocodile C unit mechanical plans Fig A2-2: CHRocodile C sensor unit mechanical plans: 66 3. CHRocodile C unit mechanical interface plans Fig A2-3: CHRocodile C unit mechanical interfaces Three surfaces are designed to fix the CHRocodile C unit on customer system. On these 3 surfaces, 4 M3x4.5 threaded holes are available. Positions of threaded holes are specified on the Figure A2-3. It is also possible to fix the CHRocodile C unit on the front ring of 34mm diameter. Consequently several mechanical interfaces are available on this sensor in order to ease the integration on customers / integrators systems. 67 Appendix 3: Trouble Shooting 1.1 Power off The Status LEDs are off when the power supply cable is not connected: - Check the power cable. 1.2 Communication error: No possible Ethernet communication between CHRocodile C and your computer: - Check the Ethernet cable is plugged correctly in RJ45 sensor unit connector. - Check the IP configuration for your PC and the CHRocodile C unit (Cf. $IPCN command in Appendix 1). - If you are using a switch, then try to connect directly from your LAN network to the sensor unit. - If possible, a Peer-to-Peer connection is recommended. No possible serial communication between CHRocodile C and your computer: - Check the multipoint cable is plugged correctly in multipoint connector (9 pins), - Check the baud rate is correct. 1.3 Distance Measurement: The target is positioned in front of the sensor, and no distance measurement is collected for all channels. - Set the measuring frequency to minimum ($SHZ100). - Set the LED intensity to maximum ($LAI100). - Check if a white light spot is emitted from the optical probe and if it is focused on the target. - Check if the target is inside the measuring range of optical probe (Cf. section 2.8). 68 - Check if the target surface is normal to the optical probe axis. The maximum angle between target surface and optical axis is given by the maximum measurable slope (Cf. section 2.8). - Check if the distance is transmitted ($SODX 16640 or SODX 256), - Check that a calibration table is uploaded ($SCA?) - Then, check and store the raw signal (this file could be demanded by PRECITEC technical support team). The raw signal should show one peak. 1.4 Thickness measurement: The target is positioned in front of the sensor, and no thickness measurement is collected for all channels. - Check that the target thickness is inside minimal and maximal measuring thickness range, - Check the target transparency, - Set the measuring frequency to minimum ($SHZ100). - Set the LED intensity to maximum ($LAI100). - Check if a white light spot is emitted from the optical probe and if it is focused on the target. - Check if the two surfaces of the target are inside the measuring range of the optical probe (Cf. section 2.8). - Check if the target surface is normal to the optical probe axis. The maximum angle between target surface and optical axis is given by the maximum measurable slope (Cf. section 2.8). - Check if the two distance peaks are transmitted ($SODX 16640 16648), - Then, check and store the raw signal (this file could be demanded by PRECITEC technical support team). The raw signal should show two peaks. If after reading the previous section you didn’t succeed in resolving your problem, please contact your vendor for technical support. In order to be more efficient, we recommend to fill the following technical support datasheet and if necessary prepare the files which are demanded in previous section. 69 Appendix 4: Technical support Technical Support Date : CUSTOMER : PRECITEC Number: PRODUCT IDENTIFICATION Sensor Unit Serial Number : Optical Head Serial Number : Firmware Serial Number : PROBLEM IDENTIFICATION Type : Software Optic Mechanic Electronic Description : Photos: Attached files : Photos Raw data Diagnostic file 70
Source Exif Data:
File Type : PDF File Type Extension : pdf MIME Type : application/pdf PDF Version : 1.4 Linearized : No Page Count : 63 Language : fr-FR Tagged PDF : Yes XMP Toolkit : 3.1-701 Producer : Microsoft® Word 2013 Title : CLS User Manual Creator : DR Creator Tool : Microsoft® Word 2013 Create Date : 2016:10:12 14:16:15+02:00 Modify Date : 2016:10:12 14:16:15+02:00 Document ID : uuid:46F59D9D-F6A8-4252-9FD2-1D55109778FF Instance ID : uuid:46F59D9D-F6A8-4252-9FD2-1D55109778FF Part : 1 Conformance : A Author : DREXIF Metadata provided by EXIF.tools