CHRocodile MPS User Manual
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CHRocodile MPS Optical Multi-Point Sensor for non-contact distance and thickness measurement Operation Manual 1 Imprint This documentation is under the copyright of Precitec Optronik GmbH. It may not be reproduced or used in a manner contrary to the company’s legal interests without prior written approval of Precitec Optronik GmbH. It is strictly intended for use in the context of service operations. Any other use is impermissible. Any sharing of this documentation with third parties requires the prior, expressed written approval of Precitec Optronik GmbH. Changes in the technical details from the descriptions, data and figures in this documentation are reserved. Printed in the Federal Republic of Germany. Responsible for Contents Original Edition Precitec Optronik GmbH Schleussnerstrasse 54 63263 Neu-Isenburg / Germany Telephone: 0049 (0)6102 / 36 76 – 100 Telefax: 0049 (0)6102 / 36 76 – 126 e-mail: info@precitec-optronik.de Website: http://www.precitec.de/en/precitec-group-start-page/ Representatives Please visit our website to know the current addresses of our representatives. PRECITEC OPTRONIK's regional contacts for the Optical Measuring Technology can be found here: http://www.precitec.de/en/contact/precitec-worldwide/ 2 Version Control Version – Manual 1.0.0.0 Date Type of Change 2015/01/29 Original edition 3 Table of Contents Table of Contents ........................................................................................................... 4 Basic Safety Instructions ................................................................................................ 7 1.1 Warranty and Liability ...................................................................................... 7 1.2 Safety Symbols .................................................................................................. 7 1.3 Proper Use ......................................................................................................... 8 1.4 Duty of Operator and Personnel....................................................................... 9 1.5 Safety Measurements in Normal Operation ..................................................... 9 1.5.1 Protection from Electronic Shock ......................................................................................... 9 1.5.2 Protection from Optic Radiation / Eye Safety ..................................................................... 9 1.5.3 Grounding the device ........................................................................................................... 10 1.6 Medical or safety-relevant usage ................................................................... 10 1.7 Storage and Transport .................................................................................... 10 1.8 Emergency Procedures ................................................................................... 10 Product Description ....................................................................................................... 11 2.1 General Description ......................................................................................... 11 2.2 Measuring principle .......................................................................................... 11 2.2.1 Optical principle ................................................................................................................... 11 2.2.2 Principle applied to multiple points sensor ........................................................................ 13 2.3 Sensor Functionalities ......................................................................................14 2.4 Typical applications (Overview) ......................................................................16 2.5 List of Deliverables ......................................................................................... 18 2.6 Connections and Interfaces .............................................................................19 2.6.1 ON / OFF Switch button ....................................................................................................... 19 4 2.6.2 Power supply jack ................................................................................................................. 19 2.6.3 USB port RS232 serial communication ................................................................................ 20 2.6.4 Ethernet connector .............................................................................................................. 20 2.6.5 Encoder-input....................................................................................................................... 20 2.6.6 Trigger Input/Output / RS422 serial communication ......................................................... 21 2.6.7 Status LED ............................................................................................................................ 23 2.7 Sensor unit Characteristics ............................................................................. 24 2.8 Optical Head Specifications definitions ......................................................... 26 2.9 CHRocodile MPS performance specifications: ............................................... 27 2.10 Connections and Interfaces......................................................................... 29 2.11 CHRocodile MPS Explorer and Drivers installations........................................31 2.12 Communication with CHRocodile MPS .........................................................31 Measurements Start Up ................................................................................................ 33 3.1 Calibration Table ............................................................................................ 33 3.2 Dark Acquisition .............................................................................................. 33 3.3 Mechanical interfacing ................................................................................... 34 3.4 Basic Settings Configuration ........................................................................... 34 3.5 Data measurement Training ........................................................................... 35 Advanced Configuration ............................................................................................... 37 4.1 Commands List ................................................................................................ 37 4.2 Detailed Commands Description .................................................................... 39 4.2.1 DNLD Command ................................................................................... 39 4.2.2 ETR Command..................................................................................... 39 4.2.3 IPCN Command.................................................................................... 40 4.2.4 LAI Command ..................................................................................... 41 4.2.5 NOP Command .................................................................................... 42 4.2.6 SCA Command ..................................................................................... 43 5 4.2.7 SHZ Command..................................................................................... 44 4.2.8 SODX Command ................................................................................... 45 4.2.9 SSU Command ..................................................................................... 52 4.2.10 STA Command ..................................................................................... 53 4.2.11 STO Command .................................................................................... 54 4.2.12 THR Command .................................................................................... 55 4.2.13 TRE Command..................................................................................... 56 4.2.14 TRG Command .................................................................................... 57 4.2.15 VER Command..................................................................................... 58 4.2.16 Calibration Table Download Function ......................................................... 58 Mechanical plans .......................................................................................................... 59 5.1 Optical Head Mechanical plans ...................................................................... 59 5.2 CHRocodile MPS unit mechanical plans ......................................................... 64 Trouble Shooting........................................................................................................... 65 6.1 Power off:........................................................................................................ 65 6.2 Communication error: .................................................................................... 65 6.3 Distance Measurement: .................................................................................. 65 6.4 Thickness measurement: ................................................................................ 66 Technical support ......................................................................................................... 68 6 Basic Safety Instructions This operation manual contains the most important instructions for the safe operation of the product. Observe all instructions and guidelines in this documentation. Moreover, the locally applicable regulations and codes for accident prevention at the use site must be observed. 1.1 Warranty and Liability The general terms and conditions of delivery for products and services in the electronics industry along with the amendments and restrictions deriving from the general terms and conditions of delivery for Precitec Optronik GmbH apply to all of our products. We reserve the right to make any changes to the device’s construction for reasons of improving quality or expanding the possible applications as well as any made for production-related reasons. Dismantling the device voids all warranty claims. The exception to this is the replacement of parts that are subject to wear and tear and require maintenance or calibration, to the extent that these are expressly identified in this documentation. Changes made to the device on own authority render liability claims void. 1.2 Safety Symbols The following terms and symbols for hazards and instructions are used in the operation manual. WARNING This symbol indicates a possibly dangerous situation. Failure to heed these instructions can result in minor injuries or cause property damage. WARNING High voltage hazard – indicates a hazard from electrical shock and warns of immediate or impending danger to the life and health of persons or of extensive property damage. 7 WARNING Do not touch – indicates that touching the contact/optics surface can cause damage/destruction of the component. IMPORTANT Information which the user must pay attention to/ be aware of in order to avoid disruptions in the course of processing/ in product use. TIP Provides information that the user needs in order to achieve the intended result of an action most directly and without difficulty. PREREQUISITE Describes all components as well as all conditions that must be present/ be fulfilled in order to the action to be successfully completed. ADDITIONAL INFORMATION Informs the user whenever there is additional information about a context being described. 1.3 Proper Use The optical sensor is intended as a stand-alone device or as part of a measurement apparatus for measuring distance, thickness and surfaces for quality and dimensional control. Only use the optical sensor in a dry environment. The device may only be operated within the specifications given in the technical data. Any use deviating from the intended and proper use is considered improper. The user assumes liability for the consequences in these cases. Electromagnetic Compatibility (EMC) Both as an individual device and in combination with the devices designated in this documentation, the optical sensor fulfils the requirements of the standards DIN EN 61326-1:2013-07 and DIN EN 61010-1:2011-07, and therefore corresponds to the EU-Directive 2014/35/EU and 2014/30/EU. This declaration is valid for all units with the CE label on it, and it loses its validity if a modification is done on the product. When customer-supplied devices or cables are used this can mean that these Norms may not be fulfilled. For this reason, you should only 8 use the original devices and replacement parts and observe the instructions for EMC-compliant installation in the handbooks that come with them. If the optical sensor is operated inside a facility with other devices, the entire facility must comply with the provisions in the EC-Guidelines in the demands of the general operating permit. 1.4 Duty of Operator and Personnel The operator of the device is obligated only to allow persons to work on the device who: x are familiar with the basic regulations concerning workplace safety and accident prevention and who have been instructed in the operation of the device x have read and understood the safety chapter of this operation manual and have confirmed this with their signature. The personnel must be trained in compliance with the regulations and safety instructions and must have been informed of possible hazards. 1.5 Safety Measurements in Normal Operation When it is assumed that the device can no longer be operated safety, the device or the plant must be taken out of operation. The device must be secured against unintended use. Unauthorized interventions will void your rights to assert warranty claims. Any attempt to copy or analyze the software will lead without fail to the voiding of all rights to assert warranty claims. 1.5.1 Protection from Electronic Shock Please make sure that the live components are uncovered after opening the housing or removing components. Touching these components presents a potentially lethal hazard. When service- and repair work is performed on opened devices and modules, the main power supply must be reliably shut off (mains cable unplugged). 1.5.2 Protection from Optic Radiation / Eye Safety When performing service and maintenance work, make sure that you 9 do not look directly into the LED’s light. The light can harm your eyes. 1.5.3 Grounding the device Make sure that the device is grounded in compliance with regulations. Please make sure that the optical sensor is supplied with power via a grounded main power input line (cold device plug). 1.6 Medical or safety-relevant usage If the CHRocodile Line Sensor is used in medical or safety-relevant applications, the operator must ensure that the CHRocodile Line Sensor is qualified for the specific application. This includes the optical characteristics of the measured sample as well as the influence of temperature and vibrations to the CHRocodile sensor. Furthermore the user has to check the CHRocodile Line Sensor for correct measurements and for exceeding the specified measuring uncertainty. 1.7 Storage and Transport In order to avoid damages in storage and transport, the following ground rules are to be observed: x Maintain the storage temperature range allowed in the technical specifications x Take suitable measures to avoid any damage from humidity or moisture, vibrations or impact x Do not store in or near magnetic fields (e.g. permanent magnet or alternating electrical field) 1.8 Emergency Procedures x Disconnect the plant from the main power supply x Extinguish any flames with a Class B fire extinguisher 10 Product Description 2.1 General Description The CHRocodile MPS optical multi-point sensor offers up to 24 simultaneous altitude and/or thickness measurements. Thanks to its 24 independent channels, CHRocodile MPS is used to couple different probes (single point or multipoint) in the limit of 24 measured points. This sensor is based on Confocal Chromatic principle which authorizes high resolution and high speed thickness and altitude measurement. The CHRocodile MPS can measure 24 points simultaneously with a measuring rate of 4500 points/s per channel corresponding to 96000 points/s. Also depending on the number of required probes, it is possible to measure faster (e.g. 12 channels at 8000points/s). This device consist in a sensor unit that contains a light source, a spectrometer and all electronic and software for data processing and transmission. Up to 24 different single point optical probe can be connected to the sensor unit, using optical fiber cable. The CHRocodile MPS can accommodate different types of optical probe. Depending on the probe which are connected, the operator must move to the right calibration table by software operation. Finally, data transmission is carried out by ETHERNET communication. Fig 2-1: CHRocodile MPS sensor unit: 3D view: 2.2 Measuring principle 2.2.1 Optical principle For most industrial applications the chromatically coded distance detection method turned out to be very well suited. CHRocodile MPS is based on this method and more precisely on the Confocal Chromatic principle. This principle combines the properties of confocality and axial chromatism. 11 Axial Chromatism: That method takes advantage from a lens optical error commonly known as axial chromatic aberration: the axial position of the focal point depends on the wavelength (color) of the light to be focused. For example, in the visible spectral range, the focal distance for blue light (a 400nm) is shorter than for red light (a 700nm). The focal points of intermediate wavelengths are located in between according to a continuous axial position variation. Thus, considering White Light passing through an optical objective provided with axial chromatic aberration, a continuum of color along the optical axis is generated, as an axial rainbow. Confocality: That method also takes advantage from confocal opto-mechanical configuration. A confocal optical system uses illumination point source and a pinhole in an optically conjugate plane in front of the detecting system to eliminate out-of-focus signal. As only in focus light can be detected, the image's optical lateral and axial resolution is improved. Consequently the pinhole act as a spatial filter which block light which is out of focus or light which come from an external light source. Confocal Chromatic Imaging: Considering both confocality and axial chromatism properties, a White Light illumination point is imaged through the chromatic objective on a target object. Depending on the distance of the target from the focusing chromatic objective, light of just a very narrow wavelength bandwidth is perfectly focused on the target’s surface. All other spectral components of the light source are out of focus. In the back path, from the target’s surface to the detector, the reflected light passes through the chromatic objective, the optically conjugate pinhole which is in front of the spectrometer. The pinhole filters all wavelengths except the narrow bandwidth which is in focus. The spectrometer analyses the spectrum of the light reflected back by the target’s surface, and only a chromatic peak is observed corresponding to the narrow wavelength bandwidth perfectly in focus. The analysis and the barycenter calculation of this chromatic peak allow to determine the distance of the target surface from the chromatic objective. (Cf. Fig. 2.2 and 2.3) 12 Fig. 2-2: Chromatic Confocal Imaging principle (point sensor) 2.2.2 Principle applied to multiple points sensor Applying Confocal Chromatic Imaging to multipoint sensor consists in increasing the number of illumination point’s source and the number of pinhole in front of the detector spectrometer. In this configuration, the spectrometer is preferably bidimensionnal. One direction corresponds to the channel number and the other direction carry the wavelength information. Consequently the spectrometer carry the information of each point focused on the target’s surface, and the distance of the target surface from the chromatic objective can be calculated for all the focused points. According to CHRocodile MPS, the operator can position the focused points anywhere on the object. 13 2.3 Sensor Functionalities The CHRocodile MPS has two different measuring mode: Distance and Thickness measurement. The principle of these two measuring mode are explained hereafter. Mode 1 Chromatic Distance Measurement Topographic, profile or roughness measurements are performed in Mode 1 (confocal distance measurement). In this process, light spots associated to channels delivering distance data (distance channel) are focused on the surface of the measured object using an optic with a known chromatic aberration. The reflected light is more intense for the wavelength in focus on the surface. For each of the distance channels, reflected light is spectrally analyzed and the spectral response is a peak centered on focused wavelengths. The spectral peak positions determine the distance to the surface of each of the distance channels. The distances are simultaneously calculated and transmitted to host computer at up to 8KHz frequency. See Fig. 2-3. Fig. 2-3: Chromatic measurement principle, distance measurement 14 Mode 2 Chromatic Thickness Measurement Thickness measurements are performed in Mode 2 (confocal thickness measurement). If a transparent material is within the measurement volume of the Chromatic Optical Head, 24 points are focused on both the two surfaces of the measured object. The reflected light is more intense for the two wavelengths in focus on the two surfaces. For each of the 24 channels, reflected light is spectrally analyzed and the spectral response is constituted of two peaks centered on focused wavelengths. Considering the refractive index of the object, one can determine the thickness of the object for the 24 points. The 24 thicknesses are simultaneously calculated and transmitted to host computer at up to 4KHz frequency. See Fig. 2-4. Fig. 2-4: Chromatic measurement principle, thickness measurement 15 2.4 Typical applications (Overview) A broad range of possible applications is available to this highly precise sensor. The CHRocodile MPS is fast sensor based on confocal chromatic imaging principle. They are perfectly suitable for demanding measuring tasks, like non-contact measurement of microtopography, layer thickness measurements. It could be used both on various reflecting and scattering surfaces. Efficient x x Measurement of layer thickness and distance along a line Replaces up to 24 individual sensors Versatile x x x Any combination of point and line measuring heads 5 encoder inputs, trigger input, sync-output Wall thickness measurements of colored container glass User-friendly and safe x x x 19“wide housing/rack mountable or Height 3U x 230mm x 213mm /rack mountable also available Non-contact measurements Robust and maintenance-free Association of CHRocodile MPS with a multipoint optical probe make a powerful sensor for glass industry application. The CHRocodile MPS simultaneously measures wall thickness at 24 locations at a rate up to 96 000 points per seconds. This results in the shortest measuring times. Also thin-walled areas of glass containers are found more reliable using a CHRocodile MPS, thus saving money and time by avoiding unnecessary rejects. The CHRocodile MPS offers the ability to perform fast and accurate metrological control of production, by being built on automatic or semi -automatic inspection machines, or by being directly integrated on production line in order to pick simultaneously 24 metrological information at different location. In this, this new technology fully meets the current needs of the industry as it is suitable for many applications: - The measurement of wafer in the field of semiconductor and generally microelectronics, The measurement and online control of mechanical or optical parts, Or even the measurement and control of glass or plastic film thickness. Other fields of applications exist, the common point is to seek a measurement system going faster and faster and more and more flexible, it is the case in laboratory environment and even more in industrial environment. It appears clearly here that the CHRocodile MPS unit of measurement meet these different needs. Depending on your application, it is possible to associate different type of optical probes to adapt to the required performances. All PRECITEC probes can be used with CHRocodile MPS except CHRocodile MPS probes. 16 Optical Head 300μm350μm 600μm ¹ ¹ ¹ ¹ ¹ ¹ ¹ ¹ ¹ ¹ ¹ ¹ ¹ ¹ ¹ ¹ ¹ ¹ ¹ ¹ ¹ ¹ ¹ ¹ ¹ ¹ ¹ Flatness ¹ ¹ ¹ Roughness ¹ ¹ ¹ Plastic and glass thickness ¹ ¹ ¹ ¹ ¹ ¹ Thin film thickness ¹ ¹ ¹ Coating thickness ¹ Application Electronics Micro-Electronics Mechanics Micro-Mechanics Optics Micro-Optics Shape Table 2.1: 100μm 2mm 6mm10mm 25mm Sensor applications 17 2.5 List of Deliverables - One operational CHRocodile MPS unit (see Fig. 2-5), Operational Optical Heads (see Fig. 2-6), Power Supply Adapter (100-240VAC to 24VDC +/-10%)) (see Fig. 2-7), A CD with DLL and firmware and Operation Manual, Calibration Test report. Fig 2-5: CHRocodile MPS unit: Fig 2-6: Compatible Optical Heads: Fig 2-7: Set of electrical cables: a- Power supply b- Adapter 18 2.6 Connections and Interfaces All of the connection ports for the sensor unit are located at the rear of the system (see Fig 2-8): 3 1 5 7 2 4 6 1. 2. 3. 4. ON / OFF Switch button, Power supply jack Serial interface RS232, USB port, Ethernet interface, RJ45 port 5. Encoder-Input, Sub-D26 male connector 6. Trigger Input/Output + RS422, Sub-D15 female connector 7. Status LED Fig. 2-8: CHRocodile MPS rear panel: Connections 2.6.1 ON / OFF Switch button The CHRocodile MPS has a Power switch ON / OFF button. 2.6.2 Power supply jack The CHRocodile MPS has two pluggable screw terminal for power supply with 24VDC +/-10%. Connect the set of power cable supply associated to the Power Supply Adapter (100-240VAC to 24VDC +/-10%) delivered with the CHRocodile MPS unit. 19 2.6.3 USB port RS232 serial communication The serial RS232 is interfaced on the USB port. Serial communication are mostly used for sending command as a hyper-terminal. As the number of channel is high with a huge amount of data, serial communication port cannot support data transfer. 2.6.4 Ethernet connector The CHRocodile MPS has a RJ45 standard connector for Ethernet communication. Connect the isolated RJ45 standard connector from the CHRocodile MPS unit to an Ethernet network (PC). Ethernet is the only port which can support the data transfer. Ethernet is also used for setting configuration through commands (Cf. command SODX in section 5.2), for loading Calibration Table (Cf. command TABL in section 5.2). Use shielded Ethernet cable for the data port connection. Ethernet communication allows to transmit 6 data at 2KHz. If more than 6 data are requested, it is possible to use Jumbo Packet configuration. In that case, you need to check network hardware for Jumbo Packet support and use the IPCN command to configure the Jumbo Packet size. Disconnect the sensor and configure the PC network hardware for the identical size and reconnect the sensor. 2.6.5 Encoder-input The incremental encoder-input makes it possible to precisely assign each measurement points along the line and axis positions without additional hardware. The CHRocodile MPS can manage with 5-axis Encoders. For an exact distance or thickness measurement it is necessary for every measurement value to be assigned to the exactly correct spatial coordinates. This data must be recorded in the system and transferred to the evaluation processing unit over the internal interface. To accomplish this, the sensor is equipped with an encoder-interface. Default are the encoder inputs not terminated. Tye Sw0t02 to GND to terminate with 100 Ohm channel 0 to 2 Tye Sw3t04 to GND to terminate with 100 Ohm channel 3 to 4 If the encoder-signals are fed through the sensor and additional other devices are connected (e.g. for axis control), the 100 Ohm termination can also be deactivated. PIN Signal 1 2 3 4 5 6 7 A0A0+ B0B0+ A1A1+ B1- Input I I I I I I I Signal to which ground Differential encoder input 120 Ohm terminated Differential encoder input 120 Ohm terminated Differential encoder input 120 Ohm terminated Differential encoder input 120 Ohm terminated Differential encoder input 120 Ohm terminated Differential encoder input 120 Ohm terminated Differential encoder input 120 Ohm terminated Sub-D26 20 8 9 10 11 12 13 14 15 B1+ GND 16 17 18 19 20 21 22 23 24 25 26 A3A3+ B3B3+ A2A2+ B2B2+ GND NC Sw0t02 +5V / 120mA Sw3t04 A4A4+ B4B4+ I P I I I I P I I I I P,O I I I I I Differential encoder input 120 Ohm terminated ground Differential encoder input 120 Ohm terminated Differential encoder input 120 Ohm terminated Differential encoder input 120 Ohm terminated Differential encoder input 120 Ohm terminated ground Not connected Differential encoder input with switchable 120 Differential encoder input with switchable 120 Differential encoder input with switchable 120 Differential encoder input with switchable 120 Not connected 5V /120mA supply for external encoder Low = termination ON, NC or 5V = termination Differential encoder input with switchable 120 Differential encoder input with switchable 120 Differential encoder input with switchable 120 Differential encoder input with switchable 120 Table 2.2: Encoder interface (PIN-Configuration) 2.6.6 Trigger Input/Output / RS422 serial communication The Trigger output use a Sub-D 15 female connector. This connector is used for trigger Input / Output and for RS422 serial communication (Cf. Table 2-3 and Table 2-4). The trigger options make the lighting cycle externally controllable and the synchronization between e.g. a scanning system cycle and the CHRocodile MPS measurement rate. This means that external triggering is possible for every measurement up to the full measurement rate of the CHRocodile MPS sensor. The interface contains the connection points for the synchronization and RS422 serial communication. The serial RS422 is interfaced on the Sub-D15 female connector. Serial communication are mostly used for sending command as a hyper-terminal. As the number of channel is high with a huge amount of data, serial communication port cannot support data transfer. 21 Signal SyncIn GND SyncOut Isolated-GND [A] RS422 (CTS) [A] RS422 (RTS) [A] RS422 (RXD) [A] RS422 (TXD) Isolated-GND Isolated-GND Isolated-GND [B] RS422 (CTS) [B] RS422 (RTS) [B] RS422 (RXD) [B] RS422 (TXD) Pin 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 Table 2.3: Interface (pin configuration) Signal Function Description RS432 RS422 Interface Isolated (Isolated-GND) RS422 Interface Sync In Trigger-Input Positive slope from 0V to 5-24V causes according to the settings of the sensor: Sync Out Sync. Output x starts the continuous measurement, if the command wait for trigger was received first (TRG Command) x starts the single measurement in mode trigger each (TRE Command) x the sensor differentiates between pulses < 13 μs and >13 μs. This information is attached to the output telegram which is triggered by this pulse. This way more sensors can be synchronized. x the input is equipped with 10 kΩ pullup-resistance at 5 V. Isolated Sync Output Positive slope 0 V to 5 V with the start of each measurement. The pulse duration is 50μs in general and every second one pulse is shorted to 10μs. This is for synchronizing more sensors when their Sync-In is connected with the Sync-Out. Table 2.4: Interface 22 Wait for trigger – signal characteristics to Analog Out The sensor stops after the current data telegram is transmitted and goes into a standby mode. The last transmitted analog value persists until the next exposure (also see TRG command). 2.6.7 Status LED LED Status No Signal RED LED Flashing GREEN LED BLUE LED Flashing BLUE / GREEN LED GREEN LED CHRocodile MPS Status Power OFF Power ON, Firmware badly configured Power ON, Firmware is configuring Power ON, Firmware is configured / Continuous Measurement Power ON, Triggering session Power ON, Waiting for Trigger Table 2.5: Status LED definition 23 2.7 Sensor unit Characteristics Optical sensor Measuring principle (1) Confocal Chromatic Measuring data (1) Distance, Thickness Number of Channel (1) 24 Light source LED Dimensions (sensor unit) 19‘‘ x 3 HE x 306 mm (2) (Height 3U x 230mm x 213mm also available) Weight 5.5 kg Data Transmission Measuring rate (3) (4500Hz (24 channels); 8000Hz (12 channels) Interfaces Ethernet, RS232, RS422 Communication Protocol Transfer rate Ethernet 100 Mbit (Ethernet), 9600 - 921600 Baud (RS-422), 921600 Baud (USB: virtual comport) Synchronization with ext. devices Trigger-input / Output (TTL) Encoder-inputs Yes (5 axis) SDK Via a DLL, compatibility .NET OS Windows XP, Windows 7, Windows 8 Data Processing / Calculation Embedded processing unit Standard to be met Power Supply 24VDC +/-10% / 40W with separate main supply unit 100 to 240VAC – 50Hz to 60Hz Operating Temperature +5 °C to +50 °C Storage Temperature -20°C to +70°C CE marking / EMC Compliant with applicable regulation RoHS Compliant with applicable regulation Protection Class IP50 (DIN 40050/ IEC 144) Optical Head Specifications See Table 2.7 Table 2.6: Sensor Characteristics (1) See section 2-3: Sensor Functionnalities (2) See Fig 6-2 Sensor unit mechanical plan in section 6.2 CHRocodile MPS unit mechanical plan (3) The maximum measurement rate depends on the number of utilized channels. Changes and/or innovations may lead to differences in the listed technical data. 24 Table 2.7: One point Optical Heads Specifications (1) Bottom of probe to middle of measuring range (2) Decreasing accuracy on the limits (3) Refractive index n=1.5 25 Table 2.7 shows one point optical heads specifications. Some line optical head design are in progress and should be available by the end of year 2015. Optical heads are interchangeable: the same CHRocodile MPS unit can store up to 5 different calibration tables per channel corresponding to different optical heads. The Optical Head is totally passive, only the CHRocodile MPS unit has an internal light source and electronic board which can be considered as heat and electrical sources. 2.8 Optical Head Specifications definitions Acceptance Angle: related to M.S W.D M.R M.S P S.D L W.D : Working Distance S.D: Spot Diameter (Size) M.R : Measuring Range M.S: Max Object Slope (specified for specular object. On diffuse object, it is possible to measure on slope up to 85°) L: Line length (only for multipoint optical head) P: Pitch between measuring spot (only for multipoint optical head) Fig 2-10: Optical Head Specification definition 26 2.9 CHRocodile MPS performance specifications: Axial Resolution: Axial resolution corresponds to the static noise on altitude or thickness measurements. It is an experimental specification. It is measured on 1000 continuous points along the measuring range for each channel of the CHRocodile MPS sensor. Axial resolution as a function of object position inside measuring range is calculated for each channel along the line. By default axial resolution specification corresponds to the minimum value (ARmin). (See Fig. 2-11), Channel p Axial Resolution (nm) ARmin 0 0 Position in the Measuring Range Fig 2-11: Axial Resolution as function of object position in Measuring Range for one channel Accuracy: Accuracy corresponds to the altitude deviation for each channel along the measuring range between the CHRocodile MPS and a calibrated interferometric reference sensor. Consequently, accuracy is an experimental specification. Accuracy as a function of object position inside measuring range is calculated for each channel. By default accuracy specification corresponds to the maximum of absolute value (Amax). (See Fig. 2-12), Channel p Accuracy (nm) Amax 0 Position in the Measuring Range Fig 2-12: Accuracy as function of object position in Measuring Range for one channel 27 Minimum and Maximum Measurable Thicknesses: The minimum and maximum measurable thickness specification is given for n=1.5 refractive index. It is measured on a standard sample in the center of measuring range for each channel. T=n.(D1-D2) D1 D2 Tmin D1 Tmax D2 Fig 2-13: Minimum and Maximum measurable thicknesses 28 Operational Start up 2.10 Connections and Interfaces All of the connection ports are located at the front panel of the CHRocodile MPS (Cf. section 2.6 Connections and Interfaces): x the connection ports for the serial interfaces RS232/RS422 x the connection for the encoder x the interface port for synchronization with external devices and x the power supply jack. 2.10.1 CHRocodile MPS Stand Alone device: The device can be used as a stand-alone device in order to perform selective distance or thickness measurements. Power supply The CHRocodile MPS has two pluggable screw terminal for power supply with 24VDC +/-10%. Connect the set of power cable supply associated to the Power Supply Adapter (100-240VAC to 24VDC +/-10%) delivered with the CHRocodile MPS unit. Ethernet connector Connect the isolated RJ45 standard connector from the CHRocodile MPS unit to an Ethernet network (PC). Use shielded cable for the data port connection (minimum category 5 cable). The default CHRocodile MPS IP address is: 192.168.170.2 Configure the PC Ethernet port to the following address: 192.168.170.X (X≠2) To configure the Ethernet port of your PC, you must open the ‘Network connection properties’ menu. After selecting the right Ethernet card (connected to the sensor), click on ‘network protocol (TCP/IPv4)’ and click ‘Properties’. Set the IP address of the PC and the mask. For a standard use the mask should be set to 255.255.255.0. If you need to configure the sensor to another IP address (different than 192.168.170.2), contact your vendor. This could be useful in case of multiple CHRocodile MPS connection on 1 computer. ON / OFF Switch button Switch on the Power button. 29 2.10.2 CHRocodile MPS integrated on measurement system: In addition to the Power supply and Ethernet connector used for stand alone device, the CHRocodile MPS need to be connected to other interfaces to be integrated into complex measurement configuration systems. The other possible interfaces are described hereafter: - The USB port (Serial interface RS232), - The Sub-D15 female connector (Trigger Input/Output and Serial interface RS422), - And the Sub-D26 male connector (Encoder-input), Encoder-input The incremental encoder-input makes it possible to precisely assign each measurement points along the line and axis positions without additional hardware. The CHRocodile MPS can manage with 5-axis Encoders. For an exact distance or thickness measurement it is necessary for every measurement value to be assigned to the exactly correct spatial coordinates. This data must be recorded in the system and transferred to the evaluation processing unit over the internal interface. To accomplish this, the sensor is equipped with an encoder-interface. Default are the encoder inputs not terminated. Tye Sw0t02 to GND to terminate with 100 Ohm channel 0 to 2 Tye Sw3t04 to GND to terminate with 100 Ohm channel 3 to 4 If the encoder-signals are fed through the sensor and additional other devices are connected (e.g. for axis control), the 100 Ohm termination can also be deactivated. Since the device has to be opened to do this, you should contact Precitec Optronik before beginning any work of this kind. Trigger Input/Output The trigger options make the lighting cycle externally controllable and the synchronization between e.g. a scanning system and the CHRocodile MPS measurement rate. This means that external triggering is possible for every measurement up to the full measurement rate. The interface contains the connection points for the synchronization and RS422 serial communication. Serial interface RS232 and RS422 The serial RS232 and RS422 are interfaced on respectively the USB port and the Sub-D15 female connector. Serial communication are mostly used for configuring the sensor by sending command as a hyper-terminal. As the number of channel is high with a huge amount of data, serial communication port cannot support data transfer. 30 2.11 CHRocodile MPS Explorer and Drivers installations 2.11.1 CHRocodile MPS Explorer installation: CHRocodile MPS Explorer is not yet done. This Man-Machine interface will allow to configure, to visualize measurement, to update firmware, to load calibration table etc… 2.12 Communication with CHRocodile MPS There are three possible way to communicate with the CHRocodile MPS: via the CHRocodile MPS Explorer software, via the CHRocodile MPS DLL and using the ASCII commands sent to the CHRocodile MPS via serial interface (RS232 or RS 422) or Ethernet. Up to 3 CHRocodile MPS can be connected and controlled by a single computer (Windows XP, Windows 7 or Windows 8 OS, 32 and 64bits). CHRocodile MPS is automatically detected through Ethernet network (broadcast mode). 2.12.1 Via CHRocodile MPS Explorer: CHRocodile MPS Explorer software is delivered with the sensor and is useful to configure sensor, to visualize continuous measurements, to perform statistic and to save data, to upload firmware and DLL version. In order to configure the sensor using CHRocodile MPS explorer, one can use the basic sensor parameters menu or the expert menu: • Basic sensor parameters setting give access to Measuring Range (Optical Head selection), Measuring Mode (Altitude or Thickness measurement), Measuring Rate, LED intensity. • Expert command window is an advanced mode which allows to configure every sensors parameter by sending commands (Cf. paragraph 5.1 Command List). This advanced mode allows to do very specific configurations in order to fit with customer application. MPS Explorer is not yet available, however, software examples are provided pending the end of MPS Explorer development project beginning of January 2016. 2.12.2 Via CHRocodile MPS DLL: DLL may be used to interface the sensor with a general-purpose user program. The CHRocodile MPS DLL is intended for .NET compatible language. A CD containing the DLL, some code examples and the operating Manual is delivered with the CHRocodile MPS. Sensor configuration, processing and data transmission can be performed through CHRocodile MPS DLL. 31 The CHRocodile MPS DLL functions are described in section 5.4, and have the same properties as the ASCII Commands. Consequently, what can be done using ASCII commands can be done using the CHRocodile MPS DLL. 2.12.3 ASCII command communication The ASCII commands can be sent to the controller via the RS232 or RS422 interface using a specific command structure described on section 5.2. Serial interface communication can be used to configure the sensor, but cannot be used to receive measurement data, due to the high amount of data simultaneously transmitted by CHRocodile MPS. Only Ethernet allows unlimited data transmission at the maximum measuring rate. As an example, the Windows™ « Hyper Terminal »™ utility can be used to send the commands and configure the sensor via the RS232 or RS422 communication port. 32 Measurements Start Up 3.1 Calibration Table The CHRocodile MPS unit can store up to 5 different calibration tables per channel corresponding to different Optical Heads. In order to start measurement you need to download or select the calibration which correspond to the used Optical Head (Cf. section 5.2 in user manual). Calibration table consists in a Look Up Table which give the correspondence between the peak position (Barycenter data) and the Altitude data. The global calibration table contains 24 single calibration tables for each of the 24 channels of the CHRocodile MPS. Consequently, each channel are calibrated independently at factory. The calibration table depends on both spectrometer and optical head. Consequently a calibration table is specific to one set of CHRocodile MPS sensor (CHRocodile MPS unit + Optical Head), it can’t be used on another set even if you are using the same optical head type (i.e same measuring range). Fig 4-1: Example of calibration table for a single channel 3.2 Dark Acquisition Even when there is no surface in the probe’s measurement range, the signal on the detector is not zero. This non-zero values for each pixel on the detector is due to electronic dark and mostly to flare corresponding to unwanted back-reflected light on optical lenses surfaces. This Dark signal which limits the measurement dynamics of the sensor can be remove from the useful signal. 33 In order to eliminate the influence of this undesirable light, a dark reference is performed on the sensor (Cf command DRK in section 5). The Dark reference acquisition must be done when no object is in the measurement range. This procedure takes less than 1 second. 3.3 Mechanical interfacing Mechanical interface depends on the optical head that you are using. The optical head is held by its diameter. The mechanical drawing of each single point optical head are at section 5-1. 3.4 Basic Settings Configuration In order the CHRocodile MPS to be operational for startup some basic parameters should be set up. Basic setting configuration consists in selection of: • Measuring Range: The CHRocodile MPS could accept 5 calibration tables, and each calibration table corresponds to a unique Optical Head. Consequently, depending on the Optical Head which is mounted on the CHRocodile MPS unit, the operator must select the right Measuring Range or Calibration Table. (Cf. command $TABL in section 5.2) • Measuring Mode: The CHRocodile MPS has two measuring mode: Altitude and Thickness measurement. Depending on the application, operator must select the right Measuring Mode. (Cf. command $MOD in section 5.2) • LED Intensity Level: The LED intensity Level can be adjusted from 0 to 100%. As for Measuring Rate, this adjustment essentially depends on object reflectivity. Adjust LED intensity in order to obtain a high signal intensity on the 24 channels of the CHRocodile MPS. The goal is to obtain the higher intensity without saturation. On homogeneous target, each channel’s intensity is mostly the same, this is not the case on inhomogeneous target and in that case, it is recommended to adjust intensity in order to obtain the maximum intensity close to saturation. In order to adjust LED intensity, use the LAI command or the equivalent DLL function (Cf. sections 5.2 and 5.4). • Measuring Rate: Instead of adjusting intensity, it is also possible to adjust the measuring rate. The Measuring Rate is related to data transmission frequency. The higher the Measuring Rate is the lower the signal intensity is. Consequently, depending on the object reflectivity under measurement, the Measuring Rate (measuring frequency) must be adjusted in order to remove saturation or too low intensity signal. In order to adjust measuring frequency, use the SHZ command or the equivalent DLL function (Cf. sections 5.2 and 5.4). 34 3.5 Data measurement Training When mechanical interfacing is done, the object to be measured must be positioned inside the measuring range of the CHRocodile MPS. This procedure is valid for Altitude and Thickness mode, i.e. to perform topographic measurement on reflecting object or to perform thickness measurement on transparent object. Measuring Altitude procedure consists in: - Adjusting the axial position of the target in order the target is centered inside the optical sensor measuring range. To do this, one can move the optical head or the target along the optical axis. Thus, it is recommended to fix the optical head or the target on a translation plate. - Adjust the light spot position on the area to be measured. Target Translation plate Target Translation plate Fig 4-5: Axial position adjustment When the target is correctly positioned in front of the optical head and basic configuration is correctly set, it is possible to collect the required data using the SODX command or the equivalent DLL function (Cf. sections 5.2 and 5.4). In order to record the data corresponding to the 24 channels of the CHRocodile MPS sensor, the Ethernet cable must be connected with the right IP address to enable the communication between CHRocodile MPS and the computer. As the sensor is configured to measure simultaneously the 24 channel’s data, then it is possible to perform an area scan: 35 - In order to scan the target, one can move the optical head or the target along the axis which is perpendicular to the measuring line. Thus, a translation system is required. The Altitude or Thickness data is recorded during the scan. In order to synchronized the data acquisition with the moving session, one need to connect the trigger in/out to the translation system. The command TRG, enables an exact alignment of the sensors sampling intervals with the movement of a scanning axis. - However, if scan velocity is not constant, the pitch between each recorded line is not constant and the global topography will be distorted. To overcome this image deformation it is important to assign precisely each measurement points along the line and axis positions. To do so, one need to connect the incremental encoder-input. The CHRocodile MPS can manage with 5-axis Encoders. 36 Advanced Configuration 4.1 Commands List command arguments comments Continue (Measuring) CTN( ) “Dark n: Index of the lowest measuring take dark reference and save to flash rate x: lowest frequency in Hz, floating point DRK DNLD answer on query <1..3> - <0..4> [<0..3>] encoder position < -2147483648 .. 4294967295, ?> reference” Download spectrum. Currently for packet connections only. “Encoder $ENC Position“ : -index of axis -optional: -position (treated modulo 2^32) Function Defined functions: ENC • 0: Set / Read Pos. • 1: set count source (0..9: A0, B0, A1, B1, …; 10: SyncIn; 11..14: n.a., 15: Quardr.) • 2: set preload value • 3: set preload event - Query currently supported for position only. ETR IPCN see detailed description <0,1>, [eight numbers <0..255>] <0…100, ?> <1..16> <1..16> LAI NOP “Encoder Trigger“, see detailed description Configure TCP address and subnet mask. 1st arg: DHCP on/off, args 2.5: fixed IP addr. args 6..9: mask (only if DHCP off, i.e. 1st arg = 0) “Lamp intensity” LED version: set on-time of LED between 1-100% of the exposure time. Set number of peaks to evaluate. WARNING: see detailed description below. SCA - - distance or thickness value [μm] for output value 32768 37 <0 .. 15, ?> SEN SHZ SODX SSU <0..17> <0..17> <0..17> <0..17> … <0..17> (max 16 “Set output data extended” definition of the output telegram … <0..17> times) by enumeration of the indices of the data. (max 16 times) or > - - - - - Start serial data output. Stop serial data output This mode will be stored in the EEPROM when executing the SSU command, so on the next power up the CHR will not begin to send measurement data until the output is restarted by the “STA” command STO
Upload table to device (or read back in case of '?'). See below for details. <0..4094, ?> - - - - THR TRG VER “Save Setup”, saves Setup Parameters to Eeprom Memory This mode will be stored in the Eeprom when executing the SSU command. If stored the CHR will begin immediately to output data telegrams on the next power up. - TRE probe“ <30 ..10000, ?> Hz “Set sample rate in Hz”. x meaning the exact sample rate in Hz in floating point format STA TABL „optical index of used optical probe 3141 WHT „threshold“ threshold for peak detection in the confocal modes (0 and 1) “Trigger Each” – Mode ”Wait For Trigger” Stops the sensor after completion of the current data telegram and puts it in a waiting state. output version data Int. ok![CR/LF] White Reference or Int. too weak![CR/LF] or Int. too high![CR/LF] Table 5.1: Commands list Additionally to this list, CRA command allows to select the number of used channels. Examples: CRA0 24 allows to measure with channels 0 to 23. (24 channels are enables starting from channel 0) CRA0 12 allows to measure with channels 0 to 11. (12 channels are enables starting from channel 0) CRA4 8 allows to measure with channels 4 to 11. (8 channels are enables starting from channel 4). 38 4.2 Detailed Commands Description 4.2.1 DNLD Command Short description: Clients use this command to request a spectrum from the device. Since acquiring spectra can take up several sample periods, a DNLD request from the client causes the device to first respond with a DNLD response that does not contain any spectrum data. It just acknowledges the request. Later, when the spectrum is available, the device sends one or more command packets (“update” packet) containing the real spectrum data. Data packets may arrive in the meantime, i. e. between the response and the spectrum. Update packets are structured exactly like command (response) packets, only with the “update” flag set. Currently, DNLD command does not function for ASCII command connections. 4.2.2 ETR Command This command groups several functions related to encoder triggering. WARNING: The settings will not be saved in the EEPROM by the $SSU command. The encoder trigger is implemented as a state machine. In the idle state, it waits for the encoder counter of the selected axis to pass the start position (in either direction) where it generates the first trigger event. Then the trigger interval value is added to the current position and when this position is reached, the next trigger event is generated. This step is repeated until the stop position is encountered. The generation of trigger events is now stopped. If Triggering during return movement is selected, the state machine waits for the stop position to be passed once again and generates trigger events similarly to the forward movement (the trigger interval is now subtracted instead of added) until the start position is reached. The state machine then goes back to the idle state. If no Trigger during return movement is selected, the state machine waits for the start position to be passed over (during return movement) and then passes to the idle state. 39 4.2.3 IPCN Command Short description: This command allows to configure TCP/IP address and subnet mask. Command syntax: $IPCN Command Description $IPCN 1 Configured as DHCP client NET Client.Network.DhcpMode = true; $IPCN 0 192 168 170 2 255 255 255 0 0 Configured as static IP address $IPCN IP Address = 192.168.170.2 Client.Network.DhcpMode = false; Client.Network.IPAdress = "192.168.170.2"; Client.Network.SubnetMask = "255.255.255.0"; $IPCN Subnet Mask = 255.255.255.0 MTU = 0 (no jumbo packets) MTU argument gives the maximum transferable unit which can be anything between 1500 and 9000 bytes per TCP packet (jumbo packets). 40 4.2.4 LAI Command Short description: This command allows to adjust LED intensity in order i.e. to remove saturation. Command syntax: $LAI Param: is Led intensity (0...100%) Command Description $LAI 95 Write Led intensity 95% NET Client.LedIntensity = 90; Read Led Intensity float Led = Client.LedIntensity; Response: $LAI 95[CR]ready[CR/LF]. $LAI ? Response: $LAI ? 95ready[CR/LF]. 41 4.2.5 NOP Command Short description: This command allows to set the number of peak to evaluate. WARNING: In confocal mode, if less than NOP peeks are detected, all thicknesses signals will be invalidated because peek identification is not possible. Command syntax: $NOP Param: is Number of Peak from 1 to 16 Command Description $NOP 3 Write Number of Peak (3) NET Client.NumberOfPeaks = 3; Read Number of Peak int Number = Client.NumberOfPeaks; Response: $NOP 3[CR]ready[CR/LF]. $NOP ? Response: $NOP ? 3ready[CR/LF]. 42 4.2.6 SCA Command Short description: The command Scale allows to query of Full Scale in micrometers. A distance value of 32768 on the serial interface would mean a distance in (Full Scale) micrometers. To convert the integer distance value (d) received from the serial interface to a value in micrometers (D), use the formula: D[μm] = d[integer] / 32768 * Full Scale. Command syntax: $SCA Command Description $SCA ? Read Full Scale Response: $SCA ? NET int FullScale = client.Scale; 3320ready[CR/LF]. 43 4.2.7 SHZ Command Short description: The command SHZ set sample rate in Hz It is possible with this command to realize any sample rates between 30Hz and up to the maximum rate of CHRocodile MPS. If the value is not accepted, the sensor responds with the string "not valid". Due to the nature of the internal time base, not every sample rate can be realized exactly. In order to give the user the possibility to know the exact frequency, to which the sample rate has been "rounded", the frequency can be queried with "?" and will be returned as ASCII floating point number with 6 decimals. Command syntax: $SHZ Param: is sample rate (ie: 4500Hz) Command Description $SHZ 1000 Write Sample Rate (1000 Hz) NET Client.FreeSampleRate = 1000; Read Sample Rate float SampleRate = Client.FreeSampleRate; Response: $SHZ 1000[CR]ready[CR/LF]. $SHZ ? Response: $SHZ ? 1000ready[CR/LF]. 44 4.2.8 SODX Command Short description: Select Output Data (extended) SODX directly selects the data words that will be included in the output For example SODX 83, 16640, 16641 will output the sample counter, the distance and the intensity. telegram by specifying their indices. Command syntax: $SODX [A0] [A1]…[AN] [Ax] is optional parameters Signal ID's scheme 420 8 420 440 110 440 450 150 450 Table 5.4: SODX command: Signal Identity’s scheme. 45 Global Exposure Information: Definition: Bit 8 = 0 (Bit 8 to 15 = 0) Type: Float Command Description $SODX 64 StartTime (in nanoseconds) sodx.GlobalSignalStartTime = true; (Acquisition Format : UInt32) StartPositionX(X encoder position on beginning of exposure) sodx.GlobalSignalStartPositionX = true; (Acquisition Format : UInt32) StartPositionY(Y encoder position on beginning of exposure) sodx.GlobalSignalStartPositionY = true; (Acquisition Format : UInt32) StartPositionZ(Z encoder position on beginning of exposure) sodx.GlobalSignalStartPositionZ = true; (Acquisition Format : UInt32) StartPositionU(U encoder position on beginning of exposure) sodx.GlobalSignalStartPositionU = true; (Acquisition Format : UInt32) StartPositionV(V encoder position on beginning of exposure) sodx.GlobalSignalStopPositionV = true; (Acquisition Format : UInt32) StopPositionX(X encoder position on end of exposure) sodx.GlobalSignalStopPositionX = true; (Acquisition Format : UInt32) StopPositionY(Y encoder position on end of exposure) sodx.GlobalSignalStopPositionY = true; (Acquisition Format : UInt32) Response: $SODX 64[CR]ready[CR/LF]. $SODX 65 Response: $SODX 65[CR]ready[CR/LF]. $SODX 66 Response: $SODX 66[CR]ready[CR/LF]. $SODX 67 Response: $SODX 67[CR]ready[CR/LF]. $SODX 68 Response: $SODX 68[CR]ready[CR/LF]. $SODX 69 Response: $SODX 69[CR]ready[CR/LF]. $SODX 70 Response: $SODX 70[CR]ready[CR/LF]. $SODX 71 Response: $SODX 71[CR]ready[CR/LF]. NET 46 StopPositionZ(Z encoder position on end of exposure) sodx.GlobalSignalStopPositionZ = true; (Acquisition Format : UInt32) StopPositionU(U encoder position on end of exposure) sodx.GlobalSignalStopPositionU = true; (Acquisition Format : UInt32) Response: $SODX 74[CR]ready[CR/LF]. StopPositionV(V encoder position on end of exposure) sodx.GlobalSignalStopPositionV = true; (Acquisition Format : UInt32) $SODX 75 FirstExposureCount sodx.GlobalSignalFirstExposureCount = true ; (Acquisition Format : UInt16) ExposureFlags sodx.GlobalSignalExposureFlags = true; (Acquisition Format : UInt16) RealExpTimeNs(Effective exposure period in nanoseconds) sodx.GlobalSignalRealExposureTime = true ; (Acquisition Format : UInt32) RealLightingTimeNs(Effective lighting period in nanoseconds) sodx.GlobalSignalRealLightningTime = true; (Acquisition Format : UInt32) TriggerLostCounter (Accumulates trigger events that have occurred during exposure and therefore have been ignored. NumberOfValidPeaks (Number of peaks that have been found in the spectrum) SampleCounter sodx.GlobalSignalTriggerLostCount = true ; (Acquisition Format : UInt16) $SODX 72 Response: $SODX 72[CR]ready[CR/LF]. $SODX 73 Response: $SODX 73[CR]ready[CR/LF]. $SODX 74 Response: $SODX 75[CR]ready[CR/LF]. $SODX 76 Response: $SODX 76[CR]ready[CR/LF]. $SODX 77 Response: $SODX 77[CR]ready[CR/LF]. $SODX 78 Response: $SODX 78[CR]ready[CR/LF]. $SODX 79 Response: $SODX 79[CR]ready[CR/LF]. $SODX 80 Response: $SODX 80[CR]ready[CR/LF]. $SODX 83 Response: $SODX 83[CR]ready[CR/LF]. sodx.GlobalSignalNumberOfValidPeaks = true; (Acquisition Format : UInt16) sodx.GlobalSignalSampleCounter = true ; (Acquisition Format : UInt32) 47 Peak Signal: Definition: Bit 8 = 1 (Bit 8 and 14 = 1) Type: For geometrical quantities like thickness or distance Integer 16bit, scaled as fraction of measurement range, without refractive index (optical thickness) Distance and thickness values are given as: d[μm] = value * $SCA[μm] / 32768. In order to get the geometrical thickness, the value has to be multiplied by the index of refraction of the material. For non-geometrical quantities (like intensity) Truncated 16bit integer value 13 0 0 0 0 1 1 12 0 0 1 1 0 0 11 0 1 0 1 0 1 BIT 15 14 Peak Signal 0 1 13 12 11 Statistics 10 0 9 Measuring Mode Statistics Average Std. Deviation Number of valid values Minimum Maximum Peak-to-peak difference (max-min) Statistics are not supported by MPS. Statistics will be supported by MPS explorer. Consequently the respective bit 11 to 13 are set to 0. Corresponding to .NET function: 8 7 6 5 1 0 0 0 4 0 0 1 1 9 1 0 0 0 0 0 0 2 X 0 0 0 0 1 1 1 X 0 0 1 1 0 0 4 3 Peak Number 3 0 1 0 1 2 1 0 Peak Signal Offset Peak Number 1st peak 2nd peak 3rd peak 4th peak 0 Measuring Mode Peak Signal Offset X Thickness 0 Altitude 1 Intensity (%) 0 Intensity Level 1 Barycenter 0 Peak Value Median 1 Peak Width sodx.AltitudePeakSignalOffset1 = eSodxPeakSignalOffset.Average; See Following Example 48 Example: Command Description $SODX 28840 Altitude, 2nd peak Response: $SODX 28840[CR]ready[CR/LF]. NET sodx.Altitude = true; sodx.AltitudePeak2 = true; sodx.AltitudePeakSignalOffset1 = eSodxPeakSignalOffset.Average; 49 Additional information: Peak Signal Offset (Bits 0 to 2) Signal ID Offset Signal Name Remarks 0 Peak Value Scaled peak distance 1 PeakIntensity Intensity of peak 2 CCDSaturation max. CCD illumination of related spectrum 3 PeakPos CCD pixel pos 4 PeakValue Median median of peak value (CHRocodile 2 only) 5 PeakWidth confocal mode only: given in CCD pixels 6 reserved 7 reserved Peak Number (Bits 3 and 4) Bits 3 and 4 are used to define the Peak Number which will be processed to calculate the demanded data. The following quantities are available: 50 Measuring Mode (Bit 9) Thickness: If bit 9 is set to 1, then the resulting value is thickness corresponding to the difference of the peak as defined in bits 3 and 4 and the next peak. This facility is used to request thicknesses directly. NOTE This difference value is not corrected for the index of refraction. Consequently, in order to obtain the real thickness data, one must divide the result by the refractive index. Altitude: If bit 9 is set to 0, then the resulting value is the Altitude corresponding to the peak number defined in bits 3 and 4. Statistics (Bit 11 to 13) Statistics are not supported by MPS. Statistics will be supported by MPS explorer. Consequently the respective bit 11 to 13 are set to 0. Corresponding to .NET function: sodx.AltitudePeakSignalOffset1 = eSodxPeakSignalOffset.Average; 51 4.2.9 SSU Command Short description: The command SSU saves Setup Saves current setup to non-volatile memory (EEPROM). The Setup will be restored upon next power up. Command syntax: $SSU Command Description $SSU Saves current setup NET Client.SaveSetup(); Response: $SSU [CR]ready[CR/LF]. 52 4.2.10 STA Command Short description: The command STA starts serial data output This mode can be stored in the EEPROM. If stored, the CHRocodile MPS will begin immediately to output data telegrams on the next power-up Command syntax: $STA Command Description $STA Starts serial data output NET Response: $STA [CR]ready[CR/LF]. 53 4.2.11 STO Command Short description: The command STO stops serial data output This mode can be stored in the EEPROM, so on the next power up the CHRocodile MPS will not begin to send measurement data until the output is restarted by the "STA" command. Command syntax: $STO Command Description $STO Stops serial data output NET Response: $STO [CR]ready[CR/LF]. 54 4.2.12 THR Command Short description: The command THR lets you specify an intensity threshold for the distance detection. It may be useful to specify a high threshold to reject all noise spikes during a measurement or to specify a low threshold to get a (noisy) result from very black surfaces. When the signal is below the threshold, 0 is output for distance and intensity. The threshold is in arbitrary units which may be subject to change in future software versions. At faster sample rates, lower settings for threshold can be used than at slower sampling rates. The reason is, that at slower sampling rates, the stray light of fiber and coupler is integrated longer on the detector. Even though this signal is automatically subtracted as "dark reference", the statistical variations of this signal are stronger, the higher the dark signal becomes. If a typical value for good noise suppression and maximum sensitivity at 2kHz sampling rate could be 20, at 100Hz 50 would be needed. If the sensor doesn’t detect a signal which passes the threshold, 0 is output for distance and intensity. Command syntax: $THR Param: is intensity threshold Command Description $THR 35 Write Intensity Threshold NET client.Threshold = 35; Read Intensity Threshold float Thr = client.Threshold; Response: $THR 35[CR]ready[CR/LF]. $THR ? Response: $THR ? 35ready[CR/LF]. 55 4.2.13 TRE Command Short description: The command TRE is a Trigger each. Trigger each mode. Every exposure will be started by a rising edge of the sync-in-input. The exposure time of the detector is determined by the selected sample rate ($SHZ). Command syntax: $TRE Command Description $TRE Trigger each NET client.TriggerEach(); Response: $TRE[CR]ready[CR/LF]. 56 4.2.14 TRG Command Short description: The command TRG is a Wait For Trigger. The command enables an exact alignment of the sensors sampling intervals with the movement of a scanning axis. It stops the sensor after completion of the current data telegram and puts it in a waiting state. This state is left by a trigger event (rising edge on the Sync in, Encoder Trigger). Command syntax: $TRG Command Description $TRG Wait For Trigger NET client.TriggerStartStop(); Response: $TRG[CR]ready[CR/LF]. 57 4.2.15 VER Command Short description: The command VER give the Version of CHRocodile MPS. The command sends back an ASCII string which gives information on the serial number of the CHRocodile MPS (SN: ...), the DSP software (DSPsoft: ...) and the microcontroller software (C: ...). Command syntax: $VER Command Description $VER Read Versions NET string versions = client.Version; Response:$VER 73;C:V5.95/240909; DSPsoft:V5.95/160909ready[CR/LF] 4.2.16 Calibration Table Download Function It is also possible to upload calibration tables using the MPS Explorer (Cf. section 3.2.1). For information MPS Explorer is not yet available. Consequently the calibration table uploading is done at PRECITEC OPTRONIC site. 58 Mechanical plans 5.1 Optical Head Mechanical plans Fig 6-1-a: 100µm probe Fig 6-1-b: 300µm probe Fig 6-1-c: 350µm probe 59 Fig 6-1-c: 350μm probe Fig 6-1-d: 400μm probe Fig 6-1-e: 600μm probe Fig 6-1-f: 1mm probe 60 Fig 6-1-g: 2mm probe Fig 6-1-h: 2mm probe Fig 6-1-i: 3mm probe 61 Fig 6-1-j: 6mm probe Fig 6-1-k: 8mm probe Fig 6-1-l: 10mm probe 62 Fig 6-1-m: 12mm probe Fig 6-1-n: 15mm probe Fig 6-1-o: 25mm probe 63 5.2 CHRocodile MPS unit mechanical plans Fig 6-2: CHRocodile MPS controller mechanical plans: 64 Trouble Shooting 6.1 Power off: The Status LEDs are off when the power supply cable is connected: - Check the CHRocodile MPS Switch button is ON. - Check the power cordon. 6.2 Communication error: No possible Ethernet communication between MPS and your computer: - Check the Ethernet cable is plugged correctly in RJ45 sensor unit connector. - Check the IP configuration for your PC and the CHRocodile MPS unit (Cf. $IPCN command in section 5.2.2). - If you are using a switch, then try to connect directly from your LAN network to the sensor unit. - If possible, a Peer-to-Peer connection is recommended. 6.3 Distance Measurement: Case 1: The target is positioned in front of the sensor, and no distance measurement is collected for all channels. - Set the measuring frequency to minimum ($SHZ100 or equivalent DLL function). - Set the LED intensity to maximum ($LAI100 or equivalent DLL function). - Check if a white light line emitted from the optical head is focused on the target. - Check if the target is inside the measuring range of the used channels (up to 24 channels) (Cf. section 2.9.1). - Check if the target surface is normal to the optical head axis. The maximum angle between target surface and optical axis is given by the maximum measurable slope (Cf. section 2.9.1). - Check if the measuring mode is Distance mode. - Check if the distance is transmitted ($SODX 16640 or equivalent function), 65 - Then, check and store the raw signal (this file could be demanded by PRECITEC technical support team). The raw signal should show a peak for channels which contribute to the measurement. Case 2: The target is positioned in front of the sensor, and distance measurement is valid only for some channels: - Set the measuring frequency to minimum ($SHZ100 or equivalent DLL function). - Set the LED intensity to maximum ($LAI100 or equivalent DLL function). - Check if the sample topography variations along the line are fitting with optical head measuring range; i.e. - Peak to Valley altitude variation should be less than measuring range , - maximum local slope on target should be less than maximum measuring slope -, - target is not homogeneous and show high reflectivity variations along the line - - Set a mirror in place of your target and store the raw signal for each channels (this file could be demanded by PRECITEC technical support team). 6.4 Thickness measurement: Case 1: The target is positioned in front of the sensor, and no thickness measurement is collected for all channels. - Check that the target thickness is inside minimal and maximal measuring thickness range, - Check the target transparency, - Set the measuring frequency to minimum ($SHZ100 or equivalent DLL function). - Set the LED intensity to maximum ($LAI100 or equivalent DLL function). - Check if a white light line emitted from the optical head is focused on the target. - Check if the two surfaces of the target are inside the measuring range of the used channels (up to 24 channels) (Cf. section 2.9.1). - Check if the target surface is normal to the optical head axis. The maximum angle between target surface and optical axis is given by the maximum measurable slope (Cf. section 2.9.1). - Check if the measuring mode is Thickness mode. - Check if the Thickness is transmitted ($SODX 17152 or equivalent function), 66 - Then, check and store the raw signal (this file could be demanded by PRECITEC technical support team). The raw signal should show two peaks for channels which contribute to the measurement. Case 2: The target is positioned in front of the sensor, and thickness measurement is valid only for some channels: - Set the measuring frequency to minimum ($SHZ100 or equivalent DLL function). - Set the LED intensity to maximum ($LAI100 or equivalent DLL function). - Check if the sample thickness variations along the line are fitting with optical head measuring range; i.e. - Peak to Valley thickness variation should be inside minimal and maximal measuring thickness range -, - maximum local slope on both target surface should be less than maximum measuring slope -, - one or two target surface(s) are not homogeneous and show high reflectivity variations along the line - - Set a mirror in place of your target and store the raw signal for each channels (this file could be demanded by PRECITEC technical support team). If after reading the previous section you didn’t succeed in resolving your problem, please contact your vendor for technical support. In order to help to be more efficient, we recommend to fill the following technical support datasheet and if necessary prepare the files which are demanded in previous section. 67 Technical support Technical Support Date : CUSTOMER : PRECITEC Number: PRODUCT IDENTIFICATION Sensor Unit Serial Number : Optical Head Serial Number : Firmware Serial Number : PROBLEM IDENTIFICATION Type : Software Optic Mechanic Electronic Description : Photos: Attached files : Photos Raw data Diagnostic file 68
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