Publication D39712880 Edwards TIC Instruction Manual

User Manual:

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Page Count: 46

Contents
Illustrations
Tables
1 Introduction
- 1.1 Scope and definitions
- 1.2 Product description
2 Technical data
3 Installation
4 Operation
5 Maintenance
6 Storage and disposal
- 6.1 Storage
- 6.2 Disposal
7 Service, spares and accessories

D397-12-880

Issue L

Instruction Manual

Turbo Controller

Description Item Number

TIC Turbo Controller 100 W D397-11-000

TIC Turbo Controller 200 W D397-12-000

Original Instructions

This page has been intentionally left blank.

Declaration of Conformity

We, Edwards,

Innovation Drive,

Burgess Hill,

West Sussex,

RH15 9TW, UK

declare under our sole responsibility, as manufacturer and person within the EU authorised

to assemble the technical file, that the product(s)

TIC Instrument Controller D397-00-000

TIC Instrument Controller 6-Gauge D397-01-000

TIC Instrument Controller 6-Gauge Capacitance Manometer D397-02-000

TIC Turbo Controller 100W D397-11-000

TIC Turbo Controller 200W D397-12-000

TIC Turbo & Instrument Controller 100W D397-21-000

TIC Turbo & Instrument Controller 200W D397-22-000

to which this declaration relates is in conformity with the following standard(s) or other

normative document(s)

EN61010-1:2010 Safety Requirements for Electrical Equipment for

Measurement, Control and Laboratory Use – Part 1: General

Requirements

EN61326-1:2013 Electrical Equipment for Measurement Control and Laboratory

(Class B Emissions, Use – EMC Requirements. General requirements

Industrial Immunity)

CAN/CSA-C22.2 Safety requirements for electrical equipment for

No.61010-1-04 measurement, Control and laboratory use – Part 1: General

requirements

UL61010-1, 2nd Edition Safety requirements for electrical equipment for

measurement, Control and laboratory use – Part 1: General

requirements

and fulfils all the relevant provisions of

2014/35/EU Low Voltage Directive

2014/30/EU Electromagnetic Compatibility (EMC) Directive

2012/19/EU Waste from Electrical and Electronic Equipment (WEEE)

Directive

2011/65/EU Restriction of Certain Hazardous Substances (RoHS) Directive

Note: This declaration covers all product serial numbers from the date this Declaration was

signed onwards.

20.09.2016, Eastbourne

Larry Marini, Senior Technical Manager Date and Place

P200-03-140 Issue G

This product has been manufactured under a quality management system certified to ISO 9001:2008

P200-10-044

Issue A

Material Declaration

In accordance with the requirements of the Chinese regulatory requirement on the Management Methods for the

Restriction of the Use of Hazardous Substances in Electrical and Electronic Products Order No. 32 (also known as

‘China RoHS2’) and SJ/T 11364 Marking for the Restricted Use of Hazardous Substances in Electronic and Electrical

Products:

Product Product Label Meaning

D39700000 TIC Instrument Controller

D39701000 TIC Instrument Controller 6 Gauge

D39702000 TIC Instrument Controller 6 Gauge

Capacitance Manometer

D39711000 TIC Turbo Controller 100 W

D39712000 TIC Turbo Controller 200 W

D39721000 TIC Turbo and Instrument

Controller 100 W

D39722000 TIC Turbo and Instrument

Controller 200 W

This product contains hazardous substances in at

least one of the homogeneous materials used

which are above the limit requirement in GB/T

26572 as detailed in the declaration table below.

These parts can safely be used for the

environmental protection use period as

indicated.

材料成分声明

Materials Content Declaration

部件名称

Part name

有害物质

Hazardous Substances

铅

Lead

(Pb)

汞

Mercury

(Hg)

镉

Cadmium

(Cd)

六价铬

Hexavalent

Chromium

(Cr VI)

多溴联苯

Polybrominated

biphenyls (PBB)

多溴二苯醚

Polybrominated

diphenyl ethers

(PBDE)

印刷电路组件 (PCA)

Printed Circuit

Assembly (PCA)

X O X O O O

电缆/电线/连接器

Cable/wire/connector

X O O O O O

机械部件

Mechanical Components X O O O O O

O: 表示该有害物质在该部件的所有均质材料中的含量低于 GB/T 26572 标准规定的限量要求。

O: Indicates that the hazardous substance contained in all of the homogeneous materials for this part is

below the limit requirement in GB/T 26572.

X: 表示该有害物质在该部件的至少一种均质材料中的含量超出 GB/T26572 标准规定的限量要求。

X: Indicates that the hazardous substance contained in at least one of the homogeneous materials used for

this part is above the limit requirement of GB/T26572.

NOTE: These products are EU RoHS compliant, the following Exemptions apply:

6(b)

Lead

as an alloying element in aluminium containing up to 0.4% by weight

6(c) Copper alloy containing up to 4%

lead

by weight

7(a)

Lead

in in high melting temperature type solder (i.e. lead based alloys containing 85% by or more)

7(b)

Lead

in solders for servers, storage and storage array systems, network infrastructure equipment for switching, signalling,

transmission, and network management for telecommunications

7(c) I Electrical and electronic components containing

lead

in a glass or ceramic other than dielectric ceramic in capacitors, e.g.

piezoelectronic devices, or in a glass or ceramic matrix compound

7(c) II

Lead

in dielectric ceramic in capacitors for a rated voltage of 125 V AC or 250 V DC or higher

8(b)

Cadmium

and its compounds in electrical contacts

Lead

in solders to complete a viable electrical connection between semiconductor die and carrier within integrated circuit flip

chip packages

Lead

in cermet-based trimmer potentiometer elements

Edwards and the Edwards logo are trademarks of Edwards Limited.

Contents

D397-12-880 Issue L

Contents

Section Page

1 Introduction .......................................................................................1

1.1 Scope and definitions ................................................................................................... 1

1.2 Product description ...................................................................................................... 1

2 Technical data ....................................................................................3

2.1 Electrical data ............................................................................................................ 3

2.2 Operating and storage data ............................................................................................ 3

2.3 Mechanical data .......................................................................................................... 3

2.4 Connections ............................................................................................................... 4

2.4.1 Turbo pump connector .................................................................................................. 4

2.4.2 Backing pump connector ............................................................................................... 5

2.4.3 Auxiliary terminals ...................................................................................................... 6

2.4.4 Logic interface ...........................................................................................................7

2.4.5 Serial communications .................................................................................................. 8

3 Installation .........................................................................................9

3.1 Unpack and inspect ...................................................................................................... 9

3.2 Fitting the controller .................................................................................................... 9

3.3 Controller electrical connections ....................................................................................12

3.3.1 Connecting the electrical supply .....................................................................................12

3.3.2 Additional earth bonding ..............................................................................................12

3.3.3 Connecting a turbo pump ..............................................................................................13

3.3.4 Connecting a backing pump ...........................................................................................13

3.3.5 Connecting a vent valve ...............................................................................................13

3.3.6 Connecting an air cooler ...............................................................................................13

3.3.7 Connecting the logic interface .......................................................................................13

3.3.8 Connecting the serial interface .......................................................................................15

4 Operation ........................................................................................ 17

4.1 Front panel description ................................................................................................17

4.2 Menu structure ..........................................................................................................18

4.3 Navigating the menu ...................................................................................................20

4.4 The view screen .........................................................................................................20

4.5 Turning pumps and relays on/off .....................................................................................20

4.6 Changing list items .....................................................................................................21

4.7 Changing numerical values ............................................................................................21

4.8 Turbo setup ..............................................................................................................21

4.8.1 Introduction .............................................................................................................21

4.8.2 Default turbo setup options ...........................................................................................22

4.8.3 Additional setup options using a DX or nEXT pump ................................................................23

4.9 Backing setup ............................................................................................................25

4.10 Alarms ....................................................................................................................26

4.11 The main menu ..........................................................................................................26

4.12 Turbo status .............................................................................................................26

4.13 Backing status ...........................................................................................................27

4.14 Parameters/units .......................................................................................................28

4.15 Relay setpoint outputs .................................................................................................28

4.16 Service information .....................................................................................................28

4.17 Electrical supply failure ...............................................................................................29

mv/06/14

D397-12-880 Issue L

Edwards and the Edwards logo are trademarks of Edwards Limited.

Contents

5 Maintenance ..................................................................................... 31

5.1 Safety .....................................................................................................................31

5.2 Fault finding .............................................................................................................31

5.3 Cleaning the controller ................................................................................................31

5.4 Software updates .......................................................................................................32

5.5 Factory defaults .........................................................................................................32

6 Storage and disposal ........................................................................... 33

6.1 Storage ...................................................................................................................33

6.2 Disposal ...................................................................................................................33

7 Service, spares and accessories .............................................................. 35

7.1 Introduction .............................................................................................................35

7.2 Service ....................................................................................................................35

7.3 Spares .....................................................................................................................35

7.4 Accessories ...............................................................................................................35

For return of equipment, complete the HS Forms at the end of this manual.

Illustrations

Figure Page

1 Pin connections for a 15-way sub-miniature ‘D’ type socket ..................................................... 4

2 Pin connections for a 15-way sub-miniature ‘D’ type socket ..................................................... 5

3 4-way screw terminal block ............................................................................................ 6

4 Pin connections for a 25-way sub-miniature ‘D’ type socket ..................................................... 7

5 Pin connections for a 9-way sub-miniature ‘D’ type socket ...................................................... 8

6 Bench mounted TIC dimensions (mm) ...............................................................................10

7 Front panel removal ....................................................................................................10

8 Rack mounting of a TIC ................................................................................................11

9 Panel cutout drawing ..................................................................................................11

10 Rear panel connections ................................................................................................12

11 IBM PC RS232 interface - 9-way ......................................................................................15

12 IBM PC RS232 interface - 25-way .....................................................................................16

13 RS485 TIC network ......................................................................................................16

14 Front panel display .....................................................................................................17

15 View screen shortcuts ..................................................................................................18

16 Menu structure ..........................................................................................................19

17 Pump status ..............................................................................................................20

18 Changing numerical values ............................................................................................21

19 Turbo setup screen .....................................................................................................22

Edwards and the Edwards logo are trademarks of Edwards Limited.

Contents

D397-12-880 Issue L

Tables

Table Page

1 Compatible equipment for the TIC range ............................................................................ 2

2 Turbo pump connector pin-out ........................................................................................ 4

3 Backing pump connector pin-out ...................................................................................... 6

4 Auxiliary connector pin-out ............................................................................................ 7

5 Logic interface connector pin-out .................................................................................... 7

6 Serial communications connector pin-out ........................................................................... 8

7 Checklist of components ................................................................................................ 9

8 Front panel symbols and their functions ............................................................................17

9 Default turbo setup options ...........................................................................................22

10 Error/diagnostic monitoring, pumps .................................................................................23

11 Turbo pump vent setup differences .................................................................................23

12 Turbo pump vent options ..............................................................................................24

13 Turbo pump vent type .................................................................................................24

14 DX, nEXT and nXDS pump setup options .............................................................................24

15 Error/diagnostic monitoring, DX, nEXT and nXDS pumps .........................................................24

16 Default Backing setup options ........................................................................................25

17 nXDS pump setup options ..............................................................................................25

18 nEXT Service Screen ....................................................................................................26

19 nEXT Service Reset Screen ............................................................................................27

20 nXDS Service Screen ....................................................................................................27

21 nXDS Service Reset Screen ............................................................................................28

22 Fault finding .............................................................................................................31

23 Factory default settings ...............................................................................................32

24 Accessories ...............................................................................................................35

This page has been intentionally left blank.

D397-12-880 Issue L

Edwards and the Edwards logo are trademarks of Edwards Limited.

Introduction

D397-12-880 Issue L

1Introduction

1.1 Scope and definitions

This manual provides Installation, Operation and Maintenance instructions for the Edwards Turbo Controller. The

controller must be used as specified in this manual. Read this manual before installing and operating the controller.

Important safety information is highlighted as WARNING and CAUTION instructions; these instructions must be

obeyed. The use of WARNINGS and CAUTIONS is defined below.

CAUTION

Cautions are given where failure to observe the instruction could result in damage to the equipment, associated

equipment and process.

The units used throughout this manual conform to the SI international system of units of measurement.

The following warning labels are on the controller:

1.2 Product description

There are two variants of the Turbo Controller, both of which are provided with a large clear graphics display, easy-

to-use control interface via a touch sensitive keypad, an RS232/485 interface for control and data monitoring on a

remote PC and a logic interface for interface with associated system hardware.

The compatible pumps/accessories that can be used with the Turbo Controller are listed in Table 1.

WARNING

Warnings are given where failure to observe the instruction could result in injury or death to

people.

Warning - refer to accompanying documentation.

Edwards offer European customers a recycling service.

WARNING

Improper use of the equipment could cause damage to it or injury to people. The user is

responsible for the safe operation and monitoring of the equipment. Hazardous voltages should not

be connected to this unit except where specified.

D397-12-880 Issue L

Edwards and the Edwards logo are trademarks of Edwards Limited.

Introduction

Table 1 - Compatible equipment for the TIC range

TIC variant Compatibility

TIC Turbo Controller 100 W EXT75DX - fast ramp

EXT255DX - slow ramp

nEXT240/300/400 family - slow ramp

nEXT85 family - fast ramp

EXT70H + EXDC80 - fast ramp

EXT255H + EXDC80 - slow ramp

Mains backing pumps, XDS scroll, up to RV12 (via an

optional relay box)

Air Cooler, ACX70 and ACX250

Vent Valve, TAV5 and TAV6

Bakeout band (via an optional relay box)

24 V backing line valves, LCPV16EKA and LCPV25EKA (via

an optional relay box)

TIC Turbo Controller 200 W Same as the 100 W version plus the following:

24 V backing pump

EXT255H + EXDC160 - fast ramp

EXT255DX - fast ramp

nEXT family - fast ramp

Edwards and the Edwards logo are trademarks of Edwards Limited.

Technical data

D397-12-880 Issue L

2Technical data

2.1 Electrical data

2.2 Operating and storage data

2.3 Mechanical data

Connector type CEE/IEC 320

Electrical supply 100 - 240 V a.c. 50/60 Hz

Power consumption

TIC Turbo Controller 100 W 215 VA maximum (D397-11-000)

TIC Turbo Controller 200 W 350 VA maximum (D397-12-000)

Peak inrush current

11 A at 110 V a.c

23 A at 240 V a.c D397-11-000

D397-12-000

Fuse The unit is self-protecting and has no user-replaceable fuse.

The unit will recover once any overload is removed.

Overvoltage category 2

Earth Stud M4

Ambient operating temperature range 0 °C to 40 °C

Ambient storage temperature range -30 °C to 70 °C

Maximum ambient operating humidity Max 90% RH non condensing at 40 °C

Maximum operating altitude 3000 m max

IP rating 20

Pollution degree 2

Indoor use only

Weight

TIC Turbo Controller 100 W 1.8 kg

TIC Turbo Controller 200 W 1.9 kg

D397-12-880 Issue L

Edwards and the Edwards logo are trademarks of Edwards Limited.

Technical data

2.4 Connections

2.4.1 Turbo pump connector

Figure 1 - Pin connections for a 15-way sub-miniature ‘D’ type socket

Connector type 15-way sub-miniature ‘D’ type socket (refer to Figure 1)

Power supply 24 V d.c.

Maximum output power

100 W TIC 80 W continuous, 120 W peak

200 W TIC 160 W continuous, 240 W peak (combined total power of the

24 V turbo and backing pumps)

Input voltage range -0.5 V to 15 V

Output ID current 33 µA, 0 V to 13 V

Control output

active <1.1 V d.c. (Iout 20 mA max)

<0.8 V d.c. (Iout <2 mA)

inactive open (<24 V d.c. externally applied)

Control input

low <4.0 V d.c. (Iout<160 µA)

high 7.0 V to 24 V d.c. (internally pulled up to 24 V)

RS232 transmit

disabled open

enabled 0: > +8 V (Iout max: 8 mA)

1: < -8 V (Iout max: -8 mA)

RS232 receive

mark <4.0 V d.c. (Iout < 160 µA)

space 7.0 V to 24 V d.c. (internal pull up to 24 V)

Maximum cable length 7 m

Table 2 - Turbo pump connector pin-out

Pin Allocation

1 Power supply positive

2 Signal common

3 /Start signal output

4RS232 Tx

5 /Serial enable output

6 Power supply positive

7RS232 Rx

8Power supply common

9 Speed signal input

Edwards and the Edwards logo are trademarks of Edwards Limited.

Technical data

D397-12-880 Issue L

2.4.2 Backing pump connector

Note: Only applicable to the 200 W TIC

Figure 2 - Pin connections for a 15-way sub-miniature ‘D’ type socket

10 Screen

11 Power supply positive

12 Screen

13 Power supply common

14 Power supply common

15 Normal signal input

Connector type 15-way sub-miniature ‘D’ type socket (refer to Figure 2)

Power supply 24 V d.c.

Maximum output power 160 W continuous, 240 W peak (combined total power of the

24 V turbo and backing pumps)

Output voltage range

Stop 0 V

Start 10 V (5 mA maximum)

Output ID current 33 µA, 0 V to 13 V

Control output

active <1.1 V d.c. (Iout < 20 mA)

<0.8 V d.c. (Iout < 2 mA)

inactive open (<24 V d.c. externally applied)

Control input

low <4.0 V d.c. (Iout<160 µA)

high 7.0 to 24 V d.c. (internally pulled up to 24 V)

RS232 transmit

disabled open

enabled 0: > +8 V (Iout max: 8 mA)

1: < -8 V (Iout max: -8 mA)

RS232 receive

mark <4.0 V d.c. (Iout < 160 µA)

space 7.0 V to 24 V d.c. (internal pull up to 24 V)

Maximum cable length 7 m

Table 2 - Turbo pump connector pin-out (continued)

Pin Allocation

D397-12-880 Issue L

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Technical data

2.4.3 Auxiliary terminals

Figure 3 - 4-way screw terminal block

Table 3 - Backing pump connector pin-out

Pin Allocation

1 Power supply positive

2 Signal common

3 /Start signal output

4RS232 Tx

5 /Serial enable output

6 Power supply positive

7RS232 Rx

8Power supply common

9 Speed signal input

10 Screen

11 Power supply positive

12 Screen

13 Power supply common

14 Power supply common

15 Normal signal input

Connector type 4-way screw terminal block (refer to Figure 3)

Wire size 1.5 mm2 max

Power supply 24 V d.c.

Maximum output power

Fan 3 W max

Vent valve 2 W max

Control output

active <1.5 V d.c.

inactive open

Maximum cable length 10 m

Edwards and the Edwards logo are trademarks of Edwards Limited.

Technical data

D397-12-880 Issue L

2.4.4 Logic interface

Figure 4 - Pin connections for a 25-way sub-miniature ‘D’ type socket

Table 4 - Auxiliary connector pin-out

Pin Allocation

1 Fan control output

2Fan 24 V

3 Vent control output

4Vent 24 V

Connector type 25-way sub-miniature ‘D’ type socket (refer to Figure 4)

Power supply 24 V d.c.

Maximum output power 5 W

Control output

active <1.1 V d.c. (Iout < 20 mA)

<0.8 V d.c. (IIout < 2 mA)

inactive open

Control input

low <2.0 V d.c. (IIout<160 µA)

high 3.5 V to 24 V d.c. (internal pull up to 24 V)

Analogue output 0 to 10 V (5 mA max)

50 mV resolution

Table 5 - Logic interface connector pin-out

Pin Allocation

1Screen

2 Analogue output signal

3Setpoint 1 output

4 Vent control output

5 Bakeout band control output

6N/C

7Power supply common

8 Backing pump control output

9N/C

10 Power supply common

11 Power supply positive

12 Power supply common

13 Power supply common

14 Analogue output common

15 Setpoint 2 output

16 Setpoint 3 output

17 Turbo normal output

D397-12-880 Issue L

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Technical data

2.4.5 Serial communications

Figure 5 - Pin connections for a 9-way sub-miniature ‘D’ type socket

18 Alarm output

19 Air cooler output

20 N/C

21 N/C

22 Backing pump enable input

23 Turbo stand-by control input

24 Turbo pump enable input

25 System interlock input (SYSI)

Connector type 9-way sub-miniature ‘D’ type socket (refer to Figure 5)

RS232 transmit

mark < - 8 V (Iout max: -8 mA)

space > +8 V (Iout max: -8 mA)

RS232 receive

mark < +1.0 V (Iin max: -2.0 mA)

space >+2.0 V (Iin max: +2.0 mA)

maximum input ±12 V

RS232 protocol 9600 baud, 1 stop bit, 8 data bits, no parity

RS485

Output differential >1.5 V (Iout max:  25 mA)

Input differential threshold > 0.2 V (Iin max:  1 mA)

Maximum input -7.0 V to +12 V

Bus load The TIC applies one unit load to the RS485 bus.

Table 6 - Serial communications connector pin-out

Pin Allocation

1N/C

2RS232 transmit

3RS232 receive

4N/C

5RS232 common

6N/C

7N/C

8RS485 data A

9RS485 data B

Table 5 - Logic interface connector pin-out (continued)

Pin Allocation

Edwards and the Edwards logo are trademarks of Edwards Limited.

Installation

D397-12-880 Issue L

3 Installation

3.1 Unpack and inspect

Remove all of the packaging material and check the controller. If the controller is damaged, follow the Edwards

return of equipment procedures that are laid out in the back of this manual. Do not use the controller if it is damaged.

Check that the package contains the items that are listed in Table 7. If any of these items are missing, notify the

supplier in writing within three days. If the controller is not to be used immediately, store the controller in suitable

conditions as described in Section 6.1.

3.2 Fitting the controller

CAUTION

Rubber feet must be fitted (Figure 6, item 1) so that there are correct clearances for air circulation. If not, the

performance of the controller may be affected at high operating temperatures.

The controller can be used on a bench top or can be fitted in a rack or cabinet. Figure 6 shows the dimensions of the

TIC that are required for bench top use.

Note: If the interlocks are not used, the logic interface adaptor must be fitted to the 25-way connector.

Table 7 - Checklist of components

Quantity Description Check ()

1 Controller

1 Quick Guide and Health and Safety Information

1TIC CD

2 Rear non-slip feet

1 Logic interface plug

WARNING

If access to the IEC connector is restricted an additional isolation device should be provided, which

will be easily accessible by an operator.

D397-12-880 Issue L

Edwards and the Edwards logo are trademarks of Edwards Limited.

Installation

Figure 6 - Bench mounted TIC dimensions (mm)

If a controller is fitted in a rack, cabinet or panel, follow the directions given in Figure 7, 8 and 9.

CAUTION

Allow 150 mm at the rear for cables. Allow 50 mm top and bottom and 15 mm to the sides for sufficient air

circulation. Do not cover any of the ventilation holes.

CAUTION

This unit is IP20 rated. Please ensure that the unit is not installed where fluids can enter into the controller.

CAUTION

The unit must be supported at the rear.

Figure 7 - Front panel removal

WARNING

Ensure that all electrical wiring is safely secured so that people cannot trip on them.

1. Rubber foot

1. Bench top adaptor

2. Fixing screw and washer

Edwards and the Edwards logo are trademarks of Edwards Limited.

Installation

D397-12-880 Issue L

-Remove the bench top adaptor (Figure 7, item 1) by removing the four screws (Figure 7, item 2).

-Slide the controller into the 19" rack or panel cut out. The use of 19" rack guide rails (Figure 8, item 2) and

support at the rear of the controller is recommended as shown in Figure 8. The panel cut out information is

defined in Figure 9.

-Fix the controller in place using the four screws removed previously (Figure 8, item 1).

Figure 8 - Rack mounting of a TIC

Figure 9 - Panel cutout drawing

1. Fixing screw and washer

2. 19" rack guide rails

D397-12-880 Issue L

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Installation

3.3 Controller electrical connections

Figure 10 - Rear panel connections

3.3.1 Connecting the electrical supply

Ensure that the electrical supply switch is set to ‘off’ and then connect the controller to the electrical supply with

an appropriate supply cable.

3.3.2 Additional earth bonding

The electrical supply cable normally provides protective earthing for electrical safety. If this is not the case, or if

additional earth bonding is required, then the earth stud on the rear of the controller (Figure 10, item 5) should be

connected to the vacuum system earth.

The earth connection of any vent valves or air coolers should also be connected to this earth stud to ensure that they

are adequately earthed.

Connect a suitably earthed cable between the two nuts fitted to the earth stud on the rear of the TIC.

Note: Do not remove the bottom nut from the earth stud.

WARNING

High voltages exist in the controller when it is operating. Ensure that the controller is earthed and

observe all appropriate safety precautions for the safe installation and handling of electrical

equipment. If not, there will be a danger of injury or death to people by electric shock.

1. Backing pump (200 W only)

2. Turbo pump connection

3. Logic interface

4. Serial communications port

5. Earth stud

6. Mains input

7. Mains on/off

8. Auxiliary terminals

Edwards and the Edwards logo are trademarks of Edwards Limited.

Installation

D397-12-880 Issue L

3.3.3 Connecting a turbo pump

CAUTION

Pumps are not hot swap safe unless explicitly stated in their manual. Before connecting or disconnecting a pump

to the TIC turn the power off. Failure to do so may damage the pump.

The TIC will only identify the pump connected at power on.

A suitable turbo pump can be connected to the TIC turbo pump connector on the rear panel.

Connect the pump to the lower of the two 15 way ‘D’ connectors and tighten the locking screws to ensure the

connector cannot come loose.

3.3.4 Connecting a backing pump

Both the 100 W and 200 W TICs can control a mains backing pump via the logic interface. For details of this, refer to

Section 3.3.7.3.

The 200 W TIC can also drive a suitable backing pump from its second rear panel pump connector.

Connect the pump to the upper of the two 15 way ‘D’ connectors and tighten the locking screws to ensure the

connector cannot come loose.

Note: To control an XDD1 24 V backing pump, the pump must be configured for ‘analogue speed control’. Refer

to the pump instruction manual for details on how to configure the pump for this operating mode.

3.3.5 Connecting a vent valve

A vent valve can be driven from either the auxiliary terminals on the rear of the TIC, or from the logic interface. For

details of using the logic interface to control a vent valve, see Section 3.3.7.3.

Note: If a DX or nEXT pump is to be used, it is recommended that the vent valve is connected to the pump, not

the TIC Controller. If two vent valves are required, both the DX and TIC vent outputs can be used at the

same time. (Refer to Table 12).

Connect the positive lead of the vent valve to the terminal marked ‘Vent +’, connect the negative lead of the vent

valve to the terminal marked ‘Vent –’ and clamp the earth wire between the earth stud locking nuts on the rear of

the controller. Ensure the screws and the earth terminal locking nut are all firmly tightened.

3.3.6 Connecting an air cooler

An air cooler can be driven from either the auxiliary terminals on the rear of the TIC, or from the logic interface. For

details of using the logic interface to control an air cooler, refer to Section 3.3.7.3.

Connect the positive lead of the air cooler to the terminal marked ‘Fan +’, connect the negative lead of the air cooler

to the terminal marked ‘Fan –’ and clamp the earth wire between the earth stud locking nuts on the rear of the

controller. Ensure the screws and the earth terminal locking nut are all firmly tightened.

3.3.7 Connecting the logic interface

3.3.7.1 Introduction

Note: In most applications, it will be preferable not to earth the logic interface power supply common to prevent

earth loops inadvertently occurring.

CAUTION

Do not connect voltages greater than 24 V to the logic interface.

The logic interface provides a number of signals that can be used for monitoring the status of the vacuum system and

for controlling certain aspects of its operation. These signals can be broadly divided into three groups, control inputs,

control outputs and status outputs.

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Installation

3.3.7.2 Using control inputs

Control inputs provide a means of controlling the operation of the TIC and the associated vacuum system from

external sources.

Turbo Stand-by: To cause the turbo pump to run at stand-by speed, link ‘Turbo Stand-by’ to 0 V. To return the pump

to full speed, disconnect ‘Turbo Stand-by’ from 0 V. Note that only pumps having stand-by speed capability will

respond to this input.

Turbo Enable: The turbo enable input can be used to control the operation of the turbo pump. If turbo enable is open,

the turbo pump cannot be started and will stop if it is running. If turbo enable is connected to 0 V when power is

applied to the TIC, the pump is able to start when commanded to do so. If turbo enable is connected to 0 V while

the controller is operating, the turbo pump will start, as long as SYSI and the software configuration allow it to do so.

Backing Pump Enable: The backing pump enable input can be used to control the operation of the backing pump. If

backing pump enable is open, the backing pump cannot start and will stop if it is running. If backing pump enable is

connected to 0 V when power is applied to the TIC, the pump is able to start when commanded to do so. If backing

pump enable is connected to 0 V while the controller is operating, the backing pump will start, as long as ‘SYSI’ and

the software configuration allow it to do so.

SYSI: The System interlock input can be used to interlock the TIC to a system fail or control signal. When ‘SYSI’ is

open, all pumps will stop and the vent valve will be opened. The TIC will also trip into the fail condition. To clear

the system interlock and allow the pumps and gauges to start, connect ‘SYSI’ to 0 V.

3.3.7.3 Using control outputs

Control outputs provide a means for the TIC to control external resources.

Vent valve control: The vent valve output can be used to control the operation of a vent valve. The ‘Vent Valve’

signal will be driven low to energise the valve when required. Connect the positive lead of the vent valve to ‘24 V’

and the negative lead to ‘Vent Valve Control’. The vent valve earth lead must be connected to ‘Screen’ or a suitable

alternative earth point.

CAUTION

The vent valve output on the logic interface will not be maintained in the event of a power failure. If venting of

the turbo pump while it is running at high speed is undesirable, use the vent valve output from the auxiliary

terminals. This output will be maintained during a power failure.

Bakeout band control: The bakeout band control can be used to switch a relay that can apply power to the band. The

relay box has a relay built in for this purpose and provides connectors to allow power to be applied to the bakeout

band. Refer to the relay box instruction manual for further information on driving a bakeout band.

To drive a relay without a relay box, connect the coil of a suitable 24 V d.c. relay between ‘Bakeout Band Control

Output’ (negative) and ‘Power Supply Positive’ (positive).

Backing pump control: The backing pump control can be used to switch a relay that can apply power to a mains

backing pump. The relay box has a relay built in for this purpose and provides a connector that will switch the pump

on and off. Refer to the relay box instructions for further information on driving a backing pump.

To drive a relay without a relay box, connect the coil of a suitable 24 V d.c. relay between ‘Backing Pump Output’

(negative) and ‘Power Supply Positive’ (positive).

Air cooler: The air cooler output can be used to control the operation of an air cooler. The air cooler signal will be

driven low to energise the cooler when required. Connect the positive lead of the cooler to the power supply positive

and the negative lead to ‘Air Cooler Control’. The air cooler earth lead must be connected to ‘Screen’ or a suitable

alternative earth point.

WARNING

‘SYSI’ is not fail safe and should not be relied upon for safety critical applications.

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Installation

D397-12-880 Issue L

3.3.7.4 Using status outputs

Status outputs provide a means for external systems to react based upon the current state of the TIC.

Analogue output: The analogue output provides a 0 V to 10 V signal that can be configured to represent system

pressure, pump speed etc. Refer to Section 4.8 for how to configure this output.

To connect this output to an external system, connect the ‘Analogue Output Signal’ to the positive input of the

system and ‘Analogue Output Common’ to the negative side.

Relay setpoint: The setpoint outputs can be used to interface to external logic or can be used to drive relays. Each

output can be configured in software to activate at pump speed. Refer to Section 4.15 for how to configure these

outputs. Each relay can be manually controlled. Refer to Section 4.5.

The relay box has built-in relays that can switch external loads and provides a connector to interface to an external

system. Refer to the relay box instructions for further information on using the setpoint outputs.

To drive a relay without a relay box, connect the coil of a suitable 24 V d.c. relay between ‘Setpoint Output’

(negative) and ‘Power Supply Positive’ (positive).

Turbo normal speed: Turbo normal speed can be used to interface to external logic or can be used to drive a relay.

This output is normally inactive and will become active when the turbo pump has reached its defined ‘Normal’ speed.

To drive a relay, connect the coil of a suitable 24 V d.c. relay between ‘Turbo Normal Output’ (negative) and ‘Power

Supply Positive’ (positive).

Alarm: Alarm can be used to interface to external logic or can be used to drive a relay. This output is normally active

and will become inactive in the event of an alarm condition.

To drive a relay, connect the coil of a suitable 24 V d.c. relay between ‘Alarm Output’ (negative) and ‘Power Supply

Positive’ (positive).

3.3.8 Connecting the serial interface

The TIC has two serial communications protocols built in, RS232 and RS485. RS232 is the simplest interface and can

be used to allow a host PC to control the TIC. RS485 allows a host PC to control a small network of TICs.

3.3.8.1 Connecting RS232

The TIC is fitted with a 9-way ‘D’ type socket on the rear panel. The interface uses two lines for data transfers and

an additional line as a signal common. Hardware handshaking is not implemented.

If connecting to an IBM compatible PC fitted with a 9-way ‘D’ type socket then a ‘straight through’ male-female

9-way extension cable can be used to connect the TIC to the computer as shown in Figure 11. Connection to an IBM

PC fitted with a 25-way serial connector should be made as shown in Figure 12.

Use shielded cable for the interface to reduce interference problems and limit the length of the RS232 link to less

than 10 metres. For longer links, either install line drivers or use RS485.

Figure 11 - IBM PC RS232 interface - 9-way

D397-12-880 Issue L

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Installation

Figure 12 - IBM PC RS232 interface - 25-way

3.3.8.2 Connecting RS485

RS485 provides the TIC with the capability to be networked with other TICs and a host PC as shown in Figure 13.

CAUTION

All of the ground connections are tied together. If differences exist in the local ground voltage, damage could

occur. If the TICs being networked are liable to experience different ground potentials, a suitable RS485 isolator

should be connected between them.

Use shielded cable for the interface to reduce interference problems and limit the length of the RS485 link to less

than 1000 metres.

Long links may require the addition of 120  terminating resistors at each end of the link to improve communications

reliability.

Figure 13 - RS485 TIC network

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Operation

D397-12-880 Issue L

4 Operation

4.1 Front panel description

Figure 14 - Front panel display

Table 8 - Front panel symbols and their functions

Symbol Name Function

UP Move up through a menu.

Cycle selected numerical values up.

Cycle a selected list item upwards.

DOWN Move down through a menu.

Cycle selected numerical values down.

Cycle a selected list item downwards.

SELECT Enter the highlighted sub-menu.

Edit the highlighted list or numerical item.

Move to the next digit of a numerical value.

Jump to the setup screen for the highlighted gauge.

MENU Switch between the default view screen and the main menu.

Exit the current sub-menu or setup screen.

Abort edit of a selected list item.

Move to the previous digit of a numerical value.

CYCLE Turn a highlighted gauge on or off.

D397-12-880 Issue L

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Operation

4.2 Menu structure

Figures 15 and 16 show the view screen shortcuts and menu structure for the TIC. They also give an indication as to

what buttons will lead where within the menu layout.

Figure 15 - View screen shortcuts

* As applicable, see Section 4.8.3 for more information.

RELAY CONTROL

Relays

SYSTEM CONTROL

System

Backing pump

Turbo

Turbo standby

Heater

TURBO SETUP

Turbodrive

ZĂŵƉͲƵƉƟŵĞƌ

ƌŽŽƉƟŵĞƌ

,ĞĂƚĞƌƟŵĞ

Start delay

System on

^ǇƐƚĞŵŽī

Air cooler

TIC vent opt

Backing opt

Turbo vent opt*

Vent type*

Normal

Standby speed

Braking

Max power

Service opt

BACKING SETUP

Back drive

Start delay

System ON

System OFF

Air cooler

TIC vent opt

Backing opt

Normal

Standby speed

Autorun

Service opt

GAUGE SETUP

Gauge

Gas type

Filter

Range

Set zero

Display

Degas

Calibrate

Name

ALARMS

No alarm or warnings

RELAY SELECT

Relays

SYSTEM START MENU

Turbo

Backing

Gauges

Relay

SYSTEM STOP MENU

Turbo

Backing

Gauges

Relay

Cycle

Select

Turbo

Back

Gauge 1 type/name

Gauge 2 type/name

Gauge 3 type/name

Alarm

Units R1 R2 R3

CONTROL SETUP

CS/1352/A

To main menu

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Operation

D397-12-880 Issue L

Figure 16 - Menu structure

* nEXT85 family only, see Section 4.12 for more information.

SYSTEM CONTROL

System

Backing pump

Turbo

Turbo standby

Heater

TURBO STATUS

Turbo

Turbo pump

Backing pump

Turbo power

Turbo speed

TIC int temp

Turbo drive

Turbo pump

Turbo rotor*

ǇĐůĞƟŵĞ

TIC vent

BACKING STATUS

Back

Turbo pump

Backing pump

Turbo power

Turbo speed

TIC int temp

Turbo drive

Turbo pump

ǇĐůĞƟŵĞ

TIC vent

ALARMS

No alarm or warnings

CONTROLLER SETUP

Control object

Controlled by -- >

Controlling object

Units

KīƐĞƚƉŶƚ

On setpnt

Setpoint

Cycle

Select

MAIN MENU

Alarms

Cycle

Turbo status

Back status

Link gauges/ pumps

Parameters/ units

^ĐƌĞĞŶŽƉƟŽŶƐ

Relay setpoints

^ĞƌǀŝĐĞŝŶĨŽƌŵĂƟŽŶ

CS/1353/A

To normal screen

CONTROLLED ITEM

Gge1

Gge2

Gge3

Trbo

PARAMETERS/UNITS

Units

Setup lock

Panel lock

0-10 V O/ P

Disp contrast

Protocol

Comms address

dDW/ůĞƌƚŽī

DW/ůĞƌƚŽī

SCREEN OPTIONS

Show all items

Show three gauges

Set three gauge order

Show one gauge

Set one gauge order

Show turbo only

Show one gauge and turbo

RELAY SELECT

Relay 1

Relay 2

Relay 3

SERVICE INFORMATION

5/W issue

Serial num

Analogue O/P

Turbo run

Reset DX

Reset TIC

D397-12-880 Issue L

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Operation

4.3 Navigating the menu

This section summarises the display navigation method for the TIC. There are 4 buttons for menu navigation and

configuration tasks. A fifth button is used for switching pumps ON and OFF. In most configuration tasks there are no

more than three menu levels.

Refer to Table 8 for a description of the functions that the buttons on the front panel perform.

4.4 The view screen

The view screen can be set to various view options. The following describes the view screen that shows ‘all’. (Refer

to Figure 17).

The top portion of the view screen shows the status of the vacuum pumps; the top line shows the pump speed as a

bar chart. In the top right-hand corner the status of the turbo pump is shown as follows:

The second line provides the basic status of the turbo pump and backing pump under TIC command.

The status of the setpoint relays is shown at the bottom line of the view screen. Relays that are on are shown in

reverse video.

Figure 17 - Pump status

4.5 Turning pumps and relays on/off

Pressing the ‘Cycle’ ( ) button whilst the turbo/backing status line is highlighted will display a menu of switchable

items.

Note: If SYSI is opened during the vacuum cycle, all connected controllable components will be switched OFF.

If the selected item is the relay status line, a list of the relays will appear. Scroll to the required relay and use the

‘cycle’ ( ) button to switch the item. When the relay is activated, the annunciator on the view screen will change

to reverse video.

Off. The turbo pump is off.

>>>. The turbo pump is accelerating.

<<<. The turbo pump is decelerating.

Run. The turbo pump is above 50% speed.

Norm. The turbo pump is at or above ‘normal

speed’.

Strt. The turbo pump is enabled to start,

but will not run until the start delay

has run down.

Flt. An error has occurred. Select the

alarms screen.

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Operation

D397-12-880 Issue L

4.6 Changing list items

To change a list item, scroll to the required line and press the ‘Select’ ( ) button. The list can then be scrolled

using the up and down arrows ( / ).

Pressing the ‘Select’ ( ) button will accept the adjustment and return the highlight to the row item, allowing

another item to be selected for adjustment.

Pressing the ‘Menu’ ( ) button will cancel the adjustment and return the highlight to the row item, allowing

another item to be selected for adjustment.

4.7 Changing numerical values

To change a numerical item, scroll to the required line and press the ‘Select’ ( ) button. The first number will then

be highlighted and can be changed using the up and down arrows ( / ).

The ‘Select’ ( ) button will move the highlight to the next digit with each successive press, allowing the complete

number to be entered. Pressing the ‘Select’ ( ) button with the last digit selected will accept the adjustment and

return the highlight to the row item, allowing another item to be selected for adjustment.

At any time, mistakes can be corrected by pressing the ‘Menu’ ( ) button. This will move the highlight to the

previous digit with each successive button press, allowing corrections to be made. Pressing the ‘Menu’ ( ) button

with the first digit selected will cancel the adjustment and return the highlight to the row item, allowing another

item to be selected for adjustment.

Figure 18 - Changing numerical values

4.8 Turbo setup

CAUTION

All setups in the TIC are held in non-volatile memory. Non-volatile memory has a limit on the number of times

its content can be changed. Current minimum lifetime is 100,000 changes on a particular section. This equates

to more than 1 change per hour every hour for 10 years. If the number of changes is exceeded, random data

may be stored, leading to unexpected system behaviour.

4.8.1 Introduction

The TIC can be used to configure the EXT, DX and nEXT pump ranges. The menu screen shows differing functionality

depending on the pump attached. The TIC will recognise the pump attached, which will be seen on the pump setup

and pump status screen. (Refer to Figure 19).

D397-12-880 Issue L

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Operation

Figure 19 - Turbo setup screen

4.8.2 Default turbo setup options

Table 9 - Default turbo setup options

Menu option Description

Ramp Up Timer The user can set the ramp up timer from 1 to 30 minutes. This timer will

generate an alarm if the pump speed does not rise above 50% speed after the

set time.

Droop Timer The user can set the droop time from 1 to 30 minutes. This timer will generate

an alarm if the pump speed drops below 50% speed for longer than the

specified time.

Heater time The user can set the time that the heater band bakes out the turbo pump from

0 to 35 hrs. The heater will come on for the set time, once the pump reaches

'normal speed'. If the pump drops below 'normal speed', the heater band will

switch off and the timer will be reset.

Once the heater band is operating, the user can interrupt and restore heater

band operation through the serial interface or the TIC front panel.

Start delay The start delay enables the user to delay the start of the turbo pump from 0 to

99 minutes.

System ON Allows the user to define the components of the system that are to be turned

on when the 'system' is cycled on.

System OFF Allows the user to define the components of the system that are to be turned

off, when the 'system' is cycled off.

Note: The system ON and OFF commands provide manual control of the items

listed. Where possible, it will override settings such as backing options

and gauge linking.

Note: If the backing pump option has been set to 50% or on stop, 'seq’ will be

indicated showing the backing pump is sequenced to one of the

options.

Air cooler The user can set when an Edwards air cooler will operate. The air cooler can be

set to 'ON' (on permanently) or 'Turbo' (on when the turbo pump is running).

TIC vent options A vent valve attached to the TIC can be operated in the following ways:

'On stop' to open the vent valve 2 seconds after the stop command or '50%' to

open the vent valve when the pump slows to 50% speed.

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Operation

D397-12-880 Issue L

Refer to Table 10 for error and diagnostic information for pumps.

CAUTION

If an Edwards 24 V backing pump is connected, it is recommended that the overall power used does not exceed

that specified in Section 2.

4.8.3 Additional setup options using a DX or nEXT pump

The TIC allows the user to set up additional functionality available within a DX, nEXT or nXDS pump.

CAUTION

Read the DX or nEXT pump manual before using the TIC to set up the DX, nEXT or nXDS pump.

Turbo venting can be set for different pump families as per Table 11. The user may also use the TIC vent option to

enable an extra vent valve to be connected to a vacuum system.

Backing pump options A backing pump attached to the TIC or via a relay box can be operated in the

following way:

None: The backing pump is not sequenced to the turbo

pump

50%: The backing pump will turn off after 2 seconds,

once the turbo speed has dropped to 50% of its

speed. The delay allows detritus to be removed

from the system on stop.

On stop: The backing pump will turn off 4 seconds after the

Turbo off command has been sent. The 4-second

delay allows shutting of a valve and then removal

of detritus from the system.

Table 10 - Error/diagnostic monitoring, pumps

Diagnostic messages Description

RampUp Timeout Check whether the pump is too hot or whether the inlet pressure is too high.

Check that the backing pump is operational.

Check the vacuum system for leaks.

Droop Timeout Check whether the pump is too hot or whether the inlet pressure is too high.

Check that the backing pump is operational.

Check the vacuum system for leaks.

Table 11 - Turbo pump vent setup differences

Pump Family Turbo vent

option (1) Turbo vent

option 2 Turbo vent

type 1 Turbo vent

type 2

DX X

nEXT85 XXXX

nEXT240/300/400 X

Table 9 - Default turbo setup options (continued)

Menu option Description

D397-12-880 Issue L

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Operation

Please refer to Table 15 for the error and diagnostic information for DX, nEXT and nXDS pumps.

Table 12 - Turbo pump vent options

On screen Description

50% Vent valve opens fully below 50% full rotational speed for both Stop command or Fail

Note: This is the default factory setting.

50%CvV Controlled venting from 100% - 50% full rotational speed;

Vent valve opens fully below 50% for both Stop command or Fail

STP50% Vent valve opens fully immediately Stop command is received;

Vent valve opens fully below 50% full rotational speed if Fail

STPCnV Vent valve opens fully immediately Stop command is received;

Controlled venting from 100% - 50% full rotational speed then vent valve opens fully

below 50% if Fail

FLT50% Vent valve opens fully immediately if Fail;

Vent valve opens fully below 50% full rotational speed if Stop

FLTCnV Vent valve opens fully immediately if Fail;

Controlled venting from 100% - 50% full rotational speed then vent valve opens fully

below 50% if Stop command received

STPFLT Vent valve opens fully immediately for both Stop command or Fail

FLTSTP Vent valve opens fully immediately for both Stop command or Fail

FAN Vent is Permanently Enabled and can be used to provide power to an Edwards air

cooler; This option cannot be set if the pump is above 50% full rotational speed

OPT 9 Do not use

OPT 10 Do not use

Table 13 - Turbo pump vent type

On screen Description

N/O Output configured for a normally open vent valve; this cannot be changed if the pump

is above 50% full rotational speed

N/C Output configured for a normally closed vent valve; this cannot be changed if the

pump is above 50% full rotational speed

Table 14 - DX, nEXT and nXDS pump setup options

Menu option Description

Normal The TIC allows ‘normal speed’ to be set as a percentage of full speed.

Standby speed The user can set the standby speed as a percentage of full speed.

Max power The user can set the maximum power a DX pump can use.

Braking Off/Enabled. The user can utilise this function to slow the turbo pump at a quicker

rate.

Service opt nEXT service indication options. Podule flashing LED, fail line, both, none.

Table 15 - Error/diagnostic monitoring, DX, nEXT and nXDS pumps

Diagnostic messages Description

Serial ID Fail A DX, nEXT, nXDS or serial pump is connected, however the type has not been

recognised. Please check the leads are connected.

Turbo Fault Review the flashing error codes on the pump podule, and refer to the DX, nEXT or

nXDS instruction manual.

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Operation

D397-12-880 Issue L

4.9 Backing setup

SC Interlock Serial enable to the DX, nEXT or nXDS pump was lost while it was running. This could

be caused by a temporary loss of power or a broken wire. It is recommended to stop

the pump and then restart it. If the alarm does not clear, cycle the controller and then

try again.

Uload Timeout Check that the pump is correctly connected, then try to upload again.

Dload Failed Check that the pump is correctly connected, then try to download again.

nEXT Service due warning One of the nEXT items has exceeded its service interval. See nEXT Service screen for

details. Contact Edwards for a suitable service kit or to arrange a service by Edwards.

nXDS Service due warning One of the nXDS items has exceeded its service interval. See nXDS Service screen for

details. Contact Edwards for a suitable service kit or to arrange a service by Edwards.

Table 16 - Default Backing setup options

Menu option Description

Start delay The start delay enables the user to delay the start of the turbo pump from 0 to 99 minutes.

System ON Allows the user to define the components of the system that are to be turned on when the

'system' is cycled on.

System OFF Allows the user to define the components of the system that are to be turned off when the

'system' is cycled off.

Note: The system ON and OFF commands provide manual control of the items listed.

Where possible it will override settings such as backing options and gauge linking.

Note: If the backing pump option has been set to 50% or on stop, ‘seq’ will be indicated

showing the backing pump is sequenced to one of the options.

Air cooler The user can set when an Edwards air cooler should operate. The air cooler can be set to

'ON' (on permanently) or 'Turbo' (on when the turbo pump is running).

TIC vent options A vent valve attached to the TIC can be operated in the following ways:

'On stop' to open the vent valve 2 seconds after the stop command or '50%' to open the vent

valve when the pump slows to 50% speed.

Backing pump options A backing pump attached to the TIC or via a relay box can be operated in the following

way:

None: The backing pump is not sequenced to the Turbo pump

50%: The backing pump will turn off after 2 seconds, once the turbo speed has dropped to

50% of its speed. The delay allows detritus to be removed from the system.

On stop: The backing pump will turn off 4 seconds after the Turbo off command has been

sent. The 4 second delay allows shutting of a valve and then removal of detritus from the

system.

Table 17 - nXDS pump setup options

Menu option Description

Normal The TIC allows ‘normal speed’ of the backing pump to be set as a percentage of full speed.

Standby speed The user can set the standby speed of the backing pump as a percentage of full speed.

Autorun Sets the nXDS to start when power is turned on

Service opt nXDS service indication options. Podule flashing LED, fail line, both, none.

Table 15 - Error/diagnostic monitoring, DX, nEXT and nXDS pumps

Diagnostic messages Description

D397-12-880 Issue L

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Operation

4.10 Alarms

If an Alarm occurs, an ‘Alarms’ warning will begin flashing in the lower half of the view screen. Refer to Figure 17.

The Alarm can then be selected by moving the cursor over it and pressing the ‘Select’ ( ) button. This action will

lead to the Alarms screen. Alternatively, the Alarms screen can be accessed through the main menu.

The Alarm will stop flashing when it has been acknowledged and will disappear when the alarm situation no longer

exists. An alarm is acknowledged by pressing the ‘Select’ ( ) button whilst the flashing alarm is highlighted.

To clear an alarm, refer to the fault finding guide in Section 5 of this instruction manual. This guide gives information

of what the alarm is and the possible solutions for clearing the alarm.

In a similar way, a warning can appear. To clear it, take the same actions as for alarms above.

4.11 The main menu

The main menu can be accessed by pressing the ‘Menu’ ( ) button on the view screen (Figure 14). From here the

following sub-menus can be accessed.

4.12 Turbo status

This screen allows the user to view the current status of the turbo and backing pumps. Basic information such as:

-Whether the turbo pump is ON or OFF and a graph of its speed.

-The state of the turbo pump that the user has requested.

-Whether the backing pump is ON or OFF.

-The power that the turbo pump is using.

-The speed of the turbo pump as a percentage of full speed.

-The temperature of the turbo drive. (Only on DX and nEXT pumps).

-The temperature of the Turbo pump/motor. (Only on DX and nEXT pumps).

-The temperature of the Turbo rotor. (Only on nEXT85 family pumps).

-The cycle time is the run time of the current cycle. (Only on DX and nEXT pumps).

-Whether the TIC vent valve is ‘on/off’.

-Service menu - enter, press enter to move to the nEXT Service screen.

Table 18 - nEXT Service Screen

nEXT Service Description

Service due Indicates which service is due - None, Oil, Bearing, Turbo, Controller. Shows

only initial letters if multiple services are due - O B T C.

Oil run Hours run since last service.

Oil until Hours left to run until next service.

Bearing run Hours run since last service.

Bear until Hours left to run until next service.

Turbo run Hours run since last service.

Turbo until Hours left to run until next service.

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Operation

D397-12-880 Issue L

Table 19 - nEXT Service Reset Screen

4.13 Backing status

This screen allows the user to view the current status of the turbo and backing pumps. Basic information such as:

-Whether the backing pump is ON or OFF and a graph of its speed.

-The state of the turbo pump that the user has requested.

-Whether the backing pump is ON or OFF.

-The power that the backing pump is using.

-The speed of the backing pump as a percentage of full speed.

-The temperature of the backing drive. (Only on nXDS pumps).

-The cycle time is the run time of the current cycle. (Only on nXDS pumps).

-Whether the TIC vent valve is 'on/off'.

-Service menu - enter, press enter to move to the nXDS Service screen.

Contlr run Stress adjusted hours controller has been powered since last service. Stress

adjustment - hours can advance slower or faster than real time depending

on temperature and load.

Cntlr until Stress adjusted hours controller is powered left until next service.

Turbo cycle Start/stop cycles run since last service.

Cycle until Start/stop cycles left to run until next service.

Knock count Backup bearing contacts since last service.

Reset Service Due ... Press enter to move to the nEXT Service Reset screen.

nEXT Service Reset Description

Select line below and press enter

after servicing Instructions to follow

Reset oil due Press enter key to reset only the oil service due

Reset bearing due Press enter key to reset only the bearing service due

Table 20 - nXDS Service Screen

nXDS Service Description

Service due Indicates which service is due - None, Tip Seal, Bearing, Backing, Controller. Shows only

initial letters if multiple services are due - O B T C.

TipSeal run Hours run since last service.

TipSeal til Hours left to run until next service.

Bearing run Hours run since last service.

Bear until Hours left to run until next service.

Back run Hours run since last service.

Cntlr run Stress adjusted hours controller has been powered since last service.

Stress adjustment - hours can advance slower or faster than real time depending on

temperature and load.

Back cycle Start/stop cycles run since last service.

Reset Service Due ... Press enter to move to the nXDS Service Reset screen.

nEXT Service Description

D397-12-880 Issue L

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Operation

4.14 Parameters/units

This screen allows the user to change the units that are displayed and other parameters such as:

-Setup lock - When the 3 digit lock code is entered, the lock is enabled and an operator will not be able to

change any of the setups, however the operator is still able to scroll through the menus and start and stop

pumps. The lock is disabled by entering the 3-digit unlock code. Lock - 501, unlock - 147.

-Panel Lock - This function completely locks the front panel. An operator will only be able to see the view

screen. Lock - 509, unlock - 824.

-The 0 - 10 V analogue output on the logic interface can be set to follow the turbo speed.

-Display contrast allows the user to change the contrast of the display.

-Protocol shows whether RS232 or RS485 is being used.

-Comms address - To set the comms address of the TIC.

-TMPI Alert off - To disable/enable the warning when using TMPI line to start the turbo pump.

-BMPI Alert off - To disable/enable the warning when using BMPI line to start the backing pump.

4.15 Relay setpoint outputs

The relay setpoints option allows the setpoint outputs on the logic interface to be linked to turbo speed. When

selected, a summary of the current setting is displayed. The default setting for the three relays is ‘Not Linked’.

Set up the links as follows:

1. Select the controlled relay. Scroll to the relay that is to be controlled and press the ‘Select’ ( ) button.

2. Select the controlling item. The top highlighted line is used to select the controlling item. The controlling item

can either be ‘Not Linked’ or ‘Turbo Speed’ (%). Press the ‘Select’ ( ) button to confirm the choice.

3. Enter the required setpoint. The ‘On’ and ‘Off’ setpoints can be adjusted to suit the application. For pumps, the

unit used is ‘Turbo Speed’ (%).

Note: For pumps, the ‘Off’ setpoint is less than or equal to the ‘On’ setpoint.

4. Enable the setpoint. Once configured, the setpoint should be enabled by changing the bottom ‘Setpoint’ line

from ‘OFF’ to ‘ENABLED’.

4.16 Service information

Service information contains the following information:

-Software Issue - This is the issue of the currently installed software. This will change when new software is

downloaded to the TIC in the future.

-Serial Number - The serial number of the TIC is used when contacting Edwards about the product.

Table 21 - nXDS Service Reset Screen

nXDS Service Reset Description

Select line below and press enter after servicing Instructions to follow

Reset Tip Seal due Press enter key to reset only the oil service due

Reset bearing due Press enter key to reset only the bearing service due

Edwards and the Edwards logo are trademarks of Edwards Limited.

Operation

D397-12-880 Issue L

-Analogue O/P - The analogue output value (internal units) is used when contacting Edwards about the

product.

-PSU Temp - Temperature of PSU.

-TIC Temp - Temperature of TIC.

-Turbo run - Number of hours the turbo pump has been run (DX and nEXT pumps only).

-Upload Turbo - The TIC can store one set of the pump’s configuration. This function will upload the current

configuration from the attached pump (DX and nEXT pump only).

-Download Turbo - The TIC can download one set of configurations to DX and nEXT pumps, once a

configuration has been uploaded. This function will download the stored configuration to the attached pump

(DX and nEXT pump only).

-Reset Trbo - Reset the turbo pump to its factory defaults (DX and nEXT pumps only).

-Reset TIC - Resets the TIC to its factory default configuration and can be used to quickly undo all user

settings (relay setpoints, units, etc.).

4.17 Electrical supply failure

If the electrical supply to the controller fails while the turbo pump is rotating at high speed, the pump begins acting

like a generator, maintaining operation of the pump electronics and supporting operation of any accessories

connected directly to the pump such as a vent valve or fan.

Additionally, certain turbo pumps can make power available to a TIC to maintain the operation of vent valves

connected to the TIC.

Where power is returned to the TIC it is not made available to the gauges, the logic interface or the air cooler. All

of these will stop operating until power is restored.

Once the turbo pump speed falls below 50%, the vent valve will open and the TIC will shut down.

Refer to the individual pump instruction manuals for availability of this feature.

Turbo Pump Power to TIC

EXT75DX Supported

nEXT240/300/400 family Not supported

nEXT85 family Supported if option enabled

D397-12-880 Issue L

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Edwards and the Edwards logo are trademarks of Edwards Limited.

Maintenance

D397-12-880 Issue L

5Maintenance

5.1 Safety

There are no serviceable parts on the TIC. Do not open. Return to the nearest Edwards Service Centre for repairs.

The Edwards return of equipment forms can be found at the rear of this manual.

5.2 Fault finding

5.3 Cleaning the controller

If necessary, use a soft dry cloth to clean the exterior of the controller. Do not clean with harsh abrasives or liquids.

If the interior of the controller requires cleaning, Edwards recommends returning the controller to the supplier or

the nearest Edwards Service Centre.

WARNING

Obey the safety instructions in this Section and take note of appropriate precautions. Failure to

observe these instructions may result in injury to people and damage to equipment.

Table 22 - Fault finding

Diagnostic messages Description

Pump

RampUp Timeout Refer to Table 10

Droop Timeout Refer to Table 10

DX and nEXT

Serial ID Fail Refer to Table 15

Turbo Fault Refer to Table 15

SC Interlock Refer to Table 15

Uload Timeout Refer to Table 15

Dload Failed Refer to Table 15

nEXT Service Due Refer to Table 15

General

SYSI Inhibit The system interlock has been disconnected. Check that the logic interface

plug is connected correctly or check the status of the system interlocks.

Ext Inhibit Enable lines have been disconnected. Check the turbo or backing pump

enable lines.

No Reading An object has not received a value update from its source within a given

time and is flagging that its value is now old. Check connections to

components of system.

No Message

Brownout/Short

An object has not received a reply to a message it sent within a given time.

Check logic interface connections are correctly attached to the TIC.

Either the loading on the TIC outputs exceeds a certain current level or

there was a brownout of the mains power while a turbo was spinning and

could provide some regen power. Remove the short or high load and then

accept the error; the TIC will then re-attempt to drive the output. If a

brownout occurs, wait for it to pass and then accept the error.

D397-12-880 Issue L

Edwards and the Edwards logo are trademarks of Edwards Limited.

Maintenance

5.4 Software updates

The software within the controller and the TIC PC monitor program will be updated as part of Edwards ongoing

development program. The updates and associated instruction manual can be found by visiting

www.upgrades.edwardsvacuum.com.

5.5 Factory defaults

The following is a list of factory default settings for the TIC:

Table 23 - Factory default settings

Menu option Default

Pump and relay slaving - not slaved

Turbo pump start delay = 0

EXDC Ramp time = 8

EXDC Droop time = 8

Analogue out slaved = NONE

TIC vent = 50%

Heater band = 0 hrs

Air Cooler = Turbo

Setup lock = Off

Panel lock = Off

Display contrast = 5

PC comms = RS232

Multi-drop address = 0

Default screen = All

System On = Backing

System Off = Turbo

Backing option = None

Edwards and the Edwards logo are trademarks of Edwards Limited.

Storage and disposal

D397-12-880 Issue L

6 Storage and disposal

6.1 Storage

Store the controller in clean dry conditions in accordance with the technical specifications. Refer to Section 2.

6.2 Disposal

Dispose of the controller and any components safely in accordance with all local and national safety and

environmental requirements.

Alternatively, the controller and/or cables may be able to be recycled. Contact Edwards or the supplier for advice.

The controller and associated cables are within the scope of the European Directive on Waste Electrical and

Electronic Equipment, 2002/96/EC. Edwards offer European customers a recycling service for the controller/cables

at the end of the product’s life. Contact Edwards for advice on how to return the controller/cables for recycling.

WARNING

Do not incinerate the controller. If the controller is heated to very high temperatures, dangerous

gases may be emitted and internal components may explode.

D397-12-880 Issue L

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Edwards and the Edwards logo are trademarks of Edwards Limited.

Service, spares and accessories

D397-12-880 Issue L

7 Service, spares and accessories

7.1 Introduction

Edwards products, spares and accessories are available from Edwards companies in Belgium, Brazil, China, France,

Germany, Israel, Italy, Japan, Korea, Singapore, United Kingdom, U.S.A and a world-wide network of distributors.

The majority of these centres employ Service Engineers who have undergone comprehensive Edwards training

courses.

When maintaining this product, Edwards recommends using only Edwards maintenance and service kits.

Order spare parts and accessories from the nearest Edwards company or distributor. When ordering, please state for

each part required:

-Model and Item Number of the equipment

-Serial number

-Item Number and description of the part

7.2 Service

Edwards products are supported by a world-wide network of Edwards Service Centres. Each Service Centre offers a

wide range of options including: equipment decontamination; service exchange; repair; rebuild and testing to factory

specifications. Equipment which has been serviced, repaired or rebuilt is returned with a full warranty.

Local Service Centres can also provide Edwards engineers to support on-site maintenance, service or repair of the

equipment.

For more information about service options, contact the nearest Service Centre or other Edwards company.

7.3 Spares

Note: This assembly is suitable for customers who have electrical and electronic repair expertise and possess a

portable appliance tester. If the customer is unable to carry out this repair, the controller should be

returned to Edwards for a full repair and safety re-test.

7.4 Accessories

Table 24 shows the range of accessories that can be purchased.

Spare Item Number

TIC Front Bezel Kit D397-00-803

TIC Logic Interface D397-00-850

Front Panel Assembly D397-00-822

Table 24 - Accessories

Product Description Ordering Information

TIC Controllers

TIC Profibus Module D397-50-000

Turbo Pumps and Controllers

EXT70H range

D397-12-880 Issue L

Edwards and the Edwards logo are trademarks of Edwards Limited.

Service, spares and accessories

(EXDC80 Control Module required with above Turbo Pumps) D396-45-000

EXT255H range

(EXDC160 Control Module required with above Turbo Pumps) D396-46-000

EXT75DX range

EXT255DX range

nEXT range

Extension Cables DX/EXDC and 24 V backing pumps

1 m DX/EXDC extension cable (16/0.2) D397-00-835

3 m DX/EXDC extension cable (16/0.2) D397-00-836

5 m DX/EXDC extension cable (16/0.2) D397-00-837

Air Cooler

ACX70 B580-53-050

ACX250 B580-53-150

Vent Valves

TAV5

TAV6 B580-66-010

B580-66-020

Examples of compatible 24 V backing pumps

XDD1 24 V d.c. Diaphragm pump A746-01-991

Examples of compatible mains backing pumps

XDS10 220-240 V 50 Hz 1-phase A726-01-903

XDS10 115-120 V 60 Hz 1-phase A726-01-906

nXDS6i 100-127/200-240 V 50/60 Hz 1-phase A735-01-983

nXDS10i 100-127/200-240 V 50/60 Hz 1-phase A736-01-983

nXDS15i 100-127/200-240 V 50/60 Hz 1-phase A737-01-983

nXDS20i 100-127/200-240 V 50/60 Hz 1-phase A738-01-983

E2M1.5 220-240 V 50/60 Hz 1-phase A371-22-919

E2M1.5 115-120 V 50/60 Hz 1-phase A371-22-902

RV12 110-120 V 60 Hz or 220-240 V 50 Hz 1-phase A655-01-903

E2M28 220-240 V 50 Hz or 230-240 V 60 Hz 1-phase A373-15-903

E2M28 115/230 V 60 Hz 1-phase A373-15-981

Bakeout band (via optional relay box)

BX70 240 V 30 W (EXT70H & EXT75DX) B580-52-060

BX70 110 V 30 W (EXT70H & EXT75DX) B580-52-040

BX250 240 V 60 W (EXT255H) B580-52-061

BX250 110 V 60 W (EXT255H) B580-52-041

24 V backing line valves (via optional relay box)

LCPV16EKA 24 V a.c./d.c. C417-51-200

LCPV25EKA 24 V a.c./d.c. C417-52-200

Relay Boxes

TIC Relay box 3 x 240 V 3 A D397-00-804

TIC Relay box D397-11-805

Table 24 - Accessories (continued)

Product Description Ordering Information

Edwards and the Edwards logo are trademarks of Edwards Limited.

Service, spares and accessories

D397-12-880 Issue L

TIC Relay box comb D397-21-806

Interface cables

2 m Logic interface cable D397-00-833

2 m RS232 interface cable D397-00-834

Mains cables (Suitable for TIC controllers)

2 m UK plug D400-13-025

2 m USA plug D400-13-120

2 m Northern European plug D400-13-120

Other accessories and supporting products

TIC software upgrade www.upgrades.edwardsvacuum.com

Table 24 - Accessories (continued)

Product Description Ordering Information

D397-12-880 Issue L

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