151 286 DCPHTR DS
User Manual: 151-286
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DCP-HTR High-Performance DC Parametric Probe DATA SHEET The DCP-HTR probe delivers fA-level measurement capability from -65°C to 300°C for advanced characterization and reliability testing. Its unique design offers superior guarding and shielding over-temperature, overcoming the high-temperature performance limitations of standard coaxial needles. For full-triaxial current/voltage over-temperature measurements, using triaxial cables, the DCP-HTR probe should be used with Cascade Microtech’s parametric probing systems with MicroChamber® and AttoGuard® technology. When used with MicroChamber, the DCP-HTR allows full utilization of semiconductor parametric test instruments. The optional probe tips with small diameter are ideal for probing pads as small as 30 μm x 30 μm. FEATURES / BENEFITS Low-noise electrical performance Ultra-low, fA-level current and fF-level capacitance measurements from -65°C to + 300°C Microstrip probe tips Guarantees fully-guarded measurements to fA and fF levels Precision, industry-standard SSMC 50 Ω connectors Individual connectors provide force-sense connection for quasi-Kelvin and CV measurements Selection of probe tip diameters Allows probing of different pad materials and sizes Easily replaceable probe tips Fast replacement of worn probes without the need for tools GENERAL SPECIFICATIONS Breakdown voltage >500 V Isolation resistance >1 x 10E13 Ω Frequency response (3 dB) 150 MHz Mounted temperature range -65°C to +300°C (above 250°C: 8 hours max operation) Typical leakage and noise current ±10 fA at -65°C to 200°C, ±20 fA at 200°C to 300°C Residual capacitance <100 fF (probe tip in air at room temperature) Characteristic impedance 50 Ω Body material Gold plated Connector type SSMC Minimum pad size 30 μm x 30 μm (10 μm radius tips required) TIP SPECIFICATIONS Tip material Tungsten Contact force 3 gram/25 μm Scrub Typically 2.5:1 skate ratio (25 μm overdrive = 10 μm skate) MicroChamber compatible Yes AttoGuard compatible Yes PN (10-PK) 154-001 154-003 154-329 TIP SHAPE Radius Flat TIP Ø (µm) TIP Ø TOL (µm) 19 ± 3.8 10 ± 2.5 38 ±5 Radius Tip 154-001 19 μm Flat Tip 154-329 38 μm DEPTH (in.) BEAM ANGLE 0.358 7° DCP-HTR www.cascademicrotech.com 2 DIMENSIONS DCP-HTR Probe Body Tip Shape PN 154-001 (Radius Tip) PN 154-003 (Radius Tip) PN 154-329 (Flat Tip) PERFORMANCE 350 4.50E-16 40 300 4.00E-16 250 3.50E-16 200 3.00E-16 Noise and Leakage Current (fA) 30 20 10 150 0 100 -10 50 -20 -30 -40 -50 0 Time (minutes) 35 Chuck Temperature (°C) 50 2.50E-16 2.00E-16 ~420aA peak-to-peak noise 1.50E-16 0 1.00E-16 -50 5.00E-17 -100 0.00E+00 Typical DCP-HTR probe noise and leakage over temperature when used in conjunction with Cascade Microtech probe station with MicroChamber and AttoGuard technology 0 Time (seconds) 60 Typical DCP-HTR probe noise and leakage at ambient when used in conjunction with Cascade Microtech probe station with MicroChamber and AttoGuard technology DCP-HTR www.cascademicrotech.com 3 ORDERING INFORMATION PART NUMBER DESCRIPTION DCP-HTR DCP-HTR DC probe holder 151-286 Thermally-stable probe arms for DCP-HTR (for MS-1 positioners, triax) 151-287 Thermally-stable probe arms for DCP-HTR (for DCM positioners, triax) 151-288 Thermally-stable probe arms for DCP-HTR (for DCM positioners, coax) 154-001 Replaceable probe tips, box of 10, radius tip, 19 μm diameter 154-003 Replaceable probe tips, box of 10, radius tip, 10 μm diameter 154-329 Replaceable probe tips, box of 10, flat tip, 38 μm diameter 138-020 Edge Sense, single blade ceramic needle for DCP-HTR probe body © Copyright 2016 Cascade Microtech, Inc. All rights reserved. Cascade Microtech, AttoGuard and MicroChamber are registered trademarks of Cascade Microtech, Inc. All other trademarks are the property of their respective owners. Data subject to change without notice Cascade Microtech, Inc. toll free: +1-800-550-3279 phone: +1-503-601-1000 email: cmi_sales@cmicro.com Germany phone: +49-35240-73-333 email: cmg_sales@cmicro.com Singapore phone: +65-6873-7482 email: cms_sales@cmicro.com Japan +81-3-5615-5150 email: cmj_sales@cmicro.com phone: phone: DCPHTR-DS-0916 DCP-HTR www.cascademicrotech.com China phone: +86-21-3330-3188 email: cmc_sales@cmicro.com Taiwan +886-3-5722810 email: cmt_sales@cmicro.com
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