151 286 DCPHTR DS

User Manual: 151-286

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FEATURES / BENEFITS
Low-noise electrical performance Ultra-low, fA-level current and fF-level capacitance measurements
from -65°C to + 300°C
Microstrip probe tips Guarantees fully-guarded measurements to fA and fF levels
Precision, industry-standard SSMC Individual connectors provide force-sense connection for quasi-Kelvin
50 Ω connectors and CV measurements
Selection of probe tip diameters Allows probing of different pad materials and sizes
Easily replaceable probe tips Fast replacement of worn probes without the need for tools
The DCP-HTR probe delivers fA-level measurement capability from -65°C to 300°C for advanced characterization and reliability testing.
Its unique design offers superior guarding and shielding over-temperature, overcoming the high-temperature performance limitations
of standard coaxial needles. For full-triaxial current/voltage over-temperature measurements, using triaxial cables, the DCP-HTR probe
should be used with Cascade Microtech’s parametric probing systems with MicroChamber® and AttoGuard® technology. When used with
MicroChamber, the DCP-HTR allows full utilization of semiconductor parametric test instruments. The optional probe tips with small
diameter are ideal for probing pads as small as 30 μm x 30 μm.
DCP-HTR
High-Performance
DC Parametric Probe
DATA SHEET
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DCP-HTR
GENERAL SPECIFICATIONS
Breakdown voltage >500 V
Isolation resistance >1 x 10E13 Ω
Frequency response (3 dB) 150 MHz
Mounted temperature range -65°C to +300°C (above 250°C: 8 hours max operation)
Typical leakage and noise current ±10 fA at -65°C to 200°C, ±20 fA at 200°C to 300°C
Residual capacitance <100 fF (probe tip in air at room temperature)
Characteristic impedance 50 Ω
Body material Gold plated
Connector type SSMC
Minimum pad size 30 μm x 30 μm (10 μm radius tips required)
TIP SPECIFICATIONS
Tip material Tungsten
Contact force 3 gram/25 μm
Scrub Typically 2.5:1 skate ratio (25 μm overdrive = 10 μm skate)
MicroChamber compatible Yes
AttoGuard compatible Yes
PN (10-PK) TIP SHAPE TIP Ø (m) TIP Ø TOL (m) DEPTH in. BEAM ANGLE
154-001 Radius 19 ± 3.8
0.358 7°154-003 10 ± 2.5
154-329 Flat 38 ± 5
Radius Tip 154-001 19 μm
Flat Tip 154-329 38 μm
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DCP-HTR
DIMENSIONS
DCP-HTR Probe Body
Tip Shape
PN 154-001 (Radius Tip) PN 154-003 (Radius Tip) PN 154-329 (Flat Tip)
PERFORMANCE
0.00E+00
2.50E-16
2.00E-16
3.00E-16
3.50E-16
4.00E-16
5.00E-17
1.00E-16
1.50E-16
4.50E-16
Time (seconds)
60
0
~420aA peak-to-peak noise
0
-50
0
10
-10
20
30
40
-40
-30
-20
50
Noise and Leakage Current (fA)
Chuck Temperature (°C)
-100
100
150
50
200
250
300
-50
0
350
35
Time (minutes)
Typical DCP-HTR probe noise and leakage over temperature
when used in conjunction with Cascade Microtech probe
station with MicroChamber and AttoGuard technology
Typical DCP-HTR probe noise and leakage at ambient when
used in conjunction with Cascade Microtech probe station
with MicroChamber and AttoGuard technology
ORDERING INFORMATION
PART NUMBER DESCRIPTION
DCP-HTR DCP-HTR DC probe holder
151-286 Thermally-stable probe arms for DCP-HTR (for MS-1 positioners, triax)
151-287 Thermally-stable probe arms for DCP-HTR (for DCM positioners, triax)
151-288 Thermally-stable probe arms for DCP-HTR (for DCM positioners, coax)
154-001 Replaceable probe tips, box of 10, radius tip, 19 μm diameter
154-003 Replaceable probe tips, box of 10, radius tip, 10 μm diameter
154-329 Replaceable probe tips, box of 10, flat tip, 38 μm diameter
138-020 Edge Sense, single blade ceramic needle for DCP-HTR probe body
DCPHTR-DS-0916
© Copyright 2016 Cascade Microtech, Inc. All rights reserved.
Cascade Microtech, AttoGuard and MicroChamber are registered
trademarks of Cascade Microtech, Inc. All other trademarks are
the property of their respective owners.
Data subject to change without notice
Cascade Microtech, Inc.
toll free: +1-800-550-3279
phone: +1-503-601-1000
email: cmi_sales@cmicro.com
Germany
phone: +49-35240-73-333
email: cmg_sales@cmicro.com
Japan
phone: +81-3-5615-5150
email: cmj_sales@cmicro.com
China
phone: +86-21-3330-3188
email: cmc_sales@cmicro.com
Singapore
phone: +65-6873-7482
email: cms_sales@cmicro.com
Taiwan
phone: +886-3-5722810
email: cmt_sales@cmicro.com
DCP-HTR
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