E220GEM Manual Ver 9.1

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1.0 Introduction
E220/E500 HP, EHP, & EHPi
MEDUIM CURRENT
ION IMPLANTER
GEM MANUAL
Revision 9.1
Varian Semiconductor Equipment Associates, Inc.
35 Dory Road
Gloucester, MA 01930-2297
WARNING
General Equipment Warning
Only persons trained in the operation and maintenance of Varian ion implanters should
attempt to perform these procedures.
Varian Semiconductor Equipment Associates Ion Implanters are complex systems that
contain high current, high voltage power supplies, gases under high pressure, hot
surfaces, toxic materials, ionizing and non- ionizing radiation and mechanical assemblies
that are in motion or which can move rapidly and powerfully in response to a command,
a component failure, or noise on a command line which is interpreted as a command.
These can represent significant hazards with the potential to cause the death of or
serious injury to any personnel not specifically trained in the operation and maintenance
of these machines. It is the “machine specific” knowledge gained in this training, which
makes the personnel aware of the nature and locations of the potential hazards and how
to avoid exposure to them while servicing the machines.
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This information in this document is proprietary to Varian Semiconductor Equipment
Associates and is intended solely for application to Varian equipment by Varian trained
personnel. It is not to be copied or disclosed to others without written permission from
Varian.
1.0 General Information
This document contains the following documentation, arranged in three parts, in accordance with SEMI GEM standard
E30-95, section 8:
General Information .
Manufacturer and product number
General description of equipment function
Function of the GEM interface
Software revision code
Changes from previous versions
Message Summary .
The message summary contains two lists of all messages understood and all messages sent by the
equipment in terms of their stream and function codes. All messages not listed on the received side are
implied to cause an error message to the host. All messages not listed on the sent side are assumed never to
be sent from the equipment.
Message Detail
The message detail contains the details for every message listed in the message summary. Messages that
appear on both the sent and received sides shall be detailed separately.
1.1 Manufacturer And Product Number
The purpose of this manual is to describe the GEM implementation for the E220HP / E500HP Ion Implanters.
1.2 General Description Of Equipment Function
The Varian E220HP / E500HP is a Medium Current Ion Implanter which processes one or two cassettes of wafers as
a batch, a single wafer at a time. A LOT ID (Material ID) can be specified for each cassette.
1.2.1 GEM Messages Defined
The following sections define the messages that are required for the GEM sub-system. Information in these sections
follow the SEMI documentation standard as defined in SEMI E5-95 section 8.
1.2.2 Messages From The E220
The following GEM SECS II transactions shall be implemented in GEM:
H --> E H <--E
S1F0 ABORT TRANSACTION S1
S1F1 A RE Y OU THERE REQUEST
S1F2 ON-LINE DATA
S1F13 ESTA BLISH COMMUNICA TIONS REQUEST
S1F14 ESTA BLISH COMMUNICATIONS ACKNOWLEDGE
S2F17 DATE AND TIME REQUEST
S2F18 DATE AND TIME DATA
S5F1 ALA RM REPORT SEND
S5F2 ALARM REPORT ACKNOWLEDGE
S6F1 TRACE DATA SEND
S6F2 TRACE DATA ACKNOWLEDGE
S6F5 MULTI-BLOCK DATA SEND INQUIRE
S6F6 MULTI-BLOCK GRANT
S6F11 EVENT REPORT SEND
S6F12 EVENT REPORT A CKNOWLEDGE
S7F1 PROCESS PROGRAM LOAD INQUIRE
S7F2 PROCESS PROGRAM LOAD GRANT
S7F3 PROCESS PROGRAM SEND
S7F4 PROCESS PROGRAM ACKNOWLEDGE
S7F5 PROCESS PROGRAM REQUEST
S7F6 PROCESS PROGRA M DA TA
S7F23 FORMATTED PROCESS PROGRAM SEND
S7F24 FORMATTED PROCESS PROGRAM ACKNOWLEDGE
S7F25 FORMATTED PROCESS PROGRAM REQUEST
S7F26 FORMATTED PROCESS PROGRAM DATA
S7F27 PROCESS PROGRAM VERIFICATION SEND
S7F28 PROCESS PROGRAM VERIFICATION ACKNOWLEDGE
S7F29 PROCESS PROGRAM VERIFICATION INQUIRE
S7F30 PROCESS PROGRAM VERIFICATION GRANT
S9F1 UNRECOGNIZED DEVICE ID
S9F3 UNRECOGNIZED STREAM TY PE
S9F5 UNRECOGNIZED FUNCTION TY PE
S9F7 ILLEGAL DATA
S9F9 TRANSACTION TIMER TIMEOUT
S9F11 DATA TOO LONG
S10F1 TERMINAL REQUEST
S10F2 TERMINAL REQUEST ACKNOWLEDGE
S10F7 MULTI-BLOCK NOT ALLOWED
1.2.3 Messages To The E220
The following GEM SECS II transactions shall be implemented in GEM:
H --> E H <--E
S1F0 ABORT TRANSA CTION S1
S1F1 ARE YOU THERE
S1F2 ON-LINE DATA
S1F3 SELECTED EQUIPMENT STA TUS REQUEST
S1F4 SELECTED EQUIPMENT STA TUS DA TA
S1F11 STATUS VARIABLE NAMELIST REQUEST
S1F12 STATUS VARIABLE NAMELIST REPLY
S1F13 ESTA BLISH COMMUNICATIONS REQUEST
S1F14 ESTA BLISH COMMUNICA TIONS REQUEST A CKNOWLEDGE
S2F13 EQUIPMENT CONSTA NT REQUEST
S2F14 EQUIPMENT CONSTANT DA TA
S2F15 NEW EQUIPMENT CONSTANT SEND
S2F16 NEW EQUIPMENT CONSTA NT ACKNOWLEDGE
S2F17 DATE AND TIME REQUEST
S2F18 DATE A ND TIME DATA
S2F23 TRA CE INITIA LIZ E SEND
S2F24 TRACE INITIALIZE ACKNOWLEDGE
S2F29 EQUIPMENT CONSTA NT NA MELIST REQUEST
S2F30 EQUIPMENT CONSTANT NA MELIST
S2F31 DATE A ND TIME SET REQUEST
S2F32 DATE A ND TIME SET ACKNOWLEDGE
S2F33 DEFINE REPORT
S2F34 ACKNOWLEDGE
S2F35 LINK EV ENT REPORT
S2F36 ACKNOWLEDGE
S2F37 ENA BLE/DISA BLE EV ENT REPORT
S2F38 ACKNOWLEDGE
S2F39 MULTI-BLOCK INQUIRE
S2F40 MULTI-BLOCK GRANT
S2F41 HOST COMMAND SEND
S2F42 HOST COMMAND A CKNOWLEDGE
S2F43 RESET SPOOLING STREAMS A ND FUNCTIONS
S2F44 RESET SPOOLING ACKNOWLEDGE
S2F45 DEFINE V A RIABLE LIMIT ATTRIBUTES
S2F46 VARIABLE LIMIT ATTRIBUTE ACKNOWLEDGE
S2F47 VARIABLE LIMIT ATTRIBUTE REQUEST
S2F48 VARIABLE LIMIT ATTRIBUTE SEND
S2F49 ENHANCED REMOTE COMMAND
S2F50 ENHANCED REMOTE COMMA ND A CKNOWLEDGE
S2F71 Initiate Processing Request ( Factory Automation Only)
S2F72 Initiate Processing Acknow ledge
S5F3 ENABLE/DISABLE ALARM SEND
S5F4 ACKNOWLEDGE
S5F5 LIST ALARMS
S5F6 ACKNOWLEDGE
S615 EVENT REPORT REQUEST
S6F16 EVENT REPORT DA TA
S6F19 INDIV IDUA L REPORT REQUEST
S6F20 INDIV IDUAL REPORT DA TA
S6F23 REQUEST SPOOLED DATA
S6F24 REQUEST SPOOLED DATA ACKNOWLEDGE
S7F1 PROCESS PROGRAM LOAD INQUIRE
S7F2 PROCESS PROGRAM LOAD GRANT
S7F3 PROCESS PROGRAM SEND
S7F4 PROCESS PROGRAM ACKNOWLEDGE
S7F5 PROCESS PROGRAM REQUEST
S7F6 PROCESS PROGRAM DATA
S7F17 DELETE PROCESS PROGRAM SEND
S7F18 DELETE PROCESS PROGRAM ACKNOWLEDGE
S7F19 CURRENT EPPD REQUEST
S7F20 CURRENT EPPD DATA
S7F23 FORMATTED PROCESS PROGRAM SEND
S7F24 FORMATTED PROCESS PROGRAM ACKNOWLEDGE
S7F25 FORMATTED PROCESS PROGRAM REQUEST
S7F26 FORMATTED PROCESS PROGRAM DATA
1.3 Function Of The GEM Interface
The GEM sub-system is composed of hardware and software. The hardware component is a SECS interface board, SIB-
311. The software has five components:
FORTH based GEM interface software which is integrated into the E220HP / E500HP control program.
A multi-tasking operating system to provide data sharing and intertask communication for the E220HP / E500HP
application and the GEM functions.
The GEM task, ‘C’ code to initialize the link between the E220HP / E500HP application and integrate the GWGEM
function library.
GWGEM, a ‘C’ function library, a product from GW Associates.
SDR, driver interfacing the SIB-311 to DOS and the E220HP / E500HP application
Protocol Parameter Parameter Description Units Standard Default Value
T1 Inter Character Timeout Sec. 0.5
T2 Protocol Timeout Sec. 10
T3 Reply Timeout Sec. 45
T4 Inter Block Timeout Sec. 45
T5
Connect Separation
Timeout (HSMS only) Sec. 10
T6
Control Transaction
Timeout (HSMS only) Sec. 5
T7
NOT SELECTED
TIMEOUT (HSMS only) Sec. 10
T8
Netw ork Intercharacter
Timeout (HSMS only) Sec. 5
Baud Baud Rate Bits/Sec. 9600
Retry Retry Limit No. of 3
Figure 1 – SCREEN 1, HOST INTERFACE
The Host Mode section has two button icons that contain the present control state of the communications: ON-LINE or
OFF-LINE, REMOTE or LOCAL. Touching the icon causes the control state to switch to the alternative state i.e.:
REMOTE -> LOCAL, LOCAL -> REMOTE; ON-LINE -> OFF-LINE, OFF-LINE -> ON-LINE.
The MODE MENU screen, shown below in Screen 2, displays the HOST CONTROL button when the GEM option is
active. Entry into the HOST CONTROL screen will be allowed if the equipment and Host have established
communications. Upon entry into the HOST CONTROL screen the GEM control state will be set to on-line and remote.
VERSION INTRODUCED: 12.20
Figure 2 - SCREEN 2, MODE MENU
1.3.1 Hardware Component
The hardware is a SECS interface board, SIB-311. The SIB-311 is a single printed circuit board occupying one expansion
slot on the ISA bus of the PC. The SIB-311 provides the following hardware: on-board CPU, RAM, I/O ports, interrupt
request signal, RS 232C interface with a DB37F connector. The SECS interface board contains its own microprocessor,
memory, and performs the entire SECS I, independently of the Intel 486. The SIB-311 interface includes addressing of
the memory and I/O port.
The customer host must be connected to port #1 of the SIB board connector located at the back of the PC.
Ports #2 and #3 are serial connections to the SMIF interface box. Port #2 provides the left SMIF serial connection while
port #3 provides serial communication to the right SMIF.
When option 125 (HSMS Host) is selected, the hardware used is 3COM ethernet card PCI-bus type. This configuration
requires the faster AMD 400 type control computer.
1.3.2 Software Component
The software components of GEM are a sub-system within the E220HP / E500HP application, see figure below.
Figure 3 – SMIF Level 1 System Architecture
In E220/E500 software versions previous to Version 10, the main control computer was based on the IBM DOS (MS-
DOS) operating system and the FORTH programming language. The SECS software was written completely in FORTH.
This software handled the SECS I, SECS II and high level communications. Since it was interleaved with the other
FORTH control software, the SECS I communications program and the control program of the implanter interfered with
each other.
In Version 10, DOS has been replaced by a DOS compatible, preemtive multitasking operating system called TSX-32.
This operating system was selected because of its ability to run 32 bit protected mode DOS programs (polyFORTH and
the GEM tasks), its preemptive multitasking, intertask communications, shared memory support and built in realtime
operating system features.
With this new architecture, the SIB board handles all of the SECS I protocol and timing. the GEM task (task 2 above) is a
separate program written in the ‘C’ programming language which handles most of the SECS II message interpretation and
creation. This allows the FORTH software (task 1) to independently control the implanter.
In Version 11.00.22, a multi-threader with an interface similar to PSOS, the VSECS component, and the Asyst SMIF LPT
2200 VSECS application was added to the TSX GEM task (task 2 above). This provides support for two Asyst SMIF LPT
2200 VSECS.
Acronym Description
Control Program in FORTH
This is a modification of the most recent release of the E220HP / E500HP
system software. It controls the implanter.
SECS
The FORTH SECS softw are has been modified to use the SECS and GEM
functions provided by GWGEM and SDR. All FORTH calls to the SECS
softw are by other E220HP / E500HP softw are modules (objects) w ill remain,
but their processing has been moved to functions w ithin GWGEM, SDR or the
SIB-311
Multi-task OS
A third party task schedule, intertask communications, and resource sharing
program. The functions provided by the operating system allow the two tasks
to interact through shared memory and intertask message passing
GEMTASK
A task w ritten in 'C' code to manage the link betw een the E220HP/E500HP
application and GWGEM and SDR functions. This includes function location,
variables, alarms, and process programs.
GWGEM A 'C' function library w ritten by GW Associates, providing GEM compatibility.
Host Control Application A GWGEM application that provides host control for the E220
SDR
An application interfacing the SIB-311 to the E220HP / E500HP application by a
set of ‘C’ library functions.
LIMITS
This is a separate C program w hich executes the limits monitoring functions
required by GEM.
VSECS
A "C" function component utilizing a PSOS style multi-threading component
that provides similar GWGEM functionality for addition SDR ports
SMIF VSECS Application
An application that provides support for tw o Asyst SMIF LPT 2200 cassette
handling robots.
These components linked together with the E220HP / E500HP application and additional hardware comprise the entire
E220HP / E500HP Ion Implanter system with GEM compatibility as specified within this document.
1.3.3 Definitions, Acronyms, and Abbreviations
Acronym Definition
ACH Automatic Cassette Handler - Support for the Daihen buffer (ACH).
C Compiled computer language used in the E220HP / E500HP control system
EPPD Equipment Process Program Directory
Equipment
intelligent system that communicates with the host, in this document it is
synonymous w ith the E220HP / E500HP
function specific message of a stream (see stream in this section)
GEM
Generic Model for Communications and Control of SEMI Equipment (GEM) SEMI
standard E30-95
GWGEM ‘C’ language library of functions producing GEM compatibility
Host the intelligent system that communicates with the Equipment
operator individual using the user interface of the Equipment
FORTH
threaded interpretative programming language, used in the E220 HP / E500HP
control system.
SECS Semiconductor Equipment Communications Standard
SECS I
the description of the physical connector, signal levels, data rate, and logical
protocols required to exchange messages betw een the host and Equipment
over a serial point to point data path
SECS II
the description that gives form and meaning to messages exchanged betw een
Equipment and host using a message transfer protocol
SECSIM
SECS simulator w ith language that can produce SECS formatted messages,
product of GW Associates
SEMI Semiconductor Equipment Manufacturers International, standards organization
SIB SECS Interface Board, product of GW Associates
SMIF
Standard Mechanical Interface - Asyst, Ergospeed II, and Jenoptic, and fixed
Jenoptic SMIF units are supported w ith the E220 application.
stream category of activity defined by SECS II
VILL
Vacuum Independent Loadlocks (ECO 90). An ECO that enables the equipment
to load/unload a loadlock w hile the opposite loadlock’s w afers are being
implanted. (Feature available in V11.01)
VDLL
Vacuum Dependent Loadlocks. Wafers cannot be implanted w hile any
loadlocks are loading or unloading. This operation is only operation available for
V10.00.00 through V11.00.XX
1.3.4 References
Name Date Vers / Rev Originator
E30-95: Generic Model for Communications and
Control of SEMI Equipment (GEM) 1995 E30-95 SEMI
E4-91: SEMI Equipment Communications Standard;
Message Transfer (SECS-I) 1991 E4-91 SEMI
E5-95: SEMI Equipment Communications Standard 2
Message Content (SECS-II) 1995 E5-95 SEMI
EXTRION 220/500 Medium Current Ion Implanter SECS
Communication Manual Feb-93 Rev. 2 Varian
1.4 Software Revision Code
All major threads of the E220/E500 operating system incorporate added features to the GEM interface. This manual
documents which revision certain features were added. To assist with a proper migration path, both a table and migration
flowchart have been provided for reference. The table established the software version where major features which
significantly impact the GEM interface were added. The flowchart provides a migration path to version 12 (and later)
features.
Name Version Introduced Description
GEM V10.00.00 Added the GEM interface.
SMIF1 V11.22.00 Added support for Asyst SMIF LPT 2200
MID1 V11.00.37
Added controller to coordinate factory automation,
Material Identification (MID) readers, and E220 basic
implanter. This softw are component is also
ref erred to as MID Module.
VILL V11.01.00 Vacuum Independent Load Locks.
Y2K V11.00.37 Y2K support.
MID Update V11.05.08
Updated GW Associates library introduced different
buffers for host messages and complex variables
linked to events.
HSMS V12.12.00 Support for HSMS.
ERGOSMIF V11.07.06 Support for Ergospeed SMIF
BCR V12.12.00 Support for Bar Code Reader
LINEUP JOB QUEUE V 12.23 revA
User Interface for the Lineup Job Queue w as
introduced in V12.20 revA, and the
host interface w as introduced in V12.23 revA.
Productivity Plus V12.50 Support for the Dual-Arm Hardw are Upgrade.
1.5 Changes from Previous Versions
Revision Date Reason for Change Author
1 1/16/1995 Original, created from Requirements Document Rev 7 Nick Parisi
2 4/3/1995 Moved events 55 thru 55 to 66 thru 69 to avoid conflicts with SECS2. Jim Hamilton
3 5/20/1996 Update the change from Requirement Document Rev 9 Q. Wei
4 8/30/1997 Added Asyst Automation R. Naugle
5 4/2/1998 Added flouroTrak Cassete ID reader R. Naugle
6 11/16/1999 Finalized Revision R. Cruz
7 3/1/2001 Updated manual and converted to on-line help format K. Zeh
8 2/1/2002 Updated manual for V12.15 Rev B,C and D R. Cruz
8.1 3/26/2002
Updates for V12.15 RevD Custom Software.
Deleted unimplemented or obsolete DVIDs R. Cruz
9 10/12/2004 Updated manual for V12.20 up to V13.10 R. Cruz
9.1 2/15/2005 Added General Equipment Warning Section R. Cruz
2.0 Data Item Directory
2.0 Data Item Directory
This section defines the data items used in the SECS II messages described in the Message Detail section. Each data
item is defined by the following:
1. an unique mnemonic name
2. allowable item format code as complying to SEMI SECS-II E5-95 Section 6.2, Item Format Codes
3. a description of the specific values, and
4. the messages in which the data item is used.
An item is an information packet which has a length and format defined by the first 2, 3, or 4 bytes of the item. These
first bytes are called the item header (IH). The item header consists of the format byte and the length byte(s) as shown
in Figure 2. Bits one and two of the item header tell how many of the following bytes refer to the length of the item.
This feature allows for long items without requiring the byte overhead for shorter items. The item length refers to the
number of bytes following the item header, called the item body (IB), which is the actual data of the item. The item
length refers only to the item body not including the item header, so the actual number of bytes in the message for one
item is the item length plus 2, 3, or 4 bytes for the item header. All bytes in the item body are in the format specified in
the format byte.
Item and List Header
A zero length in the format byte is illegal and produces an error. A zero length in the item length bytes has a special
meaning as defined in the detailed message definitions.
Bits 3 through 8 of the format byte of the item header define the format of the data which follows. Of the 64 possible
formats, fifteen are defined as shown in Table 1. Format code 0 is called a list and is defined in E5 6.3. The remaining 14
item formats define unspecified binary, code 10 (octal); Boolean, code 11 (octal); ASCII character strings, code 20 (octal);
JIS-8 character strings, code 21 (octal) signed integer, codes 30, 31, 32, 34 (octal); floating point, codes 40, 44 (octal);
and unsigned integer, codes 50, 51, 52, 54 (octal). These formats are used for groups of data which have the same
representation in order to save repeated item headers. Signed integers will be two's complement values. Floating point
numbers will conform to the IEEE standard 754. Boolean values will be byte quantities, with zero being equivalent to false,
and non-zero being equivalent to true.
2.0.1 Item Format Codes
MEA NING
Binary
765432 Octal 0-LB
Symbol
0-LB
Hex
n-LB
Symbol
1-LB
Hex
2-LB
Hex
3-LB
Hex
The data after the heading
has the follow ing form
000000 00 L 0 L+n 1 2 3 LIST (length in elements)
001000 10 B1 20 B8+n 21 22 23 Binary
001001 11 BOOL 24 B2+n 25 26 27 Boolean
010000 20 A1 40 A1+n 41 42 43 ASCII 1
010001 21 J1 44 J1+n 45 46 47 JIS-8
100000 40 F8 80 F8+n 81 82 83 8-byte floating point 3
100100 44 F4 90 F4+n 91 92 93 4-byte floating point 3
101000 50 U8 A0 U8+n A1 A2 A3 8-byte integer (unsigned) 2
101001 51 U1 A4 U1+n A5 A6 A7 1-byte integer (unsigned)
101010 52 U2 A8 U2+n A9 AA AB 2-byte integer (unsigned) 2
101100 54 U4 B0 U4+n B1 B2 B3 4-byte integer (unsigned) 2
FORMA
T
1 Non-printing characters are equipment specific.
2 Most significant byte sent first.
3 IEEE 754. The byte containing the sign bit is sent first.
ABS -- Any binary string Format: 10
Where Used: S2F25, S2F26
ACHA -- ACH Acknowledge code Format: 10
0 = acknowledge, ok
1 = can not perform now
2 = requested recipe(PPID) not found
7 = Port is not enabled
10 = bad parameter in S2F71 left side list
11 = bad parameter in S2F71 right side list
12 = error in S2F71 message
13 = process parameter error
14 = cassette not loaded
15 = enqueue failed
16 = FA option or S2F71 queue disabled
Where Used: S2F72
ACKC5 -- Acknowledge code Format: 10
0 = accepted
>0 = error, not accepted
1-63 = reserved
Where Used: S5F2, S5F4
ACKC6 -- Acknowledge code Format: 10
0 = accepted
>0 = error, not accepted
1-63 = reserved
64 = Bad PPID
Where Used: S6F12, S6F14
ACKC7 -- Acknowledge code Format: 10
0 = Accepted
1 = Permission not granted
2 = Length error
3 = Matrix overflow
4 = PPID not found
6 = Recipe with same name exists and can not overwrite (S7F4).
6-63 = reserved
Where Used: S7F4, S7F18
ACKC7A Format: 31, 51
0 = Accepted
1 = MDLN is inconsistent
2 = SOFTREV is inconsistent
3 = Invalid CCODE
4 = Invalid PPARM value
5 = Other error (described by ERRW7)
6-63 = reserved
Where Used: S7F27
ACKC10 -- Acknowledge Code Format: 10
0 = Accepted for display
1 = Message will not be displayed
2 = Terminal not available
3-63 reserved
64
Where Used: S10F2 , S10F4 , S10F6
ALCD -- Alarm code byte Format: 10
bit 7 = 1 means alarm set
bit 7 = 0 means alarm cleared
bit 6-0 = alarm category
0 = not used
1 = Personal safety
2 = Equipment safety
3 = Parameter control warning
4 = Parameter control error
5 = Irrecoverable error
6 = Equipment status warning
7 = Attention flags
8 = Data integrity
>8 = other categories
9-63 = reserved
Where Used: S5F2, S5F6
ALED-- Alarm enable/disable code, 1 byte Format: 10
bit 7 = 1 means enable alarm
bit 7 = 0 means disable alarm
Where Used: S5F3
ALID – Alarm identification Format: 5( )
All alarm identifications can be found in Appendix B of this document.
Note: The format of ALID is 54 in S5F1
Where Used: S5F1, S5F3, S5F5, S5F6
ALTX -- Alarm text limited to 40 characters Format: 20
All alarm text can be found in Appendix B of this document. Only the first 40 characters of the text is sent to the Host.
Where Used: S5F1
CCODE -- Command Code Format: 32, 52
Each command code corresponds to a unique process operation the machine is capable of performing.
Process OperationCommand
Command Code
(CCODE) Desc ription
DOPANT 1 Ion Name
PARAMETRIC MODE 2 Parametrics Operation
MULTIPLE 3 Number of Doses (Max. 12)
MASS 4 Ion Weight
CHARGE 5 Charge
SOURCE MODE 6 Gas/Vaporizer
ENERGY 7 Energy
EXT_V 8 Ex trac tion V olts
ACL/DCL 9 Accel/Decel
# SCANS 10 Minimum Scans
X SIGMA 11 Xsigma
ES VAC 12 Es Vacuum
CHECK 13 Check Interval
PURITY 14 Purity (E500 only)
W TYPE 15 Wafer Type
eFLOOD 16 Electron Flood
COOLING 17 Gas Cooling
MIRROR V 18 Mirror V olts
FLOOD MA 19 eFlood Current
ROTATIONS 20 Rotate 1
TILT 21 Tilt 1
TWIST 22 Tw ist 1
DOSE MANTISSA 23 Mantissa
DOSE EXPONENT 24 Exponent
25 Recipe Name
26 Softw are Revision
27 Recipe Version
28 Edit Date
29 Edit Time
30 Operator ID
31 Learn Date
32 EHP Option
33 Vaporizer Option
34 Recipe Status
35 Beam Slit
36 Interval Units
37 Dose Calibration
38 Arc Voltage
39 Arc Current
40 Filament Voltage
41 Filament Current
42 Extraction Current
43 Suppression Voltage
44 Suppression Current
45 Source Magnet Current
46 Source Magnet Voltage
47 Gas Pressure
48 Source Pressure
49 Pvaporizer Temperature
50 Vaporizer Temperature
51 X-Axis
52 Y-Axis
53 Z-Axis
54 Setup Beam Current
55 Setup Bias
56 Analyzer Current
57 Amu Tune Speed
58 Analyzer Pressure
59 Mirror Current
60 Mirror shunt Current
61 Quad1 Current
62 Quad1 Voltage
63 Quad2 Current
64 Quad2 Voltage
65 Deflector Voltage
66 Lens Current
68 BeamLine Pressure
69 FocusBeam Current
70 Source Type
71 Target Cup Bias
72 E Filament Voltage
73 E Filament Current
74 E Ripple Voltage
75 E Extraction Voltage
76 E Extraction Current
77 E Target Current
78 E Bias Voltage
79 E Bias Current
80 E Suppression Voltage
81 E Secondary Current
82 A Line
83 Beam Width
84 Target Beam Mantissa
85 Target Beam Exponent
86 Range Arc
87 X-Tune Speed
88 Y-Tune Speed
89 Noise
90 Ripple
91 Q1 Tune Speed
92 Q2 Tune Speed
93 Deflector Tune Speed
94 Beam Line Tune Speed
95 Calculated Scans
96 Gas String
97 Source Magnet Type
98 Num Pass
99 Num Fail
100 Last SetupDate
101 Last Setup Time
102 Spare 1
103 Spare 2
104 Spare 3
105 Spare 4
106 Spare 5
107 Spare 6
Where Used: S7F23, S7F26
CEED -- Collection event enable/disable code, 1 byte Format: 11
FALSE = Disable
TRUE = Enable
Where Used: S2F37
CEID -- Collected event ID Format: : 5( )
Identifies the event and report that is being sent. The format of CEID is 54 in S6F11. Supported Event ID's are:
CEID Description
1 Start up started
2 Start up complete
3 Shut down started
4 Shut down complete
5 Source setup started
6 Source setup complete
7 Beamline setup started
8 Beamline setup complete
9 Beamscan setup or check started
10 Beamscan setup or check complete
11 Batch started (GEM Compliant Process Started Started)
12 Batch complete (GEM Compliant Process Started completed)
13 Wafer started
14 Wafer complete
15 Alarm generated (GEM Compliant Alarmn Detected)
16 Alarm silence button pressed (GEM Compliant Alarmn Cleared)
17 Implant Held (GEM Compliant Processing Stopped)
18 Implant Continued
19 Abort started
20 Abort complete
21 Elevator vent started
22 Elevator vent complete
23 Door open started
24 Door open complete
25 Door close started
26 Door close complete
27 Elevator pump started
28 Elevator pump completed
29 Entering host control mode
30 Entering host monitor mode (SECS-II only)
31 High voltage enabled
32 High voltage disabled
33 Entering host ignore mode (SECS-II only)
34 Unload Sequence Started Version available 12.20
35 Pivot Retract Started Version available 12.20
36 Pivot Retract Complete Version available 12.20
37 Setup Only Complete
38 Wafer mapping started
39 Wafer mapping completed
40 Processing started
41 Cassette(s) removed
42 Ready to Process
43 Ready to Implant
44 Port Availability change at ACH or Eqpt
45 Cassette status change at ACH
46 Cassette status change at equipment port
47 Entering Factory Automation Off mode
48 Entering Factory Automation Manual mode
49 Entering Factory Automation Semi Auto mode
50 Entering Factory Automation Full Auto mode
51 Load/Unload ACH port Request
52 Load/Unload ACH port Request Complete
53 System Backup Started
54 System Backup Complete
55 Unused
56 Unused
57 Uniformity Precheck
58 Unused
59 Move Into ACH Port Request
60 Move Out of ACH Port Request
61 Move Into ACH Port Request Complete
62 Move Out of ACH Port Request Complete
63 Go Displayed
64 Go or Cont Button Pressed or remote command START received
from host
65 Pivot Extend Complete
66 Control State OFF-LINE
67 Control State ON-LINE, Local
68 Control State ON-LINE, Remote
69 Unused
70 Spool Activated
71 Spool Deactivated
72 Spool Transmit Failure
73 Operator Command Issued
74 Operator Command Complete
75 Processing State Change
76 Operator Changed Equipment Constant
77 Upper Trace Limit Exceeded
78 Lower Trace Limit Exceeded
79 Process Program Change
80 Process Program Selected
81 Message Recognition
82 Operator Log On
83 Operator Log Off
84 Ready to Receive Material
85 Material Sensed at Port
86 Host Command (Remote) Issued
87 Host Command (Remote) Complete
88 Job Created (Applicable to Process Job Queue)
Version available 12.20
89 Job Deleted (Applicable to Process Job Queue)
90 Job Completed (Applicable to Process Job Queue)
91 Queue Availability Changed (Applicable to Process Job Queue)
92 Job Processing Started (Applicable to Process Job Queue)
93 Job Processing Complete (Applicable to Process Job Queue)
94 Job Chain Modified (Applicable to Process Job Queue)
95 Timed Beam Run Started (Applicable to Process Job Queue)
96 Timed Beam Run Complete (Applicable to Process Job Queue)
97 Job Promoted (Applicable to Process Job Queue)
98 Job Preempt Successful (Applicable to Process Job Queue)
99 Job Preempt Unsuccessful (Applicable to Process Job Queue)
100 SMIF LPT Manual Control Mode
101 SMIF LPT Semi-Auto Control Mode
102 SMIF LPT Full-Auto Control Mode
103 SMIF LPT POD Placed
104 SMIF LPT POD Removed
105 SMIF LPT Load Ready
106 SMIF LPT Load Start
107 SMIF LPT Load Complete
108 SMIF LPT Unload Ready
109 SMIF LPT Unload Start
110 SMIF LPT Unload Complete
111 SMIF LPT Port Locked
112 SMIF LPT Port Unlocked
113 SMIF LPT Switched to Manual
114 SMIF LPT Switched to Auto
115 SMIF LPT Powered Up
116 SMIF LPT Load Aborted
117 SMIF LPT Unload Aborted
118 SMIF LPT init Started
119 SMIF LPT init Complete
120 SMIF LPT init aborted
121 SMIF LPT Cassette Placed on Equipment
122 SMIF LPT Port lock/unlock failed
123 Actual Smif Slot Map Available
124 EMID Actual Cassette ID Available Version available 12.15
125 EMID Actual Cassette ID Update Aborted Version available 12.15
126 Discard Job Version available 12.15
127 Actual SMIF Slot Map Validation Failed
128 Actual Cassette ID Validation Failed Version available 12.15
129 Actual Wafer ID Available
130 Actual Wafer ID Update Abort
131 Actual Wafer ID Validation Failed
132 Actual Equipment Slot Map Validation Failed
133 Actual Equipment Slot Map Update Aborted
134 Reject Pod
135 Actual Equipment Slot Map Validation Passed
136 Actual Smif Slot Map Validation Passed
137 EMID Validation Passed Version available 12.15
138 Actual Wafer ID Validation Passed
139 Actual Equipment Slot Map Validation Passed
140 Job Done Version available 11.05.04
141 Job Started Version available 11.05.04
142 Equipment Count Validation Failed Version available 11.05.04
143 Equipment Count Validation Passed Version available 11.05.04
144 SMIF Count Available Version available 11.05.04
145 SMIF Count Abort Version available 11.05.04
146 Smif Count Validation Failed Version available 11.05.04
147 SMIF Count Validation Passed Version available 11.05.04
160 SMART Tag Data Lot-id Available
161 SMART Tag File Data Available
162 SMART Tag Status Available
200 200+ Used for Limits Zone Transition for Analogs
2000 2000+ Used for Alarm On / Off
In addition, each alarm ID, ALID , has two CEIDs associated with it, one for alarm clear and one for alarm set. The alarm
IDs are calculated at initialization time based on the contents of the MESSAGES.USA file. The formulas for calculating
the alarm IDs are as follow:
Alarm Off CEID = (Alarm ID *2) + 300
Alarm On CEID = Alarm Off CEID + 1
VARIAN RESERVES THE RIGHT TO ADD ADDITIONAL EVENT CEIDs
The Varian GEM uses the CEID number for the SFCD and accesses the reports associated with the CEID.
Where Used: S2F35, S2F37, S6F11, S6F13
CEPACK -- Command Enhanced Parameter Acknowledge, 1 byte Format: 10, 51
0 = no error
1 = Parameter Name (CPNAME) does not exist
2 = Illegal Value specified for CEPVAL
3 = Illegal Format specified for CEPVAL
4 = Parameter name (CPNAME) not valid as used
5-63 = reserved
Where Used: S2F49
CEPVAL -- Command Enhanced Parameter Value Format: 0, 10, 11, 20, 21, 3( ), 4( ), 5( )
A specific application of CEPVAL shall always be identified with a specific value of CPNAME. A CEPVAL has the
following forms: a single (non-list) value (eg. CPVAL), a list of single items of identical format and type, or a list of items of
the form:
L,2
1. CPNAME
2. CEPVAL
Where Used: S2F49
COMMACK -- Establish Communications Acknowledge Code, 1 byte Format: 10
0 = Accepted
1 = Denied, Try Again
2-63 = Reserved
Where Used: S1F13, S1F14
CPACK -- Command Parameter Acknowledge Code, 1 byte Format: 10
1 = Parameter Name (CPNAME) does not exist
2 = Illegal Value specified for CPVAL
3 = Illegal Format specified for CPVAL
>3 = Other equipment=specific error
4-63 = reserved
64 = Discrepancy detected between WaferID and SlotMap parameters
Where Used: S2F42
CPNAME -- Command Parameter Name Format: 20
These are used in the remote command to designate the parameter being sent with the command. See the RCMD
section for CPNAME applicable to each remote command.
Where Used: S2F41
CPVAL -- Command Parameter Value Format: 10, 11, 20, 21, 3( ), 5( )
These are used in the remote command to set parameter values. See the RCMD section for CPVAL applicable to each
remote command.
Where Used: S2F41
DATAID -- Data ID Format: 5()
The data id is used to connect a multi- block request/grant message transaction with the actual multi- block message
transaction. In messages which originate from the Equipment, which include DATAID but are not multi- block, the
DATAID is undefined. In messages which originate from the Host and which are not multi- block but do contain
DATAID, DATAID will be ignored.
Note: The format of DATAID is 54 in S6F11
Where Used: S2F33, S235, S239, S6F5, S6F11, S6F13
DATALENGTH -- Total bytes to be sent Format: 3( ),5( )
Where Used: S2F39, S6F5
DRACK -- Define Report Acknowledge Code, 1 byte Format: 10
0 = Accept
1 = Denied. Insufficient space
2 = Denied. Invalid format
3 = Denied. At least one RPTID already defined
4 = Denied, At least VID does not exist
>4 = Other errors
5-63 = reserved
Where Used: S2F34
DSPER -- Data sample period Format: 20
hhmmss, 6 bytes
Where Used: S2F23
DVID Format: 5( )
The data variables may also be access with a VID of equivalent value using the functions appropriate for VID. See VID for
table showing relationship between data variables identifcation (DVID), equipment constant identifications(ECID), and
status variable identifications( SVID) . The data variable IDs are as follows:
DVID DVNAME DVID DVNAME
Implant And Machine Status Variables Recipe Data Process Program Variables
100 A(LLOT) 200 PPID
101 A(RLOT) 201 ION- NAME
102 LWAF# 202 ION- AMU
103 RWAF# 203 DOSE- MANTISSA
104 OP- NAME 204 DOSE- EXPONENT
105 OPERATOR- ID 205 ENERGY
106 WAFER- NUMBER 206 SCANS
107 WAFER- START- TIME 207 COOLING
108 WAFER- END- TIME 208 FLOOD
109 BATCH- START- TIME 209 <TILT
110 BATCH- END- TIME 210 <TWIST
111 aXSIGMA 211 ION- CHARGE
112 cSCANS 212 EST- VAC
113 aDOSE 213 X- SIGMA
114 aSCANS 214 Y- SIGMA
115 aYSIGMA 215 CHK- INT
116 216 Q- SOURCE
117 STATUS 217 W- TYPE
118 WAFER- HOLDS 218 F-LEARNED
119 BATCH- HOLDS 219 #MULTIPLE
120 LOT 220 GAS/VAPOR
121 #WAFERS 221 EXTRACTION
122 REMOTE- CONTROL 222 ACCEL/DECEL
123 TARGET- I 223 PURITY
124 BEAM- WIDTH 224 MIR-V
125 HOST- CONTROL 225 FLOOD-CURRENT
126 FAUTO 226 ROTATE
127 ACH-STATUS 227 LEFT-PPID
128 BPTN 228 RIGHT-PPID
129 CSTATUS
130 LPORT
131 RPORT
132 PORT-STATUS
133 WFR_CYC_TOT_LEFT
134 WFR_CYC_TOT_RIGHT
135 WFR_CYC_TOT_L/R
136 WFR_CYC_PM_LEFT
137 WFR_CYC_PM_RIGHT
138 WFR_CYC_PM_L/R
139 WAFERS_IMPLANTED
140 NUMBER_OF_SCANS
141 GAS1_TOTAL
142 GAS2_TOTAL
143 GAS3_TOTAL
144 GAS4_TOTAL
145 GAS1_4_TOTAL
146 GAS1_PM
147 GAS2_PM
148 GAS3_PM
149 GAS4_PM
150 GAS1_4_PM
151 PORT-ID
152 LPORT-STATUS
153 RPORT-STATUS
154 LMATERIAL-STATUS
155 RMATERIAL-STATUS
156 EXPECTED-SLOT-MAP(LLOT)
157 EXPECTED-SLOT-MAP(RLOT)
158 EXPECTED-WID(LLOT)
159 EXPECTED-WID(RLOT)
160 ACTUAL-MID(LLOT)
161 ACTUAL-MID(RLOT)
166 CURRENT-WAFER-ID
167 ID-VALIDATION(LLOT)
168 ID-VALIDATION(RLOT)
171 QUEUE-FULL
172 LEFT_WAFERS_IMPLANTED
173 RIGHT_WAFERS_IMPLANTED
174 BATCH_WAFERS_IMPLANTED
175 DI-WATER-FLOW
176 WHEREIS(LLOT)
177 WHEREIS(RLOT)
188 DOSE_CALIBRATION_FACTOR
193 JOB_ID_LIST
194 ECLAMP-I
195 JOB_ID
196 QUEUE_FREE_SLOTS
197 TAG-FILEDATA
198 LTAG-BATSTAT
199 RTAG-BATSTAT
GEM Compliant Data Variables GEM System Data Variables
300 PPChangeStatus 502 ALARMID
301 PPChangeName 503 DATAID
302 ProcessState 504 PREVIOUSCEID
303 PreviousProcessState 509 SPOOLSTARTTIME
304 PPExecName 510 SPOOLFULLTIME
305 Clock 511 SPOOLCOUNTACTUAL
306 EventsEnabled 512 SPOOLCOUNTTOTAL
307 AlarmsEnabled 513 GemSpoolState
308 AlarmsSet 514 GemSpoolFull
309
ControlState 515 GemSpoolLoadSubstate
310 PreviousControlState 516 GemSpoolUnloadSubstate
311 EventLimit
312 LimitVariable
313 TransitionType
Pump Status Variables Implanter and Processing Data
600 a1ESTurboCommStatus[0] 800 TARGET-FARADAY-DAC
601 a1ESTurboState[0] 801 LEFT-ELEV-SERVO-DAC
602 a1ESTurboCommStatus[1] 802 RIGHT-ELEV-SERVO-DAC
603 a1ESTurboState[1] 803 LEFT-ORIENTER-DAC
604 1OnBoardCommStatus 804 RIGHT-ORIENTER-DAC
605 a1OnBoardPumpStatus[0] 805 LEFT-HANDLER-DAC
606 a1OnBoardRegenStatus[0] 806 RIGHT-HANDLER-DAC
607 a1OnBoardPurgeValveStatus[0] 807 PLATEN-TILT-DAC
608 a1OnBoardRoughValveStatus[0] 808 LEFT-ORIENTER-LIFTER-DAC
609 a1OnBoardDelayStart[0] 809 RIGHT-ORIENTER-LIFTER-DAC
610 a1OnBoardDelayRestart[0] 810 ROTATING-PLATEN-DAC
611 a1OnBoardFastRoughTest[0] 811 ROPINS-MOTOR-DAC
612 a1OnBoardExtendedPurge[0] 812 ROTATION#
613 a1OnBoardRepurgeTime[0] 813 LINE#
614 a1OnBoardRepurgeCycles[0] 814 IMPLANT-STEP-PROCESS-TIME
615 a1OnBoardRORLimit[0] 815 SHUFFLE-MODE
616 a1OnBoardRORCycles[0] 816 LEFT-UPPER-ARM
617 a1OnBoardPowerFailRecoveryTemp[0] 817 RIGHT-UPPER-ARM
618 a1OnBoardFirstStageTempSetpoint[0] 818 PLATEN-ROTATION-SENSOR-COUNT
619 a1OnBoardSecondStageTempSetpoint[0] 819 EXTR-HV-TIME
620 a1OnBoardPumpStatus[1] 820 SOURCE-TIME
621 a1OnBoardRegenStatus[1] 821 ECO_SETTINGS
622 a1OnBoardPurgeValveStatus[1] 822 OPTION_SETTINGS
623 a1OnBoardRoughValveStatus[1]
624 a1OnBoardDelayStart[1]
625 a1OnBoardDelayRestart[1]
626 a1OnBoardFastRoughTest[1]
627 a1OnBoardExtendedPurge[1]
628 a1OnBoardRepurgeTime[1]
629 a1OnBoardRepurgeCycles[1]
630 a1OnBoardRORLimit[1]
631 a1OnBoardRORCycles[1]
632 a1OnBoardPowerFailRecoveryTemp[1]
633 a1OnBoardFirstStageTempSetpoint[1]
634 a1OnBoardSecondStageTempSetpoint[1]
635 a1OnBoardPumpStatus[2]
636 a1OnBoardRegenStatus[2]
637 a1OnBoardPurgeValveStatus[2]
638 a1OnBoardRoughValveStatus[2]
639 a1OnBoardDelayStart[2]
640 a1OnBoardDelayRestart[2]
641 a1OnBoardFastRoughTest[2]
642 a1OnBoardExtendedPurge[2]
643 a1OnBoardRepurgeTime[2]
644 a1OnBoardRepurgeCycles[2]
645 a1OnBoardRORLimit[2]
646 a1OnBoardRORCycles[2]
647 a1OnBoardPowerFailRecoveryTemp[2]
648 a1OnBoardFirstStageTempSetpoint[2]
649 a1OnBoardSecondStageTempSetpoint[2]
iQDP Pump Status Variables
650 lIqdpEndTask
651 lIqdpEnabled
652 alIqdpCommunicationsStatus[0]
653 alIqdpPumpStatus[0]
654 alIqdpPumpTemperature[0]
655 alIqdpPumpPower[0]
656 alIqdpPumpCurrent[0]
657 alIqdpExhaustPressure[0]
658 alIqdpWaterFlow[0]
659 alIqdpRunningTime[0]
660 alIqdpOilLevel[0]
661 alIqdpBlowerStatus[0]
662 alIqdpBlowerOilLevel[0]
663 alIqdpBlowerMotorTemperature[0]
664 alIqdpBlowerPower[0]
665 alIqdpBlowerPhaseCurrent[0]
666 alIqdpCommunicationsStatus[1]
667 alIqdpPumpStatus[1]
668 alIqdpPumpTemperature[1]
669 alIqdpPumpPower[1]
670 alIqdpPumpCurrent[1]
671 alIqdpExhaustPressure[1]
672 alIqdpWaterFlow[1]
673 alIqdpRunningTime[1]
674 alIqdpOilLevel[1]
675 alIqdpBlowerStatus[1]
676 alIqdpBlowerOilLevel[1]
677 alIqdpBlowerMotorTemperature[1]
678 alIqdpBlowerPower[1]
679 alIqdpBlowerPhaseCurrent[1]
680 alIqdpCommunicationsStatus[2]
681 alIqdpPumpStatus[2]
682 alIqdpPumpTemperature[2]
683 alIqdpPumpPower[2]
684 alIqdpPumpCurrent[2]
685 alIqdpExhaustPressure[2]
686 alIqdpWaterFlow[2]
687 alIqdpRunningTime[2]
688 alIqdpOilLevel[2]
689 alIqdpBlowerStatus[2]
690 alIqdpBlowerOilLevel[2]
691 alIqdpBlowerMotorTemperature[2]
692 alIqdpBlowerPower[2]
693 alIqdpBlowerPhaseCurrent[2]
Left Ergospeed II SMIF Variables Right Ergospeed II SMIF Variables
8300 Not Used 8400 Not Used
8301 Left ErgoSMIF Last Function 8401 Right ErgoSMIF Last Function
8302 Left ErgoSMIF RCMD Compl State 8402 Right ErgoSMIF RCMD Compl State
8303 Left ErgoSMIF Elevator State 8403 Right ErgoSMIF Elevator State
8304 Left ErgoSMIF Pod Placed 8404 Right ErgoSMIF Pod Placed
8305 Left ErgoSMIF Lock State 8405 Right ErgoSMIF Lock State
8306 Left ErgoSMIF Home State 8406 Right ErgoSMIF Home State
8307 Left ErgoSMIF Pneumatic Stroke State 8407 Right ErgoSMIF Pneumatic Stroke State
8308 Left ErgoSMIF Gripper State 8408 Right ErgoSMIF Gripper State
8309 Left ErgoSMIF Cassette in Gripper 8409 Right ErgoSMIF Cassette in Gripper
8310 Left ErgoSMIF Low Load 8410 Right ErgoSMIF Low Load
8311 Left ErgoSMIF Port Door State 8411 Right ErgoSMIF Port Door State
8312 Left ErgoSMIF Pressure State 8412 Right ErgoSMIF Pressure State
8313 Left ErgoSMIF FFU State 8413 Right ErgoSMIF FFU State
Where Used: S1F3, S1F11, S1F12, S2F23, S2F33, S2F45, S2F46, S2F47, S2F48; S6F13, S6F18, S6F22
DVNAME -- Data value name Format: 3( ),20,5( )
Where Used: S1F12
DVVAL -- Data value Format: 0, 10, 11, 20, 21, 3( ), 4( ), 5( )
Where Used:
EAC -- Equipment acknowledge code, 1 byte Format: 10
0 = Acknowledge
1 = Denied, At least one constant does not exist
2 = Denied, Busy
3 = Denied, At least one constant out of range
>3 = Other equipment-specific error
4-63 = reserved
Where Used: S2F16
ECDEF -- Equipment constant default value Format: 20, 5( )
Where Used: S2F30E5_S2F30_Equipment_Constant_Namelist
ECID -- Equipment Constant ID Format: 5( )
The equipment constants may also be access with a VID of equivalent value using the functions appropriate for VID. See
VID for table showing relationship between data variables identification (DVID), equipment constant identifications(ECID),
and status variable identifications(SVID). The Equipment constant IDs are as follows:
ECID ECNAME ECID ECNAME
250 T1 290 Not Used
251 T2 291 EQUIPMENT IP ADR
252 T3 292 CONNECT MODE
253 RTY 293 PASSIVE IP ADDRESS
254 T4 294 PASSIVE TCP PORT
255 Obsolete (always set to 0) 295 T5
256 FORMAT 296 T6
257 MODES 297 T7
258 Mirror-mode 298 T8
259 Accel-mode 299 BCR Mode
260 Extraction-volts 350 Connection Establishment
261 TYPE-RCP 351 Circuit Assurance
262 Establish-Comm-Timeout 352 TimeoutGrace
263 FACTAUTO 353 MemoryStall
264 PPTF 354 WriteStall
265 GemInitCommState 355 Submask
266 GemInitControlState 356 Router
267 Baud-Rate 357 MidVersion (Not Supported)
268 Equipment-ID
269 DEVICENAME
270 RPTYPE
271 CONFIGALARMS
272 CONFIGCONNECT
273 CONFIGEVENTS
274 WBITS5
275 WBITS6
276 WBITS10
277 HEARTBEAT
278 EQPORT_ENABLE
279 ACHPORT_ENABLE
280 GemConfigSpool
281 GemMaxSpoolFileSize
282 GemMaxSpoolTransmit
283 GemOverWriteSpool
284 GemSpoolFileName
285 GemMsgInterLv
286 MID-MODE
287 SMIF-MODE
288 GEMTASK LOG SIZE
289 EC TIMEFORMAT
Constants 258, 259 and 260 are used for recipe conversion and should be treated as a set. They are only used when
PPBODY1 recipes are used on version 9 software. These conversion numbers are ignored when using PPBODY2.
VARIAN RESERVES THE RIGHT TO ADD MORE EQUIPMENT
CONSTANTS
Where Used: S1F3, S1F11, S1F12, S2F23, S2F13, S2F15, S2F29, S2F30, S2F33, S2F45, S2F46, S2F47, S2F48;
S6F13, S6F18, S6F22
ECMAX -- Equipment constant maximum value Format: 5( )
Where Used: S2F30
ECMIN -- Equipment constant minimum value Format: 5( )
Where Used: S2F30
ECNAME -- Equipment constant name Format: 20
See ECID for list of equipment constant names.
Where Used: S2F30
ECV -- Equipment Constant Value Format: 20, 5( )
See variable dictionary for a list for individual ECV format.
Where Used: S2F15
EDID -- Expected data Identification Format: 10, 20, 3( ), 5( )
Three possible responses.
MEXP EDID EDID
S02F03, <SPID> A[6]
S03Fl3, <PTN> B[1]
S07F03, <PPID> A[16], B[16]
Where Used: S9F13
ERACK -- Enable/Disable Event Report Format: 10
Acknowledge Code, 1 byte
0 = Accepted
1 = Denied. At least one CEID does not exist
<1 = Other Errors
2-63 = reserved
Where Used: S2F38
ERRW7 Format: 20
Text string describing error found in process program
Where Used: S7F27
ESID - Equipment Port Number Format: 10
ESID designates the stage location of the Equipment Port Number
1 = Left
2 = Right
Note: Factory Automation Only
Where Used: S2F71
FCNID -- Function Identification Format: 51
Where Used: S2F43, S2F44
GRANT -- Grant code, 1 byte Format: 10
0 = Permission Granted
1 = Busy, Try Again
2 = No Space Available
3 = Duplicate DATAID
>3 = Equipment Specific Error Code
4-63 = reserved
Where Used: S2F40
GRANT6 -- Permission to send, 1 byte Format: 10
0 = Permission granted
1 = Busy, try again
2 = Not interested
>2 = Other errors
3-63 = reserved
Where Used: S6F6
HCACK -- Host Command Parameter Acknowledge Code, 1 byte Format: 10
0 = Acknowledge, command has been performed
1 = Command does not exist
2 = Cannot perform now
3 = At least one parameter is invalid
4 = Acknowledge, command will be performed with completion signaled later by an event
5 = Rejected, Already in Desired Condition
6 = Object does not exist
7-63 = reserved
64= Double Implant not allowed
65-127 = Left and right SMIF LPT (LPT must be present to occur)
LSB
7 6 5 4 3 2 1 0
0 1 LPT1 LPT1 LPT1 LPT2 LPT2 LPT2
MSB
Bit 6 1
bits 5-3 LPT HCACK code for the left LPT1
bits 2-0 LPT HCACK code for the right LPT2
LPT HCACK code
0h: LPT Completed command
1h: LPT in manual mode
2h: No Pod in place
3h: Host not ready
4h: Limit not reached
5h: LPT already in desired state
6h: LPT does not understand command
7h: LPT cannot perform command or E220 cannot send command to LPT
Where Used: S2F42
LENGTH Format: 5( )
Length of the service program or process program in bytes
Where Used: S7F1
LIMITACK Format: 10
Acknowledgment code for variable limit attribute set, 1 byte.
1 = LIMITID does not exist
2 = UPPERDB > LIMITMAX
3 = LOWERDB < LIMITMIN
4 = UPPERDB < LOWERDB
5 = Illegal format specified for UPPERDB or LOWERDB
6 = ASCII value cannot be translated to numeric
7 = Duplicate limit definition for this variable
>7 = Other equipment-specific error
8-63 = reserved
Where Used: S2F46
LIMITID Format: 10
The identifier of a specific limit in the set of limits (as defined by UPPERDB and LOWERDB) for a variable to which the
corresponding limit attributes refer, 1 byte. The range of allowable Ids is 0 - 6.
Where used: S2F45, S2F46, S2F48
LIMITMAX Format: 20
Presently the highest possible value for the SV’s value (99.9, 9, 9.99999)
Where used: S2F48
LIMITMIN Format: 20
Presently the lowest possible value for the SV’s value (0 or 0.0000099)
Where used: S2F48
LOTID - Material ID 16 bytes maximum Format: 20
This is the lot number for 1 cassette of wafers to be processed.
Note: Factory Automation only
Where used: S2F71
LOWERDB Format: 20
A variable limit attribute which defines the lower boundary of the deadband of a limit. The value applies to a single limit
(LIMITID) for a specified VID. Thus, UPPERDB and LOWERDB as a pair define a limit.
Where used: S2F45, S2F48
LRACK - Link Report Acknowledge Code, 1 byte Format: 10
0 = Accepted
1 = Denied. Insufficient space
2 = Denied. Invalid format
3 = Denied. At least one CEID link already defined
4 = Denied. At least one CEID does not exist
5 = Denied. At least one RPTID does not exist
>5 = Other errors
6-63 = reserved
Where Used: S2F36
LVACK Format: 10
Variable limit definition acknowledge code, 1 byte. Defines the error with the limit attributes for the referenced VID.
1 = Variable does not exist
2 = Variable has no limits capability
3 = Variable repeated in message
4 = Limit value error as described in LIMITACK
5-63 = reserved
Where Used: S2F46
MDLN -- Equipment Model Type, 6 bytes max Format: 20
The Equipment model type of the E220 is a 4 character string and will be "E220"
Where Used: S1F2; S1F13 , S1F14
MEXP Format: 20
Message expected in the form SxxFyy where x is stream and y is function.
Where Used: S9F13
MHEAD Format: 10
SECS message block header associated with message block in error
Where Used: S9F1, S9F3, S9F5, S9F7, S9F11
MID 16 Characters maximum Format: 20
This is the lot name for one cassette of wafers to be processed.
Where Used: S2F41, S2F71
OFLACK Format: 10
Acknowledge code for OFF-LINE request.
0 = OFF-LINE Acknowledge
1-63 Reserved
Where Used: S1F16
ONLACK -- Acknowledge code for ON-LINE request. Format: 10
0 = ON-LINE Accepted
1 = ON-LINE Not Allowed
2 = Equipment Already ON-LINE
3-63 = Reserved
Where Used: S1F18
PPARM -- Process Parameter Format: 11, 20, 3( ), 4( ), 5( )
Numeric or Boolean SECS data item, single or multiple value, or text string which provides information required to
complete the process command to which the parameter refers.
PPID used by the PPselect remote command.
Where Used: S7F23, S7F26
PPBODY -- Process program body Format: 10
The process program describes to the equipment, in its own language, the actions to be taken in processing the material it
receives. . Four process program formats are supported. They are supported for the sake of compatibility with former
models and software revisions of the equipment.
The equipment can receive any format and convert it to the most recent format for operator editing and equipment use.
Parameters not available in older formats are set to default values.
The equipment will transmit the format set by the TYPE-RCP equipment constant.
Where Used: S7F3, S7F6, S7F18
PPBODY1 -- Process program body (Version 8) Format: 10
This process program is made up of 24 fields for each pass. All fields are two bytes long. If a field should not change
from one pass to the next, it must be given a value of 32768. All items in the body are 2 byte integers (format: 32) except
for Ion Name which consists of 2 ASCII characters. Each 2 byte field should be given in reverse order, that is, LSB first,
MSB second. In the case of the Ion Name, the two letters should be in reverse order.
The Fields are:
Ion Name
Ion Weight
Dose Mantissa
Dose Exponent
Energy
Minimum Scans
Gas Cooling
Flood
Tilt
Twist
Charge
ES Vacuum
X-Sigma
Y-Sigma if value = 0 then Accel Mode; if -1 the Decel Mode
Check Interval
Quality if value > 5 it will be stored as Mirror.
Wafer type
Unused1
Unused2
Unused3
Unused4
Unused5
Unused6
Unused7
The Unused space is reserved for future additions and should be space filled. Each process will be a multiple of 48 bytes
long.
Where Used: S7F3, S7F6, S7F18
PPBODY2 Format: 10
All quantities are 16 bit format.
Byte Field name Description
1 Ion Name ASCII 2 characters
2 Learned 0 or 1 (Reset (0) after a Dow nload)
3 #multilines 1-12 If equipped w ith rotating platen
4 Ion Weight
5 Charge 1, 2, or 3
6 Gas/Vapor
0 - Gas
1 - Vaporizer
7 Energy 1 - 750
8 Extraction Volts
Unit 0.1 0 - 400 E220
0 - 700 E500
9 Accel/Decel
0 - Accel
1 - Decel
10 Minimum scans
11 Xsigma Unit 0.01
12 Es Vacuum Unit 10-7 torr
13 Check interval Unit 1 minute
14 Purity E500 only
15 Wafer Type 0 - 5
16 Electron Flood
0 - Disabled
1 - Enabled
17 Gas Cooling
0 - Disabled
1 - Enabled
18 Mirror volts Units 0.1 0 - 300
19 Eflood Current Unit 0.1 mA
20 Unused
21 Unused
22 Unused
23 Unused
24 Unused
25 Unused
26 Rotate 1 0, 1 no rotation 0 - 30
27 Tilt 1 0 - 90
28 Tw ist 1 0 - 359
29 Mantissa 3 digits
30 Exponent Machine Specific Range
31 Unused
32 Unused
33 Unused
Where Used: S7F3, S7F6, S7F18
PPBODY2 LONG Format: 10
Contains the data from a PPBODY2 SHORT in addition to the following:
Byte Name Byte Name Byte Name
34 Rotate 2 42 Rotate 3 50 Rotate 4
35 Tilt 2 43 Tilt 3 51 Tilt 4
36Twist 244Twist 352Twist 4
37 Mantissa 45 Mantissa 53 Mantissa
38 Exponent 46 Exponent 54 Exponent
39 Unused 47 Unused 55 Unused
40 Unused 48 Unused 56 Unused
41 Unused 49 Unused 57 Unused
58 Rotate 5 66 Rotate 6 74 Rotate 7
59 Tilt 5 67 Tilt 6 75 Tilt 7
60Twist 568Twist 676Twist 7
61 Mantissa 69 Mantissa 77 Mantissa
62 Exponent 70 Exponent 78 Exponent
63 Unused 71 Unused 79 Unused
64 Unused 72 Unused 80 Unused
65 Unused 73 Unused 81 Unused
82 Rotate 8 90 Rotate 9 98 Rotate 10
83 Tilt 8 91 Tilt 9 99 Tilt 10
84 Tw ist 8 92 Tw ist 9 100 Tw ist 10
85 Mantissa 93 Mantissa 101 Mantissa
86 Exponent 94 Exponent 102 Exponent
87 Unused 95 Unused 103 Unused
88 Unused 96 Unused 104 Unused
89 Unused 97 Unused 105 Unused
106 Rotate 11 114 Rotate 12
107 Tilt 11 115 Tilt 12
108 Tw ist 11 116 Tw ist 12
109 Mantissa 117 Mantissa
110 Exponent 118 Exponent
111 Unused 119 Unused
112 Unused 120 Unused
113 Unused 121 Unused
Where Used: S7F3, S7F6, S7F18
PPBODY3 - High Performance Recipe Format: 10
PPBODY2 formatting contains all data from the PPBODY2 LONG format with the addition of learned parameters,
maximum/minimum ranges for each parameter, and the type of interlock when a processing parameter exceeds the
specified range. PPBODY3 is the recommended formatting for the E220/E500 medium current ion implanter
PPBODY3 has a total length of 1518 bytes. This lays out the length and possible values of each data item as it appears
in SECS messages downloaded from or uploaded to the host. The possible data types used are:
Type Description
ASCII Plain text
Short Signed 2-byte integer
Ushort Unsigned 2-byte integer
Tgt_lim
8-byte structure consisting of:
2 bytes ushort Low Limit
2 bytes ushort Target
2 bytes ushort HiLimit
2 bytes ushort Interlock
The possible values for Interlock are:
0 = Ignore
1 = Warning
2 = Critical
Scaler is also included in the Remarks column. This number is applied to the raw value to get the final value as displayed
in the E220/500 recipe screen. For example, a raw value of 2000 with a scaler of 2 will be displayed as 20.00. For data
items with the Tgt_lim type, scalar is only applied to the LowLimit, Target and HiLimit.
Data items with format marked as "(learned)" are filled in by the E220/500 after the recipe has been learned in
parametric setup.
Header Parameters
Parameter Ccode Bytes Type Offset Raw Values Remarks Units
PPID Name 25 16 ASCII 0 16 Char
Softw are Rev 26 8 ASCII 16 xx.xx.xx 8 Char
Recipe Version 27 2 Ushort 24
Incremented after
each edit #NAME?
Edit Date 28 10 ASCII 26 mm/dd/yy 2 Trailing blanks
mm/dd/yy
10 Char
Edit Time 29 10 ASCII 36 hh:mm 5 Trailing blanks hh:mm, 10 Char
Operator ID 30 8 ASCII 46 8 Char
Learn Status 2 2 Ushort 54
1=Learned
0=NotLearned Y/N Short
Learn Date 31 10 ASCII 56 mm/dd/yy 2 Trailing blanks
mm/dd/yy
10 Char
Setup Difficulty 32 2 Ushort 66
99=Ehp
0= Not Ehp Short
Vaporizer Option 33 2 Ushort 68
1=standard
59=dual
vaporizer
59 valid only if
option 59 is
enabled Short
Recipe Status 34 2 Ushort 70 0 - 300
ro/rw /appr
Short
#Multilines 3 2 Ushort 72 12-Jan Short
Last Setup Date 100 10 ASCII 74 mm/dd/yy 2 Trailing blanks 10 Char
Last Setup time 101 10 ASCII 84 hh:mm 5 Trailing blanks 10 Char
Dopant 1 2 ASCII 94 2 Char
Gas String 96 6 ASCII 96 (learned) Gas Identifier 6 Char
Charge 5 2 Ushort 102
1 if DECEL
1,2,3 if ACCEL 1+/2+/3+, Short
Accel/Decel 9 2 Short 104 #NAME? A/D, Short
Gas/Vapo Flag 6 2 Short 106 #NAME?
If option 1 or
option 59 is set,
vaporizer can be
on or off, else
must be vaporizer G/V, Short
EFlood 16 2 Short 108 #NAME?
Must match Eflood
option ON/OFF, Short
Cooling 17 2 Short 110
-1 = On/ 0 or
any other value
= Off Wafer cooling ON/OFF, Short
Beam Slit 35 2 Ushort 112
If option 75 is
set, 0,1,2 else,
0,1
0 = off
1 = narrow
2 = w ide
OUT/NA R/WIDE,
Short
Interval Units 36 2 Ushort 114
0 = w afers
1 = minutes min/w af, Short
Check Interval 13 2 Ushort 116 0 - 60 Short
Beam Purity 14 2 Ushort 118 0 - 2000
Unit = %
scaler = 2 %, Short
Dose Calibration 37 2 Ushort 120 0 - 20000
Unit = %
scaler = 2 %, Short
Wafer Type 15 2 Ushort 122 0 - 20 #, Short
XSigma 11 2 Ushort 124 0 - 1000 Scaler = 2 #, Short
Source Parameters
Parameter Units
Default
Min / Max
Spec.
Min / Max
Default
Inter loc k
Arc V V 5% 0/300 w arning
Arc I
amps
(range dependent) 5% 0/999 w arning
Arc Range
Filament V V 20% 0/7.5 ignore
Filament I V 20% 0/200 ignore
Extraction V kV 1% 0/40.0 critical
Extraction I mA 1% 0/25.0 ignore
Suppression V kV 1% 0/2.00 critical
Suppression I mA 1% 0/50.0 ignore
Src Magnet I A 5% 0/50.0 w arning
Src Magnet V V 5% 0/20.0 ignore
Gas Press PSI 5% 0/9.99 w arning
Source Pressure TORR 5% 0 ignore
Vap Temp *C 5% 0/999 w arning
Heater Temp *C 5% 0/999 w arning
X Axis mm 5% 0/999. w arning
Y Axis mm 5% 0/999. w arning
Z Axis mm 5% 0/999. w arning
X Tune Speed
Y Tune Speed
Set Up Beam I
amps
(range dependent) --- 0/999 not monitored
Set Up Bias V 5% w arning
Spare 1
Spare 2
Spare 3
Noise
Ripple
Parameter Ccode Bytes Type Offset Raw Values Remarks
Arc V 38 8 Tgt_lim 126 0 – 300 Unit = V, scaler = 0
Arc I 39 8 Tgt_lim 134
0 – 9999 for Non-EHP
0 – 15000 for EHP
Unit = Arc Range
dependent (see item
below ), scaler = 0
Arc Range 86 2 Ushort 142 0 - 4
0 = A, 4 = uA, other
value = mA
Filament V 40 8 Tgt_lim 144 0 - 750 Unit = V, scaler = 2
Filament I 41 8 Tgt_lim 152 0 - 200 Unit = A, scaler = 0
Extraction V 8 8 Tgt_lim 160 0 - 720 Unit = kV, scaler = 1
Extraction I 42 8 Tgt_lim 168 0 - 250 Unit = mA, scaler = 1
Suppression V 43 8 Tgt_lim 176 0 - 200 Unit = KV, scaler = 2
Suppression I 44 8 Tgt_lim 184 0 - 5000 Unit = mA, scaler = 2
Src Magnet I 45 8 Tgt_lim 192 0 - 500 Unit = A, scaler = 1
Src Magnet V 46 8 Tgt_lim 200 0 -200 Unit = V, scaler = 1
Gas Press 47 8 Tgt_lim 208 0 - 999 Unit = PSI, scaler = 2
Source Pressure 48 8 Tgt_lim 216 0 - 4000 Unit = uT, scaler = 2
PVap Temp 49 8 Tgt_lim 224 0 - 999
Unit =
(prog lamp temperature)
Vap Temp 50 8 Tgt_lim 232 0 - 999 Unit =
X Axis 51 8 Tgt_lim 240 0 - 999 Unit = mm, scaler = 0
Y Axis 52 8 Tgt_lim 248 0 - 999 Unit = mm, scaler = 0
Z Axis 53 8 Tgt_lim 256 0 - 999 Unit = mm, scaler = 0
X Tune Speed 87 2 Ushort 264 (learned)
Y Tune Speed 88 2 Ushort 266 (learned)
Set Up Beam I 54 2 Ushort 268 (learned)
Unit = A (range
dependent)
Set Up Bias 55 2 Ushort 270 (learned) Unit = V
Spare 1 102 2 Ushort 272 Unused
Spare 2 103 2 Ushort 274 Unused
Spare 3 104 2 Ushort 276 Unused
Noise 89 2 Ushort 278 (learned)
Ripple 90 2 Ushort 280 (learned)
Beamline Parameters
Parameter Units
Default
Min / Max
Spec.
Min / Max
Default
Inter loc k
Analyzer I A 0.20% 0/150 w arning
Analyzer AMU AMU 0.5 AMU 0/200 critical
AMU tune speed # --- --- not monitored
Analyzer
Pressure TORR 5% 0 ignore
Mirror V kV 5% 0/30.0
0/60.0 critical
Mirror I mA 5% 0/2.50 ignore
Mirror Shunt I mA 5% 0/2.50 ignore
Q1 I A 5% 0/50.0 w arning
Q1 V V 5% 0/20.0 ignore
Q2 I A 5% 0/50.0 w arning
Q2 V V 5% 0/20.0 ignore
Deflector V kV 5% 0/20.0 w arning
Spare 4
Spare 5
Spare 6
Q1 Tune Speed
Q2 Tune Speed
Deflector Tune
Speed
Bmln Y Tune
Speed
Lens I mA 5% 0/150.0 w arning
Lens V V 5% 0/40.0 ignore
Bmln Pressure
Scans # 10% 4000 w arning
Calculated Scans # --- 0/4000 not monitored
Focus Cup Beam
I
amps
(range dependent) --- 0/999 not monitored
Src Type
Src Mag Type
Calculated Scans # --- 0/4000 not monitored
Num Pass
Num Fail
Target Cup Beam
I
amps
(range dependent) --- 0/999 not monitored
Target Beam I
Exponent
Parameter Ccode Bytes Type Offset Raw Values Remarks
Analyzer I 56 8 Tgt_lim 282
0 – 1500 for non-EHP
0 – 1200 for EHP
Unit = A
Scaler = 1 for non-EHP
Scaler = 2 for EHP
Analyzer AMU 4 8 Tgt_lim 290
0 – 1500 for non-EHP
0 – 1200 for EHP
Unit = A MU
scaler = 1 for non-EHP
Unit = Gauss
scaler = 2 for EHP
AMU tune speed 57 2 Ushort 298 (learned)
Analyzer
Pressure 58 8 Tgt_lim 300 0 - 4000
Unit = uT, scaler = 2,
option = Analyzer CCIG
Mirror V 18 8 Tgt_lim 308 0 – 600
Unit = kV, scaler = 1
Option = 60kV Mirror
Mirror I 59 8 Tgt_lim 316 0 - 120 Unit = mA, scaler = 2
Mirror Shunt I 60 8 Tgt_lim 324 0 - 250 Unit = mA, scaler = 2
Q1 I 61 8 Tgt_lim 332 0 - 500 Unit = A, scaler = 1
Q1 V 62 8 Tgt_lim 340 0 - 200 Unit = V, scaler = 1
Q2 I 63 8 Tgt_lim 348 0 - 500 Unit = A, scaler = 1
Q2 V 64 8 Tgt_lim 356 0 - 200 Unit = V, scaler = 1
Deflector V 65 2 Ushort 364 (learned) Unit = kV, scaler = 1
Spare 4 105 2 Ushort 366 Unused
Spare 5 106 2 Ushort 368 Unused
Spare 6 107 2 Ushort 370 Unused
Q1 Tune Speed 91 2 Ushort 372 (learned)
Q2 Tune Speed 92 2 Ushort 374 (learned)
Deflector Tune
Speed 93 2 Ushort 376 (learned)
Bmln Y Tune
Speed 94 2 Ushort 378 (learned)
Lens I 66 8 Tgt_lim 380 0 - 1500 Unit = mA, scaler = 1
Lens V 67 8 Tgt_lim 388 0 - 4000 Unit = V, scaler = 2
Bmln Pressure 68 8 Tgt_lim 396 0 - 4000 Unit = uT, scaler = 2
Scans 10 8 Tgt_lim 404 1-4000 Unit = #, scaler = 0
Calculated Scans 95 2 Ushort 412 (learned) Unit = #
Focus Cup Beam
I 69 2 Ushort 414 (learned)
Unit = A (range
dependent)
Src Type 70 2 Ushort 416 (learned)
Src Mag Type 97 2 Ushort 418 (learned)
Num Pass 98 2 Ushort 420 (learned)
Num Fail 99 2 Ushort 422 (learned)
TargetCup Beam
I 84 2 Ushort 424 (learned)
Unit = A (range
dependent)
Target Beam I
Exponent 85 2 Short 426 (learned)
End Station Parameters
Parameter Units
Default
Min / Max
Spec.
Min / Max
Def ault
Inter loc k
ES Vac Pressure TORR 1% 0 w arning
Target Cup Bias V V 5% 0/250 w arning
Beam Width
eFilament V Volts 5% 0/20.0 ignore
eFilament I Amps 5% 0/13.0 ignore
eRipple Volts Volts 5% 0/50.0 ignore
eExtraction V Volts 5% 0/350 ignore
eExtraction I Amps 5% 0/99.9 ignore
eTarget I mA 5% 0/99.9 ignore
eBias V Volts 5% 0/25.0 ignore
eBias I mA 5% 0/10.0 ignore
eSuppression V Volts 5% 0/999 ignore
eSecondary I mA 5% 0/10.0 ignore
Parameter Ccode Bytes Type Offset Raw Values Remarks
ES Vac Pressure 12 8 Tgt_lim 428 0 -5000 Unit = uT, scaler = 2
Target Cup Bias V 71 8 Tgt_lim 436
0 – 250 for non-flood
gun
0 – 999 for flood gun Unit = V, scaler = 0
Beam Width 83 2 Ushort 444 (learned)
eFilament V 72 8 Tgt_lim 446 0 - 200
Unit = V, scaler=
1,option= eflood
eFilament I 73 8 Tgt_lim 454 0 - 130
Unit = A, scaler=
1,option= eflood
eRipple Volts 74 8 Tgt_lim 462 0 - 500
Unit = V, scaler=
1,option= eflood
eExtraction V 75 8 Tgt_lim 470 0 - 350
Unit = V, scaler=
0,option= eflood
eExtraction I 76 8 Tgt_lim 478 0 - 999
Unit = A, scaler=
1,option= eflood
eTarget I 77 8 Tgt_lim 486 0 - 999
Unit = mA, scaler=
1,option= eflood
eBias V 78 8 Tgt_lim 494 0 - 250
Unit = V, scaler= 1,
option= eflood
eBias I 79 8 Tgt_lim 502 0 - 100
Unit= mA, scaler= 1,
option= eflood
eSuppression V 80 8 Tgt_lim 510 0 - 999
Unit = V, scaler = 0,
option = eflood
eSecondary I 81 8 Tgt_lim 518 0 - 100
Unit= mA, scaler=
1,option = eflood
AnalyzerG 109 8 Tgt_lim 526 0 - 1200 Unit= G, scaler= 2
Spares 192 Uchar 534
Multi-line Parameters
Note: There are 12 recipe lines, each consisting of data with the structure shown below.
CCODE 82 is the whole multi-line section, consisting of the parameters below.
CCODE 108 is one line.
Parameter Units
Default
Min / Max
Spec.
Min / Max
Def ault
Inter loc k
Dose (mant+expo) ions/cm² ---- 1.00E+20 ----
Dose Exponent
Rotations # ---- 0 /16 critical
Tilt DEG ---- 0/90 critical
Tw ist DEG ---- 0/359 critical
Energy keV 1% 1/400 w arning
Accel V kV 1% /200. ignore
Accel I mA 1% 5 ignore
Decel V V 1% 30 ignore
Decel I mA 1% 2.5 ignore
Accel Suppression V V 5% 5 ignore
Accel Suppression I mA 5% 5 ignore
Parameter Ccode Bytes Type Offset Raw Values Remarks
Dose Mantissa 2 Ushort 726 1000 - 9999
Unit= ions/cm², scaler
= 3
Dose Exponent 2 Ushort 728 17-Sep
Rotations 2 Ushort 730 0 - 30 Unit = #
Tilt 2 Ushort 732 0 -90 Unit = DEG
Tw ist 2 Ushort 734 0 - 359 Unit = DEG
Energy 8 Tgt_lim 736 0 - 750 Unit = keV, scaler = 0
Accel V 8 Tgt_lim 744 0 - 1950 Unit = kV, scaler = 1
Accel I 8 Tgt_lim 752 0 - 8000 Unit = mA, scaler = 3
Decel V 8 Tgt_lim 760 0 - 300 Unit = V, scaler = 1
Decel I 8 Tgt_lim 768 0 - 250 Unit = mA, scaler = 2
Accel Suppr V 8 Tgt_lim 776 0 - 500 Unit = V, scaler = 2
Accel Suppr I 8 Tgt_lim 784 0 - 500 Unit = mA, scaler = 2
Multiline 2 offset = 792
Multiline 3 offset = 858
Multiline 4 offset = 924
Multiline 5 offset = 990
Multiline 6 offset = 1056
Multiline 7 offset = 1122
Multiline 8 offset = 1188
Multiline 9 offset = 1254
Multiline 10 offset = 1320
Multiline 11 offset = 1386
Multiline 12 offset = 1452
End of recipe offset = 1518
Where Used: S7F3, S7F6, S7F18
PPGNT -- Process program grant status, 1 byte Format: 10
0 = OK
1 = already have
2 = no space
3 = invalid PPID
4 = busy, try later
5 = will not accept
>5 = other error
6-63 = reserved
Where Used: S7F2
PPID -- Process program ID. Format: 20
The recipe name as it appears in the process screens of the E220. Maximum of 16 characters. Trailing spaces are
ignored
Where Used: S7F1, S7F3, S7F5, S7F6, S7F17, S7F20
RCMD Format: 20
Code Name Action commanded Screens
(See note on screens
below)
1 START-UP Pump vacuum system, initialize handler Host Control
Batch Status
2 SHUT-DOWN Turn off ion source, idle vacuum system Host Control
Batch Status
3 STOP Cease setting up or processing wafers Host Control
Batch Status
Implant
Auto Source
Auto Scan
Manual Beam
4 START Start processing wafers or continue setting
up Host Control
Batch Status
Implant
Auto Source
Auto Scan
Manual Beam
5 ABORT Abort current operation and return wafers if
aborting during implant Host Control
Batch Status
Implant
Auto Source
Auto Scan
Manual Beam
6 VENT-ONLY Vent elevators (Doors not opened) Host Control
Batch Status
7 PUMP-ONLY Pump elevators Host Control
Batch Status
8 OPEN-ONLY Open elevator doors Host Control
Batch Status
9 CLOSE-ONLY Close elevator doors Host Control
Batch Status
10 CLOSE&PUMP Close elevator doors, pump elevators and
maps wafers Host Control
Batch Status
11 VENT&OPEN Vent elevators and open elevator doors Host Control
Batch Status
12 CYCLE-TEST Map and cycle all wafers present Host Control
Not available in V11.01 and newer software Batch Status
13 RR-PROCEED Proceed, Response to E220 Operator
Message Any Screen after message
appears
14 RR-NOT- Do Not Proceed, Response to E220
PROCEED Operator Message
15 FACTORY-
AUTO Factory Automation Equipment lot
scheduling start Any Screen after message
appears
16 PPSELECT Choose Process Program for Batch Host Control
Batch Status
Parameter Name CPNAME = PPID
Parameter Value CPVAL (Format A) = 16-
character PPID name
CPNAME = LOC
CPVAL (Format B) =
1 - Left
2 – Right
3 - Both
CPNAME = MID1
CPVAL (Format A) = 16- character Left Lot
Name
CPNAME = MID2
CPVAL (Format A) = 16-character Right Lot
Name
CPNAME = START-WAF1
CPVAL (Format B) = starting slot to process
on the left
CPNAME = WAF-COUNT1
CPVAL (Format B) = number of wafers to
process on the left
CPNAME = START-WAF2
CPVAL (Format B) = starting slot to process
on the right
CPNAME = WAF-COUNT2
CPVAL (Format B) = number of wafers to
process on the left
CPNAME = JOB-TIME
CPVAL (Format U2) = number of minutes to
wait after a SETUP-ONLY job. 0 to 120
minutes. Applicable only if Process Job
Queue is enabled.
CPNAME = WAFER-RANGE-CHECK
CPVAL (Format BOOLEAN)
If true, the number of wafers to be
processed as specified by START-WAF and
WAF-COUNT are checked against the
number of wafers mapped. If there is a
conflict, an error message is displayed.
CPNAME = SHUFFLE-MODE
CPVAL (Format BOOLEAN)
If true, a shuffle mode will be performed.
Note: This command will be rejected if ECO
37 (Wafer Shuffle Mode) is not selected.
CPNAME = JOB-ID
CPVAL (Format A) = 16-character Host-
assigned job-id. If the host specifies a JOB-
ID that has a duplicate, the equipment
replies with S2F42, HCACK=3, invalid JOB-
ID.
CPNAME = PPID-LIST
CPVAL (Format L) = list of 16-character
PPID names that the job’s materials will be
process with. (chained implant).
S2F49 message should be used with this
parameter.
CPNAME = WaferID1
CPVAL (Format L) = list of 48-character
WaferIDs on the left side that will be used to
identify the wafer being processed. If the
slot is empty, a blank WaferID should be
used. Applicable only if MID Module is
enabled.
CPNAME = SlotMap1
CPVAL (Format L) = list of Format- B flags
to specify that the wafer in a slot exists on
the left.
0x00 – no wafer in the slot
0x01 – wafer exists in the slot
Applicable only if MID Module is enabled.
CPNAME = WaferID2
CPVAL (Format L) = list of 48-character
WaferIDs on the right side that will be used
to identify the wafer being processed. If the
slot is empty, a blank WaferID should be
used. Applicable only if MID Module is
enabled.
CPNAME = SlotMap2
CPVAL (Format L) = list of Format- B flags
to specify that the wafer in a slot exists on
the right.
0x00 – no wafer in the slot
0x01 – wafer exists in the slot
Applicable only if MID Module is enabled.
17 PPCLEAR-LEFT Clears the selected process program and lot
id for the left loadlock. Not applicable in FA
semi or full-auto mode.
Any screen
18 PPCLEAR-
RIGHT Clears the selected process program and lot
id for the right loadlock. Not applicable in
FA semi or full-auto mode.
Any screen
19 SETUP-ONLY Starts source, beamline and beamscan
setups even if the loadlocks are not closed
and pumped.
Any screen
20 START-
PROCESS Start the job at the top of the Process Job
queue (V12.20 Feature).
21 LEFT-VENT Vent Left Loadlock Host Control, Batch Status
22 LEFT-PUMP Pump Left Loadlock Host Control, Batch Status
23 LEFT-OPEN Open Left Loadlock Host Control, Batch Status
24 LEFT-CLOSE Close Left Loadlock Host Control, Batch Status
25 LEFT-CLOSE-
PUMP Close and pump Left Loadlock, and map
wafers Host Control, Batch Status
26 LEFT-VENT-
OPEN Vent and Open Left Loadlock Host Control, Batch Status
27 START-DUAL Applicable for both VILL and non-VILL
processing. Starts set up on both sides if
recipes are identical. If recipes are not
identical, starts sequential processing
Host Control, Batch Status
28 START-LEFT Starts set up on left side Host Control, Batch Status
29 START-RIGHT Starts set up on right side Host Control, Batch Status
30 START-
IMPLANT Starts implanting wafers after setup Host Control, Batch Status
31 RIGHT-VENT Vent Right Loadlock Host Control, Batch Status
32 RIGHT-PUMP Pump Right Loadlock Host Control, Batch Status
33 RIGHT-OPEN Open Right Loadlock Host Control, Batch Status
34 RIGHT-CLOSE Close Right Loadlock Host Control, Batch Status
35 RIGHT-CLOSE-
PUMP Close and pump Right Loadlock, and map
wafers Host Control, Batch Status
36 RIGHT-VENT-
OPEN Vent and Open Right Loadlock Host Control, Batch Status
37 PPCLEAR-
LINEUP-QUEUE Removes all entries in the Process Job
Queue except those that are already active.
V12.20 Feature
41 GO-LOCAL Switches host control mode to LOCAL in
GEM or MONITOR in SECS. Any screen
42 GO-REMOTE Switches host control mode to REMOTE in
GEM or CONTROL in SECS. Any screen
43 BUZZER-ON Turns audible alarm on Any screen
44 BUZZER-OFF Turns audible alarm off. Note that this
remote command will be rejected if it is sent
while an alarm is unacknowledged. The
audible alarm will be turned off by alarm
acknowledgement through an operator or
host
Any screen
45 BLUE-OFF Signal tower BLUE light turns OFF Any screen
46 BLUE-FLASH Signal tower BLUE light FLASHES Any screen
47 BLUE-ON Signal tower BLUE light turns ON Any screen
48 GREEN-OFF Signal tower GREEN light turns OFF Any screen
49 GREEN-FLASH Signal tower GREEN light FLASHES Any screen
50 GREEN-ON Signal tower GREEN light turns ON Any screen
51 YELLOW-OFF Signal tower YELLOW light turns OFF Any screen
52 YELLOW-FLASH Signal tower YELLOW light FLASHES Any screen
53 YELLOW-ON Signal tower YELLOW light turns ON Any screen
54 RED-OFF Signal tower RED light turns OFF Any screen
55 RED-FLASH Signal tower RED light FLASHES Any screen
56 RED-ON Signal tower RED light turns ON Any screen
57 (unnamed) Sets run parameters LCASSETTE,
RCASSETTE, HOST-OPERATOR-ID and
OPERATION
Any screen
CPNAME = LCASSETTE
CPVAL (Format A) = 16-character
Cassette name
CPNAME = RCASSETTE
CPVAL (Format A) = 16-character Cassette
name
CPNAME = HOST-OPERATOR-ID
CPVAL (Format A) = operator id
CPNAME = OPERATION
CPVAL (Format A) = operation
58 SET-
LIGHTTOWER Set signal tower lights with one remote
command. Any screen
CPNAME = RED
CPVAL (Format U1) =
0 – Off
1 – On
2 – Flashing
CPNAME = YELLOW
CPVAL same as parameter value for RED
CPNAME = GREEN
CPVAL same as parameter value for RED
CPNAME = BLUE
CPVAL same as parameter value for RED
NOTE: Setting for BLUE is ignored when a
3 light tower is used.
60 PPQ Specifies parameters PTN, PPID, and MID
CPNAME = PTN
CPVAL (Format B) =
CPNAME = PPID
CPVAL (Format A) = 16-character PPID
name
CPNAME = MID
CPVAL (Format A) = 16-character Material
ID name
62 DELETE-JOB Deletes the specified job from the Process
Job Queue. Any screen
CPNAME = JOB-ID
CPVAL (Format A) = 16-character Host-
assigned job-id. Applicable only if Process
Job Queue is enabled.
63 PROMOTE-JOB Sets the specified job to be the next one to
be processed in the Process Job Queue. Any screen
CPNAME = JOB-ID
CPVAL (Format A) = 16-character Host-
assigned job-id. Applicable only if Process
Job Queue is enabled.
200 SMIF-Control-
Mode Perform a Load Cycle
201
202 CPNAME = MODE
CPVAL (Format U1) =
1 - Manual Mode
2 - Semi-auto Mode (Asyst smif only)
3 - Full-auto Mode
203 SMIF-Load Perform a Load Cycle Any screen
204
205 CPNAME (Format A) = SMIF
CPVAL (Format U1) =
1 - Left SMIF 1
2 - Right SMIF 2
3 - Both
206 SMIF-Unload Perform a Unload Cycle Any screen
207
208 CPNAME (Format A) = SMIF
CPVAL (Format U1) =
1 - Left SMIF 1
2 - Right SMIF 2
3 - Both
209 SMIF-PortLock Lock the POD Any screen
210
211 CPNAME (Format A) = SMIF
CPVAL (Format U1) =
1 - Left SMIF 1
2 - Right SMIF 2
3 - Both
212 SMIF-Port-
UNlock Unlock the POD Any screen
213
214 CPNAME (Format A) = SMIF
CPVAL (Format U1) =
1 - Left SMIF 1
2 - Right SMIF 2
3 - Both
215 Blink-POD-in-
LED Blink LED labled POD IN PLACE Any screen
216
217 CPNAME (Format A) = SMIF
CPVAL (Format U1) =
1 - Left SMIF 1
2 - Right SMIF 2
3 - Both
218 Emergency-Stop Unconditionally Stop Any screen
219
220 CPNAME (Format A) = SMIF
CPVAL (Format U1) =
1 - Left SMIF 1
2 - Right SMIF 2
3 - Both
221 SMIF-Home Perform a Home Cycle Any screen
222
223 CPNAME (Format A) = SMIF
CPVAL (Format U1) =
1 - Left SMIF 1
2 - Right SMIF 2
3 - Both
224 SMIF-Home- Perform a Level 2 Home Cycle Any screen
Level2 (Ergospeed 2 Only)
225
226
CPNAME (Format A) = SMIF
CPVAL (Format U1) =
1 - Left SMIF 1
2 - Right SMIF 2
3 - Both
227 SMIF-Home-
Level3 Perform a Level 3 Home Cycle
(Ergospeed 2 Only)
Any screen
228
229
CPNAME (Format A) = SMIF
CPVAL (Format U1) =
1 - Left SMIF 1
2 - Right SMIF 2
3 - Both
230 Stop-Blink Stop Blinking of LED labled POD IN
PLACE (Ergospeed 2 Only) Any screen
231
232 CPNAME (Format A) = SMIF
CPVAL (Format U1) =
1 - Left SMIF 1
2 - Right SMIF 2
3 - Both
Notes:
1) The list of remote commands (RCMD) is supported by the E220 GEM application. The maximum length of the RCMD is
20 printable characters. No spaces are allowed.
2) All RCMD names are case-sensitive.
3) CPNAMEs have ‘A’ format.
3) Codes 200-220 were added in V11.00.22. They are used to command dual SMIF LPTs. The dual SMIF LPTs must be
present, selected, and communications established between the E220 and the SMIF LPTs before the E220 will accept
these commands.
Codes 221-232 were added in V11.07.06. They are used to command Ergospeed SMIFs
4) In software versions before V11.01, remote commands are not always available for execution due to the state of the
E220. This is most notable by the displayed screen. The column labeled Screens denotes when a command will be
executed. Users must make sure the E220 is displaying the proper screen before leaving the machine. If a command
cannot be executed the message will be NAKed. In software version V11.01 and later, remote commands can be
executed independently from the screen.
5)
Examples of PPSELECT Remote Command Messages:
The structure for a dual sided PPSELECT will be as follows:
S2F41 W
<L [2]
<A ‘PPSELECT’>
<L [4]
<L [2]
<A ‘PPID’>
<A ‘PP01’>
>
<L [2]
<A ‘LOC’>
<B 03>
>
<L [2]
<A ‘MID1’>
<A ‘LEFT LOT ID’>
>
<L [2]
<A ‘MID2’>
<A ‘RIGHT LOT ID’>
>
>
>
The structure for a left single sided PPSELECT will be as follows:
S2F41 W
<L [2]
<A ‘PPSELECT’>
<L [4]
<L [2]
<A ‘PPID’>
<A ‘PP01’>
>
<L [2]
<A ‘LOC’>
<B 01>
>
<L [2]
<A ‘MID1’>
<A ‘LEFT LOT ID’>
>
<L [2]
<A ‘MID2’>
<A ‘ ’>
>
>
>
The structure for a dual sided PPSELECT with slotmap will be as follows (only wafers 1
and 2 have been specified):
S2F41 W
<L [2]
<A ‘PPSELECT’>
<L [6]
<L [2]
<A ‘PPID’>
<A ‘PP01’>
>
<L [2]
<A ‘LOC’>
<B 03>
>
<L [2]
<A ‘MID1’>
<A ‘LEFT LOT ID’>
>
<L [2]
<A ‘MID2’>
<A ‘RIGHT LOT ID’>
>
<L [2]
<A[8/1] "SlotMap1">
<B[25/1] 0x01 0x01 0x00 0x00 0x00 0x00 0x00 0x00 0x00 0x00 0x00
0x00 0x00 0x00 0x00 0x00 0x00 0x00 0x00 0x00 0x00 0x00
0x00 0x00 0x00>
>
<L [2]
<A[8/1] "SlotMap2">
<B[25/1] 0x01 0x01 0x00 0x00 0x00 0x00 0x00 0x00 0x00 0x00 0x00
0x00 0x00 0x00 0x00 0x00 0x00 0x00 0x00 0x00 0x00 0x00
0x00 0x00 0x00>
>
>
>
The structure for a left sided PPSELECT with slotmap will be as follows (only wafers 1
and 2 have been specified):
S2F41 W
<L [2]
<A ‘PPSELECT’>
<L [6]
<L [2]
<A ‘PPID’>
<A ‘PP01’>
>
<L [2]
<A ‘LOC’>
<B 01>
>
<L [2]
<A ‘MID1’>
<A ‘LEFT LOT ID’>
>
<L [2]
<A ‘MID2’>
<A ‘ ’>
>
<L [2]
<A[8/1] "SlotMap1">
<B[25/1] 0x01 0x01 0x00 0x00 0x00 0x00 0x00 0x00 0x00 0x00 0x00
0x00 0x00 0x00 0x00 0x00 0x00 0x00 0x00 0x00 0x00 0x00
0x00 0x00 0x00>
>
>
>
The structure for a dual sided PPSELECT with wafer ID map will be as follows (only
wafers 1 and 2 have been specified):
S2F41 W
<L [2]
<A ‘PPSELECT’>
<L [6]
<L [2]
<A ‘PPID’>
<A ‘PP01’>
>
<L [2]
<A ‘LOC’>
<B 03>
>
<L [2]
<A ‘MID1’>
<A ‘LEFT LOT ID’>
>
<L [2]
<A ‘MID2’>
<A ‘RIGHT LOT ID’>
>
<L [2]
<A[8/1] "WaferID1">
<L[25/1]
<A[6/1] "Wafer1">
<A[6/1] "Wafer2">
<A[0/1]>
<A[0/1]>
<A[0/1]>
<A[0/1]>
<A[0/1]>
<A[0/1]>
<A[0/1]>
<A[0/1]>
<A[0/1]>
<A[0/1]>
<A[0/1]>
<A[0/1]>
<A[0/1]>
<A[0/1]>
<A[0/1]>
<A[0/1]>
<A[0/1]>
<A[0/1]>
<A[0/1]>
<A[0/1]>
<A[0/1]>
<A[0/1]>
<A[0/1]>
>
>
<L [2]
<A[8/1] "WaferID2">
<L[25/1]
<A[6/1] "Wafer1">
<A[6/1] "Wafer2">
<A[0/1]>
<A[0/1]>
<A[0/1]>
<A[0/1]>
<A[0/1]>
<A[0/1]>
<A[0/1]>
<A[0/1]>
<A[0/1]>
<A[0/1]>
<A[0/1]>
<A[0/1]>
<A[0/1]>
<A[0/1]>
<A[0/1]>
<A[0/1]>
<A[0/1]>
<A[0/1]>
<A[0/1]>
<A[0/1]>
<A[0/1]>
<A[0/1]>
<A[0/1]>
>
>
>
>
The structure for a left sided PPSELECT with Wafer ID map will be as follows (only
wafers 1 and 2 have been specified):
S2F41 W
<L [2]
<A ‘PPSELECT’>
<L [6]
<L [2]
<A ‘PPID’>
<A ‘PP01’>
>
<L [2]
<A ‘LOC’>
<B 01>
>
<L [2]
<A ‘MID1’>
<A ‘LEFT LOT ID’>
>
<L [2]
<A ‘MID2’>
<A ‘ ’>
>
<L [2]
<A[8/1] "WaferID1">
<L[25/1]
<A[6/1] "Wafer1">
<A[6/1] "Wafer2">
<A[0/1]>
<A[0/1]>
<A[0/1]>
<A[0/1]>
<A[0/1]>
<A[0/1]>
<A[0/1]>
<A[0/1]>
<A[0/1]>
<A[0/1]>
<A[0/1]>
<A[0/1]>
<A[0/1]>
<A[0/1]>
<A[0/1]>
<A[0/1]>
<A[0/1]>
<A[0/1]>
<A[0/1]>
<A[0/1]>
<A[0/1]>
<A[0/1]>
<A[0/1]>
>
>
>
>
The structure for a left single sided PPSELECT with cassette slot and wafer ID map will
be as follows (MID-MODE ECID 286 WCC bit must be set. Slot and wafer map comparison is
made at the SMIF and not tool):
<S2F41 W
<L[2/1]
<A[8/1] "PPSELECT">
<L[6/1]
<L[2/1]
<A[4/1] "PPID">
<A[15/1] "PP01">
>
<L[2/1]
<A[3/1] "LOC">
<B[1/1] 0x01>
>
<L[2/1]
<A[4/1] "MID1">
<A[11/1] "LEFT LOT ID">
>
<L[2/1]
<A[4/1] "MID2">
<A[1/1] " ">
>
<L[2/1]
<A[8/1] "WaferID1">
<L[25/1]
<A[6/1] "Wafer1">
<A[6/1] "Wafer2">
<A[0/1]>
<A[0/1]>
<A[0/1]>
<A[0/1]>
<A[0/1]>
<A[0/1]>
<A[0/1]>
<A[0/1]>
<A[0/1]>
<A[0/1]>
<A[0/1]>
<A[0/1]>
<A[0/1]>
<A[0/1]>
<A[0/1]>
<A[0/1]>
<A[0/1]>
<A[0/1]>
<A[0/1]>
<A[0/1]>
<A[0/1]>
<A[0/1]>
<A[0/1]>
>
>
<L[2/1]
<A[8/1] "SlotMap1">
<B[25/1] 0x01 0x01 0x00 0x00 0x00 0x00 0x00 0x00 0x00 0x00 0x00
0x00 0x00 0x00 0x00 0x00 0x00 0x00 0x00 0x00 0x00 0x00
0x00 0x00 0x00>
>
>
>
>
The structure for a dual sided PPSELECT with cassette slot and wafer ID map will be as
follows (MID-MODE ECID 286 WCC bit must be set. Slot and wafer map comparison is made at
the SMIF and not tool):
<S2F41 W
<L[2/1]
<A[8/1] "PPSELECT">
<L[8/1]
<L[2/1]
<A[4/1] "PPID">
<A[15/1] "PP01">
>
<L[2/1]
<A[3/1] "LOC">
<B[1/1] 0x03>
>
<L[2/1]
<A[4/1] "MID1">
<A[11/1] "LEFT LOT ID">
>
<L[2/1]
<A[4/1] "MID2">
<A[12/1] "Right LOT ID">
>
<L[2/1]
<A[8/1] "WaferID1">
<L[25/1]
<A[6/1] "Wafer1">
<A[6/1] "Wafer2">
<A[0/1]>
<A[0/1]>
<A[0/1]>
<A[0/1]>
<A[0/1]>
<A[0/1]>
<A[0/1]>
<A[0/1]>
<A[0/1]>
<A[0/1]>
<A[0/1]>
<A[0/1]>
<A[0/1]>
<A[0/1]>
<A[0/1]>
<A[0/1]>
<A[0/1]>
<A[0/1]>
<A[0/1]>
<A[0/1]>
<A[0/1]>
<A[0/1]>
<A[0/1]>
>
>
<L[2/1]
<A[8/1] "WaferID2">
<L[25/1]
<A[6/1] "Wafer1">
<A[6/1] "Wafer2">
<A[0/1]>
<A[0/1]>
<A[0/1]>
<A[0/1]>
<A[0/1]>
<A[0/1]>
<A[0/1]>
<A[0/1]>
<A[0/1]>
<A[0/1]>
<A[0/1]>
<A[0/1]>
<A[0/1]>
<A[0/1]>
<A[0/1]>
<A[0/1]>
<A[0/1]>
<A[0/1]>
<A[0/1]>
<A[0/1]>
<A[0/1]>
<A[0/1]>
<A[0/1]>
>
>
<L[2/1]
<A[8/1] "SlotMap1">
<B[25/1] 0x01 0x01 0x00 0x00 0x00 0x00 0x00 0x00 0x00 0x00 0x00
0x00 0x00 0x00 0x00 0x00 0x00 0x00 0x00 0x00 0x00
0x00 0x00 0x00 0x00>
>
>
<L[2/1]
<A[8/1] "SlotMap2">
<B[25/1] 0x01 0x01 0x00 0x00 0x00 0x00 0x00 0x00 0x00 0x00 0x00
0x00 0x00 0x00 0x00 0x00 0x00 0x00 0x00 0x00 0x00
0x00 0x00 0x00 0x00>
>
>
>
>
The structure for a dual-sided PPSELECT specifying a 3-recipe chained implant and wafer
ranges will be as follows:
S2F49 W
<L
<U4 0>
<A " ">
<A "PPSELECT">
<L
<L
<A ‘PPID-LIST’>
<L
<A ‘PP01’>
<A ‘PP02’>
<A ‘PP03’>
>
>
<L
<A ‘LOC’>
<B 0x03>
>
<L
<A ‘MID1’>
<A ‘LEFTLOTID’>
>
<L
<A ‘START-WAF1’>
<B 1>
>
<L
<A ‘WAF-COUNT1’>
<B 2>
>
<L
<A ‘MID2’>
<A ‘RIGHTLOTID’>
>
<L
<A ‘START-WAF2’>
<B 1>
>
<L
<A ‘WAF-COUNT2’>
<B 3>
>
>
>.
Where Used: S2F41
REPGSZ -- Reporting group size Format: 5( )
Where Used: S2F23
RPTID -- Report ID Format: 5( )
Identifier of a defined report. Either a default report or a report defined with S2F33 /S2F34 .
Where Used: S2F33, S2F35; S6F11, S6F13
RSACK -- Ready to Send Acknowledge code, 1 byte Format: 10
0 = acknowledge, OK (note that 'OK' differs from 'ready')
1 = invalid port number
2 = port is already occupied
3 = busy, unable to move material at this time. Try again
4 = receiver does not have permission to perform this operation
5-63 = reserved
Where Used:
RSDA -- Request Spool Data Acknowledge Format: 10
0 = OK
1 = Denied, busy try later
2 = Denied, spooled data does not exist
3-63 = Reserved
Where Used: S6F24
RSDC -- Request Spool Data Code Format: 51
0 = Transmit Spooled Messages
1 = Purge Spooled Messages
2-63 = Reserved
Where Used: S6F23
SEQNUM -- Command Number Format: 52
Value which identifies a unique process program command by its position in the list of commands relative to the first. For
the first command of the process program, SEQNUM is l.
Where Used: S7F27
SFCD -- Status form code, 1 byte Format: 10
Where Used:
SHEAD -- Stored header related to the transaction timer Format: 10
Where Used: S9F9
SMPLN -- Sample number Format: 5( )
Where Used: S6F1
SOFTREV -- Software revision code 8 bytes maximum Format: 20
The software revision code for the E220 is a 4 to 8 character string of the form "10.00.00".
Where Used: S1F2, S1F13, S1F14
STIME -- Sample time, 12 bytes Format: 20
yymmddhhmmss
Where Used: S6F1
STRACK -- Spool Stream Acknowledge Format: 10
1 = Spooling not allowed for stream (i.e., Stream 1)
2 = Stream unknown
3 = Unknown function specified for this stream
4 = Secondary function specified for this stream
Where Used: S2F44
STRID -- Stream Identification Format: 51
Where Used: S2F43, S2F44
SV -- Status variable value Format: 20, 5( )
Where Used: S1F4, S6F1
SVID -- Status variable ID Format: 5( )
The status variables may also be access with a VID of equivalent value using the functions appropriate for VID. See VID
for table showing relationship between data variables identifcation (DVID), equipment constant identifications(ECID), and
status variable identifications( SVID) ). The status variable IDs are as follows:
SVID SVNAME SVID SVNAME
Analog Readback Variables Pump Analog Readback Variables
1 TERMINAL- MEGOHMS 400 a1ESTurboSpeed[0]
2 GROUND- MEGOHMS 401 a1ESTurboNormalizedSpeed[0]
3 TERMINAL- WATER- TEMP 402 a1ESTurboCurrent[0]
4 GROUND- WATER- TEMP 403 a1ESTurboVoltage[0]
5 CITY- WATER- TEMP 404 a1ESTurboTempC[0]
6 SOURCE- PRESSURE 405 a1ESTurboLifeHR[0]
7 SCANNER- PRESSURE 406 a1ESTurboCycles[0]
8 CHAMBER- PRESSURE 407 a1ESTurboCycleTimeMIN[0]
9 SOURCE- TURBO- SPEED 408 a1ESTurboSpeed[1]
10 SCANNER- TURBO- SPEED 409 a1ESTurboNormalizedSpeed[1]
11 LEFT- CRYO- TEMP 410 a1ESTurboCurrent[1]
12 CHAMBER- CRYO- TEMP 411 a1ESTurboVoltage[1]
13 RIGHT- CRYO- TEMP 412 a1ESTurboTempC[1]
14 LEFT- ELEVATOR- TC 413 a1ESTurboLifeHR[1]
15 CHAMBER- CRYO- TC 414 a1ESTurboCycles[1]
16 RIGHT- ELEVATOR- TC 415 a1ESTurboCycleTimeMIN[1]
17 GAS 416 a1OnBoardRegenStep[0]
18 G1- PRES 417 a1OnBoardFirstStageTemp[0]
19 G2- PRES 418 a1OnBoardSecondStageTemp[0]
20 G3- PRES 419 a1OnBoardTcGaugePress[0]
21 G4- PRES 420 a1OnBoardTotalOperatingTime[0]
22 FIL- I 421 a1OnBoardTempSinceLastFullRegen[0]
23 FIL- VOLTS 422 a1OnBoardTempSinceLastFastRegen[0]
24 ARC- I 423 a1OnBoardBasePressure[0]
25 RANGE- ARC 424 a1OnBoardRegenStep[1]
26 ARC- VOLTS 425 a1OnBoardFirstStageTemp[1]
27 MAG- I 426 a1OnBoardSecondStageTemp[1]
28 EXT- VOLTS 427 a1OnBoardTcGaugePress[1]
29 EXT- I 428 a1OnBoardTotalOperatingTime[1]
30 SUP- VOLTS 429 a1OnBoardTempSinceLastFullRegen[1]
31 SUP- I 430 a1OnBoardTempSinceLastFastRegen[1]
32 X- AXIS 431 a1OnBoardBasePressure[1]
33 Y- AXIS 432 a1OnBoardRegenStep[2]
34 Z- AXIS 433 a1OnBoardFirstStageTemp[2]
35 AMU- I 434 a1OnBoardSecondStageTemp[2]
36 AMU 435 a1OnBoardTcGaugePress[2]
37 BIAS 436 a1OnBoardTotalOperatingTime[2]
38 BEAM 437 a1OnBoardTempSinceLastFullRegen[2]
39 BEAM- I- RANGE 438 a1OnBoardTempSinceLastFastRegen[2]
40 MIR- VOLTS 439 a1OnBoardBasePressure[2]
41 MIR- I
42 MIR- SHUNT- I
43 Q1- I
44 Q2- I
45 DEFLECTOR
46 LENS- I
47 ACCEL- VOLTS GEM System Data Variables
48 ACCEL- I 506 TIME
49 DEC- VOLTS 507 MDLN
50 DEC- I 508 SOFTREV
51 ENERGY-PROBE 517 ALARMSTATE
52 TARGET- BIAS
53 VAP- TEMP
54 COOLING
55 eFIL- VOLTS
56 eFIL- I
57 eRPL- VOLTS
58 eEXT- VOLTS
59 eEXT- I
60 eTARGET- I
61 eBIAS- VOLTS
62 eBIAS- I
63 eSUP- VOLTS
64 ANALYZER- PRESSURE
65 DRY- PUMP- TC
66 Not Used
67 MAG-VOLTS
68 Q1-VOLTS
69 Q2-VOLTS
70 LENS-VOLTS
71 eSECOND-I
72 HTR-TEMP
73 DECEL-VOLTS
74 DECEL-I
75 AMU-G
76 HELIUM-PRESSURE
77 TERM-DI-RETURN-TEMP
78 ES-DIFFER-TC
79 DI-WATER-DELTA-TEMP
80 ANALYZER-TC
81 BEAMLINE-TC
82 DECEL-SUPPRESSION-VOLTS
Low Analog Readback On Last Wafer Highest Analog Readback On Last Wafer
1001 lwTERMINAL- MEGOHMS 2001 hwTERMINAL- MEGOHMS
1002 lwGROUND- MEGOHMS 2002 hwGROUND- MEGOHMS
1003 lwTERMINAL- WATER- TEMP 2003 hwTERMINAL- WATER- TEMP
1004 lwGROUND- WATER- TEMP 2004 hwGROUND- WATER- TEMP
1005 lwCITY- WATER- TEMP 2005 hwCITY- WATER- TEMP
1006 lwSOURCE- PRESSURE 2006 hwSOURCE- PRESSURE
1007 lwSCANNER- PRESSURE 2007 hwSCANNER- PRESSURE
1008 lwCHAMBER- PRESSURE 2008 hwCHAMBER- PRESSURE
1009 lwSOURCE- TURBO- SPEED 2009 hwSOURCE- TURBO- SPEED
1010 lwSCANNER- TURBO- SPEED 2010 hwSCANNER- TURBO- SPEED
1011 lwLEFT- CRYO- TEMP 2011 hwLEFT- CRYO- TEMP
1012 lwCHAMBER- CRYO- TEMP 2012 hwCHAMBER- CRYO- TEMP
1013 lwRIGHT- CRYO- TEMP 2013 hwRIGHT- CRYO- TEMP
1014 lwLEFT- ELEVATOR- TC 2014 hwLEFT- ELEVATOR- TC
1015 lwCHAMBER- CRYO- TC 2015 hwCHAMBER- CRYO- TC
1016 lwRIGHT- ELEVATOR- TC 2016 hwRIGHT- ELEVATOR- TC
1017 lwGAS 2017 hwGAS
1018 lwG1- PRES 2018 hwG1- PRES
1019 lwG2- PRES 2019 hwG2- PRES
1020 lwG3- PRES 2020 hwG3- PRES
1021 lwG4- PRES 2021 hwG4- PRES
1022 lwFIL- I 2022 hwFIL- I
1023 lwFIL- VOLTS 2023 hwFIL- VOLTS
1024 lwARC- I 2024 hwARC- I
1025 lwRANGE- ARC 2025 hwRANGE- ARC
1026 lwARC- VOLTS 2026 hwARC- VOLTS
1027 lwMAG- I 2027 hwMAG- I
1028 lwEXT- VOLTS 2028 hwEXT- VOLTS
1029 lwEXT- I 2029 hwEXT- I
1030 lwSUP- VOLTS 2030 hwSUP- VOLTS
1031 lwSUP- I 2031 hwSUP- I
1032 lwX- AXIS 2032 hwX- AXIS
1033 lwY- AXIS 2033 hwY- AXIS
1034 lwZ- AXIS 2034 hwZ- AXIS
1035 lwAMU- I 2035 hwAMU- I
1036 lwAMU 2036 hwAMU
1037 lwBIAS 2037 hwBIAS
1038 lwBEAM 2038 hwBEAM
1039 lwBEAM- I- RANGE 2039 hwBEAM- I- RANGE
1040 lwMIR- VOLTS 2040 hwMIR- VOLTS
1041 lwMIR- I 2041 hwMIR- I
1042 lwMIR- SHUNT- I 2042 hwMIR- SHUNT- I
1043 lwQ1- I 2043 hwQ1- I
1044 lwQ2- I 2044 hwQ2- I
1045 lwDEFLECTOR 2045 hwDEFLECTOR
1046 lwLENS- I 2046 hwLENS- I
1047 lwACCEL- VOLTS 2047 hwACCEL- VOLTS
1048 lwACCEL- I 2048 hwACCEL- I
1049 lwDEC- VOLTS 2049 hwDEC- VOLTS
1050 lwDEC- I 2050 hwDEC- I
1051 lwENERGY-PROBE 2051 hwENERGY-PROBE
1052 lwTARGET- BIAS 2052 hwTARGET- BIAS
1053 lwVAP- TEMP 2053 hwVAP- TEMP
1054 lwCOOLING 2054 hwCOOLING
1055 lweFIL- VOLTS 2055 hweFIL- VOLTS
1056 lweFIL- I 2056 hweFIL- I
1057 lweRPL- VOLTS 2057 hweRPL- VOLTS
1058 lweEXT- VOLTS 2058 hweEXT- VOLTS
1059 lweEXT- I 2059 hweEXT- I
1060 lweTARGET- I 2060 hweTARGET- I
1061 lweBIAS- VOLTS 2061 hweBIAS- VOLTS
1062 lweBIAS- I 2062 hweBIAS- I
1063 lweSUP- VOLTS 2063 hweSUP- VOLTS
1064 lwANALYZER- PRESSURE 2064 hwANALYZER- PRESSURE
1065 lwDRY- PUMP- TC 2065 hwDRY- PUMP- TC
1066 Not Used 2066 Not Used
1067 lwMAG-VOLTS 2067 hwMAG-VOLTS
1068 lwQ1-VOLTS 2068 hwQ1-VOLTS
1069 lwQ2-VOLTS 2069 hwQ2-VOLTS
1070 lwLENS-VOLTS 2070 hwLENS-VOLTS
1071 lweSECOND-I 2071 hweSECOND-I
1072 lwHTR-TEMP 2072 hwHTR-TEMP
1073 lwDECEL-VOLTS 2073 hwDECEL-VOLTS
1074 lwDECEL-I 2074 hwDECEL-I
1075 lwAMU-G 2075 hwAMU-G
1076 lwHELIUM-PRESSURE 2076 hwHELIUM-PRESSURE
1077 lwTERM-DI-RETURN-TEMP 2077 hwTERM-DI-RETURN-TEMP
1078 lwES-DIFFER-TC 2078 hwES-DIFFER-TC
1079 lwDI-WATER-DELTA-TEMP 2079 hwDI-WATER-DELTA-TEMP
1080 lwANALYZER-TC 2080 hwANALYZER-TC
1081 lwBEMLINE-TC 2081 hwBEMLINE-TC
Ave. Analog Readback On Last Wafer Lowest Analog Readback On Last Batch
3001 awTERMINAL- MEGOHMS 4001 lbTERMINAL- MEGOHMS
3002 awGROUND- MEGOHMS 4002 lbGROUND- MEGOHMS
3003 awTERMINAL- WATER- TEMP 4003 lbTERMINAL- WATER- TEMP
3004 awGROUND- WATER- TEMP 4004 lbGROUND- WATER- TEMP
3005 awCITY- WATER- TEMP 4005 lbCITY- WATER- TEMP
3006 awSOURCE- PRESSURE 4006 lbSOURCE- PRESSURE
3007 awSCANNER- PRESSURE 4007 lbSCANNER- PRESSURE
3008 awCHAMBER- PRESSURE 4008 lbCHAMBER- PRESSURE
3009 awSOURCE- TURBO- SPEED 4009 lbSOURCE- TURBO- SPEED
3010 awSCANNER- TURBO- SPEED 4010 lbSCANNER- TURBO- SPEED
3011 awLEFT- CRYO- TEMP 4011 lbLEFT- CRYO- TEMP
3012 awCHAMBER- CRYO- TEMP 4012 lbCHAMBER- CRYO- TEMP
3013 awRIGHT- CRYO- TEMP 4013 lbRIGHT- CRYO- TEMP
3014 awLEFT- ELEVATOR- TC 4014 lbLEFT- ELEVATOR- TC
3015 awCHAMBER- CRYO- TC 4015 lbCHAMBER- CRYO- TC
3016 awRIGHT- ELEVATOR- TC 4016 lbRIGHT- ELEVATOR- TC
3017 awGAS 4017 lbGAS
3018 awG1- PRES 4018 lbG1- PRES
3019 awG2- PRES 4019 lbG2- PRES
3020 awG3- PRES 4020 lbG3- PRES
3021 awG4- PRES 4021 lbG4- PRES
3022 awFIL- I 4022 lbFIL- I
3023 awFIL- VOLTS 4023 lbFIL- VOLTS
3024 awARC- I 4024 lbARC- I
3025 awRANGE- ARC 4025 lbRANGE- ARC
3026 awARC- VOLTS 4026 lbARC- VOLTS
3027 awMAG- I 4027 lbMAG- I
3028 awEXT- VOLTS 4028 lbEXT- VOLTS
3029 awEXT- I 4029 lbEXT- I
3030 awSUP- VOLTS 4030 lbSUP- VOLTS
3031 awSUP- I 4031 lbSUP- I
3032 awX- AXIS 4032 lbX- AXIS
3033 awY- AXIS 4033 lbY- AXIS
3034 awZ- AXIS 4034 lbZ- AXIS
3035 awAMU- I 4035 lbAMU- I
3036 awAMU 4036 lbAMU
3037 awBIAS 4037 lbBIAS
3038 awBEAM 4038 lbBEAM
3039 awBEAM- I- RANGE 4039 lbBEAM- I- RANGE
3040 awMIR- VOLTS 4040 lbMIR- VOLTS
3041 awMIR- I 4041 lbMIR- I
3042 awMIR- SHUNT- I 4042 lbMIR- SHUNT- I
3043 awQ1- I 4043 lbQ1- I
3044 awQ2- I 4044 lbQ2- I
3045 awDEFLECTOR 4045 lbDEFLECTOR
3046 awLENS- I 4046 lbLENS- I
3047 awACCEL- VOLTS 4047 lbACCEL- VOLTS
3048 awACCEL- I 4048 lbACCEL- I
3049 awDEC- VOLTS 4049 lbDEC- VOLTS
3050 awDEC- I 4050 lbDEC- I
3051 awENERGY-PROBE 4051 lbENERGY-PROBE
3052 awTARGET- BIAS 4052 lbTARGET- BIAS
3053 awVAP- TEMP 4053 lbVAP- TEMP
3054 awCOOLING 4054 lbCOOLING
3055 aweFIL- VOLTS 4055 lbeFIL- VOLTS
3056 aweFIL- I 4056 lbeFIL- I
3057 aweRPL- VOLTS 4057 lbeRPL- VOLTS
3058 aweEXT- VOLTS 4058 lbeEXT- VOLTS
3059 aweEXT- I 4059 lbeEXT- I
3060 aweTARGET- I 4060 lbeTARGET- I
3061 aweBIAS- VOLTS 4061 lbeBIAS- VOLTS
3062 aweBIAS- I 4062 lbeBIAS- I
3063 aweSUP- VOLTS 4063 lbeSUP- VOLTS
3064 awANALYZER- PRESSURE 4064 lbANALYZER- PRESSURE
3065 awDRY- PUMP- TC 4065 lbDRY- PUMP- TC
3066 Not Used 4066 Not Used
3067 awMAG-VOLTS 4067 lbMAG-VOLTS
3068 awQ1-VOLTS 4068 lbQ1-VOLTS
3069 awQ2-VOLTS 4069 lbQ2-VOLTS
3070 awLENS-VOLTS 4070 lbLENS-VOLTS
3071 aweSECOND-I 4071 lbeSECOND-I
3072 awHTR-TEMP 4072 lbHTR-TEMP
3073 awDECEL-VOLTS 4073 lbDECEL-VOLTS
3074 awDECEL-I 4074 lbDECEL-I
3075 awAMU-G 4075 lbAMU-G
3076 awHELIUM-PRESSURE 4076 lbHELIUM-PRESSURE
3077 awTERM-DI-RETURN-TEMP 4077 lbTERM-DI-RETURN-TEMP
3078 awES-DIFFER-TC 4078 lbES-DIFFER-TC
3079 awDI-WATER-DELTA-TEMP 4079 lbDI-WATER-DELTA-TEMP
3080 awANALYZER-TC 4080 lbANALYZER-TC
3081 awBEMLINE-TC 4081 lbBEMLINE-TC
High Analog Readback On Last Batch Average Analog Readback On Last Batch
5001 hbTERMINAL- MEGOHMS 6001 abTERMINAL- MEGOHMS
5002 hbGROUND- MEGOHMS 6002 abGROUND- MEGOHMS
5003 hbTERMINAL- WATER- TEMP 6003 abTERMINAL- WATER- TEMP
5004 hbGROUND- WATER- TEMP 6004 abGROUND- WATER- TEMP
5005 hbCITY- WATER- TEMP 6005 abCITY- WATER- TEMP
5006 hbSOURCE- PRESSURE 6006 abSOURCE- PRESSURE
5007 hbSCANNER- PRESSURE 6007 abSCANNER- PRESSURE
5008 hbCHAMBER- PRESSURE 6008 abCHAMBER- PRESSURE
5009 hbSOURCE- TURBO- SPEED 6009 abSOURCE- TURBO- SPEED
5010 hbSCANNER- TURBO- SPEED 6010 abSCANNER- TURBO- SPEED
5011 hbLEFT- CRYO- TEMP 6011 abLEFT- CRYO- TEMP
5012 hbCHAMBER- CRYO- TEMP 6012 abCHAMBER- CRYO- TEMP
5013 hbRIGHT- CRYO- TEMP 6013 abRIGHT- CRYO- TEMP
5014 hbLEFT- ELEVATOR- TC 6014 abLEFT- ELEVATOR- TC
5015 hbCHAMBER- CRYO- TC 6015 abCHAMBER- CRYO- TC
5016 hbRIGHT- ELEVATOR- TC 6016 abRIGHT- ELEVATOR- TC
5017 hbGAS 6017 abGAS
5018 hbG1- PRES 6018 abG1- PRES
5019 hbG2- PRES 6019 abG2- PRES
5020 hbG3- PRES 6020 abG3- PRES
5021 hbG4- PRES 6021 abG4- PRES
5022 hbFIL- I 6022 abFIL- I
5023 hbFIL- VOLTS 6023 abFIL- VOLTS
5024 hbARC- I 6024 abARC- I
5025 hbRANGE- ARC 6025 abRANGE- ARC
5026 hbARC- VOLTS 6026 abARC- VOLTS
5027 hbMAG- I 6027 abMAG- I
5028 hbEXT- VOLTS 6028 abEXT- VOLTS
5029 hbEXT- I 6029 abEXT- I
5030 hbSUP- VOLTS 6030 abSUP- VOLTS
5031 hbSUP- I 6031 abSUP- I
5032 hbX- AXIS 6032 abX- AXIS
5033 hbY- AXIS 6033 abY- AXIS
5034 hbZ- AXIS 6034 abZ- AXIS
5035 hbAMU- I 6035 abAMU- I
5036 hbAMU 6036 abAMU
5037 hbBIAS 6037 abBIAS
5038 hbBEAM 6038 abBEAM
5039 hbBEAM- I- RANGE 6039 abBEAM- I- RANGE
5040 hbMIR- VOLTS 6040 abMIR- VOLTS
5041 hbMIR- I 6041 abMIR- I
5042 hbMIR- SHUNT- I 6042 abMIR- SHUNT- I
5043 hbQ1- I 6043 abQ1- I
5044 hbQ2- I 6044 abQ2- I
5045 hbDEFLECTOR 6045 abDEFLECTOR
5046 hbLENS- I 6046 abLENS- I
5047 hbACCEL- VOLTS 6047 abACCEL- VOLTS
5048 hbACCEL- I 6048 abACCEL- I
5049 hbDEC- VOLTS 6049 abDEC- VOLTS
5050 hbDEC- I 6050 abDEC- I
5051 hbENERGY-PROBE 6051 abENERGY-PROBE
5052 hbTARGET- BIAS 6052 abTARGET- BIAS
5053 hbVAP- TEMP 6053 abVAP- TEMP
5054 hbCOOLING 6054 abCOOLING
5055 hbeFIL- VOLTS 6055 abeFIL- VOLTS
5056 hbeFIL- I 6056 abeFIL- I
5057 hbeRPL- VOLTS 6057 abeRPL- VOLTS
5058 hbeEXT- VOLTS 6058 abeEXT- VOLTS
5059 hbeEXT- I 6059 abeEXT- I
5060 hbeTARGET- I 6060 abeTARGET- I
5061 hbeBIAS- VOLTS 6061 abeBIAS- VOLTS
5062 hbeBIAS- I 6062 abeBIAS- I
5063 hbeSUP- VOLTS 6063 abeSUP- VOLTS
5064 hbANALYZER- PRESSURE 6064 abANALYZER- PRESSURE
5065 hbDRY- PUMP- TC 6065 abDRY- PUMP- TC
5066 Not Used 6066 Not Used
5067 hbMAG-VOLTS 6067 abMAG-VOLTS
5068 hbQ1-VOLTS 6068 abQ1-VOLTS
5069 hbQ2-VOLTS 6069 abQ2-VOLTS
5070 hbLENS-VOLTS 6070 abLENS-VOLTS
5071 hbeSECOND-I 6071 abeSECOND-I
5072 hbHTR-TEMP 6072 abHTR-TEMP
5073 hbDECEL-VOLTS 6073 abDECEL-VOLTS
5074 hbDECEL-I 6074 abDECEL-I
5075 hbAMU-G 6075 abAMU-G
5076 hbHELIUM-PRESSURE 6076 abHELIUM-PRESSURE
5077 hbTERM-DI-RETURN-TEMP 6077 abTERM-DI-RETURN-TEMP
5078 hbES-DIFFER-TC 6078 abES-DIFFER-TC
5079 hbDI-WATER-DELTA-TEMP 6079 abDI-WATER-DELTA-TEMP
5080 hbANALYZER-TC 6080 abANALYZER-TC
5081 hbBEMLINE-TC 6081 abBEMLINE-TC
Analog Readback Non-ACSII Format Asyst and Ergospeed II SMIF Common Variables
7001 TERMINAL- MEGOHMS 8000 SMIF Port Id
7002 GROUND- MEGOHMS 8001 SMIF1 Controls
7003 TERMINAL- WATER- TEMP 8002 SMIF Tool
7004 GROUND- WATER- TEMP
7005 CITY- WATER- TEMP
7006 SOURCE- PRESSURE
7007 SCANNER- PRESSURE
7008 CHAMBER- PRESSURE
7009 SOURCE- TURBO- SPEED
7010 SCANNER- TURBO- SPEED
7011 LEFT- CRYO- TEMP
7012 CHAMBER- CRYO- TEMP
7013 RIGHT- CRYO- TEMP
7014 LEFT- ELEVATOR- TC
7015 CHAMBER- CRYO- TC
7016 RIGHT- ELEVATOR- TC
7017 GAS
7018 G1- PRES
7019 G2- PRES
7020 G3- PRES
7021 G4- PRES
7022 FIL- I
7023 FIL- VOLTS
7024 ARC- I
7025 RANGE- ARC
7026 ARC- VOLTS
7027 MAG- I
7028 EXT- VOLTS
7029 EXT- I
7030 SUP- VOLTS
7031 SUP- I
7032 X- AXIS
7033 Y- AXIS
7034 Z- AXIS
7035 AMU- I
7036 AMU
7037 BIAS
7038 BEAM
7039 BEAM- I- RANGE
7040 MIR- VOLTS
7041 MIR- I
7042 MIR- SHUNT- I
7043 Q1- I
7044 Q2- I
7045 DEFLECTOR
7046 LENS- I
7047 ACCEL- VOLTS
7048 ACCEL- I
7049 DEC- VOLTS
7050 DEC- I
7051 ENERGY-PROBE
7052 TARGET- BIAS
7053 VAP- TEMP
7054 COOLING
7055 eFIL- VOLTS
7056 eFIL- I
7057 eRPL- VOLTS
7058 eEXT- VOLTS
7059 eEXT- I
7060 eTARGET- I
7061 eBIAS- VOLTS
7062 eBIAS- I
7063 eSUP- VOLTS
7064 ANALYZER- PRESSURE
7065 DRY- PUMP- TC
7066 Not Used
7067 MAG-VOLTS
7068 Q1-VOLTS
7069 Q2-VOLTS
7070 LENS-VOLTS
7071 eSECOND-I
7072 HTR-TEMP
7073 DECEL-VOLTS
7074 DECEL-I
7075 AMU-G
7076 HELIUM-PRESSURE
7077 TERM-DI-RETURN-TEMP
7078 ES-DIFFER-TC
7079 DI-WATER-DELTA-TEMP
7080 ANALYZER-TC
7081 BEMLINE-TC
Left Asyst SMIF Variables Right Asyst SMIF Variables
8100 Left SMIF1 Full Status 8200 Right SMIF2 Full Status
8101 Left SMIF1 Ctl Status 8201 Right SMIF2 Ctl Status
8102 Left SMIF1 ARMTYPE 8202 Right SMIF2 ARMTYPE
8103 Left SMIF1 ARM_SW 8203 Right SMIF2 ARM_SW
8104 Left SMIF1 COLST 8204 Right SMIF2 COLST
8105 Left SMIF1 COUNT 8205 Right SMIF2 COUNT
8106 Left SMIF1 DIPSW 8206 Right SMIF2 DIPSW
8107 Left SMIF1 ELDN 8207 Right SMIF2 ELDN
8108 Left SMIF1 ELPOS 8208 Right SMIF2 ELPOS
8109 Left SMIF1 ELUP 8209 Right SMIF2 ELUP
8110 Left SMIF1 FUNC 8210 Right SMIF2 FUNC
8111 Left SMIF1 GPST 8211 Right SMIF2 GPST
8112 Left SMIF1 HOMEST 8212 Right SMIF2 HOMEST
8113 Left SMIF1 LFUNC 8213 Right SMIF2 LFUNC
8114 Left SMIF1 MARMDN 8214 Right SMIF2 MARMDN
8115 Left SMIF1 MARMPOS 8215 Right SMIF2 MARMPOS
8116 Left SMIF1 MARMUP 8216 Right SMIF2 MARMUP
8117 Left SMIF1 SWITCH MODE 8217 Right SMIF2 SWITCH MODE
8118 Left SMIF1 MOT 8218 Right SMIF2 MOT
8119 Left SMIF1 MVSTAT 8219 Right SMIF2 MVSTAT
8120 Left SMIF1 PIO_LOCK 8220 Right SMIF2 PIO_LOCK
8121 Left SMIF1 PIO_LRDY 8221 Right SMIF2 PIO_LRDY
8122 Left SMIF1 PIO_LU 8222 Right SMIF2 PIO_LU
8123 Left SMIF1 PIO_URDY 8223 Right SMIF2 PIO_URDY
8124 Left SMIF1 PIP 8224 Right SMIF2 PIP
8125 Left SMIF1 PLDN 8225 Right SMIF2 PLDN
8126 Left SMIF1 PLPOS 8226 Right SMIF2 PLPOS
8127 Left SMIF1 PRTST 8227 Right SMIF2 PRTST
8128 Left SMIF1 RDYST 8228 Right SMIF2 RDYST
8129 Left SMIF1 SWPOS 8229 Right SMIF2 SWPOS
8130 Left SMIF1 TLTDN 8230 Right SMIF2 TLTDN
8131 Left SMIF1 TLTPOS 8231 Right SMIF2 TLTPOS
8132 Left SMIF1 TLTUP 8232 Right SMIF2 TLTUP
8133 Left SMIF1 XPOS 8233 Right SMIF2 XPOS
8134 Left SMIF1 YPOS 8234 Right SMIF2 YPOS
8135 Left SMIF1 Position 8235 Right SMIF2 Position
8136 Left SMIF1 PIO Status 8236 Right SMIF2 PIO Status
8137 Left SMIF1 Wafer Map 8237 Right SMIF2 Wafer Map
8138 Left SMIF1 Wafer Count 8238 Right SMIF2 Wafer Count
8139 Left SMIF1 PLUP 8239 Right SMIF2 PLUP
8140 Left SMIF1 ECV 8240 Right SMIF2 ECV
8141 Left SMIF1 ALED 8241 Right SMIF2 ALED
Left Ergospeed II SMIF Variables Right Ergospeed II SMIF Variables
8314 Left ErgoSMIF MDLN 8414 Right ErgoSMIF MDLN
8315 Left ErgoSMIF SoftRev 8415 Right ErgoSMIF SoftRev
8316 Left ErgoSMIF Control State 8416 Right ErgoSMIF Control State
8317 Left ErgoSMIF Process State 8417 Right ErgoSMIF Process State
8318 Left ErgoSMIF PIO State 8418 Right ErgoSMIF PIO State
Where Used: S1F3, S1F11, S1F12, S2F23, S2F33, S2F45, S2F46, S2F47, S2F48; S6F13, S6F18, S6F22
SVNAME -- Status Variable Name Format: 20
Defined in the SVID table above.
Where Used: S1F12
TEXT -- A single line of characters. Format: 20
Where Used: S10F1, S10F3, S10E5
TIAACK -- Equipment acknowledgement code, 1 byte Format: 10
0 = everything correct
1 = too many SVIDs
2 = no more traces allowed
3 = invalid period
>3 = equipment specified error
4-63 reserved
Where Used: S2F24
TIACK -- Time Acknowledge Code, 1 byte Format: 10
0 = OK
1 = Error, not done
2-63 = reserved
Where Used: S2F32
TID -- Terminal number, 1 byte Format: 10
0 = single or main terminal
>0 = additional terminals at the same equipment
Where Used: S10F1, S10F3, S10F5, S10F7
TIME -- Time of day Format: 20
FOR the Y2K feature
IF EC 289 (TIMEFORMAT ) = 0,
TIME is 12 bytes: yymmddhhmmss
ELSE IF EC 289 (TIMEFORMAT ) = 1,
TIME is 16 bytes: yyyymmddhhmmsscc
OTHERWISE:
TIME is 12 bytes: yymmddhhmmss
Where Used: S2F18
TOTSMP -- Total samples to be made Format: 20, 3( ), 5( )
Where Used: S2F23
TRID -- Trace Request ID Format: 20,.3( ), 5( )
Where Used: S2F23, S6F1
TSID - Material Port Number (ACH) Format: 20
It designates the stage location of the automatic cassette handler. The stage is numbered from left to right facing the
equipment, 1 to 4.
Note: For Factory Automation Only
Where Used: S2F71 S2F71
UNITS -- Units Identifier Format: 20
As allowed by E5 Section 9
Where Used: S1F12, S2F30, S2F48
UPPERDB - Upper Dead Band Format: 20
A variable limit attribute which defines the upper boundary of the deadband of a limit. The value applies to a single limit
(LIMITID) for a specified VID. Thus, UPPERDB and LOWERDB as a pair define a limit.
Where used: S2F45, S2F48
V -- Variable data Format: 20
Where Used: S6F11, S6F13
VLAACK -- Variable Limit Attribute Acknowledge Code, 1 byte Format: 10
0 = Acknowledge, command will be performed
1 = Limit attribute definition error
2 = Cannot perform now
>2 = Other equipment-specific error
3-63 = Reserved
Where Used: S2F46
VID -- Variable ID Format: 20, 3( ), 5( )
The variable id will be the identification of one of the three classes of identifications: data variable identification (DVID),
equipment constant identification (ECID), or status variable identification (SVID).
VID Description Class
1 – 99 Analog readback variables
(available for tracing)
SVID
100 - 199 Data variables (Implant and Machine Status)
(not available for tracing)
DVID
200 - 249 Data process program variables (Recipe)
(not available for tracing)
DVID
250 - 299 Equipment Constants ECID
300 - 349 GEM compliant data variables DVID
350 - 399 Equipment Constants ECID
400 - 499 Status Variables (Pump Analog Readback) SVID
500 - 599 GEM System data variables DVID/ SVID
600 - 699 Data Variables (IQDP Status) DVID
1001-1099 lowest analog readback SV value on last wafer SVID
2001-2099 highest analog readback SV value on last wafer SVID
3001-3099 average analog readback SV value on last wafer SVID
4001-4099 lowest analog readback SV value on last batch SVID
5001-5099 highest analog readback SV value on last batch SVID
6001-6099 average analog readback SV value on last batch SVID
7000-7099 Analog readback variables in a non-ASCII format.
(available for tracing)
SVID
8000-8099 Asyst and Ergospeed common SMIF Variables SVID
8100-8199 Left Asyst SMIF Variables SVID
8200-8299 Right Asyst SMIF Variables SVID
8300-8399 Left Ergospeed SMIF Variables SVID /DVID
8400-8499 Right Ergospeed SMIF Variables SVID /DVID
Where Used: S1F3, S1F11, S1F12, S2F23, S2F33, S2F45, S2F46, S2F47, S2F48; S6F13, S6F18, S6F22
VNAME -- Variable Name Format: 20
Variable names are defined in the VID table above. The name will be the name of one of the three classes of variables:
data variable name (DVNAME), equipment constant name (ECNAME), or status variable name (SVNAME).
Where Used: S1F3, S1F11, S1F12, S2F23
3.0 Message Detail
3.0 Message Detail
This section defines a number of specific functions in different streams to be used as the basis for the GEM
communications between Equipment and Host. The functions are defined in the form of transaction message pairs.
The transactions are described in a standard form, as defined by SEMI E5-95 section 7, which involves specification of
the number, name, single or multiple block, direction of communication, nature of reply required, description, variable
definition, and the detailed structure of the message in terms of lists and items. Double lines separate streams and single
lines separate transactions to aid in readability.
The functions are described in a standard form which involves specification of the number, name, single or multiple block,
direction of communication, nature of reply required, description, variable definition, and the detailed structure of the
message in terms of lists and items. Double lines separate streams, and single lines separate transactions to aid
readability.
The abbreviations used in each transaction are as follows:
Description: A description of the action generated by the function.
Structure: Detailed structure showing lists and defined items. Lists are denoted by a capital L followed by the length
separated by a comma. The individual elements in the list are numbered on separate lines. Nested lists are indented to
emphasize the structure. The detailed form of the items is given in the define section at the beginning of the transaction.
The symbols "<" and ">" are used to enclose each item in the structure data and imply that there is an item header. A
detailed description of each data item as well as a list of the allowable data formats can be found in the Data Item
Dictionary.
Exception: Special cases in the structure that have a different meaning.
SnFm+1 Name of function (same structure as above
(secondary) except never with reply)
Stream 1 Equipment Status
This stream provides a means for exchanging information about the status of the equipment, including its current mode,
depletion of various consumable items, and the status of transfer operations.
S1F0 Abort Transaction (S1F0) S,H<->E
Description:
Used in lieu of an expected reply to abort a transaction. Function 0 is defined in every stream and has the same meaning
in every stream.
Structure:
Header Only.
S1F1 Are You There Request (R) S,H<->E,reply
Description:
Establishes if the equipment is on-line. A function 0 response to this message means the communication is inoperative. In
the equipment, a function 0 is equivalent to a timeout on the receive timer after issuing S1F1 to the host.
Structure:
Header only
S1F2 On Line Data (D) S,H<->E
Description:
Data signifying that the equipment is alive.
Structure:
[1] <L,2
[1][1] <MDLN>
[1][2] <SOFTREV>
>
Exception:
This will not change the ON-LINE/OFF-LINE state of the Equipment. The Host sends a zero length list
to the Equipment.
S1F3 Selected Equipment Status Request (SSR) S,H->E,reply
Description:
A request to the equipment to report selected values of its status.
Structure:
The following structure is approved for all item formats and should be used by all new implementations:
[1] <L,n
[1][1] <VID1>
. .
. .
[1][n] <VIDn>
>
The following structure is included for compatibility with previous implementations and may only be used for items of
format 3 ( ) and 5 ( ):
[1] <Ux,n VID1 … VIDn> or <Ix,n VID1 … VIDn>
Exception:
A zero-length for list item [1] or item [1][x] means report all VIDs.
S1F4 Selected Equipment Status Data (SSD) M,H<-E
Description:
The equipment reports the value of each SVID requested in the order requested. The host remembers the names of
values requested.
Structure:
[1] <L,n
[1][1] <SV1>
. .
. .
[1][n] <SVn>
>
Exceptions:
A zero length for item [1] means no response can be made. A zero-length for item [1][x], SVx, means that SVIDx does not
exist.
S1F11 Status Variable Namelist Request (SVNR) S,H->E,reply
Description:
A request to the equipment to identify certain status variables.
Structure:
[1] <L,n
[1][1] <VID1>
. .
. .
[1][n] <VIDn>
>
Exception:
A zero length for item [1] means report all VIDs.
S1F12 Status Variable Namelist Reply (SVNRR) M,H<-E
Description:
The equipment reports to the host the name and units of the requested SV s.
Structure:
[1] <L,n
[1][1] <L,3
[1][1][1] <VID1>
[1][1][2] <VNAME1>
[1][1][3] <UNITS1>
>
. .
. .
[1][n] <L,3
[1][n][1] <VIDn>
[1][n][2] <VNAMEn>
[1][n][3] <UNITSn>
>
>
S1F13 Establish Communications Request (CR) S,H<->E,reply
Description:
The purpose of this message is to provide a formal means of initializing communications at a logical application level both
on power-up and following a break in commuications. It should be the first message sent following any period where host
and Equipment SECS applications are unable to communicate. An attempt to send an Establish Communications
Request (S1F13) should be repeated at programmable intervals until an Establish Communications Acknowledge (S1F14)
is received within the transaction timeout period with an acknowledgement code accepting the establishment.
Structure:
[1] <L,2
[1][1] <MDLN>
[1][2] <SOFTREV>
>
Exception:
The host sends a zero-length list for item [1] to the equipment.
S1F14 Establish Communications Request Acknowledge (CRA) S,H<->E
Description:
Accept or deny Establish Communications Request (S1F13). MDLN and SOFTREV are on-line data and are valid only if
COMMACK = 0.
Structure:
[1] <L,2
[1][1] <COMMACK>
[1][2] < L,2
[1][2][1] <MDLN>
[1][2][2] <SOFTREV>
>
>
Exception:
The host sends a zero-length for list item [1][2] to the equipment
S1F15 Request OFF-LINE (ROFL) S,H->E,reply
Description:
The host requests that the equipment transition to the OFF-LINE state.
Structure:
Header only.
S1F16 OFF-LINE Acknowledge (OFLA) S,H<-E
Description:
Acknowledge or error.
Structure:
[1] <OFLACK>
S1F17 Request ON-LINE (RONL) S,H->E,reply
Description:
The host requests that the equipment transition to the ON-LINE state.
Structure:
Header only
S1F18 ON-LINE Acknowledge (ONLA) S,H<-E
Description:
Acknowledge or error.
Structure:
[1] <ONLACK>
Stream 2 Equipment Control and Diagnostics
Messages which deal with control of the equipment from the host. This includes all remote operations and equipment self-
diagnostics and calibration but specifically excludes the control operations which are associated with material transfer
(see stream 4 ), loading of executive and boot programs (stream 8 ), and all file and operating system calls (stream 10
and stream 13 ).
S2F0 Abort Transaction S,H<->E
Description:
Same form as S1F0
S2F13 Equipment Constant Request (ECR) S,H->E,reply
Description:
Constants such as for calibration, servo gain, alarm limits, data collection mode and other values that are changed
infrequently can be obtained using this message.
Structure:
[1] < L,n
[1][1] <ECID1>
. .
. .
[1][n] <ECIDn>
>
The following structure is included for compatibility with previous implementations and may only be used for items of
format 3 ( ) and 5 ( ) :
[1] <Ux,n ECID1 ... ECIDn > or <Ix,n ECID1 ... ECIDn >
Exceptions:
A zero-length for list item [1] or item [1][x] means report all ECV 's according to a predefined order.
S2F14 Equipment Constant Data (ECD) M,H<-E
Description:
Data Response to S2F13 in the order requested.
Structure:
[1] <L,n
[1][1] <ECV1>
[1][2] <ECV2>
. .
. .
[1][n] <ECVn>
>
Exceptions:
A zero-length for list item [1] means no response exists. A zero-length for list item [1][x], ECVx , means that ECIDx does
not exist.
S2F15 New Equipment Constant Send (ECS) S,H->E,reply
Description:
Change one or more equipment constants.
Structure:
[1] <L,n
[1][1] <L,2
[1][1][1] <ECID1>
[1][1][2] <ECV1>
>
[1][2] <L,2
[1][2][1] <ECID2>
[1][2][2] <ECV2>
>
. .
. .
. .
[1][n] <L,2
[1][n][1] <ECIDn>
[1][n][2] <ECVn>
>
>
S2F16 New Equipment Constant Acknowledge (ECA) S,H<-E
Description:
Acknowledge or error. If EAC contains a non-zero error code, the equipment should not change any of the ECIDs
specified in S2F15.
Structure:
[1] <EAC>
Note:
Equipment constants cannot be changed if the E220 is displaying either the GEM SETUP or ECO & OPTION,
and only can be changed when E220 is in the idle state. This is done to prevent conflict between operator and
Host attempting to modify the same equipment constant and prevent a change during implanting.
S2F17 Date and Time Request (DTR) S,H<->E,reply
Description:
Useful to check equipment time base or for equipment to synchronize with the host time base.
Structure:
Header only.
S2F18 Data and Time Data (DTD) S,H<->E
Description
Actual time data.
Structure:
[1] <TIME>
Exceptions:
A zero-length item [1] means no time exists.
S2F23 Trace Initialize Send (TIS) S,H->E,reply
Description:
Status variables exist at all times. This function provides a way to sample a subset of those status variables as a function
of time. The trace data is returned on S6F1 and is related to the original request by the TRID. Multiple trace requests may
be made to that equipment allowing it. If equipment receives S2F23 with the same TRID as a trace function that is
currently in progress, the equipment should terminate the old trace and then initiate the new trace. A trace function
currently in progress may be terminated by S2F23 with TRID of that trace and TOTSMP=0.
Structure:
The following structure is approved for all item formats and should be used by all new implementations.
[1] <L,5
[1][1] <TRID>
[1][2] <DSPER>
[1][3] <TOTSMP>
[1][4] <REPGSZ>
[1][5] <L,n
[1][5][1] <SVID1>
. .
. .
[1][5][n] <SVIDn>
>
>
The following structure is included for compatibility with previous implementations and may only be used for items whose
SVID is format 3 ( ) and 5 ( ):
[1] <L,5
[1][1] <TRID>
[1][2] <DSPER>
[1][3] <TOTSMP>
[1][4] <REPGSZ>
[1][5] <U,n SVID1,..., SVIDn> or <I,n SVID1,..., SVIDn>
>
S2F24 Trace Initialize Acknowledge (TIA) S,H<-E
Description:
Acknowledge or error.
Structure:
[1] <TIAACK>
S2F25 Loopback Diagnostic Request (LDR) S,H<->E,reply
Description:
A diagnostic message for checkout of protocol and communication circuits. The binary string sent is echoed back.
Structure:
[1] <ABS>
S2F26 Loopback Diagnostic Data (LDD) S,H<->E
Description:
The echoed binary string.
Structure:
[1] <ABS >
S2F29 Equipment Constant Namelist Request (ECNR) S,H->E,reply
Description:
This function allows the host to retrieve basic information about what equipment constants are available in the equipment.
Structure:
[1] <L,n
[1][1] <ECID1>
. .
. .
[1][n] <ECIDn>
Exception:
A zero-length list item [1] means send information for all ECIDs.
S2F30 Equipment Constant Namelist (ECN) M,H<-E
Description:
Data Response.
Structure:
[1] <L,n (number of equipment constants)
[1][1] <L,6
[1][1][1] <ECID1>
[1][1][2] <ECNAME1>
[1][1][3] <ECMIN1>
[1][1][4] <ECMAX1>
[1][1][5] <ECDEF1>
[1][1][6] <UNITS1>
>
. .
. .
[1][n] <L,6
[1][n][1] <ECIDn>
[1][n][2] <ECNAMEn>
[1][n][3] <ECMINn>
[1][n][4] <ECMAXn>
[1][n][5] <ECDEFn>
[1][n][6] <UNITSn>
>
>
S2F31 Date and Time Set Request (DTS) S,H->E,reply
Description:
Useful to synchronize the equipment time with the host time base.
Structure:
[1] <TIME>
S2F32 Date and Time Set Acknowledge (DTA) S,H<-E
Description:
Acknowledge the receipt of time and date.
Structure:
[1] <TIACK>
S2F33 Define Report (DR) M,H->E,reply
Description:
The purpose of this message is for the host to define a group of reports for the equipment.
The type of report to be transmitted is designated by a Boolean "Equipment Constant." An "Equipment Constant Value" of
"False" means that an "Event Report" (S6F11) will be sent, and a value of "True" means that an "Annoted event Report"
(S6F13) will be sent.
If S2F33 is Multi-block, it must be preceded by the S2F39/S2F40 Inquire/Grant transaction.
Structure:
[1] <L,2
[1][1] <DATAID>
[1][2] <L,n // n reports
[1][2][1] <L,2 // report 1
[1][2][1][1] <RPTID1>
[1][2][1][2] <L,m // m VIDs this report
[1][2][1][2][1] <VID1>
. .
. .
. .
[1][2][1][2][m] <VIDm>
>
>
. .
. .
. .
[1][2][n] <L,2 // report n
[1][2][n][1] <RPTID1>
[1][2][n][2] <L,k // k VIDs this report
[1][2][n][2][1] <VID1>
. .
. .
. .
[1][2][n][2][k] <VIDk>
>
>
>
>
Exceptions:
1. A zero-length list item [1][2] following <DATAID> [1][1] item deletes all report definitions and associated links. See
S2F35 (Link Event/Report).
2. A zero-length list item [1][2][x][2] following <RPTIDx> [1][2][x][1] item deletes report type RPTID. All CEIDs linked to
this RPTID are also deleted.
S2F34 Define Report Acknowledge (DRA) S,H<-E
Description:
Acknowledge or error. If an error condition is detected the entire message is rejected, i.e., partial changes are not allowed.
Structure:
[1] <DRACK>
S2F35 Link Event Report (LER) M,H->E,reply
Description:
The purpose of this message is for the host to link n reports to an event (CEID ). These linked event reports will default to
'disabled' upon linking. That is, the occurrence of an event would not cause the report to be sent until enabled. See S2F37
for enabling reports.
If S2F35 is Multi-block, it must be preceded by the S2F39/S2F40 Inquire/Grant transaction.
Structure:
[1] <L,2
[1][1] <DATAID>
[1][2] <L,n // n events
[1][2][1] <L,2 // event 1
[1][2][1][1] <CEID1>
[1][2][1][2] <L,m // m reports
[1][2][1][2][1] <RPTID1>
. .
. .
. .
[1][2][1][2][m] <RPTIDm>
>
>
. .
. .
. .
[1][2][n] <L,2 // event n
[1][2][n][1] <CEID1>
[1][2][n][2] <L,k // k reports
[1][2][n][2][1] <RPTID1>
. .
. .
. .
[1][2][n][2][k] <RPTIDk>
>
>
>
>
Exceptions:
A zero length list item [1][2][x][2] following <CEIDx > [1][2][x][1] deletes all report links to that event.
S2F36 Link Event Report Acknowledge (LERA) S,H<-E
Description:
Acknowledge or error. If an error condition is detected the entire message is rejected, i.e., partial changes are not allowed.
Structure:
[1] <LRACK>
S2F37 Enable/Disable Event Report (EDER) S,H->E,reply
Description:
The purpose of this message is for the host to enable or disable reporting for a group of events (CEIDs).
Structure:
[1] <L,2
[1][1] <CEED> enable/disable
[1][2] <L,n #CEIDs
[1][2][1] <CEID1>
. .
. .
. .
[1][2][n] <CEIDn>
Exceptions:
A zero length list item [1][2] following <CEED> item [1][] means all CEID s.
S2F38 Enable/Disable Event Report Acknowledge (EERA) S,H<-E
Description
Acknowledge or error. If an error condition is detected the entire message is rejected, i.e., partial changes are not allowed.
Structure:
[1] <ERACK>
S2F39 Multi-block Inquire (DMBI) S,H->E,reply
Description:
If a S2F33, S2F35, or S2F45message is more than one block, this transaction must precede the message.
Structure:
[1] <L,2
[1][1] <DATAID>
[1][2] <DATALENGTH>
>
S2F40 Multi-block Grant (DMBG) S,H<-E
Description:
Grant permission to send multi-block message.
Structure:
[1] <GRANT>
S2F41 Host Command Send (HCS)
S,H->E,reply
Description:
The Host requests the Equipment to perform the specified remote command with the associated parameters.
Structure:
[1] <L,2
[1][1] <RCMD>
[1][2] <L,n // # of parameters
[1][2][1] <L,2
[1][2][1][1] <CPNAME1> // parameter 1 name
[1][2][1][2] <CPVAL1> // parameter 1 value
>
. .
. .
[1][2][n] <L,2
[1][2][n][1] <CPNAMEn> // parameter n name
[1][2][n][2] <CPVALn> // parameter n value
>
>
>
S2F42 Host Command Acknowledge (HCA) S,H<-E
Description:
Acknowledge Host command or error. If command is not accepted due to one or more invalid parameters. (i.e.,
HCACK=3), then a list of invalid parameters will be returned containing the parameter name and reason for being invalid.
Structure:
[1] <L,2
[1][1] <HCACK>
[1][2] <L,n // # of parameters
[1][2][1] <L,2
[1][2][1][1] <CPNAME1> // parameter 1 name
[1][2][1][2] <CPACK1> // parameter 1 reason
>
. .
. .
[1][2][n] <L,2
[1][2][n][1] <CPNAMEn> // parameter n name
[1][2][n][2] <CPACKn> // parameter n reason
>
>
>
Exception:
If there are no invalid parameters, then a list of zero-length will be sent for list item [1][2].
Note:
Remote commands will not be executed unless the machine is in the proper state denoted by the screen being displayed.
Examples of all the screens can be found in the E220 Operator’s or Maintenance Manuals. See RCMD in the Data Item
Dictionary section for further explanation
S2F43 Reset Spooling Streams and Functions (RSSF) S,H->E,reply
Description:
This message allows the host to select specific streams and functions to be spooled whenever spooling is active.
Structure:
[1] <L,m
[1][1] <L,2
[1][1][1] <STRID1>
[1][1][2] <L,n
[1][1][2][1] <FCNID1>
. .
. .
[1][1][2][n] <FCNIDn>
>
>
. .
. .
[1][n] <L,2
[1][n][1] <STRIDn>
[1][n][2] <L,k
[1][n][2][1] <FCNID1>
. .
. .
[1][n][2][k] <FCNIDk>
>
>
>
>
Exceptions:
1. A zero-length for list item[1], m=0, turns off spooling for all streams and functions.
2. A zero-length list item [1][x][2] after item [1][x][1], <STRIDx>, turns on spooling for all functions for the associated
stream <STRIDx>.
Notes:
1. Turning off spooling for all functions for a specific stream is achieved by omitting reference to the stream from
this message.
2. Spooling for Stream 1 is not allowed.
3. Equipment must allow host to spool all primary messages for a stream (except Stream 1 ).
4. A defined list of functions for a stream in this message will replace any previously selected functions.
S2F44 Reset Spooling Acknowledge (RSA) M,H<-E
Description:
Acknowledge or error.
Structure:
[1] <L,2
[1][1] <RSACK> // accept or reject
[1][2] <L,m // m=number of streams with errors
[1][2][1] <L,3
[1][2][1][1] <STRID1>
[1][2][1][2] <STRACK1> // error in stream
[1][2][1][3] <L,n // n = functions in error
[1][2][1][3][1] <FCNID1>
. .
. .
[1][2][1][3][n] <FCNIDn>
>
>
. .
. .
[1][2][m] <L,3
[1][2][m][1] <STRIDm>
[1][2][m][2] <STRACKm> // error in stream
[1][2][m][3] <L,k // k = functions in error
[1][2][m][3][1] <FCNID1>
. .
. .
[1][2][m][3][k] <FCNIDk>
>
>
>
>
Exceptions:
1. If item [1][1], RSACK, =0, list item [1][2] is always zero-length, m=0, indicating no streams or functions in
error.
2. If zero-length list item [1][2][x][3] is zero-length, there are no functions in error for stream <STRIDx>
S2F45 Define Variable Limit Attributes (DVLA) M,H->E,reply
Structure:
[1] <L,2
[1][1] <DATAID>
[1][2] <L,m // # of variables
[1][2][1] <L,2
[1][2][1][1] <VID1>
[1][2][1][2] <L,n // # of limits
[1][2][1][2][1] <L,2
[1][2][1][2][1][1] <LIMITID1>
[1][2][1][2][1][2] <L,p // p=0 or 2
[1][2][1][2][1][2][1] <UPPERDB1>
[1][2][1][2][1][2][2] <LOWERDB1>
>
>
. .
. .
[1][2][1][2][n] <L,2
[1][2][1][2][n][1] <LIMITIDn>
[1][2][1][2][n][2] <L,q // q=0 or 2
[1][2][1][2][n][2][1] <UPPERDBn>
[1][2][1][2][n][2][2] <LOWERDBn>
>
>
>
>
. .
. .
[1][2][m] <L,2
[1][2][m][1] <VIDm>
[1][2][m][2] <L,k // # of limits
[1][2][m][2][1] <L,2
[1][2][m][2][1][1] <LIMITID1>
[1][2][m][2][1][2] <L,r // r=0 or 2
[1][2][m][2][1][2][1] <UPPERDB1>
[1][2][m][2][1][2][2] <LOWERDB1>
>
>
. .
. .
[1][2][m][2][k] <L,2
[1][2][m][2][k][1] <LIMITIDk>
[1][2][m][2][k][2] <L,s // s=0 or 2
[1][2][m][2][k][2][1] <UPPERDBk>
[1][2][m][2][k][2][2] <LOWERDBk>
>
>
>
>
>
>
Exceptions:
1. Zero-length, m=0, list item [1][2] means all deadband limits, UPPERDB and LOWERDB, for all monitored VIDs are
"undefined."
2. Zero-length list item [1][2][x][2]for VIDx means all deadband limits, UPPERDB and LOWERDB for VIDx are
"undefined."
3. Zero-length deadbands list item [1][2][x][2][y][2] means deadband limits UPPERDBy and LOWERDBy for VIDx
are "undefined."
S2F46 Variable Limit Attribute Acknowledge (VLAA) M,H<-E
Description:
Acknowledge definition of variable limit attributes or report error. If S2F45 is not accepted due to one or more invalid
parameters (e.g., LIMITACK=3), then a list of invalid parameters is returned containing the variable limit attribute and
reason for rejection. If an error condition is detected, the entire message is rejected, i.e., partial changes are not allowed.
Structure:
[1] <L,2
[1][1] <VLAACK>
[1][2] <L,m // m=number of invalid parameters
[1][2][1] <L,3
[1][2][1][1] <VID1> // VID with error
[1][2][1][2] <LVACK1> // reason
[1][2][1][3] <L,p // p=0 or 2
[1][2][1][3][1] <LIMITID1> //limit in error
[1][2][1][3][2] <LIMITACK1> // reason
[1][2][1][3][0] >
[1][2][1][0] >
. .
. .
. .
[1][2][m] <L,3
[1][2][m][1] <VIDm> // VID with error
[1][2][m][2] <LVACKm> // reason
[1][2][m][3] <L,q // q=0 or 2
[1][2][m][3][1] <LIMITIDm> //limit in error
[1][2][m][3][2] <LIMITACKm> // reason
[1][2][m][3] >
[1][2][m] >
[1][2] >
[1] >
Exceptions:
1. Zero-length, m=0, list item [1][2] means no invalid variable limit attributes.
2. Zero-length list item [1][2][x][3] means no invalid limit values for that VIDx.
S2F47 Variable Limit Attribute Request (VLAR) S,H->E,reply
Description:
This message allows the host to query the equipment for current variable limit attribute definitions.
Structure:
[1] <L,m // m=# VIDs this request)
[1][1] <VID1>
. .
. .
[1][m] <VIDm>
>
Exceptions:
A zero-length list item [1], m=0, requests a list of all VID values that can have variable limit attributes.
S2F48 Variable Limit Attributes Send (VLAS) M,H<-E
Description:
Equipment sends values of requested variable limit attribute definitions in the order requested.
Structure:
[1] <L,m (m=# VIDs this request)
[1][1] <L,2
[1][1][1] <VID1>
[1][1][2] <L,p // p=0 or 4
[1][1][2][1] <UNITS1>
[1][1][2][2] <LIMITMIN1>
[1][1][2][3] <LIMITMAX1>
[1][1][2][4] <L,n //n=# limits defined
[1][1][2][4][1] <L,3
[1][1][2][4][1][1] <LIMITID1>
[1][1][2][4][1][2] <UPPERDB1>
[1][1][2][4][1][3] <LOWERDB1>
>
. .
. .
. .
[1][1][2][4][n] <L,3
[1][1][2][4][n][1] <LIMITIDn>
[1][1][2][4][n][2] <UPPERDBn>
[1][1][2][4][n][3] <LOWERDBn>
>
>
>
>
. .
. .
. .
[1][m] <L,2
[1][m][1] <VIDm>
[1][m][2] <L,q // q=0 or 4
[1][m][2][1] <UNITSm>
[1][m][2][2] <LIMITMINm>
[1][m][2][3] <LIMITMAXm>
[1][m][2][4] <L,r //r=# limits defined
[1][m][2][4][1] <L,3
[1][m][2][4][1][1] <LIMITID1>
[1][m][2][4][1][2] <UPPERDB1>
[1][m][2][4][1][3] <LOWERDB1>
>
. .
. .
. .
[1][m][2][4][r] <L,3
[1][m][2][4][r][1] <LIMITIDr>
[1][m][2][4][r][2] <UPPERDBr>
[1][m][2][4][r][3] <LOWERDBr>
>
>
>
>
>
>
Exceptions:
1. A zero-length list item [1][x][2] means that limits are not supported for the VIDx.
2. A zero-length list item [1][x][2][4] means no limits are currently defined for VIDx.
S2F49 Host Enhanced Remote Command
S,H->E,reply
Description:
The Host requests the Equipment to perform the specified remote command with the associated parameters.
Structure:
[1] <L,4
[1][1] <DATAID>
[1][2] <OBJSPEC>
[1][3] <RCMD>
[1][4] <L,n // # of parameters
[1][4][1] <L,2
[1][4][1][1] <CPNAME1> // parameter 1 name
[1][4][1][2] <CEPVAL1> // parameter 1 value
>
. .
. .
[1][4][n] <L,2
[1][4][n][1] <CPNAMEn> // parameter n name
[1][4][n][2] <CEPVALn> // parameter n value
>
>
>
Note: This is essentially the same as S2F41 except parameters in CEPVAL can also be lists. This why RCMD
"PPSELECT" has to be in an S2F49 message only when it contains the "PPID-LIST" parameter. DATAID can be any
number while OBJSPEC may be set to a null string.
S2F50 Enhanced Remote Command Acknowledge S,H<-E
Description:
The equipment acknowledges Enhanced Remote Command or reports any errors. If the command is not accepted due to
one or more invalid parameters, then a list of invalid parameters will be returned containing the parameter name and
reason for being invalid.
Structure:
[1] <L,2
[1][1] <HCACK>
[1][2] <L,n // # of parameters
[1][2][1] <L,2
[1][2][1][1] <CPNAME1> // parameter 1 name
[1][2][1][2] <CEPACK1> // parameter 1 reason
>
. .
. .
[1][2][n] <L,2
[1][2][n][1] <CPNAMEn> // parameter n name
[1][2][n][2] <CEPACKn> // parameter n reason
>
>
>
S2F71- AGV-ACH Automation Initiate Processing Request S,H->E,reply
Description:
Initiate Processsing for AGV-ACH automation.
Structure:
[1] <L, 2
[1][1] <L, 4
[1][1][1] <TSID1>
[1][1][2] <ESID1>
[1][1][3] <PPID1>
[1][1][4] <LOTID1>
>
[1][2] <L, 4
[1][2][1] <TSID2>
[1][2][2] <ESID2>
[1][2][3] <PPID2>
[1][2][4] <LOTID2>
>
>
Notes:
1. PPID1 and PPID2 must be same for one batch
2. The E220 shall queue S2F71 while the equipment is processing wafers. The queuing buffer shall hold up to four
S2F71s.
3. In case that only one cassette is processed during one batch, the structure of S2F71 shall be
[1] <L, 2
[1][1] <L, 4
[1][1][1] <TSID1>
[1][1][2] <ESID1>
[1][1][3] <PPID1>
[1][1][4] <LOTID1>
>
[1][2] <L,4
[1][2][1] <0>
[1][2][2] <0>
[1][2][3] <’ ‘>
[1][2][4] <’ ‘>
>
>
S2F72 - ACH Initiate Processing Acknowledge M,H<-E
Description:
Acknowledge or error.
Structure:
[1] <ACHA >
Stream 3 Material Status
The functions of the material status stream are used to communicate material-in-process, time to completion information,
and extraordinary material occurrences.
S3F0 Abort Transaction (S3F0) S,H<->E
Description:
Same form as S1F0
Stream 4 Material Control
The material control stream contains the original material control protocol and the newer protocol which supports the
SEMI-E32 Material Movement Management Services standard.
S4F0 Abort Transaction (S4F0) S,H<->E
Description:
Same form as S1F0.
Stream 5 Exception Reporting
This stream contains messages regarding binary and analog equipment alarms. The alarms are generated by the
equipment in response to changing conditions detected by the equipment. Alarms are divided into categories as follows:
1. Personal safety -- condition may be dangerous to people.
2. Equipment safety -- condition may harm equipment.
3.Parameter control warning -- parameter variation outside of preset limits -- may harm product.
4. Parameter control error -- parameter variation outside of reasonable control limits -- may indicate an equipment
malfunction.
5.Irrecoverable error -- intervention required before normal use of equipment can resume.
6.Equipment status warning -- an unexpected condition has occurred, but operation can continue.
7.Attention flags -- a signal from a process program indicating that a particular step has been reached.
8.Data integrity -- a condition which may cause loss of data; usually related to Stream 6.
S5F0 Abort Transaction S,H<->E
Description:
Same form as S1F0.
S5F1 Alarm Report Send (ARS) S,H<-E,[reply]
Description:
This message reports a change in or presence of an alarm condition. One message will be issued when the alarm is set
and one message will be issued when the alarm is cleared. Irrevocable errors and attention flags may not have a
corresponding clear message.
Structure:
[1] <L,3
[1][1] <ALCD>
[1][2] <ALID>
[1][3] <ALTX>
>
S5F2 Alarm Report Acknowledge (ARA) S,H->E
Description:
Acknowledge or error.
Structure:
[1] <ACKC5>
S5F3 Enable/Disable Alarm Send (EAS) S,H->E,[reply]
Description:
This message will change the state of the enable bit in the equipment. The enable bit determines if the alarm will be sent
to the host. Alarms which are not controllable in this way are unaffected by this message.
Structure:
[1] <L,2
[1][1] <ALED>
[1][2] <ALID>
>
Exception:
A zero-length item [1][2], ALID, means all alarms.
S5F4 Enable/Disable Alarm Acknowledge (EAA) S,H<-E
Description:
Acknowledge or error.
Structure:
[1] <ACKC5>
S5F5 List Alarms Request (LAR) S,H->E,reply
Description:
This message requests the equipment to send binary and analog alarm information to the host.
Structure:
[1] <ALID1,...,ALIDn>
Exception:
A zero-length item [1] means send all possible alarms regardless of the state of ALED.
S5F6 List Alarm Data (LAD) M,H<-E
Description:
This message contains the alarm data known to the equipment. There are "m" alarms in the list.
Structure:
[1] <L,m
[1][1] <L,3
[1][1][1] <ALCD1>
[1][1][2] <ALID1>
[1][1][3] <ALTX1>
>
. .
. .
[1][m] <L,3
[1][m][1] <ALCDm>
[1][m][2] <ALIDm>
[1][m][3] <ALTXm>
>
Exception:
A zero-length item [1], m=0, means no response can be made.
A zero-length item [1][x][1] ALCDx or item [1][x][2] ALIDx or item [1][x][3] ALTXx means that item does not exist.
S5F7 List Enabled Alarm Request (LEAR) S,H->E,reply
Description:
List alarms which are enabled.
Structure:
Header only.
S5F8 List Enabled Alarm Data (LEAD) M,H<-E
Description:
This message is similar to S5F6 except that it lists only alarms which
are enabled.
Structure:
Same as S5F6 .
Stream 6 Data Collection
This stream is intended to cover the needs of in-process measurements and equipment monitoring.
S6F0 Abort Transaction (S6F0) S,H<->E
Description:
Same form as S1F0.
S6F1 Trace Data Send (TDS) S,H<-E,[reply]
Description:
This function sends samples to the host according to the trace setup done by S2,F23. Trace is a time-driven form of
equipment status.
Structure:
[1] <L,4
[1][1] <TRID>
[1][2] <SMPLN>
[1][3] <STIME>
[1][4] <L,n
[1][4][1] <SV1>
. .
. .
[1][4][n] <SVn>
>
>
Exception:
A zero-length [1][3] STIME item means no value is given and that the time is to be
derived from [1][2] SMPLN item along with knowledge of the request.
S6F2 Trace Data Acknowledge (TDA) S,H->E
Description:
Acknowledge or error.
Structure:
[1] <ACKC6>
S6F5 Multi-block Data Send Inquire (MBI) S,H<-E,reply
Description:
If the discrete data report S6F11 , S6F13, can involve more than one block, this transaction must precede the
transmission.
Structure:
[1] <L,2
[1][1] <DATAID>
[1][2] <DATALENGTH>
>
S6F6 Multi-block Grant (MBG) S,H->E
Description:
Grant permission to send.
Structure:
[1] <GRANT6>
S6F11 Event Report Send (ERS) M,H<-E,reply
Description:
The purpose of this message is for the equipment to send a defined, linked, and enabled group of reports to the host upon
the occurrences of an event (CEID).
If S6F11 is Multi-block, it must be preceded by the S6F5 /S6F6 Inquire/Grant transaction.
Structure:
[1] <L,3
[1][1] <DATAID>
[1][2] <CEID>
[1][3] <L,n
[1][3][1] <L,2
[1][3][1][1] <RPTID1>
[1][3][1][2] <L,p
[1][3][1][2][1] <V1>
. .
. .
[1][3][1][2][p] <Vp>
>
>
. .
. .
[1][3][n] <L,2
[1][3][n][1] <RPTID1>
[1][3][n][2] <L,r
[1][3][n][2][1] <V1>
. .
. .
[1][3][n][2][r] <Vr>
>
>
>
>
Exceptions:
A zero-length list item [1][3] for the number of reports means there are no reports linked
to the given CEID and a 'null' report is assumed.
S6F12 Event Report Acknowledge (ERA) S,H->E
Description:
Acknowledge or error.
Structure:
[1] <ACKC6>
S6F13 Annotated Event Report Send (AERS) M,H<-E,reply
Description:
This message is the same as S6F11 with the exception that VID's are sent with the data.
If S6F13 is Multi-block, it must be preceded by the S6F5 /S6F6 Inquire/Grant transaction.
Structure:
[1] <L,3
[1][1] <DATAID>
[1][2] <CEID>
[1][3] <L,n
[1][3][1] <L,2
[1][3][1][1] <RPTID1>
[1][3][1][2] <L,p
[1][3][1][2][1] <L,2
[1][3][1][2][1][1] <VID1>
[1][3][1][2][1][2] <V1>
>
. .
. .
[1][3][1][2][p] <L,2
[1][3][1][2][p][1] <VIDp>
[1][3][1][2][p][2] <Vp>
>
>
>
. .
. .
[1][3][n] <L,2
[1][3][n][1] <RPTIDn>
[1][3][n][2] <L,q
[1][3][n][2][1] <L,2
[1][3][n][2][1][1] <VID1>
[1][3][n][2][1][2] <V1>
>
. .
. .
[1][3][n][2][q] <L,2
[1][3][n][2][q][1] <VIDq>
[1][3][n][2][q][2] <Vq>
>
>
>
>
>
Exceptions:
A zero-length list item [1][3] for the number of reports means there are no reports linked
to the given CEID and a 'null' report is assumed.
S6F14 Annoted Event Report Acknowledge (AERA) S,H->E
Description
Acknowledge or error.
Structure:
[1] <ACKC6>
S6F15 Event Report Request (ERR) S,H->E,reply
Description:
The purpose of this messge is for the host to demand the report group from the equipment linked to event CEID
Structure:
[1] <CEID>
S6F16 Event Report Data M,H<-E
Description:
Equipment sends reports linked to given CEID to host.
Structure:
Identical to structure of S6F11.
S6F17 Annoted Event Report Request (AERR) S,H->E,reply
Description:
Same as S6F15 , but requests annotated reports.
Structure:
[1] <CEID>
S6F18 Annoted Event Report Data (AERD) M,H<-E
Description:
Equipment sends annotated reports linked to given CEID.
Structure:
Same as S6F13.
S6F19 Individual Report Request (IRR) S,H->E,reply
Description:
The purpose of this message is for the host to request a defined report
from the equipment.
Structure:
[1] <RPTID>
S6F20 Individual Report Data (IRD) M,H<-E
Description:
Equipment sends variable data defined for the given RPTID to the host.
Structure:
[1] <L,n # of variable data items
[1][1] <V1>
. .
. .
[1][n] <Vn>
>
Exceptions:
A zero-length list item [1] means RPTID is not defined.
S6F21 Annoted Individual Report Request (AIRR) S,H->E,reply
Description:
The purpose of this message is for the host to request an annotated defined
report from the equipment.
Structure:
<RPTID>
S6F22 Annoted Individual Report Data (AIRD) M,H<-E
Description:
Equipment sends annotated variable data defined for the given RPTID to the host.
Structure:
[1] <L,n // number of variable data items
[1][1] <L,2
[1][1][1] <VID1>
[1][1][2] <V1>
>
.
.
[1][n] <L,2
[1][n][1] <VIDn>
[1][n][2] <Vn>
>
>
Exceptions:
A zero-length for list item [1], n=0, means RPTID is not defined.
S6F23 Request Spooled Data (RSD) S,H->E,reply
Description:
The purpose of this message is for the host to request transmission or deletion of the messages currently spooled by the
equipment.
Structure:
[1] <RSDC>
S6F24 Request Spooled Data Acknowledgement Send (RSDAS) S,H<-E
Description:
The purpose of this message is to acknowledge the receipt of the Request Spooled Data (S6F23) and to respond with an
appropriate acknowledge code.
Structure:
[1] <RSDA>
Stream 7 Process Program Management
The functions in this stream are used to manage and transfer process programs. Process programs are the equipment-
specific descriptions that determine the procedure to be conducted on the material by a single piece of equipment.
Methods are provided to transfer programs as well as establish the link between the process program and the material to
be processed with that program.
NOTE -- The equipment-to-host transfer of the process program, denoted by the R bit in the header (R=1), provides the
mechanism for the host computer to receive process programs created on the equipment. This allows use of the
equipment without having process program generation capabilities on the host.
NOTE -- M/PM defines the Material/Process Matrix. The Material/Process Matrix is a table which links the material to the
process program to be used in processing the material.
NOTE -- The matrix structure allows the program linkages to be extablished for each MID or the multi-MID production
plans for an extended period of time. The host system makes the choice of operating mode. By continuous updates to the
equipment matrix, automatic system backup is achieved.
S7F0 Abort Transaction (S7F0) S,H<->E
Description:
Same form as S1F0
S7F1 Process Program Load Inquire S,H<->E,reply
Description:
This message is used to initiate the transfer of a process program or to select from stored programs. The message may
be used to initiate the transfer of an unformatted process program (S7F3/S7F4) or a formatted process program
(S7F23/S7F24).
Structure:
[1] <L,2
[1][1] <PPID>
[1][2] <LENGTH>
>
S7F2 Process Program Load Grant (PPG) S,H<->E
Description:
This message gives permission for the process program to be loaded.
Structure:
[1] <PPGNT>
S7F3 Process Program Send (PPS) M,H<->E,reply
Description:
The program is sent. If S7F3 is multi-block, it must be preceded by the S7F1/S7F2 Inquire/Grant transaction.
Structure:
[1] <L,2
[1][1] <PPID>
[1][2] <PPBODY>
>
S7F4 Process Program Acknowledge (PPA) S,H<->E
Description:
Acknowledge or error.
Structure:
[1] <ACKC7>
S7F5 Process Program Request S,H<->E,reply
Description:
This message is used to request the transfer of a process program.
Structure:
[1] <PPID>
S7F6 Process Program Data (PPD) M,H<->E