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Quick manual to โFIB2CAMโ Interpretation and interpolation of G-code for stream file generation for FIB/SEM instruments Version 0.1 Frank Niessen E-mail: contact@fniessen.com 03/2019 1 CAM2FIB CAM2FIB is a program for interpretation and interpolation of G-code to create stream files for FIB/SEM instruments. The currently implemented output format is designed for use with an FEI Helios NanoLab G3 instrument, but may easily be adapted to other instruments. This code accepts most G-code files as an input and was tested with the G-code dialects RS274D, WinCNC and FreeCAD. In its current implementation the overall patterning time is equally distributed over all patterning points. Machining or printing of 3D-structures is therefore currently limited to layered structures. This manual gives an introduction to the application of the program. For further input on the build-up and functionality of the program please read the associated research paper. This program is provided free-of-charge with an MIT-license. If you find this program useful and you find application for it in your research I would be grateful for a citation to the associated paper: 2 SYSTEM REQUIREMENTS The program was developed in MATLAB and requires a valid MATLAB installation for execution. The functionality of the program was tested for MATLAB 2016 b and later versions. The installation of the MATLAB statistics toolbox is not essential to the functionality of the program, but is required to plot density maps for evaluating the interpolation of the beam path. 3 EXECUTING CAM2FIB.M All folders and functions need to be added to the MATLAB path before executing the program. The program is executing by running file CAM2FIB.m. The default folder for input files is Input_Gfiles in the main directory. Stream files and plots are saved in the folder Output_StreamFiles in subfolders named after the input G-code file. 4 PARAMETER SETTINGS The section %% Initialization in CAM2FIB.m contains parameters that can be adapted for different applications of the program. The parameters, their purpose and potential default values are listed in the following table. Name Purpose Description Datatype Default value f.unitLabel Output length unit File settings Length unit of the machined structure Allowed values String nm f.overlap Relative overlap 0 Relative overlap of beam ๐ต๐ต๐ต๐ต๐ต๐ต๐๐๐๐๐๐๐๐๐๐โ path (1 โ )% Double m, mm, ยตm, nm, ร -inf โ 100 Minimal segment length for beam blanking Double 0 โ inf 70 ๐ต๐ต๐ต๐ต๐ต๐ต๐ต๐ต๐๐๐๐๐๐๐๐โ f.dcrit Min. G0 distance 1 f.binFac Interpolation fac. Out.scrPrint Flag Screen Print Out.plot Out.scatter Flag Plotting Flag Scatter Plot Out.plotCnt Plot Count str.DAC DAC type str.nrIter Nr. Of iterations str.tMach Pattern machining times [s] str.fType Outp. File extension PIA.rot Pattern rotation [ยฐ] PIA.flip Mirroring operation PIA.scalFac PIA.cal Linear scaling factor DAC calibration PIA.max DAC resolution PIA.offs Offset pattern [bit] Offset of pattern in X and Y PIA.relScale Rel. pattern scale PIA.centrePa ttern PIA.availMag s Flag Centre pattern Relative scale of pattern on DAC system [1] (Used to determine the magnification) Centre pattern on DAC grid Mag. Selection Interpolation of entire beam path binning factor: <1: No interpolation >=1: Interpolation with indicated binning factor Visual output options Screen output of G-code interpreter [on/off] Plotting of maps [on/off] Scatter instead of Line plot of beam path [on/off] Number of plot updates during G-code interpretation Stream file output settings Type of DAC (currently only tested with type โs16โ) Number of pattern iterations Array of overall pattern machining times [s] (Keep empty for no file output) File extension of stream file Scaling parameters Clockwise pattern rotation [ยฐ] Mirroring on horizontal and vertical axes [on/off] Linear scaling of pattern DAC calibration factor ๐ต๐ต๐๐๐๐๐๐ ( ) ๐๐๐๐๐๐๐๐๐๐โ๐๐๐๐๐๐ DAC resolution in X and Y List of allowed standard magnifications 2 Double 0 โ inf 1 Boolean 0, 1 0 Boolean Boolean 0, 1 0, 1 1 1 Double 1 โ inf 100 String s16 s16 Integer 1-? 1 Double array 1-? 60 String / str Double / 0 Boolean array Double Double 0, 1 [0 0] 0< x < inf 0< x < inf 1 .3161e6 Integer array Integer array Double 0< x < inf / [65536 56576] [0 0] 0< x <= 1 .5 Boolean 0, 1 1 Double array 0< x < inf [.1e3 .5e3 1e3 2e3 5e3 10e3 20e3 30e3 40e3 50e3 60e3] 5 PLOTS While G-code with multiple z-layers can be interpreted and interpolated, the graphical output of the program is optimized towards processing of single layer beam paths. In the case of multi-layer input maps may overwrite lower z-layers, leading to a false representation. Plots are saved as tiff files alognside with the stream files in a subfolder with the name of the input G-code file, which can be found in the folder Output_StreamFiles in the parent directory. 5.1 LIVE PLOT The plot LivePlot shows the progress of G-code interpolation with an update rate specified by variable Out.plotCnt. The plot shows the beam path before application of any transformations. 5.2 MACHINING STRATEGY The contour plot MachiningStrategy shows the beam path after application of any transformation. The colour coding indicates the order of patterned points. White broken lines indicate repositioning of the blanked beam. 5.3 DENSITY MAPS BEFORE AND AFTER INTERPOLATION Density maps are 3D histograms that show the density of patterning points at different positions of the pattern. The overall pattern area is divided into equisized bins and the number of points in each bin is represented on a color scale. The plot intends to highlight areas of especially high and low point density. The map is plotted before and after interpolation of the entire beam path to visualize the effect of the interpolation operation. 5.4 SCALED AND TRANSFORMED PATTERN The plot ScaledAndTransformedPattern shows the beam path after application of all transformations and scaling to the DAC coordinate system. 6 STREAM FILES The stream files are written into a subfolder with the name of the input G-code file, which can be found in the folder Output_StreamFiles in the parent directory. The stream file can be directly transfered to the microscope computer and opened from the patterning control panel. 7 TROUBLE SHOOTING If any unforeseen problems occur with the program please contact me via contact@fniessen.com. 3
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