Tcu40 80
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W959-000-01 Revision F October, 96 Instruction Manual TCU 40/80 Single Channel Temperature Control Unit View our inventory EDWARDS Edwards High Vacuum International One Edwards Park 301 Ballardvale Street Wilmington, MA 01887 Telephone: (508) 658-5410 Telex: 710-347-7672 Fax: (508)658-7969 Declaration of Conformity We, Edwards High Vacuum International, One Edwards Park 301 Ballardvale St. Wilmington, MA 01887 declare under our sole responsibility that the product(s) TCU 40/80 Temperature Control Unit W95000000 to which this declaration relates is in confonnity with the following standard(s) or other normative document(s) BSIEC1010-1 Safety Requirements for Electrical Equipment for Measurement, Control and Laboratory Use. BS EN50O81-1 Electromagnetic Compatibility, General Emission Standard. BSEN50082-1 Generic Standard Class: Domestic, Commercial & Light Industry. Electromagnetic Compatibility, General Immunity Standard. Generic Standard Class: Domestic, Commercial & Light Industry following the provisions of 89/392/EEC Machinery Safety Directive 89/336/EEC Electromagnetic Compatibility Directive 73/023/EEC Low Voltage Directive Dr. A. P. Troup, Director of Technology 0 Date and Place This product has been manufactured under a quality system registered to ISO900I EDWARDS CONTENTS Section Title 1 PREFACE 1.1 2 Safety considerations TCU 40/80 Page 1 1 3 2.1 Scope of the manual 2.2 Description of the TCU 40/80 3 2.3 Lockout procedure 3 2.4 Safety features 4 3 QUICK START PROCEDURE 3 5 3.1 Power up 5 3.2 Sctpoint verification 5 PRODUCT DESCRIPTION 6 4 4.1 Refrigeration and coolant circuits 6 4.2 Refrigeration 9 4.2.1 If cooling is required: 4.2.2 If cooling is not required: 9 10 4.3 Coolant circuit 10 4.4 4.5 Temperature monitoring Front panel 10 1 ] 4.6 Rear panel 13 4.7 4.8 Specifications Dimensions 14 15 5 INSTALLATION 5.1 Receiving and unpacking 5.2 Location 5.2.1 5.2.2 5.2.3 5.3 5.3.1 5.4 ]6 16 16 Securing the unit 16 Installing the secondary containment receptacle 16 Floor levclers Stacking Tie-bolts Facilities 16 17 17 17 5.4.1 Water and coolant connections 18 5.4.2 Water 19 5.4.3 5.4.4 Coolant Remote connections 19 19 6 6.1 OPERATION Preparation 20 20 6.2 6.3 6.4 6.5 Powering up the TCU 40/80 Changing the setpoint value (SV1) Temperature controller Pid settings Remote set-point 20 21 21 22 6.6 Flow rate adjustment 22 /?^v TCU 40/80 Temperature Control Unit 7 MAINTENANCE 23 7.1 7.2 Hazard warnings Hazards 23 25 7.3 Filling the reservoir 26 7.4 Draining/bleeding the coolant reservoir 26 7.5 Temperature probe calibration 27 7.6 Preventive maintenance schedule 27 7.7 7.7.1 Semi-annual preventative maintenance Required equipment 28 28 7.7.2 Preparation 28 7.7.3 Verify system status 28 7.7.4 Refrigeration leak check 28 7.7.5 Fluorinert leak check 28 7.7.6 Water leak check 28 7.7.7 Insulation repair 28 7.7.8 Lamp check/replacement 29 7.8 Annual preventative maintenance 30 7.8.1 Required equipment 30 7.8.2 Required supplies 30 7.8.3 Solenoid valve coil replacement 30 7.8.4 System check 32 7.9 Preventive maintenance checklist 41 8 TROUBLESHOOTING 42 9 ACCESSORIES AND SPARE PARTS 52 APPENDIX Return of Edwards Equipment - Procedure Return of Edwards Equipment- Declaration 54 (Form HS1) 58 (FormHS2) 59 Legal notices, limitations and disclaimers 60 MSDS (material safety data sheet)- "SUVA" HP62 61 '-""5\ TCU 40/80 Temperature Control Unit ILLUSTRATIONS Figure Title Figure 1- Refrigeration and coolant components Page 6 Figure 2 - Refrigeration and coolant components 7 Figure 3- Refrigeration and coolant circuits 9 Figure 4 - Front panel 11 Figure 5 - Electrical rear panel 13 Figure 6 - TCU dimensions 15 Figure 7- Stacked TCU 40/80 systems 17 Figure 8-System rear view 18 Figure 9 Water connections Figure 10 - Temperature controller J9 21 Figure 11 - Lamp replacement 29 Figure 12 - Solenoid coil replacement 31 Figure 13 -Electrical drawer Figure 14-Electrical drawer schematic 51 54 Figure 15 - Remote interface 56 Table Title Table 1 - Safety features Table2 -Frontpanel Indicators Page 4 5 Table 3 - Refrigeration and coolant components Table 4 - Front panel controls 8 11 Table Table Table Table Table Table Table 5 - Front panel LED indicators 6 - Temperature controller 12 12 7 - Description of rear panel components and indicators 8 - Front panel power up indicator conditions 9 - Electrical hazards classifications 10 - Preventive maintenance schedule 11- Faults identified by front panel lamps 13 20 25 27 42 Table 12 - Faults indicated by the front panel LED indicators 44 Table 13 -Faults identified by rear panel indicators Table 14 - Miscellaneous fault conditions 48 49 Table 15 -Accessories 52 Table 16 Spare parts 53 TCU 40/80 Temperature Control Unit Hi TRANSLATIONS The TCU 40/80 Instruction Manual is available in the following translations: Language Edwards part number English W95900001 French W95900004 German W95900005 Italian W95900006 Japanese W95900007 For each TCU 40/80 purchased, you are entitled to one translated manual free of charge. This is in addition to the English version provided. Fax this completed form to the nearest Edwards location to receive your complimentary translation. Name: Title: Company: Address: TCU serial number: Language: (circle one) French German Italian Japanese TCU 40/80 Temperature Control Unit 1 PREFACE 1.1 Safety considerations Many safety features have been designed into the TCU 40/80 to protect the operator and the equipment. The following symbols are used in this manual to indicate the various safety conditions. General Alert General Alert symbol denotes the potential of personal hazards or equipment failure. Warnings are given when failure to observe the instruction could result in injury or death to persons. Cautions are given where failure to observe the instruction could result in damage to the equipment, associated equipment and process. Statement on avoiding the hazard. Electric Shock Electric Shock symbol denotes the presence of high voltage or current. It calls attention to the procedure, practice, or the like, which if not done correctly or adhered to could result in injury or death. Statement on avoiding the hazard. Eye Protection Eye Protection symbol denotes a hazard which could cause injury or irritation to the eyes. Statement on avoiding the hazard. Toxic Gases Toxic Gases symbol denotes a personal hazard. It calls attention to the procedure, practice, or the like, which if not done correctly or adhered to could result in injury or death. Statement on avoiding the hazard. TCU 40/80 Temperature Control Unit Hot Surfaces Hot Surfaces symbol denotes a hazard which could cause injury or burns. Statement on avoiding the hazard. Hand Protection Hand Protection symbol denotes a hazard which could cause injury or burns Statement on avoiding the hazard. High Pressure High Pressure symbol denotes a personal hazard or equipment failure. It calls attention to the procedure, practice, or the like, which if not done correctly or adhered to could result in equipment damage, injury or death. Statement on avoiding the hazard. Extreme Temperature Extreme Temperature symbol denotes a hazard which could cause injury or burns. Statement on avoiding the hazard. ^ TCU 40/80 Temperature Control Unit 2 TCU 40/80 2.1 Scope of the manual This manual provides information on the installation, start-up and operation of Edwards High Vacuum Model 40/80 Temperature Control Unit (TCU 40/80). The Quick Start Procedure on page 5 is a step by step guide for the start up and use of an installed, working system. Installation, starting on page 16, provides instructions and information for installing the system. The installer must have sufficient technical understanding of electrical and mechanical systems to properly use this information. Operation, starting on page 20, provides more complete instructions on the preparation and use of the system. 2.2 Description of the TCU 40/80 The TCU 40/80 is a single-channel temperature control unit engineered for temperature control of remote heat loads. From distances up to SO feet, the TCU 40/80 can cool the heat load generated by the process equipment. The coolant circulates through the TCU 40/80, where it is cooled or heated as required, then is transferred to the process equipment, and returns in a closed loop. The TCU 40/80 maintains supply coolant at a temperature between -40 °C and +80 °C, selectable in 0.1 °C increments, with a tolerance of ±1.0 °C. 2.3 Lockout procedure To prevent accidental or unauthorized starting of the TCU 40/80 during maintenance, disconnect the power cord from the receptacle and install an appropriate lock-out device (Hubbell Small Plugout™ or equivalent) on the end of the power cord. 0 TCU 40/80 Temperature Control Unit 2.4 Safety features The safety features listed in Table 1 are designed into the TCU 40/80. Table I - Safety features Component Ref. des.* EMERGENCY OFF (PB1) Function Shuts off power to major system components. button (EMO) Remote EMERGENCY (J72J2) Remote shut off of power to major system components. OFF Drawer safety switch (LSD Upon opening the drawer, shuts off power to major system components. Pressure switch (PS1) Protects the refrigeration system against high discharge pressure. Interrupts operation at 300 psig. Condenser pressure relief (W2) Vents refrigerant to the atmosphere above 350 psig. Fail safe for PS1, works even if there is no power applied to the valve system. Reservoir pressure relief (Wl) Protects the reservoir from over-pressure. Temperature switch (TS1) Protects the process fluid from exceeding 99 °C Coolant flow switch (FS1) Protects the process equipment from inadequate coolant valve flow rates. Coolant float switch (LLS1) Protects against low level in the coolant reservoir by stopping the equipment. Coolant float switch (LLS3) Protects against overfill of the coolant reservoir. Indication on front and rear panels. Thermal overload (K3) Surge suppression VR1-4 Protects the pump motor from excess current. Protects the TCU 40/80 against voltage surges and power line transients. Line phase monitor PMR1 Protects the equipment against incorrect wiring of the supply phases and low voltage burn-out. Current sensor Secondary containment CSR1 Protects the compressor against abnormal conditions. Captures fluids (internal to the TCU) in the event of a leak. • See Figure 3 on page 9. TCU 40/80 Temperature Control Unit 3 QUICK START Table 2 - Front panel Indicators PROCEDURE Indicator Reset Start Condition Condition POWER ON Green Green RESET White White FACILITY POWER Green Green FACILITY WATER Green Green CIRCUIT Green Green Off Green Green Green Off Green Green Green OfT Off Green Green (if used) (if used) This Quick Start procedure is for easy start up and operation of an installed and fully working TCU 40/80. If your TCU 40/80 is not installed, go to Installation on page 16. Detailed operating instructions are in Operation on page 20. If at any time an alarm occurs, press STOP and correct the fault indicated by the display as directed in the Troubleshooting Guide on page 42. Press RESET and START to continue operation. 3.1 Power up Before applying power, verify that all water BREAKERS COMPRESSOR TEMPERATURE and coolant lines are connected to the system. The handles on both coolant line FLOW valves should be in the open position. For the location of these connections, refer to NORMAL LEVEL Figure 8 on page 18. To power up the TCU 40/80: 1. READY light should be on. If the ready light is not on see Powering Up the TCU 40/80 on page 20. 2. LOW LEVEL REMOTE RTD (optional) Press RESET. Verify that front panel indicators are as shown in the Reset column of Table 2 on this page. 3. Press START. Verify that front panel indicators are as shown in the Start Condition column of Table 2 on this page. If in steps two or three any front panel indicators do not match Table 2, refer to the 3.2 Setpoint verification Verify that the manual mode setpoint value (SV1) displayed on the temperature control is the value desired. To change the Setpoint value see Changing the Setpoint Value (SVl)onpage21. Troubleshooting Guide on page 42 for Do not to exceed the normal operating corrective action. parameters. The system is designed to 4. operate from -40 °C to +80 °C. Verify that the coolant pressure gauge (located on the front access panel) reads less than 100 psig. TCU 40/80 Temperature Control Unit 4 PRODUCT DESCRIPTION 4.1 Refrigeration and coolant circuits Figure 1, Figure 2, and Table 3 on page 8 describe the refrigeration and coolant components of the TCU 40/80. Figure 1- Refrigeration and coolant components TCU40/80 Temperature Control Unit Figure 2 - Refrigeration and coolant components TCU 40/80 Temperature Control Unit /^\ Table 3 - Refrigeration and coolant components Item Component name Function I Reservoir A holding tank for the Fluorinert coolant. 2 Level switch Monitors the coolant level in the reservoir. 3 Compressor Compresses the refrigerant fluid. 4 Crankcase regulator Protects the compressor against pressure overload. 5 Suction service valve Allows isolation at the compressor. 6 Discharge service valve Allows isolation at the compressor. 7 Temperature switch High limit switch for reservoir heater. 8 Pressure switch Limits maximum allowable discharge pressure. 9 Condenser Transfers heat from the compressed refrigerant to the facility water. 10 Filter dryer Removes contaminants and moisture from the refrigerant. 11 Safety cooling valve Limits the discharge temperature. 12 Motor Drives the coolant pump. 13 Pump Circulates the Fluorinert coolant. 14 Bypass valve Regulates coolant flow. 15 Hot gas bypass valve Regulates cooling capacity. 16 Subcooler Further cools the refrigerant that is returning to the compressor. 17 Solenoid valve SV2 Allows refrigerant to pass through the hot gas bypass valve, then to the compressor suction line when energized. 18 Solenoid valve SV1 Allows refrigerant to pass to the TEV when energized. 19 Sight glass Allows visual inspection of the refrigerant charge and presence of moisture in the system. 20 TEV (Thermostatic Allows the refrigerant to expand from a liquid to a gas. expansion valve) 21 Heater Raises the temperature of the coolant when the process requires heating. 22 Flow switch Monitors the flow rate. 23 Heat exchanger Extracts heat from the coolant and transfers it to the refrigerant. 24 Pressure relief valve Discharges refrigerant from the system to the atmosphere in the event of severe over-pressure condition. TCU 40/80 Temperature Control Unit / Bypass vaSn Profisure Gwlttfc Oran valve I RID temperature probe Figure 3- Refrigeration and coolant circuits 4.2 Refrigeration (see figure 3 above) 1. Refrigerant gas enters the compressor at low temperature and pressure. It leaves the compressor at high pressure and temperature. 2. The gas passes into the condenser, where heat is removed by the external water supply, causing the gas to condense into a liquid. 3. The cool liquid refrigerant exits the condenser and passes through a filter dryer that removes any residual moisture or contaminants. 4.2.1 If cooling is required: 1. Solenoid valve SV1 opens (coil energized), allowing the refrigerant to flow into the Thermostatic Expansion Valve (TEV). The pressure drop across the TEV causes the refrigerant to change from a liquid to a mixture of liquid and gas. 2. The liquid and gas mixture enters the heat exchanger where it becomes entirely a gas. The process of expansion from a liquid to a gas reduces the temperature by absorbing energy. 3. The refrigerant leaving the heat exchanger returns to the compressor through the subcooler and a crankcase pressure regulator. The subcoolcr further cools the refrigerant entering the TEV. TCU 40/80 Temperature Control Unit 4.2.2 If cooling is not required: 1. 2. Solenoid valve SVl closes (coil de-energized). Hot refrigerant from the compressor is passed through SV2 (coil energized) and a hot gas bypass valve before returning to the compressor suction line. This bypassing allows the compressor to run continuously. 3. Cooling, required to prevent the compressor from overheating, is provided by allowing some of the liquid from the condenser to pass through the safety cooling automatic expansion valve into the suction line, thus maintaining the discharge gas temperature below 99 °C. 4.3 Coolant circuit Coolant is pulled from the reservoir by the circulation pump and transferred to the heat exchanger where it is cooled by the refrigeration system as required. It then flows to the process equipment by means of the coolant supply hose. The coolant returns to the TCU 40/80 reservoir by means of the coolant return hose. The coolant system requires 8 liters of coolant for the reservoir, plus the volume of the circulation lines and any other spaces filled with coolant that are attached to the TCU 40/80. To increase the coolant temperature, the reservoir uses an electrical resistance heater that is controlled by the temperature controller. The heater must be fully submerged at all times, and if the coolant in the reservoir falls below 3.S liters, a level switch causes the status alarm signal to automatically shut down the TCU 40/80. A three-float level switch, a thermostat, and a flow sensor provide coolant status signals to the TCU 40/80 control system. 4.4 Temperature monitoring A Resistance Temperature Device (RTD) monitors the temperature of the coolant leaving the TCU 40/80 and transmits this information to the temperature controller. The TCU 40/80 compares the output of the RTD to the selected process temperature (SVl) and determines if the coolant needs to be cooled or heated. The temperature controller then operates the main cooling solenoid valve or heater. The coolant temperature at the supply port on the rear panel is measured by a local, internally connected RTD. If sensing of process equipment temperature is needed, connect an RTD to J72J3 at the rear panel (see Figure 5 on page 13). For remote connection schematic details, see Figure IS on page 56. ^WIITV 10 TCU 40/80 Temperature Control Unit 4.5 Front panel Figure 4 shows the Front Panel. Table 4, Table 5 and Table 6 identify its controls and indicators. > mat mu |M O < ? 5 0 aw-" Figure 4 - Front panel Table 4 - Front panel controls Description Control name POWER ON Lights green when power is being supplied to the TCU 40/80. RESET Resets alarms and makes the TCU 40/80 ready to operate. The white light indicates that the TCU 40/80 is ready to operate. EMERGENCY OFF Removes power from all TCU 40/80 circuits except the EMERGENCY OFF circuit. To shut off power, push EMERGENCY OFF (EMO). To reset, rotate the EMERGENCY OFF button clockwise as shown on the switch. START/STOP ALARM Starts and stops the operation of the TCU 40/80. Emits a high pitched sound when there is a fault condition which has caused the TCU 40/80 to stop operation. MUTE Silences the audible alarm. TCU 40/80 Temperature Control Unit II Table 5 - Front panel LED indicators LED name FACILITY POWER Condition Description Green Power phases are normal. Red FACILITY WATER Power phases are reversed or low line voltage. Green Water pressure and flow are normal. Red Water pressure or flow are not adequate. (See Specifications on page 14. CIRCUIT BREAKERS COMPRESSOR COOLANT TEMPERATURE COOLANT FLOW Green Rear panel circuit breakers 2, 3, and 4 are on. Red One or more of these breakers is tripped or off. Green Compressor is operating normally. Red Compressor has stopped operating. Green Coolant reservoir temperature is normal. Red Coolant temperature is above the operating range. Green Coolant flow is normal. Coolant flow is not adequate. Red COOLANT NORMAL LEVEL COOLANT LOW LEVEL Green Coolant level is normal. Amber Coolant level is over filled. Off Coolant level is normal Amber REMOTE RTD Coolant level is low. Red Coolant level is very low. Off Remote RTD not connected. Remote RTD temperature probe is in use. Green Table 6 - Temperature controller Description Controls and indicators Process Value (PV) The present temperature of the coolant, as indicated by the internal RTD or the remote RTD. Setpoint Value (SP) The TCU 40/80 regulates to this temperature, as set by the operator. Pushbuttons Used to program the controller. Remote Mode LED (Aux) Indicates mode of operation: Off indicates local operation. On indicates remote operation. 12 TCU 40/80 Temperature Control Unit 4.6 Rear panel Figure 5 shows the rear panel. Table 7 identifies the controls and indicators on the rear panel. cocuurr iml D G t pn Fj n pi n p! = H t90/t0* VAC » *M •0/W Hi *0A Figure 5 - Electrical rear panel Table 7 ■■ Description of rear panel components and indicators Label J72J3 Description Five pin connector for remote RTD interface. See Figure 15 on page 56 for pinouts. CB7 24 VAC 1 -pole, 2 Amp circuit breaker. Isolates the 24 VAC transformer. Normally on (in). CB8 24 VDC l-pole, 2 Amp circuit breaker. Isolates the 24 VDC power supply output. Normally on (in). J72J2 Nine pin connector for remote EMERGENCY OFF, start-stop operation, and remote setpoint operation enable. See Figure 15 on page 56 for pinouts. CB4 reservoir heater 3-pole, 10 Amp circuit breaker. Normally on (up). CB3 circulation pump 3-pole, 6 Amp circuit breaker. Normally on (up). CB2 compressor 3-pole, 16 Amp circuit breaker. Normally on (up). CB1 main power 3-pole, 25 Amp circuit breaker. Normally on (up). normal/overfill Normal, LED Green Overfilled, LED Amber low/fault Low, LED Amber Fault, LED Red 200/208 VAC 3 PH Mains input power connector. 50/60 Hz 30A CB5-XFMR CB6-PSU J72J1 2-pole, 0.5 Amp circuit breaker. Isolates the equipment transformer. 2-poIe, 0.3 Amp circuit breaker. Isolates the power supply. 37 pin D-subminiature connector, for setpoint value signal, process value signal, and remote fail and warning signals. See Figure 15 on page 56 for pinouts. TCU 40/80 Temperature Control Unit 13 4.7 Specifications Parameter Conditions Temperature ramp Coolant short circuit conditions Cooling capacity @ Specification +25°Cto+80°C Elapsed time: <25 minutes +25°Cto-30°C Elapsed time: <20 minutes Process coolant @ -40 °C 350 watts Process coolant @-20 °C to +80 "C, 2000 watts process equipment ISO watt coolant line losses; coolant water @ 15 °C 2800 watts Heating element System flow @20 °C, 60 psig Process temperature 3 gpm (11.36 lpm) -40°Cto+80°C range Setpoint resolution ±0.1 °C Temperature regulation ± 1.0 °C typical Facility water requirements Power requirements +10oC(-0°+2°)to 3 to 6 gpm +26 "C (+0° -2°) (11.36 to 22.71 lpm) 3-phase delta (balanced load), 4 wire 30 amp outlet (3 phases & earth gnd), 200 to 208 VAC, 50/60 Hz + 10°Cto+50°C Ambient operating temperature Weight 450 pounds (204 kg) Dimensions 22" wide x 30" deep x 35" high (56 cm x 76 cm x 89 cm) Up to 2000 meters Altitude (6562 ft.) Up to 31 "C 80% Above31°C Derate linearly to 50% @ 50 °C, Transient overvoltage IEC 664, Installation Category II 2.5 kV Pollution Degree IEC 664 211 Sound pressure level At a distance of 1 meter. 65dB(A) Max. relative humidity 14 TCU 40/80 Temperature Control Unit 4.8 Dimensions TCU 40/80 TCU 40/80 inches (millimeters) Figure 6 - TCU dimensions TCU 40/80 Temperature Control Unit 15 5 INSTALLATION 5.1 Receiving and unpacking Do a complete visual inspection of the TCU 40/80 for any damage. Do not use the TCU 40/80 if physical damage is evident. If there is any damage, notify your supplier and the carrier in writing within three days; state the item number of the TCU 40/80 together with your order number and supplier's invoice number. Retain all packing materials for inspection. Caution When using a forklift to move or position the TCU 40/80, do not install the secondary containment receptacle until the TCU 40/80 is in position. Failure to follow these instructions may lead to damage of the secondary containment receptacle caused by the forks of the forklift. 5.2 Location Allow a space 46" wide x 54" deep for the TCU 40/80 cable and coolant connections. The TCU 40/80 should have at least two feet of clearance at the rear and one foot along the sides of the unit. Be sure that the mounting surface can safely support the weight of the TCU 40/80 (450 pounds evenly distributed). The center of gravity is approximately the center of the refrigeration compartment. When using a fork-lift to move the TCU 40/80, position the forks from the side of the unit. The TCU 40/80 weighs 450 pounds (204 kg). Failure to take proper care in moving or lifting these units can result in serious bodily injury. A 3 foot (1m) service length of the power cable is required to fully open the electrical drawer. Therefore, do not install the TCU 40/80 further than 7 feet (2.1 m) from the power source. 5.2.1 Securing the unit The four lockable casters of the TCU 40/80 swivel to provide maximum maneuverability. Make sure that all four casters are turned inward and locked in position once Ihe TCU 40/80 is situated. 5.2.2 Installing the secondary containment receptacle The secondary containment receptacle slides into the base from the rear of the unit. 5.2.3 Floor levelers An optional floor leveler kit is available to compensate for uneven surfaces. See Table 15 on page 52 for ordering information. 16 TCU 40/80 Temperature Control Unit 5.3 Stacking The TCU 40/80 may be stacked two high. Be sure that the mounting surface can safely support the weight of the two units (900 pounds, 408 kg). Be sure that the casters of the top unit are turned inwards, but are not locked, until the top unit is fully seated. 5.3.1 Tie-bolts An optional tie-bolt kit is available for attaching stacked units. See Table 15 on page 52 for ordering information. TCU 40/80 inches (millimeters) Figure 7- Stacked TCU 40/80 systems 5.4 Facilities The TCU 40/80 requires a water supply flow rate between 3 to 6 gallons per minute at a maximum pressure of 100 psig, and an inlet temperature range of 10 °C to 26 °C Power input is by a fused, suitable isolating electrical outlet, 208 VAC, 50/60 Hz, 30 amp, 3-phase delta (balanced load), 3-wire and earth. The required receptacle type is Hubbell P/N L21-30R2810-A, or equivalent. TCU 40/80 Temperature Control Unit 17 5.4.1 Water and coolant connections Figure 8 shows a rear view of the TCU 40/80 with its water and coolant connections. inches (millimeters) Figure 8- System rear view j 18 TCU 40/80 Temperature Control Unit 5.4.2 Water Connections to the water supply and return are made to either Vi" brass barb fittings or Vi" compression fittings. For bare hose connections ("A" nominal I.D.): 1. Slip the hose over the barb fitting and tighten the hose clamp. 2. Turn on the water supply and check for leaks. For connections using hose with tube adapters or tubing ('/i" nominal O.D.): 1. Remove the adapter coupled to the hose barb. 2. 3. Tighten the compression nut, turn on the water supply, and check for leaks. Insert the tube adapter or tubing with the appropriate ferrule and compression nut. Rear Acctii Pantl F»rrulo • 1/2' Compr.jslon Nut • 1/2" O.O. Tubing or Hose Tuba Adaptor Supplied Adaptor With Hoie Barb /JWN ♦NOT INCLUDED Figure 9 Water connections 5.4.3 Coolant Note: Ifthis TCU 40/80 is being installed on process equipment that has been used mth a coolant other than Fluorinert. contact process equipment supplierfor retrofit instructions. Connections to the coolant supply and return are made on the rear panel (see Figure 8 on page 18). The maximum distance between the process equipment and the TCU 40/80 is 50 feet (100 feet total hose length). 1. Attach the hoses to the supply and return compression fittings. Follow the hose manufacturers recommendations for appropriate adapters. 5.4.4 2. Insulate the hoses with closed cell insulation in order to minimize heat loss. 3. Tape and glue the insulated joints to avoid condensation and icing. Remote connections Wiring details for remote connections are shown in Figure 15 on page 56. Remote connections should not be run near or parallel to a.c. power lines or in the vicinity of equipment that generates large electric fields. TCU 40/80 Temperature Control Unit 19 6 OPERATION 6.1 Preparation Verify that water and coolant connections are made at both ends, that the drain valve is closed and the coolant supply and return valves are open. Connect the remote interfaces if required. 1. To use an external RTD probe, attach it to connector J72J3. Refer to Figure 15 on page 56. Verify that the plug J72J2 is installed. 2. Press the EMERGENCY OFF button on the front panel. 3. Plug the TCU 40/80 power cord into a fused, switchable, 30 amp, 3-phase, 208 VAC outlet. 4. Ensure that all circuit breakers on the rear panel are in the ON position. CB7 and CB8 are nonswitchable circuit breakers and will trip when there is a problem. They cannot be turned on or off, but they are re-settablc. 6.2 Powering up the TCU 40/80 1. Verify that the POWER ON lamp on the front panel is illuminated. 2. Release the EMERGENCY OFF button. If the Facility Power LED illuminates, the line voltage is low, or the phase of the main power supply is reversed. Adjust the line voltage, if it is low. Correct the phases by swapping two phases in the electrical outlet. 3. Press the RESET button and verify the front panel indicators are as in the Reset Condition column of Table 8. Table 8 - Front panel power up indicator conditions Reset condition Start condition Green Green Off White FACILITY POWER Green Green FACILITY WATER Green Green CIRCUIT BREAKERS Green Green Off Green Green Green FLOW Off Green NORMAL LEVEL Off Green LOW LEVEL Red Off Green Green Indicator POWER ON RESET COMPRESSOR TEMPERATURE REMOTE RTD (if used) 20 TCU 40/80 Temperature Control Unit 4. Press MUTE to silence the alarm. The TCU 40/80 is shipped without coolant. The coolant level alarm will sound and the front panel Reservoir Coolant Low Level LED will be red indicating that the reservoir must be filled. 5. Fill the coolant reservoir using the procedure Filling the Reservoir on page 26. 6. Press the START button and verify the front panel indicators are as in the Start Condition column of Table 8. 7. Use a halogen leak detector to check all supply and return line connections at both the TCU and process equipment, around the pump head assembly, drain valve, heater, flow switch, vent line, fill line, and reservoir pressure relief valve. 6.3 Changing the setpoint value (SV1) The following instructions are for local temperature control only. Do not exceed the temperature range of-40 °C to +80 This is the normal operating range of the TCU 40/80. To change the temperature settings press page up or page down to cither increase or decrease the temperature. The red display "PV" indicates the process value. The green display "SP" indicates the current setpoint. Note: The temperature controller has been programmed to prevent the setpointfrom exceeding the normal operating range of the TCU 40/80. The controller is also protectedfrom unauthorized changes to the Pid and other settings, Contact the process equipment supplierfor access to these settings and other information. 'P EDWARDS 0UT1O OUT tO : mb OUH. F -j -71 -■ HUBI 4 MB Figure 10 - Temperature controller 6.4 Temperature controller Pid settings Edwards default settings are: PID1 - heating value value PID2 - cooling parameter Pbl 8.0 Pb2 12.5 proportional band Arl 0.43 Ar2 0.7 automatic reset rAtl 7.0 rAt2 9.0 rate dbl 1.0 db2 1.0 deadband TCU 40/80 Temperature Control Unit 21 6.5 Remote set-point To use the remote set-point, wire the J72J2 mating connector as illustrated on page 56. 24vac must be applied to pins 3 and 4. The AUX LED on the temperature controller will illuminate indicating remote setpoint enable mode as soon as the mating connector is installed. 6.6 Flow rate adjustment Do not exceed coolant pressure of 100 psi. Caution Exceeding the coolant pressure may result in damage to the pump. The Fluorinert flow rate of the TCU 40/80 is factory set to provide approximately 3 gpm at 60 psig/20°C for a unit operating at 208vac/3-ph/60Hz. If the flow rate requires adjustment to accommodate the process equipment suppliers recommendations, follow the steps below. The flow rate may be measured using a flow meter external to the TCU 40/80. 1. Open the left side access door. 2. Peel back the insulation covering the by-pass valve. Refer to Figure 1 on page 6. 3. The valve handle can be found in the plastic bag secured to the pump. Reduce the flow by turning the valve stem clockwise. To increase the flow, turn the stem counter clockwise. The valve is a 1/4 turn valve. 4. Once the required flow rate has been achieved, return the valve handle to the bag for future use, glue the insulation back in place, and secure the access door. 22 TCU40/80 Temperature Control Unit 7 MAINTENANCE This section contains information that will allow you to safely keep your TCU 40/80 in working order. It contains important Hazard Warnings, a Preventive Maintenance Schedule on page 27, and a Troubleshooting Guide on page 41. Maintenance to the electrical system of the TCU40/80 should be performed by qualified personnel only. Warning The refrigeration units are scaled and are not user serviceable. Only trained and licensed refrigeration personnel should perform repairs on this equipment. All applicable EPA regulations apply. 7.1 Hazard warnings High Pressure Water and the coolant arc pressurized within this equipment. Water pressure will depend upon utility supply, but usually is up to 60 psig. The coolant can be at pressures up to 100 psig. Refrigerant pressures can be up to 300 psig. Do not open lines with pressure present. Toxic Gases The coolant breaks down above 215 °C. If the coolant is allowed to reach these temperatures, toxic gasses may be discharged from the unit. Refer to the Appendix for Material Safety Data Sheets for the coolant and refrigerant used in this system. High Pressure The reservoir may become pressurized due to changes in temperature. Under no circumstances should the reservoir pressure relief valve be removed or capped off. TCU 40/80 Temperature Control Unit 23 High Pressure The refrigerant lines are at high pressure. Under no circumstances should the refrigerant pressure relief valve be removed or capped off. Eye Protection Leakage or failure of high pressure circuits may cause injury or irritation of the eyes. Eye protection should be worn when working with fluid systems. Hand Protection Hot or cold fluids and surfaces can cause injury or irritation of the hands. Hand protection should be worn when working with these fluid systems. Electric Shock Ensure that all electrical power has been removed and the main circuit breaker has been turned off prior to opening the electrical drawer. The EMERGENCY OFF circuit (EMO) does not disconnect all power from the electrical drawer. Extreme caution must be observed if performing maintenance operations with the drawer open. Hot Surface Refrigeration and circulating fluid lines can attain temperatures as high as 110 °C. Caution must be observed. 24 TCU 40/80 Temperature Control Unit 7.2 Hazards Table 9 gives the classifications of electrical hazards. This number indicates the severity of the hazard as defined by SEMI S2-93. Table 9 - Electrical hazards classifications Classification Description Comment Typel Equipment is fully de-energized. None called out. Type 2 Equipment is energized. Live circuits are covered or None called out. insulated. Work is performed at a remote location to preclude accidental shock. Type 3 Equipment is energized. Live circuits are exposed and accidental contact is possible. Potential exposures are less than 30 volts RMS, 42.2 volts peak, 240 volt-amps, 20 Joules. (See NFPA 79-14.3, IEC 204, UL 1950 & 1262, IEC Called out as Type 3. 950.) Type 4 Equipment is energized. Live circuits are exposed and accidental contact is possible. Potential exposures are greater Called out as Type 4. than 30 volts RMS, 42.2 volts peak, 240 volt-amps, 20 Joules or radio frequency (rf) is present. Type 5 Equipment is energized and measurements and adjustments require physical entry into the equipment, or equipment configuration will not allow the use of clamp-on probes. TCU 40/80 Temperature Control Unit None called out. 25 7.3 Filling the reservoir Warning When retrofitting a TCU 40/80 in place of a water/glycol unit, the coolant lines must be flushed with nitrogen to remove moisture prior to installation. 1. Open the vent port valve (see Figure 8 on page 18) to avoid air locks that may slow filling. 2. Remove the plug and fasten the funnel accessory to the Vi" fill port located at the rear of the unit (see Figure 8 on page 18). 3. Fill the reservoir with Fluorinert heat transfer fluid. The amount needed for a new installation is approximately 44 pounds for the TCU and an additional amount for process lines (approx. .15 lbs/ft.; 1/2" tube) and other external volumes. Fill the reservoir until the Coolant Normal Level LED on the rear electrical panel turns green. 4. In the event of over-filling, the Coolant Normal LED will change from green to amber. Drain excess fluid until the Coolant Normal Level LED turns green. Refer to Draining/Bleeding the Coolant Reservoir, below. 7.4 Draining/bleeding the coolant reservoir It may be necessary to drain the coolant reservoir for storage of the TCU 40/80 or due to moisture contamination of the coolant. v It may be necessary to bleed the coolant reservoir to correct an overfill condition. Note: The unit may continue running during this procedure. Follow the procedure below whenever it becomes necessary to drain or bleed the system. Firtreme UXtreme Temnerature 1 emperature Hot or coldHot coolant mayfluid reach °C t0 +80 °C during operation. or cold can"40 cause burns. Coolant should be at ambient temperature before handling. 1. Open the vent valve located at the top of the unit. 2. Place an appropriate container beneath the drain valve. The capacity of the container used needs to be 10 liters plus the volume of the hoses and the volume of the process equipment. 3. Remove the cap fitting from the end of the drain valve. 4. Open the reservoir drain valve. 5a. To correct an overfill condition, drain the reservoir until the Coolant Level Normal LED on the rear electrical panel turns green. Close the reservoir drain and vent valves when the LED turns green. 5b. To empty the reservoir, remove power to the TCU and allow the unit to drain until all coolant has been removed. 6. Close the reservoir drain and vent valves. 7. For proper disposal of the coolant, follow the manufacturers recommendations. Note: Uncontaminated Fluorinert may be reused. The Fluorinert should be stored in a compatible and sealed container. 26 TCU 40/80 Temperature Control Unit 7.5 Temperature probe calibration The Edwards Temperature Controller comes equipped with a factory calibrated internal +10V remote input/output option making calibration unnecessary. 7.6 Preventive maintenance schedule Table 10 shows the maintenance required to keep the TCU 40/80 in good working order. Failure to follow this schedule may result in degradation of system performance. Table 10 - Preventive maintenance schedule Frequency Operation Hazard Verify system status Check coolant level Semi Check lamps (Type 3) Coolant leak check (Type 3) Refrigeration leak check (Type 3) Insulation repair (Type 3) Water leak check (Type 3) Replace solenoid coils SV1 and SV2 (Type 3) System check (Type 3) Lamp replacement (Type 3) annual ly Annually Note: All maintenance should be recorded on the Preventative Maintenance Record label located on the inside ofthe left-hand side access panel. TCU 40/80 Temperature Control Unit 27 1 7.7 Semi-annual preventative maintenance Refer to the Troubleshooting section on page 42 when results for any ofthe following checkpoints are not as expected. 7.7.1 7.7.2 Required equipment • 12" slotted screwdriver • Spare lamps (24 vac / 60 mA) • 4" slotted screwdriver • Fluorinert • Two 10" adjustable wrenches • Insulation Tape • Halogen leak detector Preparation • Locate the two screws securing each of the side access panels and loosen to open doors. • Listen for excessive or questionable noise or sounds coming from the pump assembly, motor, compressor, or solenoid valves (SV1 and SV2). 7.7.3 Verify system status • Verify system status led indicators on the front electrical panel. (See - Front panel power up indicator conditions table on page 20.) 7.7.4 Refrigeration leak check • Visually check for signs of compressor oil on the base, insulation, and on all refrigeration pipework. • Using a halogen leak detector check around the discharge and suction service valves of the compressor, and all accessible refrigeration pipework. 7.7.5 Fluorinert leak check • Use a halogen leak detector to check all supply and return line connections at both the TCU and process equipment, around the pump head assembly, drain valve, heater, flow switch, vent line, fill line, and reservoir pressure relief valve. 7.7.6 Water leak check • Visually check for signs of water leaks at all water line connections external to the TCU and at the condenser connections inside the unit. 7.7.7 Insulation repair Note: Ificeformation is excessive, it may be necessary to correct this condition before insulation can be repaired. • 28 Visually inspect refrigeration and process fluid lines both inside the TCU cabinet and at the supply and return line connections for signs of ice formation. Correct insulation as necessary. TCU 40/80 Temperature Control Unit 7.7.8 Lamp check/replacement Ensure all electrical power has been removed and Electric Shock the main circuit breaker has been turned off due to the presence of high voltage or current. Should a lamp require replacement, notify the Caution appropriate personnel that an EMO condition will occur. Failure to follow these instructions may result in the shut-down of the process tool and associated equipment. Visually verify that the POWER ON and RESET lamps are working. If either lamp needs replacement and the proper authorization has been obtained: 1. Press STOP. 2. Turn off the main circuit breaker (CB1). 3. Disconnect power cord from mains power supply. 4. Locate the two securing screws on the front electrical panel and loosen . Open the electrical drawer. 5. If replacing the POWER ON lamp, locate contactor block (LPl) on the back side of the front electrical panel. If replacing the RESET lamp, locate contactor block (PBl) on the back side of the front electrical panel. 6. Pry up the metal retaining ring attached to the coupling plate. Remove the contact block assembly. 7. Replace the defective lamp. 8. Reinstall the contact block assembly by snapping it back onto the front clement. 9. Close the electrical drawer and tighten securing screws. 10. Reconnect mains power and turn on the main circuit breaker (CBI).. The POWER ON lamp should be illuminated. 11. Press RESET. The lamp should illuminate. Press START to reactivate the TCU. Figure 11 - Lamp replacement TCU40/80 Temperature Control Unit 29 7.8 Annual preventative maintenance Refer to the Troubleshooting section on page 42 when resultsfor any ofthefollowing check points are not as expected. 7.8.1 7.8.2 7.8.3 Required equipment 12" slotted screwdriver Miniature diagonal cutters 4" slotted screwdriver Halogen leak detector 7" slotted screwdriver 3\8" open-ended wrench 8" phillips screwdriver 1\4" open-ended wrench Two 10" adjustable wrenches Wire crimpers - Insulated terminal Wire strippers (14 AWG) Digital multimeter (DMM) Two test clips w/12" leads Remote RTD connector plug (J72J3) Required supplies • Preventative Maintenance Kit (P60153005) • Fluorinert • Insulation Tape Solenoid valve coil replacement Electric Shock Ensure all electrical power has been removed and Caution notify the appropriate personnel that an EMO the main circuit breaker has been turned off due to the presence of high voltage or current. Should a solenoid valve coil require replacement, condition will occur. Failure to follow these instructions may result in the shut-down of the process tool and associated equipment. 1. Press STOP.. Turn off the main circuit breaker (CB1). 2. Disconnect the power cord from the mains power supply. 3. Locate the main cooling solenoid valve (SV1) from the left side access door. 4. Remove the junction box attachment screw. Slide off the junction box cover. 5. Back off the strain relief retaining nut. 6. Unfasten the ground screw. Cut off the wire butt splices (ensuring that the wire labels remain attached to the base assembly) and pull the wires through the junction box. 7. Remove the solenoid valve coil lock nut. Lift off the spacer cup. Separate the coil from the solenoid valve body by gently pulling up on the coil. 8. Remove replacement solenoid valve coil from packaging. 9. Remove the junction box. 10. Note the location of the conduit hole on the coil removed and remove the appropriate "knock-out" on the replacement coil. 30 TCU 40/80 Temperature Control Unit 11. Gently slip the replacement coil onto enclosing tube of solenoid valve body. 12. Pull the base assembly wiring through conduit hole and slip on the strain relief retaining nut. 13. Attach the ground wire to coil. 14. Strip the ends of all wires on base assembly and solenoid valve coils. 15. Crimp on the butt wire splices. 16. Tighten the strain relief retaining nut. 17. Install the original junction box cover and fasten attachment screw. 18. Install the spacer cup. 19. Install and tighten the lock nut. 20. Verify the coil junction box is labeled SV1. 21. Repeat the procedure for Hot Gas Bypass solenoid valve coil (SV2). 22. Discard the old solenoid coils. 23. Perform the System Check procedure. Retaining nut Lock nut Spacer cup Junction box cover Ground screw Figure 12 - Solenoid coil replacement TCU 40/80 Temperature Control Unit 31 7.8.4 System check Component settings Motor overload setting (K3) 3.S amps Current sensing relay setting (CSR) 25 amps Thermostat setting (TS1) 210°F (Differential set at 10°F) High pressure switch setting (PS1) 300 psig. (Differential set at 40 psig) Power-up conditions • Power cord connected to mains power supply. • All circuit breakers on. • EMO released. • Drawer interlock switch in maintenance position. • Host connector J72J2 installed (pins 5 & 6 shorted). • READY lamp on. Indicator Condition Relays All off LEDs All off Power On Reset Off PMR Green Current sensing relay Off \ Note: REMOTE RTD is optional. LED will be green if used. Reset button 1. 2. Press RESET. Verify contactor Kl engages. 3. Verify LED indicator on PMR is green. Indicator Relays Condition CR4on all others off LEDs FACILTITY POWER, FACILITY WATER, CIRCUIT BREAKERS, COOLANT TEMPERATURE, COOLANT NORMAL LEVEL, green COMPRESSOR, COOLANT FLOW,, COOLANT LOW LEVEL, REMOTE RTD off Power On Reset On PMR Green Current sensing relay Off Note: REMOTE RTD is optional. LED will be green if used. 32 TCU 40/80 Temperature Control Unit Temperature controller 1. All control parameters and selections procedures for the temperature controller are accomplished through simple MENU selections. These MENU selections are organized into PAGES. On each page you will find a specific set of related functions. The PAGES setup structure is as follows : diSP PAGE, Ctrl PAGE, inPt PAGE, ScAL PAGE, Outl PAGE and Out2 PAGE. To select a PAGE : Press and hold the RESET key, while pressing the ^ otW keys. The upper display of the temperature controller will increment or decrement through the PAGEs, and PAGE will be displayed in the lower display. To select a MENU : After reaching the correct page, press reset to move through MENUs. The alpha cue for the MENU will appear on the upper display and the current value will appear in the lower display. To change a MENU value : After the MENU is selected and displayed, use the^ and *V keys to change the value. 2. To enter the SetUp Mode, press the controller RESET key and hold it for about 3 seconds. The controller will display LocH XXX where XXX is the security code. The security code number should be 458. If not, press either the JLot^ keys until the display reads 458. This is the first menu in the Ctrl PAGE. Verify that the menu settings for the Ctrl PAGE are as follows : PID1 -heatinR 4. value PID2 - cooling value parameter Pbl 8.0 Pb2 12.5 proportional band Arl 0.43 Ar2 0.7 automatic reset rAtl 7.0 rAt2 9.0 rate dbl 1.0 db2 1.0 deadband OFst = 0.0 FL = On Orng = 0.0 LooP = OFF Auto = 4 rrAt = OFF Cont = HtCI CooL == PID2 rSP = On Enti = rSP Au = none Aout = Proc rSEn = OFF Select the next page which is the InPT PAGE. Verify that the menu settings for the InPt PAGE are as follows: I SEnS = rtdt unit = °C 5. CoFF = .0 1 SPLL = -40.0 | SPUL = 80.0 Select the next page which is the ScAL PAGE. Verify that the menu settings for the ScAL PAGE are as follows: DP= 1 AinL = -50.0 AinH = 100.0 AotL = -100.0 AotH = 100.0 rSPL=100.0 rSPH = 100.0 6. Select the next page which is the Outl PAGE. Verify that the menu settings for the Outl PAGE are as follows: Cycl = 16 7. HoFF = .0 Select the next page which is the Out2 PAGE. Verify that the menu settings for the Out2 PAGE arc as follows: Cyc2 =16 8. OL1 = 100.0 OL2 = 100.0 CoFF = .0 Press START. To return to Operating Mode, press and hold the RESET key for more than 3 seconds. The controller will automatically return to operating mode after 10 minutes of no pushbutton activity. 9. Press START. TCU 40/80 Temperature Control Unit 33 EMO circuit Do not perform the EMO circuit check while the TCU is on-line with the process tool. Failure to follow these instructions will lead to the shut-down of the process tool and other associated equipment. 1. Press the EMO button and check that the following occur. • READY lamp goes out. • All front panel LED indicators go out. • Temperature controller shuts off. • Kl contactor opens. 2. Release the EMO button and press RESET. • Remove rear panel connector J72J2. The READY lamp should go out. Contactor Kl should open, the Perform the following: temperature controller and the front panel LED indicators should go out. Replace J72J2 connector and press RESET. 3. Press in the interlock switch then release it. The READY lamp should go out. Contactor Kl should open, the temperature controller and the front panel LED indicators should go out. Place the drawer interlock switch in the maintenance position. • Press RESET • Press START PMR 1. On the PMR rotate the adjustment knob completely clockwise. 2. Verify the unit shuts down, LED 1 (Facility Power) illuminates red, and that the alarm sounds. 3. Press MUTE. Condition Indicator CR4,CRll,CRI3on Relays all others off FACILITY WATER, CIRCUIT BREAKERS, COOLANT TEMPERATURE, LEDs COOLANT NORMAL LEVEL green COMPRESSOR, COOLANT FLOW, COOLANT LOW LEVEL, REMOTE RTD.off FACIL1TY POWER red Power On Reset Off PMR Red Current sensing relay Off Note: REMOTE RTD is optional. LED will be green if used. 34 4. Return the PMR adjustment control to the original position. 5. Press RESET then START TCU 40/80 Temperature Control Unit Current sensing relay 1. Set CSRI to SO amps. The indicator LED on CSRI should go from green to red. 2. After a 5 second time delay, verily that the unit shuts down, COMPRESSOR illuminates red and the alarm sounds. 3. Press MUTE. Condition Indicator CR4.CR8.CRll.CR13 on Relays alt others off FACILITY POWER, FACILITY WATER, CIRCUIT BREAKERS, COOLANT TEMPERATURE, COOLANT NORMAL LEVEL green LEDs COOLANT FLOW, COOLANT LOW LEVEL, REMOTE RTD off COMPRESSOR red Power On Reset Off PMR Green Current sensing relay Off Note: REMOTE RTD is optional. LED will be green if used. 4. Reset CSRI to 25 amps. 5. Press RESET. 6. Press START. Circuit breaker 1. Power off CB4. The TCU will shut down, alarm will sound and CIRCUIT BREAKER LED should be red. 2. Press MUTE. 3. Power on CB4, press START. 4. Repeat steps 1 thru 3 for CB3 and CB2. Indicator Relays Condition CRI,CR4,CRH,CR13on all others off LEDs FACILITY POWER, FACILITY WATER, COOLANT TEMPERATURE, COOLANT NORMAL LEVEL green COMPRESSOR, COOLANT FLOW, COOLANT LOW LEVEL, REMOTE RTD, off CIRCUIT BREAKERS RED Power On Reset Off PMR Green Current sensing relay Off Note: REMOTE RTD is optional. LED will be green if used. TCU 40/80 Temperature Control Unit 35 ■^"^V Water supply 1. Short wire #23 (TBl) to wire #54 (relay board J3-13) The TCU will shut down, alarm will sound, and FACILITY WATER LED should illuminate red. 2. Press MUTE. Indicator Relays Condition CR2.CR4,CRll,CR13on all others off FACILITY POWER, CIRCUIT BREAKERS, COOLANT TEMPERATURE. LEDs COOLANT NORMAL LEVEL green COMPRESSOR. COOLANT FLOW, COOLANT LOW LEVEL, REMOTE RTD off FACILITY WATER red Power On Reset Off PMR Green Cuirait sensing relay Off Note: REMOTE RTD is optional. LED will be green if used. 3. Remove short. 4. Press RESET. 5. Press START. Reservoir over-temperature 1. Short wire #23 (TBl) to wire #56 (relay board J3-3)). The TCU will shut down, alarm will sound and COOLANT TEMPERATURE LED should be red. 2. Press MUTE. Condition Indicator Relays CR4,CR6.CRll,CRI3on all others off LEDs FACILITY POWER, FACILITY WATER, CIRCUIT BREAKERS, COOLANT NORMAL LEVEL green COMPRESSOR. COOLANT FLOW, COOLANT LOW LEVEL, REMOTE RTD off COOLANT TEMPERATURE red Power On Reset Off PMR Green Current sensing relay Off Note: REMOTE RTD is optional. LED will be green if used. 36 3. Remove short. 4. Press RESET. 5. Press START. TCU 40/80 Temperature Control Unit Coolant flow 1 Short wire #57 (Relay board J2-5) to wire #58 (Relay board J3-9). After 5 second delay, the TCU will 2. Press MUTE. shut down, alarm will sound and COOLANT FLOW LED should be red. Condition Indicator CR4,CR7,CRll,CR13on Relays all others off FACILITY POWER, FACILITY WATER, CIRCUIT BREAKERS, COOLANT TEMPERATURE, COOLANT NORMAL LEVEL green LEDs COMPRESSOR, COOLANT LOW LEVEL, REMOTE RTD off COOLANT FLOW red Power On Reset Off PMR Green Current sensing relay Off Note: REMOTE RTD is optional. LED will be green if used. 3. Remove short. 4. Press RESET 5. Press START. Compressor 1. Short wire #57 (Relay board J2-5) to wire #60 (Relay board J3-1). After 5 second delay, the TCU will shut down, alarm will sound and COMPRESSOR LED will be red. 2. Press MUTE. Condition Indicator Relays CR4,CR8,CRll,CR13on all others off LEDs FACILITY POWER, FACILITY WATER, CIRCUIT BREAKERS, COOLANT TEMPERATURE, COOLANT NORMAL LEVEL green COOLANT FLOW, COOLANT LOW LEVEL, REMOTE RTD off COMPRESSOR red Power On Reset Off PMR Green Current sensing relay Off Note: REMOTE RTD is optional. LED will be green if used. 3. Remove short. 4. Press RESET. 5. Press START. /0 TCU 40/80 Temperature Control Unit 37 Circulation pump 1. Adjust overload trip on K3 to the minimum setting. Within three minutes the overload will trip. After a five second time delay, the TCU will shut down, the alarm will sound and the COOLANT FLOW LED should illuminate red. 2. Press MUTE. Indicator Relays Condition CR4,CR7,CRU,CRI3on all others off LEDs FACILITY POWER, FACILITY WATER, CIRCUIT BREAKERS, COOLANT TEMPERATURE, COOLANT NORMAL LEVEL green COMPRESSOR, COOLANT LOW LEVEL, REMOTE RTD off COOLANT FLOW red Power On Reset Off PMR Green Current sensing relay Off Note: REMOTE RTD is optional. LED will be green ifused. 3. Reset overload trip to 3.5 amps. 4. Press RESET. 5. Press START. Reservoir overfill 1. Short wire #23 (TBl)towire#63 (Relay board J3-4). COOLANT NORMAL LEVEL LED will go from green to amber. Indicator Relays Condition CR4,CR5,CR10,CRI2on all others ofT LEDs FACILITY POWER, FACILITY WATER, CIRCUIT BREAKERS, COMPRESSOR, COOLANT TEMPERATURE, COOLANT FLOW COOLANT NORMAL LEVEL green COOLANT LOW LEVEL, REMOTE RTD off COOLANT NORMAL LEVEL amber Power On Reset On PMR Green Current sensing relay Green Note: REMOTE RTD is optional. LED will be green if used. 38 TCU 40/80 Temperature Control Unit Remote start/stop 1. Remove jumper from terminal strip (TB1 ).The TCU will shut down. 2. Press RESET. 3. Press START. Remote temperature probe 1. Install connector J72J3 and verify REMOTE RTD illuminates green. Condition Indicator Relays CR4,CR9,CRI0on all others off LEDs FACILITY POWER, FACILITY WATER, CIRCUIT BREAKERS, COMPRESSOR, COOLANT TEMPERATURE, COOLANT FLOW, COOLANT NORMAL LEVEL, REMOTE RTD green COOLANT LOW LEVEL, off Power On Reset On PMR Green Current sensing relay Green 2. Remove connector J72J3. Cooling 1. Change the temperature controller set point to -40°C. 2. Verify CR15 on the relay board illuminates. 3. Verify main solenoid valve (SVl) has opened by confinning that the sight glass has filled with refrigerant. 4. Verify OUT 2 LED on the temperature controller is on. Indicator Relays Condition CR4,CR10,CRI5on all others off LEDs FACILITY POWER, FACILITY WATER, CIRCUIT BREAKERS, COMPRESSOR, COOLANT TEMPERATURE. COOLANT FLOW, COOLANT NORMAL LEVEL, REMOTE RTD green COOLANT LOW LEVEL, REMOTE RTD off Power On Reset On PMR Green Current sensing relay Green Note: REMOTE RTD is optional. LED will be green if used. TCU 40/80 Temperature Control Unit 39 Heating 1. Change the temperature controller set point to 80°C. 2. Verify contactor K4 pulls in. 3. Verify CR15 goes out. Verify OUT 1 on the temperature controller is on and OUT 2 is off. 4. Verify hot gas bypass solenoid (SV2) is energized. Condition Indicator Relays CR4,CRI0on all others off LEDs FACILITY POWER, FACILITY WATER, CIRCUIT BREAKERS, COMPRESSOR, COOLANT TEMPERATURE, COOLANT FLOW, COOLANT NORMAL LEVEL, REMOTE RTD green COOLANT LOW LEVEL, REMOTE RTD off Power On Reset On PMR Green Current sensing relay Green Note: REMOTE RTD is optional. LED will be green (fused Process value setting 40 1. Set the temperature controller to the proper process set value. 2. Verify all the host interface connections are mated properly. TCU 40/80 Temperature Control Unit 7.9 Preventive maintenance checklist Record date: Serial no: Customer name: Line / area: Checked by: Tool name: System status Timer hours: Hours Coolant pressure: psig Process temperature: °C Fluonnert type: FC8270 Quantity ofFluonnert added: Operation mode: Remote Utilities water temperature: Leak check results: Parts replaced FC77 Other: lbs. liters Local °C Pass Fail Quantity Remarks: Cause / reason Actions / concerns TCU 40/80 Temperature Control Unit 41 >*%k 8 TROUBLESHOOTING Table 11, Table 12, Table 13 and Table 14 identify fault conditions that you may encounter with the TCU 40/80. For additional assistance contact the Edwards Service Department. Table 11- Faults identified by front panel lamps Possible causes Indicator POWER ON lamp is No not illuminated. 40/80. power to the Action TCU Hazard Verify that the power cord is plugged in. Type 4 Verify that outlet's circuit breaker is on. Verify that the outlet's EMO is not activated. The main power circuit Verify that the main power circuit breaker (CB1) is breaker (CB1) is off. on. POWER ON lamp requires Verify that the POWER ON lamp assembly is replacement. receiving 24 VAC. To do this, opening of the electrical drawer is necessary. This will activate the drawer interlock switch and shut the TCU 40/80 Type 4 down. Notify the tool operator prior to opening the electrical drawer. Check to see that 24 VAC is present across the lamp assembly terminal block (LPI),\ terminals XI and X2. If 24 VAC is present, then replace the POWER ON lamp. (EHVI part no. P23247900). Refer to the "Lamp Check/Replacement Procedure " on page 29. Verify that the transformer isolating circuit breaker The transformer isolating circuit breaker CBS may be off. CBS is on. The Verify that the transformer isolating circuit breaker transformer isolating circuit breaker CB7 may be CB7 is not tripped. Reset if necessary. tripped. One of the following circuit breakers may not be main power circuit breaker (CB1) • transformer isolating circuit breaker CB5 • transformer isolating circuit breaker CB7 42 Type 4 P43I26700). functional: • Verify that the main power circuit breaker CB1 is functional. Replace if necessary. (EHVI part no. Verify that the transformer circuit breaker CBS is functional. Replace if necessary. (EHVI part no. P43129500). Verify that the transformer circuit breaker CB7 is functional. Replace if necessary. (EHVI part no. P43129100). TCU 40/80 Temperature Control Unit Table 11- Faults identified by front panel lamps (continued) POWER ON lamp is illuminated, but when Local EMERGENCY OFF Verify circuit (EMO) is engaged. (EMO) is engaged. RESET is pressed, it does not Ensure illuminate. not illuminated, and the temperature the that front panel the EMERGENCY interface connector OFF J72J2 Type 3 is installed with pins 5 and 6 linked. The front panel LEDs are Hazard Action Possible causes Indicator Refer to the "Remote Interface wiring schematic" on page 56. controller is off. Electrical interlock drawer switch safety is not Ensure the electrical drawer is fully closed and that the securing screws are tightened. engaged. Remote OFF EMERGENCY circuit (EMO) is Verify that the remote EMERGENCY OFF (EMO) is not engaged. engaged. Remote EMERGENCY OFF circuit (EMO) is not wired properly to interface Verify the correct wiring to the interface connector Refer to the "Remote Interface wiring schematic" connector J72J2. on page 56. POWER ON lamp is A failure condition exists Review the front panel status indicators to identify illuminated. that must be satisfied. When RESET is pressed it does not panel illuminate. the front LEDs are illuminated, and the failure mode. Refer to the "Faults indicated by front panel lamps" on page 42. The audible alarm is sounding, Type 3 J72J2. the temperature controller is on. POWER ON lamp is RESET lamp requires Verify that the RESET lamp assembly is receiving illuminated. replacement. 24 VAC. To do this, opening of the electrical When RESET is pressed, it does not illuminate. There is no audible alarm sounding. The front panel LEDs are illuminated and do not indicate the presence of a failure mode. The temperature controller is on. Type 4 drawer is necessary. This will activate the drawer interlock switch and shut the TCU 40/80 down. Notify the tool operator prior to opening the electrical drawer. Check to see that 24 VAC is present across the lamp assembly terminal block (LP2), terminals XI and X2. If 24 VAC is present, then replace the RESET lamp. (EHVI part no. P23247900). Refer to the "Lamp Check/Replacement Procedure" on page 29. TCU 40/80 Temperature Control Unit 43 t Table 12 - Faults indicated by the front panel LED indicators Possible causes Indicator Action Hazard FACILITY POWER Phasing LED is red; audible power is reversed. Swap any two of the three power line supply phases in the outlet box. Line voltage is low (below Correct low line voltage condition. 177 VAC). Refer to the "Specifications Table" on page 14. alarm is of the incoming Type 4 sounding; TCU will not start or has stopped operation. (PMR) is not set properly to The adjustment knob of the PMR should be positioned such that the arrow is pointing towards 177 VAC. the calibration mark (a black ink marking) on the The phase monitor relay Type 4 PMR. The PMR is calibrated to trip at 177 VAC. If necessary replace the PMR with a known calibrated PMR. ( EHVJ part no. P60056100). FACILITY WATER LED is red; audible alarm is TCU has Water supply is off or not Verify that the water supply lines are connected connected. properly to the unit. sounding; Verify water is turned on. stopped Refer to the "Water and coolant connections" operation. instructions on page IS. Water supply is below 3 Verify that water supply valves are open and that gpm. the water flow is between 3-6 gpm. Refer to the "Specifications Table" on page 14. Verify facilities water supply meets temperature specification of 10 - 26°C. Water is too warm. the Refer to the "Specifications Table" on page 14. Pressure switch (PS1) has Verify that the pressure switch (PS1) is set to 300 tripped. psig. CIRCUIT One of the following circuit Examine the rear electrical panel of the unit to BREAKER LED is red; audible alarm is sounding; TCU has stopped operation. breakers as tripped: determine which circuit breaker has tripped. • Compressor circuit breaker (CB2) • • Circulation pump Type 4 Refer to the description of the"Rear panel" on page 13. Reset the tripped circuit breaker. To restart the unit circuit breaker (CB3) press the RESET button to clear the alarm condition, then press START. If the circuit breaker Heater circuit breaker trips again, monitor the current draw from the proper corresponding component. The maximum (CB4) Type 2 current draw is as follows: • Compressor: 7 amps per leg • Circulation Pump: 3.S amps per leg • Heater 3 amps per leg If the current draw is in excess of the values noted above, remove power to the unit and contact an Edwards service representative. 44 TCU 40/80 Temperature Control Unit Table 12 - Faults indicated by the front panel LED indicators (continued) Possible causes Action The circuit breaker may not Verify that the circuit breaker which is tripping is be functioning properly. functioning properly. Replace if necessary. Indicator Compressor circuit breaker: Hazard EHVI part Type 4 no. P43129400 Circulation pump circuit breaker: EHVI part no.. P43129300 Heater circuit breaker: EHVI part no. P43129200 COMPRESSOR LED is red; audible alarm is TCU has Current sensing relay (CSRI) has tripped. Verify that the current sensing relay (CSRI) is set Type 4 to 25 amps. To do this, opening of the electrical drawer is necessary. This will activate the drawer sounding; stopped interlock switch and shut the TCU 40/80 down. operation. Notify the tool operator prior to opening the electrical drawer. Refrigerant leak. Visually check for signs of compressor oil on the base, insulation, around the compressor service valves, and on all refrigeration pipework. Type 2 Use a halogen leak detector to leak check all accessible refrigeration pipework and the compressor service valves. If compressor oil is noted or a leak is located remove all power to the unit and contact an Edwards service representative. Hot gas bypass solenoid valve (SV2) fail. Verify 24 VAC is present between wire #15 (J4-5) on the relay board and wire #4 (TBI). To do this opening of the electrical drawer is necessary. This will activate the drawer interlock switch and shut the TCU 40/80 down. Type 4 Notify the tool operator prior to opening the electrical drawer. Verify current draw of the solenoid is not above 1 amp. Verify that the resistance of the coil is about 8 Cl. If necessary, replace the coil (EHVI part no. P33030300). Main cooling solenoid valve (SVI) fail. Verify 24 VAC is present between wire #16 (J4-5) on the relay board and wire #4 (TBI). To do this, opening of the electrical drawer is necessary. This will activate the drawer interlock switch and shut the TCU 40/80 down. Type 4 Notify the tool operator prior to opening the electrical drawer. Verify current draw of the solenoid is not above 1 amp. Verify that the resistance of the coil is about 8 Cl. If necessary, replace the coil (EHVI part no. P33O3O3OO). TCU 40/80 Temperature Control Unit 45 '■V Table 12 - Faults indicated by the front panel LED indicators (continued) Indicator Possible causes Compressor tripped thermal over-load. Action on Hazard Verify that the temperature of the discharge line of the compressor has not exceeded Type 4 195°F. If the temperature is above 195°F, remove power to the unit and contact an Edwards service representative. Warning: Ensure all electrical power has been removed and the main circuit breaker has been turned off prior to checking the compressor motor winding resistance. Verify compressor motor winding resistance. The resistance between any two terminals of the compressor motor should be 1.4 ft (± 0.3 fl). Verify all three phases are within specification. If the motor winding resistance are out of tolerance contact an Edwards service representative. Incorrect line voltage to the Verify that the compressor is receiving all three compressor. phases (208 VAC) at the compressor terminals. Coolant An excessive heat load is Ensure the heat load power does not exceed 2000 TEMPERATURE causing watts. LED is red; audible system shut down. °C. alarm; the coolant temperature to exceed 90 The temperature switch Refer to the "Specifications Table" on page 14. Verify that the temperature switch (TSI) is set at (TSI) is not set correctly. 210 °F. Coolant FLOW LED Coolant Verify coolant line valves are open. is red; audible alarm; valves at the rear of TCU system shut down. are closed. supply shut-off Supply flow is inadequate. Type 4 Verify adequate supply flow. Type 2 Eliminate possible coolant line restrictions. Refer to the "Specifications Table" on page 14. Circulation pump thermal over-load protector (K3) is set improperly. Verify that the circulation pump thermal over-load protector (K3) is set to 3.SA. To do this, opening of the electrical drawer is necessary. This will activate the drawer interlock switch and shut the TCU Type 4 40/80 down. Notify the tool operator prior to opening the electrical drawer. Circulation pump thermal over-load protector (K3) is tripped. Press the "reset" button on the circulation pump thermal over-load protector (K3) to ensure that it is Type 4 not tripped. To do this, opening of the electrical drawer is necessary. This will activate the drawer interlock switch and shut the TCU 40/80 down. Notify the tool operator prior to opening the electrical drawer. 46 TCU 40/80 Temperature Control Unit Table 12 - Faults indicated by the front panel LED indicators (continued) Indicator Possible causes Action Flow switch may not be set Monitor the voltage between wire #57 (J2-S) and properly. wire #58 (J3-9) located on the relay board. To do Hazard Type 4 this, opening of the electrical drawer is necessary. This will activate the drawer interlock switch and shut the TCU 40/80 down. Notify the tool operator prior to opening the electrical drawer. Place the drawer interlock switch in the maintenance position. Press the RESET button to clear the alarm condition, then press START. If not, a minor adjustment of the reed contact of the flow switch is required. There should be 24 VDC present. Remove the insulation from the enclosing tube of the flow switch. Loosen, but do not remove, the two locking plate securing screws on the top of the flow switch. This will allow movement of the reed contact. Make minor adjustments to the reed contact until 0 VDC is seen at "no flow" and 24 VDC is present when the unit is running. After the proper adjustment to the reed contact is complete, tighten the locking plate securing screws and re-attach the insulation. Excessive current draw from the circulation pump Verify current draw from each phase of the circulation pump motor does not exceed 3.5 Amps. Type 4 motor. Coolant LEVEL NORMAL LED Reservoir is over-filled. is amber. Coolant LEVEL Drain the reservoir until the LED turns green. Refer to"Draining/bleeding the coolant reservoir" on page 26.. LOW LED is Fluid volume is low (less than 8 liters). amber. There may be a leak. Add fluid to reservoir until LED turns green. Refer toTilling the reservoir" on page 26. Visually check for signs of leaks inside the unit and at all connections between the TCU 40/80 and the process tool. Check all process line connections for Type 2 leaks. Refer to the "Fluorinert leak check " on page 28. TCU 40/80 Temperature Control Unit 47 Table 12 - Faults indicated by the front panel LED indicators (continued) Indicator Coolant Possible causes LOW LEVEL LED is red. Action Hazard Coolant level is very low; Reservoir needs to be filled. less than 3.5 liters. Refer to "Filling the reservoir" on page 26. Reservoir drain valve is Close the drain valve. open. There may be a leak. Visually check for signs of leaks inside the unit and Type 2 at all connections between the TCU 40/80 and the process tool. Check all process line connections for leaks. Refer to "Fluoriaert leak check" on page 28. REMOTE RTD is in Terminals 4 and 5 on the Verify that terminals 4 and 5 on interface connector use but LED is off. interface J72J3 are linked. connector J72J3 are not linked. Type 3 Refer to the "Remote Interface wiring schematic" on page 56. Table 13 - Faults identified by rear panel indicators Coolant LEVEL NORMAL LED Drain the reservoir until the LED turns green. Reservoir is over-filled. is Refer amber. Coolant LEVEL Hazard Action Possible causes Indicator to"Draining/bleedlng the coolant reservoir " on page 26. LOW LED is Fluid volume is low; less Add fluid to reservoir until LED rums green. than 8 liters. Refer touFilling the reservoir"on page 26. There may be a leak. Visually check for signs of leaks inside the unit and at all connections between the TCU 40/80 and the process tool. Check all process line connections for amber. Type 2 leaks. Refer to "Fluorinert leak check " on page 28. Coolant LOW LEVEL LED is red. Coolant level is very low; less than 3.5 liters. Reservoir needs to be filled? Reservoir Close the drain valve. drain valve is Refer to"Filling the reservoir"on page 26. open. There may be a leak. Visually check for signs of leaks inside the unit and at all connections between the TCU 40/80 and the Type 2 process tool. Check all process line connections for leaks. Refer to "Fluorinert leak check" on page 28. 48 TCU 40/80 Temperature Control Unit Table 14 - Miscellaneous fault conditions Indicator Possible causes Host fail signal. Supplies fail signal to the host when any interface of the Action Hazard Unit in STOP mode Refer to the "Faults indicated by the front panel FACILITY POWER Fail LED indicators" on page 44. FACILITY WATER Fail CIRCUIT BREAKER Fail following occur: COMPRESSOR Fail TEMPERATURE Fail FLOW Fail Coolant LOW LEVEL FAULT Host wam signal. Supplies wam signal to the when process any of tool the Coolant NORMAL LEVEL OVER-FILL Refer to the "Faults indicated by the front panel LED indicators" on page 44 Coolant LOW LEVEL following occur: RTD wired incorrectly to Temperature controller value blinks. process the interface connector J72J3. to the "Remote Interface Type 3 wiring schematic" on page 56. Terminals 4 and 5 are not linked Verify that the remote RTD is wired correctly. Refer on the interface connector J72J3. Verify that terminals 4 and 5 on connector J72J3 are linked. Refer to the "Remote Interface Type 3 wiring schematic" on page 56. Incorrect RTD type being Verily that the RTD is 100 ohm European. utilized. Temperature parameters are controller not set to factory defaults. Failure to cool. Main cooling solenoid valve (SVl)fail. Verify temperature controller PID settings. Type 2 Refer to the "Temperature controller" portion of the System Check on page 21. Verify 24 VAC is present between wire #16 (J4-5) on the relay board and wire #4 (TB1). To do this, Type 4 opening of the electrical drawer is necessary. This will activate the drawer interlock switch and shut the TCU 40/80 down. Notify the tool operator prior to opening the electrical drawer. Verify current draw of the solenoid is not above 1 amp. Verify that the resistance of the coil is about 8 Q. If necessary, replace the coil (EHVI part no. P3303O3OO). Relay board failure. Verify that the main cooling relay (CR15) comes on when the unit is in cooling mode. Type 3 Moisture is in the system. Verify that the moisture indicator in the sight glass Type 2 is green. If it appears yellow in color remove power from the unit and notify an Edwards service representative. TCU 40/80 Temperature Control Unit 49 Table 14 - Miscellaneous fault conditions (continued) Indicator Hazard Action Possible causes Visually check for signs of compressor oil on the base, insulation, around the compressor service valves, and on all refrigeration pipework. Refrigerant leak. Type 2 Use a halogen leak detector to leak check all accessible refrigeration pipework and the compressor service valves. If compressor oil is noted or a leak is located remove all power to the unit and contact an Edwards service representative. Temperature parameters controller are not set to factory defaults. Temperature Type 2 Verify temperature controller PID settings. Refer to the "Temperature controller" portion of the System Check on page 21. controller is not functioning properly. Verify that the OUT 2 lamp on the front of the temperature controller is ON when the unit is in Type 4 cooling mode. Replace the temperature controller if necessary (EHVI part no. P43008000). Remote START/STOP J72J2 interface connector is Verify proper wiring of connector J72J2. fail. wired incorrectly. Refer lo the "Remote Interface Type 3 wiring schematic " on page 56.. Remote START/STOP jumper not removed Verify that the remote START/STOP jumper located across terminal TB1-I on terminal block TB1 is removed. To do this, opening of the electrical drawer is necessary. This will activate the drawer interlock switch and shut the TCU Type 4 40/80 down. Notify the tool operator prior to opening the electrical drawer. Hour counter fail. Hour counter not recording operating time. Verify 24 VDC across the wires connected to the Type 4 hour counter (wire #28 and wire #29). To do this, removal of the front access panel is necessary. Replace the hour counter if necessary (EHVI part no. P43144900). Remote enable fail. setpoint Absence of 24 VAC supply Verify the host 24 VAC supply to pin 3 and pin 4 to interface connector J72J2 on connector J72J2. or interface connector wired incorrectly. schematic" on page S6.. is Relay board failure (CR14). Refer to the "Remote Interface Type 3 wiring Verify that the remote setpoint enable relay (CR14) Type 4 is on. Temperature parameters are controller not set to factory defaults. Verify temperature controller PID settings. Type 2 Refer to the "Temperature controller" portion of the System Check on page 21.. Temperature controller not Verify temperature controller is in remote mode. functioning properly. The AUX lamp on the front of the controller should Type 4 be ON. Replace the temperature controller if necessary (EHVI part no. P43008000). 50 TCU 40/80 Temperature Control Unit TBl K4 KJ <2 K1 M Figure 13 - Electrical drawer TCU 40/80 Temperature Control Unit 51 9 ACCESSORIES AND SPARE PARTS Accessories and spare parts are available from service centers at Edwards companies in Brazil, Canada, Germany, Great Britain, Italy, Japan, USA, and a worldwide network of distributors. The majority of these centers employ service engineers who have undergone comprehensive Edwards training courses. When ordering please state for each part required: • Model and code number of your equipment • Description of part • Serial number (if any) Table 15 - Accessories Description Part number P60150400 P60152200 P60154600 P60153100 P60152100 P30152700 Qty 2 1/2" male connector 4 Tie-bolt kit Rod 3/8"-16 x 7" 4 (Anchors top to bottom unit Hex nut 3/8"-16 4 when stacking) Flat washer 3/8" 4 Coolant connection kit Stabilization kit Unistrut® channel 2 (Anchors bottom or single Studs3/8"-16x5" 4 unit to floor.) Hex nut 3/8"-16 4 Flat washer 3/8" 4 Lock washer 3/8" 4 100Q RTD; 3 wire, 15' leads 1 5 pin circular connector (J72J3) 1 Coolant RTD assembly 100*2 RTD; 3 wire, 15" leads 1 (external) 5 pin circular connector (J72J3) 1 Vi" X Vi" pipe connector 1 Leveler pad 4 Rod3/8"-16x7" 4 Hex nut 3/8"-16 4 Flat washer 3/8" 4 Lock washer 3/8" 4 Removable spill containment system I Remote RTD assembly (auxiliary) P60188300 Contents Ball valve 1/2" female NPT Leveler kit Secondary containment receptacle P60141100 Funnel Off-set funnel with Swagelok connector 1 P60153200 Host interface connector kit 9 pin plug (J72J2) 1 Sockets (J72J2) 9 37 pin male "D" connector (J72J1) 1 52 Backshell w/hardware (J72J1) 1 5 pin circular connector (J72J3) 1 P53289800 Fluorincrt 11 pound container 1 P53289900 Fluorinert 44 pound container 1 TCU 40/80 Temperature Control Unit Table 16 Spare parts Part number P60153005 P60140600 P60153001 P60153003 P60153004 P60140301 Contents Description Qty Preventative maintenance Lamps, 28vac, 60 mA 4 kit Solenoid valve coils 2 Electrical drawer assembly Electrical drawer 1 Refrigeration refurbishment Filter/dryer I kit Discharge service valve 1 Suction service valve 1 Heater contactor 1 Electrical refurbishment kit Coolant pump rebuild kit Coolant pump/motor Pump contactor 1 Solenoid valves 2 Lamps 2 Gear shafts 2 Gears (idler & drive) 2 Seals 3 Wear plates 4 Bearings 4 Coolant pump/motor 1 assembly TCU 40/80 Temperature Control Unit 53 APPENDIX Figure 14- Electrical drawer schematic 54 TCU 40/80 Temperature Control Unit TCU 40/80 Temperature Control Unit 55 Process equipment TCU J72J1 #1 #20 +10 VDC ■¥> #24 +10 VDC #7 -•Out #26 #28 «ln -© Function TCU coolant temp (PV) Remote setpoint temp .1 ?n4JTCU fail VOC •Out 24~l ,,„ VDCJTCU wornin9 ■«- J72J2 u< n ■ TCU EMO condition n o 24 VAC iH #5 Lr #6 i §7 #8 #9 g // '' L? enable N/C Process equipment EMO N/Cr Stop i~lrv• Setpoint button Remote Start button < N/O J72J3 Remote RTO #5 Figure 15 - Remote interface 56 TCU 40/80 Temperature Control Unit V TCU 40/80 Temperature Control Unit 57 i^"ft\ Return of Edwards Equipment - Procedure (Form HS1) Introduction Before you return your equipment you must warn your supplier if the substances you used (and produced) in the equipment can be dangerous. You must do this to comply with health and safety at work laws. You must complete the Declaration (HS2) on the next page and sent it to your supplier before you dispatch the equipment. If you do not, your supplier will assume that the equipment is dangerous and he will refuse to accept it. If the Declaration is not completed correctly, there may be a delay in processing your equipment. Guidelines Take note of the following guidelines: • Your equipment is 'uncontaminatcd' if it has not been used or if it has only been used with substances that • are not dangerous. Your equipment is 'contaminated' if it has been used with any dangerous substances. If your equipment has been used with radioactive substances, you must decontaminate it before you return it to your supplier. You must send independent proof of decontamination (for example a certificate of analysis) to your supplier with the Declaration (HS2). Phone your supplier for advice. • We recommend that contaminated equipment is transported in vehicles where the driver does not share the same air space as the equipment. PROCEDURE Use the following procedure: 1. Contact your supplier and obtain a Return Authorization Number for your equipment. 2. Turn to the next page(s), photocopy and then complete the Declaration (HS2). 3. Drain all fluids from the equipment and its accessories. 4. Disconnect all accessories, such as levelers and host connectors, from the equipment. 5. Close the drain, supply and return valves. 6. Ensure that the electrical drawer and all access doors are fastened securely. 7. Coil the main power cord and secure. 8. Wrap the TCU in bubble, polythene, or shrink wrap and enclose in the original or replacement shipping crate (Edwards part number P90150100). 9. If the equipment is contaminated, label the pallet (or box) in accordance with laws covering the transport of dangerous substances. 10. Fax or post a copy of the Declaration (HS2) to your supplier. The Declaration must arrive before the equipment. 11. Give a copy of the Declaration to the carrier. You must tell the carrier if the equipment is contaminated. 12. Seal the original Declaration in a suitable envelopes attach the envelope securely to the outside of the equipment package. WRITE YOUR RETURN AUTHORISATION NUMBER CLEARLY ON THEOUTSIDE OF THE ENVELOPE OR ON THE OUTSIDE OF THE EQUIPMENT PACKAGE. 58 TCU 40/80 Temperature Control Unit Return of Edwards Equipment- Declaration (FormHS2) Return Authorization Number You must: • Know about all of the substances which have been used and produced in the equipment before you complete this Declaration • Read the Procedure (HS1) on the previous page before you attempt to complete this Declaration • Contact your supplier to obtain a Return Authorization Number and to obtain advice if you have any questions • Send this form to your supplier before you return your equipment SECTION 1 : EQUIPMENT FOR SEMICONDUCTOR APPLICATIONS ONLY: Tool Reference Number Equipment model _ Serial Number Process Hours Has the equipment been used, tested, or operated? Failure Date yes □ Go to Section 2 Serial Number of Replacement TCU no □ Go to Section 4 SKCTION 2 : SUBSTANCES IN CONTACT WITH THE EQUIPMENT Are any of the substances used or produced in the equipment • Radioactive yesQ noQ • • Biologically active Dangerous to human health and yesD yesQ noD noD safety? If you have answered 'no' to all of Your supplier will not accept delivery of any equipment that is contaminated with radioactive substances, unless you: • Decontaminate the equipment • Provide proof of decontamination YOU MUST CONTACT YOUR SUPPLIER FOR these questions, go to Section 4. ADVICE BEFORE YOU RETURN SUCH EQUIPMENT /0 SECTION 3 : LIST OK SUBSTANCES IN CONTACT WITH THE EQUIPMENT Substance name Chemical Precautions required (for example, use protective gloves, etc.) symbol Action required after spillage or human contact. 1 2 3 4 5 6 SECTION 4 : RETURN IN! ORMATION Reason for return and symptoms of malfunction: If you have a warranty claim: • who did you buy the equipment from ? • give the supplier's invoice number SECTION 5 : DECLARATION Print your name: Print your job title:_ Print your organization: Print your address: Telephone number: Dale of equipment delivery: _ I have made reasonable inquiry and I have supplied accurate information in this Declaration. I have not withheld any information. I have followed the Return of Edwards Equipment Procedure (HSl) on the previous page. Signed:_ TCU 40/80 Temperature Control Unit Date: 59 Legal notices, limitations and disclaimers For a period of twelve (12) months from the date of original shipment to Purchaser, the apparatus and each part of component manufactured be Edward's High Vacuum International (Edwards) is warranted to be free from functional defects in materials and workmanship. The foregoing warranty is subject to the condition that regular periodic maintenance and service be performed or replacements made in accordance with instructions provided by Edwards. The foregoing warranty shall not apply to any apparatus, part, or component that has been repaired other than by Edwards or an authorized Edwards representative or in accordance with written instructions provided by Edwards, that has been altered by anyone other than Edwards or that has been subject to improper installation or abuse, misuse, negligence, accident, or corrosion. Purchaser's sole and exclusive remedy under the above warranty is limited to, at Edward's option, repair or replacement of defective parts of components or return to Purchaser of the price of the apparatus. The defect must be promptly reported to Edwards or Purchaser must return the part or component with a statement of the observed deficiency no later than seven (7) days after the expiration date of the warranty to the address designated by Edwards, transportation charges prepaid. In the event that Edwards elects to refund the purchase price, the apparatus shall be the property of Edwards and shall be shipped to Edwards at Edward's expense. This Mechanical Warranty shall be void and the apparatus shall be deemed to be purchased AS IS in the event that the entire purchase price has not been paid within thirty (30) days of original shipment of apparatus. THERE ARE NO EXPRESS OR IMPLIED WARRANTIES THAT EXTEND BEYOND THE WARRANTY HEREIN ABOVE SET FORTH. THERE IS NO PARTICULAR WARRANTY OF MERCHANT ABILITY OR FITNESS FOR A PARTICULAR PURPOSE WITH RESPECT TO THE APPARATUS OR ANY PART OR COMPONENT THEREOF AND NO WARRANTY SHALL BE IMPLIED BY LAW. Items not of Edwards's manufacture but resold by Edwards are the products of other manufacturers and their warranty, if any, shall apply. THERE ARE NO WARRANTIES OF ANY KIND ON PRODUCTS OF OTHER MANUFACTURERS RESOLD BY EDWARDS EXCEPT THE WARRANTY OF TITLE. AND NO WARRANTIES SHALL BE IMPLIED BY LAW. THERE IN NOT EXPRESS OR IMPLIED WARRANTY OF MERCHANT ABILITY OR OF FITNESS FOR A PARTICULAR PURPOSE WITH RESPECT TO PRODUCTS OF OTHER MANUFACTURERS. In no event shall the Purchaser be entitled to any special, indirect, or consequential damages. 60 TCU 40/80 Temperature Control Unit MSDS (material safety data sheet) - "SUVA" HP62 MATERIAL SAFETY DATA SHEETS Du Pont Chemicals 6002FR Revised 15-JUL- 1993 Printed 16-DEC-1993 "SUVA" HP62" CHEMICAL PRODUCT/COMPANY IDENTIFICATION Material Identification "SUVA" is a registered trademark of DuPont. Corporate MSDS Number DUO05612 Company identification MANUFACTURER/DISTRIBUTOR DuPont 1007 Market Street Wilmington, DE 19898 PHONE NUMBERS Product Information Transport CHEMTREC: Medical Emergency 1 -800-441 -9442 1-800-424-9300 1-800-441-3637 COMPOSITION/INFORMATION ON INGREDIENTS Components Material CAS Number % PENTAFLUOROETHANE (HFC-125) 354-33-6 44 ETHNE, 1,1,1- TRIFLUORO- (HFC-143a) 420-46-2 52 811-97-2 ETHANE, 1,1,1,2 - TETRAFLUORO. (HFO-134a) 4 HAZARDS IDENTIFICATION # Potential Health Effects Inhalation of high concentrations of vapor is harmful and may cause heart irregularities, unconsciousness, or death. Intentional misuse or deliberate inhalation may cause death without warning, Vapor reduces oxygen available for breathing and is heavier than air. Liquid contact can cause frostbite. (Continued) TCU 40/80 Temperature Control Unit 61 HAZARDS IDENTIFICATION (Continued) HUMAN HEALTH EFFECTS: Overexposure to the vapors by inhalation may include temporary nervous system depression with anesthetic effects such as dizziness, headaches, confusion , incoordination, and loss of consciousness. Higher exposures to the vapors may cause temporary alteration of the heart's electrical activity with irregular pulse, palpitations, or inadequate circulation; or fatality from gross overexposure. Contact with the liquid may cause frostbite. Individuals with preexisting diseases of the central nervous or cardiovascular system may have increased susceptibility to the toxicity of increase exposures. Carcinogenicity Information None of the components present in this material at concentrations equal to or greater than 0.1% are listed by IARC, NTP, OSHA or ACGIH as a carcinogen. FIRST AID MEASURES First Aid INHALATION If high concentrations are inhaled, immediately remove to fresh air. Keep person calm. If not breathing, give artificial respiration. If breathing is difficult, give oxygen. Call a physician. SKIN CONTACT Flush skin with water for at least 15 minutes after excessive contact. Treat for frostbite if necessary by gently wanning affected area. Call a physician if irritation is present. EYE CONTACT In case of contact, immediately flush eyes with plenty of water for at least 15 minutes. Call a physician. INGESTION Ingestion is not considered a potential route of exposure. _ Notes to Physicians Because of possible disturbances of cardiac rhythm, catecholamine drugs, such as epinephrine, should only be used with special caution in situations of emergency life support. (Continued) 62 TCU 40/80 Temperature Control Unit FIRE FIGHTING MEASURES Flammable Properties Flash Point will not burn Method TOC Flammable limits in Air % by Volume LEL Not applicable UEL Not applicable Autoignition Not determined Fire and Explosion Hazards: Cylinders may rupture under fire conditions. Decomposition may occur. Potential Combustibility: "SUVA" HP62 is notflammable at temperatures up to 80 deg C (176 deg F) and at atmospheric pressure. Data are not available at higher temperatures and pressures. However, one of the components, HFC-143a is flammable. Another, HFC-134a, has been shown in tests to be combustible at pressures as low as 6o psig at ambient temperature when mixed with air at concentrations of 65 volume % air. Therefore, "SUVA" HP82 should not be mixed with air for leak testing. In general, it should not be used or allowed to be present with high concentrations of air above atmospheric pressures. Experimental data have also been reported which indicate combustibility of HFC-134a in the presence of certain concgntrations of chlorine. Extinguishing Media As appropriate for combustible in area. Fire Fighting Instructions f Cool cylinder with water spray or fog. Self-contained breath ng apparatus (SCBA) is required if cylinders rupture and contents are released under fire conditions. ACCIDENTAL RELEASE MEASURES Safeguards (Personnel) NOTE: Review FIRE FIGHTING MEASURES and HANDLING (PERSONNEL) sections before proceeding with clean-up. Use appropriate PERSONAL PROTECTIVE EQUIPMENT during clean-up. Accidental Release Measures Ventilate area, especially low or enclosed places where heavy vapors might collect. Remove open flames. Use self-contained breathing apparatus (SCBA) for large spills or releases. (Continued) ^^ TCU 40/80 Temperature Control Unit 63 HANDLING AND STORAGE Handling (Personnel) Avoid-breathing vapor. Avoid liquid contact with eyes and skin. Use with sufficient ventilation to keep employees exposure below recommended limits. Contact with chlorine or other strong oxidizing agents should also be avoided. See Fire and Explosion Data section. Storage Clean, dry area. Do not heat above 52 deg C (125 deg F). EXPOSURE CONTROLS/PERSONAL PROTECTION Engineering Controls Avoid breathing vapors. Avoid contact with skin or eyes. Use with sufficient ventilation to keep employee exposure below the recommended exposure limit. Local exhaust should be used if large amounts are released. Mechanical ventilation should be used in low or enclosed places.. Personal Protective Equipment Impervious gloves should be used to avoid prolonged or repeated exposure. Chemical Splash goggles should be available for use as needed to prevent eye contact. Under normal manufacturing conditions, no respiratory protection is required when using this product. Self-contained breathing apparatus (SCBA) is required if a large release occurs. Exposure Guidelines Applicable Exposure Limits PENTAFLUOROETHANE (HFC-125) PEL (OSHA) TLV (ACGIH) None Established None Established AEL * (Du Pont) 1000 ppm, 8 & 12 Hr. TWA ETHANE. 1, 1, l-TRIFLUORO-(HFC-143a) PEL (OSHA) None Established TLV AEL* ETHANE, PEL TLV (ACGIH) (DuPont) ^ None Established-. 1000ppm, 8&12Hr. TWA ' 1, 1, 1,2-TETRAFLUORO- (HFC-134a) (OSHA) None Established (ACGIH) None Established AEL • (Du Pont) WEEL (AIHA) 1000 ppm, 8 & 12 Hr. TWA 1000 ppm, 8 Hr. TWA * AEL is DuPont's Acceptable Exposure Limit. Where governmental imposed occupational exposure limits which are lower than the AEL are in effect, such limits shall take precedence. (Continued) 64 TCU 40/80 Temperature Control Unit PHYSICAL AND CHEMICAL PROPERTIES Physical Data Boiling Point Vapor Pressure %Volatiles -46.7 C (-52, 1 F) Average 182.1 psia at 25 deg C (77 deg F) 100WT% Evaporation Rate (CL4 = 1) Greater than 1 Solubility in Water Not determined Odor Form Color Specific Gravity slight ethereal Liquefied gas Clear, colorless 1.05 @25C(77F) STABILITY AND REACTIVITY Chemical Stability Material is stable. However, avoid open flames and high temperatures. Incompatibility with Other Materials Incompatible with active metals, alkali or alkaline earth metals - powdered Al, Zn, Be, etc. Polymerization Polymerization will not occur. Other Hazards Decomposition Decomposition products are hazardous. "SUVA" HP62 can be decomposed by high temperatures (open flames glowing metal surfaces, etc) forming hydrochloric and hydrofluoric acids, and possibly carbonyl halides. TOXICOLOGICAL INFORMATION Animal Data The blend is untested. HFC-125 Inhalation 4-hour ALC: >709,000 ppm in rats Single high inhalation exposures caused decreased activity, labored breathing and weight loss. Cardiac scnsitization occurred in dogs exposed to concentrations of 10-30% in air and given an intravenous epinephrine challenge; no cardiac sensitization occurred at a concentration of 7.5%. No animal data are available to define carcinogenic hazards. HFC-125 did not cause cmbryotoxicity or developmental toxicity in rats or rabbits at inhalation concentrations up (continued) TCU 40/80 Temperature Control Unit 65 TOXICOLOGICAL INFORMATION (Continued) to 50,000 ppm. HFC-126 does not produce genetic damage in bacterial or mammalian call cultures or when tested in animals. HFC-134a Inhalation 4-hour LC50: 567,000 ppm in rats A 5 or 10 second spray of vapor produced very slight eye irritation and a 24-hour occlusive application produced slight skin irritation in rabbits. The compound is not a skin sensitizer in animals. No toxic effects were seen in animals from exposures by inhalation to concentrations up to 81,000 ppm. Lethargy and rapid respiration were observed at a vapor concentration of 305,000 ppm and pulmonary congestion, edema, and central nervous system effects occurred at a vapor concentration of 750,000 ppm. Cardiac sensitization occurred in dogs at 75,000 ppm following an epinephrine challenge. No effects in animals occurred from repeated inhalation-exposures to 99,000 ppm for two weeks or higher concentrations to 50,000 ppm for three months. Repeated exposures to higher concentrations caused transient tremors, incoondination and some organ weight changes. Long-term exposures produced increased testes weights and increased urinary fluoride levels. No adverse effects were observed in male and female rats fed diets containing 300 mg/kg/day of HFC-134a for 52 weeks. Animal testing indicates that this compound does not have carcinogenic or mutagenic effects. Inhalation of 50 000 ppm for two years caused an increase in benign testicular tumors in male rats. No effects were observed at lower concentrations. The tumors were late-occurring and were judged not to be life-threatening. Embryotoxic activity has been observed in some animal tests but only at high concentrations that were also maternally toxic. HFC-143a Inhalation 4-hour LC50: >540,000 ppm in rats Single exposures by inhalation to 500,000 ppm caused anesthesia but no mortality at 540,000 ppm. Cardiac sensitization occurred in dogs at 600,000 ppm following an intravenous challenge with epinephrine. Two, 4-week inhalation have been conducted. In the first study, pathological changes in the testes were observed at all exposure concentrations; no effects were observed in females. The testicular effect was considered related to the method used to expose the rats to HFC-143a. In the second study using the same exposure concentrations, no effects were noted in males at any concentration. Data from a 90-day study revealed no effects in male or female rats at exposures up to 40,000 ppm. Long-term exposure caused significantly decreased body weights in male rats fed 300 (continued) 66 TCU 40/80 Temperature Control Unit TOXICOLOGICAL INFORMATION (Continued) mg/kg for 52 weeks, but there was no effect on mortality. Tests in rats demonstrated no carcinogenic activity when administered orally 300 mg/kg/day for 52 weeks and observed for an additional 73 weeks. Tests in bacterial cell cultures demonstrated mutagenic activity, but the compound did not induce transformation of mammalian cells in culture or in the whole animal. Tests in animals demonstrate no developmental toxicity. ECOLOGICAL INFORMATION Ecotoxicological Information Aquatic Toxicity HFC 143a 96-hour LC50, rainbow trout: >40 mg/L DISPOSAL CONSIDERATIONS Waste Disposal Comply with Federal, State, and local regulations. Reclaim by distillation or remove to a permitted waste disposal facility. TRANSPORTATION INFORMATION Shipping Information D/MO Proper Shipping Name LIQUEFIED GAS, N.O.S. (CONTAINS PENTAFLUORDETHANE AND TETRAFLUOROETHANE) Hazard Class 2.2 UN No. 1956 DOT/IMO Label NON-FLAMMABLE GAS Shipping Containers Tank Cars, Cylinders Ton Tanks REGULATORY INFORMATION US Federal Regulations TSCA Inventory Status Reported/Included. TITLE III HAZARD CLASSIFICATIONS SECTIONS 311,312 TCU 40/80 Temperature Control Unit (Continued) 67 REGULATORY INFORMATION(Continued) Acute: No Chronic: No Fire: No Reactivity: No Pressure: yes LISTS: SARA Extremely Hazardous Substance No CERCLA Hazardous Material No SARA Toxic Chemicals No OTHER INFORMATION NFPA, NPCA-HMIS NPCA-HMIS Rating Health 1 Flammability 0 Reactivity 1 Personal Protection rating to be supplied by user depending on use conditions. Additional Information HFC-125 and HFC 143a are TSCA listed, and are controlled by a TSCA Section 5 Consent Order. The date in this Material Safety Data Sheet relates only to the specific material designated herein and does not relate to use in combination with any other material or in any process. Responsibility for MSDS DuPont Chemicals. Address Engineering & Product Safety P. 0. Box S0709, Chestnut Run Wilmington, DE 19880-0709 Telephone 302-999-4946 # Indicates updated section. End of MSDS <$# TCU 40/80 Temperature Control Unit NOTES: Edwards International EUROPE AMERICAS PACIFIC UNITED KINGDOM USA JAPAN Edwards High Vacuum International Manor Royal Edwards High Vacuum International One Edwards Park 301 BaltardvaleSl Wilmington, MA 01887 Tel: 508 658 5410 Fax: 508 658 7969 Nippon Edwards KK Edwards High Vacuum International Sierra Technology Center Building A Suite 120 3100 Alvin Devane Boulevard Austin, TX 78741 Tel: 512 389 3883 Fax: 512 389 3890 Nippon Edwards KK Esaka Yodo Building 5F Crawlcy West Sussex RHI0 2LW Tel: (01293)528844 Fax:(01293)533453 Shuwa Shiba Park Building A-3F 2-4-1 Shibakoen Minato-ku Tokyo 105 Tel: 3 5470 6530 Fax: 3 5470 6521 BELGIUM Edwards Bergensesteenweg 709 BI600 Sint-Pieters-Leeuw Tel: 2 360 3671 Fax: 2 360 3591 16-34Enoki-cho Suita-shii Osaka 564 Tel: 6 384 7052 Fax: 6 384 7504 FRANCE Nippon Edwards KK 508-1 Yomogi-machi Kumamoto-shi Edwards SA 125 Avenue Louis Roche 92238 Germevilliers. Cedex Tel: (1)4798 2401 Fax: (1)4798 4454 Edwards High Vacuum International 550 Sycamore Drive Milpitas,CA 95035 Tel: 408 946 4707 Fax: 408 946 8510 GERMANY CANADA HONG KONG Edwards Hochvakuum GmbH Poslfach 1 409 D3S004 Marburg Tel: 6420 82410 Edwards High Vacuum 3375 North Service Road Edwards High Vacuum (Pacific) 1308 Tower II World Trade Square 123 Hoi Bun Road Kwun Tong, Kowlocn Hong Kong Tel: 796 9111 Fax: 796 9095 Kumamoto 861-55 Tel: 96 326 7300 Fax: 96 326 7302 Fax: 6420 82411 Units B2/B3 Burlington Ontario, L7N3G2 Tel: 905 336 9119 Fax: 905 845 4924 ITALY BRAZIL REPUBLIC OF KOREA Edwards Alto Vuoto SpA Via Carpaccio 35 Edwards Alto Vacuo Songwon Edwards Ltd Sun In Building 738-41 Panpo-Dong Sochu Gu, Seoul Tel: 2515 18)1 Fax:2 515 1818 20090 Trczzano SulNaviglio Milano Tel: 2 4840 2258 Fax: 2 4840 1638 Rua Benardo Wrona, 222 Bairro do LimSo 02710 -Sao Paulo -SP Tel: 11 858 0377 Fax: 11 265 2766 SWITZERLAND TAIWAN Edwards (ECH) Posi fiich Zimmerman Scientific Co Ltd CH-4l04Obrwil-Basel Tel: 61 401 4344 Fax: 61 401 4352 EDWARDS Edwards High Vacuum International is port of BOC Limited The stripe symbol is a trade mark of The BOC Group Golden Dragon Building 8FLNol27 Fu-Shin South Road Section 1, Taipei Tel: 2 752 7075 Fax: 2 771 9415
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