Tmh520tmu

User Manual: tmh520tmu

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Operating Instructions

TMH 520 / TMU 520
TMH 520 P / TMU 520 P
Turbomolecular Drag Pumps

PM 800 309 BE/J (0008)

INDEX
Page

Page

Safety Precautions................................... 3

Operations................................................. 9

1.1.

For Your Orientation ............................................................ 3

4.1.

Before Switching ON .......................................................... 9

1.2.

Pictogram Definitions ......................................................... 3

4.2.

Switching ON ....................................................................... 9

Understanding The Pumps
TMH 520 / TMU 520 .................................. 4

4.3.

Heating (Only Pumps With Heating Sleeves) ................. 9

4.4.

Switching OFF And Venting ............................................... 9

2.1.

Main Features ...................................................................... 4

4.5.

Shutting Down For Longer Periods .................................. 9

2.2.

Differences Between The Pump Types........................... 4

Installation................................................ 5

What To Do In Case
Of Breakdowns ? .................................... 10

3.1.

Preparations For Installation............................................. 5

3.2.

Assembling The Pump,
Connecting The High Vacuum Side.................................. 5

Maintenance........................................... 11

6.1.

Changing The Lubricant Reservoir................................. 11

Fitting The Splinter Shield.................................................. 6

Service..................................................... 12

3.3.

Connecting The Fore-Vacuum Side ................................. 6

3.4.

Connecting The Cooling Unit............................................. 7

Technical Data........................................ 13

8.1.

Dimensions ......................................................................... 13

Accessories ............................................ 14

Cooling Water From The Mains ........................................ 7
Cooling With The Recycled
Water Cooling Unit TZK (Accessory) ............................... 7
Air Cooling (Accessory) ..................................................... 7
3.5.
3.6.

Connecting The Venting Valves........................................ 8
Connecting The Electronic Drive Unit.............................. 8

3.7.

Connecting The Sealing Gas Valve .................................. 8

10. Spare Parts ............................................. 15
Declaration Of Contamination...................... 17
Manufacturer's Declaration ...........(last page)

1. Safety Precautions
☞ Read and follow all the instructions in this manual.
☞ Inform yourself regarding:
– Hazards which can be caused by the pump;
– Hazards which can arise in your system;
– Hazards which can be caused by the medium being
pumped.
☞ Avoid exposing any part of your body to vacuum.
☞ Comply with all safety and accident prevention
regulations.
☞ Check regularly that all safety requirements are being
complied with.
☞ Do not operate the pump with open high vacuum flange.
☞ Do not carry out any unauthorised conversions or modifications on the pump.
☞ When returning the pump to us please note the shipping
instructions.
☞ Use at least four bracket screws to connect the high vacuum flange.
☞ Fix down the pump in accordance with the instructions on
installation.
☞ Do not disconnect the pump cable during operations.
☞ When the pump is open, disconnect the electronic drive
unit from the mains.
☞ If a heater is in use temperatures of up to 120 °C can be
present in the area of the high vacuum flange. Take care to
avoid burns !
☞ During operations, temperatures of up to 65 °C can arise in
the lower part of the turbopump. Take care to avoid burns!
☞ Keep leads and cables well away from hot
surfaces ( > 70 °C).
☞ After switching off the pump, disconnect the electronic
drive unit only once the rotor is at rest.
☞ When working on the pump, only open the high vacuum
flange once the rotor is at rest.
☞ When using sealing gas, limit the pressure in the hose
connection to 2 bar via the overflow valve.

1.1. For Your Orientation
Instruction in the text
➡ Working instruction: Here, you have to do something.
Symbols used
The following symbols are used throughout in the
illustrations:
High vacuum flange
Fore-vacuum flange
Flutanschluß
Venting connection
Air cooling
Power connection
Sealing gas connection
Position numbers
Identical pump and accessory parts have the same position
numbers in all illustrations.

1.2. Pictogram Definitions
Danger of burns from touching hot parts.

Danger of an electric shock.

Danger of personal injury.

Modifications reserved.
Danger of damage to the pump or system.

Danger of injury from rotating parts.

2. Understanding The Pumps TMH 520 / TMU 520
2.1. Main Features
Turbomolecular Pumps TMH 520
1
2
3
4
5
6

High vacuum flange
Fore-vacuum flange
Cooling water connection
Venting connection
Power connection
Rubber feet (underside)

Cooling
Standard:
Water cooling.
Alternative:
Air cooling as an accessory.
Integrated excess temperature safety feature:
Electronic drive unit reduces
rotor rotation speed to zero.
Bearings
High vacuum side: Wear free permanent magnetic bearing.
Fore-vacuum side: Oil circulatory lubricated bearings with
ceramic balls.
Pumps for sealing gas operations
The pump types TMH 520 P and TMU 520 P (see the rating
plate) are designed for connection of an inert sealing gas.
The connection is described in Section 3.7.

Proper use
– The Turbomolecular Pumps TMH 520 / TMU 520 may only
be used for the purpose of generating vacuum.
– The turbopumps may only be used to pump those media
against which they are chemically resistant. For other
media the operator is required to qualify the pumps for the
processes involved.
– If the process produces dust, the maintenance intervals
must be specified accordingly and sealing gas must be
used (only for version ”P”).
– The Turbomolecular Pumps TMH 520 / TMU 520 may only
be operated with a PFEIFFER Electronic Drive Unit and
relevant cables.
– The turbopump must be connected to a backing pump as
per Section 3.3..
Improper use
Certain types of use are regarded as improper, e.g.:
– Pumping corrosive or explosive gases.
– Operating the pump where explosive processes are
involved.
– The pumping of gases and vapours which attack the
materials of the pumps.
– The pumping of corrosive gases without sealing gas.
– The pumping of condensating vapours.
– Operations involving impermissibly high levels of gas
loads.
– Operations with impermissibly high fore-vacuum pressure.
– Operations with improper gas modes.
– Operations involving too high levels of heat radiation
power (see Section 8. ”Technical Data”).
– Using accessories not named in this manual and/or not
authorised by the manufacturer.
Improper use will cause any rights regarding liability and
guarantees to be forfeited.

2.2. Differences Between The Pump Types
Feature

TMH 520

TMU 520

HV-flange

ISO-K

CF-F

HV seal

Elastomer

Metal

Attainable
final pressure

< 1 · 10-8 mbar

< 5 · 10-11 mbar
(with baking out)

(without baking out)

Abbreviations on the rating plate of the pump
Suffix ”P”:

Pumps with the designation TMH/TMU 260 P
have been designed for the connection
of purge gas (see Section 3.7.).

3. Installation
3.1. Preparations For Installation
Do not carry out any unauthorised conversions
or modifications on the pump.

– The maximum permissible rotor temperature of the pump is
90 °C. If the vacuum chamber or parts in the vacuum
chamber are heated must be fitted if necessary, suitable
shielding in the vacuum chamber before the turbopump
(constructional suggestions available on request).
– Only remove blank flanges on the high and fore-vacuum
side just before connecting.
– TMH 520/TMU 520 turbopumps are supplied with lubricant
reservoirs fitted and filled.
– Appropriate shielding must be provided (available on
request) if magnetic fields >5,0 mT are involved.
– If the pump is baked out, the heating sleeve and the body
of the pump must be insulated to prevent burning.
– In the event of a sudden standstill of the rotor, torques of
up to 2550 Nm can arise and these must be taken up by the
turbopump and frame. Pumps must be anchored as
follows:
– ISO flange with 4 bracket screws,
or
– CF flange with the complete set of M8 screws,
or
– Underside of the pump with 4 screws M5,
screws quality 8.8.

3.2. Assembling The Pump, Connecting The
High Vacuum Side
Important:
Maintain the utmost cleanliness when fitting all high vacuum
parts. Unclean components prolong the pumping time.
Use of the splinter shield
A splinter shield in the high vacuum flange protects the turbopump against foreign particles emanating from the vacuum
chamber but it does reduce the pumping speed of the pump
by approx. 15%.
For fitting please refer to "Fitting The Splinter Shield".
The high vacuum side can be flanged directly to the vacuum
chamber or via a bellows or a vibration compensator (please
see ”Accessories”).
Connecting via a bellows
If the high vacuum side is to be flanged via a bellows, the turbopump must be secured for example via the holes on the
underside of the turbopump must be secured for example via
the holes on the underside of the pump. The fastening must
be able to withstand the torque referred to in Section 3.1.

Connecting via a vibration compensator
The maximum permissible temperature at the
vibration compensator is 100 °C.

Where a vibration compensator is in use, a freely suspended
turbopump can be flanged onto the vacuum chamber.
Additional fastening is unnecessary.
Directly flanging the pump
Permissible turbopump installation positioning
11 Vacuum chamber

11
V

Maximum high vacuum flange axial loading
capacity 1000 N (corresponds to 100 kg).
No asymmetrical loading on the high vacuum
flange.

With horizontal pump installation and oil-sealed backing
pump (e.g. rotary vane pumps) the fore-vacuum flange of the
turbopump must be aligned vertically downwards (deviation
max. ± 20˚), otherwise the turbopump could become dirty.
Installation position with oil-sealed backing pump

V
20°

20°

No forces must be transmitted from the pipe
system to a pump which is anchored.
Support or suspend all piping leading to the
pump.

Fitting The Splinter Shield

3.3. Connecting The Fore-Vacuum Side

Highvacuum flanges DN 100 and DN 160
Insert the splinter shield in the high vacuum flange so that the
curvature of the grill faces outwards.
➡ Bend clamping lugs slightly outwards so that the splinter
shield will sit firmly in the high vacuum flange (preventing
noise).
➡ Insert splinter shield in the high vacuum flange with clamping lugs bent slightly inwards.
➡ Press splinter shield outer ring into the high vacuum
flange up to the stop limit.

Backing pump:
Recommended backing pump:

Connecting the backing pump
All fore-vacuum line connections: With normal small flange
components or screwed hose connections..
Exhaust gases from the backing pump must be
conducted away. Ensure the full width of the
fore-vacuum flange remains unhindered by
other components.

Inserting the splinter shield
12 Splinter shield
12a Clamping lug

Vacuum pressure ≤ 5 mbar
Oil free Diaphragm Pump
or rotary vane pump
from the PFEIFFER product
range (note installation
position of the turbopump,
see Section 3.2.).

The exhausted process gases and vapours can
represent a health hazard and can also be environmentally damaging.
Comply with all gas manufacture's safety
instructions.

12a

➡ Fit the vacuum safety valve in the fore-vacuum line (in
PFEIFFER rotary vane vacuum pumps already integrated).
This prevents vacuum chamber venting via the backing
pump.
➡ With rigid pipe connections: Fit bellows in the connecting
line to reduce vibration.
➡ Backing pump power connection: see operating
instructions for the electronic drive unit.
Connecting the backing pump
21 Backing pump
22 Vacuum safety valve
23 Suction line

DN 25 KF
G 1⁄4"
22

≤ 5 mbar

3.4. Connecting The Cooling Unit
The turbopumps are water cooled as standard.
Cooling water either
– From the mains or
– From Recycled Water Cooling Unit TZK with closed circuit.
As an accessory: Air cooling (with an ambient temperature
of <35 °C).

Cooling With The Recycled Water Cooling
Unit TZK (Accessory)
Connecting to the TZK
A dirt trap in the fore-line is not permissible.
All other steps: As for connection to the water mains.
Cooling with the Recycled Water Cooling Unit TZK
3 Cooling water connections
34 Cooling Water Monitor TCW 002 in the return line
35 Recycled Water Cooling Unit TZK

Cooling Water From The Mains
Cooling water must be filtered to prevent deposits forming in
the pump.
Minimum cooling water requirements:
Mechanically clean, optically clear, no turbidity, no sediment,
chemically neutral and temperature > dew point.

TZK
Minimum oxygen content
Maximum chloride content
Maximum carbonate hardness:
Maximum consumption of:
potassium permanganate:
Carbon dioxide
Ammonia:
pH-value:

max.
max.
max.

4
100
10

max.
10
absent
absent
7–9

Max. fore-line over pressure:
max.
Minimum flow rate at max. gas throughput:

mg/kg
mg/kg
° dH

mg/kg

Air Cooling (Accessory)
Air cooling only if ambient temperature
< 35 °C.
Ensure adequate air circulation and ventilation.

6
bar
50 l/h at 15 °C

Connecting to the water mains
➡ Fit dirt trap (accessory) in the fore-line.
➡ Using circlips, connect fore-line to one of the two cooling
water connections.
➡ Connect Cooling Water Monitor TCW 002 (accessory) in
the return line.
➡ Connect return line to the other cooling water connection
of the turbopump.
➡ Tighten all circlips and ensure hose lines are seated firmly.
➡ Tighten the hollow screws on the cooling water
connection to a torque of 20 Nm.

Fitting the air cooling
➡ Place turbopump (blank flanged to prevent damage to the
sealed surface) on its high vacuum flange.
➡ Unscrew rubber feet from the base of the pump. The fan
must be parallel to the axis fore-vacuum connection - venting connection (see illustration below).
➡ Screw air cooling to holder with 4xM5 screws and spring
washers onto the turbopump.
Fitting the air cooling
36 Fan
37 Holder
38 M5 screw and spring washers (4x)

Cooling from the water mains
3
31
32
33
34

Cooling water connections
Fore-line
Return line
Dirt trap
Cooling Water Monitor TCW 002

3
36
33

37
31
32

Power connection, air cooling
Please see the operating instructions, Electronic Drive Unit
TCP 380 or TCP 600.

3.5. Connecting The Venting Valves

Connecting the electronic drive unit to the turbopump

– Manual venting to atmospheric pressure:
With standard venting screw in the venting connection
(without additional venting valve).
– Automatic venting on switching off and power failure:
Fitting a venting valve (accessory).
Venting Valve

TSF 010

Control Unit Electronic
Drive Unit

Venting Procedure
After Switching Off Or
Power Failure

not
required

Immediate;
Venting valve
remains open

Independent

TSF 012

not
required

TCP 380/600

Delayed (venting
begins at approx.
20% of the rated rotation
speed); venting valve;
remains open

TVF 012

TCF/TCV
103

TCP 380/600

Delayed; adjustable
(with TCS 304)

50
51
52
53

Electronic Drive Unit TCP
Male multipoint connector
Connecting cable
Bayonet plug --> turbopump

50
51
53
52

3.7. Connecting The Sealing Gas Valve
Fitting the venting valves
See the operating instructions for the respective unit.
Where flange size DN 10-KF is involved, use Adapter
PM 033 737-T.
Connecting the venting valve

41
F
42
43
41
42
43
44

Valve control unit
Venting valve
Connection hose
Drying Unit TTV 001

Power connections
See the operating instructions for the respective unit.

3.6. Connecting The Electronic Drive Unit
Voltages of >100 V can be present on the open
electrical contacts on a running down pump.
There is danger of an electrical shock if the
contacts are touched.
Disconnect the plug to the electronic drive unit
only once the pump is completely at rest and the electronic
drive unit has been disconnected from the mains.
➡ Plug in connecting cable between the electronic drive unit
and the turbopump. For details please see the operating
instructions for the electronic drive unit.

The pump types TMH 520 P and TMU 520 P (see the rating
plate) are designed for connection of sealing gas.
To protect the turbopump, particulary where corrosive or dust
producing processes are involved, it is necessary to use sealing gas. Connection is made via the sealing gas valve (please
see "Accessories").
➡ Adjust the sealing gas volume (see operating instructions
for the sealing gas valve, PM 800 229 BN).
➡ Unscrew locking screw from sealing gas connection.
➡ Screw in sealing gas valve with seal.
➡ Remove sealing gas valve blank flange.
➡ Flange on hose nipple (DN 16 ISO-KF-10; accessory).
➡ Make hose connection from pressure reducer to sealing
gas valve.
Connecting the sealing gas valve
66
67
68
69
70

Sealing gas valve
Hose nipple
Hose connection
Pressure reducer
Gas canister

4. Operations
4.1. Before Switching ON

4.4. Switching OFF And Venting

Turbopump rotors rotate at high speed. When
the high vacuum flange is open there is a danger of injury and of objects falling into the
pump. Therefore never operate the pump with
open high vacuum flange.
➡ With water cooling: Open cooling water supply and check
flow.

4.2. Switching ON
➡ Switch on the turbopump with switch S1 on the electronic
drive unit.
The electronic drive unit switches (schematically)
S1 ON/OFF switch, turbopump
S2 ON/OFF switch, heating

– With air cooling the cooling fan of the electronic drive unit
is also switched on.
– When Pumping Station Control Unit TCS 303/304 is in use,
the turbopump, the backing pump and the recycled water
cooling unit (if fitted) are started at the same time.
Take care when pumping hazardous gases.
Comply with all the gas manufacturer's safety
instructions.

4.3. Heating (Only Pumps With Heating
Sleeves)
Heating turbopumps and vacuum chambers accelerates the
attainment of final pressures.
The heating period is dependent on the level of contamination
and the required final pressure. Heat for at least four hours.
➡ Switch on turbopump heating via switch S2 on the electronic drive unit.
High temperatures are generated when turbo
pump or vacuum chamber are baked out.
Contact with hot parts can cause burns, even
when the heating has been switched off.
Heating sleeves, pump casing and vacuum
chamber should all be insulated when fitting.
Do not touch heating sleeves, pump casing and vacuum
chambers during baking out.

To avoid contamination occurring when switching off, the
pump should be vented with dry venting gas before shutdown.
➡ Close the vacuum safety valve in the fore-vacuum line.
➡ Switch off both turbopump and the electronic drive unit at
the same time with switch S1.
➡ Open locking screw or venting valve in the venting
connection (with PFEIFFER venting valves the turbopump is
vented automatically).
➡ With water cooling: Shut off water supply.

4.5. Shutting Down For Longer Periods
Vacuum pumps are sometimes used to pump
aggressive or hazardous gases. There is a danger of personal injury resulting from coming into
contact with process gases. Before removing a
turbopump from the system, first:
– Vent the turbopump with a neutral gas or dry air.
– Ensure that there is no residual process gas in the system
nor in the feeder lines.
If the turbopump is to be shut down for more than a year:
➡ Remove turbopump from the system.
➡ Change the lubricant reservoir (see Section 6.1.).
Please note: Lubricant TL 011 must no longer be used after
2 years of non operations.
➡ Close high vacuum flange and evacuate pump via the forevacuum flange.
➡ Close the high vacuum flange and evacuate the turbopump
via the fore-vacuum flange.
➡ Vent turbopump via the venting connection with nitrogen
or dry air.
➡ Close fore-vacuum connection by blank flanging.
➡ Place the pump vertically on its rubber feet.
➡ In rooms with moist or aggressive atmospheres, the turboypump must be air-sealed in a plastic bag together with a
bag of dessicant, e.g silicagel.
Important:
If the pump has been shut down for 3 years a bearing change
must be carried out (please get in touch with PFEIFFER
service).

5. What To Do In Case Of Breakdowns?
Problem

Possible Cause

Remedy

Pump doesn't start

• Power supply interrupted

• Check fuse in the
electronic drive unit
• Check plug contacts on the pump
and the electronic drive unit
• Check supply lines

Pump doesn't attain rated
rotation speed;
Pump cuts out during operations

• Fore-vacuum pressure to high
• Leak or too much gas

•
•
•
• Rotor stiff because bearing defective •
• Run-up phase in the Electronic
Drive Unit TCP too short
• Thermal overloading caused by
– Water cooling: Flow not safe
guarded
– Air cooling: Air supply restricted
– Fore-vacuum pressure too high
– Ambient temperature too high

Pump doesn't attain final pressure

Unusual operating noises

• Pump dirty

Check backing pump function
Check seals
Seek leak and repair
Check bearings (noisy ?):
Request PFEIFFER to replace

• Extend run-up phase setting time

•
•
•
•

Ensure free flow
Ensure adequate air supply
Reduce fore-vacuum pressure
Reduce ambient temperature

• Leak in vacuum chamber,
lines or pump

• Bake out pump
• If seriously contaminated:
Request PFEIFFER to clean
• Seek leak, starting with vacuum chamber
• Repair leak

• Bearings damaged
• Rotor damaged
• Splinter shield (if fitted)
not seated firmly

• Inform PFEIFFER of need for repair
• Inform PFEIFFER of need for repair
• Check splinter shield: Press clamping
lugs away from each other (see Section 3.2.)

6. Maintenance
Important:
No liability for personal injury nor material damage will be
accepted for damages and operational interruptions which
have been caused by improper maintenance; in addition, all
guarantees become invalid.
– You can change the lubricant reservoir yourself (see
Section 6.6.).
– Your pump can be cleaned on the spot if it is not very dirty.
Your local PFEIFFER Center can advise you regarding
cleaning procedures and any other maintenance and service
work with might be necessary.

6.1. Changing The Lubricant Reservoir
The lubricant reservoir should be replaced at least once a
year. Where extreme operating conditions or unclean processes are involved, the replacement interval should be checked
with your PFEIFFER Service Center.
➡ Switch off the turbopump, vent to atmospheric pressure
(see Section 4.4.) and allow to cool as necessary.
➡ If necessary, remove the turbopump from the system.
➡ Using a big screwdriver, unscrew the locking cover 90 on
the underside of the pump; take care with the O-ring 91.
➡ With the help of two screwdrivers, lever out the lubricant
reservoir.

Detaching the locking cover and removing the lubricant reservoir
90
91
92
93

Locking cover
O-ring
Lubricant reservoir
O-ring

90
91
92

93
92

➡ Remove contamination on the pump and locking cover
using a clean, fluff-free cloth.
➡ Press in new lubricant reservoir 92 up to the O-ring 93 in
the pump. The lubricant reservoir comes filled with
Lubricant TL 011.
➡ Screw in locking cover 90 with O-ring 91. The lubricant
reservoir is brought into the correct axial position by the
locking cover.

Lubricant reservoirs can contain toxic
substances from the medium pumped. Lubricant
reservoirs must be disposed of in accordance
with the respective regulations.
Safety instructions data sheet on request.

7. Service
Do make use of our service facilities
In the event that repairs are necessary a number of options
are available to you to ensure any system down time is kept
to a minimum:
– Have the pump repaired on the spot by our PFEIFFER
Service Engineers;
– Return the pump to the manufacturer for repairs;
– Replace with a new value pump.
Local PFEIFFER representatives can provide full details.
Before returning:
➡ Please attach a clearly visible notice "Free of harmful substances" (both on the unit and also on the delivery note
and any accompanying letters).
"Harmful substances" are defined in the current, local regulations; in the U.S.A. as "materials in accordance with the Code
of Federal Regulations (CFR) 49 Part 173.240 Definition and
Preparation".
We will carry out the decontamination and invoice this work
to you if you have not attached this note. This also applies
where the operator does not have the facilities to carry out
the decontamination work. Units which are contaminated
microbiologically, explosively or radioactively cannot be
accepted as a matter of principle.
Fill out the contamination declaration
➡ In every case the "Contamination Declaration" must be
completed diligently and truthfully.
➡ A copy of the completed declaration must accompany the
unit; any additional copies must be sent to your local
PFEIFFER Service Center.
Please get in touch with your local PFEIFFER representatives
if there are any questions regarding contamination.

Decontaminate units before returning or possible disposal. Do not return any units which are
microbiologically, explosively or radioactively
contaminated.

Returning contaminated units
If contaminated have to be returned for maintenance/repair,
the following instructions concerning shipping must be
followed:
➡ Neutralise the pump by flushing with nitrogen or dry air.
➡ Seal all openings to the air.
➡ Seal pump or unit in suitable protective foil.
➡ Ship units only in appropriate transport containers.
Please note:
Repair orders are carried out according to our general conditions of sale and supply. If repairs are necessary, please send
the pump to your nearest PFEIFFER Service Center.
Contact addresses and telephone hotline
Contact addresses and telephone numbers can be found on
the back cover of these operating instructions.

8. Technical Data
Feature

Unit

Connection nominal diameter
Inlet
Outlet
Electronic Drive Unit
Final pressure,
backing pump

TMH 520
TMU 520

DN 100 ISO-K
DN 100 CF-F
DN 25 ISO-KF
G 1/4“

DN 160 ISO-K
DN 160 CF-F
DN 25 ISO-KF
G 1/4“

mbar

Pumping speed for
Nitrogen N2
Helium He
Hydrogen H2

l/s
l/s
l/s

Compression ration for
N2
He
H2
Max. fore-vacuum pressure
N2
He
H2
Max. gas throughput 1)
N2
He
Final pressure2)
with rotary vane vacuum pump
with diaphragm vacuum pump

Permissible magnetic field
Weight

<5
90
10,5

300
400
400

500
500
480

> 10 12
5 · 10 7
5 · 10 6

mbar
mbar
mbar

16
14
7

mbar l/s
mbar l/s

3
4

mbar
mbar

5 · 10-11
5 · 10-11

1/min
1/min

50000
33000

7/5

min

Cooling type, standard
Max. cooling water requirements
with water at 15 °C3)
l/h
Cooling water temperature
˚C
Air cooling
Permissible ambient
temperature with air cooling
˚C
Heating power consumption
Noise level
Lubricant

DN 160

TCP 380/TCP 600

Max. permissible rotor
temperature
°C
Permissible heat radiation power W

Nominal rotation speed
Stand-by rotation speedl
Run-up time (up to 90% of the
rated rotation speed
with TCP 380/TCP 600)

8.1. Dimensions

W
dB (A)

DN 100

water
50

50
5 - 25
option
0 - 35

100
< 50

100
< 50
TL 011

mT
kg

5,0
12,5

5,0
13

1) Measured with rotary vane vacuum pump 1,5 m3/h,
higher gas throughputs with reduced rotation speed.
2) In accordance with DIN 28 428 the final pressure of a
turbomolecular pump is that pressure which is attained in
a measuring dome 48 hours after baking out.
3) With max. gas throughput.

Only pump types TMH 520 P / TMU 520 P
(see the rating plate).

9. Accessories
Description
Electronic Drive Unit
Connecting cable
Turbopump - TCP 380
Turbopump - TCP 600
Heating sleeve
Vibration compensator,

TCP 380
TCP 600

TMH
TMU
TMH
TMU

Splinter shield
Protective grill
Sealing ring for

TMH

Collar flange with retaining ring TMH
CU seal (10 pieces),

TMU

Set of screws,

TMU

Size

Number

Comments/
Operating instructions

100 - 240 V; 50/60 Hz
100 - 240 V; 50/60 Hz

PM C01 490
PM C01 320

PM 800 188 BN
PM 800 234 BN

3m
3m
115 V/230 V
DN 100 ISO-K
DN 100 CF-F
DN 160 ISO-K
DN 160 CF-F
DN 100
DN 160
DN 100
DN 160
DN 100 ISO-K
DN 160 ISO-K
DN 100 ISO-F
DN 160 ISO-F
DN 100 CF
DN 160 CF
DN 100 CF
DN 160 CF

PM 011 232 -X
PM 031 803 -T
PM 043 445 -T
PM 006 459 AX
PM 006 488 -X
PM 006 492 -X
PM 006 493 -X
PM 006 125 AX
PM 006 771 -X
PM 006 596 -R
PM 006 823
PF 303 110 -T
PF 303 116 -T
PF 307 110 -T
PF 307 116 -T
PF 501 410 -T
PF 501 416 -T
PF 505 003 -T
PF 505 003 -T

Other lengths on request
Other lengths on request)

205, 220, 380, 400, 415 V;
50/60 Hz
100 - 240 V; 50/60 Hz
208 - 415 V; 50/60 Hz

PM C01 551
PM C01 537
PM C01 537

115 V
230 V

PM Z01 206
PM Z01 205

PM 800 205 BN
PM 800 192 BN
(Only with thermistor
print PM 021 721-X)
PM 800 263 BN

DN 10 ISO-KF
DN 16 ISO-FKF-10

PM Z01 142
PF 144 020

PM 800 229 BN

110 V; 50/60 Hz
220 V; 50/60 Hz
240 V; 50/60 Hz

PM C00 131
PM C00 130
PM C00 132

PM 800 133 BN

R 3/8”
230 V; 50 Hz
230 V; 50/60 Hz
115 V; 50/60 Hz

PM 006 802-T
P 4161 300 2R
PM Z01 245
PM Z01 221
PM Z01 222

PM 800 369 BN

110/220 - 240 V; 50/60 Hz

PM C01 356

PM 800 196 BN

110/220 - 240 V; 50/60 Hz

PM C01 366

PM 800 196 BN

G 1/8”
DN 10 ISO-KF

PM Z01 082
PM Z01 080

PM 800 126 BN

G 1/8”
DN 10 ISO-KF

PM Z01 087
PM Z01 085

PM 800 126 BN

110 V; 60 Hz, G 1/8”
110 V; 60 Hz, DN 10 ISO-KF
220 V; 50/60 Hz, G 1/8”
220 V; 50/60 Hz, DN 10 ISO-KF
240 V; 50/60 Hz, G 1/8”
240 V; 50/60 Hz, DN 10 ISO-KF
G 1/8”
DN 10 ISO-KF

PM Z01 110
PM Z01 017
PM Z01 111
PM Z01 010
PM Z01 112
PM Z01 016
PM Z01 106
PM Z01 105
PM Z00 121

PM 800 032 BN

Pumping Station Controller
TCS 130
TCS 304 R
TCS 304 R
Fore-Vacuum Safety Valve TVV 001
Sealing gas valve
(only for pump types TMH/TMU 520 P)
Hose nipple for the sealing gas valve
Components for cooling
Cooling Water Monitor

TCW 002

Connection component set for the
TCW 002
Dirt trap
Recycled Water Cooling Unit TZK 400
Component set for the air cooling
Components for venting
Venting Control Unit
TCF 103
Venting and Valve Control Unitt
TCV 103
Venting valve,:
open after pressure equalisation:
(only with TCF 103 or TCV 103)
TVF 012
Venting valve, closed after
pressure equalisation:
TVF 012
Mains Power Failure Venting Unit
TSF 010

Venting Valve

TSF 012

Drier
(filled with zeolite)
Venting flange

TTV 001

DN 10 ISO-KF

PM 033 737-T

PM 800 168 BN
PM 800 022 BN

Order Quantity

10. Spare Parts
Pos.

Description

Pieces

Size

Number

Comments

Ordering Quantity

Spare Parts TMH/TMU 520

6
16
17
91
92

Set of seals

Rubber feet
USIT-ring
QUAD-ring
O-ring
Lubricant reservoir

4
4
1
1
1

PM 063 176-T
U 12,7/18x1,5
VI 10,82x1,78
Vi 38x3

P 3695 700 ZE
P 3529 142
P 4081 630 C
P 4070 621 PV
PM 063 265-T

Spare Parts, Air Cooling
Air cooling set
36

Fan

36a
36b

Finger protector
Buffer

1
1
1
1
2
4

230 V; 50/60 Hz
115 V; 50/60 Hz
230 V
115 V

PM Z01 221
PM Z01 222
P 5099 251-R7
P 5099 251-R1
P 5099 251 Z4
P 3695 705 LB

When ordering accessories and spare parts please be sure to
state the full part number. When ordering spare parts please
state additionally the unit type and unit number (see rating
plate). Please use this list as an order form (by taking a copy).

Spare parts TMH 520/TMU 520

36b
36

36
36a

Declaration of Contamination of Vacuum Equipment and Components
The repair and/or service of vacuum components will only be
carried out if a correctly completed declaration has been
submitted. Non-completion will result in delay.

The manufacturer could refuse to accept any equipment
without a declaration.

This declaration can only be completed and signed by authorised and qualified staff:
1. Description of component:

2. Reason for return:

- Equipment type/model: _________________________

_____________________________________________

- Code No.:

__________________________

_____________________________________________

- Serial No.:

__________________________

_____________________________________________

- Invoice No.:

__________________________

_____________________________________________

- Delivery Date:

__________________________

_____________________________________________

3. Equipment condition

4. Process related contamination

- Has the equipment been used?
yes ❐
no ❐

of equipment
- toxic

yes ❐ no ❐

- What type of pump oil was used?
___________________________________________

- corrosive

yes ❐ no ❐

- microbiological hazard*)

yes ❐ no ❐

- Is the eqipment free from potentially harmful
substances?
yes ❐
(go to section 5)
no ❐
(go to section 4)

- explosive*)

yes ❐ no ❐

- radioactive*)

yes ❐ no ❐

- other harmful substances yes ❐ no ❐

*) We will not accept delivery of any equipment that has been radioactively or microbiologically contaminated without written
evidence of decontamination!
Please list all substances, gases and by-products which may have come into contact with the equipment:
Tradename
Product name
Manufacturer

Chemical name
(or Symbol)

Danger class

Precautions associated
with substance

Action if spillage or human
contact

1.
2.
3.
4.
5.
5.

Legally Binding Declaration
I hereby declare that the information supplied on this form is complete and accurate. The despatch of equipment will be in
accordance with the appropriate regulations covering Packaging, Transportation and Labelling of Dangerous Substances.
Name of Organisation: _______________________________________________________________________________
Address:

_____________________________________

Post code: _____________________________________

Tel.:

______________________________________________________________________________________

Fax:

_____________________________________

Name:

______________________________________________________________________________________

Telex: ________________________________________

Job title:

______________________________________________________________________________________

Date:

_____________________________________

Company stamp: ________________________________

Legally binding signature: _____________________________________________________________________________
33

Herstellererklärung
Manufacturer´s Declaration
im Sinne folgender EU-Richtlinien:
pursuant to the following EU directives:

- Maschinen/Machinery 98/37/EG
- Elektromagnetische Verträglichkeit/Electromagnetic Compatibility
89/336/EWG
- Niederspannung/Low Voltage 73/23/EWG
Hiermit erklären wir, daß das unten aufgeführte Produkt zum Einbau in eine Maschine bestimmt ist und
daß deren Inbetriebnahme so lange untersagt ist, bis festgestellt wurde, daß das Endprodukt den
Bestimmungen der EU-Richtlinie 98/37/EG, Anhang II B entspricht.
Wir bestätigen Konformität mit der EU-Richtlinie über elektromagnetische Verträglichkeit 89/336/EWG
und der EU-Niederspannungsrichtlinie 73/23/EWG.
We hereby certify that the product specified below is intended for installation in a machine which is
forbidden to be put into operation until such time as it has been determined that the end product is in
accordance with the provision of EU Directive 98/37/EEC, Annex II B.
We certify conformity with EU Electromagnetic Compatibility Directive 89/336/EEC and EU Low Voltage
Directive 73/23/EEC.
Produkt/Product:
TMH 520 / TMU 520
TMH 520 P / TMU 520 P

Angewendete Richtlinien, harmonisierte Normen und angewendete, nationale Normen:
Guidelines, harmonised standards, national standards in which have been applied:

EN 292-1, EN 292-2, EN 294,
EN 1012-2, EN 61010
Unterschrift/Signature:

Unterschriften:
(W. Dondorf)
Geschäftsführer
Managing Director

Pfeiffer-Vacuum GmbH
Emmeliusstrasse 33
35614 Asslar
Germany

Herst.I/2000

Your Vacuum Technology Experts in

Turbo Pumps
Rotary Vane Vacuum Pumps
Roots Pumps
Dry Vacuum Pumps
Leak Test Units
Valves
Flanges, Feedthroughs
Vacuum Measurement
Gas Analysis
System Technology
Service

Pfeiffer Vacuum Technology AG · Headquarters/Germany
Tel. +49-(0) 64 41-8 02-0 · Fax +49-(0) 64 41-8 02-2 02 · info@pfeiffer-vacuum.de · www.pfeiffer-vacuum.net

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