Hitachi Microscope And Magnifier S 3400N Users Manual Tobira52E_9011

2015-01-24

• FOREWORD
  • Scope of Instruction Manual
  • Acronyms
• GUARANTEE
• INSTALLATION AND AFTER-SALES SERVICE
• CAUTION ON DISPOSAL OF INSTRUMENT
  • Available Training Programs
  • Handling of Chemicals
  • Instruction Manual
• SAFETY SUMMARY
  • For Safe Handling
  • General Precautions on Safety
    • Before Using the System
    • Precautions on Using the System
    • Precautions in Installation, Maintenance, and Relocations
  • Warning Indicators
  • Caution Indicators
  • System Warning Labels
  • Precautions for Proper Operation
    • About Electricity
    • Handling Volatile Solvents
    • Third Party’s Industrial or Proprietary Rights
    • Laser Light Hazard
    • Harmful Chemicals
    • Backup of Important Data
    • About Computer Applications Software
    • Protection against Computer Viruses
    • About Changes in Computer Settings
    • OS Operation during S-3400N SEM Operation
    • USB Devices
    • Network Connection
    • Using Other Windows Applications
    • Personal Computer (PC)
    • Transportation and Relocation of Instrument
    • Ambient Temperature and Humidity
• Additional Information of PC Setting
  • 1. Outline
  • 2. Setting of Security Center
    • 2.1 Firewall
    • 2.2 Automatic Updates
    • 2.3 Virus Protection
  • 3. Other setting
    • 3.1 Login User Name
    • 3.2 Setting of Display Properties
    • 3.3 Setting of Hard disk drive
    • 3.4 Setting of Taskbar
    • 3.5 Setting of BIOS
• Table of Contents
• 1. SPECIFICATIONS AND INSTALLATION REQUIREMENTS
  • 1.1 Specifications
    • 1.1.1 Resolution
    • 1.1.2 Magnification
    • 1.1.3 Electron Optical System
    • 1.1.4 Specimen Goniometer Stage
    • 1.1.5 Evacuation System
    • 1.1.6 Imaging Function
    • 1.1.7 Safety Equipment
    • 1.1.8 Size and Weight
  • 1.2 Installation Requirements
    • 1.2.1 General
    • 1.2.2 Room Temperature, Humidity and Altitude
    • 1.2.3 Line Power Requirement
    • 1.2.4 Grounding Terminal
    • 1.2.5 Stray Magnetic Field
    • 1.2.6 Vibrations
    • 1.2.7 Power Line Noise and Electric Field Noise
    • 1.2.8 Disturbance by Sound Waves
    • 1.2.9 Electro-Magnetic Compatibility
    • 1.2.10 Site Requirements
  • 1.3 Customer-supplied Items
• 2. FUNCTIONS
  • 2.1 Control Knobs and Switches on Main Unit
    • 2.1.1 Main Unit
    • 2.1.2 Electron Optical Column
    • 2.1.3 Specimen Stage (Type I)
    • 2.1.4 Specimen Stage (Type II)
    • 2.1.5 EVAC Panel
    • 2.1.6 Evacuation System
    • 2.1.7 System Power Distribution Board
  • 2.2 Control Knobs and Switches on Display Unit
    • 2.2.1 Display Console
    • 2.2.2 PC (Personal Computer)
    • 2.2.3 Manual Operation Panel
    • 2.2.4 Mouse and Trackball
  • 2.3 Graphical User Interface (GUI)
    • 2.3.1 Starting the PC and Logging in the S-3400 Program
    • 2.3.2 S-3400N SEM Main Window
    • 2.3.3 Control Arrangement on the Window
    • 2.3.4 Menus
    • 2.3.5 Popup Menu
    • 2.3.6 Control Panel
      • 2.3.6.1 Functional Windows on the Control Panel
      • 2.3.6.2 Electron Gun Control Unit
      • 2.3.6.3 Scan Control Windows
      • 2.3.6.4 Auto Control
      • 2.3.6.5 Magnification Control
      • 2.3.6.6 Capture Control
      • 2.3.6.7 Image Recording Control
      • 2.3.6.8 EVAC/AIR Control
      • 2.3.6.9 Stage Control
      • 2.3.6.10 Extension for Dual Screen Mode
    • 2.3.7 Operation Panel
      • 2.3.7.1 ELECTRON BEAM Window
      • 2.3.7.2 Focusing Position (WD) WORKING DISTANCE Window
      • 2.3.7.3 VACUUM MODE Window
      • 2.3.7.4 SCAN MODE Window
      • 2.3.7.5 CONDITION LOAD/SAVE Window
      • 2.3.7.6 SCREEN MODE Window
      • 2.3.7.7 DETECTOR Window
      • 2.3.7.8 IMAGE SHIFT Window
      • 2.3.7.9 R.ROTATION Window
      • 2.3.7.10 SIGNAL PROCESSING Window
      • 2.3.7.11 DATA ENTRY Window
      • 2.3.7.12 TILT COMPENSATION Window
      • 2.3.7.13 Other
    • 2.3.8 Mouse Operation on the Scanning Image
      • 2.3.8.1 Exchanging Mouse Control Functions
      • 2.3.8.2 Focus/Stigma/Contrast/Brightness Adjustment
      • 2.3.8.3 Stage and Image Shift Tools
    • 2.3.9 Setup Dialog Window
      • 2.3.9.1 Optics Tab
      • 2.3.9.2 Image Tab
      • 2.3.9.3 Record Tab
      • 2.3.9.4 OP. Cond Tab
    • 2.3.10 Captured Image Window
    • 2.3.11 SEM Data Manager Window
    • 2.3.12 Alignment Dialog Window
    • 2.3.13 CD Measurement Dialog Window (option)
    • 2.3.14 Login Setting Dialog Window
    • 2.3.15 Oblique Dialog Window
    • 2.3.16 Password Setting Dialog Window
    • 2.3.17 Save Image Dialog Window
    • 2.3.18 Opt Signal Processing Dialog Window
    • 2.3.19 Split/Dual Mag Controller
    • 2.3.20 Using Short-cut Keys
• 3. OPERATION
  • 3.1 Starting the System
    • 3.1.1 Start-up Confirmation Items
    • 3.1.2 Startup Operation
  • 3.2 Mounting a Specimen
    • 3.2.1 Precautions Concerning Specimen Preparation
    • 3.2.2 Specimen Preparation according to Material
    • 3.2.3 Mounting a Specimen on the Type I Stage (Manual Stage)
      • 3.2.3.1 Setting the Specimen Stand
      • 3.2.3.2 Measuring and Setting the Specimen Height
      • 3.2.3.3 Moving the Stage to the Specimen Exchange Position
      • 3.2.3.4 Procedure for Loading a Specimen
    • 3.2.4 Mounting a Specimen on the Type II Stage (5-axis motor-driven stage)
      • 3.2.4.1 Setting the Specimen Base
      • 3.2.4.2 Measuring and Setting the Specimen Height
      • 3.2.4.3 Moving the Stage to the Specimen Exchange Position
      • 3.2.4.4 Loading the Specimen
  • 3.3 Applying the Accelerating Voltage
    • 3.3.1 Conditions under which Accelerating Voltage can be Applied
    • 3.3.2 Setting the Accelerating Voltage and Filament Current
  • 3.4 Adjusting the Electron Optical System
    • 3.4.1 Setting Parameters for the Electron Optical System
    • 3.4.2 Axial Alignment
      • 3.4.2.1 Items Requiring Axial Alignment
      • 3.4.2.2 Axial Alignment Items in Detail
  • 3.5 Operation for Image Observation
    • 3.5.1 Selecting a Detector
      • 3.5.1.1 Secondary Electron Detector (SE)
      • 3.5.1.2 Backscattered Electron Detector (BSE)
      • 3.5.1.3 Other Detectors (optional)
    • 3.5.2 Selecting Magnification
      • 3.5.2.1 Notes on Using the Lowest Magnification and Conducting Observations at a Low Magnification
    • 3.5.3 Selecting Scanning Speed
    • 3.5.4 Image Brightness and Contrast Adjustment
    • 3.5.5 Focus and Astigmatism Correction
    • 3.5.6 Operation of the Specimen Stage (Type I - Manual Stage)
      • 3.5.6.1 Movable Range and Specimen Exchange Position
      • 3.5.6.2 Restriction on the Motion of the X and Y-axes
      • 3.5.6.3 Allowable Range of Observation and Motion of the Tilt Axis by Specimen Size
      • 3.5.6.4 Tilt and Z Axis Limitations
      • 3.5.6.5 Operating the Z-axis (varying the Working Distance [WD])
      • 3.5.6.6 Checking the Ranges of T-axis Tilting and Z-axis Motion when Observing a Bulk Specimen
    • 3.5.7 Operation of the Specimen Stage (Type II - 5-Axis Motorized Stage)
      • 3.5.7.1 Coordinate Notation
      • 3.5.7.2 Movable Range and Specimen Exchange Position
      • 3.5.7.3 Setting Specimen Size and Detectors in Use
      • 3.5.7.4 Operation Methods Used to Move the Specimen Stage
      • 3.5.7.5 X, Y, R Axis Operation
      • 3.5.7.6 Z and Tilt Axis Operation
      • 3.5.7.7 Mouse Operation of Stage on the Scanning Image
      • 3.5.7.8 Position Memory Function
      • 3.5.7.9 Stage History Function
      • 3.5.7.10 Image Navigation
      • 3.5.7.11 Rotation/Tilt Eucentric Function and Calibration
      • 3.5.7.12 Stopping Stage and Returning to Previous Stage Position
      • 3.5.7.13 Movable Range and Limitation by Optional Detectors
  • 3.6 Saving and Recording Images
    • 3.6.1 Saving and Recording Images
    • 3.6.2 Preparing Images for Recording
    • 3.6.3 Image Capture
    • 3.6.4 Saving a Scanning Image (Direct Save)
    • 3.6.5 Saving Captured Images
    • 3.6.6 Taking Photographs (Option)
      • 3.6.6.1 Setting Photo Condition
      • 3.6.6.2 Direct Photo Recording
      • 3.6.6.3 Memory Photo Recording
    • 3.6.7 Recording Data Display with Images
      • 3.6.7.1 Image Recording Using Menu Commands or Buttons on the Control Panel
      • 3.6.7.2 Captured Image Recording Using Buttons on the Captured Image Window
      • 3.6.7.3 Record Captured Images without Embedding Text or Graphic Data
  • 3.7 Using SEM Data Manager
  • 3.8 Shutting Down
    • 3.8.1 Turning High Voltage Off
    • 3.8.2 Setting the Stage at the Specimen Exchange Position
    • 3.8.3 Withdrawing the Specimen
    • 3.8.4 Closing Windows and Shutting off the Display Power
    • 3.8.5 Termination Confirmation Items
  • 3.9 Other Functions
    • 3.9.1 Screen Mode
    • 3.9.2 Split Screen and Dual Mag Mode
    • 3.9.3 Signal Selection and Color Mixing
    • 3.9.4 X-ray Analysis Mode
    • 3.9.5 Signal Processing
    • 3.9.6 Operating Condition Memory
    • 3.9.7 Pseudo Color Display
    • 3.9.8 Data Entry Function
    • 3.9.9 Raster Rotation, Dynamic Focus and Tilt Compensation
    • 3.9.10 Printing Images Using Report Generation Function
    • 3.9.11 Copy Image
    • 3.9.12 Copy Image Information Text
    • 3.9.13 Oblique Image
    • 3.9.14 Optional Setting
    • 3.9.15 Password Setting
    • 3.9.16 Setting Login Name
    • 3.9.17 Restoring DB
    • 3.9.18 User Dependent Operation Condition Memory
    • 3.9.19 Password Locking of Windows
    • 3.9.20 Downloading Stage Control Program
  • 3.10 Image Quality
    • 3.10.1 Accelerating Voltage and Image Quality
    • 3.10.2 Probe Current Setting and Image Quality
    • 3.10.3 Objective Lens Movable Aperture and Image Quality
    • 3.10.4 Influence of WD in Low-vacuum Mode
  • 3.11 Using SEM Data Manager
    • 3.11.1 Precaution on SEM Data Manager
    • 3.11.2 Functions
      • 3.11.2.1 Image Database
      • 3.11.2.2 Menu and Tool Buttons
    • 3.11.3 Operation
      • 3.11.3.1 Registering Images on SEM Data Manager Database
      • 3.11.3.2 Selecting User Name and Opening Data Tree
      • 3.11.3.3 Image Display
      • 3.11.3.4 Image Information
      • 3.11.3.5 Viewer Display
      • 3.11.3.6 Data Entry
      • 3.11.3.7 Contrast Conversion
      • 3.11.3.8 Image Processing
      • 3.11.3.9 Color Mixing
      • 3.11.3.10 Printing Images
      • 3.11.3.11 Image File Operation
      • 3.11.3.12 Batch Operation of Image Files
      • 3.11.3.13 Slide Show
      • 3.11.3.14 Optional Setting
      • 3.11.3.15 Optimizing and Repairing Database File
• 4. MAINTENANCE
  • 4.1 Maintenance of Electron Optical Column
    • 4.1.1 Filament Exchange
    • 4.1.2 Maintenance for the Objective Lens Movable Aperture
    • 4.1.3 Maintenance for the Orifice Unit
    • 4.1.4 Maintenance for the Condenser Aperture
    • 4.1.5 Cleaning of Aperture Plates
    • 4.1.6 Ultrasonic Cleaning with Organic Solvent
    • 4.1.7 Replacement of Scintillator
  • 4.2 Maintenance of Rotary Pump
    • 4.2.1 Oil Change
    • 4.2.2 Replacement of Oil Mist Trap Element
  • 4.3 Maintenance of Air Compressor
    • 4.3.1 Checkup and Maintenance
    • 4.3.2 Troubleshooting of Air Compressor
    • 4.3.3 Location and Functions of Major Components
  • 4.4 Troubleshooting
    • 4.4.1 The Evacuation System does not Run
    • 4.4.2 The Vacuum Level in the Specimen Chamber does not Rise
    • 4.4.3 The Emission Current Fails to Flow Normally
    • 4.4.4 When Image is not Shown on Screen
    • 4.4.5 When Image is Very Noisy
    • 4.4.6 When You cannot Correct Astigmatism
    • 4.4.7 When Auto Focus or Auto Stigma does not Work Satisfactorily
    • 4.4.8 When S-3400N Control Program does not Start Up
    • 4.4.9 When PC has Hung Up
    • 4.4.10 When Error Messages are Shown
  • 4.5 What to Do in the Event of a Power Outage or the System must be Shut Down Completely for a Long Time
  • 4.6 What to Do when the Power Failure and the System is to be Started Up
  • 4.7 Caution on Maintenance
  • 4.8 Electron Gun Beam Axis Maintenance
    • 4.8.1 Adjusting the Electron Gun Mounting Position (for service engineers)
• 5. REPLACEMENT PARTS
  • 5.1 Consumables
  • 5.2 Replacement Parts
  • 5.3 Spare Parts
• 6. ACCESSORY OPERATION
  • 6.1 Model S-5080 Auto-Camera (Option)
    • 6.1.1 Configuration
    • 6.1.2 Specifications
    • 6.1.3 Assembling the Camera
    • 6.1.4 Operation
  • 6.2 Faraday Cup Device (Option)
    • 6.2.1 Range of Type II Stage Drive
    • 6.2.2 Usage Method
  • 6.3 Specification of S-3400N External Communication (Option)
    • 6.3.1 About the External Communication of S-3400N
      • 6.3.1.1 Communication Procedure
      • 6.3.1.2 Function and Limitation
    • 6.3.2 Each Command
      • 6.3.2.1 Initialize the Communication
      • 6.3.2.2 Acceleration Voltage
      • 6.3.2.3 Magnification
      • 6.3.2.4 Working Distance (WD)
      • 6.3.2.5 Focus Value
      • 6.3.2.6 Probe Current
      • 6.3.2.7 Auto Functions
      • 6.3.2.8 Stage
      • 6.3.2.9 Vacuum Setting
      • 6.3.2.10 Multi-purpose Command
      • 6.3.2.11 Machine Information
    • 6.3.3 Programming
      • 6.3.3.1 Example of Program
    • 6.3.4 External Communication Setting Procedure (Setting of PC for S-3400N)
      • 6.3.4.1 Preparation
      • 6.3.4.2 Component Registration
      • 6.3.4.3 Security and DCOM Settings
      • 6.3.4.4 Setup of the External Communication Option
  • 6.4 CD Measurement Function (Option)
    • 6.4.1 Outline
      • 6.4.1.1 CD Measurement Function
      • 6.4.1.2 CD Measurement Function Options
    • 6.4.2 Specifications
      • 6.4.2.1 Modes of CD Measurement
      • 6.4.2.2 Display of Measured Result
      • 6.4.2.3 Recording/Saving of Measured Result
      • 6.4.2.4 CD Measurement Accuracy (Reproducibility)
    • 6.4.3 Principle of CD Measurement
      • 6.4.3.1 Edge Detection Algorithm in Auto Measurement
      • 6.4.3.2 Linear Approximation Method
      • 6.4.3.3 Threshold Level Method
      • 6.4.3.4 Measurement Accuracy and Error Factors
    • 6.4.4 Description of Windows Used in Measuring Operation
      • 6.4.4.1 Starting CD Measurement Function
      • 6.4.4.2 Images for Measurement
      • 6.4.4.3 CD Measurement Window
      • 6.4.4.4 Measurement Condition Window
      • 6.4.4.5 Calibration Window
    • 6.4.5 Operation
      • 6.4.5.1 Flow of Measuring Operation
      • 6.4.5.2 Display of SEM Image
      • 6.4.5.3 Start of CD Measurement Function
      • 6.4.5.4 Setting Measurement Parameters
      • 6.4.5.5 Calibration
      • 6.4.5.6 Measurement Operation
      • 6.4.5.7 Recording Measured Data
• APPENDIX
• INDEX
  • A
  • B
  • C
  • D
  • E
  • F
  • G
  • H
  • I
  • K
  • L
  • M
  • O
  • P
  • R
  • S
  • T
  • U
  • V
  • W
  • X