Hitachi Microscope And Magnifier S 3400N Users Manual Tobira52E_9011
S-3400N to the manual 5d9c35ea-554a-44a9-9432-2d608275ab47
2015-01-24
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INSTRUCTION MANUAL
FOR
MODEL S-3400N
SCANNING ELECTRON MICROSCOPE
(User’s Operation/Maintenance Edition)
Please read through this manual carefully
before using the instrument.
• Before using the instrument, read the safety
instructions and precautions carefully.
• Keep this manual in a safe place nearby so it
can be referred to whenever needed.
Hitachi Science Systems, Ltd.
Copyright
C
Hitachi Science Systems, Ltd. 2004.
All rights reserved. Printed in Japan.
Part No. 52E-9011-3 TG-G (HMS052008)
NOTICE:
1.
2.
3.
4.
Information contained in this document is subject to
change without notice for improvement.
This manual is copyrighted by Hitachi High-Technologies
Corporation with all rights reserved.
No part of this manual may be reproduced, transmitted
or disclosed to a third party in any form or by any means
without the express written permission of Hitachi
High-Technologies Corporation.
Hitachi High-Technologies Corporation assumes no
liability for any direct, indirect, or consequential damages
arising from use not described in this manual.
Utmost care must be exercised when using the
instrument.
This document does not provide any warranty or
permission for industrial properties or any rights to grant
license lawfully and without infringement.
FOREWORD
APPLICATION
• The S-3400N SEM utilizes an electron beam accelerated at 300V to
30kV. The instrument is designed mainly for observation and
evaluation of specimens prepared for the SEM.
• Note that Hitachi Science Systems, Ltd. will not be responsible for
injury or damage caused by usage of the instrument in a manner not
described in this manual.
CAUTION
The electron microscope need not conform to the “Radiation Hazard
Preventive Laws” or “Ionizing Radiation Hazard Preventive Regulations”
currently in effect throughout the world, unlike the instruments designed to
produce X-rays.
The suggestion made by the ICRP (International Committee on Radiation
Hazard Prevention), however, clearly defines that the electron
microscope, like the home television set, will potentially produce a certain
amount of X-rays as an undesirable byproduct. From a safety viewpoint,
therefore, it is essential to operate the instrument carefully taking into
account the following fundamental precautions.
(1) Use the instrument within the application range specified in the
catalog or instruction manual.
(2) Do not operate the instrument with covers or doors removed, nor use
alternatives for these components.
(3) Do not apply modifications which may possibly result in deactivation
of the built-in safety devices.
FOREWORD - 1
Before using the equipment, read this instruction manual and pertinent instruction manuals of
relevant accessories to assure proper operation of the equipment.
Scope of Instruction Manual
This instruction manual comprises the following:
1.
2.
3.
4.
5.
6.
Installation (Requirements and Items to be prepared by User)
Function (Description of Controls)
Operation (Viewing Images, Saving Data, and Taking Photographs)
Maintenance (Procedures, Troubleshooting, and Action on Power Failure)
Replacement Parts
Accessory Operation
This instruction manual describes the operation, maintenance, and specific precautions pertinent
to daily operation on the model S-3400N scanning electron microscope.
First, read and get familiar with the safety precautions described in the opening pages and
General Safety Guidelines.
Windows Ⓡ is a registered trademark of Microsoft Corp., U.S.A.
Windows Ⓡ XP is a registered trade name of Microsoft Corp., U.S.A.
Microsoft Ⓡ EXCEL is a registered trade name of Microsoft Corp., U.S.A.
Note that the Ⓡ mark is not indicated in this manual.
Acronyms
Listed below are acronyms frequently used in this manual.
•
•
•
•
•
•
SEM
WD
SE
BSE
PC
GUI
:
:
:
:
:
:
Scanning Electron Microscope
Working Distance
Secondary Electron
Backscattered Electron
Personal Computer
Graphical User Interface
FOREWORD - 2
GUARANTEE
Period of Guarantee
The charge-free guarantee period is one year from the date of installation.
Details of Guarantee
(a)
The instrument will be repaired free of charge if it malfunctions due to a defect in
manufacture within the charge-free guarantee period.
(b)
Note that a substitute part may be used for repair, or replacement with an equivalent
product may be made instead of repair.
(c)
Such system components as a personal computer and printer which are frequently
modified for improvement may not be available in original versions at the time of
replacement.
(d)
Maintenance procedures are provided to allow system operation for 10 years after its
delivery. During this period, the maintenance of units or parts having a rather short
product cycle such as personal computer and printer may entail the purchase of
substitute parts because of limits on the repair period of the former, for which we
request your understanding. Even when more than 10 years have elapsed after
delivery, maintenance will basically be provided as long as the relevant units and parts
are available.
Exclusions from Guarantee
The guarantee will not be valid for the following failures and/or cases even during the
charge-free guarantee period.
(a)
Failure due to use in improperly installed condition.
(b)
Failure due to power supply voltage/frequency other than specified by Hitachi Science
Systems Ltd. or due to power failure.
(c)
Corrosion or deterioration of the tubing due to impurities contained in gas, or air
supplied by the customer.
(d)
Corrosion of electric circuits or deterioration of optical elements due to corrosive gases
or much dust contained in the atmosphere.
(e)
Failure due to disassembly, modification, parts replacement, or relocation not approved
by Hitachi Science Systems, Ltd.
(f)
Consumables and parts having a limited period of guarantee.
(g)
Failure attributable to use of non-guaranteed parts (parts not described in the
instruction manual).
(h)
Failure due to acts of God, including fire, earthquake, storm, flood, lightning, social
disturbance, riot, crime, insurrection, war (declared or undeclared), radioactive
pollution, contamination with harmful substance, etc.
FOREWORD - 3
GUARANTEE
(i)
Failure of instrument or damage of basic software, application software or other data
due to a computer virus.
(j)
Failure of the PC used with the instrument or damage to basic software, application
software and/or data because of momentary voltage drop caused by lightning or power
interruption.
(k)
Failure of the PC used with the instrument or damage to basic software, application
software and/or data caused by turning off the PC main power without taking the
normal termination procedure.
(l)
Using the system in ways that are not covered in this operating manual, or employing
operating procedures not covered in the same; or failure of the system due to repairs
performed not under control of Hitachi or under service personnel authorized by
Hitachi.
(m) Failure of the system due to relocation or transport of the system after installation, not
under Hitachi's control or under the control of service personnel authorized by Hitachi.
(n)
Failure of components outside the scope of the warranty, covered by operating
manuals.
Limitations on Guarantee
HITACHI SCIENCE SYSTEMS, LTD. MAKE NO GUARANTEES, EITHER EXPRESS OR
IMPLIED, EXCEPT AS PROVIDED HEREIN, INCLUDING WITHOUT LIMITATION
THEREOF, GUARANTEES AS TO MARKETABILITY, MERCHANTABILITY, FOR A
PARTICULAR PURPOSE OR USE, OR AGAINST INFRINGEMENT OF ANY PATENT.
IN NO EVENT SHALL HITACHI SCIENCE SYSTEMS, LTD. BE LIABLE FOR ANY DIRECT,
INCIDENTAL OR CONSEQUENTIAL DAMAGES OF ANY NATURE, OR LOSSES OR
EXPENSES RESULTING FROM ANY DEFECTIVE PRODUCT OR THE USE OF ANY
PRODUCT. NO ORAL OR WRITTEN INFORMATION OR ADVICE GIVEN BY HITACHI
SCIENCE SYSTEMS, LTD., ITS DEALERS, DISTRIBUTORS, AGENTS OR EMPLOYEES
SHALL CREATE A GUARANTEE OR IN ANY WAY INCREASE THE SCOPE OF THIS
GUARANTEE.
FOREWORD - 4
INSTALLATION AND AFTER-SALES SERVICE
Installation
• Only the persons who have been trained by a certified engineer of the manufacturer are
allowed to carry out the installation work
• Before installation, refer to section 1 and prepare the necessary utilities.
• Installation at another place after delivery will be provided at charge.
nearest Hitachi service representative for details.
Consult your
After-sales Service
• For after-sales service of the instrument, contact the Hitachi sales or service
representative in charge.
• For service after the guarantee period, consult Hitachi service with regard to a
maintenance and inspection service contract.
CAUTION ON DISPOSAL OF INSTRUMENT
Although at present the instrument does not use materials that will directly harm the
environment, changes are apt to be made in relevant laws and/or regulations, so be sure to
consult a qualified specialist when planning to dispose of the instrument.
FOREWORD - 5
Available Training Programs
Hitachi service offers various kinds of training programs at its own facilities or at the user's site
and facilities to ensure proper and safe operations of the equipment to its full performance.
Please contact your sales representative about the details of the training programs and
application to them. Applicants will be charged.
Handling of Chemicals
(1) The user is responsible for proper handling and disposal of chemicals used for cleaning of
the equipment in accordance with applicable regulations.
(2) Follow the supplier's instructions on handling, storage, and disposal of chemicals.
Instruction Manual
(1) This instruction manual and those instruction manuals for relevant accessories may be
revised for improvement without prior notice.
(2) Hitachi Science Systems, Ltd. has the copyright of this instruction manual.
(3) Reproducing or copying of part or all of this instruction manual is not allowed without our
written permission.
FOREWORD - 6
For Safe Handling
For Safe Handling
Before operating the machine, read the following instructions
carefully.
Safety precautions are indicated with the following headings
, words “Danger”, “Warning”, and
combining the alert symbol
“Caution”, and heading words:
: This safety alert symbol calls the user’s attention
to a danger that can potentially be injurious to
people.
To avoid the hazard, or even death, that can
occur, all safety messages following the symbol
must be heeded.
DANGER: Indicates an imminently hazardous situation that, if
not avoided, will result in death or serious injury.
WARNING: Indicates a potentially hazardous situation which, if
not avoided, can result in death or serious injury.
CAUTION: Indicates a hazardous situation that, if not avoided,
will or can result in minor or moderate injury, or
serious damage of product.
IMPORTANT: Indicates a hazardous situation that, if not avoided,
can cause property damage.
In addition to the above hazard tips, precautions for safe operation
are indicated with the following headings:
NOTICE: Indicates information and descriptions for ensuring
correct usage.
SAFETY - 1
For Safe Handling
General Precautions on Safety
Before Using the System
■ Before using this product, read the operating manual careful and
be sure to understand its contents.
■ The operating manual should be kept in a safe place near you for
ready access and reference.
■ The system should be handled according to the procedures given
in this manual.
■ Be sure to understand the safety-related instructions provided in
this manual and heed them.
■ Be sure to observe the precautions indicated on the system or in
the manual. Failure to heed such precautions can result in
equipment damage or bodily injury.
■ Be sure to observe the operating instructions on the product itself
and those provided in its operating manual.
■ Do not carry out modification of the instrument, parts
replacement, use non-specified parts, nor detach safety
mechanisms since this could be hazardous.
■ Do not perform any operation or action in any way other than as
provided in this manual. When in doubt, call the designated field
engineer.
■ The customer is responsible for proper ventilation of the room
when using chemicals. Inadequate ventilation could cause a
health hazard.
■ Most system operations are performed by viewing the monitor.
Looking at the monitor continuously for long hours can cause
fatigue-related eye problems. For the safe system operation
involving the use of display devices, adequate labor management
standards should be established and implemented.
■ Keep in mind that the hazard warnings in this manual or on the
machine cannot cover every possible case, as it is impossible to
predict and evaluate all circumstances beforehand. Be alert and
use your common sense.
The above instructions should be observed strictly. Failure to do so
can result not only in improper specimen observation and evaluation,
but also in bodily injury.
SAFETY - 2
For Safe Handling
General Precautions on Safety (cont’d)
Precautions on Using the System
■ When leaving the system unattended, turn off the acceleration
voltage.
■ If abnormal conditions arise when the system is being used, such
as abnormal noise, noxious odor, fumes, or gas leakage,
immediately shut off the power, shut the master gas valve, and
take any other safety measures that the situation may dictate,
and call the HS Service Department.
Precautions in Installation, Maintenance, and Relocations
■ To ensure the safe and accurate use of the system, installation
will be performed by either personnel from Hitachi’s Service
Department or qualified engineers trained and certified by
Hitachi.
■ Upon completion of the installation work, when receiving the
transfer of the product, please make sure that nothing is missing
in the standard accessories that are supposed to come with the
system.
Operating the system with some standard accessories missing
can lead to system malfunction and safety problems.
If you notice anything missing, damaged, or out of the ordinary,
please discuss the matter with installation personnel, the sales
office servicing your installation, or the nearest Hitachi Service
Department.
■ Servicing operations to be performed by the customer are limited
to the items covered in this operating manual. Maintenance
services should be performed with a good understanding of the
information contained in the manual.
To avoid system malfunction, or even bodily injury, maintenance
operations not covered in the manual should not be performed.
■ To avoid below-standard performance due to vibrations, the
system should not be moved after installation.
■ If the warning labels deteriorate due to aging or are damaged,
please contact the nearest Hitachi Service Department.
SAFETY - 3
For Safe Handling
Warnings in the Operating Manual
Warnings provided in this manual and where they occur are summarized below.
● This system does not have components that require
signs.
Danger
Warning Indicators
● Burns from the Rotary Pump
■ If it stops abnormally the rotary pump remains hot. Touching it
can cause burns. Do not touch the rotary pump in the event of
an abnormal stoppage.
(Chapter 4 Maintenance)
● Burns from Touching the Filament Assembly
■ When the filament assembly is replaced, it can be as hot at 90℃.
Touching it can cause burns. When replacing a filament
assembly, turn off the acceleration voltage, and let the assembly
stand for 30 minutes or longer after the air is let in before working
on it.
Or, execute the filament exchange by using heatproof gloves of
the clean room specification.
(Chapter 4 Maintenance)
● Beware of Electric Shock
■ Voltages up to 100 V AC and 30 kV DC are used inside this
instrument. Do not touch inside or you may receive an electric
shock.
Do not remove the covers of main unit and display unit and do
not touch internal parts or circuits while the instrument power is
turned on. There is a hazard of fatal or serious injury due to
electric shock.
(Chapter 4 Maintenance)
SAFETY - 4
For Safe Handling
Warning Indicators (cont’d)
● Injury from Splashing Compressor Drain
■ The inside of the compressor tank is pressurized. When
draining off the compressor, jerky motion can cause the liquid to
splash, causing eye injuries.
When draining off the compressor, do not stand directly in front of
the drain. Turn the drain cock slowly.
(Chapter 4 Maintenance)
SAFETY - 5
For Safe Handling
Caution Indicators
● Fatigue due to Long Hours of Operation
■ In operating the system while viewing the display, looking at the
display for long hours at the same posture can build up fatigue in
the eyes or body. For your health, when operating the system
for long hours, take a break 10 to 15 minutes every hour or so to
rest your eyes and body.
(Chapter 3 Operation)
● Injury from Lifting Heavy Objects
■ The goniometer (stage) is a heavy object. Removing the stage
involves the risk of dropping it accidentally, injury hands or feet.
To avoid the danger, do not remove the stage from the system
unit.
(Chapter 2 System Configuration)
■ The rotary pump is a heavy object weighing approximately 30 kg.
When moving the rotary pump, it should be lifted by at least two
persons to prevent your hands or feet from getting caught.
(Chapter 4 Maintenance)
■ The weight is a heavy object, weighing as much as 40 kg. Any
installation or relocation of the weight must be performed by
Hitachi or a service department authorized by Hitachi. The
weight should not be lifted by customer personnel.
(Chapter 1 Specifications and Installation Requirement)
● Injury from Getting Caught in a Heavy Object
■ The goniometer (stage) is a heavy object. When replacing
specimens, be sure to operate the stage by grasping the handle.
(Chapter 3, Operation)
SAFETY - 6
For Safe Handling
Caution Indicators (cont’d)
● Burns from Touching the Heated Aperture Plates
■
Heated aperture plates after baking are hot. Touching it can cause
burns. Do not touch the heated aperture plates heated with bare
hands.
(Chapter 4 Maintenance)
SAFETY - 7
For Safe Handling
System Warning Labels
Safety pages 7 to 10 show Warning labels that are affixed to the
S-3400N. The contents of the warning labels should be checked
against the actual equipment.
Warning labels should be checked, cleaned, and maintained from
time to time so that they are clearly visible from a safe distance.
If warning labels fade and become difficult to read due to
aging, call the nearest Service Department for replacement.
(Front view)
(Left side view)
Warning Label Pasting Locations on System Unit
SAFETY - 8
For Safe Handling
（Right side view）
(Rear view)
Warning Label Pasting Locations on System Unit
SAFETY - 9
For Safe Handling
Warning Labels Pasting Locations on Rotary Pump
Motion shielding weight
Compressor
（Top view）
(Back view）
Warning Label Pasting Locations on Weight/Compressor
SAFETY - 10
(Front view)
SAFETY - 11
Warning Label Pasting Locations Display Unit
(Left side view)
For Safe Handling
For Safe Handling
Precautions for Proper Operation
― Precautions for the Proper Operation of the S-3400N ―
About Electricity
(a) Single-phase AC 100 V(±10%), 50/60 Hz, 2 kVA (for main
unit).When the supplied power line voltage is 100 V, the
instrument works by direct connection.
When the supplied power line voltage is other than 100 V (200 V
or others), use a step down transformer to step the power line
voltage down to 100 V. Refer to Chapter 1 (Specifications and
Installation Requirement) for the step down transformer
requirement.
(b) Connect the instrument to ground based on the standard of your
country to prevent electric shock hazards due to the high
voltage. Otherwise, you could suffer an electric shock or a
malfunction could occur in the instrument.
Avoid sharing the ground terminal with other power equipments.
Be sure to ground the instrument independently. The image
trouble and the malfunction of the equipment might be caused
when sharing.
Handling Volatile Solvents
When handling a volatile solvent in cleaning components of this
system, take precautions on the following points:
(a) Volatile solvent should be handled at a place which is well
ventilated and is well away from flames.
(b) For handling volatile solvents, ventilation equipment and
protective gear should be provided at the customer’s discretion.
The inhaling of a volatile solvent in excessive amounts can
results in respiratory difficulties. If volatile solvent is swallowed
or it gets onto the skin or into the eyes, symptoms of polyneuritis
including anesthesia and ataxia (difficulty in walking) may
develop.
SAFETY - 12
For Safe Handling
Precautions on Proper Operation (cont’d)
Third Party’s Industrial or Proprietary Rights
Hitachi Science Systems, Ltd. shall not be responsible for a third
party’s claim regarding infringement of any patent rights or industrial
properties with respect either to products manufactured through the
use of equipment supplied by Hitachi or its related companies or to
applications of the Hitachi equipment.
Laser Light Hazard
The CD-ROM or CD-R/W drive in the personal computer is equipped
with a laser device. The personal computer with laser device
complies with safety standards including International
Electrotechnical Commission (IEC) 825. With specific regard to the
laser, the equipment complies with laser product performance
standards set by U.S. governmental agencies for a Class 1 laser
product. The product does not emit hazardous light; the beam is
totally enclosed during all modes of customer operation and
maintenance. Therefore be sure to observe the following warnings
when operating a product equipped with a laser device.
• Do not try to open the unit enclosure.
There are no user-serviceable components inside.
• Do not operate controls, make adjustments, or perform procedures
with the laser device other than those specified herein.
• Allow only service personnel to repair the unit.
Laser Information:
Laser type:
Wavelength:
Divergence angle:
Output power:
Polarization:
Numerical aperture:
Semiconductor GaAlAs
780 ± 35 nm
53.5° ± 0.5°
Less than 0.2 mW or 10,869 W m-2 sr-1
Circular 0.25
0.45 ± 0.04 inches
Harmful Chemicals
This product contains chemicals, including lead, known to the State
of California to cause cancer, and birth defects or other reproductive
harm.
Wash hands after handling.
SAFETY - 13
For Safe Handling
Precautions on Proper Operation (cont’d)
Backup of Important Data
Trouble-free operation cannot be guaranteed for the computer
system. You are recommended to copy important data on the hard
disk into floppy disks (FD) or magneto-optical disks (MO) at a regular
interval
About Computer Applications Software
Other applications software should not be installed on the PC that is
a part of this system. Such software can cause unexpected
animation screens to pop up, exert adverse impact on the system,
and interfere with the operation of the system. The warranty does
not cover situations where the system fails to run properly due to the
installation of other application software.
Protection against Computer Viruses
Computer viruses are malicious programs that sneak into the PC to
cause misbehavior or damage to data. And, a program designed to
offer protection against and eradicate computer viruses is called a
vaccine program.
Using a floppy disk or other storage medium infected by a virus can
cause virus infection. Note also that once a virus infects the PC, it
may spread to other computers through storage media. Therefore,
never use a program or storage medium that is suspected of
containing a virus.
If there is a possibility of virus infection, check for a virus using a
vaccine program.
The user is requested to prepare a proper vaccine program and carry
out virus removal on his or her own responsibility.
Note, however, that some kinds of vaccine programs may cause
incorrect operation of the S-3400N control program. If a problem
occurs after you install a vaccine program, remove it or execute virus
check when the S-3400N program is not running. It is desirable not
to set the vaccine program in the auto start-up group, or to terminate
the vaccine program before starting the S-3400N program.
SAFETY - 14
For Safe Handling
Precautions on Proper Operation (cont’d)
About Changes in Computer Settings
Do not change the following system settings of your PC. These are
set up at the optimum conditions for operation of the S-3400N SEM
before shipping.
(a) Connection to the USB ports
This instrument uses a USB port for communication between the
PC and the internal microprocessor. The USB port number 1 is
assigned to the instrument. Therefore, if external storage devices
or printers are to be connected to USB ports, ports that are
available to users are subject to restrictions.
(b) Monitor screen setting
Monitor properties need to be set at 1280×1024 pixels for the
desktop area, true color (24 bit) mode and 60 Hz to 70 Hz for the
refresh rate. Using other resolution, faster refresh rate or 256
color mode may cause an abnormal screen display.
(c) Sub programs
This instrument operates using many DLL programs along with
the control program. Deletion of files in the Windows directory or
change of the registry will cause troubles. Also do not delete
tasks and processes using the task manager.
(d) Screen saver settings
The screen saver can cause to exert adverse impact on the
system, and to interfere with the operation of the system. For
using the screen saver, read the following carefully.
(1) Use only the screen saver of the windows standard.
The operation of the screen savers other than the Windows
standard are not guaranteed.
(2) Password Protection should not be set on a screen saver.
Password Protection can prevent SEM images to display
properly when the system wakes up from the screen saver
mode. . If you need to lock Windows when leaving your work
site, the option to activate Password Locking from the
S-3400N Control Program should be used.
See 3.9.19 Password Locking of Windows.
SAFETY - 15
For Safe Handling
(e) Power Saving mode
Do not use the Power Saving mode. It will cause trouble in
communication between the PC and internal microprocessor.
(f) Virtual memory setting
Do not change the virtual memory setting.
(g) Any saved image data is subject to control by SEM data
Manager. Image files should not be renamed or deleted by using
Windows File Manager or Windows Explorer. The use of
Windows File Manager or Windows Explorer can cause a conflict
between the data controlled by SEM Data Manager and the actual
data. Such files generate a “Reference disabled” message on
SEM Data Manager. If such a conflict arises, the offending file
should be deleted by using the Remove List Function of the Batch
Process of SEM Data Manager. Valuable images contained in
such a file can be re-registered using the Add From File function.
SAFETY - 16
For Safe Handling
Precautions on Proper Operation (cont’d)
OS Operation during S-3400N SEM Operation
Although the Windows Task Manager can be launched from the
Taskbar or by Ctrl+Alt+Del key operation, if Standby or Halt mode is
set or logged-off while the S-3400N control program is running, it will
not work normally when recovered from such a status. Close
S-3400N control program if setting of such mode is necessary.
USB Devices
When connecting USB devices such as external storage unit, printer
etc., take notice of the following.
(1) USB Port 1 is used by the display control unit, ports available to
users are subject to restrictions.
(2) Terminate S-3400N control program when carrying out disk
formatting or copying a large volume of image files to MO disk,
hard disk or other storage devices using USB port.
(3) By the above operation, sometimes the message “USB not
connected” will be shown. In such case, S-3400N control program
will not continue normal operation. If this message appears,
close Windows, shut down the PC, turn off the key switch for the
system unit, wait 30 seconds, and then restart the system by
turning on the power again.
SAFETY - 17
For Safe Handling
Precautions on Proper Operation (cont’d)
Network Connection
The PC is equipped with Ethernet ports for network connectivity.
Performing a network connection using the Ethernet requires
extensive knowledge of the network environment. Such a connection
should be undertaken in consultation with the Network Administrator.
(1) Connecting a cable to an Ethernet port is carried out by Hitachi
Science installation engineers or service engineers. Consult
your nearest Hitachi Science service representative for details.
(2) Ethernet cables are not included as part of the system. Cables
should be procured as necessary. For detail, refer to About
Changes in Computer Settings in this chapter.
(3) For a network connection, setting in the PC should be modified
with adequate care. Unwittingly changing the settings required by
the operation of the system can disable the system.
(4) No special software should be installed for network connection.
Such software can adversely impact the system and even disable
it. When connecting your system to a special network, please
consult the sales representative or the Service Department that
handles your system.
(6) Connecting to an external device, such as EDX, using an optional
external communications interface requires the use of an
Etherport. Therefore, for connecting to a device other than an
external device, a branching hub should be procured. Some
external devices come equipped with a standard hub, which
should be verified with your servicing sales representative.
(7) A network connection using the Microsoft TCP/IP protocol
requires an IP address, which should be set up in consultation
with a Network Administrator. Connecting to an external device,
such as EDX, requires another IP address specifically for
connection to that device.
NOTICE The user is requested to prepare a proper Computer
viruses protection on his or her own responsibility with
consulting to the network administrator. It is not
guaranteed Failure of instrument or damage of basic
software, application software or other data due to a
computer virus.（For detail, refer to Protection against
Computer Viruses in this chapter.）
SAFETY - 18
For Safe Handling
Precautions on Proper Operation (cont’d)
Using Other Windows Applications
Running non-SEM Windows applications (especially the Printer or
Internet Explorer) during a SEM operation, especially image capture,
transfer of saved.
Personal Computer (PC)
Do not turn off the PC power independently. If the PC power is
turned off during access to hard disk or floppy disk, the PC or data
and programs stored therein may be damaged.
Be sure to close the S-3400N control program, shut down Windows,
and after the PC is automatically shut off or a “You can now safety
turn off the computer” message has appeared, turn off the power
switch (key switch) on the S-3400N system unit.
If the PC lock up for some reason, take steps to shut down the PC
safely by referring to 4.4.9 When PC has Hung Up.
SAFETY - 19
For Safe Handling
Precautions on Proper Operation (cont’d)
Transportation and Relocation of Instrument
(a) The transport of the system, which carries considerable risk,
should never be attempted by a customer. Any system transport
should be performed with the assistance and supervision of
Hitachi-approved engineers.
(b) Do not lift the instrument by holding the table. The strength of
table fitting is not sufficient for bearing the weight of display unit,
approximately 120 kg. Should the table be lifted, the display unit
might slip off and crash. Hence, it is recommended to remove
the table and transport the display unit independently when
moving the instrument.
Ambient Temperature and Humidity
Even when the system is not running, the room in which the system
is installed should be maintained under the following environmental
conditions:
Room temperature: 15℃ to 30℃
Humidity: 70％ or lower (no condensation)
If the system is not used for a long time, the specimen chamber
should be evacuated instead of being exposed to the atmosphere.
SAFETY - 20
Additional Information of PC Setting
Setting of Windows (r) XP Professional Service Pack2 in S-3400N
1.
Outline
As of February 2005, OS of the personal computer for the PC-SEM control is Windows XP
Professional Service Pack2 (SP2). In SP2, a security function is strengthening in addition to
accumulation of the correction program published in the past. The setting of SP2 when PC-SEM
is shipped from factory is described as follows. The factory does not provide guarantee when
PC-SEM is used in the settings not described in this manual.
2.
Setting of Security Center
(1) Click Start button, and select Control panel.
(2) Click Security Center icon.
2.1
Firewall
The Firewall is set to ON. When you confirm this setting, refer to the following procedures.
(1) Click Windows Firewall in the Windows Security Center window.
Fig. 1 The Windows Security Center Window
PC - 1
The Windows Firewall is set as shown in the figure below.
To restore all Windows Firewall settings to a default state, select the Advanced tab and click the
Restore Defaults button.
Fig. 2 The Windows Firewall Dialogs
PC - 2
2.2
Automatic Updates
(1) Click Automatic Updates in the Windows Security Center window or click the Automatic
Updates tab in the System dialog.
Fig. 3 The Windows Security Center Window
(2) Select "Notify me but don't automatically download or install them."
Fig. 4 The Automatic Updates Dialogs
PC - 3
2.3
Virus Protection
The anti-virus software is not installed. In SP2, if the anti-virus software is not installed or the
date of the virus definitions file is old, message is displayed when OS starts.
When the instrument is shipped from factory, the Virus Protection setting is set as follows so that
the message is not displayed.
(1) Click the Recommendations button in the Windows Security Center window.
Fig. 5 The Windows Security Center Window
(2) Check "I have an antivirus program that I'll monitor myself." and click the OK button.
Fig. 6 The Recommendation Dialog
PC - 4
We have tested the following anti-virus software that install in the personal computer of PC-SEM,
and confirmed that the SEM control software operates correctly (as of February 2005).
Symantec Norton Anti Virus 2004
Symantec Norton Anti Virus 2005
Our company doesn't support above-mentioned anti-virus software. The user is requested to
prepare a proper Computer viruses protection on his or her own responsibility with consulting to
the network administrator. It is not guaranteed failure of instrument or damage of basic software,
application software or other data due to a computer virus.
3.
Other setting
3.1
Login User Name
When the instrument is shipped from factory, the Login User Name is set as follows.
User Name
Password
Group Memberships
PC-SEM
Not
registered
Power Users
Administrator
hitachi
Administrators
SEM
∗∗∗∗
Administrators
Application
Used for operation of SEM.
System environment cannot be
set.
Used for system management.
System environment can be set.
Used for maintenance of SEM.
Do not change setting.
• It is possible to set a password for users "Administrator" and "PC-SEM". For setting way of
the password, refer to the instruction manual for Windows.
• Set the Group Memberships to "Administrators" or "Power Users" when you create a new
account. The control software doesn't execute normally, when setting it to "Users".
3.2
Setting of Display Properties
Right-click on Desktop, and select Properties in the displayed menu.
(1) Desktop tab
Background: [None]
(2) Screen Saver tab
Screen saver: [None]
Monitor Power (Click the Power button):
Power schemes: Always On
Turn off monitor, Turn off hard disk, System standby, System hibernates: Set everything
to Never.
PC - 5
(3) Appearance tab
Windows and buttons: Windows XP style
Color scheme: Default (blue)
Effects: (Click the Effects button): do not check "Use the following method to smooth edges
of screen fonts."
(If it is checked, when the SEM image with a high brightness is displayed, the character of
the data display becomes hard to see.)
(4) Settings tab
Screen resolution: 1280 by 1024 pixels
Color quality: Highest (32bit)
Monitor refresh rate (Click the Advanced button, and select the Monitor tab): 60Hz (LCD)
3.3
Setting of Hard disk drive
The hard disk drive of the Windows XP model PC-SEM is separated for two partitions of drive
letter C and drive letter D. Save the data of the SEM image etc. to drive D.
To share the data of Drive D when two or more user names to be able to log in Windows are
registered, the access permits of group Everyone is set to Full control.
To share data in Drive D, The access permit of the group "Everyone" is set to "Full control" so
that two or more user names to be able to log in Windows are registered. If you change this
setting, image data might not be able to be written in the hard disk with the SEM data manager
and so forth according to the user name. Refer to the following for the setting. (Do not change
this setting except the person who is well informed about the setting of Windows.)
(1) Select Drive D by the Explorer, and select Folder Options in the Tool menu.
(2) Select the View tab in the Folder Options dialog, and remove the check mark of "Use simple
file sharing (Recommended)" in the Advanced Settings list, and then click the OK button.
(3) Select and right-click Drive D by the Explorer, and then select Properties in the displayed
menu.
(4) Select the Security tab in the Properties dialog, and select Everyone* in the Group or User
Names list. Then check Full Control the Allow side in the Permissions for Everyone list.
Then check the Allow side of the Full control check box in the Permissions for Everyone list.
*: If there is not Everyone in the Group or User Names list, add it according to the following
procedures.
(i) Click the Add button.
(ii) Click the Advanced button in the displayed Select Users or Groups dialog.
(iii) Click the Find Now button, then the list appear.
Select Everyone from the list, and then click the OK button.
PC - 6
3.4
Setting of Taskbar
When the instrument is shipped from factory, the setting of the taskbar is set for the following.
There is no influence in the operation of the SEM software even if this setting changes.
(1) Taskbar (Right-click on the taskbar and select Properties): Check "Auto-hide the taskbar"
(2) Start Menu (Select the Start tab in the Taskbar and [Start] Properties)：Select "Start menu"
3.5
Setting of BIOS
Note that the setting of BIOS might be different in each model of PC. The following procedure is
the setting of HP Compaq Business Desktop dc7100MT (as of February 2005).
(1) Restart the PC.
(2) Press the F10 key while the logo of "HP" is displayed on the screen.
(3) The language select menu is displayed in the first. Select English and press the Enter key.
(4) The main-menu is displayed. Select "Advanced", and then select "Power-on option" and
press the Enter key.
(5) The sub-menu is displayed. Select "After power loss", and change the settings to "on"
pressing the "→" key.
Then select "Post Delay (in seconds)", and change the settings to "20" pressing the "→" key.
Then select "Hyper-Threading", and change the settings to "Disable" pressing the "→" key.
Then press the F10 key.
(6) Select "Advanced" in the main-menu, and then select "Device Options" and press the Enter
key.
(7) The sub-menu is displayed. Select "Num Lock State at Power-On", and change the settings
to "on" pressing the "→" key.
Then press the F10 key.
(8) Select "File" in the main-menu, and then select "Save Changes and Exit", and then press
the Enter key.
The Exit Message is displayed, and then press the F10 key.
PC - 7
Table of Contents
FOREWORD ....................................................................................................... FOREWORD - 1
Scope of Instruction Manual ......................................................................... FOREWORD - 2
Acronyms...................................................................................................... FOREWORD - 2
GUARANTEE ...................................................................................................... FOREWORD - 3
INSTALLATION AND AFTER-SALES SERVICE ................................................ FOREWORD - 5
CAUTION ON DISPOSAL OF INSTRUMENT ..................................................... FOREWORD - 5
Available Training Programs ......................................................................... FOREWORD - 6
Handling of Chemicals .................................................................................. FOREWORD - 6
Instruction Manual ........................................................................................ FOREWORD - 6
SAFETY SUMMARY .......................................................................................... SAFETY - 1
For Safe Handling............................................................................................... SAFETY - 1
General Precautions on Safety ........................................................................... SAFETY - 2
Before Using the System .................................................................................... SAFETY - 2
Precautions on Using the System ....................................................................... SAFETY - 3
Precautions in Installation, Maintenance, and Relocations.................................. SAFETY - 3
Warning Indicators.............................................................................................. SAFETY - 4
Caution Indicators............................................................................................... SAFETY - 6
System Warning Labels...................................................................................... SAFETY - 8
Precautions for Proper Operation .......................................................................SAFETY - 12
About Electricity ..................................................................................................SAFETY - 12
Handling Volatile Solvents ..................................................................................SAFETY - 12
Third Party's Industrial or Proprietary Rights.......................................................SAFETY - 13
Laser Light Hazard .............................................................................................SAFETY - 13
Harmful Chemicals .............................................................................................SAFETY - 13
Backup of Important Data ...................................................................................SAFETY - 14
About Computer Applications Software...............................................................SAFETY - 14
Protection against Computer Viruses..................................................................SAFETY - 14
About Changes in Computer Settings.................................................................SAFETY - 15
OS Operation during S-3400N SEM Operation...................................................SAFETY - 17
USB Devices.......................................................................................................SAFETY - 17
Network Connection............................................................................................SAFETY - 18
Using Other Windows Applications .....................................................................SAFETY - 19
Personal Computer (PC).....................................................................................SAFETY - 19
Transportation and Relocation of Instrument ......................................................SAFETY - 20
Ambient Temperature and Humidity ...................................................................SAFETY - 20
Additional Information of PC Setting ................................................................................PC - 1
-i-
1
SPECIFICATIONS AND INSTALLATION REQUIREMENTS .........................................1 - 1
1.1 Specifications ........................................................................................................1 - 1
1.1.1
Resolution ................................................................................................1 - 1
1.1.2
Magnification............................................................................................1 - 1
1.1.3
Electron Optical System...........................................................................1 - 1
1.1.4
Specimen Goniometer Stage ...................................................................1 - 2
1.1.5
Evacuation System ..................................................................................1 - 2
1.1.6
Imaging Function .....................................................................................1 - 2
1.1.7
Safety Equipment.....................................................................................1 - 4
1.1.8
Size and Weight.......................................................................................1 - 4
1.2 Installation Requirements ......................................................................................1 - 5
1.2.1
General ....................................................................................................1 - 5
1.2.2
Room Temperature, Humidity and Altitude...............................................1 - 5
1.2.3
Line Power Requirement..........................................................................1 - 5
1.2.4
Grounding Terminal .................................................................................1 - 6
1.2.5
Stray Magnetic Field ................................................................................1 - 7
1.2.6
Vibrations .................................................................................................1 - 10
1.2.7
Power Line Noise and Electric Field Noise ...............................................1 - 11
1.2.8
Disturbance by Sound Waves ..................................................................1 - 13
1.2.9
Electro-Magnetic Compatibilitiy ................................................................1 - 13
1.2.10 Site Requirements ...................................................................................1 - 13
1.3 Customer-supplied Items .......................................................................................1 - 15
2
FUNCTIONS...................................................................................................................2 - 1
2.1 Control Knobs and Switches on Main Unit .............................................................2 - 2
2.1.1
Main Unit..................................................................................................2 - 2
2.1.2
Electron Optical Column ..........................................................................2 - 3
2.1.3
Specimen Stage (Type I) .........................................................................2 - 4
2.1.4
Specimen Stage (Type II) ........................................................................2 - 5
2.1.5
EVAC Panel .............................................................................................2 - 6
2.1.6
Evacuation System ..................................................................................2 - 7
2.1.7
System Power Distribution Board.............................................................2 - 8
2.2 Control Knobs and Switches on Display Unit .........................................................2 - 9
2.2.1
Display Console .......................................................................................2 - 9
2.2.2
PC (Personal Computer)..........................................................................2 - 10
2.2.3
Manual Operation Panel...........................................................................2 - 11
2.2.4
Mouse and Trackball................................................................................2 - 12
2.3 Graphical User Interface (GUI) ..............................................................................2 - 13
2.3.1
Starting the PC and Logging in the S-3400 Program ...............................2 - 13
2.3.2
S-3400N SEM Main Window....................................................................2 - 15
2.3.3
Control Arrangement on the Window .......................................................2 - 17
2.3.4
Menus ......................................................................................................2 - 18
2.3.5
Popup Menu.............................................................................................2 - 24
2.3.6
Control Panel ...........................................................................................2 - 26
2.3.6.1 Functional Windows on the Control Panel................................2 - 26
- ii -
2.3.7
2.3.8
2.3.9
2.3.10
2.3.11
2.3.12
2.3.13
2.3.14
2.3.15
2.3.16
2.3.17
2.3.18
2.3.19
2.3.20
2.3.6.2 Electron Gun Control Unit ........................................................2 - 26
2.3.6.3 Scan Control Windows.............................................................2 - 27
2.3.6.4 Auto Control .............................................................................2 - 28
2.3.6.5 Magnification Control................................................................2 - 30
2.3.6.6 Capture Control........................................................................2 - 31
2.3.6.7 Image Recording Control .........................................................2 - 33
2.3.6.8 EVAC/AIR Control....................................................................2 - 35
2.3.6.9 Stage Control ...........................................................................2 - 36
2.3.6.10 Extension for Dual Screen Mode..............................................2 - 37
Operation Panel .......................................................................................2 - 38
2.3.7.1 ELECTRON BEAM Window .....................................................2 - 39
2.3.7.2 Focusing Position (WD) WORKING DISTANCE Window ........2 - 40
2.3.7.3 VACUUM MODE Window ........................................................2 - 41
2.3.7.4 SCAN MODE Window..............................................................2 - 42
2.3.7.5 CONDITION LOAD/SAVE Window ..........................................2 - 43
2.3.7.6 SCREEN MODE Window.........................................................2 - 43
2.3.7.7 DETECTOR Window................................................................2 - 44
2.3.7.8 IMAGE SHIFT Window ............................................................2 - 44
2.3.7.9 R.ROTATION Window .............................................................2 - 45
2.3.7.10 SIGNAL PROCESSING Window..............................................2 - 46
2.3.7.11 DATA ENTRY Window.............................................................2 - 47
2.3.7.12 TILT COMPENSATION Window ..............................................2 - 47
2.3.7.13 Other........................................................................................2 - 48
Mouse Operation on the Scanning Image ................................................2 - 49
2.3.8.1 Exchanging Mouse Control Functions ......................................2 - 49
2.3.8.2 Focus/Stigma/Contrast/Brightness Adjustment ........................2 - 49
2.3.8.3 Stage and Image Shift Tools ....................................................2 - 51
Setup Dialog Window...............................................................................2 - 52
2.3.9.1 Optics Tab................................................................................2 - 53
2.3.9.2 Image Tab................................................................................2 - 55
2.3.9.3 Record Tab ..............................................................................2 - 56
2.3.9.4 OP. Cond Tab ..........................................................................2 - 58
Captured Image Window..........................................................................2 - 59
SEM Data Manager Window ....................................................................2 - 61
Alignment Dialog Window ........................................................................2 - 61
CD Measurement Dialog Window (option) ...............................................2 - 62
Login Setting Dialog Window ...................................................................2 - 62
Oblique Dialog Window............................................................................2 - 63
Password Setting Dialog Window ............................................................2 - 63
Save Image Dialog Window .....................................................................2 - 64
Opt Signal Processing Dialog Window .....................................................2 - 64
Split/Dual Mag Controller .........................................................................2 - 65
Using Short-cut Keys ...............................................................................2 - 65
- iii -
3
OPERATION ..................................................................................................................3 - 1
3.1 Starting the System ...............................................................................................3 - 2
3.1.1
Start-up Confirmation Items .....................................................................3 - 2
3.1.2
Startup Operation.....................................................................................3 - 2
3.2 Mounting a Specimen ............................................................................................3 - 4
3.2.1
Precautions Concerning Specimen Preparation .......................................3 - 4
3.2.2
Specimen Preparation according to Material............................................3 - 4
3.2.3
Mounting a Specimen on the Type I Stage (Manual Stage) .....................3 - 5
3.2.3.1 Setting the Specimen Stand.....................................................3 - 5
3.2.3.2 Measuring and Setting the Specimen Height ...........................3 - 5
3.2.3.3 Moving the Stage to the Specimen Exchange Position ............3 - 6
3.2.3.4 Procedure for Loading a Specimen ..........................................3 - 7
3.2.4
Mounting a Specimen on the Type II Stage (5-axis motor-driven stage) ..3 - 9
3.2.4.1 Setting the Specimen Base ......................................................3 - 9
3.2.4.2 Measuring and Setting the Specimen Height ...........................3 - 10
3.2.4.3 Moving the Stage to the Specimen Exchange Position ............3 - 12
3.2.4.4 Loading the Specimen..............................................................3 - 13
3.3 Applying the Accelerating Voltage .........................................................................3 - 15
3.3.1
Conditions under which Accelerating Voltage can be Applied ..................3 - 15
3.3.2
Setting the Accelerating Voltage and Filament Current ............................3 - 15
3.4 Adjusting the Electron Optical System ...................................................................3 - 18
3.4.1
Setting Parameters for the Electron Optical System ................................3 - 18
3.4.2
Axial Alignment ........................................................................................3 - 22
3.4.2.1 Items Requiring Axial Alignment...............................................3 - 22
3.4.2.2 Axial Alignment Items in Detail .................................................3 - 23
3.5 Operation for Image Observation...........................................................................3 - 31
3.5.1
Selecting a Detector.................................................................................3 - 31
3.5.1.1 Secondary Electron Detector (SE) ...........................................3 - 32
3.5.1.2 Backscattered Electron Detector (BSE) ...................................3 - 33
3.5.1.3 Other Detectors (optional) ......................................................3 - 37
3.5.2
Selecting Magnification ............................................................................3 - 38
3.5.2.1 Notes on Using the Lowest Magnification and Conducting
Observations at a Low Magnification........................................3 - 39
3.5.3
Selecting Scanning Speed .......................................................................3 - 42
3.5.4
Image Brightness and Contrast Adjustment .............................................3 - 44
3.5.5
Focus and Astigmatism Correction ..........................................................3 - 46
3.5.6
Operation of the Specimen Stage (Type I - Manual Stage) ......................3 - 52
3.5.6.1 Movable Range and Specimen Exchange Position ..................3 - 52
3.5.6.2 Restriction on the Motion of the X and Y-axes .........................3 - 52
3.5.6.3 Allowable Range of Observation and Motion of the Tilt Axis
by Specimen Size................................................................... 3 - 52
3.5.6.4 Tilt and Z Axis Limitations ........................................................3 - 54
3.5.6.5 Operating the Z-axis (varying the Working Distance [WD]) ......3 - 55
3.5.6.6 Checking the Ranges of T-axis Tilting and Z-axis Motion
when Observing a Bulk Specimen............................................3 - 56
- iv -
3.5.7
3.6
3.7
3.8
3.9
Operation of the Specimen Stage (Type II - 5-Axis Motorized Stage) ....3 - 57
3.5.7.1 Coordinate Notation ...............................................................3 - 57
3.5.7.2 Movable Range and Specimen Exchange Position ................3 - 58
3.5.7.3 Setting Specimen Size and Detectors in Use .........................3 - 60
3.5.7.4 Operation Methods Used to Move the Specimen Stage .........3 - 61
3.5.7.5 X, Y, R Axis Operation ...........................................................3 - 63
3.5.7.6 Z and Tilt Axis Operation........................................................3 - 66
3.5.7.7 Mouse Operation of Stage on the Scanning Image ................3 - 67
3.5.7.8 Position Memory Function ......................................................3 - 75
3.5.7.9 Stage History Function ...........................................................3 - 77
3.5.7.10 Image Navigation ...................................................................3 - 79
3.5.7.11 Rotation/Tilt Eucentric Function and Calibration.....................3 - 83
3.5.7.12 Stopping Stage and Returning to Previous Stage Position.....3 - 90
3.5.7.13 Movable Range and Limitation by Optional Detectors ............3 - 90
Saving and Recording Images.............................................................................3 - 95
3.6.1
Saving and Recording Images ...............................................................3 - 95
3.6.2
Preparing Images for Recording ............................................................3 - 96
3.6.3
Image Capture .......................................................................................3 - 97
3.6.4
Saving a Scanning Image (Direct Save).................................................3 - 102
3.6.5
Saving Captured Images........................................................................3 - 105
3.6.6
Taking Photographs (Option) .................................................................3 - 106
3.6.6.1 Setting Photo Condition..........................................................3 - 106
3.6.6.2 Direct Photo Recording ..........................................................3 - 108
3.6.6.3 Memory Photo Recording.......................................................3 - 108
3.6.7
Recording Data Display with Images......................................................3 - 109
3.6.7.1 Image Recording Using Menu Commands or Buttons
on the Control Panel ..............................................................3 - 109
3.6.7.2 Captured Image Recording Using Buttons on the
Captured Image Window........................................................3 - 110
3.6.7.3 Record Captured Images without Embedding Text or
Graphic Data..........................................................................3 - 111
Using SEM Data Manager ...................................................................................3 - 111
Shutting Down .....................................................................................................3 - 112
3.8.1
Turning High Voltage Off .......................................................................3 - 112
3.8.2
Setting the Stage at the Specimen Exchange Position...........................3 - 112
3.8.3
Withdrawing the Specimen ....................................................................3 - 113
3.8.4
Closing Windows and Shutting off the Display Power ............................3 - 114
3.8.5
Termination Confirmation Items .............................................................3 - 115
Other Functions ...................................................................................................3 - 116
3.9.1
Screen Mode..........................................................................................3 - 116
3.9.2
Split Screen and Dual Mag Mode...........................................................3 - 119
3.9.3
Signal Selection and Color Mixing..........................................................3 - 120
3.9.4
X-ray Analysis Mode ..............................................................................3 - 123
3.9.5
Signal Processing ..................................................................................3 - 126
3.9.6
Operating Condition Memory .................................................................3 - 128
-v-
3.9.7
Pseudo Color Display.............................................................................3 - 129
3.9.8
Data Entry Function ...............................................................................3 - 130
3.9.9
Raster Rotation, Dynamic Focus and Tilt Compensation .......................3 - 134
3.9.10 Printing Images Using Report Generation Function ...............................3 - 136
3.9.11 Copy Image............................................................................................3 - 143
3.9.12 Copy Image Information Text.................................................................3 - 143
3. 9.13 Oblique Image........................................................................................3 - 144
3.9.14 Optional Setting .....................................................................................3 - 145
3.9.15 Password Setting ...................................................................................3 - 150
3.9.16 Setting Login Name ...............................................................................3 - 150
3.9.17 Restoring DB..........................................................................................3 - 152
3.9.18 User Dependent Operation Condition Memory.......................................3 - 153
3.9.19 Password Locking of Windows ..............................................................3 - 154
3.9.20 Downloading Stage Control Program .....................................................3 - 155
3.10 Image Quality ......................................................................................................3 - 157
3.10.1 Accelerating Voltage and Image Quality ................................................3 - 157
3.10.2 Probe Current Setting and Image Quality...............................................3 - 158
3.10.3 Objective Lens Aperture and Image Quality ...........................................3 - 158
3.10.4 Influence of WD in Low-vacuum Mode...................................................3 - 159
3.11 Using SEM Data Manager ...................................................................................3 - 160
3.11.1 Precaution on SEM Data Manager.........................................................3 - 160
3.11.2 Functions ...............................................................................................3 - 161
3.11.2.1 Image Database.....................................................................3 - 161
3.11.2.2 Menu and Tool Buttons ..........................................................3 - 163
3.11.3 Operation ...............................................................................................3 - 167
3.11.3.1 Registering Images on SEM Data Manager Database ...........3 - 167
3.11.3.2 Selecting User Name and Opening Data Tree .......................3 - 168
3.11.3.3 Image Display ........................................................................3 - 169
3.11.3.4 Image Information ..................................................................3 - 170
3.11.3.5 Viewer Display .......................................................................3 - 170
3.11.3.6 Data Entry ..............................................................................3 - 171
3.11.3.7 Contrast Conversion...............................................................3 - 174
3.11.3.8 Image Processing ..................................................................3 - 177
3.11.3.9 Color Mixing ...........................................................................3 - 179
3.11.3.10 Printing Images ......................................................................3 - 181
3.11.3.11 Image File Operation..............................................................3 - 181
3.11.3.12 Batch Operation of Image Files..............................................3 - 182
3.11.3.13 Slide Show .............................................................................3 - 184
3.11.3.14 Optional Setting......................................................................3 - 184
3.11.3.15 Optimizing and Repairing Database File ................................3 - 186
4
MAINTENANCE..............................................................................................................4 4.1 Maintenance of Electron Optical Column ...............................................................4 4.1.1
Filament Exchange ..................................................................................4 4.1.2
Maintenance for the Objective Lens Movable Aperture ............................4 - vi -
1
1
1
6
4.2
4.3
4.4
4.5
4.6
4.7
4.8
4.1.3
Maintenance for the Orifice Unit...............................................................4 - 10
4.1.4
Maintenance for the Condenser Aperture ................................................4 - 15
4.1.5
Cleaning of Aperture Plates .....................................................................4 - 19
4.1.6
Ultrasonic Cleaning with Organic Solvent.................................................4 - 20
4.1.7
Replacement of Scintillator.......................................................................4 - 20
Maintenance of Rotary Pump ................................................................................4 - 21
4.2.1
Oil Change ...............................................................................................4 - 21
4.2.2
Replacement of Oil Mist Trap Element.....................................................4 - 21
Maintenance of Air Compressor.............................................................................4 - 22
4.3.1
Checkup and Maintenance.......................................................................4 - 22
4.3.2
Troubleshooting of Air Compressor..........................................................4 - 24
4.3.3
Location and Functions of Major Components .........................................4 - 25
Troubleshooting.....................................................................................................4 - 26
4.4.1
The Evacuation System does not Run .....................................................4 - 26
4.4.2
The Vacuum Level in the Specimen Chamber does not Rise...................4 - 27
4.4.3
The Emission Current Fails to Flow Normally...........................................4 - 27
4.4.4
When Image is not Shown on Screen ......................................................4 - 28
4.4.5
When Image is Very Noisy.......................................................................4 - 29
4.4.6
When You cannot Correct Astigmatism ...................................................4 - 30
4.4.7
When Auto Focus or Auto Stigma does not Work Satisfactorily...............4 - 31
4.4.8
When S-3400N Control Program does not Start Up.................................4 - 31
4.4.9
When PC has Hung Up............................................................................4 - 32
4.4.10 When Error Messages are Shown ...........................................................4 - 32
What to Do in the Event of a Power Outage or the System must be Shutdown
Completely for a Long Time...................................................................................4 - 33
What to Do when the Power Failure and the System is to be Started Up ..............4 - 33
Caution on Maintenance ........................................................................................4 - 34
Electron Gun Beam Axis Maintenance...................................................................4 - 34
4.8.1
Adjusting the Electron Gun Mounting Position (for service engineers) .....4 - 34
5
REPLACEMENT PARTS ................................................................................................5 5.1 Consumables.........................................................................................................5 5.2 Replacement Parts ................................................................................................5 5.3 Spare Parts............................................................................................................5 -
6
ACCESSORY OPERATION ...........................................................................................6 - 1
6.1 Model S-5080 Auto-Camera (Option) ....................................................................6 - 1
6.1.1
Configuration............................................................................................6 - 1
6.1.2
Specifications...........................................................................................6 - 3
6.1.3
Assembling the Camera...........................................................................6 - 5
6.1.4
Operation .................................................................................................6 - 6
6.2 Faraday Cup Device (Option) ................................................................................6 - 8
6.2.1
Range of Type II Stage Drive...................................................................6 - 8
6.1.2
Usage Method..........................................................................................6 - 8
6.3 Specification of S-3400N External Communication (Option) ..................................6 - 10
- vii -
1
1
2
3
6.3.1
6.4
About the External Communication of S-3400N .......................................6 - 10
6.3.1.1 Communication Procedure.......................................................6 - 10
6.3.1.2 Function and Limitation ............................................................6 - 10
6.3.2
Each Command .......................................................................................6 - 11
6.3.2.1 Initialize the Communication.....................................................6 - 16
6.3.2.2 Acceleration Voltage ................................................................6 - 17
6.3.2.3 Magnification ............................................................................6 - 20
6.3.2.4 Working Distance (WD) ...........................................................6 - 21
6.3.2.5 Focus Value .............................................................................6 - 22
6.3.2.6 Probe Current ..........................................................................6 - 23
6.3.2.7 Auto Functions .........................................................................6 - 24
6.3.2.8 Stage .......................................................................................6 - 26
6.3.2.9 Vacuum Setting........................................................................6 - 32
6.3.2.10 Multi-purpose Command ..........................................................6 - 34
6.3.2.11 Machine Information.................................................................6 - 34
6.3.3
Programming ...........................................................................................6 - 35
6.3.3.1 Example of Program ................................................................6 - 35
6.3.4
External Communication Setting Procedure
(Setting of PC for S-3400N) .....................................................................6 - 36
6.3.4.1 Preparation ..............................................................................6 - 36
6.3.4.2 Component Registration...........................................................6 - 36
6.3.4.3 Security and DCOM Settings....................................................6 - 38
6.3.4.4 Setup of the External Communication Option...........................6 - 55
CD Measurement Function (Option) ......................................................................6 - 56
6.4.1
Outline .....................................................................................................6 - 56
6.4.1.1 CD Measurement Function.......................................................6 - 56
6.4.1.2 CD Measurement Function Options .........................................6 - 56
6.4.2
Specifications...........................................................................................6 - 57
6.4.2.1 Modes of CD Measurement......................................................6 - 57
6.4.2.2 Display of Measured Result......................................................6 - 57
6.4.2.3 Recording/Saving of Measured Result .....................................6 - 57
6.4.2.4 CD Measurement Accuracy (Reproducibility) ...........................6 - 57
6.4.3
Principle of CD Measurement ..................................................................6 - 58
6.4.3.1 Edge Detection Algorithm in Auto Measurement ......................6 - 58
6.4.3.2 Linear Approximation Method...................................................6 - 60
6.4.3.3 Threshold Level Method...........................................................6 - 63
6.4.3.4 Measurement Accuracy and Error Factors ...............................6 - 64
6.4.4
Description of Windows Used in Measuring Operation.............................6 - 69
6.4.4.1 Starting CD Measurement Function .........................................6 - 69
6.4.4.2 Images for Measurement .........................................................6 - 69
6.4.4.3 CD Measurement Window .......................................................6 - 70
6.4.4.4 Measurement Condition Window..............................................6 - 73
6.4.4.5 Calibration Window ..................................................................6 - 80
6.4.5
Operation .................................................................................................6 - 82
6.4.5.1 Flow of Measuring Operation ...................................................6 - 82
- viii -
6.4.5.2
6.4.5.3
6.4.5.4
6.4.5.5
6.4.5.6
6.4.5.7
Display of SEM Image............................................................6 - 82
Start of CD Measurement Function ........................................6 - 83
Setting Measurement Parameters..........................................6 - 84
Calibration..............................................................................6 - 86
Measurement Operation.........................................................6 - 91
Recording Measured Data .....................................................6 - 101
APPENDIX
Message List .........................................................................................................APPENDIX - 1
INDEX .............................................................................................................................INDEX -1
Service Office Locations
- ix -
1.1.1
1.
1.1
1.1.1
SPECIFICATIONS AND INSTALLATION REQUIREMENTS
Specifications
Resolution
Secondary electron image resolution:
3.0 nm (30 kV acceleration voltage, in high vacuum
mode)
10 nm (3 kV acceleration voltage, in high vacuum
mode)
Backscattered electron image resolution: 4.0 nm (30 kV acceleration voltage, in low vacuum
mode)
1.1.2
Magnification
5x to 300,000x
(Highest and lowest magnifications are dependent upon accelerating voltage, WD and scan
speed.)
1.1.3
Electron Optical System
Electron source:
Pre-centered cartridge type tungsten
hairpin filament
Acceleration voltage:
0.3 kV to 30 kV
Gun bias:
Quad-/self-bias switching and continuously variable fixed bias
Beam alignment:
Electromagnetic two-stage deflection (doubles as blanking when the
image is frozen)
Lens system:
Three-stage electromagnetic lens reduction optical system
Stigma correcting unit:
Electromagnetic 8-pole XY method
Scanning coil:
Two-stage electromagnetic deflection method
Movable objective aperture: Four-hole movable aperture (30, 50, 80, and 150 µm)
Image shift:
± 50 µm or greater (WD = 10 mm)
X-ray analysis position:
WD =10 mm, X-ray take-out angle (TOA) = 35°
Detector and image types: Secondary electron detector; secondary electron image (high
vacuum mode)
Quad-type semiconductor backscattered electron detector;
backscattered electron image (High/low vacuum mode)
1-1
1.1
Specifications
1.1.4
(a)
Specimen Goniometer Stage
Type I (80 x 40 stage)
Range of motion:
X-axis: 0 to 80 mm
Y-axis: 0 to 40 mm
Z-axis (WD): 5 to 35 mm
R-axis (rotation): 360°, continuous
T-axis (tilt): -20° to 90°
Drive method:
Manual drive
Specimen size observable over entire region: 106 mm diameter (also R)
Maximum specimen size:
200 mm diameter
(b)
Type II (100 x 50 stage)
Range of motion:
X-axis: 0 to 100 mm
Y-axis: 0 to 50 mm
Z-axis (WD): 5 to 65 mm
R-axis (rotation): 360°, continuous
T-axis (tilt): -20°to 90°
Drive method:
5-axis motor drive
With eucentric rotation feature
With image navigation feature
Specimen size observable over entire region: 130 mm diameter (also R)
Maximum specimen size:
200 mm diameter
1.1.5
Evacuation System
Evacuation control:
Vacuum gauge:
Attainable vacuum level:
Range of vacuum level settings:
Vacuum pump:
Compressor:
1.1.6 Imaging Function
Display monitor:
Observation monitor:
Image display mode:
Fully automatic pneumatic valve method
Pirani gauge
-3
1.5 x 10 Pa
6 to 270 Pa (22 stops)
Turbo molecular pump (TMP) 210 L/s for high vacuum 1 ea.
Rotary pump 135 L/min (50Hz), 162 L/min (60Hz)
TMP back evacuation/low-vacuum settings 1 ea.
0.2 kW output, 1 ea.
Still image display on the PC monitor (at full scanning speed)
18.1- or 19-inch LCD (number of desktop pixels: 1280 x 1024)
Full-screen display (1280 x 960 pixels)
Small-screen display (640 x 480 pixels)
Dual-screen display (640 x 480 pixels, two panes), with
signal-mixing feature
1-2
1.1.6
Scanning mode:
TV/FAST
Slow
Reduced area (320 x 240 pixels)
Waveform display
Split screen/dual mag mode
High-definition capture (5120 x 3840 pixels maximum)
Frame integration capture (2560 x 1920 pixels maximum)
Scanning speed:
TV scanning (640 x 480 pixel display: 25/30* frames/s)
FAST scanning (full screen display: 6.3/7.5* frames/s)
Slow scanning
(full screen display: 1, 4, 20/16, 40/32, 80/64* s/frame)
(640 x 480 pixel display： 0.5, 2, 10/8, 20/16, 40/32* s/frame)
Reduced area scanning (320 x 240 pixel display: 25/30, 3/4*
frames/s)
High-definition capture scanning
(2560 x 1920 pixels: 40/32, 80/64, 160/128* s/frame)
(5120 x 3840 pixels: 80/64, 160/128, 320/256* s/frame)
* Power supply synchronization: 50/60 Hz
Auto-tuning feature:
Auto brightness & contrast control (ABCC)
Auto focus control (AFC)
Auto stigma & focus (ASF)
Auto filament saturation (AFS)
Auto beam alignment (ABA)
Auto beam setting (ABS)
(Auto filament saturation + auto beam alignment + auto gun
bias alignment)
Auto axial alignment (AAA)
(applicable to aperture/stigma alignment)
Signal/image processing function: S/N improvement by averaging (TV/FAST scanning)
S/N improvement by pixel integration
Frame integration (maximum number of integrated frames:
1024) (TV, FAST, SLOW1 scanning)
2-color synthesized image display (realtime/saved image in
2-image simultaneous display)
Pseudo-color image display (saved image)
Realtime image processing (brightness reversal, gamma
adjustment)
Realtime histogram display
Image processing on saved images
(brightness reversal, gamma adjustment, various space filter
processing)
1-3
1.1
Specifications
Saving image data:
Saved image size:
（640 x 480 pixels, 1280 x 960 pixels, 2560 x 1920 pixels,
and 5120 x 3840 pixels）
Applicable format: BMP, TIFF, and JPEG
Image data printout:
Free-layout printing feature provided
Management of saved image data: SEM Data Manager (an image database) provided
(image data management, thumb nail display, and various
image processing features)
Other functions:
Beam blanking (during image freeze)
Raster rotation
Dynamic focusing/tilt compensation
Data display (image number, acceleration voltage,
magnification factor, micron marker, micron value, WD value,
date, time, vacuum level, and detector)
Data display unit image/reversal switchable
Data entry (graphics (circles, rectangles, arrows, dimensional
lines) character input)
Simple measurement function (displaying size and arrow
between 2 points)
3D animation maintenance guide
Image transfer to the Quartz Imaging PCI
X-ray mode feature:
Signal input pins (pins provided on each system)
• X-ray Rate Meter signals (0 to + 10 V)
• Mapping signals (TTL)
Scanning mode
• Line analysis
• Spot analysis
• Selected area analysis
DBC interface (optional)
1.1.7
Safety Equipment
Protection features provided on power failures, electrical leakage, and vacuum failure
1.1.8
Size and Weight
Main unit:
700 (W) x 800 (D)* x 1460 (H) mm, 360 kg
Display unit:
850 (W) x 800 (D) * x 1200 (H) mm, 120 kg
Rotary pump:
526 (W) x 225 (D) x 306 (H) mm, 28 kg
Air compressor: 400 (W) x 230 (D) x 550 (H) mm, 18 kg
Weight:
200 (W) x 180 (D) x 160 (H) mm, 40 kg
* Exclusive of cables and connectors
1-4
1.2.1
1.2
Installation Requirements
Only the persons who have been trained by a certified engineer of the manufacturer are allowed
to carry out the installation work described below.
1.2.1
General
The following places or conditions should be avoided for installation of the instrument.:
(1)
(2)
(3)
(4)
(5)
(6)
(7)
(8)
(9)
(10)
(11)
1.2.2
Room adjacent to a transformer room
Room adjacent to an elevator
Location near large power-consuming equipment (e.g. electric furnace) or its power source
Location near spark discharge source or high-frequency apparatus
Atmosphere containing gas that may corrode metals
Location exposed to direct sunlight or strong draft
A dusty location
Place subjected to strong vibrations
Sharing of ground line with other electrical equipment
Location near radio or sound wave source
Place near railway
Room Temperature, Humidity and Altitude
(1)
Room temperature .......... 15 to 30°C (without condensation)
Temperature fluctuation should be less than 5 °C during operation of the instrument and
avoid climate control vents directed at the column.
(2)
Humidity .......................... 70% or less (without condensation)
The instrument should be operated in an air-conditioned room.
(3)
Altitude ............................ Up to 2,000 m
1.2.3
(1)
Line Power Requirement
Single-phase AC 100 V (±10%), 50/60 Hz, 2 kVA (for main unit)
When the supplied power line voltage is 100 V, the instrument works by direct connection.
When the supplied power line voltage is other than 100 V (200 V or others), use a step
down transformer to step the power line voltage down to 100 V.
（Installation of the step down transformer is to be carried out by Hitachi installation
engineers only.）
1-5
1.2
Installation Requirements
NOTICE: (a)
(b)
(c)
(d)
Line power fluctuation should be slow, and no abrupt fluctuation is allowable.
Allowable line voltage fluctuation is ±10 % max.
This instrument over-voltage category is "CAT.II".
The instrument provides Main ELB of the following type.
Leakage current breaker (CE conforming)
Rated current : 20 A
Trip current : 30 mA
Short-circuit interrupting capacity : 5 kA (Not be connected to supplies capable of
delivering more than 5 kA.)
Conforms to IEC/EN 60947-2
(2)
Notes concerning local preparation step down transformer
• A step-down transformer that meets the relevant standards and regulations of the
country/region of use is required. The Hitachi installation engineer will verify the
suitability of the transformer upon its installation.
• The step-down transformer must be self-protected against secondary overload or short
circuit. Alternatively the MAIN-ELB overcurrent device (specifications listed above) of
the Main Unit may be suitable to protect certain transformers. If relevant the Hitachi
installation engineer will verify the transformer/circuit breaker combination upon
installation.
• The step-down transformer (primary & secondary windings and protective earth) is
connected to a terminals of the Main Unit that are sized M5 and suitable only for
prepared (ring lug terminals). Please prepare the relevant cables for the transformer to
the Main Unit. The Hitachi installation engineer will install the transformer and verify all
connections.
• In the area of CE marking, the step-down transformer must be an isolating and double
insulated type in accordance with IEC/EN 61558-1 and IEC/EN 61558-2-4 standard.
(3)
External mains disconnection
Prepare an external mains disconnection device with the required isolation and lock-off/out
characteristics for use in the electrical supply to the Main Unit. This disconnection device
shall be located in close proximity to the equipment and within easy reach of the operator.
It shall be marked as the disconnecting device for the equipment.
(4)
An M5 ring lug terminal is equipped at the end of the input AC cord (ring lug terminal size:
5.3 mm in inside diameter, 9.5 mm in outside diameter), and the length of the input cord is
10 m.
1.2.4
Grounding Terminal
Connect the instrument to ground based on the standard of your country.
Avoid sharing the ground terminal with other power equipments. Be sure to ground the
instrument independently. The image trouble and the malfunction of the equipment might be
caused when sharing.
1-6
1.2.5
1.2.5
Stray Magnetic Field
Image disturbance will be negligible when the stray magnetic field conditions shown in Tables
1.2-1 are satisfied at the instrument installation place. Before proceeding to installation, check
the stray magnetic field conditions as required. Make sure that the conditions shown in the
tables are satisfied.
If there is a large-sized magnet clutch or power cable for other equipment in the vicinity of this
instrument, abrupt variation in current or magnetic field may take place. Avoid installing the
instrument in such a location.
If the instrument is installed in an environment having intense stray magnetic fields, the scanning
electron beam is forced to tremble due to the magnetic field, causing abnormal expansion,
shrinkage, distortion, unintentional shift, or whisker noise during imaging. These adverse
effects occur differently depending upon whether the frequency component of stray magnetic
field is synchronous with the power current frequency or not. Therefore, the allowable value of
stray magnetic field component synchronous with power current frequency is different from that
of stray magnetic field component asynchronous with power current frequency (DC magnetic
field variation).
• The stray magnetic field component synchronous with power frequency appears as image
distortion or deformation on the CRT display (Fig. 1.2-1). This is because the electron
beam is scanned in synchronization with the power frequency.
The maximum allowable value of stray magnetic field component synchronous with power
frequency is specified so that no adverse effect will be given to CD measurement
reproducibility.
• The stray magnetic field component asynchronous with power frequency affects imaging
directly. That is, movement of the electron beam due to variation in external magnetic field
appears as unintentional shift or whisker noise in imaging (Fig. 1.2-2).
Even a slight variation in external magnetic field may result in conspicuous irregularity of the
image. The maximum allowable value of stray magnetic field component asynchronous
with power frequency is specified so that CD measurement reproducibility will not be
affected by image shift or whisker noise.
The effect on the scanning electron beam varies also according to whether the stray magnetic
field component is in the horizontal or vertical direction, and the allowable value differs for each
of these components. Given below are the allowable values stipulated under the resolution
guaranteeing conditions (high resolution observation conditions), and under conditions different
from these. Image disturbance may occur even if the stray magnetic field at the site satisfies the
allowable values given in Tables 1.2-1.
In general, the effect of a stray magnetic field (wavering of scanning electron beam) is inversely
proportional to the square root of the accelerating voltage, provided the other parameters are
kept constant. The effect increases nearly proportionally to the working distance.
1-7
1.2
Installation Requirements
Amount of
distortion
(a)
Fig. 1.2-1
Image expansion/contraction
Image distortion
Effect of Stray Magnetic Field Component Synchronous with Power
Frequency (AC magnetic field)
C
A
A
B
C
B
(a) Appearance of image disturbance
Fig. 1.2-2
(b)
A:
Whisker noise
B:
Image shift
(b) DC magnetic field variation
Effect of Stray Magnetic Field Component Asynchronous with Power
Frequency (DC magnetic field variation)
1-8
1.2.5
Table 1.2-1
Resolution Guaranteeing
Conditions
Accelerating
voltage
Magnification
WD
Beam
: 3 kV
: ×30,000
: 5.0 mm
: 10
Accelerating
voltage
Magnification
WD
Beam
: 30 kV
: ×100,000
: 5.0 mm
: 0
Allowable Stray Magnetic Field
AC magnetic Field
(rms value)
DC magnetic Field
Variation
(peak to peak)
Horizontal
Direction
Vertical
Direction
Horizontal
Direction
Vertical
Direction
140 nT
730 nT
160 nT
820 nT
200 nT
640 nT
230 nT
720 nT
nT: nano-tesla
NOTICE: 1.
2.
3.
4.
5.
6.
7.
The power frequency synchronous component (AC magnetic field) is in rms value.
To evaluate in peak-to-peak value, the allowable value will be 2.8 times the rms
value.
The DC magnetic field variation is an abrupt variation of stray magnetic field with
respect to time. A slow, gently sloping variation with time is handled as a field
drift.
The allowable AC magnetic field is the value at the prescribed image disturbance
(expansion/contraction or bending of image) of 0.5 mm and at the specified
magnification.
The allowable DC magnetic field variation is the value at the prescribed image
disturbance (image shift or whisker noise) of 0.2 mm and at the specified
magnification.
The DC component of stray magnetic field without fluctuation does not cause
swaying of the electron beam, and will not affect the image if the amount is
around several ten µT.
The allowable values in Table 1.2-1 are the ones under the resolution
guaranteeing conditions in the table. In general, the longer the WD or the lower
the accelerating voltage, the more the electron beam is susceptible to stray
magnetic field effect.
If the allowable values in Table 1.2-1 are exceeded, the stray magnetic field must
be reduced by one of the countermeasures below:
(1) Try a different installation location.
(2) Provide a magnetic shielding box.
(3) Provide an active magnetic field canceller.
1-9
1.2
Installation Requirements
1.2.6
Vibrations
Before installing the instrument, measure floor vibration at the site. Image trouble will not occur
if the allowable values in Table 1.2-2 are satisfied under the resolution/photographing conditions.
If the instrument is installed on the first floor of a reinforced-concrete (steel-framed-concrete)
building, the performance of the instrument will not be degraded by external vibration as long as
vibration sources such as heavy-duty machine tools or transportation facilities (e.g. electric car)
are not operated nearby.
Check the vibration conditions at the site before installation (or upon receiving an order) as
required. Make sure that the values shown in the table are satisfied.
External vibration: Image trouble will not occur if the conditions in Table 1.2-2 are satisfied.
Table 1.2-2
Allowable Vibrations
Type I Stage Allowable Value (low-frequency region)
Frequency
X, Y-direction
Z-direction
2.0 Hz
3.0 Hz
5.0 Hz
8.0 Hz
10.0 Hz
0.8 µm p-p max.
0.8 µm p-p max.
0.8 µm p-p max.
2.0 µm p-p max.
3.0 µm p-p max.
4.0 µm p-p max.
1.5 µm p-p max.
2.5 µm p-p max.
Type I Stage Allowable Value (high-frequency region)
Frequency
X, Y, Z-direction
10.0 Hz
50.0 Hz
60.0 Hz
1.0 cm/s2 max.
2.0 cm/s2 max.
2.0 cm/s2 max.
Type II Stage Allowable Value (low-frequency region)
Frequency
X, Y-direction
Z-direction
2.0 Hz
3.0 Hz
5.0 Hz
8.0 Hz
10.0 Hz
1.0 µm p-p max.
3.0 µm p-p max.
2.0 µm p-p max.
1.5 µm p-p max.
2.5 µm p-p max.
0.6 µm p-p max.
1.2 µm p-p max.
1.6 µm p-p max.
1 - 10
1.2.7
Type II Stage Allowable Value (high-frequency region)
Frequency
X, Y, Z-direction
10.0 Hz
50.0 Hz
60.0 Hz
1.0 cm/s2 max.
2
2.0 cm/s max.
2.0 cm/s2 max.
2
Acceleration 4 cm/s (gal) is the same as amplitude 10 µm p-p in the frequency 10 Hz.
The allowable values is the value at the prescribed image disturbance of 0.2 mm and at the X
100,000 in photograph.
NOTICE: 1.
2.
3.
4.
5.
1.2.7
A sine wave should be used for vibration measurement.
If other than a sine wave, measurement should be made with each frequency
component concentrated at a dominant frequency level.
For vibration at an extremely low frequency of less than 1 Hz, complete prevention
is impossible with the vibration-isolating technology available at present.
In a frequency region from 1 to 10 Hz, interpolation should be made through each
allowable value point.
If floor vibration exceeds the allowable values, please consult Hitachi (floor
vibration that may cause image trouble should be measured in advance).
The above-mentioned allowable amplitude is the value with a sample size of 5 mm
diameter. The larger sample, the more susceptible to the effect of vibration and
the lower the allowable amplitude.
Power Line Noise and Electric Field Noise
Image troubles may be observed when a device as given in Table 1.2-3 or its power line is
installed nearby or, even if it is distant, it is a heavy-duty type. When selecting the installation
site, therefore, whether a source of interference is located nearby or not must be checked.
In case an equipment energized by power of a frequency different from the commercial
frequency employed on the Model S-3400N or the power line for it is located nearby, scan
synchronization with power line frequency will become ineffective. Such a location should be
avoided.
1 - 11
1.2
Installation Requirements
Table 1.2-3
Classification
Small-sized
electric
equipments
Equipment
using high
frequency
Power
equipment
Large power
Radio frequency
equipment
Noise
Source
Source Equipment
Electric equipment
with contacts
Electric discharge
(spark, arc)
Flasher (neon sign, ornamental electric
bulb), relay, electromagnetic contactor,
thermostat (warmer, refrigerator, heating
iron), cash register
Equipment utilizing
brush type motor
Electric discharge
(spark, arc),
sliding contact
Electric drill, laboratory engine, motor of
sewing machine, cleaner, food mixer,
shaver, massaging machine
Electric discharge
tube
Glow discharge
Neon discharge tube, high pressure
mercury arc lamp
Controller utilizing
semiconductor
Phase control
(transient noise)
Thyristor dimmer, inverter
Industrial high
frequency
equipment
* Electro-magnetic
emission
Industrial high frequency heater, high
frequency electric welder, microwave
oven
Medical high
frequency
equipment
* Electro-magnetic
emission
VHF/UHF devices, electric scalpel
Equipment utilizing
ultrasonic wave
* Electro-magnetic
emission
Flaw detector, depth sounder, fish finder,
ultrasonic cleaner
Power cable
(transmission line)
Electric or
magnetic filed,
Ground current
Induction of commercial frequency
(electrostatic induction, electromagnetic
induction, current leaking in ground)
Electric discharge
(corona, arc)
Corona, poor insulator, poor contact due
to corroded metal (arc discharge)
Electric discharge
(spark, arc)
Trolley wire, internal equipment, rectifier
Magnetic field
Current flow deviation
Electric discharge
Ignition system
Other
Dynamo, voltage regulator, wiper, horn,
winker
*Electro-magnetic
emission
Broadcasting equipment, radar
Electric
railroad/train
Internal
combustion
engine
External Noise Sources
Automobile
Electro-magnetic
emission
Radio transceiver
＊ Emission that are signals in a given system but cause interference in other systems.
1 - 12
1.2.8
1.2.8
Disturbance by Sound Waves
Sound waves (vibrations of air) adversely affect the Model S-3400N regardless of their frequency
and may cause image trouble. To prevent this, confirm before installation that equipment that
may cause a sonic disturbance is not located in the vicinity of the S-3400N. If such equipment
exists, then check for noise level.
In general, as the frequency of noise increases, the sound pressure level decreases, and the
frequency of noise varies depending on the cause of noise. It is therefore necessary to carry out
noise frequency analysis at the installation location of the S-3400N SEM to check the degree of
noise (effective factor) in each case. If the frequency of noise matches the resonance frequency
of the system, a frequency of less than 150 Hz can cause image faults if the noise level is
greater than 58 dB.
Table 1.2-4
Allowable Sound Pressure Level (C characteristics)
Frequency: f (Hz)
Allowable Noise Level (Type I)
Allowable Noise Level (Type II)
f ≤ 150
150 ≤ f ≤ 800
800 ≤ f ≤ 2000
70 dB max.
60 dB max.
70 dB max.
75 dB max.
65 dB max.
65 dB max.
NOTICE: The representative value at the noise level where this instrument is generated is
recorded below.
Normal operation
: 42 dB
Evacuation after specimen exchange : 50 dB
Compressor operation
: 57 to 60 dB (use standard compressor)
* Operator's position in normal use. Exclude Buzzer sound. Condition with low noise
other than instrument.
1.2.9
Electro-Magnetic Compatibility
This instrument has suited class A of EN standard EN61326 (First edition 2002-02). Do not set
up this instrument near the equipment that is influenced data by the electromagnetic radiation
noise in this standard allowance value. Moreover, this instrument might be influenced data by
the electromagnetic radiation noise, and cause the malfunction of the instrument. Manage in
the room where this instrument was set up so as not to bring the following electric equipment * in.
*: Equipment that generates electric wave like specific, small electric power equipment such as
cellular phone, transceiver and cordless phone.
1.2.10 Site Requirements
(1)
Required floor space
A minimum area of 2.5 m x 2.2 m is required.
1 - 13
Installation Requirements
(2)
Minimum required dimensions of the entrance
0.85 m (W) ×1.7 m (H)
(3)
Required strength of the floor
floor strength (N / m2 ) total mass of equipment (kg) × 9.8
≧
3
florr space (m 2 )
(4)
Other
For layout, see Figure 1.2-3.
Rotary Pump
526
800
800
Power cable 10 m
Display unit
Main unit
850
700
500 or
longer
1550
2200 or longer
230
Air Compressor
500 or
longer
Weight
400
225
1.2
400 or
longer
850 or wider
2500 or longer
Dimensions in mm
*The chair is not contained to the instruments.
Fig. 1.2-3 Layout Diagram
NOTICE: Leave an approximately 500 mm clearance on the left side and rear side of the system
for maintenance purposes.
1 - 14
1.3
1.3
Customer-supplied Items
The items listed in Table 1.3-1 should be procured prior to the installation work.
Table 1.3-1
Name
Customer-supplied Items
Quantity
Ethanol
500 mL
Acetone
500 mL
Comments
For cleaning/ultrasound cleaning of components
Polyethylene gloves
1 box
For handling vacuum parts
Specimen vapor deposition system
1 set
For metal vapor deposition on specimen
surfaces/aperture vacuum baking (cleaning)
Ion sputtering system
1 set
For specimen metal coating
Tungsten basket
1 ea.
For vapor deposition equipment filaments
Gold wire
1 ea.
Specimen vapor deposition targets
Ultrasonic cleaning system
1 set
For cleaning components
Aluminum foil
1 ea.
For storing cleaned components
Dessicator or a dry storage box
1 ea.
For the storage of specimens and filaments
Optical microscope
1 ea.
For verifying specimens
Conducting two-side tape
1 ea.
For fixing large specimens/for quick fixing (for low
magnification applications)
Conducting bonding agent (paste)
20 g
For fixing specimens (for high magnification
applications)
Bond
1 ea
For wet specimens fixing
Tweezer
1 ea
For handling specimens and parts
Blower
1 ea
For cleaning
1 - 15
2
2.
FUNCTIONS
This chapter explains the mechanical configuration of the S-3400N SEM and describes its
software.
Figures 2-1a and 2-1b show the appearance of the Model S-3400N Type I and Type II.
Display unit
Main unit
Fig. 2-1 (a)
Model S-3400N Scanning Electron Microscope, Type I
Fig. 2-1 (b)
Model S-3400N Scanning Electron Microscope, Type II
2-1
2.1
Control Knobs and Switches on Main Unit
2.1
Control Knobs and Switches on Main Unit
2.1.1
Main Unit
Figure 2.1-1 shows the appearance of the S-3400N main unit (Type II).
Electron Gun
Condenser Lens Adjustment Screws (8 places)
Specimen Stage
(Photo: Type II stage)
Column
Objective Lens Movable Aperture
AIR Switch
Specimen Chamber
EVAC Switch
TrackBall
Type II stage accessory
Key Switch
(Power switch)
EVAC Panel
Fig. 2.1-1
External View of the Column (Type II)
NOTICE: Do not touch the Condenser Lens Adjustment Screws (8 places).
The position of the condenser lenses adjusted shift, and the first performance might
not be obtained.
2-2
2.1.2
2.1.2
Electron Optical Column
Figure 2.1-2 sketches the sectional view of the S-3400N column.
Electron Gun
Pre-centered cartridge type
Tungsten hairpin filament
1st Condenser Lens
Beam Alignment coils
Specimen Stage
2nd Condenser Lens
Objective Lens Movable Aperture
Deflection Coil
Objective Lens
SE Detector
Specimen
Specimen Stab
Specimen
Chamber
BSE Detector
Fig. 2.1-2
Sectional View of S-3400N Column
2-3
2.1
Control Knobs and Switches on Main Unit
2.1.3
Specimen Stage (Type I)
Figure 2.1-3 shows the Type I specimen stage.
[R] control
[T] control
Touch Sensor and
Absorbed Current
Terminal
[X] control
[Z] control
[Y] control
Fig. 2.1-3
Specimen Stage (Type I)
• [X] control: Moves specimen in X direction within a range from 0 to 80 mm.
• [Y] control: Moves specimen in Y direction within a range from 0 to 40 mm.
• [Z] control: Moves specimen in Z direction or shifts WD (Working Distance) within a range
from 5 to 35 mm. (X-ray analysis position is at 15 mm working distance)
• [R] control: Rotates specimen through 360° (continuously variable)
• [T] control: Tilts specimen within a range from -20° to 90°.
• [Touch sensor and absorbed electron measurement terminal]: This terminal is used for the
measurement of the irradiation
current of electrons on the
specimen (normally it is used
as a touch sensor).
Touch Sensor
: This observes whether the specimen or the stage come in contact
with components inside the specimen chamber
The sensor will inform with the buzzer and the message when
coming in contact.
Absorbed Current Terminal : The absorbed current can be measured by removing the cable for
the touch sensor, and connecting a minute ammeter instead.
2-4
2.1.4
2.1.4
Specimen Stage (Type II)
Figure 2.1-4 shows the appearance of specimen stage driven by motors (Type II).
Absorbed current
measuring terminal
(normally used as a
touch sensor terminal)
Fig. 2.1-4
Large Specimen Stage (Type II)
• Range of movement in X direction: 0 to 100 mm
• Range of movement in Y direction: 0 to 50 mm
• Range of movement in Z direction: WD = 5 to 65 mm
(X-ray analysis position is at 10 mm working distance)
• Range of movement in R direction: 360° continuously
• Range of movement in T direction: -20° to 90°
• Touch sensor and absorbed current measurement terminal: This terminal is for the
measurement of the absorbed
current of the electron image of
a specimen (normally it is used
as a touch sensor terminal).
2-5
2.1
Control Knobs and Switches on Main Unit
2.1.5
EVAC Panel
Figure 2.1-5 shows the EVAC panel.
EVAC Switch/light
N-MODE Light
AIR Switch/light
Key Switch
PUMP Light
Fig. 2.1-5
• Key switch:
EVAC Panel
The POWER for the system unit. Insert the key and turn it to the START
position to start the system. Releasing the key stops the key at the ON
position. Returning the key to the OFF position shuts down the system in
a few seconds.
• EVAC switch/light: This switch introduces air into the specimen chamber. The built-in light
comes on when the specimen chamber is at atmospheric pressure.
When the air is being introduced, the light blinks. When held down for
0.5 second or longer, this switch acts as an AIR switch/light.
• N-MODE light:
This light comes on when the VP-SEM mode is selected.
See <2.3.7.3 VACUUM MODE Window>.
• PUMP light:
This light, which indicates the operating status of the turbo molecular
pump (TMP), blinks when the TMP is accelerating, and remains solidly lit
when the pump is running at a steady state.
2-6
2.1.6
2.1.6
Evacuation System
Figure 2.1-6 shows the block diagram of evacuating system.
S.E.C (OPTION)
GV
Pi-EX
V5
NV
Pi-2
V9
V4
V2
V8
V6
V1
Pi-1
V10
V7
V3
TMP
VALVE 状態検知
Fig. 2.1-6
TMP:
RP:
V1-V7:
NV:
Pi.1:
Pi.2:
R.P 1 /
R.P 2(OPTION) /
(DRY POMP)
(DRY POMP)
Evacuation System
Turbo molecular pump for evacuating the specimen chamber
Rotary pump
Vacuum valves
Needle valve
Pirani vacuum gauge
Pirani vacuum gauge
2-7
2.1
Control Knobs and Switches on Main Unit
2.1.7
System Power Distribution Board
Figure 2.1-7 shows an external view of the system distribution board located in the back of the
main unit.
MAIN ELB
Fig. 2.1-7
FFB1 STAGE
FFB2 DISPLAY
System Power Distribution Board
• MAIN ELB:
Main breaker. At starting turn it ON. Turn it OFF for a complete shutdown.
• FFB1 STAGE:
Breaker for the power for the Type II stage control unit. This breaker, which
is not required for a Type I stage, should normally be turned OFF.
• FFB2 DISPLAY: Breaker for the display power supply unit. Normally this remains ON.
Turn it OFF for a complete shutdown.
2-8
2.2.1
2.2
Control Knobs and Switches on Display Unit
2.2.1
Display Console
Figure 2.2-1 shows the display unit.
Monitor Display
Keyboard
Manual Operation Panel
Mouse
PC
(inside the door)
Fig. 2.2-1
Display Unit
• PC:
SEM control personal computer.
• Monitor display:
Display monitor of PC. For adjustment of the monitor, refer to
instruction manual of the monitor. Model of the monitor display is
subject to change without notice.
Placed inside of the door.
• Manual operation panel: Frequently used controls are placed on the manual operation panel.
• Display power switch:
Power switch of display unit. Power of PC also controlled with the
switch. Be careful not to shut the power switch off before shutting
down PC using Windows functions.
2-9
2.2
Control Knobs and Switches on Display Unit
2.2.2
PC (Personal Computer)
Figure 2.2-2 shows the front part of the control PC. (Because PCs undergo frequent model
changes, the photograph below may not be the same as the model that is actually delivered.)
CD-ROM Drive Unit
FD Drive Unit
PC Power Switch
Power Lamp
Hard Disk Accessing Lamp
Fig. 2.2-2
PC Panel
• PC power switch:
Power switch of PC. Usually the switch need not be used.
The power for the PC is set so that it comes ON when the EVAC
panel key switch is turned to the START position, and it turns OFF
when Windows is shut down.
• FD drive unit:
Floppy disk drive. Be careful not to insert or remove disk while
the access lamp is lit.
• CD-ROM drive unit:
CD-ROM drive.
• Hard disk accessing lamp: Shows that hard disk is being accessed.
2 - 10
2.2.3
2.2.3
Manual Operation Panel
Figure 2.2-3 shows the manual operation panel.
Brightness/Contrast Adjusting Section
Magnification/Image Shift Control Section
Stigma/alignment Adjusting Section
Fig. 2.2-3
Focus Adjusting Section
Manual Operation Panel
• Stigma/alignment adjusting section
[Stigma/alignment] [X], [Y] knobs: Use for astigmatism correction in a usual practice manual
mode.
In the electron optics alignment mode, these knobs serve
for alignment adjustment.
• Focus adjusting section
[Focus] [Coarse] [Fine] knobs:
Use for coarse and fine focus adjustment.
• Magnification/Image shift control section
[Magnification] knob:
Use for magnification setting.
[Image Shift] knobs:
Move image by electrical image shift.
• Brightness/Contrast adjusting section
[Brightness] knob:
Use for brightness adjustment.
[Contrast] knob:
Use for contrast adjustment.
2 - 11
2.2
Control Knobs and Switches on Display Unit
2.2.4
Mouse and Trackball
Figure 2.2-4 shows the mouse.
The mouse has an additional two side buttons, S and E button.
Right Button
Left Button
Wheel and Wheel Button
Fig. 2.2-4
Mouse
Figure 2.2-5 shows the trackball unit.
It is used for stage X and Y-axis manual operation of Type II model.
Direction Switch
Ball
Fig. 2.2-5
• Ball:
Trackball Unit
The field of view modes in the direction in which the ball is rotated.
It is possible to set the direction of motion in a reverse direction.
(See 3.9.14 Optional Setting.)
• Direction switch: Setting the switch to the X side and turning the ball causes the stage to
move solely in a horizontal direction. Likewise, setting the switch to the Y
side and turning the ball causes the state to move solely in a vertical
direction. When the switch is in a neutral state, the stage moves in either
direction.
2 - 12
2.3.1
2.3
2.3.1
Graphical User Interface (GUI)
Starting the PC and Logging in the S-3400 Program
Use the following steps to logon to Windows XP.
(1) Starting up the PC
Use the key switch to turn on the system and star it.
The PC will also start up automatically.
(2) Logon
A message requesting key in will appear. Press Ctrl, Alt and Delete keys simultaneously.
(This request message will be shown or not depending on network setting of SEM computer.)
Then the Windows XP logon dialog window will appear.
(3) Enter the logon name and password assigned to each user to log on.
When the system is delivered, the logon user name "S-3400" should be used.
No password for "S-3400" is set at delivery time.
NOTICE: When the system is delivered, the following two sets of Windows XP logon user
names/privileges/passwords are in effect:
Logon user name
Privileges
Password
Administrator
S-3400
Administrator
Power User
hitachi
None
S-3400N control program will start up automatically. When starting S-3400N control program
after once terminating it, select Start - PC_SEM on the taskbar S-3400N operating program.
When closing this program and restarting it, select All Programs - PC_SEM from Start on the
Taskbar. The program can also be started by double-clicking the shortcut
on the
Desktop.
2 - 13
2.3
Graphical User Interface (GUI)
Fig. 2.3-1
(Windows XP
(R)
Example of Windows Desktop
is a trademark of Microsoft Corp.)
The S-3400 login dialog window will open.
Fig. 2.3-2
S-3400N Login Dialog Window
At the first startup after installation of the program, use the login name "S-3400" and click the OK
button. You need no Password. After login names and passwords have been set, input the
name and the password and then click the OK button.
NOTICE: • The system supervisor shall be responsible for setting and maintaining login names
and passwords.
Refer to <3.9.16 Setting Login Name>.
• Setting or change of password for a login name once registered with the above
operation can be made using the Password Setting dialog window.
Refer to < 3.9.15 Password Setting>.
(R)
• For operation of Windows, refer to the instruction manual for Windows XP .
2 - 14
2.3.2
2.3.2
S-3400N SEM Main Window
Figure 2.3-3 shows the main window for operation of the microscope.
Control Panel
Minimize Button
Menu Bar
Title Bar
Size Button
Close Button
Operation Panel
Fig. 2.3-3
• Title bar:
S-3400N Main Window (Full screen display)
Shows the window title.
• Minimize button: Minimizes the window size.
Task bar.
The window is iconized and placed on the
• Size button:
The window status becomes Normal type. You can change the window
size. Clicking the button changes it to Maximize button.
• Close button:
Terminates the S-3400 operation program and closes the window.
• Menu bar:
Clicking a main menu on the menu bar shows a pull-down menu.
Clicks one of the commands on the pull-down menu to execute the
command.
• Control panel:
Frequently used command buttons are placed on the control panel.
Click a button to execute the command.
2 - 15
2.3
Graphical User Interface (GUI)
• Operation panel: The
button hides the panel, and alternate
shows it again.
Position of the panel can be
moved to left or right side with
and
buttons.
The display position can be moved to the right or left edge by using the
,
buttons.
The
button can be used to specify whether the panel is to be on all
the time.
If the thumb tack (
) is off, the Operation Panel automatically turns off
when the mouse cursor moves away from the Operation Panel.
When the thumb tack is sticking ( ) , the Operation Panel remains on all
the time.
Three modes of scanning image display are available, Full screen (shown on previous page),
Small screen (Fig. 2.3-4 left) and Dual screen (Fig. 2.3-4 right).
Fig. 2.3-4
S-3400 Main Window (Small and Dual screen modes)
2 - 16
2.3.3
2.3.3
Control Arrangement on the Window
Operation tools are placed as follows.
(1) Control panel
Most frequently used controls are placed on it.
(2) Operation panel
The Operation Panel is comprised of four tabs: Cond., Image, Utility, and Stage.
• < Cond tab >
Scanning controls, and electron optical column controls are placed on it.
• < Image tab >
Principally controls related to image size and detector settings are provided.
• < Stage tab >
It has stage operation controls for type II model.
• < Utility tab >
Optional function controls are placed here.
Functions to be placed on Cond and Image, Utility tabs can be customized.
To change control arrangement, open Operation Panel dialog window by Optional setup
command in Option menu.
Also up to eight tool buttons can be placed on the tool button area (lower part of Operation
panel).
Refer to <3.9.14 Optional Setting >.
(3) Menu bar
Most functions are executed on the menu bar.
(4) Mouse operation on the scanning image
The types of operations that can be performed on the image switch when appropriate modes
are selected from the Mouse Mode on the Option menu or from the Mouse Mode of the
pop-up menu that comes up when the mouse wheel button is clicked on the image.
• < Image adjustment >
Focusing, astigmatism correction and brightness/contrast adjustment
• < Stage operation > (Only Type II stage)
X/Y operation as with joystick, R, Z, T (Coordinates specification and continuous
movement), RISM
• < Image shift >
(5) Popup menu
Clicking the wheel button of mouse shows a popup menu.
2 - 17
2.3
Graphical User Interface (GUI)
(6) Shortcut keys
Some shortcut keys are specified.
Refer to <2.3.20 Using Short-cut Keys>.
2.3.4
Menus
The menu bar includes the following menus and commands.
(1)
File menu: The File menu includes commands for opening SEM Data Manager, saving
files, photo recording, and image printing.
• Open SEM Data Manager:
Opens the SEM Data Manager window.
Refer to <3.11 Using SEM Data Manager >.
• Direct Save:
Opens the Save Image dialog window. Use it for
saving viewing images to a disk. (To save captured
button in the Captured
images, use the Save
Image window.)
Refer to <2.3.17 Save Image Dialog Window>.
• Direct Photo
Executes direct photo recording.
Refer to < 3.6.6 Taking Photographs (Option)>.
• Memory Photo
Executes memory photo recording.
Refer to < 3.6.6 Taking Photographs (Option)>.
• Layout Print
Opens the Report Generation dialog window. Use it
for printing viewing images to a Windows-supported
printer.
To print captured images, use Layout Print
button on Captured Image window. And for saved
images, use the print function on the SEM Data
Manager.
Refer to <3.9.10 Printing Images Using Report
Generation Function>.
• PCI Transfer
Transfers viewing image to Quartz PCI. This is enabled
when the PCI option is set.
• Assignment Record Buttons: These buttons assign buttons in the Record Area on
the Control Panel.
• Password Lock:
This option can be used to lock Windows when you
leave your work site unattended. To unlock Windows,
you need to enter a password.
See <3.9.19 Password Locking of Windows>.
2 - 18
2.3.4
• Exit
(2)
Closes SEM operation.
Edit menu: The Edit menu includes commands for copying viewing images and attributes
to the Windows clipboard.
• Copy Image:
Copies viewing images to the Windows clipboard.
Refer to < 3.9.11 Copy Image>.
• Copy Attribute: Copies information on viewing images to the Windows clipboard.
Refer to < 3.9.12 Copy Image Information Text>.
(3)
Setup menu: Commands for setting system operating conditions.
• Optics Setup:
Opens the Optics tab of the Setup dialog window. Use it to
select the optimal electron optical column.
Refer to <3.4.1 Setting Parameters for the Electron Optical
System>.
• Condition Load:
Opens the Op. Cond. Tab of the Setup dialog window.
Use it for loading and reproducing previously saved electron
optical column condition.
Refer to <3.9.6 Operating Condition Memory>.
• Condition Save:
Opens the Op. Cond. Tab of the Setup dialog window.
Use it for saving present electron optical column condition.
Refer to <3.9.6 Operating Condition Memory>.
• Image Display:
Opens the Image tab of the Setup dialog window. Use it for
setting the preset magnification, contrast and brightness of ABCC,
and capture speed.
Refer to <2.3.9.2 Image Tab>.
• Photo Condition:
Opens the Record tab of the Setup dialog window. Use it for
selecting scanning speed and other photo recording conditions.
Refer to <2.3.9.3 Record Tab>.
• Data Display:
Opens the Record tab of the Setup dialog window. Use it to turn
data display On/Off and select specific information to be printed on
image.
Refer to <2.3.9.3 Record Tab>.
• Mag. Preset Setup: Displays a window for setting magnification preset values.
(4)
Operate menu: The Operate menu includes commands for operation of column
alignment, motorized stage (Type II instrument only), auto functions etc.
• Alignment:
Opens the Alignment dialog window. Use it for column
alignment operation.
Refer to <3.4.2 Axial Alignment>.
2 - 19
2.3
Graphical User Interface (GUI)
• Filament Image:
Displays the Filament Image window.
This button is used to perform appropriate image
adjustments using a filament image. Normally this
function is not used by customers.
• Image Adjustment:
Displays the Image Adjustment window.
This button permits the performance of basic adjustment
operations, such as focusing and stigma compensation.
• ABCC:
Executes automatic brightness and contrast control.
Refer to <3.5.4 Image Brightness and Contrast
Adjustment>.
• Auto Focus:
Executes automatic focusing.
Refer to <3.5.5 Focus and Astigmatism Correction>.
• Auto Stigma and Focus:
Executes automatic astigmatism correction and focusing.
Refer to <3.5.5 Focus and Astigmatism Correction>.
• Assignment Auto Buttons: These buttons assign buttons to the Auto Function area
on the Control Panel.
(5)
• Focus Monitor:
Starts Focus Monitor mode.
Refer to <3.5.5 Focus and Astigmatism Correction>.
• BC Monitor:
Starts BC Monitor mode.
Refer to <3.5.4 Image Brightness and Contrast
Adjustment>.
• Dynamic Stigma Monitor:
Starts up the Dynamic Stigma Monitor.
• DeGauss:
Degausses the objective lens.
Scan menu: The Scan menu includes commands for scanning control.
• Run (Freeze):
Runs or freezes scanning alternately.
• Capture:
Starts image capture.
Refer to <3.6.3 Image Capture>.
• Capture Setup:
During the image capture operation, this button can be
used to specify an image size (in pixels) and scanning.
• Split DM Mode:
Activates Split/Dual Mag mode.
Refer to <3.9.2 Split Screen and Dual Mag Mode>.
• Scan Speed:
Selects scanning speed.
Refer to <3.5.3 Selecting Scanning Speed>.
• Assignment Speed Buttons: These buttons assign scanning speeds to the scan
speed buttons. Twelve speeds can be assigned to four
buttons.
See <3.5.3 Selecting Scanning Speed>.
2 - 20
2.3.4
• Scan Mode:
(6)
Selects the size of scanning image display (Screen
mode) from Full, Dual and Small.
Refer to <3.9.1 Screen Mode>.
Image menu: The Image menu includes commands for signal processing of optional
detectors.
• Opt. Signal Processing: Opens the Opt Signal Processing dialog window.
Refer to <3.9.5 Signal Processing>.
• Show Histogram:
Displays a histogram of the image being observed.
See <3.5.4 Image Brightness and Contrast Adjustment>.
(7)
Analysis menu: The Analysis menu includes commands for analysis modes,
measurement and others.
• Normal:
Sets to Normal mode (image observation).
• Line Analysis:
Selects Line analysis 1 and 2 mode alternately.
Refer to <3.9.4 X-ray Analysis Mode>.
• Spot Analysis:
Selects Spot 1 and 2 mode alternately.
Refer to <3.9.4 X-ray Analysis Mode>.
• Area Analysis:
Selects Area analysis 1 and 2 mode alternately.
Refer to <3.9.4 X-ray Analysis Mode>.
• Oblique:
Opens Oblique image window and displays bird's-eye view of
viewing images.
Refer to <3.9.13 Oblique Image>.
• CD Measurement: If the CD-Measurement option is installed, the CD Measurement
dialog window is brought up.
(8)
Option menu: The Option menu includes commands for optional functions.
• Optional Setup - Op. Panel Setting: Opens Op. Panel tab of the Optional Setup
dialog window.
Use for arrangement of functions on the
Operation Panel.
Refer to <3.9.14 Optional Setting>.
• Optional Setup - Stage:
Opens Stage tab of the Optional Setup dialog
window.
Use for setting parameters of stage control
function. Enabled in Type II.
Refer to <3.9.14 Optional Setting>.
2 - 21
2.3
Graphical User Interface (GUI)
• Optional Setup- Mouse Operation: Opens Mouse tab of the Optional Setup dialog
window.
Use for setting sensitivity of mouse operation.
Refer to <3.9.14 Optional Setting>.
• Optional Setup- General:
Opens General tab of the Optional Setup dialog
window.
Use for setting various operation parameters.
Refer to <3.9.14 Optional Setting>.
• Optional Setup- Evacuation:
Displays the Evacuation tab on the Optional
Setup window. Sets the Evacuation mode for
startup.
• Optional Setup- AAA Adjust:
Displays the AAA Adjust tab on the Optional
Setup window. Sets a scanning speed and the
number of images to be integrated for auto
adjustments.
• Assignment Tool Buttons:
Assigns functions to the tool button located in the
lower portion of the Operation Panel. Switches
the types of operations that can be performed on
the Mouse Mode image.
• Login Setting:
Opens the Login Setting dialog window. Use it
for setting login names and passwords for users.
The dialog window can be opened only when
logged in with the system manager's login name.
Refer to < 2.3.14 Login Setting Dialog Window>.
• Password Setting:
Opens the Password Setting dialog window.
Use it for setting or changing the password for
the login name of the current user.
Refer to <2.3.16 Password Setting Dialog
Window>.
• Stage Calibration:
Starts calibration functions for stage controller.
• Stage Program Download:
Use this function when the specimen stage
control program needs to be updated due to a
system version upgrade.
See <3.9.20 Downloading Stage Control
Program>.
2 - 22
2.3.4
(9)
Window menu: The Window menu includes commands for opening the Captured Image
window, and others.
• Captured Image: Opens the Captured Image window.
Refer to <2.3.10 Captured Image Window>.
• Close All:
Closes all dialog windows except for the Scanning Image window.
(10) Undo menu: Returns to the status prior to conducting the following operation.
Auto Focus (AFC)
Auto Stigma and Focus (ASFC)
ABCC
Auto Filament (AFS)
Auto Beam Alignment (ABA)
Stage Drive
(11) Help menu:
Opens Help for S-3400N SEM operation.
• Operation Guide: Opens the Operation Guide dialog window.
It will help you to perform general operation procedures.
• Maintenance:
Opens the Maintenance dialog window Explains filament
replacement procedures in 3D animation graphics.
• Index:
Shows the index of Help.
• Search:
Shows the key-word search of Help.
• About S-3400N:
Indicates the version of S-3400N SEM.
2 - 23
2.3
Graphical User Interface (GUI)
2.3.5
Popup Menu
Click the center (wheel) button of the mouse on the image area to open the Popup menu.
The Popup menu includes frequently used commands and changes depending on present
status (scan is running or frozen).
(scanning)
Fig. 2.3-5
(frozen)
An Example of Popup Menu
(1) Open when scanning
•
•
•
•
•
•
•
•
•
•
•
•
•
•
Freeze:
Capture:
Photo:
ABCC:
Auto Focus:
Auto Stigma and Focus:
Scan Speed:
Stage Register:
Freezes scanning.
Starts image capturing.
Photographs images (optional).
Executes automatic brightness and contrast control.
Executes automatic focusing.
Executes automatic astigmatism correction.
Selects scanning speed.
Register the present stage position for the Sample Map
function.
Scrollbar:
Show or hide scrollbars for adjusting focus, stigma,
brightness and contrast.
Area Marker:
Show or hide the area marker.
Mouse Mode:
Switches mouse operation functions on the image.
Open Dialog- Setup:
Opens the Setup dialog window.
Open Dialog- Captured Image: Opens the Captured Image window.
Open Dialog- Sample Map:
Opens the Sample Map dialog window.
2 - 24
2.3.5
(2) Open when frozen
• RUN:
Runs scanning.
• Memory Photo: Photographs a frozen image (optional).
• Layout Print: Opens the Report Generation dialog window.
viewing images.
• PCI transfer : Transfers a frozen image to the PC.
2 - 25
Use it for printing
2.3
Graphical User Interface (GUI)
2.3.6
Control Panel
Contains the most frequently used controls such as for image observation, and image recording.
Usual operation can be performed using the Control Panel and the Manual Operation Panel.
2.3.6.1
Functional Windows on the Control Panel
Electron gun control
Scan control
Image recording
Stage control
Auto control/Monitoring function
Magnification control
Fig. 2.3-6
2.3.6.2
Capture control
EVAC/AIR control
Control Panel
Electron Gun Control Unit
Accelerating voltage ON/OFF button, accelerating voltage settings Vacc, and emission current
Ie display
Fig. 2.3-7
Electron Gun Control Unit
When conditions that allow the application of accelerating voltage to the electron gun
(appropriate vacuum levels in the electron gun and specimen chambers), the ON button is
enabled, and the Vacc indicator blink alternately in yellow and blue. Clicking the ON button
applies the accelerating voltage, turns the Vacc indicator yellow, and causes the le section to
display the emission current.
OFF button shuts the gun accelerating voltage down.
2 - 26
2.3.6
2.3.6.3
Scan Control Windows
Fig. 2.3-8
Scan Control Block
(1) Run button
when scanning and changes to
Used to run or freeze scanning. The button is at
while scan is frozen.
To stop scanning, click the button. Scanning continues until it reaches the end of the frame
and then stops. During this time, the display in the upper left section of the image shows
"Going to Freeze", and after the image stops, the displays shows "Freeze".
In the slow scan mode, to stop the scanning process before the last frame is reached during
the "Going to Freeze" process, click this button again.
(2) Scan speed buttons (TV1 to Red1 in above picture)
14 scanning speeds are assigned to 4 buttons. Each of buttons sets 2 scanning speeds
alternately. To assign scanning speed to each button, click the
button. The following
dialog will be shown.
Fig. 2.3-9
Scanning Speed Assignment Window
Select a speed for each button and click OK.
See <3.5.3 Selecting Scanning Speed>.
2 - 27
2.3
Graphical User Interface (GUI)
2.3.6.4
Auto Control
Fig. 2.3-10
Auto Control
(1) ABCC
Starts auto brightness/contrast control (ABCC). If the results of ABCC are not adequate,
you can change the reference brightness and contrast in the Image tab of the Setup dialog
window. ABCC is applicable to SE and BSE signal.
(2) AFC
Starts Auto Focus Control.
When magnification is lower than 5,000×, coarse focus (search using a wide focus range) is
carried out. Fine focus (search using a narrow focus range) is carried out at magnifications
higher than 5,000×.
Fine focus works correctly under conditions where the image is not clear but visible.
The result of Auto Focus depends on the surface structure of the specimen.
When there is little or no surface detail on the specimen, or when the specimen is charged,
Auto Focus will not operate properly.
(3) ASFC (Auto Stigma & Focus Control)
Automatically corrects the stigma and focus.
(4) Align
Opens Alignment dialog window and starts Aperture alignment.
Fig. 2.3-11
Alignment Window
See <3.4.2 Axial Alignment>.
2 - 28
2.3.6
(5) Monit
Waveform monitor mode is activated. The Focus monitor and B/C monitor modes are
set alternately by clicking the button.
At the first click, a waveform is displayed for monitoring the focus. The magnification is set
at 1,000×. Focus the image so that the waveform shows sharp peaks.
The next click changes the mode to B/C monitor. A waveform and reference lines are
displayed for monitoring contrast (amplitude of the waveform) and brightness (vertical level
of the waveform).
When the maximum and minimum values of the waveform are adjusted to fit within the
upper and lower reference lines, appropriate brightness and contrast will be obtained.
To terminate the Focus monitor and B/C monitor mode, click the Cancel button in the
message dialog shown while in the monitor modes, or click one of the scan speed buttons.
Refer to <3.5.4 Image Brightness and Contrast Adjustment> and <3.5.5 Focus and
Astigmatism Correction>.
(6) Customizing the buttons
button
The scanning speeds assigned to the buttons can be customized. Either click the
or right-click the button, or click Operate- Assignment Auto Buttons to bring up an
assignment window below the button, as shown in the figure below.
Fig. 2.3-12
Assignment Auto Window
2 - 29
2.3
Graphical User Interface (GUI)
2.3.6.5
Magnification Control
Fig. 2.3-13
Magnification Control
(1) Magnification indicator Window
Indicates magnification.
In this window, moving the mouse while holding down the left or right button changes
magnification. To increase magnification, drag the mouse to the right. To decrease it, drag
to the left.
For coarse changes, press the right button and for fine changes, the left button.
Alternately, click the area with the right button to increase or with the left button to decrease
magnification stepwise.
(2) Preset button
Two magnifications can be preset.
Clicking the same button again restores the original magnification.
For the magnification preset function, clicking Setup - Mag.Preset Setup, clicking the
button on the Preset Mag. button, or right-clicking the Preset Mag. button brings up a setup
window, as shown below. If the magnification indicated is a preset value, the letters PM are
displayed in the upper right corner of the magnification display section.
Fig. 2.3-14
Preset Mag. Setup Box
2 - 30
2.3.6
2.3.6.6
Capture Control
This block is used to capture images.
Fig. 2.3-15
Capture Control Unit
Captures an image with pre-specified image resolution and scanning speed.
Displayed figures on the capture button (the number 640 in the above example) indicates the
button on the
resolution of the captured image. Clicking Scan - Capture Setup, clicking the
Capture button, or right-clicking the Capture button brings up a Setup window, as shown below,
on which you can set a scanning speed and a resolution level for the capturing process:
Fig. 2.3-16
Capture Control Unit
The capturing process runs in two modes: one in which capturing conditions can be set
according to the capturing speed currently in effect (with the Scan Speed Link check ON) or
one in which capturing is conducted at fixed conditions, irrespective of the scanning speed (with
the Scan Speed Link check OFF).
2 - 31
2.3
Graphical User Interface (GUI)
• Scan speed unlinked mode
Fig. 2.3-17
Scan Speed Unlinked Mode Setting
Irrespective of the scanning speed currently in effect, the system captures images using a
specified scanning speed, Resolution, and Speed/Integration.
Select one of TV, Fast, and Slow, and set the Resolution and Speed/Integration.
If an image cannot be captured using specified conditions, either the displayed image size
changes or a message comes up.
For example, if the image size is Full, the capture scanning speed is TV, and a 1280 x 960
Resolution is specified for a capturing operation, the image size will change from Full to Small,
the capturing process begins, and upon completion of that process, the image size will revert to
Full.
• Scan speed link mode
Fig. 2.3-18
Scan Speed Link Mode Setting
This option allows you to set capturing conditions independent of the scanning speed currently in
effect.
For each scanning operation, setting a Resolution and a Speed/Integration causes the system
to capture images under capturing conditions according to the scanning speed currently in effect.
If a capturing operation cannot be performed under specified conditions, either the image size
changes or a message comes up.
2 - 32
2.3.6
2.3.6.7
Image Recording Control
This block allows you to record captured images.
Fig. 2.3-19
Image Recording Control
Recording function buttons
Of the recording functions to be used, three functions can be assigned to three buttons here.
The following seven recording functions are available:
Direct Save:
Opens the Save Image dialog window.
to a disk.
Use it for saving viewing images
Quick Save:
Saves the currently displayed image under a pre-defined file name.
Layout Print:
Opens the currently displayed image by adding it to the Preview page of
the Report Generation window.
Direct Print:
Directly outputs the current image to the printer.
Direct Photo:
Executes Direct Photo recording. (The button is effective when the
optional photo-recording unit is included.)
Memory Photo: Executes Memory Photo recording. (The button is effective when the
optional photo recording unit is included.)
PCI Transfer:
Transfers viewing image to Quartz PCI.
the optional PCI is installed.)
2 - 33
(The button is effective when
2.3
Graphical User Interface (GUI)
Clicking File - Assignment Record Buttons or clicking the
button on the Image Recording
Control button or right-clicking the Image Recording Control button brings up a Setup window,
as shown below. From this window, functions can be assigned to three buttons:
Fig. 2.3-20
Recording Function Selection Window
2 - 34
2.3.6
2.3.6.8
EVAC/AIR Control
Fig. 2.3-21
EVAC/AIR Control
Clicking the EVAC button initiates the evacuation of the specimen chamber. Similarly, clicking
the AIR button causes the AIR processing of the specimen chamber.
The display window to the left of the EVAC button lights up when the specimen chamber is in the
EVAC state; it blinks when the EVAC process is in progress; and in other cases it remains off.
Similarly, the display window to the left of the AIR button lights up when the specimen chamber
is in the AIR state; it blinks when the AIR processing is in progress; and it remains off in all other
cases.
EVAC
Button
EVAC
Window
AIR
Button
AIR
Window
EVAC fall sequence
Disabled
※1
Disabled
※1
EVAC rise sequence
Disabled
※2
Disabled
※2
EVAC processing on specimen
chamber
Disabled
Blinking
Enabled
Off
Specimen chamber in HVON/OFF
operation in EVAC mode
Disabled
Lit
Disabled
Off
Specimen chamber undergoing an
EVAC mode change in EVAC mode
Disabled
Blinking
Enabled
Off
Specimen chamber in EVAC mode,
and in LOW-EVAC mode the
vacuum level currently set does not
agree with the current vacuum level.
Disabled
Blinking
Enabled
Off
Specimen chamber in EVAC mode
and in conditions other than the
above 3 items
Disabled
Lit
Enabled
Off
Specimen chamber undergoing AIR
processing
Enabled
Off
Disabled
Blinking
Specimen chamber in AIR
Enabled
Off
Disabled
Lit
Status
※3
※1: Both EVAC and AIR windows blink alternately.
※2: The applicable window blinks, depending on the EVAC/AIR condition.
※3: Only the EVAC window blinks in deep green.
2 - 35
2.3
Graphical User Interface (GUI)
2.3.6.9
Stage Control
（With Type II 5-axis motor-drive stage）
Fig. 2.3-22
Stage Control
(1) HOME Z10 button
Moves the stage to the Exchange Position (X＝60 mm, Y＝25 mm, R＝0°, T＝0°, Z＝10
mm). If the stage is in the Exchange position (the Z-axis at 10 mm), the display window on
the left side of the button is in blue.
(2) HOME Z65 button
Moves the stage to the Exchange Position (X＝60 mm, Y＝25 mm, R＝0°, T＝0°, Z＝65
mm). If the stage is in the Exchange position (the Z-axis at 65 mm), the display window on
the left side of the button is in blue.
(3) !STOP button
Use this button to stop stage movement when, for example, it has been started with
incorrect stage coordinate value.
2 - 36
2.3.6
2.3.6.10
Extension for Dual Screen Mode
When the screen mode is Dual, the control panel is extended as follows.
Fig. 2.3-23
Control Panel (Dual screen mode)
(1) Right-and-left dual control
The Run/Freeze, Capture, Recording, and detector selection control buttons are available
in right-left configurations. By using these buttons, you can control right and left actions
independently.
(2) Signal A/B selection
ABCC, brightness and contrast knobs on the manual operation panel are effective for the
signal selected here.
(Brightness and contrast adjustment with mouse operation works on A and B images
separately.)
(3) Signal Mixing
Different signals can be assigned to right and left, and the signals assigned to right and left
can be mixed and displayed.
When the box is checked, the system displays an image, produced by mixing the two
selected signals, on the right screen.
• Brightness and contrast adjustments using the mouse on the screen operate not on the
results of mixing, but on the image signal that is selected in the Signal Selection unit.
• Unchecking the box turns off the signal mixing option.
(4) Color Mixing
When different types of signals are assigned to the right and left screens, this function
assigns different colors (R/G/B) to the two signals to produce a color-mixed image. The
image on the right is displayed in color. First, set the dual mode, assign different signals to
right and left, and then make observations. Check the Color Mixing box. Click the colors
to be assigned to A (left) and B (right) to assign colors to the signals. If a color is not to be
assigned, click Off. Unchecking the Color Mixing box resets the display to the normal
monochrome mode. Although mixed color images cannot be photographed, they can be
saved. Selecting Screen B and saving it records the image as a color image.
2 - 37
2.3
Graphical User Interface (GUI)
2.3.7
Operation Panel
The Operation Panel is comprised of four tabs. The Cond., Image, and Utility tabs relate to
SEM operations. On each tab, control view/hide can be specified on a user-to-user basis.
The Stage tab is for operating the stage. This tab is displayed when the available stage is a
Type II stage (with a 5-axis motor drive).
The following explains the functions of the blocks that appear on the Cond., Image, and Utility
tabs. The Stage tab will be explained in the section on Stage Operation (3.5.7).
Cond tab
Image tab
Fig. 2.3-24
Operation Panel
2 - 38
Utility tab
2.3.7
2.3.7.1
ELECTRON BEAM Window
This block allows you to turn the accelerating voltage on and off, and to set the probe current.
Vacc selection box
Vacc micro adjustment button
Vacc ON/OFF button
Probe current selection box
Probe current micro adjustment button
Probe current setting slider
Fig. 2.3-25
Electron Beam Window
(1) Accelerating voltage selection box
To set an accelerating voltage, either enter a numerical value directly in this box or select a
desired value from a list that is displayed by clicking a pull-down menu.
(2) Accelerating voltage micro-adjustment button
By clicking the Up and Down arrows, you can adjust the accelerating voltage in 0.1kV
increments.
(3) Accelerating voltage ON/OFF button
This button turns the accelerating voltage on and off.
(4) Probe current selection box
You can set a probe current by either entering a numerical value directly in this box or
selecting a desired value from a list that is displayed by clicking a pull-down button.
(5) Probe current micro-adjustment button
By clicking the Up and Down arrows, you can adjust the probe current in 0.1 increments.
(6) Probe current setting slider
By moving the slider to the right or left, you can vary the probe current. In addition, by
clicking the side of the slider, you can adjust the probe current in 0.5 increments.
2 - 39
2.3
Graphical User Interface (GUI)
2.3.7.2
Focusing Position (WD) WORKING DISTANCE Window
This block allows you to set a focusing position.
WD setup/display box
WD micro adjustment button
WD setting slider
Analysis position setting button
Fig. 2.3-26
Focusing Position (WD) Window
(1) WD setup/display window
This window displays the current working distance (the focusing position calculated from the
lens current).
When a working distance value is selected from the pull-down list, focus point will be set to
the specified working distance. The box also indicates present focal length if varied with
manual focusing. This window can be used for focusing purposes when the Z-axis of the
stage is moved or when it is necessary to set the WD accurately for EDX analysis purposes.
(2) WD micro-adjustment button
By clicking the Up and Down arrows, you can adjust the WD in 0.1mm increments.
(3) WD setting slider
The slider indicates the current WD. Also, by moving the slider with the mouse to the right
and left, you can change the WD. By clicking the side of the slider, you can adjust the WD
in 1 mm increments.
(4) Analysis position setting button
This button can be used to set the WD at 10 mm, such as during an EDX analysis.
This button sets a WD without the moving the stage itself.
2 - 40
2.3.7
2.3.7.3
VACUUM MODE Window
This window can be used to switch vacuum modes and set a vacuum level.
Vacuum mode selection control
Vacuum level display area
Vacuum level setting control
Fig. 2.3-27
VACUUM MODE Window
(1) Vacuum mode selection control
This control switches between the VP-SEM and SEM modes.
If the VP-SEM mode is selected, the vacuum level is set to the level specified in the Setting
Vacuum option in the block.
(2) Vacuum level display area
This area shows the current vacuum level in the specimen chamber in terms of an indicator
and a numerical value.
(3) Vacuum level setting control
This control sets and displays the vacuum level that is specified in the VP-SEM mode.
The allowable range of vacuum level is from 6 to 270Pa.
2 - 41
2.3
Graphical User Interface (GUI)
2.3.7.4
SCAN MODE Window
This window sets the Scan Mode.
Fig. 2.3-28
Scan mode button
Norm
Line
Spot
Area
SCAN MODE Block
(1) Norm
Image observation mode
(2) Line
Displays a line profile of the signal intensity as a horizontal line in the observed image.
This control toggles between the 1 (position setting) and 2 (line analysis) modes.
(3) Spot
Stops the scanning and places the electron beam at a specified point on the image.
Used for X-ray analysis of a point on the specimen.
This control toggles between the 1 (position setting) and 2 (line analysis) modes.
(4) Area
Scans the electron beam in a selected frame in the image.
An advantage to this is that it allows an area-averaged spectrum as the beam is scanned
over a specified area, greater than the beam spot. Another advantage is that it reduces the
likelihood of specimen contamination in comparison with the stationary beam in Spot
Analysis mode.
This control toggles between the 1 (position setting) and 2 (line analysis) modes.
2 - 42
2.3.7
2.3.7.5
CONDITION LOAD/SAVE Window
This window calls and saves observation conditions and executes the operating guides.
Fig. 2.3-29
CONDITION LOAD/SAVE Window
(1) Load button
This button opens the Op. Cond. tab on the Setup window in the Load mode.
(2) Save
This button opens the Op. Cond. tab on the Setup window in the Save mode.
(3) Guide
This button opens the Operation Guide window.
2.3.7.6
SCREEN MODE Window
Selects a screen mode.
Fig. 2.3-30
SCREEN MODE Window
(1) Full: Full screen mode
Scanning image is displayed on full desktop.
(2) Dual: Dual screen mode
Two image screens are displayed. Use the mode to observe different signal images
simultaneously or for color mixing image observation.
(3) Small: Small screen mode
Scanning image is displayed with a half size of desktop.
Faster frame speeds are available and in some cases results in better image quality.
2 - 43
2.3
Graphical User Interface (GUI)
2.3.7.7
DETECTOR Window
This window switches and controls detectors.
Detector selection control
ABCC link check box
Detector control area
Fig. 2.3-31
DETECTOR Window
(1) Detector selection control
This control switches detectors.
(2) ABCC link check box
If this box is checked, switching detectors automatically executes ABCC.
With the BSE selected, switching the BSE mode or modifying gains also automatically
executes ABCC.
(3) Detector-only control area
If a detector-only control selected on the DETECTOR control is available, the control is
displayed in this area. The figure above indicates the situation where a BSE detector is
selected.
2.3.7.8
IMAGE SHIFT Window
Indicates the present value of image shift with yellow cross mark.
Clicking the Reset resets image shift at the mid-point of the movable range.
Fig. 2.3-32
IMAGE SHIFT Window
2 - 44
2.3.7
2.3.7.9
R.ROTATION Window
The raster rotation rotates the direction of the displayed image by rotating the scanning direction
of the electron beam.
Rotation ON/OFF check box
Rotation angle display/set box
Angle micro adjustment button
90° step rotation button
Angle setting slider
Fig. 2.3-33
R.ROTATION Window
(1) Rotation ON/OFF check box
Clicking this box and placing a checkmark on it enables raster rotation.
(2) Rotation angle display/set box
This box displays the current angle of rotation. Entering an angle from the keyboard and
pressing the Enter key causes the image to rotate by that angle.
(3) Angle setting slider
By moving the slider to the right and left with the mouse, you can vary the angle of rotation
continuously. By clicking the side of the slider, you can adjust the angle in 0.5-degree
increments.
(4) Angle micro-adjustment button
By clicking the right and left arrows, you can adjust the angle of rotation in 0.1-degree
increments.
(5) 90° step rotation button
Rotates scanning direction in 90° increments.
2 - 45
2.3
Graphical User Interface (GUI)
2.3.7.10
SIGNAL PROCESSING Window
Applies real time digital image processing to the scanning image.
Processing selection box
Intensity selection box
Fig. 2.3-34
SIGNAL PROCESSING Window
(1) Processing selection box
Selects a processing.
• Smooth:
Applies pixel averaging spatial filtering. Reduces snow noise.
Effective especially in case of high magnification image where the beam
spot size is larger than pixel size. For low magnification images having fine
structures, it may cause some degradation of sharpness.
Two processing intensities selectable.
• Sharpen:
Increases sharpness of scanning image.
Two processing intensities selectable.
It may increase noise when the original image contains snow noise.
• Edge Enhance: Similar but stronger processing than Sharpen.
• Invert:
Color inversion.
• Gamma:
Gamma correction.
-5 to +5 selectable.
Results in negative image.
(2) Intensity selection box
Selects a processing intensity.
NOTICE: The signal processing is not applied to pictures taken with direct photo function.
The signal processing is not applicable when operating with Dual screen mode.
It is possible to apply similar spatial filtering to saved images using SEM Data
Manager.
2 - 46
2.3.7
2.3.7.11
DATA ENTRY Window
Use for drawing texts and graphics on the scanning image.
Fig. 2.3-35
Refer to <3.9.8
2.3.7.12
DATA ENTRY Window
Data Entry Function>.
TILT COMPENSATION Window
Specimen tilting causes defocusing and magnification change in the tilt direction.
Tilt compensation is the tool to correct the two phenomena.
Dynamic focus check box
Dynamic focus display/entry box
Dynamic focus micro adjustment button
Dynamic focus adjustment slider
Tilt-magnification compensation check box
Tilt-magnification compensation display/entry box
Tilt-magnification compensation micro adjustment button
Tilt-magnification compensation adjust slider
Fig. 2.3-36
TILT COMPENSATION Window
(1) Dynamic focus
Checking the Dyn.Focus check box enables dynamic focusing (the function that varies the
focusing in tandem with the scanning process). The adjustment slider and the microadjustment button can be used to make adjustments so that the image will be in focus over
the entire screen.
The possible range of adjustment is ±100(±70°) so that compensation can be made in both
positive and negative directions of tilt. These numbers are index values, not angles.
Adjustments should be made by viewing the focus on the image.
2 - 47
2.3
Graphical User Interface (GUI)
(2) Tilt compensation
Tilting the specimen causes the specimen to be viewed from a tilted direction such that the
specimen appears shrunk in the direction of tilt. The tilt compensation function corrects this
factor so that the magnification in the direction of tilt will be equal to the situation where there
is no tilt.
Checking the Tilt Comp. check box enables this function. The adjustment slider and the
micro-adjustment button can be used to set the value in the display/entry box equal to the
specimen tilt angle.
See <3.9.9 Raster Rotation, Dynamic Focus and Tilt Compensation>.
2.3.7.13
Other
• Detail button
Clicking this button opens the Optics tab of the Setup menu.
• Show Histogram button
This button opens the Histogram menu.
• Scroll Bar and Area Marker Window
Fig. 2.3-37
Scrollbar/Marker Show/Select Window
(1) Show Scrollbar check box
Scrollbars for stigma, brightness and contrast are shown around the scanning image when
the Show Scrollbar is checked.
(2) Show Area Marker check box
The area marker, which is a crosshair cursor appearing at the center of scanning image, is
shown when the Show Area Marker is checked.
2 - 48
2.3.8
2.3.8
Mouse Operation on the Scanning Image
Mouse operation tools for adjusting focus, stigma, contrast, brightness and specimen stage are
provided.
2.3.8.1
Exchanging Mouse Control Functions
Image mouse operation can be switched to the following modes by using either the Mouse
Mode on the Option menu or the Mouse Mode on the pop-up menu that comes up when the
mouse wheel button is clicked on the image display unit:
(1) Focus/Stigma/Contrast/Brightness Adjustment
(2) Stage operation (X, Y, R, T, Z) and image shift operation
(3) Stage operation (X, Y, R) and image shift operation
(4) Stage operation (dragging with mouse) and image shift operation
(5) No operation (Off)
2.3.8.2
Focus/Stigma/Contrast/Brightness Adjustment
The design of mouse pointer is changed corresponding to its position as shown below.
Fig. 2.3-38
Mouse Control (Focus/stigma/contrast/brightness)
2 - 49
2.3
Graphical User Interface (GUI)
Area:
Coarse focus adjustment: move mouse horizontally while pressing down right button.
Fine focus adjustment:
move mouse horizontally while pressing down left button.
Area:
Stigma adjustment (X):
Stigma adjustment (Y):
move mouse horizontally while pressing down left button.
move mouse horizontally while pressing down right button.
Area:
Brightness adjustment:
Contrast adjustment:
move mouse horizontally while pressing down left button.
move mouse horizontally while pressing down right button.
When the Show Scrollbar is checked on the Utility tab, adjustment scrollbars are placed on the
scanning image area.
It is possible to operate with these scrollbars.
Stigma Sliders:
Brightness and Contrast Sliders:
Focus:
2 - 50
2.3.8
2.3.8.3
Stage and Image Shift Tools
Controls shown below will appear on the scanning image.
Type I manual stage
Type II motorized stage (X, Y, R, T, Z)
Type II motorized stage (X, Y, R)
Type II motorized stage (dragging with mouse)
Fig. 2.3-39
Mouse Control (stage)
2 - 51
2.3
Graphical User Interface (GUI)
(1) Type I manual stage
It is for image shift operation.
Move the mouse pointer
to a position and press down
left or right button. The pointer will be changed to
mark. Move mouse to target
position while holding down the button and then release the button.
If the above target position is near the center of the image area, the mouse trace line is
changed and the target position is moved to the center of image.
(2) Type II motorized stage
All 5 axes are controlled with stage control tools.
Refer to <3.5.7.4 Operation Methods Used to Move the Specimen Stage> for operation
procedure.
2.3.9
Setup Dialog Window
The Setup dialog window has four tabs.
operation.
(1) Click the Setup
To open the dialog window, use the following
button on the Tool button area of the Operation panel.
(2) Select following commands from the Setup menu.
Setup - Optics Setup:
Opens Optics tab
Setup - Condition Load: Opens Op. Cond tab
Setup - Condition Save: Opens Op. Cond tab
Setup - Image Display: Opens Image tab
Setup - Photo Condition: Opens Record tab
Setup - Data Display:
Opens Record tab
(3) Click the Detail button on the Cond tab of the Operation panel.
(4) Click the Load/Save button on the Cond tab of the Operation panel.
(5) Clicking Accelerating voltage on the Control Panel and the Emission display area:
Optics tab
2 - 52
2.3.9
2.3.9.1
Optics Tab
The Optics tab is for setting operating condition of the electron optical column.
(1) ELECTRON BEAM Window
Sets electron optical system conditions.
Fig. 2.3-40
Setup Window – Optics Tab
(a) Vacc
Sets and accelerating voltage. This function is equivalent to the ELECTRON BEAM
window on the Operation Panel.
(b) Emission Current
Indicates the present emission current.
(c) Filament
Changes the filament current and adjusts the temperature to which the filament is to be
heated. The filament current should be adjusted to a point slightly below the saturation
point for the emission current.
The Auto Filament Saturation (AFS) function automatically sets an appropriate filament
current. AFS can be run in three modes, low, medium, and high, and can be used for
the following purposes:
2 - 53
2.3
Graphical User Interface (GUI)
Low:
Long life mode (so that the filament can be used for a long time)
Medium: Standard mode
High:
High resolution mode (when the filament current is to be set near the
saturation point for the emission current)
AFS can give an error if the filament is improperly installed or an emission current above
a specified level fails to flow when a low accelerating voltage is applied.
(d) Gun Bias
This button, which sets a gun bias, can be used to adjust the emission current.
The Auto Gun Bias function automatically sets an appropriate gun bias when the
accelerating voltage is changed. Normally this button should be check marked.
The correct operation of Auto Gun Bias requires the Auto Beam Setting (ABS) function,
which is enabled when the ABS button is clicked. It is recommended that ABS be
turned on whenever filaments are changed.
(e) Probe Current
This button, which sets a probe current, is functionally equivalent to the ELECTRON
BEAM window on the Operation Panel.
(2) Focusing position (WD) WORKING DISTANCE window
This button, which sets a focusing position (WD), is functionally equivalent to the WORKING
DISTANCE window on the Operation Panel.
(3) Degauss button
The Degauss operation eliminates hysteresis of the magnetic field in the objective lens.
When focus is changed greatly, accuracy of magnification or alignment of the electron
optical axis may degrade due to hysteresis of the focusing magnetic field.
Click Degauss button under the following conditions:
• After large change of focus without change of WD or Vacc in their respective windows.
• Before making the electron optical axis alignment.
Degaussing is automatically effected when WD is changed in the WORKING DISTANCE
windows, when the accelerating voltage is changed, or when a new Probe Current mode is
selected.
NOTICE: The F2 hotkey also available for degauss operation.
2 - 54
2.3.9
2.3.9.2
Image Tab
The Image tab is for setting operating condition with respect to image observation.
Fig. 2.3-41
Setup Window – Image Tab
(1) ABCC Window (SE/BSE)
If the results of ABCC are not adequate, you can change the reference brightness and
contrast. Adjustable range is -5 to +5. Adjustments can be set independently on the SE
and BSE detectors.
(2) FAST SCAN AVERAGING Window
Select number of frames to be averaged for TV1, 2 and Fast1, 2 speeds. Recommended
numbers are 4 for TV1 and 8 or 16 for TV2, 2 for Fast1 and 4 for Fast2. The higher the
number of frames, the better the attainable image quality. However, the higher number
results in longer persistence time. Select an optimal value for the present observed image.
NOTICE: The number of frames to be averaged is set for each screen mode (Full, Small or
Dual) independently.
2 - 55
2.3
Graphical User Interface (GUI)
(3) LINE PROFILE SIGNAL Window
The signal for line profile can be selected independently from the signal for image.
For example, you can observe or take a photograph of an X-ray intensity line profile on the
secondary electron image. Select a signal for the line profile in the box.
When the Image is selected in the Background select buttons, the line profile is overlaid on
the image. When the Black is selected, only the line profile is shown on the screen.
2.3.9.3
Record Tab
Fig. 2.3-42
Setup Window – Image Recording Tab
(1) AUTO DATA DISPLAY Window
(a) Auto Data Display
Auto data display is engaged when this box is checked.
(b) Magnification to Time and Signal, Name and Vacuum checkboxes
These items are included in data display if checked.
(c) Data Number input box
Input data number into this box. Up to ten characters may be keyed in. Do not use ","
(comma) or " " (space).
If the Auto Increment check box is checked and the Data Number has "-nn" at its end
(n : numerals, for example "Hitachi-00" ), Data Number is incremented with each
successive photographing.
2 - 56
2.3.9
(d) Back Ground Image checkbox
When this box is checked, the data display is overlaid on the scanning image.
not checked, the background of the data display area is black.
If it is
(e) Embed into Image checkbox
When this box is checked, the auto data display is embedded into the image data when
the image is saved to disk. If it is not checked, only the image data is saved. This
setting is also applied for Print, Copy and PCI Transfer commands.
If the For Photograph is checked, the position of the auto data display in the saved
image is shifted slightly upward to ensure that it is properly framed in photographs.
It is recommended to not check the box if the saved image data will be used on the
computer only.
NOTICE: If all of the above display items (Magnification to Time and Signal Name) are
selected, data display on the photograph may be overlapped because of limited
display space.
In such a case, remove insignificant items.
(2) PHOTO SPEED Window
(a) Direct Photo
Selects a scanning speed for direct photo recording.
selected scanning speed is shown under the box.
The number of lines for the
(b) Memory Photo
Selects number of scanning lines for memory photo recording.
Normal: For 640 × 480 pixel image data
→960 lines (16/19 s photographing time)
For 1280 × 960 pixel image data
→960 lines (16/19 s photographing time)
For 2560 × 1920 pixel image data
→1920 lines (32/38 s photographing time)
Enhance: For 640 × 480 pixel image data
→960 lines (16/19 s photographing time)
For 1280 × 960 pixel image data
→1920 lines (32/38 s photographing time)
For 2560 × 1920 pixel image data
→1920 lines (32/38 s photographing time)
(Scanning time is shown as the value at 60 Hz/50 Hz power line frequency.)
(3) BRIGHTNESS/CONTRAST Window
Sets brightness and contrast for photo recording. These are compensation factors for
brightness and contrast adjusted in the scanning image. Adjust these values if a
photograph does not have adequate brightness or contrast.
2 - 57
2.3
Graphical User Interface (GUI)
(4) FILM Window
(a) Film Speed
Selects a film speed (sensitivity) of the film. The brightness setting is changed
internally according to the selected film speed.
(b) Photo Size
Selects a size of the film. The magnification is adjusted internally according to the
selected size.
×1.0: for 4×5 inch instant film
×0.8: for type 107 or 105 instant film
×0.6: for type 120 negative film
2.3.9.4
OP. Cond Tab
This function is provided for saving and loading conditions of the electron optical column.
Save
Fig. 2.3-43
Load
Setup Window - OP.Cond. Tab
For details of operation, refer to < 3.9.6 Operating Condition Memory >.
2 - 58
2.3.10
2.3.10
Captured Image Window
Captured images are displayed as thumbnails on this window.
It opens when you have captured an image. Also it will open by selecting Captured Image
command from Window menu or using the short-cut key (Ctrl + L).
The yellow border shows the present selected image. Tool buttons placed on the window are
effective for the selected image. To select multiple images, click thumbnails while pressing
down the Ctrl key. The window shows up to 16 images. When 7 or more images are placed,
a scrollbar will be shown and images can be scrolled horizontally.
Thumbnail: Selected by clicking.
viewer window.
Double click opens the image on
Image information: Signal, accelerating voltage and magnification are
indicated.
Fig. 2.3-44
Save button:
Captured Image Restore Window
Saves the selected image. If started when multiple images are selected,
these are saved at once using All save option. The notation "Saved" is put
on the already saved image thumbnails.
Delete button: Deletes the selected image.
All button:
Selects all thumbnail buttons.
View button:
Opens the selected image on the viewer window.
Layout button: Opens the Report Generation window for printing the image. To add
other captured images on the sheet of the Report Generation window,
double-click the image.
Cond button:
Opens the Ope. Cond tab of the Setup dialog window under the image
and column condition when the image was captured.
Photo button: Starts memory photographing of the selected image.
Move button:
Moves the stage to the position where the selected image was captured.
It is effective for the Type II motorized stage.
PCI button:
Transfers the selected image to "Quartz PCI" database program.
It is effective when the "Quartz PCI" has been installed.
The notation "PCI" is put on the already transferred image thumbnails.
2 - 59
2.3
Graphical User Interface (GUI)
Close button: Closes the window. Closing the window does not clear thumbnails.
You can open them again.
: When the box is checked, auto data display at the time of capture and data
written with the Data Entry function are recorded with the image.
Refer to <3.6.3 Image Capture> and <2.3.18 Opt Signal Processing Dialog
Window>.
／
:
Vertical/horizontal display switching button
Clicking this button toggles the Captured Image between
vertical/horizontal display formats.
Fig. 2.3-45
Vertical Display Captured Image Window
See <3.6.3 Image Capture>.
See <3.6.5 Saving Captured Images>.
See <3.6.6 Taking Photographs (Option)>.
See <3.9.10 Printing Images Using Report Generation Function>.
2 - 60
2.3.11
2.3.11
SEM Data Manager Window
SEM Data Manager is an image-filing program with an easy-to-operate database function.
Images are registered to the database automatically when saved.
For details, refer to <3.11 Using SEM Data Manager>.
2.3.12
Alignment Dialog Window
The Alignment dialog window is used for alignment operations.
button on the Control panel or select the
To open the dialog window, click the Align
Alignment command from the Operate menu. When the dialog window is opened with the
Align button, Aperture Alignment starts as the default setting.
Refer to <3.4.2 Axial Alignment>.
Alignment operation area
Function select buttons
Fig. 2.3-46
•
•
•
•
Function select buttons:
Reset button:
Reset All button:
Alignment operation:
• Auto button:
Alignment Window
Starts each alignment function. Off stops functions.
Resets alignment of the selected function.
Resets alignment of all functions.
This area is used for adjustment operation. When the mouse area
, you can make adjustment both in X or X direction by
pointer is
moving the mouse while pressing the left button. When the mouse
or
, adjustment is restricted in X or Y direction.
pointer is
The Auto button is enabled with the alignment mode is
ApertureAlign, BeamTilt, BeamShift, StigmaAlignX, and
StigmaAlignY.
If the alignment mode is ApertureAlign, StigmaAlignX, or
StigmaAlignY, this function executes the automatic axial alignment
(AAA); if the alignment mode is BeamTilt or BeamShift, this
function executes the automatic beam alignment (ABA). If the the
automatic axial alignment (AAA) is run, the alignment mode will be
automatically turned off. Also, the automatic axial alignment (AAA)
cannot run in the Dual/Full screen mode.
2 - 61
2.3
Graphical User Interface (GUI)
• Default button:
• Close button:
2.3.13
The Default button is enabled when the alignment mode is either
StigmaAlignX or StigmaAlignY. If the alignment mode is
StigmaAlignX, sets the stigma X alignment data to the default value,
and the X of stigma to the mid-point. If the alignment mode is
StigmaAlignY, sets the stigma Y alignment data to the default value,
and the Y of stigma to the mid-point.
Stops alignment operation and closes the dialog window.
CD Measurement Dialog Window (option)
This window, which is used for measurement purposes, can be launched by clicking the
Measure
button in the Tool Button area on the Operation Panel or by selecting CD
Measurement from the Analysis menu.
Refer to the operation manual of CD Measurement option.
2.3.14
Login Setting Dialog Window
It opens by selecting Login Setting command from Option menu. This is available only when
logged in with the login name [S-3400].
You can create or change login names and their password for each user.
Fig. 2.3-47
Login Setup Window
Refer to <3.9.16 Setting Login Name>.
2 - 62
2.3.15
2.3.15
Oblique Dialog Window
The Oblique dialog window is used to display an oblique image.
select the Oblique command from the Analysis menu.
Fig. 2.3-48
Refer to <3.9.13 Oblique Image>.
2.3.16
To open the dialog window,
Oblique Image Window
Password Setting Dialog Window
Use the Password Setting dialog window for setting or changing the password of the login
name for current user.
To open this dialog window, select the Password Setting command from the Option menu.
Fig. 2.3-49
Password Setup Window
Refer to <3.9.15 Password Setting>.
2 - 63
2.3
Graphical User Interface (GUI)
2.3.17
Save Image Dialog Window
The Save Image dialog window is used for saving scanning images or captured images.
To save scanning images, use the Direct Save button on the Control Panel. Use the save
button on the Captured Image window to save captured images.
Fig. 2.3-50 Image Save Window
See <3.6.4 Saving a Scanning Image (Direct Save)>.
See <3.6.5 Saving Captured Images>.
NOTICE: The SDM Register check box should be checked if you wish to automatically register
saved images to the SEM Data manager database. Remove the check when
registration is not necessary, for example when the PCI is be used for data archiving.
2.3.18
Opt Signal Processing Dialog Window
The Opt Signal Processing dialog window is used to apply analog processing to signals of an
optional detector.
Fig. 2.3-51
Optional Signal Setting Window
Refer to <3.9.5 Signal Processing>.
2 - 64
2.3.19
2.3.19
Split/Dual Mag Controller
Split Screen mode displays two images in the viewing area, and allows images having different
signals and at different magnifications to be displayed. To open this controller, select the Split
DM command from the Scan menu.
For switching detectors, click the Detector button so that detector-setting control will expand and
display a menu.
Fig. 2.3-52
Split/Dual Controller
Refer to <3.9.2 Split Screen and Dual Mag mode>.
2.3.20
Using Short-cut Keys
Short-cut keys are available for execution of many commands.
(1) Using short-cut keys
Input Alt + [underlined character in a main menu command] opens the pull-down menu.
And then, [underlined character in a pull-down menu] executes the command.
For example, Alt + F opens the File menu and S key executes the Direct Save command.
While a pull-down menu is open, arrow keys ↑（←）↓（→）select commands in order.
The Enter key executes the selected command.
(2) Using Ctrl + ~ keys or Functions keys
Some frequently used commands are executed using this type of short-cut keys.
They are;
Ctrl + O: Open SEM Data Manager
Ctrl + P: Print
Ctrl + C Copy Image
Ctrl + L: Open Captured Image window
F1:
Help can be opened
F2:
Activates the Degauss function
F5:
Runs or stops scanning alternately
2 - 65
3
3.
OPERATION
Shown below is the procedural flow of typical S-3400 SEM operation. For details, refer to each
subsection.
3.1
Starting the System
●
●
●
●
3.2
Mounting a Specimen
●
●
3.3
3.4
Applying the Accelerating
Voltage
●
Adjusting the Electron
●
Optical System
3.5
●
Operation for Image
Observation
●
Images
Shutting Down
Precaution on SEM Data Manager
Functions
Operation
(3.11.1)
(3.11.2)
(3.11.3)
Turning High Voltage Off
Setting the Stage at the Specimen Exchange Position
Withdrawing the Specimen
Closing Windows and Shutting off the Display Power
Termination Confirmation Items
(3.8.1)
(3.8.2)
(3.8.3)
(3.8.4)
(3.8.5)
●
●
●
●
●
●
●
●
●
3.9
(3.4.1)
(3.4.2)
(3.6.1)
(3.6.2)
(3.6.3)
(3.6.4)
(3.6.5)
(3.6.6)
(3.6.7)
●
3.8
Setting Parameters for the Electron Optical System
Axial Alignment
Saving and Recording Images
Preparing Images for Recording
Image Capture
Saving a Scanning Image (Direct Save)
Saving Captured Images
Taking Photographs (Option)
Recording Data Display with Images
●
Using SEM Data Manager
Conditions under which Accelerating Voltage can be Applied
(3.3.1)
Setting the Accelerating Voltage and Filament Current (3.3.2)
●
●
3.7
Precautions Concerning Specimen Preparation
(3.2.1)
Specimen Preparation according to Material
(3.2.2)
Mounting a Specimen on the Type I Stage (Manual Stage)
(3.2.3)
Mounting a Specimen on the Type II Stage (5-axis motor-driven stage)
(3.2.4)
Selecting a Detector
(3.5.1)
Selecting Magnification
(3.5.2)
Selecting Scanning Speed
(3.5.3)
Image Brightness and Contrast Adjustment
(3.5.4)
Focus and Astigmatism Correction
(3.5.5)
Operation of the Specimen Stage (Type I - Manual Stage)
(3.5.6)
Operation of the Specimen Stage (Type II - 5-Axis Motorized Stage)
(3.5.7)
●
Saving and Recording
(3.1.1)
(3.1.2)
●
●
●
●
●
●
●
●
3.6
Start-up Confirmation Items
Startup Operation
Other Functions
3.10 Image Quality
3-1
3.1
Starting the System
3.1
Starting the System
3.1.1
Start-up Confirmation Items
Before starting the system, check the following items:
(1) Check the amount and quality of oil in the rotary pump.
See 4.2.1 Oil Change.
(2) Make sure that the rubber tubes in the evacuation system are not loose or disconnected.
(3) Close the drain cock of the compressor.
See 4.3.1 Checkup and Maintenance.
(4) Is the compressor stop valve open?
See 4.3.3 Location and Functions of Major Components.
(5) Is the breaker on the customer-provided power distribution board turned on?
(6) Are all breakers on the system power distribution board turned on?
Fig. 3.1-1
3.1.2
System Power Distribution Board
Startup Operation
(1) Rotate the key switch on the EVAC Panel to START and then release it. The system will
start.
Fig. 3.1-2
Starting the System
3-2
3.1.2
(2) Windows will start up and request to key in Ctrl + Alt + Delete will appear. Press Ctrl + Alt
+ Delete simultaneously (This request message will be shown or not depending on network
setting of SEM computer). The logon dialog window will appear. Enter user name and
password. The Windows XP will start. The following initial settings are made when the
instrument is shipped from the factory.
User name: S-3400
Password: None
Reference: 2.3.1 Starting the PC and Logging in the S-3400 Program
NOTICE: When the system is delivered, the password for the Administrator account is set to
hitachi.
(3) The S-3400N system will start up automatically and the initial log-in dialog window appears.
The initial control program log-in name and password are shown below.
Log-in name : S-3400
Password : None
Fig. 3.1-3
Log-in Window
Input login name and password, then click OK. The SEM main window will open.
Refer to <3.9.15 Password Setting> and <3.9.16 Setting Login Name>.
3-3
3.2
Mounting a Specimen
3.2
Mounting a Specimen
3.2.1
Precautions Concerning Specimen Preparation
During specimen preparation, observe the following.
(1) Wear clean gloves when exchanging specimens.
with bare hands should be avoided.
Holding the specimen or specimen stub
(2) Avoid using an excessive amount of conductive paste to fix a specimen on the specimen
stub. Ensure that the paste has dried before placing the specimen in the chamber. Too
much paste can release a large quantity of gas into the vacuum, which can cause the
vacuum level to decline and result in contamination.
(3) When using double-sided adhesive tape to fix a specimen to the stub, use the least possible
amount so as to minimize out-gassing. The use of double-sided adhesive tape may also
cause specimen drift.
(4) Mounting a specimen containing an excessive amount of water or oil can cause
contamination in the column, which should be avoided.
3.2.2
Specimen Preparation according to Material
The method of specimen preparation varies with different materials.
preparation methods for various types of specimens.
Listed below are typical
(1) Conductive specimens such as metals:
These types of specimens can be observed without preparation. However, coating with
heavy metals by using a vacuum evaporator, an ion sputtering or magnetron-sputtering unit
may result in better contrast.
(2) Non-conductive specimens such as semiconductors, fibrous specimens and polymeric
materials:
When imaging a specimen without coating, the recommended procedure is to use either the
low-vacuum mode or a low accelerating voltage. If the specimen needs to be imaged at high
magnification, mount the specimen onto a stub, and then coat the specimen with a metal
coating using a recommended procedure. If a high magnification image is required of microstructures, the metal coating may be visible. Care should be taken to avoid this problem.
(3) Biological specimens:
Biological specimens can be observed in the low-vacuum mode without prior treatment. For
high magnification observation, dry the specimen by using a method such as critical point
drying, freeze drying or other drying techniques, then coat the specimen with conductive
material.
(4) X-ray analysis specimens:
Generally, polish the surface of the specimen, then fix it to the specimen stub using carbon
paste. Non-conductive specimens should be coated with carbon using a vacuum
evaporator.
3-4
3.2.3
3.2.3
Mounting a Specimen on the Type I Stage (Manual Stage)
IMPORTANT: The specimen base that comes with the system is round. When loading an
angular specimen, select an appropriate specimen base so that the entire
specimen will fit on the base. Movable range limits are established by restricting
the operating range for the X and Y-axes to within the diameter of the specimen
stand and by calculating the safe operating range for the Z and Tilt axes.
For example, if a square specimen measuring 50 mm on the edge is affixed onto
a 50mm-diameter specimen base and the specimen is rotated 45°, the size of
the specimen in X and Y directions will be 70 mm, which means that the
specimen cannot be protected safely if its size is set to 50 mm. In such a
situation, either use a 77-mm (3-inch) specimen base or specify a specimen
setting (see 3.5.6.6) of 77 mm (3 inches) rather than 50 mm (2 inches).
3.2.3.1
Setting the Specimen Stand
Combine the adjustable screw, locking ring, and holder base, and screw the stub to the
adjustable screw. Tighten the locking ring so that the adjustable screw will not become loose.
Specimen stub
Adjustable screw
Locking ring
Specimen holder base
Fig. 3.2-1
3.2.3.2
Fixing the Specimen Stub
Measuring and Setting the Specimen Height
Loosen the locking ring for the specimen stub. Use an adjustment screw to align the highest
position of the specimen to the Standard (45 mm) mark on the height gauge, and fix the
specimen using the locking ring so that the adjustment screw will not become loose. The height
of the specimen base from the bottom to the specimen surface is 45 mm. See Section 3.5.7.3 for
further details.
3-5
3.2
Mounting a Specimen
Specimen height (Standard)
Specimen
Specimen stub
Adjusting screw
Locking ring
Specimen holder
Level gauge
Fig. 3.2-2
Measuring the Specimen Height
IMPORTANT: If the specimen is tilted or the Stage Z is short, the specimen can touch the
objective lens or the backscattered electron detector that is provided on the
underside of the objective lens, which can result in damage to the specimen,
objective lens or the backscattered electron detector.
3.2.3.3
Moving the Stage to the Specimen Exchange Position
Align the X, Y, R, T, and Z knobs of the specimen stage to the specimen exchange position (the
specimen exchange position is indicated on the upper face of the specimen stage).
Specimen replacement position
T
X: 30mm
R: 0°
Y: 20mm
T: 0°
Z: 35mm
R
X
Y
Fig. 3.2-3
Type I Stage
3-6
Z
3.2.3
3.2.3.4
Procedure for Loading a Specimen
(1) Removing the specimen, from the specimen chamber
• If the accelerating voltage is on, click the OFF button on the Control Panel to shut it off.
• Press the AIR button on the EVAC panel on the front side of the main unit or click the AIR
button located in the upper right section of the Control Panel.
EVAC Panel
Fig. 3.2-4
Control Panel
AIR Button (lets air into the specimen chamber)
• Air is introduced into the specimen chamber. Allow approximately 100 seconds for the
specimen chamber to attain atmospheric pressure.
• Grasp the handle located on the front side of the specimen stage, and pull the specimen
stage toward you to remove the specimen base.
(2) Loading a specimen
• Slide the specimen base into the specimen holder receptacle on the specimen stage.
Fig. 3.2-5
Setting the Specimen Base
• Grasp the handle. Push the specimen stage into the specimen chamber.
• Press the EVAC button on the front EVAC Panel located on the front side of the unit or
click EVAC located in the upper right section of the Control Panel. Evacuation of the
specimen chamber then commences. Accelerating voltage can then be energized
approximately 2 minutes after the EVAC button is pushed.
3-7
3.2
Mounting a Specimen
IMPORTANT: Do not touch the operation parts such as gears and driving screws and note that
clothes are never placed when you bring the hand close to the movement
mechanism in the specimen stage by the specimen exchange etc.
EVAC Panel
Fig. 3.2-6
Control Panel
Operating the EVAC Button (evacuating the specimen chamber)
CAUTION: When pushing the specimen stage into the specimen chamber, be careful that
your fingers are not caught between the stage and the specimen chamber.
IMPORTANT: Ensure that the stage door is firmly against the chamber before the EVAC button
is pushed. The chamber cannot be evacuated unless the specimen stage has a
tight fit with the chamber.
3-8
3.2.4
3.2.4
Mounting a Specimen on the Type II Stage (5-axis motor-driven stage)
IMPORTANT: The specimen base comes with the system is round. When loading an
irregularly shaped specimen, select an appropriate specimen stub so that the
entire specimen will fit on the stub. Movable range limits are established by
restricting the operating range for the X and Y-axes to within the diameter of the
specimen stub and by calculating the safe operating range for the Z and Tilt axes.
For example, if a square specimen measuring 50 mm on the edge is affixed onto
a 50mm-diameter specimen base and the specimen is rotated 45°, the size of
the specimen in X and Y directions will be 70 mm, which means that the
specimen cannot be protected safely if its size is set to 50 mm. In such a
situation, either use a 77-mm (3-inch) specimen base or specify a specimen
setting (see 3.5.7.3 Setting Specimen Size and Detectors in Use) of 77 mm
(3 inches) rather than 50 mm (2 inches).
IMPORTANT: The height of a specimen should be measured with great care. Be sure to set
the specimen size and height on the Stage Control menu. If they are not
properly set, when the specimen is tilted or Stage Z is small, the specimen can
touch the objective lens or the backscattered electron detector that is provided
on the underside of the objective lens, potentially causing damage to the
specimen, objective lens, and backscattered electron detector.
3.2.4.1
Setting the Specimen Base
As shown in the figure below, screw the specimen stub to the specimen base stand (S, L), and
securely insert it into the specimen holder.
Orient the specimen holder so that is aligns with the reference face of the specimen holder
receptacle on the stage itself, and slide it on.
Carry out <3.2.4.2 Measuring and Setting the Specimen Height >, before loading the
specimen the stage.
Specimen stand
Stage unit, specimen holder
receptacle, top side
Specimen base stand (S, L)
Reference face
Specimen holder
Specimen holder, top side
Fig. 3.2-7
Fixing the Specimen Base
3-9
3.2
Mounting a Specimen
3.2.4.2 Measuring and Setting the Specimen Height
(1) Measuring of the specimen height with the height gauge
(a) The specimen is combined with the specimen stub and the specimen base stand.
The height gauge indicates the height of the specimen when the specimen stub and
specimen base stand (S, L) are combined as shown in Fig. 3.2-8. The height of the
specimen holder isn't contained.
Specimen
Specimen stub
Specimen base stand (S, L)
Fig. 3.2-8
Specimen + Specimen Base + Specimen Stub
(b) Use the height gauge to read the height of the specimen.
Be sure to read off the highest spot of the specimens.
The size of the specimen becomes the size of the specimen stub. When the size of the
specimen is larger than the specimen stub, the specimen size becomes the size of the
specimen.
Height gauge
Specimen Height
Specimen Size
Specimen
＋15
Specimen stub
Specimen base stand (S, L)
Fig. 3.2-9
Measuring of Specimen Height
3 - 10
3.2.4
(2) Setting the Specimen Height and Specimen Height and Size
The specimen height and the specimen size measured in (1) are set. This setting limits the
amount of the movement of the stage (Z and T direction), and protects the specimen and
and components inside the specimen chamber from damage by contact of both.
(a) Moving the Stage to the Specimen Exchange Position
The specimen size and height can be set only at the exchange position.
If the Set button is disabled, (grayed out), click the Exchange Z65 [HOME Z65] button in
Fig. 3.2-10 (a). The stage will move to Exchange position.
(b) Setting the Specimen Height and Specimen Size
On the SPECIMEN block on the Stage tab, click the Set button in Fig. 3.2-10 (b). Set
Sample Size / Detector window will open.
(a) Exchange Z65 button
Fig. 3.2-10
(b) SPECIMEN block
Exchange Z65 Button and SPECIMEN Block
3 - 11
3.2
Mounting a Specimen
In Set Sample Size/Detector window, select from the pull-down and set the specimen
height and size measured with the height gauge.
In the case of the height
In the case of the
of the specimen
size of the sample
measured with the height
is 32 mm diameter.
gauge is +15 mm.
The Size is set to
The Height is set to +
32 mm.
15 mm.
Fig. 3.2-11
Set Sample Size/Detector Window
NOTICE: When a specimen is observed using a specimen base for 80-mm high specimens, add
-4 to the specimen height measured with the height gauge.
And if the height of the specimen itself is lower than 20 mm (outside the range of the
scale on the height gauge), the observed image can be displayed as an image
exceeding the focusing limit. If this happens, the accuracy of the magnification factor
and the value of the micron-marker cannot be guaranteed. Therefore, observations
should always be made by loading a specimen equal to or greater than 20 mm in
height (within the range of the scale on the height gauge).
Fig. 3.2-12
3.2.4.3
Specimen Base for 80-mm High Samples
Moving the Stage to the Specimen Exchange Position
Clicking the Replace Z10, Z65 HOME Z10, Z65 button on the Control Panel causes the
specimen stage to move to the specimen change position. This may take some time depending
on the current position of the specimen. Upon completion of the motion, the display window to
the left of the HOME button will change to blue and light up.
Fig. 3.2-13
Moving to the Specimen Exchange Position
Specimen exchange position X: 60 mm
Y: 25 mm
R: 0° T: 0°
Z: 10 mm (Replace Z10, HOME Z10)
Z: 65 mm (Replace Z65, HOME Z65)
3 - 12
3.2.4
IMPORTANT: When the stage is in motion, the Replace Z10, Z65 HOME Z10, Z65 button
should not be pressed repeatedly.
Pressing the button several times can disable the ! STOP button, and can
potentially damage the specimen or components inside the specimen chamber.
3.2.4.4
Loading the Specimen
(1) Removing a specimen form the chamber
(a) If the accelerating voltage is on, click the OFF button on the Control Panel to turn it off.
(b) Press the AIR button on the EVAC panel on the front side of the main unit.
Alternatively, click the AIR button located in the upper right section of the Control Panel.
Air is introduced into the specimen chamber. Allow approximately 2 minutes until the
specimen chamber completely attains the atmospheric pressure.
EVAC Panel
Fig. 3.2-14
Control Panel
AIR Button (letting air into the specimen chamber)
(c) After the specimen chamber has attained atmospheric pressure, pull the stage out using
the handles provided and remove the specimen.
Fig. 3.2-15
Pulling out the Stage
Fig. 3.2-16
3 - 13
Removing the Specimen Stand
3.2
Mounting a Specimen
(2) Loading a Specimen
(a) Set the specimen holder on the specimen holder receptacle on the stage.
(b) Using the handles on both sides of the specimen stage, push the stage into the chamber.
(c) Set the specimen height and specimen size
Refer to 3.2.4.2 Measuring and Setting the Specimen Height
(2) Setting the Specimen Height and Specimen Size
IMPORTANT: Do not touch the operation parts such as gears and driving screws and note that
clothes are never placed when you bring the hand close to the movement
mechanism in the specimen stage by the specimen exchange, etc.
IMPORTANT: The height of a specimen should be measured with great care. Be sure to set
the specimen size and height on the Stage Control menu. If they are not
properly set, when the specimen is tilted or Stage Z is small, the specimen can
touch the objective lens or the backscattered electron detector that is provided
on the underside of the objective lens, potentially causing damage to the
specimen, objective lens, and backscattered electron detector.
(d) Press the EVAC button on the front EVAC Panel located on the front side of the main
unit or click EVAC located in the upper right section of the Control Panel. Evacuation of
the specimen chamber then commences. After approximately 2 minutes accelerating
voltage can then be energized.
EVAC Panel
Fig. 3.2-17
Control Panel
EVAC Button (evacuating the specimen chamber)
CAUTION: When inserting the stage into the specimen chamber, be careful so that your
fingers will not be caught between the stage and the specimen chamber.
IMPORTANT: When evacuating the chamber, be sure to hold the stage tightly against the
chamber to ensure a tight fit before turning the evacuation process on.
Evacuation cannot take place unless the specimen stage has a tight fit with the
chamber.
3 - 14
3.3.1
3.3
Applying the Accelerating Voltage
3.3.1
Conditions under which Accelerating Voltage can be Applied
If Electron Beam box at the left top position on the Control Panel is grayed out, the
accelerating voltage can not applied, wait until the ON button is activated with the evacuation
of the camber is completed.
When the accelerating voltage is on, the accelerating voltage indicator shows the currently set
accelerating voltage and the emission current (in µA). The top left button should indicate OFF.
Fig. 3.3-1
3.3.2
Electron Beam block (ON active)
Setting the Accelerating Voltage and Filament Current
There are four ways of applying an accelerating voltage:
(a) Clicking Electron Beam box, opening SETUP, and press ON in OPTICS.
Fig. 3.3-2
Applying the Accelerating Voltage (a)
(b) Pressing the left ON button in Electron Beam box.
Fig. 3.3-3
Applying the Accelerating Voltage (b)
3 - 15
3.3
Applying the Accelerating Voltage
(c) Pressing ON on ELECTRON BEAM block on the Cond. tab on the Control Panel.
Fig. 3.3-4
Applying the Accelerating Voltage (c)
(d) Selecting DETAIL on the Optics tab on the Control Panel, and pressing ON on the
ELECTRON BEAM menu.
Fig. 3.3-5
Applying the Accelerating Voltage (d)
3 - 16
3.3.2
(1) For accelerating voltage, select the desired accelerating voltage level from the list displayed
buttons can
in the accelerating voltage Vacc input section. If necessary, the Up/Down
be used to set the defined value in 100V increments. If desired, a specific numerical value
can be entered from the keyboard (use the Enter key to set the value).
(2) Set a filament current, Filament. Select DETAIL on the Optics tab on the Control Panel,
and press AFS with Mid selected.
Fig. 3.3-6
Setting a Filament Current
NOTICE: The filament current, Filament, can be set automatically by pressing either the Auto
Filament Saturation AFS function or the Auto Beam Setting ABS button.
NOTICE: Because the previous setting value is memorized in Filament, AFS need not be done
every time. Execute it when Filament setting changes.
Also, the filament current Filament can be adjusted on a customized basis by moving the slider.
Normally, Hitachi recommends the use of an automatically set filament current Filament by
means of the Auto Filament Saturation AFS function or the Auto Beam Setting ABS option to
Image a specimen.
When the AFS function is running, the screen freezes, and a dialog message appears. When
the screen changes to a RUN state, it is an indication that the auto adjustment has finished.
NOTICE: The Auto Filament Saturation AFS should be set to High for high magnification
imaging, and Low to ensure long filament life.
3 - 17
3.4
Adjusting the Electron Optical System
3.4
Adjusting the Electron Optical System
3.4.1
Setting Parameters for the Electron Optical System
Parameters for the electron optical system can be set in two locations:
(1) Condition Tab (on the Control Panel)
On the Condition tab, accelerating voltage Vacc, Probe Current, focusing position
WORKING DISTANCE, and DETAIL can be set and selected.
Fig. 3.4-1
Setting Electron Optical System Parameters on the Condition Tab
3 - 18
3.4.1
(2) Setting electron optical system parameters on DETAIL
The DETAIL menu provides a consolidated view of all parameters related to the electron
optical system, including Vacc, Filament Current, Gun Bias, Probe Current, WORKING
DISTANCE, automated functions (AFS and ABC), and DeGauss.
Fig. 3.4-2
DETAIL Window
The following methods can be used to set parameters:
(a) Setting a Gun Bias
The emission current can be adjusted by varying the bias voltage for the electron gun.
The bias voltage can be changed from 0 to 100 by pressing the slider. The higher the
value, the lower the emission current. To increase the emission current, set the gun bias
low. Conversely, for a low emission current, set the gun bias to high. For a standard
imaging environment, set a maximum emission current of 130 µA. Hitachi recommends
the use of the Auto Gun Bias function as described below for most operating conditions.
(b) Setting an Auto Gun Bias
The Auto Gun Bias function corrects any change in emission current when the
accelerating voltage is changed so that imaging can be done at a fixed emission current
of approximately 100 µA. Normally, this function should be used with the checkmark on.
3 - 19
3.4
Adjusting the Electron Optical System
(c) Auto Beam Setting (ABS)
ABS combines the automation functions of AFS (Auto Filament Saturation), ABA (Auto
Beam Alignment), ABCC (Auto Brightness Contrast), and AFC (Auto Focus Control) to
produce good-quality SEM images. This feature can be helpful when steps such as
the setting the filament current and the adjusting the gun alignment axes after a filament
is replaced. For details, see the individual Auto functions. After the ABS function is
activated, the Auto Gun Bias function is set to the checkmarked conditions.
See the following sections:
3.4.2.2 Axis Alignment Items in Detail
3.3.2 Setting the Accelerating Voltage and a Filament Current
3.5.4 Image Brightness and Contrast Adjustment
3.5.5 Focus and Astigmatism Correction
(d) Setting the Probe current
Click the ↓ button to select the desired probe current level from 0 to 100, from a
displayed list. The lower the probe current setting, the higher the resolution that can be
obtained. For observing low-contrast specimens and performing X-ray analyses, the
Probe Current level should be set high to produce a large amount of probe current.
The default is 50.
Small adjustments can be made by using the Up/Down
buttons to change the probe
current in 0.1 increments. A numerical value can be entered directly from the keyboard
(use the Return key to set).
(e) Setting a WD (Working Distance)
Working Distance (WD) refers to the distance between the bottom of the objective lens
and the surface of the specimen. The scale on the Z-axis of the specimen stage
corresponds to the Working Distance.
Objective
lens
WD
Specimen
Fig. 3.4-3
Definition of WD
3 - 20
3.4.1
When a WD value is selected from the list which is displayed when the ↓ button is
clicked, the current for the objective lens will be set so that the specimen is in focus at
that WD (the actual position of the specimen can be adjusted by manipulating the Z-axis
of the specimen stage).
For X-ray analysis, a WD value of 10 mm should always be used in order to maintain a
fixed X-ray extraction angle in relation to the detector. First, for the focusing position,
that is, WORKING DISTANCE, set the value of WD to 10 mm, and adjust the Z-axis of
the specimen stage so that the specimen is in focus at that distance. In this manner,
the geometry of the analysis point for the X-ray detector and the specimen can be set to
the desired condition even when the specimen has substantial peaks and valleys on its
surface.
Varying the WD changes the resolution, the focal depth, and tilt restrictions. The table
below shows the relationship between WD, resolution, focal depth, and specimen tilt
angle.
Table 3.4-1
Resolution
Focal depth
Specimen tilt angle
Influence of WD
Short
High
Shallow
Small
WD
Long
Low
Deep
Large
NOTICE: The longer the WD the greater is the sensitivity of the primary electron beam to
floating magnetic fields. For this reason, in situations where a long WD is used, the
floating magnetic field can produce image errors during high magnification imaging.
(f) Degaussing (DeGauss) operation
The degaussing operation is designed to remove residual magnetic fields from the
objective lens magnetic field. Changing the focus extensively can cause the residual
magnetic field to reduce the precision of the magnification factor and the WD indication
factor. This can be minimized by clicking the Degauss button such as:
• After changing the focus substantially
• Before adjusting the axes for the electron optical system (electromagnetic alignment)
Degaussing is performed automatically when any of the following operations is
performed:
• Applying or modifying the accelerating voltage (changing the accelerating voltage by
more than 3 kV)
• Setting the WD
• Changing the Probe Current mode
HINT: The function key F2 can be used to perform degaussing operations without opening the
SETUP dialog.
3 - 21
3.4
Adjusting the Electron Optical System
3.4.2
Axial Alignment
To fully exploit the capabilities of the system, it is necessary to perform axis alignment on the
electron optical system.
The chart below shows axis alignment procedures. The required items should be adjusted after
imaging conditions are modified.
(1) Preliminary to axial alignment
(2) Beam Alignment: horizontal, tilt alignments (electromagnetic
alignment)
ABA
(Auto Beam Alignment)
(3) Mechanical alignment of objective lens movable aperture
(4) Aperture Alignment (electromagnetic alignment)
AAA
(Auto Axial Alignment)
(5) Stigma Alignment X, Y (electromagnetic alignment)
(6) AFC Alignment
(A) Basic axis alignment while viewing an image
Fig. 3.4-4
(B) Using the Auto feature
Axis Alignment Procedures
Method (A), shown on the left side of Figure 3.4-4, is a basic axis alignment method that allows
you to perform alignments by moving a knob on the Control Panel while viewing an image. In the
electromagnetic alignment part (Beam Alignment horizontal, tilt alignment, Aperture
Alignment adjustment, Stigma Alignment, and X, Y alignment) can also be aligned by using
Method (B), which combines the Auto features.
3.4.2.1
Items Requiring Axial Alignment
The list below shows when an axial alignment is needed and what specific items need to be
adjusted. For further details, see <3.4.2.2 Axial Alignment Items in Detail>.
(1) After a filament is replaced: Adjust all items.
(2) After the position of the objective movable aperture has been changed:
Adjust items (3)-(5).
(3) When the accelerating voltage or probe current is changed:
Adjust items (4) and (5).
(4) Adjustment of Auto Focus is not suitable well :
Adjust item (6).
3 - 22
3.4.2
3.4.2.2
Axial Alignment Items in Detail
(1) Preliminary checks before performing an axial alignment
Before commencing an axial alignment, the following preliminary steps should be performed:
(a) Place a specimen in the specimen chamber.
See 3.2 Mounting Specimen.
(b) Set the accelerating voltage to 5.0kV.
(c) Set Probe Current on the electron optical system SETUP tab to 80.
(d) Set the objective lens movable aperture to the "0" position (open aperture).
(e) Set the WD to 10 mm; focus the specimen.
button on the Control Panel, start the [Alignment] window. On
(f) Using the Align
this window, click the [Reset All] button.
(2) Beam Alignment
Beam Alignment is required so that the electron beam passes through the center of the
objective lens aperture. This alignment is performed in terms of Beam Align Tilt and
Beam Align Shift.
Fig. 3.4-5
Selecting the Beam Alignment
(A) Basic axial alignment method that can be performed while viewing an image
• Click the Beam Align Shift button. If an image fails to appear, adjust the contrast
and the brightness of the image.
• On the Manual Operation Knobset, either adjust the STIGMA/ALIGNMENT knob or
move the mouse while holding down on the left mouse button in the Alignment
Operation area on the Alignment window, and adjust the screen crosshairs to
maximize the brightness of the observed image.
• Similarly, click the Beam Align Tilt button, and adjust the screen crosshairs to
maximize the brightness of the observed image.
3 - 23
3.4
Adjusting the Electron Optical System
• After the alignment process is finished, click the Off button on the [Alignment]
window.
• Adjust the contrast so that the screen will be at the best possible brightness to view
images.
(B) Using the Auto feature
This method allows you to perform alignment using ABA (Auto Beam Alignment) on
both Beam Align Shift and Beam Align Tilt.
• Click the Beam Align Shift button.
• Click the Auto button shown in the figure below:
Fig. 3.4-6
•
•
•
•
Selecting the Auto Beam Alignment
ABA (Auto Beam Alignment) is performed, and an alignment is accomplished.
Click the Beam Align Tilt button.
Similarly, click the Auto button.
The ABA is performed, after which the Beam Alignment process terminates.
NOTICE: If an image fails to show even when the contrast to is set to a maximum, redo the
beam alignment as follows: click Reset All, set the Probe Current to approximately 80,
perform a beam alignment, and then set the Probe Current to a level required by the
operating condition (default: 50).
3 - 24
3.4.2
(3) Performing a mechanical axial alignment on the objective lens movable aperture
• Set the objective lens movable aperture to the number to be used (normally 2 or 3).
Aperture diameters: 1: 100 µm
2: 80 µm
3: 50 µm
4: 30 µm
• If the image becomes dark, adjust the contrast.
• Use relatively low magnification.
• Adjust the aperture hole adjustment X, Y knobs so that the brightness of the image is
maximized.
X direction
Fig. 3.4-7
Y direction
Mechanical Axial Alignment on the Objective Lens Movable Aperture
NOTICE: In some cases, the Beam Alignment shifts after the position of the objective lens
movable aperture is changed. In such a case, a Beam Alignment should be
performed again.
NOTICE: For normal observation, axial alignments should be performed using the
Electromagnetic Alignment. If the objective lens movable aperture is moved, reset
the aperture alignment to a mid-point. After that, adjust mechanically the objective
lens movable aperture to adjust the image so that its brightness will be at a maximum.
3 - 25
3.4
Adjusting the Electron Optical System
(4) Aperture Alignment
The Aperture Alignment is designed so that the electron beam will pass through the center
of the objective lens. If this alignment is not performed precisely, focusing operations can
shift the image, resulting in inadequate resolution or image quality.
Fig. 3.4-8
Aperture Alignment Menu
NOTICE: For normal observation, axial alignments should be performed using the
Electromagnetic Alignment. If the objective lens movable aperture is moved, reset
the aperture alignment to a mid-point. After that, use the objective lens movable
aperture to make adjustments so that the brightness of the image will be at a
maximum. In subsequent normal observations, axial alignments should be performed
using the Electromagnetic Alignment.
(A) Basic axial alignment by viewing an image
• Set the magnification factor from 1,000x to 5,000x. Move a spot on the specimen to
near the center of the image.
• Perform focus and stigmation adjustments.
• On the [Alignment] window, click the [Aperture Align] button to bring up the Aperture
Alignment mode in which the focus and the image position fluctuate periodically.
• Using either the STIGMA/ALIGNMENT knob on the Manual Operation Knobset or
the alignment operation area in the Alignment window, move the mouse while
holding down the left button of the mouse, and move the crosshairs so that the
motion of the image is minimized.
• Increase the magnification factor to 5000x or higher to perform final Aperture
alignments.
• After the adjustment process is finished, click the Off button on the Alignment
window.
3 - 26
3.4.2
NOTICE: An accurate aperture alignment cannot be performed at a low magnification (1.000x or
less). After making coarse adjustments at low magnification factor, the final
adjustments should be made at 1,000x or higher. Prerequisite to an accurate
aperture alignment is the correct focus adjustment.
NOTICE: If the focus is changed substantially for some reason, the recommended procedure is
to click the Degauss button, and then perform alignment adjustments. (The hot key,
F12 can be used to perform degaussing operations without opening the SETUP
dialog.)
button on the Control Panel changes the normal image
HINT: Clicking the Align
observation mode to the Aperture Alignment mode. If the image moves when adjusting
focus, the aperture alignment mode should be performed.
(B) Using the Auto feature
Selecting the Alignment button and clicking the Auto button activates Auto Axial
Alignment (AAA) function for the Aperture Alignment.
• Click the Alignment button.
• Click the Auto button shown in the figure below:
Fig. 3.4-9
Selecting the Auto Axial Alignment (AAA)
NOTICE: Depending on the particular magnification factor that was in effect during the execution
of Auto Axial Alignment (AAA), with some WD conditions, the Auto feature may not
work properly. In such a case, either run the Auto feature again after the condition is
made right or perform the basic axial alignment method (A) by viewing the image.
3 - 27
3.4
Adjusting the Electron Optical System
(5) Stigma Alignment X, Y adjustments
The Stigma Alignment function is designed to ensure that the image will not move during
the stigma correction process. This function is also necessary for the accurate operation of
Auto Stigma.
Fig. 3.4-10
Selecting the Stigma Alignment
(A) Basic axial alignment that is performed while viewing an image
• Set the magnification between 1,000x to 5,000x. Move a salient spot on the
specimen to near the center of the image.
• Perform focus and stigmation alignments.
• On the Alignment window, click the Stigma Align X button so that the image will
move periodically.
• Either adjust the STIGMA/ALIGNMENT knob on the Manual Operation knobset or
move the mouse while holding down on the left button of the mouse in the Alignment
Operation area on the Alignment window to minimize the motion of the image.
• Similarly, click the Stigma Align Y button on the Alignment window to minimize the
motion of the image.
• After the alignment process is finished, click the Off button.
NOTICE: To improve the effectiveness of the electron optical axis alignment process, click the
Degauss button after focusing adjustment is finished (or press the function key F2),
and then perform an electromagnetic alignment.
3 - 28
3.4.2
(B) Using the Auto feature
Select either the Stigma Align X or Stigma Align Y button and click the Auto button to
run the stigma alignment auto axial alignment (AAA) process.
Fig. 3.4-11
•
•
•
•
Selecting the Auto Axial Alignment (AAA)
Click the Stigma Align X button.
Click the Auto button shown in the figure below.
Click the Stigma Align Y button.
Similarly, click the Auto button shown in the figure below.
NOTICE: Depending on the particular magnification factor that was in effect during the execution
of Auto Axial Alignment (AAA), with some WD conditions, the Auto feature may not
work properly. In such a case, either run the Auto feature again after the condition is
made right or perform the basic axial alignment method (A) by viewing the image.
NOTICE: Stigma alignment can sometimes cause a shift in aperture alignment.
adjust (X/Y), and then perform an aperture alignment again.
3 - 29
In such a case,
3.4
Adjusting the Electron Optical System
(6) AFC Alignment adjustments
The AFC Alignment function is designed to the electron beam will pass through the center
of the objective lens. This function is also necessary for the accurate operation of Auto
Focus and the Auto Stigma and Focus.
Fig. 3.4-12
Selecting the AFC Alignment
• Set the magnification between 1,000x to 5,000x. Move a salient spot on the specimen to
near the center of the image.
• Perform focus and stigmation alignments.
• On the Alignment window, click the AFC Align button so that the image will move
periodically.
• Either adjust the STIGMA/ALIGNMENT knob on the Manual Operation knobset or move
the mouse while holding down on the left button of the mouse in the Alignment Operation
area on the Alignment window to minimize the motion of the image.
• After the alignment process is finished, click the Off button.
3 - 30
3.5.1
3.5
Operation for Image Observation
Follow the operation below for observation of a scanning image.
•
•
•
•
•
•
•
3.5.1
Selecting a Detector ................................................................... (3.5.1)
Selecting Magnification............................................................... (3.5.2)
Selecting Scanning Speed ......................................................... (3.5.3)
Image Brightness and Contrast Adjustment ............................... (3.5.4)
Focus and Astigmatism Correction............................................. (3.5.5)
Operation of the Specimen Stage (Type I - Manual Stage) ........ (3.5.6)
Operation of the Specimen Stage
(Type II - 5-Axis Motorized Stage) ............................................ (3.5.7)
Selecting a Detector
A detector can be selected by using the DETECTOR block located in the Image tab on the
Operation Panel. One of the following detectors can be selected: a secondary electron detector
(SE), a backscattered electron detector (BSE), or (optional) other detectors. If the ABCC Link
is checked, changing detector settings automatically causes contrast and brightness
adjustments.
Fig. 3.5-1
Selecting a Detector
HINT: Changing detectors causes a substantial change in the brightness of the image.
If the ABCC Link check box in the Image tab of the Operational panel has been checked,
ABCC will start automatically when detector selection is changed.
Image brightness will be adjusted to an adequate value.
3 - 31
3.5
Operation for Image Observation
As signals detected by a detector have the following characteristics, they should be selected
according to the intended purpose:
Table 3.5-1
Detector
General Characteristics of Detector-dependent Signals
Characteristics
SE
High resolution surface information
(Secondary electron)
High edge contrast
Application
Useful for making
morphological observations
on the specimen surface.
Sensitive to specimen charging
Not suitable for the low-vacuum mode
BSE
Sensitive to compositional information
(Backscattered
electron)
Less sensitive to specimen charging
Less edge contrast
Permits observations in the lowvacuum mode.
3.5.1.1
Useful in conducting
observations with edge
contrast suppressed,
observing specimen
composition information, or
reducing the charge-up
effect.
Secondary Electron Detector (SE)
Selecting the SE option on the DETECTOR block produces an observation image detected by
the secondary electron detector.
Because it uses a high voltage in its sensor, the secondary electron detector produces electric
discharges and cannot be used in the low-vacuum mode. When the low-vacuum mode is on, a
detector other than the secondary electron detector is automatically selected.
In SE detector menu, secondary electron collection efficiency can be changed by the slider, or
the combo box from 0 to 100. It is recommended to use with adjusting to the images lighten
most. The default value is 30, and the Reset button is pushed, it will return to a default value.
Fig. 3.5-2
SE Detector Menu
3 - 32
3.5.1
3.5.1.2
Backscattered Electron Detector (BSE)
For conducting observations, a backscattered electron detector is normally used in the lowvacuum mode.
The backscattered electron detector picks up the electrons reflected from the specimen by
means of a semiconductor sensor attached to the underside of the objective lens. The
semiconductor sensor is comprised of a doughnut-shaped 4-way split element that has a hole
through which the primary electron beam can pass, and a 3D imaging sensor that detects lowangle reflection electrons. By putting detected signals through computational processing, the
semiconductor sensor provides image observations in three detection modes: composition
(COMP), topology (TOPO), and stereo (3D) modes.
Primary electron beam
3D imaging semiconductor element
4-way split semiconductor element
BSE
Specimen
Fig. 3.5-3
Signal Detection by Backscattered Electron Detector
3 - 33
3.5
Operation for Image Observation
IMPORTANT: The BSE uses semiconductor elements in its detection unit. To prevent
damage to the semiconductor elements and the specimen, the following
precautions should be observed:
• The movable range for the stage must be observed strictly. In particular, a short WD or a
high angle tilt can cause the stage or specimen to touch the detector, damaging the sensor.
See 3.5.6 Operation of the Specimen Stage (Type I - Manual Stage).
• The specimen height should be set accurately by using the supplied specimen height gauge.
See 3.2.3.2 Measuring and Setting the Specimen Height.
• For the Type II stage, always measure the specimen height using a specimen height level
gauge and set the specimen height in the Stage tab of the Operation Panel. If the actual
specimen height is greater than the set height, the specimen can come into contact with the
semiconductor sensor even within the software-defined movable range.
See 3.2.4.2 Measuring and Setting the Specimen Height.
See 3.5.7.3 Setting Specimen Size and Detectors in Use.
• When inserting the specimen stage use the interference verification protective metal fixture
and check the operating range of the stage axes so that the specimen will not touch the
fixture; the specimen stage should be used only within that range.
See 3.5.6.6 Checking the Ranges of T-axis Tilting and Z-axis Motion when Observing a Bulk
Specimen.
• To prevent any contact between a specimen and the detector sensor, the Z (WD) should be
used in a range greater than 5 mm.
Fig. 3.5-4
Interference Verification Protective Fixture
3 - 34
3.5.1
(1) Setting the backscattered electron detector (BSE)
Selecting the BSE option in the DETECTOR block produces a BSE image. This menu can
be used to set the type of BSE signal, COMP, TOPO or 3D, and the amount of gains to be
produced.
Fig. 3.5-5
BSE Menu
(a) COMP mode
The COMP mode allows the observation of a composition image by exploiting the
atomic number effect that the lighter the atomic weight of an element, the darker is the
backscattered electron signal, and the heavier the element, the brighter the signal.
Pressing the COMP mode button again reverses the composition image, from black to
white and from white to black, and this is repeated each time the button is pressed.
Fig. 3.5-6
COMP Mode
(b) TOPO mode
Based on the difference in signal between oppositely disposed detector sensors, this
mode permits the observation of topographic images. Each pressing of the TOPO
mode button changes the direction of shading by 90 degrees.
Fig. 3.5-7
TOPO Mode
3 - 35
3.5
Operation for Image Observation
(c) 3D mode
This mode produces enhanced Topographic or 3D images with a mixture of specimen
surface composition information and topology information. Each pressing of the 3D
mode button changes the intensity of shading.
Fig. 3.5-8
3D Mode
For BSE Gain, normally select a level 3. If the amount of detected backscattered
electrons is large and the image contrast appears to be too strong, change the Gain to 2
or 1. Conversely, if the image contrast is too low due to a low detection amount of
backscattered electrons, the Gain setting should be changed to 4.
NOTICE: At a BSE Gain level or 4 or 3, depending on the characteristic of the detector, the
observed image may drift sideways during fast scanning, such as in the TV or FAST
scanning mode, resulting in an unclear image. In such a case, either select the
SLOW scanning mode or increase the probe current so that the BSE Gain level can
be set low.
(2) Detailed settings of the BSE
For detailed detector sensor settings, press the Detail button in the DETECTOR block to
bring up a BSE dialog, which allows you to turn individual sensor signals on and off and
select signal polarity reversal/non-reversal.
3 - 36
3.5.1
Fig. 3.5-9
BSE Detail Dialog
IMAGE MODE:
This button switches between detection modes, similar to pressing
the COMP/TOPO/3D buttons in the DETECTOR block.
ELEMENT SETTING: Either select radio buttons A-E or click elements in the detector
sensor diagram to set each element to +/－/OFF.
3.5.1.3
Other Detectors (optional)
By selecting a detector other than SE/BSE in the DETECTOR block, it is possible to observe
images based on the different detector. Optional detectors that are installed can be selected
from a pull-down menu.
NOTICE: Different detectors can be selected by setting a 2-screen display mode by selecting
Dual in the image display size block in the Image tab on the Operation Panel. This
feature allows you to compare images from different detectors in realtime or display a
composite image from different detectors. For further details, see Section 3.9.3
Signal Selection and Color Mixing.
3 - 37
3.5
Operation for Image Observation
3.5.2
Selecting Magnification
There are several ways to select a magnification.
(1) Manual Operation Panel
The MAGNIFICATION knob can be used to set a magnification.
See 2.2.3 Manual Operation Panel.
(2) Dragging the mouse in the Magnification indication area on the Control panel.
Fig. 3.5-10
Magnification Control Unit
To increase magnification, drag the mouse to the right. To decrease magnification, drag
the mouse to the left. For coarse changes, press the right button and for fine changes, the
left button.
(3) Clicking the mouse button in the Magnification indication area
Magnification increases in incremental steps by clicking the right button and decreases by
clicking the left button.
(4) Using a pre-set magnification
Two preset buttons can be used to recall up to two pre-defined magnifications. If a given
magnification is already assigned to a preset button, the indicator PM is displayed to the
right of that magnification.
A magnification can be preset by either clicking Mag.Preset Setup on the Setup menu,
button above the Preset button, or right-clicking the Preset button.
clicking the
NOTICE: If the preset magnification is lower than the minimum possible magnification for the
current WD value, the magnification is set to the minimum value.
3 - 38
3.5.2
3.5.2.1 Notes on Using the Lowest Magnification and Conducting Observations at a Low
Magnification
(1) Range of minimum magnifications
Table 3.5-2 shows available minimum magnifications for the various observation parameters.
The minimum magnification is subject to restrictions by WD and accelerating voltage, scan
speed.
Table 3.5-2
Vacc(kV)
30.0 ～
28.0 ～
26.0 ～
24.0 ～
22.0 ～
20.0 ～
18.0 ～
16.0 ～
14.0 ～
12.0 ～
10.0 ～
8.0 ～
6.0 ～
4.0 ～
2.0 ～
Minimum Magnification
WD(mm)
3.5～
9.5～
13.5～
19.5～
29.5～
39.5～
49.5～
55.5～
TV/Fast Slow TV/Fast Slow TV/Fast Slow TV/Fast Slow TV/Fast Slow TV/Fast Slow TV/Fast Slow TV/Fast Slow
28.1 80
55
45
32
37
25
27
19
20
14
15
11
13
9
12
9
26.1 80
55
45
32
35
25
27
19
19
13
15
11
12
9
12
8
24.1 80
55
42
30
35
25
25
18
18
13
14
10
12
9
11
8
22.1 75
50
42
30
32
23
25
17
18
13
14
10
12
8
11
8
20.1 65
47
42
30
30
21
23
17
17
12
13
10
11
8
10
7
18.1 65
47
40
27
30
21
23
16
16
11
13
9
11
8
10
7
16.1 65
45
35
25
30
20
21
15
15
11
12
9
10
7
10
7
14.1 60
42
35
25
27
19
20
14
14
10
11
8
10
7
9
6
12.1 60
42
32
23
25
17
19
13
14
10
11
8
9
6
9
6
10.1 55
37
30
20
23
16
17
12
13
9
10
7
8
6
8
6
8.1 45
32
27
19
21
15
16
11
11
8
9
7
7
5
7
5
6.1 42
30
23
16
18
13
14
10
10
7
8
6
7
5
7
5
4.1 35
25
20
14
15
11
12
9
9
6
7
5
6
5
6
5
2.1 35
25
20
14
15
11
12
9
9
6
7
5
6
5
6
5
0.3 35
25
20
14
15
11
12
9
9
6
7
5
6
5
6
5
3 - 39
3.5
Operation for Image Observation
(2) Notes on operating at low magnifications.
In the light gray range shown in Table 3.5-2, depending on the particular observation
parameters employed (especially low accelerating voltages or low-magnification at a short
WD), the use of the No. 4 or 3 objective lens movable aperture with Slow scan speed can
produce a shadow, as illustrated in Figure 3.5-11, on the edge of the image. The problem
arises when the electron beam passing through the objective lens movable aperture is
unable to pass through the orifice. It is not arises scan speed is TV/FAST. The problem
can be minimized by increasing the hole diameter for the objective lens movable aperture
(No. 1 or 0).
Shadow
Shadow
Fig. 3.5-11 Interference Shadow from Objective Lens Movable Aperture
Left: shadow present, Right: no shadow (objective lens movable aperture No. 0)
In the dark gray range, depending on the particular observation parameters employed (especially
low accelerating voltages and low magnification), when scan speed is Slow, image sometimes
shows a round clipping, as illustrated in Figure 3.5-12. This problem arises when the electron
beam undergoes wide-angle deflection oscillations in order to display the specimen at an
extremely low magnification. With scan speed is TV/Fast, the image could have shadows, as
above.
Fig. 3.5-12
Restricted Shading under an Extremely Low Magnification
Left: present, Right: not present
3 - 40
3.5.2
HINT: The light and dark gray observation conditions shown in Table 3.5-2 permit wide FOV
observations, which are suitable for searching for a specimen. Under such conditions,
observations should be conducted by changing the objective lens movable aperture to
No. 1 or 0.
NOTICE: Auto magnification fraction adjustment
The auto fraction adjustment calculates and sets nearest even value magnification
when capturing an image or directly photographing.
To enable the auto magnification fraction adjustment, check the mark at
Magnification Fraction Adjust check box on Optional Setup dialog window General tab.
Note that, it will be set to preset magnification if the most recent magnification
operation was magnification preset.
3 - 41
3.5
Operation for Image Observation
3.5.3
Selecting Scanning Speed
Twelve scanning speeds are available with four buttons.
To select a scanning speed, click one of the Scan speed icons on the Control panel.
Fig. 3.5-13
Scanning Control Unit
Two scanning speeds are assigned to each button. They are set alternately by clicking the
button. The assignment of scanning speeds to four buttons can be customized.
Refer to <2.3.6.3 Scan Control Windows>.
) button on the Control panel changes run (scans the
The Run/Freeze (
electron beam over the specimen, and continuously acquire image) and freeze (blank
electron beam and stop image acquisition) status alternately. While the electron beam is
scanning, the characters "RUN" blink at the upper-left corner of the scanning image. When the
RUN button is clicked, scanning stops after completing the corrent frame.
The characters "Going to Freeze" blink while the scan completes and then changes to "Freeze".
(1) TV Scanning:
TV Scanning of flicker-free images is convenient for a field search of the specimen, coarse
focus, etc. The quality (S/N ratio) of the image is improved by frame averaging.
Two TV scanning speeds, TV1 and TV2, operate at the same speed but allow different
number of frames to be averaged for each.
To set the number of frames to be averaged, use the Image tab in the Setup dialog window.
In the FAST SCAN AVERAGING area, set TV1 and TV2 values. Recommended numbers
are 4 for TV1 and 8 or 16 for TV2. The higher the number of frames, the better the
attainable image quality.
(2) Fast Scanning:
Fast Scanning runs with half the speed of TV scanning. It is also convenient for a field
search of the specimen, coarse focus, etc.
This is the highest possible scanning speed under the full screen mode.
The quality (S/N ratio) of the image is improved by frame averaging.
Two fast scanning speeds, FAST1 and FAST2, operate at the same speed but allow
different number of frames to be averaged for each. To set the number of frames to be
averaged, use the Image tab in the Setup dialog window. In the FAST SCAN
AVERAGING area, set FAST1 and FAST2 values. Recommended numbers are 2 or 4 for
FAST 1 and 4 or 8 for FAST 2.
3 - 42
3.5.3
(3) Slow Scanning:
Slow1 and Slow2 are relatively fast slow scans.
These two speeds are asynchronous to AC line frequency. It may cause some field
magnetic disturbance at high magnification and/or low kV condition.
Use for a field search of the specimen, coarse focus, etc.
Slow 1: About 1 s/frame (Full screen)
About 0.5 s/frame (Small screen)
Slow 2: About 4 s/frame (Full screen)
About 2 s/frame (Small screen)
(4) Slow Scanning:
Use these for observation, fine focus, and astigmatism correction.
may be attainable.
Slow 3: 19 s/frame (Full screen) 10 s/frame (Small screen)
Slow 4: 38 s/frame (Full screen) 19 s/frame (Small screen)
Slow 5: 77 s/frame (Full screen) 38 s/frame (Small screen)
Finest image quality
(5) Reduce Area Scanning:
Three reduced area scanning speeds are available.
(a) Reduce 1:
The scan speed is approximately equal to the TV scanning rate. It is, therefore,
suitable for searching the field, focus and astigmatism correction.
To move the scanning area box, place the mouse cursor over the border of the reduced
area window. While the mouse cursor is changed to the Move indicator (intersecting
arrows), press the left button and drag the scanning area box to a desired place.
(b) Reduce 2:
Scanning speed is the same as Slow3 while the frame speed is 4 times faster.
It is suitable for final focus and astigmatism correction. The scanning area can be
moved with the same operation as mentioned above.
(c) Reduce 3:
Image size is the same as Reduce1 and a slower horizontal scanning speed is utilized.
It is useful for optional detector signals having low frequency bandwidth such as BSE
detector or ESED.
3 - 43
3.5
Operation for Image Observation
3.5.4
Image Brightness and Contrast Adjustment
Image brightness and contrast can be adjusted both manually and automatically.
BC Monitor mode is also available for manual adjustment.
A histogram of present image can be shown for reference of adjustment.
(1) Auto adjustment (ABCC)
on the Control panel or select the ABCC command from
Click the ABCC button
Operate menu to start auto-adjustment.
If the results of ABCC are not adequate, you can change the reference brightness and
contrast on the Image tab in the Setup dialog window.
Fig. 3.5-14
Adjusting the Auto Setup Level
When the Dual Screen mode is used, ABCC is applied to the signal of the selected screen
by the Signal (A/B) selection on the Control panel.
Fig. 3.5-15
Selecting the Image to Adjust
3 - 44
3.5.4
(2) Manual adjustment using the mouse on the GUI
. Drag the mouse while holding down the left
The cursor changes to the B/C cursor
button to adjust brightness; and while holding down the right button to adjust contrast.
Drag it to the right to increase and to the left to decrease brightness or contrast.
Sensitivity of mouse operation can be adjusted on the Mouse Operation tab in the Optional
setup dialog window.
Additionally, you can adjust the brightness and contrast using the scroll bars.
Checking the Show Scroll Bar box on the Utility tab in the Operation panel enables using
these scroll bars.
Refer to < 2.3.7.10 SIGNAL PROCESSING Windows>.
(3) Using the Manual Operation Panel
Use Brightness and Contrast knobs on the manual operation panel.
(4) BC Monitor mode
A waveform and reference lines are displayed for monitoring contrast (amplitude of the
waveform) and brightness (vertical level of the waveform).
On the Control Panel, clicking the Monitor
button twice in succession turns the
button into
, displaying signal waves. When the maximum and minimum values of the
waveform are adjusted to fit within the upper and lower reference lines, appropriate
brightness and contrast will be obtained.
Fig. 3.5-16
BC Monitor
To terminate BC Monitor mode, click the Cancel button in the BC Monitor mode message
or click one of the Scanning Speed buttons.
3 - 45
3.5
Operation for Image Observation
(5) Histogram display
A histogram of the corrent image can be shown.
To show histogram, select Show Histogram from Image menu.
This function periodically calculates and displays a histogram of the displayed image.
Fig. 3.5-17
3.5.5
Histogram
Focus and Astigmatism Correction
Focus and astigmatism correction can be done manually and automatically.
Focus Monitor mode is available for manual focusing.
(1) General method for focusing and astigmatism correction
Focusing and astigmatism corrections are related to each other and need to be repeated
alternately. Use the following process to complete adjustments.
(a) Focus the image. When there is no astigmatism, the sharpest image is obtained at the
best-focus point.
When there is astigmatism, the image looks like its stretching in one direction at an over focused
or under-focused condition, and uniformly focused at the best-focus point.
No image drift
Fig. 3.5-18
Adjusting the Focus
3 - 46
3.5.5
(b) Adjust the stigmators X and Y alternately for the sharpest image.
Fig. 3.5-19
Stigma Adjustment
(c) Focus again and check image drift and sharpness.
(d) Repeat steps (a) to (c) until adjustments are completed.
NOTICE: If it takes a long time to focus and correct astigmatism, you may end up with specimen
damage due to electron beam irradiation and/or contamination.
If the specimen is beam- or contamination-sensitive, we suggest the following
techniques:
(a) Reduce probe current.
(b) Use another area on the specimen for focusing purposes. After focusing, return
to the area of interest, adjust the final focus quickly, and then capture or record
the image.
(2) Auto Focus function
on the Control panel or select the Auto Focus command from the
Click Auto button
Operate menu to start Auto Focus.
When magnification is lower than 5,000×, coarse focus (search using a wide focus range) is
carried out. Fine focus (search using a narrow focus range) is carried out at magnifications
higher than 5,000×.
Fine focus works correctly under conditions where the image is not clear but visible.
The result of Auto Focus depends on the surface structures of the specimen. When there
is little or no surface detail on the specimen, or when the specimen is charged, Auto Focus
does not operate properly.
3 - 47
3.5
Operation for Image Observation
(3) Manual Focus
Manual focusing can be done using the control knobs on the operation panel or the mouse
in the Scanning Image window.
(a) Knob operation
Use Focus control knobs COARSE and FINE on the manual operation panel.
(b) Mouse operation
Move the mouse cursor to the lower half of the image, where the mouse cursor is
. Move the mouse while holding down the left button
changed to the Focus cursor
for fine focus or the right button for coarse focus. Move to the right for a shorter focal
length and to the left for a longer focal length.
Sensitivity of mouse operation can be adjusted on the Mouse Operation tab in the
Optional setup dialog window.
The Focus Monitor mode is available for monitoring focus.
(4) Auto Stigma and Focus
Select the Auto Stigma and Focus command from Operate menu to start Auto Stigma and
Focus.
It is recommended to use this function at magnifications higher than 5,000×. The results of
Auto Stigma depend on the surface structure of the specimen. When the specimen is
charged up or when there is no surface detail on the specimen, Auto Stigma does not
operate properly.
NOTICE: The accuracy of Auto Focus and Auto Stigma and Focus disimprove if the AFC
Alignment adjustment is not correctly done. In that case, adjust AFC Alignment.
See 3.4.2.2 Axial Alignment Items in Detail.
3 - 48
3.5.5
(5) Manual astigmatism correction
Manual astigmatism correction can be done using the knobs on the manual operation panel
or with the mouse operation in the Scanning Image window.
(a) Knob operation
Use Stigma control knobs X and Y on the operation panel.
(b) Mouse Operation
Move the mouse cursor to the top left quadrant of the image, where the mouse cursor is
changed to the STIGMA cursor
.
Drag the mouse while holding down the left
button for X or the right button for Y correction. Repeat X and Y corrections, and focus,
for a final result.
Sensitivity of mouse operation can be adjusted on the Mouse Operation tab in the
Optional Setup dialog window.
Astigmatism corrections can be done with the X and Y scroll bars as well.
Checking the Scroll Bar box on the Utility tab in the operation panel enables use of
these scroll bars.
NOTICE: If the image moves while correcting astigmatism, carry out Stigma Alignment.
Refer to <3.4.2 Axial Alignment>.
(c) Dynamic stigma monitor
The dynamic stigma monitor is a mode that changes the amount of stigma correction
according to the image scanning position. Because only the part of the image for which
stigma correction is at optimum is in focus, adjustments are performed so as to bring
the in-focus point to the center of the image. This mode is useful for observing a
specimen that indicates the presence of a structure in the entire image at a high
magnification. If the specimen surface contains few micro-structures or has a skewed
structure, it may be difficult to identify an in-focus position.
Selecting the dynamic stigma monitor from the Operate menu causes the execution of
the dynamic stigma monitor mode. Because this mode works well at a magnification of
5,000x or higher, any low-magnification setting when the mode is selected will
automatically be preset to 5,000x. Any magnification equal to or greater than 5,000x will
remain unchanged.
Running the dynamic stigma monitor displays a circle and a crossbar on the observation
image, as illustrated in the figure below:
3 - 49
3.5
Operation for Image Observation
Fig. 3.5-20
Dynamic Stigma Monitor
When placed on the observation image, the cursor becomes a cross-hair cursor.
Clicking an in-focus point on the image moves the selected in-focus point to the center.
Alternatively, the stigma knobs X and Y can be used to align the in-focus point with the
center of the image.
Fig. 3.5-21
Monitor Mode Dialog
On the dialog box Monitor Mode, clicking the Reset button moves the in-focus point to
the first point at which the dynamic stigma monitor mode was turned on. Clicking the
Cancel button turns off the dynamic stigma monitor mode.
3 - 50
3.5.5
(5) Focus Monitor mode
A waveform is displayed for monitoring the focus.
The magnification is set at 1,000×.
To start the Focus Monitor, click the Monitor button
the image so that the waveform shows sharp peaks.
Defocused
Fig. 3.5-22
on the Control panel and focus
Focused
Focus Monitor Mode
To close the Focus Monitor, click the Cancel button in the Focus Monitor mode message or
click one of the Scanning Speed buttons.
Clicking the Monitor button in succession toggles between the BC monitor mode
, described above, and the focus monitor mode.
3 - 51
3.5
Operation for Image Observation
3.5.6
Operation of the Specimen Stage (Type I - Manual Stage)
The S-3400N Type I SEM provides a 5-axis manual stage.
3.5.6.1
Movable Range and Specimen Exchange Position
The following table shows movable range and specimen exchange position.
The specimen exchange position is indicated on the label on the stage.
Table 3.5-3
3.5.6.2
Movable Range of the Stage and the Specimen Exchange Position
Movable Range
Specimen Exchange Position
X
0 ~ 80 mm
30 mm
Y
0 ~ 40 mm
20 mm
R
0~360° (Continuous rotation)
0°
T
-20 ~ 90°
0°
Z
5.0 ~ 35 mm
35 mm
Restriction on the Motion of the X and Y-axes
(1) Restrictions on specimens measuring 6 inches or less across
There are no restrictions on the motion of the X and Y-axes with regard to specimen
measuring 6 inches (153 mm in diameter) across or less.
However, if an optional signal detector is attached or inserted restrictions on the X and Ymotions may arise. For details, see the operation manual on the optional detector.
(2) Restrictions on ∅8-inch specimens
∅8-inch (200 mm): 30mm≦X≦45mm
3.5.6.3
Allowable Range of Observation and Motion of the Tilt Axis by Specimen Size
The figure on the following page shows observable ranges in X and Y directions by specimen
size.
For ∅8-inch (200 mm) specimens, the range over which the X axis can be moved is limited to
30mm - 45mm; therefore, a specimen can be observed only in that range.
3 - 52
3.5.6
∅77 sample
∅85 sample
Observable by rotation
Observable by rotation
（80,0）
（0,0）
（80,0）
（0,0）
Observable area
Observable area
（30,20）
（30,20）
77 mm∅ sample
（0,40）
85 mm∅ sample
（0,40）
（80,40）
（80,40）
∅127 sample
∅102 sample
Maximum observable area (φ107）
127 mm∅ sample
102 mm∅ sample
（0,0）
（0,0）
（80,0）
（80,0）
Observable area
Observable area
（30,20）
（30,20）
（0,40）
（0,40）
（80,40）
（80,40）
Observable by rotation
Observable by rotation
∅200 sample
∅153 sample
Maximum observable area (∅107)
Maximum observable area (∅50)
153 mm∅ sample
Observable by 90° rotation
（0,0）
（80,0）
Observable area
（30,20）
Observable by 180° rotation
（0,40）
Observable area
（30,20）
（15,0）
（45,0）
18
（80,40）
30 20
（15,40）
15
（45,40）
Observable by rotation
Observable by 90° rotation
200 mm∅ sample
Fig. 3.5-23
Observable Ranges in X and Y Directions by Specimen Size
(Type I stage - not using an optional detector)
3 - 53
3.5
Operation for Image Observation
3.5.6.4
Tilt and Z Axis Limitations
The allowable tilting angle depends on both Z-axis position and specimen size. A diagram of
the relationship between allowable tilt angles for various Z positions is shown below.
The values shown here represent the case where the specimen height is set in the Standard
position by uising a level gauge. The allowable tilting angles for ∅200 mm specimens
represent the case where the range over which the specimen can be moved in an X direction is
restricted to 30 mm – 45 mm. The use of an optional signal detector (inserted into the
specimen chamber) is subject to further restrictions. For further details on this topic, the
operating instructions on the optional detector should be consulted.
∅15mm
90
80
∅51mm
70 ∅26mm, 32mm
T [deg]
∅77mm
60
∅85mm
50
∅102mm
40
∅127mm
30
∅153mm, ∅200mm
20
10
0
0
5
Fig. 3.5-24
10
15
20
Z [mm]
25
30
35
40
Allowable Angle of Tilt (Type I) with respect to the Z Axis
(positive angle of tilt)
3 - 54
3.5.6
5
∅77mm, ∅85mm
0
∅102mm
T [deg]
-5
∅127mm
∅153mm
-10
∅15mm
∅200mm
-15
-20
∅26mm
∅32mm
∅51mm
-25
0
5
10
15
20
25
30
35
40
Z [mm]
Fig. 3.5-25
Allowable Angle of Tilt (Type I) with respect to the Z Axis
(negative angle of tilt)
IMPORTANT: Set Z and T within the allowable range; otherwise, the specimen may strike the
objective lens or BSE detector and cause damage to both specimen and them.
3.5.6.5
Operating the Z-axis (varying the Working Distance [WD])
Turning the Z-axis knob, counterclockwise moves the specimen toward the objective lens, and
reduces the WD. Conversely, turning the Z-axis knob clockwise moves the specimen away
from the objective lens, and increases the WD. The value of the WD can be read off from the
scale provided on the Z-axis knob.
Readings from the scale are valid when the combined height of the specimen base on which the
specimen is loaded and the specimen base stand is set at the Standard position on the height
gauge.
3 - 55
3.5
Operation for Image Observation
3.5.6.6 Checking the Ranges of T-axis Tilting and Z-axis Motion when Observing a Bulk
Specimen
When observing a specimen that is higher than the Standard position on the height gauge or a
bulk specimen, the interference verification protective fixture should be used when inserting the
specimen stage so that the specimen will not touch the protective fixture, and the stage should
be used within those ranges.
The interference verification protective fixture has a shape similar to an objective lens and the
backscattered electron detector combined.
Fig. 3.5-26
Interference Verification Protective Fixture
3 - 56
3.5.7
3.5.7
Operation of the Specimen Stage (Type II - 5-Axis Motorized Stage)
The S-3400N Type II SEM provides a 5-axis motorized stage.
3.5.7.1
Coordinate Notation
S-3400N utilizes two coordinate notation systems, Stage (Mechanical) Coordinate and Sample
Coordinate. The Sample Coordinate system will be better for using the Rotation Assist
function. The Stage Coordinate system is also available for users familiar with previous Hitachi
SEMs using the Stage Coordinate system.
(1) Relationship of stage and Sample Coordinates
Following is an example of a 5 inch diameter sample.
On the Stage Coordinate system, the center of the sample is (X=60, Y=25 mm) and the
origin is at the upper-left corner of XY movable area.
On the Sample Coordinate system, the center of the sample is the origin (X=0, Y=0 mm)
and the origin fits to it.
∅102 mm sample
∅102 mm sample
（60, -26）
Movable range of stage
（40, 25）
（-60, 25）
(100, 0)
(0, 0)
（0, 51）
Movable range of stage
X
Y
Y
（9, 25）
（60, 25） （100, 25）
(111, 25)
（100, 50）
(0, 50)
(-60, 0)
（0, 0）
（-60, -25）
（40, 0）
（40, -25）
（0, -51）
（60, 76）
Stage coordinates (mechanical coordinates)
Fig. 3.5-27
X
（-51, 0）
Sample coordinates
Relationship between the Two Coordinate Systems
(2) Switching coordinate systems
Open the Optional Setup dialog window by selecting Stage command in Optional Setup
menu.
On the COORDINATE area, select Sample or Stage. OK button will update the coordinate
system.
3 - 57
3.5
Operation for Image Observation
Fig. 3.5-28
Coordinate System Area
NOTICE: The sample coordinate is not exactly the coordinate of the sample.
with the sample when it is rotated.
3.5.7.2
It is not rotated
Movable Range and Specimen Exchange Position
(1) Movable Range and Specimen Exchange Position
The following table shows the movable range and the specimen exchange position.
Mechanical coordinate and specimen coordinates are selectable for X and Y-axes. The
specimen coordinate is (0, 0) at the center of the specimen holder.
Table 3.5-4
Operating Ranges and Specimen Exchange Position (Type II)
Movable Range of
Mechanical Coordinate
Movable Range of
Specimen Coordinate
Exchange Position of
Mechanical (specimen)
Coordinate
X
0 ~ 100 mm
－60 ~ ＋40 mm
60 mm (0 mm)
Y
0 ~ 50 mm
－25 ~ ＋25 mm
25 mm (0 mm)
R
0~360°(Continuous rotation)
0~360° (Continuous rotation)
0°
T
-20 ~ 90°
-20 ~ 90°
0°
Z
5.0 ~ 65 mm
5.0 ~ 65 mm
10 mm, 65 mm
The allowable ranges of X, Y, Z and T axes are limited for a large specimen, and when
optional detectors are in position.
Motion of each axis is limited to within the allowable range by computer control. There is
no risk of striking the objective lens if the correct specimen size, height, and detectors being
used are set correctly.
The table below shows movable ranges along the X and Y-axes (in stage coordinates) by
specimen size.
3 - 58
3.5.7
Table 3.5-5
Restrictions on Operation by Specimen Size (Type II Stage)
X Motion Range
Y Motion Range
∅15 mm
52~68
17~33
∅26 mm
46.5~73.5
11.5~38.5
∅32 mm
43.5~76.5
8.5~41.5
∅51 mm
34~86
0~50
∅15 mm x 4
34~86
0~50
∅77 mm
21~99
0~50
∅85 mm
17~100
0~50
∅102 mm
0~100
0~50
∅127 mm
0~100
0~50
∅153 mm
0~100
0~50
∅200 mm
30~60
7~44
□50x5 mm
34.5~85.5
22~28
□30x10 mm
44.5~75.5
19.5~30.5
EBSP Holder
20~90
21~29
For motion ranges along the T and Z-axes, see 3.5.7.13 Movable Range and Limitation by
Optional Detectors in the text below.
(2) To move stage to specimen exchange position
Use HOME Z10 or HOME Z65 button on the control panel to bring stage to specimen
exchange position. The Exchange Z10 [HOME Z10] button moves the Z-axis to the 10 mm
mark, and the Exchange Z65 [HOME Z65] button moves the Z-axis to the 65 mm mark.
When the Exchange Z10 [HOME Z10] button is disabled (grayed out), the axis cannot move
to the 10 mm mark.
Fig. 3.5-29
Moving to the Specimen Exchange Position
3 - 59
3.5
Operation for Image Observation
IMPORTANT: The Exchange Z10 [HOME Z10] button moves the Z-axis of the specimen stage
to the 10 mm mark. Therefore, if the Exchange Z10 [HOME Z10] button is
pressed when a tall specimen not suitable for the Z-axis 10 mm mark is mounted,
the specimen will touch the BSE located on the underside of the objective lens,
damaging both the BSE and specimen. To avoid this problem, the specimen
should be exchanged using the Exchange Z 65 [HOME Z65] button.
3.5.7.3
Setting Specimen Size and Detectors in Use
The specimen size, height and operating position of an optional detector in the specimen
chamber must be set correctly to keep the movement of each axis within the allowable range.
Use the following procedure for the setting.
(1) On the Stage tab on the Operation Panel, verify the display of the SPECIMEN box, which
shows the specimen size and height. On Size, specify the size of the specimen to be
imaged. On Height, select the highest point of the loaded specimen as measured using the
height gauge.
See 3.2.4.2 Measuring and Setting the Specimen Height.
For example, if the highest point on the loaded specimen matches the Standard mark on the
height gauge, the Standard setting should be selected. On each detector, the display
window is appears in orange if the detector is inserted to the position where it is used. If the
content of the display does not match the specimen to be observed, click the Set button.
Fig. 3.5-30
SPECIMEN Box
The specimen size and height can be set only at the exchange position.
If the Set button is disabled (grayed out), click the Exchange Z10 [HOME Z10] (or Exchange
Z65 [HOME Z65]) button on the right side of the Control Panel, and set a specimen size
after the display window on the left of the button has turned blue.
See 3.5.7.2 Movable Range and Specimen Exchange Position.
3 - 60
3.5.7
(2) When the dialog shown in the figure below appears, click the
button to select Size and
Height from the list and check the applicable detector. Press the OK button to confirm the
settings and close the dialog box.
Fig. 3.5-31
3.5.7.4
Set Window
Operation Methods Used to Move the Specimen Stage
The following operation methods are available to move the stage.
• Operation on the Stage tab of the Operation panel (all 5 axes)
• Manual operation using trackball (X and Y)
• Mouse operation on the image (all 5 axes)
The following additional auxiliary functions are also available:
• Position memory function (X, Y and R axes)
• Stage history function
Memorizes position where capturing or photographing was performed, or manually
registered and display the stage movement path and location of positions. Reset of
stage to memorized positions is also possible.
• Image Navigation function
Goes to assigned position on captured image or imported external image.
3 - 61
3.5
Operation for Image Observation
The figure below illustrates the Stage tab on the Operation Panel:
SPECIMEN box
Sets specimen size, detector
Speed slider
Adj. speed of motion
X, Y motion step count box
X, Y axis step count display &
input
X/Y/R box
X, Y, R axes display & op.
X/Y/R specimen position display
X, Y step move button
Starts X, Y axis step motion
X, Y coordinate box
X, Y coordinate display & input
Abs/Rel select button
R-axis absolute/relative coord.
specs.
Rotation coordinate box
R-axis coordinate display & input
Rotation button
R-axis continuous move
Eucentric checkbox
Specify Eucentric rotation operation
Go button
Starts motion after
R-coordinate spec.
Regist button
Registers stage history
Disp button
Start stage history function
Z/TILT box
Z, Tilt axes display & operation
Multi Holder button
Starts X, Y motion on Multi
Holder
Z/Tilt specimen position
display
Analysis button
Moves Z axis to analysis position.
Tilt scrollbar & coordinate box
Tilt axis coordinate display & spec.
Continuous move button
Continuous move of Z
Z scrollbar & coordinate box
Z-axis coordinate display & spec.
Eucentric Tilt checkbox
Tilt motion eucentric operation
spec.
Go button
Starts motion after Z & Tilt coord.
spec.
Focus Link checkbox
Z motion focus trail spec.
Calibration button
Starts tilt center axis deviation
correction
Navigate button
Starts Image Navigation
Memory button
Starts Stage Memory function.
Fig. 3.5-32
Stage Operation Panel
3 - 62
3.5.7
3.5.7.5
X, Y, R Axis Operation
(1) Manual operation using trackball
Stage moves in the direction of trackball rotation.
Direction switch
Ball
Fig. 3.5-33
Trackball
• Amount of stage motion by ball rotation is linked with magnification. To move a long
distance, it is advisable to lower the magnification.
• The amount of stage motion with respect to the amount of ball rotation can also be veried
in four steps by setting Operation Panel - Stage tab - Speed slider.
• Pushing the direction switch to the [X] side moves the stage only in the lateral direction;
pushing it to the [Y] side moves the stage only in the vertical direction.
• Stage moving direction versus ball rotation direction can be reversed. Check the
Trackball/Joystick check box in the Reverse mode area of the Stage tab in the
Optional setup dialog window.
For a description of custom settings of the stage, see 3.9.14 Optional Setting.
(2) Entering Absolute or Relative Coordinate Value
For X and Y-axes, enter absolute coordinates for X and Y-axes into XY Display/Input box
and then the ENTER key.
For R axis, both absolute and relative value can be used. Select Abs (absolute) or Rel
(relative) with Abs/Rel select buttons, and enter coordinate value into R Display/Input box
and then click Go button. Range of R coordinate is 0 to 360 for absolute and -180 to +180
for relative value.
When the Rotation eucentric check box is checked, X and Y axes move so that the
present field of view is maintained after the stage is rotated. (Eucentric rotation function).
(3) Continuous rotation (R axis)
or
The R axis is moved with the Rotation buttons. Press
R axis continuously or click the buttons to move in steps.
A driving speed can be selected in four steps using the Speed slider.
3 - 63
button to move the
3.5
Operation for Image Observation
(4) Mouse operation on the scanning image
Operation of all 5 axes by using the mouse is available.
Refer to <3.5.7.7 Mouse Operation of Stage on the Scanning Image>.
(5) Moving the X and Y-axes in defined steps
By entering the number of steps by which the X and Y-axes are to be moved in the [Step]
button, the X and Y-axes can be moved in 1-step
box and clicking the
increments.
The allowable range of steps that can be entered is 0.01~10 mm.
(6) Moving the X and Y-axes continuously
By pressing the
or
button while holding down on the [Shift] key on the keyboard, it
is possible to move the stage continuously in the lateral direction. Alternatively, press the
or
button to move the stage continuously in the vertical direction.
(7) Moving the X and Y-axes on the Multi-Holder
Selecting ∅15 mm x 4, ∅25.4 mm x 4, and EBSP Holder as a specimen size enables the
Multi Holder button in the X, Y, R-box. Clicking the Multi Holder button brings up the Multi
Holder dialog box shown below so that the X and Y-axes can be moved between the
specimens loaded on the Multi-Hodler (the R-axis remains fixed at 0°).
∅15 mm x 4
∅25.4 mm x 4
Fig. 3.5-34
EBSP Holder
Multi Holder Dialog Boxes
In Figure 3.5-34, items 1, 2, 3, 4, F, and C represent specimen positions on the Multi Holder.
Clicking any of these items selects the specimen that is indicated in Blue. Clicking the
Move button at this point moves the X and Y-axes to the selected specimen position. If the
R-axis is not 0°, clicking an item resets the R-axis to 0°.
The following specimen positions (mechanical coordinates) are available:
∅15 mm x 4
∅15 mm x 4
EBSP Holder
1 X=69 mm, Y=34 mm
1 X=74 mm, Y=39 mm
1 X=75 mm, Y=25 mm
2 X=51 mm, Y=34 mm
2 X=46 mm, Y=39 mm
F X=60 mm, Y=25 mm
3 X=69 mm, Y=16 mm
3 X=74 mm, Y=11 mm
2 X=45 mm, Y=25 mm
4 X=51 mm, Y=16 mm
4 X=46 mm, Y=11 mm
C X=23 mm, Y=25 mm
3 - 64
3.5.7
(8) Position display
The size of the specimen, its present position and rotation angle are displayed on the XYR
position monitor area.
White circle: Specimen stub
Straightline on specimen circle: Angle of specimen rotation.
Directly above at 0°.
Green rectangle: Scanning direction of electron beam on specimen.
Turns by raster rotation. Red circle corresponds to
upper left pos. on screen.
Red cross cursor intersection: Electron beam irradiation position
Blue square: Observable area on the specimen.
Fig. 3.5-35
Position Display
When sample and stage coordinates are selected, the following scale values apply; the
example below applies to a ∅15 mm sample.
When the specimen is moved, the numbers associated with the vertical and horizontal axes
at the intersection of the red cross epresent the coordinates of the position that is being
irradiated by the beam. The numbers change when the specimen size is changed.
Sample coordinates
Fig. 3.5-36
Stage coordinates
Differences of values displayed in sample position monitor
3 - 65
3.5
Operation for Image Observation
3.5.7.6
Z and Tilt Axis Operation
(1) Operation using the Z/TILT box of the Stage tab on the Operation Panel (coordinates
specifications)
When moving Z and Tilt axis by specifying a set of coordinates, use the Z and Tilt scrollbars
to specify coordinates, and then click the GO button. Z and Tilt axis coordinates can be set
by input from the keyboard and then press ENTER key.
(2) Operation using the Z/TILT box of the Stage tab on the Operation Panel (continuous
motion)
It is possible to move the Z-axis continuously by holding down on the Continuous Move
.
button
The speed of motion can be specified in four steps using the Speed slider.
Similar operations can also be performed using the mouse on the screen, to be described
later.
(3) Moving to an analysis position.
By clicking the Analysis button, it is possible to move to the analysis position of WD=10 mm.
(4) Mouse operation on the scanning image
It is advisable to use mouse operation on the scanning image for continuous operation of Z
or Tilt axis.
For further details, see 3.5.7.7 Mouse Operation of Stage on the Scanning Image.
IMPORTANT: Incorrect specimen size, height, and detector settings can damage the objective
lens or the semiconductor BSE located on the underside of the objective lens, as
well as the specimen itself.
IMPORTANT: To avoid inadvertently disabling the !Stop button, the GO button should not be
pressed continuously when the stage is in motion.
3 - 66
3.5.7
3.5.7.7
Mouse Operation of Stage on the Scanning Image
Use the Mouse Mode on the Option menu or the Mouse Mode on the popup menu to activate
the stage and image shift operation mode (the condition in which the Stage Move tool shown in
the figure below is displayed).
(Operation mode without T, Z tools is also available.)
Fig. 3.5-37
Image Shift/Stage Move Tools
(1) X, Y continuous driving (joystick-like operation)
.
Move the mouse pointer to the circle at the center. It changes to XY mark
Press the left button down and move the mouse in the direction you wish to move the image.
Stage moves in the mouse drag direction while holding down the button. When you drag
the mouse far from the center, the stage moves faster. The speed is also linked with
magnification so as to keep image moving speed constant.
The direction and speed can be changed while pressing down the button.
Fig. 3.5-38
Continuous Motion of XY
3 - 67
3.5
Operation for Image Observation
(2) Dragging the image
At the outside of tools, where the mouse pointer is MOVE mark
, place the mouse
cursor at a start point on the scanning image. Move the mouse to an end point holding
down the left button (a red line is drawn), and release it. The stage is then driven so that
the image at the start point moves to the end point.
Fig. 3.5-39
Motion by XY Specification
(3) RISM function with mouse dragging
If the end point of the above operation is near the center of the image, the red line is
changed to a yellow line and the end point is positioned at the center of the image.
When the left mouse button is released, the stage is driven so that the image at the start
point moves to the center of the viewing screen with the help of the electrical image shift.
Fig. 3.5-40
RISM Function
(4) RISM function with mouse clicking
Alternately, simply clicking the left button of the mouse starts a similar motion.
operation, only the stage is driven, without electrical image shift.
In this
NOTICE: The RISM (Rapid Image Shift Mode) function moves a point of interest to the center of
the viewing screen. The stage motion and electrical image shift are combined for
better positioning accuracy. When the distance from the point of interest to the
center of the image display is within the range of the electrical image shift, beam shift
is used without stage movement. The RISM function is useful for going to higher
magnification without losing the field of interest.
RISM is meant to be used at low and medium magnification levels.
3 - 68
3.5.7
(5) Electrical image shift
The Electrical Image Shift function moves the scanning image electrically. It is useful at
high magnifications where mechanical stage motion is not desired.
To move the image with Electrical Image Shift, use the same operation as in the above (2)
but use right button instead of left button. When you press right button, the mouse pointer
. Move the mouse to an end point while holding down the
will change to Beam mark
right button (a red line is drawn), and release it.
Image Shift knobs on the manual operation knobset are also available. The knobs are
easy to operate.
(6) R axis operation to a specified angle
On the circle of the R axis tool, the mouse pointer will be changed as shown below.
Press down the left button and move the mouse while holding down the button. The tool
rotates following the mouse and the rotation angle is shown in the indicator box.
Then release the button. Stage will be rotated to the angle specified in the indicator box.
The angle value is the absolute angle.
The eucentric rotation function is effective when the Eucentric check box in the Stage tab is
checked.
Fig. 3.5-41
R-axis Moving Tool (angle specification)
3 - 69
3.5
Operation for Image Observation
(7) R axis continuous driving
On the rectangles of the R axis tool, mouse pointer will be changed as shown below.
Fig. 3.5-42
R-axis Moving Tool (continuous move)
Press down the left button on one of the rectangles. Stage will be rotated continuously
while holding the button down. On the right side rectangle, stage rotates clockwise, and on
the left side, counterclockwise.
The eucentric rotation function is not effective when using this selection.
(8) Z-axis operation to a specified coordinate
On the circle of the Z-axis tool, mouse pointer will be changed as shown below.
Fig. 3.5-43
Z-axis Moving Tool (coordinates specification)
Press down the left button and move the mouse up or downward while holding down the
button. The circle moves following the mouse and the Z-axis value is shown in the indicator
box. Then release the button. Stage will go to the Z position specified in the indicator box.
The change of Z is limited to a range allowable for the present Tilt angle.
3 - 70
3.5.7
(9)
Z axis continuous driving
On the rectangles at the top and bottom of Z-axis tool, mouse pointer will be changed as
shown below.
Fig. 3.5-44
Z-axis Moving Tool (continuous move)
Press down the left button on one of the rectangles. The stage will go up or down
continuously while holding the button down. On the top rectangle, stage moves to a
shorter Z, and on the bottom, to a longer Z.
Z motion will stop when it reaches the end of allowable range calculated using the present
Tilt angle.
(10) Tilt axis operation to a specified coordinate
On the circle of the Tilt axis tool, mouse pointer will be changed as shown below.
Fig. 3.5-45
Tilt-axis Moving Tool (coordinates specification)
Press down the left button and move the mouse up or downward while holding down the
button. The circle moves following the mouse and the Tilt axis value is shown in the
indicator box. Then release the button. Stage will go to the Tilt angle specified in the
indicator box.
The change of Tilt is limited to a range allowable for the present Z value.
3 - 71
3.5
Operation for Image Observation
(11) Tilt axis continuous driving
On the rectangles at the top and bottom of Tilt axis tool, mouse pointer will be changed as
shown below.
Fig. 3.5-46
Tilt-axis Moving Tool (continuous move)
Press down the left button on one of the rectangles. Tilt axis will move continuously while
holding the button down. On the top rectangle, tilt angle is increased and on the bottom,
decreased.
Tilting will stop when it reaches the end of allowable range calculated using the present Z
angle.
3 - 72
3.5.7
(12) Rotation adjust tool
The rotation adjust tool is convenient for adjusting an
image to horizontal.
Sa
le
mp
im
e
ag
R adjust tool
Move the mouse at about the center of the tool.
.
Mouse pointer will be changed to array mark
Press down the left button and move the tool to fit an
end to the inclined line part to be rotated to horizontal.
Press down the left button in the circle of another end
and fit the tool to the line part.
Release the mouse button. R axis will rotate and
the line part is adjusted to horizontal.
The eucentric rotation function is effective when the
Eucentric check box in the Stage tab is checked.
Fig. 3.5-47
Rotation Adjust
Tool
IMPORTANT: Using right button instead of left button drives raster rotation with just the same
manner of operation. It is necessary to set raster rotation to operate the raster
rotation function.
3 - 73
3.5
Operation for Image Observation
(13) To move tools
The Z, Tilt and R adjust tools can be placed anywhere in the scanning image.
The mouse pointer will be changed as shown below when mouse is moved to about the
center of vertical line part of Z tool, near the intersecting point of Tilt tool, and center of
horizontal line part of R adjust tool.
Fig. 3.5-48
Movable Tools
Press down the left button and move tools while holding down the button.
3 - 74
3.5.7
3.5.7.8
Position Memory Function
The stage coordinates, both absolute and relative, can be memorized and retrieved.
200 absolute coordinates (20 points on each of 10 pages) and 20 relative coordinates can be
saved in total. Three axes, X, Y, and R, can be registered.
Click the Memory button on the Stage tab. The following Position Memory dialog window will
open.
Fig. 3.5-49
Stage Memory Dialog Box
(1) Registration of absolute stage coordinates at the present stage position
Select a Page and Number, then click Get Position. The present coordinates are then
indicated in the X, Y and R boxes. Input any comments in the Comment box, and click
Save.
(2) Registration of absolute stage coordinates by direct input
Select a Page and Number, and input values to the X, Y and R boxes using the keyboard
followed by the Enter key. Input any comments in the Comment box, and click Save.
(3) Registration of relative stage coordinates using the present stage positions
(a) Select page Rel and Number.
(b) Move the stage (using RISM) to the first position and click Get Relative-1.
(c) Move the stage to the second position and click Get Relative-2.
The relative coordinates between the first and the second positions are calculated and
indicated in X, Y and R boxes.
(d) Input comments in the Comment box and click Save.
3 - 75
3.5
Operation for Image Observation
(4) Registration of relative stage coordinates by direct input
(a) Select page Rel and Number.
(b) Input coordinates in X, Y and R boxes using the keyboard followed by the Enter key.
Input any comments in the Comment box and click Save.
(5) Moving the stage to a memorized position
To move the stage to a memorized position, select a Page and Number, and click Go.
The Next button moves the stage to the coordinate of next number.
(6) Moving the stage by relative movement
To move the stage by a relative movement from the present position, select a page Rel and
click Go.
(7) Clearing of registered data
Select a Page and Number, and click Clear.
3 - 76
3.5.7
3.5.7.9
Stage History Function
Displays present position and registered positions on a specimen picture with trajectory lines
showing the order of registration.
Click the Disp button in the XYR block on the Stage tab. The Stage History dialog box will open.
Fig. 3.5-50
History Display Box
(1) Display
The white circle represents the stub size. The red cross indicates beam irradiation point.
The green points are registered points. And the blue point is selected point.
Lines connecting registered points show the stage movement history.
The Comment field automatically shows the conditions under which the information was
recorded, such as Register (registered using the Reg button), Capture, or Photo.
Appropriate comments should be entered after these indicators.
(2) Registration
Stage coordinates are registered automatically by capturing, photographing and moving to
home or specimen exchange position.
Also clicking Reg button on the dialog window or in the XYR block on the Stage tab
registers present stage position.
(3) Retrieving registered stage coordinates
To retrieve a registered coordinate and go to the position, select a point by clicking the point
on the display, or select its number in the Select box. The selected point is changed to
blue color. Click Go button to go to the position representing the selected point.
3 - 77
3.5
Operation for Image Observation
(4) Deleting registered points
To delete points individually, select the point and click the Delete button.
points, click the Clear button.
To delete all
(5) Saving and reading history data
To save displayed position data, click the Save button. A dialog box for saving will open.
Specify folder and file name and then, click the Save on it. The extension of history files
is .ssh.
To read saved data, click the Load button and specify a file name on the opening dialog
window. The saved data contains the information on specimen size and data reading is
possible when the present specimen size setting is the same as that of the data to be read.
If the read data is just that of the current specimen or of a specimen having the same object
layout, the data is effective for retrieving a prior imaged field of view.
3 - 78
3.5.7
3.5.7.10
Image Navigation
The Image Navigation function moves the stage to the position pointed out on the navigation
images.
Captured SEM images at low magnification as well as imported externally created images, such
as optical microscope images or drawings, are available as navigation images. In this case,
alignment operations are needed to ensure that the drawing (photo) to be used and the
specimen being observed match in their relative geometry.
SEM images and imported images can be used in 10 images each. Navigation images to be
used can be switched at any time.
SEM image
Fig. 3.5-51
Imported image
Image Navigation Window
(1) Starting image navigation
The Navigation button on the Stage tab opens Image Navigation dialog window.
(2) Using Captured SEM images
Select Capture at Capture/Import selection.
Click the Capture button. The present displayed scanning image will be captured and
shown on the Image Navigation window.
Up to 10 images, with different stage position or magnification, can be captured and you can
use any one by selecting with << and >> buttons.
3 - 79
3.5
Operation for Image Observation
NOTICE: • Use the navigation image function at magnification lower than 5000×.
Capturing of higher magnification image is not allowed.
• When the following operations are performed, the precious image becomes
unregistered, and the [Need Refresh] window will blink in red:
(a) When the R, T, or Z-axis for the stage is moved (for raster rotation, changing
angles does not unregister an image).
(b) When the accelerating voltage is changed.
(3) Navigation on an SEM image
On the navigation image, the mouse pointer becomes a white cross mark. Place the cross
mark intersection point at the position to be enlarged, and click the left button on the mouse.
The stage will move so that the indicated point will come to the center of the screen. The red
cross mark indicates the current observation point.
If multiple images are registered, use the ＜＜
＞＞ button to select images in
sequence.
(4) Using imported images
Select Import at Capture/Import selection.
Picture files of windows bitmap (.bmp), Tiff (.tif) or JPEG (.jpg) format can be loaded as
imported images. Up to 10 images can be imported.
The pictures shall have correct aspect ratio and not be mirror inverted or flipped. Also it is
recommended that the picture direction coincide with the specimen direction (looking from
the display unit side to the main unit).
To import an image, click the Import button. Select a file in the opening file selection
dialog window.
3 - 80
3.5.7
(5) Alignment operation
To use imported images for navigation, alignment operation is necessary.
Select two alignment points on a navigation image. These two points shall be separated
left - right or upper - lower side of the image center.
(a) Select the object, which corresponds to the first alignment position on scanning image.
(b) Click the Alignment button on the Image Navigation dialog window.
Fig. 3.5-52
Alignment Box
A message [Move a remarkable object to the center of image and click 1st button, click
the position in the navigation image corresponding to the selected object by mouse.] will
be shown. Close the message by OK button. Adjust the stage so the selected object
goes to the center of image and then click the 1st button.
Fig. 3.5-53
1st Setting
(c) Find the first alignment point in the navigation image and click it.
The next message [Move a selected object to the center of image and click 2nd button,
click the position in the navigation image corresponding to the remarkable object by
mouse.] will appear. Close the message by OK button.
Search the object, which corresponds to the second alignment position on scanning
image, and move it to the center of image.
(d) Click the 2nd button on the Image Navigation dialog window. And then find the second
alignment point in the navigation image and click it.
Fig. 3.5-54
2nd Setting
3 - 81
3.5
Operation for Image Observation
NOTICE: • The two alignment points on the navigation image shall be separated left - right or
upper - lower side of the image center. The navigation image is divided into four
areas with cross marker in the alignment operation. Alignment points shall be
selected on two different areas.
• When you have moved R, T or Z-axis of stage or have changed accelerating
voltage, perform alignment again.
(6) Navigation operation
After finishing alignment, the picture can be used in just the same manner as a captured
SEM image.
Clicking a point on the navigation image moves the stage to bring the point to the center of
field of view.
(7) Using both imported and captured images
Valid (with a green Need Refresh window) SEM images and properly aligned imported
images can be switched at any time for navigation purposes.
(8) Deleting a navigation image
Clicking the Delete button deletes the image that is currently displayed as a navigation
image.
3 - 82
3.5.7
3.5.7.11
Rotation/Tilt Eucentric Function and Calibration
The rotation eucentric function serves to keep the present field of view after specimen rotation.
It calculates XY position that will recover the present viewing position after rotation axis is driven
using the present XY position and the angle to be rotated. XY axes are moved to the calculated
point together with rotation axis.
In addition, the tilt eucentric function moves the XY axes together with tilt axis so that the
previous viewing point will be kept after the tilting operation.
To improve accuracy of the functions, calibration of the error factors is necessary.
(1) Specifying eucentric or non-eucentric rotation or tilt
Check the Eucentric check box in the XYR block to enable the eucentric rotation.
It is effective when rotating R axis by specifying the angle value. It is not effective when
rotating R axis using continuous rotation.
Check the Eucentric Tilt check box in the Z/Tilt block to enable the eucentric tilt.
It is effective when tilting specimen by specifying the angle value. It is not effective when
using continuous tilting.
(2) Calibration
The following calibration commands are provided:
(a) Measure and correct the deviation between rotation center axis and beam irradiation
position.
(b) Measure and correct the deviation between tilt center axis and beam irradiation position.
(c) Measure and correct the deviation between rotation center axis and beam irradiation
position caused by changing Z-axis position.
(d) Measure the specimen height error and compensate the rotation center and the tilt
center axes.
The beam irradiation position may shift when adjusting the electron beam axis, this
measurement tool is provided to enable measurement and correction at any time. For
execution methods, see 3.5.7.11 (4) Calibration is necessary when accuracy is degraded.
On the other hand, the specimen height error (the above (d)) will change whenever
specimens are exchanged. It should be compensated at each specimen exchange to get
the best accuracy. For execution methods, see 3.5.7.11 (3) Stage tilt calibration Calibration necessary for each specimen exchange.
It is not necessary when you use the eucentric rotation function with no tilting condition.
3 - 83
3.5
Operation for Image Observation
NOTICE: For this auxiliary operation, a flat specimen should be used and the specimen height
should be measured as accurately as possible using the height gauge. This series of
operations will automatically move the R, Z, and T-axes of the stage.
(3) Stage tilt calibration - Calibration necessary for each specimen exchange
When specimen height differs from the standard value and the specimen is tilted, the
rotation and tilt center axes will shift. For accurate operation of the eucentric function, the
specimen height must be measured and corrected at each specimen exchange.
Since the previous correction factor is retained, calibration is not necessary if the specimen
height does not vary at each specimen exchange.
Carry out the calibration as follows.
(a) Insert a specimen. On the Z/Tilt box, verify that the movable range of the Tilt axis is 20°
or greater.
Then search for a structure of interest near the specimen center.
(b) Click the Calibration button in the Z/Tilt area on Z/Tilt block, then the Stage Tilt
Calibration dialog box will appear.
Fig. 3.5-55
Center of Tilt Calibration Box
3 - 84
3.5.7
(c) Click the Reset button.
The following message will appear.
Fig. 3.5-56
Confirming the Operation Method
As described in the message, bring the structure of interest to the image center at a
magnification of about 500×, then click Enter button of Tilt 0 deg.
(d) Stage is moved to tilt angle of 20°. Again bring the structure of interest to the image
center, and click Enter button of Tilt 20 deg. A Calibration Factor is calculated and
indicated. This value represents the deviation of specimen height from the reference
position. Now click the Apply button.
Click the Close button to close the window.
3 - 85
3.5
Operation for Image Observation
(4) Calibration is necessary when accuracy is degraded.
Carry out the following three calibrations when accuracy of eucentricity is degraded.
(a) Rotation center
It measures the deviation of the rotation center from the beam irradiation point.
For this auxiliary operation, use a specimen base (height: 6 mm) on which no specimen
is loaded. Use the Stage tab to set the specimen Height in the SPECIMEN block to
Standard.
1)
Insert a specimen, set WD at 10 mm, tilt at 0° and R at 0°, then search for a
structure of interest near the specimen center.
2)
Select Stage Calibration - Rotation center command in the Option menu.
The Stage Offset Adjust dialog box will open.
Fig. 3.5-57
3)
Center of Rotation Calibration Dialog Box
Click Reset button. The following message indicating steps of operation will be
shown.
Fig. 3.5-58
4)
Verifying the Operating Method
Bring the structure of interest to the image center, and click Enter button.
The specimen rotates 45°. After it stops, search for the aforementioned structure
of interest (although it shifts from the image center, it will be located within a range
of about 300 µm). Bring this point to the image center and click Enter button.
3 - 86
3.5.7
5)
The specimen rotates to an angle of 90°.
center and click Enter button.
Again bring the point of interest to the
6)
In the same way, each click of Enter button rotates the specimen 45° at a time.
Bring the point of interest to the center each time and then click Enter.
Upon clicking Enter at a rotation angle of 315°, a Calibration Factor is calculated
and indicated. This value is the stage coordinate at the rotation center, and is
normally within 60±1 mm, 25±1 mm. After clicking Apply button, click Close button
to close the box.
(b) Stage tilt calibration
It measures the deviation of the tilting center from the beam irradiation point.
For this auxiliary operation, use a flat specimen, and measure the specimen height as
accurately as possible with the height gauge and setting it. The specimen size should
be ∅32 mm or less.
Refer to < 3.2.4.2 Measuring and Setting the Specimen Height >.
1)
Insert a specimen, set WD at 30 mm, tilt at 0° and R at 0°, then search for a
structure of interest near the specimen center.
2)
Select Stage Calibration - Tilt center command in the Option menu.
The Stage Tilt Calibration dialog box will open.
Fig. 3.5-59
Center of Tilt Calibration Dialog Box
3 - 87
3.5
Operation for Image Observation
3)
Click the Reset button.
be shown.
Fig. 3.5-60
The following message indicating steps of operation will
Verifying the Operating Method
As described in the message, bring the point of interest to the image center at a
magnification of about 500×, then click Enter button of Tilt 0°.
4)
The stage will be moved to a tilt angle of 20°. Bring the point of interest to the
image center and click Enter button of Tilt 20°.
5)
The stage will be driven to a tilt angle of 40°. Again bring the point of interest to
the image center and click Enter button of Tilt 40°.
A Calibration Factor is now calibrated and indicated. This value represents the
deviation of specimen height from the reference position. Click Apply button, then
click Close button to close the box.
(c) Z-axis compensation
It measures the shift of the stage caused by changing Z-axis position.
For this auxiliary operation, use a flat specimen, and measure the specimen height as
accurately as possible with the height gauge and setting it.
Refer to < 3.2.4.2 Measuring and Setting the Specimen Height >.
1)
Insert a specimen, set WD at 30 mm, tilt at 0° and R at 0°, then search for a
structure of interest near the specimen center.
2)
Select Stage Calibration - Z Axis Comp command in the Option menu.
The following box appears:
Fig. 3.5-61
Z-axis Calibration Dialog Box
3 - 88
3.5.7
3)
Click the Reset button.
be shown.
Fig. 3.5-62
The following message indicating steps of operation will
Verifying the Operating Method
Upon closing the message, the Z-axis will be driven to 30 mm. Carry out focusing
and set magnification to about 500×, then bring the point of interest to the image
center and click Enter button.
4)
The Z-axis of stage will be driven to 50 mm. Carry out focusing again, bring the
point of interest to the image center and click Enter.
5)
At each click of Enter, the Z-axis will be driven to 35 mm, 20 mm, 10 mm and then
5 mm. Bring the point of interest to the image center each time and then click
Enter.
After clicking Enter at 5 mm, click Apply and then click Close to close the box.
3 - 89
3.5
Operation for Image Observation
3.5.7.12
Stopping Stage and Returning to Previous Stage Position
If an incorrect position specification must be canceled when the stage is moving to a coordinate
specification or the stage keeps moving and does not stop for some reason, click the !STOP
button.
Fig. 3.5-63
!STOP Button
To return to a previous position after moving stage using coordinate specifying operation, use
Undo - Stage Drive menu. It is effective for only one previous position.
(The stage cannot be reset to two or more previous positions. The Undo-Stage is valid only on
coordinate specification or stage memory motion.)
IMPORTANT: Do not repeat clicking the button. Clicking the button repeatedly can cause
malfunction and damage the specimen or components inside the specimen
chamber.
3.5.7.13
Movable Range and Limitation by Optional Detectors
(1) Movable range of the specimen stage for various specimen sizes
The movable range is limited when observing large size specimens.
Stage motion is limited to the movable range automatically designated by the computer.
The limit value is calculated using the size information set on the Set Sample Size/Detector
dialog box.
The following operating ranges apply:
• For small size specimen, X and Y limitation is specified so the movable range covers just
the size of the specimen.
• For large size specimen, the movable range is limited to safety area. When optional
detectors are inserted to their operating position, the safety area will be limited to
narrower range.
IMPORTANT: Always measure the height of a specimen using the supplied height gauge. In
the Sample Size/Height input field in the Operation Panel Stage tab, set the
specimen size and height. Incorrect specimen size, height, or detector settings
can damage the objective lens, the BSE detector located on the underside of the
objective lens, or the specimen itself.
3 - 90
3.5.7
(2) Observable range
The following page shows the X and Y observable ranges by specimen size, and mutual
restrictions on the Z and Tilt axes at the Standard height, and the movable range for the Tilt
axis as a function of specimen height by specimen size. With regard to Z and Tilt
restrictions, for an actual movable range, if either the Z or T scrollbar is set to the
coordinates to which the axis is moved by using the Z/TILT box of the Stage tab on the
Operation Panel, the movable range for the other axis is automatically calculated and
displayed on the scrollbar. Therefore, SOMETHING (subject missing) should be set within
that range.
See 3.5.7.6 Z and Tilt Axis Operation.
The Z axis coodinate value indicated in the Z scroll bar and the Z coodinate box on the
Z/TILT Window of the Stage tab changes according to setting of the specimen height.
Refer to < 3.2.4.2 Measuring and Setting the Specimen Height >.
Z scrollbar
Z coordinate box
Fig. 3.5-64
Z/TILT Window
3 - 91
3.5
Operation for Image Observation
∅77 sample
∅85 sample
Observable by rotation
（1,0）
Observable by rotation
（79,0）
（83,0）
（0,0）
Observable
area
（40,25）
Observable
area
（40,25）
77 mm∅ sample
（1,50）
85 mm∅ sample
（79,50）
（0,50）
∅102 sample
（83,50）
∅127 sample
127 mm∅ sample
102 mm∅ sample
（0,0）
（100,0）
（0,0）
（100,0）
Observable
area
（40,25）
（0,50）
Observable area
（40,25）
（100,50）
（0,50）
（100,50）
Observable by rotation
Observable by rotation
∅153 sample
∅200 sample
Maximum observable area (∅130)
Maximum observable area (∅71)
153 mm∅ sample
（0,0）
（100,0）
Observable by 90° rotation
Observable area
（40,25）
（0,50）
Observable by 180°
rotation
（70,7）
18
（100,50）
Observable by rotation
（40,7）
30
（60,25）
（40,25）
29
（64,44）
（70,44）
Observable by 90° rotation
200 mm∅sample
Fig. 3.5-65
X and Y Movable Ranges for the Type II Stage by Specimen Size
(when an optional detector is not used)
3 - 92
3.5.7
Type II stage
Movable range of the Tilt axis with respect to Z values st Standard specimen height by specimen
size (when an optional detector is not used)
• Restrictions on positive angles of tilt
95
90
∅15 mm
85
∅32 mm ∅51 mm
∅26 mm
∅77, ∅85 mm
80
∅102 mm
75
∅127 mm
70
∅153 mm
65
60
T [deg]
55
50
45
40
35
30
25
20
15
∅200 mm
10
5
0
0
5
10
15
20
25
30
35
40
45
50
55
60
65
Z [mm]
Fig. 3.5-66
Tiltable Angles with respect to Z-axis Positions (Type II)
(positive angles of tilt)
3 - 93
3.5
Operation for Image Observation
• Restrictions on positive angles of tilt (when an optional detector is not used)
0
-5
∅200 mm
∅102 mm
T [deg]
-10
∅127 mm
∅51 mm
-15
∅15 mm
∅153 mm
-20
∅26 mm
∅77, ∅85 mm
∅32 mm
-25
0
5
10
15
20
25
30
35
40
45
50
55
60
65
Z [mm]
Fig. 3.5-67
Tiltable Angles with respect to Z-axis Positions (Type I Stage)
(negative angles of tilt)
(3) Limitation and evacuation when an optional detector is inserted
Some optional detectors have sensor switches and are automatically sensed when they are
inserted. For detectors not having such sensor switches, it is necessary to set detector in
use correctly in the Set Sample Size/Detector dialog box. If a detector having sensor
switch is inserted when present stage position is out of allowable area, the stage will
evacuate to the safe position as follows.
(a) EDX detector
No limitation required.
(b) WDX detector (made by Oxford Corporation) used:
∅5-inch (127 mm) specimens are restricted to X: 0.0 ~ 85.0 mm in mechanical
coordinates.
∅6-inch (153 mm) specimens are restricted to X: 0.0 ~ 72.0 mm in mechanical
coordinates.
∅8-inch (200 mm) specimens cannot be loaded.
NOTICE: If the stage positions (X, Y, Z, and T) are outside the movable range when a detector
is inserted, and if a detector equipped with a detection sensor is inserted, the stage
will be forced to undergo retraction motions.
3 - 94
3.6.1
3.6
3.6.1
Saving and Recording Images
Saving and Recording Images
It is possible to record images using conventional photo films and printers, and/or as image data
files (to disk drive). There are four methods of image recording:
(1) Taking photographs (optional photo-recording unit is necessary)
For photographic image recording, you can use Direct Photo or Memory Photo recording.
Memory Photo can produce multiple photographs from a given image.
See <3.6.6 Taking Photographs (Option)>.
(2) Saving images
Direct Saving, which saves an image on the scanning image display, and Captured Image
Saving, which saves captured images, are available.
Also available is a Quick Save function, which can automatically save captured images
under a specified name. Using these functions, it is possible to save images that are
processed on SEM Data Manager.
(3) Printing images
Printing of images using Windows-supported printers is available.
Refer to <3.9.10 Printing Images Using Report Generation Function>.
(4) Copying images to other application software
Scanning Image can be copied to Windows-clipboard. You can use the image on
application software by simply pasting it.
When the optional PCI image database software is installed, images are transferred directly
to it without saving images.
Refer to <3.9.11 Copy Image>.
(5) Related information
Auto data display, and text and graphics written on the image using data entry functions are
recorded with the image. A text file including image information such as operating
condition, date and others is created when the image is saved. It is saved in the same
directory as the image. The measurement function option allows you to save and output
images by writing any text to them as well as incorporating the results of measurements
(measured values and cursors).
NOTICE: For storing images, we suggest the use of external storage devices, as the storage
capacity of PC hard drives is limited. Also, external storage devices are
recommended for data backup.
3 - 95
3.6
Saving and Recording Images
3.6.2
Preparing Images for Recording
The source of images to be recorded is frozen images in the image memory except for direct
photographing.
(1) Freezing an image
(a) Using Run/Freeze button
Scanning image will be frozen. When scanning speed is slow, scanning continues to the
end of the frame and then, the image is frozen. Image size is 1280 x 960 pixels in full
screen. It is 640 x 480 pixels in small and dual screen mode.
(b) Capturing an image
During the image capture process, depending on the particular scanning speed
employed, the image is frozen either after integration or after one frame is scanned
slowly. Image size depends on the selected capture resolution (640 x 480, 1280 x 960,
2560 x 1920 or 5120 x 3840 pixels).
(c) Direct photographing
After photographing, the image is frozen in the image memory. Image size depends
on the capture resolution selectable with Capture resolution select button (640 x 480,
1280 x 960 or 2560 x 1920 pixels).
(2) The source of image to be recorded
Several commands or buttons are placed on multiple areas.
commands are as follows.
The image sources for the
(a) When you use menu commands, or buttons on the control panel, the scanning image
will be used as the image source. Image size depends on the way of freezing, as
mentioned above.
(b) When you use buttons on the Captured Image window, the selected image on the
window is used as the image source. Image size depends on the capture resolution
setting.
(3) Embedding texts and graphics written on the image
(a) Auto Data Display
When the Embed Into Image box in the AUTO Data Display area on the Setup dialog
window - Record tab has been checked, the auto data display is embedded into the
image data when the image is saved. If it is not checked, only the image data is saved.
This setting is also applied for Print, Copy and PCI Transfer commands. If the For
Photograph box is checked, the position of the auto data display in the saved image is
shifted slightly upward to ensure that it is properly framed in photographs. It is
recommended not to check the box if the saved image data will be used on the
computer only.
3 - 96
3.6.3
(b) Data Entry
When recording scanning images, graphics and texts written using Data Entry function
are recorded as they are shown on the scanning image.
When recording captured images using command buttons placed on the Captured
Image window, graphics and texts written before starting capture are embedded into
captured images and recorded.
Note that they may be different from present displayed data.
If data embedding is not necessary, uncheck the Embed into Image on the Captured
Image window.
For details, refer to <3.6.7 Recording Data Display with Images>.
(c) CD Measurement data (option)
The measured data and cursors together with Data Entry data are saved, recorded,
printed or copied with images.
3.6.3
Image Capture
Image Capture stores images using specified scanning mode and specified resolution.
Two methods, multi-frame integration and single frame slow scanning are available.
Max 16 images can be recorded temporarily.
Multi frame integration is effective for specimens susceptible to charge-up. Slow scan is
advantageous in order to obtain high-resolution images.
To select conditions for image capture, use the following steps.
(1) Capture Resolution
Click either the Capture Setting button ( ) in the upper right section of the Capture button on
the Control panel or right-click the Capture button. Then, a pull-down menu for selecting
capture resolution will appear. Select the desired resolution on this menu. The selected
resolution is displayed on the Capture button as follows:
Fig. 3.6-1
List of Capture Settings
3 - 97
3.6
Saving and Recording Images
• 640 x 480:
Low resolution
Advantageous for small image sizes and faster acquisition times.
• 1280 x 960:
Medium resolution
Adequate image quality with reasonable acquisition times. Recommended
for usual operation.
• 2560 x 1920: High resolution
Fine quality image. The large image size results in a long acquisition,
storage and processing time.
• 5120 x 3840: Highest resolution
Effective for relatively low magnification and samples containing very fine
structure.
Note that the large image size requires long processing time for creation,
saving, loading and image processing.
NOTICE: For large size captured images, the following limitations apply.
1) CD Measurement function works on 2560 x 1920 pixel or smaller images.
2) Color mixing on SEM Data Manager works on 2560 x 1920 pixel or smaller
images.
3) Pseudo Coloring on SEM Data Manager works for 2560 x 1920 pixel or smaller
images.
In the above cases, a message will be shown and the specified commands will be
canceled.
3 - 98
3.6.3
(2) Selecting the number of integration frames and the speed of slow scanning capture
Either click the Capture Setting button ( ) in the upper right section of the Capture button on
the Control Panel or right-click the Capture button to bring up a list of capture settings.
Fig. 3.6-2
Link to Scanning Speeds Selected
• The scanning speed link check-marked:
Capturing is executed according to the current scanning speed settings.
• TV 1/TV 2/Fast 1/Fast 2:
Select the desired number of integration frames (16 to 1024 frames) for the TV/Fast
scanning capture process.
The larger this number, the higher is image quality at the expense of an increased
processing time. Under conditions of a high magnification rate and specimens that are
susceptible to charging up, a high integration frame number can cause a reduction in the
sharpness of the image due to image drifting during the integration.
• Slow:
Select the desired scanning speed (20 to 320s) for the slow scanning capture mode. (If
the image cannot be captured within a specified time depending on the particular display
mode in effect, the nearest possible condition will be employed for the execution of the
scanning process. No matter what scanning speed is selected, the actual capturing
speed in this mode will be in the Slow 1 to 5 range.
3 - 99
3.6
Saving and Recording Images
Fig. 3.6-3
No Link to a Scanning Capture Link
• The Scanning Speed Link is not check-marked:
Irrespective of the current scanning speed, the capturing process is executed at the
scanning rate selected on the TV/Fast/Slow radio button.
• TV/Fast:
Select the desired number of integration frames (16 to 1024 frames) for the TV/Fast
scanning capture process.
The larger this number, the higher is image quality at the expense of an increased
processing time. Under conditions of a high magnification rate and specimens that are
susceptible to charging up, a high integration frame number can cause a reduction in the
sharpness of the image due to image drifting during the integration.
• Slow:
Select the desired scanning speed (20 to 320s) for the slow scanning capture mode. (If
the image cannot be captured within a specified time depending on the particular display
mode in effect, the nearest possible condition will be employed for the execution of the
scanning process.
3 - 100
3.6.3
(3) Image Capture
To start Image Capture, click the Capture
button on the Control panel.
capture can be started either in RUN or FREEZE status.
Image
(4) Displaying a captured image
After the scanning is finished, the Captured Image window opens and the captured image
is added in the list as a thumbnail.
Fig. 3.6-4
Captured Image List Window
The Captured Image window opens by Captured button on the tool button area of the
Operation panel, Captured Image command in the Window menu and the shortcut Ctrl - L at
any time.
Refer to <2.3.10 Captured Image Window>.
3 - 101
3.6
Saving and Recording Images
3.6.4
Saving a Scanning Image (Direct Save)
The scanning image, simply frozen or captured, can be saved. Resolution of saved image is
1280 x 960 or 640 x 480 depending on present screen mode when saved just after freezing the
image. When saved after capturing, resolution follows capture resolution.
Graphics and texts written using Data Entry function and CD measurement function are put on
saved images when saved while they are shown on the image.
button on the control panel or select the Direct Save command from the
Click the Save
File menu. The Save Image dialog window will open.
Fig. 3.6-5
"Save As" Window
(1) Select an image format on Image Type area.
Bitmap: Windows bitmap
TIFF:
TIFF (Tagged Image File Format)
JPEG: JPEG
(2) Set Save Option if necessary.
Off:
Save one image only.
All Save:
Effective when opened from Captured Image window. Saves all images
selected in Captured Image window at a time.
File names [{Input File name} + _n (n: capture number)] are automatically
generated.
Data No. Save: Puts a data number, which is specified in Auto Data Display setting to the
end of file name when saving images.
This function is effective when saving plural captured images with one
saving operation.
The Auto Increment shall be set for Data Number on Setup dialog
window - Record tab.
To enable auto Increment, set Data Number to ON, Auto Increment to
ON and put "-" plus number to the end of the data number as shown on
the following picture.
3 - 102
3.6.4
Fig. 3.6-6
Settings Window Record Tab
In the above case, resulting file names are [S3400_i001.TIFF], [S3400_i002.TIFF] and so on.
If the Auto Increment is not set when the Data Number Save is selected, Following
message will be shown.
Fig. 3.6-7
Data No. Save Window
If the function is reset so that the above auto incrementing is not performed after the "Save
Data No." option was enabled, the image will be saved with no Data No. (using a specified
file name only). If an attempt is made to save multiple images in a single operation, the
second and subsequent images will be saved under the same name, in which case a
confirmation message will appear, asking the user whether files can be overwritten. In this
case, temporarily cancel the image save, cancel the "Save Data No." option, and save the
images one by one. The captured image is assigned a data number that was in effect
when the capturing process was executed. Therefore, before performing a capturing
process, the auto incrementing option should be enabled.
3 - 103
3.6
Saving and Recording Images
(3) Input INFORMATION.
User Name, Sample Name, Keywords can be selected from already used names or
created newly. Entry of these items is not necessary but useful for selection of files in the
SEM Data Manager.
(4) Set options.
The saved data is automatically registered to SEM Data Manager database when the SDM
Register is checked.
(5) Specify folder and file name.
The ↓ button beside the Folder and Image Name input box opens a list of recently used
names. You can select one of them and modify it. The Select button opens Save as
dialog window. You can select or create folder and file name on it.
Click Save button to execute saving.
Note that for file names on Quick Save and All Save, only up to 251 characters is allowed.
Another function available to save the image under observation is Quick Save.
After an image is captured as described in <3.6.3>, Quick Save allows you to save images
under a previously specified file name.
To run Quick Save, select Quick Save on the File menu. This will open the type of Save
Image As window shown below:
Fig. 3.6-8
Save Image As Window
On this window, enter IMAGE TYPE, INFORMATION, SDM Register, the destination folder,
and a file name. Quick Save indicates a file number below the file name. Quick Save
saves files under a file name with a "qXX" extension, where the letters XX corresponds to
the file number. File numbers are half-size numeric characters ranging from 1 to 99.
Once Quick Save is executed, the file number is incremented by 1. When the file number
reaches, 99, a message appears, prompting you to change file names.
When the Quick Save option is set, simply pressing the Save button
Quick Save function without displaying the Quick Save window.
3 - 104
executes the
3.6.5
3.6.5
Saving Captured Images
Captured images can be saved using the Save
button in the Captured Image window.
To save captured images, select an image by clicking a thumbnail or multiple images by clicking
thumbnails and pressing Ctrl key. Also multi selection with Shift key is available.
The Save button opens the Save Image dialog window. Procedure is the same as above.
Additionally the All Save option is available.
The selected images are identified with yellow bordering. The text "Saved" shows already
saved images.
Fig. 3.6-9
Captured Image List Window
3 - 105
3.6
Saving and Recording Images
3.6.6
Taking Photographs (Option)
To take a photograph of an image, use one of two modes: Direct Photo mode and Memory
Photo mode.
Direct Photo:
Direct Photo mode takes a photograph while directly scanning the electron beam.
Memory Photo:
Memory photo mode can produce photographs of simply frozen or captured, or stored images.
It is also possible to take a photograph of an image formed by using a Fast scan integration
method, which is useful for observation of charge-sensitive samples. The Fast scan integration
method can also embed auto data displays, characters that are input using the data entry
function, and graphics.
3.6.6.1
Setting Photo Condition
To select the conditions for photo recording, open the Setup dialog window - Record tab by
button on the tool button area of the Operation panel, or by selecting
clicking the Setup
the Photo Condition command in the Setup menu.
Fig. 3.6-10
Settings Window Recording Tab
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3.6.6
(1) Photo Speed
• Direct Photo
Recommended selection is 80 seconds.
Use a 40-second scan for beam-sensitive specimens, or to shorten recording time.
A selection of 160 or 320 seconds is recommended for recording X-ray mapping images.
Number of scanning lines is shown below the selection box.
• Memory Photo
The number of scanning lines is selectable.
Normal : 640 x 480 pixel image →960 lines (16/19 s)
1280 x 960 pixel image →960 lines (16/19 s)
2560 x 1920 pixel image →1920 lines (16/19 s)
Enhance : 640 x 480 pixel image →960 lines (16/19 s)
1280 x 960 pixel image →1920 lines (16/19 s)
2560 x 1920 pixel image →1920 lines (16/19 s)
(2) BRIGHTNESS/CONTRAST
Use slider controls to adjust brightness and contrast of recorded images. Set the controls
in plus areas to brighten or enhance contrast. Set them in minus areas to darken or reduce
contrast. These values indicate compensation factors for brightness and contrast on the
scanning image.
(3) FILM
Film Speed (ISO)
Select the speed (sensitivity) of the film. This parameter is necessary in order to obtain an
adequate brightness of recorded images for various types of film.
Photo Size
Select a size of film. The magnification value is adjusted internally according to the
selected size.
× 0.6: For Type 120 negative film
× 0.8: For small size Polaroid film (type 107, 105 or equivalents)
× 1.0: For 4 × 5 Polaroid film
(4) X-ray Mapping Intensity
Check this to brighten a low density X-ray mapping image.
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3.6
Saving and Recording Images
3.6.6.2
Direct Photo Recording
Direct Photo mode takes a photograph while directly scanning the electron beam.
It generally shows better image quality compared to the Memory Photo mode.
button on the Control panel or select the Direct
To start recording, click the Photo
Photo command from the File menu.
The scanning speed and other conditions can be selected in the Setup dialog window - Record
tab.
3.6.6.3
Memory Photo Recording
Memory Photo mode can reproduce photographs of memorized or filed images. It is also
possible to take a photograph of an image formed using Fast scan integration method, which is
useful for observation of charge sensitive samples.
(1) Photographing frozen scanning image
button on
To take a photograph of a frozen scanning image, click the Memory Photo
the Control panel, or select the Memory Photo command from the File menu.
In the case of recording a frozen image, the image resolution depends on screen size, 1280
x 960 pixels for full screen and 640 x 480 pixels for small and dual screen mode.
(2) Photographing images from the Captured Image window
It is also possible to take a photograph of a captured image by clicking the Photo
button in the Captured Image window.
On the window;
1) Select an image by clicking a thumbnail. The selected image is shown with yellow
bordering.
2)
Click the Photo
button in the Captured Image window.
When the Embed into Image has been checked, auto data display and texts and
graphics written using Data Entry function are overlaid on image. (Note that the data is
at the time capture was executed.)
(3) Photographing saved images
To take a photograph of a saved image from disk, use SEM Data Manager.
3 - 108
3.6.7
3.6.7
Recording Data Display with Images
Text and graphics drawn using Auto Data Display and Data Entry function are embedded into
image data as follows.
3.6.7.1 Image Recording Using Menu Commands or Buttons on the Control Panel
When images displayed on the scanning image screen are saved, photographed, printed or
transferred to PCI using menu commands or using command buttons on the Control panel, text
and/or graphics will be embedded and recorded as they are shown on the image.
(1) Text and graphics written using Data Entry function will be recorded just as they are shown
on the image.
(2) Auto Data Display on the bottom of the image will be recorded when the Embed into Image
checkbox on Record tab of Setup dialog window is checked. If the checkbox is not checked,
Auto Data Display text is not recorded even if it is shown on the image.
The control is provided because the Auto Data Display may be used simply for indication
purposes.
NOTICE: The check box shall be checked to record
Auto Data Display with images.
Fig. 3.6-11
Settings Window Recording Tab
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3.6
Saving and Recording Images
3.6.7.2
Captured Image Recording Using Buttons on the Captured Image Window
When images are captured, text and graphics shown on the image at the moment of starting
capture are memorized as the data for the captured image. The memorized data will be
recorded when the image is recorded using command buttons on the Captured Image window.
(1) To change entry data of the latest captured image, edit or add data and then click the
Update button on the Data Entry window. The memorized data for the captured image is
then replaced with the new data.
It is not possible if the image has been refreshed by RUN operation.
(2) During a capture process, if data input is performed either to add or change data while the
image is being displayed (with a CAP number displayed in yellow on the upper left edge of
the image), and then if the image is saved (Direct Save) from either the menu or the Control
Panel, photographed, printed, or sent to a PC, the data that is added will be added as data
on the captured image.
(3) When the Embed into Image checkbox on Record tab of Setup dialog window is checked,
Auto Data Display on the bottom of the image is memorized for the captured image at the
moment of starting capture. The memorized data will be recorded when the image is
recorded using command buttons on the Captured Image window. If the checkbox is not
checked, Auto Data Display text is not memorized even if it is shown on the image.
NOTICE:
If this check is turned off, the
data will not be embedded in
the recorded image even
when Auto Data is indicated
on the image.
Fig. 3.6-12
Settings Window Recording Tab
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3.6.7
3.6.7.3
Record Captured Images without Embedding Text or Graphic Data
When the Embed into Image checkbox on the Captured Image window is not checked,
captured images are recorded without embedding text or graphic data even if the data has been
memorized at the moment of capture. This selection can be set at just before carrying out
recording.
NOTICE: If the checkbox is not checked,
only the images are recorded.
Fig. 3.6-13
3.7
Captured Image List Window
Using SEM Data Manager
SEM Data Manager is an image-filing program with an easy-to-operate database function.
A database table is established for each user, and acquired SEM images are registered to this
table automatically when saving. The SEM Data Manager lists image files, finds images
following a Select query, displays images, displays and enables image information editing, and
allows image processing.
Refer to <3.11 Using SEM Data Manager>.
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3.8
Shutting Down
3.8
Shutting Down
3.8.1
Turning High Voltage Off
(1) Close opening dialog windows.
Save data if necessary.
on the Control Panel to turn off the
(2) Click the Acceleration Voltage OFF button
acceleration voltage.
3.8.2
Setting the Stage at the Specimen Exchange Position
(1) Type I (manual stage)
Align the axial scale with the specimen change position.
Specimen exchange position
X: 30mm
R: arbitrary
Y: 20mm
T: 0°
Z: 35mm
(2) Type II (motor drive stage)
On the right edge of the Control Panel, click either the Change Z65 [HOME Z65] button or
the Change Z10 [HOME Z10] button. Wait until the display window to the left of the button
lights up in blue.
Fig. 3.8-1
Moving to the Specimen Exchange Position
Specimen exchange position
X: 60 mm
Y: 25 mm
R: 0°
Z: 10 mm (Change Z10, HOME Z10)
Z: 65 mm (Change Z65, HOME Z65)
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T: 0°
3.8.3
3.8.3
Withdrawing the Specimen
The following procedures can be employed to withdraw a specimen from the specimen chamber:
(1) On the EVAC panel located on the front side of the main unit, press the AIR button.
Alternatively, click the AIR button located in the upper right section of the Control Panel.
This introduces air into the specimen chamber. Wait approximately 100 seconds until the
specimen chamber is completely at the atmospheric pressure.
EVAC panel
Fig. 3.8-2
Control Panel
AIR Button (letting air into the specimen chamber)
(2) Grasp the handle on the front side of the specimen stage. Pull the specimen stage toward
you, and take out the specimen. When removing the specimen, be sure to put on clean
gloves; do not use a bare hand.
Fig. 3.8-3
Pulling Out the Stage
Fig. 3.8-4
Removing the Specimen
IMPORTANT: Do not touch the operation parts such as gears and driving screws and note that
clothes are never placed when you bring the hand close to the movement
mechanism in the specimen stage by the specimen exchange etc.
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3.8
Shutting Down
(3) If the vacuum mode is set to Low Vacuum (VP-SEM) on the Operation Panel, change it to
High Vacuum (SEM).
(4) Grasp the handle. Insert the specimen stage into the specimen chamber. On the EVAC
panel on the front side of the main unit, press the EVAC button. Alternatively, click EVAC
located in the upper right section of the Control Panel. The evacuation of the specimen
chamber commences.
If the specimen chamber had already been in a fairly good vacuum condition, a high vacuum
state can be attained in approximately 2 minutes.
EVAC panel
Fig. 3.8-5
Control Panel
Evacuating the Specimen Chamber
Caution: When inserting the specimen stage into the specimen chamber, be careful that
your fingers are not caught between the stage and the specimen chamber.
3.8.4
Closing Windows and Shutting off the Display Power
Close Windows.
Turn off the power.
(1) On the S-3400N Main Window, either click the Close button
menu. A termination confirmation message will appear:
Fig. 3.8-6
or select Exit from the File
Termination Confirmation Message
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3.8.5
If the processing is not completely finished, the following message appears. If this happens,
take appropriate action:
• Some of the captured images still need to be saved:
[There are unsaved images in the capture area. Do you want to save them?]
Click "Yes" to save. An Image Save dialog appears.
• The acceleration voltage is not shut off:
[OK to turn off HV?]
Click OK to exit.
(2) On the Windows task bar, click the Start button and select Shut Down.
(3) In the Shut Down dialog window, select Shut down the computer and click Yes.
(4) Wait until the message "It's now safe to turn off your computer" is displayed, or the power of
PC is shut down automatically.
(5) Turn off the key switch located on the front side of the main unit to turn off the power.
Caution: Wait until the power of PC is shut down automatically, or the message "It's now
safe to turn off your computer" is displayed. If the key switch is turned off before
the above condition, the power of PC will be shut off while the PC is running and
it may cause damage to its data or hard disk.
3.8.5
Termination Confirmation Items
When the key switch is turned off, the EVAC/AIR buttons on the EVAC Panel will blink
alternately. The power is shut off after the termination procedure for the evacuation system is
completed. Normally it takes approximately 10 seconds after the key switch is turned off and
before the power is shut off. If a problem occurs during the termination procedure for the
evacuation system, the power may fail to shut off after 10 seconds, in which case the main
breaker in the back of the main unit should be turned off. Also, the breaker in the back of the
main unit should be turned off if the system is to be brought down completely.
To restart the system, turn on the main breaker, and turn the key switch to the START position.
See <4.5 What to Do in the Event of a Power Outage or the System must be Shutdown
Completely for a Long Time>.
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3.9
Other Functions
3.9
Other Functions
In addition to the basic operations described above, the system provides various functions, which
should be employed depending on the particular application to be accomplished.
3.9.1
Screen Mode
Screen modes, Full, Dual or Small are selectable with SCREEN MODE window of the operation
panel.
Fig. 3.9-1
SCREEN MODE Window
(1) Full screen mode
A scanning image is displayed with full desktop size. Image resolution is 1280 x 960 pixels.
It is recommended to use this mode for normal operation.
Fig. 3.9-2
Full Screen Mode
Large image provides easy to operate condition. Magnification of displayed image is about
3 times the indication that is calculated for 4 x 5 inch photograph size.
Scan speed is somewhat slower compared with Small screen mode. If scanning image is
noisy or you need faster refreshing rate, try using Small screen mode.
When TV scan is selected or in alignment mode, image size is reduced to half to obtain true
TV rate scanning speed.
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3.9.1
(2) Small screen mode
Scanning image size is reduced to half. Image resolution is 640 × 480 pixels.
Faster scanning rate compared with Full screen mode may result in better image quality in
some cases. Magnification of displayed image is about 1.5 times the indication.
Fig. 3.9-3
Small Display Mode
(3) Dual screen mode
Two 640 × 480 pixel images are shown simultaneously. These two images can be live or
frozen independently, and can display different signals or the same signal. In this mode,
color mixing is available, while analysis modes (line, spot and area analysis) and split screen
modes are disengaged.
Fig. 3.9-4
Dual Mode
The Dual mode in some cases behaves differently from the Small mode:
• Signal selection
You can observe two images with different signals on two image screens simultaneously.
Use the Signal Select block of the operation panel.
Fig. 3.9-5
Signal Selection Control
Left side selection box is for left side (A screen) image, and right side box for right side
(B screen) image.
3 - 117
3.9
Other Functions
• Run/Freeze operation
buttons located in the right and left frames at the top of the screen,
Using the
Panels A and B can independently be toggled Run/Freeze. To toggle Run/Freeze both
for Panels A and B at the same time, use the
button at the center.
• Capturing images
button located at the top
To capture an image on one of the two screens, click the
of the screen to be captured. To capture the images on both Panels A and B, click the
button located in the center.
• Saving and recording an image
For operations such as direct photo, memory photo, direct save, quick save, direct print,
layout print, and PC transfer can be selected by using the buttons located at the top of
the screen. The buttons that are displayed are identical to those displayed in the image
recording section of the Control Panel.
• Capture resolution
Capture resolutions 2560 × 1920 and 5120 × 3840 are not available.
• The brightness and contrast knob assignments on the ABCC and Operation Panel
operate on the image signal that is specified by the right or left selection button for image
adjustment.
Fig. 3.9-6
Image Adj. Button
• If the scanning speed is RED (1/2/3), the focusing monitor, the BC monitor mode, the
alignment mode, or the filament image mode is on, an image is displayed only on the
right or left screen. On which screen the image will be displayed depends on the settings
that are in effect on the Image Adj. right/left button shown above.
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3.9.2
3.9.2
Split Screen and Dual Mag Mode
In the split screen/dual mag mode, the screen can be split two ways to display dissimilar signal
images, such as a secondary electron image and a backscattered electron image on the right
and left screens (split screen). It is also possible to enlarge a part of the left screen to display it
on the right screen (dual mag). This feature can be used in both Full and Small modes.
Selecting Split DM Mode from Scan menu brings up the Split/Dual Mag controller. Selecting
the specific magnification rate under which the image is to be observed split the screen into right
and left sections, and displays images enlarged 1x, 4x, and 8x on the right side.
Fig. 3.9-7
Split/Dual Mag Controller
(1) Split screen mode
Clicking the x1 button displays dissimilar-signal images at the same magnification on the
right and left split screens. By selecting input signals under this condition, it is possible to
display images based on different signals on the right and left.
Input signals can be selected and set by bringing up a Setup field using the Detector.
Fig. 3.9-8
Enlarged Display of Detector Settings
(2) Dual mag mode
Clicking either the x4 or x8 button causes a part of the left screen to be enlarged 4x or 8x
and displayed on the right screen. The area to be enlarged is displayed in a box in the left
image. By dragging the box, it is possible to specify the specific area to be enlarged.
3 - 119
3.9
Other Functions
3.9.3
Signal Selection and Color Mixing
The S-3400N has three external signal channels for optional signal detectors and one X-ray
signal input, in addition to the standard secondary electron detector. When these detectors are
installed, you can select a signal from among these detectors. Using Dual screen mode or
Split screen mode, you can display two images with two different signals simultaneously.
Also color mixing, which combines two signals with different colors, is available.
To select a signal;
(1) Signal selection in Full and Small display modes
In the DETECTOR block of the Operation Panel, select the signal to be observed.
Fig. 3.9-9
DETECTOR Window
The signal for line profile in the Line Analysis mode is selected independently of the signal
for image. Use the LINE PROFILE SIGNAL block in the Setup dialog window - Image tab.
3 - 120
3.9.3
(2) Signal selection in Dual mode
Fig. 3.9-10
Enhanced Control Panel for Dual Mode
In the Dual mode, use the left box to select Panel A (left image), and the right box to select
Panel B (right image) signals.
Brightness and contrast adjustments using the mouse on the screen work on the image
signals that are selected on the signal selection fields in Panels A and B.
(3) Signal Mixing (available in the Dual mode)
This feature allows you to mix the signals assigned to right and left before displaying them.
The Signal Mixing feature is available only in the Dual mode.
First, turn on the Dual mode, and observe images by assigning different signals to the right
and left panels.
In the Image Adj. box, place a checkmark on the Signal Mixing feature, which displays an
image produced by mixing the selected two signals on Panel B (the right image).
The example below displays an SE (secondary electrons) image on Panel A (left), and a
mixed image of SE (secondary electrons) and BSE (backscattered electrons) on Panel B
(right).
Fig. 3.9-11
Signal Mixing Control
• Contrast and Brightness adjustment by mouse operation on scanning image is applied to
original signals, not to mixed signal.
• To turn off the Signal Mixing mode, simply remove the checkmark.
3 - 121
3.9
Other Functions
(4) Color Mixing mode (available in Dual mode)
When different signals are assigned to the right and left screens, this feature assigns
different colors (R/G/B) to the two signals to display a mixed color image. The image on the
right will be in color.
First, turn on the Dual mode, and then assign different signals to the right and left before
observing images.
In the Color Mixing block located at the top of the image, place a checkmark on the Color
Mixing box. Click the color to be assigned to Panel A or B, and assign colors to the
various signals. If a given color is not to be assigned, click Off on it. In the example below,
colors are mixed between red signal assigned to Panel A and yellow signal (resulting from a
mix of red and green) assigned to Panel B, and the results are displayed on Panel B.
Fig. 3.9-12
Color Mixing Control
Removing the checkmark from the Color Mixing box resets the display to ordinary monochrome
display. Although mixed color images cannot be photographed, they can be saved. To save a
color image, capture it, and then either use the Save option on the Capture Image list window,
click the Save button on the Control Panel, or use the Direct Save option on the File menu.
NOTICE: Both A and B screen images are refreshed by capturing even when one of the
screens was frozen before starting capture.
3 - 122
3.9.4
3.9.4
X-ray Analysis Mode
Scanning modes for analysis is available in the Full and Small screen modes.
Use the SCAN MODE block in the operation panel.
Fig. 3.9-13
(1) Normal mode
Normal image observation mode.
SCAN MODE Window
Click this to return from analysis modes.
(2) Line Analysis mode
Displays a line profile of the signal intensity as a horizontal line in the observed image.
The Line Analysis button is used for two scanning modes as follows.
(a) Position Set mode for Line Analysis
Upon the first click of the button in other scanning modes or in Line Analysis mode, a
horizontal dotted line cursor is shown on the image. This line cursor corresponds to a
position of the scanned line in Line Analysis mode. To position the line cursor, locate
the mouse icon near to the line. When the mouse cursor is changed to an intersecting
, drag the line cursor with the mouse while holding down the left button.
arrow mark
(b) Line Analysis mode
When the Line Analysis button is clicked in Position Set mode, the scanning image is
frozen and a waveform, which is a profile of the signal intensity of the line, is shown on
the image. You can move the line cursor in this mode with the same operation as
above, and you can change scanning speeds.
Use Scanning Speed buttons to select line scan speed. TV or Fast scans with fast
speed, useful for SE or BSE signal profiling. Slow1 to Slow5 scans with slow speed,
used for X-ray intensity profiling.
When the Back Ground in the LINE PROFILE SIGNAL block on the Setup dialog
window - Image tab is checked, the line profile is overlaid on the image. When it is not
checked, only the line profile is shown on the screen.
3 - 123
3.9
Other Functions
Fig. 3.9-14
LINE PROFILE SIGNAL Window
The Run/Freeze button changes run and stop alternately.
In the Freeze state, the line profile of an image is displayed clearly.
Recommended procedure for taking a photograph is:
1)
Observe an image in Position Set mode at Slow2 or slower scanning speeds.
Click the Line Analysis button when the scanning raster reaches the bottom of the
screen.
2)
Set the line cursor at an analyzing position. Adjust the baseline (in case of SE or
BSE, adjust brightness) and the height (in case of SE or BSE, adjust contrast and in
case of X-ray, adjust the count-rate meter range) of the profile. Then stop the
scanning.
The signal for line profile can be selected independent of the signal for image.
For example, you can observe or take a image of an X-ray intensity line profile on the
secondary electron image. To select a signal for the line profile, use the LINE
PROFILE SIGNAL block on the Setup dialog window - Image tab.
Saving an image under a Line Profile condition Freeze state causes an image
containing a profile to be saved. Line profiles cannot be photographed.
(3) Spot Analysis mode
Stops the scanning and places the electron beam at a specified point on the image.
This is used for X-ray analysis of a point on the specimen.
The Spot Analysis button is used for two scanning modes as follows.
(a) Position Set mode for Spot Analysis
Upon the first click of the button in other scanning modes or in Spot Analysis mode, a
cross-hair cursor is overlaid on the image. The cross point of the cursor corresponds
to a position where the electron beam is positioned in Spot Analysis mode.
To select a position of the cursor, locate the mouse icon near the cross point.
, drag the cursor
When the mouse cursor is changed to an intersecting arrow mark
with the mouse while holding down the left button.
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3.9.4
(b) Spot Analysis mode
When the Spot Analysis button is clicked in Position Set mode, the scanning image is
frozen and the electron beam is positioned at the cross point of the cursor.
You can make analysis of this point.
The cursor can also be moved in this mode with the same operation as above.
The Run/Stop button and Scanning Speed buttons are disabled in this mode.
Images containing a cross cursor cannot be photographed.
(4) Area Analysis mode
Scans the electron beam in a selected frame in the image. This is used for X-ray analysis
of a specified area on the specimen.
The Area Analysis button is used for two scanning modes as follows.
(a) Position Set mode for Area Analysis
Upon the first click of the button in other scanning modes or in Area Analysis mode, a
box cursor with dotted line is overlaid on the image. The box cursor corresponds to an
area where the electron beam is scanned in Area Analysis mode.
To set a position and size of the cursor, locate the mouse icon near the line, corner or
or (change the size in
inside of the box. When the mouse cursor is changed to
or (change the size in vertical direction),
(change the size
horizontal direction),
(move the position), drag the cursor with the mouse while
in both directions), or
holding down the left button.
(b) Area Analysis mode
When the Area Analysis button is clicked in Position Set mode, the scanning image is
frozen and the electron beam is scanned in the box area (the cursor is changed to a
straight-line box). The cursor can be moved with the same operation as above.
The Run/Stop button and Scanning Speed buttons are disabled in this mode.
Images containing a box cursor cannot be photographed.
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3.9
Other Functions
3.9.5
Signal Processing
Processing of the image signal is available on a live image.
For SE signal, digital processing, spatial filtering, gamma control and inversion can be applied.
In addition, analog signal processing is available for an optional detector signal.
(1) Digital signal processing
Use SIGNAL PROCESSING block on the operation panel to apply digital signal processing.
Fig. 3.9-15
SIGNAL PROCESSING Window
Click ↓ button and select a processing on the pull-down list that appears.
Fig. 3.9-16
Signal Processing List
Some of the processing includes depth of processing.
Fig. 3.9-17
Select with the selection box.
Signal Processing Depth List
The following processing is available.
(a) Smooth (1/2)
Reduces snow noise. It is effective especially at high magnification, where originally
image itself has defocusing limited by spatial resolution. In this case, noise can be
reduced without image defocusing.
For lower magnification images, the processing may cause loss of sharpness.
(b) Sharpen (1/2)
Increases image sharpness.
Snow noise may be intensified if the image includes noise.
3 - 126
3.9.5
(c) Edge Enhance (1/2)
Similar but stronger effect than the above Sharpen.
(d) Invert
Inverse contrast.
(e) Gamma (-5 to +5)
Plus value of Gamma suppresses white contrast and enhances dark part.
Minus value increases contrast.
NOTICE: 1. The digital processing is applied to saved images and pictures taken using
Memory photographing. It is not applied to pictures taken with Direct
photographing.
2. When you set or change the processing, scanning will be reset to the top of the
frame.
(2) Analog signal processing for optional detector signal
To use analog signal processing, click the Option Signal button in the SIGNAL
PROCESSING block on the Operation panel. The Signal Processing dialog window will
open.
Fig. 3.9-18
Opt. Signal Processing Menu
(a) Gamma:
Gamma correction suppresses excessive contrast, maintaining the contrast of the
average brightness of the image.
(b) Differential:
Differential 1 and 2 are high-pass filters for the image signal. When applied, the image
is differentiated in a horizontal direction and details of the image are emphasized, while
broad shades are suppressed. Results vary with scanning speeds because it applies
time domain differentiation.
(c) Invert:
Inverse contrast.
3 - 127
3.9
Other Functions
3.9.6
Operating Condition Memory
The Operating Condition Memory is provided for saving and loading conditions of the electron
optical column. If the column is aligned and a specimen is observed at a particular accelerating
voltage, the same condition can be reproduced by saving and loading the condition memory.
(1) Saving Present Operating Conditions
Use the following steps to save the present operating
conditions.
(a) Open the Setup dialog window
Select Condition Save from the Operate menu, or
click the Setup button in the tool button area of the
Operation panel and select Op.Cond tab.
Select Save Present Condition on it.
(b) Refresh present condition data
Condition items are memorized when the tab is
brought up. If column condition is changed while the
tab is opened, the Update button memorizes the
present condition.
NOTICE: The memorized condition data remains until the
Update button is clicked, even when loading
previously stored condition. Update the present
condition by the Update button before saving.
(c) Capture an image as a sample picture
The Capture button captures the present scanning
image. It can be memorized together with condition data.
Fig. 3.9-19
(d) Saving condition data
Click the Save button. The Condition Save dialog window will open.
Fig. 3.9-20
Condition Save Menu
Input a comment; specify a Condition Name and then click Save button.
3 - 128
Op.Cond Tab
(Save)
3.9.6
(2) Loading a Set of Operating Conditions
Use the following steps to load a set of operating conditions.
(a) Open the Setup dialog window
Select Condition Load from the Operate menu, or
click the Setup button in the tool button section of the
Operation panel and select Op.Cond tab.
Select Load Memorized Condition on it.
(b) Select a condition name
Memorized condition names are listed. Select a name
by clicking it.
Use sample picture and comment for reference of
selection.
(c) Select items to be loaded
Check items ( Vacc to Contrast) you wish to load and
reproduce. Stage position is effective only for Type 2
instrument.
(d) Reproduce column condition
Click the Load button. Memorized data are retrieved
and the electron optical column is set.
If the Stigma/Alignment is included, a message will
Fig. 3.9-21 Op.Cond
appear for confirmation. These are possibly changed if
Window (call)
the loaded condition was saved long before.
In such cases, it may be better not to reproduce Stigma and Alignment data. The
recent data is memorized automatically y abnother condition memory function
(the most recent condition for each of Vacc - Condenser lens setting is memorized and
reproduced automatically).
(3) Deleting an operating condition
Select a condition name in the same manner as above, and click the Delete button.
3.9.7
Pseudo Color Display
Use function of SEM Data Manager for pseudo color imaging.
See 3.11.3.7 Contrast Conversion.
3 - 129
3.9
Other Functions
3.9.8
Data Entry Function
Use the DATA ENTRY window on the Operation panel for drawing graphics and texts on the
scanning image display. For saved image, use the same function provided in the SEM Data
Manager.
Fig. 3.9-22
Data Entry Window
(1) Function of tool buttons
(a)
Stop data entry
Stops data entry. Tool buttons are disabled.
Drawn data remains on image.
(b)
Edit text
Edits already written texts.
mark. Click the text to be
Selecting the Edit button changes mouse pointer to
edited. The text is changed to black background form. You can edit the text.
The Enter key terminates editing. The text is shown in red color and you can move its
position by dragging it with mouse.
(c)
Text input
Writes texts on the image.
After selecting the button, click on the image. The text input area of black stripe is
shown on the image. Input text using keyboard and terminate with Enter key.
The text is shown in red color and you can move its position by dragging it with mouse.
If you enter a text in the text box and then click on the image, the text is placed
automatically.
10 recently used texts are memorized and can be selected with the ↓
button. Use the function when you repeat writing the same or similar texts.
To set the font and size, use DATA ENTRY/MEASUREMENT window in the Optional
Setup dialog window - General tab.
(d)
Line
Draws lines on the image. Click this button, and press the left button of the mouse to
create the starting point of the line on the image. Move the mouse to an end position
and then release the button of the mouse. While this button is depressed, you can
repeat a line drawing.
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3.9.8
(e)
Arrow
Draws single-head arrow marks on the image.
(f)
Double head arrow
Draws double-head arrow marks on the image.
(g)
Inner dimension mark
Draws inner dimension arrow marks on the image.
(h)
Outer dimension mark
Draws outer dimension marks on the image.
(i)
Inner dimension mark with measurement
Draws inner dimension marks with measurement on the image.
(j)
Outer dimension mark with measurement
Draws outer dimension marks with measurement on the image.
(k)
Circle
Draws circles or oval shapes on the image. Click this button and press the left button
of the mouse to create a starting point on the image. Draw a shape by moving the
mouse and then releasing the mouse button. While this button is depressed, you can
repeat drawing of a shape.
(l)
Rectangle
Draws rectangles on the image. Click this button and press the left button of the
mouse to create a starting point on the image. Draw a shape by moving the mouse
and then releasing the mouse button. While this button is depressed, you can repeat
drawing of a shape.
(m) Shadow check box
When the Shadow box is checked, texts and graphics are drawn with shadow.
(n)
Text box
If you enter a text in the text box and then click on the image for text, the text in the text
box is placed automatically. 10 recently used texts are memorized and can be
selected with the ↓ button.
Use the function when you repeat writing the same or
similar texts.
(o)
Show check box
Shows (checked) or hides (unchecked) text and graphics.
(p) Update button
The entry data is memorized at the moment of image capture for the image.
However, it is possible to edit or add entry data while the captured image remains on the
image screen. To exchange the previously memorized data with new edited data, click
the Update button. It is possible only before the image is refreshed by RUN operation.
3 - 131
3.9
Other Functions
(q)
Select buttons
or
button selects graphics or text on the image in order. A selected graphics is
indicated with gray color and a surrounding dotted line box. A selected text is indicated
with gray color and black background. They can be moved and
re-positioned by mouse dragging. A selected text can be edited by double-clicking on
it. The text line is prolonged and editing becomes possible.
All button selects all graphics and text.
(r) Clear button
Clears selected graphics or text.
(2) Entry data and show/hide drawn data
When tool buttons except for Stop data entry are pressed, a green dotted rectangle will be
shown on the image. It shows area for data entry. The selected shape or text can be
drawn.
The Stop data entry button disables data entry and the area rectangle is cleared.
To hide drawn data, uncheck Show box.
(3) Editing texts
To edit already written texts, select the Edit text
tool.
mark. Click the text to be edited.
Selecting the button changes mouse pointer to
The text is changed to black background form. You can edit the text. The Enter key
terminates editing. The text is shown in red color and you can move its position by
dragging it with mouse.
(4) Moving position or deleting drawn data
or
button selects graphics or text on the image in order. A selected graphics is
indicated with gray color and a surrounding dotted line box. A selected text is indicated with
gray color and black background. They can be moved and re-positioned by mouse
dragging. A selected text can be edited by double-clicking on it. The text line is prolonged
and editing becomes possible.
The Clear button erases the selected data. To erase all, select all data by clicking All
button and then click the Clear button.
3 - 132
3.9.8
(5) Recording entry data with images
According to entry data, recording refer to < 3.6.7
Recording Data Display with Images>.
NOTICE: The Auto Data Display mode saves the data displayed on the screen together with
the image itself if the [Embed into Image] checkbox is turned ON in the Record tab of
the Setup window. If the checkbox is turned OFF, the displayed data, even when
appearing on the screen, will not be saved as embedded data.
If the Input Data and Auto Data options are on at the time an image is captured, only
the image can be saved by unchecking the Embed into Image checkbox on the
Captured Image window.
If the data being displayed is to be saved together with the image, turn ON the
checkbox.
NOTICE: If an image is displayed with dimensions, and if the magnification factor is changed
after the image is input, the dimensions are recalculated and re-displayed at the
following timing:
• When the image is frozen
• When Direct Photo operation is performed
• When the image being scanned is fixed, such as executing the Capture function
NOTICE: Dimension marks with measurement calculate dimension using present magnification
value. The dimension value will be re-calculated when image magnification is
changed.
In Dual Screen mode, it is possible to display two different magnification images.
Note that in such a case, dimension value is correct for only one of two images.
An abnormal text character display where text is shown doubly may occur. Although
this will be very rare, carry out the following operation in such case. This will recover
the normal display.
3 - 133
3.9
Other Functions
3.9.9
Raster Rotation, Dynamic Focus and Tilt Compensation
(1) Raster Rotation
Scanning of electron beam can be rotated within a range of -200° to +200°, using the slider.
This allows observation of an image at the best orientation. Use the R. ROTATION window
on the Operation panel.
Fig. 3.9-23
R.ROTATION Window
To operate the Raster Rotation, check the R. Rotation box.
To select a rotation angle, move the slider, click the arrow buttons, or input an angle into the
angle indication box.
Also mouse operation on image can be used.
For operating procedures, see [3.5.7.7 Mouse Operation of Stage on the Scanning Image
(12) Rotation adjust tool].
NOTICE: Image rotation caused by the objective lens magnetic field is compensated
automatically even when the above rotation angle is set at 0 or the R. Rotation box is
not checked. The scanning direction is kept to coincide with the direction of stage
movement by this function. If it is necessary to disable the automatic compensation,
set the WD-Rotation Link to off in the Optional Setup dialog window - General tab.
For normal operation, it is strongly recommended to enable the automatic
compensation function.
(2) Tilt compensation (Dynamic focus and Tilt magnification compensation)
When a specimen is tilted at a large angle, the field of view that can be focused is small
(particularly at low magnifications and at a short WD). Dynamic Focus function allows you
to focus the beam for the entire field of view. Dynamic Focus scans the focal length linked
with the scanning positions.
Also magnification along the tilting direction is lower than that in a non-tilting direction.
As a result, the image appears to be contracted in the tilting direction. The image can be
corrected so the magnification is accurate in all directions by using Tilt (magnification)
compensation.
Use the TILT COMPENSATION block on the operation panel.
3 - 134
3.9.9
Fig. 3.9-24
TILT COMPENSATION Window
Use the following steps to focus the entire field.
(a) Set the Raster Rotation angle at 0. In this condition, direction of the scanning beam
coincides with the specimen tilting direction.
(b) Check the Dynamic Focus box and focus the image so that the center of the image is
focused. Adjust the Dynamic Focus slider so the whole image is in focus.
(c) Alternately, use the Reduce 2 scanning speed. After focusing the center part of the
image, set the scanning speed at Reduce 2 and move the scanning area to the top of
the screen. Adjust Dynamic Focus slider for the best focus.
Take the following steps to use Tilt (magnification) compensation.
(d) Check the Tilt Compensation box, and set the angle to the specimen tilting angle
(move the slider or input an angle into the angle indication box).
NOTICE: If magnification, WD, or accelerating voltage is changed, the Dynamic Focus slider
needs to be re-adjusted.
Tilting the specimen extensively can cause distortion in the observed image at a low
magnification or low accelerating voltage as the electron beam undergoes a rotation in
the objective lens magnetic field.
At SLOW1 or faster scanning speed, unexpected defocusing may appear in the image.
It is caused by a slow response of the magnetic field of the objective lens.
Tilt Compensation may result in an unnatural image when a specimen has threedimensional structures.
3 - 135
3.9
Other Functions
3.9.10
Printing Images Using Report Generation Function
The scanning image or saved image can be printed using a Windows-supported printer.
This function allows you to lay out and print one or more images on paper with a specified size.
(1) Report Generation function
The Report Generation window will open by selecting Layout Print from the File menu or
on the Control panel or on the Captured Image window.
clicking the Print button
When the Report Generation window is brought up by the Layout Print menu or by the Print
button on the Control panel, the scanning image is placed first.
If started by the Print button in the Captured Image window, images selected on the window
(these are shown with yellow border) are placed.
And if above commands are executed when the Report Generation is already open, the
image(s) mentioned above are added on the sheet.
Fig. 3.9-25
Report Generation Window
(2) Selection of printer and setting sheet size
Use the Printer area on the Setting tab to select a printer to be used and to select sheet
direction.
Use Windows function for printer property setting and sheet size selection.
(3) Setting image size on the sheet
Click the Image Size Setting button in the Setting tab.
window will open.
3 - 136
The Image size setting dialog
3.9.10
Fig. 3.9-26
Image Setting Menu
• Format
This allows you to specify whether the file name of the image to be printed should be
printed independently in the upper left portion of the image or it should be printed as part
of the image attribute section.
• Size - Photo Size (127 mm x 96.3 mm)
When an image is added, the same image size as the Polaroid film is used (at this size,
the magnification rate for the printed image will be equal to the magnification rate of the
displayed image).
• Size - User
By selecting this option and entering a numerical value (in mm) in the box on the left side,
you can specify an image size for the printed results. (This setting applies to the image
size to be registered in the layout.)
NOTICE: The size setting is not effective for already brought up images. To change the size of
these, right-click the mouse on the image and select Set default size in the opening
popup menu.
3 - 137
3.9
Other Functions
Images can be added from the Add tab.
Fig. 3.9-27
Add Tab
(4) Adjusting layout and image size
To adjust image size on the sheet, select an image by clicking it and drag the lower-right
corner.
To move an image, drag it using the mouse.
The Arrange button
on the toolbar arranges images automatically.
When adjusting the layout manually, use either the Grid or Fix to Grid function to bring up
grid lines so that the images being adjusted can be aligned to the grid lines and made to line
up along them.
Fig. 3.9-28
Grid Control
Size can be changed when the Edit Lock button located in the lower right part of the menu is
(unlocked); however, when it is
(locked), comments cannot be moved or resized
by using the mouse.
(unlocked).
To move a comment, click the Lock button to make it appear
3 - 138
3.9.10
(5) Text information
• Header and Footer
On the Setting tab, enter the header and footer texts.
when Header and Footer boxes are checked.
Fig. 3.9-29
Both are printed on the sheet
Header/Footer Control
• File name and image information
File Name, Micron Marker and Image Information are printed around the image when
check boxes for each on the Display tab are checked.
To change these fonts, click the Set button for Font located under the Control to bring up
a Font setup window.
Fig. 3.9-30
Display Window
• Comment
Press the A button on the toolbar and click on the sheet.
The Comment input dialog window will open. Input a comment.
To change comment fonts or size, click the Font button in the Comment area to bring up
a Font setup window.
Fig. 3.9-31
Comment Window
3 - 139
3.9
Other Functions
The comment placed on the sheet can be moved by mouse dragging. To edit a
comment, double-click it. The comment input dialog window will open and you can edit
the comment on it.
To delete a comment, highlight the comment with the mouse, and then press the Delete
button on the keyboard.
(6) Contrast adjustment
When you click an image on the sheet, the image will be brought to preview area of the B/C
Adjustment block of the Tool tab.
Adjust brightness and contrast using scrollbars. The Auto button will make auto
adjustment.
Fig. 3.9-32
B/C Adjustment Window
The result of adjustment is applied to the image on the sheet by clicking OK button.
(7) Print
Set number of print on the Setting tab and then click Print button.
The layout sheet will be printed.
Fig. 3.9-33
Batch Print Window
3 - 140
3.9.10
(8) Additional functions
These functions allow you to perform image contrast compensation on the layout, fetching
images that are registered in SEM Data Manager, and saving and reading paper formats.
• Batch Print
Fig. 3.9-34
Batch Print Window
By clicking the Add button, you can specify an image file and add it to the list.
By clicking Print, you can print the image that was added to the list in the layout.
These functions can be used to print different images in the same layout.
• Index Print
This function allows you to print a list of images managed by user name selected under
User (a user name created for image management under SEM Data Manager), in a
reduced format.
Fig. 3.9-35
Index Print Window
3 - 141
3.9
Other Functions
• Layout template
The Layout Print application provides predefined report templates. Clicking the
button to the right of the New button brings up the window shown above, from which a
desired layout can be selected:
Fig. 3.9-36
Layout Template Menu
• Open/Save
A layout that has been created can be opened and saved by using the button shown in
the above figure on the Toolbar.
When saved, a layout can be output in a report file as well as in an HTML format
document.
Fig. 3.9-37
Open/Save Button
3 - 142
3.9.11
3.9.11
Copy Image
The Copy Image command copies the scanning image to the Windows clipboard in a size of
1280 × 960 pixels (Full screen) or 640 × 480 pixels (Small or Dual screen). The copied image
can be used in any application software such as a word processor or image processor by pasting
it from Windows clipboard.
To copy an image to the Windows clipboard, select the Copy Image command from the Edit
menu or click the Copy Image button
3.9.12
on the tool button area on the Operation panel.
Copy Image Information Text
The Copy Attribute command copies information in the auto data display to the Windows
clipboard as a text file. The copied text can be used in any application software such as a word
processor or image processor by pasting it from Windows clipboard.
To copy image attributes to the Windows clipboard, select the Copy Attribute command from the
Edit menu or click the Copy Text button
on the tool button area on the Operation panel.
3 - 143
3.9
Other Functions
3.9.13
Oblique Image
An oblique (or bird's-eye-view) image is formed from a scanning image.
To open the Oblique window, select the Oblique command from the Analysis.
Fig. 3.9-38
Oblique Menu
(1) Setting properties
Check the Image box to show reference image together with oblique image.
Bird's eye area specifies viewing angle and tilting angle. If it is not checked, just a flat
image is formed.
X Resolution and Y Line specify number of horizontal pixels and vertical lines. Too much
Y Line may cause overlapping of lines and result in a complicated image. Select a proper
number.
Gain sets height of modification.
Brightness Modulation modulates brightness of each line with signal intensity. If not
checked, lines are drawn with a fixed brightness.
(2) Drawing and recording oblique image
Go button starts drawing image. Photo button is for photographing (needs photo monitor
option). Click Save to save the oblique image.
3 - 144
3.9.14
3.9.14
Optional Setting
Operation environments are set on the Optional Setup dialog
window.
To open the Optional Setup dialog window, select the Optional
Setup command from the Option menu or click the Opt Setup
on the tool button area of the Operation panel.
button
The dialog window has 6 tabs.
Each has functions as follows.
NOTICE: Setting on each tab is applied when the OK button is
clicked.
(1) General tab: general setting
(a) RASTER ROTATION area
WD-Rotation Link selection specifies if the image
rotation caused by the objective lens magnetic field will
be compensated automatically or not.
For normal operation, it is strongly recommended to
enable the automatic compensation function.
(b) MICRON MARKER area
When Sizable is selected, the length of the micron
marker will be adjusted so the length indication does
Fig. 3.9-39
not have a fraction.
If Fixed is selected, the length is fixed at 30 mm on 4 ×
5 inch photograph. In this case, the length value
indication some times has a fraction, especially by coarse focusing.
General Tab
(c) Magnification fraction adjustment
Put check mark to this checkbox to enable the auto magnification fraction adjustment.
Magnification value will have fraction by focusing operation.
The auto fraction adjustment calculates and set nearest even magnification value when
starting image capturing or direct photographing.
(d) DATA ENTRY/MEASUREMENT
This box allows you to specify the character font to be used in the Data Entry and
Measurement functions.
Specify the font in Font Name, and the character size in Font Size.
NOTICE: In Font Name, fonts that have an @ symbol at the beginning represent horizontally
oriented fonts.
3 - 145
3.9
Other Functions
(e) PRINT SIZE
This box allows you to specify an image size on the application if an image saved in
either TIFF or BMP format is assigned in an application that supports X Resolution/Y
Resolution that are stored in a file in the S-3400. Entering an X value in the left box
automatically sets a Y value (0.75 times the value of X). In applications such as Aldus
Page Maker, Adobe PhotoShop, and Microsoft Word that support this feature, a font
size can be assigned in a specified value irrespective of the number of pixels in the
image. Many of the commonly used word processing programs may not support this
feature, in which case a value specified in the PRINT SIZE box will have no effect.
By clicking the 4×5 Photo size button, it is possible to specify a font size equal to the
magnification rate for the image that was photographed using 4 x 5 inch Polaroid film.
(f) PCI
If PCI (a database program made by Quartz Imaging Corporation) is installed in the
system, this box should be checked on.
(g) PANEL
This box allows you to specify Operation Panel settings.
Turning on the checkmark on Invalidated stigma control disables the Stigma knob on
the Operation Panel.
Turning on Stigma⇔Brightness / Contrast toggles between the Stigma X/Y knob and
the Brightness/Contrast knob on the Operation Panel.
(2) Operation Panel tab
The arrangement of control blocks to be placed on the operation panel can be customized.
See 2.3.2
S-3400N SEM Main Window.
3 - 146
3.9.14
(3) Stage tab
(a) MOTOR DRIVE STAGE
Selects enable (On) or disable (Off) for motor
driven stage (5 axis motorized stage of type 2).
Set it at Off when the motorized stage is removed or
not used, for example when using the cryo-stage.
It is necessary when control program accesses
motor drive part and may be locked up if there is no
response from the motorized stage.
(b) REVERSE MODE
Changes direction of image motion by mouse
operation on the scanning image and by the
trackball and the joystick. When it is not checked,
image moves in the direction of mouse movement or
trackball rotation. When it is checked, image
moves in the reverse direction.
(c) TRACK BALL/JOYSTICK SPEED
When this box is checked, stage driving speed by
the trackball or the joystick option can be adjusted
with the Speed slider on the Stage tab on the
Operation panel.
Fig. 3.9-40
Stage Tab
(d) COORDINATE
Selects coordinate notation.
Refer to <3.5.7.1 Coordinate Notation>.
(4) MOUSE OPERATION tab
Set the sensitivity of mouse operation (focus, stigma, brightness and contrast adjustment)
on the scanning image.
Set a slider control at the Slow side for lower sensitivity or at the Fast side for higher
sensitivity. Adjustable range is from a half to 1.5 times the default sensitivity.
On each of the Stigma, Brightness/Contrast, and Focus, specify whether mouse
operations are to be performed on the image. By checking the appropriate check box for
these functions, you can perform mouse operations. Because stigma adjustments require
experience, if the Stigma box should not be touched by mistake, the check box for it should
be turned off.
3 - 147
3.9
Other Functions
Fig. 3.9-41
Mouse Op. Tab
(5) Selecting a vacuum mode when the application is started: Evacuation tab/Evacuation
menu
Fig. 3.9-42
Evacuation Tab
3 - 148
3.9.14
• Selecting a startup vacuum mode
This box allows you to specify the particular vacuum mode to be in effect when an
application is started. The Previous Mode recalls the vacuum mode that was used
previously. The SEM option starts the High Vacuum mode. The VP-SEM option starts the
Low Vacuum mode. For low vacuum, the desired vacuum level can also be specified at
the same time.
(6) Setting the Auto Axial Adjustment function: AAA Adjust tab/AAA Adjust menu
Fig. 3.9-43
AAA Adjust Tab
• Setting the Auto Axial Adjustment function
This box allows you to the particular mode in which the Auto Axial Adjustment function is
to run. In SCAN SPEED you can specify the speed at which auto axial adjustments are
to be run. FRAME is enabled when either TV or Fast is selected in SCAN SPEED, and
it allows you to specify the number of frames to be captured on an integration basis.
3 - 149
3.9
Other Functions
3.9.15
Password Setting
Use the Password Setting dialog window for setting or changing the password of the login
name for current user.
To open this dialog window, select the Password Setting command from the Option menu.
Fig. 3.9-44
Password Setting Window
The present login name is shown in the User box. Input present password to Old Password
box and then input New Password and Confirm Password. Click the OK button. Up to eight
characters are accepted as password. Uppercase and lowercase letters are distinguished.
If you click the OK button without entering New and Confirm Password, password will be
deleted.
Setting login name is possible using the Login Setting dialog window.
when logged in with the superintendent login name "S-3400".
3.9.16
It is only accessible
Setting Login Name
By setting login names and passwords, the instrument will be protected from unauthorized users'
operation.
When the instrument is shipped, the login name "S-3400" is set up with no password. Use this
name for the user who is responsible for the instrument.
Use Login Setting command in the Option menu for setting a password for the login name
"S-3400" and also for setting other login names and passwords. This command is available
only when logged in with "S-3400".
Fig. 3.9-45
Login Setting Menu
3 - 150
3.9.16
Use the following steps for setting password protection.
(1) Login with the name "S-3400".
(2) Open the Login Setting dialog window by selecting the Login Setting command from the
Option menu.
(3) Select the "S-3400" in the Login Name list. Set a password for the name. Input Old
Password, if already set, and input new password to New and Confirm Password boxes
and then click the Change button.
If you do not open the password to other users, they cannot use the login name "S-3400" for
next login. Because the Login Setting command will not open when logged in with other
than "S-3400", it cannot register a new login name nor change the password for
"S-3400".
(4) Register login names for general users.
the opening input dialog window.
Fig. 3.9-46
Click the Add button and input a login name on
Add User Menu
(5) Select a name on the Login Name list by clicking it and set a password for the name.
You will notice the names and passwords to general users. Then, they can login using
them.
Up to eight characters are accepted as login names and passwords. Uppercase and
lowercase letters are distinguished.
The password of each general user can be changed using the Password Setting command
by the user.
(6) To delete a login name, select the name in the Login Name list by clicking it and click the
Delete button. Note that the name "S-3400" cannot be deleted.
NOTICE: If you forget the password for "S-3400", the above operation is not possible.
must call the service engineer to recover the password for the name.
3 - 151
You
3.9
Other Functions
3.9.17
Restoring DB
S-3400N control program utilizes database files for storing conditions or data.
If an error occurs in a database file, it cannot be accessed normally and a message "Database
not found" will be shown. A database error may occur, for example, when PC is stopped while
the database file is open for accessing.
In such a case, open the Maintenance dialog window by Mainte button on the tool button area
of the Operation panel or by Maintenance command in the Help menu, and select the Restore
DB tab.
Fig. 3.9-47
DB Repair Tab
Database files are shown in the list box. Select a database, which is considered to be the
source of error, by mouse clicking and click the Repair button.
When repairing is finished successfully, the message End of this procedure will be shown.
If it failed, the message Repair unsuccessful will be shown. After that, if the same error
occurs by a certain operation, contact the service engineer.
The Optimize button is provided for optimizing database files.
operate this.
3 - 152
It is usually not necessary to
3.9.18
3.9.18
User Dependent Operation Condition Memory
The operating conditions just before shutting down S-3400N operation program are memorized
and reproduced at the next starting up.
Most of operating conditions are memorized individually to each login user name.
The following list shows items memorized individually for login user name.
Table 3.9-1
User Dependent Operation Conditions
Condition Item
Contents
Operation panel display
The foreground tab, show or hide, left side or right side
Operation panel arrangement
Arrangement of control blocks on the operation panel, selection
of tool buttons
High voltage setting
Previously used acc. voltage, emission current setting, list of
recently used voltage
Column condition
Setup window – Probe Current and AFS level in Optics tab
working distance value
Signal selection
Setting on SIGNAL SELECT block on the operation panel
Image Saving
Setting on Save Image dialog window
Image format, Save option, destination folder, file name etc.
Image display parameters
Setting on Setup dialog window – Image tab
Screen mode
Full, Dual or Small screen
Scanning speed assignment
Scanning speed assignment to Scan Speed buttons
Record button assignment
Function assignment to Record buttons
Raster Rotation setting
Rotation angle and Tilting angle
(Raster rotation is set to OFF at starting up)
Optional setting for specimen stage
Setting on Optional Setup dialog window – Stage tab
Data Display setting
Setting on Setup dialog window – Record tab
Photographing condition
Setting on Setup dialog window – Record tab
Optional setting for mouse
Setting on Optional Setup dialog window – Mouse tab
operation
Other optional setting
Setting on Optional Setup dialog window – General tab
Data Entry setting
Recent written strings, drawing option etc.
Color mixing setting
Color combination
Window position
Last placed position of dialog windows
Specimen stage operation
Setting of Eucentric rotation and tilting
3 - 153
3.9
Other Functions
3.9.19
Password Locking of Windows
Password locking of Windows is possible using screen saver function. However, it can not be
used when operating S-3400N program because the screen saver locking forces termination of
Direct Draw function which is used by S-3400N program for image display and results missing of
image display when unlocked again.
Instead of using Windows function, password locking can be started on S-3400N GUI.
Please notice that after unlocking, scanning mode and speed will be set to normal, slow1
condition regardless of previous scanning mode.
To lock Windows, select "Password Lock" from File menu.
Fig. 3.9-48
File Menu
The following warning message will be shown.
Fig. 3.9-49
Password Lock Confirmation Message
OK button locks Windows.
To unlock Windows, press Ctrl + Alt + Delete keys simultaneously.
Enter user name and password following to Windows message.
NOTICE: Use user name and password for logging on to Windows, not for S-3400N logon.
User names shall be Power User level. By using with Users level, S-3400N program
will not work correctly.
3 - 154
3.9.20
3.9.20
Downloading Stage Control Program
Upgrading of specimen stage control program can be carried out by user.
However, it shall be operated only by manufacturer's or service engineer's request.
To start stage program download, select Stage Program Download from Option menu.
The following message will appear.
Fig. 3.9-50
Stage Program Download Confirmation Message
Click OK to continue.
At first stage status is checked. If stage is not working correctly, the following message will be
shown and program downloading will be canceled.
Fig. 3.9-51
Connection Lost Error Message
When stage is working correctly, the Stage program download dialog window will appear.
Fig. 3.9-52
Stage Program Download Menu
Click the Write button. The following message will appear.
Fig. 3.9-53
Write Confirmation Message
3 - 155
3.9
Other Functions
Set the CD-ROM and click OK.
Program downloading will start. Following messages are shown on the message area of the
above dialog window.
Fig. 3.9-54
Writing
The above message comes on while a write operation is in progress.
Fig. 3.9-55
Write Error
This message comes up when an error occurs. If this happens, please note the error number
and notify the Hitachi Service Department.
Fig. 3.9-56
Write Completed
The program has terminated normally.
Upon normal program termination, remove the CD-ROM, and click the Close button to close the
stage program download window.
3 - 156
3.10.1
3.10
Image Quality
The following are references for getting better image quality.
3.10.1
Accelerating Voltage and Image Quality
There is a multitude of accelerating voltages to choose. Resolution, image quality, charging
and other effects are greatly determined by the selected accelerating voltage. Below is a
guideline for selecting an accelerating voltage with which to image various specimens.
Table 3.10-1
Acc. volt.
(kV)
Accelerating Voltage and Image Quality
1
2
3
5
10
15
20
25
30
Resolution
Low
Secondary electron signal
Surface information
Influence of contamination
※1
High
Low
High
Surface info. (incl.
internal info.)
Topmost surface
info.
Low
High
Charge-up
※2
High
Low
Non-deposition observation
※2
Easy
Specimen damage
※2
Low
Influence of floating
magnetic filed
High
High
Low
X-RAY
X-ray analysis
※1: Under a low accelerating voltage, information is at the topmost surface. When there is
contamination, that surface is observed, exerting significant impact on the image.
※2: The extent of this factor is subject to change depending on the type of specimen involved
and the type of specimen pretreatment conducted.
3 - 157
3.10
Image Quality
3.10.2
Probe Current Setting and Image Quality
On the ELECTORION BEAM block, image quality can be adjusted by specifying an appropriate
probe current level. An appropriate setting should be selected in reference to the table below.
The default probe current is set to 50. The lower the probe current, the higher the resolution at
the expense of decreased probe current. For low-magnification observation, the probe current
should be set high, and for high-magnification observation, it should be set low.
Table 3.10-2
Probe Current and Image Quality
Probe Current Setting
Irradiation current
（A）
Resolution
Secondary electron signal
Image roughness
Charge-up
※1
0
50
100
Low
High
High
Low
Low
High
High
Low
Low
High
※1: For non-conducting specimens
See 3.4.1 Setting Parameters for the Electron Optical System.
3.10.3
Objective Lens Movable Aperture and Image Quality
The diameter of the objective lens movable aperture can be selected from four options. The
table below shows the relationship between aperture diameters on one hand and the specimen
current, the focal depth, and applications, on the other hand. Resolution is set so that it is the
highest when the hole diameter is 30 µm. The probe current can be adjusted by using the
Probe Current menu on the Electron BEAM block.
The surface condition of the objective lens movable aperture can have a significant impact on
image quality, especially at low accelerating voltage levels. Maintenance services on the
objective lens movable aperture should be performed periodically. Also critical is axial
alignment for the electron optical system.
3 - 158
3.10.2
Table 3.10-3
Stop No.
1
2
3
4
Aperture diameter
（µm）
150
80
50
30
Focal depth
Shallow
Deep
Probe current
High
Low
Resolution
Low
High
Application
See 3.4.2
3.10.4
Objective Lens Movable Aperture and Image Quality
X-ray analysis on
Observation and normal X-ray
low accelerating
analysis
voltage
Observations
requiring a great
focal depth
Axial Alignment.
Influence of WD in Low-vacuum Mode
When observation is conducted in the low-vacuum mode, in which the specimen chamber is
maintained at a low vacuum level, some of the primary electrons and the backscattered
electrons that provide signals are subject to scattering by residual gas molecules, and this may
result in a less than clear image. To ensure a clear image, the following settings may be required.
(1) Accelerating voltage
The accelerating voltage should be set as high as possible (see Table 3.10-1).
(2) Probe current
If image roughness is noticeable, the probe current should be increased (see Table 3.10-2).
(3) Working distance
To increase the sensitivity of the detector, the working distance should be minimized as
much as possible (see Table 3.10-4).
Table 3.10-4
Impact of WD in Low-vacuum Mode
Working Distance (mm)
10
50
Scattering of irradiation electrons
Low
High
Scattering of backscattered electrons
Low
High
3 - 159
3.11
Using SEM Data Manager
3.11
Using SEM Data Manager
SEM Data Manager is an image filing program with an easy-to-operate database function.
A database table is established for each user, and acquired SEM images are registered in the
table automatically when saving. The SEM Data Manager lists image files, finds images
following a Select query, displays images, displays and enables image information editing, and
allows image processing.
3.11.1
Precaution on SEM Data Manager
(1) Available image formats are 8-bit gray scale BMP, TIFF and JPEG. It is possible to register
images of other color modes, which are converted into 8 bit gray scale images when image
modifications (i.e. Data Entry, Image Processing etc.) have been performed.
(2) Use the Batch Process function to delete or move images to other directories, in order to
keep information in the database of SEM Data Manager. Using Windows File Manager or
Explorer functions for such operations will cause errors when you try to access these images
from SEM Data Manager. When such errors occur, remove these images from the
database using the Batch Process - Remove List function. If necessary, images can be
added to the database using the Add From File function.
(3) When an image is saved, a file {image filename}.t × t is created automatically in the same
directory as the saved image. It includes operating conditions of SEM and other image
acquisition information necessary for the database organization. Do not delete, move, or
edit these files.
(4) Do not edit Image Database files SDM.sdb as they are compatible with Microsoft Access
database files. Unexpected modifications of database files may cause errors in the SEM
Data Manager.
(5) Large size images (5120 × 3840, 2560 × 1920 pixels) will need a longer time for loading,
displaying or processing.
There are the following limitations.
(a) CD Measurement function works on 2560 × 1920 pixels or smaller images.
(b) Color mixing works for 1280 × 960 and 640 × 480 pixels images.
(c) Pseudo Coloring works for 2560 × 1920 pixels or smaller images.
In above cases, a message will be shown and the specified commands are canceled.
3 - 160
3.11.2
(6) Opening of image files, image processing or other operation on the SEM Data Manager
need large PC power. If SEM operation, such as image capturing is carried out while
above processing is running, it may cause some incorrect results. For example, image
capturing while slide show is running sometimes results incorrect captured data.
Avoid SEM operation while such an operation on the SEM Data Manager is running.
Also opening or operating SEM Data Manager while image capturing, saving on SEM is not
recommended by the same reason.
(7) When operating Color Mixing mode on SEM (not on SEM Data Manager), Photo Replay
from SEM Data Manager is inhibited. Terminate the Color Mixing mode to carry out
photographing.
3.11.2
3.11.2.1
Functions
Image Database
The top part of SEM Data Manager window when opened is as follows.
Selection items
Data tree area
Fig. 3.11-1
SEM Data Manager Window
(1) Opening a database
Database name is shown on the Data tree area.
Double click the database to open. User names included in the database will be shown
following the database name on the Data tree area.
Lower level tree opens following the Selection items. In the above example, Data tree is
open in the order of Folder - Image format - date of image creation.
3 - 161
3.11
Using SEM Data Manager
(2) Database fields
The following fields are created for each registered image data.
• User: Create a user name on the SEM Data Manager. It may also be created when
saving images.
• Folder and Media
• Image format: BMP, JPEG or TIFF
• Date: Date of creation or modification
• Sample, Keywords: Applied when saving.
• Image size
• Instrument condition: Magnification, signal source, Vacc, column condition etc.
Among the above fields, the following are used for selection items.
•
•
•
•
•
•
•
•
•
Folder
Image size
Image format
date
Vacc
signal
Sample
Keyword1/2
Media
3 - 162
3.11.2
3.11.2.2
Menu and Tool Buttons
The following picture shows an example where image is open.
Menu
Toolbar
Data tree
Image file list
Image display
Image
information
Thumbnail
display
Fig. 3.11-2
SEM Data Manager Window
Functions of Menu commands are as follows.
parentheses.
Corresponding tool buttons are shown in
(1) File menu
)
• Save as (
Save the image on the display area.
• Reload
Load and display the original image.
Use to recover processing, etc.
)
• Photo Replay (
Take a picture of the image on the display area.
• PCI Transfer (
Needs optional photo recording unit.
)
Transfers the image on the display area to the Quartz PCI together with the information
text file. It is available only when Quartz PCI software is built in.
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3.11
Using SEM Data Manager
• Remove List
Remove the image from database.
• Delete
Delete the image.
Image file is not erased.
Image file is erased.
• Rename
Rename the image file.
• Layout Print (
)
The Report Generation window opens for printing images.
• Exit
Close SEM Data Manager.
(2) Database menu
• Add from file (
)
Register image files specifying file name.
• Batch Process (
)
Apply file operation (copy, move, delete, etc.) to multiple selected images.
• Make new User (
)
Create new user name.
• Delete User (
)
Delete present selected user name.
before deleting a user.
All images included in the user must be removed
(3) Edit menu
• Copy (
)
Copy the image to Windows clipboard.
• Copy Small Size (
)
Copy the image to Windows clipboard.
• Copy Info (
The size of image is reduced to 640 × 480 pixels.
)
Copy the image information text file to Windows clipboard.
• Image Editor
Open an image editing application program, which has been associated with the image
format.
3 - 164
3.11.2
(4) View menu
• Image Maximize (
)
Display the image in full desktop.
window.
• Zoom (
Menu and tool buttons are available on the maximized
)
Enable or disable image enlargement by clicking on the image.
mark when it is enabled.
Mouse pointer is the
• Show thumbnail
Show or hide thumbnail display.
• Viewer Open (
)
Open a viewer window and display the image.
Data Manager is closed.
• Next Image (
) / Previous Image (
The window remains even when SEM
)
Open the image listed at next or previous position in the image file list.
• Slide Show (
)
Open the Slide Show tool.
• Refresh (F5 key)
Reload image or refresh thumbnail display.
(5) Processing menu
• Contrast Conversion－Conversion (
)
Open Contrast Conversion dialog window.
conversion are available on it.
Adjusting contrast and pseudo-color
• Contrast Conversion－Auto Adjust
Execute automatic contrast enhancement.
• Contrast Conversion－Gamma－1.2/1.5/2.0
Execute gamma adjustment.
• Color Mixing (
)
Open Color Mixing dialog window.
images.
Create color composite image using two selected
)
• Area Copy (
Copy a specified rectangular area of the image on the display area.
)
• Area Paste (
Paste an image copied using above Area Copy command to the image on the display
area.
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3.11
Using SEM Data Manager
• Image Processing－Processing (
)
Open Image Processing dialog window.
filtering are available on it.
Several image processings including spatial
• Image Processing－Noise Reduction to Flip Vertical
Execute each of image processing.
• Image Processing－Cancel
Cancel the results of image processing and load the original image.
)
• Data Entry (
Draw shapes and characters on the image.
• CD Measurement (
)
Open CD Measurement dialog window (optional function).
(6) Tool menu
• Options
Open Options dialog window.
others.
Use for setting size of thumbnail, character font and
• Database Utility
Repair or optimize database files.
3 - 166
3.11.3
3.11.3
3.11.3.1
Operation
Registering Images on SEM Data Manager Database
(1) Saving images on SEM
On the Save Image dialog window, put a check mark in SDM Register box to register
images when saving.
Fig. 3.11-3
Save As Window
Parameters for registering image are in the INFORMATION area.
(a) User Name
You can select a User name already registered by opening the list with the ↓ button,
or input a new user name.
(b) Sample Name
Input sample name or other text for classification of samples.
You can select from
already registered sample names by opening the list with the ↓ button, or input a
new name.
(c) Keyword1 and 2
Input keywords for selecting images.
(d) Comment
Input a comment.
3 - 167
3.11
Using SEM Data Manager
(2) Registering images stored on disks
To register already saved images to the SEM Data Manager database, use Add from File
on the tool bar.
command in Database menu or the Add from File button
The following Add from File dialog window will open.
Fig. 3.11-4
Add Image Window
Select a folder and image files and then click Open button.
Multiple file selection using Shift or Ctrl key is available.
NOTICE: When copying image files using Windows tools such as File Manager, copy text files
having the name "{Image file name}.txt" together with image files. The text files
include image information and are used for registering images in the SEM Data
Manager database.
3.11.3.2
Selecting User Name and Opening Data Tree
In the Data tree area, double click the database name (SDM).
database will open.
Set Selection items in the order of opening data tree.
Fig. 3.11-5
User names included in the
Data Tree Window
3 - 168
3.11.3
The above example has two User names (P-A01 and P-A02) and data tree is opened in the
order of Folder - Image format - stored date.
To open the tree to a lower level, click + button and to close the lower tree, click - button.
To open image files in the image file list, click a folder mark. The present opening folder is
mark.
shown with
NOTICE: When you have changed one of the selection items, the data tree will be closed.
Open the tree again.
To make a new user name, use Make New User command in Database menu or Make New
button on the tool bar.
User
Input a user name and click OK.
Fig. 3.11-6
3.11.3.3
New User Window
Image Display
Click on a thumbnail or a file name in the image file list to select an image.
The selected image will open on the image display area. The selected image is shown with
yellow border on thumbnail area.
To display the image on full desktop, double-click on the image or use Image Maximize
button on the tool bar.
command in View menu or click Image Maximize
The same operations return the image display to original size.
To zoom up or down image display, use the following operations.
(1) Click the ▼ of Zoom
button.
A magnification list will appear.
Select a desired
magnification value. (This magnification is the ratio versus the number of pixels of the
image data.) Upon selecting Default, a reduction ratio is determined so that the entire
image will fit into the image display area.
(2) Click the Zoom
button.
The mouse pointer will be changed to magnifier
mark.
Left click on image magnifies and right click demagnifies the image.
Note that while the mouse pointer is the magnifier mark, other operations on the image are
inhibited.
Click the Zoom
button again to return to default pointer.
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3.11
Using SEM Data Manager
3.11.3.4
Image Information
Information on the presently selected image is shown on the image information area.
Fig. 3.11-7
Image Information Window
You can edit Sample, Comment, and Keywords.
Click Edit button to edit the above items. Input each item and click OK.
3.11.3.5
Viewer Display
To display the presently selected image on a viewer window, use Viewer Open command in
button. The Viewer is an independent window and remains after
View menu or Viewer
terminating SEM Data Manager. It is intended for use as a reference image for observing
images with SEM.
To close the Viewer window, click the X button on the title bar.
Fig. 3.11-8
Viewer Display Window
3 - 170
3.11.3
3.11.3.6
Data Entry
Use Data Entry function for drawing shapes and writing texts on the image.
The Data Entry toolbox will open by Data Entry command in Processing menu or Data Entry
button.
Fig. 3.11-9
Data Entry Window
(1) Function of tool buttons
Function of tool buttons in the Data Entry toolbox is similar to the function on S-4800.
(a)
Edit text
Edit already written texts .
mark. Click the text to be
Selecting the Edit button changes mouse pointer to
edited. The text is changed to black background form. You can edit the text.
The Enter key terminates editing. The text is shown in red color and you can move its
position by dragging it with the mouse.
(b)
Text input
Write texts on the image.
After selecting the button, click on the image. The text input area of black stripes is
shown on the image. Input text using keyboard and terminate with Enter key.
The text is shown in red color and you can move its position by dragging it with the
mouse.
If you enter a text in the text box and then click on the image, the text is placed
automatically. 10 recently used texts are memorized and can be selected with the
↓ button.
Use the function when you repeat writing the same or similar texts.
To set the font and size, use DATA ENTRY/MEASUREMENT block in the Optional
Setup dialog window - General tab.
(c)
Line
Draw lines on the image. Click this button, and press the left button of the mouse to
create the starting point of the line on the image. Move the mouse to an end point and
then release the mouse button. While this button is depressed, you can repeat a line
drawing.
(d)
Arrow
Draw single-head arrow marks on the image.
3 - 171
3.11
Using SEM Data Manager
(e)
Double head arrow
Draw double-head arrow marks on the image.
(f)
Inner dimension mark
Draw inner dimension arrow marks on the image.
(g)
Outer dimension mark
Draw outer dimension marks on the image.
(h)
Inner dimension mark with measurement
Draw inner dimension marks with measurement on the image.
(i)
Outer dimension mark with measurement
Draw outer dimension marks with measurement on the image.
(j)
Circle
Draw circles or oval shapes on the image. Click this button and press the left button of
the mouse to create a starting point on the image. Draw a shape by moving the mouse
and then releasing the mouse button. While this button is depressed, you can repeat
drawing of a shape.
(k)
Rectangle
Draw rectangles on the image. Click this button and press the left button of the mouse
to create a starting point on the image. Draw a shape by moving the mouse and then
releasing the mouse button. While this button is depressed, you can repeat drawing of
a shape.
(l)
Shadow check box
When the Shadow box is checked, texts and graphics are drawn with shadow.
(m) Comment box
If you enter a text in the comment box and then click on the image for text, the text in
the comment box is placed automatically. 10 recently used texts are memorized and
can be selected with the ▼ button. Use the function when you repeat writing the
same or similar texts.
3 - 172
3.11.3
(n)
Select buttons
or
button selects graphics or text on the image in order. A selected graphics is
indicated with gray color and a surrounding dotted line box. A selected text is indicated
with gray color and black background. They can be moved and re-positioned by
mouse dragging. A selected text can be edited by double-clicking on it. The text line
is prolonged and editing becomes possible.
All button selects all graphics and text.
(o) Clear button
Clear selected graphics or text.
(2) Writing texts and graphics
Click a tool button and draw graphics or write texts.
(3) Editing texts
To edit already written texts, select the Edit text
tool.
Selecting the button changes mouse pointer to
mark.
Click the text to be edited.
The text is changed to black background form. You can edit the text. The Enter key
terminates editing. The text is shown in red color and you can move its position by
dragging it with the mouse.
(4) Moving position or deleting drawn data
or
button selects graphics or text on the image in order. A selected graphics is
indicated with gray color and a surrounding dotted line box. A selected text is indicated with
gray color and black background. They can be moved and re-positioned by mouse
dragging. A selected text can be edited by double-clicking on it. The text line is prolonged
and editing becomes possible.
The Clear button erases the selected data. To erase all, select all data by clicking All
button and then click the Clear button.
(5) Saving image with entry data
button on
Click OK to fix entry data. Use Save as command in File menu or Save
the tool bar.
The save dialog window will open with present image name as a default file name.
Click Save button to overwrite to present image. Input new name and folder to save as a
new image.
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3.11
Using SEM Data Manager
3.11.3.7
Contrast Conversion
Gray scale conversions and pseudo-coloring are available.
To apply conversions to the image,
open the Contrast Conversion dialog window by clicking the Contrast Conversion button
on the tool bar or use Contrast Conversion - Conversion command in Processing menu.
Fig. 3.11-10
Contrast Adjustment Window
(1) Manual adjustment of contrast and brightness
Use Contrast and Brightness scroll bars. The % values show rate of processing.
The histogram display will be changed linked with contrast and brightness change.
(2) Auto adjustment of contrast and brightness
Auto button enhances contrast to full grayscale range.
Note that when auto data display or entry data exists in the image, the true image data
cannot be enhanced. Use the next function in such a case.
(3) Contrast and brightness adjustment on the histogram display
Set the left and right yellow cursors to the level to be enhanced to black and white level and
button. Refer to the following example.
then click Enhance
→
Fig. 3.11-11
→
Brightness/Contrast Conversion
3 - 174
3.11.3
(4) Contrast inversion
The Negative
button inverses black and white.
(5) Gamma correction
A Gamma value of larger than 1 enhances dark area and suppresses highlight area.
A value smaller than 1 suppresses dark area and enhances highlight area.
Select a gamma value and click the button.
(6) Apply or cancel conversion result
OK button applies conversion result and rewrites image palette data. Cancel button
cancels conversion result and returns to original contrast.
Close button closes the dialog window. If it is clicked before clicking OK, the conversion
result is canceled.
(7) Pseudo color conversion
button expands the dialog window for pseudo color setting.
Pseudo color
Fig. 3.11-12
Pseudo-color Contrast Adjustment Window
Set following parameters.
3 - 175
3.11
Using SEM Data Manager
(a) Color Mode and Color Order
• Off : No coloring
• Color1 or Color2
Convert gray scale value to RGB color as in the following figures.
The L, M and H represent R, G or B color specified by Color Order setting.
Color 1 mode
L
M
M
Color 2 mode
H
H
Intensity
L
L
M
M
H
Intensity
Fig. 3.11-13
Signal/Color Intensity
For example when Color Order is set to B-G-R and Color Mode to Color1, L, M and H
represent B, G and R color and results in a pseudo color image where original dark area
is blue and bright area is red.
• Slice 4/8/16
Slices full grayscale range to 4, 8 or 16 levels and specifies colors for each separated
level.
(b) Max and Min Level
Adjust minimum and maximum of gray scale range to be converted to color image.
(c) Color bar
The color bar shows relation of colors to original brightness level when checked.
NOTICE: Pseudo color conversion is available for images of 2560 × 1920 pixels or smaller.
3 - 176
3.11.3
3.11.3.8
Image Processing
Digital image processing for noise reduction, increase of sharpness and detail enhancement is
available.
Open the Image Processing tool window by Image Processing - Processing command in
Processing menu or Processing
button on the tool bar.
The following tool window will open.
OK applies processing result to the image data, Cancel recovers the original image and Close
terminates the window.
Fig. 3.11-14
(1)
(2)
(3)
(4)
(5)
Noise Red.(Median)
Applies 3 × 3 pixel median filter.
Soften
Applies 2 × 2 pixel averaging.
Soften More
Applies 3 × 3 pixel averaging.
be lost.
Image Processing Window
It is effective for reducing noise.
It is effective for reducing noise.
It is more effective for reducing noise.
Fine details may
Sharpen
Increases sharpness.
Snow noise may increase when applied to noisy images.
Sharpen More
Increases sharpness.
Snow noise may increase when applied to noisy images.
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Using SEM Data Manager
(6)
Edge Enhance
Applies Laplacian filter.
It is effective for edge enhancement.
Edge Detect
Applies Laplacian filter.
It is effective for edge detection.
(7)
(8)
Line Segment
Extracts line segment.
(9)
Emboss
Emboss effect.
(10) Highlight FLT
(11) Highlight FLT More
Highlight filter emphasizes detailed construction and reduces shadowing of the image.
(12) Rotate 90 deg
Rotates the image by 90° clockwise.
(13) Flip Vertical
Inverts top and bottom of the image.
(14) Flip Horizontal
Reverses the left and right of the image.
3 - 178
3.11.3
3.11.3.9
Color Mixing
Creates color composite image using two original images.
It is applicable for color composition of two different signal images, or stereo imaging using
colored glasses.
Positional alignment of two original images is possible.
(1) Color mixing operation
Select one of two original images to be mixed and open the Color mixing dialog window by
Color Mixing command in Processing menu or Color Mixing
The selected image is shown in the source image area A.
Fig. 3.11-15
button.
Color Mixing Window
To bring another source image, select the source area B by clicking it and then double-click
the image thumbnail to be used as the source image.
The source images can be exchanged by the above operation.
Mixing selection box
Fig. 3.11-16
Image Selection Status on Color Mixing Window
3 - 179
3.11
Using SEM Data Manager
Select color for source images. Check Color and select R, G or B button.
Select a mixing mode in the mixing selection box.
• ADD: Add A and B source images. Use this when two images are of different single
colors.
• AVG: Average of A and B source images is used. Use this when one or both of source
images are monochrome.
• MAX: Compare intensity of each pixel of source A and B images and use larger data for
resulting composite image. When A and B are of different color, it results in the same
image as when using ADD. When one or both of source images are monochrome, it will
result in a clearer contrast than when using AVG.
The following picture is an example where source A is SE and B is BSE image and they
are mixed with green and red colors.
Fig. 3.11-17
Color Mixing Results Display Window
(2) Contrast adjustment
Use scrollbars to adjust contrast and brightness of source images.
brightness of the resulting image can be adjusted.
Also contrast and
(3) Trimming
Check the Trimming box. Yellow box cursors are shown on source images. The cursor
on the B image is movable with mouse. Mixing is carried out for the area in the cursors.
You can correct a small positional deviation between two source images.
(4) Saving composite image
Click Save button. Specify file name on the opening save dialog window.
NOTICE: • The composite image is saved with 24 bit RGB format. It has a file size 3 times
larger than original monochrome images.
• Original source images for Color Mixing shall be of 2560 × 1920 pixels or smaller
size.
• When one or both of source images are monochrome, it will take a longer
processing time than where both images have different single colors.
3 - 180
3.11.3
3.11.3.10
Printing Images
button on the tool bar.
Use Layout Print command in File menu or Layout Print
The Report Generation window will open with the presently selected image on the layout sheet.
Double-click a thumbnail image to add it to the layout sheet.
Refer to <3.9.10 Printing Images Using Report Generation Function>.
3.11.3.11
Image File Operation
NOTICE: Use functions provided on SEM Data Manager to delete or move images to other
directories, in order to keep information in the database of SEM Data Manager.
Using Windows File Manager or Explorer functions for such operations will cause
errors when you try to access these images from SEM Data Manager. When such
errors occur, remove these images from the database using the Batch Process Remove List function. If necessary, images can be added to the database using the
Add From File function.
(1) Saving processed image
To save the result of image processing and/or contrast conversion, use Image Save
button on the tool bar or Save as command in File menu.
Image save dialog window will open with the present image name as the default file name.
Just click Save button to overwrite, or input a new file name and click Save button to save
as a new file.
(2) Removing an image from database
Use Remove List command in File menu. The presently selected image is removed from
the database. This command is executed without showing message. Image file itself is
not deleted.
(3) Deletion of an image
Use Delete command in File menu. The presently selected image is deleted and removed
from the database. A message for confirmation will be shown. Image file itself is deleted.
(4) Renaming an image file
Use Rename command in File menu to rename the presently selected image file.
Fig. 3.11-18
Rename File Window
3 - 181
3.11
Using SEM Data Manager
3.11.3.12
Batch Operation of Image Files
Two or more image files can be operated at once.
Use Batch Process command in Database menu or Batch Process
bar. The Batch Process dialog window will open.
Fig. 3.11-19
button on the tool
Batch Processing Window
(1) Action buttons
(a) Move Files:
Moves image files selected from the Source list to other folders specified in the
Destination area. Image files in the source directory are deleted.
(b) Copy Files/Resize:
Copies images files selected from the Source list to other folders specified in the
Destination area.
(c) Copy Files Only:
Copies images files selected from the Source list to other folders specified in the
Destination area. Files in target folders are not registered in the database. Use this
command to copy image files to floppy disks for carrying data to other PCs.
(d) Convert/Copy:
Converts image format of files selected from the Source list and then copies to other
folders specified in the Destination area.
(e) Move to User:
Moves images selected from the Source list to another User database.
Moved images are removed from the source User database. The image files are not
moved.
(f) Remove List:
Image files selected from the Source list are removed from the present User database.
Image files are not deleted.
(g) Delete Image:
Deletes image files selected from the Source list and removes them from the present
User database. Image files are deleted.
(h) Rename Image:
Renames an image file selected from the Source list.
3 - 182
3.11.3
(2) Source list
Image files included in the present opening folder are listed here. Files can be selected
from this list for one of the aforementioned actions. Multiple selection using the Shift or Ctrl
key is supported.
For multiple file selection,
(a) Press the left button of the mouse on the first selected file, and move the mouse while
holding down the button to the last selected file, and then release the button.
Selected files are shown by reverse color.
(b) Click the first selected file and then click the last selected file while holding down the
Shift key.
(c) Click selected files while holding down the Ctrl key.
(3) Destination
These are enabled when Move Files, Copy Files, Copy Files Only or Convert/Copy
actions are selected. Select a target folder. The Media ID indicates the volume label of
the selected drive.
NOTICE: It is recommended to put independent volume labels on removable disks such as MO
and ZIP disks. The volume label is shown in the Media ID area.
To put a volume label onto a disk, right-click the drive name in the Windows Explorer.
Select Property (R) on the pop-up menu. You can check or set a volume label in the
Information tab.
(4) Format selection
Select a file format. BMP, JPG and TIF are available.
It is shown when Convert/Copy action is selected.
(5) Image size selection
Select an image size for resizing image files.
selected.
It is shown when Copy files/Resize action is
(6) User selection
User selection is enabled when Move Files, Copy Files, Convert/Copy and Move to User
actions are selected. With the exception of the current User, all other Users are listed.
Select a User for selected Action.
3 - 183
3.11
Using SEM Data Manager
3.11.3.13
Slide Show
Use the Slide Show controller for viewing images in continuous slide motion.
To open the Slide Show controller, use Slide Show command in View menu or Slide Show
button on the tool bar.
Start slide show
Interval: Select interval time
Stop slide show
Fig. 3.11-20
3.11.3.14
Slide Show Window
Optional Setting
Tool menu - Options command opens the Options dialog window.
Fig. 3.11-21
Option Settings Window Display Tab
(1) Thumbnail Size
(a) Auto:
Thumbnail size is selected automatically according to desktop size.
When opened on 1280 × 1024 pixel desktop, thumbnail size is set to 80 × 60 pixels.
If the desktop size is 1024 × 768, it is set to 64 × 48 pixels.
(b) 64×48 or 80×60:
Thumbnail size is set according to the selection.
3 - 184
3.11.3
(2) Thumbnail Directory
The default directory of thumbnail images is "C:\Windows\Temp". It can be set here at any
directory. If the thumbnail directory is changed, all of existing image thumbnails are recreated in the new directory when the images are opened. It is recommended not to
change the thumbnail directory frequently.
(3) Data Entry/Measurement
Use for selection of font type and size for Data Entry function and CD Measurement function.
(4) Print Size
Set the image size when pasted on some other application software which supports X
Resolution/Y Resolution parameter included in the header part of image files.
Input horizontal size in mm into the left size box. The vertical size is automatically set.
For example, Aldus Page Maker and Adobe PhotoShop will support it in TIFF format images.
Microsoft Word supports it in Bitmap format images.
Fig. 3.11-22
Option Settings Window Image Information Embedding Tab
3 - 185
3.11
Using SEM Data Manager
3.11.3.15
Optimizing and Repairing Database File
Use Database Utility command in Tool menu.
Fig. 3.11-23
The following dialog window will open.
Database Settings Window
(1) Optimizing database file
To optimize the database file when the file size becomes unnecessarily large by repeating
registration and deletion, select the database file by clicking the name and click Optimize.
Usually it is not necessary if no problem has been shown.
(2) Repairing database file
When the message "Database not found" is shown while operating SEM Data Manager, try
to repair the database. Select the database file by clicking the name and click Repair
button.
3 - 186
4.1.1
4.
MAINTENANCE
When attempting maintenance of this instrument, observe the following cautionary instructions.
(1)
Read through the maintenance procedures contained in this manual, and then carry out
maintenance as described.
(2)
Avoid disassembling/reassembling or repairing any part that is not described in the
maintenance procedures.
The vacuum pump (turbo-molecular pump) recommends the maintenance of the oil
cartridge once/year and the bearing once/two years. The maintenance message is
displayed after one year from installed day and contact the Hitachi service of the nearest,
please.
(3)
4.1
4.1.1
Maintenance of Electron Optical Column
Filament Exchange
It is thought of as filament cuts when the image or the emission current doesn't obtain even if the
accelerating voltage is impressed. Directions on how to replace a filament, prepared in 3D CG,
are also available. For details, see 2.3.4 Menus.
(1)
In the Setup tab in the Setup window, set the Filament value to 0.
Fig. 4.1-1
(2)
Filament Menu
If the accelerating voltage is ON, click OFF to shut it off.
(Notes on display: When the accelerating voltage is ON, the OFF is active.
When the accelerating voltage is OFF, the ON is active.)
4-1
4.1
Maintenance of Electron Optical Column
Fig. 4.1-2
(3)
Accelerating Voltage Setup Dialog
Either press the AIR switch on the Evacuation Control Panel or press the AIR evacuation
control button located on the right side of the observation screen Control Panel. Wait until
the inside of the column reaches a complete AIR state.
EVAC panel
Control Panel
Fig. 4.1-3
(4)
Evacuation Control Panel
Lift the entire electron gun unit toward left, and tilt it.
WARNING: When used, the filament becomes hot, reaching approximately 90℃. Therefore,
touching it carries the risk of burns.
For replacing a filament, let it stand for 30 minutes or more after air is
introduced, and work should be performed after the filament has cooled down
sufficiently.
Or, execute the filament exchange by using heatproof gloves of the clean room
specification.
Fig. 4.1-4
Removing the Electron Gun Unit
4-2
4.1.1
CAUTION: The gun housing should be lifted by both hands until it stops. If the gun
housing is released halfway, your fingers might be caught in it.
NOTICE: Take care not to leave fingerprints on the internal vacuum parts for preventing gas
degassing. Be sure to wear clean gloves when performing the following procedure.
(5)
Turn the holding ring counterclockwise to remove the cartridge filament assembly.
Fig. 4.1-5
Removing the Cartridge Filament Assembly
WARNING: When used, the filament becomes hot, reaching approximately 90℃. Therefore,
touching it carries the risk of burns.
For replacing a filament, let it stand for 30 minutes or more after air is
introduced, and work should be performed after the filament has cooled down
sufficiently.
(6)
Remove the Wehnelt cylinder. If the Wehnelt cylinder hole is contaminated, clean it with
bamboo stick, absorbent cotton, polishing paste, acetone, etc. It is good practice to clean
Wehnelt at every filament change.
Cartridge filament
Wehnelt
Fig. 4.1-6
Cartridge Filament Assembly
NOTICE: Any polishing paste used in the cleaning operation should be removed completely. If
a cartridge filament assembly with some residue still attached is used, the emission
current fluctuates and can cause a faulty image, such as changes in brightness.
Inspection with an optical microscope is a good way to check. Cleaning parts in an
ultrasonic cleaner is good practice.
4-3
4.1
(7)
Maintenance of Electron Optical Column
If the area around the center of the anode hole is dirty, the screwed-in anode should be
removed. As described in (6) above, clean the area around the hole on the anode plate,
and then install the cleaned anode.
Fig. 4.1-7
(8)
Cleaning the Anode
Attach the Wehnelt to the cartridge filament.
Fig. 4.1-8
Wehnelt (left) and Cartridge Filament (right)
NOTICE: The Wehnelt is fitted as shown in the figure below with spacers be attached
individually. Ultimately, verification should be made by using emission current.
The rule of thumb is an emission current level of 90 to 110 µA (Auto Gun Bias ON) or
130 to 150 µA (Auto Gun Bias OFF) at an accelerating voltage of 30.
Reuse
Adjust using
spacer, 1 to 2
Wehnelt
P/N 50E-0524
Blown
Cartridge filament
P/N 51E-0240
Fig. 4.1-9
Discard
Details of Assembling the Cartridge Filament
4-4
4.1.1
(9)
Check to see that the Wehnelt is securely fitted. After that, use a spray or blower to
completely remove any lint and other debris attached to the filament assembly.
Fig. 4.1-10
Cartridge Filament Assembly
(10) Attach the filament assembly to the electron gun. Fix it by turning the holding ring
clockwise.
Fig. 4.1-11
Installing the Cartridge Filament Assembly
(11) Set the gun onto the column.
Fig. 4.1-12
Installing the Electron Gun Unit
NOTICE: Unload the electron gun after O-ring returns to the groove when it has come off from
the groove.
CAUTION: When setting the gun, take care not to pinch the O-ring. The gun should be
lowered by both hands until it stops. If the gun is released halfway, your
fingers might be caught in it.
4-5
4.1
Maintenance of Electron Optical Column
NOTICE: Adequate care should be taken to prevent any dust particles from intruding into the
electron gun unit or the inside the column.
(12) Either press the EVAC switch on the Evacuation Control Panel or the EVAC control button
located on the right side of the Observation Screen Control Panel. Wait until the
evacuation process finishes.
EVAC Panel
Fig. 4.1-13
Control Panel
Evacuation Control Panel
(13) When application of accelerating voltage is enabled, apply an accelerating voltage, and
perform and electron beam axial alignment according to <3.4.2 Axial Alignment>.
4.1.2
Maintenance for the Objective Lens Movable Aperture
A dirty objective lens movable aperture can cause a stigma aberration with a significant impact
on image resolution. Although how often the objective lens movable aperture should be serviced
depends on the frequency of use of it, it should be serviced as follows:
① Periodically once every six months under normal usage conditions
② If resolution declines apparently due to a dirty aperture
③ More frequent routine maintenance may be required if a low accelerating voltage (less
than 5 kV) is ordinarily used.
Maintenance procedures are given below. Operating instructions based on 3D CG are also
available. For further details, see <2.3.4 Menus>.
4-6
4.1.2
(1)
On the Setup window, set the numerical value in Filament in the electron optical system
Setup tab to 0.
Fig. 4.1-14
Filament Setup Menu
(2)
If the accelerating voltage is ON, click OFF to shut it off.
(3)
Press either the AIR switch on the Evacuation Control Panel or the AIR evacuation control
button located on the Observation Screen Control Panel. Wait until the interior of the
column completely attains the AIR state.
EVAC Panel
Fig. 4.1-15
(4)
Control Panel
EVAC Control Panel
Using a hexagon wrench, loosen the Align screw that secures the advancing mechanism
for the objective lens movable aperture.
Fig. 4.1-16
Removing the Objective Lens Movable Aperture
4-7
4.1
(5)
Maintenance of Electron Optical Column
Pull out the entire assembly for the objective lens movable aperture.
Fig. 4.1-17
(6)
Removing the Objective Lens Movable Aperture Assembly
Using a precision screw driver, remove the retaining screw that holds down the objective
lens movable aperture plate.
B950104
Fig. 4.1-18
(7)
Removing the Retaining Screw
Using a pair of tweezers, remove the aperture plate and replace it with a new one (or one
that has been baked in vacuum deposition equipment). If the aperture holder or aperture
base is dirty, polish it with a cotton swab soaked in polishing paste, and then sonicate it
with acetone.
Retaining screw
Positioning slot
Aperture plate
50E-1138(standard)
Aperture holder
432-3039
Aperture base
538-0549
Fig. 4.1-19
Replacing the Aperture Plate
4-8
4.1.2
NOTICE: Objective lens movable aperture plates can be used on either side.
(8)
Referring to Figure 4.1-20, align the positioning slot for the objective lens movable aperture
plate with the positioning slot for the aperture base. Place the aperture holder over them,
and lightly fasten the aperture holder retaining screw.
(9)
Verify that that the positioning slot for the aperture plate is properly aligned with the
positioning slots for the aperture base and aperture holder, and then tighten the aperture
holder retaining screw.
B950104
Fig. 4.1-20
Attaching the Retaining Screw
(10) Make sure that the area around the objective lens movable aperture plate is free of dust,
and insert the objective lens movable aperture advancing mechanism straight into the
guide slot.
Fig. 4.1-21
Installing the Advancing Mechanism
NOTICE: If there are dust particles in the area around the objective lens movable aperture plate,
they should be removed using a spray or blower; care should be taken to avoid
contaminating the inside of the column.
4-9
4.1
Maintenance of Electron Optical Column
(11) Securely insert the advancing mechanism for the objective lens movable aperture. Fasten
the W-point screw with a hexagon wrench to secure the advancing mechanism.
Fig. 4.1-22
Installing the Objective Lens Movable Aperture
(12) Press either the EVAC switch on the Evacuation Control Panel or the EVAC control button
on the Observation Screen Control Panel; wait until the evacuation process finishes.
EVAC Panel
Fig. 4.1-23
4.1.3
Control Panel
Evacuation Control Panel
Maintenance for the Orifice Unit
The orifice unit in the S-3400N rarely becomes dirty due to the presence of an objective lens
movable aperture in the upper part of the column and because the space between them is
evacuated. The orifice unit, however, requires maintenance services in the following cases:
• Image stigma is substantial with a declining resolution. Although the objective lens
movable aperture was serviced according to Section 4.1.2, the stigma could not be
removed and the problem has not been resolved.
• Stigma was still significant when the objective lens movable aperture position was set to
"0" during the observation.
• Some dust fell into the orifice unit.
• It has been more than one year since last servicing under normal usage conditions.
NOTICE: Procedure for servicing the orifice unit are given below. However, this operation,
which involves the handling of tiny components, should be delegated to service
personnel.
4 - 10
4.1.3
(1)
If the accelerating voltage is ON, click OFF to shut it off.
Fig. 4.1-24
(2)
Accelerating Voltage Setup Dialog
Press either the AIR switch on the Evacuation Control Panel or the AIR evacuation control
button located on the Observation Screen Control Panel. Wait until the interior of the
specimen chamber completely attains the AIR state.
EVAC Panel
Fig. 4.1-25
(3)
Control Panel
Evacuation Control Panel
Pull out the stage.
Fig. 4.1-26
Pulling Out the Stage
IMPORTANT: Before pulling out the Type I stage, be sure to move the Z knob for the stage to
the sample exchange position. Pulling out the stage with the specimen in a
position other than the sample exchange position can potentially damage the
specimen or equipment.
IMPORTANT: Before pulling out the Type II stage, be sure to press the HOME Z10, Z65 button
in the Stage Operation dialog to move the specimen to the sample exchange
position. Pulling out the stage with the specimen in a position other than the
sample exchange position can potentially damage the specimen or equipment.
4 - 11
4.1
(4)
Maintenance of Electron Optical Column
Turn the knob for the BSED (backscattered electron detector) mechanical unit to pull out
the BSED detector, and insert the aperture replacement tool through the stage opening to
remove the orifice unit.
Objective lens
Turn the knob
Tool
Orifice unit
BSED detector
Fig. 4.1-27
Removing the Orifice Unit (1)
IMPORTANT: Do not touch the operation parts such as gears and driving screws and note that
clothes are never placed when you bring the hand close to the movement
mechanism in the specimen stage by the orifice maintenance.
4 - 12
4.1.3
Align tool groove with
orifice groove
Aperture replacement tool
P/N 52E-6560
Objective lens
① Before removal
② Aperture replacement tool and the orifice unit
Pull out orifice unit and tool
Turn grooved tool
counterclockwise
Orifice unit
P/N 52E-6563
③ Turn the orifice unit and the tool together
Fig. 4.1-28
④ Removal
Removing the Orifice Unit (2)
To remove the orifice unit, first insert the tip (the M4 male screw) of the part inside the
replacement tool into the hole located on the underside of the objective lens, and screw it
into the orifice unit, as illustrated in Figure 4.1-28 ②. In this step, align the outer groove
of the aperture replacement tool with the circular groove located in the lower part of the
orifice unit. After that, rotate the outer part of the replacement too counterclockwise, as
shown in Figure 4.1-28 ③, and then remove the orifice unit, as shown in Figure 4.1-28 ④.
IMPORTANT: Subjecting the objective lens to shock or scratching it can significantly reduce
system performance. The replacement operation should be performed with
great care. Also, care should be exercised so that no dirt or dust will get on the
objective lens.
4 - 13
4.1
Maintenance of Electron Optical Column
IMPORTANT: Be careful to avoid any damage to the surface of the scintillator in the specimen
chamber or to the backscattered electron detector.
Orifice holder
Orifice: ∅0.35 diameter
Screw in style
Orifice holder
Screw in style prevents
orifice unit from falling off
Aperture replacement tool
M4 male screw
Fig. 4.1-29
Makeup of the Orifice Unit and Aperture Replacement Tool
Ordering a set of orifice unit: Fixed aperture set P/N 52E-6563
Ordering a set of aperture replacement tools: Fixed aperture tools P/N 52E-6560
(5)
Set the slotted screw drive attached to the reverse side of the aperture replacement tool on
the ring groove of the orifice unit, turn it counterclockwise, remove the ring, and take out
the aperture.
Aperture plate (∅0.35 diameter)
50E-1139 (10 plates)
Orifice holder
52E-6561
Ring
52E-6562
Fig. 4.1-30
(6)
Removing the Orifice Ring
Thoroughly clean the components, with the exception of the aperture, with acetone-dipped
cotton swabs. The acetone should be wiped off completely so as to leave no residue.
Preferably, an ultrasound cleaner should be used. Inspect all parts with optical
microscope to check for residue.
4 - 14
4.1.4
(7)
Replace the aperture with a new one.
(8)
After the aperture has been replaced, perform Steps (4) - (5) in reverse to re-assemble the
unit. When turning the knob clockwise and inserting the BSED detector, turn it until the
BSED detector catches the orifice unit and stops. Notice that if the knob is turned too
hard, the detector will disengage from the orifice unit and overshoot.
(9)
Press either the EVAC switch on the Evacuation Control Panel or the EVAC control button
located on the right side of the Observation Screen Control Panel, and wait until the
evacuation process finishes.
EVAC Panel
Control Panel
Fig. 4.1-31
4.1.4
Evacuation Control Panel
Maintenance for the Condenser Aperture
The condenser aperture should be replaced once a year.
Directions on how to replace a condenser aperture, prepared in 3D CG, are also available.
For details, see 2.3.4, Menus.
(1)
If the accelerating voltage is ON, click OFF to shut it off.
Fig. 4.1-32
(2)
Accelerating Voltage Setup Dialog
Either press the AIR switch on the Evacuation Control Panel or press the AIR evacuation
control button located on the right side of the observation screen Control Panel. Wait until
the inside of the column reaches a complete AIR state.
4 - 15
4.1
Maintenance of Electron Optical Column
EVAC Panel
Control Panel
Fig. 4.1-33
(3)
Evacuation Control Panel
Lift the entire electron gun unit to the left and tilt it.
Fig. 4.1-34
Removing the Electron Gun Unit
CAUTION: When lifting the entire electron gun unit, be sure to use both hands, and move
it until it stops. Releasing it prematurely can cause fingers to be caught,
resulting in injury.
NOTICE: To avoid any fingerprint, which can release gas, on components inside the vacuum
unit, the steps described below should be performed by wearing clean gloves.
(4)
Remove the anode which is screwed in.
Fig. 4.1-35
Removing the Anode
4 - 16
4.1.4
(5)
Using a special pair of tweezers, pull out the condenser aperture.
Fig. 4.1-36
Removing the Condenser Aperture
(6)
Referring to Fig. 4.1-36, loosen the pipe and the pipe holder, and remove the single-hole
mesh aperture.
(7)
Install a new aperture.
When re-using an old aperture, it should be cleaned by baking. The new aperture should
be checked under an optical microscope to make sure that it is free of dirt or dust, and that
it is clean and its hole is neatly machined.
(8)
After assembling the aperture, use a spray or blower to remove any lint or dust.
(9)
After the cleaning is completed, perform Steps (6) to (2), in reverse sequence, to complete
the assembling process.
4 - 17
4.1
Maintenance of Electron Optical Column
Holder
50E-1677
Pipe 1
52E-6526
41.5 mm
Holder ring
50E-1493
Aperture
535-1289
Pipe holder
52E-6531
38.0 mm
Pipe 2
52E-6527
87.0 mm
Pipe 3
52E-6528
27.0 mm
Pipe 4
52E-6529
Fig. 4.1-37
Condenser Aperture Assembly
4 - 18
4.1.5
4.1.5
Cleaning of Aperture Plates
(1)
Use the vacuum evaporator for heating aperture plates. For handling of the vacuum
evaporator, refer to the instruction manual of the evaporator.
(2)
Mount the molybdenum board in the vacuum evaporator.
(3)
(See Fig. 4.1-38.)
-3
Evacuate the vacuum evaporator to better than 5 × 10 Pa.
Heat the molybdenum board. Continue applying heater current until the molybdenum
board becomes incandescent. Do not apply too much heater current, otherwise the
molybdenum board may be melted.
(4)
After completion of heating the molybdenum board, wait about 5 minutes for cooling down.
And then introduce air into the vacuum evaporator.
(5)
Mount an aperture plate at the center of the molybdenum board.
(6)
Evacuate the vacuum evaporator to a high vacuum better than 5 × 10 Pa.
Apply heater current. Heat the molybdenum board up to the incandescent point and then
stop heating. Be careful not to heat for a long time.
(7)
After completion of heating, wait for 10 to 15 minutes and introduce air into the vacuum
evaporator. Then remove the aperture plate with tweezers.
-3
CAUTION: Do not touch the heated aperture plate directly with bare hands.
Aperture plate
Molybdenum board
(533-1337)
Fig 4.1-38
Baking of Aperture Plate
4 - 19
4.1
Maintenance of Electron Optical Column
4.1.6
Ultrasonic Cleaning with Organic Solvent
CAUTION: When handling organic solvent (volatile solvent), take the following points into
consideration to avoid the danger of injury or explosion caused by ignition.
1. Volatile solvent should be handled at a place which is well ventilated and is
well away from flame.
2. If volatile solvent is excessively inhaled, dyspnea (difficulty in breathing) may
be caused. If volatile solvent is swallowed or gets onto the skin or into the
eyes, the symptoms of polyneuritis including anesthesia and ataxia (difficulty
in walking) may develop. So use a gas mask for organic gas, plus an
inhaler, safety goggles, protective gloves, protective boots, etc. as the
occasion demands or in consideration of conditions.
For cleaning of the Wehnelt cylinder and anode plate, the furnished polishing paste is used and
organic solvent is used to remove polishing past.
Conduct the work safely with reference to the warnings given at the beginning of this manual.
(1)
Supply water into the wash-basin of the ultrasonic cleaner up to 10 to 20% of its capacity.
(2)
Fill organic solvent into a beaker to about half of its capacity.
(3)
Put parts, which have been cleaned with polishing paste, into the beaker.
(4)
Place the beaker in the wash-basin of the ultrasonic cleaner.
(5)
Turn on the cleaner and clean the parts for 2 to 3 minutes.
(6)
After the cleaning, take the parts out of the beaker and rinse them in distilled water for 2 to
3 minutes to remove organic solvent.
(7)
Put the rinsed parts into another beaker filled with clean ethyl alcohol.
(8)
After substituting water adhering to parts with alcohol, take the parts out of the beaker with
tweezers and place them on a sheet of clean filter paper to evaporate the alcohol heat to
dry.
4.1.7
Replacement of Scintillator
When the instrument is used in the low vacuum mode for a long time, the inside of specimen
chamber is likely to be contaminated sooner than in the high vacuum mode.
The scintillator receiving secondary electrons is also apt to be contaminated in the low vacuum
mode. If the surface of scintillator is contaminated, the efficiency of secondary electron
detection may deteriorate to cause an unclear image. So, replace the scintillator before it is
contaminated heavily. It is advisable to replace the scintillator in a cycle of about three years,
though depending on the instrument operating condition in the low vacuum mode.
The replacement work should be conducted by the service engineer.
4 - 20
4.2.1
4.2
Maintenance of Rotary Pump
NOTICE: Instruments shipped to European area where CE marking conformity is necessary are
not provided with the rotary pump. Also according to the configuration of the
apparatus, the rotary pump is not provided even when shipped to outside of the
European area.
A period of inspection cannot be uniformly determined simply because operating conditions of
vacuum pumps differ. To minimize trouble and to maximize service life, conduct periodic
inspections (at least once every six months) according to the operation conditions.
For maintenance and inspection of the rotary pump refer to the
instrument manual furnished with it.
4.2.1
Oil Change
Condition of the pump oil exerts a strong influence on vacuum pressure produced by the pump
as well as on pump service life. To maintain the pump under ideal operating conditions, always
pay attention to the oil volume and cleanliness by observing through the oil gauge window.
Replace the oil with a new supply as soon as it appears to be contaminated.
(1)
Under normal operating conditions, replace old oil with new oil semiannually, although the
recommended period for oil change greatly differs according to actual operating conditions.
(2)
When employing the pump with air containing steam or other materials noxious to the oil,
the oil rapidly becomes degraded. In this instance, replace it sooner than usual.
When changing oil, refer to the instruction manual furnished with the pump.
(3)
We recommend employing SMR-100 (ULVAC, Inc.) for this Vacuum Pump.
4.2.2
Replacement of Oil Mist Trap Element
The oil mist trap element is of a disposable type.
assembly with a new one. (P/N 51E-1545)
When oil vapor or soot is found, replace this
IMPORTANT: The rotary pump has a finite life. Any rotary pump that has been in service for
five years should be replaced with a new one. An expired motor can cause
abnormal heating and emit fumes.
CAUTION: The rotary pump is a heavy object weighing as much as 30 kg. When the
pump must be lifted for oil change, the work should be performed by two or
more persons. Be careful not to get hands or feet caught.
WARNING: If it stops abnormally, the rotary pump tends to be hot, and touching it can
cause burns. If the pump stops abnormally, do not touch it, and call service
personnel.
4 - 21
4.3
Maintenance of Air Compressor
4.3
Maintenance of Air Compressor
NOTICE: Instruments shipped to European area where CE marking conformity is necessary are
not provided with the rotary pump. Also according to the configuration of the
apparatus, the rotary pump is not provided even when shipped to outside of the
European area.
4.3.1
Checkup and Maintenance
Check the following items regularly.
Before checkup/maintenance, be sure to turn the main switch off.
Service Cycle
Check Item
Procedure
Every
day
Discharge of drain
Loosen the drain
cock of air tank to
discharge drain.
○
Activation of control
devices (pressure
gauge, pressure switch
and safety valve)
Check the working
pressure and
activated function.
○
○
Abnormal vibration and
abnormal sound
Every 250 h
(1 month)
If loose, retighten
them.
○
Contamination and
clogging of strainer/filter
Blow air to
remove clogged
substance.
○
Piston ring ∗
Rider ring ∗
Bearing
∗
Ball bearing
Needle roller
bearing
Every 6,000 h
(2 years)
○
○
○
○
○
○
○
●
●
●
●
●
○
Loose bolts, nuts and
screws
Leakage through air
valve ∗
Every 3,000 h
(1 year)
WARNING: When the compressor must be drained, the inside of the tank remains
pressurized. A jerking operation can cause the contents of the tank to splash,
causing injury to eyes. When draining the compressor, do not stand directly in
front of the cock. Turn the cock slowly, and drain off the unit gradually.
4 - 22
4.3.1
NOTICE: 1. The mark "○" indicates the time period after the start of operation or replacement
of the part. The mark "●" shows the time point for part replacement.
2. The above table shows the standard inspection cycle. The inspection cycle
changes slightly with the operating conditions (temperature, humidity, etc.).
If the operating conditions are severe, shorten the inspection cycle.
3. For inspection and maintenance of the asterisked items, ask your dealer or nearby
service agent.
4. Caution on long shutdown
If the air compressor is not intended to be used for a long time, idle it for 30
minutes or longer once a month in order to prevent the service life of grease from
being shortened due to humidity.
4 - 23
4.3
Maintenance of Air Compressor
4.3.2
Troubleshooting of Air Compressor
If the air compressor becomes faulty, reference should be made to the following table.
Symptom
Probable Cause
Remedy
Air compressor rotates.
Pressure does not rise
at all or rises very
slowly.
Maximum pressure
limit is exceeded.
Abnormal sound has
been emitted.
Motor overheats.
Drain or stop valve leaks.
Retighten. If the valve still leaks,
replace with a new one.
Packing, screw or seal is
defective.
Retighten or replace the packing
with a new one.
Safety valve leaks.
Replace with a new one.
Air valve is defective.
Clean or replace with a new one.
Suction filter has clogged.
Clean or replace with a new one.
Piston ring has worn.
Replace with a new one.
Starting unloader is faulty.
Ask service agent for repair.
Pressure gauge reading is
improper.
Replace with a new one.
Pressure switch is faulty.
Adjust or replace with a new one.
Pressure gauge reading is
improper.
Replace with a new one.
Push solenoid is faulty.
Ask service agent for repair.
Piston hits air valve.
Ask service agent for repair.
Bearing is defective.
Ask service agent for repair.
Rider ring has worn.
Replace with a new one.
Installation is inappropriate.
Install on level floor.
Sliding part has scorched.
Ask service agent for repair.
Motor is abnormal.
Ask service agent for repair.
Pressure switch is faulty.
Replace with a new one.
Protector is actuated.
Stop operation, and then restart.
Voltage has dropped.
Replace wires with the specified
ones.
Air valve leaks.
Replace with a new one.
Starting unloader is faulty.
Ask service agent for repair.
Air compressor does not rotate.
Motor does not whir.
Motor whirs.
• When asking the service agent for repair, please notify them of the following.
1. Model code
2. Symptom of trouble
3. Location of installation site
4 - 24
4.3.3
4.3.3
Location and Functions of Major Components
Pressure switch
Starts and stops compressor.
Suction filter
Removes dust and dirt
in suction air.
Safety valve
Relieves compressed air at
abnormal rise in pressure.
Push solenoid (single phase
type only)
Activated at start of
compressor.
Stop valve (air outlet)
Connects hose.
Pressure gauge
Compressor
Indicates the pressure
of air tank.
Motor
Drain cock
Air tank
Fig. 4.3-1
Compressor
4 - 25
4.4
Troubleshooting
4.4
Troubleshooting
4.4.1
The Evacuation System does not Run
If the evacuation system fails to run or the evacuation system does not proceed, the following
items should be checked:
(1)
Is there an error?
If both the EVAC/AIR switches on the EVAC Panel are blinking and the buzzer is sounding,
it is an indication that an error has occurred. If this happens, check the error message on
the PC operation screen. If an error message is displayed, the corrective action described
in the list of error messages in the Appendix should be taken.
(2)
Is the PUMP light on the EVAC Panel either lit or blinking?
In the steady-state operation condition, the pump is running normally if the PUMP light is on.
During system startup, the PUMP light begins to blink after the compressor air pressure
has reached a prescribed level and values are set, and the pace of blinking picks up as the
rpm for the turbo molecular pump increases. When the rpm for the turbo molecular pump
has reached a prescribed level and the pump goes into the normal running condition, the
PUMP light becomes solidly lit.
Normally, the turbo molecular pump reaches a set rpm level and the PUMP light becomes
solidly lit within 10 minutes after the power is turned on. If the PUMP light fails to blink or
the blinking condition lasts more than 10 minutes, and if an error message is displayed on
the PC operation screen, the corrective action described in the list of error messages in the
Appendix should be taken. If an error message does not come up, call the service
engineer.
4 - 26
4.4.2
4.4.2
The Vacuum Level in the Specimen Chamber does not Rise
If the evacuation process does not end in 5 minutes after the evacuation process for the
specimen chamber was started by flipping the EVAC button on the EVAC Panel keeps blinking,
it is an indication of an error, and an error message appears on the PC operation screen. If this
happens, perform the tips provided in the error message, and check the following items:
(1)
Is the specimen stage securely inserted into the specimen chamber? The vacuum level
will not rise if the specimen stage is pulled out or there is something caught between the
specimen stage and the contact unit for the specimen chamber. Verify that the Current
Vacuum level displayed in VACUUM MODE on the operation panel declines gradually.
The pump is running normally if the vacuum levels falls to near the set vacuum level in lowvacuum mode, or to 1 Pa or less in high-vacuum mode.
(2)
If the pump is set to the low-vacuum mode, reset it to the high-vacuum mode, and then
press the EVAC button to run the evacuation process.
If you have attached some unit, e.g. objective lens aperture unit, prior to starting
evacuation, then introduce air into the specimen chamber and detach the unit. Clean and
grease up the O-ring of the unit and attach it again. Then restart evacuation.
Check if your specimen has dried. If the specimen is not dry, outgas from the specimen
may cause a longer evacuation time.
(3)
If you do not find any failure mentioned above, contact the service engineer.
4.4.3
The Emission Current Fails to Flow Normally
If the emission current fails to flow when an accelerating voltage is applied, the items listed
below should be checked. The emission current, which varies as a function of the accelerating
voltage, gun bias settings, or filament settings, will remain at 50 to 180 µA if the accelerating
voltage is 15 kV, the gun bias is 0, and normal filament settings are in effect.
(1)
Make sure that the filament is not blown and that it is installed correctly.
(2)
Make sure that the correct filament settings are in effect. Normal filament settings are 70
to 95. This can be confirmed by opening the Optics tab in the Setup menu.
(3)
The higher the gun bias value, the lower will be the emission current. Normally, if the
accelerating voltage is 15 kV, the gun bias level will be under 30. This can be confirmed
by opening the Optics tab in the Setup menu.
(4)
An accelerating voltage less than 2 kV will reduce the emission current.
See <3.3.2 Setting the Accelerating Voltage and Filament Current>.
See <4.1.1 Filament Exchange>.
4 - 27
4.4
Troubleshooting
4.4.4
When Image is not Shown on Screen
If an image does not appear on the screen or if it is difficult to focus the image, check the
following.
(1)
Is a specimen loaded? Is the specimen at the exchange position? Are the accelerating
voltage and emission current normal? Is either SE (secondary electron) or BSE
(backscattered electron) selected as a detector? Is the probe current set too low?
See <3.3.2 Setting the Accelerating Voltage and Filament Current>.
See <3.5.1 Selecting a Detector>.
See <3.10.2 Probe Current Settings and Image Quality>.
(2)
Set contrast at maximum.
(3)
Open the objective lens movable aperture (set it to the 0 position). If an image appears,
perform mechanical axial alignment and aperture alignment adjustments on the objective
lens movable aperture.
See <3.4.2.2 Axial Alignment Items in Detail>.
(4)
If an image fails to appear in Step (3) above, perform a beam alignment.
See <3.4.2.2 Axial Alignment Items in Detail>.
(5)
On Operate menu, set the Filament Image mode. If a round image appears off center on
the screen or the circle is chipped, re-adjustments should be performed.
(6)
If the BSE option is selected, is the detector properly inserted? Pull out the specimen stage
and verify that the BSE is inserted on the underside of the lens.
If image signals are not displayed at all and the screen fails to become bright even when the
Brightness knob is turned to a maximum position, the problem may be that the PC screen is not
set properly. It should be noted that the screen on the personal computer has the following
default settings:
(Specified using Screen Properties and Setting)
Color palette: Full color (approximately 16,000,000 colors)
Desktop:
1280 x 1024 pixels
Refresh rate: 60 Hz or 75 Hz (monitor-dependent)
If the problem still cannot be resolved, call the service engineer.
4 - 28
4.4.5
4.4.5
When Image is Very Noisy
There may be three types of noise on scanning images.
The first is a snow noise that appears uniformly on the image. It is mainly due to statistical
fluctuation of number of primary or secondary electrons. It appears when probe current is too
small, secondary electron emission efficiency of the specimen is too low, or efficiency of signal
detection is too low.
If images show such a noise, check the following.
(1)
Is the emission current too low?
Reset the accelerating voltage, the filament, and the gun bias.
See <3.3.2 Setting the Accelerating Voltage and Filament Current>.
(2)
Is the probe current setting too low?
If the probe current level is less than 30, it should be set to a level greater than or equal to
30.
See <3.10.2 Probe Current Setting and Image Quality>.
(3)
If you are using TV or FAST scanning speed, open the Image tab of the Setup dialog
window and check if the Frame Averaging for TV1, TV2, Fast1 and Fast2 is set at 1 or 2.
If so, try setting at 4 and 8.
(4)
Decrease contrast and increase brightness.
(5)
If the BSE is selected, re-check the BSE settings in the DETECTOR tab on the Operation
Panel. If contrast is too high, reduce the BSE Gain; if contrast is too low, increase the
BSE Gain. The detector should normally set to the COMP mode.
In the case of a BSE detector, a long WD reduces the detection efficiency. If that is the
case, set a WD less than 15 mm. If the BSE is selected in the high-vacuum mode, try to
select the SE detector.
See <3.5.1.2 Backscattered Electron Detector (BSE)>.
(6)
On Operate menu, set the Filament Image mode. If a round image appears off center on
the screen or the circle is chipped, re-adjustments should be performed.
4 - 29
4.4
Troubleshooting
The second is random noise caused by unstable probe current or unstable detector.
For example, bright spots or bright or dark lines appear when emission current is unstable or the
scintillator of the secondary electron detector has been damaged.
If images show such a noise, check the following.
(1)
Is the emission current too low?
Reset the accelerating voltage, the filament, and the gun bias.
See <3.3.2 Setting the Accelerating Voltage and Filament Current>.
(2)
If the filament setting off?
If the filament setting is off the saturation point, the emission current may fluctuate, in
which case the filament should be reset.
See <3.3.2 Setting the Accelerating Voltage and Filament Current>.
(3)
Select the BSE detector to check the noise level. If there is no noise, the problem may lie
with the SE detector itself, such as a specimen charge-up problem.
The third is random noise caused by partial charging of a specimen.
Observe another area of specimen or surface of a specimen stub. If noise does not appear,
your specimen may be charged. Select operating conditions for such charged samples or apply
a suitable preparation to your specimen to eliminate charging.
4.4.6
When You cannot Correct Astigmatism
If astigmatism still remains at the maximum correction level (One (and/or both) of Stigma sliders
is set at the maximum or the minimum, or one (and/or both) of Stigma knobs on the operation
panel is full), check the following.
(1)
Open the Alignment dialog window and start Aperture Alignment mode.
wobbling, carry out aperture alignment.
(2)
Use another opening of the objective lens aperture. If you can correct astigmatism, use
the opening or conduct cleaning of the aperture plate referring to the instruction manual.
(3)
If astigmatism correction is difficult due to shift of image during correction, open the
Alignment dialog window and carry out Aperture alignment and Stigma alignment.
If you still have troubles, contact a service engineer.
4 - 30
If image is
4.4.7
4.4.7
When Auto Focus or Auto Stigma does not Work Satisfactorily
When auto focus or auto stigma does not produce sharp images, check the following.
(1)
Open the Alignment dialog window and start Aperture Alignment mode.
wobbling, carry out aperture alignment.
(2)
Open the Alignment dialog window and start Stigma Alignment mode.
wobbling, carry out stigma alignment.
(3)
Check if the observed specimen has a fine surface structure.
manual focus and manual astigmatism correction.
(4)
If an abnormal contrast appears due to a charge-up problem, appropriate results may fail
to be produced.
4.4.8
If image is
If image is
If it does not, please use
When S-3400N Control Program does not Start Up
When the progress bar on the login dialog window does not progress to the end, or the login
dialog window disappears before completing start up, check the following.
Confirm that the evacuation system is up. Is either the AIR or EVAC switch on the EVAC Panel
blinking or solidly lit? If both switches are off, or both switches are lit or blinking, it is possible
that the evacuation system is in error.
If the stage is a motor-drive stage, is it running normally? After the stage is powered up,
operate the motor again to move the stage to its home position for initialization. If it appears
that the motor is not running properly, turn off the Stage breaker located in the back of the main
unit and restart the stage. If the S-3400N control program comes up normally even when the
stage cannot be operated, it is possible that the motor drive stage is in error, in which case the
service engineer should be called.
4 - 31
4.4
Troubleshooting
4.4.9
When PC has Hung Up
If the PC locks up during system operation, close Windows, shut down the system, and restart it.
Although the program can be ended and the system restarted, that approach may result in
unstable system behavior. The recommended procedure is to shut down the entire system.
Before the system is shut down, if there any programs other than the SEM control program that
are running, save the data if it is at all possible, and close the programs.
(1)
On the Windows Taskbar, click Start and select Shut down Windows. On the Windows
closing screen, select Computer may be turned off, and click the (Y) button.
If this cannot be performed, on the keyboard press the Alt, Ctrl, and Delete keys
simultaneously. Windows Security will appear, on the menu, select Shutdown.
(2)
Wait until a "Turn off computer" message appears (depending on settings, in some PCs
the power is shut off automatically).
If the PC fails to turn itself off, hold down on the power button on the PC to shut it off.
On rare occasion if the power for the PC fails to shut off when the Power button on the PC
is pressed for 20 seconds or more, confirm that the hard disk access light is off, and then
turn off the DISPLAY breaker, to be described in the next paragraph. (If the hard disk
access light is on, wait until it goes off.)
(3)
Allow about 1 minute, and then turn on the DISPLAY breaker. (If the PC is not set to start
up automatically when the power is turned on, manually turn on the PC power.)
If Windows was not shut down properly during the preceding session, a "Checking file
system on C: ...
To skip disk checking, press any key with 10 second." message may
come on. If no action is taken at this point, the Scan Disk program starts automatically.
Upon completion of Scan Disk, on rare occasion the system may come up in Safe mode. If
this happens, click Start - Turn off computer to restart the system.
(4)
Log in to Windows. Launch the S-3400N program.
See <3.1.2 Startup Operation>.
(5)
If the program locked up and the S-3400N control program was not shut down normally, in
some cases the condition that existed before the shutdown may not be reproduced (the
condition that existed two sessions ago comes up).
4.4.10
When Error Messages are Shown
Messages shown on the S-3400N GUI include operation assist messages, warning for operation
and messages showing instrumental error.
Messages are shown with a number. Refer to the list of messages in the appendix.
4 - 32
4.5
4.5
What to Do in the Event of a Power Outage or the System must be Shut Down
Completely for a Long Time
(1)
Perform routine shutdown operations (remove the specimen, shut down Windows, and turn
off the power).
See <3.8 Shutting Down>.
(2)
Turn off the MAIN breaker located in the back of the main unit.
MAIN breaker（ELB）
Fig. 4.5-1
MAIN Breaker
(3)
Turn off the power breaker on the distribution board at the installation site.
4.6
What to Do when the Power Failure and the System is to be Started Up
When the power failure returns, the device is started according to the following procedure.
(1)
Do the operation similar to section 4.5.
(Confirm that Main breaker on back of the main unit and the power breaker on the
distribution board at the installation site are OFF.)
(2)
Turn on the power breaker on the distribution board at the installation site.
(3)
Turn on the MAIN breaker located in the back of the main unit. For the Type I stage, make
sure that the DISPLAY breaker is on. If it is off, turn it on. For the Type II stage, confirm
that the DISPLAY and STAGE breakers are on. If they are off, turn them on.
(4)
On the front side of the system unit, rotate the key switch to the START position, release it,
and perform the normal startup operations.
See <3.1.2 Startup Operation>.
4 - 33
4.7
Caution of Maintenance
4.7
Caution on Maintenance
On maintenance of the instrument, the following cautions must be observed.
(1)
Follow the maintenance procedures described in this manual after a full understanding of it.
(In particular, carefully read "PRECAUTIONS ON HANDLING" at the beginning of the
manual.)
(2)
Maintenance work (disassembly-reassembly or repair) of the components other than
described in this manual must not be carried out by the customer.
4.8
Electron Gun Beam Axis Maintenance
Because the maintenance and adjustment of the electron gun and the condenser lenses (C lens)
are important work related to the device performance, only the service engineer is carrying out
the maintenance and the adjustment.
It is recommended to carrying out the maintenance and the adjustment of the electron gun beam
axis by the service engineer, when the equipment becomes the following condition.
• After the filament exchanged, the image disappears completely when the accelerating voltage
is changed with the objective lens movable aperture is "0".
• The glare on the image stands out even if Probe Current is enlarged with the objective lens
movable aperture is "0".
• The most lightened spot exceeded the adjustable range in the Beam Alignment.
4.8.1
Adjusting the Electron Gun Mounting Position (for service engineers)
Subtle mechanical variability in the cartridge filament can sometimes create a misalignment state,
exhibiting the types of symptoms described in Section 4.8 above. When Beam Alignment
operations are performed in such a condition, symptoms such as "out of tuning range" tend to
occur.
To prevent this problem, verification/adjustments should be performed according to the steps
given below:
(1)
Start the Alignment window. Press Reset All.
Fig. 4.8-1 Selecting Reset All
4 - 34
4.8.1
(2)
Set the acceleration voltage to 5 kV. With the Filament Image mode on (with an elliptic
image displayed), set the Probe Current to 100.
Make sure that the objective lens movable aperture is "0".
(3)
Set the Filament to approximately 90 (saturation condition).
Turn off Auto Gun Bias.
(4)
In Filament Image, select the Beam Align Shift. If the image is too bright or dark, adjust
the contrast by using the M4 screw (using an M4 hex wrench) of the electron gun so that
the bright spot is brought to the center of the screen. See Fig. 4.8-2 on the right. Be careful
that the M4 screw is not confused with a transport screw or the C-lens adjustment screw.
If the C lens adjustment screw is moved by mistake, the C-lens current center can shift,
causing a significant change in system performance. The operation should be performed
with great care to avoid this type of problem.
Electron gun adjustment
screw (4 places)
Transport screw
C-lens adjustment screw
Fig. 4.8-2 Adjusting the electron gun mounting position
(5)
Fix the electron gun mounting position screws when the image in the Filament Image
assumes the condition shown in Figure 4.8-2 on the left.
To avoid over-tightening, secure the screws diagonally a little at a time.
(6)
Turn off the Filament Image
This concludes the electron gun mounting position adjustment process. Confirm that the image
is displayed normally when the acceleration voltage is modified or the Probe Current is changed.
4 - 35
5.1
5.
5.1
REPLACEMENT PARTS
Consumables
The items shown in Table 5.1-1 should always be on hand for normal operation.
Table 5.1-1
Part No.
Consumables
Part Name
Use
For protection against chargeup
Remarks
G370009
Conductive paint
30 g
50E-6159
Carbon seal
G370250
Metal polishing paste 50 g
For cleaning parts
50 g
G743002
Stick bamboo
For cleaning parts
10 pcs
S370057
Cotton cloth
For cleaning parts
S269003
Aluminum foil
For cleaning parts
585-4267
Vacuum grease (in tube)
For vacuum seal (stationary part)
50E-1138
Objective lens aperture plate
(0.03, 0.05, 0.05, 0.12 mm dia.)
50E-1139
Objective fixed aperture 0.35
(made of Mo)
For orifice unit
Set of 20
535-1289
Condenser aperture (made of
Mo)
For condenser lens aperture
Set of 20
51E-0240
Cartridge Filament
Needs for Cartridge Wehnelt
Set of 10
51E-1527
RP oil SMR-100 (ULVAC.Inc.)
For oil rotary pump
500 mL
51E-1526
Oil mist trap OMT-200A
For oil rotary pump
Acetone
For cleaning
533-1337
Molybdenum board
For baking aperture plate
S263001
Polyethylene gloves
For handling parts
52E-1629
TMP oil reserver
Turbo molecular pump
Set of 20
5-1
5.2
Replacement Parts
5.2
Replacement Parts
The items below should be prepared in the necessary quantities.
Table 5.2-1
Replacement Parts
Part No.
Part Name
Use
Expiration
J386042
Photomultiplier R2649
Secondary electron detector
5 years
TMP exchange service
Turbo molecular pump
3 years
50E-1205
Scintillator
SE detector
3 years
K433004
Pirani gauge bulb
Evacuation system
3 years
52E-4501
Rubber tube for evacuation
Evacuation system
5 years
F229251
Vinyl tube
Evacuation system
3 years
51E-1528
Rotary pump
Evacuation system
5 years
PC monitor
PC
5 years
Hard disk
PC
3 years
Keyboard
PC
3 years
Mouse
PC
2 years
Battery for PC
PC
2 years
K429012
Rotary encoder
Manual operation panel (Mag.)
3 years
K429013
Rotary encoder
Manual operation panel (others)
5 years
52E-2384
Pulse motor X
Type II stage
4 years
52E-2385
Pulse motor Y
Type II stage
4 years
52E-2386
Pulse motor Z
Type II stage
4 years
52E-2387
Pulse motor R
Type II stage
4 years
52E-2388
Pulse motor T
Type II stage
4 years
52E-4013
Specimen stab spring
Stage
3 years
NOTE:
The Expiration column indicates the approximate lifetime of the part, and not the
guaranteed period.
5-2
5.3
5.3
Spare Parts
The items shown in Table 5.3-1 must be prepared for long-term operation.
Select a proper quantity in consideration of the application of each part.
Table 5.3-1
Part No.
Spare Parts
Part Name
Location
Q’ty Used
52E-2012
Accessory FUSE (W) set
433-3702
Specimen stub
15mm dia
－
52E-4020
Specimen stub
26mm dia
－
52E-4021
Specimen stub
32mm dia
－
52E-4022
Specimen stub
51mm dia
－
52E-4023
Specimen stub
77mm dia
－
52E-4024
Specimen stub
102mm dia
－
52E-4025
Specimen stub
127 mm dia
－
52E-4026
Specimen stub
153 mm dia
－
52E-4027
Specimen stub
200 mm dia
－
L456825
O-ring AS568-235 FPM
For electron gun
1
L456711
O-ring AS568-012 FPM
For objective lens aperture
1
L456815
O-ring AS568-225 FPM
For specimen chamber port
6
L456810
O-ring AS568-220 FPM
For specimen chamber
1
L456818
O-ring AS568-228 FPM
For specimen chamber
1
L456865
O-ring AS568-275 FPM
For specimen stage
1
5-3
1set
6.1.1
6.
6.1
ACCESSORY OPERATION
Model S-5080 Auto-Camera (Option)
This camera is used for taking photographs of images displayed on the screen of CRT dedicated
for photographing. You can use the following kinds of film by attaching various units consisting
of lenses and adapters (see Fig. 6.1-2): 6 × 7 roll film, 8 × 10 instant film, and type 4 × 5 instant
film.
6.1.1
Configuration
Figure 6.1-1 shows the camera body and one kind of adapter. Your SEM is provided with the
camera itself as a standard item along with various units for each specific kind of film that you
have specified. Select an appropriate unit for the film that you are going to use.
(1)
Camera body
(2)
Adapter 1.0-fold (for type 4 × 5 instant film)
Camera body
1：1 Adapter
C970194
Fig. 6.1-1
Model S-5080 Auto-Camera
(Configuration for image ratios of 1:1 is shown.)
6-1
6.1
Model S-5080 Auto-Camera (Option)
C910804
C910905
Type 4 × 5 single-exposure unit Type 4 × 5 Polaroid unit
(P/N 589-9871)
(P/N 589-9872)
Image ratio = 1 : 1
Image ratio = 1 : 1
C921211
Type 4 × 5 Fuji instant unit
(P/N 589-9875)
Image ratio = 1 : 1
C970192
6 × 7 roll film unit
(P/N 589-9873)
Image ratio = 1 : 0.6
C923691
107 Polaroid unit (8 exposures)
(P/N 589-9874)
Image ratio = 1 : 0.8
NOTICE: 1. The 107 unit integrates the 0.8-fold adapter dedicated for the model S-5080
camera.
2. The 6 × 7 roll film unit integrates the 0.6-fold adapter dedicated for the model S5080 camera.
Fig. 6.1-2
Configurations of Various Film Holder Units (Option)
6-2
6.1.2
6.1.2
Specifications
(1) Magnification :
×1.0, ×0.8, and ×0.6
(2) Lens
:
F = 75 mm
(3) Aperture
:
f = 4.5 to 22, manual
(4) Focusing
:
Manual (preset when shipped at the same time with the SEM)
(5) Film type
:
Roll film 120, Polaroid TYPE52 (P/N 55), Polaroid 107 and 105 (the user is
to buy the film.)
REMARKS: Refer to Table 6.1-1, which illustrates image sizes on the film for each combination
of adapter and kind of film.
6-3
120
6-4
×1.0
×0.8
54
90
120
96
72
Exposure Area on Film
NO
NO
118
NO
NO
95
Roll Film 120 and 220
6 × 7 cm
NO
NO
68
56
×0.6
Camera
Magnification
Polaroid 107
Table 6.1-1
Field of View on
Photographing CRT
Area
of
Film
Type 4 × 5
Polaroid Type 52, etc.
Fufi Film FP500B
6.1
Model S-5080 Auto-Camera (Option)
Image Sizes for Combinations of Adapters and Kinds of Film
75
89
72
90
6.1.3
6.1.3
Assembling the Camera
(1) Illustrated below are films for the standard PHOTO CRT.
(a) Type 4 × 5 film (magnification of ×1.0)
Fig. 6.1-3
4″ × 5″ Film (Magnification of ×1.0)
(b) Polaroid 107 film (magnification of ×0.8)
Fig. 6.1-4
Polaroid 107 Film (Magnification of ×0.8)
(c) Roll film 120 (magnification of ×0.6)
Fig. 6.1-5
Roll Film 120 (Magnification of ×0.6)
6-5
6.1
Model S-5080 Auto-Camera (Option)
6.1.4
Operation
(1) Installing the Camera
You should ask a service engineer for the installation. Take out the PHOTO CRT unit by
referring to Fig. 6.1-6. Tighten four 5-mm screws to fix the camera on the PHOTO CRT
panel.
(2) Adjustment
The adjustment for the roll film 120 is described below.
for other kinds of film.
Similar procedures are applicable
(a) Focusing
1) Remove the film holder, and attach the focusing hood instead.
2) Select the operation mode of NORMAL on the SEM, and press PHOTO switch.
3) Attain the optimum focus so that the raster on the focusing hood screen appears
sharpest.
(b) Aperture selection
By referring to Table 6.1-2, select an appropriate aperture for each kind of film.
Table 6.1-2
Aperture for Each Kind of Film
Film
ISO
Aperture (f)
Polaroid type 4 × 5
TYPE52
400
8
Land film
TYPE53
800
8
3000
16
Polaroid 107
6 × 7 cm
SS
100
5.6
Roll film
TRI-X
400
8
NOTICE: The model S-5080 is adjusted before shipment. If you decide for any reason that
readjustment of the camera is necessary, contact your nearest service representative.
6-6
6.1.4
PHOTO CRT unit
Camera
Aperture
Fig. 6.1-6
Disassembling the Photo CRT
6-7
6.2
Faraday Cup Device (Option)
6.2
Faraday Cup Device (Option)
This device is used for measuring the probe current.
6.2.1
Range of Type II Stage Drive
When the Faraday cup device is used, the range of the drive of Z axis and T axis of the sample
stage (Type II) is limited as follows.
• Z axis: 10 mm-65 mm
• T axis: 0° fixation
6.2.2
Usage Method
(1) Connect an ammeter (µµA meter) to the connector (the ammeter is to be prepared by the
customer).
(2) Use HOME Z10 or HOME Z65 button on the control panel to bring stage to specimen
exchange position. The HOME Z10 button moves the Z-axis to the 10mm mark, and the
HOME Z65 button moves the Z-axis to the 65 mm mark. When the HOME Z10 button is
disabled (grayed out), the axis cannot move to the 10 mm mark.
Fig. 6.2-1
The Specimen Exchange Position Button
(3) Please confirm the sample stage moved to the sample exchange position.
(4) The stopper screw is loosened while gripping the knob, and the Faraday cup device is
inserted in the specimen chamber slowly. At the time, please confirm the hole in Faraday
cup is almost at the center on the screen.
(5) Set the magnification more than 10,000×, and measure the probe current.
(6) After the measurement ends, draw out the Faraday cup device to the limit, and tight the
stopper screw and fix it.
6-8
6.2.2
NOTICE: If faraday cup insert when the stage is moving to safety position, the following alert
message is displayed on screen with the warning buzzer. Draw out the Faraday cup
immediately and wait to stop the warning buzzer and stage movement. After that,
insert the faraday cup. If the Faraday cup insert to the chamber when the stage is
moving to safety position (warning buzzer is ringing) or Z position (WD) is higher than
9.9 mm or stage is tilted, the sample and stage might be damaged. Normally, when
the Faraday cup insert to the chamber, the Alert massage is displayed without warning
buzzer.
《Alert message》
Fig. 6.2-2
Alert Message
Connector, connect an ammeter
(µµA meter) here.
Stop screw
Fig. 6.2-3
Faraday Cup Device
6-9
Knob
6.3
Specification of S-3400N External Communication (Option)
6.3
Specification of S-3400N External Communication (Option)
6.3.1
About the External Communication of S-3400N
The external communication of S-3400N is the software that controls S-3400N from the external
controller with the Ethernet.
SEM PC
EDX PC
Column control
SEM application
EDX application
Stage control
SemCommunication
DCOM
SEM
Ethernet (TCP/IP)
Fig. 6.3-1
6.3.1.1
Diagram of the External Communication of S-3400N
Communication Procedure
DCOM (Distributed Component Object Model) is used as the communication procedure.
The external communication operates by the ActiveX component and the remote server (ActiveX
EXE format).
6.3.1.2
Function and Limitation
Property command (Table 6.3-1) and Method command (Table 6.3-2) and Event command
(Table 6.3-3) can be used.
(1) Control of the specimen stage.
• Only the Stage Coordinate (mechanical coordinates) is available. See 3.5.7.1
Coordinate Notation.
• Movable Range of the specimen stage is limited mutually with present location of the
stage and the state of option detector insertion, the specimen size.
This information is not output by the external communication. When the specimen stage
cannot move to the specified position, the error information will be replied.
(2) Others
Do not use any other Property/Method/Event which command are not described in this
manual.
6 - 10
6.3.2
6.3.2
Each Command
Table 6.3-1 Property Command
Command
Return
Contents
IsActive
0 : SEM not execute
1 : Ready
0 : HV-OFF
1 : HV-ON
0 : HV OFF
300-30000 : 0.3-30 kV
5-300000：x5-x300k
400-7000：4.00-70.00 mm
０-16383
SEM status reading
HVOn
Vacc
Mag
WD
ObjLensCoarse
ObjLensFine
ProbeCurrent
ChamberType
StageType
VacuumMode
Vacuum
InstructName
Version
Revision
0-4095
0-1000 : 0.0-100.0
0 : Standard specimen
chamber
0 : Manual stage
1 : 5 axis motor driven
stage
0 : High vacuum
1 : Low vacuum
6-270 : 6-270Pa
“S-3400N”
0-20
0-99
6 - 11
HV ON/OFF monitoring
Acceleration voltage
monitoring
Magnification. monitoring
W.D. monitoring
Focus course value
monitoring
Focus fine value monitoring
Probe current monitoring
Chamber type reading
Stage type reading
Vacuum mode reading
Vacuum value monitoring
Instrument name reading
Software version reading
Software revision reading
6.3
Specification of S-3400N External Communication (Option)
Table 6.3-2 Method Command
Command
Set value
SemCommInitialize
SetHVOn
0 : HV-OFF
1 : HV-ON
SetVacc
300-30000：0.330.0 kV
SetMag
5-300000：x5-x300k
SetWD
400-7000：4.0070.00 mm
Coarse：０-16383
Fine：0-4095
0-1000：0.0-100.0
SetObjLens
SetProbeCurrent
SetABC
SetAFC
GetStagePosition
6 - 12
Return
Contents
0 : Normal end
1 : Abnormal end
0: Normal
receiving
Excluding 0:
Abnormal
receiving
0: Normal
receiving
Excluding 0:
Abnormal
receiving
0 : Normal end
2 : Abnormal end
0 : Normal end
2 : Abnormal end
0 : Normal end
2 : Abnormal end
0 : Normal end
2 : Abnormal end
0: Normal
receiving
Excluding 0:
Abnormal
receiving
0: Normal
receiving
Excluding 0:
Abnormal
receiving
0: Normal
receiving
Excluding 0:
Abnormal
receiving
Initialize the
communication
HV ON/OFF setting
Acceleration
voltage
setting
Magnification.
setting
W.D. setting
Focus value setting
Probe current
setting
ABCC execute
AFC execute
5 axis position
monitoring
6.3.2
Command
Set value
Return
Contents
SetStagePosition
X：0100000000(nm)
100 nm Step
Y：0-50000000(nm)
100 nm Step
Z：500000070000000
(nm)
100000 nm
Step
T：-20000-90000
x1000(deg)
0.1deg Step
R：0-359900
x1000(deg)
0.1deg Step
0: Normal
receiving
Excluding 0:
Abnormal
receiving
5 axis moving
SetStagePositionXYR
X：0100000000(nm)
100 nm Step
Y：0-50000000(nm)
100 nm Step
R：0-359900
0: Normal
receiving
Excluding 0:
Abnormal
receiving
3 axis(XYR) moving
0: Normal
receiving
Excluding 0:
Abnormal
receiving
Home position
move
(Z=10 mm)
x1000(deg)
0.1deg Step
SetStageHomePosition
6 - 13
6.3
Specification of S-3400N External Communication (Option)
SetStageHomePosition2
SetVacuumMode
SetVacuum
SetSemCommand
0 : High vacuum
1 : Low vacuum
6 to 270：6 – 270
(Pa)
Command string
6 - 14
0: Normal
receiving
Excluding 0:
Abnormal
receiving
0 : Normal end
2 : Abnormal end
0 : Normal end
2 : Abnormal end
0: Normal
receiving
Excluding 0:
Abnormal
receiving
Home position
move2
(Z=65 mm)
Vacuum mode
setting
Vacuum value
setting
Extension
command
setting
6.3.2
Table 6.3-3 Event Command
Command
Return
Contents
HVOnChange
0 : HV-OFF
1 : HV-ON
300-30000：0.3-30ｋ
V
HV changing
VaccChange
HVOnFinished
VaccFinished
MagChange
WDChange
ObjLensChange
ProbeCurrentChange
ABCFiniished
AFCFinished
StagePositionChange
StagePositionFinished
VacuumModeChange
VacuumChange
SemCommandFinished
5-300000：x5-x300k
400-7000：4.0070.00mm
Coarse：０-16383
Fine：0-4095
0-1000：0.0-100.0
0 : High vacuum
1 : Low vacuum
6-270：6-270Pa
6 - 15
Acceleration voltage changing
Completion of HV setting
Completion of acceleration
voltage setting
Magnification changing
W.D. changing
Focus value changing
Probe current changing
Completion of ABCC
Completion of AFC
Stage position changing
Completion of stage move
Vacuum mode changing
Vacuum value changing
End of extension command
6.3
Specification of S-3400N External Communication (Option)
6.3.2.1
Initialize the Communication
(1) Check SEM status
Property
SEM status reading
IsActive
As Long
Read Only
0: Did not execute at SEM side
1: Ready
(2) SEM connection
Method
Initialize the communication
SemCommInitialize() as Long
Return
Comment:
6 - 16
0: Normal end
1: Abnormal end
After initialization, the Event that is
corresponding to each Property of SEM
condition is released.
6.3.2
6.3.2.2
Acceleration Voltage
(1) Monitoring/Setting of Acceleration voltage
Property
HV ON/OFF monitoring
HVOn
as Long
Read Only
0: HV–OFF
1: HV-ON
Acceleration voltage monitoring
Vacc
as Long
Read Only
0: HV–OFF
300 to 30000 :
0.3 – 30.0 (kV)
Method
HV ON/OFF setting
SetHVOn (HVON as Long) as Long
HVON
0: HV-OFF 1: HV-ON
Return
0: Normal receiving
Excluding 0: Abnormal receiving
Comment:
The method is finished at completion of
command analysis.
The completion of acceleration voltage
setting is notified by the HVOnFinished event.
If the return value is not 0, the HVOnFinished
event is not issued.
Please do not use other method until
receiving the HVOnFinished event.
6 - 17
6.3
Specification of S-3400N External Communication (Option)
Acceleration voltage setting
SetVacc ( Vacc as Long) as Long
Vacc
Return
Comment:
300 to 30000 : 0.3 – 30.0 (kV)
0.1kV unit at 10 to 30kV
0.01kV unit at 0.3 to 9.99kV
0: Normal receiving
Excluding 0: Abnormal receiving
The method is finished at completion of
command analysis.
The completion of acceleration voltage
setting is notified by the VaccFinished event.
If the return value is not 0, the VaccFinished
event is not issued.
Please do not use other method until
receiving the VaccFinished event.
Event
HV changing
HVOnChange (HVOn as Long)
HVOn
0: HV–OFF
1: HV-ON
Acceleration voltage changing
VaccChange (Vacc as Long)
Vacc
Comment:
6 - 18
0: HV–OFF
300 to 30000 : 0.3 – 30.0 (kV)
The event is not generated during the
voltage increasing or decreasing.
6.3.2
Completion of HV setting
HVOnFinished (ErrorCode as Long)
ErrorCode
0: Normal end
1: Impracticable
2: Abnormal end
Comment:
The completion message of SetHvOn
Method.
Completion of acceleration voltage setting
VaccFinished (ErrorCode as Long)
ErrorCode
0: Normal end
1: Impracticable
2: Abnormal end
Comment:
The completion message of SetVacc Method.
6 - 19
6.3
Specification of S-3400N External Communication (Option)
6.3.2.3
Magnification
(1) Monitoring /Setting of Magnification
Property
Magnification monitoring
Mag
As Long
Read Only
5 to 300000 : x5 – x300k
Method
Magnification setting
SetMag (Mag as Long) as Long
Mag
5 to 300000 :x5 – x300k
Effective digit: 3 figures
Return
0: Normal end
2: Abnormal end
Comment:
This method is finished after completion of
magnification setting.
Event
Magnification changing
MagChange (Mag as Long)
Mag
5 to 300000
6 - 20
: x5 – x300k
6.3.2
6.3.2.4
Working Distance (WD)
(1) Monitoring/Setting of WD
Property
W.D. monitoring
WD
as Long
Read Only
400 to 7000 : 4.00 – 70.00 (mm)
Method
W.D. setting
SetWD (WD as Long) as Long
WD
400 to 7000
: 4.00 – 70.00 (mm)
0.1mm unit
0: Normal end
2: Abnormal end
Currently setting by 0.01mm unit is not
possible.
The method is finished after completion of
W.D. setting.
Return
Comment:
Event
W.D. changing
WDChange (WD as Long)
WD
400 to 7000
6 - 21
: 4.00 – 70.00 (mm)
6.3
Specification of S-3400N External Communication (Option)
6.3.2.5
Focus Value
(1) Monitoring/Setting of Course, Fine
Property
Focus coarse value monitoring
ObjLensCoarse
as Long
Read Only
0 to 16383
Focus fine value monitoring
ObjLensFine
as Long
Read Only
0 to 4095
Method
Focus value setting
SetObjLens (ObjLensCoarse as Long, ObjLensFine as Long) as Long
ObjLensCoarse 0 to 16383
ObjLensFine
0 to 4095
Return
0: Normal end
2: Abnormal end
Comment:
This method is finished after completion of
ObjLens setting.
Event
Focus value changing
ObjLensChange (ObjLensCoarse as Long, ObjLensFine as Long)
ObjLensCoarse same as Property
ObjLensFine
same as Property
6 - 22
6.3.2
6.3.2.6
Probe Current
(1) Monitoring /Setting of probe current
Property
Probe current monitoring
ProbeCurrent
as Long
Read Only
0 to 1000 : 0.0 – 100.0
Method
Probe current setting
SetProbeCurrent (ProbeCurrent as Long) as Long
ProbeCurrent 0 to 1000 : 0.0 – 100.0
Return
0: Normal end
2: Abnormal end
Comment:
This method is finished after completion of
probe current setting.
Event
Probe current changing
ProbeCurrentChange (ProbeCurrent as Long)
ProbeCurrent 0 to 1000
6 - 23
: 0.0 – 100.0
6.3
Specification of S-3400N External Communication (Option)
6.3.2.7
Auto Functions
(1) ABCC
Method
ABCC execute
SetABC ( )
as Long
Return
Comment:
0: Normal receiving
Excluding 0: Abnormal receiving
This method is not completed until ABCC
finished.
The method is finished at completion of
command analysis.
The completion of ABCC is notified by the
ABCFinished event.
If the return value is not 0, the ABCFinished
event is not issued.
Please do not use other method until
receiving the ABCFinished event.
Event
Completion of ABCC
ABCFinished (ErrorCode as Long)
ErrorCode
Comment:
6 - 24
0: Normal end
1: Impracticable
2: Abnormal end
The completion message of SetABC method.
6.3.2
(2) AFC
Method
AFC execute
SetAFC ( )
as Long
Return
Excluding
Comment:
0: Normal receiving
0: Abnormal receiving
This method is not completed until AFC
finished.
The method is finished at completion of
command analysis.
The completion of AFC is notified by the
AFCFinished event.
If the return value is not 0, the AFCFinished
event is not issued.
Please do not use other method until
receiving the AFCFinished event.
Event
Completion of AFC
AFCFinished (ErrorCode as Long)
ErrorCode
Comment:
6 - 25
0: Normal end
1: Impracticable
2: Abnormal end
The completion message of SetAFC method.
6.3
Specification of S-3400N External Communication (Option)
6.3.2.8
Stage
(1) Stage information
Property
Chamber type reading
ChamberType
as Long
Comment:
Stage type reading
StageType
as Long
Read Only
0: Standard specimen chamber
Currently there is only standard specimen
chamber, but maybe other type chamber will
add in future.
Read Only
0: manual stage
1: 5 axes motor drive stage
(2) Monitoring /setting of stage position
Method
5 axis position monitoring
GetStagePosition (Byref X as Long, Byref Y as Long, Byref Z as Long,
Byref T as Long, Byref R as Long) as Long
X
0 to 100000000
: (nm)
100 nm Step
Y
0 to 50000000
: (nm)
100 nm Step
Z
5000000 to 70000000 : (nm)
100000 nm Step
T
-20000 to 90000
: x1000 (deg) 0.1 deg Step
R
0 to 359900
: x1000 (deg) 0.1 deg Step
Return
0: Normal receiving
Excluding
0: Abnormal receiving
Comment:
Read current position of X, Y, Z, T, R.
6 - 26
6.3.2
5 axis moving
SetStagePosition (X as Long, Y as Long, Z as Long, T as Long, R as Long) as
Long
X
0 to 100000000
: (nm)
100 nm Step
Y
0 to 50000000
: (nm)
100 nm Step
Z
5000000 to 70000000 : (nm)
100000 nm Step
T
-20000 to 90000
: x1000 (deg) 0.1 deg Step
R
0 to 359900
: x1000 (deg) 0.1 deg Step
Return
0: Normal receiving
Excluding
0: Abnormal receiving
Comment:
The stage is moved by 5 axis (X, Y, Z, T, R)
Setting.
The method is finished at completion of
command analysis.
The completion of SetStagePosition is
notified by the StagePositionFinished event.
If the return value is not 0, the
StagePositionFinished event is not issued.
The StagePositionChange event is
periodically generated while the stage is
moving.
Please do not use other method until
receiving the StagePositionFinished event.
If the sample size is selecting 50 x 5 mm, 30
x 10 mm or EBSP, it is not possible to move
by external communication.
So, StagePositionFinished event generate
the ErrCode 1 (Impracticable).
6 - 27
6.3
Specification of S-3400N External Communication (Option)
3 axis (XYR) moving
SetStagePositionXYR(X as Long, Y as Long, R as Long) as Long
X
0 to 100000000
: (nm)
100 nm Step
Y
0 to 50000000
: (nm)
100 nm Step
R
0 to 359900
: x1000 (deg) 0.1 deg Step
Return
0: Normal receiving
Excluding
0: Abnormal receiving
Comment:
The stage is moved by 3 axis (X, Y, R)
setting.
The method is finished at completion of
command analysis.
The completion of SetStagePositionXYR is
notified by the StagePositionFinished event.
If the return value is not 0, the
StagePositionFinished event is not issued.
The StagePositionChange event is
periodically generated while the stage is
moving.
Please do not use other method until
receiving the StagePositionFinished event.
If the sample size is selecting 50 x 5 mm,
30 x 10 mm or EBSP, it is not possible to
move by external communication.
So, StagePositionFinished event generate
the ErrCode 1 (Impracticable).
6 - 28
6.3.2
Home position moving
SetStageHomePosition () as Long
Return
Excluding
Comment:
6 - 29
0: Normal receiving
0: Abnormal receiving
Move to Z=10mm
The method is finished at completion of
command analysis.
The completion of SetStageHomePosition is
notified by the StagePositionFinished event.
If the return value is not 0, the
StagePositionFinished event is not issued.
The StagePositionChange event is
periodically generated while the stage is
moving.
Please do not use other method until
receiving the StagePositionFinished event.
If the sample size is selecting 50 x 5 mm,
30 x 10 mm or EBSP, it is not possible to
move by external communication.
So, StagePositionFinished event generate
the ErrCode 1 (Impracticable).
6.3
Specification of S-3400N External Communication (Option)
Home position moving 2
SetStageHomePosition2 () as Long
Return
0: Normal receiving
Excluding
0: Abnormal receiving
Comment:
Move to Z=65mm
The method is finished at completion of
command analysis.
The completion of etStageHomePosition2 is
notified by the StagePositionFinished event.
If the return value is not 0, the
StagePositionFinished event is not issued.
The StagePositionChange event is
periodically generated while the stage is
moving.
Please do not use other method until
receiving the StagePositionFinished event.
If the sample size is selecting 50 x 5 mm,
30 x 10 mm or EBSP, it is not possible to
move by external communication.
So, StagePositionFinished event generate
the ErrCode 1 (Impracticable).
6 - 30
6.3.2
Event
Stage position changing
StagePositionChange (X as Long, Y as Long, Z as Long, T as Long, R as
Long)
X, Y, Z, T, R
same as each items of GetStagePosition
Comment:
This event is generated when the stage
position changed by SEM-GUI control,
trackball control and external control.
Completion of stage move
StagePositionFinished (ErrorCode as Long)
ErrorCode
0: Normal end
1: Impracticable
2: Abnormal end
Comment:
The completion message of each stage
move method.
6 - 31
6.3
Specification of S-3400N External Communication (Option)
6.3.2.9
Vacuum Setting
(1) Vacuum mode
Property
Vacuum mode reading
VacuumMode
as Long
Read Only
0: High vacuum
1: Low vacuum
Method
Vacuum mode setting
SetVacuumMode (VacuumMode as Long) as Long
VacuumMode 0: High vacuum
1: Low vacuum
Return
0: Normal end
2: Abnormal end
Comment:
This method is finished after completion of
vacuum mode setting.
Event
Vacuum mode changing
VacuumModeChange (VacuumMode as Long)
VacuumMode same as Property
6 - 32
6.3.2
(2) Vacuum value
Property
Vacuum value monitoring
Vacuum
as Long
Read Only
6 to 270 : 6 – 270 (Pa)
Method
Vacuum value setting
SetVacuum (Vacuum as Long) as Long
Vacuum 6 to 270 : 6 – 270 (Pa)
Settable vacuum value
6, 10, 15, 20, 25, 30, 40, 50, 60, 70, 80, 90,
100, 110, 120, 130, 140, 150, 170, 200, 240,
270
Return
0: Normal end
2: Abnormal end
Comment:
This method is finished after completion of
vacuum value setting.
Event
Vacuum value changing
VacuumChange (Vacuum as Long)
Vacuum 6 to 270
6 - 33
: 6 – 270 (Pa)
6.3
Specification of S-3400N External Communication (Option)
6.3.2.10
Multi-purpose Command
Extension command setting
SetSemCommand (Command as String) as Long
Command
command string
Return
0: Normal receiving
Excluding
0: Abnormal receiving
Comment:
For extension command in future.
This method is finished after completion of
extension command setting.
The reply of this command is informed by
SemCommandFinished Event.
If the return value is not 0, the
SemCommandFinished event is not issued.
Please do not use other method until
receiving the SemCommandFinished event.
Event
End of extension command
SemCommandFinished (CmdReturn as String)
CmdReturn
return command string
6.3.2.11
Machine Information
(1) Instrument name
Property
InstructName as String
Read Only
“S-3400”
(2) Software version
Property
Software version
Version
as Long
Read Only
0 to 20
Software revision
Revision
as Long
Read Only
0 to 99
6 - 34
6.3.3
6.3.3
6.3.3.1
Programming
Example of Program
Private cSCOConnector
Private
cSCO
as SemCommunicationC. SemCommunicationConnector
as SemCommunicationC. SemCommunication
Set cSCOConnector = New SemCommunicationC . SemCommunicationConnector
Set cSCO = cSCOConnector. SemCommunication
Call cSCO. SemCommInitialize
‘Initialize
cSCO.Mag = 1000
cSCO.WD = 1500
‘Set Mag x1.0k
‘Set WD 15.00 mm
6 - 35
6.3
Specification of S-3400N External Communication (Option)
6.3.4
6.3.4.1
1.
2.
Preparation
Log-In as Administrator.
Close all programs including S3400N.
6.3.4.2
1.
2.
External Communication Setting Procedure (Setting of PC for S-3400N)
Component Registration
Insert the S-3400N installation CD-ROM in the CD-ROM drive.
Open My Computer (Fig. 6.3-2).
Fig. 6.3-2
3.
Double click on the CD-ROM Drive (Fig. 6.3-3) in the My Computer.
Fig. 6.3-3
4.
Browse to Reg.bat file and Double click the file.
Fig. 6.3-4
5.
Reg.bat
Click on OK when a window as shown below appears (Fig. 6.3-5).
Fig. 6.3-5
RegSvr32 Window
6 - 36
6.3.4
6.
Click on Yes when a window as shown below appears (Fig. 6.3-6).
Fig. 6.3-6
7.
Click on OK when a window as shown below appears (Fig. 6.3-7).
Fig. 6.3-7
8.
Registry Editor Window
Click on Yes when a window as shown below appears (Fig. 6.3-8).
Fig. 6.3-8
9.
Registry Editor Window
Registry Editor Window
Click on OK when a window as shown below appears (Fig. 6.3-9).
Fig. 6.3-9
Registry Editor Window
10. Remove the S-3400N installation CD from CD-ROM Drive.
6 - 37
6.3
Specification of S-3400N External Communication (Option)
6.3.4.3
1.
Security and DCOM Settings
Open Control Panel.
Fig. 6.3-10
2.
Control Panel Window
Click on Performance and Maintenance.
Fig. 6.3-11
Performance and Maintenance Window
6 - 38
6.3.4
3.
Click on Administrative Tools.
Fig. 6.3-12
4.
5.
Administrative Tools Window
Double click on Local Security Policy. (Shown in Fig. 6.3-13.)
Double click on Local Policies, and then Security Options. (Shown in Fig. 6.3-14.)
Fig. 6.3-13
Local Security Settings Window
6 - 39
6.3
Specification of S-3400N External Communication (Option)
6.
Double click on Network access:Let Everyone permissions apply to anonymous users.
(Shown in Fig. 6.3-14.)
Fig. 6.3-14
7.
Local Security Settings Window
Check Enabled, and then click on Apply. (Shown in Fig. 6.3-15.)
Fig. 6.3-15
Network Access:Let Everyone Permissions Apply to Anonymous Users
Window
6 - 40
6.3.4
8.
Confirm that Security Setting is Enabled for Network access:Let Everyone Permissions
Apply to anonymous users as shown in Fig. 6.3-16, and then close the Local Security
Settings window.
Fig. 6.3-16
9.
Local Security Settings Window
Double click on Component Services in Administrative Tools window. (Shown in
Fig. 6.3-17.)
Fig. 6.3-17 Administrative Tools Window
6 - 41
6.3
Specification of S-3400N External Communication (Option)
10. Double click on Component Services, then Computers. (Shown in Fig. 6.3-18.)
Fig. 6.3-18
Component Services Window
11. Right Mouse Click on My Computer and Select Properties from Action menu.
Fig. 6.3-19
Component Services Window
6 - 42
6.3.4
12. Click on Default Properties.
13. Set Default Authentication level to None.
click on Apply.
Confirm the setting as in Fig. 6.3-20, and then
For Service Pack 1
Fig. 6.3-20
For Service Pack 2
Default Properties Tab Window
14. Click on Default COM Security tab or COM Security tab.
15. Click on Edit Default under Access Permissions section.
For Service Pack 1
Fig. 6.3-21
For Service Pack 2
My Computer Properties Window
6 - 43
6.3
Specification of S-3400N External Communication (Option)
16. Click on Add button. (Shown in Fig. 6.3-22.)
Fig. 6.3-22
Access Permission Window
17. Click on Advanced button as shown below.
Fig. 6.3-23 Select Users or Groups Window
6 - 44
6.3.4
18. Click on Find Now button as shown below.
Fig. 6.3-24
Select Users or Groups Window
19. Select Everyone, and then click on OK.
Fig. 6.3-25
Select Users or Groups
6 - 45
6.3
Specification of S-3400N External Communication (Option)
20. Click on OK button as shown below.
Fig. 6.3-26
Select Users or Groups Window
21. Click on Edit Limits under Launch and Activation Permissions at Service Pack2.
For Service Pack 1
Fig. 6.3-27
For Service Pack 2
My Computer Properties Window
6 - 46
6.3.4
22. Select Everyone at Group of user names (at Service Pack 2).
Fig. 6.3-28
Launch Permission Window
23. Add check mark on Allow of Remote Launch and Remote Activation, and then click on OK
(at Service Pack 2).
Fig. 6.3-29
Launch Permission Window
6 - 47
6.3
Specification of S-3400N External Communication (Option)
24. Click on Apply, and then OK to quit.
For Service Pack 1
Fig. 6.3-30
For Service Pack 2
My Computer Properties Window
25. Double click on My Computer.
Fig. 6.3-31
Component Services Window
6 - 48
6.3.4
26. Right Mouse Click on SemCommuniC.SemCommunication under DCOM Config items
and select Property from Action menu. Fig. 6.3-32 is shown in Detail View. (Can be
selected via View Menu and then Details.)
Fig. 6.3-32
Component Services Window
6 - 49
6.3
Specification of S-3400N External Communication (Option)
27. Under General Tab, Set Authentication Level to None.
Fig. 6.3-33
Properties Window
28. Under Location Tab, confirm the setting as shown below (Fig. 6.3-34).
Fig. 6.3-34
Properties Window
6 - 50
6.3.4
29. Under Security Tab, Select Customize as shown in Fig. 6.3-35.
30. Click on Edit for Launch Permissions.
Fig. 6.3-35
Properties Window
31. Click Add button, if Everyone is not shown as below under Group or user names (follow
steps 15-19 to add Everyone). Click on OK to apply.
Fig. 6.3-36
Launch Permission Window
6 - 51
6.3
Specification of S-3400N External Communication (Option)
32. Click on Apply button.
Fig. 6.3-37
Properties Window
33. Choose Identity Tab and confirm the setting as shown in Fig. 6.3-38.
34. Click on OK to quit.
Fig. 6.3-38
Properties Window
6 - 52
6.3.4
35. Select SemControlC.SemControl and do procedure from 22 to 31.
Fig. 6.3-39
Component Services Window
36. Close window.
37. Turn off the Window Firewall at Service Pack 2.
38. Open the Control Panel from Start button.
Fig. 6.3-40
Control Panle Window
6 - 53
6.3
Specification of S-3400N External Communication (Option)
39. Click on Network and Internet Connections.
Fig. 6.3-41
Network and Internet Connection Window
40. Click on Windows Firewall.
41. Select Off (not recommended), and then click on OK.
Fig. 6.3-42
Windows Firewall Window
42. Close window and restart the S3400N PC.
6 - 54
6.3.4
6.3.4.4
Setup of the External Communication Option
External Communication I/F set up disk for the added option is inserted in the drive, and
Setup.exe in FD is double-clicked.
Select EDX Type, and click OK button.
Fig. 6.3-43
Option Install Window
Please the option must be added above, and logout from Administrator, log on again in the user
who usually uses (“S-3400N" is registered in default.), and use SEM.
6 - 55
6.4
CD Measurement Function (Option)
6.4
CD Measurement Function (Option)
6.4.1
Outline
6.4.1.1
CD Measurement Function
The CD Measurement function is designed for carrying out measurement of a critical-dimension
or angle at a specified position on a SEM image, and then displaying and recording the result.
The Measurement function comes in various modes - manual, automatic, successive
measurement, simultaneous width and pitch measurement, and so on. This allows selecting
and applying a measurement method from among these that is suitable for your purpose.
Figure 6.4-1 shows an example of the operating window for the CD Measurement function.
Fig. 6.4-1
6.4.1.2
Example of Operating Window for CD Measurement
CD Measurement Function Options
The following two CD measurement function options are available.
(1)
CD Measurement Function Option for SEM Main Unit
Permits measurement of images displayed on the Scanning Image window of the SEM
main unit.
(2)
CD Measurement Function Option for SEM Data Manager
Allows measurement of the images saved on the SEM data manager that is operated on a
different PC from the SEM data manager of the SEM main unit.
6 - 56
6.4.2
6.4.2
Specifications
6.4.2.1
Modes of CD Measurement
(1)
Manual Measurement
Distance (X, Y, D, width and pitch) between cursors placed by manual operation is
measured. An angle (T) between two cursor lines placed by manual operation is also
measured.
(2)
Automatic Measurement
The edges of specimens within a specified range are automatically detected and the
distance (X, Y, width and pitch) is measured. Either linear approximation method or
threshold level method is selectable for the edge detection.
6.4.2.2
Display of Measured Result
(1)
Measured result is superposed on an image in 5 digits (in µm unit).
(2)
A maximum of eight distances and/or angles can be displayed in succession.
(3)
A line profile can be displayed simultaneously with the measured result.
6.4.2.3
Recording/Saving of Measured Result
(1)
The measured result and line profile can be photographed on the displayed image
(function available only with SEM main unit).
(2)
The measured result and line profile can be saved in a file with the displayed image.
(3)
The measured result can be saved in a file of text format.
6.4.2.4
CD Measurement Accuracy (Reproducibility)
Within ±5% in automatic CD measurement after calibration with the following conditions fixed;
accelerating voltage, scan speed, magnification, Working distance, raster rotation angle,
measurement parameter, etc.
Within ±10% without calibration.
6 - 57
6.4
CD Measurement Function (Option)
6.4.3
Principle of CD Measurement
6.4.3.1
Edge Detection Algorithm in Auto Measurement
Figure 6.4-2 shows the cross section and secondary electron signal of the typical specimen.
As demonstrated in the figure, the intensity of secondary electron signal is higher at the edges of
the pattern. In auto CD measurement, edge positions are detected using this characteristic of
secondary electron signal.
Measured pattern
Secondary electron
signal line profile
Fig. 6.4-2
Secondary Electron Signal Waveform
There are two kinds of edge detection algorithms available; linear approximation method and
threshold level method. Determine which method to use with reference to the description below.
(1)
Linear Approximation Method
In this method calculation is made upon determining the intersecting point of baseline and
edges, and it is suitable when a standing wave is relatively sharp at the pattern edges.
In this case, it is required to specify a constant threshold level parameter for the same kind
of specimens.
L
Fig. 6.4-3
Linear Approximation Method
6 - 58
6.4.3
(2)
Threshold Level Method
In this method the variation of image signal at the edges is detected upon cutting off at a
desired threshold, and it is suitable when the sides of pattern edges are relatively linear.
L
Fig. 6.4-4
Threshold Level Method
6 - 59
6.4
CD Measurement Function (Option)
6.4.3.2
Linear Approximation Method
Explained below is the linear approximation algorithm.
Linear approximation
method
Image acquisition
p(n)
Preparation of profile
[Refer to 6.4.3.2 (2).]
s(n)
Edge search direction
Max. value dmax
d peek
Threshold level Th
Slope line detection
[Refer to 6.4.3.2 (3).]
d(n)
0
Slope line
s (n)
Baseline start point
Baseline area
Baseline detection
[Refer to 6.4.3.2 (4).]
Baseline
Length detection
[Refer to 6.4.3.2 (5).]
Edge position
End
Fig. 6.4-5
Linear Approximation Algorithm
6 - 60
6.4.3
(1)
Area Used for CD Measurement
The area in each on-screen box cursor is used for CD measurement. Figure 6.4-6 shows
the relationship between box cursor and measurement parameters. For "Design Value",
specify a distance (µm) between box cursors. The "entire measurement area" is
determined by a combination of parameters. For "Search Area", specify a number of
pixels.
When the distance between box cursors is changed using the mouse, it is automatically
reflected at "Design Value".
Design Value
Entire measurement
area
Search Area
(a) Cursor placement for CD measurement
parameters
Fig. 6.4-6
(2)
(b)
Relationship between cursor and
CD Measurement Area
S/N Ratio Improvement and Preparation of Profile
Figure 6.4-7 shows the relationship between a pattern under measurement and its
secondary electron signal. For improving the S/N ratio, take the following procedure:
First, as shown in Fig. 6.4-7 (a), detect secondary electron signals of "N" lines on the
pattern and then overlay these signals. After overlaying, a signal having little variation is
attained as indicated in Fig. 6.4-7 (b). If the number of overlaid lines is insufficient, a
signal having greater variation is provided as shown in Fig. 6.4-7 (c). For "Summing Line",
specify the number of lines to be overlaid as required.
Also, the S/N ratio can be improved by carrying out smoothing based on moving average
operation of secondary electron signals. For "Smoothing", specify a width of moving
average operation. Denoting the "Smoothing" value as N, the relationship between signal
overlaying "p(n)" and signal smoothing "s(n)" is defined by the following expression (6.4.1).
s(n) =
1 L
∑ p(n + i) .................................................... (6.4.1)
N i=−L
L = (N - 1)/2
In this manner, a signal profile can be prepared.
6 - 61
6.4
CD Measurement Function (Option)
“N” lines
(b)
Overlay area
(a)
Measured pattern
(c)
Fig. 6.4-7
(3)
Waveform after overlay
Poor S/N ratio of image
Measured Pattern and Secondary Electron Signals
Slope Line Detection
To detect a slope line using a profile, the following differentiation is performed on profile
"s (n)" as expressed below.
d(n) = s(n + M) - s(n - M)................................................. (6.4.2)
M = (N - 1)/2
N: Differential size
Then, a peak position having a higher value than "Th" given by the following equation is
determined.
Th =
dmax × T
100
................................................................ (6.4.3)
dmax : Max. value of differentiated profile
T : Threshold (%)
If multiple peaks d (n) appear as shown in Fig. 6.4-5, the first peak position higher than
"Th" in searching in the specified direction is defined as the target peak position.
To reverse the search direction, then reverse the "edge search direction" indicated in the
figure.
A slope line is tangent to the peak position determined above on the profile "s (n)".
6 - 62
6.4.3
(4)
Baseline Detection
The baseline is a straight line having no slope, which is determined by the peak position
attained before, the "baseline start point" and "baseline area".
The start point of the baseline is located outside or inside the peak position, and it
corresponds to a position of data having differential coefficient "dbase" in the following
expression of profile differentiation.
dbase =
dpeak
|B|
dpeak :
B
:
.............................................................. (6.4.4)
Differentiation coefficient of peak position
Baseline start point (1, 2, 4, 8)
To determine the baseline, averaging is performed on a profile area included in a range
specified with "baseline area". For the "baseline start point", it is allowed to enter any one
of 1, 2, 4 and 8.
(5)
Length Detection
For length detection, an intersecting point of slope line and baseline is determined.
Then an actual pattern dimension is calculated using the intersecting point data,
magnification and correction coefficient.
6.4.3.3
Threshold Level Method
Described next is the threshold level algorithm. In the same manner as for the linear
approximation method, a smoothed profile "s (n)" is obtained. Maximum and minimum values
of the profile are determined in the edge detection area. Then an intersecting point with "Th"
given by the following expression is defined as the edge position.
Th =
smax - smin
100
× T + smin .............................................. (6.4.5)
smax : Max. value of profile in the vicinity of edge
smin : Min. value of profile in the vicinity of edge
T : Threshold (%)
6 - 63
6.4
CD Measurement Function (Option)
6.4.3.4
Measurement Accuracy and Error Factors
Following is a description on measurement accuracy and error factors.
(1)
Measurement Reproducibility and Absolute Dimensional Accuracy
In CD (critical dimension) measurement, the reliability of measured results can be evaluated in
terms of variation of measured values and accuracy of mean value obtained by measuring the
same dimension repeatedly. The variation of measured values is represented by measurement
reproducibility defined by 3 σ (dispersion). On the other hand, absolute dimensional accuracy
can be evaluated in terms of difference in measurements between mean values (statistical mean
values) and true values.
CD measurement function of the S-3400N provides a calibration function and the measured
result can be calibrated so that measured values (mean values) of a standard sample such as a
microscale agree with known dimensions.
The dimensional accuracy of measured values after calibration is determined by the dimensional
accuracy of the standard sample itself. Therefore, as long as calibration is made using a
standard sample of sufficiently high reliability, the reliability of measurement data finally depends
on measurement reproducibility.
Although the measurement reproducibility depends on a number of factors described in the next
section, even if all the factors are temporarily ideal, one must be careful about measurement
errors caused by pixel size or resolution when the measured object is extremely small (a thin film
of a few 10 nm thickness, for instance).
(2)
Factors Determining Measurement Reproducibility, and Methods of Improvement
(a) Factors Determining Measurement Reproducibility
Measurement reproducibility is affected by magnetic hysteresis of the objective lens,
reproducibility of focus, stability of image contrast (for instance, a stable contrast is
difficult to obtain when there is charge-up or specimen damage), floor vibration or
external magnetic field variation at the installation site, and other factors. One must
also be careful about dimensional change of samples due to contamination or sample
damage in measurement of very fine pattern widths. Also, upon changing the
instrument operating parameters (viewing parameters) such as accelerating voltage or
working distance during a measurement, the magnification accuracy may vary and
measurement reproducibility may decrease.
6 - 64
6.4.3
(b) Methods for Improving Measurement Reproducibility
It is recommended to use the SEM under fixed operating conditions (magnification,
accelerating voltage, probe current, raster rotation angle, working distance, etc.) in CD
measurement. If measurement under varied conditions is unavoidable, then
calibration should be made under each of the conditions. A number of calibration
conditions are registered in the CD measurement function, and these can be selected
either automatically or by specifying a registration No.
It is also recommended to measure dimensions in the X (horizontal) direction for
images acquired by slow scan. Although measurement is also possible in the Y
(vertical) direction, accuracy is lower than that in the X direction for the reasons given
below.
Since image acquisition time is longer in Y direction measurement, external magnetic
field may fluctuate during the acquisition and cause specimen drift, resulting in
measurement error. This error is more conspicuous as the measured dimension
becomes smaller.
To measure dimensions in the Y direction accurately, it is recommended to rotate the
image 90° by means of raster rotation and measure the dimensions as X-direction
ones. Note that since the magnification accuracy of the instrument is also dependent
on the raster rotation angle, it is important to calibrate the magnification at each raster
rotation angle to permit high-accuracy measurement.
In order to minimize the effect of magnetic hysteresis of the objective lens and improve
the focus reproducibility (working distance), it is essential to set the sample Z position
and focus in the following procedure.
• Set the working distance to be used for measurement on the Operation panel Cond. tab.
• Adjust Z-axis control of the stage to obtain an approximate focus (so that the
image profile can be identified at a few thousand times magnification).
• After focus adjustment, click the DeGauss button on Setup dialog window Optics tab and focus again.
It is recommended to set magnification once after making final focus
adjustment. It is because focusing operation will cause small fraction to
magnification value even when indication do not have fraction. It may cause
discrepancy with calibration condition.
The abovementioned procedure allows measurement reproducibility (3σ) of 2% or on
the order of 10 nm or less when the effects of sample damage, charge-up and
installation conditions are not serious. Note that the 3σ value depends on
measurement dimensions and image magnification.
6 - 65
6.4
(3)
CD Measurement Function (Option)
Measurement Error Caused by Pixel Size or Image Resolution
Described in this section are the measurement errors caused by pixel size or SEM image
resolution. These errors are more conspicuous as the measured dimension becomes smaller.
(a) Measurement Error Caused by Pixel Size
In the CD measurement function, dimensions are measured by counting a number of
pixels included within measurement cursors in the acquired SEM image of 640 × 480
pixels. The minimum dimension for measurement (measurement resolution)
therefore coincides with pixel size in the image.
As shown in Fig. 6.4-8, if the number of pixels included within cursors is N and the
measured dimension is L, the true dimension L0 will be in the following range:
1
1
1 − ⋅ L < L 0 < 1 + ⋅ L .............................................. (6.4.6)
N
N
In other words the measured dimension includes error of ±L/N relative to true value L0.
When the number of pixels within cursors is 10 and measured dimension is 1 µm, for
example, the true value of dimension will be in the range of 0.9 to 1.1 µm. Therefore
the measured dimension includes error of ±10% in this case. However, if
measurement is made by 100 pixels at ten times higher magnification on the same
dimension (1 µm), the true dimensions will be in the range of 0.99 to 1.01 µm and the
error will decrease down to ±1%.
The number of pixels within cursors is dependent on dimensions and image
magnification. Higher magnifications allow more pixels for measuring dimensions,
and therefore the measurement error caused by pixel size decreases at higher
magnifications. But the effect of resolution in SEM image upon measurement error
becomes more important at higher magnifications. The effect of installation
conditions (floor vibration and stray magnetic field), sample damage and
contamination will also be important at higher magnifications. The highest
magnification which is suitable for measuring dimensions is limited for these reasons.
L = N × Lp
Measurement cursor
Lp
・・・・・・・・・・・・
Pixel
L1 = (N - 1) × Lp
L2 = (N + 1) × Lp
L = L0 (1 ± 1/N)
L : Measured value
LP : Pixel size
L0 : True dimension (L1 < L0 < L2)
Fig. 6.4-8
Measurement Error Caused by Pixel Size
6 - 66
6.4.3
(b) Measurement error Caused by SEM Image Resolution
Image resolution can be regarded as the minimum dimension where sample
information can be reproduced in a form of brightness (contrast) change. Thus there
is no meaningful contrast when a dimension is smaller than the image resolution.
Such an area of no contrast is equivalent to a pixel because there is also no contrast
in a pixel area. Therefore the effect of resolution upon measurement error is similar
to that of pixel size described above, and image resolution finally determines the
measurement error at higher magnifications.
(c) Measurement Error in Consideration of Both Pixel Size and Image Resolution
Measurement errors caused by both pixel size and image resolution are determined by
the effective pixel size.
Leff
Px which is approximated by the following equation:
2
2
Leff
Px = LP + LR ................................................................... (6.4.7)
Here LP and LR represent pixel size and image resolution, respectively. If image
resolution is 1.5 nm and measured dimension is L at a magnification of 150 k×, for
example, measured dimension L includes error of ±1.95 nm since the effective pixel
size ( Leff
Px ) is given as 1.95 nm by resolution (1.5 nm) and pixel size (1.25 nm at 150
k×).
Figure 6.4-9 shows the relation between measured dimensions and measurement
error (theoretical value) at various magnifications. Measurement error in the figure is
caused only by pixel size and image resolution (assumed to be 1.5 nm). Other
measurement reproducibility factors are not included. Assuming the upper limit of
measurement magnification is 150 k× and measurement error is suppressed to within
±2%, the minimum theoretical dimension measurable is about 0.1 µm.
6 - 67
CD Measurement Function (Option)
20
Magnification:
150 k×
Magnification:
50 k×
15
Measurement error (%)
6.4
Magnification:
20 k×
10
5
0
0.01
1
0.1
Measured dimension [µm]
Fig. 6.4-9
Measured Dimension vs Measurement Error
(theoretical) at Various Magnifications
6 - 68
10
6.4.4
6.4.4
Description of Windows Used in Measuring Operation
Following is a description of the windows used in CD measurement.
6.4.4.1
Starting CD Measurement Function
on the tool
For starting CD measurement on S-3400N GUI, click CD measurement icon
button area of the Operation panel or select CD Measurement command in Analysis menu.
To start on SEM Data Manager, click Measure icon
or select CD Measurement command
in Processing menu.
6.4.4.2
Images for Measurement
On the S-3400N GUI, use observing image for CD measurement.
Measurement is carried out in the frozen image. When you start measurement while image is
scanning, scan will stop at the end of the frame and then, measurement cursor will be shown.
Use Full or Small screen mode. Full screen mode results more accurate measurement in such
a condition where error caused by pixel size limitation is dominant.
On the SEM Data Manager, measurement is carried out on an image on the display area.
NOTICE: (1) Use image size of 2560 x 1920 pixels or smaller. Measurement is disabled for
5120 x 3840 pixels images.
(2) In automatic measurement mode, processing time for finding edges depends on
the image size. Larger images need longer processing time.
It is recommended to use 1280 x 960 image size for measurement.
(3) Showing line profiles also needs processing time. For higher throughput, it is
recommended not to show line profiles (uncheck Profile check box).
6 - 69
6.4
CD Measurement Function (Option)
6.4.4.3
CD Measurement Window
Use this window to set measurement and calibration conditions and to execute measurement.
(1)
(2)
(3)
(4)
(5)
(6)
(7)
(9)
(19)
(8)
(10)
(11)
(12)
(13)
(15)
(14)
(16)
(17)
(18)
Fig. 6.4-10
(1)
CD Measurement Window
Condition Combo Box
Select one of the registered measurement conditions.
registered measurement condition No. and a caption.
Clicking the button displays a
(2)
Edit Button
Opens the Condition window for editing and registering the measurement conditions.
(3)
Save at Exit Check Box
Registers the measuring conditions set at the end of the measurement function.
Setting cannot be made when condition registration is locked.
6 - 70
6.4.4
(4)
Type of Measurement
Specify a type of measurement.
(a) Standard button
Select Standard for a single dimension measurement in X or Y direction or angle.
(b) W&P button
Select this button for simultaneous width and pitch measurement.
(c) Multiple check box
Click this for setting successive measurements.
been selected.
(d) Profile check box
Click this for displaying a line profile.
Auto.
(5)
This is usable when Standard has
This is settable when measurement mode is
Mode Selection
Select the measurement mode.
(a) Auto button
Selects auto measurement.
(b) Manual button
Selects manual measurement.
(6)
Measurement Direction
Select a measurement direction.
(a) X button
Selects measurement in X (horizontal) direction.
(b) Y button
Selects measurement in Y (vertical) direction.
(c) Angle button
Selects an angle measurement.
Manual.
(7)
This is selectable when measurement mode is
Edge Detect Direction
Select an edge detect direction of the cursor box that specifies the position including edge
to be detected, when X or Y has been selected as the measuring direction. This is
selectable when measurement mode is Auto. The icon changes with the type of
measurement and measurement mode. When Angle measurement has been selected,
then select the circle cursor for the side to be measured.
6 - 71
6.4
CD Measurement Function (Option)
(8)
Set Button
Displays the measurement cursor. The shape of measurement cursor varies with the type
of measurement and measurement mode.
(9)
Measure Button
Executes the CD measurement.
(10) Cursor Color Indication
Specify a color for the measurement cursor. Color changes in the order of white, red,
green, yellow, blue, violet and light blue at each click of the button.
(11) Done/Uncalib Indication
When the present operating condition of SEM matches the selected calibration condition,
Done is indicated together with a calibration No. If the conditions do not match, Uncalib
will be indicated.
(12) Measured Data Box
Displays the SEM conditions at measurement and the measured results.
(13) Comment Box
Enter a comment here.
measured result.
The entered comment is displayed and saved together with the
(14) Cancel Button
Deletes the measured result display.
result will be deleted.
In the case of successive measurements, the final
(15) Save Button
Saves the measured result in a text file.
Clicking the button displays the File Save window.
(16) Calibration Combo Box
Selects a calibration condition. When Auto Select is selected, a calibration condition
which matches the present operating condition will be selected automatically.
(17) Edit Button
Opens the Calibration window for registering a calibration.
(18) Close Button
Terminates the measurement.
results are saved.
The File Save window won't appear unless measured
(19) Zoom Check Box
When it is checked, a magnified image is shown in an independent window. It is useful for
fitting cursor to measured edge in manual measurement mode.
6 - 72
6.4.4
6.4.4.4
Measurement Condition Window
This is used to edit the measurement conditions.
(1)
(2)
(3)
(4)
(5)
(6)
(7)
(8)
(9)
(10)
(13)
(11)
Fig. 6.4-11
(12)
Measurement Condition Window
6 - 73
6.4
CD Measurement Function (Option)
(1)
Entry No. combo Box
Select a registration No. for measurement conditions. A maximum of 16 measurement
conditions can be registered. An asterisk (*) appears at the right of an already registered
No.
(2)
Lock Check Box
Put a check here to inhibit change of the conditions.
(3)
Caption Box
Enter a caption for the registered No.
characters.
(4)
Entry can be made in a maximum of 16 half-size
Type
Select a measurement type.
(a) Standard button
Select Standard for a single dimension measurement in X or Y direction or angle.
(b) W&P button
Select this button for simultaneous width and pitch measurement.
(c) Multiple check box
Click this for setting successive measurements.
been selected.
(d) Profile check box
Click this for displaying a line profile.
Auto.
(5)
This is settable when measurement mode is
Mode Selection
Select the measurement mode.
(a) Auto button
Selects auto measurement.
(b) Manual button
Selects manual measurement.
(6)
This is usable when Standard has
Measurement Direction
Select a measurement direction.
(a) X button
Selects measurement in X (horizontal) direction.
(b) Y button
Selects measurement in Y (vertical) direction.
6 - 74
6.4.4
(c) Angle button
Selects an angle measurement.
Manual.
This is selectable when measurement mode is
(7)
Edge Detect Direction
Select an edge detect direction of the cursor box that specifies the position including edge
to be detected, when X or Y has been selected as the measuring direction. This is
selectable when measurement mode is Auto. The icon changes with the type of
measurement and measurement mode. When Angle measurement has been selected,
then select the circle cursor for the side to be measured.
(8)
Parameters
Select parameters for the auto measurement.
(a) Measurement Point combo box
Enter a numeric value for number of measurement points. When "2" or higher is
specified, measurement is performed according to the specified number of
measurement points while shifting the scan line at Multi Pitch (described below).
Then the average value (Width), maximum value (Max), minimum value (Min) and
standard deviation (3 Sigma) are indicated.
(b) Measurement Pitch combo box
Specify a scan-line pitch to be used for averaging signal profiles (line profiles)
corresponding to scan lines. If "2" is specified, for instance, line profiles are taken
every other scan line according to the number of summing lines (described below) to
provide one profile for edge detection. This parameter is specifiable in a range of 1 to
64.
(c) Summing Line combo box
According to the specified number of scan lines, line profiles are averaged for edge
detection. If "8" is specified, for example, line profiles corresponding to eight scan
lines are averaged. As the number of summing lines increases, an adverse effect of
noise is reduced. This parameter is specifiable in a range of 1 to 64.
(d) Multi Pitch combo box
Specify an interval of Measurement Point when two or more measurement points are
used. This parameter is specifiable in a range of 2 to 64 represented in unit of
number of scan lines.
(e) Smoothing combo box
This parameter indicates a factor of line profile smoothing on a scan line. It is allowed
to select 1, 3, 5 or 7 represented in unit of number of pixels in smoothing. The
smoothing can reduce noise contained in the SEM image signal (line profile). Using
signal profile data obtained through the Summing Line function (described above) and
the Smoothing function, edge detection is carried out in the specified method (linear
approximation or threshold level method).
6 - 75
6.4
CD Measurement Function (Option)
(f) Design Value combo box
Specify an interval between cursors (two boxes) for CD measurement.
This parameter is specifiable in a range of 0.1 to 200 µm.
(g) Design Pitch combo box
Specify a pitch in the case of simultaneous width and pitch measurement.
This parameter is specifiable in a range of 0.1 to 200 µm.
(h) Search Area combo box
Specify a width of cursor box (edge detection area). This parameter is specifiable in
a range of 16 to 160 represented in unit of number of pixels.
NOTICE: In auto CD measurement, the vertical dimension (length) of cursor box indicates a
range of measurement, which varies according to the parameter settings mentioned
above and also according to the size of images under measurement. The vertical
length of box cursor is defined by the following expression; (Measurement Point - 1) ×
(Multi Pitch) + [(Summing Line) × (Measurement Pitch)] (unit: number of scan lines).
It is not allowed to exceed 480 scan lines in parameter input. Even if each parameter
is specified within its allowable range, therefore, parameter setting may not be
permitted in some combinations.
Measurement pitch
(Measurement Pitch = 2)
Fig. 6.4-12
Parameters vs Measurement Lines (parameters are examples)
6 - 76
6.4.4
NOTICE: Relation between the size of image and the size of cursor box
In case using the CD measurement function on live or frozen SEM images, the size of
image is 1280 x 960 pixels in Full Screen mode and 640 x 480 pixels in Small Screen
mode. The size of pixel itself is the same for both screen modes. The same
parameter set results the same cursor box size for both screen modes.
Measurement is applied to the image displayed on the image screen, even when it is
an image captured with larger image resolution, i.e. 2560 x 1920 pixels.
In the other hand in case using the CD measurement function on the SEM Data
Manager, measurement is applied to the original image, not to the present displayed
image. Using the larger size, i.e. 2560 x 1920 pixels image will results smaller
measurement error caused by pixel size limitation (refer to 6.4.3.4) even the display
size is small, i.e. 640 x 480 pixels.
And it results different size of cursor box on different size of image for the same
parameter set. For example the cursor box size on 2560 x 1920 pixels images is 4
times smaller than that on 640 x 480 pixels images if the same parameter set is used.
It may be reasonable because if the same measurement error caused by pixel size
limitation is expected, the larger image size allows to include wider specimen area
using lower magnification.
But if you prefer to use similar cursor box size for images with different size, it is
recommended to set and register parameter set for each of image size, and select a
parameter set to fit to the present image size under measurement.
The vertical length of box cursor is limited to 480 lines even when using 1280 x 960 or
2560 x 1920 images. It is because too eliminate to result too long processing time
which may caused by too much lines to be calculated.
6 - 77
6.4
(9)
CD Measurement Function (Option)
Edge Detection Area
Set parameters specific for each edge detection method.
(a) Linear Approximation button
Specifies the Linear Approximation method for auto edge detection.
four parameters are effective for this method.
The following
(b) Threshold Level combo box
Specify a threshold value to be used for linear approximation. This parameter is
selectable in a range of 5 to 95. For example, if there are standing waves in the
pattern under measurement, multiple steps may be produced at the edge part,
resulting in improper edge detection. To prevent this, adjust the threshold value
properly for normal edge detection.
In the linear approximation method, a slope line is determined by identifying a local
peak (maximum value) on the signal gradient in the edge detecting direction. In this
step of operation, if there are multiple gradient peaks (local gradient peaks), a slope
line is determined using the first local gradient peak that is larger than an input
threshold value, with respect to the maximum value "100" of the signal gradient in the
edge part. Therefore, in the case of a signal waveform (line profile) having just one
peak in the signal gradient, edge detection is performed independent of the specified
threshold value.
(c) Differential Size combo box
This parameter is used for signal gradient calculation (coefficient of signal
differentiation) in linear approximation. Specify "5" in common practice. If variation
in measured value data is appreciable due to noise contained in the image, it is
advisable to specify "7". One of numeric values 3, 5 and 7 is selectable.
(d) Base Line Start Point combo box
This parameter is used to determine the start point of signal baseline readout in linear
approximation. Using a position specified for Base Line Start Point, a baseline is
determined according to an average value in a signal level range specified for Base
Line Area (described below). For Base Line Start Point, one of the following four
values is selectable; 1, 2, 4 and 8. The smaller this value, the nearer the start point of
baseline reading is brought to the maximum gradient position of the signal, thereby
shifting the baseline upward.
(e) Base Line Area combo box
This parameter indicates a range of baseline reading in linear approximation. One of
the following four values is selectable; 4, 8, 16 and 32 (represented in unit of number
of pixels).
(f) Threshold button
Specifies the threshold level method for auto edge detection.
6 - 78
6.4.4
(g) Threshold Level combo box
Specifies a threshold value to be taken in the threshold level method. A numeric
value may be input with respect to a difference of "100" between minimum and
maximum in signal variation on the edge part. If "50" is specified, for instance, the
intermediate threshold level is used. This parameter is selectable in a range of 5 to
95.
(10) Apply Button
Applies the form of cursor under display according to the set value.
registration No. of the measurement conditions.
(11) Save Button
Saves the present settings under a different registration No.
registration No. of the save destination appears.
Also saves the
A window for specifying the
(12) Del Button
Deletes the registration.
(13) Close Button
Closes the Measurement Mode window. When measurement parameters have been
edited, a message asking whether you will save the contents appears.
6 - 79
6.4
CD Measurement Function (Option)
6.4.4.5
Calibration Window
This is used to carry out calibration.
(1)
(2)
(3)
(5)
(4)
(6)
(13)
(7)
(8)
(9)
(12)
(10)
(11)
Fig. 6.4-13
(1)
Calibration Window
Entry No. Combo Box
Specify a No. for registering the calibration.
already registered No.
An asterisk (*) appears at the right of an
(2)
Caption box
Enter a caption for identifying the calibration with up to 16 characters.
(3)
Calibration Condition Box
Indicates the SEM conditions at calibration.
6 - 80
6.4.4
(4)
Set Button
Displays a measurement cursor for calibration in accordance with the measurement
parameters.
For calibration using manual mode, align the measurement cursor in both X, Y directions
with a position of known dimensions on the screen. For calibration in auto mode, adjust
so that the cursor box encloses the edges of the pattern under measurement.
(5)
Measure button
Measures the distance specified by the measurement cursors.
(6)
Multiple measurement setting
Use for measuring and averaging multiple points for the measured data.
(a) Multi checkbox
When the box has been checked, multiple measured data are averaged and indicated
in the Average box by each measurement. The number of measurement is shown in
the right side box.
If it is not checked, only the latest measured data is used.
(b) Cancel and Reset buttons
Cancel deletes the latest measured data, and Clear deletes all measured data.
(c) Reject Max Min check box
When the box has been checked, maximum and minimum data are rejected for
averaging calculation. Maximum and minimum data are rejected when number of
measurement is 5 times or more.
(7)
Correct Value Box
Enter a calibration value.
(8)
Calibrate X/Y Button
Calculates a calibration coefficient.
(9)
Calibration Factor Box
Displays the calculated calibration factor.
The calibration factor "C" is calculated by the following equation:
C = Correct Value / Measured Value (6.4.8)
(10) Apply Button
Registers the calibration result.
(11) Delete Button
Deletes the registration of calibration result.
6 - 81
6.4
CD Measurement Function (Option)
(12) Close Button
Closes the Calibration window.
(13) Measured Value indication
Displays the measured result.
When the Multi checkbox is not checked, the latest measurement result is indicated in the
Average box.
When the Multi checkbox is checked, Average, 3 Sigma, Max and Min value is calculated
and indicated by each measurement operation.
6.4.5
Operation
6.4.5.1
Flow of Measuring Operation
Following is the general flow of measuring operation.
•
•
•
•
•
•
Display of SEM image
Start of CD measurement function
Setting of measurement parameters
Setting of calibration
Execution of measurement
Saving of measured results
Details of each operation are described in the following.
6.4.5.2
Display of SEM Image
(1)
In the case of the SEM main unit, display a SEM image on the Scanning Image window by
the usual SEM operation. Do this either by setting the Run/Freeze button to Freeze or by
capturing an image with the Capture button.
(2)
In the case of the SEM data manager, start up the SEM data manager and specify the
image to be subjected to measurement from the file list or thumbnail.
NOTICE: (1) Use image size of 2560 x 1920 pixels or smaller. Measurement is disabled for
5120 x 3840 pixels images.
(2) In automatic measurement mode, processing time for finding edges depends on
the image size. Larger images need longer processing time.
It is recommended to use 1280 x 960 image size for measurement.
(3)
Showing line profiles also needs processing time. For higher throughput, it is
recommended not to show line profiles (uncheck Profile check box).
6 - 82
6.4.5
6.4.5.3
(1)
Start of CD Measurement Function
In the case of the SEM main unit, click the CD Measurement button
on the tool
button area of the Operation panel or select Measurement in the Analysis menu.
To start on the SEM Data Manager, use Measure button
CD Measurement menu command.
The CD Measurement window will open.
Fig. 6.4-14
CD Measurement Window
6 - 83
on the tool bar or Analysis -
6.4
CD Measurement Function (Option)
6.4.5.4
(1)
Setting Measurement Parameters
Selecting Registered Measurement Parameters
(a) Measurement parameters can be saved and then called out later to allow efficient
measurement of a number of samples under predetermined parameters.
(b) To call out registered parameters, select the desired parameters from those displayed
in the Entry No. box.
Note that the cursor box size for automatic measurement is different for different image size
even when using the same parameter set. Refer to notice in < 6.4.4.4 Measurement Condition
Window>.
(2)
Editing/Saving Measurement Parameters
To edit and save measurement parameters, click the Condition Edit button to open the
Measurement Condition window.
Fig. 6.4-15
Measurement Condition Window
6 - 84
6.4.5
(a) Specify a registration No. according to the setting of the Entry No. combo box.
(b) Enter a caption in the Caption box that will facilitate calling out measurement
parameters.
(c) Set the type of measurement and measurement mode corresponding to the
measurement to be executed.
(d) For auto measurement, set the measurement parameters or edge detection
parameters.
(e) Click the Apply button to apply the set measurement parameters to the process.
the same time the parameters are saved under the set registration No.
At
(f) By putting a check at the Lock button, editing of the measurement parameters can be
inhibited.
(g) The Save button is used for calling out and editing the saved measurement
parameters and then saving them under a new registration No. Clicking this button
opens a window for specifying a registration No.
Fig. 6.4-16
Measurement Condition Save Window
Select a save destination No. and then click Save button.
(h) For deleting the saved measurement parameters, click the Delete button.
(i)
When parameter editing and saving are finished, click the Close button to close the
Measurement Condition window.
6 - 85
6.4
CD Measurement Function (Option)
6.4.5.5
Calibration
The accuracy of measured values depends on the accuracy of image magnification unless
calibration has been made. Factors that affect the accuracy include accelerating voltage, scan
speed, magnification setting, working distance, raster rotation angle and others. By fixing these
parameters and conducting calibration with a sample of known dimensions, measurement can
be made with an even higher accuracy.
(1)
Using Registered Calibration factor
Calibration is specified by means of the Calibration selector box on CD Measurement window.
The modes of calibration are selectable from the following.
(a) Auto Select
Automatically selects calibration that matches the measurement parameters. When a
number of calibrations have been registered under the same parameters, the
calibration registered at the maximum Entry No. among the relevant parameters will
be selected.
(b) Entry No.
Calibration is applied only when the SEM parameters of the specified calibration match
the SEM parameters of the object image. Specifying an Entry No. displays the
corresponding SEM parameters. An Entry No. for which calibration is not registered
cannot be specified.
(c) Not Apply
Calibration is not applied.
(2)
Applied Parameters for Calibration
Calibration is made when the present SEM parameters are within the following ranges as
compared with the calibrated condition.
•
•
•
•
•
•
•
Accelerating voltage
Viewing magnification
Working distance
Detector
Probe Current
Vacuum
Scan speed
:
:
:
:
:
:
:
Same as calibrated condition
±1% of calibrated mag.
±0.5mm of calibration working distance
Same as calibrated condition
±1.0 of calibrated condition
Same as calibrated condition
Same as calibrated condition
6 - 86
6.4.5
(3)
Carrying out Calibration
(a) With the CD measurement function of the SEM main unit, set a sample for calibration
into the SEM and set the instrument conditions to those actually used for
measurement.
Since the value of working distance is calculated from the focused objective lens
current, adjusting the focus causes a variation in the working distance value. Select a
working distance value in the WORKING DISTANCE block of the Operation panel Cond tab and then, adjust the Z axis of the specimen stage to obtain a focus. After
obtaining a coarse focus with the stage Z control, carry out fine focusing in the usual
procedure. Finally set magnification again, because focusing operation will cause a
small fraction to magnification value eve if it is not shown in the magnification
indication. It may cause discrepancy with measurement condition.
NOTICE: If the focus varies significantly, the objective lens yoke is affected by magnetic
hysteresis and causes a reduction in measurement reproducibility.
After a large change in the focus, click the DeGauss button on the Setup dialog
window - Optics tab to eliminate the effect of hysteresis, then adjust the focus and
astigmatism correction again.
You can use F2 key as the hot-key for degaussing.
DeGauss button
Fig. 6.4-17
DeGauss Button
(b) Set the desired visual field and magnification for the observed SEM image, then set
the Run button to Freeze or use the Capture button to freeze the image.
6 - 87
6.4
CD Measurement Function (Option)
(c) In measurement with the SEM data manager, use an image under the same SEM
parameters as the image to be measured.
(d) Set measurement parameters such as measurement mode and type of measurement
on the CD Measurement or Measurement Condition window. When Manual
measurement mode is selected, calibration can be performed in both X and Y-axis
directions.
For calibration in the Auto measurement mode, parameters should be set beforehand
on the auto measurement parameter setting window.
(e) Click the Calibration Edit button on the CD Measurement window to open the
Calibration window.
Fig. 6.4-18
Calibration Window
(f) Specify a No. to be registered in the Entry No. combo box.
(g) Enter into the Caption box a caption that will facilitate call-out.
6 - 88
6.4.5
(h) Click the Set button to display the measurement cursor for calibration according to the
measurement parameters. For calibration in Manual mode, align the measurement
cursors (both X and Y directions) with a position of known dimensions on the screen.
For calibration in Auto mode, make sure the cursor box encloses the edges of the
measurement pattern.
(i)
Click the Measure button.
Measured Value box.
The measured result prior to calibration appears in the
(j)
Enter a calibration value into the Correct Value box.
(k) Click the Calibrate X/Y button.
Calibration Factor box.
(l)
The calculated calibration factor appears in the
Click the Apply button and the data is saved.
(m) Click the Close button and the Calibration window closes.
(n) Using multi point calibration
In cases where calibration sample has fraction of dimension, it is desirable to use
average value by measuring multiple points.
Check the Multi checkbox, and repeat measurement at points having theoretically
same dimension.
By each measurement, measured value is averaged with previous measure data and
indicated in Average, 3 sigma, Max and Min boxes. Use Cancel to delete the latest
data. To delete all data, use Reset.
When the Reject Max Min box has been checked, the maximum and minimum value
within measured data are rejected for averaging calculation. It is effective when
number of measurement is 5 times or more.
Use the same steps of above (j) to (m) after measurement is finished.
New image acquisition and continued measurement during multi point calibration is
possible.
When once scanning is set to RUN state during multi point calibration operation,
following image condition will be compared with previous measured image when next
measurement is started.
If observation condition of old and new images do not match, a warning message will
be shown.
You can continue measurement including data of old image, or start measurement
newly clearing old data. Checked condition is
[must be equal] : Accelerating voltage / Magnification / Probe current
/ Vacuum / scanning speed / detector
[must be nearly equal] : Working distance (within + - 5%)
6 - 89
6.4
CD Measurement Function (Option)
In case of measurement on the SEM Data Manager, a new image can be displayed by
clicking a thumbnail.
When new image file is opened during multi point calibration, recording condition will
be compared with that of previous measured image.
If recording condition of old and new images do not match, a warning message will be
shown.
You can continue measurement including data of old image, or start measurement
newly clearing old data. Checked condition is
[must be equal] : Accelerating voltage / Magnification / Probe current / Vacuum /
scanning speed / detector
[must be nearly equal] : Working distance (within + - 5%)
Calibration factor and used measured data can be saved.
When "Apply" button is clicked, a message Save calibration data ? will be shown.
You can save calibration factor, used measured data and statistical data as text or csv
file format.
NOTICE: In the CD measurement function on the SEM data manager, calibration using images
obtained with other models (S-3000N, S-4800 or others) is not effective.
6 - 90
6.4.5
6.4.5.6
Measurement Operation
The following six kinds of measurement are mainly available.
•
•
•
•
•
•
(1)
Manual measurement
Successive manual measurement
Auto measurement
Successive auto measurement
Width & pitch manual measurement
Width & pitch auto measurement
Manual Measurement
(a) With the measurement type at Standard, measurement mode at Manual and
measuring direction at X or Y, click the Set button on CD Measurement window, and
measurement cursors as shown in Fig. 6.4-19 will appear.
Fig. 6.4-19
Manual Measurement Cursor Display
(b) Drag with the mouse the box located on the cursor intersecting point, and align the
cursor with the part to be measured. Even in this status, the measured values
(horizontal, vertical, slope directions) can be read out.
(c) Click the Enter button, and the measured result can be saved as indicated in
Fig. 6.4-20. And if the present SEM parameters match the calibration parameters,
the calibrated measurement result will be displayed.
6 - 91
6.4
CD Measurement Function (Option)
Fig. 6.4-20
Manual Measurement Result
(d) In the CD measurement function of the SEM main unit, click the Run button again and
the system will return to image observation.
(e) By setting the measuring direction to Angle and clicking the Set button of CD
Measurement window, a measurement cursor that permits specifying the angle will
appear as in Fig. 6.4-21.
Fig. 6.4-21
Angle Measurement Cursor
6 - 92
6.4.5
(f) Drag the cursor with the mouse and align it with the part to be measured, then click
Enter button. Angle measurement can thus be done as in Fig. 6.4-22. Calibration is
not performed in the case of angle measurement.
Fig. 6.4-22
(2)
Angle Measurement Result
Successive Manual Measurement
(a) By selecting Multiple under manual measurement mode and under the same
measurement parameters, successive manual measurement can be carried out.
Click Set button on the CD Measurement window and the measurement cursors
appear. In successive measurement, X and Y directions cannot be measured
simultaneously, so you must specify a measuring direction.
(b) Drag the measurement cursor box with the mouse as in the manual measurement,
and align the cursor with the part to be measured. Click Enter button and the
measured result appears.
(c) Click Set button in this status to display the measurement cursors, then align the
cursor with the next part to be measured. Click Enter button and the 2nd measured
result will appear after the 1st measured result.
(d) In the same manner, click Set button, align the measurement cursors, and click Enter
button to achieve successive measurement. In manual mode, a maximum of 8
successive measurements can be achieved.
(e) Successive measurement is also possible in the angle measurement mode.
Successive measurement by changing X, Y or Angle midway as in Fig. 6.4-23 is also
feasible. In the case of Angle, numerics will be displayed in the part where the
circular cursor appears.
6 - 93
6.4
CD Measurement Function (Option)
Fig. 6.4-23
(3)
Successive Manual Measurement Results
Auto Measurement
(a) With the measurement type at Standard, measurement mode at Auto and measuring
direction at X or Y, click the Set button on CD Measurement window, and the auto
measurement cursors will appear as shown in the figure. The measurement cursor
box will be of the size set previously in the measurement parameters.
(b) Drag the box with the mouse so that the edge part to be measured is enclosed in the
box.
Fig. 6.4-24
Auto Measurement Cursors
6 - 94
6.4.5
(c) Set the cursors and click the Measure button to start measurement. When there are
two or more measurement points, a "+" sign appears at the location where an edge
was detected for each measurement point, and when the measurement of all the
points is finished, the cursor moves to the part representing the average value of the
points.
(d) When Line Profile has been set, a signal waveform (line profile) will appear.
Fig. 6.4-25
Auto Measurement Result Display
(e) The measurement results are indicated as follows.
Width
: Measured value of one point, or average of measured values of multiple
points
Max
: Maximum of measured values
Min
: Minimum of measured values
3 Sigma : Standard deviation of measured value
NOTICE: 1.
2.
3.
4.
When "1" is set for Measurement Point in the measurement parameters, the
maximum, minimum and standard deviation values are not indicated.
Standard deviation is calculated using numeric values having more digits than the
measured value indication. Therefore the standard deviation may not be "0"
even if the maximum and minimum values indicated in the measured results are
equal to each other.
The standard deviation represents a degree of edge roughness of the pattern
under measurement. Use the standard deviation function as required.
A comment entered in the comment entry box on CD Measurement window
appears on the measured results.
6 - 95
6.4
(4)
CD Measurement Function (Option)
Successive Auto Measurement
(a) Set Multiple in the measurement parameters the same as for auto measurement, then
successive auto measurement can be achieved. Click Set button on the CD
Measurement window and measurement cursors as for auto measurement will appear.
(b) Drag the measurement cursor box with the mouse as in auto measurement, align the
cursors with the part to be measured, then click Measure button and the measured
result will appear.
(c) In this status, click the Set button to display the measurement cursors, align the
cursors with the next part to be measured, then click Measure button and the 2nd
measured result will be displayed following the 1st measured result.
(d) In the same way, click Set button and set the cursors, then click Measure button and
successive measurement can be achieved as shown in Fig. 6.4-26. In the case of
auto measurement, a maximum of four successive measurements is possible.
(e) Successive auto measurements upon changing X and/or Y midway is also possible.
Fig. 6.4-26
(5)
Successive Auto Measurement Results
Width & Pitch Manual Measurement
(a) Set the measurement type to W&P, measurement mode to Manual and measuring
direction to X or Y, then width and pitch can be simultaneously measured manually.
(b) Click Set button on CD Measurement window. The measurement cursors will appear.
6 - 96
6.4.5
Fig. 6.4-27
Width & Pitch Manual Measurement Cursors
(c) Drag the cursor via the mouse to the edge to be measured, and set the position.
The side where the "+" sign is located represents the width.
(d) Align the cursor with the part to be measured as in manual measurement, click the
Enter button and then the measured results will appear as in Fig. 6.4-28.
Fig. 6.4-28
Width & Pitch Manual Measurement Results Display
6 - 97
6.4
CD Measurement Function (Option)
(6)
Width & Pitch Auto Measurement
(a) Set the measurement type to W&P, measurement mode to Auto and measuring
direction to X or Y, then width and pitch can be simultaneously measured automatically.
(b) Click Set button on CD Measurement window. The auto measurement cursors will
appear. The measurement cursor box will be of a size set before in the measurement
parameters.
Fig. 6.4-29
Width & Pitch Auto Measurement Cursors
(c) Drag the box using mouse so the edge to be measured will be enclosed in the box,
and set the position. The side where the "+" sign is located represents the width.
(d) Align the cursor with the part to be measured as in auto measurement, click the
Measure button and then the measured results will appear as in Fig. 6.4-30.
6 - 98
6.4.5
Fig. 6.4-30
Width & Pitch Auto Measurement Results Display
6 - 99
6.4
(7)
CD Measurement Function (Option)
Zoom function
A partial image besides the cursor is magnified and shown on the Zoom window. Check the
Zoom box to use the zoom function.
The crosshair cursor corresponds to the cursor position. It will be useful for accurate fitting of
cursor to the point to be measured in manual measurement mode.
Fig. 6.4.31
Image Exchange during CD Measurement (SEM Data Manager)
The target image can be changed without closing CD Measurement dialog window.
In case of measurement on the SEM Data Manager, image file name is put at the top of
measured data when saved as text or csv format file to identify measured image.
6 - 100
6.4.5
6.4.5.7
Recording Measured Data
The image can be photographed or saved with measured data as is shown on the screen.
Also the measurement data is saved in text format or in Microsoft Excel format.
(1)
Photographing an image with measured data
When operating on S-3400N, click Memory Photo button, or select Memory Photo command in
the File menu.
(2)
Saving an image with measured data
When operating on S-3400N, click Save button on the Control panel, or select Direct Save
command in the File menu.
When operating on SEM Data Manager, click the Direct Save button on the tool bar.
Image save dialog window will open. Select or input User name, folder and file name and then,
click Save button.
NOTICE: Measured data is not saved by using Save button on Captured Image window.
(3)
Saving measured data
Measured can be saved as text format or csv format. The latter is Microsoft Excel compatible.
Measured data is accumulated by succeeding measurement and saved as a file.
(a) Click Save button on the CD Measurement window.
(b) Select a data format (*.mev for text format, or *.csv for Excel format) and specify folder
and filename on the opening save dialog window.
NOTICE: 1.
2.
To open the saved data file, use text application program for text file (mev files) or
Microsoft Excel (csv files).
When image data with measured value is necessary, record the image before
saving measured data. The data on the image is cleared when the data is saved.
6 - 101
6.4
CD Measurement Function (Option)
The following table is an example of measured data saved in csv format and opened with
Microsoft Excel. (Measurement on SEM Data Manager) Where 3 times of width-pitch (left side
width), width-pitch (right side width), 5 times of horizontal and vertical width and 5 times of angle
are measured and then, saved.
Table 6.4-1
The Example of Measured Data
File
Comment Mode
測長hhh.jpg
2 W&P
測長hhh.jpg
2 W&P
測長hhh.jpg
2 W&P
Multiple
Off
Off
Off
Auto/Manua Date
Vacc
Auto
2004/7/9 14:04 1kV
Auto
2004/7/9 14:04 1kV
Auto
2004/7/9 14:04 1kV
Vdec
0kV
0kV
0kV
DecelerationMag
Off
x100.0k
Off
x100.0k
Off
x100.0k
W.D.
2.6mm
2.6mm
2.6mm
Calibration
Calibrated
Calibrated
Calibrated
Width(Left Pattern)(umMax(um)
0.0839 0.0872
0.0837
0.087
0.0816 0.0852
Min(um) 3Sigma(um) Pitch(Left Line)(umMax(um) Min(um) 3Sigma(um) W/P
0.0796
0.0052
0.2427
0.248 0.2392
0.0077 0.3
0.0794
0.0052
0.2426 0.2479 0.2391
0.0077 0.3
0.0788
0.0046
0.2411
0.244 0.238
0.006 0.3
File
Comment Mode
測長hhh.jpg
2 W&P
測長hhh.jpg
2 W&P
測長hhh.jpg
2 W&P
Multiple
Off
Off
Off
Auto/Manua Date
Vacc
Auto
2004/7/9 14:05 1kV
Auto
2004/7/9 14:05 1kV
Auto
2004/7/9 14:05 1kV
Vdec
0kV
0kV
0kV
DecelerationMag
Off
x100.0k
Off
x100.0k
Off
x100.0k
W.D.
2.6mm
2.6mm
2.6mm
Calibration
Calibrated
Calibrated
Calibrated
Width(Right Pattern)(u Max(um)
0.0818 0.0869
0.0776 0.0811
0.0795
0.082
Min(um) 3Sigma(um) Pitch(Right Line)(u Max(um) Min(um) 3Sigma(um) W/P
0.0792
0.0051
0.2411 0.2444 0.238
0.0046 0.3
0.0754
0.004
0.2385 0.2424 0.2364
0.0046 0.3
0.0762
0.0042
0.2368 0.2407 0.2334
0.0045 0.3
Multiple
Off
Off
Off
Off
Off
Auto/Manua Date
Auto
2004/7/9
Auto
2004/7/9
Auto
2004/7/9
Auto
2004/7/9
Auto
2004/7/9
14:07
14:07
14:07
14:07
14:07
Vacc
2kV
2kV
2kV
2kV
2kV
Vdec
0kV
0kV
0kV
0kV
0kV
DecelerationMag
Off
x35.0k
Off
x35.0k
Off
x35.0k
Off
x35.0k
Off
x35.0k
W.D.
3.0mm
3.0mm
3.0mm
3.0mm
3.0mm
Calibration
Calibrated
Calibrated
Calibrated
Calibrated
Calibrated
Width(X)(Line)(um)
Max(um)
0.7958 0.7962
0.7924 0.7932
0.7879 0.7887
0.7827 0.7838
0.7872 0.7876
Min(um) 3Sigma(um)
0.7951
0.0024
0.7924
0.0016
0.7876
0.0024
0.7819
0.004
0.7864
0.0024
Multiple
File
Comment Mode
TV35R.bmp
2 Standard Off
TV35R.bmp
2 Standard Off
TV35R.bmp
2 Standard Off
TV35R.bmp
2 Standard Off
TV35R.bmp
2 Standard Off
Auto/Manua Date
Auto
2004/7/9
Auto
2004/7/9
Auto
2004/7/9
Auto
2004/7/9
Auto
2004/7/9
14:07
14:07
14:07
14:07
14:08
Vacc
2kV
2kV
2kV
2kV
2kV
Vdec
0kV
0kV
0kV
0kV
0kV
DecelerationMag
Off
x35.0k
Off
x35.0k
Off
x35.0k
Off
x35.0k
Off
x35.0k
W.D.
3.0mm
3.0mm
3.0mm
3.0mm
3.0mm
Calibration
Calibrated
Calibrated
Calibrated
Calibrated
Calibrated
Width(Y)(Line)(um)
Max(um)
0.5749 0.5749
0.5749 0.5757
0.5678 0.5685
0.5806 0.5808
0.581 0.5812
Min(um) 3Sigma(um)
0.5749
0
0.5746
0.0023
0.5668
0.0035
0.5806
0.0004
0.581
0.0004
Multiple
File
Comment Mode
0TR02.BMP
2 Standard Off
0TR02.BMP
2 Standard Off
0TR02.BMP
2 Standard Off
0TR02.BMP
2 Standard Off
0TR02.BMP
2 Standard Off
Auto/Manua Date
Manual
2004/7/9
Manual
2004/7/9
Manual
2004/7/9
Manual
2004/7/9
Manual
2004/7/9
14:09
14:09
14:09
14:09
14:09
Vacc
20kV
20kV
20kV
20kV
20kV
Vdec
0kV
0kV
0kV
0kV
0kV
DecelerationMag
Off
x120
Off
x120
Off
x120
Off
x120
Off
x120
W.D. Calibration T(deg)
29.9mm UnCalibrated
29.9mm UnCalibrated
29.9mm UnCalibrated
29.9mm UnCalibrated
29.9mm UnCalibrated
File
TV35.tif
TV35.tif
TV35.tif
TV35.tif
TV35.tif
Comment Mode
2 Standard
2 Standard
2 Standard
2 Standard
2 Standard
89.26
88.41
86.98
90.38
89.47
In case of measurement on SEM, "File" is not put in saved data.
Note that the comment shall be written before carrying out measurement. The comment is
stored together with measured data when a measurement is performed.
6 - 102
APPENDIX
Message List
The table below lists messages that can appear when the S-3400N is being used.
Messages without a message code are for instructions, simple notifications, or confirmation
messages; they are not included in the table below.
Message codes listed below that are marked with an * appear as error codes.
Code
Message Text
*1301 Repair unsuccessful.
*1302 Optimize unsuccessful.
2000 Invalid input data
2001 Invalid data (out of range)
Explanation and Countermeasure
Failed to repair or optimize database file using SEM Data
Manager - Tool – Database Utility or S-4800 – Help –
Maintenance function. If you tried and failed to repair
database when the code 2014 error appeared, contact a
service engineer.
These messages will be shown when input data is not
correct. Confirm acceptable data and then, input again.
2002 Only a number is acceptable.
2003 Invalid Data.
2004 The name is used in the system. S-3400N uses this login name.
Use other names.
2007 Invalid login name.
Use a login name already registered. [S-3400] is the
default login name.
Note that capital and small letters are distinguished for login
names. Confirm your input.
2008 The password you typed is
incorrect.
You entered incorrect password. Note that capital and
small letters are distinguished for login names.
Confirm your input.
*2010 Specified file is different from the The file for operation condition is not correct. When this
condition file for PC_SEM. SEM message is shown, check if other application is using files
of extension pm1.
Parameters will be initialized.
*2014 Database not found
Failed to access database files of S-4800 or SEM Data
Manager. If the message is shown when you are using
SEM Data Manager, try to repair the file [SDM.sdb] using
Tool – Database Utility. If it is shown when you are
operating SEM, try to repair files using
Help - Maintenance function.
2016 Specified file not moved because This message will be shown when you have specified the
same directory as of the source files for the target directory
source and destination folders
in Batch Process - Move File command. Specify a
are the same.
directory other than that of source files for the target
directory.
2017 Is already Exist.
This message will be shown when the input User name (or
login name) is already used. Specify another name.
2031 Use as Magnification Lower than This message will be shown when you click the Get Image
x5,000
button at a higher magnification than ×5,000.
APPENDIX - 1
Code
Message Text
*2032 Timeout error.
2034 Rotate R-axis with 90 degree
pitches.
*2035 Failed in the capture.
Explanation and Countermeasure
This message will be shown when operations such as auto
focusing did not end within specified period. If it happens
frequently, contact a service engineer.
The rotation angle is limited to only 90 deg steps.
Image capturing failed. If the error is repeated, contact a
service engineer.
2036 Image Processing is not applied Image Processing function on the operation panel is
applicable to 1280 × 960 pixels or smaller capture size.
for the selected Capture
Capturing will be performed without processing when you
resolution.
click OK button.
*2040 This is not 8 bits image file.
Some commands in the SEM Data Manager handle 8 bit
gray scale images only.
SEM Data Manager has some restrictions on image size,
*2041 The size of image exceeds the
maximum resolution 2560x1920. depending on the type of processing required.
2042 The size of image exceeds the
maximum resolution 2560x1920.
2044 The size of image exceeds the
maximum resolution 2560x1920.
2049 Start Password locking of
Windows. Scan mode and scan
speed will be set to Normal,
Slow1 when Windows is
unlocked.
You need a password for
Windows logon to unlock.
*2060 Insufficient memory space in a
temporary drive.
At least 400MB free area is
necessary for startup.
*2061 Insufficient memory space in a
temporary drive.
At least 20MB free area is
necessary for executing this
process.
*2062 Insufficient memory space in a
temporary drive.
At least 10MB free area is
necessary for executing this
process.
*2063 Insufficient memory space in a
temporary drive.
At least 1MB free area is
necessary for executing this
process.
Before performing password locking, this message should
be checked. If password locking interferes with operation, it
should be canceled.
These messages will be shown when vacant area of the
hard disk is not enough for the process to be executed.
Delete unnecessary files and allow more space than
specified.
2065 Free space in temporary drive is
30MB or less. System may
become unstable.
Please quit PC-SEM program
and free up the disk space.
APPENDIX - 2
Code
Message Text
Explanation and Countermeasure
2070 For correct operation of the PCSEM, set the Display properties
at 1280x1024 pixels for the
desktop area.
And confirm setting of the color
palette and the refresh rate are
optimal value to PC and the
monitor.
(Recommended setting: Full
color (about16illion), 60Hz or
75Hz)
During program startup, the system checks the Desktop
settings, and if the settings indicated on the left are not in
effect, it generates this message. If this happens, cancel
the S-3400N startup process, change Desktop settings as
appropriate, and restart Windows.
2101 Please input file name.
Input a file name and then, click the Save button.
2102 Please input user name.
Input or select a user name and then, click the Save button.
2103 Input sample name, limit is 40
bytes.
These messages will be shown when you input too many
characters. Input within specified number of characters.
2104 Input keyword, limit is 20 bytes.
2105 Auto increment counter has
reached 99.
Please use another file name.
Quick saving allows up to 99 file names.
name.
2106 Input comment sentence, limit is
80 bytes.
This message will be shown when you input over
80 characters for comment.
2107 Please input comment.
CD Measurement option – [Calibration]
Input a comment before clicking the Apply button.
2108 File name is duplicated.
This message will be shown when you have specified a file
name already used. Use another name.
2109 File name is too long.
Up to 255 characters are acceptable for a file name
including drive name, folder name, and extension.
2110 User table is not empty.
Delete all lists or images by using
Remove List Command or Delete
Image Command before deleting
User table.
If a user account is to be deleted in SEM Data Manager,
the image list for that user must be empty.
Execute either the [Remove List] command (removing the
list only from the database) or [Delete Image] (also deleting
image files) command to delete the list, and then remove
the user.
2111 Cannot save in the Folder.
Specify another folder.
2112 Invalid character is included.
The input possibly includes characters not allowed (/ : ; , * ?
“ < > |).
2113 Please input No. of Quick Save
within the range from 1 to 99.
Quick saving allows up to 99 file names.
number smaller than 99.
*2121 The number of written items
exceeds the maximum. More
items cannot be input.
Use another file
Specify a start
Number of texts or graphics exceeds allowable number.
Delete some of texts or graphics to add new one.
2140 Invalid file name.
The file name possibly includes characters not allowed
(/ : ; , * ? “ < > |).
2141 File name is too long.
Up to 255 characters are
acceptable for a file name
including folder name.
Use file name shorter than 255 characters including folder
name and extension.
2142 Invalid User name.
The User name possibly includes characters not allowed
(/ : ; , * ? “ < > |).
APPENDIX - 3
Code
Message Text
Explanation and Countermeasure
2143 User name is too long.
Up to 64 characters are
acceptable.
Use User name shorter than 64 characters.
2144 Invalid Sample name.
The Sample name possibly includes characters not allowed
(/ : ; , * ? “ < > |).
2145 Sample name is too long.
Up to 40 characters are
acceptable.
Use Sample name shorter than 40 characters.
2146 Invalid Keyword.
The Keyword name possibly includes characters not
allowed (/ : ; , * ? “ < > |).
2147 Keyword is too long.
Up to 20 characters are
acceptable.
Use Keyword shorter than 20 characters.
2149 Comment is too long.
Up to 80 characters are
acceptable.
Use Comment shorter than 80 characters.
2151 Invalid file name.
The file name possibly includes characters not allowed
(/ : ; , * ? “ < > |).
2152 File name is too long.
Up to 255 characters are
acceptable for a file name
including folder name.
Use file name shorter than 255 characters including folder
name and extension.
2153 To use Data No. Save, set Data To save a file by attaching a data number to the file name,
Number to ON, Auto Increment to the settings indicated in the message must be specified.
Perform appropriate settings according to the message.
ON, and put “-“ plus number to
the end of the Data number.
*2200 The new and confirmed
passwords do not match.
Please type them again.
Input both new and confirmation password again.
Note that capital and small letters are distinguished.
2202 Cannot delete this login name.
This login name is not allowed to delete.
2210 Capacity of floppy disk in not
enough.
Check the floppy disk.
2211 The disk is Write-protected.
2212 There is not floppy disk.
*2213 Cannot save the file.
3901 The limits is bytes.
You entered too long a login name or password.
4500 Input value or measured value is [CD Measurement option]
not correct.
This message will be shown when ratio of correct value and
measured value in the calibration operation is out of range.
4501 Present magnification has a
fluctuation. Focus adjustment will
cause magnification fluctuation.
Set magnification once and then,
carry out calibration
measurement.
Magnification is set stepwise by magnification operation
and also changed finely by focusing operation. Calibration
of measured data is possible only for the step-set
magnification value. When this message is shown, make
magnification operation once using mouse on the
magnification area or using the knob on the operation panel
(option). And then, continue measurement operation.
4502 Please execute calibration.
This message will be shown when you click the Apply
button before the Calibration Factors are calculated.
APPENDIX - 4
Code
Message Text
Explanation and Countermeasure
4503 Please input caption.
Input Caption before applying calibration or measurement
parameters.
4504 Invalid caption.
The caption possibly includes characters not allowed (/ : ; ,
* ? “ < > |).
4505 Caption is too long.
Use Caption shorter than 16 characters.
4510 Over maximum number of
measurement.
Number of measurements on an image is limited.
Save results, erase measured data and then repeat
measurement.
4511 Calibration of another direction
not completed.
In manual measurement mode, both X and Y direction
calibration shall be done as a set.
4512 Remove the check mark of
"Multiple".
Calibration operation is not allowed in multiple
measurement mode.
*4520 An information as SEM-image is
missing.
You can not measure of this
image.
The image under measurement lacks image information
(magnification, etc). This error will occur for images
registered using Add from File command if the image
information files have not been copied in the same folder as
the images.
*5000 X-axis parameter error (Max)
Please check sample size with
Stage Control Window.
X or Y axis position is at the limit.
towards reverse direction.
You can drive the stage
*5001 X-axis parameter error (Min)
Please check sample size with
Stage Control Window.
*5002 Y-axis parameter error (Max)
Please check sample size with
Stage Control Window.
*5003 Y-axis parameter error (Min)
Please check sample size with
Stage Control Window.
*5004 Z-axis parameter error(Max)
*5005 Z-axis parameter error(Min)
*5006 T-axis parameter error(Max)
*5007 T-axis parameter error(Min)
These errors will not happen by usual operation.
Turn the STAGE POWER switch to off and turn it on
again.
It these errors occur again, contact a service engineer.
*5008 R-axis parameter error(Max)
*5009 R-axis parameter error(Min)
*5020 Cannot execute while drive
X-axis
*5021 Cannot execute while drive
Y-axis
Possibly the initialization is in progress. Wait for a few
minutes. If the message is shown even when about
10 minutes has passed, shut the stage power off once and
then, turn it on.
*5022 Cannot execute while drive
Z-axis
*5023 Cannot execute while drive
T-axis
*5024 Cannot execute while drive
R-axis
*5025 Cannot execute while drive stage This message will be shown when operation on the GUI
by track ball or joy stick
and by the trackball or joystick is generated simultaneously.
APPENDIX - 5
Code
Message Text
5040 Cannot execute while not
initialize X axis
Explanation and Countermeasure
Initialization of each axis in progress.
initialization ends.
Wait until
5041 Cannot execute while not
initialize Y axis
5042 Cannot execute while not
initialize Z axis
5043 Cannot execute while not
initialize T axis
5044 Cannot execute while not
initialize R axis
*5075 Stage over run error (X-CCW)
*5080 Stage over run error (X-CW)
This message will be shown when each axis is driven over
its limit. It will be recovered automatically.
*5085 Stage over run error (Y-CCW)
*5090 Stage over run error (Y-CW)
*5101 Stage over run error (Z-CCW)
*5102 Stage over run error (Z-CW)
*5103 Stage over run error (T-CCW)
*5104 Stage over run error (T-CW)
5985 Set Z axis so as 40 deg. or more This calibration operation tilts stage to 40 deg.
tilt is possible.
Set Z axis where 40 deg. or more tilting angle is allowed.
5987 Set Z axis so as 20 deg. or more This calibration operation tilts stage to 20 deg.
tilt is possible.
Set Z axis where 20 deg. or more tilting angle is allowed.
5988 Extract optional detector(s) for
the calibration.
Extract optional detector(s) for the calibration.
5989 Set specimen height error within - Set specimen height error within -0.5 mm to +0.5 mm to
0.5mm to +0.5mm to keep
keep calibration accuracy.
calibration accuracy.
5999 1st and 2nd alignment point are
too near, or Y coordinates of the
two points are too near.
Change coordinates of the two
alignment points.
Separate two aligned points by at least 10 mm.
Same X coordinate value for two alignment points can not
be used.
6000 Too near to stage limit. Set 1mm The alignment position is too near the stage limit.
or more.
Set 1 mm or more away from the limit.
6001 No data alignment 2.
No data for 2nd alignment position is registered.
6002 Incorrect alignment calculation
value.
Alignment result seems incorrect. Possibly alignment
operation was done on incorrect point.
6003 R axis must be the same as the
first alignment point.
1st and 2nd alignment points shall be at the same rotation
angle.
APPENDIX - 6
Code
Message Text
Explanation and Countermeasure
Due to a conflict between specimen size, specimen height,
the type of detector/unit used, this operation cannot be
performed. The current settings should be checked and
6005 The selected detector/unit cannot modified as appropriate.
be set by present sample height.
6004 The selected sample height
cannot be set by present
detector/unit.
6006 The selected sample size cannot
be set by present sample height.
6007 The selected sample height
cannot be set by present sample
size.
6008 The selected sample size cannot
be set by present detector/unit.
6009 The selected detector/unit cannot
be set by present sample size.
6701 AFC Error. Check Filament
setting.
This message appears if an error occurs in the Auto
Filament Setting executed in the Auto Beam Setting (ABS).
The current filament settings should be checked and
modified as appropriate.
6702 ABA Error. Set No.1 or open the This message appears if an error occurs in the Auto Beam
movable objective aperture, open Alignment (ABA) executed in the Auto Beam Setting (ABS).
Alignement dialog and adjust
The objective lens movable aperture should be rechecked.
Beam Tilt/Shift manualy.
6703 AFC Error.
*7012 HV forced OFF due to vacuum
error.
This message appears if an error occurs in the Auto Focus
(AFC) process executed in the Auto Beam Setting (ABS).
This message appears if the vacuum level in the specimen
chamber or electron gun declines during image
observation and the acceleration voltage is automatically
shut off. If this happens, wait until the vacuum level is
restored, and then turn on the acceleration voltage.
This error is also generated if an attempt is made to
perform specimen chamber AIR operation with HV still
turned on.
APPENDIX - 7
Code
Message Text
7069 Auto alignment process has not
completed due to un-suitable
SEM conditions.
Set SEM conditions according to
the following procedure.
Explanation and Countermeasure
This message appears if an error occurs in the midst of
aperture alignment or automatic stigma axial alignment.
The corrective action indicated in the message should be
taken.
(1) In the case where focus is
improper: The sample must
suit focus to the scope of
control or suit the stage
position.
(2) In the case where the
aperture alignment is almost
the limit of the range: Reset
the aperture alignment and
focus the image again.
7070 Auto alignment process has not
been completed due to the
condition where the stigmaalignment and/or the stigma
adjustment are almost at the limit
of the range.
Carry out the auto stigmaalignment again after clicking the
Default button and selecting
appropriate view field.
7071 Auto alignment process has not
completed due to un-suitable
SEM image. Focus the image
and/or select a suitable view field
having some distinctive and clear
for the image.
*7072 Auto alignment process has not
completed due to the system
trouble on the S-3400N.
Contact a service engineer for
the troubleshooting.
This is an auto axial alignment software error. Call a
service engineer.
*7200 Abnormal temperature rise
occurred in the power supply.
Shut down the PC and turn the
[MAIN] switch off. Restart the
microscope after about half an
hour. When this message is
shown again, contact a service
engineer.
This is an OVERHEAT error in the power supply. Shut
down the PC, turn off the Main switch, wait 30 minutes, and
then restart the system. If the problem persists, call a
service engineer.
APPENDIX - 8
Code
Message Text
*7304 Evacuation system is not
working.
Check power switch.
Explanation and Countermeasure
The system fails to start due to an evacuation system error.
Shut down the PC, turn off the Main switch, wait 30
minutes, and then restart the system. If turning off the
Main switch does not shut off the power, turn off the Main
breaker in the back of the system, and restart the system
after the power is completely shut off. If the problem
persists, call a service engineer.
7310 Abnormality in the EVAC system According to the message, call a service engineer.
control power supply was
detected.
Shut down the PC , turn the
[MAIN] switch off and contact a
service engineer.
Moreover, after abnormality is
detected, the main power supply
will be turned off in about ten
minutes automatically.
7311 The vacuum exhaust was not
normally done or the vacuum
leakage is occurred.
Confirm whether the specimen
stage and the specimen chamber
have stuck or the thing doesn't
narrow. And confirm the vacuum
leaks in the specimen chamber
installation part of various
detectors, then push the [EVAC]
switch.
When it occur again, contact a
service engineer.
This message appears if the evacuation of the specimen
chamber fails within a specified length of time. Follow the
tips given in the message.
According to the message, call a service engineer.
7312 The EVAC system vacuum valve
doesn't work normally.
Shut down the PC , turn the
[MAIN] switch off and contact a
service engineer.
7313
The rotary pump doesn't work.
Shut down the PC , turn the
[MAIN] switch off and contact a
service engineer.
Moreover, after abnormality is
detected, the main power supply
will be turned off in about ten
minutes automatically.
7314
Abnormality of the Pirani vacuum
gauge was detected.
Start again after the [MAIN]
switch is turned off after PC is
shutted down, and the system
stops completely. When this
message is shown again, contact
a service engineer.
APPENDIX - 9
Code
Message Text
Explanation and Countermeasure
This is a TMP vacuum pump error. Shut down the PC, turn
7315 The error of the TMP vacuum
off the Main switch, wait 30 minutes, and then restart the
pump was detected.
system. If the problem persists, call a service engineer.
Shut down the PC and turn the
[MAIN] switch off. Restart the
microscope after about half an
hour.
When this message is shown
again, contact a service engineer.
7316 The vacuum exhaust with the
TMP vacuum pump was not
normally done.
Shut down the PC and turn the
[MAIN] switch off. Restart the
microscope after about half an
hour. When this message is
shown again, contact a service
engineer.
This message appears if the pressure of the compressed
7317 When using air compressor,
check the valve at the air output. air that drives the vacuum valve falls. Follow the tips given
When using utility air, check the in the message.
air supply. Evacuation sequence
will recover when the air supply
becomes normal pressure. If the
alarm can not be recovered, shut
down the PC, turn the [MAIN]
switch off and contact a service
engineer.
7318 The vacuum pumping system is
set for the maintenance mode.
Shut down the PC, turn the
[MAIN] switch off and contact a
service engineer.
This error message, which appears if the evacuation
system is in the manual mode for service engineers, is not
displayed under normal conditions. If this message comes
on, shut down the PC, turn off the Main switch, and then
call a service engineer.
7319 The vacuum link interlock
operates, and AIR or the low
vacuum mode is prohibited.
Turn off HV of the device such as
WDX or shut the gate valve and
release the vacuum link interlock.
Shut down the PC, turn the
[MAIN] switch off and contact a
service engineer when the error
doesn't recover.
This message appears if the specimen chamber is exposed
to the atmosphere or a low-vacuum mode operation is
performed when an external device (e.g., WDX) to which
the vacuum-interlocked protection circuit is connected is
running an analysis. Stop the analysis process being
conducted on the external device, such as WDX. If the
external device involved is a WDX, close the gate valve,
release the vacuum interlock, and then perform the
operation. If the error message appears even when a
vacuum interlock protection circuit is not connected or
under conditions not described above, call a service
engineer.
APPENDIX - 10
Code
Message Text
Explanation and Countermeasure
7320 An abnormal power supply
(Vacc) in the electron gun control
power supply was detected.
Shut down the PC and turn the
[MAIN] switch off.
Restart the microscope after
about half an hour.
When this message is shown
again, contact a service engineer.
This message appears if the electron gun-controlling power
supply unit detects an error during a self test. It is possible
that the error is due to malfunction or equipment error from
isolated noises, in which case shut down the PC, turn off
the Main switch, wait 30 minutes, and then restart the
system. If the problem persists, call a service engineer.
7321 An abnormal power supply
(Vfilament) in the electron gun
control power supply was
detected.
Shut down the PC and turn the
[MAIN] switch off.
Restart the microscope after
about half an hour.
When this message is shown
again, contact a service engineer.
7322 An abnormal power supply
(Vbias) in the electron gun control
power supply was detected.
Shut down the PC and turn the
[MAIN] switch off.
Restart the microscope after
about half an hour.
When this message is shown
again, contact a service engineer.
7323 An abnormal power supply
(Vbiasselect) in the electron gun
control power supply was
detected.
Shut down the PC and turn the
[MAIN] switch off.
Restart the microscope after
about half an hour.
When this message is shown
again, contact a service engineer.
7324 The electron gun interlock switch
worked.
Shut down the PC, turn the
[MAIN] switch off and contact a
service engineer.
This message appears if the interlock switch for the
electron gun unit is activated when the acceleration voltage
is still on. Shut down the PC, turn off the Main switch, and
then call a service engineer.
7325 Over current protection of the
electron gun operated. Please
confirm the setting of the
filament.
This message appears if the protection circuit is activated
due to a surge in emission current due to a filament height
settings. See the filament replacement/servicing
procedures in the Help menu to check the filament settings.
APPENDIX - 11
INDEX
A
AAA(Auto Axial Alignment) .................................................................................................. 3-27
ABA(Auto Beam Alignment) .................................................................................................. 3-20
ABCC(Auto Braightness and Contrast Control) ................................................... 2-28, 3-20, 3-44
ABS(Auto Beam Setting) ....................................................................................................... 3-20
Accelerating Voltage..................................................................................... 2-26, 2-39, 3-15, 4-1
AFC (Auto Focus)......................................................................................................... 2-28, 3-30
Air button ............................................................................................................................... 2-35
Alignment .............................................................. 2-28, 3-20, 3-22, 3-23, 3-26, 3-28, 3-30, 3-81
Analysis
Area Analysis ............................................................................................................. 3-125
Line Analysis .............................................................................................................. 3-123
Normal.......................................................................................................................... 2-21
Spot Analysis.............................................................................................................. 3-124
Aperture .................................................................................... 3-23, 3-26, 3-40, 3-158, 4-6, 6-3
Area Marker........................................................................................................................... 2-48
ASFS(Auto Stigma and Focus).............................................................................................. 3-48
Astigmatism......................................................................................................... 3-46, 3-49, 4-30
Auto Focus ............................................................................................................................ 3-30
Auto Gun Bias ....................................................................................................................... 3-19
B
BC Monitor ............................................................................................................................ 3-45
Beam Alignment .................................................................................................................... 3-23
Brightness ..................................................................................... 2-49, 3-20, 3-44, 3-107, 3-174
BSE Detector......................................................................................................... 2-3, 2-44, 4-29
C
Calibration ............................................................................................................................. 3-83
Capture ........................................................................................... 2-31, 2-59, 3-78, 3-95, 3-118
Color
Color Bar .................................................................................................................... 3-176
Color Mixing ..................................................................... 2-37, 3-120, 3-122, 3-165, 3-179
Color Mode................................................................................................................. 3-176
Color Order ................................................................................................................ 3-176
Level........................................................................................................................... 3-176
Pseudo Color................................................................................................... 3-129, 3-175
COMP.................................................................................................................................... 3-35
Compressor........................................................................................................................... 4-22
INDEX - 1
C
Condition
Condition Memory ...................................................................................................... 3-128
Operating Condition.................................................................................................... 3-128
Photo Condition.......................................................................................................... 3-106
Electron Optical Column.......................................................................................... 2-3, 4-1
Contrast..................................................................... 2-49, 2-57, 3-44, 3-107, 3-140, 3-165, 4-29
Copy Image ......................................................................................................................... 3-143
D
Data Display ...................................................................................................... 2-56, 3-96, 3-109
Data Entry ........................................................................ 2-47, 3-97, 3-130, 3-166, 3-171, 3-185
Database ................................................ 3-152, 3-160, 3-161, 3-162, 3-164, 3-166, 3-167, 3-186
Degauss Operation................................................................................................................ 2-54
Detector................................................................. 2-44, 3-31, 3-32, 3-33, 3-35, 3-52, 3-60, 3-90
Direct Photo............................................................................................ 2-33, 2-57, 3-106, 3-108
Direct Save................................................................................................................. 2-33, 3-102
Display................................................................................................................................. 3-114
Dynamic Focus........................................................................................................... 2-47, 3-134
E
Electron Beam..................................................................................................... 2-39, 2-53, 3-15
Electron Gun ........................................................................................................... 2-3, 2-26, 4-2
Electron Optical Column ................................................................................................... 2-3, 4-1
Emission Current .......................................................................................................... 2-53, 4-27
Error Message....................................................................................................................... 4-26
EVAC .................................................................................................................................... 2-35
EVAC Panel ............................................................................................................................ 2-6
F
Fast Scanning ....................................................................................................................... 3-42
Filament.......................................................................................................................... 3-17, 4-1
Filament Exchange....................................................................................................................4-1
Focus ............................................................................... 2-28, 2-40, 2-47, 2-49, 3-46, 4-31, 6-6
G
Gun Bias....................................................................................................................... 2-53, 3-19
H
High Voltage........................................................................................................................ 3-112
INDEX - 2
I
Image Brightness ....................................................................................................................3-44
Image Navigation.....................................................................................................................3-79
Image Observation ....................................................................................................... 2-42, 3-31
Image Processing..................................................................................................... 3-166, 3-177
Image Quality ........................................................................................................... 3-157, 3-158
Image Shift ................................................................................................. 2-44, 2-51, 3-67, 3-69
Image Size ................................................................................................................. 3-96, 3-183
K
Key switch ............................................................................................................................... 3-2
L
Login Setting ......................................................................................................................... 2-62
M
Magnification ........................................................................................ 2-30, 2-56, 3-4, 3-38, 6-5
Main Window......................................................................................................................... 2-15
Memory
Condition Memory ...................................................................................................... 3-128
Memory Photo .......................................................................................... 2-33, 2-57, 3-106
Monitor ................................................................................................................ 2-29, 3-44, 3-45
Mouse Operation ...................................................................................... 2-49, 3-48, 3-67, 3-147
O
Oblique....................................................................................................................... 2-63, 3-144
Observation ........................................................................................................................... 3-31
Operating Condition............................................................................................................. 3-128
Orifice Unit............................................................................................................................. 4-10
Objective Lens Movable Aperture............................................................... 3-23, 3-25, 3-158, 4-6
P
Password Setting........................................................................................................ 2-63, 3-150
PCI ......................................................................................................... 2-33, 2-59, 3-146, 3-163
Photo Condition ................................................................................................................... 3-106
Photographing ....................................................................................................... 2-57, 3-96, 6-1
Print........................................................................................................ 2-33, 3-95, 3-136, 3-164
Probe Current........................................................................................... 2-39, 2-54, 3-20, 3-158
Pseudo Color............................................................................................................ 3-129, 3-175
INDEX - 3
R
Raster Rotation .......................................................................................................... 2-45, 3-134
Recording ........................................................................... 2-33, 3-95, 3-96, 3-108, 3-109, 3-110
RISM ..................................................................................................................................... 3-68
Rotary Pump ......................................................................................................................... 4-21
S
Save Image .................................................................................................................. 2-33, 2-64
Scan Speed.................................................................................................................. 2-27, 2-32
Scan Speed Link ................................................................................................................... 2-31
Screen Mode ....................................................................................................................... 3-116
Scroll Bar............................................................................................................................... 2-48
SE Detector ........................................................................................................... 2-3, 3-31, 3-32
SEM Data Manager .................................................................................................... 2-61, 3-160
Short-cut Keys....................................................................................................................... 2-65
Signal
Signal Processing..................................................................................... 2-46, 2-64, 3-126
Slide Show .......................................................................................................................... 3-165
Specimen
Specimen Stage ................................................................................ 3-7, 3-52, 3-57, 3-113
Specimen Setting ........................................................................................................... 3-7
Split Screen ......................................................................................................................... 3-119
Split/Dual Mag ............................................................................................................ 2-65, 3-119
Stage
Axis Operation..................................................................................................... 3-63, 3-66
Image Navigation ......................................................................................................... 3-79
Position Memory........................................................................................................... 3-75
Specimen Stage ....................................................................................... 3-52, 3-57, 3-113
Stigma
Auto Stigma And Focus....................................................................................... 2-28, 3-48
Stigma Alignment ......................................................................................................... 3-28
T
Thumbnail........................................................................................................ 2-59, 3-101, 3-165
Tilt Compensation....................................................................................................... 2-47, 3-134
TOPO .................................................................................................................................... 3-33
Troubleshooting............................................................................................................ 4-24, 4-26
Turning High Voltage Off ..................................................................................................... 3-112
U
V
VP-SEM........................................................................................................... 2-41, 3-114, 3-149
Vaccum Mode........................................................................................................................ 2-41
INDEX - 4
W
WD (Working Distance)............................................................................ 2-40, 3-20, 3-55, 3-159
Window .............................................. 2-14, 2-26, 2-27, 3-96, 3-101, 3-102, 3-116, 3-161, 3-163
X
X-ray Analysis Mode............................................................................................................ 3-123
INDEX - 5
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