Nikon If Not Then NWL860
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NWL-Series 03.1.21 9:01 AM ページ1 IC Inspection Wafer Loaders NWL860/641 Series NWL-Series 03.1.20 4:53 PM ページ3 The perfect answer to macro insp ection tasks The NWL-860 series provides a full range of macro inspection capabilities—one of the features considered most essential for inspecting semiconductor patterns with progressively higher steps and ever-increasing layers. A single cassette wafer loader capable of handling 8- and 6inch (200 and 150 mm) wafers, this series of wafer loaders not only comes standard with pattern side macro inspection capability, but also with the ability to perform back side periphery and center macro inspections as well. The NWL-860TMB SP comes in a stainless-steel body and generates no static electricity, preventing particulate from attaching to the wafers. The NWL-860TMB INX comes with an SMIF elevator and both models feature a stop switch for greater safeguards against abnormalities. MB-type models are also available exclusively for macro inspections. Macro inspections of 8- to 6-inch wafers NWL-860TMB SP Besides pattern side macro inspection, the NWL-860 series can perform back side periphery and center macro inspections. Macro inspection parameters, such as wafer rotation speed and tilt angle, can be set automatically or manually. Use the macro setting knobs to preset initial settings and make later adjustments using the joystick. (Joystick adjustments not possible during back side center macro inspections) Dust-free, stainless-steel body High reliability Simple, easy operation Should an error occur, an error message appears on the LCD panel with a wafer recovery feature. Even when the power is turned OFF, the vacuum chuck stays ON, and the wafer is automatically returned to the cassette when the power is switched ON again. For even greater safety, the SP and INX types both feature an emergency button. The NWL-860 series uses a dialog-type operating system with an LCD panel, in which display information is logically classified, allowing settings for each step to be made easily on a single screen. Sophisticated functions such as file management for cassettes and wafer samples further enhance operational ease. A dedicated input keypad for setting inspection processes and programming wafers to be checked is also available as an option. Ergonomic design Back side periphery inspection Pattern side macro inspection Non-contact pre-alignment function Prevention of wafer contamination is a vital issue when inspecting semiconductors. To avoid any chance of contamination, the NWL-860 series employs non-contact pre-alignment using photoelectric sensors to center wafers, avoiding all contact during orientation flat/notch operations. Furthermore, the whole system is configured, so that the entire inspection process can be performed without disturbing the downflow air stream in the cleanroom. 2 NWL-860 Series NWL-860TMB Back side macro inspection Back side center inspection IC Inspection Wafer Loaders To assure operation in a natural posture, ergonomics surround every aspect of this system’s design. Operation keys and knobs are located at the front and close to the operator, so that operation requires a minimum movement of the hand or eye. The wafer cassette is set at the front and 35° to the left of the operator, enhancing cassette setting and streamlining visual wafer inspections. High throughput Not only is the speed of the elevator surprisingly fast, but the use of a non-contact centering mechanism makes it possible to perform alignment operations quickly and accurately. A multi-arm system also allows loading and unloading of wafers with the utmost precision, increasing the overall efficiency of transfer and wafer exchange operations. This dramatically decreases cycle times, providing levels of throughput never seen before in any other system. NWL-860TMB INX SMIF elevator model Communication function (option) A data communication function conforming to SEMI (SECS) standards can be added optionally, enabling transfer of inspection data via the RS232C interface or by remote control. This proves handy when expanding the system or incorporating it into a total network. 3 NWL-Series 03.1.20 4:54 PM ページ5 IC Inspection Wafer Loaders Nikon’s IC inspection microscope and the NWL-860 series constitute a highly efficient IC external inspection system NWL-860 Series SMIF pod™ NWL-860TMB SP + ECLIPSE L200 NWL-860TMB INX + ECLIPSE L200 Fiber illumination (option) Fiber illumination (option) Exchange arm Exchange arm Orientation flat/notch detector SMIF elevator Orientation flat/notch detector Wafer position detector IC inspection microscope (ECLIPSE L200) Wafer position detector IC inspection microscope (ECLIPSE L200) Pre-alignment sensor Feeder arm Dedicated stage (NWL-860 stage) Buffer section (syringe) Feeder arm Buffer section (syringe) Pre-alignment sensor Dedicated stage (NWL-860 stage) Rotation dial Elevator section Rotation dial Fine movement knob Driving handle Fine movement knob Driving handle Stop switch NWL-860TMB SP Control Panel NWL-860TMB INX Control Panel 1. Cursor keys 2. LCD display 3. Function keys 4. Stop key 5. Micro Reject key 6. Macro Reject key 7. Manual key 8. Macro setting knobs 9. Pattern side macro inspection rotation speed 10. Pattern side macro inspection X tilt angle 11. Pattern side macro inspection Y tilt angle 12. Back side periphery inspection tilt angle 13. Back side center inspection rotation angle 14. Joystick 15. Start switch 1. 2. 3. 4. 5. 6. 7. 8. Operation/display section Cursor keys LCD display Function keys Stop key Micro Reject key Macro Reject key Manual key Macro setting knobs 9. Pattern side macro inspection rotation speed 10. Pattern side macro inspection X tilt angle 11. Pattern side macro inspection Y tilt angle 12. Back side periphery inspection tilt angle 13. Back side center inspection rotation angle 14. Stop switch 15. Joystick 16. Start switch Dedicated microscope base plate Dimensional Diagram NWL-860TMB SP + ECLIPSE L200 2 Dedicated microscope base plate Operation/display section Dimensional Diagram NWL-860TMB INX + ECLIPSE L200 2 1 1 3 3 6 7 9 14 11 12 13 535 (21.1) 6 7 8 10 11 12 13 375 (14.8) 785 (30.1) 14 918 (36.1) 15 5 4 9 760 (30.0) 5 625 (24.6) 4 10 838-856 (33.0-33.7) 8 4 Stop switch Unit: mm (inch) 15 375 (14.8) 1168 (46.0) 16 Unit: mm (inch) 5 NWL-Series 03.1.20 4:54 PM ページ7 IC Inspection Wafer Loaders IC Inspection Wafer Loaders NWL-641M/641 Quick Reference Chart For 6- to 4-inch Wafer Inspection Wafer size Inspection mode Models Macro illumination unit (option) Dual exchange arms 86inch inch Micro Macro NWL-860TMB ● ● ● ● ● ● NWL-860TM ● ● ● ● NWL-860T ● ● ● NWL-860MB* ● ● ● ● ● NWL-860TMB SP ● ● ● ● ● ● NWL-860TM SP* ● ● ● ● NWL-860T SP* ● ● ● NWL-860MB SP ● ● Stage (rotatable 360°, with vacuum wafer chuck) Setting switches (hidden switches) Orientation flat detector Operation handle Back side macro (periphery) Back side macro (center) SECS2 Stainless steel body & peek chuck ● Option ● ● Option ● ● Option ● Option ● Stop switch SMIF elevator Feeder arm Wafer position detector 730 mm (28.7 in.) NWL-641M 598 mm (23.3 in.) Simple, speedy wafer exchange Operation is a breeze, thanks to the logical arrangement of keys on the control panel. The NWL-641 series can memorize up to 10 combinations of wafer channels to be inspected. The orientation flat detector allows the wafer direction to be set in four directions (0°, 90°, 180°, 270°) individually during wafer loading onto the microscope or during wafer unloading. Wafer exchange takes a short two seconds. 360° rotation vacuum wafer chuck The vacuum wafer chuck on the stage draws and holds a wafer transferred by the loader, and if necessary, the wafer can be rotated 360° by using the syringe rotation knob, allowing the loaders to meet the varying needs of microscopic inspection. Enhanced macro observations with unique fluttering mode (641M only) Dimensional Diagram NWL-641M + OPTIPHOT 150 Figures in parentheses are those for Type 641 The 641M incorporates sophisticated macro observation movements, including Nikon’s original fluttering mode, tilt macro rotation, and fluttering + tilt macro rotation. The loader in the NWL-641 series uses transmission-type laser wafer sensors. These sensors check the presence of wafers in the cassette, wafer tilt, as well as wafer deformation, to determine automatically the ideal position in which to take the wafers in and out, thus ensuring secure transfer. ● NWL-860MB INX ● NWL-860TMB INX* (6-inch only) 730 (730)/28.7˝ (28.7˝) 685 (655)/27.0˝ (25.8˝) Irregular-shaped wafer cassette capability NWL-860TMB INX NWL-860MB INX* MAX 220/8.7˝ (6-inch only) ● ● ● ● NWL-641 ● ● NWL-641M ● ● ● ● ● ● ● ● ● ● ● ● ● ● ● ● ● ● ● ● ● ● ● ● ● ● ● ● ● ● ● ● ● ● Anti-contamination design To significantly curtail dust generation from the equipment and the attachment of particles to wafers, Nikon adopted a special design, whereby the motor unit in the macro mechanism is located as far apart as possible from the wafer under inspection. 6 266 (246)/ 10.5˝ (9.7˝) 598/23.5˝ ● Unit: mm/inch Note: Models with asterisks are available on a special order basis. 7 NWL-Series 03.1.21 9:01 AM ページ2 Specifications Wafer size Wafer cassette Number of wafers NWL-860TMB/860TMB SP NWL-860MB/860MB SP NWL-860TMB INX NWL-860MB INX 8 to 6 inches (conforms to both SEMI and JEIDA) Fluoroware® PA182-60MB, Fluoroware® PA192-80M 25 wafers (6-inch), 25 or 26 wafers (8-inch) Inspection mode 1. Micro inspection 2. Tilt macro inspection 3. Back side center macro inspection 4. Back side periphery macro inspection Wafer transfer Pre-alignment Robotic transfer with vacuum chuck Non-contact pre-alignment Orientation flat/notch detection By transmitted-type sensor Wafer angle before and after inspection can be specified in increments of 90° degrees Stage Compatible microscopes Dedicated stage (rotatable 360°; with vacuum chuck) Nikon OPTIPHOT 300/200C/150, ECLIPSE L200 Dimensions (WxDxH) and weight (Approx.) Main unit: 530 x 620 x 275 mm, 50 kg (INX type: 786 x 752 x 442 mm, 60 kg) Footprint (WxD): 900 x 620 mm (INX type: 1450 x 800 mm) Vacuum Power source Pressure: – 600 mmHg (– 80 kPa) or less, Displacement:10 nl/min. or more AC 100V/120V, 220V/240V ±10%, 50/60 Hz, 3.5A max. Wafer size Wafer cassette Number of wafers NWL-641 6, 5 and 4 inches Fluoroware® H-BAR type housing 25 wafers Inspection mode 1. Tilt macro inspection 2. Back side center macro inspection 3. Back side periphery macro inspection NWL-860TM/860TM SP 1. Micro inspection 1. Micro inspection 2. Tilt macro inspection 1. Micro inspection NWL-641M 1. Micro inspection 2. Tilt macro inspection Wafer transfer Robotic transfer with vacuum chuck Orientation flat/notch detection By transmitted-type sensor Wafer angle before and after inspection can be specified in increments of 90° degrees Stage Compatible microscopes Dedicated stage (rotatable 360°; with vacuum chuck) Nikon OPTIPHOT 300/200C/150, ECLIPSE L200 Dimensions (WxDxH) and weight (Approx.) 246 x 655 x 245 mm, 21 kg Vacuum Pressure: – 600 mmHg (– 80 kPa) or less, Displacement: 10 nl/min. or more AC 100V/120V ±10%, 50/60 Hz, 1.7A max. AC 220V/240V ±10%, 50/60 Hz, 0.85A max. Power source NWL-860T/860T SP 266 x 655 x 245 mm, 23.5 kg Note: Class 1 laser equipment *All models listed here are UL/CE approved. WARNING TO ENSURE CORRECT USAGE, READ THE CORRESPONDING MANUALS CAREFULLY BEFORE USING YOUR EQUIPMENT. Specifications and equipment are subject to change without any notice or obligation on the part of the manufacturer. September 2000. ©2000 NIKON CORPORATION ISO 9001 Accredited by the Dutch Council for Accreditation ISO 9001 Certified NIKON CORPORATION Instruments Company ISO 14001 ISO 14001 Certified NIKON CORPORATION Yokohama Plant NIKON CORPORATION NIKON EUROPE B.V. NIKON INSTRUMENTS INC. 9-16, Ohi 3-chome, Shinagawa-ku, Tokyo 140-8505, Japan Phone: +81-3-3773-8122 Fax: +81-3-3773-8115 http://www.nikon.com/ http://www.nikon.co.jp/inst/ P.O. Box 222, 1170 AE Badhoevedorp, The Netherlands Phone: +31-20-44-96-222 Fax: +31-20-44-96-298 1300 Walt Whitman Road, Melville, N.Y. 11747-3064, U.S.A. Phone: +1-631-547-8500 Fax: +1-631-547-0306 NIKON CANADA INC. NIKON SINGAPORE PTE LTD CANADA Phone: +1-905-625-9910 Fax: +1-905-625-0103 SINGAPORE Phone: +65-2978123 Fax: +65-2978131 NIKON FRANCE S.A. NIKON AG FRANCE Phone: +33-1-45-16-45-16 Fax: +33-1-45-16-00-33 SWITZERLAND Phone: +41-1-913-62 00 Fax: +41-1-910-37 44 NIKON GmbH NIKON UK LTD. GERMANY Phone: +49-211-9414-0 Fax: +49-211-9414-322 UNITED KINGDOM Phone: +44-181-541-4440 Fax: +44-181-541-4584 NIKON INSTRUMENTS S.p.A. ITALY Phone: + 39-55-3009601 Fax: + 39-55-300993 Printed in Japan (0009-10)T Code No. 2CE-KXTH-3 This brochure is printed on recycled paper made from 40% used material. E
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