Nikon If Not Then NWL860

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IC Inspection Wafer Loaders

NWL860/641

Series

NWL-Series 03.1.21 9:01 AM ページ1

IC Inspection Wafer Loaders

NWL-860 Series

NWL-860TMB

NWL-860TMB SP

NWL-860TMB INX

Macro inspections of 8- to 6-inch wafers

Dust-free, stainless-steel body

SMIF elevator model

The perfect answer to macro inspection tasks

Back side macro inspection

Non-contact pre-alignment function

Ergonomic design

High reliability Simple, easy operation

High throughput

Communication function (option)

Back side center inspection

Pattern side macro inspection

Back side periphery inspection

The NWL-860 series provides a full range of macro inspection

capabilities—one of the features considered most essential

for inspecting semiconductor patterns with progressively

higher steps and ever-increasing layers.

A single cassette wafer loader capable of handling 8- and 6-

inch (200 and 150 mm) wafers, this series of wafer loaders

not only comes standard with pattern side macro inspection

capability, but also with the ability to perform back side

periphery and center macro inspections as well.

The NWL-860TMB SP comes in a stainless-steel body and

generates no static electricity, preventing particulate from

attaching to the wafers. The NWL-860TMB INX comes with an

SMIF elevator and both models feature a stop switch for

greater safeguards against abnormalities. MB-type models are

also available exclusively for macro inspections.

Besides pattern side macro inspection, the NWL-860 series

can perform back side periphery and center macro

inspections. Macro inspection parameters, such as wafer

rotation speed and tilt angle, can be set automatically or

manually. Use the macro setting knobs to preset initial

settings and make later adjustments using the joystick.

(Joystick adjustments not possible during back side center

macro inspections)

Prevention of wafer contamination is a vital issue when

inspecting semiconductors. To avoid any chance of

contamination, the NWL-860 series employs non-contact

pre-alignment using photoelectric sensors to center wafers,

avoiding all contact during orientation flat/notch operations.

Furthermore, the whole system is configured, so that the

entire inspection process can be performed without

disturbing the downflow air stream in the cleanroom.

Should an error occur, an error message appears on the

LCD panel with a wafer recovery feature. Even when the

power is turned OFF, the vacuum chuck stays ON, and the

wafer is automatically returned to the cassette when the

power is switched ON again. For even greater safety, the

SP and INX types both feature an emergency button.

To assure operation in a natural posture, ergonomics

surround every aspect of this system’s design. Operation

keys and knobs are located at the front and close to the

operator, so that operation requires a minimum movement

of the hand or eye. The wafer cassette is set at the front and

35° to the left of the operator, enhancing cassette setting

and streamlining visual wafer inspections.

The NWL-860 series uses a dialog-type operating

system with an LCD panel, in which display

information is logically classified, allowing settings

for each step to be made easily on a single screen.

Sophisticated functions such as file management

for cassettes and wafer samples further enhance

operational ease. A dedicated input keypad for

setting inspection processes and programming

wafers to be checked is also available as an option.

Not only is the speed of the elevator surprisingly

fast, but the use of a non-contact centering

mechanism makes it possible to perform alignment

operations quickly and accurately. A multi-arm

system also allows loading and unloading of wafers

with the utmost precision, increasing the overall

efficiency of transfer and wafer exchange

operations. This dramatically decreases cycle

times, providing levels of throughput never seen

before in any other system.

A data communication function conforming to SEMI

(SECS) standards can be added optionally,

enabling transfer of inspection data via the RS-

232C interface or by remote control. This proves

handy when expanding the system or incorporating

it into a total network.

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NWL-Series 03.1.20 4:53 PM ページ3

NWL-860TMB SP + ECLIPSE L200 Fiber illumination (option)

Orientation flat/notch detector

Wafer position detector

Feeder arm

Buffer section (syringe)

Pre-alignment sensor

Elevator section

Stop switch

Operation/display section Dedicated microscope base plate

Exchange arm

Dedicated stage (NWL-860 stage)

Rotation dial

Fine movement knob

Driving handle

IC inspection microscope

(ECLIPSE L200)

NWL-860TMB SP Control Panel

1. Cursor keys

2. LCD display

3. Function keys

4. Stop key

5. Micro Reject key

6. Macro Reject key

7. Manual key

8. Macro setting knobs

9. Pattern side macro inspection rotation speed

10. Pattern side macro inspection X tilt angle

11. Pattern side macro inspection Y tilt angle

12. Back side periphery inspection tilt angle

13. Back side center inspection rotation angle

14. Joystick

15. Start switch

625 (24.6)

535 (21.1) 375 (14.8)

918 (36.1)

838-856 (33.0-33.7)

Dimensional Diagram

NWL-860TMB SP + ECLIPSE L200

Unit: mm (inch)

1

2

3

4567

8

910

12 13

14

15

11

IC Inspection Wafer Loaders

NWL-860 Series

Nikon’s IC inspection microscope and the NWL-860

series constitute a highly efficient IC external

inspection system

NWL-860TMB INX + ECLIPSE L200 Fiber illumination (option)

Orientation flat/notch

detector

SMIF pod™

Wafer position detector

Feeder arm

Buffer section (syringe)

Pre-alignment sensor

SMIF elevator

Operation/display section

Exchange arm

Stop switch

NWL-860TMB INX Control Panel

1. Cursor keys

2. LCD display

3. Function keys

4. Stop key

5. Micro Reject key

6. Macro Reject key

7. Manual key

8. Macro setting knobs

9. Pattern side macro inspection rotation speed

10. Pattern side macro inspection X tilt angle

11. Pattern side macro inspection Y tilt angle

12. Back side periphery inspection tilt angle

13. Back side center inspection rotation angle

14. Stop switch

15. Joystick

16. Start switch

785 (30.1) 375 (14.8)

1168 (46.0)

760 (30.0)

Dimensional Diagram

NWL-860TMB INX + ECLIPSE L200

1

2

3

456

7

8

910

12 13

1514

16

11

Unit: mm (inch)

4 5

Dedicated stage

(NWL-860 stage)

Rotation dial

Fine movement knob

Driving handle

IC inspection microscope

(ECLIPSE L200)

Dedicated microscope base plate

NWL-Series 03.1.20 4:54 PM ページ5

For 6- to 4-inch Wafer Inspection

685 (655)/27.0˝ (25.8˝)

730 (730)/28.7˝ (28.7˝)

10.5˝ (9.7˝)

266 (246)/

MAX 220/8.7˝

598/23.5˝

Dimensional Diagram

NWL-641M + OPTIPHOT 150

Unit: mm/inch

IC Inspection Wafer Loaders

NWL-641M/641

IC Inspection Wafer Loaders

Simple, speedy wafer exchange

Operation is a breeze, thanks to the logical arrangement of keys on

the control panel. The NWL-641 series can memorize up to 10

combinations of wafer channels to be inspected. The orientation flat

detector allows the wafer direction to be set in four directions

(0°, 90°, 180°, 270°) individually during wafer loading onto the

microscope or during wafer unloading. Wafer exchange takes a

short two seconds.

360° rotation vacuum wafer chuck

The vacuum wafer chuck on the stage draws and holds a wafer

transferred by the loader, and if necessary, the wafer can be rotated

360°by using the syringe rotation knob, allowing the loaders to

meet the varying needs of microscopic inspection.

Enhanced macro observations with unique

fluttering mode (641M only)

The 641M incorporates sophisticated macro observation

movements, including Nikon’s original fluttering mode, tilt macro

rotation, and fluttering + tilt macro rotation.

Irregular-shaped wafer cassette capability

The loader in the NWL-641 series uses transmission-type laser

wafer sensors. These sensors check the presence of wafers in the

cassette, wafer tilt, as well as wafer deformation, to determine

automatically the ideal position in which to take the wafers in and

out, thus ensuring secure transfer.

Anti-contamination design

To significantly curtail dust generation from the equipment and the

attachment of particles to wafers, Nikon adopted a special design,

whereby the motor unit in the macro mechanism is located as far

apart as possible from the wafer under inspection.

NWL-641M

Figures in parentheses

are those for Type 641

Quick Reference Chart

NWL-860TMB

NWL-860TM

NWL-860T

NWL-860MB*

Wafer

size

6-

inch

8-

inch

Inspection mode

Micro Macro

Back side

macro

(center)

Back side

macro

(periphery)

Stop

switch

SMIF

elevator

SECS2

Stainless

steel

body &

peek

chuck

NWL-860TMB SP

NWL-860TM SP*

NWL-860T SP*

NWL-860MB SP

NWL-860TMB INX

NWL-641

NWL-641M

NWL-860MB INX

NWL-860TMB INX*

NWL-860MB INX*

Models

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Option

Option

Option

Option

Note: Models with asterisks are available on a special order basis.

(6-inch only)

(6-inch only)

Macro illumination

unit (option)

Setting switches

(hidden switches)

Orientation flat detector

Wafer position detector

Feeder arm

Dual exchange arms

Operation handle

Stage (rotatable 360°, with

vacuum wafer chuck)

598 mm (23.3 in.)

730 mm (28.7 in.)

6 7

NWL-Series 03.1.20 4:54 PM ページ7

WARNING TO ENSURE CORRECT USAGE, READ THE CORRESPONDING

MANUALS CAREFULLY BEFORE USING YOUR EQUIPMENT.

Specifications and equipment are subject to change without any notice or

obligation on the part of the manufacturer. September 2000.

ISO 14001 Certified

NIKON CORPORATION

Yokohama Plant

ISO 9001 Certified

NIKON CORPORATION

Instruments Company

ISO 9001

Accredited by the

Dutch Council for

Accreditation

ISO 14001

©2000 NIKON CORPORATION

NWL-641 NWL-641M

Wafer size 6, 5 and 4 inches

Wafer cassette Fluoroware®H-BAR type housing

Number of wafers 25 wafers

Inspection mode 1. Micro inspection 1. Micro inspection

2. Tilt macro inspection

Wafer transfer Robotic transfer with vacuum chuck

Orientation flat/notch By transmitted-type sensor

detection

Wafer angle before and after inspection can be specified in increments of 90

°

degrees

Stage Dedicated stage (rotatable 360°; with vacuum chuck)

Compatible microscopes

Nikon OPTIPHOT 300/200C/150, ECLIPSE L200

Dimensions (WxDxH) 246 x 655 x 245 mm, 266 x 655 x 245 mm,

and weight (Approx.) 21 kg 23.5 kg

Vacuum Pressure: –600 mmHg (–80 kPa) or less, Displacement: 10 nl/min. or more

Power source AC 100V/120V ±10%, 50/60 Hz, 1.7A max.

AC 220V/240V ±10%, 50/60 Hz, 0.85A max.

NWL-860TMB/860TMB SP NWL-860MB/860MB SP NWL-860TM/860TM SP NWL-860T/860T SP

NWL-860TMB INX NWL-860MB INX

Wafer size 8 to 6 inches (conforms to both SEMI and JEIDA)

Wafer cassette Fluoroware®PA182-60MB, Fluoroware®PA192-80M

Number of wafers 25 wafers (6-inch), 25 or 26 wafers (8-inch)

Inspection mode

Wafer transfer Robotic transfer with vacuum chuck

Pre-alignment Non-contact pre-alignment

Orientation flat/notch By transmitted-type sensor

detection Wafer angle before and after inspection can be specified in increments of 90° degrees

Stage Dedicated stage (rotatable 360°; with vacuum chuck)

Compatible microscopes

Nikon OPTIPHOT 300/200C/150, ECLIPSE L200

Dimensions (WxDxH) Main unit: 530 x 620 x 275 mm, 50 kg (INX type: 786 x 752 x 442 mm, 60 kg)

and weight (Approx.) Footprint (WxD): 900 x 620 mm (INX type: 1450 x 800 mm)

Vacuum Pressure: –600 mmHg (–80 kPa) or less, Displacement:10 nl/min. or more

Power source AC 100V/120V, 220V/240V ±10%, 50/60 Hz, 3.5A max.

Note: Class 1 laser equipment

Specifications

1. Micro inspection

2. Tilt macro inspection

3.

Back side center macro inspection

4.

Back side periphery macro inspection

1. Tilt macro inspection

2.

Back side center macro inspection

3.

Back side periphery macro inspection

1. Micro inspection

2. Tilt macro inspection 1. Micro inspection

*All models listed here are UL/CE approved.

Printed in Japan (0009-10)T Code No. 2CE-KXTH-3 E

This brochure is printed on recycled paper made from 40% used material.

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UNITED KINGDOM Phone: +44-181-541-4440 Fax: +44-181-541-4584

NIKON CORPORATION

9-16, Ohi 3-chome, Shinagawa-ku, Tokyo 140-8505, Japan

Phone: +81-3-3773-8122 Fax: +81-3-3773-8115

http://www.nikon.com/

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Phone: +31-20-44-96-222 Fax: +31-20-44-96-298

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Phone: +1-631-547-8500 Fax: +1-631-547-0306

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