E 536 Datasheet

User Manual: Pdf datasheet E-536 PicoCube Piezo Controllers

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PicoCube Piezo Controllers
High Dynamics and Resolution in up to Three Axes

E-536
 For P-363 PicoCube systems
 Peak power 3 × 100 W
 Extremely low noise
 Variants: High dynamics & high resolution
 Output voltage ±250 V

PicoCube controller in two variants

The E-536 PicoCube controller has three extremely low-noise amplifier channels for high-volt shear actuators. The controller
was specially designed to meet the requirements of extremely fast and high-resolution PicoCube XY(Z) piezo scanners. The E536 is offered in two variants for voltage ranges of -250V to +250 V and allows both static and dynamic applications. The
performance-optimized E-536.3x for especially dynamic applications is able to output peak currents of 200 mA within a small
signal bandwidth of 10 kHz. The E-536.3xH model variants with optimized resolution achieve a position resolution with the
PicoCube lower than 0.03 nm at a peak power up to 50 W. Both variants are available for closed-loop and open-loop
operation.

Highest resolution with high dynamics

Open-loop operation is ideal for applications where fast response times and very high resolutions are essential. The
specification or position feedback in absolute values is either not significant or is done by external sensors, as is the case in
atomic force microscopy. The P-363 PicoCube achieves a resolution of 0.05 nm and better.

Higher precision due to capacitive sensors

The E-536.3C versions have an integrated sensor / servo controller for closed-loop operation. The position is controlled, for
example by the PicoCube nanopositioning system with capacitive sensors, which then achieve a resolution to 0.1 nm.

Computer Control

The optional E-517 24-bit interface/display module allows control and position control via digital PC interfaces.

Fields of application

 Scanning probe microscopy
 Atomic force microscopy
 Scanning and screening

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Specifications
E-536.3C / E-536.30
Power amplifier / servo controller for P-363
PicoCube

E-536.3CH / E-536.30H
High-resolution power amplifier / servo
controller for P-363 PicoCube

E-536.3C / E-536.30

E-536.3CH / E-536.30H

Sensor type

Analog proportional-integral (P-I) algorithm with
notch filter
Capacitive sensors

Analog proportional-integral (P-I) algorithm with
notch filter
Capacitive sensors

Sensor channels

3/–

3/–

Sensor bandwidth

1.5 kHz

1.5 kHz

Sensor monitor output

0 to +10 V

0 to +10 V

Amplifier

E-536.3C / E-536.30

E-536.3CH / E-536.30H

Output voltage

-250 to +250 V

-250 to +250 V

Amplifier channels

3

3

Function

Sensor*
Controller type

Average output power per channel

10 W, limited by temperature sensor

6 W, limited by temperature sensor

Peak power per channel, <3ms

100 W

50 W

Average output current

30 mA

15 mA

Peak current per channel, < 3 ms

200 mA

100 mA

Bandwidth, small signal

10 kHz

2 kHz

Bandwidth, large signal, @ 100 nF
Ripple, noise
0 to 100 kHz
Current limitation

0.2 kHz
0.8 mVrms
<5 mVpp (100 nF)
Short-circuit proof

0.125 kHz
0.5 mVrms
<3 mVpp (100 nF)
Short-circuit proof

Voltage gain

50

50

Input impedance

100 kΩ

100 kΩ

Interfaces and operation**

E-536.3C / E-536.30

E-536.3CH / E-536.30H

Piezo connection

LEMO EGG.0B.701.CJL.1173

LEMO EGG.0B.701.CJL.1173

Sensor target and probe sockets

LEMO EPL.00.250.NTD

LEMO EPL.00.250.NTD

Analog input socket

SMB

SMB

Sensor monitor socket

DC offset setting

LEMO FGG.0B.306.CLAD56
Without servo: -5 to +5
With servo: 0 to +10 V
0 to 100 % with 10-turn potentiometer

LEMO FGG.0B.306.CLAD56
Without servo: -5 to +5
With servo: 0 to +10 V
0 to 100 % with 10-turn potentiometer

Miscellaneous

E-536.3C / E-536.30

E-536.3CH / E-536.30H

Operating temperature range

Mass

5 to 50 °C (above 40 °C, power derated)
Automatic disconnection of high voltage by
temperature sensor (75 °C max.)
8.1 kg / 7.8 kg (with E-517 module)

5 to 50 °C (above 40 °C, power derated)
Automatic disconnection of high voltage by
temperature sensor (75 °C max.)
8.1 kg / 7.8 kg (with E-517 module)

Dimensions

450 mm × 132 mm × 296 mm + handles

450 mm × 132 mm × 296 mm + handles

Operating voltage

115 V AC / 50-60 Hz or 230 V AC / 50-60 Hz

115 V AC / 50-60 Hz or 230 V AC / 50-60 Hz

Control input voltage

Overheat protection

* only E-536.3Cx with capacitive sensors
** Communication interfaces: RS-232, TCP/IP and USB (optional with E-517 computer interface / display module)
Ask about customized versions.

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Drawings / Images

E-536.3x: Operating limits with various piezo loads, capacitance values in µF

E-536.3xH: Operating limits with various piezo loads, capacitance values in µF

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The position measured by an ultrahigh-resolution external capacitive sensor shows that the resolution of the P-363 is
under 0.05 nm with an E-536.3x (open loop)

Ordering Information
E-536.3C

PicoCube piezo controller, 3 channels, capacitive sensors

E-536.30

PicoCube piezo controller, 3 channels, open loop

E-536.3CH

PicoCube piezo controller, 3 channels, high resolution, capacitive sensors

E-536.30H

PicoCube piezo controller, 3 channels, high resolution, open loop

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