E 536 Datasheet

User Manual: Pdf datasheet E-536 PicoCube Piezo Controllers

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High Dynamics and Resolution in up to Three Axes
PicoCube controller in two variants
The E-536 PicoCube controller has three extremely low-noise amplifier channels for high-volt shear actuators. The controller
was specially designed to meet the requirements of extremely fast and high-resolution PicoCube XY(Z) piezo scanners. The E-
536 is offered in two variants for voltage ranges of -250V to +250 V and allows both static and dynamic applications. The
performance-optimized E-536.3x for especially dynamic applications is able to output peak currents of 200 mA within a small
signal bandwidth of 10 kHz. The E-536.3xH model variants with optimized resolution achieve a position resolution with the
PicoCube lower than 0.03 nm at a peak power up to 50 W. Both variants are available for closed-loop and open-loop
operation.
Highest resolution with high dynamics
Open-loop operation is ideal for applications where fast response times and very high resolutions are essential. The
specification or position feedback in absolute values is either not significant or is done by external sensors, as is the case in
atomic force microscopy. The P-363 PicoCube achieves a resolution of 0.05 nm and better.
Higher precision due to capacitive sensors
The E-536.3C versions have an integrated sensor / servo controller for closed-loop operation. The position is controlled, for
example by the PicoCube nanopositioning system with capacitive sensors, which then achieve a resolution to 0.1 nm.
Computer Control
The optional E-517 24-bit interface/display module allows control and position control via digital PC interfaces.
Fields of application
Scanning probe microscopy
Atomic force microscopy
Scanning and screening
E-536
PicoCube Piezo Controllers
For P-363 PicoCube systems
Peak power 3 × 100 W
Extremely low noise
Variants: High dynamics & high resolution
Output voltage ±250 V
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Specifications
E-536.3C / E-536.30 E-536.3CH / E-536.30H
Function
Power amplifier / servo controller for P-363
PicoCube
High-resolution power amplifier / servo
controller for P-363 PicoCube
Sensor* E-536.3C / E-536.30 E-536.3CH / E-536.30H
Controller type
Analog proportional-integral (P-I) algorithm with
notch filter
Analog proportional-integral (P-I) algorithm with
notch filter
Sensor type Capacitive sensors Capacitive sensors
Sensor channels 3 / 3 /
Sensor bandwidth 1.5 kHz 1.5 kHz
Sensor monitor output 0 to +10 V 0 to +10 V
Amplifier E-536.3C / E-536.30 E-536.3CH / E-536.30H
Output voltage -250 to +250 V -250 to +250 V
Amplifier channels 3 3
Average output power per channel 10 W, limited by temperature sensor 6 W, limited by temperature sensor
Peak power per channel, <3ms 100 W 50 W
Average output current 30 mA 15 mA
Peak current per channel, < 3 ms 200 mA 100 mA
Bandwidth, small signal 10 kHz 2 kHz
Bandwidth, large signal, @ 100 nF 0.2 kHz 0.125 kHz
Ripple, noise
0 to 100 kHz
0.8 mV
rms
<5 mVpp (100 nF)
0.5 mV
rms
<3 mVpp (100 nF)
Current limitation Short-circuit proof Short-circuit proof
Voltage gain 50 50
Input impedance 100 kΩ 100 kΩ
Interfaces and operation** E-536.3C / E-536.30 E-536.3CH / E-536.30H
Piezo connection LEMO EGG.0B.701.CJL.1173 LEMO EGG.0B.701.CJL.1173
Sensor target and probe sockets LEMO EPL.00.250.NTD LEMO EPL.00.250.NTD
Analog input socket SMB SMB
Sensor monitor socket LEMO FGG.0B.306.CLAD56 LEMO FGG.0B.306.CLAD56
Control input voltage
Without servo: -5 to +5
With servo: 0 to +10 V
Without servo: -5 to +5
With servo: 0 to +10 V
DC offset setting 0 to 100 % with 10-turn potentiometer 0 to 100 % with 10-turn potentiometer
Miscellaneous E-536.3C / E-536.30 E-536.3CH / E-536.30H
Operating temperature range 5 to 50 °C (above 40 °C, power derated) 5 to 50 °C (above 40 °C, power derated)
Overheat protection
Automatic disconnection of high voltage by
temperature sensor (75 °C max.)
Automatic disconnection of high voltage by
temperature sensor (75 °C max.)
Mass 8.1 kg / 7.8 kg (with E-517 module) 8.1 kg / 7.8 kg (with E-517 module)
Dimensions 450 mm × 132 mm × 296 mm + handles 450 mm × 132 mm × 296 mm + handles
Operating voltage 115 V AC / 50-60 Hz or 230 V AC / 50-60 Hz 115 V AC / 50-60 Hz or 230 V AC / 50-60 Hz
* only E-536.3Cx with capacitive sensors
** Communication interfaces: RS-232, TCP/IP and USB (optional with E-517 computer interface / display module)
Ask about customized versions.
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Drawings / Images
E-536.3x: Operating limits with various piezo loads, capacitance values in µF
E-536.3xH: Operating limits with various piezo loads, capacitance values in µF
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The position measured by an ultrahigh-resolution external capacitive sensor shows that the resolution of the P-363 is
under 0.05 nm with an E-536.3x (open loop)
Ordering Information
E-536.3C
PicoCube piezo controller, 3 channels, capacitive sensors
E-536.30
PicoCube piezo controller, 3 channels, open loop
E-536.3CH
PicoCube piezo controller, 3 channels, high resolution, capacitive sensors
E-536.30H
PicoCube piezo controller, 3 channels, high resolution, open loop

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