PI CAT132E Precision Positioning And Motion Control
User Manual: Pdf Industry-Compliant, Motorized, Precision Positioning Systems
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VOICE COIL BALL SCREW AIR BEARING REPEATABILITY PIGLIDE MICRO POSITIONING ENGINEERED SYSTEMS DIRECT DRIVE NANOPOSITIONING ACCURACY PRECISION POSITIONING AND MOTION CONTROL LINEAR MOTOR HIGH DYNAMICS PIMAG® W W W. P I . W S Precision Positioning and Motion Control Product Finder Online – What is the easiest way for you to find the best positioning solution? The printed catalog is a major showcase for PI and, as well as presenting the entire product range, it also acts as a reference for all of our motion solutions. However, to take advantage of the latest products and developments, we recommend using the product finder on the PI website www.pi.ws. How to use the product finder: Select the product type specified by the axes of motion required. Selection of more criteria expands or shortens the list of results. Select more than one filter at a time, for example, to find positioning stages designed for higher load capacity, too. INTRODUCTION Markets and Applications ............................................................................................. Motorized Standard Products Overview ....................................................................... Technological Depth for Optimized Products ............................................................... Custom Examples Picture Wall .................................................................................... The PI Group – A Strong Partner for Industry and Research ........................................ The PI Group Milestones .............................................................................................. Expert Consulting ......................................................................................................... Engineering Design Expertise and Customization ........................................................ Production Capabilities ................................................................................................ Vacuum Know-how ...................................................................................................... From 1-off to Series: OEM Users Benefit From Maximum Flexibility............................ Global Service and After-Sales ..................................................................................... Preferred Solutions for High-Precision Automation Tasks ........................................... 2 W W W. P I . W S 04 10 12 15 17 18 20 21 22 23 24 25 26 Introduction Translation Stages PRODUCTS XY Stages Translation Stages ............................................................................................................................................................... 28 Precision Linear Stages................................................................................................. 30 High-Precision Linear Stages........................................................................................ 72 PIglide Linear Air Bearing Stages.................................................................................. 112 Z Stages........................................................................................................................ 126 Rotation Stages XY Stages ............................................................................................................................................................................ 138 XY Stages with Mechanical Bearings ........................................................................... 140 PIglide XY Stages with Air Bearings ............................................................................. 158 Linear Actuators Rotation Stages ................................................................................................................................................................... 162 Rotation Stages ............................................................................................................ 164 Rotation Stages with Torque Motor and Air Bearing ................................................... 184 Goniometer Stages ...................................................................................................... 192 Linear Actuators ................................................................................................................................................................... 200 Voice Coil Actuators ..................................................................................................... 202 Screw-Drive Precision Actuators .................................................................................. 216 High-Load Screw-Drive Actuators ................................................................................ 226 Motion Control Motion Control ..................................................................................................................................................................... 232 Industrial motion control .............................................................................................. 234 Modular Multi-Channel Piezo Controllers ..................................................................... 250 Stepper Motor Controllers ............................................................................................ 252 DC Motor Controllers ................................................................................................... 254 Voice Coil Controllers ................................................................................................... 258 Gantry Systems Gantry Systems ................................................................................................................................................................... 260 Throughput, Precision and Reliability .......................................................................... 262 Components & Accessories ................................................................................................................................................. 264 Air Bearings .................................................................................................................. 266 Accessories for Air Bearings and Stages ...................................................................... 280 Adapter Brackets for Multi-Axis Combinations ............................................................ 286 More information, step-files and downloads are available from our website www.pi.ws. All data subject to change without notice, ©PI 2018. 3 MOTION | POSITIONING Terms and Technology Glossary Components & Accessories Terms and Technology Glossary .......................................................................................................................................... 290 Markets and Applications SEMICONDUCTOR PRODUCTION AND INSPECTION The automation of process steps in production and inspection is steadily on the increase. At the same time, the requirements to accuracy required in motion and positioning are growing. Today, in many industrial areas accuracy levels are needed as they were needed just a few years ago in research institutions. PI with its linear stages, rotation stages, and lifting stages, as well as more complex multi-axis kinematics, offers excellent solutions for industrial applications in many growing markets and even for very general automation tasks with challenging specifications. The requirements to the straightness and flatness, and the precision are particularly high in the production and inspection of semiconductors or circuit boards. High dynamics of the motion axis are required for an optimized throughput. In this case, a standard A-311 stage with a 200 mm × 200 mm travel range in XY carries a customized rotation stage. All stages have air bearings to warrant the best flatness and direct drives for precision and high dynamics positioning. In addition, it is possible to hold a stable position The semiconductor industry often requires very specific solutions, e.g., for wire or ball bonders. PI's Gantry systems are an ideal basis for customized adaptations. The strokes and the stacking height can be varied almost arbitrarily, the configuration of the motors provides extremely high accelerations of up to 5 g and this ensures the highest productivity in the application. Control features of ACS motion controllers such as “Input Shaping” help to build a stable system which actively suppresses possible vibrations 4 W W W. P I . W S Wafer inspection system with integrated linear motor axes for fast precision XY scanning. Stepper motor axis for fine vertical position of the inspection equipment Introduction PHOTONICS PACKAGING AND OPTICAL ALIGNMENT During production and inspection of components with optical data transmission, it is important to align fibers or fiber arrays for optimum connection with the highest possible accuracy. Position tolerances way under 50 nm are usual and multi-channel inputs and outputs require simultaneous alignment in several axes. In this multi-axis system for wafer inspection and photonics alignment, high speed linear motor stages are used for the long xy stroke, while mechanical stages with stepper motors and screw drives are used for the other degrees of freedom that do not require too high dynamics 18-axis double alignment system provides fast NxM alignment of SiP devices in wafer probers. Cascade Microtech’s pioneering CM300xi photonics-enabled engineering wafer probe station integrates PI’s parallel-kinematic Fast Multichannel Photonics Alignment systems for high throughput, wafer-safe, nanoprecision optical probing of on-wafer Silicon Photonics devices. (Image: Cascade Microtech, a FormFactor company) In photonics, automated alignment is the key to high throughput and outstanding quality. The basis of this optical alignment system is a very stiff XYZ set-up consisting of three motorized linear stages and a P-616 NanoCube® piezo nanopositioner. The low overall height simplifies integration in limited installation space. The motorized drives make longer travel ranges possible and at the same time, the NanoCube® nanopositioner ensures fast scanning motion and dynamic compensation of drift effects. Flexure guides and all-ceramic insulated PICMA® actuators guarantee a long lifetime. Because all drives are equipped with position sensors, it is possible for example, to reliably prevent collisions with expensive silicon wafers 5 MOTION | POSITIONING Markets and Applications Automated testing procedures ensure quality, e.g., in the production process of printed circuit boards (PCBs). Thereby, the precise control of the forces acting on the sensitive boards as well as the fast capturing and interpretation of measurement data are extremely important INDUSTRIAL MANUFACTURING The field of industrial manufacturing and assembly offers the widest range of applications for the PI micropositioning stages. In many applications the precision requirements keep growing for industrial application. For example, digital printing becomes more and more common. The accuracy of the separate dots needs to be better than 20 µm to be recognized as equidistant by the human eye. This requires motion technology providing an accuracy typically 10 times higher meaning 2 µm, as well as motion with constant speed, good straightness and flatness. Another example is force-controlled testing of a touch screen, a keyboard or electronic car keys, as well as the control of force with which small parts are being assembled. Here, PI offers advanced solutions for those markets using its proprietary voice coil and force sensor technologies. 6 W W W. P I . W S Introduction LASER MATERIAL PROCESSING Laser cutting for example, often requires lowest tracking errors while following the arbitrary path of the customer’s workpiece. This means very dynamic multi-axis motion that is ideally realized by using linear motor solutions which combine dynamics and accuracy. An additional vertical motion is typically realized using a ball screw stage. For improved dynamics in the Z-direction, a linear motor axis can be equipped with a mechanical, magnetic or pneumatic weight balance. These applications can be served with standard linear stages with a debris protection or with fully customized solutions. Building Highly Productive Laser Systems ACS Motion Control, as part of the PI group, allows to supply highly sophisticated Motion Controller and Universal Drive Modules for the control of laser processing applications. Control of the laser power and the triggering of the laser is done by the LCMV2 Laser Control Module. A dedicated software to create a custom specific Human Machine Interface (HMI) is available as well. Additionally integrating a 3rd party galvo scanner allows to decouple the high and the low frequencies of motion: The high frequencies will be covered by the galvo scanner and the low frequency motions will be executed by PI linear stages. The resulting possibilities for the overlapping motion of the scanner and stages are practically unlimited and allow to create best-productivity systems with high-precision motion without any stitching errors. SPiiPlusEC PI’s dynamic positioning systems combined with ACS motion controllers become fast, productive systems which, with the help of lasers, can label, mark, rip, cut, or drill UDMnt ACS Motion Control and PI motion systems are perfectly matched to each other. A solution from a single-source supplier does not just offer the customer sophisticated positioning technology and high-performance control solutions, but also faster start-up and high flexibility when implementing new requirements 7 MOTION | POSITIONING Markets and Applications Typical 2-axis setup with clear aperture for the scanning of larger surfaces 3-axis combination of linear motor stages. The vertical axis uses weight compensation and it can, therefore, move with high dynamics while, at the same time, offering the best positioning accuracy AUTOMATED OPTICAL INSPECTION (AOI) To increase productivity, it is very common to do a meander scan. While one axis generates a motion with constant speed, the perpendicular axis moves one step to the next line. Pictures are taken during the constant speed motion which leads to high requirements in straightness and flatness of those stages. The field of optical inspection widens as the requirements in quality assurance are growing higher and higher. There are different ways of inspecting devices like PCB, electronic components, and medical samples. The easiest way is to move from point to point, stop, and take a picture. This requires fast step-and-settle times and a high stability when on target position. To cover large surfaces will take a long time. In many cases an additional Z-stage is used for autofocusing during the scan. Those Z-stages typically carry the objective and have to execute a high-bandwidth, very fast short-stroke motion. Depending on the requirements in stroke, PI offers different solution for the vertical systems. 8 W W W. P I . W S Introduction The sample positioning setup inside the holography endstation uses a variety of PI’s motorized translation and rotary stages, as well as piezo stages for ultra-fine positioning (Image: M. Osterhoff, Institute for X-Ray Physics, Georg-August-University Göttingen) BASIC RESEARCH, SCIENTIFIC INSTRUMENTATION Why scientists rely on PI: Creativity for Research and Development. Many scientific publications cite PI systems because they are an important prerequisite for successful research and development projects. Customized designs for university research are everyday business for PI, also for environmental conditions such as UHV to 10–10 hPa, radiation, or strong temperature changes down to the cryogenic range. The spectrum reaches from completely new designs to small modifications of standard products for a better adaptation to the application. Important fields of research are, for example, beamline instrumentation, micro systems and nanotechnology. Hybrid drive, consisting of electric motor and piezo actuator, for optimum positioning accuracy and minimum path deviation Compact linear translation stage that features two separate moving plates on one guiding 9 MOTION | POSITIONING Motorized Standard Products Overview Linear Actuators n Optional force control n Screw or voice coil drive n Compact Linear Stages n Travel range up to several 100 mm n Screw or direct drive n Mechanical n Incremental n Vacuum or air bearing or absolute encoders or clean room compatible Rotary Stages n 360° or goniometer stages n Worm or direct drive n Mechanical n Incremental n Vacuum or air bearing or absolute encoders or clean room compatible XY Stages n Screw or direct drive n Mechanical n Incremental n Optional 10 W W W. P I . W S or air bearing or absolute encoders aperture Introduction Broad Range of Standard Axes The PI Group has many years of experience in the development and construction of highly complex motion systems with the highest precision classes. The experience gained over the years, mainly from customized solutions, has been transferred to the standard products. As a result, a broad spectrum of standard positioning systems has been established, which offers many options within the individual series such as variable travel ranges, different motors, or adaptations to different ambient conditions such as a vacuum and clean-room environments. Today, the use of PI positioning systems is very common in robust industrial environments with high demands on lifetime and productivity. Stacked Systems Configured from Standard Products n Flexible n Fast to adapt to custom application n Cost-efficient solution Integrated System Solutions n Gantries n Fast with industrial motion controllers multi-channel photonics alignment systems 11 MOTION | POSITIONING Technological Depth for Optimized Products From Standard to Custom Products Customization on all levels of integration PI’s proprietary technological know-how and vertically integrated production are the basis for the successful development of customized motion systems from scratch. All technologies can be adapted specifically to an application. Examples range from a PIMag® voice coil drive for integration into an OEM system, to complex multi-axis positioning setups, to fully integrated, turn-key system solutions. Individual assembly of a stage PI produces core components in-house for its precision positioning systems. This applies to sensors, electronics, and motors as well as certain milled parts with particularly low tolerances PI’s own development of guiding technologies allows the design of individual solutions. Linear guiding technologies such as flexures for small displacements, air bearings for extreme requirements on travel accuracy, or magnetic levitation for the highest demands in up to six degrees of freedom are developed in-house. Leveraging of long-standing piezo technology at PI Ceramic, PI is able to manufacture ceramic bearings in its own facilities. For many requirements, mechanical bearings in different precision grades from highly qualified suppliers are used 12 W W W. P I . W S Introduction Systems From a Single Source The controller technology of ACS Motion Control ensures that even complex industrial applications can be managed by one single source. This means that PI can offer ideal solutions from one single source to meet the demands of the most diverse industries, which all need reliable, durable technology with increasing levels of precision. Modular multi-axis controllers from ACS for automation control are based on an internal EtherCAT network. This modular technology allows to control stages needing a bus voltage from 24 VDC up to 560 VDC and a peak current of 5 A up to 90 A. The ACS control technologies are designed especially for direct drives such as voice coils and linear motors in the best possible way enabling fast settling times, high speed stability and low jitter OEM controllers from PI meet customers’ requirements in every aspect. They are available for any drive technology and can be adapted to include special functions such as force control Positioning stages with PIMag® linear motor and with PIOne measuring system allow minimum incremental motion and the highest precision such as for example, the V-551.xD linear stage. The diagram shows steps from 1 nm and the idle noise of <±0.4 nm. In the linear motor axes, this precision can be combined with long travel ranges, high velocities, and accelerations Compact motion control solutions permit the control of individual axes with different drive technologies such as stepper, DC or linear motors and piezo-based drives. The modular design allows a subsequent adaptation of the network while using one common control interface 13 MOTION | POSITIONING Technological Depth for Optimized Products From Standard to Custom Products In-House Technological Expertise All decisive technologies required for the drive or motor, the measuring system, the motion controller, and the guiding system, are available in-house. To serve industrial applications, in-house development and the production capabilities of PIMag® magnetic drive and PIglide air bearing technologies are essential. PI also has production capabilities for high-end mechanical parts such as the milling of components with lowest tolerances. 0 10 20 30 40 50 mm Commercially available torque motors offer very high torque but only limited apertures. This customized PIMag® torque motor has a particularly large aperture and it positions with high dynamics and stability while needing minimal installation space. It can be integrated as a rotation stage on top of a PI hexapod PIMag® linear motors with or without iron core are the result of in-house development. In this way, specific properties of the stages and axes can be influenced directly. PI is in a position to develop customized linear motor and voice coil solutions not only for standard products but also for customized OEM solutions, where special features are needed. In most cases, the form factor of such a motor will be customized and adapted to the customers’ needs PIMag® voice coil drives can be designed with a particularly compact size and they can be directly integrated into the customers’ application. The PIMag® technology and dedicated simulation tools allow to optimize the force-to-size ratio for a required form factor The highly precise PIOne linear encoder, one of PI’s own measurement systems, permits a signal period to 0.5 µm. In the controller, sine/ cosine signals are evaluated which allow for a very high position measurement accuracy of down to a fraction of a nanometer 14 W W W. P I . W S Introduction Custom Examples Picture Wall 56 motors, 16 motion controllers, and 20 tons weight make the system for Microscopy and Quality Assurance (MiQA). The unique system integrates hexapods, rotation stages, goniometers, and a custom sample stage and will be used in a beamline for X-ray microscopy and the qualification of X-ray optics. Virtually all available PI technologies are combined here in a highly specialized solution providing the best possible accuracy for this application, resulting in 80 nm at the tool center point over multiple stacked axes Focusses an objective in space: Linear stage for the “Mars 2020” NASA mission Coordinate measuring machines (CMM) and metrology tools use a variety of design architectures, including moving gantries, static gantries, cantilevered XYZ, and many others. The most common type of CMM is composed of three orthogonal axes (X, Y, and Z) operating in a three-dimensional coordinate system. Each axis has a position encoder that indicates the position of that axis. The machine will read the input from the touch probe, as directed by the operator or computer program. The machine then utilizes the X, Y, and Z coordinates of each of these discrete points to determine size and position of the part being measured 15 MOTION | POSITIONING Custom Examples Picture Wall Complete autofocus system with PIMag® voice coil drive. Not only the voice coil stage is supplied by PI but also the alignment tools and an alignment routine to warrant highest precision assembly of the payload The dynamics and precision of voice coil or linear motor stages is required in vertical direction as well. For an improved position stability PI offers various solutions for a counter balance system which can be based on springs, magnetic solutions and pneumatic cylinders. The picture shows a modified V-528 standard product with PIMag® direct drive and gravity compensation for vertical applications. The compensation is done by a constant force spring and is adjusted precisely to the customers payload Customized parallel-kinematics stage with six degrees of freedom. The PIMag® linear motors ensure high dynamics and precision as required in optical alignment or fiber alignment. The solution is based on 3 XY stages which are driven by linear motors that allow high dynamics for the precision alignment. The SpaceFAB parallel kinematic allows a very flat design with long strokes in x and y. In comparison to a PI Hexapod, the footprint of the SpaceFAB is relatively large, and the hexapod is better suited for longer vertical strokes 16 W W W. P I . W S Introduction The PI Group – A Strong Partner for Industry and Research The PI headquarters in Karlsruhe, Germany, manifests the continuous growth. In front, the 2017 Technology Center Over the last four decades, PI (Physik Instrumente) has developed into the leading manufacturer of nanopositioning technology. The key element and motivation of the entrepreneurial behavior have always remained the same: Finding the best possible solution for the customer. PI is well known for the quality of its products and has been one of the leading players in the global market for precision positioning technology for many years. One of the most important building blocks for this is the team spirit within the international PI family, which is based on mutual understanding and support that goes beyond international borders and functional restrictions. PI is a privately owned company with healthy growth, more than 1000 employees worldwide and a flexible, vertically integrated organization, which enables PI to fulfill almost any request in the field of innovative precision positioning technology. The foremost priority for PI is to be a reliable and highly qualified partner for the customer. 17 MOTION | POSITIONING The PI Group Milestones A Success Story Well known for the high quality of its products, PI (Physik Instrumente) has been one of the leading players in the global market for precision positioning technology for many years. PI has been developing and manufacturing standard and OEM products with piezo or motor drives for more than 40 years. In addition to four locations in Germany, the PI Group is represented internationally by fifteen sales and service subsidiaries. All of our customers worldwide can rely on this. Market introduction of PILine® ultrasonic piezomotors Foundation of PI Ceramic in Thuringia, Germany, cornerstone for market leadership in nanopositioning technology Founding year of PI 2001 1998 1994 1993 1992 Market introduction of capacitive position sensors, implementation in piezo-based nanopositioning systems 1991 1987 1970 Market introduction of six-axis parallelkinematic positioning systems (Hexapods) Market introduction of digital control electronics New subsidiary in the USA New subsidiary in Japan New subsidiaries in Great Britain and France 18 W W W. P I . W S New subsidiary in Italy Introduction Market introduction of the PICMA® multilayer piezo actuators 2015 2016 Market introduction of the magnetic PIMag® direct drives Acquisition of majority shares in ACS Motion Control 2014 Acquisition of majority shares in miCos GmbH, Eschbach, Germany Introduction ofair bearings 2011 Market introduction of the NEXLINE® high-performance piezo linear drives 2002 2004 2007 Acquisition of Nelson Air Corp., USA Market introduction of Q-Motion® and PiezoMikes Market introduction of NEXACT® piezo linear drives New subsidiary in China New subsidiaries in Korea and Singapore New subsidiaries in Taiwan and the Netherlands 19 MOTION | POSITIONING Expert Consulting Time for qualified technical consultation is crucial for the success of high-tech projects The PI Group can respond precisely to what customers want: Specific requirements can often only be satisfied by customized solutions – solutions that can be found by unconventional and creative thinking. Together with the customers, PI plans and realizes individual solutions for the most varied applications and integration levels. And that means that PI’s customers can always be sure that they will get the best solution every time. Customers directly benefit from: Highly Qualified Consultancy Through Trained Specialists Individual advice often is key to solve a complex problem. PI sales engineers are ready to come on site with all the time necessary for a solid understanding of the topic. Or they will gladly meet at the PI head office. All PI sales engineers have a background in natural sciences or engineering, and have up to 20 years of experience in optical, micro- or nanopositioning technology. 20 W W W. P I . W S International Support PI subsidiaries and distributors in many countries across the world guarantee global support – a decisive advantage, especially for globally operating customers. PI has its own sales and service offices in all important markets. Moreover, the company maintains testing devices for nanometrology on three continents. PI Shanghai and PI USA have additional development and manufacturing resources that allow rapid local reaction to custom-engineered specifications. Introduction Engineering Design Expertise and Customization Core Technologies n I n-house manufacturing of piezo components and piezo actuators n M agnetic direct drives: linear motors and voice coils n A ir bearings, magnetic and flexure guides n C omprehensive range of piezo motor technologies n Nanometrology sensors n P arallel-kinematic systems for positioning in six axes (Hexapods) n Motion control technology n Software The development and customized design of electromagnetic direct drives that are used for high-resolution motion and positioning tasks require a scientific approach to the technology. The images show the analysis of magnetic fields down to a magnitude of 5 µT that were used to select the optimum position of the drive components within an application Unique Technological Breadth The technological diversity of the PI Group is unrivalled all over the world. PI develops, manufactures, and qualifies all its core technologies itself. PI is therefore not dependent on components available on the market. That puts PI in a position to offer its customers the most advanced products for motion and positioning tasks – without technological restriction. Customized Solutions With this background, PI develops positioning solutions with innovative drive technologies for high-tech applications worldwide. PI covers the whole motion range from finger-tip sized nanopositioners to large-scale stages with long travel ranges, through their plethora of differ-ent drive and guiding systems. Calculation of the magnetic flux density and currents for a novel voice coil drive allowing multiple degrees of freedom 21 MOTION | POSITIONING Production Capabilities PI’s flexibility in serial production allows for fast adaptation of both processes and quantities A modern production management and an integrated management system allow PI to guarantee the high quality of its products, processes, and services. The continual improvement of organization and processes is an integral part of the corporate culture. KAIZEN workshops and an active innovation management are important elements for achieving this. The production processes for the standard range are made flexible by the fractal production structure and it is therefore possible to manufacture even large series with full process control. Active, system-based requirements management makes it possible to dispense with comprehensive storage facilities. n 13,000 m² of overall production space n 5,000 m² for cleanrooms n A ir-conditioned n V acuum chambers for startup and residual gas analysis n M easuring technology with traceable, calibrated measuring equipment n M onitoring of piezo actuator technology from material composition to final inspection n I n-house manufacturing of positioning sensors Vertical Production Range and Production Capacity n P roduction The product spectrum ranging from the two-ton hexapod to the 10-gram nanopositioner requires PI to have the equipment and technologies at its disposal that allow the systems to be manufactured, assembled, and qualified. n F ractal 22 W W W. P I . W S and vibration-proof measuring conditions hall with measuring technology for heavy loads production organization Introduction Vacuum Know-How PI offers high-precision solutions for positioning in vacuum conditions to 10–10 hPa. Positioning solutions in a vacuum follow clearly defined constraints. This applies to the limited installation space, as well as prevention of contamination and excessive heat input. Selection of the optimum drive technology for the respective application and the mechanical design must be matched exactly to the required load capacity and velocity as well as the intended operating and planned duty cycles. The handling regulations for vacuum positioning systems are just as important as the design principles. Cleanrooms are available for assembling larger parts. Suitable packaging and the corresponding instructions for the recipient are part of shipping. Vacuum chambers are available in several sizes with vacuum levels down to 10–10 hPa, where start-up and measurement of outgassing, but also interferometric measuring of position accuracy under real operating conditions is possible. At PI, several vacuum chambers are available in various sizes 23 MOTION | POSITIONING From 1-off to Series: OEM Users Benefit From Maximum Flexibility PI serves both the research and industrial markets. The complete control over the design and manufacturing process provides our customers with significant competitive advantages. Optimized processes allow PI to deliver customized products in quantities up to several 100,000 units per year at low cost and right on time. The range of OEM products offered by the PI Group varies widely, ranging from “bare” actuators and sensors to highly integrated parallel-kinematic positioning systems. Evaluation of preproduction run samples, test procedures, production processes and quality management are all included in the development process. Services n G lobal n R isk account management: Close proximity to the customer thanks to international presence assessment from design to delivery n D epending n C opy on the task: From the drive to the turnkey system exactly policy n P reparation n P roduction of internal and external certification of series of several 10,000 units in the shortest time n S ustainable spare parts service n M anufacturing and testing capacities from functional samples to mass production Standardized performance control with full documentation of individual measurement charts 24 W W W. P I . W S Introduction Global Service and After-Sales On-site training is key to optimize and maximize the potential of new PI systems Start-Up, User Training and Life Long Support Contracted Services PI is dedicated to supporting its customers right from the initial consultation through to when a customer has purchased a PI system. Beyond that, PI’s services division is committed to ensuring that every aspect of owning a PI system is catered for. Customers subscribing to Contractual Support Services will receive commitment from PI to achieving agreed Service Levels. These include responding to the customer’s first contact and providing remote technical support, through to response times for a PI expert to be on site, either to repair or replace a defective unit. Global Coverage Supported by 4 Global Service Hubs in Asia, China, Europe and USA, with field product specialists working from these hubs, PI is able to support all technologies and customer applications via this global services team. PI’s Standard On-Site Services n S et up and Commissioning – On-site support to un-box, set-up and commission the PI system n T raining Program – User training on software and programming, through to optimization of system performance n M aintenance Systems Health Check – Preventative maintenance to prolong the life of the motion device n S upport – Ongoing remote and on-site support to maximize system uptime and provide maintenance for the whole life of any system Extended Warranty Most customer applications require PI’s systems to be operational beyond the standard warranty period. Extending the warranty for additional year(s), is simply extending the customers peace of mind and PI’s commitment that the product will not fail due to poor workmanship or faulty materials. Should a customer’s system then fail due to these conditions, PI will cover the costs to repair or replace it. 25 MOTION | POSITIONING Preferred Solutions for High-Precision Automation Tasks Application Examples Major Requirements Translation Stages Z-Stages see p. 28 ff see p. 126 ff XY-Stages, Gantry Systems Rotation & Goniometer Stages Linear Actuators see p. 138 ff, see p. 260 ff see p. 162 ff see p. 200 ff Autofocus High dynamics High repeatability Compact size High precision L-505 L-509 L-511 MTS-65 V-522 V-524 V-528 Automated Optical Inspection (AOI) Good precision High dynamics L-402 L-412 L-417 L-505 V-412 V-417 Biotechnology / Life Science and Microscopy High dynamics High repeatability Good precision L-402 L-505 L-509 L-511 M-403 M-404 M-413 M-414 MTS-65 V-551 Digital Printing High dynamics V-412 V-417 V-508 V-522 V-524 V-528 Electronics Manufacturing High dynamics Constant velocity Position stability L-402 L-412 L-417 V-412 V-417 V-508 V-551 Flatpanel Inspection Best straightness and flatness Constant velocity High repeatability A-110 A-121 A-123 V-412 V-417 Laser Cutting High precision Long stroke High dynamics L-412 L-417 L-509 L-511 V-408 V-412 V-417 L-310 UPL-120 A-321 Gantry L-731 L-738 Laser Marking Compact size High precision High repeatability HPS-170 M-110 M-122.2DD1 MTS-65 V-408 V-508 V-522 V-524 V-528 L-310 UPL-120 A-311 L-731 L-741 V-731 V-741 Machine Tooling / Fast Tooling High dynamics Compact size Constant velocity A-131 Medical Industry High repeatability Good precision Best straightness and flatness A-131 L-505 M-403 M-404 M-413 M-414 V-508 V-551 L-310 UPL-120 L-731 L-738 L-741 Metrology and Testing Best straightness and flatness Constant velocity High dynamics A-110 A-121 A-123 HPS-170 M-406 M-511 M-521 M-531 V-508 V-522 V-524 V-528 V-551 L-310 UPL-120 L-731 L-738 L-741 V-731 V-738 V-741 Optical Alignment High repeatability High dynamics Compact size A-141 L-505 L-509 L-511 M-110 M-122.2DD1 M-511 M-521 M-531 V-900KPIC L-310 UPL-120 V-731 V-738 V-741 L-731 L-738 L-741 L-611 PRS-200 UPR-100 UPR-120 V-731 V-738 V-741 A-311 A-322 Gantry L-310 UPL-120 26 W W W. P I . W S L-741 V-731 V-738 V-741 L-611 PRS-200 UPR-100 UPR-120 UPR-120 Air V-900KPIC UPR-100 UPR-120 L-220 L-239 V-273 V-275 V-277 L-611 PRS-200 UPR-100 UPR-120 L-611 M-116 PRS-200 UPR-100 UPR-120 V-731 V-738 V-741 L-611 PRS-200 UPR-100 UPR-120 UPR-120 Air V-900KPIC A-62x WT-100 L-611 WT-90 PRS-200 WT-120 UPR-100 UPR-120 UPR-120 Air WT-85 V-273 V-275 V-277 A-62x L-611 M-060 M-061 M-062 M-116 PRS-200 UPR-100 UPR-120 L-220 L-239 M-227 M-228 M-229 M-230 M-232 M-235 M-238 WT-85 WT-100 WT-90 WT-120 Introduction Application Examples Major Requirements Translation Stages Z-Stages see p. 28 ff see p. 126 ff Photonics Probing & Packaging Compact size High repeatability High dynamics A-110 A-121 A-123 A-141 L-505 M-403 M-404 M-413 M-414 Precision Micro Assembly Most compact size Dynamic motion High duty cycles A-141 L-402 L-406 L-408 L-505 M-110 M-122.2DD1 M-406 Sample Inspection Best straightness and flatness Force control A-110 A-121 A-123 HPS-170 LS-180 M-511 M-521 M-531 Scanning High repeatability High dynamics Constant velocity Position stability A-110 A-121 A-123 A-131 A-141 V-408 V-412 V-417 V-508 V-522 V-524 V-528 V-551 Scientific Instrumentation Versatility Networkable solutions Compact size HPS-170 L-402 L-406 L-408 L-505 L-509 L-511 LS-180 M-110 M-122.2DD1 M-406 M-511 M-521 M-531 MTS-65 V-408 V-522 V-524 V-528 VT-80 Semiconductor High dynamics High precision Position stability Constant velocity HPS-170 LS-180 V-522 V-524 V-528 V-551 M-511 M-521 M-531 V-408 V-522 V-524 V-528 V-551 XY-Stages, Gantry Systems Rotation & Goniometer Stages Linear Actuators see p. 138 ff, see p. 260 ff see p. 162 ff see p. 200 ff L-306 L-310 M-501 UPL-120 L-731 L-738 L-741 V-731 V-738 V-741 L-611 WT-100 PRS-200 WT-90 WT-85 WT-120 L-310 UPL-120 L-738 V-738 DT-34 DT-80 L-611 M-060 M-061 M-062 M-116 PRS-200 RS-40 UPR-100 UPR-120 UPR-120 Air WT-85 WT-100 WT-90 WT-120 L-220 L-239 V-273 V-275 V-277 V-900KPIC L-310 UPL-120 Gantry A-62x L-611 PRS-200 UPR-100 UPR-120 UPR-120 Air WT-85 WT-100 WT-90 WT-120 V-273 V-275 V-277 V-900KPIC A-311 A-322 V-731 V-738 V-741 A-62x L-306 L-310 M-501 UPL-120 A-311 A-322 Gantry L-731 L-738 L-741 V-731 V-738 V-741 A-62x DT-34 DT-80 L-611 M-060 M-061 M-062 M-116 PRS-200 RS-40 UPR-100 UPR-120 UPR-120 Air L-220 L-239 M-227 M-228 M-229 M-230 M-232 M-235 M-238 L-306 L-310 M-501 UPL-120 A-311 A-322 Gantry L-731 L-738 L-741 V-731 V-738 V-741 L-611 PRS-200 UPR-100 UPR-120 UPR-120 Air L-220 L-239 27 MOTION | POSITIONING Translation Stages 28 W W W. P I . W S Translation Stages Precision Linear Stages ............................................................................................................................................................ L-402 Miniature Linear Stage ......................................................................................... M-110 / M-111 / M-112 Compact Linear Stage ................................................................ L-406 Compact Linear Stage ........................................................................................... L-408 Compact Linear Stage ........................................................................................... V-408 PIMag® Linear Stage ............................................................................................. VT-80 Linear Stage ......................................................................................................... M-406 Precision Linear Stage ......................................................................................... M-403 Precision Translation Stage ................................................................................. M-404 Precision Translation Stage ................................................................................. M-413 High-Load Precision Stage .................................................................................. M-414 High-Load Precision Stage .................................................................................. L-412 High-Load Linear Stage ........................................................................................ V-412 PIMag® High-Load Linear Stage ........................................................................... L-417 High-Load Linear Stage ........................................................................................ V-417 PIMag® High-Load Linear Stage ........................................................................... LS-180 Linear Stage for Heavy Loads ............................................................................. High-Precision Linear Stages .................................................................................................................................................... 30 30 32 34 36 38 40 42 44 46 48 50 52 56 60 64 68 72 L-505 Compact Linear Stage ........................................................................................... 72 V-522 / V-524 / V-528 High-Dynamics PIMag® Linear Stage ............................................ 76 V-508 PIMag® Precision Linear Stage ............................................................................. 78 M-122.2DD1 Micro Translation Stage ............................................................................. 80 MTS-65 Miniature Linear Stage ...................................................................................... 82 M-105 / M-106 Microtranslation Stage ........................................................................... 84 L-509 Precision Linear Stage .......................................................................................... 86 L-511 High-Precision Linear Stage .................................................................................. 94 V-551 PIMag® Precision Linear Stage ............................................................................. 102 M-511 / M-521 / M-531 High-Precision Linear Stage ....................................................... 106 HPS-170 High-Precision Linear Stage for Heavy Loads .................................................. 108 PIglide Linear Air Bearing Stages ............................................................................................................................................. 112 A-141 PIglide MB Miniature Linear Stage with Air Bearings .......................................... 112 A-121 PIglide AT1 Linear Stage with Air Bearings .......................................................... 114 A-123 PIglide AT3 Linear Stage with Air Bearings .......................................................... 116 A-110 PIglide LC Linear Stage with Air Bearings ............................................................ 120 A-131 PIglide VC Voice Coil Linear Stage with Air Bearings ........................................... 124 Z Stages .................................................................................................................................................................................... 126 L-306 Compact Precision Z Stage ................................................................................... 126 L-310 Precision Z Stage .................................................................................................. 128 M-501 Precision Z Stage ................................................................................................. 132 UPL-120 Precision Z Stage ............................................................................................. 134 29 MOTION | POSITIONING L-402 Miniature Linear Stage With DC or Stepper Motor n T ravel range 13 mm n Unidirectional repeatability to 0.5 µm n Velocity to 5 mm/s n Load capacity to 1 kg n Integrated reference point and limit switch n Crossed roller guides, anti-creep n Directly mountable XY and XYZ combinations L-402.10DD, dimensions in mm Applications >> Incremental Encoder n Automation >> Vacuum-Compatible Versions n Precision Micro Assembly n Scientific Instrumentation Technology Glossary ....................... page 290 30 W W W. P I . W S L-402.10DD L-402.10SD Unit Tolerance Travel range 13 13 mm Integrated sensor Rotary encoder – Design resolution 0.122 2.5 (full step) µm Sensor resolution rotary encoder 4096 – Cts./rev. Minimum incremental motion 1 0.5 µm typ. Unidirectional repeatability 1 0.5 µm typ. Bidirectional repeatability ±5 ±5 µm typ. Pitch ±175 ±175 µrad typ. Yaw ±125 ±125 µrad typ. Straightness ±3 ±3 µm typ. Flatness ±3 ±3 µm typ. Velocity 5 5 mm/s max. Reference and limit switches Optical Optical Drive screw Leadscrew Leadscrew Drive screw pitch 0.5 0.5 mm Load capacity 10 10 N max. Push/pull force 10 10 N max. Holding force 10 10 N max. Permissible lateral force 5 5 N max. Permissible torque in θX, θY, θZ 1 1 N·m max. Motor type DC motor 2-phase stepper motor Step resolution – 200 Full steps/rev. Operating voltage, nominal 24 24 V nom. Operating voltage, max. 48 48 V max. Operating temperature range 5 to 40 5 to 40 °C Material Aluminum, anodized, stainless steel Aluminum, anodized, stainless steel Mass 0.16 0.15 kg Cable length 0.135 0.25 m Connector HD Sub-D 26 (m) HD Sub-D 26 (m) Recommended controllers C-863 (single axis) C-663.12 (single axis) Translation Stages Motion and positioning Mechanical properties Drive properties Miscellaneous ±10 mm All cables required for operation with the ordered controller are included in the scope of delivery. The cable length is 3 m. Motion controllers for >1 axis are available on www.pi.ws. Ask about custom designs! L-402.10SD, dimensions in mm 31 MOTION | POSITIONING M-110 / M-111 / M-112 Compact Linear Stage XY(Z) Combinations with a Variety of Drives and Travel Ranges n Very compact due to folded drive n Stepper motors and closed-loop DC motors n Sliding thread and ball screws n Noncontact reference and limit switches n XY setups can be mounted directly n Larger quantities available quickly M-11x.xxx1, dimensions in mm Applications A B M-110.1DG1 M-110.2DG1 M-110.12S1 M-110.22S1 60 25 M-111.1DG1 M-111.2DG1 M-111.12S1 M-111.22S1 70 30 M-112.1DG1 M-112.2DG1 M-112.12S1 M-112.22S1 80 35 >> Incremental Encoder n Automation n Precision Micro Assembly n Scientific Instrumentation Technology Glossary ....................... page 290 32 W W W. P I . W S M-110.12S1 M-111.12S1 M-112.12S1 M-110.2DG1 M-111.2DG1 M-112.2DG1 M-110.22S1 M-111.22S1 M-112.22S1 Unit Travel range 5 / 15 / 25 5 / 15 / 25 5 / 15 / 25 5 / 15 / 25 mm Integrated sensor Rotary encoder – Rotary encoder – Tolerance Motion and positioning Sensor resolution 2048 Design resolution (1) 0.0069 0.00029 0.0086 2048 0.00036 µm Cts./rev. Min. incremental motion (1) 0.05 0.02 0.2 0.2 µm typ. Backlash 2 2 4 4 µm typ. Unidirectional repeatability 0.25 0.25 0.15 0.15 µm typ. Pitch / yaw ±50 / ±150 / ±150 ±50 / ±150 / ±150 ±50 / ±150 / ±150 ±50 / ±150 / ±150 µrad Velocity 1 / 1.5 / 1.5 1/1/1 1.5 / 2 / 2 1/1/1 mm/s Drive screw type Leadscrew Leadscrew Ball screw Ball screw Drive screw pitch 0.4 0.4 0.5 0.5 Gear ratio 256:9 256:9 256:9 256:9 Step resolution – 24 – 24 Full steps/ rev. Load capacity 30 / 30 / 20 30 / 30 / 20 30 / 30 / 20 30 / 30 / 20 N max. Push/pull force 10 10 10 10 N max. Holding force 10 10 10 10 N max. Permissible lateral force 15 / 10 / 10 15 / 10 / 10 15 / 10 / 10 15 / 10 / 10 N max. Motor type DC gear motor 2-phase stepper motor DC gear motor 2-phase stepper motor Operating voltage 0 to ±12 – 0 to ±12 – V Motor power 0.52 / 1.75 / 1.75 1.5 0.52 / 1.75 / 1.75 1.5 W Nominal current per phase 160 / 320 / 320 250 160 / 320 / 320 250 mA Reference and limit switches Hall effect Hall effect Hall effect Hall effect Operating temperature range –20 to 65 –20 to 65 –20 to 65 –20 to 65 Material Al (black anodized) Al (black anodized) Al (black anodized) Al (black anodized) Mass 0.25 / 0.27 / 0.3 0.25 / 0.27 / 0.3 0.25 / 0.27 / 0.3 0.25 / 0.27 / 0.3 kg Cable length 0.5 0.5 0.5 0.5 m Connection HD Sub-D 26 (m) HD Sub-D 26 (m) HD Sub-D 26 (m) HD Sub-D 26 (m) Recommended controllers C-863 C-884 C-663.12 C-863 C-884 C-663.12 max. Mechanical properties mm Drive properties Miscellaneous °C (1) With recommended controller. Ask about custom designs! 33 MOTION | POSITIONING Translation Stages M-110.1DG1 M-111.1DG1 M-112.1DG1 L-406 Compact Linear Stage For Loads up to 10 kg n T ravel ranges from 26 mm to 102 mm (1” to 4”) n S tepper motor or DC servo motor with and without gearhead n D irection-sensing n I ntegrated reference point switch optical limit switches L-406, dimensions in mm Detail drawing of the L-406 motion platform, dimensions in mm L-406.10SD00 L-406.20SD00 L-406.40SD00 A B C D E 55,5 68,5 93,5 – 100 150 82 82 82 132 158 208 62,5 75,5 75,5 L-406.10DG10 L-406.20DG10 L-406.40DG10 A B C D E 55,5 68,5 93,5 – 100 150 73,5 73,5 73,5 132 158 208 62,5 75,5 75,5 Applications >> Incremental Encoder n Automation >> Vacuum-Compatible Versions n Precision Micro Assembly n Scientific Instrumentation Technology Glossary ....................... page 290 34 W W W. P I . W S L-406.10DG10 L-406.20DG10 L-406.40DG10 L-406.10SD00 L-406.20SD00 L-406.40SD00 Linear stage with DC motor and rotary encoder Linear stage with DC gear motor and rotary encoder Linear stage with stepper motor Unit Tolerance Translation Stages L-406.10DD10 L-406.20DD10 L-406.40DD10 Motion and positioning Travel range 26 / 52 / 102 26 / 52 / 102 26 / 52 / 102 Integrated sensor Rotary encoder Rotary encoder – Sensor resolution rotary encoder 4096 2048 – mm Cts./rev. Design resolution 0.244 0.0165 5 (full step) µm Minimum incremental motion 0.5 0.2 0.2 µm typ. Unidirectional repeatability 0.5 0.5 0.5 µm typ. Bidirectional repeatability ±5 ±5 ±5 µm typ. Pitch / yaw ±70 / ±90 / ±100 ±70 / ±90 / ±100 ±70 / ±90 / ±100 µrad typ. Straightness / flatness ±2 / ±4 / ±6 ±2 / ±4 / ±6 ±2 / ±4 / ±6 µm typ. mm/s max. Max. velocity 20 3 20 Reference and limit switches Optical Optical Optical Recirculating ball bearing Recirculating ball bearing Recirculating ball bearing Mechanical properties Guide type Drive screw type Leadscrew Leadscrew Leadscrew Drive screw pitch 1 1 1 Gear ratio – 2401:81 – mm Load capacity 100 100 100 N max. Push/pull force 15 100 50 N max. Permissible lateral force 50 50 50 N max. Holding force 15 100 50 N max. Permissible torque in θ X, θY, θZ 7.5 7.5 7.5 N·m max. Drive properties Motor type DC motor DC gear motor 2-phase stepper motor Step resolution – – 200 Full steps/ rev. Operating voltage, nominal 24 24 24 V Operating voltage, max. 48 48 48 5 to 40 5 to 40 5 to 40 nom. max. Miscellaneous Operating temperature range °C Material Aluminum, steel Aluminum, steel Aluminum, steel Mass 0.8 / 0.9 / 1.0 0.8 / 0.9 / 1.0 0.8 / 0.9 / 1.0 kg ±5 % Moved mass 0.16 0.16 0.16 kg ±5 % Connector HD Sub-D 26 (m) HD Sub-D 26 (m) HD Sub-D 26 (m) Recommended controllers C-863 (single axis) C-884 (up to 6 axes) C-885 with C-863.20C885 (to 40 axes) ACS modular controller C-863 (single axis) C-884 (up to 6 axes) C-885 with C-863.20C885 (to 40 axes) ACS modular controller C-663.12 (single axis) SMC Hydra (double axis) C-885 with C-663.12C885 (up to 20 axes) ACS modular controller All cables required for operation with the ordered controller are included in the scope of delivery. The cable length is 3 m. Cable for connecting to other controllers can be ordered as accessory. Ask about custom designs! 35 MOTION | POSITIONING L-408 Compact Linear Stage For Loads up to 200 N n Travel range 25 mm n Stepper motor, DC or DC gear motor n Precision sliding-thread spindle n C rossed roller guides for high load capacity and precision, anti-creep n Integrated optical limit switches n O ptical reference point switch with direction sensing L-408.503232 and L-408.504232, dimensions in mm Applications >> Incremental Encoder n Automation n Precision Micro Assembly n Scientific Instrumentation Technology Glossary ....................... page 290 36 W W W. P I . W S L-408.504232 L-408.503232 L-408.501200 Unit Tolerance mm max. Travel range 25 25 25 Integrated sensor Rotary encoder Rotary encoder – Sensor resolution 2048 4096 – Cts./rev. Design resolution 0.008 0.122 2.5 µm Minimum incremental motion 0.1 0.5 0.1 µm typ. Unidirectional repeatability 0.5 0.5 0.5 µm typ. Bidirectional repeatability ±5 ±5 ±5 µm typ. Pitch / yaw ±100 ±100 ±100 µrad typ. Straightness / flatness ±2 ±2 ±2 µm typ. mm/s max. µm typ. Max. velocity 1.1 10 10 Reference and limit switches Hall effect Hall effect Hall effect Reference point switch repeatability 1 1 1 Crossed roller guide with anti-creep system Crossed roller guide with anti-creep system Crossed roller guide with anti-creep system Translation Stages Motion and positioning Mechanical properties Guide type Drive screw Leadscrew Leadscrew Leadscrew Drive screw pitch 0.5 0.5 0.5 Gear ratio 2401:81 – – mm Push/pull force 50 50 40 N max. Holding force 50 50 40 N max. Load capacity 200 200 200 N max. Permissible lateral force 100 100 100 N max. Permissible torque in θ X 15 15 15 N·m max. Permissible torque in θY, θZ 10 10 10 N·m max. V nom. max. Drive properties Motor type DC gear motor DC motor 2-phase stepper motor Operating voltage, nominal 24 24 24 Operating voltage, max. 48 48 48 V Step resolution – – 200 Full steps/ rev. Operating temperature range 5 to 40 5 to 40 5 to 40 °C Material Aluminum black anodized, steel Aluminum black anodized, steel Aluminum black anodized, steel Miscellaneous Mass 0.87 0.87 0.98 kg ±5 % Moved mass 0.155 0.155 0.155 kg ±5 % Connector HD Sub-D 26 HD Sub-D 26 HD Sub-D 26 Recommended controllers C-863 (single axis) C-884 (up to 6 axes) C-885 with C-863.20C885 (to 40 axes) ACS modular controller C-863 (single axis) C-884 (up to 6 axes) C-885 with C-863.20C885 (to 40 axes) ACS modular controller C-663.12 (single axis) SMC Hydra (double axis) C-885 with C-663.12C885 (up to 20 axes) ACS modular controller All cables required for operation with the ordered controller are included in the scope of delivery. The cable length is 3 m. Cable for connecting to other controllers can be ordered as accessory. Ask about custom designs! 37 MOTION | POSITIONING V-408 PIMag® Linear Stage Inexpensive, with Linear Motor n Iron core 3-phase linear motor n C rossed roller bearings for high load capacity, anti-creep n Minimum incremental motion 20 nm n Bidirectional repeatability ±0.1 µm n Compact design n Low price V-408, dimensions in mm travel range A B C D E F Applications V-408.132020 V-408.232020 25 80 70 n/a 8 4 25 50 105 95 70 12 6 50 >> Linear Encoder >> PIMag® Magnetic Linear Motors n Automation n Photonics n Laser Cutting n Scanning n Laser Marking n Scientific Instrumentation Technology Glossary ....................... page 290 38 W W W. P I . W S Unit Travel range V-408.132020: 25 V-408.232020: 50 mm Integrated Sensor Incremental linear encoder Sensor signal period 80 µm Sensor resolution 10 (1) nm typ. Min. incremental motion 20 nm typ. Bidirectional repeatability ±0.1 µm typ. Pitch / Yaw ±150 µrad typ. Straightness / flatness ±4 µm typ. Velocity V-408.132020: 1.2 V-408.232020: 1.5 m/s max. Load capacity in Z 80 N max. Permissible lateral force 80 N max. Permissible torque in θX 2.3 N·m max. Permissible torque in θY, θZ 1.3 N·m max. Moved mass V-408.132020: 0.23 V-408.232020: 0.3 kg Mass without cable V-408.132020: 0.5 V-408.232020: 0.65 kg Overall mass V-408.132020: 0.79 V-408.232020: 0.94 kg Guide type Crossed roller guide with anti-creep system Translation Stages V-408 Tolerance Motion and positioning Mechanical properties Drive properties Drive type PIMag® Linear motor, iron core, 3-phase Intermediate circuit voltage 48 V DC max. Peak force 14 N typ. Nominal force 5 N typ. Peak current, effective 3.2 A typ. Nominal current, effective 1.1 A typ. Force constant, effective 4.60 N/A typ. Resistance phase-phase 1.23 Ω typ. Inductance phase-phase 0.97 mH typ. Back EMF phase-phase 2.81 V·s/m max. Pole pitch N-N 18 mm Operating temperature range 10 to 50 °C Humidity 20 – 90 % rel., not condensing Material Aluminum, black anodized Motor connector HD Sub-D 26 (m) Sensor connection Sub-D 15 (f) Cable length 2 Recommended controllers C-891 (single axis) C-885 with C-891.10C885 (up to 20 axes) ACS modular controller Miscellaneous m (1) interpolated Ask about custom designs! 39 MOTION | POSITIONING VT-80 Linear Stage Basic Version for Universal Use n Travel ranges from 25 to 300 mm (1 to 12”) n Low profile design n Max. velocity to 20 mm/s n Load capacity to 5 kg n Compact XY combinations VT-80, DC motor, dimensions in mm VT-80, dimensions in mm VT-80, stepper motor, dimensions in mm Direction of the axes and torques for linear stages 25 mm 50 mm 75 mm 100 mm 150 mm 200 mm 300 mm Applications A (mm) B (mm) C (mm) 52.5 65 77.5 90 115 140 190 100 125 150 175 225 275 375 70 95 120 145 195 245 345 >> Incremental Encoder n Automation n Scientific Instrumentation Technology Glossary ....................... page 290 40 W W W. P I . W S 623092x0 Linear stage with DC motor and rotary encoder Linear stage with stepper motor Unit Tolerance Motion and positioning Travel range 25 / 50 / 75 / 100 / 150 / 200 / 300 25 / 50 / 75 / 100 / 150 / 200 / 300 Integrated sensor Rotary encoder, incremental – mm Design resolution 0.5 5 (full step) µm Sensor resolution 2000 – Cts./rev. Minimum incremental motion 0.5 0.2 µm typ. Unidirectional repeatability 0.8 0.4 µm typ. Bidirectional repeatability ±10 ±10 µm typ. Pitch ±100 / ±110 / ±120 / ±130 / ±150 / ±170 / ±210 ±100 / ±110 / ±120 / ±130 / ±150 / ±170 / ±210 µrad typ. Yaw ±150 ±150 µrad typ. Straightness / flatness ±8 / ±10 / ±11 / ±12 / ±14 / ±20 / ±35 ±8 / ±10 / ±11 / ±12 / ±14 / ±20 / ±35 µm Max. velocity 20 20 mm/s Guide type Recirculating ball bearing Recirculating ball bearing Drive screw type Leadscrew Leadscrew Drive screw pitch 1 1 mm Load capacity 50 50 N max. Push/pull force 40 40 N max. Permissible lateral force 30 30 N max. Holding force, power off 40 40 N max. Permissible torque Mx in X 2.5 2.5 N·m max. Permissible torque My in Y 5 5 N·m max. Permissible torque Mz in Z 2.5 2.5 N·m max. Motor type DC motor 2-phase stepper motor Operating voltage 24 24 V nom. Operating voltage 48 48 V max. Step resolution – 200 Full steps/ rev. Limit switches 2 × mechanical 2 × mechanical Mechanical properties Drive properties Miscellaneous Operating temperature range 5 to 40 5 to 40 Material Aluminum, black anodized Aluminum, black anodized °C Mass 0.55 / 0.65 / 0.7 / 0.75 / 0.85 / 0.95 / 1.25 0.55 / 0.65 / 0.7 / 0.75 / 0.85 / 0.95 / 1.25 kg ±5 % Moved mass 0.13 / 0.14 / 0.14 / 0.15 / 0.15 / 0.15 / 0.15 0.16 / 0.16 / 0.17 / 0.17 / 0.17 / 0.18 / 0.18 kg ±5 % Connector HD Sub-D 15 (m) HD Sub-D 15 (m) Recommended controllers C-863 (single axis) C-884 (up to 6 axes) C-885 with C-863.20C885 (to 40 axes) ACS modular controller C-663.12 (single axis) SMC Hydra (double axis) C-885 with C-663.12C885 (up to 20 axes) ACS modular controller Connecting cables for motor and sensor are not in the scope of delivery and must be ordered separately. Ask about custom designs! 41 MOTION | POSITIONING Translation Stages 623091x0 M-406 Precision Linear Stage High Travel Accuracy and Inexpensive n Travel ranges to 150 mm n Crossed roller guides, anti-creep n DC servo motor drive n Direction-sensing reference point switch M-406, dimensions in mm M-406.2xx M-406.4xx M-406.6xx Applications n Metrology A L 98,5 123,5 148,5 207 257 307 >> ActiveDrive >> Incremental Encoder / Testing n Precision Micro Assembly n Scientific Instrumentation Technology Glossary ....................... page 290 42 W W W. P I . W S M-406.2PD M-406.4PD M-406.6PD Unit Travel range 50 / 100 / 150 50 / 100 / 150 mm Integrated sensor Rotary encoder Rotary encoder Sensor resolution 2000 4000 Cts./rev. Design resolution 0.0085 0.125 µm Minimum incremental motion 0.1 0.25 µm Unidirectional repeatability 0.2 0.2 µm Backlash 2 2 µm Crosstalk, angular error ±25 / ±50 / ±75 ±25 / ±50 / ±75 µrad Velocity 1 15 mm/s Drive screw pitch 0.5 0.5 mm Gear ratio 29.6:1 – Tolerance Motion and positioning max. Mechanical properties Load capacity 200 200 N max. Push/pull force 50 / 50 50 / 50 N max. Lateral force 150 150 N max. Motor type DC gear motor DC motor with PWM control Operating voltage 0 to ±12 24 V Motor power 3 30 W Reference and limit switches Hall effect Hall effect Drive properties Miscellaneous Operating temperature range –20 to 65 –20 to 65 Material Aluminum, steel Aluminum, steel Mass 2.1 / 2.4 / 2.8 2.1 / 2.4 / 2.8 Connector Sub-D 15, incl. 3 m cable Sub-D 15, incl. 3 m cable Recommended controllers C-863 C-884 C-863 C-884 °C kg Ask about custom designs! 43 MOTION | POSITIONING Translation Stages M-406.2DG M-406.4DG M-406.6DG M-403 Precision Translation Stage Inexpensive and Flexible Thanks to Large Number of Drives and Travel Range Variants n I nexpensive cost-optimized design for precise positioning n Travel ranges from 25 mm to 200 mm n Resolution to 0.018 µm n Min. incremental motion to 0.2 µm n Preloaded precision leadscrew n M -413 and M-414 versions for higher load requirements M-403 and M-404, dimensions in mm A B C D E H M-403.1xx M-404.1xx M-403.2xx M-404.2xx M-403.4x M-404.4xx M-403.6xx M-404.6xx M-403.8xx M-404.8xx 141 25 20,5 16,5 (±12,5) 10 X 166 37,5 33 29 (±25) 22,5 X 216 62,5 58 54 (±50) 47,5 X 266 87,5 83 79 (±75) 72,5 50 316 112,5 108 104 (±100) 97,5 75 F G M-403.xPD M-403.xDG 114 59,5 119,5 56 Applications F G M-404.xPD M-403.xDG 114 59,5 128,5 56 >> ActiveDrive n Automation n Medical Industry n Biotechnology n Photonics >> Incremental Encoder Technology Glossary ....................... page 290 44 W W W. P I . W S M-403.1DG M-403.2DG M-403.4DG M-403.6DG M-403.8DG with ActiveDrive with DC gear motor Travel range 25 / 50 / 100 / 150 / 200 25 / 50 / 100 / 150 / 200 Integrated sensor Rotary encoder Rotary encoder Unit Translation Stages M-403.1PD M-403.2PD M-403.4PD M-403.6PD M-403.8PD Tolerance Motion and positioning mm Sensor resolution 4000 2000 Design resolution 0.25 0.018 Cts./rev. µm typ. Minimum incremental motion 0.25 0.2 µm typ. Backlash 6 10 µm typ. Unidirectional repeatability 1 1 µm typ. Pitch 200 200 µrad typ. over 100 mm Yaw 200 200 µrad typ. over 100 mm Velocity 10 (1) 2.5 mm/s max. Reference point switch repeatability 1 1 µm typ. Drive screw pitch 1 1 mm Gear ratio – 2304:81 Stiffness in motion direction 3.5 3.5 N/µm ±20 % Load capacity (2) 200 200 N max. Push/pull force 50 50 N max. Lateral force 100 100 N max. Drive type DC motor, ActiveDrive DC gear motor Operating voltage 24 0 to ±12 V Motor power 26 2.5 W Operating temperature range –20 to 65 –20 to 65 °C Material Al (black anodized) Al (black anodized) Mechanical properties Drive properties nominal Miscellaneous Mass 1.7 / 1.8 / 2.1 / 2.2 / 2.5 1.7 / 1.8 / 2.1 / 2.2 / 2.5 Connector Sub-D 15 (m), incl. 3 m cable Sub-D 15 (m), incl. 3 m cable Recommended controllers / drivers C-863 C-884 C-863 C-884 kg ±5 % (1) Recommended velocity (2) Load capacity: Max. possible normal load capacity, centered, vertical load (linear stage horizontal). 45 MOTION | POSITIONING M-404 Precision Translation Stage Inexpensive and Flexible Thanks to Large Number of Drives and Travel Range Variants n I nexpensive cost-optimized design for precise positioning n Travel ranges from 25 mm to 200 mm n Resolution to 0.012 µm n Min. incremental motion to 0.1 µm n B all screw for high velocities and number of cycles n M -413 and M-414 versions for higher load requirements M-403 and M-404, dimensions in mm A B C D E H M-403.1xx M-404.1xx M-403.2xx M-404.2xx M-403.4x M-404.4xx M-403.6xx M-404.6xx M-403.8xx M-404.8xx 141 25 20,5 16,5 (±12,5) 10 X 166 37,5 33 29 (±25) 22,5 X 216 62,5 58 54 (±50) 47,5 X 266 87,5 83 79 (±75) 72,5 50 316 112,5 108 104 (±100) 97,5 75 F G M-403.xPD M-403.xDG 114 59,5 119,5 56 Applications F G M-404.xPD M-403.xDG 114 59,5 128,5 56 >> ActiveDrive n Automation n Medical Industry n Biotechnology n Photonics >> Incremental Encoder Technology Glossary ....................... page 290 46 W W W. P I . W S M-404.1DG M-404.2DG M-404.4DG M-404.6DG M-404.8DG with ActiveDrive with DC gear motor Travel range 25 / 50 / 100 / 150 / 200 25 / 50 / 100 / 150 / 200 Integrated sensor Rotary encoder Rotary encoder Unit Translation Stages M-404.1PD M-404.2PD M-404.4PD M-404.6PD M-404.8PD Tolerance Motion and positioning mm Sensor resolution 4000 2000 Design resolution 0.25 0.012 Cts./rev. µm typ. Minimum incremental motion 0.25 0.1 µm typ. Backlash 0.5 2 µm typ. Unidirectional repeatability 0.5 1 µm typ. Pitch 75 75 µrad typ. over 100 mm Yaw 75 75 µrad typ. over 100 mm Velocity 50 1.5 mm/s max. Reference point switch repeatability 1 1 µm typ. Drive screw pitch 1 1 mm Gear ratio – 2704:63 Mechanical properties Motor resolution – – Stiffness in motion direction 3 3 steps/rev. N/µm ±20 % Load capacity (1) 200 200 N max. Push/pull force 50 50 N max. Lateral force 100 100 N max. Drive type DC motor, ActiveDrive DC gear motor Operating voltage 24 0 to ±12 V Motor power 26 2.5 W nominal Operating temperature range –20 to 65 °C –20 to 65 °C Material Al (black anodized) Al (black anodized) Mass 1.8 / 1.9 /2.2 / 2.3 /2.6 1.8 / 1.9 /2.2 / 2.3 /2.6 kg ±5 % Connector Sub-D 15 (m), incl. 3 m cable Sub-D 15 (m), incl. 3 m cable Recommended controllers / drivers C-863 C-884 C-863 C-884 Drive properties Miscellaneous (1) Max. possible normal load capacity, centered, vertical load (linear stage horizontal). 47 MOTION | POSITIONING M-413 High-Load Precision Stage Inexpensive and Flexible Thanks to Large Number of Drives and Travel Range Variants for High Loads n Very inexpensive, robust models n F lexible modular system M-403, M-404, M-413, M-414 n Travel ranges from 100 to 300 mm n Resolution to 0.018 µm n Preloaded precision leadscrew n Min. incremental motion 0.2 µm M-413 and M-414, dimensions in mm A B C D E H M-413/414.1xx M-413/414.2xx M-413/414.3xx 255 65 59,5 54 (±50) 40 X 355 115 109,5 104 (±100) 90 X 455 165 159,5 154 (±150) 140 100 F G Applications M-413/414.xPD M-413.xDG M-414.xDG 120 59,5 122 56 133 59,5 >> ActiveDrive n Automation n Medical Industry n Biotechnology n Photonics >> Incremental Encoder Technology Glossary ....................... page 290 48 W W W. P I . W S M-413.1DG M-413.2DG M-413.3DG with ActiveDrive with DC gear motor Travel range 100 / 200 / 300 100 / 200 / 300 Integrated sensor Rotary encoder Rotary encoder Unit Translation Stages M-413.1PD M-413.2PD M-413.3PD Tolerance Motion and positioning mm Sensor resolution 4000 2000 Design resolution 0.25 0.018 Cts./rev. µm typ. Minimum incremental motion 0.25 0.2 µm typ. Backlash 6 10 µm typ. Unidirectional repeatability 1 1 µm typ. Pitch / yaw (1) 300 300 µrad typ. over 100 mm Velocity 10 (2) 2.5 mm/s max. Reference point switch repeatability 1 1 µm typ. Drive screw pitch 1 1 mm Gear ratio – 2304:81 Stiffness in motion direction 3.5 3.5 N/µm ±20 % Load capacity 500 500 N max. Push/pull force 50 50 N max. Lateral force 200 200 N max. Drive type DC motor, ActiveDrive DC gear motor Operating voltage 24 0 to ±12 V Motor power 70 3.6 W Operating temperature range –20 to 65 –20 to 65 °C Material Al (black anodized) Al (black anodized) Mass 4.4 / 5.4 / 6.6 4.2 / 5.2 / 6.4 Connector Sub-D 15 (m), incl. 3 m cable Sub-D 15 (m), incl. 3 m cable Recommended controllers / drivers C-863 C-884 C-863 C-884 Mechanical properties Drive properties nominal Miscellaneous kg ±5 % (1) This value applies to each 100 mm respectively for travel ranges greater than 100 mm. (2) Recommended velocity 49 MOTION | POSITIONING M-414 High-Load Precision Stage Inexpensive and Flexible Thanks to Large Number of Drives and Travel Range Variants for High Loads n Use of precision components n F lexible modular system M-403, M-404, M-413, M-414 n T ravel ranges from 100 mm to 300 mm n R esolution to 0.023 µm n B all screw for high velocities and number of cycles n M in. incremental motion 0.1 µm M-413 and M-414, dimensions in mm A B C D E H M-413/414.1xx M-413/414.2xx M-413/414.3xx 255 65 59,5 54 (±50) 40 X 355 115 109,5 104 (±100) 90 X 455 165 159,5 154 (±150) 140 100 F G Applications M-413/414.xPD M-413.xDG M-414.xDG 120 59,5 122 56 133 59,5 >> ActiveDrive n Automation n Medical Industry n Biotechnology n Photonics >> Incremental Encoder Technology Glossary ....................... page 290 50 W W W. P I . W S M-414.1DG M-414.2DG M-414.3DG with ActiveDrive with DC gear motor Travel range 100 / 200 / 300 100 / 200 / 300 Integrated sensor Rotary encoder Rotary encoder Unit Translation Stages M-414.1PD M-414.2PD M-414.3PD Tolerance Motion and positioning mm Sensor resolution 4000 2000 Design resolution 0.5 0.023 Cts./rev. µm typ. Minimum incremental motion 0.5 0.1 µm typ. Backlash 0.5 4 µm typ. Unidirectional repeatability 0.5 1 µm typ. Pitch / yaw (1) 100 100 µrad typ. over 100 mm Velocity 100 3 mm/s max. Reference point switch repeatability 1 1 µm typ. Drive screw pitch 2 2 mm Gear ratio – 42.9206 Mechanical properties Stiffness in motion direction 8 8 N/µm ±20 % Load capacity 500 500 N max. Push/pull force 100 50 N max. Lateral force 200 200 N max. Drive type DC motor, ActiveDrive DC gear motor Operating voltage 24 0 to ±12 V Motor power 70 3.6 W Operating temperature range –20 to 65 –20 to 65 °C Material Al (black anodized) Al (black anodized) Drive properties nominal Miscellaneous Mass 4.4 / 5.4 / 6.6 4.2 / 5.2 / 6.4 Connector Sub-D 15 (m), incl. 3 m cable Sub-D 15 (m), incl. 3 m cable Recommended controllers / drivers C-863 C-884 C-863 C-884 kg ±5 % (1) This value applies to each 100 mm respectively for travel ranges greater than 100 mm. 51 MOTION | POSITIONING L-412 High-Load Linear Stage High Performance and Cost Efficiency, Drive Screw n Width 116 mm n Travel range to 610 mm n Precision ball screw n I ncremental n A dditional or absolute rotary encoder options linear encoder options n P recision recirculating ball bearings, load capacity to 400 N n C overing strip on the side for protection against debris Reference-class linear stage Options PI has extended its product portfolio for industrial solutions with a new family of precision linear ball-screw stages. Various versions are availablewith highperformance synchronous servo motors, heavy-duty recirculating ball bearings, and precision rotary and linear encoders. An optional holding brake allows use as a vertical axis. The stage’s internal ball screw can be relubricated externally thus removing the need to disassemble the stage. This provides a higher reliability and longer lifetime when compared to stages requiring additional effort in relubrication. It is also possible to integrate such lubrication into a customer‘s central lubrication system. The protective side seal and the purge air connection prevent contamination by debris entering the stage. n Holding brake (L-412.xxxxxxB) n V arious rotary and linear encoders, absolute and incremental n V ersions with linear encoder with optional drag chain and connection box (L-412.xxxxxxE1) or without drag chain (L-412.xxxxxxE0) n F oldback kits to reduce overall length available on request n C ertification Synchronous servo motor These motors have high positioning accuracy and overload capacity over a large rotation speed range. High torque and low inertia ensure high dynamic operation of the stage. The motor provides an adaptable cable exit, allowing the user to be flexible with their cable positioning strategies in their machine. The long lifetime, high performance and robustness of these servo motors produce excellent results in applications in precision industrial automation. Applications Class leading design When compared to current market offerings, the new L-412 series of stages provides users with a higher specification recirculating ball bearing that offers higher load carrying capacity and dynamic performance. The standard motor offers a high resolution resulting in improved motion tracking errors and refined move and settle performance. >> Absolute Encoder n Automated Optical Inspection (AOI) n Electronics and calibration available on request >> Incremental Encoder n Automation n Laser Cutting Manufacturing Technology Glossary ....................... page 290 52 W W W. P I . W S L-412.05 L-412.09 L-412.13 Unit Tolerance Travel range 52 102 204 305 mm Pitch / yaw ±9 ±14 ±19 ±29 µrad max. Straightness / flatness ±1.5 ±2.5 ±4 ±6 µm max. Motion Velocity, unloaded 300 300 300 300 mm/s max. Positioning accuracy (uncalibrated) ±5 ±6 ±8 ±10 µm max. Unit Tolerance L-412.17 L-412.21 L-412.25 Motion Active axes X X X Travel range 407 508 610 mm Pitch / yaw ±39 ±48 ±58 µrad max. Straightness / flatness ±8 ±9 ±10 µm max. Velocity, unloaded 300 300 300 mm/s max. Positioning accuracy (uncalibrated) ±12 ±14 ±16 µm max. L-412.xxx232 basic option L-412.xxx244 L-412.xxx054 Unit Tolerance Incremental rotary encoder Absolute rotary encoder, single turn Absolute rotary encoder, multiturn Encoder options Integrated sensor Sensor signal A/B quadrature, RS-422 EnDat 2.1 EnDat 2.1 Sensor resolution 20000 8192 8192 Cts./rev. Design resolution 0.25 0.6 0.6 µm Minimum incremental motion 1 2 2 µm Bidirectional repeatability ±1 ±3 ±3 µm max. Unit Tolerance Limit switches Hall effect, 5 V NPN Hall effect, 5 V NPN – Sensor connection M23 M23 M23 L-412.xxx212Ex L-412.xxx211Ex L-412.xxx025Ex Integrated sensor Incremental linear encoder Additional rotary encoder, see basic option Incremental linear encoder Additional rotary encoder, see basic option Absolute-measuring linear encoder Additional rotary encoder, see basic option Sensor signal A/B quadrature, RS-422 Sin/cos, 1 V peak-peak, 20 µm signal period EnDat 2.2 Encoder options Design resolution 0.05 – 0.001 µm Minimum incremental motion 300 50 50 nm typ. Bidirectional repeatability ±0.5 ±0.5 ±0.5 µm max. Limit switches Hall effect, 5 V NPN Hall effect, 5 V NPN – Sensor connection Sub-D 15 (m) M17 M17 53 MOTION | POSITIONING Translation Stages L-412.03 L-412.xxxxxx L-412.xxxxxxB Unit Tolerance Guide type Recirculating ball bearing Recirculating ball bearing Drive screw type Ball screw Ball screw Holding brake – Electromagnetic safety brake Drive screw pitch 5 5 mm Push/pull force, power on 700 700 N max. Holding force, power off – 500 N typ. Load capacity in Z 400 400 N max. Permissible lateral force 200 200 N max. Permissible torque in θX 20 20 N·m max. Permissible torque in θY 15 15 N·m max. Permissible torque in θZ 20 20 N·m max. L-412.xx9 Unit Tolerance Mechanical properties Drive properties Drive type Synchronous servo motor Intermediate circuit voltage, effective 320 V DC max. Peak torque 2.76 N·m typ. Nominal torque 0.7 N·m typ. Peak current, effective (RMS) 10.9 A typ. Nominal current, effective (RMS) 2.2 A typ. Torque constant, effective 0.32 N·m/A typ. Resistance phase-phase 5.22 Ω typ. Inductance phase-phase 9.7 mH typ. Back EMF phase-phase 20.4 V/kRPM max. Number of pole pairs 3 L-412 Unit Tolerance kg ±5 % ±5 % Miscellaneous Material Aluminum, black anodized stainless steel Overall mass L-412.03 (52 mm travel range): 6.4 L-412.05 (102 mm travel range): 6.9 L-412.09 (204 mm travel range): 7.9 L-412.13 (305 mm travel range): 8.9 L-412.17 (407 mm travel range): 9.8 L-412.21 (508 mm travel range): 10.8 L-412.25 (610 mm travel range): 11.8 Moved mass 1.4 kg MTBF 20000 h Connection M23 (motor) M23 (rotary encoder) optional connection for linear encoder Fitting for purge air hose with outside diameter 4 mm Funnel-type grease nipple for spindle lubrication Limit switch connection M8 8-pin Recommended controllers ACS modular controller Connecting cables are not in the scope of delivery and must be ordered separately. Ask about custom designs! 54 W W W. P I . W S Translation Stages L-412, dimensions in mm TRAVEL L-417.03xxxx L-417.05xxxx L-417.09xxxx L-417.13xxxx L-417.17xxxx L-417.21xxxx L-417.25xxxx 52 (4”) 102 (4”) 204 (8”) 305 (12”) 407 (16”) 508 (20”) 610 (24”) A 290 340 445 545 645 745 850 B 147,5 172,5 225 275 325 375 427,5 C D 100 100, 200 100, 200, 300 100, 200, 300, 400 100, 200, 300, 400, 500 100, 200, 300, 400, 500, 600 100, 200, 300, 400, 500, 600, 700 E D1 L-412.xxxxxxxx D2 L-412.xxxxxxxxB E1 L-412.xxxxxxEO E2 L-412.xxx211E1 E3 L-412.xxx212E1 114,5 114,5 114,5 114,5 114,5 114,5 114,5 148,5 148,5 148,5 148,5 148,5 148,5 148,5 44 44 44 44 44 44 44 28,5 28,5 28,5 28,5 28,5 28,5 28,5 28 28 28 28 28 28 28 55 MOTION | POSITIONING V-412 PIMag® High-Load Linear Stage High Performance and Cost Efficiency, Linear Motor n Width 116 mm n Travel range to 610 mm n Nominal force 33 N n Incremental or absolute linear encoder n P recision recirculating ball bearings, load capacity to 400 N n C overing strip on the side for protection against debris Reference-class linear stage Class leading design PI has extended its product portfolio for industrial solutions with a new family of precision linear motor stages. Various versions are available with high-performance linear motors, heavy-duty recirculating ball bearings, and precision linear encoders. The protective side seal and the purge air connection prevent contamination by debris entering the stage. When compared to current market offerings, the new V-412 series of stages provides users with a higher specification recirculating ball bearing that offers higher load carrying capacity and dynamic performance. The encoder options offer a high resolution resulting in improved motion tracking errors and refined move and settle performance. For full flexibility the user can select either incremental or absolute types. Absolute types remove the requirement to home the stage during startup and provide additional benefits including reduced collision risks during operation. PIMag® magnetic direct drive 3-phase magnetic direct drives do not use mechanical components in the drivetrain, they transmit the drive force to the motion platform directly and without friction. The ironless linear motors reach high velocities and accelerations. Ironless motors are particularly suitable for positioning tasks with the highest demands on precision because there is no undesirable interaction with the permanent magnets. This is in comparison to iron core linear motors which exhibit ‘cogging’. This allows smooth running even at low velocities and no vibration at high velocities. Applications n Automated >> Absolute Encoder Optical Inspection (AOI) n Flatpanel Inspection n Digital Printing n Laser n Electronics Manufacturing n Scanning >> Linear Encoder >> PIMag® Magnetic Linear Motors n Automation Cutting Technology Glossary ....................... page 290 56 W W W. P I . W S V-412.05 V-412.09 V-412.13 Unit Tolerance Travel range 52 102 204 305 mm Pitch / yaw ±9 ±14 ±19 ±29 µrad max. Straightness / flatness ±1.5 ±2.5 ±4 ±6 µm max. Motion Velocity, unloaded 2000 2000 2000 2000 mm/s max. Positioning accuracy (uncalibrated) ±3 ±4 ±8 ±10 µm typ. Unit Tolerance V-412.17 V-412.21 V-412.25 Motion Active axes X X X Travel range 407 508 610 mm Pitch / yaw ±39 ±48 ±58 µrad max. Straightness / flatness ±8 ±9 ±10 µm max. Velocity, unloaded 2000 2000 2000 mm/s max. Positioning accuracy (uncalibrated) ±12 ±14 ±15 µm typ. Unit Tolerance V-412.xxx211Ex V-412.xxx025Ex Integrated sensor Incremental linear encoder Absolute-measuring linear encoder Sensor signal Sin/cos, 1 V peak-peak, 20 µm signal period EnDat 2.2 Design resolution 0.0003 0.001 µm Minimum incremental motion 5 10 nm typ. Bidirectional repeatability ±0.5 ±0.5 µm typ. Limit switches Hall effect, 5 V NPN – V-412.xxxxxx V-412.xxxxxxB Unit Tolerance Guide type Recirculating ball bearing Recirculating ball bearing Load capacity in Z 400 400 N max. Permissible lateral force 200 200 N max. Permissible torque in θX 20 20 N·m max. Permissible torque in θY 15 15 N·m max. Permissible torque in θZ 20 20 N·m max. Encoder options Mechanical properties 57 MOTION | POSITIONING Translation Stages V-412.03 V-412.xx6 Unit Tolerance V DC max. Drive properties Drive type Ironless 3-phase linear motor Intermediate circuit voltage, effective 300 Peak force 151 N typ. Nominal force 33 N typ. Peak current, effective (RMS) 10.6 A typ. Nominal current, effective (RMS) 2.3 A typ. Force constant, effective 14.1 N/A typ. Motor constant 4 N/√W typ. Electrical time constant 0.19 ms Resistance phase-phase 8.69 Ω typ. Inductance phase-phase 1.4 mH typ. max. Back EMF phase-phase 8.1 V·s/m Pole pitch N-N 30.5 mm V-412 Unit Tolerance kg ±5 % ±5 % Miscellaneous Material Aluminum, black anodized stainless steel Overall mass V-412.03 (52 mm travel range): 5.0 V-412.05 (102 mm travel range): 5.6 V-412.09 (204 mm travel range): 6.7 V-412.13 (305 mm travel range): 7.9 V-412.17 (407 mm travel range): 9.0 V-412.21 (508 mm travel range): 10.2 V-412.25 (610 mm travel range): 11.3 Moved mass 1.7 kg MTBF 20000 h Connection M17 (motor) M17 (linear encoder) Fitting for purge air hose with outside diameter 4 mm Recommended controllers C-891 (single axis) C-885 with C-891.10C885 (up to 20 axes) ACS modular controller Connecting cables are not in the scope of delivery and must be ordered separately. Ask about custom designs! 58 W W W. P I . W S Translation Stages V-412, dimensions in mm V-412.03xxxx V-412.05xxxx V-412.09xxxx V-412.13xxxx V-412.17xxxx V-412.21xxxx V-412.25xxxx TRAVEL A B C 52 (2”) 102 (4”) 204 (8”) 305 (12”) 407 (16”) 508 (20”) 610 (24”) 285 335 440 540 640 740 845 142,5 167,5 220 270 320 370 422,5 100 100, 200 100, 200, 300 100, 200, 300, 400 100, 200, 300, 400, 500 100, 200, 300, 400, 500, 600 100, 200, 300, 400, 500, 600, 700 59 MOTION | POSITIONING L-417 High-Load Linear Stage High Performance and Cost Efficiency, Drive Screw n Width 166 mm n Travel range to 813 mm n Precision ball screw n I ncremental n or absolute rotary encoder options Additional linear encoder options n P recision recirculating ball bearings, load capacity to 450 N n C overing strip on the side for protection against debris Reference-class linear stage Options PI has extended its product portfolio for industrial solutions with a new family of precision linear ball-screw stages. Various versions are available with highperformance synchronous servo motors, heavy-duty recirculating ball bearings, and precision rotary and linear encoders. An optional holding brake allows use as a vertical axis. The stage’s internal ball screw can be relubricated externally thus removing the need to disassemble the stage. This provides a higher reliability and longer lifetime when compared to stages requiring additional effort in relubrication. It is also possible to integrate such lubrication into a customer‘s central lubrication system. The protective side seal and the purge air connection prevent contamination by debris entering the stage. n Holding brake (L-417.xxxxxxB) n V arious rotary and linear encoders, absolute and incremental n V ersions with linear encoder with optional drag chain and connection box (L-417.xxxxxxE1) or without drag chain (L-417.xxxxxxE0) n F oldback kits to reduce overall length available on request n C ertification Synchronous servo motor These motors have high positioning accuracy and overload capacity over a large rotation speed range. High torque and low inertia ensure high dynamic operation of the stage. The motor provides an adaptable cable exit, allowing the user to be flexible with their cable positioning strategies in their machine. The long lifetime, high performance and robustness of these servo motors produce excellent results in applications in precision industrial automation. Applications n Automated Class leading design When compared to current market offerings, the new L-417 series of stages provides users with a higher specification recirculating ball bearing that offers higher load carrying capacity and dynamic performance. The standard motor offers a high resolution resulting in improved motion tracking errors and refined move and settle performance. >> Absolute Encoder Optical Inspection (AOI) n and calibration available on request n Automation n Laser Cutting >> Incremental Encoder Electronics Manufacturing Technology Glossary ....................... page 290 60 W W W. P I . W S L-417.09 L-417.13 L-417.17 Unit Tolerance Travel range 102 204 305 407 mm Pitch / yaw ±14 ±19 ±29 ±35 µrad max. Straightness / flatness ±2.5 ±4 ±6 ±8 µm max. Motion Velocity, unloaded 300 300 300 300 mm/s max. Positioning accuracy (uncalibrated) ±6 ±8 ±10 ±12 µm max. Unit Tolerance L-417.21 L-417.25 L-417.33 Motion Active axes X X X Travel range 508 610 813 mm Pitch / yaw ±40 ±45 ±50 µrad max. Straightness / flatness ±9 ±10 ±12 µm max. Velocity, unloaded 300 300 250 mm/s max. Positioning accuracy (uncalibrated) ±14 ±16 ±18 µm max. L-417.xxx232 basic option L-417.xxx244 L-417.xxx054 Unit Tolerance Incremental rotary encoder Absolute rotary encoder, single turn Absolute rotary encoder, multiturn Encoder options Integrated sensor Sensor signal A/B quadrature, RS-422 EnDat 2.1 EnDat 2.1 Sensor resolution 20000 8192 8192 Cts./rev. Design resolution 0.25 0.6 0.6 µm Minimum incremental motion 1 2 2 µm Bidirectional repeatability ±1 ±3 ±3 µm max. Unit Tolerance Limit switches Hall effect, 5 V NPN Hall effect, 5 V NPN – Sensor connection M23 M23 M23 L-417.xxx212Ex L-417.xxx211Ex L-417.xxx025Ex Integrated sensor Incremental linear encoder Additional rotary encoder, see basic option Incremental linear encoder Additional rotary encoder, see basic option Absolute-measuring linear encoder Additional rotary encoder, see basic option Sensor signal A/B quadrature, RS-422 Sin/cos, 1 V peak-peak, 20 µm signal period EnDat 2.2 Encoder options Design resolution 0.05 – 0.001 µm Minimum incremental motion 300 50 50 nm typ. Bidirectional repeatability ±0.5 ±0.5 ±0.5 µm max. Limit switches Hall effect, 5 V NPN Hall effect, 5 V NPN – Sensor connection Sub-D 15 (m) M17 M17 61 MOTION | POSITIONING Translation Stages L-417.05 L-417.xxxxxx L-417.xxxxxxB Unit Tolerance Guide type Recirculating ball bearing Recirculating ball bearing Drive screw type Ball screw Ball screw Holding brake – Electromagnetic safety brake Drive screw pitch 5 5 mm Push/pull force, power on 700 700 N max. Holding force, power off – 500 N typ. Load capacity in Z 450 450 N max. Permissible lateral force 250 250 N max. Permissible torque in θX 40 40 N·m max. Permissible torque in θY 30 30 N·m max. Permissible torque in θZ 40 40 N·m max. L-417.xx9 Unit Tolerance Mechanical properties Drive properties Drive type Synchronous servo motor Intermediate circuit voltage, effective 320 V DC max. Peak torque 2.76 N·m typ. Nominal torque 0.7 N·m typ. Peak current, effective (RMS) 10.9 A typ. Nominal current, effective (RMS) 2.2 A typ. Torque constant, effective 0.32 N·m/A typ. Resistance phase-phase 5.22 Ω typ. Inductance phase-phase 9.7 mH typ. Back EMF phase-phase 20.4 V/kRPM max. Number of pole pairs 3 L-417 Unit Tolerance kg ±5 % ±5 % Miscellaneous Material Aluminum, black anodized stainless steel Overall mass L-417.05 (102 mm travel range): 9.3 L-417.09 (204 mm travel range): 10.8 L-417.13 (305 mm travel range): 12.2 L-417.17 (407 mm travel range): 13.7 L-417.21 (508 mm travel range): 15.1 L-417.25 (610 mm travel range): 16.5 L-417.33 (813 mm travel range): 19.4 Moved mass 2.4 kg MTBF 20000 h Connection M23 (motor) M23 (rotary encoder) optional connection for linear encoder Fitting for purge air hose with outside diameter 4 mm Funnel-type grease nipple for spindle lubrication Limit switch connection M8 8-pin Recommended controllers ACS modular controller Connecting cables are not in the scope of delivery and must be ordered separately. Ask about custom designs! 62 W W W. P I . W S Translation Stages L-417, dimensions in mm TRAVEL L-417.05xxxx L-417.09xxxx L-417.13xxxx L-417.17xxxx L-417.21xxxx L-417.25xxxx L-417.33xxxx 102 (4”) 204 (8”) 305 (12”) 407 (16”) 508 (20”) 610 (24”) 813 (32”) A 356 470 570 670 775 875 1080 B 198 250,5 300,5 350,5 403 453 555,5 C D 150 150, 350 150, 350 150, 350, 550 150, 350, 550 150, 350, 550, 750 150, 350, 550, 750, 950 E D1 L-417.xxxxxxxx D2 L-417.xxxxxxxxB E1 L-417.xxxxxxEO E2 L-417.xxx211E1 E3 L-417.xxx212E1 119,5 119,5 119,5 119,5 119,5 119,5 119,5 153,5 153,5 153,5 153,5 153,5 153,5 153,5 44 44 44 44 44 44 44 28,5 28,5 28,5 28,5 28,5 28,5 28,5 28 28 28 28 28 28 28 63 MOTION | POSITIONING V-417 PIMag® High-Load Linear Stage High Performance and Cost Efficiency, Linear Motor n Width 166 mm n Travel range to 813 mm n Nominal force 87 N n Incremental or absolute linear encoder n P recision recirculating ball bearings, load capacity to 450 N n C overing strip on the side for protection against debris Reference-class linear stage Class leading design PI has extended its product portfolio for industrial solutions with a new family of precision linear motor stages. Various versions are available with high-performance linear motors, heavy-duty recirculating ball bearings, and precision linear encoders. The protective side seal and the purge air connection prevent contamination by debris entering the stage. When compared to current market offerings, the new V-417 series of stages provides users with a higher specification recirculating ball bearing that offers higher load carrying capacity and dynamic performance. The encoder options offer a high resolution resulting in improved motion tracking errors and refined move and settle performance. For full flexibility the user can select either incremental or absolute types. Absolute types remove the requirement to home the stage during startup and provide additional benefits including reduced collision risks during operation. PIMag® magnetic direct drive 3-phase magnetic direct drives do not use mechanical components in the drivetrain, they transmit the drive force to the motion platform directly and without friction. The ironless linear motors reach high velocities and accelerations. Ironless motors are particularly suitable for positioning tasks with the highest demands on precision because there is no undesirable interaction with the permanent magnets. This is in comparison to iron core linear motors which exhibit ‘cogging’. This allows smooth running even at low velocities and no vibration at high velocities. Applications >> Absolute Encoder n Automated Optical Inspection (AOI) n Digital Printing n Electronics Manufacturing n Flatpanel Inspection n Automation n Laser Cutting n Scanning >> Linear Encoder >> PIMag® Magnetic Linear Motors Technology Glossary ....................... page 290 64 W W W. P I . W S V-417.09 V-417.13 V-417.17 Unit Tolerance Travel range 102 204 305 407 mm Pitch / yaw ±14 ±19 ±29 ±39 µrad max. Straightness / flatness ±2.5 ±4 ±6 ±8 µm max. Motion Velocity, unloaded 2000 2000 2000 2000 mm/s max. Positioning accuracy (uncalibrated) ±4 ±8 ±10 ±12 µm typ. Unit Tolerance V-417.21 V-417.25 V-417.33 Motion Active axes X X X Travel range 508 610 813 mm Pitch / yaw ±40 ±45 ±50 µrad max. Straightness / flatness ±9 ±10 ±12 µm max. Velocity, unloaded 2000 2000 2000 mm/s max. Positioning accuracy (uncalibrated) ±14 ±15 ±17 µm typ. Unit Tolerance V-417.xxx211Ex V-417.xxx025Ex Integrated sensor Incremental linear encoder Absolute-measuring linear encoder Sensor signal Sin/cos, 1 V peak-peak, 20 µm signal period EnDat 2.2 Design resolution 0.0003 0.001 µm Minimum incremental motion 5 10 nm typ. Bidirectional repeatability ±0.5 ±0.5 µm typ. Limit switches Hall effect, 5 V NPN – V-417.xxxxxx V-417.xxxxxxB Unit Tolerance Guide type Recirculating ball bearing Recirculating ball bearing Load capacity in Z 450 450 N max. Permissible lateral force 250 250 N max. Permissible torque in θX 40 40 N·m max. Permissible torque in θY 30 30 N·m max. Permissible torque in θZ 40 40 N·m max. Encoder options Mechanical properties 65 MOTION | POSITIONING Translation Stages V-417.05 V-417.xx6 Unit Tolerance Drive properties Drive type Ironless 3-phase linear motor Intermediate circuit voltage, effective 300 V DC max. Peak force 300 N typ. Nominal force 87 N typ. Peak current, effective (RMS) 15 A typ. Nominal current, effective (RMS) 4.4 A typ. Force constant, effective 19.9 N/A typ. Motor constant 8.4 N/√W typ. Electrical time constant 0.35 ms Resistance phase-phase 3.6 Ω typ. Inductance phase-phase 1.2 mH typ. Back EMF phase-phase 16 V·s/m max. Pole pitch N-N 30 mm V-417 Unit Tolerance Miscellaneous Material Aluminum, black anodized stainless steel Overall mass V-417.05 (102 mm travel range): 9.3 V-417.09 (204 mm travel range): 11.2 V-417.13 (305 mm travel range): 13.0 V-417.17 (407 mm travel range): 14.8 V-417.21 (508 mm travel range): 16.6 V-417.25 (610 mm travel range): 18.4 V-417.33 (610 mm travel range): 21.1 kg ±5 % Moved mass 2.8 kg ±5 % MTBF 20000 h Connection M17 (motor) M17 (linear encoder) Fitting for purge air hose with outside diameter 4 mm Recommended controllers C-891 (single axis) C-885 with C-891.10C885 (up to 20 axes) ACS modular controller Connecting cables are not in the scope of delivery and must be ordered separately. Ask about custom designs! 66 W W W. P I . W S Translation Stages V-417, dimensions in mm V-417.05XXXX V-417.09XXXX V-417.13XXXX V-417.17XXXX V-417.21XXXX V-417.25XXXX V-417.33XXXX TRAVEL A B C 102 (4”) 204 (8”) 305 (12”) 407 (16”) 508 (20”) 610 (24”) 813 (32”) 360 465 565 665 770 870 1075 180 232,5 282,5 332,5 385 435 537,5 150 150, 350 150, 350 150, 350, 550 150, 350, 550 150, 350, 550, 750 150, 350, 550, 750, 950 67 MOTION | POSITIONING LS-180 Linear Stage for Heavy Loads Robust Design for Industrial Use n T ravel ranges from 155 mm to 508 mm (6” to 20”) n Max. velocity to 150 mm/s n Load capacity to 1000 N n O ptional linear encoder for direct position measurement Reference-class linear stage Drive types Recirculating ball bearings for high travel accuracy and load capacity. Precision ball screw with 5 mm pitch. Stress-relieved aluminum base for highest stability. Noncontact inductive limit switches. n losed-loop DC servo motor with rotary C encoder on the motor shaft n -phase stepper motor for high torque 2 even at low velocities and high resolution Highly accurate position measuring with incremental linear encoder Noncontact optical linear encoders measure the actual position directly at the motion platform with the greatest accuracy so that nonlinearity, mechanical play or elastic deformation have no influence on position measuring. Recirculating ball bearings When carefully assembled, recirculating ball bearings are distinguished by a beneficial combination of high load capacity, lifetime, maintenance-free operation, and guiding accuracy. The moving part of the stages is supported by four preloaded linear ball bearing units which run on two guide rails. Each bearing unit is made up of two independent rows of circulating ball bearings. Applications n Sample Inspection n Scanning Minimum incremental motion In conjunction with the SMC Hydra controller, versions with stepper motor and integrated linear encoder achieve repeatable minimum incremental motion in the range of the sensor resolution. The same configuration achieves constant low velocities of a few sensor increments per second. >> Linear Encoder n Scientific n Instrumentation Semiconductor Technology Glossary ....................... page 290 68 W W W. P I . W S 624091x1 624092x0 624092x1-0001 Unit Tolerance Linear stage with DC motor and rotary encoder Linear stage with DC motor, linear and rotary encoder Linear stage with stepper motor Linear stage with stepper motor and linear encoder Travel range 155 / 205 / 305 / 508 155 / 205 / 305 / 508 155 / 205 / 305 / 508 155 / 205 / 305 / 508 Integrated sensor Rotary encoder Linear and rotary encoder – Linear encoder Sensor signal rotary encoder A/B quadrature, RS-422 A/B quadrature, RS-422 – – Sensor signal linear encoder – A/B quadrature, RS-422 – Sin/cos, 1 V peak-peak, 20 µm signal period Design resolution 0.25 0.05 25 0.005 Sensor resolution rotary encoder 20000 20000 – Sensor resolution linear encoder – 0.05 – – µm Minimum incremental motion 0.5 0.1 0.5 0.1 µm typ. Unidirectional repeatability 0.5 0.1 0.5 0.1 µm typ. Bidirectional repeatability ±2.5 ±0.1 ±2.5 ±0.1 µm typ. Pitch ±40 / ±50 / ±60 / ±80 ±40 / ±50 / ±60 / ±80 ±40 / ±50 / ±60 / ±80 ±40 / ±50 / ±60 / ±80 µrad typ. Motion and positioning mm µm Counts/ rev. Yaw ±50 ±50 ±50 ±50 µrad typ. Straightness ±2 / ±3 / ±4 / ±6 ±2 / ±3 / ±4 / ±6 ±2 / ±3 / ±4 / ±6 ±2 / ±3 / ±4 / ±6 µm typ. typ. Flatness ±2 / ±3 / ±4 / ±6 ±2 / ±3 / ±4 / ±6 ±2 / ±3 / ±4 / ±6 ±2 / ±3 / ±4 / ±6 µm Max. velocity 150 150 75 75 mm/s Recirculating ball bearing Recirculating ball bearing Recirculating ball bearing Recirculating ball bearing Mechanical properties Guide type Drive screw type Ball screw Ball screw Ball screw Ball screw Drive screw pitch 5 5 5 5 Load capacity 1000 1000 1000 1000 N max. Push/pull force 800 800 800 800 N max. mm Holding force, power off 20 20 50 50 N max. Permissible lateral force 500 500 500 500 N max. Permissible torque Mx in θX 250 250 250 250 N·m max. Permissible torque My in θY 132 132 132 132 N·m max. Permissible torque Mz in θZ 125 125 125 125 N·m max. 69 MOTION | POSITIONING Translation Stages 624091x0 624091x0 624091x1 624092x0 624092x1-0001 Motor type DC motor DC motor 2-phase stepper motor 2-phase stepper motor Operating voltage, nominal 24 24 48 48 Unit Tolerance V nom. Drive properties Operating voltage, max. 48 48 48 48 V max. Peak current, effective 3.8 3.8 2 2 A typ. Electrical time constant 6 6 Resistance phase-phase 0.62 0.62 2.4 2.4 ms Ω typ. Inductance phase-phase 0.13 0.13 2.87 2.87 mH typ. Back EMF phase-phase 0.00349 0.00349 V/kRPM max. 200 200 Full steps/ rev. Step resolution Limit switches Inductive Inductive Inductive Inductive 5 to 40 5 to 40 5 to 40 0 to 55 Miscellaneous Operating temperature range °C Material Aluminum, steel Aluminum, steel Aluminum, steel Aluminum, steel Mass 7.8 / 8.4 / 9.4 / 10.6 8.5 / 9.1 / 10.3 / 11.5 8.3 / 8.9 / 9.9 / 11.0 9.0 / 9.6 / 10.8 / 12 kg ±5 % kg ±5 % Moved mass 2.2 2.2 2.2 2.2 Connection Sub-D 25 (m) Motor: Sub-D 25 (m) Sensor: Sub-D 9 (m) Sub-D 25 (m) Motor: Sub-D 25 (m Sensor: Sub-D 9 (m) Recommended controllers C-863 (single axis) with C-863.AD11 line driver C-884 (to 6 axes) with C-863.AD11 line driver C-885 with C-863.20C885 (to 40 axes) and C-863.AD11 line driver ACS modular controller C-863 (single axis) with C-863.AD11 line driver C-884 (to 6 axes) with C-863.AD11 line driver C-885 with C-863.20C885 (to 40 axes) and C-863.AD11 line driver ACS modular controller C-663.12 (single axis) SMC Hydra (double axis) C-885 with C-663.12C885 (up to 20 axes) ACS modular controller C-663.12 (single axis) SMC Hydra (double axis) C-885 with C-663.12C885 (up to 20 axes) ACS modular controller Ask about custom designs! Connecting cables for motor and sensor are not in the scope of delivery and must be ordered separately. 70 W W W. P I . W S Translation Stages LS-180, dimensions in mm, LS-010: Cable for linear encoder Travel range/mm A B C D 155 205 305 508 235 260 310 410 470 520 620 820 3 3 5 5 350 350 450 650 Direction of the axes and torques for linear stages 71 MOTION | POSITIONING L-505 Compact Linear Stage With DC or Stepper Motor n T ravel ranges 13 or 26 mm n S tepper motor or DC servo motor with and without gearhead n V elocity n L oad to 15 mm/s capacity to 30 N n I ntegrated Product overview Compact linear stage with low-backlash fine-threaded leadscrews and ball guides. Directly mountable XY combination. Integrated reference point and limit switches: Hall effect. The linear stage is available in two design variants: n Narrow, long variant with direct fixed drive (flange motor). n W ide, compact variant with belt drive (folded drivetrain). These variants are marked by an “F” at the end of the item number. Drive types n DC motor with or without gearhead n Stepper motor with or without gearhead Applications n Autofocus n Biotechnology n Automation reference point and limit switch Variants with DC motor are equipped with an incremental linear encoder. This is optional in the case of stepper motor variants. Highly accurate position measuring with incremental linear encoder Noncontact optical linear encoders measure the actual position directly at the motion platform with the greatest accuracy so that nonlinearity, mechanical play or elastic deformation have no influence on position measuring. >> Linear Encoder n Medical Industry n Precision Micro Assembly Technology Glossary ....................... page 290 72 W W W. P I . W S L-505.014212F L-505.024212F Linear stage with DC motor and linear encoder Linear stage with DC gear motor and linear encoder X X Travel range 13 / 26 13 / 26 Integrated sensor Incremental linear encoder Incremental linear encoder Sensor signal linear encoder A/B quadrature, RS-422 A/B quadrature, RS-422 Design resolution 0.05 0.05 µm Sensor resolution linear encoder 0.05 0.05 µm Minimum incremental motion 0.1 0.5 µm typ. Unidirectional repeatability 0.1 0.25 µm typ. Bidirectional repeatability ±0.15 ±0.25 µm typ. Pitch / yaw ±50 / ±75 ±50 / ±75 µrad typ. Straightness / flatness ±0.5 / ±1 ±0.5 / ±1 µm typ. Max. velocity L-505.xxxxxx: 15 L-505.xxxxxxF: 7.5 1 mm/s Reference and limit switches Hall effect Hall effect Reference point switch repeatability <4 <4 Guide type Ball guide Ball guide Drive screw type Leadscrew Leadscrew Drive screw pitch 0.5 0.5 mm Load capacity 30 30 N max. Permissible lateral force 30 30 N max. Push/pull force 20 20 N max. Holding force, power off 20 20 N typ. Permissible torque Mx in θX L-505.01: 7 L-505.02: 9 L-505.01: 7 L-505.02: 9 N·m max. Permissible torque My in θY L-505.01: 6 L-505.02: 8 L-505.01: 6 L-505.02: 8 N·m max. Permissible torque Mz in θZ L-505.01: 6 L-505.02: 8 L-505.01: 6 L-505.02: 8 N·m max. Motor type DC motor DC gear motor Operating voltage, nominal 24 12 V nom. Operating voltage, max. 48 24 V max. Operating temperature range 5 to 40 5 to 40 °C Material anodized aluminum, stainless steel anodized aluminum, stainless steel Mass 0.4 0.4 kg ±5 % Moved mass 0.07 0.07 kg ±5 % Connection HD Sub-D 26 (m) HD Sub-D 26 (m) Recommended controllers C-863 (single axis) C-884 (up to 6 axes) C-885 with C-863.20C885 (to 40 axes) ACS modular controller C-863 (single axis) C-884 (up to 6 axes) C-885 with C-863.20C885 (to 40 axes) ACS modular controller Active axes Unit Tolerance Translation Stages L-505.013212 L-505.013212F L-505.023212 L-505.023212F L-505 with DC motor Motion and positioning mm µm typ. Mechanical properties Drive properties Miscellaneous 73 MOTION | POSITIONING L-505.011200 L-505.011200F L-505.021200 L-505.021200F L-505.011212 L-505.011212F L-505.021212 L-505.021212F L-505.01A200F L-505.02A200F L-505.01A212F L-505.02A212F Linear stage with stepper motor Linear stage with stepper motor and linear encoder Linear stage with stepper motor and gearhead Linear stage with stepper motor, gearhead and linear encoder X X Travel range 13 / 26 13 / 26 13 / 26 13 / 26 Integrated sensor – Incremental linear encoder – Incremental linear encoder Sensor signal linear encoder – A/B quadrature, RS-422 – A/B quadrature, RS-422 Design resolution 2.5 (full step) 0.005 0.732 (full step) 0.005 µm Sensor resolution linear encoder – 0.005 – 0.005 µm Minimum incremental motion 0.1 0.05 0.2 0.05 µm typ. Unidirectional repeatability 0.3 0.1 0.3 0.1 µm typ. Bidirectional repeatability ±2.5 ±0.15 ±2.5 ±0.15 µm typ. L-505 with stepper motor Active axes Unit Tolerance Motion and positioning mm Pitch / yaw ±50 / ±75 ±50 / ±75 ±50 / ±75 ±50 / ±75 µrad typ. Straightness / flatness ±0.5 / ±1 ±0.5 / ±1 ±0.5 / ±1 ±0.5 / ±1 µm typ. Max. velocity L-505.xxxxxx: 10 L-505.xxxxxxF: 7.5 L-505.xxxxxx: 10 L-505.xxxxxxF: 7.5 0.75 0.75 mm/s Reference and limit switches Hall effect Hall effect Hall effect Hall effect Reference point switch repeatability <4 <4 <4 <4 µm typ. Mechanical properties Guide type Ball guide Ball guide Ball guide Ball guide Drive screw type Leadscrew Leadscrew Leadscrew Leadscrew Drive screw pitch 0.5 0.5 0.5 0.5 Load capacity 30 30 30 30 N max. Permissible lateral force 30 30 30 30 N max. mm Push/pull force 20 20 20 20 N max. Holding force, power off 20 20 20 20 N typ. Permissible torque Mx in θX L-505.01: 7 L-505.02: 9 L-505.01: 7 L-505.02: 9 L-505.01: 7 L-505.02: 9 L-505.01: 7 L-505.02: 9 N·m max. Permissible torque My in θY L-505.01: 6 L-505.02: 8 L-505.01: 6 L-505.02: 8 L-505.01: 6 L-505.02: 8 L-505.01: 6 L-505.02: 8 N·m max. Permissible torque Mz in θZ L-505.01: 6 L-505.02: 8 L-505.01: 6 L-505.02: 8 L-505.01: 6 L-505.02: 8 L-505.01: 6 L-505.02: 8 N·m max. Motor type 2-phase stepper motor 2-phase stepper motor 2-phase stepper motor with gearhead 2-phase stepper motor with gearhead Operating voltage, nominal 24 24 24 24 V nom. max. Drive properties Operating voltage, max. 48 48 48 48 V Step resolution 200 200 24 24 Full steps/ rev. 74 W W W. P I . W S L-505.011212 L-505.011212F L-505.021212 L-505.021212F L-505.01A200F L-505.02A200F L-505.01A212F L-505.02A212F Unit Operating temperature range 5 to 40 5 to 40 5 to 40 5 to 40 °C Material anodized aluminum, stainless steel anodized aluminum, stainless steel anodized aluminum, stainless steel anodized aluminum, stainless steel Tolerance Translation Stages L-505.011200 L-505.011200F L-505.021200 L-505.021200F L-505 with stepper motor Miscellaneous Mass 0.4 0.4 0.4 0.4 kg ±5 % Moved mass 0.07 0.07 0.07 0.07 kg ±5 % Connection HD Sub-D 26 (m) HD Sub-D 26 (m) HD Sub-D 26 (m) HD Sub-D 26 (m) Recommended controllers C-663.12 (single axis) SMC Hydra (double axis) C-885 with C-663.12C885 (up to 20 axes) ACS modular controller C-663.12 (single axis) SMC Hydra (double axis) C-885 with C-663.12C885 (up to 20 axes) ACS modular controller C-663.12 (single axis) SMC Hydra (double axis) C-885 with C-663.12C885 (up to 20 axes) ACS modular controller C-663.12 (single axis) SMC Hydra (double axis) C-885 with C-663.12C885 (up to 20 axes) ACS modular controller All cables required for operation with the ordered controller are included in the scope of delivery. The cable length is 3 m. Cable for connecting to other controllers can be ordered as accessory. Custom designs or different specifications on request. L-505 with direct fixed drive, dimensions in mm L-505.xxxxxxF with belt drive, dimensions in mm Travel range A B 13 mm 26 mm 40.5 47 75 88 Travel range A B 13 mm 26 mm 28.5 35 136 149 L-505 motion platform, dimensions in mm 75 MOTION | POSITIONING V-522 / V-524 / V-528 High-Dynamics PIMag® Linear Stage Voice Coil-Direct Drive with Direct Position Measurement n Fast scanning and positioning n Travel ranges 5 mm, 10 mm, 20 mm n Scanning frequencies of more than 10 Hz n Max. velocity 250 mm/s n C rossed roller bearings for the highest precision, anti-creep V-52x, dimensions in mm The V-522 reliably performs 20-nm repeatable steps V-522.1AA V-522.1AB V-524.1AA V-524.1AB V-528.1AA V-528.1AB Applications n Photonics n Digital n Scanning Printing Marking n Metrology B C D E F G 80 80 90 90 120 120 65 65 75 75 95 95 70 70 80 80 110 110 70 70 70 70 100 100 – – – – 75 75 – 15 – 15 – 20 – 23 – 25,5 – 39,5 >> Linear Encoder n Autofocus n Laser A / Testing n Scientific >> PIMag® Voice Coil Instrumentation n Semiconductor Technology Glossary ....................... page 290 76 W W W. P I . W S V-524.1AA V-524.1AB V-528.1AA V-528.1AB Unit mm Tolerance Motion and positioning Active axes X Travel range 5 10 20 Integrated Sensor Optical, incremental Optical, incremental Optical, incremental Sensor resolution 10 10 10 nm Min. incremental motion 20 20 20 nm Unidirectional repeatability 20 20 20 nm Bidirectional repeatability ±120 ±120 ±120 nm Reference point switch repeatability <1 <1 <1 µm typ. typ. Pitch ±50 ±50 ±50 µrad max. Yaw ±50 ±50 ±50 µrad max. Straightness 0.5 0.5 0.5 µm max. Flatness 0.5 0.5 0.5 µm max. Velocity 250 250 250 mm/s max. max. Mechanical properties Load capacity in Z 100 100 100 N Moved mass 131 137 150 g Overall mass 460 500 580 g Drive properties Drive type voice coil voice coil voice coil Nominal force 4 3.8 2.9 N nominal Nominal current 1.3 1.3 1.3 A nominal Peak current 3 3 3 A max. (3s) Force constant 3.4 2.9 2.3 N/A typ. Motor constant 1.3 1.1 0.85 N/(√W) typ. Coil resistance 7.2 7.2 7.2 Ω typ. typ. Coil inductance 1.7 1.7 1.7 mH Time constant 0.32 0.32 0.32 ms Aluminum, black anodized Aluminum, black anodized Aluminum, black anodized Miscellaneous Housing material Cable length 2 2 2 Cable exit V-52x.1AA: cable exit in X V-52x.1AB: cable exit in Y V-52x.1AA: cable exit in X V-52x.1AB: cable exit in Y V-52x.1AA: cable exit in X V-52x.1AB: cable exit in Y Voltage / sensor connection Sub-D 15 (m) Sub-D 15 (m) Sub-D 15 (m) m Lifetime 20000 20000 20000 km Operating temperature range 18 to 45 18 to 45 18 to 45 °C Relative humidity during operation 20 to 80 20 to 80 20 to 80 % Recommended controllers C-413 (single axis) ACS modular controller C-413 (single axis) ACS modular controller C-413 (single axis) ACS modular controller ±10 mm Ask about custom designs! 77 MOTION | POSITIONING Translation Stages V-522.1AA V-522.1AB V-508 PIMag® Precision Linear Stage Versatile options for adapting to requirements n Travel ranges 80, 170, and 250 mm n Ironless or iron core linear motor n I ncremental or absolute linear encoder, various resolutions n Compact cross section: 80 mm × 25 mm n C rossed roller bearings for high load capacity, anti-creep V-508, dimensions in mm Applications n Digital Printing Travel 80 V-508.3xxxxx 170 V-508.6xxxxx 250 V-508.9xxxxx A B C D E F 145 25 25 2 100 25 235 25 25 4 100 / 200 37,5 315 12.5 – 5 100 / 200 50 >> Absolute Encoder n Medical Industry n Electronics Manufacturing n Metrology n Laser Marking n Scanning / Testing >> Linear Encoder >> PIMag® Magnetic Linear Motors Technology Glossary ....................... page 290 78 W W W. P I . W S V-508.2 V-508.6 V-508.9 Unit Tolerance Active axes X X X Travel range 80 170 250 mm Pitch / yaw ±100 ±200 ±300 µrad max. Straightness / flatness ±4 ±10 ±20 µm max. Velocity, unloaded 1 1 1 m/s max. Acceleration, unloaded 5 5 5 m/s² max. max. Translation Stages Motion and positioning Mechanical properties Load capacity in Z 100 100 100 N Moved mass 0.35 0.55 0.8 kg kg Overall mass 1.1 1.6 2.1 Guide type Crossed roller guide with anti-creep system Crossed roller guide with anti-creep system Crossed roller guide with anti-creep system V-508.x3 V-508.x5 V-508.xB Integrated sensor Incremental linear encoder PIOne incremental linear encoder Absolute encoder Sensor signal Sin/cos, 1 V peak-peak, 80 µm signal period Sin/cos, 1 V peak-peak, 2 µm signal period BiSS-C Sensor resolution 10 (1) 0.2 (1) 78 nm typ. Minimum incremental motion 20 0.5 160 nm typ. Bidirectional repeatability ±0.1 ±0.05 ±0.15 Unit Tolerance Encoder options V-508.xx1 V-508.xx2 typ. Unit Tolerance Drive properties Drive type Linear motor, ironless, 3-phase Linear motor, iron core, 3-phase Intermediate circuit voltage, effective 48 48 V DC Peak force 12 14 N typ. Nominal force 3 4 N typ. Peak current, effective 3.2 3.2 A typ. Nominal current, effective 0.7 1.1 A typ. Force constant, effective 4.28 4.81 N/A typ. Resistance phase-phase 2.96 1.23 Ω typ. Inductance phase-phase 0.63 0.97 mH typ. Back EMF phase-phase 5.36 3.02 V·s/m max. Pole pitch N-N 20 18 mm V-508 Miscellaneous Operating temperature range 10 °C to 50 °C Humidity 20 – 90 % rel., not condensing Material Aluminum, black anodized Motor connector HD Sub-D 26 (m) Sensor connection Sub-D 15 (f) Cable length 2m Recommended controllers C-891 (single axis) C-885 with C-891.10C885 (up to 20 axes) ACS modular controller (1) interpolated Ask about custom designs! 79 MOTION | POSITIONING M-122.2DD1 Micro Translation Stage Compact Linear Stage with Direct Position Measuring n Travel range 25 mm n I ntegrated linear encoder option for highest accuracy with 0.1 µm resolution n Min. incremental motion 0.2 µm n Max. velocity 20 mm/s n B all screw for high velocities and number of cycles M-122.2DD1, dimensions in mm Applications >> Linear Encoder n Automation n Precision Micro Assembly n Laser n Scientific Instrumentation Marking n Optical Alignment Technology Glossary ....................... page 290 80 W W W. P I . W S Unit Travel range 25 mm Integrated sensor Linear encoder Sensor resolution 0.1 µm Design resolution 0.1 µm typ. Minimum incremental motion 0.2 µm typ. Backlash 0.2 µm typ. Unidirectional repeatability 0.15 µm typ. Pitch ±150 µrad typ. Yaw ±150 µrad typ. Velocity 20 mm/s max. Reference point switch repeatability 1 µm typ. Translation Stages M-122.2DD1 Tolerance Motion and positioning Mechanical properties Drive screw Ball screw Stiffness in motion direction 0.25 N/µm Load capacity 50 N max. Push/pull force 20 N max. Lateral force 25 N max. Drive properties Motor type DC motor Operating voltage 0 to ±12 V DC Motor power 2.25 W Drive screw pitch 0.5 mm Reference and limit switches Hall effect Miscellaneous Cable length 0.5 m Operating temperature range 10 to 50 °C Material Aluminum, steel Mass 0.22 Recommended controllers C-863 C-884 kg XYZ setup consisting of three M-122.2DD1 microtranslation stages. 81 MOTION | POSITIONING MTS-65 Miniature Linear Stage Robust Design for Industrial Use n Travel ranges to 52 mm (2”) n Repeatability to 0.1 µm n Load capacity to 2 kg MTS-65, dimensions in mm Travel range/mm 13 26 52 A / mm B / mm C / mm 38.5 62 99.5 45 75 112.5 62 105 147.5 Applications n Autofocus n Laser n Biotechnology n Marking Scientific Instrumentation n Automation Technology Glossary ....................... page 290 82 W W W. P I . W S 621792x03 Tolerance X Translation Stages Active axes Unit Motion and positioning Travel range 13 / 26 / 52 mm Design resolution 5 (full step) µm Minimum incremental motion 0.1 µm typ. Unidirectional repeatability 0.2 µm typ. Bidirectional repeatability ±5.0 µm typ. Straightness ±1.0 / ±2.0 / ±3.0 µm typ. Flatness ±1.0 / ±2.0 / ±3.0 µm typ. Pitch ±40 / ±60 / ±80 µrad typ. Yaw ±40 µrad typ. Max. velocity 8 mm/s max. Mechanical properties Drive screw type Ball screw Drive screw pitch 1 mm Load capacity 10 N max. Push/pull force 3 N max. Holding force, power off 3 N typ. Permissible lateral force 10 N max. Permissible torque Mx in X 0.4 N·m max. Permissible torque My in Y 0.6 N·m max. Permissible torque Mz in Z 0.4 N·m max. Drive properties Motor type 2-phase stepper motor Operating voltage, nominal 24 V nom. Operating voltage, max. 48 V max. Step resolution 200 Full steps/ rev. Limit switches Optical Miscellaneous Operating temperature range 5 to 40 Material Aluminum, black anodized °C Mass 0.4 / 0.6 / 0.8 Connector HD Sub-D 15 (m) Recommended controllers C-663.12 (single axis) SMC Hydra (double axis) C-885 with C-663.12C885 (up to 20 axes) ACS modular controller kg ±5 % Connecting cables for motor and sensor are not in the scope of delivery and must be ordered separately. Ask about custom designs! Direction of the axes and torques for linear stages 83 MOTION | POSITIONING M-105 / M-106 Microtranslation Stage Precision Crossed Roller Guides, PiezoMike Option, XY(Z) Combinations n Travel range to 18 mm n All-stainless-steel construction n XY and XYZ combinations n Resolution to 0.1 µm n O ptional n PiezoMike with 10 nm resolution Optional motor drives The M-105 and M-106 linear stages are available in X, XY, and XYZ configurations, and allow travel ranges of up to 18 mm. They have crossed roller bearings that allow a guiding accuracy of better than 2 µm. The carriage is preloaded against the precision micrometer screw with springs to suppress backlash. With the XYZ version, the Z axis is mounted with an adapter bracket so that the load acts in the direction of the spring preload. M-105.10, dimensions in mm M-105.1P, dimensions in mm Applications n Manual sample manipulation 84 W W W. P I . W S M-105.1P* M-106.10* Unit Travel range 18 18 5 mm Piezo fine travel range – 30 – µm Min. incremental motion (piezo drive) – 0.01 – µm Minimum incremental motion (micrometer screw)** 1 1 0.1 µm Backlash 2 2 2 µm Straightness 2 2 2 µm Tolerance Flatness 2 2 2 µm Load capacity 100 100 100 N max. Push/pull force 20 / 4 20 / 4 20 / 4 N max. N max. Lateral force 25 25 25 Drive M-626.00 P-854.00 M-653.00 Drive screw pitch (coarse / fine) 0.5 / – 0.5 / – 0.4 / 0.02 mm/rev. kg Mass 0.32 0.38 0.33 Housing material St St St Recommended piezo driver – E-610, E-500 system – * Versions M-105.2x, M-106.2x and M-105.3x, M-106.x0 are combinations of basic .1x. versions ** Motorized versions achieve up to 50 nm. 85 MOTION | POSITIONING Translation Stages M-105.10* L-509 Precision Linear Stage Compact Design, for Loads to 10 kg n T ravel Applications n Autofocus ranges from 26 to 102 mm (1” to 4”) n Repeatability to 0.1 µm n Optional with Direct-Measuring Linear Encoder n ActiveDrive DC, DC, BLDC, and DC gear motors n Stepper motors n Direction-sensing reference point switch >> ActiveDrive n Laser >> Linear Encoder Cutting n Biotechnology n Optical Alignment n Automation n Scientific Instrumentation >> Vacuum-Compatible Versions Technology Glossary ....................... page 290 86 W W W. P I . W S L-509.xxADxx L-509.xxSD00 / L-509.xASD00 Unit Tolerance Translation Stages Stages with stepper motor and ActiveDrive DC motor Motion Active axes X X Travel range L-509.1xADxx: 26 L-509.2xADxx: 52 L-509.4xADxx: 102 L-509.1xSDxx: 26 L-509.2xSDxx: 52 L-509.4xSDxx: 102 mm Pitch / yaw L-509.1xADxx: ±60 L-509.2xADxx: ±90 L-509.4xADxx: ±120 L-509.1xSDxx: ±60 L-509.2xSDxx: ±90 L-509.4xSDxx: ±120 µrad typ. Straightness / flatness L-509.1xADxx: 2 L-509.2xADxx: 4 L-509.4xADxx: 8 L-509.1xSDxx: 2 L-509.2xSDxx: 4 L-509.4xSDxx: 8 µm typ. Velocity 50 20 mm/s max. Unit Tolerance L-509.xxADxx L-509.xxSD00 L-509.xASD00 Integrated sensor L-509.xxAD10: Incremental rotary encoder L-509.xxAD00: Incremental linear encoder – Incremental linear encoder Sensor signal A/B quadrature, TTL – Sin/cos, 1 V peak-peak, 20 µm signal period Design resolution L-509.xxAD10: 0.061 L-509.xxAD00: 0.05 5.0 0.005 µm Sensor resolution rotary encoder L-509.xxAD10: 16384 – – Cts./rev. Sensor resolution linear encoder L-509.xxAD00: 0.05 – 0.005 µm Resolution stepper motor – 200 200 Full steps/ rev. Minimum incremental motion L-509.xxAD10: 0.8 L-509.xxAD00: 0.2 0.1 0.02 µm typ. Unidirectional repeatability L-509.xxAD10: 0.2 L-509.xxAD00: 0.1 0.3 0.1 µm typ. Bidirectional repeatability L-509.xxAD10: ±0.5 L-509.14AD00: ±0.3 L-509.24AD00: ±0.2 L-509.44AD00: ±0.2 ±1 ±0.2 µm typ. Reference and limit switches Optical Optical Optical Unit Tolerance Positioning L-509.xxADxx / L-509.xxSD00 / L-509.xASD00 Mechanical properties Drive screw type Crossed roller guide with anti-creep system Drive screw pitch 1 Guide type Recirculating ball bearings Holding force, power off L-509.xxADxx: 20 L-509.xxSD00 / L-509.xASD00: 60 N typ. Push/pull force Fx, power on 60 N max. mm Permissible lateral force 50 N max. Load capacity 100 N max. Permissible torque Mx in θX 30 N·m max. Permissible torque My in θY 25 N·m max. Permissible torque Mz in θZ 20 N·m max. 87 MOTION | POSITIONING Stages with stepper motor and ActiveDrive DC motor L-509.xxADxx L-509.xxSD00 / L-509.xASD00 Unit Tolerance Drive properties Motor type ActiveDrive DC motor (PWM) Stepper motor, 2-phase Operating voltage, nominal 24 24 V nom. Operating voltage, max. 24 48 V max. Tolerance L-509.xxADxx L-509.xxSD00 L-509.xASD00 Unit 5 to 40 5 to 40 5 to 40 °C Miscellaneous Operating temperature range Material Aluminum, steel Aluminum, steel Aluminum, steel Mass L-509.10AD10: 1.4 L-509.20AD10: 1.5 L-509.40AD10: 1.7 L-509.14AD00: 1.4 L-509.24AD00: 1.6 L-509.44AD00: 1.8 L-509.10SD00: 1.4 L-509.20SD00: 1.5 L-509.40SD00: 1.7 L-509.1ASD00: 1.5 L-509.2ASD00: 1.6 L-509.4ASD00: 1.8 kg ±5 % Moved mass, unloaded L-509.x0AD10: 0.22 L-509.14AD00: 0.24 L-509.24AD00: 0.24 L-509.44AD00: 0.25 0.22 L-509.1ASD00: 0.24 L-509.2ASD00: 0.24 L-509.4ASD00: 0.25 kg ±5 % Connection 1 × Sub-D 15 (m) (motor/sensor) 1 × HD Sub-D 26 (m) (motor) 1 × HD Sub-D 26 (m) (motor) 1 × Sub-D 9 (m) (sensor) Recommended controllers / drivers C-863 (single axis) C-884 (up to 6 axes) C-885 with C-863.20C885 (to 40 axes) ACS modular controller C-663.12 (single axis) SMC Hydra (double axis) C-885 with C-663.12C885 (up to 20 axes) ACS modular controller C-663.12 (single axis) SMC Hydra (double axis) C-885 with C-663.12C885 (up to 20 axes) ACS modular controller Stages with DC motor and BLDC motor L-509.xxDG10 L-509.xx3111 / L-509.xx3132 L-509.xx5132 Unit Tolerance Motion Active axes X X X Travel range L-509.10DG10: 26 L-509.20DG10: 52 L-509.40DG10: 102 L-509.023xxx: 26 L-509.033xxx: 52 L-509.053xxx: 102 L-509.025132: 26 L-509.035132: 52 L-509.055132: 102 mm Pitch / yaw L-509.10DG10: ±60 L-509.20DG10: ±90 L-509.40DG10: ±120 L-509.023xxx: ±60 L-509.033xxx: ±90 L-509.053xxx: ±120 L-509.025132: ±60 L-509.035132: ±90 L-509.055132: ±120 µrad typ. Straightness / flatness L-509.10DG10: 2 L-509.20DG10: 4 L-509.40DG10: 8 L-509.023xxx: 2 L-509.033xxx: 4 L-509.053xxx: 8 L-509.025132: 2 L-509.035132: 4 L-509.055132: 8 µm typ. Velocity 3 50 50 mm/s max. 88 W W W. P I . W S L-509.xxDG10 L-509.xx3111 L-509.xxx132 Integrated sensor Incremental rotary encoder Incremental linear encoder Incremental rotary encoder Sensor signal A/B quadrature, TTL Sin/cos, 1 V peak-peak, 20 µm signal period A/B quadrature, TTL Unit Tolerance Translation Stages Positioning Design resolution 0.008 0.005 0.05 µm Sensor resolution rotary encoder 4096 – 20000 Cts./rev. Sensor resolution linear encoder – – µm Minimum incremental motion 0.1 0.1 0.5 µm typ. Unidirectional repeatability 0.1 0.1 0.2 µm typ. µm typ. Unit Tolerance Bidirectional repeatability ±2 ±0.2 ±0.5 Reference and limit switches Optical Optical Optical L-509.xxDG10 L-509.xx3xxx L-509.xx5xxx Crossed roller guide with anti-creep system Crossed roller guide with anti-creep system Mechanical properties Drive screw type Drive screw pitch 1 1 Gear ratio 2401:81 – mm Guide type Recirculating ball bearings Recirculating ball bearings Holding force, power off L-509.10DG10: 40 L-509.20DG10: 60 L-509.40DG10: 60 20 N typ. Push/pull force Fx, power on 60 60 N max. Permissible lateral force 50 50 N max. Load capacity 100 100 N max. Permissible torque Mx in θX 30 30 N·m max. Permissible torque My in θY 25 25 N·m max. Permissible torque Mz in θZ 20 20 N·m max. Unit Tolerance L-509.xxDG10 L-509.xx3xxx L-509.xx5xxx Motor type DC motor (with gearhead) DC motor Brushless DC motor, 3-phase Operating voltage, nominal 24 24 24 V nom. Operating voltage, max. 48 48 48 V max. Drive properties 89 MOTION | POSITIONING Stages with DC motor and BLDC motor L-509.xxDG10 L-509.xx3xxx L-509.xx5132 Unit 5 to 40 5 to 40 5 to 40 °C Tolerance Miscellaneous Operating temperature range Material Aluminum, steel Aluminum, steel Aluminum, steel Mass L-509.10DG10: 1.4 L-509.20DG10: 1.6 L-509.40DG10: 1.9 L-509.023xxx: 1.2 L-509.033xxx: 1.3 L-509.053xxx: 1.5 L-509.025132: 1.4 L-509.035132: 1.5 L-509.055132: 1.7 kg ±5 % Moved mass, unloaded 0.22 L-509.023111: 0.24 L-509.033111: 0.24 L-509.053111: 0.25 0.22 kg ±5 % Connection 1 × HD Sub-D 26 (m) (motor/sensor) 1 × HD Sub-D 26 (m) (motor) L-509.xx3111 additional: 1 × Sub-D 9 (m) (sensor) 1 × HD Sub-D 26 (m) (motor/sensor) Recommended controllers / drivers C-863 (single axis) C-884 (up to 6 axes) C-885 with C-863.20C885 (to 40 axes) ACS modular controller C-863 (single axis) C-884 (up to 6 axes) C-885 with C-863.20C885 (to 40 axes) ACS modular controller C-891 (single axis) C-885 with C-891.10C885 (up to 20 axes) ACS modular controller All cables required for operation with the ordered controller are included in the scope of delivery. The cable length is 3 m. Cable for connecting to other controllers can be ordered as accessory. Ask about custom designs! L-509 versions with DC and BLDC motor, dimensions in mm L-509.023111 L-509.023132 L-509.025132 L-509.033111 L-509.033132 L-509.035132 L-509.053111 L-509.053132 L-509.055132 A B C D 157.3 157.3 157.3 166.8 166.8 166.8 191.8 191.8 191.8 100 100 100 100 100 100 150 150 150 135.3 135.3 135.3 154.3 154.3 154.3 204.3 204.3 204.3 104.4 – – 104.4 – – 104.4 – – 90 W W W. P I . W S Translation Stages Detail drawing of the L-509 motion platform L-509 versions with DC gear motor, dimensions in mm L-509.10DG10 L-509.20DG10 L-509.40DG10 A B C D 157.3 166.8 191.8 100 100 150 135.3 154.3 204.3 106 106 106 91 MOTION | POSITIONING L-509 versions with stepper motor, dimensions in mm L-509.10SD00 L-509.1ASD00 L-509.20SD00 L-509.2ASD00 L-509.40SD00 L-509.4ASD00 A B C D E 129.3 129.3 138.8 138.8 163.8 163.8 100 100 100 100 150 150 135.3 135.3 154.3 154.3 204.3 204.3 78 78 78 78 78 78 – 104.2 – 104.2 – 104.2 92 W W W. P I . W S Translation Stages L-509 versions with ActiveDrive DC motor, dimensions in mm L-509.10AD10 L-509.14AD00 L-509.20AD10 L-509.24AD00 L-509.40AD10 L-509.44AD00 A B C D E 157.3 157.3 166.8 166.8 191.8 191.8 100 100 100 100 150 150 135.3 135.3 154.3 154.3 204.3 204.3 106 106 106 106 106 106 – 104.2 – 104.2 – 104.2 93 MOTION | POSITIONING L-511 High-Precision Linear Stage High Travel Accuracy n T ravel ranges to 155 mm (6”) n Repeatability to 0.1 µm n ActiveDrive DC, DC, BLDC, and DC gear motors n Stepper motors n O ptional n linear encoder for direct position measurement Direction-sensing reference point switch Reference-class linear stage Drive types Recirculating ball bearings for high travel accuracy and load capacity. Precision ball screw with 2 mm pitch. Stress-relieved aluminum base for highest stability. Noncontact limit switches. Noncontact optical reference point switch with direction sensing in the middle of the travel range. n Highly accurate position measuring with incremental linear encoder Noncontact optical linear encoders measure the actual position directly at the motion platform with the greatest accuracy so that nonlinearity, mechanical play or elastic deformation have no influence on position measuring. n . xxDG variant: DC servo motor with gearhead for high torques and resolution at low motor power n . xxSD variant: 2-phase stepper motor for low velocity and high resolution Minimum incremental motion and slow motion In conjunction with the SMC Hydra controller, versions with stepper motor and integrated linear encoder (L-511.xASD00) achieve repeatable minimum incremental motion in the range of the sensor resolution. The same configuration achieves constant low velocities of a few sensor increments per second. .xxAD variant: ActiveDrive DC motor for high velocity: Control via pulse-width-modulated (PWM) signals, the operating voltage is attained via an amplifier integrated in the motor housing. n .xx3xxx variant: DC motor n .xx5xxx variant: Brushless DC motor Position measurement n I ntegrated rotary encoder on the motor shaft (xxAD10, xxDG10, xxxx32). n I ncremental linear encoder (xxAD00, xASD00, xxxx11). Applications >> ActiveDrive >> Linear Encoder n Autofocus n Laser Cutting n Biotechnology n Optical Alignment n Automation n Scientific Instrumentation >> Vacuum-Compatible Versions Technology Glossary ....................... page 290 94 W W W. P I . W S L-511.xxSD00 / L-511.xASD00 Unit Tolerance Active axes X X Travel range L-511.2xADxx: 52 L-511.4xADxx: 102 L-511.6xADxx: 155 L-511.2xSD00: 52 L-511.4xSD00: 102 L-511.6xSD00: 155 mm Pitch / yaw L-511.2xADxx: ±40 L-511.4xADxx: ±60 L-511.6xADxx: ±70 L-511.2xSD00: ±40 L-511.4xSD00: ±60 L-511.6xSD00: ±70 µrad typ. Straightness / flatness L-511.2xADxx: ±1.5 L-511.4xADxx: ±2.5 L-511.6xADxx: ±3.0 L-511.2xSD00: ±1.5 L-511.4xSD00: ±2.5 L-511.6xSD00: ±3.0 µm typ. Velocity 90 45 mm/s max. Unit Tolerance Translation Stages L-511.xxADxx Stages with stepper motor and ActiveDrive DC motor Motion L-511.xxADxx L-511.xxSD00 L-511.xASD00 Integrated sensor L-511.xxAD10: Incremental rotary encoder L-511xxAD00: Incremental linear encoder – Incremental linear encoder Sensor signal A/B quadrature, TTL – Sin/cos, 1 V peak-peak, 20 µm signal period Design resolution L-511.xxAD10: 0.122 L-511.xxAD00: 0.05 10.0 0.005 µm Sensor resolution rotary encoder L-511.xxAD10: 16384 – – Cts./rev. Sensor resolution linear encoder L-511.xxAD00: 0.05 – 0.005 µm Resolution stepper motor – 200 200 Full steps/ rev. Minimum incremental motion L-511.xxAD10: 0.488 L-511.xxAD00: 0.1 0.2 0.02 µm typ. Unidirectional repeatability L-511.xxAD10: 0.488 L-511.xxAD00: 0.1 0.2 0.1 µm typ. Bidirectional repeatability L-511.xxAD10: ±1.250 L-511.xxAD00: ±0.2 ±2 ±0.2 µm typ. Reference and limit switches Optical Optical Optical Unit Tolerance Positioning L-511.xxADxx / L-511.xxSD00 / L-511.xASD00 Mechanical properties Drive screw type Ball screw Drive screw pitch 2 Guide type Recirculating ball bearings mm Holding force, power off L-511.xxADxx: 20 L-511.xxSD00 / L-511.xASD00: 60 N typ. Push/pull force Fx, power on 100 N max. Permissible lateral force 250 N max. Load capacity 500 N max. Permissible torque Mx in θX 60 N·m max. Permissible torque My in θY 30 N·m max. Permissible torque Mz in θZ 30 N·m max. 95 MOTION | POSITIONING Stages with stepper motor and ActiveDrive DC motor L-511.xxADxx L-511.xxSD00 / L-511.xASD00 Unit Tolerance Drive properties Motor type ActiveDrive DC motor (PWM) Stepper motor, 2-phase Operating voltage, nominal 24 24 V nom. Operating voltage, max. 24 48 V max. Tolerance L-511.xxADxx L-511.xxSD00 L-511.xASD00 Unit Operating temperature range 5 to 40 5 to 40 5 to 40 °C Material Aluminum, stainless steel Aluminum, stainless steel Aluminum, stainless steel Mass L-511.2xADxx: .2.5 L-511.40AD10: 2.8 L-511.60AD10: 3.3 L-511.44AD00: 2.7 L-511.64AD00: 3.5 L-511.20SDxx: 2.4 L-511.40SDxx: 2.6 L-511.60SDxx: 3.1 L-511.2ASDxx: 2.4 L-511.4ASDxx: 2.6 L-511.6ASDxx: 3.1 kg ±5 % Moved mass, unloaded L-511.2xADxx: 0.6 L-511.4xADxx: 0.6 L-511.6xADxx: 0.65 L-511.20SDxx: 0.6 L-511.40SDxx: 0.6 L-511.60SDxx: 0.65 L-511.2ASDxx: 0.6 L-511.4ASDxx: 0.6 L-511.6ASDxx: 0.65 kg ±5 % Connection 1 × Sub-D 15 (m) (motor/sensor) 1 × HD Sub-D 26 (m) (motor) 1 × HD Sub-D 26 (m) (motor) 1 × Sub-D 9 (m) (sensor) Recommended controllers / drivers C-863 (single axis) C-884 (up to 6 axes) C-885 with C-863.20C885 (to 40 axes) ACS modular controller C-663.12 (single axis) SMC Hydra (double axis) C-885 with C-663.12C885 (up to 20 axes) ACS modular controller C-663.12 (single axis) SMC Hydra (double axis) C-885 with C-663.12C885 (up to 20 axes) ACS modular controller Stages with DC motor and BLDC motor L-511.xxDG10 Unit Tolerance Miscellaneous L-511.xx3111 / L-511.xx3132 L-511.xx5111 / L-511.xx5132 Motion Active axes X X Travel range L-511.20DG10: 52 L-511.40DG10: 102 L-511.60DG10: 155 L-511.03xxxx: 52 L-511.05xxxx: 102 L-511.07xxxx: 155 mm Pitch / yaw L-511.20DG10: ±40 L-511.40DG10: ±60 L-511.60DG10: ±70 L-511.03xxxx: ±40 L-511.05xxxx: ±60 L-511.07xxxx: ±70 µrad typ. Straightness / flatness L-511.20DG10: ±1.5 L-511.40DG10: ±2.5 L-511.60DG10: ±3.0 L-511.03xxxx: ±1.5 L-511.05xxxx: ±2.5 L-511.07xxxx: ±3.0 µm typ. Velocity 6 90 mm/s max. 96 W W W. P I . W S L-511.xx3111 / L-511.xx5111 L-511.xx3132 / L-511.xx5132 Unit Tolerance Integrated sensor Incremental rotary encoder L-511.xx3111: Incremental linear encoder L-511.xx5111: Incremental rotary encoder, incremental rotary encoder Incremental rotary encoder Sensor signal A/B quadrature, TTL Linear encoder: Sin/cos, 1 V peak-peak, 20 µm signal period Rotary encoder: A/B quadrature, TTL A/B quadrature, TTL Design resolution 0.017 L-511.xx3111: 0.005 L-511.xx5111: 0.05 0.1 µm Sensor resolution rotary encoder 4096 20000 20000 Cts./rev. Sensor resolution linear encoder – L-511.xx3111: 0.005 L-511.xx5111: 0.05 0.1 µm Minimum incremental motion 0.1 0.1 0.2 µm typ. Unidirectional repeatability 0.2 0.1 0.2 µm typ. Bidirectional repeatability ±2 ±0.1 ±1.25 µm typ. Reference and limit switches Optical Optical Optical Unit Tolerance Translation Stages L-511.xxDG10 Positioning L-511.xxDG10 L-511.xx3xxx / L-511.xx5xxx Mechanical properties Drive screw type Ball screw Ball screw Drive screw pitch 2 2 Gear ratio 2401:81 – mm Guide type Recirculating ball bearings Recirculating ball bearings Holding force, power off 100 20 N typ. Push/pull force Fx, power on 100 100 N max. Permissible lateral force 250 250 N max. Load capacity 500 500 N max. Permissible torque Mx in θX 60 60 N·m max. Permissible torque My in θY 30 30 N·m max. Permissible torque Mz in θZ 30 30 N·m max. 97 MOTION | POSITIONING Stages with DC motor and BLDC motor L-511.xxDG10 L-511.xx3xxx L-511.xx5xxx Unit Tolerance Motor type DC motor (with gearhead) DC motor Brushless DC motor, 3-phase Operating voltage, nominal 24 24 24 V nom. Operating voltage, max. 48 48 48 V max. Operating temperature range 5 to 40 5 to 40 5 to 40 °C Mass L-511.20DG10: 2.5 L-511.40DG10: 2.7 L-511.60DG10: 2.9 L-511.033xxx: 2.5 L-511.053xxx: 2.6 L-511.073xxx: 3.1 L-511.035xxx: 2.4 L-511.055xxx: 2.7 L-511.075xxx: 3.0 kg ±5 % Moved mass, unloaded L-511.20DG10: 0.6 L-511.40DG10: 0.6 L-511.60DG10: 0.65 L-511.033xxx: 0.6 L-511.053xxx: 0.6 L-511.073xxx: 0.65 L-511.035xxx: 0.6 L-511.055xxx: 0.6 L-511.075xxx: 0.65 kg ±5 % Connection 1 × HD Sub-D 26 (m) (motor/sensor) L-511.xx3111: 1 × HD Sub-D 26 (m) (motor), 1 × Sub-D 9 (m) (sensor) L-511.xx3132: 1 × HD Sub-D 26 (m) (motor/sensor) L-511.xx5111: 1 × HD Sub-D 26 (m) (motor/sensor), 1 × Sub-D 9 (m) (sensor) L-511.xx5132: 1 × HD Sub-D 26 (m) (motor/sensor) Recommended controllers / drivers C-863 (single axis) C-884 (up to 6 axes) C-885 with C-863.20C885 (to 40 axes) ACS modular controller C-863 (single axis) C-884 (up to 6 axes) C-885 with C-863.20C885 (to 40 axes) ACS modular controller L-511.xx5111: C-891 (single axis) C-885 with C-891.10C885 (up to 20 axes) ACS modular controller L-511.xx5132 additional: SMC Hydra (double axis) Drive properties Miscellaneous All cables required for operation with the ordered controller are included in the scope of delivery. The cable length is 3 m. Cable for connecting to other controllers can be ordered as accessory. Ask about custom designs! The L-511 reliably performs repeatable 20-nm steps with the linear encoder and SMC Hydra motion controller 98 W W W. P I . W S Translation Stages L-511 versions with DC and BLDC motor, and rotary encoder, dimensions in mm L-511.033132 L-511.035132 L-511.053132 L-511.055132 L-511.073132 L-511.075132 A B C 186 186 211 211 261 261 – – – – 250 250 210 210 260 260 360 360 L-511 versions with DC and BLDC motor, and linear encoder, dimensions in mm L-511.033111 L-511.053111 L-511.073111 L-511.035111 L-511.055111 L-511.075111 A B C 186 211 261 186 211 261 – – 250 – – 250 210 260 360 210 260 360 99 MOTION | POSITIONING L-511 versions with DC gear motor, dimensions in mm L-511.20DG10 L-511.40DG10 L-511.60DG10 A B C D 186 211 261 – – 250 210 260 360 131 131 131 A B C D 158 158 183 183 233 233 – – – – 250 250 210 210 260 260 360 360 103 103 103 103 103 103 L-511 versions with stepper motor, dimensions in mm L-511.20SD00 L-511.2ASD00 L-511.40SD00 L-511 4ASD00 L-511.6OSD00 L-511.6ASD00 100 W W W. P I . W S Translation Stages L-511 versions with ActiveDrive DC motor, dimensions in mm L-511.20AD10 L-511.24AD00 L-511.40AD10 L-511.44AD00 L-511.60AD10 L-511.64AD00 A B C D 186 186 211 211 261 261 – – – – 250 250 210 210 260 260 360 360 131 131 131 131 131 131 Detail drawing of the L-511 motion platform, dimensions in mm 101 MOTION | POSITIONING V-551 PIMag® Precision Linear Stage High Velocity and Precision due to Magnetic Direct Drive n T ravel ranges to 230 mm n V elocity up to 0.5 m/s n A bsolute encoder with 1 nm resolution n H ighest precision with PIOne linear encoder: Minimum incremental motion 0.5 nm n H igh guiding accuracy n C ompact n C rossed design with 160 mm width roller guide, anti-creep Reference-class linear stage PIMag® magnetic direct drive Thanks to the smooth-running precision linear guides with crossed roller bearings, the linear stage is particularly suitable for scanning applications with constant velocity. The anti-creep system reliably prevents cage creep. The guides have high load capacity and high precision under all operating conditions. 3-phase magnetic direct drives do not use mechanical components in the drivetrain, they transmit the drive force to the motion platform directly and without friction. The drives reach high velocities and accelerations. Ironless motors are particularly suitable for positioning tasks with the highest demands on precision because there is no undesirable interaction with the permanent magnets. This allows smooth running even at the lowest velocities and at the same time, there is no vibration at high velocities. Nonlinearity in control behavior is avoid-ed and any position can be controlled easily. The drive force can be set freely. Direct position measurement Position measuring takes place directly at the motion platform with the highest accuracy so that nonlinearity, mechanical play or elastic deformation have no influence on position measuring. The high-resolution PIOne encoder was developed by PI and, with corresponding processing of the measured values, allows a position resolution of much less than one nanometer. The optical and noncontact PIOne encoders are based on an interferometric measuring principle. Due to the short signal period and the high quality of the signals, the linearity error of PIOne encoders is less than 1 %. PIOne encoders support direction sensing when evaluating a reference signal. Absolute encoders supply explicit position information that enables immediate determination of the position. This means that referencing is not required during switch-on, which increases efficiency and safety during operation. Applications n Biotechnology >> Absolute Encoder n Photonics >> Linear Encoder >> PIMag® Magnetic Linear Motors n Electronics Manufacturing n Scanning n Medical Industry n Semiconductor n Metrology / Testing Technology Glossary ....................... page 290 102 W W W. P I . W S V-551.2x V-551.4x V-551.7x Unit Tolerance Active axes X X X Travel range 60 130 230 mm Pitch ±50 ±100 ±100 µrad typ. Yaw ±50 ±50 ±50 µrad typ. Straightness ±1 ±1 ±2 µm typ. Flatness ±2 ±2 ±2 µm typ. Velocity 0.5 0.5 0.5 m/s max. Translation Stages Motion and positioning Mechanical properties Load capacity in Z 150 150 150 N max. Load capacity in Y 50 50 50 N max. Moved mass 2.2 2.7 4.9 kg Overall mass 4.2 5.5 9.7 kg Linear guide Crossed roller bearing with anti-creep system Crossed roller bearing with anti-creep system Crossed roller bearing with anti-creep system V-551 Unit Tolerance V DC max. Drive properties Drive type PIMag® linear motor, ironless, 3-phase Intermediate circuit voltage 110 * Peak force 180 N typ. Nominal force 27 N typ. Peak current, effective 10 A typ. Nominal current, effective 1.5 A typ. Force constant, effective 18 N/A typ. Resistance per phase 3.15 Ω typ. Inductance per phase 0.9 mH typ. Back EMF phase-phase 16 V·s/m max. V-551.xB V-551.xD Integrated Sensor Absolute encoder PIOne incremental linear encoder Sensor signal BiSS-C Sin/cos, 1 V peak-peak, 2 µm signal period Sensor resolution 1 nm 0.2 nm** Min. incremental motion 2 nm 0.5 nm Unidirectional repeatability 0.02 µm 0.02 µm Bidirectional repeatability ±0.05 µm ±0.05 µm Travel range limit Limits are set via software; additional mechanical stop buffers. Hall effect limit switches Reference point switch – Encoder index Reference point switch repeatability – <1 µm Encoder options V-551 Miscellaneous Operating temperature range 10 °C to 50 °C Humidity 20 – 90 % rel., not condensing Material Aluminum, black anodized Motor connector HD Sub-D 26 (m) Sensor connection Sub-D 15 (f) Recommended controllers C-891 (single axis) C-885 with C-891.10C885 (up to 20 axes) ACS modular controller * 24 V DC with C-891.120200 ** interpolated Ask about custom designs. 103 MOTION | POSITIONING 50,5 A V-551, dimensions in mm V-551.4x : B D x 40 5 D x 40 C F x 100 E 20 20 160 130 110 40 Y Stroke A B C D E F V-551.2x 60 220 210 60 1 1 V-551.4x 130 290 280 120 1 40 1 X 79,85 M4 50,5 A A V-551.4x : B D x 40 20 20 60 220 210 60 1 – 1 130 290 280 120 1 40 1 20 V-551.7x 230 450 D x 40440 120 3 20 40 3 Y 5 M4 Y Stroke A B C D E F V-551.2x 60 220 210 60 1 1 X 79,85 M4 104 W W W. P I . W S V-551.4x 130 290 280 120 1 40 1 V-551.7x 230 450 440 120 3 40 3 Stroke A B C D E F X 79,85 D x 40 V-551.4x 160 130 110 40 Stroke A B B C C F x 100 D E E F V-551.2x 5 D x 40 C F x 100 E V-551.2x 60 220 210 60 1 1 V-551.4x 130 290 280 120 1 40 1 Translation Stages G H 50,5 50,5 I 8,5 8,5 30 30 75 100 30 30 79,85 79,85 M 4 4 M 6 M 4 4, G H I G H I V-551.4x 225 200 130 V-551.2x V-551.4x V-551.7x 125 175 130 225 200 130 225 250 190 20 7,5 M 4 4 6, V-551.2x 125 175 130 V-551.7x 225 250 190 A V-551.4D with PIOne linear encoder performs a sequence of 0.5-nm steps. A V-551.4D with PIOne linear encoder performs a sequence of 1-nm steps. 105 MOTION | POSITIONING M-511 / M-521 / M-531 High-Precision Linear Stage High Travel Accuracy, Long Travel Ranges, Many Motor Variants n T ravel ranges 102, 204, and 306 mm (4”, 8”, 12”) n M ax. velocity to 100 mm/s n E ncoder n L oad resolution 50 nm capacity to 100 kg n Z ero-play n X Y ball screw and XYZ combinations M-511, M-521, M-531, dimensions in mm M-511.xx1 M-521.xx1 M-531.xx1 L A B C 400 500 600 250 350 450 186,5 236,5 286,5 283 383 483 Applications n Metrology n Optical >> ActiveDrive / Testing Alignment n Sample Inspection n Scientific >> Linear Encoder Instrumentation n Photonics Technology Glossary ....................... page 290 106 W W W. P I . W S M-5x1.EC / M-5x1.PD1 M-5x1.DG1 / M-5x1.PG1 Unit M-511: 102 (4”) / M-521: 204 (8”) / M-531: 306 (12”) M-511: 102 (4”) / M-521: 204 (8”) / M-531: 306 (12”) M-511: 102 (4”) / M-521: 204 (8”) / M-531: 306 (12”) mm Rotary encoder Rotary encoder Tolerance Motion and positioning Travel range Integrated sensor Linear encoder Sensor resolution linear encoder 0.05 Sensor resolution rotary encoder – µm 4096 2048 Cts./rev. Design resolution 0.05 0.488 0.033 µm typ. Minimum incremental motion 0.1 0.5 0.4 µm typ. Unidirectional repeatability 0.1 0.5 0.4 µm typ. Bidirectional repeatability ±0.2 – – µm typ. Backlash – 1 1 µm typ. typ. Pitch / yaw per 100 mm ±35 ±35 ±35 µrad Straightness / flatness per 100 mm 1 1 1 µm Velocity 50 100 6 mm/s Drive screw pitch of ball screw 2 2 2 mm Gear ratio – – (28/12)4 ~ 29.6:1 Load capacity 1000 1000 1000 N max. Push/pull force 80 80 80 N max. Permissible lateral force 200 200 200 N max. DC motor with PWM control DC motor with PWM control* DC gear motor max. Mechanical properties Drive properties Motor type Motor resolution – – – Guide Recirculating ball bearings Recirculating ball bearings Recirculating ball bearings Operating voltage 24 24 M-5x1.DG1: 0 to ±12 M-5x1.PG1: 24 steps/rev. V Motor power 30 60 3 W nom. Torque 80 70 5 mN·m nom. Reference and limit switches Hall effect Hall effect Hall effect Operating temperature range 10 to 50 –20 to 65 –20 to 65 °C Material Aluminum, black anodized Mass 5 (M-511) / 6.1 (M-521) / 7.2 (M-531) 5 (M-511) / 6.1 (M-521) / 7.2 (M-531) 5 (M-511) / 6.1 (M-521) / 7.2 (M-531) kg Connector Sub-D 15, 3 m incl. cable Sub-D 15, 3 m incl. cable Sub-D 15, 3 m incl. cable Recommended controllers C-863 C-884 C-863 C-884 C-863 C-884 Miscellaneous ±5 % * M-5xx.EC: Brushless DC motor with integrated block commutation (PWM control). Ask about custom designs! 107 MOTION | POSITIONING Translation Stages M-5x1.DD1 / M-5x1.DD2 HPS-170 High-Precision Linear Stage for Heavy Loads Excellent Repeatability and Travel Accuracy n T ravel ranges from 52 to 205 mm (2 to 8”) n M ax. velocity to 100 mm/s n L oad capacity to 35 kg n O ptional linear encoder for direct position measurement n C rossed roller guide, anti-creep Direction of the axes and torques for linear stages Applications n Laser >> ActiveDrive Marking n Metrology / Testing n Sample Inspection >> Linear Encoder n Semiconductor Technology Glossary ....................... page 290 108 W W W. P I . W S 626291x10 626292x00 626292x10-0001 Linear stage with DC motor and rotary encoder Additionally with linear encoder Linear stage with stepper motor Additionally with linear encoder Unit Tolerance Translation Stages Active axes 626291x00 X X Travel range 52 / 102 / 155 / 205 52 / 102 / 155 / 205 Integrated sensor Rotary encoder Rotary and linear encoder – Sensor signal rotary encoder A/B quadrature, RS-422 A/B quadrature, RS-422 – Sensor signal linear encoder – A/B quadrature, RS-422 – Sin/cos, 1 V peak-peak, 20 µm signal period Design resolution 0.1 0.05 10 (full step) 0.005 Sensor resolution rotary encoder 20000 20000 – Sensor resolution linear encoder – 0.05 – – µm typ. Minimum incremental motion 0.2 0.2 0.2 0.05 µm typ. Unidirectional repeatability 0.2 0.2 0.2 0.05 µm typ. Bidirectional repeatability ±2 ±0.2 ±2 ±0.05 µm typ. Pitch ±20 / ±25 / ±30 / ±35 ±20 / ±25 / ±30 / ±35 ±20 / ±25 / ±30 / ±35 ±20 / ±25 / ±30 / ±35 µrad typ. Motion and positioning mm Linear encoder µm Cts./rev. Yaw ±40 ±40 ±40 ±40 µrad typ. Straightness / flatness ±0.75 / ±1 / ±2 / ±3 ±0.75 / ±1 / ±2 / ±3 ±0.75 / ±1 / ±2 / ±3 ±0.75 / ±1 / ±2 / ±3 µrad typ. Max. velocity 100 100 35 35 mm/s Crossed roller guide with anticreep system Crossed roller guide with anticreep system Crossed roller guide with anticreep system Crossed roller guide with anticreep system Mechanical properties Guide type Drive screw type Ball screw Ball screw Ball screw Ball screw Drive screw pitch 2 2 2 2 Load capacity 350 350 350 350 N max. Push/pull force 100 100 150 150 N max. mm Holding force 20 20 60 60 N max. Permissible lateral force 150 150 150 150 N max. Permissible torque Mx in θX 400 400 400 400 Nm max. Permissible torque My in θY 300 300 300 300 Nm max. Permissible torque Mz in θZ 300 300 300 300 Nm max. Motor type DC motor DC motor 2-phase stepper motor 2-phase stepper motor Operating voltage, nominal 24 24 24 24 V nom. Drive properties Operating voltage, max. 48 48 48 48 V nom. Peak current, effective 3.8 3.8 1.2 1.2 A typ. Torque constant, effective 0.03 0.03 N·m/A typ. Electrical time constant 6 6 Resistance phase-phase 0.62 0.62 3.3 3.3 Ω typ. Inductance phase-phase 0.13 0.13 2.8 2.8 mH typ. V/kRPM max. mechanical mechanical Back EMF phase-phase 0.00349 0.00349 Limit switches mechanical mechanical ms 109 MOTION | POSITIONING 626291x00 626291x10 626292x00 626292x10-0001 Unit Linear stage with DC motor and rotary encoder Additionally with linear encoder Linear stage with stepper motor Additionally with linear encoder Operating temperature range 5 to 40 5 to 40 5 to 40 5 to 40 °C MTBF 10000 10000 – – h Material Aluminum, steel Aluminum, steel Aluminum, steel Aluminum, steel Tolerance Miscellaneous Mass 5.1 / 5.8 / 6.6 / 7.5 5.1 / 5.8 / 6.6 / 7.5 5 / 5.7 / 6.5 / 7.4 5 / 5.7 / 6.5 / 7.4 Moved mass 1.1 1.4 1.1 1.4 Connection Sub-D 15 (m) Motor: Sub-D 15 (m) Sensor: Sub-D 9 (m) Sub-D 15 (m) Motor: Sub-D 15 (m) Sensor: Sub-D 9 (m) Recommended controllers C-863 (single axis) with C-863.AD12 line driver C-884 (to 6 axes) with C-863.AD12 line driver C-885 with C-863.20C885 (to 40 axes) and C-863.AD12 line driver ACS modular controller C-863 (single axis) with C-863.AD12 line driver C-884 (to 6 axes) with C-863.AD12 line driver C-885 with C-863.20C885 (to 40 axes) and C-863.AD12 line driver ACS modular controller C-663.12 (single axis) SMC Hydra (double axis) C-885 with C-663.12C885 (up to 20 axes) ACS modular controller C-663.12 (single axis) SMC Hydra (double axis C-885 with C-663.12C885 (up to 20 axes) ACS modular controller Connecting cables for motor and sensor are not in the scope of delivery and must be ordered separately. Ask about custom designs! HPS-170, DC motor, dimensions in mm HPS-170, stepper motor, dimensions in mm 110 W W W. P I . W S kg ±5 % Translation Stages HPS-170, dimensions in mm Travel range/mm 52 102 155 205 A/mm B/mm C/mm 261 127.5 3 311 152.5 3 381 187.5 3 456 225 6 111 MOTION | POSITIONING A-141 PIglide MB Miniature Linear Stage with Air Bearings High Performance, Cleanroom Compatible, Customizable n S ize of the motion platform 57 mm × 93 mm n L ow profile 38 mm n T ravel n L oad ranges to 35 mm capacity to 3 kg n V elocity to 0.25 m/sec n A cceleration to 3.5 m/s² Accessories and options n PIglide filter and air preparation kits n Single and multi-axis motion controller n XY setups and individual configurations n C ounterbalance options for vertical (Z) orientations n B ase plates made of granite and systems for reducing vibration A-141.035A1, dimensions in mm Applications n Precision n Scanning Micro Assembly >> Air bearings n Photonics >> Linear encoder n Optical Alignment >> Linear motor Technology Glossary ....................... page 290 112 W W W. P I . W S Unit Translation Stages A-141 Tolerance Motion Active axes X Travel range 35 mm Pitch / yaw (1) over the entire travel range 10 µrad max. Straightness / flatness (1) over the entire travel range 0.5 µm max. Velocity (2), unloaded 0.25 m/s max. Acceleration (2), unloaded 3.5 m/s² max. Load capacity in z (3) 3 kg max. Moved mass 0.3 kg Overall mass 0.6 kg Guide type Air bearing Mechanical properties Drive properties Drive type Linear motor, ironless, 3-phase Intermediate circuit voltage, effective 48, nominal 80, max. V DC Peak force 2.3 N typ. Nominal force 0.58 N typ. Force constant, effective 2.1 N/A typ. Resistance phase-phase 22.4 Ω typ. Inductivity phase-phase 1.0 mH typ. Back EMF phase-phase 0.7 V·s/m max. Cabling Internal, no moving cable Positioning Integrated sensor Incremental linear encoder with travel range limits and home index Sensor signal Sin/cos, 1 V peak-peak, 20 µm signal period Sensor resolution 1.2 nm (4) Bidirectional repeatability ±0.1 µm (4) Accuracy, uncompensated (5) ±2.0 µm Accuracy, with error compensation (5) ±0.25 µm Miscellaneous Operating pressure (6) 65±5 psi (450±35 kPa) Air consumption <1.0 SCFM (28 SLPM) Air quality Clean (unfiltered to 1.0 µm or better) – ISO 8573-1 class 1 Oil free – ISO 8573-1 class 1 Dry (–15 °C dew point) – ISO 8573-1 class 3 Materials Hardcoat aluminum, stainless steel fasteners (1) Dependent on the flatness of the surface, on which the stage is mounted. (2) Can be limited by the payload, controller or drive. (3) Assumes payload CG is centered no more than 50 mm above the motion platform. The stage is designed for horizontal operation only. (4) Assumes 16384x interpolation. Contact PI for the use of other factors. (5) Improved accuracy can be obtained with controller-based error compensation. The stage must be ordered with a controller from PI to reach these values. Accuracy values assume short-term duration and do not consider the long-term effects of thermal drift on the stage. (6) To protect the stage against damage, it is recommended to connect an air pressure sensor to the E-Stop input of the controller. 113 MOTION | POSITIONING A-121 PIglide AT1 Linear Stage with Air Bearings High Performance Small Footprint Nanopositioning Stage n I deal for scanning applications or high-precision positioning n C leanroom compatible n S ize of the motion platform 115 mm × 115 mm n T ravel n L ow ranges to 350 mm profile from 60 mm n R esolution n B est to 1 nm flatness / straightness n C ounterbalance options for vertical assembly A-121, dimensions in mm Applications n Sample A A-121.050 A-121.100 A-121.150 A-121.200 A-121.250 A-121.350 240 290 340 390 440 540 B C D E F G 100 75 100 125 150 150 200 25 50 75 100 125 175 30 55 80 105 130 180 4 4 6 6 6 10 126.5 151.5 176.5 201.5 226.5 276.5 >> Air bearings Inspection n Scanning n Metrology MODEL n Photonics >> Linear encoder n Flatpanel Inspection >> Linear motor / Testing Technology Glossary ....................... page 290 114 W W W. P I . W S A-121.050 A-121.100 A-121.150 A-121.200 A-121.250 A-121.350 Unit Tolerance X 50 12 ±0.5 0.1 X 100 12 ±0.5 0.1 X 150 15 ±0.5 0.1 X 200 20 ±0.75 0.1 X 250 25 ±0.75 0.1 X 350 35 ±1.25 0.1 mm µrad µm µm max. max. max. 1 20 1 20 1 20 1 20 1 20 1 20 m/s m/s² max. max. 100 40 1.2 3.5 Air bearing 100 40 1.2 4.2 Air bearing 100 40 1.2 4.5 Air bearing 100 40 1.2 5.2 Air bearing 100 40 1.2 5.7 Air bearing 100 40 1.2 6.8 Air bearing N N kg kg max. max. Unit Tolerance A-121 Drive properties Drive type Intermediate circuit voltage, effective Peak force Nominal force Force constant, effective Resistance phase-phase Inductivity phase-phase Back EMF phase-phase Cabling Positioning Integrated Sensor Sensor signal Sensor resolution Bidirectional repeatability Accuracy, uncompensated (5) Accuracy, with error compensation (5) Linear motor, ironless, 3-phase 48, nominal 80, max. 33.2 11.1 6.67 6.3 1.0 7.7 External, moving cable V DC N N N/A Ω mH V·s/m typ. typ. typ. typ. typ. max. A-121.xxxA A-121.xxxB A-121.xxxC Incremental linear encoder Sin/cos, 1 V peak-peak, 20 µm signal period 1.2 nm (4) A-121.050: ±0.25 µm (4) A-121.100: ±0.25 µm (4) A-121.150: ±0.25 µm (4) A-121.200: ±0.25 µm (4) A-121.250: ±0.25 µm (4) A-121.350: ±0.50 µm (4) A-121.050: ±1.0 µm A-121.100: ±1.0 µm A-121.150: ±1.5 µm A-121.200: ±2.0 µm A-121.250: ±2.0 µm A-121.350: ±3.0 µm A-121.050: ±0.50 µm A-121.100: ±0.50 µm A-121.150: ±0.50 µm A-121.200: ±0.50 µm A-121.250: ±0.50 µm A-121.350: ±1.0 µm Absolute encoder BiSS-C Incremental linear encoder A/B quadrature, TTL 1 nm A-121.050: ±0.25 µm A-121.100: ±0.25 µm A-121.150: ±0.25 µm A-121.200: ±0.25 µm A-121.250: ±0.25 µm A-121.350: ±0.50 µm A-121.050: ±1.5 µm A-121.100: ±1.5 µm A-121.150: ±1.5 µm A-121.200: ±1.5 µm A-121.250: ±1.5 µm A-121.350: ±1.5 µm A-121.050: ±0.5 µm A-121.100: ±0.5 µm A-121.150: ±0.5 µm A-121.200: ±0.5 µm A-121.250: ±0.5 µm A-121.350: ±0.5 µm 50 nm A-121.050: ±0.25 µm A-121.100: ±0.25 µm A-121.150: ±0.25 µm A-121.200: ±0.25 µm A-121.250: ±0.25 µm A-121.350: ±0.50 µm A-121.050: ±1.0 µm A-121.100: ±1.0 µm A-121.150: ±1.5 µm A-121.200: ±2.0 µm A-121.250: ±2.0 µm A-121.350: ±3.0 µm A-121.050: ±0.50 µm A-121.100: ±0.50 µm A-121.150: ±0.50 µm A-121.200: ±0.50 µm A-121.250: ±0.50 µm A-121.350: ±1.0 µm A-121 Miscellaneous Operating pressure (6) Air consumption Air quality Materials 65 to 75 psi (450 to 520 kPa) <1.0 SCFM (28 SLPM) Clean (filtered to 1.0 μm or better) – ISO 8573-1 Class 1 Oil free – ISO 8573-1 Class 1 Dry (–15 °C dew point) – ISO 8573-1 Class 3 Hardcoat aluminum, stainless steel fasteners (5) Improved accuracy can be obtained with controller-based error compensation. The stage must be ordered with a controller from PI to reach these values. Accuracy values assume short-term duration and do not consider the long-term effects of thermal drift on the stage. (6) To protect the stage against damage, it is recommended to connect 115 an air pressure sensor to the Motion-Stop input of the controller. (1) Dependent on the flatness of the surface, on which the stage is mounted. (2) Can be limited by the payload, controller or drive. (3) Assumes payload CG is centered no more than 50 mm above the motion platform. (4) Assumes 16384x interpolation. Contact PI for the use of other factors. MOTION | POSITIONING Translation Stages Motion Active axes Travel range Pitch / yaw (1) Straightness / flatness (1) Straightness / flatness per 25 mm travel range (1) Velocity, unloaded (2) Acceleration, unloaded (2) Mechanical properties Load capacity in z (3) Load capacity in y (3) Moved mass Overall mass Guide type A-123 PIglide AT3 Linear Stage with Air Bearings High Performance Nanopositioning Stage n I deal for scanning applications or highprecision positioning n C leanroom n S ize compatible of the motion platform 210 mm × 210 mm n T ravel ranges 50 mm to 750 mm n R esolution to 1 nm Product Overview Accessories and options The stages in the PIglide are equipped with a servo drive linear motor with preloaded air bearings and integrated linear encoder. The combination of these noncontact components results in a frictionless motion platform that offers the highest performance, quality, and lifetime. A high-force linear motor can drive the stage to top speed within a few milliseconds, and the high-capacity bearings can support payloads up to 60 kg. The laterally opposed, actively preloaded air bearing design in this model allows mounting in any orientation. n Encoder n PIglide filter and air preparation kits n Single and multi-axis motion controller n XY setups and individual configurations n Cable track variations n O ptions with counterweight for vertical (Z) orientation Application fields PIglide positioning systems are ideally suited for many high-precision applications such as metrology, photonics, and precision scanning in semiconductor or flat panel display manufacturing. Thanks to the friction-free motion, no particles are formed, which makes PIglide stages ideal for cleanroom applications. Applications n Sample Customizations available n B ase plates made of granite and systems for reducing vibration >> Air bearings Inspection n Scanning n Metrology n n Photonics >> Linear encoder n Flatpanel Inspection >> Linear motor / Testing Technology Glossary ....................... page 290 116 W W W. P I . W S A-123.100 A-123.150 A-123.200 A-123.350 A-123.500 A-123.750 Unit Tolerance Motion Active axes X X X X X X X Travel range 50 100 150 200 350 500 750 mm Pitch / yaw (1) 5 10 15 15 20 25 35 µrad max. Straightness / flatness (1) ±0.5 ±0.5 ±0.5 ±1 ±1.5 ±1.5 ±2.5 µm max. Straightness / flatness per 25 mm travel range (1) 0.1 0.1 0.1 0.1 0.1 0.1 0.1 µm max. Velocity, unloaded (2) 1 1 1 1 1 1 1 m/s max. Acceleration, unloaded (2) 30 30 30 30 30 30 30 m/s² max. Load capacity in z (3) 590 590 590 590 590 590 590 N max. Load capacity in y (3) 295 295 295 295 295 295 295 N max. Mechanical properties Moved mass 5 5 5 5 5 5 5 kg Overall mass 14 15.5 16.5 18 21.5 25 32 kg Guide type Air bearing Air bearing Air bearing Air bearing Air bearing Air bearing Air bearing A-123 Unit Tolerance Drive properties Drive type Linear motor, ironless, 3-phase Intermediate circuit voltage, effective 48, nominal 80, max. V DC Peak force 298 N typ. Nominal force 87.5 N typ. typ. Force constant, effective 19.9 N/A Resistance phase-phase 3.6 Ω typ. Inductivity phase-phase 1.2 mH typ. Back EMF phase-phase 16 V·s/m max. Cabling External, moving cable 117 MOTION | POSITIONING Translation Stages A-123.050 A 123.xxxA A 123.xxxB A 123.xxxC Integrated Sensor Incremental linear encoder Absolute encoder Incremental linear encoder Sensor signal Sin/cos, 1 V peak-peak, 20 µm signal period BiSS-C A/B quadrature, TTL Sensor resolution 1.2 nm (4) 1 nm 50 nm Bidirectional repeatability A-123.050: ±0.25 µm (4) A-123.100: ±0.25 µm (4) A-123.150: ±0.25 µm (4) A-123.200: ±0.25 µm (4) A-123.350: ±0.5 µm (4) A-123.500: ±0.5 µm (4) A-123.750: ±0.75 µm (4) A-123.050: ±0.25 µm A-123.100: ±0.25 µm A-123.150: ±0.25 µm A-123.200: ±0.25 µm A-123.350: ±0.5 µm A-123.500: ±0.5 µm A-123.750: ±0.75 µm A-123.050: ±0.25 µm A-123.100: ±0.25 µm A-123.150: ±0.25 µm A-123.200: ±0.25 µm A-123.350: ±0.5 µm A-123.500: ±0.5 µm A-123.750: ±0.75 µm Accuracy, uncompensated (5) A-123.050: ±1 µm A-123.100: ±1 µm A-123.150: ±1.5 µm A-123.200: ±2 µm A-123.350: ±3 µm A-123.500: ±3.5 µm A-123.750: ±5 µm A-123.050: ±1.5 µm A-123.100: ±1.5 µm A-123.150: ±1.5 µm A-123.200: ±1.5 µm A-123.350: ±1.5 µm A-123.500: ±1.5 µm A-123.750: ±1.5 µm A-123.050: ±1 µm A-123.100: ±1 µm A-123.150: ±1.5 µm A-123.200: ±2 µm A-123.350: ±3 µm A-123.500: ±3.5 µm A-123.750: ±5 µm Accuracy, with error compensation (5) A-123.050: ±0.5 µm A-123.100: ±0.5 µm A-123.150: ±0.5 µm A-123.200: ±0.5 µm A-123.350: ±1 µm A-123.500: ±1 µm A-123.750: ±1.5 µm A-123.050: ±1.5 µm A-123.100: ±1.5 µm A-123.150: ±1.5 µm A-123.200: ±1.5 µm A-123.350: ±1.5 µm A-123.500: ±1.5 µm A-123.750: ±1.5 µm A-123.050: ±0.5 µm A-123.100: ±0.5 µm A-123.150: ±0.5 µm A-123.200: ±0.5 µm A-123.350: ±1 µm A-123.500: ±1 µm A-123.750: ±1.5 µm Positioning A-123 Miscellaneous Operating pressure (6) 75 to 85 psi (515 to 585 kPa) Air consumption <1.0 SCFM (28 SLPM) Air quality Clean (filtered to 1.0 μm or better) – ISO 8573-1 Class 1 Oil free – ISO 8573-1 Class 1 Dry (–15 °C dew point) – ISO 8573-1 Class 3 Materials Hardcoat aluminum, stainless steel fasteners (1) Dependent on the flatness of the surface, on which the stage is mounted. (2) Can be limited by the payload, controller or drive. (3) Assumes payload CG is centered no more than 50 mm above the motion platform. (4) Assumes 16384x interpolation. Contact PI for the use of other factors. (5) Improved accuracy can be obtained with controller-based error compensation. The stage must be ordered with a controller from PI to reach these values. Accuracy values assume short-term duration and do not consider the long-term effects of thermal drift on the stage. (6) To protect the stage against damage, it is recommended to connect an air pressure sensor to the Motion-Stop input of the controller. 118 W W W. P I . W S Translation Stages A-123, dimensions in mm MODEL A B* A-123.050 A-123.100 A-123.150 A-123.200 A-123.350 A-123.500 A-123.750 350 400 450 500 650 800 1050 100 100 100 100 100 100 C* 325 300 400 D* E* F G Hx J Moving Mass Total Mass 500 700 250 300 350 400 550 700 1000 25 50 75 100 175 250 375 31.5 56.5 81.5 106.5 181.5 256.5 381.5 4 8 8 8 12 16 16 181.5 206.5 231.5 256.5 331.5 406.5 531.5 5 kg 5 kg 5 kg 5 kg 5 kg 5 kg 5 kg 14 kg 15.5 kg 16.5 kg 18 kg 21.5 kg 25 kg 32 kg *The mounting holes are symmetric around the center line located at “J” 119 MOTION | POSITIONING A-110 PIglide LC Linear Stage with Air Bearings High-Performance Nanopositioning System for a Good Price n I deal for scanning applications or high-precision positioning n Product Overview PIglide positioning systems have a magnetic linear motor, magnetically preloaded air bearings and an optical linear encoder: Noncontact and frictionfree motion for the highest accuracy and reliability. Cleanroom compatible n S ize of the motion platform 160 mm × 200 mm n Travel ranges to 400 mm n Load capacity to 100 N Accessories and options n Best flatness / straightness n Encoder n PIglide Filter and Air Preparation Kits n Single and multi-axis motion controller n XY setups and individual configurations n B ase plates made of granite and systems for reducing vibration Applications n Sample >> Air bearings Inspection n Scanning n Metrology n Photonics >> Linear encoder n Flatpanel >> Linear motor Inspection / Testing Technology Glossary ....................... page 290 120 W W W. P I . W S A-110.100xx A-110.200xx A-110.300xx A-110.400xx Unit Tolerance Active axes X X X X X Travel range 50 100 200 300 400 mm Pitch / yaw (1) 10 20 30 40 50 µrad max. Straightness / flatness (1) ±1 ±1 ±1.5 ±2 ±2.5 µm max. Straightness / flatness per 10 mm travel range (1) ±10 ±10 ±10 ±10 ±10 nm max. Velocity, unloaded (2) 0.5 0.5 1 1 1 m/s max. Acceleration, unloaded (2) 10 10 30 30 30 m/s² max. Load capacity in z (3) 100 100 100 100 100 N max. Moved mass 2.5 2.5 2.6 2.6 2.6 kg Overall mass 6.3 7.5 11 12 14 kg Guide type Air bearing Air bearing Air bearing Air bearing Air bearing Motion Mechanical properties A-110.050xx A-110.100xx Unit A-110.200xx A-110.300xx A-110.400xx Tolerance Drive properties Drive type Linear motor, ironless, 3-phase Linear motor, ironless, 3-phase Intermediate circuit voltage, effective 48, nominal 60, max. 48, nominal 60, max. V DC Peak force 25 85 N typ. Nominal force 9.2 39 N typ. Force constant, effective 4.2 12.3 N/A typ. Resistance phase-phase 8.2 3.6 Ω typ. Inductivity phase-phase 2.7 1.24 mH typ. Back EMF phase-phase 4.2 10.1 V·s/m max. Cabling Internal, no moving cable External, moving cable A-110.xxxA A-110.xxxB A-110.xxxC Integrated Sensor Incremental linear encoder Absolute encoder Incremental linear encoder Sensor signal Sin/cos, 1 V peak-peak, 20 µm signal period BiSS-C A/B quadrature, TTL Sensor resolution 1.2 nm (4) 1 nm 50 nm Bidirectional repeatability ±0.5 µm (4) ±0.5 µm ±0.5 µm Accuracy, uncompensated (5) A-110.050: ±1 µm A-110.100: ±1.5 µm A-110.200: ±2 µm A-110.300: ±3 µm A-110.400: ±4 µm A-110.050: ±1.5 µm A-110.100: ±1.5 µm A-110.200: ±1.5 µm A-110.300: ±1.5 µm A-110.400: ±1.5 µm A-110.050: ±1 µm A-110.100: ±1.5 µm A-110.200: ±2 µm A-110.300: ±3 µm A-110.400: ±4 µm Accuracy, with error compensation (5) A-110.050: ±1 µm A-110.100: ±1 µm A-110.200: ±1 µm A-110.300: ±1.5 µm A-110.400: ±1.5 µm A-110.050: ±0.5 µm A-110.100: ±0.5 µm A-110.200: ±0.5 µm A-110.300: ±0.5 µm A-110.400: ±0.5 µm A-110.050: ±1 µm A-110.100: ±1 µm A-110.200: ±1 µm A-110.300: ±1.5 µm A-110.400: ±1.5 µm Positioning 121 MOTION | POSITIONING Translation Stages A-110.050xx A-110 Miscellaneous Operating pressure (6) 60 to 70 psi (415 to 485 kPa) Air consumption <1.0 SCFM (28 SLPM) Air quality Clean (filtered to 1.0 μm or better) – ISO 8573-1 Class 1 Oil free – ISO 8573-1 Class 1 Dry (–15 °C dew point) – ISO 857-1 Class 3 Materials Hardcoat aluminum, stainless steel fasteners (1) Dependent on the flatness of the surface, on which the stage is mounted. (2) Can be limited by the payload, controller or drive. (3) Assumes payload CG is centered no more than 50 mm above the motion platform. The stage is designed for horizontal operation only. (4) Assumes 16384x interpolation. Contact PI for the use of other factors. (5) Improved accuracy can be obtained with controller-based error compensation. The stage must be ordered with a controller from PI to reach these values. Accuracy values assume short-term duration and do not consider the long-term effects of thermal drift on the stage. (6) To protect the stage against damage, it is recommended to connect an air pressure sensor to the Motion-Stop input of the controller. A-110.050 and A-110.100, dimensions in mm A-110.050 A-110.100 A B C D 302 352 275 325 25 50 35 60 122 W W W. P I . W S Translation Stages A-110.200, A-110.300 and A-110.400, dimensions in mm MODEL A B C D E A-110.200 A-110.300 A-110-400 475 575 675 400 500 600 200 250 300 102 152 202 105 155 205 123 MOTION | POSITIONING A-131 PIglide VC Voice Coil Linear Stage with Air Bearings High-Performance Miniature Nanopositioning System n I deal for scanning applications or high-precision positioning n Cleanroom compatible n Travel ranges to 25 mm n Load capacity to 100 N n Acceleration to 80 m/s² n Best flatness / straightness A-131.025xx, dimensions in mm A-131.025xxB, dimensions in mm Applications >> Air bearings n Medical >> Linear encoder Industry >> Voice Coil Drives n Scanning n Machine Tool / Fast Tool Technology Glossary ....................... page 290 124 W W W. P I . W S A-131 Unit Tolerance Active axes Translation Stages Motion X Travel range 25 mm Pitch (1) 10 µrad max. Yaw (1) 10 µrad max. Straightness / flatness (1) ±0.125 µm max. Velocity, unloaded (2) 1 m/s max. Acceleration, unloaded (2) 80 m/s² max. max. Mechanical properties Load capacity in z (3) 100 N Moved mass 0.85 kg Overall mass 3.6 kg Guide type Air bearing Drive properties Drive type Brushless voice coil drive, ironless, 1 phase Intermediate circuit voltage, effective 48, nominal 80, max. V DC Peak force 70.4 N typ. Nominal force 22.3 N typ. Force constant, effective 6.9 N/A typ. Resistance 2.7 Ω typ. typ. Inductivity (at 1000 Hz) 1.4 mH Back EMF 6.9 V·s/m Nominal power 28 W Cabling Internal, no moving cable A-131.025A1x A-131.025D1x A-131.025F1x max. Positioning Integrated sensor Incremental linear encoder Incremental linear encoder Incremental linear encoder Sensor signal Sin/cos, 1 V peak-peak, 20 µm signal period A/B quadrature, TTL A/B quadrature, TTL Sensor resolution 1.2 nm (4) 100 nm (5) 500 nm (5) Bidirectional repeatability ±0.1 µm ±0.1 µm ±0.1 µm Accuracy (6) 0.2 µm 0.2 µm 0.2 µm Reference point switch Home index Home index Home index Reference point switch repeatability ±1 encoder step ±1 encoder step ±1 encoder step (4) A-131 Miscellaneous (1) (2) (3) (4) (5) (6) (7) Operating pressure (7) 75 to 85 psi (520 to 585 kPa) Air consumption <1.0 SCFM (28 SLPM) Air quality Clean (filtered to 1.0 μm or better) – ISO 8573-1 Class 1 Oil free – ISO 857-1 Class 1 Dry (–15 °C dew point) – ISO 8573-1 Class 3 Materials Hardcoat aluminum, stainless steel fasteners Dependent on the flatness of the surface, on which the stage is mounted. Can be limited by the payload, controller or drive. Assumes that the center of gravity is centered no more than 50 mm from the motion platform. Assumes 16384x interpolation. Contact PI for the use of other factors. Alternative resolutions on request. Higher resolutions can limit the velocity. Improved accuracy can be obtained with controller-based error compensation. The stage must be ordered with a controller from PI to reach these values. To protect the stage against damage, it is recommended to connect an air pressure sensor to the Motion-Stop input of the controller. 125 MOTION | POSITIONING L-306 Compact Precision Z Stage Compact Design, Multi-Axis Combinations n C ompact n S tepper design: Surface 63 mm × 63 mm motors and closed-loop DC motors n O ptional linear encoder for direct position measurement n C rossed roller guides, anti-creep n N oncontact reference and limit switches L-306, dimensions in mm Applications n General n Automation Photonics >> Linear Encoder n Scientific Instrumentation n Semiconductor Technology Glossary ....................... page 290 126 W W W. P I . W S L-306.011112 L-306.013112 Z stage with 2-phase stepper motor Z stage with 2-phase stepper motor, linear encoder with A/B quadrature signal transmission Z stage with DC motor, linear encoder with A/B quadrature signal transmission Unit Tolerance Translation Stages L-306.011100 Motion and positioning Travel range 13 13 13 Integrated sensor – Incremental linear encoder Incremental linear encoder mm Sensor resolution – 5 50 nm Design resolution 2.5 0.005 0.05 µm Minimum incremental motion 2.5 0.1 0.1 µm typ. Unidirectional repeatability 0.5 0.1 0.1 µm typ. Bidirectional repeatability ±2 ±0.5 ±0.5 µm typ. Pitch ±175 ±175 ±175 µrad typ. Yaw ±150 ±150 ±150 µrad typ. Straightness / flatness ±3 ±3 ±3 µm typ. Velocity 5 5 5 mm/s max. Reference and limit switches Optical Optical Optical Crossed roller guide with anti-creep system Crossed roller guide with anti-creep system Crossed roller guide with anti-creep system Mechanical properties Guide type Drive screw type Ball screw Ball screw Ball screw Drive screw pitch 0.5 0.5 0.5 mm Push/pull force 20 20 20 N max. Holding force, power off 20 20 20 N typ. Permissible lateral force 10 10 10 N max. Load capacity 20 20 20 N max. Permissible torque in θX, θY 1 1 1 N·m max. Permissible torque in θZ 2 2 2 N·m max. 2-phase stepper motor 2-phase stepper motor DC motor Operating temperature range 5 to 40 5 to 40 5 to 40 Humidity 20 – 80 % rel., not condensing 20 – 80 % rel., not condensing 20 – 80 % rel., not condensing Material Anodized aluminum, steel Anodized aluminum, steel Anodized aluminum, steel Drive properties Motor type Miscellaneous °C Mass 0.6 0.6 0.6 kg ±5 % Moved mass 0.18 0.18 0.18 kg ±5 % Connection HD Sub-D 26 (m) (motor) HD Sub-D 26 (m) (motor and encoder) HD Sub-D 26 (m) (motor and encoder) Cable length 0.5 0.5 0.5 Recommended controllers C-663.12 (single axis) SMC Hydra (double axis) C-885 with C-663.12C885 (up to 20 axes) ACS modular controller C-663.12 (single axis) SMC Hydra (double axis) C-885 with C-663.12C885 (up to 20 axes) ACS modular controller C-863 (single axis) C-884 (up to 6 axes) C-885 with C-863.20C885 (to 40 axes) ACS modular controller m All cables required for operation with the ordered controller are included in the scope of delivery. The cable length is 3 m. Cable for connecting to other controllers can be ordered as accessory. Ask about custom designs! 127 MOTION | POSITIONING L-310 Precision Z Stage Compact Multi-Axis Combinations with Linear and Rotation Stages n Travel range 26 mm (1”) n High-resolution encoder n A ctiveDrive DC, DC, BLDC, and stepper motors n Zero-play ball screw n MTBF 10000 h n Self-locking to 10 kg Precision-class Z stage Drive types High guiding accuracy and stiffness due to ball screws and crossed roller guides. Stress-relieved aluminum base for highest stability. Vacuum versions available on request. Noncontact limit and reference point switches (Hall effect). Reference point switch with direction sensing in the middle of the travel range. n n . xxAD variant: ActiveDrive DC motor for high velocity: Control via pulse-width-modulated (PWM) signals, the operating voltage is attained via an amplifier integrated in the motor housing. Highly accurate position measuring with incremental linear encoder Noncontact optical linear encoders measure the actual position directly at the motion platform with the greatest accuracy so that nonlinearity, mechanical play or elastic deformation have no influence on position measuring. In conjunction with the SMC Hydra controller, versions with stepper motor and integrated linear encoder (L-310.xASD) achieve repeatable minimum incremental motion in the range of the sensor resolution. The same configuration attains constant low velocities of a few sensor increments per second. Applications Automation n Photonics n .023xxx variant: DC servo motor n . 025xxx Minimum incremental motion and slow motion n General .xxSD variant: 2-phase stepper motor for high torque even at low velocities and high resolution. variant: Brushless DC motor (BLDC) for high rotational velocity. Smooth running and low wear, therefore higher lifetime. Position measurement n Versions with DC motor: Rotary encoder n ptional: Integrated linear encoder, O installed centrically. >> ActiveDrive n Scientific Instrumentation >> Linear Encoder >> Vacuum-Compatible Versions n Semiconductor Technology Glossary ....................... page 290 128 W W W. P I . W S L-310 Unit Tolerance Translation Stages Motion Active axis Z Travel range 26 mm Pitch / yaw ±150 µrad typ. Straightness / flatness ±3 µm typ. Velocity L-310.2xAD: 20 L-310.2xSD: 15 L-310.02xxxx: 50 mm/s max. Tolerance L-310.2ASD L-310.023211 L-310.24AD L-310.xxx212 L-310.20AD L-310.xxx232 L-310.20SD Unit Design resolution 0.005 0.05 L-310.20AD: 0.061 L-310.023232: 0.061 L-310.025232: 0.05 5 µm Integrated sensor Incremental linear encoder Incremental linear encoder L-310.025212 additional rotary encoder Rotary encoder – Sensor signal Sin/cos, 1 V peak-peak, 20 µm signal period A/B quadrature, TTL A/B quadrature, TTL – Sensor resolution rotary encoder – L-310.025212: 20000 L-310.20AD: 16384 L-310.023232: 16384 L-310.025232: 20000 – Cts./rev. – µm Positioning Sensor resolution linear encoder 0.05 Minimum incremental motion L-310.2ASD: 0.05 L-310.023211: 0.2 L-310.24AD: 0.3 L-310.xxx212: 0.2 0.3 0.3 µm typ. Unidirectional repeatability L-310.2ASD: 0.1 L-310.023211: 0.2 L-310.24AD: 0.3 L-310.xxx212: 0.2 0.3 0.3 µm typ. Bidirectional repeatability ±0.2 ±0.2 ±2 ±2 µm typ. µm typ. Unit Tolerance Limit switches Hall effect Hall effect Hall effect Hall effect Reference point switch repeatability 2 2 2 2 L-310 Mechanical properties Drive screw Ball screw Drive screw pitch 1 Guide Crossed roller guide with anti-creep system mm Holding force, power off L-310.2xAD: 30 / L-310.2xSD: 50 / L-310.02xxxx: 30 N max. Permissible lateral force, Fx 100 N max. Permissible lateral force, Fy 50 N max. Permissible torque in θX (Mx) 40 N·m max. Permissible torque in θY (My) 80 N·m max. Permissible torque in θZ (Mz) 80 N·m max. 129 MOTION | POSITIONING L-310.xxSD L-310.xxAD L-310.xx3xxx L-310.xx5xxx Motor type 2-phase stepper motor DC motor with PWM control DC motor BLDC motor Operating voltage, nominal 24 24 24 24 Unit Tolerance V nom. max. Drive properties Operating voltage, max. 48 48 48 48 V Step resolution 200 – – – Full steps/rev. L-310.20SD L-310.2ASD L-310.023xxx L-310.2xAD L-310.025xxx Unit 5 to 40 5 to 40 5 to 40 5 to 40 °C Tolerance Miscellaneous Operating temperature range Material Al (black anodized) Al (black anodized) Al (black anodized) Al (black anodized) MTBF – – – 10000 h Mass 2.7 2.8 2.7 2.7 kg ±5 % Moved mass, unloaded 0.9 0.9 0.9 0.9 kg ±5 % Connection HD Sub-D 26 (m) HD Sub-D 26 (m) (motor) Sub-D 9 (m) (sensor) L-310.2xAD: Sub-D 15 (m) L-310.023232: HD Sub-D 26 (m) L-310.023211: HD Sub-D 26 (m) (motor), Sub-D 9 (m) (sensor) HD Sub-D 26 (m) Recommended controllers / drivers C-663.12 (single axis) SMC Hydra (double axis) C-885 with C-663.12C885 (up to 20 axes) ACS modular controller C-663.12 (single axis) SMC Hydra (double axis) C-885 with C-663.12C885 (up to 20 axes ACS modular controller C-863 (single axis) C-884 (up to 6 axes) C-885 with C-863.20C885 (to 40 axes) ACS modular controller C-891 (single axis) C-885 with C-891.10C885 (up to 20 axes) ACS modular controller All cables required for operation with the ordered controller are included in the scope of delivery. The cable length is 3 m. Cable for connecting to other controllers can be ordered as accessory. Ask about custom designs! Direction of the axes and torques for Z stages 130 W W W. P I . W S Translation Stages L-310, dimensions in mm 131 MOTION | POSITIONING M-501 Precision Z Stage Compact XYZ Combinations with M-511 Translation Stage Series n E xtremely high-resolution encoder n A ctiveDrive n Z ero-play motor ball screws n N oncontact limit and reference point switches n S tress-relieved n S elf-locking aluminum base for highest stability to 10 kg M-501, dimensions in mm Applications n General n Automation Photonics >> ActiveDrive n Scientific Instrumentation >> Incremental Encoder n Semiconductor Technology Glossary ....................... page 290 132 W W W. P I . W S Active axes M-501.1DG Z Z Unit Tolerance Motion and positioning Travel range 12.5 12.5 Integrated sensor Rotary encoder Rotary encoder mm Sensor resolution 40960 2048 Cts./rev. Design resolution 0.024 0.005 µm Minimum incremental motion <0.1 <0.1 µm Unidirectional repeatability 0.1 0.1 µm Pitch ±150 ±150 µrad Yaw ±150 ±150 µrad Velocity 3 1 mm/s Reference point switch repeatability 1 1 µm Drive screw pitch 1 1 mm Gear ratio 80/26 (belt drive) 80/26 (belt drive); (28/12) 4:1 ~ 29.6:1 gearhead Load capacity 50 100 N max. Holding force 20 100 N max. Motor type DC motor with PWM control (ActiveDrive) DC gear motor Operating voltage 24 0 to ±12 V Motor power 17 4 W Reference and limit switches Hall effect Hall effect Operating temperature range 10 to 50 –20 to 50 Material Al (black anodized) Al (black anodized) Mass 2.6 2.6 Recommended controllers / drivers C-863 (single axis) C-884 (up to 6 axes) C-863 (single axis) C-884 (up to 6 axes) max. Mechanical properties Drive properties Miscellaneous °C kg ±5 % Ask about custom designs! 133 MOTION | POSITIONING Translation Stages M-501.1PD UPL-120 Precision Z Stage Excellent Accuracy for High Loads n T ravel range 13 mm (1/2”) n Unidirectional repeatability to 0.05 µm n Load capacity to 20 kg n Integrated optical limit switches n Available with direct-measuring encoder n Crossed roller guide, anti-creep Reference-class Z stage Extremely accurate and reliable positioning. Crossed roller guides for smooth feed at high loads. Stress-relieved aluminum base for highest stability. Drive variants with DC motor and 2-phase stepper motor. Noncontact limit switches. Highly accurate position measuring with incremental linear encoder Noncontact optical linear encoders measure the actual position directly at the motion platform with the greatest accuracy so that nonlinearity, mechanical play or elastic deformation have no influence on position measuring. Crossed roller guide With crossed roller guides, the point contact of the balls in ball guides is replaced by line contact of the hardened rollers. Consequently, they are considerably stiffer and need less preload, which reduces friction and allows smoother running. Crossed roller guides are also distinguished by high guiding accuracy and load capacity. Force-guided rolling element cages prevent cage creep. Applications n General Automation n Photonics >> Linear Encoder n Scientific Instrumentation n Semiconductor Technology Glossary ....................... page 290 134 W W W. P I . W S Active axes 6635921030 6635911130 6635921130-0001 Z stage with DC motor and rotary encoder Z stage with stepper motor Z stage with DC motor, linear and rotary encoder Z stage with stepper motor and linear encoder Z Z Z Z Unit Tolerance Motion and positioning Travel range 13 13 13 13 Integrated sensor Rotary encoder – Linear encoder Rotary encoder Linear encoder Sensor signal rotary encoder A/B quadrature, RS-422 – A/B quadrature, RS-422 – Sensor signal linear encoder – – A/B quadrature, RS-422 Sin/cos, 1 V peak-peak, 20 µm signal period mm Design resolution 0.013 1.34 0.05 0.005 µm Sensor resolution rotary encoder 20000 – 20000 – Cts./rev. Sensor resolution linear encoder – – 0.05 – µm Minimum incremental motion 0.1 0.1 0.1 0.05 µm typ. Unidirectional repeatability 0.1 0.1 0.1 0.05 µm typ. Bidirectional repeatability ±2 ±2 ±0.1 ±0.05 µm typ. Pitch ±100 ±100 ±100 ±100 µrad typ. Yaw ±100 ±100 ±100 ±100 µrad typ. Straightness ±3.0 ±3.0 ±3.0 ±3.0 µm typ. Flatness ±3.0 ±3.0 ±3.0 ±3.0 µm typ. Velocity 6 3 6 3 mm/s max. Reference point switch repeatability <1 <1 <1 <1 µm typ. Crossed roller guide with anticreep system Crossed roller guide with anticreep system Crossed roller guide with anticreep system Crossed roller guide with anticreep system Mechanical properties Guide type Drive screw type Ball screw Ball screw Ball screw Ball screw Drive screw pitch 1 1 1 1 Gear ratio 2911:780 2911:780 2911:780 2911:780 Push/pull force, power on 200 200 200 200 mm N max. Holding force, power off 40 80 40 80 N typ. Load capacity 200 150 200 150 200 150 200 150 N N max. max. Permissible torque Mx in θx 130 130 130 130 N·m max. Permissible torque My in θy 38 38 38 38 N·m max. Permissible torque Mz in θZ 150 150 150 150 N·m max. Permissible lateral force Fy in Y 135 MOTION | POSITIONING Translation Stages 6635911030 6635911030 6635921030 6635911130 6635921130-0001 Unit Tolerance Motor type DC motor 2-phase stepper motor DC motor 2-phase stepper motor Step resolution – 200 – 200 Full steps/ rev. Operating voltage, nominal 24 24 24 24 V nom. V max. Drive properties Operating voltage, max. 48 48 48 48 Limit switches Optical Optical Optical Optical 5 to 40 5 to 40 5 to 40 5 to 40 Miscellaneous Operating temperature range °C Mass 2.4 2.3 2.4 2.4 kg ±5 % Moved mass 1.3 1.3 1.3 1.3 kg ±5 % Material Aluminum, black anodized Aluminum, black anodized Aluminum, black anodized Aluminum, black anodized Connection HD Sub-D 15 (m) HD Sub-D 15 (m) Motor: HD Sub-D 15 (m) Sensor: Sub-D 9 (m) Motor: HD Sub-D 15 (m) Sensor: Sub-D 9 (m) Recommended controllers / drivers C-863 (single axis) C-884 (up to 6 axes) C-885 with C-863.20C885 (to 40 axes) ACS modular controller C-663.12 (single axis) SMC Hydra (double axis) C-885 with C-663.12C885 (up to 20 axes) ACS modular controller C-863 (single axis) C-884 (up to 6 axes) C-885 with C-863.20C885 (to 40 axes) ACS modular controller C-663.12 (single axis) SMC Hydra (double axis) C-885 with C-663.12C885 (up to 20 axes) ACS modular controller Connecting cables for motor and sensor are not in the scope of delivery and must be ordered separately. Ask about custom designs! UPL-120, DC motor, dimensions in mm UPL-120, stepper motor, dimensions in mm 136 W W W. P I . W S Direction of the axes and torques for Z stages Translation Stages UPL-120, dimensions in mm 137 MOTION | POSITIONING XY Stages 138 W W W. P I . W S L-731 Precision XY Stage ............................................................................................... 140 V-731 PIMag® High-Precision XY Stage .......................................................................... 144 L-741 Precision XY Stage ............................................................................................... 146 V-741 PIMag® High-Precision XY Stage .......................................................................... 150 L-738 Precision XY Stage ............................................................................................... 152 V-738 PIMag® High-Precision XY Stage .......................................................................... 156 PIglide XY Stages with Air Bearings ........................................................................................................................................ 158 A-311 PIglide IS Planar Scanner with Air Bearing .......................................................... 158 A-322 PIglide HS Planar Scanner with Air Bearing ......................................................... 160 139 MOTION | POSITIONING XY Stages XY Stages with Mechanical Bearings ....................................................................................................................................... 140 L-731 Precision XY Stage High Travel Accuracy and Stability n T ravel range 205 mm × 205 mm (8”) n U nidirectional repeatability to 0.05 µm n V elocity to 90 mm/s n 2 -phase stepper motor or DC motors n I ncremental encoder with 1 nm resolution n R otary encoder with 20000 impulses/ r evolution n C rossed Highly accurate position measuring with incremental linear encoder Drive types Noncontact optical linear encoders measure the actual position directly at the motion platform with the greatest accuracy so that nonlinearity, mechanical play or elastic deformation have no influence on position measuring. Optical limit and reference point switches. n 2 -phase roller guide, anti-creep stepper motor for high torque even at low velocities and higher resolution n D C motor for high velocity constancy, low vibration, and high velocities Other travel ranges on request. Crossed roller guide With crossed roller guides, the point contact of the balls in ball guides is replaced by line contact of the hardened rollers. Consequently, they are considerably stiffer and need less preload, which reduces friction and allows smoother running. Crossed roller guides are also distinguished by high guiding accuracy and load capacity. Force-guided rolling element cages prevent cage creep. Applications >> Incremental Encoder n Biotechnology n Medical Industry n Laser Cutting n Metrology / Testing n Laser Marking Technology Glossary ....................... page 290 140 W W W. P I . W S Stages with DC motor L-731.093111 / L-731.093112 / L-731.093132 Unit Tolerance Motion X, Y Travel range 205 × 205 mm Angular error xry (pitch) ±50 µrad typ. Angular error xrz (yaw) ±30 µrad typ. Angular error yrx (pitch) ±40 µrad typ. Angular error yrz (yaw) ±30 µrad typ. Straightness / flatness ±2 µm typ. Orthogonality ±96.963 µrad typ. Velocity L-731.093111 / L-731.093112: 50 L-731.093132: 90 mm/s max. Stages with DC motor L-731.093111 L-731.093112 L-731.093132 Unit Tolerance Integrated sensor Incremental linear encoder Incremental linear encoder Incremental rotary encoder Sensor signal Sin/cos, 1 V peakpeak, 20 µm signal period A/B quadrature, TTL A/B quadrature, TTL Design resolution 0.001 0.01 0.1 µm Sensor resolution rotary encoder – – 20000 Cts./rev. Minimum incremental motion 0.1 0.5 0.8 µm typ. Unidirectional repeatability 0.1 0.5 0.8 µm typ. Bidirectional repeatability ±0.5 ±0.5 ±2.5 µm typ. Reference point switch repeatability <1 <1 <1 µm typ. Reference and limit switches Optical Optical Optical Stages with DC motor L-731.093xxx Unit Tolerance XY Stages Active axes Positioning Mechanical properties Drive screw type Ball screw Drive screw pitch 2 Guide type Crossed roller guide with anti-creep system mm Load capacity 200 N max. Permissible torque Mx in θX 125 N·m max. Permissible torque My in θY 125 N·m max. Permissible torque Mz in θZ 125 N·m max. Drive properties Motor type DC motor Operating voltage, nominal 24 V nom. Operating voltage, max. 48 V max. 141 MOTION | POSITIONING Stages with DC motor L-731.093111 L-731.093112 / L-731.093132 Unit Tolerance Operating temperature range 5 to 40 5 to 40 °C Material Aluminum, black anodized Aluminum, black anodized Mass 16 16 kg ±5 % Moved mass in X, unloaded 12 12 kg ±5 % Moved mass in Y, unloaded 3.5 3.5 kg ±5 % Connection 2 × HD Sub-D 26 (m) (motor) 2 × Sub-D 15 (f) (sensor) 2 × HD Sub-D 26 (m) (motor/sensor) Recommended controllers / drivers SMC Hydra (double axis) C-891 (single axis) C-885 with C-891.10C885 (up to 20 axes) ACS modular controller C-863 (single axis) C-884 (up to 6 axes) C-885 with C-863.20C885 (to 40 axes) ACS modular controller Stages with stepper motor L-731.40SD / L-731.44SD / L-731.4ASD Unit Tolerance Miscellaneous Motion Active axes X, Y Travel range 205 × 205 mm Angular error xry (pitch) ±50 µrad typ. Angular error xrz (yaw) ±30 µrad typ. Angular error yrx (pitch) ±40 µrad typ. Angular error yrz (yaw) ±30 µrad typ. Straightness / flatness ±2 µm typ. Orthogonality ±96.963 µrad typ. Velocity 45 mm/s max. Stages with stepper motor L-731.40SD L-731.44SD L-731.4ASD Unit Tolerance Integrated sensor – Incremental linear encoder Incremental linear encoder Sensor signal – A/B quadrature, TTL Sin/cos, 1 V peak-peak, 20 µm signal period Design resolution 10.0 0.01 0.001 µm Minimum incremental motion 1 0.05 0.05 µm typ. Unidirectional repeatability 1 0.05 0.05 µm typ. Bidirectional repeatability ±2.5 ±0.5 ±0.5 µm typ. Reference and limit switches Optical Optical Optical Stages with stepper motor L-731.4xSD Unit Tolerance Positioning Mechanical properties Drive screw type Ball screw Drive screw pitch 2 Guide type Crossed roller guide with anti-creep system mm Load capacity 200 N max. Permissible torque Mx in θX 125 N·m max. Permissible torque My in θY 125 N·m max. Permissible torque Mz in θZ 125 N·m max. Drive properties Motor type Stepper motor, 2-phase Operating voltage, nominal 24 V nom. Operating voltage, max. 48 V max. Stepper motor 200 Full steps/ rev. 142 W W W. P I . W S Stages with stepper motor L-731.40SD / L-731.44SD L-731.4ASD Unit °C Tolerance Operating temperature range 5 to 40 5 to 40 Material Aluminum, black anodized Aluminum, black anodized Mass 15.5 15.5 kg ±5 % Moved mass in X, unloaded 12 12 kg ±5 % kg ±5 % Moved mass in Y, unloaded 3.5 3.5 Connection L-731.40SD: 2 × HD Sub-D 26 (m) (motor) L-731.44SD: 2 × HD Sub-D 26 (m) (motor/sensor) 2 × HD Sub-D 26 (m) (motor) 2 × Sub-D 15 (f) (sensor) Recommended controllers / drivers C-663.12 (single axis) SMC Hydra (double axis) C-885 with C-663.12C885 (up to 20 axes) ACS modular controller SMC Hydra (double axis) ACS modular controller XY Stages Miscellaneous All cables required for operation with the ordered controller are included in the scope of delivery. The cable length is 3 m. Cable for connecting to other controllers can be ordered as accessory. Ask about custom designs! L-731, dimensions in mm 143 MOTION | POSITIONING V-731 PIMag® High-Precision XY Stage High Travel Accuracy and Stability, Magnetic Direct Drive n Travel range 205 mm × 205 mm (8”) n Unidirectional repeatability to 0.1 µm n Ironless 3-phase linear motor n Velocity to 200 mm/s n I ncremental n linear encoder with 1 nm resolution Crossed roller guides, anti-creep V-731, dimensions in mm Applications n Automated >> Incremental Encoder Optical Inspection (AOI) n Medical Industry n Biotechnology n Metrology / Testing n Laser Cutting n Scanning n Laser Marking >> PIMag® Magnetic Linear Motors Technology Glossary ....................... page 290 144 W W W. P I . W S V-731.096111 Unit Tolerance Motion and positioning X, Y Travel range 205 × 205 Integrated sensor Incremental linear encoder mm Design resolution 0.001 Sensor signal Sin/cos, 1 V peak-peak, 20 µm signal period µm Minimum incremental motion 0.02 µm typ. Unidirectional repeatability 0.1 µm typ. Bidirectional repeatability ±0.25 µm typ. Angular error xry (pitch) ±50 µrad typ. Angular error xrz (yaw) ±30 µrad typ. Angular error yrx (pitch) ±40 µrad typ. Angular error yrz (yaw) ±30 µrad typ. Orthogonality ±96.963 µrad typ. Straightness / flatness ±2 µm typ. Velocity 200 mm/s max. Acceleration in X, without load 5 m/s² max. Acceleration in Y, without load 15 m/s² max. Reference and limit switches Optical XY Stages Active axes Mechanical properties Load capacity 50 N max. Permissible torque in θX, θY 125 N·m max. Permissible torque in θZ 125 N·m max. Guide Crossed roller guide with anti-creep system Drive properties Motor type Ironless 3-phase linear motor Operating voltage, nominal 48 V nom. Operating voltage, max. 48 V max. Peak force 80 N max. Nominal force 29 N typ. Peak current, effective 5 A typ. Nominal current, effective 1.5 A typ. Force constant, effective 19.9 N/A typ. Motor constant 4.89 N/√W typ. Electrical time constant 0.4 ms Resistance phase-phase 11 Ω typ. Inductance phase-phase 3.6 mH typ. Back EMF phase-phase 16 V·s/m max. Pole pitch N-N 30 mm °C Miscellaneous Operating temperature range 5 to 40 Material Aluminum, black anodized Moved mass in X 15.4 kg ±5 % Moved mass in Y 5.6 kg ±5 % Overall mass 19.4 kg ±5 % MTBF 20000 h Connection 2 × HD Sub-D 26 (m) (motor) 2 × Sub-D 15 (f) (sensor) Recommended controller SMC Hydra (double axis) C-891 (single axis) C-885 with C-891.10C885 (up to 20 axes) ACS modular controller All cables required for operation with the ordered controller are included in the scope of delivery. The cable length is 3 m. Cable for connecting to other controllers can be ordered as accessory. Ask about custom designs! 145 MOTION | POSITIONING L-741 Precision XY Stage High Travel Accuracy and Stability, 305 × 305 mm Travel Range n T ravel range 305 mm × 305 mm (12”) n U nidirectional repeatability to 0.05 µm n V elocity to 90 mm/s n 2 -phase stepper motors or DC motors n Incremental n R otary linear encoder with 1 nm resolution encoder with 20000 impulses/revolution n C rossed Highly accurate position measuring with incremental linear encoder Drive types Noncontact optical linear encoders measure the actual position directly at the motion platform with the greatest accuracy so that nonlinearity, mechanical play or elastic deformation have no influence on position measuring. Optical limit and reference point switches. n 2 -phase roller guide, anti-creep stepper motor for high torque even at low velocities and higher resolution n D C motor for high velocity constancy, low vibration, and high velocities Other travel ranges on request. Crossed roller guide With crossed roller guides, the point contact of the balls in ball guides is replaced by line contact of the hardened rollers. Consequently, they are considerably stiffer and need less preload, which reduces friction and allows smoother running. Crossed roller guides are also distinguished by high guiding accuracy and load capacity. Force-guided rolling element cages prevent cage creep. Applications >> Incremental Encoder n Biotechnology n Medical Industry n Laser Cutting n Metrology / Testing n Laser Marking Technology Glossary ....................... page 290 146 W W W. P I . W S Stages with DC motor L-741.133111 / L-741.133112 / L-741.133132 Unit Tolerance Motion X, Y Travel range 305 × 305 mm Angular error xry (pitch) ±60 µrad typ. Angular error xrz (yaw) ±40 µrad typ. Angular error yrx (pitch) ±60 µrad typ. Angular error yrz (yaw) ±40 µrad typ. Straightness / flatness ±4 µm typ. Orthogonality ±96.963 µrad typ. Velocity L-741.133111 / L-741.133112: 50 L-741.133132: 90 mm/s max. Stages with DC motor L-741.133111 L-741.133112 L-741.133132 Unit Tolerance Integrated sensor Incremental linear encoder Incremental linear encoder Incremental rotary encoder Sensor signal Sin/cos, 1 V peakpeak, 20 µm signal period A/B quadrature, TTL A/B quadrature, TTL Design resolution 0.001 0.01 0.1 µm Sensor resolution rotary encoder – – 20000 Cts./rev. Minimum incremental motion 0.1 0.5 0.8 µm typ. Unidirectional repeatability 0.1 0.5 0.8 µm typ. Bidirectional repeatability ±0.5 ±0.5 ±2.5 µm typ. Reference point switch repeatability <1 <1 <1 µm typ. Reference and limit switches Optical Optical Optical Stages with DC motor L-741.133xxx Unit Tolerance XY Stages Active axes Positioning Mechanical properties Drive screw type Ball screw Drive screw pitch 2 Guide type Crossed roller guide with anti-creep system mm Load capacity 200 N max. Permissible torque Mx in θX 125 N·m max. Permissible torque My in θY 125 N·m max. Permissible torque Mz in θZ 125 N·m max. Drive properties Motor type DC motor Operating voltage, nominal 24 V nom. Operating voltage, max. 48 V max. 147 MOTION | POSITIONING Stages with DC motor L-741.133111 L-741.133112 / L-741.133132 Unit Tolerance Operating temperature range 5 to 40 5 to 40 °C Material Aluminum, black anodized Aluminum, black anodized Mass 28 28 kg ±5 % Moved mass in X, unloaded 20.2 20.2 kg ±5 % Moved mass in Y, unloaded 6.1 6.1 kg ±5 % Connection 2 × HD Sub-D 26 (m) (motor) 2 × Sub-D 15 (f) (sensor) 2 × HD Sub-D 26 (m) (motor/sensor) Recommended controllers / drivers SMC Hydra (double axis) C-891 (single axis) C-885 with C-891.10C885 (up to 20 axes) ACS modular controller C-863 (single axis) C-884 (up to 6 axes) C-885 with C-863.20C885 (to 40 axes) ACS modular controller Stages with stepper motor L-741.131100 / L-741.131111 / L-741.131112 Unit Tolerance Miscellaneous Motion Active axes X, Y Travel range 305 × 305 mm Angular error xry (pitch) ±60 µrad typ. Angular error xrz (yaw) ±40 µrad typ. Angular error yrx (pitch) ±60 µrad typ. Angular error yrz (yaw) ±40 µrad typ. Straightness / flatness ±4 µm typ. Orthogonality ±96.963 µrad typ. Velocity 45 mm/s max. Stages with stepper motor L-741.131100 L-741.131111 L-741.131112 Unit Tolerance Integrated sensor – Incremental linear encoder Incremental linear encoder Sensor signal – Sin/cos, 1 V peakpeak, 20 µm signal period A/B quadrature, TTL Design resolution 10.0 0.001 0.01 µm Sensor resolution rotary encoder – – – Cts./rev. Sensor resolution linear encoder – 0.001 0.01 µm Minimum incremental motion 1 0.05 0.05 µm typ. Unidirectional repeatability 1 0.05 0.05 µm typ. Bidirectional repeatability ±2.5 ±0.5 ±0.5 µm typ. Reference point switch repeatability <1 <1 <1 µm typ. Reference and limit switches Optical Optical Optical Stages with stepper motor L-741.131xxx Unit Tolerance Positioning Mechanical properties Drive screw type Ball screw Drive screw pitch 2 Guide type Crossed roller guide with anti-creep system mm Load capacity 200 N max. Permissible torque Mx in θX 125 N·m max. Permissible torque My in θY 125 N·m max. Permissible torque Mz in θZ 125 N·m max. Drive properties Motor type Stepper motor, 2-phase Operating voltage, nominal 24 V nom. Operating voltage, max. 48 V max. Step resolution 200 Full steps/ rev. 148 W W W. P I . W S Stages with stepper motor L-741.131100 / L-741.131112 L-741.131111 Unit Tolerance Operating temperature range 5 to 40 5 to 40 °C Material Aluminum, black anodized Aluminum, black anodized Mass 27.5 27.5 kg ±5 % Moved mass in X, unloaded 19.9 19.9 kg ±5 % Moved mass in Y, unloaded 6.1 6.1 kg ±5 % Connection L-741.131100. 2 × HD Sub-D 26 (m) (motor) L-741.131112. 2 × HD Sub-D 26 (m) (motor/sensor) 2 × HD Sub-D 26 (m) (motor) 2 × Sub-D 15 (f) (sensor) Recommended controllers / drivers C-663.12 (single axis) SMC Hydra (double axis) C-885 with C-663.12C885 (up to 20 axes) ACS modular controller SMC Hydra (double axis) ACS modular controller XY Stages Miscellaneous All cables required for operation with the ordered controller are included in the scope of delivery. The cable length is 3 m. Cable for connecting to other controllers can be ordered as accessory. Ask about custom designs! L-741, dimensions in mm 149 MOTION | POSITIONING V-741 PIMag® High-Precision XY Stage High Travel Accuracy and Stability, 305 mm × 305 mm Travel Range, Magnetic Direct Drive n Travel range 305 mm × 305 mm (12”) n Unidirectional repeatability to 0.1 µm n Ironless 3-phase linear motor n Velocity to 200 mm/s n I ncremental n linear encoder with 1 nm resolution Crossed roller guides, anti-creep V-741, dimensions in mm Applications n Automated >> Linear Encoder Optical Inspection (AOI) n Medical Industry n Biotechnology n Metrology / Testing n Laser Cutting n Scanning n Laser Marking >> PIMag® Magnetic Linear Motors Technology Glossary ....................... page 290 150 W W W. P I . W S V-741.136111 Unit Tolerance Motion and positioning X, Y Travel range 305 × 305 Integrated sensor Incremental linear encoder mm Design resolution 0.001 Sensor signal Sin/cos, 1 V peak-peak, 20 µm signal period µm Minimum incremental motion 0.02 µm typ. Unidirectional repeatability 0.1 µm typ. Bidirectional repeatability ±0.25 µm typ. Angular error xry (pitch) ±70 µrad typ. Angular error xrz (yaw) ±50 µrad typ. Angular error yrx (pitch) ±60 µrad typ. Angular error yrz (yaw) ±50 µrad typ. Orthogonality ±96.963 µrad typ. Straightness / flatness ±3 µm typ. Velocity 200 mm/s max. Acceleration in X, without load 3 m/s² max. Acceleration in Y, without load 9 m/s² max. Reference and limit switches Optical XY Stages Active axes Mechanical properties Load capacity 50 N max. Permissible torque in θX, θY 125 N·m max. Permissible torque in θZ 125 N·m max. Guide Crossed roller guide with anti-creep system Drive properties Motor type Ironless 3-phase linear motor Operating voltage, nominal 48 V nom. Operating voltage, max. 48 V max. Peak force 80 N max. Nominal force 29 N typ. Peak current, effective 5 A typ. Nominal current, effective 1.5 A typ. Force constant, effective 19.9 N/A typ. Motor constant 4.89 N/√W typ. Electrical time constant 0.4 ms Resistance phase-phase 11 Ω typ. Inductance phase-phase 3.6 mH typ. Back EMF phase-phase 16 V·s/m max. Pole pitch N-N 30 mm °C Miscellaneous Operating temperature range 5 to 40 Material Aluminum, black anodized Moved mass in X 25.5 kg ±5 % Moved mass in Y 9.2 kg ±5 % Overall mass 33 kg ±5 % MTBF 20000 h Connection 2 × HD Sub-D 26 (m) (motor) 2 × Sub-D 15 (f) (sensor) Recommended controller SMC Hydra (double axis) C-891 (single axis) C-885 with C-891.10C885 (up to 20 axes) ACS modular controller All cables required for operation with the ordered controller are included in the scope of delivery. The cable length is 3 m. Cable for connecting to other controllers can be ordered as accessory. Ask about custom designs! 151 MOTION | POSITIONING L-738 Precision XY Stage Clear Aperture, High Travel Accuracy, and Stability n T ravel n L arge range 102 mm × 102 mm (4”) aperture, 150 mm × 150 mm n U nidirectional repeatability to 0.05 µm n V elocity to 90 mm/s n 2 -phase stepper motors, DC motors n I ncremental linear encoder with 1 nm resolution Highly accurate position measuring with incremental linear encoder Drive types Noncontact optical linear encoders measure the actual position directly at the motion platform with the greatest accuracy so that nonlinearity, mechanical play or elastic deformation have no influence on position measuring. Optical reference points and limit switches. n 2 -phase stepper motor for high torque even at low velocities and higher resolution n D C motor for high velocity constancy, low vibration, and high velocities Recirculating ball bearings When carefully assembled, recirculating ball bearings are distinguished by a beneficial combination of high load capacity, lifetime, maintenance-free operation, and guiding accuracy. The moving part of the stages is supported by four preloaded linear ball bearing units which run on two guide rails. Each bearing unit is made up of two independent rows of circulating ball bearings. Applications >> Incremental Encoder n Biotechnology n Medical Industry n Laser Cutting n Metrology / Testing n Laser Marking Technology Glossary ....................... page 290 152 W W W. P I . W S Stages with DC motor L-738.053111 / L-738.053112 / L-738.053132 Unit Tolerance Motion X, Y Travel range 102 × 102 mm Angular error xry (pitch) ±40 µrad typ. Angular error xrz (yaw) ±20 µrad typ. Angular error yrx (pitch) ±40 µrad typ. Angular error yrz (yaw) ±20 µrad typ. Straightness / flatness ±2 µm typ. Orthogonality ±96.963 µrad typ. Velocity L-738.053111 / L-738.053112: 50 L-738.053132: 90 mm/s max. Stages with DC motor L-738.053111 L-738.053112 L-738.053132 Unit Tolerance Integrated sensor Incremental linear encoder Incremental linear encoder Incremental rotary encoder Sensor signal Sin/cos, 1 V peakpeak, 20 µm signal period A/B quadrature, TTL A/B quadrature, TTL Design resolution 0.001 0.01 0.1 µm Sensor resolution rotary encoder – – 20000 Cts./rev. Minimum incremental motion 0.1 0.1 0.4 µm typ. Unidirectional repeatability 0.1 0.1 0.4 µm typ. Bidirectional repeatability ±0.5 ±0.5 ±2 µm typ. Reference point switch repeatability <1 <1 <1 µm typ. Reference and limit switches Optical Optical Optical Stages with DC motor L-738.053xxx Unit Tolerance XY Stages Active axes Positioning Mechanical properties Drive screw type Ball screw Drive screw pitch 2 Guide type Recirculating ball bearing Holding force, power off 20 N typ. Push/pull force Fx, Fy power on 100 N max. Load capacity 200 N max. Permissible torque Mx in θX 130 N·m max. Permissible torque My in θY 130 N·m max. Permissible torque Mz in θZ 90 N·m max. mm Drive properties Motor type DC motor Operating voltage, nominal 24 V nom. Operating voltage, max. 48 V max. 153 MOTION | POSITIONING Stages with DC motor Miscellaneous Operating temperature range Material Mass Moved mass in X, unloaded Moved mass in Y, unloaded Connection Recommended controllers / drivers Stages with stepper motor L-738.053111 L-738.053112 / L-738.053132 Unit 5 to 40 Aluminum, black anodized 24 14.6 5.8 2 × HD Sub-D 26 (m) (motor) 2 × Sub-D 15 (f) (sensor) SMC Hydra (double axis) C-891 (single axis) C-885 with C-891.10C885 (up to 20 axes) ACS modular controller 5 to 40 Aluminum, black anodized 24 14.6 5.8 2 × HD Sub-D 26 (m) (motor/sensor) C-863 (single axis) C-884 (up to 6 axes) C-885 with C-863.20C885 (to 40 axes) ACS modular controller °C L-738.051100 / L-738.051111 / L-738.051112 Tolerance kg kg kg ±5 % ±5 % ±5 % Unit Tolerance Motion Active axes X, Y Travel range 102 × 102 mm Angular error xry (pitch) ±40 µrad typ. Angular error xrz (yaw) ±20 µrad typ. Angular error yrx (pitch) ±40 µrad typ. Angular error yrz (yaw) ±20 µrad typ. Straightness / flatness ±2 µm typ. Orthogonality ±96.963 µrad typ. Velocity 35 mm/s max. Stages with stepper motor L-738.051100 L-738.051111 L-738.051112 Unit Tolerance Integrated sensor – Incremental linear encoder Incremental linear encoder Sensor signal – Sin/cos, 1 V peakpeak, 20 µm signal period A/B quadrature, TTL Design resolution 10.0 0.001 0.01 µm Minimum incremental motion 0.2 0.05 0.05 µm typ. Unidirectional repeatability 0.2 0.05 0.05 µm typ. Bidirectional repeatability ±2 ±0.5 ±0.5 µm typ. Reference point switch repeatability <1 <1 <1 µm typ. Reference and limit switches Optical Optical Optical Stages with stepper motor L-738.051xxx Unit Tolerance Positioning Mechanical properties Drive screw type Ball screw Drive screw pitch 2 Guide type Recirculating ball bearing mm Holding force, power off 60 N typ. Push/pull force FX, FY power on 100 N max. Load capacity 200 N max. Permissible torque Mx in θX 130 N·m max. Permissible torque My in θY 130 N·m max. Permissible torque Mz in θZ 90 N·m max. Drive properties Motor type Stepper motor, 2-phase Operating voltage, nominal 24 V nom. Operating voltage, max. 48 V max. Step resolution 200 Full steps/ rev. 154 W W W. P I . W S Stages with stepper motor L-738.051100 L-738.051111 L-738.051112 Unit Tolerance Operating temperature range 5 to 40 5 to 40 5 to 40 °C Material Aluminum, black anodized Aluminum, b lack anodized Aluminum, black anodized Mass 22 22 22 kg ±5 % Moved mass in X, unloaded 13.8 13.8 13.8 kg ±5 % Moved mass in Y, unloaded 5.8 5.8 5.8 kg ±5 % Connection 2 × HD Sub-D 26 (m) (motor) 2 × HD Sub-D 26 (m) (motor) 2 × Sub-D 15 (f) (sensor) 2 × HD Sub-D 26 (m) (motor/ sensor) Recommended controllers / drivers C-663.12 (single axis) SMC Hydra (double axis) C-885 with C-663.12C885 (up to 20 axes) ACS modular controller SMC Hydra (double axis) ACS modular controller C-663.12 (single axis) C-885 with C-663.12C885 (up to 20 axes) ACS modular controller XY Stages Miscellaneous All cables required for operation with the ordered controller are included in the scope of delivery. The cable length is 3 m. Cable for connecting to other controllers can be ordered as accessory. Ask about custom designs! L-738, dimensions in mm 155 MOTION | POSITIONING V-738 PIMag® High-Precision XY Stage Clear Aperture, High Travel Accuracy and Stability, Magnetic Direct Drive n Travel range 102 mm × 102 mm (4”) n Large aperture, 150 mm × 150 mm n Unidirectional repeatability to 0.1 µm n Velocity to 500 mm/s n Ironless 3-phase linear motor n Incremental linear encoder with 1 nm resolution V-738, dimensions in mm Applications n Automated >> Incremental Encoder Optical Inspection (AOI) n Medical Industry n Biotechnology n Metrology / Testing n Laser Cutting n Scanning n Laser Marking >> PIMag® Magnetic Linear Motors Technology Glossary ....................... page 290 156 W W W. P I . W S V-738.056111 Unit Travel range 102 × 102 mm Integrated sensor Incremental linear encoder Tolerance Motion and positioning 0.001 Sin/cos, 1 V peak-peak, 20 µm signal period µm Minimum incremental motion 0.02 µm typ. Unidirectional repeatability 0.1 µm typ. Bidirectional repeatability ±0.25 µm typ. Angular error xry (pitch) ±40 µrad typ. Angular error xrz (yaw) ±20 µrad typ. Angular error yrx (pitch) ±40 µrad typ. Angular error yrz (yaw) ±20 µrad typ. Straightness / flatness ±2 µm typ. Orthogonality ±96.963 µrad typ. Velocity 500 mm/s max. Acceleration in X, Y, without load 10 m/s² max. Reference and limit switches Optical XY Stages Design resolution Sensor signal Mechanical properties Load capacity 100 N max. Permissible torque in θX, θY 130 N·m max. Permissible torque in θZ 90 N·m max. Guide Recirculating ball bearing Drive properties Motor type Ironless 3-phase linear motor Operating voltage, nominal 48 V nom. Operating voltage, max. 48 V max. Peak force 200 N max. Nominal force 87 N typ. Peak current, effective 15 A typ. Nominal current, effective 4.4 A typ. Motor constant 71 N/√W typ. Electrical time constant 0.4 ms Resistance phase-phase 3.6 Ω typ. Inductance phase-phase 1.2 mH typ. Back EMF phase-phase 16 V·s/m max. Pole pitch N-N 30 mm °C Miscellaneous Operating temperature range 5 to 40 Material Aluminum, black anodized Moved mass in X, unloaded 16.8 kg ±5 % Moved mass in Y, unloaded 8 kg ±5 % Overall mass 24 kg ±5 % Connection 2 × HD Sub-D 26 (m) (motor) 2 × Sub-D 15 (f) (sensor) h Recommended controller SMC Hydra (double axis) C-891 (single axis) C-885 with C-891.10C885 (up to 20 axes) ACS modular controller All cables required for operation with the ordered controller are included in the scope of delivery. The cable length is 3 m. Cable for connecting to other controllers can be ordered as accessory. Ask about custom designs! 157 MOTION | POSITIONING A-311 PIglide IS Planar Scanner with Air Bearing High-Performance, Compact XY Nanopositioning System n I deal for scanning applications or high-precision positioning n C leanroom n T ravel n L oad n L ow compatible ranges to 200 mm × 200 mm capacity to 147 N profile n R esolution n O ptional to 1 nm granite base plates A-311.xxx, dimensions in mm A-311.Dxx A-311.Axx A-311.Bxx A-311.Cxx Applications n Electronics n Laser A B C D E F 300 350 400 450 232 282 332 382 100 150 200 250 275 325 375 425 25 50 75 100 30 55 80 105 >> Absolute Encoder Manufacturing Marking n Scientific Instrumentation >> Incremental Encoder n Semiconductor >> PIglide Air Bearing Technology >> PIMag® Magnetic Linear Motors n Scanning Technology Glossary ....................... page 290 158 W W W. P I . W S A-311.Dxx A-311.Axx A-311.Bxx A-311.Cxx Unit Tolerance Travel range 50 × 50 100 × 100 150 × 150 200 × 200 mm Pitch (1) 20 30 40 50 µrad max. Yaw (1) 5 10 15 20 µrad max. Straightness (1) ±0.25 ±0.25 ±0.5 ±0.5 µm max. Straightness per 10 mm travel range (1) ±10 ±10 ±10 ±10 nm max. Flatness (1) ±0.5 ±0.5 ±1 ±1 µm max. Flatness per 10 mm travel range (1) ±10 ±10 ±10 ±10 nm max. XY orthogonality 25 25 25 25 µrad max. Velocity, unloaded (2) 2 2 2 2 m/s max. Acceleration of the upper axis, unloaded (2) 27.5 27.5 27.5 27.5 m/s² max. Acceleration of the lower axis, unloaded (2) 15 13 11 10 m/s² max. Load capacity in z (3) 147 147 147 147 N max. Moved mass, upper axis 3 3 3 3 kg Moved mass, lower axis 5.5 6.5 7.5 8.5 kg Overall mass 14.5 18.5 22.5 27.5 kg XY Stages Motion Mechanical properties A-311.xAx A-311.xBx A-311.xCx Integrated sensor Incremental linear encoder Absolute encoder Incremental linear encoder Sensor signal Sin/cos, 1 V peak-peak, 20 µm signal period BiSS-C A/B quadrature, TTL Sensor resolution 1.2 nm (4) 1 nm 50 nm Bidirectional repeatability ±0.05 µm (4) ±0.05 µm ±0.05 µm Accuracy, uncompensated (5) A-311.Dxx: ±1 µm A-311.Axx: ±1.5 µm A-311.Bxx: ±2 µm A-311.Cxx: ±2.5 µm A-311.Axx: ±1.5 µm A-311.Axx: ±1.5 µm A-311.Axx: ±1.5 µm A-311.Axx: ±1.5 µm A-311.Dxx: ±1 µm A-311.Axx: ±1.5 µm A-311.Bxx: ±2 µm A-311.Cxx: ±2.5 µm Accuracy, with error compensation (5) ±0.5 µm ±0.5 µm ±0.5 µm Positioning A-311 Unit Tolerance Drive properties Drive type Linear motor, ironless, 3-phase Intermediate circuit voltage, effective 48, nominal 80, max. V DC Peak force 85 N typ. Nominal force 39 N typ. typ. Force constant, effective 12.3 N/A Resistance phase-phase 3.6 Ω Inductivity phase-phase 1.24 mH Back EMF phase-phase 10.1 V·s/m Cabling External, movable drag chain max. Miscellaneous Operating pressure (6) 60 to 70 psi (415 to 485 kPa) Air consumption <2 SCFM (56 SLPM) Air quality see A-322 datasheet, next page Materials Hardcoat aluminum, stainless steel fasteners (1) Dependent on the flatness of the surface, on which the stage is mounted. (2) Can be limited by the payload, controller or drive. (3) Assumes payload CG is centered no more than 50 mm above the motion platform. The stage is designed for horizontal operation only. (4) Assumes 16384x interpolation. Contact PI for the use of other factors. (5) Improved accuracy can be obtained with controller-based error compensation. The stage must be ordered with a controller from PI to reach these values. Accuracy values assume short-term duration and do not consider the long-term effects of thermal drift on the stage. (6) To protect the stage against damage, it is recommended to connect an air pressure sensor to the Motion-Stop input of the controller. All specifications apply per axis, if not otherwise described. MOTION | POSITIONING 159 A-322 PIglide HS Planar Scanner with Air Bearing XY Positioning System with 1 nm Resolution n I deal for scanning applications or high-precision positioning n Cleanroom compatible n Travel ranges to 500 mm × 1000 mm n Load capacity to 245 N n Resolution to 1 nm n Velocity up to 2 m/s A-322.xxx, dimensions in mm A-322.Axx A-322.Bxx A-322.Cxx A-322.Dxx Applications n Electronics n Laser A B C D E F G H J 960 1110 1110 1610 960 960 1110 1110 348 459 459 709 480 480 555 555 175 250 250 500 200 275 275 525 182 182 257 257 175 175 250 250 175 175 250 250 >> Absolute Encoder Manufacturing Cutting n Scientific Instrumentation >> PIglide Air Bearing Technology n Semiconductor >> PIMag® Magnetic Linear Motors n Scanning Technology Glossary ....................... page 290 160 W W W. P I . W S A-322.Axx A-322.Bxx A-322.Cxx A-322.Dxx Unit Tolerance Active axes X, Y X, Y X, Y X, Y Travel range (bridge axis × gantry axis) 350 × 350 350 × 500 500 × 500 500 × 1000 Integrated sensors Absolute Encoders Absolute Encoders Absolute Encoders Absolute Encoders Sensor resolution 1 1 1 1 nm Bidirectional repeatability ±0.08 ±0.08 ±0.08 ±0.08 µm max. Accuracy* ±0.5 ±0.5 ±0.5 ±0.5 µm max. Pitch 15 20 30 40 µrad max. Yaw* 5 5 7 7 µrad max. Straightness* ±0.5 ±0.5 ±1 ±1 µm max. Straightness per 10 mm travel range* ±10 ±10 ±10 ±10 nm max. Flatness ±0.5 ±1 ±1.5 ±2.5 µm max. Flatness per 10 mm travel range ±10 ±10 ±10 ±10 nm max. XY orthogonality 25 25 25 25 µrad max. Velocity** 2 2 2 2 m/s max. Acceleration, bridge axis** 20 20 20 20 m/s² max. Acceleration, gantry axis** 15 15 12 12 m/s² max. Load capacity in Z*** 245 245 245 245 N max. Moved mass, bridge axis 14 14 14 14 kg Moved mass, gantry axis 40 40 43 43 kg Overall mass 610 700 1075 1525 kg Guide type Air bearings Air bearings Air bearings Air bearings Motion and positioning XY Stages mm Mechanical properties A-322 Drive properties Drive type Linear motor, ironless, 3-phase, 1 × to bridge axis, 2 × to gantry axis Intermediate circuit voltage, effective 48, nominal 80, max. VDC Peak force # 298 N typ. Nominal force # 87 N typ. typ. Force constant, effective # 19.9 N/A Resistance phase-phase # 3.6 Ω Inductivity phase-phase # 1.2 mH Back EMF phase-phase # 16 V·s/m Cabling moved ribbon cable, cleanroom compatible max. Motion and positioning Operating pressure ## 80 psi (552 kPa) Air consumption with external vacuum supply <2 SCFM (56 SLPM) Air consumption with internal vacuum supply <3.2 SCFM (100 SLPM) Vacuum 10.8 psi (74.7 kPa), <0.5 SCFM (14 SLPM) Air quality Clean (filtered to 1.0 μm or better) – ISO 8573-1 Class 1 Oil free – ISO 8573-1 Class 1 Dry (–15 °C dew point) – ISO 8573-1 Class 3 Materials Hardcoat aluminum and nickel-plated steel with stainless steel mounting material, granite base * Improved accuracy can be obtained with controller-based error compensation. Stage must be ordered with controller. Accuracy values assume short-term time duration and do not consider the long-term effects of thermal drift on the stage. ** Unloaded. Can be limited by the insulating system payload, controller or drive. *** Assumes payload CG is centered no more than 50 mm above the stage table. # Specifications for the drive apply per motor. Two motors are located at the gantry axis. ## To protect the stage against damage, it is recommended to connect an air pressure sensor to the Motion-Stop input of the controller. All specifications apply per axis, if not otherwise described. 161 MOTION | POSITIONING Rotation Stages 162 W W W. P I . W S M-116 Precision Rotation Stage ..................................................................................... 164 RS-40 Compact Rotation Stage ...................................................................................... 166 DT-34 Miniature Rotation Stage ..................................................................................... 168 DT-80 Compact Rotation Stage ...................................................................................... 170 M-060 / M-061 / M-062 Precision Rotation Stage ............................................................ 172 L-611 Precision Rotation Stage ....................................................................................... 174 PRS-200 Precision Rotation Stage .................................................................................. 178 UPR-100 Ultraprecision Rotation Stage .......................................................................... 180 UPR-120 Ultraprecision Rotation Stage .......................................................................... 182 Rotation Stages with Torque Motor and Air Bearing .............................................................................................................. 184 UPR-120 Air Ultraprecision Rotation Stage with Air Bearing .......................................... 184 A-62x PIglide RM Rotation Stage with Air Bearings ....................................................... 186 A-63x PIglide RL Low-Profile Rotation Stage with Air Bearing ....................................... 190 Goniometer Stages ................................................................................................................................................................... 192 WT-85 Motorized Precision Goniometer ........................................................................ 192 WT-100 Motorized Precision Goniometer ....................................................................... 194 WT-90 Motorized Precision Goniometer ........................................................................ 196 WT-120 Motorized Precision Goniometer ....................................................................... 198 163 MOTION | POSITIONING Rotation Stages Rotation Stages ........................................................................................................................................................................ 164 M-116 Precision Rotation Stage Compact, for Multi-Axis Combinations with M-110 n Compact Design n Unlimited travel range n C lear aperture for transmitted-light applications Dimensions of the M-116.AL1 lens adapter for 0.5” optic devices such as polarizers. Dimensions in mm. Note that the decimal places are separated by a comma in the drawings. Applications n Backlash-compensated worm drive n Compact multi-axis combinations with M-110 n Noncontact reference point switch M-116, dimensions in mm >> Incremental Encoder n Automation n Precision Micro Assembly n Scientific Instrumentation Technology Glossary ....................... page 290 164 W W W. P I . W S M-116.DG M-116.DGH Rotation Rotation Rotation range >360 >360 Integrated sensor Rotary encoder Rotary encoder Active axes Unit Tolerance Motion and positioning ° Sensor resolution 2048 2048 Cts./rev. Design resolution 2.45 (0.00013) 3.16 (0.00018) µrad (°) Minimum incremental motion 50 25 µrad Backlash 1000 500 µrad Unidirectional repeatability 12 10 µrad Velocity 20 20 °/s Worm gear ratio 44:1 44:1 Gear ratio 28.444:1 22.0335:1 Load capacity / axial force ±15 ±15 Max. torque (θX, θY) ±1.5 ±1.5 N·m max. Max. torque clockwise (θZ) 0.4 0.4 N·m max. Max. torque counterclockwise (θZ) 0.8 0.8 N·m max. Motor type DC gear motor DC gear motor Operating voltage 0 to ±12 0 to ±12 V Motor power 1.75 1.75 W Reference point switch Optical Optical Operating temperature range –20 to 65 –20 to 65 Material Aluminum Aluminum Mass 0.4 0.4 Recommended controllers / drivers C-863 C-884 C-863 C-884 max. Rotation Stages Mechanical properties N Drive properties Miscellaneous °C kg Ask about custom designs! 165 MOTION | POSITIONING RS-40 Compact Rotation Stage Precision Positioning RS-40 rotation stage, dimensions in mm n Unlimited travel range n Repeatability to 87 µrad n 20 mm Ø aperture n Reference point switch RS-40 rotation stage, DC motor, dimensions in mm RS-40 rotation stage, stepper motor, dimensions in mm Applications >> Incremental Encoder n Automation n Precision Micro Assembly n Scientific Instrumentation Technology Glossary ....................... page 290 166 W W W. P I . W S 321691001-0000 321692001 With DC motor With stepper motor Rotation Rotation Rotation range >360 >360 ° Design resolution 0.45 38 µrad Sensor resolution rotary encoder 2048 – Cts./rev. Minimum incremental motion 87 87 µrad typ. Unidirectional repeatability 87 87 µrad typ. Bidirectional repeatability ±700 ±700 µrad typ. Angular velocity 7 5 °/s max. Eccentricity ±5 ±5 µm typ. Flatness ±5 ±5 µm typ. Wobble ±35 ±35 µrad typ. Bearing Ball bearings Ball bearings Gear ratio 76:1 76:1 Worm gear ratio 90:1 90:1 Load capacity / axial force 20 20 N max. Permissible lateral force 5 5 N max. Holding torque in θZ, power off 0.20 0.20 N·m typ. Permissible torque Mx in θX, θY 2 2 N·m max. Torque MZ in θZ, power on 0.2 0.2 N·m max. Moment of inertia 0.0155 0.0155 kg·mm² ±20 % Motor type DC motor 2-phase stepper motor Operating voltage, nominal 12 24 V nom. Operating voltage, max. 24 24 V max. Nominal current, effective 0.04 – A typ. Peak current, effective 0.16 – A typ. Torque constant, effective 0.00826 – N·m/A typ. Electrical time constant 35 – ms Resistance phase-phase 60 12.5 Ω typ. Inductance phase-phase 0.4 6.3 mH typ. Back EMF phase-phase – 4.4 V/kRPM max. Reference point switch Hall effect Hall effect Operating temperature range 5 to 40 5 to 40 Material Aluminum Aluminum Active axes Unit Tolerance Motion and positioning Rotation Stages Mechanical properties Drive properties Miscellaneous °C Mass 0.4 0.4 kg Moved mass 0.088 0.088 kg MTBF 10000 10000 h Connection Sub-D 15 (m) HD Sub-D 15 (m) Recommended controllers / drivers C-863 (single axis) C-884 (up to 6 axes) C-885 with C-863.20C885 (to 40 axes) ACS modular controller C-663.12 (single axis) SMC Hydra (double axis) C-885 with C-663.12C885 (up to 20 axes) ACS modular controller Connecting cables for motor and sensor are not in the scope of delivery and must be ordered separately. Ask about custom designs! Direction of the axes and torques for rotation stages 167 MOTION | POSITIONING DT-34 Miniature Rotation Stage Compact Dimensions, with DC or Stepper Motor DT-34 with DC motor, dimensions in mm n Clear aperture, 10 mm Ø n Compact design n Unidirectional repeatability to 350 µrad n Angular velocity to 675 °/s n Integrated optical reference point switch DT-34 with stepper motor, dimensions in mm Applications >> Incremental Encoder n Automation n Precision Micro Assembly n Scientific Instrumentation Technology Glossary ....................... page 290 168 W W W. P I . W S 3215910030 Active axes 3215920030-0000 With DC motor With stepper motor θZ θZ Unit Tolerance Rotation range 360 360 ° Design resolution 69.62 1724.8 µrad Integrated sensor Rotary encoder – Sensor resolution rotary encoder 2048 – Cts./rev. Minimum incremental motion 700 350 µrad typ. Unidirectional repeatability 700 350 µrad typ. Bidirectional repeatability ±1400 ±1000 µrad typ. Angular velocity 675 195 °/s max. Eccentricity ±50 ±50 µm typ. Flatness ±8 ±8 µm typ. Wobble ±100 ±100 µrad typ. Reference point switch Optical Optical Bearing Ball bearings Ball bearings Worm gear ratio 24986:567 774566:5103 Load capacity / axial force FZ 15 15 N max. Permissible lateral force FX, FY 2.5 2.5 N max. Permissible torque Mx in θX, θY 2.5 2.5 N·m max. N·m max. Rotation Stages Motion and positioning Mechanical properties Drive properties Drive torque 0.9 0.3 Motor type DC motor 2-phase stepper motor Operating voltage, nominal 12 12 V nom. Operating voltage, max. 48 48 V max. Step resolution – 24 Full steps/ rev. Operating temperature range 5 to 40 5 to 40 °C Material Aluminum, black anodized Aluminum, black anodized Mass 0.15 0.15 kg ±5 % Moved mass 0.1 0.1 kg ±5 % Connection Sub-D 15 (m) Sub-D 15 (m) Recommended controllers / drivers C-863 (single axis) C-884 (up to 6 axes) C-885 with C-863.20C885 (to 40 axes) ACS modular controller C-663.12 (single axis) SMC Hydra (double axis) C-885 with C-663.12C885 (up to 20 axes) ACS modular controller Miscellaneous Connecting cables for motor and sensor are not in the scope of delivery and must be ordered separately. Ask about custom designs! 169 MOTION | POSITIONING DT-80 Compact Rotation Stage Large clear aperture n Unlimited travel range n Repeatability to 175 µrad n Maximum velocity 40°/s n Reference point switch DT-80 rotation stage, dimensions in mm DT-80 rotation stage, DC motor, dimensions in mm RS-80 rotation stage, stepper motor, dimensions in mm Direction of the axes and torques for rotation stages Applications >> Incremental Encoder n Automation n Precision Micro Assembly n Scientific Instrumentation Technology Glossary ....................... page 290 170 W W W. P I . W S 64439100 Active axes 64439200 With DC motor With stepper motor* θZ θZ Unit Tolerance Rotation range >360 >360 ° Design resolution 17.453 174.53 µrad Integrated sensor Rotary encoder – Sensor resolution rotary encoder 2000 – Cts./rev. Minimum incremental motion 69.8 69.8 µrad typ. Unidirectional repeatability 175 175 µrad typ. Bidirectional repeatability ±3491 ±3491 µrad typ. Angular velocity 40 30 °/s max. Eccentricity ±30 ±30 µm typ. Flatness ±30 ±30 µm typ. Wobble ±100 ±100 µrad typ. Worm gear ratio 180:1 180:1 Load capacity / axial force 20 20 N max. Permissible lateral force 10 10 N max. Permissible torque Mx in θX, θY 5 5 N·m max. N·m max. Rotation Stages Motion and positioning Mechanical properties Drive properties Drive torque 0.1 0.1 Guide type Ball bearings Ball bearings Motor type DC motor 2-phase stepper motor Operating voltage, nominal 24 24 V nom. Operating voltage, max. 48 48 V max. Reference point switch mechanical mechanical Operating temperature range 5 to 40 5 to 40 Material Aluminum, black anodized, red bronze Aluminum, black anodized, red bronze Mass 0.8 0.8 kg ±5 % Moved mass, unloaded 0.3 0.3 kg ±5 % Connection HD Sub-D 15 (m) HD Sub-D 15 (m) Recommended controllers / drivers C-863 (single axis) C-884 (up to 6 axes) C-885 with C-863.20C885 (to 40 axes) ACS modular controller C-663.12 (single axis) SMC Hydra (double axis) C-885 with C-663.12C885 (up to 20 axes) ACS modular controller Miscellaneous °C * Max. 1.7 A/phase; 200 full step/rev. Connecting cables for motor and sensor are not in the scope of delivery and must be ordered separately. Ask about custom designs! 171 MOTION | POSITIONING M-060 / M-061 / M-062 Precision Rotation Stage Unlimited Travel Range M-06x, dimensions in mm DIMENSIONS M-060.PD M-060.DG M-061.PD M-061.DG M-062.PD M-062.DG A B C D E F G H I J K L M N O P 90 29 25 35 12,5 70 60 20 50 38 20 39 80,8 19 59,3 7 130 34 30 55 15 110 100 35 90 50 20 34 83,8 15 51 4,5 90 29 25 35 12,5 70 60 20 50 38 20 34 83,8 15 51 7 130 34 30 55 15 110 100 35 90 50 20 39 80,8 19 59,3 4,5 150 42 38 65 21,5 130 120 45 110 60 28 39 80,8 19 59,3 – n Unlimited travel range n Very high resolution n Max. velocity 90°/s n Backlash-compensated worm drive n ActiveDrive or DC motor n Direction-sensing reference point switch 150 42 38 65 21,5 130 120 45 110 60 25 34 83,8 15 51 – Applications >> ActiveDrive n Optical >> Incremental Encoder Alignment n Precision Micro Assembly n Scientific Instrumentation Technology Glossary ....................... page 290 172 W W W. P I . W S M-060.PD / M-061.PD / M-062.PD M-060.DG / M-061.DG / M-062.DG Rotation Rotation Rotation range >360 >360 Integrated sensor Rotary encoder Rotary encoder Active axes Unit Tolerance Motion and positioning Sensor resolution 4000 2000 Cts./rev. Design resolution 32 (0.0018) / 17.5 (0.001) / 15 (0.0008) 2.1 (0.00012) / 1.2 (6.9 × 10–5) / 0.96 (5.5 × 10–5) µrad (°) Minimum incremental motion 32 / 17.5 / 15 6.3 / 6 / 5 µrad Backlash 200 / 200 / 240 200 / 200 / 240 µrad Unidirectional repeatability 50 / 50 / 60 50 / 50 / 60 µrad Velocity 90 16 / 9 / 7.5 °/s Worm gear ratio 50:1 / 90:1 / 110:1 50:1 / 90:1 / 110:1 Gear ratio – (28/12)4:1 Load capacity / axial force ±500 / ±550 / ±650 ±500 / ±550 / ±650 N Max. torque θX, θY ±6 / ±6 / ±7 ±6 / ±6 / ±7 N·m max. Max. torque θZ ±4 / ±6 / ±8 ±4 / ±6 / ±8 N·m max. Motor type DC motor, ActiveDrive DC gear motor Operating voltage 24 0 to ±12 V Motor power 30 3 W Reference point switch Hall effect Hall effect Operating temperature range –10 to 40 –10 to 40 Material Aluminum Aluminum Mass 0.94 / 1.88 / 2.76 0.94 / 1.88 / 2.76 Recommended controllers / drivers C-863 (single axis) C-884 (up to 6 axes) C-863 (single axis) C-884 (up to 6 axes) Rotation Stages ° max. Mechanical properties Drive properties Miscellaneous °C kg 173 MOTION | POSITIONING L-611 Precision Rotation Stage High Travel Accuracy n Unlimited travel range n Very high resolution n Maximum velocity 200°/s n O ptional angle measuring system for direct position measurement n ActiveDrive DC, DC, BLDC, and stepper motors n Direction-sensing reference point switch Direction of the axes and torques for rotation stages Applications n Medical >> ActiveDrive Industry n Metrology / Testing n Precision Micro Assembly >> Incremental Encoder n Sample Inspection >> Vacuum-Compatible Versions n Photonics Technology Glossary ....................... page 290 174 W W W. P I . W S L-611 Unit Tolerance Motion θZ Rotation range >360 ° Wobble ±15 µrad Flatness ±1 µm Eccentricity ±2.5 µm Angular velocity L-611.xxSD: 50 L-611.xxAD: 200 L-611.99xxxx: 200 °/s max. L-611.9ASD L-611.993261 L-611.94AD L-611.90AD L-611.xxx232 L-611.90SD Unit Integrated sensor Incremental angle measuring system Incremental angle measuring system Rotary encoder – Sensor signal Sin/cos, 1 V peak-peak A/B quadrature, TTL A/B quadrature, TTL – Sensor resolution rotary encoder – – 20000 – Cts./rev. Sensor resolution angle measuring system 9000 9000 – – Lines/ revolution Tolerance Positioning Design resolution 0.174 3.49 3.49 349 µrad Minimum incremental motion L-611.9ASD: 0.87 L-611.993261: 3.5 17.45 35 8.72 µrad typ. Unidirectional repeatability L-611.9ASD: 0.87 L-611.993261: 3.5 17.45 35 20 µrad typ. µrad typ. µm typ. Bidirectional repeatability ±3.5 ±17.45 ±175 ±175 Reference point switch Hall effect Hall effect Hall effect Hall effect Reference point switch repeatability <2 <2 <2 <2 Unit Tolerance L-611 Mechanical properties Bearing Ball bearings Worm gear ratio 90:1 Load capacity / axial force 100 N max. Permissible lateral force 50 N max. Permissible torque Mx in θX, θY 40 N·m max. Permissible torque Mz in θz 3 N·m max. Moment of inertia 770 kg·mm² ±20 % 175 MOTION | POSITIONING Rotation Stages Active axes L-611.xxSD L-611.xxAD L-611.xx3xxx L-611.xx5xxx Motor type 2-phase stepper motor * DC motor with PWM control DC motor BLDC motor Operating voltage, nominal 24 24 24 24 Unit Tolerance V nom. max. Drive properties Operating voltage, max. 48 24 48 48 V Motor resolution 200 – – – Full steps/ rev. L-611.9xSD L-611.xxAD L-611.993xxx L-611.995232 Unit Operating temperature range 5 to 40 5 to 40 5 to 40 5 to 40 °C Material Aluminum, black anodized, stainless steel, red bronze Aluminum, black anodized, stainless steel, red bronze Aluminum, black anodized, stainless steel, red bronze Aluminum, black anodized, stainless steel, red bronze Tolerance Miscellaneous Mass 2.6 2.6 2.6 2.6 kg ±5 % Moved mass 1.1 1.1 1.1 1.1 kg ±5 % Connection HD Sub-D 26 (m) L-611.9ASD additional Sub-D 9 (m) (sensor) Sub-D 15 (m) HD Sub-D 26 (m) L-611.993261 additional Sub-D 9 (m) (sensor) HD Sub-D 26 (m) Recommended controllers / drivers C-663.12 (single axis) SMC Hydra (double axis) C-885 with C-663.12C885 (up to 20 axes) ACS modular controller C-863 (single axis) C-884 (up to 6 axes) C-885 with C-863.20C885 (to 40 axes) ACS modular controller C-863 (single axis) C-884 (up to 6 axes) C-885 with C-863.20C885 (to 40 axes) ACS modular controller C-891 (single axis) C-885 with C-891.10C885 (up to 20 axes) ACS modular controller * Max. 1.2 A/phase All cables required for operation with the recommended controller are included in the scope of delivery. The cable length is 3 m. Cable for connecting to other controllers can be ordered as accessory. Ask about custom designs! 176 W W W. P I . W S Rotation Stages L-611 with stepper motor, dimensions in mm L-611 with ActiveDrive, DC, and BLDC motor, dimensions in mm 177 MOTION | POSITIONING PRS-200 Precision Rotation Stage Large Aperture, High Travel Accuracy n Unlimited travel range n Repeatability to 0.5 µrad n Load capacity to 50 kg n O ption: Direct position measurement with angle measuring system PRS-200 precision rotation stage, dimensions in mm PRS-200 precision rotation stage, connection for angle measuring system Direction of the axes and torques fo rotation stages PRS-200 precision rotation stage, DC motor, dimensions in mm PRS-200 precision rotation stage, stepper motor, dimensions in mm Applications n Medical >> Incremental Encoder Industry n Metrology / Testing n Precision Micro Assembly n Sample Inspection >> Vacuum-Compatible Versions n Photonics Technology Glossary ....................... page 290 178 W W W. P I . W S 6449911011 6449921011 6449921111 With DC motor With stepper motor With stepper motor and angle measuring system θZ θZ θZ Rotation range >360 >360 >360 Integrated sensor Rotary encoder Sensor signal A/B quadrature, RS-422 – Sin/cos, 1 V peak-peak Sensor resolution rotary encoder 20000 – – Cts./rev. Sensor resolution angle measuring system – – 23600 Lines/ revolution Design resolution 1.75 175.00 0.017 µrad Minimum incremental motion 8.72 8.72 0.50 µrad typ. Unidirectional repeatability 17.44 17.44 0.5 µrad typ. Bidirectional repeatability ±175 ±175 ±5 µrad typ. Wobble ±17.5 ±17.5 ±17.5 µrad typ. Flatness ±1 ±1 ±1 µm typ. Eccentricity ±2.5 ±2.5 ±2.5 µm typ. Angular velocity 75 35 35 °/s max. Bearing Crossed roller bearings Crossed roller bearings Crossed roller bearings Torque, power on 4 4 4 N·m max. Worm gear ratio 180:1 180:1 180:1 Load capacity / axial force 500 500 500 N max. Permissible lateral force 200 200 200 N max. Permissible torque in θX, θY 60 60 60 N·m max. Permissible torque in θZ 4 4 4 N·m max. Motor type DC motor 2-phase stepper motor 2-phase stepper motor Operating voltage, nominal 24 48 48 V nom. Operating voltage, max. 48 48 48 V max. Limit switches 2 × Hall effect 2 × Hall effect 2 × Hall effect Operating temperature range 5 to 40 5 to 40 5 to 40 Material Aluminum, black anodized, stainless steel, red bronze Aluminum, black anodized, stainless steel, red bronze Aluminum, black anodized, stainless steel, red bronze Mass 8 8 8.7 kg ±5 % Moved mass, unloaded 4.3 4.3 4.7 kg ±5 % Connection Sub-D 7W2 (m) (motor) M23 12-pin (m) (sensor) Sub-D 15 (m) Recommended controllers / drivers C-863 (single axis) with C-863.AD12 line driver C-884 (to 6 axes) with C-863.AD12 line driver C-885 with C-863.20C885 (to 40 axes) and C-863.AD12 line driver ACS modular controller C-663.12 (single axis) SMC Hydra (double axis) C-885 with C-663.12C885 (up to 20 axes) ACS modular controller Sub-D 15 (m) (motor) HD Sub-D 26 (m) (sensor) C-663.12 (single axis) SMC Hydra (double axis) C-885 with C-663.12C885 (up to 20 axes) ACS modular controller Active axes Unit Tolerance Motion and positioning ° Rotation Stages Incremental angle measuring system Mechanical properties Drive properties Miscellaneous °C Connecting cables for motor and sensor are not in the scope of delivery and must be ordered separately. Ask about custom designs! 179 MOTION | POSITIONING UPR-100 Ultraprecision Rotation Stage High Dynamics due to Magnetic Drive, High Stability n Unlimited travel range n Velocity to 360 °/s n Repeatability to 1.4 µrad n Clear aperture with 20 mm diameter n Direct drive UPR-100 ultraprecision rotation stage, dimensions in mm Directions of the axes and torques for rotation stages Applications >> Incremental Encoder n Automation n Precision Micro Assembly n Biotechnology n Sample Inspection n Medical n Scientific Instrumentation n Semiconductor Industry n Metrology / Testing >> Torque Motor Technology Glossary ....................... page 290 180 W W W. P I . W S 680591111 Unit Tolerance Motion and positioning Active axes θZ Travel range >360 Integrated sensor Incremental angle measuring system Sensor signal Sin/cos, 1 V peak-peak Sensor resolution 15744 Lines/ revolution Minimum incremental motion 1.4 µrad typ. Unidirectional repeatability 1.4 µrad typ. Bidirectional repeatability ±1.75 µrad typ. Flatness ±2.5 µm typ. Eccentricity ±3.5 µm typ. Wobble ±25 µrad typ. Angular velocity 360 °/s max. Reference point switch Encoder index Rotation Stages ° Mechanical properties Bearing Crossed roller bearings Torque, power on 0.25 N·m Load capacity / axial force 20 N Permissible lateral force 15 N max. Permissible torque in θX, θY 5 N·m max. max. Drive properties Drive type Ironless 3-phase torque motor Intermediate circuit voltage 48 V DC max. Nominal current, effective 1.2 A typ. Peak current, effective 3.8 A typ. Torque constant, effective 0.13 N·m/A typ. Motor constant 0.04 N·m/√W typ. Electrical time constant 0.1 ms Resistance phase-phase 6.6 Ω typ. Inductance phase-phase 0.7 mH typ. Back EMF phase-phase 0.67 V/kRPM max. Number of pole pairs 14 Miscellaneous Operating temperature range 5 to 40 °C MTBF 20000 h Material Aluminum, black anodized Mass 1.2 kg ±5 % Moved mass 0.4 kg ±5 % Connection Sub-D 17W2 (motor) HD Sub-D 26 (m) (sensor) Recommended controller SMC Hydra (double axis) C-891 (single axis) C-885 with C-891.10C885 (up to 20 axes) ACS modular controller Connecting cables for motor and sensor are not in the scope of delivery and must be ordered separately. Ask about custom designs! 181 MOTION | POSITIONING UPR-120 Ultraprecision Rotation Stage Excellent Stability and Travel Accuracy n Unlimited travel range n Velocity to 360 °/s n I ncremental angle measuring system with 0.017 µrad resolution n Clear aperture with 35 mm diameter n Cleanroom compatible n Direct drive UPR-120, dimensions in mm Directions of the axes and torques for rotation stages Applications >> Incremental Encoder n Biotechnology n Precision Micro Assembly n Automation n Sample Inspection n Medical Industry n Scientific Instrumentation n Metrology / Testing n Semiconductor >> Torque Motor Technology Glossary ....................... page 290 182 W W W. P I . W S 6808911130 Unit Tolerance Motion and positioning Active axes θZ Travel range >360 Integrated sensor Incremental angle-measuring system Sensor signal Sin/cos, 1 V peak-peak Sensor resolution 15744 Lines/ revolution Minimum incremental motion 1.4 µrad typ. Unidirectional repeatability 1.4 µrad typ. Bidirectional repeatability ±1.4 µrad typ. Flatness ±1 µm typ. Eccentricity ±3 µm typ. Wobble ±25 µrad typ. Angular velocity 360 °/s max. Reference point switch Encoder index Limit switches Optical Rotation Stages ° Mechanical properties Bearing Crossed roller bearings Torque, power on 0.5 N·m Load capacity / axial force 200 N max. Permissible lateral force 100 N max. Drive properties Drive type Iron-core 2-phase torque motor Intermediate circuit voltage 48 V DC max. Nominal current, effective 7.7 A typ. Torque constant, effective 0.26 N·m/A typ. Resistance phase-phase 2.2 Ω typ. Inductance phase-phase 1.17 mH typ. Back EMF phase-phase 0.18 V·s/rad max. Operating temperature range 5 to 40 °C Material Aluminum, black anodized Miscellaneous MTBF 20000 h Mass 6 kg ±5 % Moved mass 0.8 kg ±5 % Connection Sub-D 9W4 (m) (motor) Sub-D 15 (m) (sensor) Recommended controller SMC Hydra (double axis) C-891 (single axis) C-885 with C-891.10C885 (up to 20 axes) ACS modular controller Connecting cables for motor and sensor are not in the scope of delivery and must be ordered separately. Ask about custom designs! 183 MOTION | POSITIONING UPR-120 Air Ultraprecision Rotation Stage with Air Bearing Excellent Stability and Travel Accuracy n Unlimited travel range n Velocity to 360 °/s n I ncremental angle measuring system with 0.017 µrad resolution n Clear aperture with 35 mm diameter n Air bearings for optimized flatness n Cleanroom compatible n Direct drive UPR-120, dimensions in mm Directions of the axes and torques for rotation stages Applications >> Air Bearing n Biotechnology n Precision Micro Assembly >> Incremental Encoder n Automation n Sample Inspection >> Torque Motor n Medical Industry n Scientific Instrumentation n Metrology / Testing n Semiconductor Technology Glossary ....................... page 290 184 W W W. P I . W S 6824911130 Unit Tolerance Motion and positioning Active axes θZ Travel range >360 Integrated sensor Incremental angle-measuring system Sensor signal Sin/cos, 1 V peak-peak Sensor resolution 15744 Lines/ revolution Minimum incremental motion 0.35 µrad typ. Unidirectional repeatability 0.7 µrad typ. Bidirectional repeatability ±0.7 µrad typ. Flatness ±0.05 µm typ. Eccentricity ±0.1 µm typ. Wobble ±1.25 µrad typ. Angular velocity 360 °/s max. Reference point switch Encoder index Limit switches Optical Rotation Stages ° Mechanical properties Bearing Air bearing Torque, power on 0.7 N·m Load capacity / axial force 200 N max. Permissible lateral force 40 N max. Drive properties Drive type Iron-core 2-phase torque motor Intermediate circuit voltage 48 V DC max. Nominal current, effective 7.7 A typ. Torque constant, effective 0.26 N·m/A typ. Resistance phase-phase 2.2 Ω typ. Inductance phase-phase 1.17 mH typ. Back EMF phase-phase 0.18 V·s/rad max. Operating temperature range 5 to 40 °C Material Aluminum, black anodized Miscellaneous MTBF 20000 h Mass 6.5 kg ±5 % Moved mass 1.1 kg ±5 % Connection Sub-D 9W4 (m) (motor) Sub-D 15 (m) (sensor) Recommended controller SMC Hydra (double axis) C-891 (single axis) C-885 with C-891.10C885 (up to 20 axes) ACS modular controller Connecting cables for motor and sensor are not in the scope of delivery and must be ordered separately. Ask about custom designs! 185 MOTION | POSITIONING A-62x PIglide RM Rotation Stage with Air Bearings Friction-Free, Ideal for Indexing, Positioning, Scanning, Measuring Technology n C leanroom n Motion n L oad capacity to 4170 N n E ccentricity n C an compatible platform diameter from 50 mm to 300 mm and flatness <200 nm be mounted vertically or horizontally A-627.075xx, dimensions in mm Applications n Metrology n Optical >> Absolute Encoder / Testing Alignment n Sample n Scanning >> Incremental Encoder n Scientific Instrumentation >> PIglide Air Bearing Technology >> Torque Motor Inspection Technology Glossary ....................... page 290 186 W W W. P I . W S A-621.025 A-623.025 A-623.050 A-624.050 A-627.075 Unit Tolerance Travel range unlimited, >360° unlimited, >360° unlimited, >360° unlimited, >360° unlimited, >360° Motion platform diameter 50 100 100 150 300 Journal length 25 25 50 50 75 mm Eccentricity (1) 300 175 175 100 75 nm max. Flatness 100 75 75 50 40 nm max. Wobble 5 3 3 2 1 μrad max. Load capacity, axial 134 536 536 1206 4244 N max. Load capacity, radial 57 115 229 344 1203 N max. Load torque MX,Y 0.57 1.7 4.52 22.6 141.3 N·m max. Axial stiffness 26 96 96 210 788 N/µm Radial stiffness 8 18 35 64 204 N/µm Moment of inertia 125 1485 1530 8790 210850 kg·mm² Moved mass 0.4 1.2 1.4 3.2 21.5 kg Overall mass 1.2 3.1 4.5 8.6 50 kg Guide type Air bearing Air bearing Air bearing Air bearing Air bearing Torque motor, 3-phase, brushless, ironless, slotless 48, nominal 80, max. Torque motor, 3-phase, brushless, ironless, slotless Torque motor, 3-phase, brushless, ironless, slotless Torque motor, 3-phase, brushless, ironless, slotless Intermediate circuit voltage, effective Torque motor, 3-phase, brushless, ironless, slotless 48, nominal 80, max. 48, nominal 80, max. 48, nominal 80, max. 48, nominal 80, max. V DC Peak torque 0.21 2.1 2.1 4.71 8.46 N·m typ. Nominal torque 0.07 0.7 0.7 1.57 2.82 N·m typ. Force constant, effective 0.03 0.26 0.26 0.59 0.61 N·m/A typ. Resistance phase-phase 2.7 4.2 4.2 6.7 4.5 Ω Inductance phase-phase 0.1 0.4 0.4 0.9 0.6 mH Back EMF phase-phase 4.1 31.8 31.8 71 74 V/kRPM Motion mm Rotation Stages Mechanical properties Drive properties Drive type max. A-62x.xxxAx A-62x.xxxBx A-62x.xxxCx Integrated sensor Incremental angle measuring system Absolute-measuring angle measuring system Incremental angle measuring system Sensor signal Sin/cos, 1 V peak-peak BiSS-C A/B quadrature, TTL Lines/revolution A-621: 8192 A-623: 15744 A-624: 23600 A-627: 47200 – A-621: 8192 A-623: 15744 A-624: 23600 A-627: 47200 Velocity (2) A-621: 2500 RPM max. A-623: 1200 RPM max. A-624: 600 RPM max. A-627: 500 RPM max. A-621: 2500 RPM max. A-623: 1200 RPM max. A-624: 600 RPM max. A-627: 500 RPM max. A-621: 550 RPM max. (3) A-623: 300 RPM max. (3) A-624: 175 RPM max. (3) A-627: 75 RPM max. (3) Sensor resolution A-621: 0.047 µrad (4) A-623: 0.024 µrad (4) A-624: 0.016 µrad (4) A-627: 0.008 µrad (4) A-621: 0.0015 µrad A-623: 0.0015 µrad A-624: 0.0015 µrad A-627: 0.0015 µrad A-621: 1.94 µrad (5) A-623: 1.02 µrad (5) A-624: 0.68 µrad (5) A-627: 0.33 µrad (5) Bidirectional repeatability ±4 µrad ±4 µrad ±4 µrad Accuracy, with error compensation (6) ±8 µrad ±8 µrad ±8 µrad Reference point switch 1 / revolution, differential pulse over one sensor signal period, 1 V peak-peak – 1 / revolution, one count over one step of the encoder, synchronized to output signal Positioning 187 MOTION | POSITIONING A-62x Miscellaneous Operating pressure (7) 75 to 85 psi (515 to 585 kPa) Air consumption <2 SCFM (56 SLPM) Air quality Clean (filtered to 1.0 μm or better) – ISO 8573-1 Class 1 Oil free – ISO 8573-1 Class 1 Dry (–15 °C dew point) – ISO 8573-1 Class 3 Materials (8) Hardcoat aluminum, stainless steel fasteners (1) Dependent on the quality of the underlying surface, the payload, orientation, and forces that act on the stage from the outside. Please contact PI for application-specific parameters. The specified values are static (no rotary motion during measuring) and without load. (2) Can be limited by imbalance of the payload or the controller and the drive. (3) Assumes a sampling rate of 50 MHz. (4) Assumes 16384x interpolation. Contact PI for the use of other factors. (5) Uses 400x interpolation. Alternative digital encoder resolutions on request. Please contact PI for a quote. (6) The specified values are based on error compensation controlled by the controller. The stage must be ordered with a controller from PI to reach these values. Accuracy values assume short-term duration and do not consider the long-term effects of thermal drift on the stage. (7) To protect the stage against damage, it is recommended to connect an air pressure sensor to the Motion-Stop input of the controller. (8) Customer-specific materials such as rust-free steel on request. Please contact PI for a quote. A-621.025xx, dimensions in mm 188 W W W. P I . W S Rotation Stages A-623.xxxxx, dimensions in mm A-623.025xx: A=75 mm; B=90 mm A-623.050xx: A=100 mm; B=115 mm A-624.050xx, dimensions in mm 189 MOTION | POSITIONING A-63x PIglide RL Low-Profile Rotation Stage with Air Bearing Friction-Free, Motorized n 2 00 mm or 300 mm motion platform diameter n L ow profile, 60 mm n E ccentricity n O ption n D irect and flatness <100 nm for self-locking at rest by magnetic preload Drive A-635.x100 , dimensions in mm Drawing for A-637.x100 available on www.pi.ws Applications n Metrology n Optical >> Absolute Encoder / Testing Alignment n Sample Inspection n Scanning >> Incremental Encoder n Scientific Instrumentation >> PIglide Air Bearing Technology n Semiconductor >> Torque Motor Technology Glossary ....................... page 290 190 W W W. P I . W S A-635 A-637 unlimited, >360° unlimited, >360° Unit Tolerance Motion Travel range Motion platform diameter 200 300 mm Eccentricity (1) 100 100 nm max. Flatness (1) 50 50 nm max. Wobble (1) 2 1 μrad max. Load capacity, axial (2) 200 500 N max. Load capacity, radial (2) 50 200 N max. Load torque, MX,Y (2) 5 10 N·m max. Moment of inertia 25820 72000 kg·mm² Moved mass 4.2 6.4 kg Overall mass 7.5 14 kg Guide type Air bearing, magnetic preload Air bearing, magnetic preload A-63x Unit Tolerance Drive properties Drive type Torque motor, 3-phase, brushless, ironless, slotless Intermediate circuit voltage, effective 48, nominal 80, max. V DC Peak torque 9 N·m typ. Nominal torque 3 N·m typ. Torque constant, effective 0.66 N·m/A typ. Resistance phase-phase 4.5 Ω Inductance phase-phase 0.6 mH Back EMF phase-phase 80 V/kRPM max. A-63x.A100 A-63x.B100 Integrated sensor Incremental angle-measuring system Absolute angle-measuring system Sensor signal Sin/cos, 1 V peak-peak BiSS-C Lines/revolution A-635: 31488 A-637: 47200 – Velocity (3) A-635: 500 rpm max. A-637: 500 rpm max. A-635: 500 rpm max. A-637: 500 rpm max. Sensor resolution A-635: 0.05 µrad (4) A-637: 0.03 µrad (4) A-635: 0.0015 µrad A-637: 0.0015 µrad Bidirectional repeatability ±2 µrad ±2 µrad Accuracy, with error compensation (5) ±6 µrad ±6 µrad Reference point switch 1 / revolution, differential pulse over one sensor signal period, 1 V peak-peak – Positioning A-63x Miscellaneous Operating pressure (6) 75 to 85 psi (515 to 585 kPa) Air consumption <2 SCFM (56 SLPM) Air quality Clean (filtered to 1.0 μm or better) – ISO 8573-1 Class 1 Oil free – ISO 8573-1 Class 1 Dry (–15 °C dew point) – ISO 8573-1 Class 3 Materials Hardcoat aluminum, stainless steel fasteners (1) Dependent on the quality of the underlying surface, the payload, orientation, and forces that act on the stage from the outside. Please contact PI for a pplication-specific parameters. The specified values are static (no rotary motion during measuring) and without load. (2) The loads listed assume a supply pressure of 550 kPa (80 psi). Please contact PI if other pressures are required. (3) May be limited by the payload, payload imbalance, controller or drive. (4) Assumes 4096x interpolation. Contact PI for the use of other factors. (5) The specified values are based on error compensation controlled by the c ontroller. The stage must be ordered with an A-8xx series controller from PI to reach these values. Accuracy values assume short-term duration and do not consider the long-term effects of thermal drift on the stage. (6) To protect the stage against damage, it is recommended to connect an air pressure sensor to the Motion-Stop input of the controller. 191 MOTION | POSITIONING Rotation Stages Mechanical properties WT-85 Motorized Precision Goniometer Compact, Clear Aperture n Rotation range 10° n Repeatability to 8.7 µrad n Load capacity to 2 kg n O ption: Direct position measurement with angle measuring system n C ombination with WT-100 with common pivot point WT-85 goniometer stage, dimensions in mm Direction of the axes and torques for goniometer stages WT-85 goniometer stage, DC motor, dimensions in mm WT-85 goniometer stage, stepper motor, dimensions in mm Applications n Sample >> Direct Metrology >> Vacuum-Compatible Version Inspection n Photonics n Precision Micro Assembly n Optical Alignment n Metrology / Testing n Scientific Instrumentation Technology Glossary ....................... page 290 192 W W W. P I . W S 65409100 65409101 65409200-0000 65409201-0001 DC motor with rotary encoder DC motor with angle measuring system and rotary encoder Stepper motor Stepper motor and angle measuring system θX θX θX θX Rotation range 10 10 10 10 Integrated sensor Rotary encoder Incremental angle measuring system Rotary encoder – Incremental angle measuring system Sensor signal rotary encoder AB quadrature, RS-422 AB quadrature, RS-422 – – Sin/cos, 1 V peak-peak – Sin/cos, 1 V peak-peak Active axes Unit Tolerance Motion and positioning Sensor signal periods angle measuring system – 211 – 211 µrad Sensor resolution rotary encoder 2000 2000 – – Counts/ rev. Design resolution 4.65 2.11 46.5 (full step) 2.11 µrad Minimum incremental motion 17.5 2 17.5 2 µrad typ. Unidirectional repeatability 69.8 8.7 69.8 8.7 µrad typ. Bidirectional repeatability ±69.8 ±8.7 ±69.8 ±8.7 µrad typ. Wobble ±125 ±125 ±125 ±125 µrad typ. Angular velocity 15 15 7 7 °/s max. Limit switches 2 × mechanical 2 × mechanical 2 × mechanical 2 × mechanical Drive screw type Ball screw Ball screw Ball screw Ball screw Drive screw pitch 1 1 1 1 Guide type Ball bearings Ball bearings Ball bearings Ball bearings Gear ratio 675:1 675:1 675:1 675:1 Load capacity 20 20 20 20 N max. Torque Mx, power on 0.75 0.75 0.75 0.75 N·m max. Rotation Stages Sensor signal angle measuring system ° Mechanical properties mm Permissible lateral force 15 15 15 15 N max. Permissible torque in θy, θz 4 4 4 4 N·m max. Motor type DC motor DC motor 2-phase stepper motor 2-phase stepper motor Operating voltage, nominal 24 24 24 24 V nom. Operating voltage, max. 48 48 48 48 V max. Step resolution – – 200 200 Full steps/rev. Operating temperature range 5 to 40 5 to 40 5 to 40 5 to 40 °C Material Aluminum, black anodized Aluminum, black anodized Aluminum, black anodized Aluminum, black anodized Mass 0.9 0.9 0.9 1.1 Connection HD Sub-D 15 (m) (motor/sensor) HD Sub-D 15 (m) (motor) Sub-D 9 (m) (sensor) HD Sub-D 15 (m) Recommended controllers / drivers C-863 (single axis) C-884 (up to 6 axes) C-885 with C-863.20C885 (to 40 axes) ACS modular controller C-863 (single axis) C-884 (up to 6 axes) C-885 with C-863.20C885 (to 40 axes) ACS modular controller C-663.12 (single axis) SMC Hydra (double axis) C-885 with C-663.12C885 (up to 20 axes) ACS modular controller HD Sub-D 15 (m) (motor) Sub-D 9 (m) (sensor) C-663.12 (single axis) SMC Hydra (double axis) C-885 with C-663.12C885 (up to 20 axes) ACS modular controller Drive properties Miscellaneous kg ±5 % Connecting cables for motor and sensor are not in the scope of delivery and must be ordered separately. Ask about custom designs! 193 MOTION | POSITIONING WT-100 Motorized Precision Goniometer Compact, with Large Aperture n Rotation range 10° n Repeatability to 8.7 µrad n Load capacity to 2 kg n O ption: Direct position measurement with angle measuring system n C ombination with WT-85 with common pivot point WT-100 goniometer stage, DC motor, dimensions in mm WT-100 goniometer stage, dimensions in mm WT-100 goniometer stage, stepper motor,dimensions in mm Applications n Sample >> Direct Metrology Inspection n Precision Micro Assembly n Metrology / Testing >> Vacuum-Compatible Version n Photonics n Optical Alignment n Scientific Instrumentation Technology Glossary ....................... page 290 194 W W W. P I . W S 65419100 65419101 65419200-0000 65419201-0001 DC motor with rotary encoder DC motor with angle measuring system and rotary encoder With stepper motor Stepper motor and angle measuring system θX θX θX θX Rotation range 10 10 10 10 Integrated sensor Rotary encoder Incremental angle measuring system Rotary encoder – Incremental angle measuring system Sensor signal rotary encoder AB quadrature, RS-422 AB quadrature, RS-422 – – Sensor signal angle measuring system – Sin/cos, 1 V peak-peak – Sin/cos, 1 V peak-peak Sensor signal periods angle measuring system – 157 – 157 Sensor resolution rotary encoder 2000 2000 – Design resolution 3.49 1.57 34.9 1.57 µrad Minimum incremental motion 17.5 8.7 17.5 8.7 µrad typ. Unidirectional repeatability 70 8.7 70 8.7 µrad typ. Bidirectional repeatability ±70 ±8.7 ±70 ±8.7 µrad typ. Wobble ±125 ±125 ±125 ±125 µrad typ. Angular velocity 15 15 7 7 °/s max. Limit switches 2 × mechanical 2 × mechanical 2 × mechanical 2 × mechanical Drive screw type Ball screw Ball screw Ball screw Ball screw Drive screw pitch 1 1 1 1 Guide type Ball bearings Ball bearings Ball bearings Ball bearings Gear ratio 900:1 900:1 900:1 900:1 Load capacity 20 20 20 20 N Permissible lateral force 15 15 15 15 N max. Permissible torque in θY, θZ 4 4 4 4 N·m max. Motor type DC motor DC motor 2-phase stepper motor 2-phase stepper motor Operating voltage, nominal 24 24 24 24 V nom. Operating voltage, max. 48 48 48 48 V max. Step resolution – – 200 200 Full steps/ rev. Operating temperature range 5 to 40 5 to 40 5 to 40 5 to 40 °C Material Aluminum, black anodized, steel Aluminum, black anodized, steel Aluminum, black anodized, steel Aluminum, black anodized, steel Mass 0.9 0.9 0.9 0.9 Connection HD Sub-D 15 (m) HD Sub-D 15 (m) (motor) Sub-D 9 (m) (sensor) HD Sub-D 15 (m) (motor) HD Sub-D 15 (m) (motor Sub-D 9 (m) (sensor) Recommended controllers / drivers C-863 (single axis) C-884 (up to 6 axes) C-885 with C-863.20C885 (to 40 axes) ACS modular controller C-863 (single axis) C-884 (up to 6 axes) C-885 with C-863.20C885 (to 40 axes) ACS modular controller C-663.12 (single axis) SMC Hydra (double axis) C-885 with C-663.12C885 (up to 20 axes) ACS modular controller C-663.12 (single axis) SMC Hydra (double axis) C-885 with C-663.12C885 (up to 20 axes) ACS modular controller Active axes Unit Tolerance Motion and positioning ° µrad Rotation Stages Cts./rev. Mechanical properties mm max. Drive properties Miscellaneous kg ±5 % Connecting cables for motor and sensor are not in the scope of delivery and must be ordered separately. Ask about custom designs! 195 MOTION | POSITIONING WT-90 Motorized Precision Goniometer Long Travel Range n Rotation range 90° n Repeatability to 2.7 µrad n Load capacity to 8 kg n O ption: Direct position measurement with angle measuring system n C ombination with WT-120 with common pivot point WT-90 goniometer stage, dimensions in mm Direction of the axes and torques for goniometer stages WT-90 goniometer stage, DC motor, dimensions in mm WT-90 goniometer stage, stepper motor, dimensions in mm Applications n Sample >> Direct Metrology Inspection n Precision Micro Assembly n Metrology / Testing >> Vacuum-Compatible Version n Photonics n Optical Alignment n Scientific Instrumentation Technology Glossary ....................... page 290 196 W W W. P I . W S Active axes 65509100 65509200 65509201 With DC motor With stepper motor With stepper motor and angle measuring system θX θX θX Unit Tolerance Motion and positioning 90 90 90 Rotary encoder – Incremental angle measuring system Sensor signal rotary encoder AB quadrature, RS-422 – – – Sin/cos, 1 V peak-peak Sensor signal angle measuring system Sensor resolution rotary encoder 20000 – – Sensor signal periods angle measuring system – – 269.3 ° µrad Design resolution 1.047 105 2.69 µrad Minimum incremental motion 52.4 4.8 2.7 µrad typ. Unidirectional repeatability 87 9.6 17.5 µrad typ. Bidirectional repeatability ±350 ±175 ±17.5 µrad typ. Wobble ±125 ±125 ±125 µrad typ. °/s max. Angular velocity 15 10 10 Limit switches 2 × mechanical 2 × mechanical 2 × mechanical Rotation Stages Rotation range Integrated sensor Mechanical properties Guide type Ball bearings Ball bearings Ball bearings Drive screw type Worm gear Worm gear Worm gear 300:1 300:1 300:1 Drive screw pitch Worm gear ratio mm Torque, power on 2.5 2.5 2.5 N·m max. Holding torque, power off 2.5 2.5 2.5 N·m max. Load capacity 80 80 80 N max. Permissible lateral force 50 50 50 N max. Permissible torque in θY, θZ 12 12 12 N·m max. Motor type DC motor 2-phase stepper motor 2-phase stepper motor Step resolution – 200 200 Full steps/ rev. °C Drive properties Miscellaneous Operating temperature range 5 to 40 5 to 40 5 to 40 Material Aluminum, black anodized, stainless steel, red bronze Aluminum, black anodized, stainless steel, red bronze Aluminum, black anodized, stainless steel, red bronze Mass 2.8 2.8 3 Connection Sub-D 15 (m) HD Sub-D 15 (m) HD Sub-D 15 (m) (motor) Sub-D 9 (m) (sensor) Recommended controllers / drivers C-863 (single axis) C-884 (up to 6 axes) C-885 with C-863.20C885 (to 40 axes) ACS modular controller C-663.12 (single axis) SMC Hydra (double axis) C-885 with C-663.12C885 (up to 20 axes) ACS modular controller C-663.12 (single axis) SMC Hydra (double axis) C-885 with C-663.12C885 (up to 20 axes) ACS modular controller kg ±5 % Connecting cables for motor and sensor are not in the scope of delivery and must be ordered separately. Ask about custom designs! 197 MOTION | POSITIONING WT-120 Motorized Precision Goniometer Long Travel Range, High Loads n Rotation range 90° n Repeatability to 17.5 µrad n Load capacity to 20 kg n O ption: Direct position measurement with angle measuring system n C ombination with WT-90 with common pivot point WT-120 goniometer stage, dimensions in mm Direction of the axes and torques for goniometer stages WT-120 goniometer stage, DC motor, dimensions in mm WT-120 goniometer stage, stepper motor, dimensions in mm Applications n Sample >> Direct Metrology Inspection n Precision Micro Assembly n Metrology / Testing >> Vacuum-Compatible Version n Photonics n Optical Alignment n Scientific Instrumentation Technology Glossary ....................... page 290 198 W W W. P I . W S Active axes 65609110 65609200 65609211 With DC motor With stepper motor With stepper motor and angle measuring system θX θX θX Unit Tolerance Motion and positioning 90 90 90 Rotary encoder – Incremental angle measuring system Sensor signal rotary encoder AB quadrature, RS-422 – – – Sin/cos, 1 V peak-peak Sensor signal angle measuring system Sensor resolution rotary encoder 20000 – – Sensor signal periods angle measuring system – – 150 ° µrad Design resolution 1.745 174.5 1.5 µrad Minimum incremental motion 69.8 69.8 17.5 µrad typ. Unidirectional repeatability 87 87 17.5 µrad typ. Bidirectional repeatability ±350 ±350 ±17.5 µrad typ. Wobble ±125 ±125 ±125 µrad typ. °/s max. Angular velocity 30 25 25 Limit switches 2 × mechanical 2 × mechanical 2 × mechanical Rotation Stages Rotation range Integrated sensor Mechanical properties Guide type Ball bearings Ball bearings Ball bearings Drive screw type Worm gear Worm gear Worm gear 180:1 180:1 180:1 Drive screw pitch Worm gear ratio mm Torque, power on 8 8 8 N·m max. Load capacity 200 200 200 N max. Permissible lateral force 90 90 90 N max. Permissible torque in θY, θZ 25 25 25 N·m max. Motor type DC motor 2-phase stepper motor 2-phase stepper motor Step resolution – 200 200 Full steps/ rev. °C Drive properties Miscellaneous Operating temperature range 5 to 40 5 to 40 5 to 40 Material Aluminum, black anodized, stainless steel, red bronze Aluminum, black anodized, stainless steel, red bronze Aluminum, black anodized, stainless steel, red bronze Mass 11.5 11.5 11.5 Connection Sub-D 15 (m) LEMO ERA.3S.316 16-pin LEMO ERA.3S.316 16-pin (motor) Recommended controllers / drivers C-863 (single axis) with C-863.AD12 line driver C-663.12 (single axis) Sub-D 9 (m) (sensor) C-663.12 (single axis) C-884 (to 6 axes) with C-863.AD12 line driver SMC Hydra (double axis) SMC Hydra (double axis) C-885 with C-663.12C885 (up to 20 axes) C-885 with C-663.12C885 (up to 20 axes) ACS modular controller ACS modular controller C-885 with C-863.20C885 (to 40 axes) and C-863.AD12 line driver kg ±5 % ACS modular controller Connecting cables for motor and sensor are not in the scope of delivery and must be ordered separately. Ask about custom designs! 199 MOTION | POSITIONING Linear Actuators 200 W W W. P I . W S Voice Coil Actuators ................................................................................................................................................................. 202 V-900KPIC PIMag® VC Vertical Linear Actuator ............................................................... 202 V-273 PIMag® Voice Coil Linear Actuator ........................................................................ 204 V-275 PIMag® Voice Coil Linear Actuator ........................................................................ 208 V-277 PIMag® High-Load Linear Actuator ....................................................................... 212 Screw-Drive Precision Actuators .............................................................................................................................................. 216 L-220 High-Resolution Linear Actuator ........................................................................... 216 M-227 High-Resolution Linear Actuator with DC Motor ................................................. 218 M-228 / M-229 High-Resolution Linear Actuator with Stepper Motor ............................. 220 M-230 High-Resolution Linear Actuator with DC Motor ................................................. 222 M-232 High-Resolution Linear Actuator with DC Motor ................................................. 224 M-235 High-Resolution Linear Actuator with DC Motor ................................................. 226 L-239 High-Load Linear Actuator .................................................................................... 228 M-238 High-Load Linear Actuator with DC Motor .......................................................... 230 201 MOTION | POSITIONING Linear Actuators High-Load Screw-Drive Actuators ............................................................................................................................................ 226 V-900KPIC PIMag® VC Vertical Linear Actuator Compact with Integrated Position Sensor n T ravel n H igh range 1.5 mm scanning frequencies, fast step-and-settle n I ntegrated linear encoder with 0.1 µm resolution n W ear-free flexure guide for long lifetime n C ompact n O EM dimensions linear actuator V-900KPIC, dimensions in mm Applications n Sample Inspection n Precision Micro Assembly n Electronics Manufacturing >> Flexure Guiding System n Metrology n General / Testing Automation >> Incremental Encoder >> PIMag® Voice Coil Technology Glossary ....................... page 290 202 W W W. P I . W S V-900KPIC Active axes Unit Tolerance Z Motion and positioning Travel range 1.5 Integrated sensor Optical linear encoder mm Servo update rate 10* Resolution, open loop 10* nm typ. Resolution, closed loop 100 nm typ. kHz Linearity error, closed loop ±1 % typ. Repeatability ±500 nm typ. Motion straightness ±5 µm ±5 Velocity, open loop 250 mm/s max. Velocity, closed loop 45 mm/s Mechanical properties Moved mass 10 g typ. Average push/pull force 0.5 N nominal Push/pull force 0.8 N max. Force constant 4 N/A typ. Drive properties Motor type PIMag® Voice Coil Drive Magnet material NdFeB (N38SH) Coil resistance 8.8 Ω typ. Coil inductance 0.8 mH typ. Average continuous current 120** mA max. Peak current (max. 3 s) 200 mA Operating temperature range 10 to 45 °C Material Aluminum Mass 40 g Cable length 0.2 m Motor / sensor connection Molex 12 pins Lifetime >108 Recommended controller C-413 (plug adapter required) cycles Linear Actuators Miscellaneous ±5 % min. * With C-413 controller. ** Do not exceed for continuous operation. The settling time for a 100 µm step is approx. 50 ms. 203 MOTION | POSITIONING V-273 PIMag® Voice Coil Linear Actuator High Dynamics and Inexpensive n T ravel ranges to 20 mm n V elocity to 100 mm/s n I ntegrated n O ptional linear encoder, 0.01 µm resolution force sensor with 1 mN resolution PIMag® Voice Coil Voice coil drives consist of 2 essential components: A permanent magnet and a coil, which is located in the air gap of the magnetic field. When current flows through the coil, it moves in the magnetic field of the permanent magnet. The direction of motion depends on the polarity. Thanks to their low weight and friction-free drive principle, voice coil drives are particularly suitable for applications, which require high dynamics and high velocities at limited travel ranges. High scan frequencies and precision positioning are also possible with these drives, because they are free of the effects of hysteresis. Highly accurate position measuring with incremental linear encoder Noncontact optical linear encoders measure the actual position directly at the motion platform with the greatest accuracy so that nonlinearity, mechanical play or elastic deformation have no influence on position measuring. Applications n Sample >> Incremental Encoder Inspection n Precision Micro Assembly n Electronics V-273.441 with force sensor n Metrology n General / Testing >> PIMag® Voice Coil Automation Manufacturing Technology Glossary ....................... page 290 204 W W W. P I . W S V-273.440 V-273.441 with force sensor Active axes Unit Tolerance Z Motion and positioning Travel range 20 Integrated sensor Optical linear encoder mm Sensor resolution 10 (1) nm max. Minimum incremental motion 100 nm typ. Linearity error, closed loop 1 % typ. Repeatability ±0.5 µm typ. Velocity 100 mm/s max. Force sensor resolution (optional) 1 mN max. Smallest force step (optional) 5 mN typ. Mechanical properties Bearing / guide Recirculating ball bearings Motion straightness ±20 µm ±5 % Moved mass without load 100 (230 with force sensor) g typ. Motor type PIMag® Voice Coil Drive, moving coil Coil resistance 16 Ω typ., at 20 °C Coil inductance 6 mH typ., at 20 °C Time constant 0.375 ms Back EMF 8 V·s/m Force constant 8 N/A Motor constant 2 N/(√W) Current constant 0.125 A/N typ. Average continuous current 375 (2) mA max. Peak current (max. 3 s) 800 mA Average push/pull force 3 N Power dissipation of the coil with 100 % duty cycle 2.25 W Maximum push/pull force 6 N Operating temperature range 10 to 60 °C Material Aluminum Mass 660 (790 with force sensor) g Cable length 1 m Motor / sensor connection Sub-D 15 (m) with force sensor: 2 × Sub-D 15 (m) Lifetime >107 Recommended controller C-413.2x Linear Actuators Drive properties typ. nominal max. Miscellaneous cycles ±5 % min. (1) With C-413 controller. (2) Do not exceed for continuous operation. 205 MOTION | POSITIONING V-273.440, dimensions in mm 206 W W W. P I . W S Linear Actuators V-273.441, dimensions in mm 207 MOTION | POSITIONING V-275 PIMag® Voice Coil Linear Actuator High Dynamics, with Optional Force Control n Push force up to 10 N n Velocity to 600 mm/s n Integrated linear encoder, 0.01 µm resolution n Weight force compensation n Optional force sensor with 1 mN resolution PIMag® Voice Coil Voice coil drives consist of 2 essential components: A permanent magnet and a coil, which is located in the air gap of the magnetic field. When current flows through the coil, it moves in the magnetic field of the permanent magnet. The direction of motion depends on the polarity. Thanks to their low weight and friction-free drive principle, voice coil drives are particularly suitable for applications, which require high dynamics and high velocities at limited travel ranges. High scan frequencies and precision positioning are also possible with these drives, because they are free of the effects of hysteresis. Highly accurate position measuring with incremental linear encoder Noncontact optical linear encoders measure the actual position directly at the motion platform with the greatest accuracy so that nonlinearity, mechanical play or elastic deformation have no influence on position measuring. Applications n Sample >> Incremental Encoder Inspection n Precision Micro Assembly n Electronics n Metrology n General / Testing >> PIMag® Voice Coil Automation Manufacturing Technology Glossary ....................... page 290 208 W W W. P I . W S V-275.430 V-275.431 with force sensor Active axes Unit Tolerance Z Motion and positioning Travel range 10 Integrated sensor Optical linear encoder mm Sensor resolution 10 (1) nm max. Minimum incremental motion 100 nm typ. Linearity error, closed loop 1 % typ. Repeatability ±0.5 µm typ. Velocity 600 mm/s max. Force sensor resolution (optional) 1 mN max. Smallest force step (optional) 5 mN typ. Mechanical properties Bearing / guide Linear recirculating ball bearings Motion straightness ±5 µm ±5 % Moved mass without load 150 g typ. Motor type PIMag® voice coil drive, moving coil Coil resistance 5.7 Ω typ., at 20 °C Coil inductance 3.75 mH typ., at 1 kHz Time constant 0.65 ms Back EMF 10 V·s/m Force constant 10 N/A Motor constant 4.2 N/(√W) Current constant 0.1 A/N typ. Average continuous current 700 (2) mA max. Peak current (max. 3 s) 1500 mA Average push/pull force 7 N Power dissipation of the coil with 100 % duty cycle 4 W Maximum push/pull force 15 N Operating temperature range 10 to 60 °C Material Aluminum Mass 800 g Cable length 3 m Motor / sensor connection Sub-D 25 (m), with force sensor Sub-D 9 (m) Lifetime >107 Recommended controller C-413.1x Linear Actuators µm Drive properties typ. nominal max. Miscellaneous cycles ±5 % min. (1) With C-413 controller. (2) Do not exceed for continuous operation. 209 MOTION | POSITIONING V-275.430, dimensions in mm 55 29 20 105 59.5 3.5 1 2 x M3 10 40 28 12 8 1 0.5 A B 4 H7 5 17 5 x M3 B 5 4 x M4 8 41 60 0.02 A the given flatness value is also a recommandation for the flatness of the customer mounting interface ~ 129.5 (max. pos.) 55 ~ 119.5 (min. pos.) 111.5 25 6 25 22.5 61.6 55.5 0 1 4 H7 ~2 22 28 3.5 4 x M3 40.5 5 Transportsicherung transport lock 210 W W W. P I . W S M3 thread Signal-GND of Probe Tip 105 1 M3 5 28 40 4 H7 59.5 3.5 V-275.431, dimensions in mm B 6 41 0.5 A B A ~ 133.2 (max. pos.) ~ 123.7 (min. pos.) ~ 113.5 (min. pos.) 111.5 47 25 6 0.02 the given flatness value is also a recommendation for the flatness of the customer mounting interface 55 25 60 8 Linear Actuators 4 x M4 53.5 28 1 4 H7 3.5 4 x M3 0 5 ~2 28 22 25 22.5 61.6 55.5 Transportsicherung transport lock 3.8 40.5 211 MOTION | POSITIONING V-277 PIMag® High-Load Linear Actuator Voice Coil Drive for High Velocity n F orce up to 20 N n V elocity up to 750 mm/s n I ntegrated n W eight linear encoder, 0.01 µm resolution force compensation n O ptional force sensor with 1 mN resolution PIMag® Voice Coil Voice coil drives consist of 2 essential components: A permanent magnet and a coil, which is located in the air gap of the magnetic field. When current flows through the coil, it moves in the magnetic field of the permanent magnet. The direction of motion depends on the polarity. Thanks to their low weight and friction-free drive principle, voice coil drives are particularly suitable for applications, which require high dynamics and high velocities at limited travel ranges. High scan frequencies and precision positioning are also possible with these drives, because they are free of the effects of hysteresis. Highly accurate position measuring with incremental linear encoder Noncontact optical linear encoders measure the actual position directly at the motion platform with the greatest accuracy so that nonlinearity, mechanical play or elastic deformation have no influence on position measuring. Applications n Sample >> Incremental Encoder Inspection n Precision Micro Assembly n Electronics n Metrology n General / Testing >> PIMag® Voice Coil Automation Manufacturing Technology Glossary ....................... page 290 212 W W W. P I . W S V-277.630 V-277.631 with force sensor Active axes Unit Tolerance Z Motion and positioning Travel range 15 Integrated sensor Optical linear encoder mm Sensor resolution 10 (1) nm max. Minimum incremental motion 100 nm typ. Linearity error, closed loop 1 % typ. Repeatability ±0.5 µm typ. Velocity 750 mm/s max. Force sensor resolution 1 mN max. Force resolution, closed-loop 5 mN typ. Mechanical properties Bearing / guide Linear recirculating ball bearings Motion straightness ±5 µm ±5 % Moved mass without load 190 g typ. Motor type PIMag® voice coil drive, moving coil Coil resistance 6.3 Ω typ., at 20 °C Coil inductance 2.70 mH typ., at 1 kHz, at 20 °C Time constant 0.43 ms typ. Back EMF 14 V·s/m Force constant 13.5 N/A Motor constant 5.6 N/(√W) Current constant 0.072 A/N typ. Average continuous current 740 (2) mA max. Peak current (max. 3 s) 1500 mA Average push/pull force 10 N Power dissipation of the coil with 100 % duty cycle 3.2 W Maximum push/pull force 20 N Operating temperature range 10 to 60 °C Material Aluminum Mass 1850 g Cable length 3 m Motor / sensor connection Sub-D 25 (m), with force sensor Sub-D 9 (m) Lifetime >107 Recommended controller C-413.1x Linear Actuators Drive properties typ. nominal max. Miscellaneous cycles ±5 % min. (1) With C-413 controller. (2) Do not exceed for continuous operation. 213 MOTION | POSITIONING V-277.630, dimensions in mm 5 x M3 5 2 x M3 5 4 H7 90 40 175 (max. pos.) 160 (min. pos.) 154 140.5 85.7 79.7 73.5 67 59.5 14.5 7.5 6.5 0 1 3 72 45 6 134 B 7.5 A 0.02 the given flatness value is also a recommendation for the flatness of the customer mounting interface 4 x M4 64.5 5 12 4 H7 46 45 43 37 31 28 0 4 x M4 7.5 ~ 2.4 0.5 A B 85.7 79.7 73.5 60 25 10 72 20 5.5 64 5 Transportsicherung transport lock 214 W W W. P I . W S M3 thread Signal-GND of Probe Tip 64.5 5 V-277.631, dimensions in mm M3 5 34 72 60 25 6 4 H7 1 B 4 x M4 12 0.02 the given flatness value is also a recommendation for the flatness of the customer mounting interface 14.5 7.5 6.5 0 4 H7 5 0.5 A B A ~ 211.2 (max. pos.) ~ 196.2 (min. pos.) ~ 184.7 (min. pos.) 140.5 85.7 79.7 73.5 54 48 36 34 33 32 0 47 25 Linear Actuators 85.7 79.7 73.5 67 59.5 40 85 ~3 72 45 6 90 Transportsicherung transport lock 64 5.5 215 MOTION | POSITIONING L-220 High-Resolution Linear Actuator Suitable for a High Number of Cycles n F orces up to 125 N n T ravel ranges 13 to 77 mm (½” to 3”) n D C or stepper motor n N onrotating tip n V acuum-compatible versions to 10–9 hPa on request L-220, dimensions in mm L-220.10SG L-220.10DG L-220.20SG L-220.20DG L-220.50SG L-220.50DG L-220.70SG L-220.70DG Travel A B C 13 13 26 26 52 52 77 77 26 26 39 39 65 65 90 90 148,3 155,2 161,5 168,4 186,6 193,5 211,6 218,5 13 19,9 13 19,9 13 19,9 13 19,9 Applications n Electronics n General n Optical >> Incremental Encoder Manufacturing Automation Alignment n Precision Micro Assembly n Scientific Instrumentation >> Vacuum-Compatible Versions n Semiconductor Technology Glossary ....................... page 290 216 W W W. P I . W S L-220.x0DG L-220.x0SG High precision, with DC gear motor Stepper motor with gearhead X X Travel range 13 / 26 / 52 / 77 13 / 26 / 52 / 77 Integrated sensor Rotary encoder – Sensor resolution 2048 – Cts./rev. Design resolution 0.022 0.55 (full step) µm typ. Minimum incremental motion 0.1 0.1 µm typ. Unidirectional repeatability 0.5 0.5 µm typ. Bidirectional repeatability ±1 ±1 µm typ. Velocity 3.5 0.8 mm/s max. Drive screw type Ball screw Ball screw Thread pitch 1 1 Gear ratio 12493:567 387283:5103 Motor resolution – 384 (29184)* Steps/rev. Push/pull force 125 125 N max. Holding force 80 125 N typ. Permissible lateral force 1 1 N max. Motor type DC motor with gearhead 2-phase stepper motor with gearhead Operating voltage, nominal 12 12 V nom. Operating voltage, max. 24 48 V max. Step resolution – 24 Full steps/rev. Limit and reference point switches Hall effect Hall effect Operating temperature range 5 to 40 5 to 40 Material Stainless steel, red brass Stainless steel, red brass Mass 0.21 / 0.23 / 0.26 /0.29 0.23 / 0.25 / 0.28 /0.32 kg ±5 % Moved mass 0.02 / 0.02 / 0.025 / 0.030 0.02 / 0.02 / 0.025 / 0.030 kg ±5 % Cable length 0.5 0.5 m ±10 mm Connector HD Sub-D 26 (m) HD Sub-D 26 (m) Recommended controllers / drivers C-863 (single axis) C-884 (up to 6 axes) C-885 with C-863.20C885 (to 40 axes) ACS modular controller C-663.12 (single axis) SMC Hydra (double axis) C-885 with C-663.12C885 (up to 20 axes) ACS modular controller Motion axes Unit Tolerance Motion and positioning mm Mechanical properties Linear Actuators mm Drive properties Miscellaneous °C All cables required for operation with the recommended controller are included in the scope of delivery. The cable length is 3 m. Cable for connecting to other controllers can be ordered as accessory. Ask about custom designs! 217 MOTION | POSITIONING M-227 High-Resolution Linear Actuator with DC Motor With Optional Piezo Drive n M in. incremental motion 0.05 µm n N onrotating n F lat end piece tip included n S ubnanometer resolution with optional piezo drive n F or installing into mechanical systems with external limit switches M-227, dimensions in mm Applications n General >> Incremental Encoder Automation Technology Glossary ....................... page 290 218 W W W. P I . W S M-227.10 M-227.25 M-227.50 Unit Tolerance Travel range 10 / 25 / 50 mm Integrated sensor Rotary encoder Sensor resolution 2048 Cts./rev. Design resolution 0.0035 µm typ. Minimum incremental motion 0.05 µm typ. Backlash 10 µm typ. Unidirectional repeatability ±0.1 µm typ. Velocity 0.75 mm/s max. Motion and positioning Mechanical properties Drive screw Leadscrew Thread pitch 0.5 Gear ratio 69.12:1 Push/pull force (1) 40 N max. Permissible lateral force 0.1 N max. mm Motor type DC gear motor Operating voltage 0 to ±12 V Motor power 1.78 W Operating temperature range –20 to 65 °C Material Aluminum anodized, chrome steel Mass 0.16 / 0.22 / 0.26 kg ±5 % Cable length 0.1 m + 3 m extension cable (included) m ±10 mm Connector Sub-D 15 Recommended controllers / drivers C-863 C-884 Linear Actuators Drive properties nominal Miscellaneous (1) Higher forces on request. Ask about custom designs! 219 MOTION | POSITIONING M-228 / M-229 High-Resolution Linear Actuator with Stepper Motor Compact and Extremely Inexpensive n Travel ranges 10 and 25 mm n High load capacity 80 N n Resolution 0.36 nm with gearhead version n Velocity to 4 mm/s n Direct drive versions include handwheel n N oncontact limit and reference point switches M-228.11S, dimensions in mm M-228.10S, dimensions in mm M-229.26S, dimensions in mm M-229.25S, dimensions in mm Applications n General n >> Incremental Encoder Automation Scientific Instrumentation Technology Glossary ....................... page 290 220 W W W. P I . W S M-228.10S M-228.11S M-229.25S M-229.26S Slim design Lower cost, higher velocity Slim design Lower cost, higher velocity Unit Tolerance Motion and positioning Travel range 10 10 25 25 mm Design resolution (1) 0.00036 0.00061 0.00036 0.00061 µm typ. Min. incremental motion (1) 1 1 1 1 µm typ. Backlash (2) 5 10 10 10 µm typ. Unidirectional repeatability ±2 ±2 ±2 ±2 µm typ. Velocity 1.5 4 1.5 4 mm/s max. Reference point switch repeatability 1 1 1 1 µm typ. Drive screw type Leadscrew Leadscrew Leadscrew Leadscrew Drive screw pitch 0.5 0.5 0.5 0.5 Gear ratio 256/9 – 256/9 – Push/pull force capacity 20 50 50 80 Motor type 2-phase stepper motor 2-phase stepper motor 2-phase stepper motor 2-phase stepper motor Step resolution 24 400 24 400 steps/rev. Nominal current per phase 250 850 1000 850 mA Limit and reference point switches Hall effect Hall effect Hall effect Hall effect Operating temperature range –20 to 65 –20 to 65 –20 to 65 –20 to 65 Material Al (anodized), steel, brass Al (anodized), steel, brass Al (anodized), steel, brass Al (anodized), steel, brass Mass 0.23 0.36 0.4 0.61 kg ±5 % Cable length 0.5 m, incl. 3 m cable 0.6 m, incl. 3 m cable 0.5 m, incl. 3 m cable 0.6 m, incl. 3 m cable m ±10 mm Connector Sub-D 15 Sub-D 15 Sub-D 15 Sub-D 15 Recommended controller C-663.12 C-663.12 C-663.12 C-663.12 Mechanical properties mm N max. Linear Actuators Drive properties max. Miscellaneous °C (1) With recommended controller. (2) With preload. Avoid lateral forces on the pusher! Ask about custom designs! 221 MOTION | POSITIONING M-230 High-Resolution Linear Actuator with DC Motor Nonrotating Tip, Limit Switches n Min. incremental motion 0.05 µm n Travel ranges 10 and 25 mm n Nonrotating end piece n Velocity 0.8 mm/s n MTBF >20000 h M-230, dimensions in mm Applications n General >> Incremental Encoder Automation n Optical Alignment n Scientific Instrumentation Technology Glossary ....................... page 290 222 W W W. P I . W S M-230.10 M-230.25 Unit Tolerance High precision, with DC gear motor Motion and positioning Travel range 10 / 25 Integrated sensor Rotary encoder mm Sensor resolution 2048 Cts./rev. Design resolution 0.0046 µm typ. Minimum incremental motion 0.05 µm typ. Backlash 2 µm typ. Unidirectional repeatability ±0.1 µm typ. Velocity 0.8 mm/s max. Reference point switch repeatability 1 µm typ. Mechanical properties Drive screw Leadscrew Thread pitch 0.4 Gear ratio 42.92063:1 Push/pull force capacity 70 N max. Permissible lateral force 30 / 20 N max. mm Motor type DC gear motor Operating voltage 0 to ±12 V Motor power 1.78 W Limit and reference point switches Hall effect Linear Actuators Drive properties nominal Miscellaneous Operating temperature range –20 to 65 Material Al (anodized), steel, brass °C Mass 0.3 / 0.35 Connector 15-pin sub-D, incl. encoder driver Recommended controllers / drivers C-863 C-884 kg ±5 % Ask about custom designs! 223 MOTION | POSITIONING M-232 High-Resolution Linear Actuator with DC Motor Compact due to Folded Drive n Travel range 17 mm n Min. incremental motion 0.1 µm n Velocity to 1.5 mm/s n Closed-loop DC motors n Rotating end piece, rotating pusher n MTBF >5000 h M-232, dimensions in mm Applications n General >> Incremental Encoder Automation n Optical Alignment n Scientific Instrumentation Technology Glossary ....................... page 290 224 W W W. P I . W S M-232.17 Unit Tolerance High resolution, closed loop Motion and positioning Travel range 17 Integrated sensor Rotary encoder mm Sensor resolution 2048 Cts./rev. Design resolution 0.007 µm typ. Minimum incremental motion 0.1 µm typ. Backlash 2 µm typ. Unidirectional repeatability ±0.2 µm typ. Velocity 1.5 mm/s max. Mechanical properties Drive screw Leadscrew Thread pitch 0.4 Gear ratio 28.44444:1 Motor resolution – steps/rev. Push/pull force 40 N mm max. Motor type DC gear motor Operating voltage 0 to ±12 V Motor power 1.78 W Limit switches Hall effect Linear Actuators Drive properties Miscellaneous Operating temperature range –20 to 65 Material Aluminum anodized, chrome steel °C Mass 0.17 kg ±5 % Cable length 0.5 + 3 m extension cable (included) m ±10 mm Connector 15-pin sub-D, incl. encoder driver Recommended controllers / drivers C-863 C-884 Avoid lateral forces on the pusher! Ask about custom designs! 225 MOTION | POSITIONING M-235 High-Resolution Linear Actuator with DC Motor Highly Dynamic, High Forces up to 120 N n Travel ranges 20 and 50 mm n Min. incremental motion to 0.1 µm n DC motor allows high velocities n Push/pull force capacity to 120 N n MTBF >10000 h n Nonrotating end piece n Recirculating ball screw 2,5 9,5 6 20 h6 M-235.2DD, M-235.2DG, M-235.5DD and M-235.5DG, dimensions in mm 4 10 22 M6 min.12 27 M20x0,5 166 (M-235.2Dx) 196 (M-235.5Dx) 1...21 (M-235.2Dx) 1...51 (M-235.5Dx) Applications n General >> Incremental Encoder Automation n Optical Alignment n Scientific Instrumentation Technology Glossary ....................... page 290 226 W W W. P I . W S M-235.2DG M-235.5DG M-235.2DD M-235.5DD Unit Tolerance High precision, with DC gear motor High dynamics Travel range 20 / 50 20 / 50 Integrated sensor Rotary encoder Rotary encoder Sensor resolution 2048 2048 Cts./rev. Design resolution 0.016 0.5 µm typ. Minimum incremental motion 0.1 1.5 µm typ. Backlash 2 2 µm typ. Unidirectional repeatability ±0.1 ±0.5 µm typ. Velocity 2 30 mm/s max. Gear ratio 29.6:1 – Push/pull force 120 50 N max. Permissible lateral force 8 8 N max. Motor type DC gear motor DC motor Operating voltage 0 to ±12 0 to ±12 V Motor power 4 17 W Limit and reference point switches Hall effect Hall effect Operating temperature range –20 to 65 –20 to 65 Material Aluminum anodized, chrome steel Aluminum anodized, chrome steel Mass 0.55 / 0.7 0.5 / 0.65 kg ±5 % Cable length 0.5 m, 3 m cables incl. 0.5 m, 3 m cables incl. m ±10 mm Connector 15-pin sub-D, incl. encoder driver 15-pin sub-D, incl. encoder driver Recommended controllers / drivers C-863 C-884 C-863 C-884 Motion and positioning mm Mechanical properties Linear Actuators Drive properties nominal Miscellaneous °C Ask about custom designs! 227 MOTION | POSITIONING L-239 High-Load Linear Actuator Dynamic, High-Resolution Precision Drive L-239.50SD with stepper motor, dimensions in mm n obust design for industrial R environments n High feed force to 300 N n Travel range 52 mm (2”) n inimum incremental motion M 0.1 µm n Velocity to 50 mm/s n Preloaded, low-friction ball screw n acuum-compatible versions to V 10–9 hPa on request n Stepper, DC and BLDC motors L-239.50AD with ActiveDrive DC motor, dimensions in mm L-239.033232 with DC motor and L-239.035232 with brushless DC motor, dimensions in mm Applications n Electronics L-239 shaft, dimensions in mm >> ActiveDrive Manufacturing n Precision Micro Assembly >> Incremental Encoder Instrumentation >> Vacuum-Compatible Versions n General Automation n Scientific n Optical Alignment n Semiconductor Technology Glossary ....................... page 290 228 W W W. P I . W S L-239.50AD L-239.033232 L-239.035232 L-239.50SD Unit Tolerance Active axis X X Travel range 52 52 mm Velocity 50 25 mm/s Integrated sensor Rotary encoder – Sensor resolution 20000 – Counts./rev. Design resolution 0.05 5 (full step) µm typ. Minimum incremental motion 0.2 0.1 µm typ. Unidirectional repeatability 0.2 0.1 µm typ. Bidirectional repeatability ±1 ±1 µm typ. Limit and reference point switches Hall effect Hall effect Guide type Recirculating ball bearings Recirculating ball bearings Drive screw type Ball screw Ball screw Drive screw pitch 1 1 mm Push/pull force 300 300 N max. Holding force, power off 40 80 Permissible lateral force 10 10 N max. Unit Tolerance V nom. Motion max. Positioning L-239.50AD L-239.50SD L-239.033232 L-239.035232 Motor type DC motor with PWM control 2-phase stepper motor DC motor BLDC motor Operating voltage, nominal 24 24 24 24 Operating voltage, max. 24 48 48 48 Step resolution – 200 – – Full steps/rev. Operating temperature range 5 to 40 5 to 40 5 to 40 5 to 40 °C Material Aluminum, stainless steel Aluminum, stainless steel Aluminum, stainless steel Aluminum, stainless steel Mass 1.72 1.65 1.75 1.75 kg ±5 % Moved mass 0.155 0.155 0.155 0.155 kg ±5 % Connector Sub-D 15 (m) HD Sub-D 26 (m) HD Sub-D 26 (m) HD Sub-D 26 (m) Recommended controllers / drivers C-863 (single axis) C-884 (up to 6 axes) C-885 with C-863.20C885 (to 40 axes) ACS modular controller C-663.12 (single axis) SMC Hydra (double axis) C-885 with C-663.12C885 (up to 20 axes) ACS modular controller C-863 (single axis) C-884 (up to 6 axes) C-885 with C-863.20C885 (to 40 axes) ACS modular controller C-891 (single axis) C-885 with C-891.10C885 (up to 20 axes) ACS modular controller Linear Actuators Mechanical properties Drive properties max. Miscellaneous All cables required for operation with the recommended controller are included in the scope of delivery. The cable length is 3 m. Cable for connecting to other controllers can be ordered as accessory. Ask about custom designs! 229 MOTION | POSITIONING M-238 High-Load Linear Actuator with DC Motor Dynamic, High-Resolution Precision Drive n ptional linear encoder for direct position O measurement n High load capacity to 400 N n Travel range 50 mm n Resolution to 0.1 µm n Velocity to 30 mm/s n Nonrotating end piece n Recirculating ball screw M-238, dimensions in mm A B 336,2 347,2 90 67,6 Applications >> ActiveDrive n General >> Incremental Encoder n Optical Automation >> Linear Encoder Alignment n Scientific Instrumentation Technology Glossary ....................... page 290 230 W W W. P I . W S M-238.5PG M-238.5PL Unit Tolerance Rotary encoder on motor shaft Highest precision with linear encoder Travel range 50 50 Integrated sensor Rotary encoder Linear encoder Sensor resolution 4000 cts/rev 0.1 µm Design resolution 0.13 0.1 µm typ. Minimum incremental motion 0.5 0.3 µm typ. Backlash 3 1 µm typ. Unidirectional repeatability ±1 ±0.3 µm typ. Velocity 30 30 mm/s max. Reference point switch repeatability 1 1 µm typ. Drive screw pitch 2 2 mm Gear ratio 3.71:1 3.71:1 Push/pull force 400 400 N max. Permissible lateral force 100 100 N max. Motor type DC motor, ActiveDrive DC motor, ActiveDrive Motor voltage 24 V 24 V V Motor power 80 80 W Operating temperature range –10 to 50 –10 to 50 °C Material Aluminum anodized, chrome steel Aluminum anodized, chrome steel Mass 2.4 2.4 kg ±5 % Cable length 3 3 m ±10 mm Connector Sub-D 15 Sub-D 15 Recommended controllers / drivers C-863 C-884 C-863 C-884 Motion and positioning mm Linear Actuators Mechanical properties Drive properties nominal Miscellaneous Ask about custom designs! The repeatability of the M-238.5PL with linear encoder is less than 0.3 µm. The velocity constancy of an M-238.5PL at 30 mm/s. 231 MOTION | POSITIONING Motion Control 232 W W W. P I . W S Industrial motion control .......................................................................................................................................................... 234 Solutions for Motion Centric Industrial Automation ....................................................... 234 Overview of Available ACS Motion Control Modules ..................................................... 236 ACS Motion Control for Motion Centric Industrial Automation ...................................... 238 A-81x PIglide Motion Controller for 1, 2 or 4 Axes ......................................................... 242 A-82x PIglide Motion Controller for 4, 6 or 8 Axes ......................................................... 244 SMC Hydra Universal Motion Controller ........................................................................ 246 C-891 PIMag® Motion Controller for Magnetic Direct Drives .......................................... 248 Modular Multi-Channel Piezo Controllers ................................................................................................................................ 250 C-885 PIMotionMaster .................................................................................................... 250 Stepper Motor Controllers ........................................................................................................................................................ 252 C-663.12 Mercury Step Stepper Motor Controller, 1 Axis ............................................... 252 DC Motor Controllers ................................................................................................................................................................ 254 C-863 Mercury Servo Controller ..................................................................................... 254 C-884.4DC / C-884.6DC Motion Controller for DC Motors, 4 or 6 Axess .......................... 256 C-413 PIMag® Motion Controller ..................................................................................... 258 233 MOTION | POSITIONING Motion Control Voice Coil Controllers ............................................................................................................................................................... 258 Solutions for Motion Centric Industrial Automation Positioning and motion tasks in industrial automation such as those in assembly, semiconductor manufacturing, mechanical engineering, laser material processing, inspection systems or in additive manufacturing demand solutions that need to be robust and reliable. Submicrometer accuracy, exact position reproducibility, high dynamics, and throughput are just as essential. This is particularly the case with industry 4.0 where safety and simple networking options play an important role. SMARTER MOTION AND POSITIONING What makes a positioner and motion solution smart? What functions and features must a high-performance control solution offer to make smart motion and positioning possible? PI has identified the following list of basic requirements that make it possible to offer solutions for industrial applications that fulfill the high demands for precision and dynamics irrespective of the number of motion axes. n Functional safety n Communication via fieldbus interfaces n Autotuning n Synchronization of the individual axes in the system n Multidimensional motion profiles n 3-DOF compensation of the position error n Yaw compensation for gantry solutions n Suppression of system oscillation n Robust control behavior n E asy integration into the higher-level automation environment 234 W W W. P I . W S COMPLETE SOLUTIONS FOR HIGH-THROUGHPUT AND HIGH-PRECISION MULTI-AXIS APPLICATIONS Those requirements can only be fulfilled when the mechanics, drive technology, and control electronics of the positioning system are perfectly matched to each other. A solution from a single-source supplier does not just offer the customer sophisticated positioning technology and high-performance control solutions, but also faster start-up and high flexibility when implementing new requirements. UDMnt Motion Control SPiiPlusEC HIGH-PERFORMANCE MOTION CONTROL SYSTEMS ACS Motion Control offers distributed-architecture motion control systems, completely modular, with components organized over three levels: The first level is the user interface. This is basically the host software and allows communication with the motion system. The devices on the second level are called motion controllers. The motion controller is responsible for communication with the host software and also takes care of everything related to profile generation, trajectory, macros, diagnostics, and so on. The position commands are sent to the universal drive modules on the third level via an EtherCAT real-time network. In some products, the motion controller, the drives, and the power supplies are integrated into one housing. These products are called control modules. The universal drive modules on the third level include the digital servo processor (DSP). It performs the servo positioning of the axes. The drive modules power and actuate the motors, handle the feedback devices, manage the I/Os, and analyze the sensor signals for closed-loop positioning control. 235 MOTION | POSITIONING Overview of Available ACS Motion Control Modules PI offers complete systems that implement the ACS motion control solutions EtherCAT® is a registered trademark and patented technology, licensed by Beckhoff Automation GmbH, Germany. 236 W W W. P I . W S Motion Control 237 MOTION | POSITIONING ACS Motion Control for Motion Centric Industrial Automation Available Modules EtherCAT® Motion Controller SPiiPlusEC Powerful Motion Controller and EtherCAT® Network Manager up to 64 axes and thousands of I/O’s SPiiPlusES High Performance Multi-Axis Controller with Built-in EtherCAT®-toEtherCAT® Bridge up to 64 axes and thousands of I/O’s SPiiPlusSC Software Based Powerful Motion Controller and EtherCAT® Network Manager up to 64 axes and thousands of I/O’s SPiiPlusCMnt 32-Axis EtherCAT® Master Control Module with 2 Built-in Drives 1, 2 drives 85 – 265 V-AC, up to 7.5/15 A SPiiPlusCMhp/ba 32-Axis EtherCAT® Master Control Module with 3 Built-in Drives 1 to 3 drives, 85 – 265 V-AC, up to 15/30 A Control Modules MC4Unt Customized Multiaxis Control Using Standard Components 2 to 8 drives, wide power range User Interface Software Applications SPiiPlusSPC Smart Processing Commander Machine Control Interface for High-Precision Laser Processing Applications SPiiPlusSMC Smart Motion Commander Customizable CNC HMI Platform for High-Precision Machining and Processing Applications 238 W W W. P I . W S SPiiPlusCMhv 32-Axis EtherCAT® Master Control Module with 2 Built-in High-Voltage Drives 1, 2 axes, 230 – 480 V-AC, up to 15/30 A, or 230 V-AC, 20/60 A Drives with ±10 V Interface NPApc Single/Dual Axis NanoPWM Drive with ±10 V Current Commutation Commands 1,2 drives, 12 – 100 V, up to 13.3/40 A, PCB mount NPApm Single/Dual Axis NanoPWM Drive with ±10 V Current Commutation Commands 1,2 drives, 12 – 100 V, up to 13.3/40 A NPArm 2 to 8 Axis NanoPWM Drive system with ±10V Current Commutation Commands and Power Supply 2 to 8 drives, up to 96 V, up to 13.3/40 A, rack mount PDMnt EtherCAT® Quad Axis P/D Interface Module 4 axes, Pulse/Direction interface to external motor drives PDIcl EtherCAT® Dual/Quad Axis Interface Module for P/D with Feedback 2, 4 axes, Pulse/Direction interface to external motor drives Motion Control Interfaces UDIhp/lt EtherCAT® Dual/Quad Axis Motor Drive Interface 2 to 4 axes, ±10 V interface to external motor drives IOMnt EtherCAT® Digital I/O Module up to 32 digital inputs and outputs, 24 V-DC 239 MOTION | POSITIONING ACS Motion Control for Motion Centric Industrial Automation Available Modules Universal Drive Modules with 48 V DC UDMlc EtherCAT® Dual/ Quad Axis Drive Module 2, 4 drives, 12 – 48 V, up to 5/10 A UDMsd EtherCAT® Dual/ Quad Axis Drive Module 2, 4 drives, 12 – 48 V, up to 2.5/5 A UDMpc EtherCAT® Single/ Dual Axis Drive Module 1, 2 drives, 24 – 48 V, up to 10/20 A, PCB mount Universal Drive Modules with 80 V DC UDMnt EtherCAT® Single/ Dual Axis Drive Module 1, 2 drives, 12 – 80 V, up to 10/20 A UDMmc EtherCAT® Drive Module, Compact, Cost Effective 2, 4 drives, 12 – 80 V, up to 20/40 A Universal Drive Modules with AC UDMpm EtherCAT® Single/Dual Axis Drive Module 1, 2 drives, 85 – 265 V, up to 7.5/15 A UDMhp/ba EtherCAT® Drive Module, Compact, Powerful 1 to 3 drives, 85 – 265 V-AC, up to 15/30 A UDMhv EtherCAT® Single/ Dual Axis High Voltage Drive Module 1, 2 drives, 230 – 480 V-AC, up to 15/30 A or 230 V-AC 20/60 A 240 W W W. P I . W S Universal Drive Modules with NanoPWM NPMpc EtherCAT® Single/Dual Axis NanoPWM Drive Module 1, 2 drives, 12 – 100 V, up to 13.3/40 A, PCB mount NPMpm EtherCAT® Single/Dual Axis NanoPWM Drive Module 1, 2 drives, 12 – 100 V, up to 13.3/40 A UDMcb Economical EtherCAT® Single/Dual Axis Drive Module 1, 2 drives, up to 100 V, 13.3/40 A, PCB mount Motion Control Other Universal Drive Modules UDMpa EtherCAT® Single/ Dual Axis Drive Module 1, 2 drives, up to 100 V, 13.3/40 A Stepper Drive Module SDMnt EtherCAT® 4/8 Axis Stepper Drive Module 4, 8 unipolar stepper motor drives, 40 V, 3 A 241 MOTION | POSITIONING A-81x PIglide Motion Controller for 1, 2 or 4 Axes For Stages with Direct Drive, TCP/IP Interface n 1 , 2, & 4 motion axes n F ully integrated closed-loop servo control, amplifier module, and power supplies n F or voice coil drives, DC motors and brushless 3-phase motors n Q uiet PWM drives n E ncoder n 5 inputs support sine/cosine and BiSS-C A continuous current / 10 A peak output current per axis Overview Options The A-81x motion controller series from PI offers a fully integrated electronics solution with controller, drives, and power supplies in a compact 19-inch rack unit. The A-81x controllers are designed and optimized for PIglide air bearing stages that are equipped with direct drive linear and rotation servo motors, and high-resolution encoders. n A bsolute Standard options include inputs for incremental sine/cosine and absolute encoders that use the BiSS-C data protocol. Support for sine/cosine encoders has an integrated interpolation factor of 16384x. All controllers feature integrated flash memory for stored motion programs and parameters. n I nput The A-81x controllers can be operated in stand-alone mode running stored programs, or controlled via an external PC. A PC is required for programming and startup. All software is supplied with the controller. encoders or incremental encoders (can be combined individually according to customer specifications for all axes of the controller) n G -Code programming shaping n A dditional control axes for external drives via EtherCAT® n A lternative customized packaging for OEM designs If the controller is purchased together with a PIglide air bearing stage or positioning system, PI will perform the servo tuning, startup of the controller, and error calibration, and supply a complete ready-to-use positioning system. The A-81x motion controller features the state of the art ACS SPiiPlusEC motion controller and EtherCAT® master, and includes ServoBoost™ for up to eight axes of motion. ServoBoost™ provides better, more consistent servo performance that is insensitive to noise or changes in the system. >> Extensive Software Package Technology Glossary ....................... page 290 242 W W W. P I . W S A-811.21x00 A-812.21x00 A-814.21x00 Number of axes 1 2 4 Controller type Closed-loop servo control (PID), parameter changing during operation Closed-loop servo control (PID), parameter changing during operation Closed-loop servo control (PID), parameter changing during operation Servo-frequency position control 10 kHz 10 kHz 10 kHz Servo frequency current control 20 kHz 20 kHz 20 kHz Trajectory profiles Point-to-point, jog, s-curve Point-to-point, jog, s-curve, interpolated coordinated multi-axis profiles Point-to-point, jog, s-curve, interpolated coordinated multi-axis profiles Cooling Fan on the side (continuous operation, constant speed) Fan on the side (continuous operation, constant speed) Fan on the side (continuous operation, constant speed) Drive type PWM PWM PWM Motor types Voice coil Brushed DC motor Brushless 3-phase motor with sine commutation Voice coil Brushed DC motor Brushless 3-phase motor with sine commutation Voice coil Brushed DC motor Brushless 3-phase motor with sine commutation Encoder options (factory default) (Can be configured individually for combinations according to customer specifications) Incremental sine/cosine (1 Vpp) A/B quadrature (RS-422) (on request), Absolute encoder BiSS-C Incremental sine/cosine (1 Vpp) A/B quadrature (RS-422) (on request), Absolute encoder BiSS-C Incremental sine/cosine (1 Vpp) A/B quadrature (RS-422) (on request), Absolute encoder BiSS-C Output current (per axis) 5 A continuous operation, 10 A peak 5 A continuous operation, 10 A peak 5 A continuous operation, 10 A peak Communication Ethernet: TCP/IP, 100/1000 Mbps Ethernet/IP Modbus Ethernet: TCP/IP, 100/1000 Mbps Ethernet/IP Modbus User I/O (without reference and limit switch) 2 × digital input, 24 V DC, sink 2 × digital output, 24 V DC, source 1 × analog input, differential, 12 bit 1 × analog output, differential, 10 bit 1 × RS-422 high-speed output for position trigger (PEG) 1 × 24 V DC sink 2 × digital input, 24 V DC, sink 2 × digital output, 24 V DC, source 1 × analog input, differential, 12 bit 1 × analog output, differential, 10 bit 2 × RS-422 high-speed output for position trigger (PEG) Ethernet: TCP/IP, 100/1000 Mbps Ethernet/IP Modbus 4 × digital input, 24 V DC, sink 4 × digital output, 24 V DC, source 2 × analog input, differential, 12 bit 2 × analog output, differential, 10 bit 4 × RS-422 high-speed output for position trigger (PEG) 1 × 24 V DC sink 1 x 24 V DC sink Rear panel connectors Sub-D for motor and signal connections IEC 60320 type C14 for power supply Rear panel connectors Sub-D for motor and signal connections IEC 60320 type C14 for power supply Rear panel connectors Sub-D for motor and signal connections IEC 60320 type C14 for power supply Power supply 120 – 240 V AC, single phase, 50 – 60 Hz (factory default), 600 W 120 – 240 V AC, single phase, 50 – 60 Hz (factory default), 600 W 120 – 240 V AC, single phase, 50 – 60 Hz (factory default), 600 W Mass (approx.) 8.5 kg 8.5 kg 9.3 kg Dimensions 19” rack unit, 483 mm × 88 mm × 487 mm (incl. handles) 19” rack unit, 483 mm × 88 mm × 487 mm (incl. handles) 19” rack unit, 483 mm × 88 mm × 487 mm (incl. handles) Interlock / motion-stop Connector interface Miscellaneous 243 MOTION | POSITIONING Motion Control Interfaces A-82x PIglide Motion Controller for 4, 6 or 8 Axes For Stages with Direct Drive and High Power Requirements, TCP/IP Interface n 4 , 6 or 8 high-performance motion axes n F ully integrated closed-loop servo control, amplifier module, and power supplies n F or voice coil drives, DC motors and brushless 3-phase motors n Q uiet PWM drives n E ncoder n 1 0 inputs support sine/cosine and BiSS-C A continuous current / 20 A peak output current per axis Overview Options The A-82x motion controller series from PI offers a fully integrated electronics solution with controller, drives, and power supplies in a compact 4-U-high 19-inch rack unit. The A-824 supplies continuous power of 2 kW. The A-82x controllers are designed and optimized for PIglide air bearing stages that are equipped with direct drive linear and rotation servo motors, and high-resolution encoders. n A bsolute Standard options include inputs for incremental sine/cosine and absolute encoders that use the BiSS-C data protocol. Support for sine/cosine encoders has an integrated interpolation factor of 16384x. All controllers feature integrated flash memory for stored motion programs and parameters. n A dditional encoders or incremental encoders (can be combined individually according to customer specifications for all axes of the controller) n G -Code n I nput programming shaping control axes for external drives via EtherCAT® n A lternative customized packaging for OEM designs The A-82x controllers can be operated in stand-alone mode running stored programs, or controlled via an external PC. A PC is required for programming and startup. All software is supplied with the controller. If the controller is purchased together with a PIglide air bearing stage or positioning system, PI will perform the servo tuning, startup of the controller, and error calibration, and supply a complete ready-to-use positioning system. The A-82x motion controller features the state of the art ACS SPiiPlusEC motion controller and EtherCAT® master, and includes ServoBoost™ for up to eight axes of motion. ServoBoost™ provides better, more consistent servo performance that is insensitive to noise or changes in the system. >> Extensive Software Package Technology Glossary ....................... page 290 244 W W W. P I . W S A-824.21x00 A-826.21x00 A-828.21x00 Number of axes 4 6 8 Controller type Closed-loop servo control (PID), parameter changing during operation Closed-loop servo control (PID), parameter changing during operation Closed-loop servo control (PID), parameter changing during operation Servo-frequency position control 10 kHz 10 kHz 10 kHz Servo frequency current control 20 kHz 20 kHz 20 kHz Trajectory profiles Point-to-point, jog, s-curve, interpolated coordinated multi-axis profiles Point-to-point, jog, s-curve, interpolated coordinated multi-axis profiles Point-to-point, jog, s-curve, interpolated coordinated multi-axis profiles Cooling Fan on the side (continuous operation, constant speed) Fan on the side (continuous operation, constant speed) Fan on the side (continuous operation, constant speed) Drive type PWM PWM PWM Motor types Voice coil Brushed DC motor Brushless 3-phase motor with sine commutation Voice coil Brushed DC motor Brushless 3-phase motor with sine commutation Voice coil Brushed DC motor Brushless 3-phase motor with sine commutation Encoder options (factory default) (Can be configured individually for combinations according to customer specifications) Incremental sine/cosine (1 Vpp) A/B quadrature (RS-422) (on request), Absolute encoder BiSS-C Incremental sine/cosine (1 Vpp) A/B quadrature (RS-422) (on request), Absolute encoder BiSS-C Incremental sine/cosine (1 Vpp) A/B quadrature (RS-422) (on request), Absolute encoder BiSS-C Interpolation factor sine/cosine encoder 4 x to 16384x (can be adjusted by software) 4 x to 16384x (can be adjusted by software) 4 x to 16384x (can be adjusted by software) Output voltage 72 VDC 72 VDC 72 VDC Output current (per axis) 10 A continuous operation, 20 A peak (<1 s) 10 A continuous operation, 20 A peak (<1 s) 10 A continuous operation, 20 A peak (<1 s) Output power (total) 1100 W continuous operation 3900 W peak 1700 W continuous operation 3900 W peak 2000 W continuous operation 3900 W peak A-82x Communication Ethernet: TCP/IP, 100/1000 Mbps Ethernet/IP Modbus User I/O (without reference and limit switch) 4 × digital input, 24 V DC, sink 3 × digital output, 24 V DC, source 2 × analog input, differential, 12 bit 2 × analog output, differential, 10 bit 4 × RS-422 high-speed output for position trigger (PEG) Interlock / motion-stop 1 × 24 V DC Connector interface Rear panel connectors Sub-D for motor and signal connections IEC 60320 type C20 for power supply Motion Control Interfaces A-824.2x00 A-826.21x00 A-828.21x00 Power supply 200 – 240 V AC, single phase, 50 – 60 Hz 200 – 240 V AC, single phase, 50 – 60 Hz 200 – 240 V AC, single phase, 50 – 60 Hz Mass (approx.) 13.6 kg 14.4 kg 15.2 kg Dimensions 19” rack unit, 483 mm × 171 mm × 495 mm (incl. handles) 19” rack unit, 483 mm × 171 mm × 495 mm (incl. handles) 19” rack unit, 483 mm × 171 mm × 495 mm (incl. handles) Miscellaneous 245 MOTION | POSITIONING SMC Hydra Universal Motion Controller For Electromagnetic Motors n -D vector motion with linear interpolation, independent 2 single-axis motion n or DC servo and brushless DC motors (BLDC), linear F and torque motors (2 / 3 phases), 2-phase stepper motors n Digital inputs and outputs n Optional: Encoder-based trigger output n ptional: Position capture input: Position detection O in real time via digital input n Optional: Dynamic position correction n Joystick operation via CAN bus Compact SMC Hydra CM 2-axis motion controller >> Extensive Software Package Technology Glossary ....................... page 290 246 W W W. P I . W S SMC Hydra TT SMC Hydra CM SMC Hydra RM Function Motion controller for electromagnetic motors Benchtop device with integrated power supply Motion controller for electromagnetic motors Compact device Motion controller for electromagnetic motors 19” rack unit with integrated power supply Axes 2 2 2/4 Sensor channels 2 2 2/4 Operating voltage 90 – 260 V, integrated widerange-input power supply 24 V / 48 V, external power supply (not in scope of delivery) 90 – 260 V, integrated widerange-input power supply Max. power consumption 300 W 120 W 1000 W Max. current consumption 11 A 11 A 11 A Operating temperature range 10 to 40 °C 10 to 40 °C 10 to 40 °C Weight 2.65 kg 0.45 kg 6 kg Dimensions 225 mm x 515 mm x 56 mm 76 mm x 156 mm x 56 mm 84 HP, 2 RU, 310 mm depth Miscellaneous Motion and control Supported functions Linear vector motion, independent point-to-point motion. Automatic detection of the motor phase. Controller type PID controller, also adaptive for position and velocity as well as velocity and acceleration feed-forward, parameter changing during operation Servo frequency 4 kHz Profile generator Trapezoidal velocity profile, setting of maximum velocity and acceleration 2-D vector control with linear interpolation Encoder input Analog signals (sin/cos) max. 150 kHz (line count) Digital signals (A/B differential via RS-422) max. 4 MHz (line count) Positioning range: ±4.3*1012 mm / deg Stall detection Position error, peak current, I2t limit Microsteps per full step 3000 Limit switches 2 per channel, 5 to 24 V (programmable polarity); N/O contact / N/C contact; NPN / PNP Reference point switch Index signal of the encoder Motor brake 1 x per channel, TTL, configurable via software Maximum output voltage 24 V / 48 V Maximum output power per channel 200 W Maximum output current per channel 10 Arms Safety features Switch-off via external switch. Overload protection of the motor driver. Overheat protection of the motor (I2t). Overcurrent protection of the system. Motion Control Electrical properties Interfaces and operation Communication interfaces TCP/IP: 10/100 Mbit; RS-232: Sub-D 9 (m), 9.6 to 115.2 kBaud. Hydra RM: USB as well Motor connection per channel Sub-D 15 (f) Sensor connection per channel Sub-D 15 (f) I/O lines 6 inputs, opto decoupled, 5 – 24 V (2 each reserved per channel for limit switch) Input for motor switch-off on all axes, opto decoupled Open drain output (100 mA) 2 TTL outputs 4 analog outputs, 10-bit resolution, 0 to 3.3 V (not for Hydra TT) With DeltaStar interface as factory default option: Fast trigger output, max. 400 kHz, equidistant or from freely definable table (max. 3000 axis positions) Position capture input, max. 4 kHz (>3,000,000 axis positions) With the factory default DeltaStar Eco interface option: Trigger output, 2 kHz, equidistant, jitter 10 – 30 µs Command set Venus-3 ASCII interpreter; dynamic library for PI General Command Set (GCS) User software Venus-3 demo program LabVIEW (source code & executable) Terminal program (Venus-3 DLL) PIMikroMove via dynamic libraries for Windows Software drivers LabVIEW drivers, dynamic libraries for Windows and Linux (GCS) GCS2 DLL 32/64-bit Venus3 DLL 32/64-bit / .net wrapper DLL incl. example source code Manual operation Joystick via CAN bus (accessory) 247 MOTION | POSITIONING C-891 PIMag® Motion Controller for Magnetic Direct Drives 1 Axis, for 3-Phase Linear Motors with Medium Power Consumption n Maximum average current consumption 3 A n 20-kHz control bandwidth n USB interface for sending commands and for configuration n Digital inputs and outputs n Optional analog input n Encoder inputs: A/B or sine/cosine and BiSS-C Digital motion controller for PIMag® linear motors 1 motor channel, 1 sensor channel. For three-phase linear motors, maximum current consumption 3A (rms) per phase. Sine-commutated operation, field-oriented current control. Automatic detection of the motor phase. PID controller for position and velocity. Servo update rate 20 kHz. C-891.10C885 Plug-in module for C-885 PIMotionMaster >> Extensive Software Package Technology Glossary ....................... page 290 248 W W W. P I . W S C-891.120200 Motor channels Sensor channels Supported functions Safety features Motion and control Controller type Servo frequency Profile generator Encoder input Reference and limit switches Electrical properties Max. output voltage Max. output current Interfaces and operation Communication interfaces Motor connector Sensor connection I/O port Command set User software Application programming interfaces Miscellaneous Operating voltage Max. current consumption Operating temperature range Max. mass Dimensions PIMag® Motion Controller for 3-phase linear motors, sine-commutated, field-oriented current control 1 1 Point-to-point motion. Data recorder. Wave generator. Automatic detection of the motor phase. Switch-off via external switch. Overload protection of the motor driver. Overheat protection of the motor. Overcurrent protection of the system. PID controller for position and velocity, parameter changing during operation 20 kHz Trapezoidal velocity profile, setting of maximum velocity and acceleration Analog (sin/cos) or digital signals (A/B differential, TTL, or BISS interface) TTL 24 V 3 Arms USB, RS-232 HD Sub-D 26 (f) Sub-D 15 (m) 4 x digital input, 4 x digital output Optional analog input, –10 to 10 V PI General Command Set (GCS) PIMikroMove API for C / C++ / C# / VB.NET / MATLAB / python, drivers for LabVIEW Motion Control Function 24 V, external power supply included in the scope of delivery 4.5 A 5 to 40 °C 1.0 kg 190 mm × 83 mm × 110 mm (with rubber feet and connection for supply voltage: 206 mm x 83 mm x 112 mm) Ask about custom designs! 249 MOTION | POSITIONING C-885 PIMotionMaster Rack with Processor and Interface Module for Modular Multi-Axis Controller System n Easy configuration and startup Easy to expand n Modular design for versatile expansion n Efficient communication with the controller modules n Greatly reduced wiring effort n Saves space and costs The system is easily scalable. An additional controller module can be inserted into any free slot and expands the overall system by the corresponding functions. Optional digital inputs and outputs can be installed for every controller module. Controller modules Easy installation n C-863.20C885 DC Motor Controller Module, 2 Axes Plug-and-play installation of the controller modules in the C-885 PIMotionMaster. The processor and interface module communicates with the PIMikroMove software and with the controller modules. It detects the available controller module type automatically. Grouping the controller modules in one housing ensures internal communication and reduces the wiring effort because of the common power supply and external communication via a single USB or Ethernet interface. n C-867.10C885 PILine® Controller Module n E-861.11C885 NEXACT® Controller Module n E -873.10C885 Q-Motion® Controller Module for C-885 PIMotionMaster n C -663.12C885 Mercury Step Stepper Motor Controller Module >> Extensive Software Package Technology Glossary ....................... page 290 250 W W W. P I . W S C-885.R2 C-885.R3 Function 9.5” chassis for C-885 PIMotionMaster 19” chassis for C-885 PIMotionMaster 19” chassis for C-885 PIMotionMaster Number of card slots 1 C-885.Mx module (required) 4 controller modules (max.) 1 C-885.Mx module (required) 20 controller modules (max.) 1 C-885.Mx module (required) 19 controller modules (max.) Dimensions 269.04 mm × 133.14 mm × 349.5 mm (incl. handles) Without modules: 482.6 mm × 132.55 mm × 265.3 mm With modules: 482.6 mm × 132.55 mm × 278.55 mm Without modules: 482.6 mm × 132.55 mm × 265.3 mm With modules: 482.6 mm × 132.55 mm × 278.55 mm Operating voltage 24 V DC from external power supply 24 V DC from external power supply 24 V DC from external power supply also optional: 48 V DC from external power supply Supply voltage for controller modules 24 V DC 24 V DC 24 V DC / 48 V DC Current consumption, max. 32 A 32 A 32 A Mass without modules 3.2 kg 2.9 kg 5.08 kg Operating temperature range 10 to 40 °C 10 to 40 °C 10 to 40 °C C-885.M1 C-885.M2 Function Digital Processor and Interface Module for C-885 PIMotionMaster Digital Processor and Interface Module for C-885 PIMotionMaster Communication interfaces Ethernet, USB Ethernet, USB Command set PI General Command Set (GCS) PI General Command Set (GCS) User software PIMikroMove PIMikroMove Software drivers LabVIEW drivers, dynamic libraries for Windows and Linux LabVIEW drivers, dynamic libraries for Windows and Linux Indicators LEDs for Power, Error LEDs for Power, Error Operating temperature range 10 to 40°C 10 to 40°C Mass 132 g 270 g Dimensions 186.42 mm × 128.4 mm (3 RU) × 19.98 mm (4 HP) 186.42 mm × 128.4 mm (3 RU) × 19.98 mm (4 HP) Motion Control C-885.R1 Ask about custom designs! 251 MOTION | POSITIONING C-663.12 Mercury Step Stepper Motor Controller, 1 Axis For Closed-Loop and Open-Loop Operation, HD Sub-D 26, 48 V n High microstep resolution n Operating voltage up to 48 V n Closed-loop operation of 2-phase stepper motors n Support for external sensors n Daisy chain networking C-663.12C885 Mercury Step Stepper Motor Controller Plug-in Module for C-885 PIMotionMaster >> Extensive Software Package Technology Glossary ....................... page 290 252 W W W. P I . W S C-663.12 Function Mercury Step stepper motor controller Drive types 2-phase stepper motor Axes 1 Supported functions Point-to-point motion. Startup macro. Data recorder for recording operating data such as velocity, position or position error. Internal safety circuitry: Watchdog timer. ID chip detection (for future use). Motion and control Controller type PID, parameter changing during operation Servo cycle time 50 µs Dynamics profile Trapezoidal velocity profile Microstep resolution 1/2048 full step Encoder input A/B quadrature, TTL, RS-422; 60 MHz Limit switches 2 × TTL, programmable Reference point switch 1 × TTL, programmable Index switch 1 × RS-422 for index pulse Stall detection Automatic motor stop when a programmable position error is exceeded (only in conjunction with sensor) Electrical properties Max. output voltage* 0 V to operating voltage, for direct control of stepper motors Max. output power 60 W Average output power 48 W Power consumption, full load 48 W (max.) Power consumption without load 3W Current limitation per motor phase 2.5 A Communication interfaces USB, RS-232 Motor / sensor connection HD Sub-D 26 (f) Controller network Up to 16 units on a single interface** I/O lines 4 analog / digital inputs (0 to 5 V / TTL), 4 digital outputs (TTL) Command set PI General Command Set (GCS) User software PIMikroMove Application programming interfaces API for C / C++ / C# / VB.NET / MATLAB / python, drivers for LabVIEW Manual control Joystick, Y-cable for 2-D motion, pushbutton box Motion Control Interfaces and operation Miscellaneous Operating voltage 24 to 48 V DC from external power supply (48 V DC power supply in scope of delivery) Max. current consumption 40 mA without load (when supplied with 48 V) 80 mA without load (when supplied with 24 V) Operating temperature range 5 to 50 °C (temperature protection switches off at excessively high temperatures) Mass 0.48 kg Dimensions 130 mm × 76 mm × 40 mm (incl. mounting rails) * Depending on the power supply used ** 16 units with USB; 6 units with RS-232 253 MOTION | POSITIONING C-863 Mercury Servo Controller 1 Axis, for DC Motors and Brushless DC Motors n High-speed encoder input to 60 MHz n P owerful macro programming language, e.g., for stand-alone operation n Nonvolatile EEPROM for macros and parameters n Data recorder n Daisy chain networking n Connection for joystick C-863.20C885 2-Axes DC Motor Controller, Plug-in Module for C-885 PIMotionMaster >> Extensive Software Package Technology Glossary ....................... page 290 254 W W W. P I . W S C-863.11 / C-863.12 Function DC motor control, servo control Axes 1 Supported functions Point-to-point motion. Startup macro. Data recorder for recording operating data such as motor voltage, velocity, position or position error. Internal safety circuitry: Watchdog timer. C-863.12 additional: ID chip detection Motion and control Controller type PID controller, parameter changing during operation Servo cycle time 50 µs Profile generator Trapezoidal velocity profile Encoder input A/B quadrature single-ended or differential TTL signal acc. to RS-422; 60 MHz Stall detection Automatic motor stop when a programmable position error is exceeded Limit switches 2 × TTL (programmable polarity) Reference point switch 1 × TTL Motor brake 1 × TTL, can be switched by software Interfaces and operation Communication interfaces USB; RS-232, Sub-D 9 (m) Motor connection C-863.11: Sub-D 15 (f) / C-863.12: HD Sub-D 26 (f) Controller network Up to 16 units** on a single interface I/O lines 4 analog / digital inputs, 4 digital outputs (TTL), 5 V TTL Command set PI General Command Set (GCS) User software PIMikroMove Application programming interfaces API for C / C++ / C# / VB.NET / MATLAB / python, drivers for LabVIEW Manual control Joystick, Y cable for 2-D motion, pushbutton box C-863.12 Max. output voltage* 0 to ±15 V for direct control of DC motors 0 V to operating voltage, for direct control of DC motors Max. output power 30 W 60 W Average output power 45 W 48 W Power consumption, full load 30 W 48 W Power consumption without load 2W 3W Current limitation 2A 2.5 A Operating voltage 15 to 30 V from external power supply (15 V DC power supply in scope of delivery) 24 to 48 V DC from external power supply (48 V DC power supply in scope of delivery) Max. current consumption 80 mA without load (when supplied with 24 V) 40 mA without load (when supplied with 48 V) 80 mA without load (when supplied with 24 V) Operating temperature range 5 to 50 °C 5 to 50 °C (temperature protection switches off at excessively high temperatures) Mass 0.3 kg 0.48 kg Dimensions 130 mm × 76 mm × 40 mm (incl. mounting rails) 130 mm × 76 mm × 40 mm (incl. mounting rails) Motion Control C-863.11 Electrical properties Miscellaneous 255 MOTION | POSITIONING C-884.4DC / C-884.6DC Motion Controller for DC Motors, 4 or 6 Axes For Positioners with Closed-Loop DC Motor, USB, RS-232, TCP/IP, SPI, I/O, Joystick n PID servo control with dynamic parameter switching Motion profiles Point-to-point, trapezoidal velocity profile. User-definable trajectories (e.g., circles, sine curves) from externally fed points. n P owerful macro programming language, e.g., for stand-alone operation n Data recorder n I ntegrated interfaces: USB, RS-232, Ethernet, SPI, I/O, joystick n Trajectory support for 1 or 2 D motion patterns Interfaces and communication Interfaces: TCP/IP, USB and RS-232 for commands. A/B quadrature encoder input. TTL inputs for limit and reference point switches. I/O lines (analog/digital) for automation. USB interface for human interface devices. Digital motion controller for DC servo motors Extensive functions, software support 4 or 6 axes. Dual-core architecture for increased performance and flexibility by separating command processing and position control. Simple adaptation / extension possible for OEM products. Motion control of PI positioning systems with DC motors: Direct motor control, PWM control for PI positioning stages with integrated ActiveDrive amplifiers or integrated block commutation (brushless motors). Supports motor brake. Powerful macro command language. Nonvolatile macro storage, e.g., for stand-alone operation with autostart macro. Data recorder. ID chip detection for fast startup. PID controller, parameter changing during operation. Extensive software support, e.g., for LabVIEW, C, C++, MATLAB, python. PIMikroMove user software. >> Extensive Software Package Technology Glossary ....................... page 290 256 W W W. P I . W S C-884.4DC / C-884.6DC Function Position control for closed-loop DC motors Processor Dual core architecture. Controller on a DSP core, with extendable command interpreter in an ARM core under Linux Axes C-884.4DC: 4 / C-884.6DC: 6 Supported functions Linear vector motion. Point-to-point motion. User-definable trajectories. Startup macro. PI Python. Data recorder for recording operating data such as motor voltage, velocity, position or position error. ID chip detection. Motion and control Controller type PID controller, parameter changing during operation Servo cycle time 100 µs Profile generator Trapezoidal velocity profile Encoder input A/B quadrature (TTL differential according to RS-422), 50 MHz; BiSS interface Stall detection Automatic motor stop when a programmable position error is exceeded Limit switches 2 × TTL per axis (programmable polarity) Reference point switch 1 × TTL per axis Motor brake 1 × TTL per axis, can be switched per software Electrical properties Max. output voltage* 24 V Max. output power 240 W Current limitation 2.5 A per axis Communication interfaces TCP/IP: RJ45 / Ethernet; USB: Mini-USB type B; RS-232: Sub-D 9 (m); SPI: DisplayPort Motor connector Sub-D 15 (f) I/O lines 4 analog inputs (–10 to 10 V), 4 digital outputs (5 V TTL) 4 digital outputs (5 V TTL) Command set PI General Command Set (GCS) User software PIMikroMove Application programming interfaces API for C / C++ / C# / VB.NET / MATLAB / python, drivers for LabVIEW Manual control USB interface for HID-compliant devices Motion Control Interfaces and operation Miscellaneous Operating voltage External power supply 24 V / 5 A (120 W) included in the scope of delivery Max. current consumption C-884.4DC: 11 A / C-884.6DC: 16 A Current consumption, no load 500 mA Operating temperature range 5 to 50 °C Mass C-884.4DC: 1.77 kg / C-884.6DC: 1.97 kg Dimensions 312 mm × 153.4 mm × 59.2 mm (incl. mounting rails) * The output voltage depends on the connected power supply. 257 MOTION | POSITIONING C-413 PIMag® Motion Controller Control of Force, Position and Velocity 1 or 2 motor channels Digital motion controller for PIMag® voice coil drives n C-413.1: 1 motor channel, 2 sensor channels, for the V-275 and V-277 linear actuators; C-413.2: 2 motor channels, 4 sensor channels. PID controller for force, position, velocity. Servo update rate selectable between 5 to 10 kHz. n U p to 4 sensor channels for 2 force and 2 position sensors each n D epending on version, TCP/IP or USB interface for configuration and sending commands Force control The force control allows operation of PIMag® drives and stages with a defined holding or feed force. The force and position sensors can be read simultaneously and the values processed. In addition to pure force control, subordinate position and velocity control is also an option. PI offers PIMag® actuators with a force sensor. The C-413.20A / .2GA models enable external force sensors to be read via analog inputs. n D epending on version, real-time SPI interface for sending commands n Digital inputs and outputs n Optional analog inputs and outputs Extensive functionality Data recorder: Recording of operating data such as motor current, velocity, position or position error. Wave generator: Saves and outputs periodical motion profiles. Auto-zero function defines the holding current, at which the drive outputs a force of 0 N in open-loop operation, e.g., for compensating the weight force. ID chip support: Identifies the connected stages and simplifies configuration and exchangeability. Supports direction-sensing reference point switches. Extensive software support, e.g., for LabVIEW, dynamic libraries for Windows and Linux. Interfaces Depending on the version, commanding via TCP/IP, USB 2.0, SPI. Digital inputs and outputs for automation. Optional analog inputs and outputs, e.g., for sensors, commanding or position feedback. >> Extensive Software Package >> PIMag® Voice Coil Technology Glossary ....................... page 290 258 W W W. P I . W S C-413.1G C-413.20 / C-413.20A C-413.2G / C-413.2GA Function PIMag® motion controller for voice coil drives, 1 channel, housed device PIMag® motion controller for voice coil drives, 2 channels C-413.20/.20A: OEM board C-413.2G/.2GA: Housed device Motor channels 1 2 Sensor channels 2 4 Servo characteristics PID controller for force, position and velocity; parameter changing during operation PID controller for force, position and velocity; parameter changing during operation Servo cycle time 100 µs to 200 µs, selectable in 4 steps 100 µs to 200 µs, selectable in 4 steps Profile generator Trapezoidal velocity profile, specification of the maximum velocity and acceleration Trapezoidal velocity profile, specification of the maximum velocity and acceleration Encoder input SPI sensor interface SPI sensor interface Reference point switches 2 × TTL, direction-sensing 4 × TTL, direction-sensing Max. output voltage 24 V 24 V Max. output current ±1.5 A (regulated) ±1.5 A (regulated) Communication interfaces TCP/IP USB 2.0, real time SPI Motor / sensor connection Sub-D 9 (f) for motor, Sub-D 25 (f) for sensor Sub-D 15 (f) combined for motor and sensor I/O port 2 × analog output, –10 to 10 V, 17 bit, 1 kHz 4 × digital input, 24 V 6 × digital output, 24 V 2 × analog input, –10 to 10 V, 16 bit, 1 kHz (only .20A and .2GA) 2 × analog output, –10 to 10 V, 17 bit, 1 kHz (only .20A und .2GA) 6 × digital outputs (open collector, voltage range 5 V to 24 V, 33 kΩ internal pull-up to 5 V) 4 × digital input (5 V TTL level, to 24 V max. input voltage, 10 kΩ input resistance) Command set PI General Command Set (GCS) PI General Command Set (GCS) User software PIMikroMove PIMikroMove Application programming interfaces API for C / C++ / C# / VB.NET / MATLAB / python, drivers for LabVIEW API for C / C++ / C# / VB.NET / MATLAB / python, drivers for LabVIEW Supported functions Point-to-point motion. Data recorder. Wave generator. Auto zero. ID chip detection. Point-to-point motion. Data recorder. Wave generator. Auto zero. ID chip detection. Operating voltage 24 V DC from external power supply (included) 24 V DC from external power adapter (included in the scope of delivery for C-413.2G and .2GA) Max. current consumption 2A 2A Operating temperature range 5 to 50 °C 5 to 50 °C Mass 0.3 kg 0.3 kg Dimensions 210 mm × 28 mm × 105 mm 189 mm × 28 mm × 105 mm (.2G/.2GA) 160 mm × 18 mm × 100 mm (.20/.20A) Motion and control Electrical properties Motion Control Interfaces and operation Miscellaneous Ask about custom designs! 259 MOTION | POSITIONING Gantry Systems 260 W W W. P I . W S Gantry Systems ........................................................................................................................................................................ 262 Gantry Systems Throughput, Precision and Reliability ............................................................................ 262 261 MOTION | POSITIONING Throughput, Precision and Reliability Solutions for Motion-Centric Industrial Automation XY and Gantry Systems from PI Positioning and motion tasks in industrial automation such as those in assembly, semiconductor manufacturing, mechanical engineering, laser material processing, inspection systems or in additive manufacturing demand solutions that need to be robust and reliable. PI offers a broad range of in-house drive and motion control technologies such as EtherCAT-based industrial controllers by ACS, where PI holds the major shares, or air bearing technology for optimized guiding accuracy. System engineering for customization and a global service and training network are added-value offers. PI is therefore the ideal partner for motion-centric industrial solutions. Gantry Systems – High-Dynamic Precision Positioning in 3 Axes n Linear motor or brushless drives, optionally with air bearings n Individual travel ranges in XY up to 2 m n Z-axis with pneumatic counterweight, DC or Stepper motor n Piezomotor n Incremental n Controlled for fine adjustment or absolute encoders by ACS Motion Control The specifications below are an example of what is feasible. Contact PI to discuss your requirements! Applications n Electronics n Laser >> Absolute Encoder >> Air Bearing Manufacturing >> Linear Motor Cutting n Sample Inspection Technology Glossary ....................... page 290 262 W W W. P I . W S Unit Active axes X Y Tolerance Z Motion and positioning Travel range 508 508 155 Integrated sensor Optical linear encoder, incremental Optical linear encoder, incremental Optical linear encoder, incremental mm Sensor resolution 0.002 0.002 0.002 µm Unidirectional repeatability 0.5 0.5 0.5 µm typ. Max. velocity* 3000 3000 2000 mm/s typ. Max. acceleration** 30 30 20 m/s2 typ. Ball bearing Cross roller bearings kg max. Ironless linear motor Ironless linear motor with pneumatic counterbalance Mechanical properties Bearings Ball bearing Load capacity 5 Motor type Ironless linear motor Gantry Systems * Maximum speed based on stage capability. Maximum application velocity may be limited by system data rate and system resolution. Maximum speed of the z-axis is specified without pneumatic counterbalance. ** No load. Maximum acceleration of the z-axis is specified without pneumatic counterbalance. 263 MOTION | POSITIONING Components & Accessories 264 W W W. P I . W S Air Bearings ............................................................................................................................................................................... 266 A-10x PIglide RB Linear Air Bearing Module .................................................................. 266 A-10x.MNT Mounting Feet.............................................................................................. 269 A-41x PIglide FPC: Flat, Circular Air Bearing Modules .................................................... 270 A-60x PIglide RT Rotary Air Bearing Module .................................................................. 274 A-65x PIglide HB: Hemispherical Air Bearing ................................................................. 278 Accessories for Air Bearings and Stages .................................................................................................................................. 280 A-60x.MTT PIglide Manual X-Y-Tilt Platform................................................................... 280 A-80x PIglide Filter and Air Preparation Kits .................................................................. 282 Adapter Brackets for Multi-Axis Combinations ....................................................................................................................... 286 Components & Accessories L-500 Adapter Bracket .................................................................................................... 286 265 MOTION | POSITIONING A-10x PIglide RB Linear Air Bearing Module Friction Free, Ideal for Positioning, Scanning, Metrology n Ideal for scanning applications or high-resolution positioning n Cleanroom compatible n Size of the motion platform to 300 mm × 300 mm n Travel ranges to 1 m n Load capacity to 775 kg n Straightness / flatness to 0.5 μm per 25 mm n Pitch / roll / yaw to 1.2 µrad per 25 mm Linear air bearings of the PIglide RB series are exactly right for applications that need smooth, precise, linear motion. The air bearing modules replace ball or crossed roller guides and are easy to integrate. They offer improved straightness, angular deviation, and repeatability compared to stage units with ball guides, especially for travel ranges longer than 100 mm. Because air bearings are basically friction free, they work without stiction on approach or during operation, even under maximum load. Air bearings work without making contact and with purified air, and are virtually maintenance and wear free. Applications n Sample Inspection n Scanning n Metrology / Testing Accessories and options n Air preparation kit n Mounting Feet n Custom configurations on request n Several motion platforms on one guide n Constructions with moving guide >> PIglide Air Bearing Technology n Optical Alignment n Flatpanel Inspection Technology Glossary ....................... page 290 266 W W W. P I . W S Size of the motion platform / mm × mm Travel range / mm Vertical load capacity* / N Lateral load capacity* / N A-101 50 × 50 50 to 200 130 75 A-102 50 × 100 50 to 300 260 260 A-103 75 × 75 50 to 300 350 195 A-104 75 × 115 50 to 300 540 540 A-105 100 × 100 50 to 300 630 370 A-106 100 × 150 50 to 600 950 950 A-107 150 × 150 50 to 750 1580 790 A-108 200 × 200 50 to 1000 2950 1475 A-109 300 × 300 50 to 1000 7600 2210 Travel ranges to 300 mm Travel ranges to 600 mm Travel ranges to 1000 mm Straightness / flatness** ±1.25 μm ±2.5 μm ±5 μm Straightness / flatness, per 25 mm travel range** ±0.25 μm ±0.25 μm ±0.25 μm Position stability** ±0.05 μm ±0.05 μm ±0.05 μm Pitch / yaw, per 25 mm travel range** 1.2 µrad 1.2 µrad 1.2 µrad Pitch / yaw, overall** 10 µrad 20 µrad 30 µrad A-10x.xxx Operating pressure 80 psi (550 kPa) nominal Air consumption <1.0 SCFM (28 SLPM) Air quality Clean (filtered to 1.0 μm or better) – ISO 8573-1 Class 1 Oil free – ISO 8573-1 Class 1 Dry (–15 °C dew point) – ISO 8573-1 Class 3 Materials Hardcoat aluminum, stainless steel fasteners Components & Accessories * The specified load capacities assume an operating pressure of 80 psi (550 kPa). For an alternative operating pressure, contact PI for determining other load capacities. ** Precision specifications depending on load, orientation, and external forces on the bearing. Contact PI for application-specific parameters. Ask about custom designs! 267 MOTION | POSITIONING A-10x.xxx, dimensions in mm Model A B C D E F G H J K L M N P Q R S T U V W X A-101 A-102 A-103 A-104 A-105 A-106 A-107 A-108 A-109 50 100 75 115 100 150 150 200 300 50 50 75 75 100 100 150 200 300 35 45 55 75 75 100 100 130 140 15 25 25 45 35 60 50 70 70 25 25 45 45 60 60 100 140 240 5 5 7.5 7.5 10 10 10 10 10 15 15 30 30 40 40 75 100 200 CL CL 12.5 12.5 20 20 50 50 100 4x M3 C’BORE 4x M3 C’BORE 4x M5 C’BORE 4x M5 C’BORE 4x M6 C’BORE 4x M6 C’BORE 6x M6 C’BORE 6x M6 C’BORE 6x M6 C’BORE 2x M3 2x M3 2x M5 2x M5 2x M6 2x M6 4x M6 4x M6 4x M3 80 130 115 155 150 200 200 250 350 15 15 35 50 50 50 50 50 50 40 40 N/A N/A N/A N/A N/A N/A N/A N/A 60 N/A N/A N/A 110 110 150 150 N/A N/A N/A N/A N/A N/A N/A N/A 250 40 40 60 60 80 80 125 170 270 6x M3 10x M3 4x M5 4x M5 4x M6 8x M6 8x M6 8x M6 12x M6 12 12 14 14 14 14 14 14 14 21 46 37.5 57.5 50 75 75 100 150 30 40 47.5 67.5 37.5 50 50 65 65 10 10 15 15 20 20 20 20 20 4 (5/32”) 6 (1/4”) 6 (1/4”) 6 (1/4”) 6 (1/4”) 6 (1/4”) 6 (1/4”) 6 (1/4”) 6 (1/4”) 268 W W W. P I . W S A-10x.MNT Mounting Feet For Mounting the Air Bearing Modules of the A-10x Series n Hardcoat aluminum n atched exactly to the respective M air bearing module Compatible with Width / mm Overall mass (one set) / kg A-101.MNT A-101.xxx 10 0.03 A-102.MNT A-102.xxx 10 0.03 A-103.MNT A-103.xxx 15 0.08 A-104.MNT A-104.xxx 15 0.08 A-105.MNT A-105.xxx 20 0.13 A-106.MNT A-106.xxx 20 0.13 A-107.MNT A-107.xxx 20 0.27 A-108.MNT A-108.xxx 20 0.46 A-109.MNT A-109.xxx 20 0.94 Components & Accessories Model 269 MOTION | POSITIONING A-41x PIglide FPC: Flat, Circular Air Bearing Modules Friction-free, modular air bearings n Diameters from 25 mm to 300 mm n Load capacity to 15500 N n Stiffness to 860 kN/mm n Cleanroom compatible n M ounting hardware, customizations, and accessories available The PIglide Flat Pad Circular air bearing series is suitable for applications that require friction-free, accurate linear or planar motion. The modular concept of these air bearings allows the user to build their own motion system. Several bearings can be combined to increase the load capacity or to create multi-axis motion platforms. Applications n Sample >> PIglide Air Bearing Technology Inspection n Scanning n Metrology n Optical Alignment n Flatpanel Inspection / Testing Technology Glossary ....................... page 290 270 W W W. P I . W S Part # Diameter / mm Ball interface diameter / mm Load capacity / N Stiffness / N/µm Air consumption / l/h (SCFH) Mass / g A-411.025 25 13 88 17.5 60 (2) 16 A-411.040 40 13 220 28.0 60 (2) 42 A-411.050 50 13 330 52.5 85 (3) 66 A-411.065 65 13 660 78.8 115 (4) 171 A-411.080 80 13 1010 111 170 (6) 259 A-411.100 100 20 1710 175 170 (6) 505 A-411.125 125 20 2780 254 230 (8) 1105 A-411.150 150 20 4000 350 285 (10) 1590 A-411.200 200 20 7700 520 570 (20) 4040 A-411.300 300 20 15500 860 850 (30) 12000 Air supply Operating pressure 80 psi (550 kPa) nominal Air quality Clean (filtered to 1.0 μm or better) – ISO 8573-1 Class 1 Oil free – ISO 8573-1 Class 1 Dry (–15 °C dew point) – ISO 8573-1 Class 3 Miscellaneous Guideway surface flatness <1µm / 300 mm Nominal fly-height 10 – 15 µm Materials Hardcoat aluminum, stainless steel fasteners Recommended guideway materials Guideways are supplied by the customer. Granite, hardcoat aluminum, stainless steel, ceramics, nickel-plated steel, nickel-plated cast iron Air bearing type Discrete orifice Mounting Hardware (sold separately) Part # Description Ball interface diameter A-412.013S Threaded ball stud assembly 13 A-412.013N Mounting nut 13 A-412.013P Retaining plate 13 A-412.020S Threaded ball stud assembly 20 A-412.020N Mounting nut 20 A-412.020P Retaining plate 20 Components & Accessories The loads listed assume a supply pressure of 550 kPa (80 psi). Please contact PI if other pressures are required. 271 MOTION | POSITIONING Model A B C D E F A-411.025 A-411.040 A-411.050 A-411.065 A-411.080 A-411.100 A-411.125 A-411.150 A-411.200 A-411.300 25 40 50 65 80 100 125 150 200 300 13 13 13 20 20 25 35 35 66 66 13 13 13 13 13 20 20 20 20 20 N/A 21.6 21.6 21.6 21.6 31.6 31.6 31.6 31.6 31.6 6.4 7 7 8 8 9 9 9 9 9 1.5 1 1 1 4.5 6.4 6.4 6.4 25 25 272 W W W. P I . W S Mounting hardware dimensions: 13 mm ball interface diameter Components & Accessories Mounting hardware dimensions: 20 mm ball interface diameter 273 MOTION | POSITIONING A-60x PIglide RT Rotary Air Bearing Module Frictionless, Nonmotorized n otion platform diameter from 50 mm M to 300 mm n Load capacity to 425 kg n Eccentricity / flatness <200 nm n Can be mounted vertically or horizontally n Cleanroom compatible Product Overview Accessories and options The PIglide RT series of nonmotorized passive rotary air bearings are designed for accuracy, precision, high stiffness, and ease of use. They can be used in any orientation and are easy to integrate with motors and encoders for complete positioning solutions. n Encoder The bearings of the RT series offer superior eccentricity, flatness, and wobble performance. Because they are completely friction-free, they exhibit no breakaway torque and no frictional resistance during operation. They are ideal for use in cleanrooms, require no maintenance or lubrication, and have unlimited lifetime. n Applications n Sample n Inspection Scanning for precise acquisition of stage angle during manual operation n Mounting base for horizontal mounting onto optical tables and flat surfaces PIglide filter and air preparation kits n Customized mounting flanges and square housings >> PIglide Air Bearing Technology n Metrology n Optical / Testing Alignment Technology Glossary ....................... page 290 274 W W W. P I . W S Size and loads Motion platform diameter /mm Journal length / mm Load capacity (1) axial / radial /N Permissible tip / tilt torque (1) / N·m Stiffness axial / radial / N/µm A-601.025 50 25 134 / 57 0.57 26 / 8 A-602.038 75 38 299 / 132 1.13 57 / 22 A-603.025 100 25 536 / 115 1.70 96 / 18 A-603.050 100 50 536 / 229 4.52 96 / 35 A-604.050 150 50 1206 / 344 22.6 210 / 64 A-604.090 150 90 1206 / 605 36.7 210 / 113 A-605.065 200 65 2144 / 577 39.6 385 / 110 A-605.100 200 100 2144 / 917 67.8 385 / 175 A-607.075 300 75 4244 / 1203 141.3 788 / 204 A-607.175 300 175 4244 / 2789 282.5 788 / 475 Performance specifications Eccentricity (2) / nm Flatness (2) / nm Wobble (2) / µrad Max. velocity (3) / rpm Moment of inertia / kg·mm² Rotating mass / kg Overall mass / kg A-601.025 300 100 5 3000 35 0.15 0.4 A-602.038 250 75 4 3000 231 0.4 1.2 A-603.025 175 75 2.5 3000 705 0.7 1.5 A-603.050 175 75 2.5 3000 750 0.8 2.5 A-604.050 100 50 2 3000 4715 2.1 5.4 A-604.090 100 50 2 3000 5050 2.6 8.2 A-605.065 100 50 1.5 2000 17900 4.6 11.6 A-605.100 100 50 1.5 2000 18800 5.3 16.3 A-607.075 75 40 1 1000 181900 19.4 38.1 A-607.175 75 40 1 1000 206700 26.0 59.0 Optional encoders Sensor signal Sensor resolution / µrad Max. velocity / rpm Reference point switch A-601.xxxH A/B quadrature, differential, RS-422, 4 MHz 192 2500 1 / revolution, one count over one step of the encoder, synchronized to output signal A-602.xxxH A/B quadrature, differential, RS-422, max. 4 MHz 133 2000 1 / revolution, one count over one step of the encoder, synchronized to output signal A-603.xxxH A/B quadrature, differential, RS-422, max. 4 MHz 100 1500 1 / revolution, one count over one step of the encoder, synchronized to output signal A-604.xxxH A/B quadrature, differential, RS-422, max. 4 MHz 66.4 1000 1 / revolution, one count over one step of the encoder, synchronized to output signal A-605.xxxH A/B quadrature, differential, RS-422, max. 4 MHz 50 800 1 / revolution, one count over one step of the encoder, synchronized to output signal A-607.xxxH A/B quadrature, differential, RS-422, max. 4 MHz 33.5 500 1 / revolution, one count over one step of the encoder, synchronized to output signal A-60x Operating pressure 75 to 85 psi (515 to 585 kPa) Air consumption <2.0 SCFM (57 SLPM) Air quality Clean (filtered to 1.0 μm or better) – ISO 8573-1 Class 1 Oil free – ISO 8573-1 Class 1 Dry (–15 °C dew point) – ISO 8573-1 Class 3 Materials (4) Hardcoat aluminum, stainless steel fasteners Components & Accessories Miscellaneous (1 Capacities listed assume supply pressure of 80 psi. Please contact PI if other pressures are required. (2) Precision specifications are dependent on quality of mounting base, payload, orientation, and external forces on the bearing. For application-specific parameters, please contact PI. Values shown are static (no rotational velocity during measurement). (3) Velocity may be limited by the encoder option or payload imbalance. Please contact PI for further details. (4) Alternate stage surface materials, such as stainless steel, are available. Please contact PI for a quote. 275 MOTION | POSITIONING A-60x.xxx, dimensions in mm Model A B C D E F G H J K L M N A-601.025 A-602.038 A-603.025 A-603.050 A-604.050 A-604.090 A-605.065 A-605.100 A-607.075 A-607.175 50 75 100 100 150 150 200 200 300 300 25 38 25 50 50 90 65 100 75 175 50 65 55 80 95 135 125 160 150 250 70 100 125 125 185 185 240 240 355 355 25 30 50 50 75 75 100 100 150 150 40 50 75 75 125 125 150 150 250 250 60 87.5 112.5 112.5 170 170 220 220 330 330 8 12.5 25 25 40 40 60 60 75 75 M3x0.5, 6 DEEP M3x0.5, 6 DEEP M4x0.7, 8 DEEP M4x0.7, 8 DEEP M5x0.8, 10 DEEP M5x0.8, 10 DEEP M6x1.0, 12 DEEP M6x1.0, 12 DEEP M6x1.0, 12 DEEP M6x1.0, 12 DEEP 3x M3 SHCS, 30 LG. MIN 3x M4 SHCS, 40 LG. MIN 3x MS SHCS, 30 LG. MIN 3x MS SHCS, 50 LG. MIN 4x M6 SHCS, 50 LG. MIN 4x M6 SHCS, 90 LG. MIN 6x M6 SHCS, 70 LG. MIN 6x M6 SHCS, 100 LG. MIN 6x M8 SHCS, 80 LG. MIN 6x M8 SHCS, 150 LG. MIN 3x M3x0.5, 6 DEEP 3x M4x0.7, 8 DEEP 3x M5x0.8, 10 DEEP 3x M5x0.8, 10 DEEP 4x M6x1.0, 12 DEEP 4x M6x1.0, 12 DEEP 6x M6x1.0, 12 DEEP 6x M6x1.0, 12 DEEP 6x M8x1.25, 16 DEEP 6x M8x1.25, 16 DEEP 6 9.5 6 12.5 12.5 22.5 16 23.5 17.3 58.5 30 30 30 30 68 68 5 5 5 5 276 W W W. P I . W S Model A-601.025 A-602.038 A-603.025 A-603.050 A-604.050 A-604.090 A-605.065 A-605.100 A-607.075 A-607 175 M or H M or H M or H M or H M or H M or H M or H M or H M or H M or H A B C D E F G H J 50 75 100 100 150 150 200 200 300 300 65 80 65 90 100 140 130 165 155 255 26.5 28.5 25 25 27.5 27.5 35 35 42.5 42.5 82 106 135 135 185 185 240 240 355 355 74 104 125 125 185 185 240 240 355 355 55 80 100 100 150 150 200 200 300 300 70 100 - 35 50 - M3 SHCS, 25 LG. MIN M4 SHCS, 30 LG. MIN M5 SHCS, 25 LG. MIN M5 SHCS, 25 LG. MIN M6 SHCS, 30 LG. MIN M6 SHCS. 30 LG. MIN M6 SHCS, 35 LG. MIN M6 SHCS, 35 LG. MIN M8 SHCS, 40 LG. MIN M8 SHCS, 40 LG MIN Components & Accessories A-60x.xxxH and A-60x.xxxM, dimensions in mm 277 MOTION | POSITIONING A-65x PIglide HB: Hemispherical Air Bearing Friction-free, ideal for rotary motion on three axes n Cleanroom compatible n Low inertia n Diameter up to 300 mm n Rotatable in three directions n Load capacity to 635 kg n Tip / tilt range to ±45° n perating pressure from 30 psi to 90 psi O (207 kPa to 621 kPa) n Ideal for satellite control and simulation of weightlessness Overview The spherical bearings, which are often used in research on weightlessness in satellites, are also used in systems for precision chip contacting and optical alignment. Due to the use of spherical bearings at both ends of the drive screw shaft, it is possible to build extremely stiff drive screws. This arrangement allows precision alignment of the drive screw shaft due to the motion of one spherical bearing relative to the other. Accessories and options A-65x.PED Matching pedestal for each A-65x model, dimensions in mm Applications n Semiconductor n Optical Alignment n Air preparation kit n Custom configurations on request Model Mass / kg Compatible with A-651.PED A-652.PED A-653.PED A-654.PED A-655.PED A-656.PED A-657.PED 3.1 4.0 16 16 17 43 44 A-651.xxx A-652.xxx A-653.xxx A-654.xxx A-655.xxx A-656.xxx A-657.xxx >> PIglide Air Bearing Technology n Scientific Instrumentation Technology Glossary ....................... page 290 278 W W W. P I . W S Model Sphere diameter / mm Rotation range**/ ° Load capacity* / kg Base mass / g Sphere mass / g Moment of inertia*** / g·m2 A-651 50 ±45 15 115 70 0.02 A-652 75 ±45 35 235 216 0.14 A-653 100 ±45 65 550 475 0.58 A-654 150 ±45 160 1350 1475 4.21 A-655 200 ±45 265 2500 3350 17.2 A-656 250 ±45 405 4000 5525 46.3 A-657 300 ±45 635 6500 8100 103 Operating pressureperating pressure 80 psi (550 kPa) nominal, 90 psi (621 kPa) maximum Air consumption <1.0 SCFM (28 SLPM) Air quality Clean (filtered to 1.0 μm or better) – ISO 8573-1 Class 1 Oil free – ISO 8573-1 Class-1 Dry (–15 °C dew point) – ISO 8573-1 Class 3 Materials Hardcoat aluminum, stainless steel fasteners alternative materials on request * The specified load capacities assume an operating pressure of 80 psi (550 kPa). For an alternative operating pressure, contact PI for determining other load capacities. ** Other travel ranges on request. *** Around the center of the sphere. Components & Accessories A-65x.045, dimensions in mm Model A B C D E F G H I A-651 A-652 A-653 A-654 A-655 A-656 A-657 50 75 100 150 200 250 300 30 50 70 110 150 200 250 42 55 70 95 125 150 175 55 70 100 140 170 210 250 23 27 30 40 50 55 65 M3 M3 M4 M5 M5 M6 M6 38 60 85 125 175 225 275 M3 M3 M4 M5 M5 M6 M6 45 60 85 125 150 190 230 279 MOTION | POSITIONING A-60x.MTT PIglide Manual X-Y-Tilt Platform Compatible with A-60x and A-62x n Motion platform diameter 75 to 300 mm n Manual operation n 4 degrees of freedom: X, Y, θX, θY n Clear aperture n C an be mounted directly onto an A-60x and A-62x Applications n Sample n Metrology n Optical >> PIglide Air Bearing Technology Inspection / Testing Alignment Technology Glossary ....................... page 290 280 W W W. P I . W S Model Motion platform diameter /mm Travel range X,Y Travel range θX, θY Overall mass /kg Moment of inertia /kg·mm² A-602.MTT 75 ±1.5 mm ±1.25° 0.8 620 A-603.MTT 100 ±1.5 mm ±1.25° 1.5 2090 A-604.MTT 150 ±3 mm ±1.25° 4 12900 A-605.MTT 200 ±3 mm ±1.25° 8.6 52100 A-607.MTT 300 ±3 mm ±1.25° 25 319000 Model Motion platform diameter /mm Compatible with A-60x Compatible with A-62x A-602.MTT 75 A-602.xxx A-603.MTT 100 A-603.xxx A-623.xxx A-604.MTT 150 A-604.xxx A-624.xxx A-605.MTT 200 A-605.xxx A-607.MTT 300 A-607.xxx A-627.xxx A-60x.MTT, dimensions in mm A-604 through A-607 Components & Accessories A-602 / A-603 Model A B C D E A-602.MTT A-603.MTT A-604.MTT A-605.MTT A-607.MTT 75 100 150 200 300 25 30 35 45 55 30 50 75 100 150 50 75 125 150 250 M3x0.5, 6 DEEP M4x0.7, 8 DEEP M5x0.8, 10 DEEP M6x1.0, 12 DEEP M6x1.0, 12 DEEP 281 MOTION | POSITIONING A-80x PIglide Filter and Air Preparation Kits Multi-stage Filtration System with Pressure Regulation n C leans and filters the compressed air supply n Controls the supply pressure n Optional pressure switch n R ecommended for use with all PIglide air bearing products n 282 W W W. P I . W S Customized adaptations possible A-801 A-802 4-stage air preparation kit 2-stage air preparation kit Maximum flow 60 SCFM (1680 SLPM) 10 SCFM (300 SLPM) Compressed air supply quality (ISO 8573-1) As desired Class 3 or better Max input pressure 150 psi (1035 kPa) 150 psi (1035 kPa) Primary construction Aluminum Polycarbonate Mass 4.2 kg 0.7 kg Description Air supply Miscellaneous Options Option 1 pressure switch 1 = none 2 = N/O contact, adjustable threshold value Option 2 Air input connection 0 = quick connection, 6 mm and 8 mm outer diameter in the scope of delivery 3 = quick connection 1/4” and 3/8” outer diameter in the scope of delivery Option 3 Air output connection 0 = quick connection, 6 mm and 8 mm outer diameter in the scope of delivery 3 = quick connection 1/4” and 3/8” outer diameter in the scope of delivery All modules require a compressed air supply with dry air according to ISO 8573-1 Class 3 or better (dew point no greater than 0°C). Components & Accessories A-801.100, dimensions in mm 283 MOTION | POSITIONING A-801.200, dimensions in mm A-802.100, dimensions in mm 284 W W W. P I . W S A-802.200, dimensions in mm Components & Accessories Air pressure below the threshold value, pressure switch opened (left). Air pressure above the threshold value, pressure switch closed (right). 285 MOTION | POSITIONING L-500 Adapter Bracket For Vertical Mounting of Linear and Rotation Stages 286 W W W. P I . W S L-500.AV1 (Angle to axis) L-500.AV1 (Axis to angle) L-500.AV3 (Angle to axis) L-500.AV3 (Axis to angle) Linear stages HPS-170 X X* X – L-406 – – X X L-408 – – – X L-412 X X X – – L-417 X – – V-412 X X X V-417 X – – – L-509 – – X X L-511 X X* X – LS-180 X – X – UPL-120 – – – X Rotation stages DT-80 – – – X L-611 – X X – UPR-100 – – – – UPR-120 – X X – UPR-120 AIR – X X – Goniometers WT-85 – – X X WT-90 – – X – WT-100 – – – X WT-120 – – X – Z stage L-306 – – X – L-310 – – X – XY stage L-731 X – X – V-731 X – X – L-741 X – X – V-741 X – X – Components & Accessories * to 155 mm stroke Ask about custom designs! 287 MOTION | POSITIONING L-500.AV1, dimensions in mm Top view of the L-500.AV1 adapter bracket, dimensions in mm Bottom view of the L-500.AV1 adapter bracket, dimensions in mm 288 W W W. P I . W S L-500.AV3, dimensions in mm Bottom view of the L-500.AV3 adapter bracket, dimensions in mm Components & Accessories Top view of the L-500.AV3 adapter bracket, dimensions in mm 289 MOTION | POSITIONING Terms and Technology Glossary A Absolute encoder Absolute encoders are used for detecting the position and provide information on the absolute position of a motion platform. For example, this can be realized optically by using an additional Pseudo Random Code (PRC) scale. ActiveDrive motor The ActiveDrive Motor also integrates a servo amplifier into the motor housing, which is driven in PWM mode (Pulse Width Modulation). The operating voltage, which is mostly 24 V for ActiveDrive motors, is supplied by a separate power supply. Advantage: Lower costs, more compact design and higher reliability compared to an externally cabled amplifier; a higher degree of efficiency due to elimination of power loss between the amplifier and motor; avoidance of radiation interference because the amplifier and motor are built into the same shielded housing. Air bearing An air film of a few micrometers is used as bearing. Therefore, air bearings are free of friction and, compared to mechanical bearings, allow a considerably higher guiding accuracy. See “PIglide Air Bearing Technology”. Average current Current that is available reliably over a longer period. Given as measured value. For multi-axis controllers, it is specified per channel. B Ball screw In the case of ball screws, only rolling friction occurs, which allows higher speeds, drive performance, and longer lifetime than leadscrews. They are however, not self-locking. The backlash can be minimized adjusting the ball diameter and the thread profile. Brushless DC Motor (BLDC) Compared to conventional DC motors, BLDC motors manage without wear-prone brushes meaning that a considerably longer lifetime is possible. Commutation is fully electronic and is generated completely by a rotating magnetic field in the stator that drags the rotor; the motor is based more on the concept of a synchronous machine. If sine commutation and a servo amplifier are used for position control instead of block commutation, the term synchronous servo motor (SSVM) is often encountered. Compared to DC motors, it is possible to realize a smaller and lighter design and provide the same performance, which results in a high ratio between the torque and the motor size. At the same time, the drivetrain can be shorter for the same travel range because the drive shaft is located inside the motor. C Capacitive sensor Capacitive sensors allow contactless measuring, do not introduce much energy into the drive system and have a flat design. Their direct position measurement eliminates drift effects for travel ranges of up to 1.5 mm. The overall system, which consists of the stage, sensor technology, and electronics, gains on performance and precision. Due to noncontact measuring in the 10 μm up to approx. 2 mm range, it is possible to mount the capacitive sensor in the stage at the point where the motion actually takes place. The design consists of two conductive surfaces: A high-frequency alternating current generates a homogenous electric field between the two surfaces. Customers from the semiconductor industry also appreciate the small and versatile design as well as the lack of thermal build-up in the system. See “Sensor linearization”. Closed-loop operation Additional position feedback makes it possible to operate motors in a closed servo loop. Feedback of the corresponding encoder signals is necessary for this purpose. Basically, this concept makes it possible to control the rotational speed, the position, and the torque, which allows realization of a high position resolution, a uniform feed rate, and a large dynamic range for velocity and acceleration at a constant torque. Creep An unwanted change in the displacement over time. Crossed roller guide Crossed roller guides are comparatively stiff and manage with low preload. This results in reduced friction with high load capacity, high guiding accuracy, and smooth running. An additional forced cage control helps to prevent the roller bearing from creeping. Nevertheless, this shortens the possible travel range over the same axis length. 290 W W W. P I . W S Crosstalk Drift Deviation from the ideal motion in axes perpendicular to the direction of motion. Angular errors are xrx = roll, xry = pitch, xrz = yaw. Linear errors are lateral runout such as xty = straightness, xtz = flatness. See “Linearity error”. See “Creep”. Current consumption Current consumption of the system on supply end. It is specified for controller without load. Alternatively, power consumption. Drive type Defines the types of drive supported by the controller / driver, such as voice coils, linear motors, DC/BLDC motors, stepper motors and others. E Current limitation Encoder Short-circuit protection. D An encoder is used for determining the position. Basically, a difference is made between linear and rotary encoders, which, depending on the configuration, operate either incrementally or absolutely. DC motor Encoder input A DC motor exploits the force effect of the electrical current via a pivoted conductor loop in a magnetic field. In conjunction with servo controllers (see “servo motor”) , these types of motors allow high torques at lower motor speeds, good dynamics over a large speed range, faster response, lower heat generation as well as smooth and vibration-free operation. The disadvantage is the wear-prone brushes used for commutation that does result in a comparatively shorter lifetime. However, due to their low holding force, DC motors (without gearhead) are generally not suited for vertically oriented axes. Maximum bandwidth (-3 dB) of the input signals for the encoder input. Design resolution The theoretical minimum movement that can be made. Design resolution must not be confused with minimum incremental motion. In indirect position measurement methods, values for spindle pitch, gear ratio, motor or sensor / encoder resolution, for example, are included in the calculation of the resolution; normally it is considerably below the minimum incremental motion of a mechanical system. Indirect measurement methods, the resolution of the sensor is specified. Extensive software package To make systems more user friendly, software plays an important role in positioning systems. Customers expect a plug-andplay solution even if several positioning systems are combined or different drive systems need to interact, and that is why PI (Physik Instrumente) provides PIMikroMove® host software. You only need to enter your parameters into the application to avoid programming altogether. Also supports a number of text-based languages, has its own LabVIEW, Python and Matlab drivers, and the software is compatible with Windows, Linux, and OSX. However, not all software tools may be available for all controller versions. F Flatness See “Crosstalk”. Position measuring is performed with the highest accuracy directly at the motion platform so that nonlinearity, mechanical play or elastic deformation have no influence on position measuring. This is achieved by noncontact optical linear encoders. Precision positioning systems use different encoder types as position sensor: Incremental encoders with different accuracy levels, absolute-measuring encoders that additionally make referencing unnecessary when a machine is switched on again, and for travel ranges under 2 mm, capacitive sensors. Flexures The motion of a flexure is based on elastic deformation of a solid. This avoids any static, rolling or sliding friction. Flexure elements have high stiffness and load capacity and are very insensitive to shocks and vibrations. They do not wear, require no maintenance, are completely vacuum compatible, function in a wide temperature range, and do not require any lubricants. 291 MOTION | POSITIONING Terms and Technology Glossary Direct metrology Terms and Technology Glossary G Leadscrew Gearhead Gearheads allow adjustment of the speed and the torque. However, the transmission ratio, which is the proportion between the speed and the gear input, is decisive and the speed is defined at the gear output. In the case of transmission reduction, this ratio is greater than one, which results in a lower speed with a higher torque. The opposite applies in the case of higher speeds. Typical types of gears include for example, worm gears, spur gears, planetary gears, bevel gears, and belt gears. I ID chip An ID chip is located in the connector of many stages. When the stage is calibrated at the factory with a digital controller, the calibration data is saved together with specific product information on the ID chip. When switched on, digital electronics read the data from the ID chip of the connected stage. Stages, whose ID chip contains the calibration data, can therefore be connected to any suitable digital electronics without renewed calibration. Leadscrews can achieve very high resolutions with smooth running and are often preloaded by springs to minimize backlash. This results in sliding friction and therefore a self-locking effect. However, this reduces the speed, performance, and the lifetime. Limit switch Function: Optical, magnetic. Linear ball guiding Linear ball guides require exact tolerances between the guide and bearing in order to keep the play and friction as low as possible. This limits the load capacity. Due to the simple design, they are only suitable for inexpensive applications with comparatively low requirements. Linear encoder Linear encoders measure the position directly at the motion platform. As a rule, this means that a higher accuracy is achieved compared to rotary encoders, because nonlinearity, mechanical play, and elastic deformation have no influence. Linear motor Permissible input level for digital interfaces. A linear motor is an electromagnetic direct drive that generates straight linear motion. The range of a linear motor is practically unlimited. A linear measuring system is always required for motion and positioning; open loop operation of a linear motor is not possible. The linear motor does not require mechanical coupling elements to convert the rotation of the motor into linear motion as is the case with servo motors. Typically, 3-phase motors are used. Typical applications are found in the electronics and semiconductor industry, medicine and biotechnology, in tool machines with a strong focus on laser cutting but also in other fields where precision, dynamics, and productivity are important. Integrated feedback sensor Linearity error Absolute measuring capacitive, piezo resistive (PRS) or strain gauge (SGS) and optical (absolute and relative) sensors are used to provide position information to the controller. Deviation in motion direction, of measured position from commanded position (positioning accuracy). Measured with an external, traceable device. The value is given as a percentage of the entire measuring range. Measurement of the linearity error: The target and measured actual values of the positions are plotted against each other, a line is drawn through the first and last data point, and the maximum absolute deviation is determined. A linearity error of 0.1 % corresponds to an area of ±0.1 % around the ideal line. Example: A linearity error of 0.1 % over a measuring range of 100 µm produces a possible maximum error of 0.1 µm. Incremental encoder When incremental encoders are in motion, they generate impulses that are counted by the controller. However, in contrast to absolute encoders, it is a question of determining a relative position. To determine an absolute position, a limit switch or reference point switch signal must also be referenced. Input level L Lateral force, max. Maximum lateral force perpendicular to the operating direction. For XY stages the push/pull force capacity of the other module (in its operating direction) limits the lateral force that can be tolerated. Load capacity Maximum vertical load, when the stage is mounted horizontally. 292 W W W. P I . W S M Overtemperature protection Switch-off temperature for voltage output. No automatic restart. Magnetic bearing Magnetic levitation allows excellent linear and rotational guiding accuracy on a plane. The passive runner hovers of a magnetic field and is then actively guided by it. Flatness errors are measured and compensated by very accurate noncontact sensors. Contrary to air bearings, which are also very accurate, magnetic bearings can also be used in vacuum. P Measurement range extension factor Parallel kinematics, hexapods For capacitive sensors, used by PI. Hexapods are parallel-kinematic systems with six drives that are connected directly to a single platform. This makes it possible for users to position objects automatically in all degrees of freedom, X, Y, Z, and rotatory and, depending on the drive, with an accuracy in the micrometer range or lower. The parallelkinematic system is very stiff, with only a low passive weight to move and, with the corresponding design, can carry loads of up to several tons. Users are able to arbitrarily choose the reference coordinate system and, today, workers are now working together with hexapods on the production line. The user integrates the system into the automation environment via EtherCAT. N Noise For capacitive sensors. In extended measurement ranges, noise is considerably higher than in the nominal measurement range. Nonlinearity See “Linearity error”. Patents PI owns a large variety of patents on piezo and motor technology. Parallel metrology Each sensor measures the position of the same moving platform in the respective degree of freedom. This keeps the off-axis runout, or crosstalk, of all actuators inside the servo-control loop and allows it to be corrected automatically. Open-loop operation The actuator is used without a position sensor. Displacement roughly corresponds to the drive voltage. Creep, nonlinearity and hysteresis remain uncompensated. Open-loop operation is ideal for applications where fast response and very high resolution with maximum bandwidth are essential. Here, commanding and reading the target position in absolute values is either not important or carried out by external position sensors. Open-loop operation is not possible for electro-magnetic direct drives, such as linear motors and voice-coil drives. Operating temperature range In any case, the device can be operated safely in the maximum permissible temperature range. To avoid internal overheating however, full load is no longer available above a certain temperature (maximum operating temperature under full load). Nevertheless, recalibration or zero-point-adjustment may be required if the system is operated at different temperatures. Performance specifications are valid for room temperature range. Please refer to individual datasheets and contact PI for more details. Operating voltage Allowed control input voltage range (also input frequency) for the supply of the device. Peak current Only available for very short times, typically under a few milliseconds. It is used to estimate the possible dynamics with a certain capacitive load. Note: In this case, the controller / driver does not necessarily work linearly. Piezoresistive sensor (PRS) Strain gauge sensors that consist of a semiconductor foil. See “Strain gauge sensors”. PIglide Air Bearing Technology The PIglide air bearing technology allows friction-free positioning with a high guiding accuracy of up to 5 μrad over 100 mm. The technology improves the position resolution and it is possible to realize constant-velocity scanning. The repeatability is only a few encoder impulses. A similar precision in the nanometer range is also possible with flexure-guided piezo nanopositioners, however, only over considerably shorter travel ranges. The developers at PI (Physik Instrumente) adapt high-precision, air bearing positioning stages and motion control systems according to customer requirements. 293 MOTION | POSITIONING Terms and Technology Glossary O Terms and Technology Glossary PIMag® Magnetic Linear Motors Magnetic direct drives from PI (Physik Instrumente) provide a direct and stiff connection between the load to be moved and the drive. The industry demand is particularly high when objects need to be positioned with high dynamics and precision. Thanks to the smooth-running precision linear guides with crossed roller bearings, these types of linear motor stages are particularly suitable for applications that require constant-velocity scanning. The drives operate without contact and therefore very reliable. Users can integrate the magnetic direct drives into existing machines and systems quickly and easily via standardized fieldbus systems. See “Linear motor”, “Torque motor” PIMag® Voice Coil Thanks to their low weight and friction-free drive principle, voice coil drives are small and particularly suitable for applications that require high dynamics and high velocities over limited travel ranges – for example, in medical technology. Voice coil drives have a greater advantage for the customer when compared to traditional drive screw-based solutions, particularly with respect to wear and dynamics. High scan frequencies and precision positioning are possible with these drives, because they are free of hysteresis effects. See “Voice Coil Drive”. R Recirculating Ball Bearing Due to their design, recirculating ball bearings are already insensitive to creeping. For example, they are suitable for highprecision axes, which are often used for scanning smaller areas. When assembled correctly, they offer a high load capacity and at the same time, long lifetime, no maintenance, and high guiding accuracy. Reference point switch Function: Optical, magnetic. Repeatability Typical values in closed-loop operation mode (RMS, 1 σ). Repeatability is a percentage of the total distance or angle traveled. For small ranges, repeatability may be significantly better. Resolution Position resolution relates to the smallest change in displacement that can still be detected by the measuring devices. Values are typical results (RMS, 1 σ). Pitch Roll See “Crosstalk”. See “Crosstalk”. Power consumption Rotational runout Maximum power consumption under full load. See “Crosstalk”. Profile generator Rotary encoder Functionality of motor controllers that allows motion profiles such as linear interpolation, point-to-point, trapezoid, double bends. For several axes: Electronic gearing. Rotary encoders measure the position indirectly because for example, they are mounted directly on the motor shaft. That means that they are attached to a rotating part of the drivetrain. Easy installation of the sensors is an advantage but backlash and mechanical play affect the resulting measurement. Pulse width modulation (PWM) PWM-controlled motors allow control of the (motor) performance with a high-frequency-signal. This means that the power signal can be separated from the digital control signal. PWM control is used for example for controlling electric motors such linear motors or voice coil drives. The “ActiveDrive Motor” is a special feature from PI, see there. Push/pull force capacity (in operating direction) Specifies the maximum forces that can be applied to the system along the active axis. If larger forces are applied, damage to the actuator can occur. The force limit must also be considered in dynamic applications. Example: the dynamic forces generated by sinusoidal operation at 500 Hz, 20 µm peak-to-peak, 1 kg moved mass, are approximately ±100 N. S Stepper motor Stepper motors only take discrete positions within one revolution. A position can be commanded with a constant step size without an additional encoder. The achievable step size is specified by the motor control. Intelligent wiring of the individual poles allows a so-called microstep mode, which, depending on the type, is able to realize several hundreds of thousands of microsteps between the full steps by electrical interpolation. However, step losses and the associated positioning errors can be the result in the case of excessively high loads and accelerations as well as resonance effects if an additional encoder is 294 W W W. P I . W S not used. High speeds are only possible with high numbers of steps, which however, prevents reaching the achievable torque. A mechanical damper on the motor shaft, which also works as handwheel, supports smooth running. To hold position without a self-locking gearhead, stepper motors must be supplied with current, which can then lead to jittering. Nevertheless, stepper motors offer a very long lifetime and, compared to DC motors, are especially suited to applications with reduced dynamics and in a vacuum. Specification Performance specifications are valid for room temperature (22 ±3 °C) and closed-loop systems are calibrated at this temperature (specifications for different operating temperatures on request). Recalibration is recommended for operation at significantly higher or lower temperature. Custom designs for ultralow or ultrahigh temperatures on request. Straightness See “Crosstalk“. Measured value that specifies the frequency, with which the amplitude decreased by -3 dB. Sensor linearization For capacitive sensors, the signal conditioning electronics demonstrates a notably low noise level. The integrated linearization system (ILS) compensates for the influences of parallelism errors between the capacitor plates. Sensor resolution The smallest calculable increment that can be detected by the measuring system used. Rotary encoder: Number of counts per screw rotation. Linear encoder: Smallest increment still detected by the sensor system used. The sensor can be the critical element in position resolution, for this reason the sensor resolution is specified separately if necessary. See “Design resolution”. Serial kinematics Each actuator acts on its own platform. There is a clear relationship between actuators and motion axes. The advantages are the relatively simple assembly and multi-axis control. The dynamic characteristics depend on the individual axis. Guiding errors cumulate and the overall guiding accuracy is poorer if compared to “Parallel kinematics”, see there. Serial metrology One sensor is assigned to each moving axis to be servo-controlled. Undesired off-axis motion, guiding error or crosstalk, go unnoticed and uncorrected. See “Parallel metrology”. Servo motor A motor with position detection and control is called a servo motor. The motor itself is often a DC motor. Servo motors offer high torques at a low speed, good dynamics over a large speed range, fast response, low heat generation as well as smooth and vibration-free operation. Either rotary or absolute encoders are used for detecting the position. A servo amplifier takes care of amplifying the signal and controlling the motor parameters. This is normally a PID controller (Proportional, Integral, Derivative) with additional filters in order to exploit the above-mentioned characteristics as best as possible. Synchronous servo motor (SSVM) A servo motor that is designed as a synchronous machine. This type of motor for example, can be realized from a brushless DC servo motor with sine commutation (see brushless “DC motor” and “servo motor”). T Threaded roller drive screw In the case of threaded roller drive screws, the contact surface between the drive screw, roller, and nut is considerably larger than with ball screw drives. This results in a very high stiffness and higher loads are possible. There are various versions, for example, guided planetary rollers without roller recirculation or rotating rollers, i.e., with roller recirculation, which allow even smaller pitches. Torque motor Torque motors are mainly brushless DC motors that are optimized for high torques or classical servo drives with a high number of poles. On the other side, it is possible to envisage torque motors as rolled-up linear motors. In contrast to conventional servo drives, torque motors achieve lower speeds but are able to achieve very high torques at medium to low speeds. The torque generated by a torque motor increases squared to the rotor diameter. As a rule, the rotor is a hollow shaft. When compared to the usual servo drives, the length of the installation space is not used and this allows low-profile dimensions. Torque motors represent a zero-play and stiff direct drive and can reach high positioning and repeatability with a high load. The high drive torque also allows higher accelerations and the associated high dynamics. Trajectory control Provisions to prevent deviation from the specified trajectory. Can be passive (e.g., flexure guidance) or active (e.g., using additional active axes and sensors). Translator A linear actuator. 295 MOTION | POSITIONING Terms and Technology Glossary Sensor bandwidth Terms and Technology Glossary U Voice coil drives User software and functions PIMikroMove®, PI General Command Set (GCS). Drivers for LabVIEW, shared libraries for Windows and Linux. Compatible with µManager, MetaMorph, MATLAB. Wave Generator. Linearization. Data recorder. Auto zero. Trigger I/O. Software configurable servo parameters. See “Extensive software package”. V Vacuum-compatible versions In a large number of industry sectors, production in a vacuum is becoming increasingly more important. Therefore, PI (Physik Instrumente) offers various different drive technologies to its customers that can be operated in a vacuum of 10 –7 or even 10–10 hPa. This applies to specially designed motors and actuators. These friction-free electromagnetic linear drives are characterized by their good dynamics, albeit with relatively low holding force. Voice coil motors are direct drives. The drive principle is the technical implementation of the Lorentz force: The force that a live conductor exerts in a permanent magnetic field is proportional to the magnetic field strength and the current. The motion controller controls the force via PWM control. The drive is combined with a measuring system for precision positioning and operated in a closed loop. The travel ranges of voice coil drives are therefore limited by the technology and are between 0.5 mm and 25 mm. Typical applications include short-range motion with fast settling times, applications with low noise generation, or sensitive programmable force controls. Y Yaw See “Crosstalk”. Physik Instrumente (PI) GmbH & Co. KG Auf der Roemerstrasse 1, 76228 Karlsruhe Germany Phone +49 721 4846-0 Fax +49 721 4846-1019 info@pi.ws www.pi.ws General Management: Dr. Karl Spanner, Dr. Peter Schittenhelm, Markus Spanner; Commercial Register: Reg.-Gericht Mannheim: HRA 104804; VAT-No.: DE 1431 828 03; WEEE-Reg.-No.: DE 93978928; General Partner: Physik Instrumente (PI) Verwaltungs GmbH; Commercial Register: Reg.-Gericht Mannheim: HRB 109941; Although the information in this document has been compiled with the greatest care, errors cannot be ruled out completely. Therefore, we cannot guarantee for the information being complete, correct and up to date. Illustrations may differ from the original and are not binding. PI reserves the right to supplement or change the information provided without prior notice. The company names or marks listed below are registered trademarks of Physik Instrumente (PI) GmbH & Co. KG: PI®, PIC®, PICMA®, PILine®, PIFOC®, PiezoWalk®, NEXACT®, NEXLINE®, PInano®, NanoCube®, Picoactuator®, Nanoautomation®, NEXSHIFT, PicoCube, PiezoMove, PIMikroMove, PIMag® The company names or marks listed below are registered trademarks of their owners: µManager, EtherCAT, LabVIEW, Leica, Linux, MATLAB, MetaMorph, Microsoft, National Instruments, Nikon, Olympus, Windows, Zeiss. CAT132E Precision Positioning and Motion Control 03/2018 4.2. ® Physik Instrumente (PI) GmbH & Co. KG 2018. Subject to change without notice. All contents, including texts, graphics, data etc., as well as their layout, are subject to copyright and other protective laws. Any copying, modification or redistribution in whole or in parts is subject to a written permission of PI. 296 W W W. P I . W S MOTION | POSITIONING Headquarters Subsidiaries GERMANY USA (East) & CANADA USA (West) & MEXICO Physik Instrumente (PI) GmbH & Co. KG Auf der Roemerstrasse 1 76228 Karlsruhe Phone +49 721 4846-0 Fax +49 721 4846-1019 info@pi.ws www.pi.ws PI (Physik Instrumente) L.P. Auburn, MA 01501 www.pi-usa.us PI (Physik Instrumente) L.P. Irvine, CA 92620 www.pi-usa.us USA (San Francisco Bay Area) UK & IRELAND PI (Physik Instrumente) L.P. Sausalito, CA 94965 www.pi-usa.us PI (Physik Instrumente) Ltd. Cranfield, Bedford www.physikinstrumente.co.uk PI miCos GmbH Freiburger Strasse 30 79427 Eschbach Phone +49 7634 5057-0 Fax +49 7634 5057-99 info@pimicos.com www.pi.ws ITALY NETHERLANDS Physik Instrumente (PI) S. r. l. Bresso www.pionline.it PI Benelux B.V. Sint-Oedenrode www.pi.ws/benelux FRANCE SPAIN PI France SAS Aix-en-Provence www.pi.ws Micos Iberia S.L. Vilanova i la Geltrú www.pimicos.es PI Ceramic GmbH Lindenstrasse 07589 Lederhose Phone +49 36604 882-0 Fax +49 36604 882-4109 info@piceramic.com www.piceramic.com JAPAN PI Japan Co., Ltd. Tokyo www.pi-japan.jp PI Japan Co., Ltd. Osaka www.pi-japan.jp CHINA Physik Instrumente (PI Shanghai) Co., Ltd. Shanghai www.pi-china.cn Physik Instrumente (PI Shanghai) Co., Ltd. Beijing www.pi-china.cn SOUTHEAST ASIA TAIWAN PI (Physik Instrumente) Singapore LLP Singapore www.pi-singapore.sg For ID / MY / PH / SG / TH / VNM Physik Instrumente (PI) Taiwan Ltd. Taipei www.pi-taiwan.com.tw KOREA PI Korea Ltd. Seoul www.pikorea.co.kr W W W. P I . W S
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