PI CAT132E Precision Positioning And Motion Control

User Manual: Pdf Industry-Compliant, Motorized, Precision Positioning Systems

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AIR BEARING

REPEATABILITY

BALL SCREW

MICRO

POSITIONING

VOICE COIL

LINEAR MOTOR

ACCURACY

DIRECT DRIVE

ENGINEERED SYSTEMS

NANOPOSITIONING

PRECISION POSITIONING

AND MOTION CONTROL

HIGH DYNAMICS

PIMAG®

PIGLIDE

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Precision Positioning and Motion Control

Product Finder Online – What is the easiest way for you to find the best positioning solution?

The printed catalog is a major showcase for PI and, as well as presenting the entire product

range, it also acts as a reference for all of our motion solutions. However, to take advantage

of the latest products and developments, we recommend using the product finder on the PI

website www.pi.ws.

How to use the product finder:

Select the product type specified by the axes of motion required. Selection of more criteria

expands or shortens the list of results. Select more than one filter at a time, for example, to

find positioning stages designed for higher load capacity, too.

INTRODUCTION

Markets and Applications ............................................................................................ 04

Motorized Standard Products Overview ...................................................................... 10

Technological Depth for Optimized Products .............................................................. 12

Custom Examples Picture Wall ................................................................................... 15

The PI Group – A Strong Partner for Industry and Research ....................................... 17

The PI Group Milestones ............................................................................................. 18

Expert Consulting ........................................................................................................ 20

Engineering Design Expertise and Customization ....................................................... 21

Production Capabilities ............................................................................................... 22

Vacuum Know-how ..................................................................................................... 23

From 1-off to Series: OEM Users Benefit From Maximum Flexibility ........................... 24

Global Service and After-Sales .................................................................................... 25

Preferred Solutions for High-Precision Automation Tasks .......................................... 26

MOTION | POSITIONING

More information, step-files and downloads are available from our website www.pi.ws.

All data subject to change without notice, ©PI 2018.

PRODUCTS

XY Stages ........................................................................................................................................................................... 138

XY Stages with Mechanical Bearings .......................................................................... 140

PIglide XY Stages with Air Bearings ............................................................................ 158

Translation Stages .............................................................................................................................................................. 28

Precision Linear Stages ................................................................................................ 30

High-Precision Linear Stages ....................................................................................... 72

PIglide Linear Air Bearing Stages ................................................................................. 112

Z Stages ....................................................................................................................... 126

Linear Actuators .................................................................................................................................................................. 200

Voice Coil Actuators .................................................................................................... 202

Screw-Drive Precision Actuators ................................................................................. 216

High-Load Screw-Drive Actuators ............................................................................... 226

Motion Control .................................................................................................................................................................... 232

Industrial motion control ............................................................................................. 234

Modular Multi-Channel Piezo Controllers .................................................................... 250

Stepper Motor Controllers ........................................................................................... 252

DC Motor Controllers .................................................................................................. 254

Voice Coil Controllers .................................................................................................. 258

Gantry Systems .................................................................................................................................................................. 260

Throughput, Precision and Reliability ......................................................................... 262

Terms and Technology Glossary ......................................................................................................................................... 290

Components & Accessories ................................................................................................................................................ 264

Air Bearings ................................................................................................................. 266

Accessories for Air Bearings and Stages ..................................................................... 280

Adapter Brackets for Multi-Axis Combinations ........................................................... 286

Rotation Stages .................................................................................................................................................................. 162

Rotation Stages ........................................................................................................... 164

Rotation Stages with Torque Motor and Air Bearing .................................................. 184

Goniometer Stages ..................................................................................................... 192

Terms and Technology

Glossary

Components &

Accessories Gantry Systems Motion Control Linear Actuators Rotation Stages XY Stages Translation Stages Introduction

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Markets and Applications

SEMICONDUCTOR PRODUCTION AND INSPECTION

The automation of process steps in production and inspection is steadily on the increase. At the same time, the requirements to

accuracy required in motion and positioning are growing. Today, in many industrial areas accuracy levels are needed as they were

needed just a few years ago in research institutions. PI with its linear stages, rotation stages, and lifting stages, as well as more

complex multi-axis kinematics, offers excellent solutions for industrial applications in many growing markets and even for very

general automation tasks with challenging specifications.

The requirements to the straightness and flatness, and the precision are particu-

larly high in the production and inspection of semiconductors or circuit boards.

High dynamics of the motion axis are required for an optimized throughput. In this

case, a standard A-311 stage with a 200 mm × 200 mm travel range in XY carries a

customized rotation stage. All stages have air bearings to warrant the best flatness

and direct drives for precision and high dynamics positioning. In addition, it is

possible to hold a stable position

Wafer inspection system with integrated linear

motor axes for fast precision XY scanning.

Stepper motor axis for fine vertical position of

the inspection equipment

The semiconductor industry often requires very specific solutions, e.g., for wire

or ball bonders. PI's Gantry systems are an ideal basis for customized adaptations.

The strokes and the stacking height can be varied almost arbitrarily, the configura-

tion of the motors provides extremely high accelerations of up to 5 g and this

ensures the highest productivity in the application. Control features of ACS motion

controllers such as “Input Shaping” help to build a stable system which actively

suppresses possible vibrations

MOTION | POSITIONING

PHOTONICS PACKAGING AND OPTICAL ALIGNMENT

During production and inspection of components with optical data transmission, it is important to align fibers or fiber arrays for

optimum connection with the highest possible accuracy. Position tolerances way under 50 nm are usual and multi-channel inputs

and outputs require simultaneous alignment in several axes.

In photonics, automated alignment is the key to high throughput

and outstanding quality. The basis of this optical alignment system is

a very stiff XYZ set-up consisting of three motorized linear stages

and a P-616 NanoCube® piezo nanopositioner. The low overall height

simplifies integration in limited installation space. The motorized

drives make longer travel ranges possible and at the same time, the

NanoCube® nanopositioner ensures fast scanning motion and dynamic

compensation of drift effects. Flexure guides and all-ceramic insulated

PICMA® actuators guarantee a long lifetime. Because all drives are

equipped with position sensors, it is possible for example, to reliably

prevent collisions with expensive silicon wafers

18-axis double alignment system provides fast NxM alignment

of SiP devices in wafer probers. Cascade Microtech’s pioneering

CM300xi photonics-enabled engineering wafer probe station

integrates PI’s parallel-kinematic Fast Multichannel Photonics

Alignment systems for high throughput, wafer-safe, nano-

precision optical probing of on-wafer Silicon Photonics devices.

(Image: Cascade Microtech, a FormFactor company)

In this multi-axis system for

wafer inspection and photonics

alignment, high speed linear motor

stages are used for the long xy stroke,

while mechanical stages with stepper

motors and screw drives are used for the

other degrees of freedom that do not require

too high dynamics

Introduction

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Markets and Applications

INDUSTRIAL MANUFACTURING

The field of industrial manufacturing and assembly offers the widest range of applications for the PI micropositioning stages. In

many applications the precision requirements keep growing for industrial application.

For example, digital printing becomes more and more common. The accuracy of the separate dots needs to be better than 20 µm

to be recognized as equidistant by the human eye. This requires motion technology providing an accuracy typically 10 times higher

meaning 2 µm, as well as motion with constant speed, good straightness and flatness.

Another example is force-controlled testing of a touch screen, a keyboard or electronic car keys, as well as the control of force

with which small parts are being assembled. Here, PI offers advanced solutions for those markets using its proprietary voice coil

and force sensor technologies.

Automated testing procedures ensure

quality, e.g., in the production process

of printed circuit boards (PCBs). Thereby,

the precise control of the forces acting

on the sensitive boards as well as the fast

capturing and interpretation of measure-

ment data are extremely important

MOTION | POSITIONING

LASER MATERIAL PROCESSING

Laser cutting for example, often requires lowest tracking errors while following the

arbitrary path of the customer’s workpiece. This means very dynamic multi-axis motion

that is ideally realized by using linear motor solutions which combine dynamics and

accuracy. An additional vertical motion is typically realized using a ball screw stage.

For improved dynamics in the Z-direction, a linear motor axis can be equipped with a

mechanical, magnetic or pneumatic weight balance. These applications can be served

with standard linear stages with a debris protection or with fully customized solutions.

Building Highly Productive Laser Systems

ACS Motion Control, as part of the PI group, allows to supply highly sophisticated

Motion Controller and Universal Drive Modules for the control of laser processing

applications. Control of the laser power and the triggering of the laser is done by the

LCMV2 Laser Control Module. A dedicated software to create a custom specific Human

Machine Interface (HMI) is available as well. Additionally integrating a 3rd party galvo

scanner allows to decouple the high and the low frequencies of motion: The high fre-

quencies will be covered by the galvo scanner and the low frequency motions will be

executed by PI linear stages. The resulting possibilities for the overlapping motion of

the scanner and stages are practically unlimited and allow to create best-productivity

systems with high-precision motion without any stitching errors.

ACS Motion Control and PI motion systems are perfectly matched to each other. A solution from

a single-source supplier does not just offer the customer sophisticated positioning technology

and high-performance control solutions, but also faster start-up and high flexibility when imple-

menting new requirements

UDMntSPiiPlusEC

PI’s dynamic positioning systems com-

bined with ACS motion controllers

become fast, productive systems which,

with the help of lasers, can label, mark,

rip, cut, or drill

Introduction

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Markets and Applications

3-axis combination of linear motor stages. The vertical axis uses

weight compensation and it can, therefore, move with high dynamics

while, at the same time, offering the best positioning accuracy

Typical 2-axis setup with clear aperture for the scanning

of larger surfaces

AUTOMATED OPTICAL INSPECTION (AOI)

The field of optical inspection widens as the requirements in

quality assurance are growing higher and higher. There are dif-

ferent ways of inspecting devices like PCB, electronic compon-

ents, and medical samples.

The easiest way is to move from point to point, stop, and take

a picture. This requires fast step-and-settle times and a high

stability when on target position. To cover large surfaces will

take a long time.

To increase productivity, it is very common to do a meander scan.

While one axis generates a motion with constant speed, the

perpendicular axis moves one step to the next line. Pictures are

taken during the constant speed motion which leads to high

requirements in straightness and flatness of those stages.

In many cases an additional Z-stage is used for autofocusing

during the scan. Those Z-stages typically carry the objective

and have to execute a high-bandwidth, very fast short-stroke

motion. Depending on the requirements in stroke, PI offers dif-

ferent solution for the vertical systems.

MOTION | POSITIONING

BASIC RESEARCH, SCIENTIFIC INSTRUMENTATION

Why scientists rely on PI: Creativity for Research and Development. Many scientific publications cite PI systems because they

are an important prerequisite for successful research and development projects. Customized designs for university research are

everyday business for PI, also for environmental conditions such as UHV to 10–10 hPa, radiation, or strong temperature changes

down to the cryogenic range. The spectrum reaches from completely new designs to small modifications of standard products

for a better adaptation to the application. Important fields of research are, for example, beamline instrumentation, micro systems

and nanotechnology.

The sample positioning setup inside the holography endstation uses a variety of PI’s motorized translation and rotary stages, as well as piezo

stages for ultra-fine positioning (Image: M. Osterhoff, Institute for X-Ray Physics, Georg-August-University Göttingen)

Hybrid drive, consisting of

electric motor and piezo actuator,

for optimum positioning accuracy

and minimum path deviation

Compact linear translation

stage that features two

separate moving plates on

one guiding

Introduction

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Linear Actuators

n Optional force control

n Screw or voice coil drive

n Compact

Linear Stages

n Travel range up to several 100 mm

n Screw or direct drive

n Mechanical or air bearing

n Incremental or absolute encoders

n Vacuum or clean room compatible

Rotary Stages

n 360° or goniometer stages

n Worm or direct drive

n Mechanical or air bearing

n Incremental or absolute encoders

n Vacuum or clean room compatible

XY Stages

n Screw or direct drive

n Mechanical or air bearing

n Incremental or absolute encoders

n Optional aperture

Motorized Standard Products Overview

MOTION | POSITIONING

Stacked Systems Configured from Standard Products

n Flexible

n Fast to adapt to custom application

n Cost-efficient solution

Integrated System Solutions

n Gantries with industrial motion controllers

n Fast multi-channel photonics alignment systems

Broad Range of Standard Axes

The PI Group has many years of experience in the development and construction of highly complex motion systems with the highest

precision classes. The experience gained over the years, mainly from customized solutions, has been transferred to the standard

products. As a result, a broad spectrum of standard positioning systems has been established, which offers many options within the

individual series such as variable travel ranges, different motors, or adaptations to different ambient conditions such as a vacuum

and clean-room environments. Today, the use of PI positioning systems is very common in robust industrial environments with

high demands on lifetime and productivity.

Introduction

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From Standard to Custom Products

Technological Depth for Optimized Products

Customization on all levels of integration

PI’s proprietary technological know-how and vertically integrated production are the basis for the successful development of

customized motion systems from scratch. All technologies can be adapted specifically to an application. Examples range from a

PIMag® voice coil drive for integration into an OEM system, to complex multi-axis positioning setups, to fully integrated, turn-key

system solutions.

Individual assembly of a stage PI produces core components in-house for its precision positioning

systems. This applies to sensors, electronics, and motors as well as

certain milled parts with particularly low tolerances

PI’s own development of guiding technologies allows the design

of individual solutions. Linear guiding technologies such as flexures

for small displacements, air bearings for extreme requirements on

travel accuracy, or magnetic levitation for the highest demands in

up to six degrees of freedom are developed in-house. Leveraging of

long-standing piezo technology at PI Ceramic, PI is able to manufac-

ture ceramic bearings in its own facilities. For many requirements,

mechanical bearings in different precision grades from highly

qualified suppliers are used

MOTION | POSITIONING

Systems From a Single Source

The controller technology of ACS Motion Control ensures that even complex industrial applications can be managed by one single

source. This means that PI can offer ideal solutions from one single source to meet the demands of the most diverse industries,

which all need reliable, durable technology with increasing levels of precision.

Modular multi-axis controllers from ACS for automation control are based on an internal

EtherCAT network. This modular technology allows to control stages needing a bus

voltage from 24 VDC up to 560 VDC and a peak current of 5 A up to 90 A. The ACS control

technologies are designed especially for direct drives such as voice coils and linear motors

in the best possible way enabling fast settling times, high speed stability and low jitter

OEM controllers from PI meet customers’

requirements in every aspect. They are

available for any drive technology and can

be adapted to include special functions

such as force control

Compact motion control solutions

permit the control of individual axes

with different drive technologies such

as stepper, DC or linear motors and

piezo-based drives. The modular design

allows a subsequent adaptation of

the network while using one common

control interface

Positioning stages with PIMag® linear motor and with PIOne measuring system allow

minimum incremental motion and the highest precision such as for example, the

V-551.xD linear stage. The diagram shows steps from 1 nm and the idle noise of <±0.4 nm.

In the linear motor axes, this precision can be combined with long travel ranges, high

velocities, and accelerations

Introduction

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In-House Technological Expertise

All decisive technologies required for the drive or motor, the measuring system, the motion controller, and the guiding system,

are available in-house. To serve industrial applications, in-house development and the production capabilities of PIMag® magnetic

drive and PIglide air bearing technologies are essential. PI also has production capabilities for high-end mechanical parts such as

the milling of components with lowest tolerances.

Commercially available torque motors offer very high torque but only limited

apertures. This customized PIMag® torque motor has a particularly large

aperture and it positions with high dynamics and stability while needing minimal

installation space. It can be integrated as a rotation stage on top of a PI hexapod

From Standard to Custom Products

Technological Depth for Optimized Products

PIMag® voice coil drives can be designed with a particularly compact size and

they can be directly integrated into the customers’ application. The PIMag®

technology and dedicated simulation tools allow to optimize the force-to-size

ratio for a required form factor

PIMag® linear motors with or without iron core

are the result of in-house development. In this

way, specific properties of the stages and axes

can be influenced directly. PI is in a position

to develop customized linear motor and voice

coil solutions not only for standard products

but also for customized OEM solutions, where

special features are needed. In most cases, the

form factor of such a motor will be customized

and adapted to the customers’ needs

0 10 20 30 40 50 mm

The highly precise PIOne linear encoder, one

of PI’s own measurement systems, permits a

signal period to 0.5 µm. In the controller, sine/

cosine signals are evaluated which allow for

a very high position measurement accuracy of

down to a fraction of a nanometer

MOTION | POSITIONING

56 motors, 16 motion controllers, and 20 tons weight make the system for Microscopy and Quality Assurance (MiQA). The unique system

integrates hexapods, rotation stages, goniometers, and a custom sample stage and will be used in a beamline for X-ray microscopy and the

qualification of X-ray optics. Virtually all available PI technologies are combined here in a highly specialized solution providing the best

possible accuracy for this application, resulting in 80 nm at the tool center point over multiple stacked axes

Focusses an objective in space:

Linear stage for the “Mars 2020”

NASA mission

Coordinate measuring machines (CMM) and metrology

tools use a variety of design architectures, including

moving gantries, static gantries, cantilevered XYZ, and

many others. The most common type of CMM is com-

posed of three orthogonal axes (X, Y, and Z) operating in

a three-dimensional coordinate system. Each axis has a

position encoder that indicates the position of that axis.

The machine will read the input from the touch probe,

as directed by the operator or computer program. The

machine then utilizes the X, Y, and Z coordinates of each

of these discrete points to determine size and position

of the part being measured

Custom Examples Picture Wall

Introduction

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Custom Examples Picture Wall

Complete autofocus system

with PIMag® voice coil drive. Not

only the voice coil stage is supplied

by PI but also the alignment tools and an

alignment routine to warrant highest precision

assembly of the payload

Customized parallel-kinematics stage with six degrees of freedom.

The PIMag® linear motors ensure high dynamics and precision as

required in optical alignment or fiber alignment. The solution is

based on 3 XY stages which are driven by linear motors that allow

high dynamics for the precision alignment. The SpaceFAB parallel

kinematic allows a very flat design with long strokes in x and y.

In comparison to a PI Hexapod, the footprint of the SpaceFAB is

relatively large, and the hexapod is better suited for longer vertical

strokes

The dynamics and precision of voice coil or linear motor stages is

required in vertical direction as well. For an improved position stability

PI offers various solutions for a counter balance system which can be

based on springs, magnetic solutions and pneumatic cylinders. The

picture shows a modified V-528 standard product with PIMag® direct

drive and gravity compensation for vertical applications. The compen-

sation is done by a constant force spring and is adjusted precisely to

the customers payload

MOTION | POSITIONING

Over the last four decades, PI (Physik Instrumente) has developed into the leading manufac-

turer of nanopositioning technology. The key element and motivation of the entrepreneurial

behavior have always remained the same: Finding the best possible solution for the customer.

PI is well known for the quality of its products and has been one of the leading players in the

global market for precision positioning technology for many years. One of the most important

building blocks for this is the team spirit within the international PI family, which is based on

mutual understanding and support that goes beyond international borders and functional

restrictions.

PI is a privately owned company with healthy growth, more than 1000 employees worldwide

and a flexible, vertically integrated organization, which enables PI to fulfill almost any request

in the field of innovative precision positioning technology. The foremost priority for PI is to

be a reliable and highly qualified partner for the customer.

The PI headquarters in Karlsruhe, Germany, manifests the continuous growth. In front, the 2017 Technology Center

The PI Group – A Strong Partner

for Industry and Research

Introduction

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Market introduction of capacitive

position sensors, implementation

in piezo-based nanopositioning

systems

New

subsidiary

in Italy

New

subsidiary

in Japan

Foundation of PI Ceramic

in Thuringia, Germany,

cornerstone for market

leadership in nano-

positioning technology

New

subsidiary

in the USA

Market introduction

of six-axis parallel-

kinematic positioning

systems (Hexapods)

Market introduction

of digital

control electronics

Market introduction

of PILine® ultrasonic

piezomotors

Market introduction

of the NEXLINE®

high-performance

piezo linear drives

Market introduction

of the magnetic

PIMag® direct drives

Acquisition

of majority shares

in miCos GmbH,

Eschbach, Germany

Founding year

of PI

New subsidiaries

in Great Britain

and France

New

subsidiary

in China

Market introduction

of the PICMA®

multilayer piezo

actuators

New subsidiaries

in Korea and

Singapore

Market introduction

of Q-Motion®

and PiezoMikes

Market introduction

of NEXACT®

piezo linear drives

Introduction

ofair bearings

Acquisition

of Nelson

Air Corp., USA

1992

1998

2001

2004

2007

1987

1970

1991

1993

2002

2011

2014

2015

1994

Acquisition of

majority shares

in ACS Motion

Control

2016

New subsidiaries

in Taiwan and the

Netherlands

Well known for the high quality of its pro-

ducts, PI (Physik Instrumente) has been

one of the leading players in the global

market for precision positioning techno-

logy for many years. PI has been develop-

ing and manufacturing standard and OEM

The PI Group Milestones

A Success Story

products with piezo or motor drives for

more than 40 years. In addition to four

locations in Germany, the PI Group is

represented internationally by fifteen

sales and service subsidiaries. All of our

customers worldwide can rely on this.

MOTION | POSITIONING

Market introduction of capacitive

position sensors, implementation

in piezo-based nanopositioning

systems

New

subsidiary

in Italy

New

subsidiary

in Japan

Foundation of PI Ceramic

in Thuringia, Germany,

cornerstone for market

leadership in nano-

positioning technology

New

subsidiary

in the USA

Market introduction

of six-axis parallel-

kinematic positioning

systems (Hexapods)

Market introduction

of digital

control electronics

Market introduction

of PILine® ultrasonic

piezomotors

Market introduction

of the NEXLINE®

high-performance

piezo linear drives

Market introduction

of the magnetic

PIMag® direct drives

Acquisition

of majority shares

in miCos GmbH,

Eschbach, Germany

Founding year

of PI

New subsidiaries

in Great Britain

and France

New

subsidiary

in China

Market introduction

of the PICMA®

multilayer piezo

actuators

New subsidiaries

in Korea and

Singapore

Market introduction

of Q-Motion®

and PiezoMikes

Market introduction

of NEXACT®

piezo linear drives

Introduction

ofair bearings

Acquisition

of Nelson

Air Corp., USA

1992

1998

2001

2004

2007

1987

1970

1991

1993

2002

2011

2014

2015

1994

Acquisition of

majority shares

in ACS Motion

Control

2016

New subsidiaries

in Taiwan and the

Netherlands

Introduction

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Expert Consulting

The PI Group can respond precisely to what customers want: Specific require-

ments can often only be satisfied by customized solutions – solutions that can

be found by unconventional and creative thinking. Together with the customers,

PI plans and realizes individual solutions for the most varied applications and

integration levels. And that means that PI’s customers can always be sure that

they will get the best solution every time.

Customers directly benefit from:

Highly Qualified Consultancy Through Trained Specialists

Individual advice often is key to solve a complex problem. PI sales engineers

are ready to come on site with all the time necessary for a solid understanding

of the topic. Or they will gladly meet at the PI head office. All PI sales engineers

have a background in natural sciences or engineering, and have up to 20 years

of experience in optical, micro- or nanopositioning technology.

International Support

PI subsidiaries and distributors in many

countries across the world guarantee global

support – a decisive advantage, especially

for globally operating customers. PI has its

own sales and service offices in all important

markets. Moreover, the company maintains

testing devices for nanometrology on three

continents. PI Shanghai and PI USA have

additional development and manufacturing

resources that allow rapid local reaction to

custom-engineered specifications.

Time for qualified technical consultation is crucial for the success of high-tech projects

MOTION | POSITIONING

Unique Technological Breadth

The technological diversity of the PI Group is unrivalled all over the world.

PI develops, manufactures, and qualifies all its core technologies itself. PI is

therefore not dependent on components available on the market. That puts PI

in a position to offer its customers the most advanced products for motion and

positioning tasks – without technological restriction.

Customized Solutions

With this background, PI develops positioning solutions with innovative drive

technologies for high-tech applications worldwide. PI covers the whole motion

range from finger-tip sized nanopositioners to large-scale stages with long

travel ranges, through their plethora of differ-ent drive and guiding systems.

Core Technologies

n In-house manufacturing of piezo

components and piezo actuators

n Magnetic direct drives: linear motors

and voice coils

n Air bearings, magnetic and flexure

guides

n Comprehensive range of piezo motor

technologies

n Nanometrology sensors

n Parallel-kinematic systems for

positioning in six axes (Hexapods)

n Motion control technology

n Software

Engineering Design Expertise

and Customization

Calculation of the magnetic flux density and

currents for a novel voice coil drive allowing

multiple degrees of freedom

The development and customized design of

electromagnetic direct drives that are used for

high-resolution motion and positioning tasks

require a scientific approach to the technology.

The images show the analysis of magnetic fields

down to a magnitude of 5 µT that were used to

select the optimum position of the drive compo-

nents within an application

Introduction

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Production Capabilities

A modern production management and an integrated management

system allow PI to guarantee the high quality of its products, processes,

and services. The continual improvement of organization and processes

is an integral part of the corporate culture. KAIZEN workshops and an

active innovation management are important elements for achieving

this.

The production processes for the standard range are made flexible by

the fractal production structure and it is therefore possible to manufac-

ture even large series with full process control. Active, system-based

requirements management makes it possible to dispense with compre-

hensive storage facilities.

Vertical Production Range and Production Capacity

The product spectrum ranging from the two-ton hexapod to the 10-gram

nanopositioner requires PI to have the equipment and technologies at

its disposal that allow the systems to be manufactured, assembled, and

qualified.

n 13,000 m² of overall production space

n 5,000 m² for cleanrooms

n Air-conditioned and vibration-proof measuring

conditions

n Vacuum chambers for startup and residual gas

analysis

n Measuring technology with traceable, calibrated

measuring equipment

n Monitoring of piezo actuator technology from

material composition to final inspection

n In-house manufacturing of positioning sensors

n Production hall with measuring technology for

heavy loads

n Fractal production organization

PI’s flexibility in serial production allows for fast adaptation of both processes and quantities

MOTION | POSITIONING

PI offers high-precision solutions for positioning in vacuum conditions to 10–10 hPa.

Positioning solutions in a vacuum follow clearly defined constraints. This applies to

the limited installation space, as well as prevention of contamination and excessive

heat input.

Selection of the optimum drive technology for the respective application and the

mechanical design must be matched exactly to the required load capacity and

velocity as well as the intended operating and planned duty cycles.

The handling regulations for vacuum positioning systems are just as important as

the design principles. Cleanrooms are available for assembling larger parts. Suitable

packaging and the corresponding instructions for the recipient are part of shipping.

Vacuum chambers are available in several sizes with vacuum levels down to 10–10 hPa,

where start-up and measurement of outgassing, but also interferometric measuring of

position accuracy under real operating conditions is possible.

At PI, several vacuum

chambers are available

in various sizes

Vacuum Know-How

Introduction

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PI serves both the research and industrial markets. The complete control over the design and manufac-

turing process provides our customers with significant competitive advantages. Optimized processes

allow PI to deliver customized products in quantities up to several 100,000 units per year at low cost and

right on time. The range of OEM products offered by the PI Group varies widely, ranging from “bare”

actuators and sensors to highly integrated parallel-kinematic positioning systems. Evaluation of pre-

production run samples, test procedures, production processes and quality management are all included

in the development process.

Services

n Global account management: Close proximity to the customer thanks to international presence

n Risk assessment from design to delivery

n Depending on the task: From the drive to the turnkey system

n Copy exactly policy

n Preparation of internal and external certification

n Production of series of several 10,000 units in the shortest time

n Sustainable spare parts service

n Manufacturing and testing capacities from functional samples to mass production

From 1-off to Series:

OEM Users Beneﬁt From Maximum Flexibility

Standardized performance control with full documentation of individual measurement charts

MOTION | POSITIONING

Global Service and After-Sales

On-site training is key to optimize and maximize the potential of new PI systems

Start-Up, User Training and Life Long Support

PI is dedicated to supporting its customers right from the initial consultation

through to when a customer has purchased a PI system. Beyond that, PI’s services

division is committed to ensuring that every aspect of owning a PI system is

catered for.

Global Coverage

Supported by 4 Global Service Hubs in Asia, China, Europe and USA, with field

product specialists working from these hubs, PI is able to support all technolo-

gies and customer applications via this global services team.

PI’s Standard On-Site Services

n Set up and Commissioning – On-site support to un-box, set-up and

commission the PI system

n Training Program – User training on software and programming,

through to optimization of system performance

n Maintenance Systems Health Check – Preventative maintenance to

prolong the life of the motion device

n Support – Ongoing remote and on-site support to maximize system

uptime and provide maintenance for the whole life of any system

Contracted Services

Customers subscribing to Contractual Sup-

port Services will receive commitment from

PI to achieving agreed Service Levels. These

include responding to the customer’s first

contact and providing remote technical

support, through to response times for a PI

expert to be on site, either to repair or replace

a defective unit.

Extended Warranty

Most customer applications require PI’s

systems to be operational beyond the stand-

ard warranty period. Extending the warranty

for additional year(s), is simply extending the

customers peace of mind and PI’s commit-

ment that the product will not fail due to poor

workmanship or faulty materials. Should

a customer’s system then fail due to these

conditions, PI will cover the costs to repair or

replace it.

Introduction

WWW.PI.WS

Application

Examples

Major

Requirements

Translation

Stages

see p. 28 ff

Z-Stages

see p. 126 ff

XY-Stages,

Gantry

Systems

see p. 138 ff,

see p. 260 ff

Rotation &

Goniometer

Stages

see p. 162 ff

Linear

Actuators

see p. 200 ff

Autofocus High dynamics

High repeatability

Compact size

High precision

L-505

L-509

L-511

MTS-65

V-522

V-524

V-528 V-900KPIC

Automated

Optical

Inspection (AOI)

Good precision

High dynamics

L-402

L-412

L-417

L-505

V-412

V-417 L-310

UPL-120 V-731

V-738

V-741

L- 611

PRS-200

UPR-100

UPR-120

Biotechnology /

Life Science

and Microscopy

High dynamics

High repeatability

Good precision

L-402

L-505

L-509

L-511

M-403

M-404

M-413

M-414

MTS-65

V-551

L-731

L-738

L-741

V-731

V-738

V-741

L- 611

PRS-200

UPR-100

UPR-120

UPR-120 Air

V-900KPIC

Digital Printing High dynamics V-412

V-417

V-508

V-522

V-524

V-528

Electronics

Manufacturing

High dynamics

Constant velocity

Position stability

L-402

L-412

L-417

V-412

V-417

V-508

V-551 A- 311

A-322

Gantry

UPR-100

UPR-120 L-220

L-239

V-273

V-275

V-277

Flatpanel

Inspection

Best straightness

and ﬂatness

Constant velocity

High repeatability

A-110

A-121

A-123

V-412

V-417

Laser Cutting High precision

Long stroke

High dynamics

L-412

L-417

L-509

L-511

V-408

V-412

V-417

L-310

UPL-120 A-321

Gantry

L-731

L-738

L-741

V-731

V-738

V-741

L- 611

PRS-200

UPR-100

UPR-120

Laser Marking Compact size

High precision

High repeatability

HPS-170

M-110

M-122.2DD1

MTS-65

V-408

V-508

V-522

V-524

V-528

L-310

UPL-120 A-311

L-731

L-741

V-731

V-741

L- 611

M-116

PRS-200

UPR-100

UPR-120

Machine

Tooling /

Fast Tooling

High dynamics

Compact size

Constant velocity

A-131

Medical

Industry

High repeatability

Good precision

Best straightness

and ﬂatness

A-131

L-505

M-403

M-404

M-413

M-414

V-508

V-551

L-310

UPL-120 L-731

L-738

L-741

V-731

V-738

V-741

L- 611

PRS-200

UPR-100

UPR-120

UPR-120 Air

V-900KPIC

Metrology

and Testing

Best straightness

and ﬂatness

Constant velocity

High dynamics

A-110

A-121

A-123

HPS-170

M-406

M-511

M-521

M-531

V-508

V-522

V-524

V-528

V-551

L-310

UPL-120 L-731

L-738

L-741

V-731

V-738

V-741

A-62x

L- 611

PRS-200

UPR-100

UPR-120

UPR-120 Air

WT-85

WT-100

WT-90

WT-120

V-273

V-275

V-277

Optical

Alignment

High repeatability

High dynamics

Compact size

A-141

L-505

L-509

L-511

M-110

M-122.2DD1

M-511

M-521

M-531

L-310

UPL-120 A-62x

L- 611

M-060

M-061

M-062

M-116

PRS-200

UPR-100

UPR-120

WT-85

WT-100

WT-90

WT-120

L-220

L-239

M-227

M-228

M-229

M-230

M-232

M-235

M-238

Preferred Solutions

for High-Precision Automation Tasks

MOTION | POSITIONING

Application

Examples

Major

Requirements

Translation

Stages

see p. 28 ff

Z-Stages

see p. 126 ff

XY-Stages,

Gantry

Systems

see p. 138 ff,

see p. 260 ff

Rotation &

Goniometer

Stages

see p. 162 ff

Linear

Actuators

see p. 200 ff

Photonics

Probing &

Packaging

Compact size

High repeatability

High dynamics

A-110

A-121

A-123

A-141

L-505

M-403

M-404

M-413

M-414

M-511

M-521

M-531

V-408

V-522

V-524

V-528

V-551

L-306

L-310

M-501

UPL-120

L-731

L-738

L-741

V-731

V-738

V-741

L- 611

PRS-200

WT-85

WT-100

WT-90

WT-120

Precision Micro

Assembly

Most compact

size

Dynamic motion

High duty cycles

A-141

L-402

L-406

L-408

L-505

M-110

M-122.2DD1

M-406

L-310

UPL-120 L-738

V-738 DT-34

DT-80

L- 611

M-060

M-061

M-062

M-116

PRS-200

RS-40

UPR-100

UPR-120

UPR-120 Air

WT-85

WT-100

WT-90

WT-120

L-220

L-239

V-273

V-275

V-277

V-900KPIC

Sample

Inspection

Best straightness

and ﬂatness

Force control

A-110

A-121

A-123

HPS-170

LS-180

M-511

M-521

M-531

L-310

UPL-120 Gantry A-62x

L- 611

PRS-200

UPR-100

UPR-120

UPR-120 Air

WT-85

WT-100

WT-90

WT-120

V-273

V-275

V-277

V-900KPIC

Scanning High repeatability

High dynamics

Constant velocity

Position stability

A-110

A-121

A-123

A-131

A-141

V-408

V-412

V-417

V-508

V-522

V-524

V-528

V-551

A-311

A-322

V-731

V-738

V-741

A-62x

Scientiﬁc

Instrumentation

Versatility

Networkable

solutions

Compact size

HPS-170

L-402

L-406

L-408

L-505

L-509

L-511

LS-180

M-110

M-122.2DD1

M-406

M-511

M-521

M-531

MTS-65

V-408

V-522

V-524

V-528

VT-80

L-306

L-310

M-501

UPL-120

A-311

A-322

Gantry

L-731

L-738

L-741

V-731

V-738

V-741

A-62x

DT-34

DT-80

L- 611

M-060

M-061

M-062

M-116

PRS-200

RS-40

UPR-100

UPR-120

UPR-120 Air

L-220

L-239

M-227

M-228

M-229

M-230

M-232

M-235

M-238

Semiconductor High dynamics

High precision

Position stability

Constant velocity

HPS-170

LS-180

V-522

V-524

V-528

V-551

L-306

L-310

M-501

UPL-120

A-311

A-322

Gantry

L-731

L-738

L-741

V-731

V-738

V-741

L- 611

PRS-200

UPR-100

UPR-120

UPR-120 Air

L-220

L-239

Introduction

WWW.PI.WS

Translation Stages

MOTION | POSITIONING

Precision Linear Stages ............................................................................................................................................................ 30

L-402 Miniature Linear Stage ........................................................................................ 30

M-110 / M-111 / M-112 Compact Linear Stage ............................................................... 32

L-406 Compact Linear Stage .......................................................................................... 34

L-408 Compact Linear Stage .......................................................................................... 36

V-408 PIMag® Linear Stage ............................................................................................ 38

VT-80 Linear Stage ........................................................................................................ 40

M-406 Precision Linear Stage ........................................................................................ 42

M-403 Precision Translation Stage ................................................................................ 44

M-404 Precision Translation Stage ................................................................................ 46

M-413 High-Load Precision Stage ................................................................................. 48

M-414 High-Load Precision Stage ................................................................................. 50

L-412 High-Load Linear Stage ....................................................................................... 52

V-412 PIMag® High-Load Linear Stage ........................................................................... 56

L-417 High-Load Linear Stage ....................................................................................... 60

V-417 PIMag® High-Load Linear Stage ........................................................................... 64

LS-180 Linear Stage for Heavy Loads ............................................................................ 68

High-Precision Linear Stages ................................................................................................................................................... 72

L-505 Compact Linear Stage .......................................................................................... 72

V-522 / V-524 / V-528 High-Dynamics PIMag® Linear Stage ........................................... 76

V-508 PIMag® Precision Linear Stage ............................................................................ 78

M-122.2DD1 Micro Translation Stage ............................................................................ 80

MTS-65 Miniature Linear Stage ..................................................................................... 82

M-105 / M-106 Microtranslation Stage .......................................................................... 84

L-509 Precision Linear Stage ......................................................................................... 86

L-511 High-Precision Linear Stage ................................................................................. 94

V-551 PIMag® Precision Linear Stage ............................................................................ 102

M-511 / M-521 / M-531 High-Precision Linear Stage ...................................................... 106

HPS-170 High-Precision Linear Stage for Heavy Loads ................................................. 108

PIglide Linear Air Bearing Stages ............................................................................................................................................ 112

A-141 PIglide MB Miniature Linear Stage with Air Bearings ......................................... 112

A-121 PIglide AT1 Linear Stage with Air Bearings ......................................................... 114

A-123 PIglide AT3 Linear Stage with Air Bearings ......................................................... 116

A-110 PIglide LC Linear Stage with Air Bearings ........................................................... 120

A-131 PIglide VC Voice Coil Linear Stage with Air Bearings .......................................... 124

Z Stages ................................................................................................................................................................................... 126

L-306 Compact Precision Z Stage .................................................................................. 126

L-310 Precision Z Stage ................................................................................................. 128

M-501 Precision Z Stage ................................................................................................ 132

UPL-120 Precision Z Stage ............................................................................................ 134

Translation Stages

WWW.PI.WS

With DC or Stepper Motor

L-402 Miniature Linear Stage

n Travel range 13 mm

n Unidirectional repeatability to 0.5 µm

n Velocity to 5 mm/s

n Load capacity to 1 kg

n Integrated reference point and limit switch

n Crossed roller guides, anti-creep

n Directly mountable XY and XYZ combinations

>> Incremental Encoder

>> Vacuum-Compatible Versions

Technology Glossary ...................... page 290

Applications

n Automation

n Precision Micro Assembly

n Scientific Instrumentation

L-402.10DD, dimensions in mm

MOTION | POSITIONING

L-402.10SD, dimensions in mm

L-402.10DD L-402.10SD Unit Tolerance

Motion and positioning

Travel range 13 13 mm

Integrated sensor Rotary encoder –

Design resolution 0.122 2.5 (full step) µm

Sensor resolution rotary encoder 4096 – Cts./rev.

Minimum incremental motion 1 0.5 µm typ.

Unidirectional repeatability 1 0.5 µm typ.

Bidirectional repeatability ±5 ±5 µm typ.

Pitch ±175 ±175 µrad typ.

Yaw ±125 ±125 µrad typ.

Straightness ±3 ±3 µm typ.

Flatness ±3 ±3 µm typ.

Velocity 5 5 mm/s max.

Reference and limit switches Optical Optical

Mechanical properties

Drive screw Leadscrew Leadscrew

Drive screw pitch 0.5 0.5 mm

Load capacity 10 10 N max.

Push/pull force 10 10 N max.

Holding force 10 10 N max.

Permissible lateral force 5 5 N max.

Permissible torque in θX, θY

, θZ1 1 N·m max.

Drive properties

Motor type DC motor 2-phase stepper motor

Step resolution – 200 Full steps/rev.

Operating voltage, nominal 24 24 V nom.

Operating voltage, max. 48 48 V max.

Miscellaneous

Operating temperature range 5 to 40 5 to 40 °C

Material Aluminum, anodized,

stainless steel

Aluminum, anodized,

stainless steel

Mass 0.16 0.15 kg

Cable length 0.135 0.25 m ±10 mm

Connector HD Sub-D 26 (m) HD Sub-D 26 (m)

Recommended controllers C-863 (single axis) C-663.12 (single axis)

All cables required for operation with the ordered controller are included in the scope of delivery. The cable length is 3 m.

Motion controllers for >1 axis are available on www.pi.ws. Ask about custom designs!

Translation Stages

WWW.PI.WS

XY(Z) Combinations with a Variety of Drives and Travel Ranges

M-110 / M-111 / M-112 Compact Linear Stage

n Very compact due to folded drive

n Stepper motors and closed-loop DC motors

n Sliding thread and ball screws

n Noncontact reference and limit switches

n XY setups can be mounted directly

n Larger quantities available quickly

>> Incremental Encoder

Technology Glossary ...................... page 290

Applications

n Automation

n Precision Micro Assembly

n Scientific Instrumentation

M-11x.xxx1, dimensions in mm

A B

M-110.1DG1

M-110.2DG1

M-110.12S1

M-110.22S1

60 25

M-111.1DG1

M-111.2DG1

M-111.12S1

M-111.22S1

70 30

M-112.1DG1

M-112.2DG1

M-112.12S1

M-112.22S1

80 35

MOTION | POSITIONING

M-110.1DG1

M-111.1DG1

M-112.1DG1

M-110.12S1

M-111.12S1

M-112.12S1

M-110.2DG1

M-111.2DG1

M-112.2DG1

M-110.22S1

M-111.22S1

M-112.22S1

Unit Tolerance

Motion and

positioning

Travel range 5 / 15 / 25 5 / 15 / 25 5 / 15 / 25 5 / 15 / 25 mm

Integrated sensor Rotary encoder – Rotary encoder –

Sensor resolution 2048 2048 Cts./rev.

Design resolution (1) 0.0069 0.00029 0.0086 0.00036 µm

Min. incremental

motion (1)

0.05 0.02 0.2 0.2 µm typ.

Backlash 2 2 4 4 µm typ.

Unidirectional

repeatability

0.25 0.25 0.15 0.15 µm typ.

Pitch / yaw ±50 / ±150 / ±150 ±50 / ±150 / ±150 ±50 / ±150 / ±150 ±50 / ±150 / ±150 µrad

Velocity 1 / 1.5 / 1.5 1 / 1 / 1 1.5 / 2 / 2 1 / 1 / 1 mm/s max.

Mechanical

properties

Drive screw type Leadscrew Leadscrew Ball screw Ball screw

Drive screw pitch 0.4 0.4 0.5 0.5 mm

Gear ratio 256:9 256:9 256:9 256:9

Step resolution – 24 – 24 Full steps/

rev.

Load capacity 30 / 30 / 20 30 / 30 / 20 30 / 30 / 20 30 / 30 / 20 N max.

Push/pull force 10 10 10 10 N max.

Holding force 10 10 10 10 N max.

Permissible lateral

force

15 / 10 / 10 15 / 10 / 10 15 / 10 / 10 15 / 10 / 10 N max.

Drive properties

Motor type DC gear motor 2-phase

stepper motor

DC gear motor 2-phase

stepper motor

Operating voltage 0 to ±12 – 0 to ±12 – V

Motor power 0.52 / 1.75 / 1.75 1.5 0.52 / 1.75 / 1.75 1.5 W

Nominal current

per phase

160 / 320 / 320 250 160 / 320 / 320 250 mA

Reference and limit

switches

Hall effect Hall effect Hall effect Hall effect

Miscellaneous

Operating

temperature range

–20 to 65 –20 to 65 –20 to 65 –20 to 65 °C

Material Al (black

anodized)

Al (black

anodized)

Al (black

anodized)

Al (black

anodized)

Mass 0.25 / 0.27 / 0.3 0.25 / 0.27 / 0.3 0.25 / 0.27 / 0.3 0.25 / 0.27 / 0.3 kg

Cable length 0.5 0.5 0.5 0.5 m

Connection HD Sub-D 26 (m) HD Sub-D 26 (m) HD Sub-D 26 (m) HD Sub-D 26 (m)

Recommended

controllers

C-863

C-884

C-663.12 C-863

C-884

C-663.12

(1) With recommended controller.

Ask about custom designs!

Translation Stages

WWW.PI.WS

For Loads up to 10 kg

L-406 Compact Linear Stage

n Travel ranges from 26 mm to 102 mm

(1” to 4”)

n Stepper motor or DC servo motor with

and without gearhead

n Direction-sensing reference point switch

n Integrated optical limit switches

>> Incremental Encoder

>> Vacuum-Compatible Versions

Technology Glossary ...................... page 290

Applications

n Automation

n Precision Micro Assembly

n Scientific Instrumentation

A B C D E

L- 4 0 6.10SD00

L-406.20SD00

L-406.40SD00

55,5

68,5

93,5

–

100

150

132

158

208

62,5

75,5

L-406, dimensions in mm

A B C D E

L-406.10DG10

L-406.20DG10

L-406.40DG10

55,5

68,5

93,5

–

100

150

73,5

132

158

208

62,5

75,5

Detail drawing of the L-406 motion platform,

dimensions in mm

MOTION | POSITIONING

L-406.10DD10

L-406.20DD10

L-406.40DD10

L-406.10DG10

L-406.20DG10

L-406.40DG10

L-406.10SD00

L-406.20SD00

L-406.40SD00

Unit Tolerance

Linear stage with

DC motor and rotary

encoder

Linear stage with DC

gear motor and rotary

encoder

Linear stage with

stepper motor

Motion and positioning

Travel range 26 / 52 / 102 26 / 52 / 102 26 / 52 / 102 mm

Integrated sensor Rotary encoder Rotary encoder –

Sensor resolution rotary

encoder

4096 2048 – Cts./rev.

Design resolution 0.244 0.0165 5 (full step) µm

Minimum incremental

motion

0.5 0.2 0.2 µm typ.

Unidirectional

repeatability

0.5 0.5 0.5 µm typ.

Bidirectional

repeatability

±5 ±5 ±5 µm typ.

Pitch / yaw ±70 / ±90 / ±100 ±70 / ±90 / ±100 ±70 / ±90 / ±100 µrad typ.

Straightness / ﬂatness ±2 / ±4 / ±6 ±2 / ±4 / ±6 ±2 / ±4 / ±6 µm typ.

Max. velocity 20 3 20 mm/s max.

Reference and limit

switches

Optical Optical Optical

Mechanical properties

Guide type Recirculating ball

bearing

Recirculating ball

bearing

Recirculating ball

bearing

Drive screw type Leadscrew Leadscrew Leadscrew

Drive screw pitch 1 1 1 mm

Gear ratio – 2401:81 –

Load capacity 100 100 100 N max.

Push/pull force 15 100 50 N max.

Permissible lateral force 50 50 50 N max.

Holding force 15 100 50 N max.

Permissible torque

in θX, θY

, θZ

7. 5 7. 5 7. 5 N·m max.

Drive properties

Motor type DC motor DC gear motor 2-phase stepper motor

Step resolution – – 200 Full steps/

rev.

Operating voltage,

nominal

24 24 24 V nom.

Operating voltage, max. 48 48 48 max.

Miscellaneous

Operating temperature

range

5 to 40 5 to 40 5 to 40 °C

Material Aluminum, steel Aluminum, steel Aluminum, steel

Mass 0.8 / 0.9 / 1.0 0.8 / 0.9 / 1.0 0.8 / 0.9 / 1.0 kg ±5 %

Moved mass 0.16 0.16 0.16 kg ±5 %

Connector HD Sub-D 26 (m) HD Sub-D 26 (m) HD Sub-D 26 (m)

Recommended

controllers

C-863 (single axis)

C-884 (up to 6 axes)

C-885 with

C-863.20C885

(to 40 axes)

ACS modular controller

C-863 (single axis)

C-884 (up to 6 axes)

C-885 with

C-863.20C885

(to 40 axes)

ACS modular controller

C-663.12 (single axis)

SMC Hydra

(double axis)

C-885 with

C-663.12C885

(up to 20 axes)

ACS modular controller

All cables required for operation with the ordered controller are included in the scope of delivery.

The cable length is 3 m. Cable for connecting to other controllers can be ordered as accessory.

Ask about custom designs!

Translation Stages

WWW.PI.WS

For Loads up to 200 N

L-408 Compact Linear Stage

>> Incremental Encoder

Technology Glossary ...................... page 290

Applications

n Automation

n Precision Micro Assembly

n Scientific Instrumentation

n Travel range 25 mm

n Stepper motor, DC or DC gear motor

n Precision sliding-thread spindle

n Crossed roller guides for high load capacity and precision,

anti-creep

n Integrated optical limit switches

n Optical reference point switch with direction sensing

L-408.503232 and L-408.504232, dimensions in mm

MOTION | POSITIONING

L-408.504232 L-408.503232 L-408.501200 Unit Tolerance

Motion and positioning

Travel range 25 25 25 mm max.

Integrated sensor Rotary encoder Rotary encoder –

Sensor resolution 2048 4096 – Cts./rev.

Design resolution 0.008 0.122 2.5 µm

Minimum incremental

motion

0.1 0.5 0.1 µm typ.

Unidirectional

repeatability

0.5 0.5 0.5 µm typ.

Bidirectional

repeatability

±5 ±5 ±5 µm typ.

Pitch / yaw ±100 ±100 ±100 µrad typ.

Straightness / ﬂatness ±2 ±2 ±2 µm typ.

Max. velocity 1.1 10 10 mm/s max.

Reference and limit

switches

Hall effect Hall effect Hall effect

Reference point switch

repeatability

1 1 1 µm typ.

Mechanical properties

Guide type Crossed roller guide

with anti-creep system

Crossed roller guide

with anti-creep system

Crossed roller guide

with anti-creep system

Drive screw Leadscrew Leadscrew Leadscrew

Drive screw pitch 0.5 0.5 0.5 mm

Gear ratio 2401:81 – –

Push/pull force 50 50 40 N max.

Holding force 50 50 40 N max.

Load capacity 200 200 200 N max.

Permissible lateral force 100 100 100 N max.

Permissible torque in θX15 15 15 N·m max.

Permissible torque

in θY

, θZ

10 10 10 N·m max.

Drive properties

Motor type DC gear motor DC motor 2-phase stepper motor

Operating voltage,

nominal

24 24 24 V nom.

Operating voltage, max. 48 48 48 V max.

Step resolution – – 200 Full steps/

rev.

Miscellaneous

Operating temperature

range

5 to 40 5 to 40 5 to 40 °C

Material Aluminum black

anodized, steel

Aluminum black

anodized, steel

Aluminum black

anodized, steel

Mass 0.87 0.87 0.98 kg ±5 %

Moved mass 0.155 0.155 0.155 kg ±5 %

Connector HD Sub-D 26 HD Sub-D 26 HD Sub-D 26

Recommended

controllers

C-863 (single axis)

C-884 (up to 6 axes)

C-885 with

C-863.20C885

(to 40 axes)

ACS modular controller

C-863 (single axis)

C-884 (up to 6 axes)

C-885 with

C-863.20C885

(to 40 axes)

ACS modular controller

C-663.12 (single axis)

SMC Hydra

(double axis)

C-885 with

C-663.12C885

(up to 20 axes)

ACS modular controller

All cables required for operation with the ordered controller are included in the scope of delivery.

The cable length is 3 m. Cable for connecting to other controllers can be ordered as accessory.

Ask about custom designs!

Translation Stages

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Inexpensive, with Linear Motor

V-408 PIMag® Linear Stage

>> Linear Encoder

>> PIMag® Magnetic Linear Motors

Technology Glossary ...................... page 290

Applications

n Automation

n Laser Cutting

n Laser Marking

n Photonics

n Scanning

n Scientific Instrumentation

n Iron core 3-phase linear motor

n Crossed roller bearings for high load

capacity, anti-creep

n Minimum incremental motion 20 nm

n Bidirectional repeatability ±0.1 µm

n Compact design

n Low price

V-408.132020 V-408.232020

travel range

n/a

105

V-408, dimensions in mm

MOTION | POSITIONING

V-408 Unit Tolerance

Motion and positioning

Travel range V-408.132020: 25

V-408.232020: 50

Integrated Sensor Incremental linear encoder

Sensor signal period 80 µm

Sensor resolution 10 (1) nm typ.

Min. incremental motion 20 nm typ.

Bidirectional repeatability ±0.1 µm typ.

Pitch / Yaw ±150 µrad typ.

Straightness / ﬂatness ±4 µm typ.

Velocity V-408.132020: 1.2

V-408.232020: 1.5

m/s max.

Mechanical properties

Load capacity in Z 80 N max.

Permissible lateral force 80 N max.

Permissible torque in θX2.3 N·m max.

Permissible torque in θY

, θZ1.3 N·m max.

Moved mass V-408.132020: 0.23

V-408.232020: 0.3

Mass without cable V-408.132020: 0.5

V-408.232020: 0.65

Overall mass V-408.132020: 0.79

V-408.232020: 0.94

Guide type Crossed roller guide with anti-creep system

Drive properties

Drive type PIMag® Linear motor, iron core, 3-phase

Intermediate circuit voltage 48 V DC max.

Peak force 14 N typ.

Nominal force 5 N typ.

Peak current, effective 3.2 A typ.

Nominal current, effective 1.1 A typ.

Force constant, effective 4.60 N/A typ.

Resistance phase-phase 1.23 Ω typ.

Inductance phase-phase 0.97 mH typ.

Back EMF phase-phase 2.81 V·s/m max.

Pole pitch N-N 18 mm

Miscellaneous

Operating temperature range 10 to 50 °C

Humidity 20 – 90 % rel., not condensing

Material Aluminum, black anodized

Motor connector HD Sub-D 26 (m)

Sensor connection Sub-D 15 (f)

Cable length 2 m

Recommended controllers C-891 (single axis)

C-885 with C-891.10C885 (up to 20 axes)

ACS modular controller

(1) interpolated

Ask about custom designs!

Translation Stages

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Basic Version for Universal Use

VT-80 Linear Stage

>> Incremental Encoder

Technology Glossary ...................... page 290

Applications

n Automation

n Scientific Instrumentation

n Travel ranges from 25 to 300 mm (1 to 12”)

n Low profile design

n Max. velocity to 20 mm/s

n Load capacity to 5 kg

n Compact XY combinations

VT-80, DC motor, dimensions in mm

VT-80, stepper motor, dimensions in mm

Direction of the axes and

torques for linear stages

A (mm) B (mm) C (mm)

25 mm

50 mm

75 mm

100 mm

150 mm

200 mm

300 mm

52.5

77.5

115

140

190

100

125

150

175

225

275

375

120

145

195

245

345

VT-80, dimensions in mm

MOTION | POSITIONING

623091x0 623092x0 Unit Tolerance

Linear stage with DC motor and

rotary encoder

Linear stage with stepper motor

Motion and positioning

Travel range 25 / 50 / 75 / 100 / 150 / 200 / 300 25 / 50 / 75 / 100 / 150 / 200 / 300 mm

Integrated sensor Rotary encoder, incremental –

Design resolution 0.5 5 (full step) µm

Sensor resolution 2000 – Cts./rev.

Minimum incremental motion 0.5 0.2 µm typ.

Unidirectional repeatability 0.8 0.4 µm typ.

Bidirectional repeatability ±10 ±10 µm typ.

Pitch ±100 / ±110 / ±120 / ±130 / ±150 /

±170 / ±210

±100 / ±110 / ±120 / ±130 / ±150 /

±170 / ±210

µrad typ.

Yaw ±150 ±150 µrad typ.

Straightness / ﬂatness ±8 / ±10 / ±11 / ±12 / ±14 / ±20 /

±35

±8 / ±10 / ±11 / ±12 / ±14 / ±20 /

±35

µm

Max. velocity 20 20 mm/s

Mechanical properties

Guide type Recirculating ball bearing Recirculating ball bearing

Drive screw type Leadscrew Leadscrew

Drive screw pitch 1 1 mm

Load capacity 50 50 N max.

Push/pull force 40 40 N max.

Permissible lateral force 30 30 N max.

Holding force, power off 40 40 N max.

Permissible torque Mx in X 2.5 2.5 N·m max.

Permissible torque My in Y 5 5 N·m max.

Permissible torque Mz in Z 2.5 2.5 N·m max.

Drive properties

Motor type DC motor 2-phase stepper motor

Operating voltage 24 24 V nom.

Operating voltage 48 48 V max.

Step resolution – 200 Full steps/

rev.

Limit switches 2 × mechanical 2 × mechanical

Miscellaneous

Operating temperature range 5 to 40 5 to 40 °C

Material Aluminum, black anodized Aluminum, black anodized

Mass 0.55 / 0.65 / 0.7 / 0.75 / 0.85 /

0.95 / 1.25

0.55 / 0.65 / 0.7 / 0.75 / 0.85 /

0.95 / 1.25

kg ±5 %

Moved mass 0.13 / 0.14 / 0.14 / 0.15 / 0.15 /

0.15 / 0.15

0.16 / 0.16 / 0.17 / 0.17 / 0.17 /

0.18 / 0.18

kg ±5 %

Connector HD Sub-D 15 (m) HD Sub-D 15 (m)

Recommended controllers C-863 (single axis)

C-884 (up to 6 axes)

C-885 with C-863.20C885

(to 40 axes)

ACS modular controller

C-663.12 (single axis)

SMC Hydra (double axis)

C-885 with C-663.12C885

(up to 20 axes)

ACS modular controller

Connecting cables for motor and sensor are not in the scope of delivery and must be ordered separately.

Ask about custom designs!

Translation Stages

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High Travel Accuracy and Inexpensive

M-406 Precision Linear Stage

>> ActiveDrive

>> Incremental Encoder

Technology Glossary ...................... page 290

Applications

n Metrology / Testing

n Precision Micro Assembly

n Scientific Instrumentation

n Travel ranges to 150 mm

n Crossed roller guides, anti-creep

n DC servo motor drive

n Direction-sensing reference point switch

A L

M-406.2xx

M-406.4xx

M-406.6xx

98,5

123,5

148,5

207

257

307

M-406, dimensions in mm

MOTION | POSITIONING

M-406.2DG

M-406.4DG

M-406.6DG

M-406.2PD

M-406.4PD

M-406.6PD

Unit Tolerance

Motion and positioning

Travel range 50 / 100 / 150 50 / 100 / 150 mm

Integrated sensor Rotary encoder Rotary encoder

Sensor resolution 2000 4000 Cts./rev.

Design resolution 0.0085 0.125 µm

Minimum incremental motion 0.1 0.25 µm

Unidirectional repeatability 0.2 0.2 µm

Backlash 2 2 µm

Crosstalk, angular error ±25 / ±50 / ±75 ±25 / ±50 / ±75 µrad

Velocity 1 15 mm/s max.

Mechanical properties

Drive screw pitch 0.5 0.5 mm

Gear ratio 29.6:1 –

Load capacity 200 200 N max.

Push/pull force 50 / 50 50 / 50 N max.

Lateral force 150 150 N max.

Drive properties

Motor type DC gear motor DC motor with PWM control

Operating voltage 0 to ±12 24 V

Motor power 3 30 W

Reference and limit switches Hall effect Hall effect

Miscellaneous

Operating temperature range –20 to 65 –20 to 65 °C

Material Aluminum, steel Aluminum, steel

Mass 2.1 / 2.4 / 2.8 2.1 / 2.4 / 2.8 kg

Connector Sub-D 15, incl. 3 m cable Sub-D 15, incl. 3 m cable

Recommended controllers C-863

C-884

C-863

C-884

Ask about custom designs!

Translation Stages

WWW.PI.WS

Inexpensive and Flexible Thanks to Large Number of Drives and Travel Range Variants

M-403 Precision Translation Stage

>> ActiveDrive

>> Incremental Encoder

Technology Glossary ...................... page 290

Applications

n Automation

n Biotechnology

n Medical Industry

n Photonics

n Inexpensive cost-optimized design for

precise positioning

n Travel ranges from 25 mm to 200 mm

n Resolution to 0.018 µm

n Min. incremental motion to 0.2 µm

n Preloaded precision leadscrew

n M-413 and M-414 versions for higher

load requirements

M-403 and M-404, dimensions in mm

M-403.xPD M-403.xDG

114

59,5

119,5

M-404.xPD M-403.xDG

114

59,5

128,5

M- 403.1x x

M- 404.1x x

M-403.2xx

M-404.2xx

M-403.4x

M-404.4xx

M-403.6xx

M-404.6xx

M-403.8xx

M-404.8xx

141

20,5

16,5 (±12,5)

166

37,5

29 (±25)

22,5

216

62,5

54 (±50)

47, 5

266

87,5

79 (±75)

72,5

316

112,5

108

104 (±100)

97, 5

MOTION | POSITIONING

M-403.1PD

M-403.2PD

M-403.4PD

M-403.6PD

M-403.8PD

M-403.1DG

M-403.2DG

M-403.4DG

M-403.6DG

M-403.8DG

Unit Tolerance

with ActiveDrive with DC gear motor

Motion and positioning

Travel range 25 / 50 / 100 / 150 / 200 25 / 50 / 100 / 150 / 200 mm

Integrated sensor Rotary encoder Rotary encoder

Sensor resolution 4000 2000 Cts./rev.

Design resolution 0.25 0.018 µm typ.

Minimum incremental motion 0.25 0.2 µm typ.

Backlash 6 10 µm typ.

Unidirectional repeatability 1 1 µm typ.

Pitch 200 200 µrad typ. over

100 mm

Yaw 200 200 µrad typ. over

100 mm

Velocity 10 (1) 2.5 mm/s max.

Reference point switch

repeatability

1 1 µm typ.

Mechanical properties

Drive screw pitch 1 1 mm

Gear ratio – 2304:81

Stiffness in motion direction 3.5 3.5 N/µm ±20 %

Load capacity (2) 200 200 N max.

Push/pull force 50 50 N max.

Lateral force 100 100 N max.

Drive properties

Drive type DC motor, ActiveDrive DC gear motor

Operating voltage 24 0 to ±12 V

Motor power 26 2.5 W nominal

Miscellaneous

Operating temperature range –20 to 65 –20 to 65 °C

Material Al (black anodized) Al (black anodized)

Mass 1.7 / 1.8 / 2.1 / 2.2 / 2.5 1.7 / 1.8 / 2.1 / 2.2 / 2.5 kg ±5 %

Connector Sub-D 15 (m), incl. 3 m cable Sub-D 15 (m), incl. 3 m cable

Recommended controllers /

drivers

C-863

C-884

C-863

C-884

(1) Recommended velocity

(2) Load capacity: Max. possible normal load capacity, centered, vertical load (linear stage horizontal).

Translation Stages

WWW.PI.WS

Inexpensive and Flexible Thanks to Large Number of Drives and Travel Range Variants

M-404 Precision Translation Stage

>> ActiveDrive

>> Incremental Encoder

Technology Glossary ...................... page 290

Applications

n Automation

n Biotechnology

n Medical Industry

n Photonics

n Inexpensive cost-optimized design for

precise positioning

n Travel ranges from 25 mm to 200 mm

n Resolution to 0.012 µm

n Min. incremental motion to 0.1 µm

n Ball screw for high velocities and number

of cycles

n M-413 and M-414 versions for higher load

requirements

M-403 and M-404, dimensions in mm

M-403.xPD M-403.xDG

114

59,5

119,5

M-404.xPD M-403.xDG

114

59,5

128,5

M- 403.1x x

M- 404.1x x

M-403.2xx

M-404.2xx

M-403.4x

M-404.4xx

M-403.6xx

M-404.6xx

M-403.8xx

M-404.8xx

141

20,5

16,5 (±12,5)

166

37,5

29 (±25)

22,5

216

62,5

54 (±50)

47, 5

266

87,5

79 (±75)

72,5

316

112,5

108

104 (±100)

97, 5

MOTION | POSITIONING

M-404.1PD

M-404.2PD

M-404.4PD

M-404.6PD

M-404.8PD

M-404.1DG

M-404.2DG

M-404.4DG

M-404.6DG

M-404.8DG

Unit Tolerance

with ActiveDrive with DC gear motor

Motion and positioning

Travel range 25 / 50 / 100 / 150 / 200 25 / 50 / 100 / 150 / 200 mm

Integrated sensor Rotary encoder Rotary encoder

Sensor resolution 4000 2000 Cts./rev.

Design resolution 0.25 0.012 µm typ.

Minimum incremental motion 0.25 0.1 µm typ.

Backlash 0.5 2 µm typ.

Unidirectional repeatability 0.5 1 µm typ.

Pitch 75 75 µrad typ. over

100 mm

Yaw 75 75 µrad typ. over

100 mm

Velocity 50 1.5 mm/s max.

Reference point switch

repeatability

1 1 µm typ.

Mechanical properties

Drive screw pitch 1 1 mm

Gear ratio – 2704:63

Motor resolution – – steps/rev.

Stiffness in motion direction 3 3 N/µm ±20 %

Load capacity (1) 200 200 N max.

Push/pull force 50 50 N max.

Lateral force 100 100 N max.

Drive properties

Drive type DC motor, ActiveDrive DC gear motor

Operating voltage 24 0 to ±12 V

Motor power 26 2.5 W nominal

Miscellaneous

Operating temperature range –20 to 65 °C –20 to 65 °C

Material Al (black anodized) Al (black anodized)

Mass 1.8 / 1.9 /2.2 / 2.3 /2.6 1.8 / 1.9 /2.2 / 2.3 /2.6 kg ±5 %

Connector Sub-D 15 (m), incl. 3 m cable Sub-D 15 (m), incl. 3 m cable

Recommended controllers /

drivers

C-863

C-884

C-863

C-884

(1) Max. possible normal load capacity, centered, vertical load (linear stage horizontal).

Translation Stages

WWW.PI.WS

Inexpensive and Flexible Thanks to Large Number of Drives and Travel Range Variants for High Loads

M-413 High-Load Precision Stage

>> ActiveDrive

>> Incremental Encoder

Technology Glossary ...................... page 290

Applications

n Automation

n Biotechnology

n Medical Industry

n Photonics

n Very inexpensive, robust models

n Flexible modular system M-403,

M-404, M-413, M-414

n Travel ranges from 100 to 300 mm

n Resolution to 0.018 µm

n Preloaded precision leadscrew

n Min. incremental motion 0.2 µm

M-413 and M-414, dimensions in mm

M-413/414.1xx M-413/414.2xx M-413/414.3xx

255

59,5

54 (±50)

355

115

109,5

104 (±100)

455

165

159,5

154 (±150)

140

100

M-413/414.xPD M-413.xDG M-414.xDG

120

59,5

122

133

59,5

MOTION | POSITIONING

M-413.1PD

M-413.2PD

M-413.3PD

M-413.1DG

M-413.2DG

M-413.3DG

Unit Tolerance

with ActiveDrive with DC gear motor

Motion and positioning

Travel range 100 / 200 / 300 100 / 200 / 300 mm

Integrated sensor Rotary encoder Rotary encoder

Sensor resolution 4000 2000 Cts./rev.

Design resolution 0.25 0.018 µm typ.

Minimum incremental motion 0.25 0.2 µm typ.

Backlash 6 10 µm typ.

Unidirectional repeatability 1 1 µm typ.

Pitch / yaw (1) 300 300 µrad typ. over

100 mm

Velocity 10 (2) 2.5 mm/s max.

Reference point switch

repeatability

1 1 µm typ.

Mechanical properties

Drive screw pitch 1 1 mm

Gear ratio – 2304:81

Stiffness in motion direction 3.5 3.5 N/µm ±20 %

Load capacity 500 500 N max.

Push/pull force 50 50 N max.

Lateral force 200 200 N max.

Drive properties

Drive type DC motor, ActiveDrive DC gear motor

Operating voltage 24 0 to ±12 V

Motor power 70 3.6 W nominal

Miscellaneous

Operating temperature range –20 to 65 –20 to 65 °C

Material Al (black anodized) Al (black anodized)

Mass 4.4 / 5.4 / 6.6 4.2 / 5.2 / 6.4 kg ±5 %

Connector Sub-D 15 (m), incl. 3 m cable Sub-D 15 (m), incl. 3 m cable

Recommended controllers /

drivers

C-863

C-884

C-863

C-884

(1) This value applies to each 100 mm respectively for travel ranges greater than 100 mm.

(2) Recommended velocity

Translation Stages

WWW.PI.WS

Inexpensive and Flexible Thanks to Large Number of Drives and Travel Range Variants for High Loads

M-414 High-Load Precision Stage

>> ActiveDrive

>> Incremental Encoder

Technology Glossary ...................... page 290

Applications

n Automation

n Biotechnology

n Medical Industry

n Photonics

n Use of precision components

n Flexible modular system M-403, M-404,

M-413, M-414

n Travel ranges from 100 mm to 300 mm

n Resolution to 0.023 µm

n Ball screw for high velocities and number

of cycles

n Min. incremental motion 0.1 µm

M-413 and M-414, dimensions in mm

M-413/414.1xx M-413/414.2xx M-413/414.3xx

255

59,5

54 (±50)

355

115

109,5

104 (±100)

455

165

159,5

154 (±150)

140

100

M-413/414.xPD M-413.xDG M-414.xDG

120

59,5

122

133

59,5

MOTION | POSITIONING

M-414.1PD

M-414.2PD

M-414.3PD

M-414.1DG

M-414.2DG

M-414.3DG

Unit Tolerance

with ActiveDrive with DC gear motor

Motion and positioning

Travel range 100 / 200 / 300 100 / 200 / 300 mm

Integrated sensor Rotary encoder Rotary encoder

Sensor resolution 4000 2000 Cts./rev.

Design resolution 0.5 0.023 µm typ.

Minimum incremental motion 0.5 0.1 µm typ.

Backlash 0.5 4 µm typ.

Unidirectional repeatability 0.5 1 µm typ.

Pitch / yaw (1) 100 100 µrad typ. over

100 mm

Velocity 100 3 mm/s max.

Reference point switch

repeatability

1 1 µm typ.

Mechanical properties

Drive screw pitch 2 2 mm

Gear ratio – 42.9206

Stiffness in motion direction 8 8 N/µm ±20 %

Load capacity 500 500 N max.

Push/pull force 100 50 N max.

Lateral force 200 200 N max.

Drive properties

Drive type DC motor, ActiveDrive DC gear motor

Operating voltage 24 0 to ±12 V

Motor power 70 3.6 W nominal

Miscellaneous

Operating temperature range –20 to 65 –20 to 65 °C

Material Al (black anodized) Al (black anodized)

Mass 4.4 / 5.4 / 6.6 4.2 / 5.2 / 6.4 kg ±5 %

Connector Sub-D 15 (m), incl. 3 m cable Sub-D 15 (m), incl. 3 m cable

Recommended controllers /

drivers

C-863

C-884

C-863

C-884

(1) This value applies to each 100 mm respectively for travel ranges greater than 100 mm.

Translation Stages

WWW.PI.WS

High Performance and Cost Efficiency, Drive Screw

L-412 High-Load Linear Stage

>> Absolute Encoder

>> Incremental Encoder

Technology Glossary ...................... page 290

Applications

n Automated Optical

Inspection (AOI)

n Electronics Manufacturing

n Automation

n Laser Cutting

Class leading design

When compared to current market offerings, the

new L-412 series of stages provides users with a

higher specification recirculating ball bearing that

offers higher load carrying capacity and dynamic

performance. The standard motor offers a high

resolution resulting in improved motion tracking

errors and refined move and settle performance.

Options

n Holding brake (L-412.xxxxxxB)

n Various rotary and linear encoders,

absolute and incremental

n Versions with linear encoder with

optional drag chain and connection box

(L-412.xxxxxxE1) or without drag chain

(L-412.xxxxxxE0)

n Foldback kits to reduce overall length

available on request

n Certification and calibration available

on request

Reference-class linear stage

PI has extended its product portfolio for industrial solutions with a new family

of precision linear ball-screw stages. Various versions are availablewith high-

performance synchronous servo motors, heavy-duty recirculating ball bearings,

and precision rotary and linear encoders. An optional holding brake allows use

as a vertical axis. The stage’s internal ball screw can be relubricated externally

thus removing the need to disassemble the stage. This provides a higher relia-

bility and longer lifetime when compared to stages requiring additional effort in

relubrication. It is also possible to integrate such lubrication into a customer‘s

central lubrication system. The protective side seal and the purge air connection

prevent contamination by debris entering the stage.

Synchronous servo motor

These motors have high positioning accuracy and overload capacity over a

large rotation speed range. High torque and low inertia ensure high dynamic

operation of the stage. The motor provides an adaptable cable exit, allowing the

user to be flexible with their cable positioning strategies in their machine. The

long lifetime, high performance and robustness of these servo motors produce

excellent results in applications in precision industrial automation.

n Width 116 mm

n Travel range to 610 mm

n Precision ball screw

n Incremental or absolute rotary encoder options

n Additional linear encoder options

n Precision recirculating ball bearings, load capacity to 400 N

n Covering strip on the side for protection against debris

MOTION | POSITIONING

L-412.03 L-412.05 L-412.09 L-412.13 Unit Tolerance

Motion

Travel range 52 102 204 305 mm

Pitch / yaw ±9 ±14 ±19 ±29 µrad max.

Straightness / ﬂatness ±1.5 ±2.5 ±4 ±6 µm max.

Velocity, unloaded 300 300 300 300 mm/s max.

Positioning accuracy

(uncalibrated)

±5 ±6 ±8 ±10 µm max.

L-412.17 L-412.21 L-412.25 Unit Tolerance

Motion

Active axes X X X

Travel range 407 508 610 mm

Pitch / yaw ±39 ±48 ±58 µrad max.

Straightness / ﬂatness ±8 ±9 ±10 µm max.

Velocity, unloaded 300 300 300 mm/s max.

Positioning accuracy

(uncalibrated)

±12 ±14 ±16 µm max.

L-412.xxx232

basic option

L-412.xxx244 L-412.xxx054 Unit Tolerance

Encoder options

Integrated sensor Incremental rotary

encoder

Absolute rotary

encoder, single turn

Absolute rotary

encoder, multiturn

Sensor signal A/B quadrature, RS-422 EnDat 2.1 EnDat 2.1

Sensor resolution 20000 8192 8192 Cts./rev.

Design resolution 0.25 0.6 0.6 µm

Minimum incremental

motion

122µm

Bidirectional repeata-

bility

±1 ±3 ±3 µm max.

Limit switches Hall effect, 5 V NPN Hall effect, 5 V NPN –

Sensor connection M23 M23 M23

L-412.xxx212Ex L-412.xxx211Ex L-412.xxx025Ex Unit Tolerance

Encoder options

Integrated sensor Incremental linear

encoder

Additional rotary

encoder, see basic

option

Incremental linear

encoder

Additional rotary

encoder, see basic

option

Absolute-measuring

linear encoder

Additional rotary

encoder, see basic

option

Sensor signal A/B quadrature, RS-422 Sin/cos, 1 V peak-peak,

20 µm signal period

EnDat 2.2

Design resolution 0.05 – 0.001 µm

Minimum incremental

motion

300 50 50 nm typ.

Bidirectional

repeatability

±0.5 ±0.5 ±0.5 µm max.

Limit switches Hall effect, 5 V NPN Hall effect, 5 V NPN –

Sensor connection Sub-D 15 (m) M17 M17

Translation Stages

WWW.PI.WS

L-412.xx9 Unit Tolerance

Drive properties

Drive type Synchronous servo motor

Intermediate circuit

voltage, effective

320 V DC max.

Peak torque 2.76 N·m typ.

Nominal torque 0.7 N·m typ.

Peak current,

effective (RMS)

10.9 A typ.

Nominal current,

effective (RMS)

2.2 A typ.

Torque constant,

effective

0.32 N·m/A typ.

Resistance phase-phase 5.22 Ω typ.

Inductance phase-phase 9.7 mH typ.

Back EMF phase-phase 20.4 V/kRPM max.

Number of pole pairs 3

Connecting cables are not in the scope of delivery and must be ordered separately.

Ask about custom designs!

L-412 Unit Tolerance

Miscellaneous

Material Aluminum, black anodized stainless steel

Overall mass L-412.03 (52 mm travel range): 6.4

L-412.05 (102 mm travel range): 6.9

L-412.09 (204 mm travel range): 7.9

L-412.13 (305 mm travel range): 8.9

L-412.17 (407 mm travel range): 9.8

L-412.21 (508 mm travel range): 10.8

L-412.25 (610 mm travel range): 11.8

kg ±5 %

Moved mass 1.4 kg ±5 %

MTBF 20000 h

Connection M23 (motor)

M23 (rotary encoder)

optional connection for linear encoder

Fitting for purge air hose with outside diameter 4 mm

Funnel-type grease nipple for spindle lubrication

Limit switch connection M8 8-pin

Recommended

controllers

ACS modular controller

L-412.xxxxxx L-412.xxxxxxB Unit Tolerance

Mechanical properties

Guide type Recirculating ball bearing Recirculating ball bearing

Drive screw type Ball screw Ball screw

Holding brake – Electromagnetic safety brake

Drive screw pitch 5 5 mm

Push/pull force,

power on

700 700 N max.

Holding force, power off – 500 N typ.

Load capacity in Z 400 400 N max.

Permissible lateral force 200 200 N max.

Permissible torque in θX20 20 N·m max.

Permissible torque in θY15 15 N·m max.

Permissible torque in θZ20 20 N·m max.

MOTION | POSITIONING

TRAVEL A B C D E

L-412.xxxxxxxx

L-412.xxxxxxxxB

L-412.xxxxxxEO

L-412.xxx211E1

L-412.xxx212E1

L-417.03xxxx

L-417.05xxxx

L-417.09xxxx

L-417.13xxxx

L-417.17xxxx

L-417.21xxxx

L-417.25xxxx

52 (4”)

102 (4”)

204 (8”)

305 (12”)

407 (16”)

508 (20”)

610 (24”)

290

340

445

545

645

745

850

147, 5

172,5

225

275

325

375

42 7, 5

100

100, 200

100, 200, 300

100, 200, 300, 400

100, 200, 300, 400, 500

100, 200, 300, 400, 500, 600

100, 200, 300, 400, 500, 600, 700

114,5

148,5

28,5

L-412, dimensions in mm

Translation Stages

WWW.PI.WS

High Performance and Cost Efficiency, Linear Motor

V-412 PIMag® High-Load Linear Stage

>> Absolute Encoder

>> Linear Encoder

>> PIMag® Magnetic Linear Motors

Technology Glossary ...................... page 290

Applications

n Automated Optical

Inspection (AOI)

n Digital Printing

n Electronics Manufacturing

n Flatpanel Inspection

n Automation

n Laser Cutting

n Scanning

n Width 116 mm

n Travel range to 610 mm

n Nominal force 33 N

n Incremental or absolute linear encoder

n Precision recirculating ball bearings,

load capacity to 400 N

n Covering strip on the side for protection

against debris

Class leading design

When compared to current market offerings, the

new V-412 series of stages provides users with a

higher specification recirculating ball bearing that

offers higher load carrying capacity and dynamic

performance. The encoder options offer a high

resolution resulting in improved motion tracking

errors and refined move and settle performance.

For full flexibility the user can select either incre-

mental or absolute types. Absolute types remove

the requirement to home the stage during startup

and provide additional benefits including reduced

collision risks during operation.

Reference-class linear stage

PI has extended its product portfolio for industrial solutions with a new family

of precision linear motor stages. Various versions are available with high-per-

formance linear motors, heavy-duty recirculating ball bearings, and precision

linear encoders. The protective side seal and the purge air connection prevent

contamination by debris entering the stage.

PIMag® magnetic direct drive

3-phase magnetic direct drives do not use mechanical components in the drive-

train, they transmit the drive force to the motion platform directly and without

friction. The ironless linear motors reach high velocities and accelerations.

Ironless motors are particularly suitable for positioning tasks with the highest

demands on precision because there is no undesirable interaction with the

permanent magnets. This is in comparison to iron core linear motors which

exhibit ‘cogging’. This allows smooth running even at low velocities and no

vibration at high velocities.

MOTION | POSITIONING

V-412.03 V-412.05 V-412.09 V-412.13 Unit Tolerance

Motion

Travel range 52 102 204 305 mm

Pitch / yaw ±9 ±14 ±19 ±29 µrad max.

Straightness / ﬂatness ±1.5 ±2.5 ±4 ±6 µm max.

Velocity, unloaded 2000 2000 2000 2000 mm/s max.

Positioning accuracy

(uncalibrated)

±3 ±4 ±8 ±10 µm typ.

V-412.17 V-412.21 V-412.25 Unit Tolerance

Motion

Active axes X X X

Travel range 407 508 610 mm

Pitch / yaw ±39 ±48 ±58 µrad max.

Straightness / ﬂatness ±8 ±9 ±10 µm max.

Velocity, unloaded 2000 2000 2000 mm/s max.

Positioning accuracy

(uncalibrated)

±12 ±14 ±15 µm typ.

V-412.xxx211Ex V-412.xxx025Ex Unit Tolerance

Encoder options

Integrated sensor Incremental linear encoder Absolute-measuring linear encoder

Sensor signal Sin/cos, 1 V peak-peak,

20 µm signal period

EnDat 2.2

Design resolution 0.0003 0.001 µm

Minimum incremental

motion

510 nm typ.

Bidirectional

repeatability

±0.5 ±0.5 µm typ.

Limit switches Hall effect, 5 V NPN –

V-412.xxxxxx V-412.xxxxxxB Unit Tolerance

Mechanical properties

Guide type Recirculating ball bearing Recirculating ball bearing

Load capacity in Z 400 400 N max.

Permissible lateral force 200 200 N max.

Permissible torque in θX20 20 N·m max.

Permissible torque in θY15 15 N·m max.

Permissible torque in θZ20 20 N·m max.

Translation Stages

WWW.PI.WS

V-412.xx6 Unit Tolerance

Drive properties

Drive type Ironless 3-phase linear motor

Intermediate circuit

voltage, effective

300 V DC max.

Peak force 151 N typ.

Nominal force 33 N typ.

Peak current,

effective (RMS)

10.6 A typ.

Nominal current,

effective (RMS)

2.3 A typ.

Force constant, effective 14.1 N/A typ.

Motor constant 4 N/√W typ.

Electrical time constant 0.19 ms

Resistance phase-phase 8.69 Ω typ.

Inductance phase-phase 1.4 mH typ.

Back EMF phase-phase 8.1 V·s/m max.

Pole pitch N-N 30.5 mm

V-412 Unit Tolerance

Miscellaneous

Material Aluminum, black anodized

stainless steel

Overall mass V-412.03 (52 mm travel range): 5.0

V-412.05 (102 mm travel range): 5.6

V-412.09 (204 mm travel range): 6.7

V-412.13 (305 mm travel range): 7.9

V-412.17 (407 mm travel range): 9.0

V-412.21 (508 mm travel range): 10.2

V-412.25 (610 mm travel range): 11.3

kg ±5 %

Moved mass 1.7 kg ±5 %

MTBF 20000 h

Connection M17 (motor)

M17 (linear encoder)

Fitting for purge air hose with outside diameter 4 mm

Recommended

controllers

C-891 (single axis)

C-885 with C-891.10C885 (up to 20 axes)

ACS modular controller

Connecting cables are not in the scope of delivery and must be ordered separately.

Ask about custom designs!

MOTION | POSITIONING

V-412, dimensions in mm

TRAVEL A B C

V-412.03xxxx

V-412.05xxxx

V-412.09xxxx

V-412.13xxxx

V-412.17xxxx

V-412.21xxxx

V-412.25xxxx

52 (2”)

102 (4”)

204 (8”)

305 (12”)

407 (16”)

508 (20”)

610 (24”)

285

335

440

540

640

740

845

142,5

167,5

220

270

320

370

422,5

100

100, 200

100, 200, 300

100, 200, 300, 400

100, 200, 300, 400, 500

100, 200, 300, 400, 500, 600

100, 200, 300, 400, 500, 600, 700

Translation Stages

WWW.PI.WS

High Performance and Cost Efficiency, Drive Screw

L-417 High-Load Linear Stage

>> Absolute Encoder

>> Incremental Encoder

Technology Glossary ...................... page 290

Applications

n Automated Optical Inspection

(AOI)

n Electronics Manufacturing

n Automation

n Laser Cutting

n Width 166 mm

n Travel range to 813 mm

n Precision ball screw

n Incremental or absolute rotary encoder options

n Additional linear encoder options

n Precision recirculating ball bearings, load capacity to 450 N

n Covering strip on the side for protection against debris

Options

n Holding brake (L-417.xxxxxxB)

n Various rotary and linear encoders,

absolute and incremental

n Versions with linear encoder with

optional drag chain and connection box

(L-417.xxxxxxE1) or without drag chain

(L-417.xxxxxxE0)

n Foldback kits to reduce overall length

available on request

n Certification and calibration available

on request

Class leading design

When compared to current market offerings, the

new L-417 series of stages provides users with a

higher specification recirculating ball bearing that

offers higher load carrying capacity and dynamic

performance. The standard motor offers a high

resolution resulting in improved motion tracking

errors and refined move and settle performance.

Reference-class linear stage

PI has extended its product portfolio for industrial solutions with a new family

of precision linear ball-screw stages. Various versions are available with high-

performance synchronous servo motors, heavy-duty recirculating ball bearings,

and precision rotary and linear encoders. An optional holding brake allows use

as a vertical axis. The stage’s internal ball screw can be relubricated externally

thus removing the need to disassemble the stage. This provides a higher relia-

bility and longer lifetime when compared to stages requiring additional effort in

relubrication. It is also possible to integrate such lubrication into a customer‘s

central lubrication system. The protective side seal and the purge air connection

prevent contamination by debris entering the stage.

Synchronous servo motor

These motors have high positioning accuracy and overload capacity over a

large rotation speed range. High torque and low inertia ensure high dynamic

operation of the stage. The motor provides an adaptable cable exit, allowing the

user to be flexible with their cable positioning strategies in their machine. The

long lifetime, high performance and robustness of these servo motors produce

excellent results in applications in precision industrial automation.

MOTION | POSITIONING

L-417.05 L-417.09 L-417.13 L-417.17 Unit Tolerance

Motion

Travel range 102 204 305 407 mm

Pitch / yaw ±14 ±19 ±29 ±35 µrad max.

Straightness / ﬂatness ±2.5 ±4 ±6 ±8 µm max.

Velocity, unloaded 300 300 300 300 mm/s max.

Positioning accuracy

(uncalibrated)

±6 ±8 ±10 ±12 µm max.

L-417.21 L-417.25 L-417.33 Unit Tolerance

Motion

Active axes X X X

Travel range 508 610 813 mm

Pitch / yaw ±40 ±45 ±50 µrad max.

Straightness / ﬂatness ±9 ±10 ±12 µm max.

Velocity, unloaded 300 300 250 mm/s max.

Positioning accuracy

(uncalibrated)

±14 ±16 ±18 µm max.

L-417.xxx232

basic option

L-417.xxx244 L-417.xxx054 Unit Tolerance

Encoder options

Integrated sensor Incremental rotary

encoder

Absolute rotary

encoder, single turn

Absolute rotary

encoder, multiturn

Sensor signal A/B quadrature, RS-422 EnDat 2.1 EnDat 2.1

Sensor resolution 20000 8192 8192 Cts./rev.

Design resolution 0.25 0.6 0.6 µm

Minimum incremental

motion

122µm

Bidirectional

repeatability

±1 ±3 ±3 µm max.

Limit switches Hall effect, 5 V NPN Hall effect, 5 V NPN –

Sensor connection M23 M23 M23

L-417.xxx212Ex L-417.xxx211Ex L-417.xxx025Ex Unit Tolerance

Encoder options

Integrated sensor Incremental linear

encoder

Additional rotary

encoder, see basic

option

Incremental linear

encoder

Additional rotary

encoder, see basic

option

Absolute-measuring

linear encoder

Additional rotary

encoder, see basic

option

Sensor signal A/B quadrature, RS-422 Sin/cos, 1 V peak-peak,

20 µm signal period

EnDat 2.2

Design resolution 0.05 – 0.001 µm

Minimum incremental

motion

300 50 50 nm typ.

Bidirectional

repeatability

±0.5 ±0.5 ±0.5 µm max.

Limit switches Hall effect, 5 V NPN Hall effect, 5 V NPN –

Sensor connection Sub-D 15 (m) M17 M17

Translation Stages

WWW.PI.WS

L-417.xxxxxx L-417.xxxxxxB Unit Tolerance

Mechanical properties

Guide type Recirculating ball bearing Recirculating ball bearing

Drive screw type Ball screw Ball screw

Holding brake – Electromagnetic safety brake

Drive screw pitch 5 5 mm

Push/pull force,

power on

700 700 N max.

Holding force, power off – 500 N typ.

Load capacity in Z 450 450 N max.

Permissible lateral force 250 250 N max.

Permissible torque in θX40 40 N·m max.

Permissible torque in θY30 30 N·m max.

Permissible torque in θZ40 40 N·m max.

L-417.xx9 Unit Tolerance

Drive properties

Drive type Synchronous servo motor

Intermediate circuit

voltage, effective

320 V DC max.

Peak torque 2.76 N·m typ.

Nominal torque 0.7 N·m typ.

Peak current,

effective (RMS)

10.9 A typ.

Nominal current,

effective (RMS)

2.2 A typ.

Torque constant,

effective

0.32 N·m/A typ.

Resistance phase-phase 5.22 Ω typ.

Inductance phase-phase 9.7 mH typ.

Back EMF phase-phase 20.4 V/kRPM max.

Number of pole pairs 3

L-417 Unit Tolerance

Miscellaneous

Material Aluminum, black anodized

stainless steel

Overall mass L-417.05 (102 mm travel range): 9.3

L-417.09 (204 mm travel range): 10.8

L-417.13 (305 mm travel range): 12.2

L-417.17 (407 mm travel range): 13.7

L-417.21 (508 mm travel range): 15.1

L-417.25 (610 mm travel range): 16.5

L-417.33 (813 mm travel range): 19.4

kg ±5 %

Moved mass 2.4 kg ±5 %

MTBF 20000 h

Connection M23 (motor)

M23 (rotary encoder)

optional connection for linear encoder

Fitting for purge air hose with outside diameter 4 mm

Funnel-type grease nipple for spindle lubrication

Limit switch connection M8 8-pin

Recommended

controllers

ACS modular controller

Connecting cables are not in the scope of delivery and must be ordered separately.

Ask about custom designs!

MOTION | POSITIONING

L-417, dimensions in mm

TRAVEL A B C D E

L-417.xxxxxxxx

L-417.xxxxxxxxB

L-417.xxxxxxEO

L- 417. x x x211E1

L-417.xxx212E1

L-417.05xxxx

L-417.09xxxx

L-417.13xxxx

L-417.17xxxx

L-417.21xxxx

L-417.25xxxx

L-417.33xxxx

102 (4”)

204 (8”)

305 (12”)

407 (16”)

508 (20”)

610 (24”)

813 (32”)

356

470

570

670

775

875

1080

198

250,5

300,5

350,5

403

453

555,5

150

150, 350

150, 350, 550

150, 350, 550, 750

150, 350, 550, 750, 950

119,5

153,5

28,5

Translation Stages

WWW.PI.WS

High Performance and Cost Efficiency, Linear Motor

V-417 PIMag® High-Load Linear Stage

>> Absolute Encoder

>> Linear Encoder

>> PIMag® Magnetic Linear Motors

Technology Glossary ...................... page 290

Applications

n Automated Optical

Inspection (AOI)

n Digital Printing

n Electronics Manufacturing

n Flatpanel Inspection

n Automation

n Laser Cutting

n Scanning

Class leading design

When compared to current market offerings, the

new V-417 series of stages provides users with a

higher specification recirculating ball bearing that

offers higher load carrying capacity and dynamic

performance. The encoder options offer a high

resolution resulting in improved motion tracking

errors and refined move and settle performance.

For full flexibility the user can select either incre-

mental or absolute types. Absolute types remove

the requirement to home the stage during startup

and provide additional benefits including reduced

collision risks during operation.

Reference-class linear stage

PI has extended its product portfolio for industrial solutions with a new family

of precision linear motor stages. Various versions are available with high-per-

formance linear motors, heavy-duty recirculating ball bearings, and precision

linear encoders. The protective side seal and the purge air connection prevent

contamination by debris entering the stage.

PIMag® magnetic direct drive

3-phase magnetic direct drives do not use mechanical components in the drive-

train, they transmit the drive force to the motion platform directly and without

friction. The ironless linear motors reach high velocities and accelerations.

Ironless motors are particularly suitable for positioning tasks with the highest

demands on precision because there is no undesirable interaction with the

permanent magnets. This is in comparison to iron core linear motors which

exhibit ‘cogging’. This allows smooth running even at low velocities and no

vibration at high velocities.

n Width 166 mm

n Travel range to 813 mm

n Nominal force 87 N

n Incremental or absolute linear encoder

n Precision recirculating ball bearings, load

capacity to 450 N

n Covering strip on the side for protection

against debris

MOTION | POSITIONING

V-417.05 V-417.09 V-417.13 V-417.17 Unit Tolerance

Motion

Travel range 102 204 305 407 mm

Pitch / yaw ±14 ±19 ±29 ±39 µrad max.

Straightness / ﬂatness ±2.5 ±4 ±6 ±8 µm max.

Velocity, unloaded 2000 2000 2000 2000 mm/s max.

Positioning accuracy

(uncalibrated)

±4 ±8 ±10 ±12 µm typ.

V-417.21 V-417.25 V-417.33 Unit Tolerance

Motion

Active axes X X X

Travel range 508 610 813 mm

Pitch / yaw ±40 ±45 ±50 µrad max.

Straightness / ﬂatness ±9 ±10 ±12 µm max.

Velocity, unloaded 2000 2000 2000 mm/s max.

Positioning accuracy

(uncalibrated)

±14 ±15 ±17 µm typ.

V-417.xxxxxx V-417.xxxxxxB Unit Tolerance

Mechanical properties

Guide type Recirculating ball bearing Recirculating ball bearing

Load capacity in Z 450 450 N max.

Permissible lateral force 250 250 N max.

Permissible torque in θX40 40 N·m max.

Permissible torque in θY30 30 N·m max.

Permissible torque in θZ40 40 N·m max.

V-417.xxx211Ex V-417.xxx025Ex Unit Tolerance

Encoder options

Integrated sensor Incremental linear encoder Absolute-measuring linear encoder

Sensor signal Sin/cos, 1 V peak-peak,

20 µm signal period

EnDat 2.2

Design resolution 0.0003 0.001 µm

Minimum

incremental motion

510 nm typ.

Bidirectional

repeatability

±0.5 ±0.5 µm typ.

Limit switches Hall effect, 5 V NPN –

Translation Stages

WWW.PI.WS

V-417 Unit Tolerance

Miscellaneous

Material Aluminum, black anodized

stainless steel

Overall mass V-417.05 (102 mm travel range): 9.3

V-417.09 (204 mm travel range): 11.2

V-417.13 (305 mm travel range): 13.0

V-417.17 (407 mm travel range): 14.8

V-417.21 (508 mm travel range): 16.6

V-417.25 (610 mm travel range): 18.4

V-417.33 (610 mm travel range): 21.1

kg ±5 %

Moved mass 2.8 kg ±5 %

MTBF 20000 h

Connection M17 (motor)

M17 (linear encoder)

Fitting for purge air hose with outside diameter 4 mm

Recommended

controllers

C-891 (single axis)

C-885 with C-891.10C885 (up to 20 axes)

ACS modular controller

Connecting cables are not in the scope of delivery and must be ordered separately.

Ask about custom designs!

V-417.xx6 Unit Tolerance

Drive properties

Drive type Ironless 3-phase linear motor

Intermediate circuit

voltage, effective

300 V DC max.

Peak force 300 N typ.

Nominal force 87 N typ.

Peak current,

effective (RMS)

15 A typ.

Nominal current,

effective (RMS)

4.4 A typ.

Force constant, effective 19.9 N/A typ.

Motor constant 8.4 N/√W typ.

Electrical time constant 0.35 ms

Resistance phase-phase 3.6 Ω typ.

Inductance phase-phase 1.2 mH typ.

Back EMF phase-phase 16 V·s/m max.

Pole pitch N-N 30 mm

MOTION | POSITIONING

V-417, dimensions in mm

TRAVEL A B C

V-417.05XXXX

V-417.09XXXX

V-417.13XXXX

V-417.17XXXX

V-417.21XXXX

V-417.25XXXX

V-417.33XXXX

102 (4”)

204 (8”)

305 (12”)

407 (16”)

508 (20”)

610 (24”)

813 (32”)

360

465

565

665

770

870

1075

180

232,5

282,5

332,5

385

435

537,5

150

150, 350

150, 350, 550

150, 350, 550, 750

150, 350, 550, 750, 950

Translation Stages

WWW.PI.WS

Robust Design for Industrial Use

LS-180 Linear Stage for Heavy Loads

>> Linear Encoder

Technology Glossary ...................... page 290

Applications

n Sample Inspection

n Scanning

n Scientific Instrumentation

n Semiconductor

Drive types

n Closed-loop DC servo motor with rotary

encoder on the motor shaft

n 2-phase stepper motor for high torque

even at low velocities and high resolution

Minimum incremental motion

In conjunction with the SMC Hydra controller,

versions with stepper motor and integrated linear

encoder achieve repeatable minimum incremen-

tal motion in the range of the sensor resolution.

The same configuration achieves constant low

velocities of a few sensor increments per second.

Reference-class linear stage

Recirculating ball bearings for high travel accuracy and load capacity. Precision

ball screw with 5 mm pitch. Stress-relieved aluminum base for highest stability.

Noncontact inductive limit switches.

Highly accurate position measuring with incremental linear encoder

Noncontact optical linear encoders measure the actual position directly at the

motion platform with the greatest accuracy so that nonlinearity, mechanical

play or elastic deformation have no influence on position measuring.

Recirculating ball bearings

When carefully assembled, recirculating ball bearings are distinguished by

a beneficial combination of high load capacity, lifetime, maintenance-free

operation, and guiding accuracy. The moving part of the stages is supported

by four preloaded linear ball bearing units which run on two guide rails. Each

bearing unit is made up of two independent rows of circulating ball bearings.

n Travel ranges from 155 mm to 508 mm

(6” to 20”)

n Max. velocity to 150 mm/s

n Load capacity to 1000 N

n Optional linear encoder for direct

position measurement

MOTION | POSITIONING

624091x0 624091x1 624092x0 624092x1-0001 Unit Tolerance

Linear stage with

DC motor and

rotary encoder

Linear stage

with DC motor,

linear and rotary

encoder

Linear stage with

stepper motor

Linear stage

with stepper

motor and linear

encoder

Motion and positioning

Travel range 155 / 205 / 305 /

508

155 / 205 / 305 /

508

155 / 205 / 305 /

508

155 / 205 / 305 /

508

Integrated sensor Rotary encoder Linear and

rotary encoder

– Linear encoder

Sensor signal rotary

encoder

A/B quadrature,

RS-422

A/B quadrature,

RS-422

– –

Sensor signal linear

encoder

– A/B quadrature,

RS-422

– Sin/cos,

1 V peak-peak,

20 µm signal

period

Design resolution 0.25 0.05 25 0.005 µm

Sensor resolution

rotary encoder

20000 20000 – Counts/

rev.

Sensor resolution linear

encoder

– 0.05 – – µm

Minimum incremental

motion

0.5 0.1 0.5 0.1 µm typ.

Unidirectional

repeatability

0.5 0.1 0.5 0.1 µm typ.

Bidirectional

repeatability

±2.5 ±0.1 ±2.5 ±0.1 µm typ.

Pitch ±40 / ±50 / ±60 /

±80

±40 / ±50 / ±60 /

±80

±40 / ±50 / ±60 /

±80

±40 / ±50 / ±60 /

±80

µrad typ.

Yaw ±50 ±50 ±50 ±50 µrad typ.

Straightness ±2 / ±3 / ±4 / ±6 ±2 / ±3 / ±4 / ±6 ±2 / ±3 / ±4 / ±6 ±2 / ±3 / ±4 / ±6 µm typ.

Flatness ±2 / ±3 / ±4 / ±6 ±2 / ±3 / ±4 / ±6 ±2 / ±3 / ±4 / ±6 ±2 / ±3 / ±4 / ±6 µm typ.

Max. velocity 150 150 75 75 mm/s

Mechanical properties

Guide type Recirculating

ball bearing

Recirculating

ball bearing

Recirculating

ball bearing

Recirculating

ball bearing

Drive screw type Ball screw Ball screw Ball screw Ball screw

Drive screw pitch 5 5 5 5 mm

Load capacity 1000 1000 1000 1000 N max.

Push/pull force 800 800 800 800 N max.

Holding force, power off 20 20 50 50 N max.

Permissible lateral force 500 500 500 500 N max.

Permissible torque Mx

in θX

250 250 250 250 N·m max.

Permissible torque My

in θY

132 132 132 132 N·m max.

Permissible torque Mz

in θZ

125 125 125 125 N·m max.

Translation Stages

WWW.PI.WS

624091x0 624091x1 624092x0 624092x1-0001 Unit Tolerance

Drive properties

Motor type DC motor DC motor 2-phase stepper

motor

2-phase stepper

motor

Operating voltage,

nominal

24 24 48 48 V nom.

Operating voltage, max. 48 48 48 48 V max.

Peak current, effective 3.8 3.8 2 2 A typ.

Electrical time constant 6 6 ms

Resistance phase-phase 0.62 0.62 2.4 2.4 Ω typ.

Inductance phase-phase 0.13 0.13 2.87 2.87 mH typ.

Back EMF phase-phase 0.00349 0.00349 V/kRPM max.

Step resolution 200 200 Full

steps/

rev.

Limit switches Inductive Inductive Inductive Inductive

Miscellaneous

Operating temperature

range

5 to 40 5 to 40 5 to 40 0 to 55 °C

Material Aluminum, steel Aluminum, steel Aluminum, steel Aluminum, steel

Mass 7.8 / 8.4 / 9.4 /

10.6

8.5 / 9.1 / 10.3 /

11. 5

8.3 / 8.9 / 9.9 /

11. 0

9.0 / 9.6 / 10.8 /

kg ±5 %

Moved mass 2.2 2.2 2.2 2.2 kg ±5 %

Connection Sub-D 25 (m) Motor:

Sub-D 25 (m)

Sensor:

Sub-D 9 (m)

Sub-D 25 (m) Motor:

Sub-D 25 (m

Sensor:

Sub-D 9 (m)

Recommended

controllers

C-863

(single axis)

with C-863.AD11

line driver

C-884 (to 6 axes)

with C-863.AD11

line driver

C-885 with

C-863.20C885

(to 40 axes)

and C-863.AD11

line driver

ACS modular

controller

C-863

(single axis)

with C-863.AD11

line driver

C-884 (to 6 axes)

with C-863.AD11

line driver

C-885 with

C-863.20C885

(to 40 axes)

and C-863.AD11

line driver

ACS modular

controller

C-663.12

(single axis)

SMC Hydra

(double axis)

C-885 with

C-663.12C885

(up to 20 axes)

ACS modular

controller

C-663.12

(single axis)

SMC Hydra

(double axis)

C-885 with

C-663.12C885

(up to 20 axes)

ACS modular

controller

Ask about custom designs!

Connecting cables for motor and sensor are not in the scope of delivery and must be ordered separately.

MOTION | POSITIONING

LS-180, dimensions in mm, LS-010: Cable for linear encoder

Travel range/mm A B C D

155

205

305

508

235

260

310

410

470

520

620

820

350

450

650 Direction of the axes

and torques for linear stages

Translation Stages

WWW.PI.WS

With DC or Stepper Motor

L-505 Compact Linear Stage

>> Linear Encoder

Technology Glossary ...................... page 290

Applications

n Autofocus

n Biotechnology

n Automation

n Medical Industry

n Precision Micro Assembly

Variants with DC motor are equipped with an

incremental linear encoder. This is optional in

the case of stepper motor variants.

Highly accurate position measuring with

incremental linear encoder

Noncontact optical linear encoders measure the

actual position directly at the motion platform

with the greatest accuracy so that nonlinearity,

mechanical play or elastic deformation have no

influence on position measuring.

Product overview

Compact linear stage with low-backlash fine-threaded leadscrews and ball

guides. Directly mountable XY combination. Integrated reference point and

limit switches: Hall effect.

The linear stage is available in two design variants:

n Narrow, long variant with direct fixed drive (flange motor).

n Wide, compact variant with belt drive (folded drivetrain).

These variants are marked by an “F” at the end of the item number.

Drive types

n DC motor with or without gearhead

n Stepper motor with or without gearhead

n Travel ranges 13 or 26 mm

n Stepper motor or DC servo motor with

and without gearhead

n Velocity to 15 mm/s

n Load capacity to 30 N

n Integrated reference point and limit switch

MOTION | POSITIONING

L-505 with DC motor L-505.013212

L-505.013212F

L-505.023212

L-505.023212F

L-505.014212F

L-505.024212F

Unit Tolerance

Linear stage with DC motor

and linear encoder

Linear stage with DC gear motor

and linear encoder

Active axes X X

Motion and positioning

Travel range 13 / 26 13 / 26 mm

Integrated sensor Incremental linear encoder Incremental linear encoder

Sensor signal linear

encoder

A/B quadrature, RS-422 A/B quadrature, RS-422

Design resolution 0.05 0.05 µm

Sensor resolution linear

encoder

0.05 0.05 µm

Minimum incremental

motion

0.1 0.5 µm typ.

Unidirectional

repeatability

0.1 0.25 µm typ.

Bidirectional

repeatability

±0.15 ±0.25 µm typ.

Pitch / yaw ±50 / ±75 ±50 / ±75 µrad typ.

Straightness / ﬂatness ±0.5 / ±1 ±0.5 / ±1 µm typ.

Max. velocity L-505.xxxxxx: 15

L-505.xxxxxxF: 7.5

1 mm/s

Reference and limit

switches

Hall effect Hall effect

Reference point switch

repeatability

<4 <4 µm typ.

Mechanical properties

Guide type Ball guide Ball guide

Drive screw type Leadscrew Leadscrew

Drive screw pitch 0.5 0.5 mm

Load capacity 30 30 N max.

Permissible lateral force 30 30 N max.

Push/pull force 20 20 N max.

Holding force, power off 20 20 N typ.

Permissible torque Mx

in θX

L-505.01: 7

L-505.02: 9

L-505.01: 7

L-505.02: 9

N·m max.

Permissible torque My

in θY

L-505.01: 6

L-505.02: 8

L-505.01: 6

L-505.02: 8

N·m max.

Permissible torque Mz

in θZ

L-505.01: 6

L-505.02: 8

L-505.01: 6

L-505.02: 8

N·m max.

Drive properties

Motor type DC motor DC gear motor

Operating voltage,

nominal

24 12 V nom.

Operating voltage, max. 48 24 V max.

Miscellaneous

Operating temperature

range

5 to 40 5 to 40 °C

Material anodized aluminum, stainless steel anodized aluminum, stainless steel

Mass 0.4 0.4 kg ±5 %

Moved mass 0.07 0.07 kg ±5 %

Connection HD Sub-D 26 (m) HD Sub-D 26 (m)

Recommended

controllers

C-863 (single axis)

C-884 (up to 6 axes)

C-885 with C-863.20C885 (to 40 axes)

ACS modular controller

C-863 (single axis)

C-884 (up to 6 axes)

C-885 with C-863.20C885 (to 40 axes)

ACS modular controller

Translation Stages

WWW.PI.WS

L-505 with stepper

motor

L-505.011200

L-505.011200F

L-505.021200

L-505.021200F

L-505.011212

L-505.011212F

L-505.021212

L-505.021212F

L-505.01A200F

L-505.02A200F

L-505.01A212F

L-505.02A212F

Unit Tolerance

Linear stage with

stepper motor

Linear stage

with stepper

motor and linear

encoder

Linear stage with

stepper motor

and gearhead

Linear stage with

stepper motor,

gearhead and

linear encoder

Active axes X X

Motion and positioning

Travel range 13 / 26 13 / 26 13 / 26 13 / 26 mm

Integrated sensor – Incremental

linear encoder

– Incremental

linear encoder

Sensor signal linear

encoder

– A/B quadrature,

RS-422

– A/B quadrature,

RS-422

Design resolution 2.5 (full step) 0.005 0.732 (full step) 0.005 µm

Sensor resolution

linear encoder

– 0.005 – 0.005 µm

Minimum incremental

motion

0.1 0.05 0.2 0.05 µm typ.

Unidirectional

repeatability

0.3 0.1 0.3 0.1 µm typ.

Bidirectional

repeatability

±2.5 ±0.15 ±2.5 ±0.15 µm typ.

Pitch / yaw ±50 / ±75 ±50 / ±75 ±50 / ±75 ±50 / ±75 µrad typ.

Straightness / ﬂatness ±0.5 / ±1 ±0.5 / ±1 ±0.5 / ±1 ±0.5 / ±1 µm typ.

Max. velocity L-505.xxxxxx: 10

L-505.xxxxxxF: 7.5

L-505.xxxxxx: 10

L-505.xxxxxxF: 7.5

0.75 0.75 mm/s

Reference and limit

switches

Hall effect Hall effect Hall effect Hall effect

Reference point switch

repeatability

<4 <4 <4 <4 µm typ.

Mechanical properties

Guide type Ball guide Ball guide Ball guide Ball guide

Drive screw type Leadscrew Leadscrew Leadscrew Leadscrew

Drive screw pitch 0.5 0.5 0.5 0.5 mm

Load capacity 30 30 30 30 N max.

Permissible lateral force 30 30 30 30 N max.

Push/pull force 20 20 20 20 N max.

Holding force, power off 20 20 20 20 N typ.

Permissible torque Mx

in θX

L-505.01: 7

L-505.02: 9

L-505.01: 7

L-505.02: 9

L-505.01: 7

L-505.02: 9

L-505.01: 7

L-505.02: 9

N·m max.

Permissible torque My

in θY

L-505.01: 6

L-505.02: 8

L-505.01: 6

L-505.02: 8

L-505.01: 6

L-505.02: 8

L-505.01: 6

L-505.02: 8

N·m max.

Permissible torque Mz

in θZ

L-505.01: 6

L-505.02: 8

L-505.01: 6

L-505.02: 8

L-505.01: 6

L-505.02: 8

L-505.01: 6

L-505.02: 8

N·m max.

Drive properties

Motor type 2-phase stepper

motor

2-phase stepper

motor

2-phase stepper

motor with gear-

head

2-phase stepper

motor with gear-

head

Operating voltage,

nominal

24 24 24 24 V nom.

Operating voltage, max. 48 48 48 48 V max.

Step resolution 200 200 24 24 Full

steps/

rev.

MOTION | POSITIONING

All cables required for operation with the ordered controller are included in the scope of delivery.

The cable length is 3 m. Cable for connecting to other controllers can be ordered as accessory.

Custom designs or different specifications on request.

L-505 with stepper motor L-505.011200

L-505.011200F

L-505.021200

L-505.021200F

L-505.011212

L-505.011212F

L-505.021212

L-505.021212F

L-505.01A200F

L-505.02A200F

L-505.01A212F

L-505.02A212F

Unit Tolerance

Miscellaneous

Operating temperature

range

5 to 40 5 to 40 5 to 40 5 to 40 °C

Material anodized

aluminum,

stainless steel

anodized

aluminum,

stainless steel

anodized

aluminum,

stainless steel

anodized

aluminum,

stainless steel

Mass 0.4 0.4 0.4 0.4 kg ±5 %

Moved mass 0.07 0.07 0.07 0.07 kg ±5 %

Connection HD Sub-D 26 (m) HD Sub-D 26 (m) HD Sub-D 26 (m) HD Sub-D 26 (m)

Recommended

controllers

C-663.12

(single axis)

SMC Hydra

(double axis)

C-885 with

C-663.12C885

(up to 20 axes)

ACS modular

controller

C-663.12

(single axis)

SMC Hydra

(double axis)

C-885 with

C-663.12C885

(up to 20 axes)

ACS modular

controller

C-663.12

(single axis)

SMC Hydra

(double axis)

C-885 with

C-663.12C885

(up to 20 axes)

ACS modular

controller

C-663.12

(single axis)

SMC Hydra

(double axis)

C-885 with

C-663.12C885

(up to 20 axes)

ACS modular

controller

Travel range A B

13 mm

26 mm

28.5

136

149

L-505.xxxxxxF with belt drive,

dimensions in mm

Travel range A B

13 mm

26 mm

40.5

L-505 motion platform,

dimensions in mm

L-505 with direct fixed drive,

dimensions in mm

Translation Stages

WWW.PI.WS

Voice Coil-Direct Drive with Direct Position Measurement

V-522 / V-524 / V-528

High-Dynamics PIMag® Linear Stage

>> Linear Encoder

>> PIMag® Voice Coil

Technology Glossary ...................... page 290

Applications

n Autofocus

n Digital Printing

n Laser Marking

n Metrology / Testing

n Photonics

n Scanning

n Scientific Instrumentation

n Semiconductor

n Fast scanning and positioning

n Travel ranges 5 mm, 10 mm, 20 mm

n Scanning frequencies of more than 10 Hz

n Max. velocity 250 mm/s

n Crossed roller bearings for the highest

precision, anti-creep

The V-522 reliably performs 20-nm repeatable steps

A B C D E F G

V- 52 2.1 A A

V-522.1A B

V- 524 .1A A

V-524.1A B

V- 52 8.1A A

V-528.1AB

120

110

100

–

25,5

–

39,5

V-52x, dimensions in mm

MOTION | POSITIONING

V-522.1AA

V-522.1AB

V-524.1AA

V-524.1AB

V-528.1AA

V-528.1AB

Unit Tolerance

Motion and positioning

Active axes X

Travel range 5 10 20 mm

Integrated Sensor Optical, incremental Optical, incremental Optical, incremental

Sensor resolution 10 10 10 nm

Min. incremental motion 20 20 20 nm typ.

Unidirectional

repeatability

20 20 20 nm

Bidirectional repeatability ±120 ±120 ±120 nm typ.

Reference point

switch repeatability

<1 <1 <1 µm

Pitch ±50 ±50 ±50 µrad max.

Yaw ±50 ±50 ±50 µrad max.

Straightness 0.5 0.5 0.5 µm max.

Flatness 0.5 0.5 0.5 µm max.

Velocity 250 250 250 mm/s max.

Mechanical properties

Load capacity in Z 100 100 100 N max.

Moved mass 131 137 150 g

Overall mass 460 500 580 g

Drive properties

Drive type voice coil voice coil voice coil

Nominal force 4 3.8 2.9 N nominal

Nominal current 1.3 1.3 1. 3 A nominal

Peak current 3 3 3 A max. (3s)

Force constant 3.4 2.9 2.3 N/A typ.

Motor constant 1.3 1.1 0.85 N/(√W) typ.

Coil resistance 7. 2 7. 2 7. 2 Ω typ.

Coil inductance 1.7 1.7 1. 7 mH typ.

Time constant 0.32 0.32 0.32 ms

Miscellaneous

Housing material Aluminum,

black anodized

Aluminum,

black anodized

Aluminum,

black anodized

Cable length 2 2 2 m ±10 mm

Cable exit V-52x.1AA:

cable exit in X

V-52x.1AB:

cable exit in Y

V-52x.1AA:

cable exit in X

V-52x.1AB:

cable exit in Y

V-52x.1AA:

cable exit in X

V-52x.1AB:

cable exit in Y

Voltage / sensor

connection

Sub-D 15 (m) Sub-D 15 (m) Sub-D 15 (m)

Lifetime 20000 20000 20000 km

Operating temperature

range

18 to 45 18 to 45 18 to 45 °C

Relative humidity

during operation

20 to 80 20 to 80 20 to 80 %

Recommended

controllers

C-413 (single axis)

ACS modular controller

C-413 (single axis)

ACS modular controller

C-413 (single axis)

ACS modular controller

Ask about custom designs!

Translation Stages

WWW.PI.WS

Versatile options for adapting to requirements

V-508 PIMag® Precision Linear Stage

>> Absolute Encoder

>> Linear Encoder

>> PIMag® Magnetic Linear Motors

Technology Glossary ...................... page 290

Applications

n Digital Printing

n Electronics Manufacturing

n Laser Marking

n Medical Industry

n Metrology / Testing

n Scanning

n Travel ranges 80, 170, and 250 mm

n Ironless or iron core linear motor

n Incremental or absolute linear encoder,

various resolutions

n Compact cross section: 80 mm × 25 mm

n Crossed roller bearings for high load

capacity, anti-creep

V-508, dimensions in mm

Travel 80

V-508.3xxxxx

170

V-508.6xxxxx

250

V-508.9xxxxx

145

100

235

100 / 200

37,5

315

12.5

–

100 / 200

MOTION | POSITIONING

V-508.2 V-508.6 V-508.9 Unit Tolerance

Motion and positioning

Active axes X X X

Travel range 80 170 250 mm

Pitch / yaw ±100 ±200 ±300 µrad max.

Straightness / ﬂatness ±4 ±10 ±20 µm max.

Velocity, unloaded 1 1 1 m/s max.

Acceleration, unloaded 5 5 5 m/s² max.

Mechanical properties

Load capacity in Z 100 100 100 N max.

Moved mass 0.35 0.55 0.8 kg

Overall mass 1.1 1.6 2.1 kg

Guide type Crossed roller guide

with anti-creep system

Crossed roller guide

with anti-creep system

Crossed roller guide

with anti-creep system

V-508.x3 V-508.x5 V-508.xB Unit Tolerance

Encoder options

Integrated sensor Incremental linear

encoder

PIOne incremental

linear encoder

Absolute encoder

Sensor signal Sin/cos, 1 V peak-peak,

80 µm signal period

Sin/cos, 1 V peak-peak,

2 µm signal period

BiSS-C

Sensor resolution 10 (1) 0.2 (1) 78 nm typ.

Minimum incremental

motion

20 0.5 160 nm typ.

Bidirectional repeatability ±0.1 ±0.05 ±0.15 typ.

V-508.xx1 V-508.xx2 Unit Tolerance

Drive properties

Drive type Linear motor, ironless, 3-phase Linear motor, iron core, 3-phase

Intermediate circuit

voltage, effective

48 48 V DC

Peak force 12 14 N typ.

Nominal force 3 4 N typ.

Peak current, effective 3.2 3.2 A typ.

Nominal current,

effective

0.7 1.1 A typ.

Force constant, effective 4.28 4.81 N/A typ.

Resistance phase-phase 2.96 1.23 Ω typ.

Inductance phase-phase 0.63 0.97 mH typ.

Back EMF phase-phase 5.36 3.02 V·s/m max.

Pole pitch N-N 20 18 mm

(1) interpolated

Ask about custom designs!

V-508

Miscellaneous

Operating temperature

range

10 °C to 50 °C

Humidity 20 – 90 % rel., not condensing

Material Aluminum, black anodized

Motor connector HD Sub-D 26 (m)

Sensor connection Sub-D 15 (f)

Cable length 2 m

Recommended

controllers

C-891 (single axis)

C-885 with C-891.10C885 (up to 20 axes)

ACS modular controller

Translation Stages

WWW.PI.WS

Compact Linear Stage with Direct Position Measuring

M-122.2DD1 Micro Translation Stage

>> Linear Encoder

Technology Glossary ...................... page 290

Applications

n Automation

n Laser Marking

n Optical Alignment

n Precision Micro Assembly

n Scientific Instrumentation

n Travel range 25 mm

n Integrated linear encoder option for

highest accuracy with 0.1 µm resolution

n Min. incremental motion 0.2 µm

n Max. velocity 20 mm/s

n Ball screw for high velocities and number

of cycles

M-122.2DD1, dimensions in mm

MOTION | POSITIONING

M-122.2DD1 Unit Tolerance

Motion and positioning

Travel range 25 mm

Integrated sensor Linear encoder

Sensor resolution 0.1 µm

Design resolution 0.1 µm typ.

Minimum incremental motion 0.2 µm typ.

Backlash 0.2 µm typ.

Unidirectional repeatability 0.15 µm typ.

Pitch ±150 µrad typ.

Yaw ±150 µrad typ.

Velocity 20 mm/s max.

Reference point switch repeatability 1 µm typ.

Mechanical properties

Drive screw Ball screw

Stiffness in motion direction 0.25 N/µm

Load capacity 50 N max.

Push/pull force 20 N max.

Lateral force 25 N max.

Drive properties

Motor type DC motor

Operating voltage 0 to ±12 V DC

Motor power 2.25 W

Drive screw pitch 0.5 mm

Reference and limit switches Hall effect

Miscellaneous

Cable length 0.5 m

Operating temperature range 10 to 50 °C

Material Aluminum, steel

Mass 0.22 kg

Recommended controllers C-863

C-884

XYZ setup consisting of three

M-122.2DD1 microtranslation stages.

Translation Stages

WWW.PI.WS

Robust Design for Industrial Use

MTS-65 Miniature Linear Stage

Technology Glossary ...................... page 290

Applications

n Autofocus

n Biotechnology

n Automation

n Laser Marking

n Scientific Instrumentation

n Travel ranges to 52 mm (2”)

n Repeatability to 0.1 µm

n Load capacity to 2 kg

Travel range/mm 13 26 52

A / mm

B / mm

C / mm

38.5

99.5

112.5

105

147.5

MTS-65, dimensions in mm

MOTION | POSITIONING

621792x03 Unit Tolerance

Active axes X

Motion and positioning

Travel range 13 / 26 / 52 mm

Design resolution 5 (full step) µm

Minimum incremental motion 0.1 µm typ.

Unidirectional repeatability 0.2 µm typ.

Bidirectional repeatability ±5.0 µm typ.

Straightness ±1.0 / ±2.0 / ±3.0 µm typ.

Flatness ±1.0 / ±2.0 / ±3.0 µm typ.

Pitch ±40 / ±60 / ±80 µrad typ.

Yaw ±40 µrad typ.

Max. velocity 8 mm/s max.

Mechanical properties

Drive screw type Ball screw

Drive screw pitch 1 mm

Load capacity 10 N max.

Push/pull force 3 N max.

Holding force, power off 3 N typ.

Permissible lateral force 10 N max.

Permissible torque Mx in X 0.4 N·m max.

Permissible torque My in Y 0.6 N·m max.

Permissible torque Mz in Z 0.4 N·m max.

Drive properties

Motor type 2-phase stepper motor

Operating voltage, nominal 24 V nom.

Operating voltage, max. 48 V max.

Step resolution 200 Full steps/

rev.

Limit switches Optical

Miscellaneous

Operating temperature range 5 to 40 °C

Material Aluminum, black anodized

Mass 0.4 / 0.6 / 0.8 kg ±5 %

Connector HD Sub-D 15 (m)

Recommended controllers C-663.12 (single axis)

SMC Hydra (double axis)

C-885 with C-663.12C885 (up to 20 axes)

ACS modular controller

Connecting cables for motor and sensor are not in the scope of delivery and must be ordered separately.

Ask about custom designs!

Direction of the axes

and torques for linear stages

Translation Stages

WWW.PI.WS

Precision Crossed Roller Guides, PiezoMike Option, XY(Z) Combinations

M-105 / M-106 Microtranslation Stage

Applications

n Manual sample manipulation

n Travel range to 18 mm

n All-stainless-steel construction

n XY and XYZ combinations

n Resolution to 0.1 µm

n Optional PiezoMike with 10 nm resolution

n Optional motor drives

The M-105 and M-106 linear stages are available

in X, XY, and XYZ configurations, and allow travel

ranges of up to 18 mm. They have crossed roller

bearings that allow a guiding accuracy of better

than 2 µm. The carriage is preloaded against the

precision micrometer screw with springs to sup-

press backlash. With the XYZ version, the Z axis

is mounted with an adapter bracket so that the

load acts in the direction of the spring preload.

M-105.10, dimensions in mm M-105.1P, dimensions in mm

MOTION | POSITIONING

* Versions M-105.2x, M-106.2x and M-105.3x, M-106.x0 are combinations of basic .1x. versions

** Motorized versions achieve up to 50 nm.

M-105.10* M-105.1P* M-106.10* Unit Tolerance

Travel range 18 18 5 mm

Piezo ﬁne travel range – 30 – µm

Min. incremental

motion (piezo drive)

– 0.01 – µm

Minimum incremental

motion (micrometer

screw)**

1 1 0.1 µm

Backlash 2 2 2 µm

Straightness 2 2 2 µm

Flatness 2 2 2 µm

Load capacity 100 100 100 N max.

Push/pull force 20 / 4 20 / 4 20 / 4 N max.

Lateral force 25 25 25 N max.

Drive M-626.00 P-854.00 M-653.00

Drive screw pitch

(coarse / ﬁne)

0.5 / – 0.5 / – 0.4 / 0.02 mm/rev.

Mass 0.32 0.38 0.33 kg

Housing material St St St

Recommended piezo

driver

– E-610, E-500 system –

Translation Stages

WWW.PI.WS

Compact Design, for Loads to 10 kg

L-509 Precision Linear Stage

>> ActiveDrive

>> Linear Encoder

>> Vacuum-Compatible Versions

Technology Glossary ...................... page 290

Applications

n Autofocus

n Biotechnology

n Automation

n Laser Cutting

n Optical Alignment

n Scientific Instrumentation

n Travel ranges from 26 to 102 mm (1” to 4”)

n Repeatability to 0.1 µm

n Optional with Direct-Measuring Linear Encoder

n ActiveDrive DC, DC, BLDC, and DC gear motors

n Stepper motors

n Direction-sensing reference point switch

MOTION | POSITIONING

Stages with stepper

motor and ActiveDrive

DC motor

L-509.xxADxx L-509.xxSD00 / L-509.xASD00 Unit Tolerance

Motion

Active axes X X

Travel range L-509.1xADxx: 26

L-509.2xADxx: 52

L-509.4xADxx: 102

L-509.1xSDxx: 26

L-509.2xSDxx: 52

L-509.4xSDxx: 102

Pitch / yaw L-509.1xADxx: ±60

L-509.2xADxx: ±90

L-509.4xADxx: ±120

L-509.1xSDxx: ±60

L-509.2xSDxx: ±90

L-509.4xSDxx: ±120

µrad typ.

Straightness / ﬂatness L-509.1xADxx: 2

L-509.2xADxx: 4

L-509.4xADxx: 8

L-509.1xSDxx: 2

L-509.2xSDxx: 4

L-509.4xSDxx: 8

µm typ.

Velocity 50 20 mm/s max.

L-509.xxADxx L-509.xxSD00 L-509.xASD00 Unit Tolerance

Positioning

Integrated sensor L-509.xxAD10:

Incremental rotary

encoder

L-509.xxAD00:

Incremental linear

encoder

– Incremental linear

encoder

Sensor signal A/B quadrature, TTL – Sin/cos, 1 V peak-peak,

20 µm signal period

Design resolution L-509.xxAD10: 0.061

L-509.xxAD00: 0.05

5.0 0.005 µm

Sensor resolution

rotary encoder

L-509.xxAD10: 16384 – – Cts./rev.

Sensor resolution

linear encoder

L-509.xxAD00: 0.05 – 0.005 µm

Resolution stepper

motor

– 200 200 Full

steps/

rev.

Minimum incremental

motion

L-509.xxAD10: 0.8

L-509.xxAD00: 0.2

0.1 0.02 µm typ.

Unidirectional

repeatability

L-509.xxAD10: 0.2

L-509.xxAD00: 0.1

0.3 0.1 µm typ.

Bidirectional

repeatability

L-509.xxAD10: ±0.5

L-509.14AD00: ±0.3

L-509.24AD00: ±0.2

L-509.44AD00: ±0.2

±1 ±0.2 µm typ.

Reference and limit

switches

Optical Optical Optical

L-509.xxADxx / L-509.xxSD00 / L-509.xASD00 Unit Tolerance

Mechanical properties

Drive screw type Crossed roller guide with anti-creep system

Drive screw pitch 1 mm

Guide type Recirculating ball bearings

Holding force, power off L-509.xxADxx: 20

L-509.xxSD00 / L-509.xASD00: 60

N typ.

Push/pull force Fx,

power on

60 N max.

Permissible lateral force 50 N max.

Load capacity 100 N max.

Permissible torque Mx

in θX

30 N·m max.

Permissible torque My

in θY

25 N·m max.

Permissible torque Mz

in θZ

20 N·m max.

Translation Stages

WWW.PI.WS

Stages with stepper

motor and ActiveDrive

DC motor

L-509.xxADxx L-509.xxSD00 / L-509.xASD00 Unit Tolerance

Drive properties

Motor type ActiveDrive DC motor (PWM) Stepper motor, 2-phase

Operating voltage,

nominal

24 24 V nom.

Operating voltage, max. 24 48 V max.

L-509.xxADxx L-509.xxSD00 L-509.xASD00 Unit Tolerance

Miscellaneous

Operating temperature

range

5 to 40 5 to 40 5 to 40 °C

Material Aluminum, steel Aluminum, steel Aluminum, steel

Mass L-509.10AD10: 1.4

L-509.20AD10: 1.5

L-509.40AD10: 1.7

L-509.14AD00: 1.4

L-509.24AD00: 1.6

L-509.44AD00: 1.8

L-509.10SD00: 1.4

L-509.20SD00: 1.5

L-509.40SD00: 1.7

L-509.1ASD00: 1.5

L-509.2ASD00: 1.6

L-509.4ASD00: 1.8

kg ±5 %

Moved mass, unloaded L-509.x0AD10: 0.22

L-509.14AD00: 0.24

L-509.24AD00: 0.24

L-509.44AD00: 0.25

0.22 L-509.1ASD00: 0.24

L-509.2ASD00: 0.24

L-509.4ASD00: 0.25

kg ±5 %

Connection 1 × Sub-D 15 (m)

(motor/sensor)

1 × HD Sub-D 26 (m)

(motor)

1 × HD Sub-D 26 (m)

(motor)

1 × Sub-D 9 (m) (sensor)

Recommended

controllers / drivers

C-863 (single axis)

C-884 (up to 6 axes)

C-885 with

C-863.20C885

(to 40 axes)

ACS modular controller

C-663.12 (single axis)

SMC Hydra

(double axis)

C-885 with

C-663.12C885

(up to 20 axes)

ACS modular controller

C-663.12 (single axis)

SMC Hydra

(double axis)

C-885 with

C-663.12C885

(up to 20 axes)

ACS modular controller

Stages with DC motor

and BLDC motor

L-509.xxDG10 L-509.xx3111 /

L-509.xx3132

L-509.xx5132 Unit Tolerance

Motion

Active axes X X X

Travel range L-509.10DG10: 26

L-509.20DG10: 52

L-509.40DG10: 102

L-509.023xxx: 26

L-509.033xxx: 52

L-509.053xxx: 102

L-509.025132: 26

L-509.035132: 52

L-509.055132: 102

Pitch / yaw L-509.10DG10: ±60

L-509.20DG10: ±90

L-509.40DG10: ±120

L-509.023xxx: ±60

L-509.033xxx: ±90

L-509.053xxx: ±120

L-509.025132: ±60

L-509.035132: ±90

L-509.055132: ±120

µrad typ.

Straightness / ﬂatness L-509.10DG10: 2

L-509.20DG10: 4

L-509.40DG10: 8

L-509.023xxx: 2

L-509.033xxx: 4

L-509.053xxx: 8

L-509.025132: 2

L-509.035132: 4

L-509.055132: 8

µm typ.

Velocity 3 50 50 mm/s max.

MOTION | POSITIONING

L-509.xxDG10 L-509.xx3111 L-509.xxx132 Unit Tolerance

Positioning

Integrated sensor Incremental rotary

encoder

Incremental linear

encoder

Incremental rotary

encoder

Sensor signal A/B quadrature, TTL Sin/cos, 1 V peak-peak,

20 µm signal period

A/B quadrature, TTL

Design resolution 0.008 0.005 0.05 µm

Sensor resolution

rotary encoder

4096 – 20000 Cts./rev.

Sensor resolution

linear encoder

– – µm

Minimum incremental

motion

0.1 0.1 0.5 µm typ.

Unidirectional

repeatability

0.1 0.1 0.2 µm typ.

Bidirectional repeatability ±2 ±0.2 ±0.5 µm typ.

Reference and limit

switches

Optical Optical Optical

L-509.xxDG10 L-509.xx3xxx

L-509.xx5xxx

Unit Tolerance

Mechanical properties

Drive screw type Crossed roller guide with anti-creep

system

Crossed roller guide with anti-creep

system

Drive screw pitch 1 1 mm

Gear ratio 2401:81 –

Guide type Recirculating ball bearings Recirculating ball bearings

Holding force, power off L-509.10DG10: 40

L-509.20DG10: 60

L-509.40DG10: 60

20 N typ.

Push/pull force Fx,

power on

60 60 N max.

Permissible lateral force 50 50 N max.

Load capacity 100 100 N max.

Permissible torque Mx

in θX

30 30 N·m max.

Permissible torque My

in θY

25 25 N·m max.

Permissible torque Mz

in θZ

20 20 N·m max.

L-509.xxDG10 L-509.xx3xxx L-509.xx5xxx Unit Tolerance

Drive properties

Motor type DC motor

(with gearhead)

DC motor Brushless DC motor,

3-phase

Operating voltage,

nominal

24 24 24 V nom.

Operating voltage, max. 48 48 48 V max.

Translation Stages

WWW.PI.WS

Stages with DC motor

and BLDC motor

L-509.xxDG10 L-509.xx3xxx L-509.xx5132 Unit Tolerance

Miscellaneous

Operating temperature

range

5 to 40 5 to 40 5 to 40 °C

Material Aluminum, steel Aluminum, steel Aluminum, steel

Mass L-509.10DG10: 1.4

L-509.20DG10: 1.6

L-509.40DG10: 1.9

L-509.023xxx: 1.2

L-509.033xxx: 1.3

L-509.053xxx: 1.5

L-509.025132: 1.4

L-509.035132: 1.5

L-509.055132: 1.7

kg ±5 %

Moved mass, unloaded 0.22 L-509.023111: 0.24

L-509.033111: 0.24

L-509.053111: 0.25

0.22 kg ±5 %

Connection 1 × HD Sub-D 26 (m)

(motor/sensor)

1 × HD Sub-D 26 (m)

(motor)

L-509.xx3111 additional:

1 × Sub-D 9 (m) (sensor)

1 × HD Sub-D 26 (m)

(motor/sensor)

Recommended

controllers / drivers

C-863 (single axis)

C-884 (up to 6 axes)

C-885 with

C-863.20C885

(to 40 axes)

ACS modular controller

C-863 (single axis)

C-884 (up to 6 axes)

C-885 with

C-863.20C885

(to 40 axes)

ACS modular controller

C-891 (single axis)

C-885 with

C-891.10C885

(up to 20 axes)

ACS modular controller

All cables required for operation with the ordered controller are included in the scope of delivery.

The cable length is 3 m. Cable for connecting to other controllers can be ordered as accessory.

Ask about custom designs!

L-509 versions with DC and BLDC motor, dimensions in mm

A B C D

L-509.023111

L-509.023132

L-509.025132

L-509.03 3111

L-509.033132

L-509.035132

L-509.053111

L-509.053132

L-509.055132

157.3

166.8

191.8

100

150

135.3

154.3

204.3

104.4

–

104.4

–

104.4

–

MOTION | POSITIONING

Detail drawing of the L-509 motion platform

Translation Stages

A B C D

L-509.10DG10

L-509.20DG10

L-509.40DG10

157.3

166.8

191.8

100

150

135.3

154.3

204.3

106

L-509 versions with DC gear motor, dimensions in mm

WWW.PI.WS

L-509 versions with stepper motor, dimensions in mm

A B C D E

L-509.10SD 0 0

L-509.1ASD 0 0

L-509.20SD00

L-509.2ASD00

L-509.40SD0 0

L-509.4ASD00

129.3

138.8

163.8

100

150

135.3

154.3

204.3

–

104.2

–

104.2

–

104.2

MOTION | POSITIONING

Translation Stages

L-509 versions with ActiveDrive DC motor, dimensions in mm

A B C D E

L-509.10AD10

L-509.14AD00

L-509.20AD10

L-509.24AD00

L-509.40AD10

L-509.44AD00

157.3

166.8

191.8

100

150

135.3

154.3

204.3

106

–

104.2

–

104.2

–

104.2

WWW.PI.WS

High Travel Accuracy

L-511 High-Precision Linear Stage

>> ActiveDrive

>> Linear Encoder

>> Vacuum-Compatible Versions

Technology Glossary ...................... page 290

Applications

n Autofocus

n Biotechnology

n Automation

n Laser Cutting

n Optical Alignment

n Scientific Instrumentation

Drive types

n .xxAD variant: ActiveDrive DC motor for high

velocity: Control via pulse-width-modulated

(PWM) signals, the operating voltage is

attained via an amplifier integrated in the

motor housing.

n .xxDG variant: DC servo motor with gearhead

for high torques and resolution at low motor

power

n .xxSD variant: 2-phase stepper motor for

low velocity and high resolution

n .xx3xxx variant: DC motor

n .xx5xxx variant: Brushless DC motor

Position measurement

n Integrated rotary encoder on the motor

shaft (xxAD10, xxDG10, xxxx32).

n Incremental linear encoder

(xxAD00, xASD00, xxxx11).

Reference-class linear stage

Recirculating ball bearings for high travel accuracy and load capacity. Precision

ball screw with 2 mm pitch. Stress-relieved aluminum base for highest sta-

bility. Noncontact limit switches. Noncontact optical reference point switch with

direction sensing in the middle of the travel range.

Highly accurate position measuring with incremental linear encoder

Noncontact optical linear encoders measure the actual position directly at the

motion platform with the greatest accuracy so that nonlinearity, mechanical

play or elastic deformation have no influence on position measuring.

Minimum incremental motion and slow motion

In conjunction with the SMC Hydra controller, versions with stepper motor and

integrated linear encoder (L-511.xASD00) achieve repeatable minimum incre-

mental motion in the range of the sensor resolution. The same configuration

achieves constant low velocities of a few sensor increments per second.

n Travel ranges to 155 mm (6”)

n Repeatability to 0.1 µm

n ActiveDrive DC, DC, BLDC, and DC gear motors

n Stepper motors

n Optional linear encoder for direct position measurement

n Direction-sensing reference point switch

MOTION | POSITIONING

Stages with stepper

motor and ActiveDrive

DC motor

L-511.xxADxx L-511.xxSD00 / L-511.xASD00 Unit Tolerance

Motion

Active axes X X

Travel range L-511.2xADxx: 52

L-511.4xADxx: 102

L-511.6xADxx: 155

L-511.2xSD00: 52

L-511.4xSD00: 102

L-511.6xSD00: 155

Pitch / yaw L-511.2xADxx: ±40

L-511.4xADxx: ±60

L-511.6xADxx: ±70

L-511.2xSD00: ±40

L-511.4xSD00: ±60

L-511.6xSD00: ±70

µrad typ.

Straightness / ﬂatness L-511.2xADxx: ±1.5

L-511.4xADxx: ±2.5

L-511.6xADxx: ±3.0

L-511.2xSD00: ±1.5

L-511.4xSD00: ±2.5

L-511.6xSD00: ±3.0

µm typ.

Velocity 90 45 mm/s max.

L-511.xxADxx L-511.xxSD00 L-511.xASD00 Unit Tolerance

Positioning

Integrated sensor L-511.xxAD10:

Incremental rotary

encoder

L-511xxAD00:

Incremental linear

encoder

– Incremental linear

encoder

Sensor signal A/B quadrature, TTL – Sin/cos, 1 V peak-peak,

20 µm signal period

Design resolution L-511.xxAD10: 0.122

L-511.xxAD00: 0.05

10.0 0.005 µm

Sensor resolution

rotary encoder

L-511.xxAD10: 16384 – – Cts./rev.

Sensor resolution

linear encoder

L-511.xxAD00: 0.05 – 0.005 µm

Resolution stepper

motor

– 200 200 Full steps/

rev.

Minimum incremental

motion

L-511.xxAD10: 0.488

L-511.xxAD00: 0.1

0.2 0.02 µm typ.

Unidirectional

repeatability

L-511.xxAD10: 0.488

L-511.xxAD00: 0.1

0.2 0.1 µm typ.

Bidirectional

repeatability

L-511.xxAD10: ±1.250

L-511.xxAD00: ±0.2

±2 ±0.2 µm typ.

Reference and limit

switches

Optical Optical Optical

L-511.xxADxx / L-511.xxSD00 / L-511.xASD00 Unit Tolerance

Mechanical properties

Drive screw type Ball screw

Drive screw pitch 2 mm

Guide type Recirculating ball bearings

Holding force, power off L-511.xxADxx: 20

L-511.xxSD00 / L-511.xASD00: 60

N typ.

Push/pull force Fx,

power on

100 N max.

Permissible lateral force 250 N max.

Load capacity 500 N max.

Permissible torque Mx

in θX

60 N·m max.

Permissible torque My

in θY

30 N·m max.

Permissible torque Mz

in θZ

30 N·m max.

Translation Stages

WWW.PI.WS

Stages with stepper

motor and ActiveDrive

DC motor

L-511.xxADxx L-511.xxSD00 / L-511.xASD00 Unit Tolerance

Drive properties

Motor type ActiveDrive DC motor (PWM) Stepper motor, 2-phase

Operating voltage,

nominal

24 24 V nom.

Operating voltage, max. 24 48 V max.

L-511.xxADxx L-511.xxSD00 L-511.xASD00 Unit Tolerance

Miscellaneous

Operating temperature

range

5 to 40 5 to 40 5 to 40 °C

Material Aluminum,

stainless steel

Aluminum,

stainless steel

Aluminum,

stainless steel

Mass L-511.2xADxx: .2.5

L-511.40AD10: 2.8

L-511.60AD10: 3.3

L-511.44AD00: 2.7

L-511.64AD00: 3.5

L-511.20SDxx: 2.4

L-511.40SDxx: 2.6

L-511.60SDxx: 3.1

L-511.2ASDxx: 2.4

L-511.4ASDxx: 2.6

L-511.6ASDxx: 3.1

kg ±5 %

Moved mass, unloaded L-511.2xADxx: 0.6

L-511.4xADxx: 0.6

L-511.6xADxx: 0.65

L-511.20SDxx: 0.6

L-511.40SDxx: 0.6

L-511.60SDxx: 0.65

L-511.2ASDxx: 0.6

L-511.4ASDxx: 0.6

L-511.6ASDxx: 0.65

kg ±5 %

Connection 1 × Sub-D 15 (m)

(motor/sensor)

1 × HD Sub-D 26 (m)

(motor)

1 × HD Sub-D 26 (m)

(motor)

1 × Sub-D 9 (m) (sensor)

Recommended

controllers / drivers

C-863 (single axis)

C-884 (up to 6 axes)

C-885 with

C-863.20C885

(to 40 axes)

ACS modular controller

C-663.12 (single axis)

SMC Hydra

(double axis)

C-885 with

C-663.12C885

(up to 20 axes)

ACS modular controller

C-663.12 (single axis)

SMC Hydra

(double axis)

C-885 with

C-663.12C885

(up to 20 axes)

ACS modular controller

Stages with DC motor

and BLDC motor

L-511.xxDG10 L-511.xx3111 / L-511.xx3132

L-511.xx5111 / L-511.xx5132

Unit Tolerance

Motion

Active axes X X

Travel range L-511.20DG10: 52

L-511.40DG10: 102

L-511.60DG10: 155

L-511.03xxxx: 52

L-511.05xxxx: 102

L-511.07xxxx: 155

Pitch / yaw L-511.20DG10: ±40

L-511.40DG10: ±60

L-511.60DG10: ±70

L-511.03xxxx: ±40

L-511.05xxxx: ±60

L-511.07xxxx: ±70

µrad typ.

Straightness / ﬂatness L-511.20DG10: ±1.5

L-511.40DG10: ±2.5

L-511.60DG10: ±3.0

L-511.03xxxx: ±1.5

L-511.05xxxx: ±2.5

L-511.07xxxx: ±3.0

µm typ.

Velocity 6 90 mm/s max.

MOTION | POSITIONING

L-511.xxDG10 L-511.xx3111 /

L-511.xx5111

L-511.xx3132 /

L-511.xx5132

Unit Tolerance

Positioning

Integrated sensor Incremental rotary

encoder

L-511.xx3111:

Incremental linear

encoder

L-511.xx5111:

Incremental rotary

encoder, incremental

rotary encoder

Incremental rotary

encoder

Sensor signal A/B quadrature, TTL Linear encoder:

Sin/cos, 1 V peak-peak,

20 µm signal period

Rotary encoder:

A/B quadrature, TTL

Design resolution 0.017 L-511.xx3111: 0.005

L-511.xx5111: 0.05

0.1 µm

Sensor resolution

rotary encoder

4096 20000 20000 Cts./rev.

Sensor resolution

linear encoder

– L-511.xx3111: 0.005

L-511.xx5111: 0.05

0.1 µm

Minimum

incremental motion

0.1 0.1 0.2 µm typ.

Unidirectional

repeatability

0.2 0.1 0.2 µm typ.

Bidirectional

repeatability

±2 ±0.1 ±1.25 µm typ.

Reference and limit

switches

Optical Optical Optical

L-511.xxDG10 L-511.xx3xxx /

L-511.xx5xxx

Unit Tolerance

Mechanical properties

Drive screw type Ball screw Ball screw

Drive screw pitch 2 2 mm

Gear ratio 2401:81 –

Guide type Recirculating ball bearings Recirculating ball bearings

Holding force,

power off

100 20 N typ.

Push/pull force Fx,

power on

100 100 N max.

Permissible lateral force 250 250 N max.

Load capacity 500 500 N max.

Permissible torque Mx

in θX

60 60 N·m max.

Permissible torque My

in θY

30 30 N·m max.

Permissible torque Mz

in θZ

30 30 N·m max.

Translation Stages

WWW.PI.WS

Stages with DC motor

and BLDC motor

L-511.xxDG10 L-511.xx3xxx L-511.xx5xxx Unit Tolerance

Drive properties

Motor type DC motor

(with gearhead)

DC motor Brushless DC motor,

3-phase

Operating voltage,

nominal

24 24 24 V nom.

Operating voltage, max. 48 48 48 V max.

Miscellaneous

Operating temperature

range

5 to 40 5 to 40 5 to 40 °C

Mass L-511.20DG10: 2.5

L-511.40DG10: 2.7

L-511.60DG10: 2.9

L-511.033xxx: 2.5

L-511.053xxx: 2.6

L-511.073xxx: 3.1

L-511.035xxx: 2.4

L-511.055xxx: 2.7

L-511.075xxx: 3.0

kg ±5 %

Moved mass, unloaded L-511.20DG10: 0.6

L-511.40DG10: 0.6

L-511.60DG10: 0.65

L-511.033xxx: 0.6

L-511.053xxx: 0.6

L-511.073xxx: 0.65

L-511.035xxx: 0.6

L-511.055xxx: 0.6

L-511.075xxx: 0.65

kg ±5 %

Connection 1 × HD Sub-D 26 (m)

(motor/sensor)

L-511.xx3111:

1 × HD Sub-D 26 (m)

(motor),

1 × Sub-D 9 (m) (sensor)

L-511.xx3132:

1 × HD Sub-D 26 (m)

(motor/sensor)

L-511.xx5111:

1 × HD Sub-D 26 (m)

(motor/sensor),

1 × Sub-D 9 (m) (sensor)

L-511.xx5132:

1 × HD Sub-D 26 (m)

(motor/sensor)

Recommended

controllers / drivers

C-863 (single axis)

C-884 (up to 6 axes)

C-885 with

C-863.20C885

(to 40 axes)

ACS modular controller

C-863 (single axis)

C-884 (up to 6 axes)

C-885 with

C-863.20C885

(to 40 axes)

ACS modular controller

L-511.xx5111:

C-891 (single axis)

C-885 with

C-891.10C885

(up to 20 axes)

ACS modular controller

L-511.xx5132 additional:

SMC Hydra

(double axis)

All cables required for operation with the ordered controller are included in the scope of delivery.

The cable length is 3 m. Cable for connecting to other controllers can be ordered as accessory.

Ask about custom designs!

The L-511 reliably performs repeatable 20-nm steps with the linear encoder

and SMC Hydra motion controller

MOTION | POSITIONING

L-511 versions with DC and BLDC motor, and rotary encoder, dimensions in mm

A B C

L-511.033132

L-511.035132

L-511.053132

L-511.055132

L-511.073132

L-511.075132

186

211

261

–

250

210

260

360

L-511 versions with DC and BLDC motor, and linear encoder, dimensions in mm

A B C

L-511.033111

L-511.053111

L-511.073111

L-511.035111

L-511.055111

L-511.075111

186

211

261

186

211

261

–

250

–

250

210

260

360

210

260

360

Translation Stages

WWW.PI.WS

100

A B C D

L-511.20SD00

L-511.2ASD00

L-511. 4 0SD 0 0

L-511 4ASD00

L-511.6OSD00

L-511.6ASD00

158

183

233

–

250

210

260

360

103

L-511 versions with stepper motor, dimensions in mm

A B C D

L-511. 20DG10

L-511.40DG10

L-511.60DG10

186

211

261

–

250

210

260

360

131

L-511 versions with DC gear motor, dimensions in mm

MOTION | POSITIONING

101

A B C D

L-511. 20A D10

L-511.24AD00

L-511. 4 0AD10

L-511. 4 4 AD00

L-511.60A D10

L-511.64AD00

186

211

261

–

250

210

260

360

131

L-511 versions with ActiveDrive DC motor, dimensions in mm

Detail drawing of the L-511 motion platform, dimensions in mm

Translation Stages

WWW.PI.WS

102

High Velocity and Precision due to Magnetic Direct Drive

V-551 PIMag® Precision Linear Stage

>> Absolute Encoder

>> Linear Encoder

>> PIMag® Magnetic Linear Motors

Technology Glossary ...................... page 290

Applications

n Biotechnology

n Electronics Manufacturing

n Medical Industry

n Metrology / Testing

n Photonics

n Scanning

n Semiconductor

n Travel ranges to 230 mm

n Velocity up to 0.5 m/s

n Absolute encoder with 1 nm resolution

n Highest precision with PIOne linear encoder:

Minimum incremental motion 0.5 nm

n High guiding accuracy

n Compact design with 160 mm width

n Crossed roller guide, anti-creep

Reference-class linear stage

Thanks to the smooth-running precision linear guides with crossed roller bear-

ings, the linear stage is particularly suitable for scanning applications with con-

stant velocity. The anti-creep system reliably prevents cage creep. The guides

have high load capacity and high precision under all operating conditions.

Direct position measurement

Position measuring takes place directly at the motion platform with the highest

accuracy so that nonlinearity, mechanical play or elastic deformation have no

influence on position measuring. The high-resolution PIOne encoder was de-

veloped by PI and, with corresponding processing of the measured values,

allows a position resolution of much less than one nanometer. The optical

and noncontact PIOne encoders are based on an interferometric measuring

principle. Due to the short signal period and the high quality of the signals,

the linearity error of PIOne encoders is less than 1 %. PIOne encoders support

direction sensing when evaluating a reference signal. Absolute encoders

supply explicit position information that enables immediate determination

of the position. This means that referencing is not required during switch-on,

which increases efficiency and safety during operation.

PIMag® magnetic direct drive

3-phase magnetic direct drives do not use mecha-

nical components in the drivetrain, they transmit

the drive force to the motion platform directly

and without friction. The drives reach high velo-

cities and accelerations. Ironless motors are par-

ticularly suitable for positioning tasks with the

highest demands on precision because there is

no undesirable interaction with the permanent

magnets. This allows smooth running even at the

lowest velocities and at the same time, there

is no vibration at high velocities. Nonlinearity in

control behavior is avoid-ed and any position can

be controlled easily. The drive force can be set

freely.

MOTION | POSITIONING

103

V-551.2x V-551.4x V-551.7x Unit Tolerance

Motion and positioning

Active axes X X X

Travel range 60 130 230 mm

Pitch ±50 ±100 ±100 µrad typ.

Yaw ±50 ±50 ±50 µrad typ.

Straightness ±1 ±1 ±2 µm typ.

Flatness ±2 ±2 ±2 µm typ.

Velocity 0.5 0.5 0.5 m/s max.

Mechanical properties

Load capacity in Z 150 150 150 N max.

Load capacity in Y 50 50 50 N max.

Moved mass 2.2 2.7 4.9 kg

Overall mass 4.2 5.5 9.7 kg

Linear guide Crossed roller bearing

with anti-creep system

Crossed roller bearing

with anti-creep system

Crossed roller bearing

with anti-creep system

V-551 Unit Tolerance

Drive properties

Drive type PIMag® linear motor, ironless, 3-phase

Intermediate

circuit voltage

110 * V DC max.

Peak force 180 N typ.

Nominal force 27 N typ.

Peak current, effective 10 A typ.

Nominal current, effective 1.5 A typ.

Force constant, effective 18 N/A typ.

Resistance per phase 3.15 Ω typ.

Inductance per phase 0.9 mH typ.

Back EMF phase-phase 16 V·s/m max.

V-551.xB V-551.xD

Encoder options

Integrated Sensor Absolute encoder PIOne incremental linear encoder

Sensor signal BiSS-C Sin/cos, 1 V peak-peak, 2 µm signal period

Sensor resolution 1 nm 0.2 nm**

Min. incremental motion 2 nm 0.5 nm

Unidirectional

repeatability

0.02 µm 0.02 µm

Bidirectional repeatability ±0.05 µm ±0.05 µm

Travel range limit Limits are set via software;

additional mechanical stop buffers.

Hall effect limit switches

Reference point switch – Encoder index

Reference point switch

repeatability

– <1 µm

V-551

Miscellaneous

Operating temperature

range

10 °C to 50 °C

Humidity 20 – 90 % rel., not condensing

Material Aluminum, black anodized

Motor connector HD Sub-D 26 (m)

Sensor connection Sub-D 15 (f)

Recommended

controllers

C-891 (single axis)

C-885 with C-891.10C885 (up to 20 axes)

ACS modular controller

* 24 V DC with C-891.120200

** interpolated

Ask about custom designs.

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104

V-551, dimensions in mm

V-551.2x V-551.4x V-551.7x

Stroke

220

210

–

130

290

280

120

230

450

440

120

50,5

160

D x 40

130

110

F x 100

D x 40

79,85

V-551.4x :

V-551.2x V-551.4x V-551.7x

Stroke

60 130 230

220 290 450

210 280 440

60 120 120

113

40 40

113

50,5

160

D x 40

130

110

F x 100

D x 40

79,85

V-551.4x :

V-551.2x V-551.4x V-551.7x

Stroke

60 130 230

220 290 450

210 280 440

60 120 120

113

40 40

113

50,5

160

D x 40

130

110

F x 100

D x 40

79,85

V-551.4x :

V-551.2x V-551.4x V-551.7x

Stroke

60 130 230

220 290 450

210 280 440

60 120 120

113

40 40

113

MOTION | POSITIONING

105

7,5

100

6,4

4,4

79,85

30 30

50,5

8,5

79,85

30 30

50,5

8,5

V-551.2x V-551.4x V-551.7x

125 225 225

175 200 250

I 130 130 190

V-551.2x V-551.4x V-551.7x

125

175

130

225

200

130

225

250

190

A V-551.4D with PIOne linear encoder performs a sequence of 0.5-nm steps. A V-551.4D with PIOne linear encoder performs a sequence of 1-nm steps.

Translation Stages

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106

High Travel Accuracy, Long Travel Ranges, Many Motor Variants

M-511 / M-521 / M-531

High-Precision Linear Stage

>> ActiveDrive

>> Linear Encoder

Technology Glossary ...................... page 290

Applications

n Metrology / Testing

n Optical Alignment

n Photonics

n Sample Inspection

n Scientific Instrumentation

n Travel ranges 102, 204, and 306 mm

(4”, 8”, 12”)

n Max. velocity to 100 mm/s

n Encoder resolution 50 nm

n Load capacity to 100 kg

n Zero-play ball screw

n XY and XYZ combinations

M-511, M-521, M-531, dimensions in mm

L A B C

M- 511.xx1

M-521.xx1

M-531.xx1

400

500

600

250

350

450

186,5

236,5

286,5

283

383

483

MOTION | POSITIONING

107

M-5x1.DD1 /

M-5x1.DD2

M-5x1.EC /

M-5x1.PD1

M-5x1.DG1 /

M-5x1.PG1

Unit Tolerance

Motion and positioning

Travel range M-511: 102 (4”) /

M-521: 204 (8”) /

M-531: 306 (12”)

M-511: 102 (4”) /

M-521: 204 (8”) /

M-531: 306 (12”)

M-511: 102 (4”) /

M-521: 204 (8”) /

M-531: 306 (12”)

Integrated sensor Linear encoder Rotary encoder Rotary encoder

Sensor resolution linear

encoder

0.05 µm

Sensor resolution rotary

encoder

– 4096 2048 Cts./rev.

Design resolution 0.05 0.488 0.033 µm typ.

Minimum incremental

motion

0.1 0.5 0.4 µm typ.

Unidirectional

repeatability

0.1 0.5 0.4 µm typ.

Bidirectional repeatability ±0.2 – – µm typ.

Backlash – 1 1 µm typ.

Pitch / yaw per 100 mm ±35 ±35 ±35 µrad typ.

Straightness / ﬂatness

per 100 mm

111µm

Velocity 50 100 6 mm/s max.

Mechanical properties

Drive screw pitch of ball

screw

222mm

Gear ratio – – (28/12)4 ~ 29.6:1

Load capacity 1000 1000 1000 N max.

Push/pull force 80 80 80 N max.

Permissible lateral force 200 200 200 N max.

Drive properties

Motor type DC motor with PWM

control

DC motor with PWM

control*

DC gear motor

Motor resolution – – – steps/rev.

Guide Recirculating ball

bearings

Recirculating ball

bearings

Recirculating ball

bearings

Operating voltage 24 24 M-5x1.DG1: 0 to ±12

M-5x1.PG1: 24

Motor power 30 60 3 W nom.

Torque 80 70 5 mN·m nom.

Reference and limit

switches

Hall effect Hall effect Hall effect

Miscellaneous

Operating temperature

range

10 to 50 –20 to 65 –20 to 65 °C

Material Aluminum,

black anodized

Mass 5 (M-511) /

6.1 (M-521) /

7.2 (M-531)

5 (M-511) /

6.1 (M-521) /

7.2 (M-531)

5 (M-511) /

6.1 (M-521) /

7.2 (M-531)

kg ±5 %

Connector Sub-D 15,

3 m incl. cable

Sub-D 15,

3 m incl. cable

Sub-D 15,

3 m incl. cable

Recommended

controllers

C-863

C-884

C-863

C-884

C-863

C-884

* M-5xx.EC: Brushless DC motor with integrated block commutation (PWM control).

Ask about custom designs!

Translation Stages

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108

Excellent Repeatability and Travel Accuracy

HPS-170

High-Precision Linear Stage for Heavy Loads

>> ActiveDrive

>> Linear Encoder

Technology Glossary ...................... page 290

Applications

n Laser Marking

n Metrology / Testing

n Sample Inspection

n Semiconductor

n Travel ranges from 52 to 205 mm

(2 to 8”)

n Max. velocity to 100 mm/s

n Load capacity to 35 kg

n Optional linear encoder for direct

position measurement

n Crossed roller guide, anti-creep

Direction of the axes

and torques for linear stages

MOTION | POSITIONING

109

626291x00 626291x10 626292x00 626292x10-0001 Unit Tolerance

Linear stage with

DC motor and

rotary encoder

Additionally with

linear encoder

Linear stage with

stepper motor

Additionally with

linear encoder

Active axes X X

Motion and positioning

Travel range 52 / 102 / 155 /

205

52 / 102 / 155 /

205

Integrated sensor Rotary encoder Rotary and linear

encoder

– Linear encoder

Sensor signal rotary

encoder

A/B quadrature,

RS-422

A/B quadrature,

RS-422

–

Sensor signal linear

encoder

– A/B quadrature,

RS-422

–Sin/cos, 1 V

peak-peak, 20 µm

signal period

Design resolution 0.1 0.05 10 (full step) 0.005 µm

Sensor resolution rotary

encoder

20000 20000 – Cts./rev.

Sensor resolution

linear encoder

– 0.05 – – µm typ.

Minimum incremental

motion

0.2 0.2 0.2 0.05 µm typ.

Unidirectional

repeatability

0.2 0.2 0.2 0.05 µm typ.

Bidirectional

repeatability

±2 ±0.2 ±2 ±0.05 µm typ.

Pitch ±20 / ±25 / ±30 /

±35

±20 / ±25 / ±30 /

±35

±20 / ±25 / ±30 /

±35

±20 / ±25 / ±30 /

±35

µrad typ.

Yaw ±40 ±40 ±40 ±40 µrad typ.

Straightness / ﬂatness ±0.75 / ±1 / ±2 /

±3

±0.75 / ±1 / ±2 /

±3

±0.75 / ±1 / ±2 /

±3

±0.75 / ±1 / ±2 /

±3

µrad typ.

Max. velocity 100 100 35 35 mm/s

Mechanical properties

Guide type Crossed roller

guide with anti-

creep system

Crossed roller

guide with anti-

creep system

Crossed roller

guide with anti-

creep system

Crossed roller

guide with anti-

creep system

Drive screw type Ball screw Ball screw Ball screw Ball screw

Drive screw pitch 2 2 2 2 mm

Load capacity 350 350 350 350 N max.

Push/pull force 100 100 150 150 N max.

Holding force 20 20 60 60 N max.

Permissible lateral force 150 150 150 150 N max.

Permissible torque Mx

in θX

400 400 400 400 Nm max.

Permissible torque My

in θY

300 300 300 300 Nm max.

Permissible torque Mz

in θZ

300 300 300 300 Nm max.

Drive properties

Motor type DC motor DC motor 2-phase stepper

motor

2-phase stepper

motor

Operating voltage,

nominal

24 24 24 24 V nom.

Operating voltage, max. 48 48 48 48 V nom.

Peak current, effective 3.8 3.8 1.2 1.2 A typ.

Torque constant,

effective

0.03 0.03 N·m/A typ.

Electrical time constant 6 6 ms

Resistance phase-phase 0.62 0.62 3.3 3.3 Ω typ.

Inductance phase-phase 0.13 0.13 2.8 2.8 mH typ.

Back EMF phase-phase 0.00349 0.00349 V/kRPM max.

Limit switches mechanical mechanical mechanical mechanical

Translation Stages

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110

Connecting cables for motor and sensor are not in the scope of delivery and must be ordered separately.

Ask about custom designs!

626291x00 626291x10 626292x00 626292x10-0001 Unit Tolerance

Linear stage with

DC motor and

rotary encoder

Additionally with

linear encoder

Linear stage with

stepper motor

Additionally with

linear encoder

Miscellaneous

Operating temperature

range

5 to 40 5 to 40 5 to 40 5 to 40 °C

MTBF 10000 10000 ––h

Material Aluminum, steel Aluminum, steel Aluminum, steel Aluminum, steel

Mass 5.1 / 5.8 / 6.6 / 7.5 5.1 / 5.8 / 6.6 / 7.5 5 / 5.7 / 6.5 / 7.4 5 / 5.7 / 6.5 / 7.4 kg ±5 %

Moved mass 1.1 1.4 1.1 1.4

Connection Sub-D 15 (m) Motor:

Sub-D 15 (m)

Sensor:

Sub-D 9 (m)

Sub-D 15 (m) Motor:

Sub-D 15 (m)

Sensor:

Sub-D 9 (m)

Recommended

controllers

C-863

(single axis)

with C-863.AD12

line driver

C-884

(to 6 axes) with

C-863.AD12

line driver

C-885 with

C-863.20C885

(to 40 axes)

and C-863.AD12

line driver

ACS modular

controller

C-863

(single axis)

with C-863.AD12

line driver

C-884

(to 6 axes) with

C-863.AD12

line driver

C-885 with

C-863.20C885

(to 40 axes)

and C-863.AD12

line driver

ACS modular

controller

C-663.12

(single axis)

SMC Hydra

(double axis)

C-885 with

C-663.12C885

(up to 20 axes)

ACS modular

controller

C-663.12

(single axis)

SMC Hydra

(double axis

C-885 with

C-663.12C885

(up to 20 axes)

ACS modular

controller

HPS-170, stepper motor, dimensions in mmHPS-170, DC motor, dimensions in mm

MOTION | POSITIONING

111

Travel range/mm 52 102 155 205

A/mm

B/mm

C/mm

261

127.5

311

152.5

381

187.5

456

225

HPS-170, dimensions in mm

Translation Stages

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112

High Performance, Cleanroom Compatible, Customizable

A-141 PIglide MB Miniature

Linear Stage with Air Bearings

n Size of the motion platform 57 mm × 93 mm

n Low profile 38 mm

n Travel ranges to 35 mm

n Load capacity to 3 kg

n Velocity to 0.25 m/sec

n Acceleration to 3.5 m/s²

>> Air bearings

>> Linear encoder

>> Linear motor

Technology Glossary ...................... page 290

Applications

n Precision Micro Assembly

n Scanning

n Photonics

n Optical Alignment

A-141.035A1, dimensions in mm

Accessories and options

n PIglide filter and air preparation kits

n Single and multi-axis motion controller

n XY setups and individual configurations

n Counterbalance options for vertical (Z)

orientations

n Base plates made of granite and systems

for reducing vibration

MOTION | POSITIONING

113

A-141 Unit Tolerance

Motion

Active axes X

Travel range 35 mm

Pitch / yaw (1)

over the entire travel range

10 µrad max.

Straightness / ﬂatness (1)

over the entire travel range

0.5 µm max.

Velocity (2), unloaded 0.25 m/s max.

Acceleration (2), unloaded 3.5 m/s² max.

Mechanical properties

Load capacity in z (3) 3kg max.

Moved mass 0.3 kg

Overall mass 0.6 kg

Guide type Air bearing

Drive properties

Drive type Linear motor, ironless, 3-phase

Intermediate circuit voltage, effective 48, nominal

80, max.

V DC

Peak force 2.3 N typ.

Nominal force 0.58 N typ.

Force constant, effective 2.1 N/A typ.

Resistance phase-phase 22.4 Ω typ.

Inductivity phase-phase 1.0 mH typ.

Back EMF phase-phase 0.7 V·s/m max.

Cabling Internal, no moving cable

Positioning

Integrated sensor Incremental linear encoder with travel range limits

and home index

Sensor signal Sin/cos, 1 V peak-peak, 20 µm signal period

Sensor resolution 1.2 nm (4)

Bidirectional repeatability ±0.1 µm (4)

Accuracy, uncompensated (5) ±2.0 µm

Accuracy, with error compensation (5) ±0.25 µm

Miscellaneous

Operating pressure (6) 65±5 psi (450±35 kPa)

Air consumption <1.0 SCFM (28 SLPM)

Air quality Clean (unﬁltered to 1.0 µm or better) – ISO 8573-1 class 1

Oil free – ISO 8573-1 class 1

Dry (–15 °C dew point) – ISO 8573-1 class 3

Materials Hardcoat aluminum, stainless steel fasteners

(1) Dependent on the flatness of the surface, on which the stage is mounted.

(2) Can be limited by the payload, controller or drive.

(3) Assumes payload CG is centered no more than 50 mm above the motion platform. The stage is designed for horizontal operation only.

(4) Assumes 16384x interpolation. Contact PI for the use of other factors.

(5) Improved accuracy can be obtained with controller-based error compensation. The stage must be ordered with a controller from PI to reach these values.

Accuracy values assume short-term duration and do not consider the long-term effects of thermal drift on the stage.

(6) To protect the stage against damage, it is recommended to connect an air pressure sensor to the E-Stop input of the controller.

Translation Stages

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114

n Ideal for scanning applications

or high-precision positioning

n Cleanroom compatible

n Size of the motion platform

115 mm × 115 mm

n Travel ranges to 350 mm

n Low profile from 60 mm

n Resolution to 1 nm

n Best flatness / straightness

n Counterbalance options for

vertical assembly

>> Air bearings

>> Linear encoder

>> Linear motor

Technology Glossary ...................... page 290

Applications

n Sample Inspection

n Scanning

n Metrology / Testing

n Photonics

n Flatpanel Inspection

MODEL A B C D E F G

A-121.050

A-121.10 0

A-121.150

A-121.200

A-121.250

A-121.350

240

290

340

390

440

540

100

125

150

200

100

125

175

105

130

180

126.5

151.5

176.5

201.5

226.5

276.5

High Performance Small Footprint Nanopositioning Stage

A-121 PIglide AT1 Linear Stage with Air Bearings

A-121, dimensions in mm

MOTION | POSITIONING

115

A-121.050 A-121.100 A-121.150 A-121.200 A-121.250 A-121.350 Unit Tolerance

Motion

Active axes X X X X X X

Travel range 50 100 150 200 250 350 mm

Pitch / yaw (1) 12 12 15 20 25 35 µrad max.

Straightness / ﬂatness (1) ±0.5 ±0.5 ±0.5 ±0.75 ±0.75 ±1.25 µm max.

Straightness / ﬂatness

per 25 mm travel range (1)

0.1 0.1 0.1 0.1 0.1 0.1 µm max.

Velocity, unloaded (2) 1 1 1 1 1 1 m/s max.

Acceleration, unloaded (2) 20 20 20 20 20 20 m/s² max.

Mechanical properties

Load capacity in z (3) 100 100 10 0 100 100 100 N max.

Load capacity in y (3) 40 40 40 40 40 40 N max.

Moved mass 1.2 1.2 1.2 1.2 1.2 1.2 kg

Overall mass 3.5 4.2 4.5 5.2 5.7 6.8 kg

Guide type

Air bearing Air bearing Air bearing Air bearing Air bearing Air bearing

A-121 Unit Tolerance

Drive properties

Drive type Linear motor, ironless, 3-phase

Intermediate circuit voltage,

effective

48, nominal

80, max.

V DC

Peak force 33.2 N typ.

Nominal force 11. 1 N typ.

Force constant, effective 6.67 N/A typ.

Resistance phase-phase 6.3 Ω typ.

Inductivity phase-phase 1.0 mH typ.

Back EMF phase-phase 7. 7 V·s/m max.

Cabling External, moving cable

A-121.xxxA A-121.xxxB A-121.xxxC

Positioning

Integrated Sensor Incremental linear encoder Absolute encoder Incremental linear encoder

Sensor signal Sin/cos, 1 V peak-peak,

20 µm signal period

BiSS-C A/B quadrature, TTL

Sensor resolution 1.2 nm (4) 1 nm 50 nm

Bidirectional repeatability A-121.050: ±0.25 µm (4)

A-121.100: ±0.25 µm (4)

A-121.150: ±0.25 µm (4)

A-121.200: ±0.25 µm (4)

A-121.250: ±0.25 µm (4)

A-121.350: ±0.50 µm (4)

A-121.050: ±0.25 µm

A-121.100: ±0.25 µm

A-121.150: ±0.25 µm

A-121.200: ±0.25 µm

A-121.250: ±0.25 µm

A-121.350: ±0.50 µm

A-121.050: ±0.25 µm

A-121.100: ±0.25 µm

A-121.150: ±0.25 µm

A-121.200: ±0.25 µm

A-121.250: ±0.25 µm

A-121.350: ±0.50 µm

Accuracy, uncompensated (5) A-121.050: ±1.0 µm

A-121.100: ±1.0 µm

A-121.150: ±1.5 µm

A-121.200: ±2.0 µm

A-121.250: ±2.0 µm

A-121.350: ±3.0 µm

A-121.050: ±1.5 µm

A-121.100: ±1.5 µm

A-121.150: ±1.5 µm

A-121.200: ±1.5 µm

A-121.250: ±1.5 µm

A-121.350: ±1.5 µm

A-121.050: ±1.0 µm

A-121.100: ±1.0 µm

A-121.150: ±1.5 µm

A-121.200: ±2.0 µm

A-121.250: ±2.0 µm

A-121.350: ±3.0 µm

Accuracy, with error

compensation (5)

A-121.050: ±0.50 µm

A-121.100: ±0.50 µm

A-121.150: ±0.50 µm

A-121.200: ±0.50 µm

A-121.250: ±0.50 µm

A-121.350: ±1.0 µm

A-121.050: ±0.5 µm

A-121.100: ±0.5 µm

A-121.150: ±0.5 µm

A-121.200: ±0.5 µm

A-121.250: ±0.5 µm

A-121.350: ±0.5 µm

A-121.050: ±0.50 µm

A-121.100: ±0.50 µm

A-121.150: ±0.50 µm

A-121.200: ±0.50 µm

A-121.250: ±0.50 µm

A-121.350: ±1.0 µm

A-121

Miscellaneous

Operating pressure (6) 65 to 75 psi (450 to 520 kPa)

Air consumption <1.0 SCFM (28 SLPM)

Air quality Clean (ﬁltered to 1.0 µm or better) – ISO 8573-1 Class 1

Oil free – ISO 8573-1 Class 1

Dry (–15 °C dew point) – ISO 8573-1 Class 3

Materials Hardcoat aluminum, stainless steel fasteners

(1) Dependent on the flatness of the surface, on which the stage is mounted.

(2) Can be limited by the payload, controller or drive.

(3) Assumes payload CG is centered no more than 50 mm above the motion

platform.

(4) Assumes 16384x interpolation. Contact PI for the use of other factors.

(5) Improved accuracy can be obtained with controller-based error compensation.

The stage must be ordered with a controller from PI to reach these values.

Accuracy values assume short-term duration and do not consider the long-term

effects of thermal drift on the stage.

(6) To protect the stage against damage, it is recommended to connect

an air pressure sensor to the Motion-Stop input of the controller.

Translation Stages

WWW.PI.WS

116

n Ideal for scanning applications or high-

precision positioning

n Cleanroom compatible

n Size of the motion platform 210 mm × 210 mm

n Travel ranges 50 mm to 750 mm

n Resolution to 1 nm

>> Air bearings

>> Linear encoder

>> Linear motor

Technology Glossary ...................... page 290

Applications

n Sample Inspection

n Scanning

n Metrology / Testing

n Photonics

n Flatpanel Inspection

High Performance Nanopositioning Stage

A-123 PIglide AT3 Linear Stage with Air Bearings

Product Overview

The stages in the PIglide are equipped with a servo drive linear motor with

preloaded air bearings and integrated linear encoder. The combination of these

noncontact components results in a frictionless motion platform that offers

the highest performance, quality, and lifetime. A high-force linear motor can

drive the stage to top speed within a few milliseconds, and the high-capacity

bearings can support payloads up to 60 kg. The laterally opposed, actively

preloaded air bearing design in this model allows mounting in any orientation.

Application fields

PIglide positioning systems are ideally suited for many high-precision appli-

cations such as metrology, photonics, and precision scanning in semiconduc-

tor or flat panel display manufacturing. Thanks to the friction-free motion,

no particles are formed, which makes PIglide stages ideal for cleanroom appli-

cations.

Accessories and options

n Encoder

n PIglide filter and air preparation kits

n Single and multi-axis motion controller

n XY setups and individual configurations

n Cable track variations

n Options with counterweight for vertical (Z)

orientation

n Customizations available

n Base plates made of granite and systems

for reducing vibration

MOTION | POSITIONING

117

A-123.050 A-123.100 A-123.150 A-123.200 A-123.350 A-123.500 A-123.750 Unit Tolerance

Motion

Active axes X X X X X X X

Travel range 50 100 150 200 350 500 750 mm

Pitch / yaw (1) 510 15 15 20 25 35 µrad max.

Straightness /

ﬂatness (1)

±0.5 ±0.5 ±0.5 ±1 ±1.5 ±1.5 ±2.5 µm max.

Straightness /

ﬂatness per

25 mm travel

range (1)

0.1 0.1 0.1 0.1 0.1 0.1 0.1 µm max.

Velocity,

unloaded (2)

1 1 1 1 1 1 1 m/s max.

Acceleration,

unloaded (2)

30 30 30 30 30 30 30 m/s² max.

Mechanical

properties

Load capacity

in z (3)

590 590 590 590 590 590 590 N max.

Load capacity

in y (3)

295 295 295 295 295 295 295 N max.

Moved mass 5 5 5 5 5 5 5 kg

Overall mass 14 15.5 16.5 18 21.5 25 32 kg

Guide type

Air bearing Air bearing Air bearing Air bearing Air bearing Air bearing Air bearing

A-123 Unit Tolerance

Drive properties

Drive type Linear motor, ironless, 3-phase

Intermediate circuit

voltage, effective

48, nominal

80, max.

V DC

Peak force 298 N typ.

Nominal force 87.5 N typ.

Force constant, effective 19.9 N/A typ.

Resistance phase-phase 3.6 Ω typ.

Inductivity phase-phase 1.2 mH typ.

Back EMF phase-phase 16 V·s/m max.

Cabling External, moving cable

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118

(1) Dependent on the flatness of the surface, on which the stage is mounted.

(2) Can be limited by the payload, controller or drive.

(3) Assumes payload CG is centered no more than 50 mm above the motion platform.

(4) Assumes 16384x interpolation. Contact PI for the use of other factors.

(5) Improved accuracy can be obtained with controller-based error compensation. The stage must be ordered with a controller from PI to reach these values.

Accuracy values assume short-term duration and do not consider the long-term effects of thermal drift on the stage.

(6) To protect the stage against damage, it is recommended to connect an air pressure sensor to the Motion-Stop input of the controller.

A 123.xxxA A 123.xxxB A 123.xxxC

Positioning

Integrated Sensor Incremental linear encoder Absolute encoder Incremental linear encoder

Sensor signal Sin/cos, 1 V peak-peak,

20 µm signal period

BiSS-C A/B quadrature, TTL

Sensor resolution 1.2 nm (4) 1 nm 50 nm

Bidirectional repeatability A-123.050: ±0.25 µm (4)

A-123.100: ±0.25 µm (4)

A-123.150: ±0.25 µm (4)

A-123.200: ±0.25 µm (4)

A-123.350: ±0.5 µm (4)

A-123.500: ±0.5 µm (4)

A-123.750: ±0.75 µm (4)

A-123.050: ±0.25 µm

A-123.100: ±0.25 µm

A-123.150: ±0.25 µm

A-123.200: ±0.25 µm

A-123.350: ±0.5 µm

A-123.500: ±0.5 µm

A-123.750: ±0.75 µm

A-123.050: ±0.25 µm

A-123.100: ±0.25 µm

A-123.150: ±0.25 µm

A-123.200: ±0.25 µm

A-123.350: ±0.5 µm

A-123.500: ±0.5 µm

A-123.750: ±0.75 µm

Accuracy,

uncompensated (5)

A-123.050: ±1 µm

A-123.100: ±1 µm

A-123.150: ±1.5 µm

A-123.200: ±2 µm

A-123.350: ±3 µm

A-123.500: ±3.5 µm

A-123.750: ±5 µm

A-123.050: ±1.5 µm

A-123.100: ±1.5 µm

A-123.150: ±1.5 µm

A-123.200: ±1.5 µm

A-123.350: ±1.5 µm

A-123.500: ±1.5 µm

A-123.750: ±1.5 µm

A-123.050: ±1 µm

A-123.100: ±1 µm

A-123.150: ±1.5 µm

A-123.200: ±2 µm

A-123.350: ±3 µm

A-123.500: ±3.5 µm

A-123.750: ±5 µm

Accuracy, with error

compensation (5)

A-123.050: ±0.5 µm

A-123.100: ±0.5 µm

A-123.150: ±0.5 µm

A-123.200: ±0.5 µm

A-123.350: ±1 µm

A-123.500: ±1 µm

A-123.750: ±1.5 µm

A-123.050: ±1.5 µm

A-123.100: ±1.5 µm

A-123.150: ±1.5 µm

A-123.200: ±1.5 µm

A-123.350: ±1.5 µm

A-123.500: ±1.5 µm

A-123.750: ±1.5 µm

A-123.050: ±0.5 µm

A-123.100: ±0.5 µm

A-123.150: ±0.5 µm

A-123.200: ±0.5 µm

A-123.350: ±1 µm

A-123.500: ±1 µm

A-123.750: ±1.5 µm

A-123

Miscellaneous

Operating pressure (6) 75 to 85 psi (515 to 585 kPa)

Air consumption <1.0 SCFM (28 SLPM)

Air quality Clean (ﬁltered to 1.0 µm or better) – ISO 8573-1 Class 1

Oil free – ISO 8573-1 Class 1

Dry (–15 °C dew point) – ISO 8573-1 Class 3

Materials Hardcoat aluminum, stainless steel fasteners

MOTION | POSITIONING

119

A-123, dimensions in mm

* The mounting holes are symmetric around the center line located at “J”

MODEL A B* C* D* E* F G Hx J Moving Mass Total Mass

A-123.050

A-123.100

A-123.150

A-123.200

A-123.350

A-123.500

A-123.750

350

400

450

500

650

800

1050

100

325

300

400

500

700

250

300

350

400

550

700

1000

100

175

250

375

31.5

56.5

81.5

106.5

181.5

256.5

381.5

181.5

206.5

231.5

256.5

331.5

406.5

531.5

5 kg

14 kg

15.5 kg

16.5 kg

18 kg

21.5 kg

25 kg

32 kg

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120

High-Performance Nanopositioning System for a Good Price

A-110 PIglide LC Linear Stage with Air Bearings

>> Air bearings

>> Linear encoder

>> Linear motor

Technology Glossary ...................... page 290

Applications

n Sample Inspection

n Scanning

n Metrology / Testing

n Photonics

n Flatpanel Inspection

n Ideal for scanning applications or high-precision

positioning

n Cleanroom compatible

n Size of the motion platform 160 mm × 200 mm

n Travel ranges to 400 mm

n Load capacity to 100 N

n Best flatness / straightness

Product Overview

PIglide positioning systems have a magnetic linear

motor, magnetically preloaded air bearings and

an optical linear encoder: Noncontact and friction-

free motion for the highest accuracy and reliability.

Accessories and options

n Encoder

n PIglide Filter and Air Preparation Kits

n Single and multi-axis motion controller

n XY setups and individual configurations

n Base plates made of granite and systems

for reducing vibration

MOTION | POSITIONING

121

A-110.050xx A-110.100xx A-110.200xx A-110.300xx A-110.400xx Unit Tolerance

Motion

Active axes X X X X X

Travel range 50 100 200 300 400 mm

Pitch / yaw (1) 10 20 30 40 50 µrad max.

Straightness / ﬂatness (1) ±1 ±1 ±1.5 ±2 ±2.5 µm max.

Straightness / ﬂatness

per 10 mm travel range (1)

±10 ±10 ±10 ±10 ±10 nm max.

Velocity, unloaded (2) 0.5 0.5 1 1 1 m/s max.

Acceleration, unloaded (2) 10 10 30 30 30 m/s² max.

Mechanical properties

Load capacity in z (3) 100 100 100 100 100 N max.

Moved mass 2.5 2.5 2.6 2.6 2.6 kg

Overall mass 6.3 7. 5 11 12 14 kg

Guide type Air bearing Air bearing Air bearing Air bearing Air bearing

A-110.050xx

A-110.100xx

A-110.200xx

A-110.300xx

A-110.400xx

Unit Tolerance

Drive properties

Drive type Linear motor, ironless, 3-phase Linear motor, ironless, 3-phase

Intermediate circuit voltage,

effective

48, nominal

60, max.

48, nominal

60, max.

V DC

Peak force 25 85 N typ.

Nominal force 9.2 39 N typ.

Force constant, effective 4.2 12.3 N/A typ.

Resistance phase-phase 8.2 3.6 Ω typ.

Inductivity phase-phase 2.7 1.24 mH typ.

Back EMF phase-phase 4.2 10.1 V·s/m max.

Cabling Internal, no moving cable External, moving cable

A-110.xxxA A-110.xxxB A-110.xxxC

Positioning

Integrated Sensor Incremental linear encoder Absolute encoder Incremental linear encoder

Sensor signal Sin/cos, 1 V peak-peak,

20 µm signal period

BiSS-C A/B quadrature, TTL

Sensor resolution 1.2 nm (4) 1 nm 50 nm

Bidirectional repeatability ±0.5 µm (4) ±0.5 µm ±0.5 µm

Accuracy, uncompensated (5) A-110.050: ±1 µm

A-110.100: ±1.5 µm

A-110.200: ±2 µm

A-110.300: ±3 µm

A-110.400: ±4 µm

A-110.050: ±1.5 µm

A-110.100: ±1.5 µm

A-110.200: ±1.5 µm

A-110.300: ±1.5 µm

A-110.400: ±1.5 µm

A-110.050: ±1 µm

A-110.100: ±1.5 µm

A-110.200: ±2 µm

A-110.300: ±3 µm

A-110.400: ±4 µm

Accuracy, with error

compensation (5)

A-110.050: ±1 µm

A-110.100: ±1 µm

A-110.200: ±1 µm

A-110.300: ±1.5 µm

A-110.400: ±1.5 µm

A-110.050: ±0.5 µm

A-110.100: ±0.5 µm

A-110.200: ±0.5 µm

A-110.300: ±0.5 µm

A-110.400: ±0.5 µm

A-110.050: ±1 µm

A-110.100: ±1 µm

A-110.200: ±1 µm

A-110.300: ±1.5 µm

A-110.400: ±1.5 µm

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122

A B C D

A-110.050

A-110.100

302

352

275

325

A-110

Miscellaneous

Operating pressure (6) 60 to 70 psi (415 to 485 kPa)

Air consumption <1.0 SCFM (28 SLPM)

Air quality Clean (ﬁltered to 1.0 µm or better) – ISO 8573-1 Class 1

Oil free – ISO 8573-1 Class 1

Dry (–15 °C dew point) – ISO 857-1 Class 3

Materials Hardcoat aluminum, stainless steel fasteners

(1) Dependent on the flatness of the surface, on which the stage is mounted.

(2) Can be limited by the payload, controller or drive.

(3) Assumes payload CG is centered no more than 50 mm above the motion platform. The stage is designed for horizontal operation only.

(4) Assumes 16384x interpolation. Contact PI for the use of other factors.

(5) Improved accuracy can be obtained with controller-based error compensation. The stage must be ordered with a controller from PI to reach

these values. Accuracy values assume short-term duration and do not consider the long-term effects of thermal drift on the stage.

(6) To protect the stage against damage, it is recommended to connect an air pressure sensor to the Motion-Stop input of the controller.

A-110.050 and A-110.100, dimensions in mm

MOTION | POSITIONING

123

MODEL A B C D E

A-110.200

A-110.300

A-110- 4 0 0

475

575

675

400

500

600

200

250

300

102

152

202

105

155

205

A-110.200, A-110.300 and A-110.400, dimensions in mm

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124

High-Performance Miniature Nanopositioning System

A-131 PIglide VC Voice Coil

Linear Stage with Air Bearings

n Ideal for scanning applications

or high-precision positioning

n Cleanroom compatible

n Travel ranges to 25 mm

n Load capacity to 100 N

n Acceleration to 80 m/s²

n Best flatness / straightness

>> Air bearings

>> Linear encoder

>> Voice Coil Drives

Technology Glossary ...................... page 290

Applications

n Medical Industry

n Scanning

n Machine Tool / Fast Tool

A-131.025xx, dimensions in mm

A-131.025xxB, dimensions in mm

MOTION | POSITIONING

125

A-131 Unit Tolerance

Motion

Active axes X

Travel range 25 mm

Pitch (1) 10 µrad max.

Yaw (1) 10 µrad max.

Straightness / ﬂatness (1) ±0.125 µm max.

Velocity, unloaded (2) 1 m/s max.

Acceleration, unloaded (2) 80 m/s² max.

Mechanical properties

Load capacity in z (3) 100 N max.

Moved mass 0.85 kg

Overall mass 3.6 kg

Guide type Air bearing

Drive properties

Drive type Brushless voice coil drive, ironless, 1 phase

Intermediate circuit voltage,

effective

48, nominal

80, max.

V DC

Peak force 70.4 N typ.

Nominal force 22.3 N typ.

Force constant, effective 6.9 N/A typ.

Resistance 2.7 Ω typ.

Inductivity (at 1000 Hz) 1.4 mH typ.

Back EMF 6.9 V·s/m

Nominal power 28 W max.

Cabling Internal, no moving cable

A-131.025A1x A-131.025D1x A-131.025F1x

Positioning

Integrated sensor Incremental linear encoder Incremental linear encoder Incremental linear encoder

Sensor signal Sin/cos, 1 V peak-peak,

20 µm signal period

A/B quadrature, TTL A/B quadrature, TTL

Sensor resolution 1.2 nm (4) 100 nm (5) 500 nm (5)

Bidirectional repeatability ±0.1 µm (4) ±0.1 µm ±0.1 µm

Accuracy (6) 0.2 µm 0.2 µm 0.2 µm

Reference point switch Home index Home index Home index

Reference point switch repeatability ±1 encoder step ±1 encoder step ±1 encoder step

A-131

Miscellaneous

Operating pressure (7) 75 to 85 psi (520 to 585 kPa)

Air consumption <1.0 SCFM (28 SLPM)

Air quality Clean (ﬁltered to 1.0 µm or better) – ISO 8573-1 Class 1

Oil free – ISO 857-1 Class 1

Dry (–15 °C dew point) – ISO 8573-1 Class 3

Materials Hardcoat aluminum, stainless steel fasteners

(1) Dependent on the flatness of the surface, on which the stage is mounted.

(2) Can be limited by the payload, controller or drive.

(3) Assumes that the center of gravity is centered no more than 50 mm from the motion platform.

(4) Assumes 16384x interpolation. Contact PI for the use of other factors.

(5) Alternative resolutions on request. Higher resolutions can limit the velocity.

(6) Improved accuracy can be obtained with controller-based error compensation. The stage must be ordered with a controller from PI to reach these values.

(7) To protect the stage against damage, it is recommended to connect an air pressure sensor to the Motion-Stop input of the controller.

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126

Compact Design, Multi-Axis Combinations

L-306 Compact Precision Z Stage

>> Linear Encoder

Technology Glossary ...................... page 290

Applications

n General Automation

n Photonics

n Scientific Instrumentation

n Semiconductor

n Compact design: Surface 63 mm × 63 mm

n Stepper motors and closed-loop DC motors

n Optional linear encoder for direct position measurement

n Crossed roller guides, anti-creep

n Noncontact reference and limit switches

L-306, dimensions in mm

MOTION | POSITIONING

127

L-306.011100 L-306.011112 L-306.013112 Unit Tolerance

Z stage with 2-phase

stepper motor

Z stage with 2-phase

stepper motor, linear

encoder with A/B

quadrature signal

transmission

Z stage with DC motor,

linear encoder with

A/B quadrature signal

transmission

Motion and positioning

Travel range 13 13 13 mm

Integrated sensor – Incremental linear

encoder

Incremental linear

encoder

Sensor resolution – 5 50 nm

Design resolution 2.5 0.005 0.05 µm

Minimum

incremental motion

2.5 0.1 0.1 µm typ.

Unidirectional

repeatability

0.5 0.1 0.1 µm typ.

Bidirectional

repeatability

±2 ±0.5 ±0.5 µm typ.

Pitch ±175 ±175 ±175 µrad typ.

Yaw ±150 ±150 ±150 µrad typ.

Straightness / ﬂatness ±3 ±3 ±3 µm typ.

Velocity 5 5 5 mm/s max.

Reference and limit

switches

Optical Optical Optical

Mechanical properties

Guide type Crossed roller guide

with anti-creep system

Crossed roller guide

with anti-creep system

Crossed roller guide

with anti-creep system

Drive screw type Ball screw Ball screw Ball screw

Drive screw pitch 0.5 0.5 0.5 mm

Push/pull force 20 20 20 N max.

Holding force, power off 20 20 20 N typ.

Permissible lateral force 10 10 10 N max.

Load capacity 20 20 20 N max.

Permissible torque in

θX, θY

1 1 1 N·m max.

Permissible torque in θZ2 2 2 N·m max.

Drive properties

Motor type 2-phase stepper motor 2-phase stepper motor DC motor

Miscellaneous

Operating temperature

range

5 to 40 5 to 40 5 to 40 °C

Humidity 20 – 80 % rel.,

not condensing

20 – 80 % rel.,

not condensing

20 – 80 % rel.,

not condensing

Material Anodized aluminum,

steel

Anodized aluminum,

steel

Anodized aluminum,

steel

Mass 0.6 0.6 0.6 kg ±5 %

Moved mass 0.18 0.18 0.18 kg ±5 %

Connection HD Sub-D 26 (m) (motor) HD Sub-D 26 (m)

(motor and encoder)

HD Sub-D 26 (m)

(motor and encoder)

Cable length 0.5 0.5 0.5 m

Recommended

controllers

C-663.12 (single axis)

SMC Hydra (double axis)

C-885 with C-663.12C885

(up to 20 axes)

ACS modular controller

C-663.12 (single axis)

SMC Hydra (double axis)

C-885 with C-663.12C885

(up to 20 axes)

ACS modular controller

C-863 (single axis)

C-884 (up to 6 axes)

C-885 with C-863.20C885

(to 40 axes)

ACS modular controller

All cables required for operation with the ordered controller are included in the scope of delivery.

The cable length is 3 m. Cable for connecting to other controllers can be ordered as accessory.

Ask about custom designs!

Translation Stages

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128

Compact Multi-Axis Combinations with Linear and Rotation Stages

L-310 Precision Z Stage

>> ActiveDrive

>> Linear Encoder

>> Vacuum-Compatible Versions

Technology Glossary ...................... page 290

Applications

n General Automation

n Photonics

n Scientific Instrumentation

n Semiconductor

n Travel range 26 mm (1”)

n High-resolution encoder

n ActiveDrive DC, DC, BLDC,

and stepper motors

n Zero-play ball screw

n MTBF 10000 h

n Self-locking to 10 kg

Precision-class Z stage

High guiding accuracy and stiffness due to ball screws and crossed roller

guides. Stress-relieved aluminum base for highest stability. Vacuum versions

available on request. Noncontact limit and reference point switches (Hall effect).

Reference point switch with direction sensing in the middle of the travel range.

Highly accurate position measuring with incremental linear encoder

Noncontact optical linear encoders measure the actual position directly at the

motion platform with the greatest accuracy so that nonlinearity, mechanical

play or elastic deformation have no influence on position measuring.

Minimum incremental motion and slow motion

In conjunction with the SMC Hydra controller, versions with stepper motor and

integrated linear encoder (L-310.xASD) achieve repeatable minimum incremental

motion in the range of the sensor resolution. The same configuration attains

constant low velocities of a few sensor increments per second.

Drive types

n .xxSD variant: 2-phase stepper motor for

high torque even at low velocities and high

resolution.

n .xxAD variant: ActiveDrive DC motor for high

velocity: Control via pulse-width-modulated

(PWM) signals, the operating voltage is

attained via an amplifier integrated in the

motor housing.

n .023xxx variant: DC servo motor

n .025xxx variant: Brushless DC motor (BLDC)

for high rotational velocity. Smooth running

and low wear, therefore higher lifetime.

Position measurement

n Versions with DC motor: Rotary encoder

n Optional: Integrated linear encoder,

installed centrically.

MOTION | POSITIONING

129

L-310 Unit Tolerance

Motion

Active axis Z

Travel range 26 mm

Pitch / yaw ±150 µrad typ.

Straightness / ﬂatness ±3 µm typ.

Velocity L-310.2xAD: 20

L-310.2xSD: 15

L-310.02xxxx: 50

mm/s max.

L-310 Unit Tolerance

Mechanical properties

Drive screw Ball screw

Drive screw pitch 1 mm

Guide Crossed roller guide with anti-creep system

Holding force, power off L-310.2xAD: 30 / L-310.2xSD: 50 / L-310.02xxxx: 30 N max.

Permissible

lateral force, Fx

100 N max.

Permissible

lateral force, Fy

50 N max.

Permissible

torque in θX (Mx)

40 N·m max.

Permissible

torque in θY (My)

80 N·m max.

Permissible

torque in θZ (Mz)

80 N·m max.

L-310.2ASD

L-310.023211

L-310.24AD

L-310.xxx212

L-310.20AD

L-310.xxx232

L-310.20SD Unit Tolerance

Positioning

Design resolution 0.005 0.05 L-310.20AD: 0.061

L-310.023232: 0.061

L-310.025232: 0.05

5 µm

Integrated sensor Incremental

linear encoder

Incremental

linear encoder

L-310.025212

additional

rotary encoder

Rotary encoder –

Sensor signal Sin/cos,

1 V peak-peak,

20 µm signal

period

A/B quadrature,

TTL

A/B quadrature,

TTL

–

Sensor resolution

rotary encoder

– L-310.025212:

20000

L-310.20AD: 16384

L-310.023232:

16384

L-310.025232:

20000

– Cts./rev.

Sensor resolution

linear encoder

0.05 – µm

Minimum incremental

motion

L-310.2ASD: 0.05

L-310.023211: 0.2

L-310.24AD: 0.3

L-310.xxx212: 0.2

0.3 0.3 µm typ.

Unidirectional

repeatability

L-310.2ASD: 0.1

L-310.023211: 0.2

L-310.24AD: 0.3

L-310.xxx212: 0.2

0.3 0.3 µm typ.

Bidirectional

repeatability

±0.2 ±0.2 ±2 ±2 µm typ.

Limit switches Hall effect Hall effect Hall effect Hall effect

Reference point switch

repeatability

2 2 2 2 µm typ.

Translation Stages

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L-310.xxSD L-310.xxAD L-310.xx3xxx L-310.xx5xxx Unit Tolerance

Drive properties

Motor type 2-phase stepper

motor

DC motor with

PWM control

DC motor BLDC motor

Operating voltage,

nominal

24 24 24 24 V nom.

Operating voltage, max. 48 48 48 48 V max.

Step resolution 200 – – – Full

steps/rev.

All cables required for operation with the ordered controller are included in the scope of delivery. The cable length is 3 m.

Cable for connecting to other controllers can be ordered as accessory.

Ask about custom designs!

L-310.20SD L-310.2ASD L-310.023xxx

L-310.2xAD

L-310.025xxx Unit Tolerance

Miscellaneous

Operating temperature

range

5 to 40 5 to 40 5 to 40 5 to 40 °C

Material Al (black anodized) Al (black anodized) Al (black anodized) Al (black anodized)

MTBF – – – 10000 h

Mass 2.7 2.8 2.7 2.7 kg ±5 %

Moved mass, unloaded 0.9 0.9 0.9 0.9 kg ±5 %

Connection HD Sub-D 26 (m) HD Sub-D 26 (m)

(motor) Sub-D 9

(m) (sensor)

L-310.2xAD:

Sub-D 15 (m)

L-310.023232:

HD Sub-D 26 (m)

L-310.023211:

HD Sub-D 26 (m)

(motor), Sub-D 9

(m) (sensor)

HD Sub-D 26 (m)

Recommended

controllers / drivers

C-663.12

(single axis)

SMC Hydra

(double axis)

C-885 with

C-663.12C885

(up to 20 axes)

ACS modular

controller

C-663.12

(single axis)

SMC Hydra

(double axis)

C-885 with

C-663.12C885

(up to 20 axes

ACS modular

controller

C-863

(single axis)

C-884

(up to 6 axes)

C-885 with

C-863.20C885

(to 40 axes)

ACS modular

controller

C-891

(single axis)

C-885 with

C-891.10C885

(up to 20 axes)

ACS modular

controller

Direction of the

axes and torques

for Z stages

MOTION | POSITIONING

131

L-310, dimensions in mm

Translation Stages

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132

Compact XYZ Combinations with M-511 Translation Stage Series

M-501 Precision Z Stage

n Extremely high-resolution encoder

n ActiveDrive motor

n Zero-play ball screws

n Noncontact limit and reference point switches

n Stress-relieved aluminum base for highest stability

n Self-locking to 10 kg

M-501, dimensions in mm

>> ActiveDrive

>> Incremental Encoder

Technology Glossary ...................... page 290

Applications

n General Automation

n Photonics

n Scientific Instrumentation

n Semiconductor

MOTION | POSITIONING

133

M-501.1PD M-501.1DG Unit Tolerance

Active axes Z Z

Motion and positioning

Travel range 12.5 12.5 mm

Integrated sensor Rotary encoder Rotary encoder

Sensor resolution 40960 2048 Cts./rev.

Design resolution 0.024 0.005 µm

Minimum incremental motion <0.1 <0.1 µm

Unidirectional repeatability 0.1 0.1 µm

Pitch ±150 ±150 µrad

Yaw ±150 ±150 µrad

Velocity 3 1 mm/s max.

Reference point switch

repeatability

1 1 µm

Mechanical properties

Drive screw pitch 1 1 mm

Gear ratio 80/26 (belt drive) 80/26 (belt drive);

(28/12)4:1 ~ 29.6:1 gearhead

Load capacity 50 100 N max.

Holding force 20 100 N max.

Drive properties

Motor type DC motor with PWM control

(ActiveDrive)

DC gear motor

Operating voltage 24 0 to ±12 V

Motor power 17 4 W

Reference and limit switches Hall effect Hall effect

Miscellaneous

Operating temperature range 10 to 50 –20 to 50 °C

Material Al (black anodized) Al (black anodized)

Mass 2.6 2.6 kg ±5 %

Recommended controllers /

drivers

C-863 (single axis)

C-884 (up to 6 axes)

C-863 (single axis)

C-884 (up to 6 axes)

Ask about custom designs!

Translation Stages

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134

Excellent Accuracy for High Loads

UPL-120 Precision Z Stage

n Travel range 13 mm (1/2”)

n Unidirectional repeatability to 0.05 µm

n Load capacity to 20 kg

n Integrated optical limit switches

n Available with direct-measuring encoder

n Crossed roller guide, anti-creep

>> Linear Encoder

Technology Glossary ...................... page 290

Applications

n General Automation

n Photonics

n Scientific Instrumentation

n Semiconductor

Reference-class Z stage

Extremely accurate and reliable positioning. Crossed roller guides for smooth

feed at high loads. Stress-relieved aluminum base for highest stability. Drive

variants with DC motor and 2-phase stepper motor. Noncontact limit switches.

Highly accurate position measuring with incremental linear encoder

Noncontact optical linear encoders measure the actual position directly at the

motion platform with the greatest accuracy so that nonlinearity, mechanical

play or elastic deformation have no influence on position measuring.

Crossed roller guide

With crossed roller guides, the point contact of the balls in ball guides is

replaced by line contact of the hardened rollers. Consequently, they are consi-

derably stiffer and need less preload, which reduces friction and allows smoo-

ther running. Crossed roller guides are also distinguished by high guiding accu-

racy and load capacity. Force-guided rolling element cages prevent cage creep.

MOTION | POSITIONING

135

6635911030 6635921030 6635911130 6635921130-0001 Unit Tolerance

Z stage with

DC motor and

rotary encoder

Z stage with

stepper motor

Z stage with

DC motor,

linear and

rotary encoder

Z stage with

stepper motor

and linear

encoder

Active axes Z Z Z Z

Motion and positioning

Travel range 13 13 13 13 mm

Integrated sensor Rotary encoder – Linear encoder

Rotary encoder

Linear encoder

Sensor signal rotary

encoder

A/B quadrature,

RS-422

– A/B quadrature,

RS-422

–

Sensor signal linear

encoder

– – A/B quadrature,

RS-422

Sin/cos,

1 V peak-peak,

20 µm signal

period

Design resolution 0.013 1.34 0.05 0.005 µm

Sensor resolution

rotary encoder

20000 –20000 – Cts./rev.

Sensor resolution

linear encoder

– – 0.05 – µm

Minimum incremental

motion

0.1 0.1 0.1 0.05 µm typ.

Unidirectional

repeatability

0.1 0.1 0.1 0.05 µm typ.

Bidirectional

repeatability

±2 ±2 ±0.1 ±0.05 µm typ.

Pitch ±100 ±100 ±100 ±100 µrad typ.

Yaw ±100 ±100 ±100 ±100 µrad typ.

Straightness ±3.0 ±3.0 ±3.0 ±3.0 µm typ.

Flatness ±3.0 ±3.0 ±3.0 ±3.0 µm typ.

Velocity 6 3 6 3 mm/s max.

Reference point switch

repeatability

<1 <1 <1 <1 µm typ.

Mechanical properties

Guide type Crossed roller

guide with anti-

creep system

Crossed roller

guide with anti-

creep system

Crossed roller

guide with anti-

creep system

Crossed roller

guide with anti-

creep system

Drive screw type Ball screw Ball screw Ball screw Ball screw

Drive screw pitch 1 1 1 1 mm

Gear ratio 2911:780 2911:780 2911:780 2911:780

Push/pull force,

power on

200 200 200 200 N max.

Holding force, power off 40 80 40 80 N typ.

Load capacity 200 200 200 200 N max.

Permissible lateral force

Fy in Y

150 150 150 150 N max.

Permissible torque Mx

in θx

130 130 130 130 N·m max.

Permissible torque My

in θy

38 38 38 38 N·m max.

Permissible torque Mz

in θZ

150 150 150 150 N·m max.

Translation Stages

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136

UPL-120, DC motor,

dimensions in mm

UPL-120, stepper motor,

dimensions in mm

Direction of the

axes and torques

for Z stages

6635911030 6635921030 6635911130 6635921130-0001 Unit Tolerance

Drive properties

Motor type DC motor 2-phase

stepper motor

DC motor 2-phase

stepper motor

Step resolution – 200 – 200 Full steps/

rev.

Operating voltage,

nominal

24 24 24 24 V nom.

Operating voltage, max. 48 48 48 48 V max.

Limit switches Optical Optical Optical Optical

Miscellaneous

Operating temperature

range

5 to 40 5 to 40 5 to 40 5 to 40 °C

Mass 2.4 2.3 2.4 2.4 kg ±5 %

Moved mass 1.3 1.3 1.3 1.3 kg ±5 %

Material Aluminum,

black anodized

Aluminum,

black anodized

Aluminum,

black anodized

Aluminum,

black anodized

Connection HD Sub-D 15 (m) HD Sub-D 15 (m) Motor:

HD Sub-D 15 (m)

Sensor:

Sub-D 9 (m)

Motor:

HD Sub-D 15 (m)

Sensor:

Sub-D 9 (m)

Recommended

controllers / drivers

C-863

(single axis)

C-884

(up to 6 axes)

C-885 with

C-863.20C885

(to 40 axes)

ACS modular

controller

C-663.12

(single axis)

SMC Hydra

(double axis)

C-885 with

C-663.12C885

(up to 20 axes)

ACS modular

controller

C-863

(single axis)

C-884

(up to 6 axes)

C-885 with

C-863.20C885

(to 40 axes)

ACS modular

controller

C-663.12

(single axis)

SMC Hydra

(double axis)

C-885 with

C-663.12C885

(up to 20 axes)

ACS modular

controller

Connecting cables for motor and sensor are not in the scope of delivery and must be ordered separately.

Ask about custom designs!

MOTION | POSITIONING

137

UPL-120, dimensions in mm

Translation Stages

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138

XY Stages

MOTION | POSITIONING

139

XY Stages with Mechanical Bearings ...................................................................................................................................... 140

L-731 Precision XY Stage .............................................................................................. 140

V-731 PIMag® High-Precision XY Stage ......................................................................... 144

L-741 Precision XY Stage .............................................................................................. 146

V-741 PIMag® High-Precision XY Stage ......................................................................... 150

L-738 Precision XY Stage .............................................................................................. 152

V-738 PIMag® High-Precision XY Stage ......................................................................... 156

PIglide XY Stages with Air Bearings ....................................................................................................................................... 158

A-311 PIglide IS Planar Scanner with Air Bearing .......................................................... 158

A-322 PIglide HS Planar Scanner with Air Bearing ........................................................ 160

XY Stages

WWW.PI.WS

140

High Travel Accuracy and Stability

L-731 Precision XY Stage

n Travel range 205 mm × 205 mm (8”)

n Unidirectional repeatability to 0.05 µm

n Velocity to 90 mm/s

n 2-phase stepper motor or DC motors

n Incremental encoder with 1 nm resolution

n Rotary encoder with 20000 impulses/

revolution

n Crossed roller guide, anti-creep

>> Incremental Encoder

Technology Glossary ...................... page 290

Drive types

n 2-phase stepper motor for high torque even

at low velocities and higher resolution

n DC motor for high velocity constancy, low

vibration, and high velocities

Other travel ranges on request.

Highly accurate position measuring with incremental linear encoder

Noncontact optical linear encoders measure the actual position directly at the

motion platform with the greatest accuracy so that nonlinearity, mechanical

play or elastic deformation have no influence on position measuring.

Optical limit and reference point switches.

Crossed roller guide

With crossed roller guides, the point contact of the balls in ball guides

is replaced by line contact of the hardened rollers. Consequently, they are

considerably stiffer and need less preload, which reduces friction and allows

smoother running. Crossed roller guides are also distinguished by high guiding

accuracy and load capacity. Force-guided rolling element cages prevent cage

creep.

Applications

n Biotechnology

n Laser Cutting

n Laser Marking

n Medical Industry

n Metrology / Testing

MOTION | POSITIONING

141

Stages with DC motor L-731.093111 / L-731.093112 / L-731.093132 Unit Tolerance

Motion

Active axes X, Y

Travel range 205 × 205 mm

Angular error xry (pitch) ±50 µrad typ.

Angular error xrz (yaw) ±30 µrad typ.

Angular error yrx (pitch) ±40 µrad typ.

Angular error yrz (yaw) ±30 µrad typ.

Straightness / ﬂatness ±2 µm typ.

Orthogonality ±96.963 µrad typ.

Velocity L-731.093111 / L-731.093112: 50

L-731.093132: 90

mm/s max.

Stages with DC motor L-731.093xxx Unit Tolerance

Mechanical properties

Drive screw type Ball screw

Drive screw pitch 2 mm

Guide type Crossed roller guide with anti-creep system

Load capacity 200 N max.

Permissible torque Mx in θX125 N·m max.

Permissible torque My in θY125 N·m max.

Permissible torque Mz in θZ125 N·m max.

Drive properties

Motor type DC motor

Operating voltage, nominal 24 V nom.

Operating voltage, max. 48 V max.

Stages with DC motor L-731.093111 L-731.093112 L-731.093132 Unit Tolerance

Positioning

Integrated sensor Incremental linear

encoder

Incremental linear

encoder

Incremental rotary

encoder

Sensor signal Sin/cos, 1 V peak-

peak, 20 µm signal

period

A/B quadrature,

TTL

A/B quadrature,

TTL

Design resolution 0.001 0.01 0.1 µm

Sensor resolution rotary encoder – – 20000 Cts./rev.

Minimum incremental motion 0.1 0.5 0.8 µm typ.

Unidirectional repeatability 0.1 0.5 0.8 µm typ.

Bidirectional repeatability ±0.5 ±0.5 ±2.5 µm typ.

Reference point switch repeatability <1 <1 <1 µm typ.

Reference and limit switches Optical Optical Optical

XY Stages

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Stages with stepper motor L-731.40SD / L-731.44SD / L-731.4ASD Unit Tolerance

Motion

Active axes X, Y

Travel range 205 × 205 mm

Angular error xry (pitch) ±50 µrad typ.

Angular error xrz (yaw) ±30 µrad typ.

Angular error yrx (pitch) ±40 µrad typ.

Angular error yrz (yaw) ±30 µrad typ.

Straightness / ﬂatness ±2 µm typ.

Orthogonality ±96.963 µrad typ.

Velocity 45 mm/s max.

Stages with stepper motor L- 7 3 1. 4 x S D Unit Tolerance

Mechanical properties

Drive screw type Ball screw

Drive screw pitch 2 mm

Guide type Crossed roller guide with anti-creep system

Load capacity 200 N max.

Permissible torque Mx in θX125 N·m max.

Permissible torque My in θY125 N·m max.

Permissible torque Mz in θZ125 N·m max.

Drive properties

Motor type Stepper motor, 2-phase

Operating voltage, nominal 24 V nom.

Operating voltage, max. 48 V max.

Stepper motor 200 Full steps/

rev.

Stages with stepper motor L- 7 3 1. 4 0 S D L- 7 3 1 . 4 4 S D L- 7 3 1 . 4 A S D Unit Tolerance

Positioning

Integrated sensor – Incremental linear

encoder

Incremental linear

encoder

Sensor signal – A/B quadrature,

TTL

Sin/cos, 1 V

peak-peak, 20 µm

signal period

Design resolution 10.0 0.01 0.001 µm

Minimum incremental motion 1 0.05 0.05 µm typ.

Unidirectional repeatability 1 0.05 0.05 µm typ.

Bidirectional repeatability ±2.5 ±0.5 ±0.5 µm typ.

Reference and limit switches Optical Optical Optical

Stages with DC motor L-731.093111 L-731.093112 / L-731.093132 Unit Tolerance

Miscellaneous

Operating temperature range 5 to 40 5 to 40 °C

Material Aluminum, black anodized Aluminum, black anodized

Mass 16 16 kg ±5 %

Moved mass in X, unloaded 12 12 kg ±5 %

Moved mass in Y, unloaded 3.5 3.5 kg ±5 %

Connection 2 × HD Sub-D 26 (m) (motor)

2 × Sub-D 15 (f) (sensor)

2 × HD Sub-D 26 (m)

(motor/sensor)

Recommended controllers / drivers SMC Hydra (double axis)

C-891 (single axis)

C-885 with C-891.10C885

(up to 20 axes)

ACS modular controller

C-863 (single axis)

C-884 (up to 6 axes)

C-885 with C-863.20C885

(to 40 axes)

ACS modular controller

MOTION | POSITIONING

143

All cables required for operation with the ordered controller are included in the scope of delivery.

The cable length is 3 m. Cable for connecting to other controllers can be ordered as accessory.

Ask about custom designs!

Stages with stepper motor L-731.40SD / L-731.44SD L- 7 3 1 . 4 A S D Unit Tolerance

Miscellaneous

Operating temperature range 5 to 40 5 to 40 °C

Material Aluminum, black anodized Aluminum, black anodized

Mass 15.5 15.5 kg ±5 %

Moved mass in X, unloaded 12 12 kg ±5 %

Moved mass in Y, unloaded 3.5 3.5 kg ±5 %

Connection L-731.40SD: 2 × HD Sub-D

26 (m) (motor)

L-731.44SD: 2 × HD Sub-D

26 (m) (motor/sensor)

2 × HD Sub-D 26 (m) (motor)

2 × Sub-D 15 (f) (sensor)

Recommended controllers / drivers C-663.12 (single axis)

SMC Hydra (double axis)

C-885 with C-663.12C885

(up to 20 axes)

ACS modular controller

SMC Hydra (double axis)

ACS modular controller

L-731, dimensions in mm

XY Stages

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144

High Travel Accuracy and Stability, Magnetic Direct Drive

V-731 PIMag® High-Precision XY Stage

n Travel range 205 mm × 205 mm (8”)

n Unidirectional repeatability to 0.1 µm

n Ironless 3-phase linear motor

n Velocity to 200 mm/s

n Incremental linear encoder with 1 nm resolution

n Crossed roller guides, anti-creep

>> Incremental Encoder

>> PIMag® Magnetic Linear Motors

Technology Glossary ...................... page 290

V-731, dimensions in mm

Applications

n Automated Optical Inspection (AOI)

n Biotechnology

n Laser Cutting

n Laser Marking

n Medical Industry

n Metrology / Testing

n Scanning

MOTION | POSITIONING

145

V-731.096111 Unit Tolerance

Motion and positioning

Active axes X, Y

Travel range 205 × 205 mm

Integrated sensor Incremental linear encoder

Design resolution 0.001 µm

Sensor signal Sin/cos, 1 V peak-peak,

20 µm signal period

Minimum incremental motion 0.02 µm typ.

Unidirectional repeatability 0.1 µm typ.

Bidirectional repeatability ±0.25 µm typ.

Angular error xry (pitch) ±50 µrad typ.

Angular error xrz (yaw) ±30 µrad typ.

Angular error yrx (pitch) ±40 µrad typ.

Angular error yrz (yaw) ±30 µrad typ.

Orthogonality ±96.963 µrad typ.

Straightness / ﬂatness ±2 µm typ.

Velocity 200 mm/s max.

Acceleration in X, without load 5 m/s² max.

Acceleration in Y, without load 15 m/s² max.

Reference and limit switches Optical

Mechanical properties

Load capacity 50 N max.

Permissible torque in θX, θY125 N·m max.

Permissible torque in θZ125 N·m max.

Guide Crossed roller guide with

anti-creep system

Drive properties

Motor type Ironless 3-phase linear motor

Operating voltage, nominal 48 V nom.

Operating voltage, max. 48 V max.

Peak force 80 N max.

Nominal force 29 N typ.

Peak current, effective 5 A typ.

Nominal current, effective 1. 5 A typ.

Force constant, effective 19.9 N/A typ.

Motor constant 4.89 N/√W typ.

Electrical time constant 0.4 ms

Resistance phase-phase 11 Ω typ.

Inductance phase-phase 3.6 mH typ.

Back EMF phase-phase 16 V·s/m max.

Pole pitch N-N 30 mm

Miscellaneous

Operating temperature range 5 to 40 °C

Material Aluminum, black anodized

Moved mass in X 15.4 kg ±5 %

Moved mass in Y 5.6 kg ±5 %

Overall mass 19.4 kg ±5 %

MTBF 20000 h

Connection 2 × HD Sub-D 26 (m) (motor)

2 × Sub-D 15 (f) (sensor)

Recommended controller SMC Hydra (double axis)

C-891 (single axis)

C-885 with C-891.10C885 (up to 20 axes)

ACS modular controller

All cables required for operation with the ordered controller are included in the scope of delivery.

The cable length is 3 m. Cable for connecting to other controllers can be ordered as accessory.

Ask about custom designs!

XY Stages

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146

High Travel Accuracy and Stability, 305 × 305 mm Travel Range

L-741 Precision XY Stage

n Travel range 305 mm × 305 mm (12”)

n Unidirectional repeatability to 0.05 µm

n Velocity to 90 mm/s

n 2-phase stepper motors or DC motors

n  Incremental linear encoder with 1 nm resolution

n Rotary encoder with 20000 impulses/revolution

n Crossed roller guide, anti-creep

>> Incremental Encoder

Technology Glossary ...................... page 290

Drive types

n 2-phase stepper motor for high torque even

at low velocities and higher resolution

n DC motor for high velocity constancy, low

vibration, and high velocities

Other travel ranges on request.

Highly accurate position measuring with incremental linear encoder

Noncontact optical linear encoders measure the actual position directly at

the motion platform with the greatest accuracy so that nonlinearity, mecha-

nical play or elastic deformation have no influence on position measuring.

Optical limit and reference point switches.

Crossed roller guide

With crossed roller guides, the point contact of the balls in ball guides is

replaced by line contact of the hardened rollers. Consequently, they are

considerably stiffer and need less preload, which reduces friction and allows

smoother running. Crossed roller guides are also distinguished by high guid-

ing accuracy and load capacity. Force-guided rolling element cages prevent

cage creep.

Applications

n Biotechnology

n Laser Cutting

n Laser Marking

n Medical Industry

n Metrology / Testing

MOTION | POSITIONING

147

Stages with DC motor L-741.133111 / L-741.133112 / L-741.133132 Unit Tolerance

Motion

Active axes X, Y

Travel range 305 × 305 mm

Angular error xry (pitch) ±60 µrad typ.

Angular error xrz (yaw) ±40 µrad typ.

Angular error yrx (pitch) ±60 µrad typ.

Angular error yrz (yaw) ±40 µrad typ.

Straightness / ﬂatness ±4 µm typ.

Orthogonality ±96.963 µrad typ.

Velocity L-741.133111 / L-741.133112: 50

L-741.133132: 90

mm/s max.

Stages with DC motor L-741.133xxx Unit Tolerance

Mechanical properties

Drive screw type Ball screw

Drive screw pitch 2 mm

Guide type Crossed roller guide with anti-creep system

Load capacity 200 N max.

Permissible torque Mx in θX125 N·m max.

Permissible torque My in θY125 N·m max.

Permissible torque Mz in θZ125 N·m max.

Drive properties

Motor type DC motor

Operating voltage, nominal 24 V nom.

Operating voltage, max. 48 V max.

Stages with DC motor L-741.133111 L-741.133112 L-741.133132 Unit Tolerance

Positioning

Integrated sensor Incremental linear

encoder

Incremental linear

encoder

Incremental rotary

encoder

Sensor signal Sin/cos, 1 V peak-

peak, 20 µm signal

period

A/B quadrature,

TTL

A/B quadrature,

TTL

Design resolution 0.001 0.01 0.1 µm

Sensor resolution rotary encoder – – 20000 Cts./rev.

Minimum incremental motion 0.1 0.5 0.8 µm typ.

Unidirectional repeatability 0.1 0.5 0.8 µm typ.

Bidirectional repeatability ±0.5 ±0.5 ±2.5 µm typ.

Reference point switch repeatability <1 <1 <1 µm typ.

Reference and limit switches Optical Optical Optical

XY Stages

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Stages with stepper motor L-741.131100 / L-741.131111 / L-741.131112 Unit Tolerance

Motion

Active axes X, Y

Travel range 305 × 305 mm

Angular error xry (pitch) ±60 µrad typ.

Angular error xrz (yaw) ±40 µrad typ.

Angular error yrx (pitch) ±60 µrad typ.

Angular error yrz (yaw) ±40 µrad typ.

Straightness / ﬂatness ±4 µm typ.

Orthogonality ±96.963 µrad typ.

Velocity 45 mm/s max.

Stages with stepper motor L-741.131xxx Unit Tolerance

Mechanical properties

Drive screw type Ball screw

Drive screw pitch 2 mm

Guide type Crossed roller guide with anti-creep system

Load capacity 200 N max.

Permissible torque Mx in θX125 N·m max.

Permissible torque My in θY125 N·m max.

Permissible torque Mz in θZ125 N·m max.

Drive properties

Motor type Stepper motor, 2-phase

Operating voltage, nominal 24 V nom.

Operating voltage, max. 48 V max.

Step resolution 200 Full steps/

rev.

Stages with stepper motor L-741.131100 L-741.131111 L-741.131112 Unit Tolerance

Positioning

Integrated sensor – Incremental linear

encoder

Incremental linear

encoder

Sensor signal – Sin/cos, 1 V peak-

peak, 20 µm signal

period

A/B quadrature,

TTL

Design resolution 10.0 0.001 0.01 µm

Sensor resolution rotary encoder – – – Cts./rev.

Sensor resolution linear encoder – 0.001 0.01 µm

Minimum incremental motion 1 0.05 0.05 µm typ.

Unidirectional repeatability 1 0.05 0.05 µm typ.

Bidirectional repeatability ±2.5 ±0.5 ±0.5 µm typ.

Reference point switch repeatability <1 <1 <1 µm typ.

Reference and limit switches Optical Optical Optical

Stages with DC motor L-741.133111 L-741.133112 / L-741.133132 Unit Tolerance

Miscellaneous

Operating temperature range 5 to 40 5 to 40 °C

Material Aluminum, black anodized Aluminum, black anodized

Mass 28 28 kg ±5 %

Moved mass in X, unloaded 20.2 20.2 kg ±5 %

Moved mass in Y, unloaded 6.1 6.1 kg ±5 %

Connection 2 × HD Sub-D 26 (m) (motor)

2 × Sub-D 15 (f) (sensor)

2 × HD Sub-D 26 (m)

(motor/sensor)

Recommended controllers / drivers SMC Hydra (double axis)

C-891 (single axis)

C-885 with C-891.10C885

(up to 20 axes)

ACS modular controller

C-863 (single axis)

C-884 (up to 6 axes)

C-885 with C-863.20C885

(to 40 axes)

ACS modular controller

MOTION | POSITIONING

149

All cables required for operation with the ordered controller are included in the scope of delivery.

The cable length is 3 m. Cable for connecting to other controllers can be ordered as accessory.

Ask about custom designs!

Stages with stepper motor L-741.131100 / L-741.131112 L-741.131111 Unit Tolerance

Miscellaneous

Operating temperature range 5 to 40 5 to 40 °C

Material Aluminum, black anodized Aluminum, black anodized

Mass 27.5 27.5 kg ±5 %

Moved mass in X, unloaded 19.9 19.9 kg ±5 %

Moved mass in Y, unloaded 6.1 6.1 kg ±5 %

Connection L-741.131100. 2 × HD Sub-D

26 (m) (motor)

L-741.131112. 2 × HD Sub-D

26 (m) (motor/sensor)

2 × HD Sub-D 26 (m) (motor)

2 × Sub-D 15 (f) (sensor)

Recommended controllers / drivers C-663.12 (single axis)

SMC Hydra (double axis)

C-885 with C-663.12C885

(up to 20 axes)

ACS modular controller

SMC Hydra (double axis)

ACS modular controller

L-741, dimensions in mm

XY Stages

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150

High Travel Accuracy and Stability, 305 mm × 305 mm Travel Range, Magnetic Direct Drive

V-741 PIMag® High-Precision XY Stage

n Travel range 305 mm × 305 mm (12”)

n Unidirectional repeatability to 0.1 µm

n Ironless 3-phase linear motor

n Velocity to 200 mm/s

n Incremental linear encoder with 1 nm resolution

n Crossed roller guides, anti-creep

>> Linear Encoder

>> PIMag® Magnetic Linear Motors

Technology Glossary ...................... page 290

V-741, dimensions in mm

Applications

n Automated Optical Inspection (AOI)

n Biotechnology

n Laser Cutting

n Laser Marking

n Medical Industry

n Metrology / Testing

n Scanning

MOTION | POSITIONING

151

V-741.136111 Unit Tolerance

Motion and positioning

Active axes X, Y

Travel range 305 × 305 mm

Integrated sensor Incremental linear encoder

Design resolution 0.001 µm

Sensor signal Sin/cos, 1 V peak-peak,

20 µm signal period

Minimum incremental motion 0.02 µm typ.

Unidirectional repeatability 0.1 µm typ.

Bidirectional repeatability ±0.25 µm typ.

Angular error xry (pitch) ±70 µrad typ.

Angular error xrz (yaw) ±50 µrad typ.

Angular error yrx (pitch) ±60 µrad typ.

Angular error yrz (yaw) ±50 µrad typ.

Orthogonality ±96.963 µrad typ.

Straightness / ﬂatness ±3 µm typ.

Velocity 200 mm/s max.

Acceleration in X, without load 3 m/s² max.

Acceleration in Y, without load 9 m/s² max.

Reference and limit switches Optical

Mechanical properties

Load capacity 50 N max.

Permissible torque in θX, θY125 N·m max.

Permissible torque in θZ125 N·m max.

Guide Crossed roller guide with

anti-creep system

Drive properties

Motor type Ironless 3-phase linear motor

Operating voltage, nominal 48 V nom.

Operating voltage, max. 48 V max.

Peak force 80 N max.

Nominal force 29 N typ.

Peak current, effective 5 A typ.

Nominal current, effective 1. 5 A typ.

Force constant, effective 19.9 N/A typ.

Motor constant 4.89 N/√W typ.

Electrical time constant 0.4 ms

Resistance phase-phase 11 Ω typ.

Inductance phase-phase 3.6 mH typ.

Back EMF phase-phase 16 V·s/m max.

Pole pitch N-N 30 mm

Miscellaneous

Operating temperature range 5 to 40 °C

Material Aluminum, black anodized

Moved mass in X 25.5 kg ±5 %

Moved mass in Y 9.2 kg ±5 %

Overall mass 33 kg ±5 %

MTBF 20000 h

Connection 2 × HD Sub-D 26 (m) (motor)

2 × Sub-D 15 (f) (sensor)

Recommended controller SMC Hydra (double axis)

C-891 (single axis)

C-885 with C-891.10C885 (up to 20 axes)

ACS modular controller

All cables required for operation with the ordered controller are included in the scope of delivery.

The cable length is 3 m. Cable for connecting to other controllers can be ordered as accessory.

Ask about custom designs!

XY Stages

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152

Clear Aperture, High Travel Accuracy, and Stability

L-738 Precision XY Stage

n Travel range 102 mm × 102 mm (4”)

n Large aperture, 150 mm × 150 mm

n Unidirectional repeatability to 0.05 µm

n Velocity to 90 mm/s

n 2-phase stepper motors, DC motors

n Incremental linear encoder with

1 nm resolution

>> Incremental Encoder

Technology Glossary ...................... page 290

Drive types

n 2-phase stepper motor for high torque even

at low velocities and higher resolution

n DC motor for high velocity constancy, low

vibration, and high velocities

Highly accurate position measuring with incremental linear encoder

Noncontact optical linear encoders measure the actual position directly at the

motion platform with the greatest accuracy so that nonlinearity, mechanical

play or elastic deformation have no influence on position measuring. Optical

reference points and limit switches.

Recirculating ball bearings

When carefully assembled, recirculating ball bearings are distinguished by a

beneficial combination of high load capacity, lifetime, maintenance-free opera-

tion, and guiding accuracy. The moving part of the stages is supported by four

preloaded linear ball bearing units which run on two guide rails. Each bearing

unit is made up of two independent rows of circulating ball bearings.

Applications

n Biotechnology

n Laser Cutting

n Laser Marking

n Medical Industry

n Metrology / Testing

MOTION | POSITIONING

153

Stages with DC motor L-738.053111 / L-738.053112 / L-738.053132 Unit Tolerance

Motion

Active axes X, Y

Travel range 102 × 102 mm

Angular error xry (pitch) ±40 µrad typ.

Angular error xrz (yaw) ±20 µrad typ.

Angular error yrx (pitch) ±40 µrad typ.

Angular error yrz (yaw) ±20 µrad typ.

Straightness / ﬂatness ±2 µm typ.

Orthogonality ±96.963 µrad typ.

Velocity L-738.0 53111 / L-738.053112: 50

L-738.053132: 90

mm/s max.

Stages with DC motor L-738.053xxx Unit Tolerance

Mechanical properties

Drive screw type Ball screw

Drive screw pitch 2 mm

Guide type Recirculating ball bearing

Holding force, power off 20 N typ.

Push/pull force Fx, Fy power on 100 N max.

Load capacity 200 N max.

Permissible torque Mx in θX130 N·m max.

Permissible torque My in θY130 N·m max.

Permissible torque Mz in θZ90 N·m max.

Drive properties

Motor type DC motor

Operating voltage, nominal 24 V nom.

Operating voltage, max. 48 V max.

Stages with DC motor L-738.053111 L-738.053112 L-738.053132 Unit Tolerance

Positioning

Integrated sensor Incremental linear

encoder

Incremental linear

encoder

Incremental rotary

encoder

Sensor signal Sin/cos, 1 V peak-

peak, 20 µm signal

period

A/B quadrature,

TTL

A/B quadrature,

TTL

Design resolution 0.001 0.01 0.1 µm

Sensor resolution rotary encoder – – 20000 Cts./rev.

Minimum incremental motion 0.1 0.1 0.4 µm typ.

Unidirectional repeatability 0.1 0.1 0.4 µm typ.

Bidirectional repeatability ±0.5 ±0.5 ±2 µm typ.

Reference point switch repeatability <1 <1 <1 µm typ.

Reference and limit switches Optical Optical Optical

XY Stages

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154

Stages with stepper motor L-738.051100 / L-738.051111 / L-738.051112 Unit Tolerance

Motion

Active axes X, Y

Travel range 102 × 102 mm

Angular error xry (pitch) ±40 µrad typ.

Angular error xrz (yaw) ±20 µrad typ.

Angular error yrx (pitch) ±40 µrad typ.

Angular error yrz (yaw) ±20 µrad typ.

Straightness / ﬂatness ±2 µm typ.

Orthogonality ±96.963 µrad typ.

Velocity 35 mm/s max.

Stages with stepper motor L-738.051xxx Unit Tolerance

Mechanical properties

Drive screw type Ball screw

Drive screw pitch 2 mm

Guide type Recirculating ball bearing

Holding force, power off 60 N typ.

Push/pull force FX, FY power on 100 N max.

Load capacity 200 N max.

Permissible torque Mx in θX130 N·m max.

Permissible torque My in θY130 N·m max.

Permissible torque Mz in θZ90 N·m max.

Drive properties

Motor type Stepper motor, 2-phase

Operating voltage, nominal 24 V nom.

Operating voltage, max. 48 V max.

Step resolution 200 Full steps/

rev.

Stages with stepper motor L-738.051100 L-738.051111 L-738.051112 Unit Tolerance

Positioning

Integrated sensor – Incremental linear

encoder

Incremental linear

encoder

Sensor signal – Sin/cos, 1 V peak-

peak, 20 µm signal

period

A/B quadrature,

TTL

Design resolution 10.0 0.001 0.01 µm

Minimum incremental motion 0.2 0.05 0.05 µm typ.

Unidirectional repeatability 0.2 0.05 0.05 µm typ.

Bidirectional repeatability ±2 ±0.5 ±0.5 µm typ.

Reference point switch repeatability <1 <1 <1 µm typ.

Reference and limit switches Optical Optical Optical

Stages with DC motor L-738.053111 L-738.053112 / L-738.053132 Unit Tolerance

Miscellaneous

Operating temperature range 5 to 40 5 to 40 °C

Material Aluminum, black anodized Aluminum, black anodized

Mass 24 24 kg ±5 %

Moved mass in X, unloaded 14.6 14.6 kg ±5 %

Moved mass in Y, unloaded 5.8 5.8 kg ±5 %

Connection 2 × HD Sub-D 26 (m) (motor)

2 × Sub-D 15 (f) (sensor)

2 × HD Sub-D 26 (m)

(motor/sensor)

Recommended controllers / drivers SMC Hydra (double axis)

C-891 (single axis)

C-885 with C-891.10C885

(up to 20 axes)

ACS modular controller

C-863 (single axis)

C-884 (up to 6 axes)

C-885 with C-863.20C885

(to 40 axes)

ACS modular controller

MOTION | POSITIONING

155

All cables required for operation with the ordered controller are included in the scope of delivery.

The cable length is 3 m. Cable for connecting to other controllers can be ordered as accessory.

Ask about custom designs!

Stages with stepper motor L-738.051100 L-738.051111 L-738.051112 Unit Tolerance

Miscellaneous

Operating temperature range 5 to 40 5 to 40 5 to 40 °C

Material Aluminum,

black anodized

Aluminum, b

lack anodized

Aluminum,

black anodized

Mass 22 22 22 kg ±5 %

Moved mass in X, unloaded 13.8 13.8 13.8 kg ±5 %

Moved mass in Y, unloaded 5.8 5.8 5.8 kg ±5 %

Connection 2 × HD Sub-D

26 (m) (motor)

2 × HD Sub-D

26 (m) (motor)

2 × Sub-D

15 (f) (sensor)

2 × HD Sub-D

26 (m) (motor/

sensor)

Recommended controllers / drivers C-663.12

(single axis)

SMC Hydra

(double axis)

C-885 with

C-663.12C885

(up to 20 axes)

ACS modular

controller

SMC Hydra

(double axis)

ACS modular

controller

C-663.12

(single axis)

C-885 with

C-663.12C885

(up to 20 axes)

ACS modular

controller

L-738, dimensions in mm

XY Stages

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156

Clear Aperture, High Travel Accuracy and Stability, Magnetic Direct Drive

V-738 PIMag® High-Precision XY Stage

>> Incremental Encoder

>> PIMag® Magnetic Linear Motors

Technology Glossary ...................... page 290

V-738, dimensions in mm

Applications

n Automated Optical Inspection (AOI)

n Biotechnology

n Laser Cutting

n Laser Marking

n Medical Industry

n Metrology / Testing

n Scanning

n Travel range 102 mm × 102 mm (4”)

n Large aperture, 150 mm × 150 mm

n Unidirectional repeatability to 0.1 µm

n Velocity to 500 mm/s

n Ironless 3-phase linear motor

n Incremental linear encoder with 1 nm resolution

MOTION | POSITIONING

157

V-738.056111 Unit Tolerance

Motion and positioning

Travel range 102 × 102 mm

Integrated sensor Incremental linear encoder

Design resolution 0.001 µm

Sensor signal Sin/cos, 1 V peak-peak,

20 µm signal period

Minimum incremental motion 0.02 µm typ.

Unidirectional repeatability 0.1 µm typ.

Bidirectional repeatability ±0.25 µm typ.

Angular error xry (pitch) ±40 µrad typ.

Angular error xrz (yaw) ±20 µrad typ.

Angular error yrx (pitch) ±40 µrad typ.

Angular error yrz (yaw) ±20 µrad typ.

Straightness / ﬂatness ±2 µm typ.

Orthogonality ±96.963 µrad typ.

Velocity 500 mm/s max.

Acceleration in X, Y, without load 10 m/s² max.

Reference and limit switches Optical

Mechanical properties

Load capacity 100 N max.

Permissible torque in θX, θY130 N·m max.

Permissible torque in θZ90 N·m max.

Guide Recirculating ball bearing

Drive properties

Motor type Ironless 3-phase linear motor

Operating voltage, nominal 48 V nom.

Operating voltage, max. 48 V max.

Peak force 200 N max.

Nominal force 87 N typ.

Peak current, effective 15 A typ.

Nominal current, effective 4.4 A typ.

Motor constant 71 N/√W typ.

Electrical time constant 0.4 ms

Resistance phase-phase 3.6 Ω typ.

Inductance phase-phase 1.2 mH typ.

Back EMF phase-phase 16 V·s/m max.

Pole pitch N-N 30 mm

Miscellaneous

Operating temperature range 5 to 40 °C

Material Aluminum, black anodized

Moved mass in X, unloaded 16.8 kg ±5 %

Moved mass in Y, unloaded 8 kg ±5 %

Overall mass 24 kg ±5 %

Connection 2 × HD Sub-D 26 (m) (motor)

2 × Sub-D 15 (f) (sensor)

Recommended controller SMC Hydra (double axis)

C-891 (single axis)

C-885 with C-891.10C885 (up to 20 axes)

ACS modular controller

All cables required for operation with the ordered controller are included in the scope of delivery.

The cable length is 3 m. Cable for connecting to other controllers can be ordered as accessory.

Ask about custom designs!

XY Stages

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158

High-Performance, Compact XY Nanopositioning System

A-311 PIglide IS Planar Scanner with Air Bearing

n Ideal for scanning applications or

high-precision positioning

n Cleanroom compatible

n Travel ranges to 200 mm × 200 mm

n Load capacity to 147 N

n Low profile

n Resolution to 1 nm

n Optional granite base plates

>> Absolute Encoder

>> Incremental Encoder

>> PIglide Air Bearing Technology

>> PIMag® Magnetic Linear Motors

Technology Glossary ...................... page 290

Applications

n Electronics Manufacturing

n Laser Marking

n Scanning

n Scientific Instrumentation

n Semiconductor

A-311.xxx, dimensions in mm

A B C D E F

A-311.Dx x

A-311.A x x

A-311.Bxx

A-311.Cx x

300

350

400

450

232

282

332

382

100

150

200

250

275

325

375

425

100

105

MOTION | POSITIONING

159

A-311.Dxx A-311.Axx A-311.Bxx A-311.Cxx Unit Tolerance

Motion

Travel range 50 × 50 100 × 100 150 × 150 200 × 200 mm

Pitch (1) 20 30 40 50 µrad max.

Yaw (1) 510 15 20 µrad max.

Straightness (1) ±0.25 ±0.25 ±0.5 ±0.5 µm max.

Straightness per 10 mm

travel range (1)

±10 ±10 ±10 ±10 nm max.

Flatness (1) ±0.5 ±0.5 ±1 ±1 µm max.

Flatness per 10 mm travel

range (1)

±10 ±10 ±10 ±10 nm max.

XY orthogonality 25 25 25 25 µrad max.

Velocity, unloaded (2) 2 2 2 2 m/s max.

Acceleration of the upper axis,

unloaded (2)

27.5 27.5 27.5 27.5 m/s² max.

Acceleration of the lower axis,

unloaded (2)

15 13 11 10 m/s² max.

Mechanical properties

Load capacity in z (3) 147 147 147 147 N max.

Moved mass, upper axis 3 3 3 3 kg

Moved mass, lower axis 5.5 6.5 7. 5 8.5 kg

Overall mass 14.5 18.5 22.5 27.5 kg

A-311.xAx A-311.xBx A-311.xCx

Positioning

Integrated sensor Incremental linear encoder Absolute encoder Incremental linear encoder

Sensor signal Sin/cos, 1 V peak-peak,

20 µm signal period

BiSS-C A/B quadrature, TTL

Sensor resolution 1.2 nm (4) 1 nm 50 nm

Bidirectional repeatability ±0.05 µm (4) ±0.05 µm ±0.05 µm

Accuracy, uncompensated (5) A-311.Dxx: ±1 µm

A-311.Axx: ±1.5 µm

A-311.Bxx: ±2 µm

A-311.Cxx: ±2.5 µm

A-311.Axx: ±1.5 µm

A-311.Dxx: ±1 µm

A-311.Axx: ±1.5 µm

A-311.Bxx: ±2 µm

A-311.Cxx: ±2.5 µm

Accuracy, with error

compensation (5)

±0.5 µm ±0.5 µm ±0.5 µm

A-311 Unit Tolerance

Drive properties

Drive type Linear motor, ironless, 3-phase

Intermediate circuit voltage,

effective

48, nominal

80, max.

V DC

Peak force 85 N typ.

Nominal force 39 N typ.

Force constant, effective 12.3 N/A typ.

Resistance phase-phase 3.6 Ω

Inductivity phase-phase 1.24 mH

Back EMF phase-phase 10.1 V·s/m max.

Cabling External, movable drag chain

Miscellaneous

Operating pressure (6) 60 to 70 psi (415 to 485 kPa)

Air consumption <2 SCFM (56 SLPM)

Air quality see A-322 datasheet, next page

Materials Hardcoat aluminum, stainless steel fasteners

(1) Dependent on the flatness of the surface, on which the stage is mounted.

(2) Can be limited by the payload, controller or drive.

(3) Assumes payload CG is centered no more than 50 mm above the motion platform. The stage is designed for horizontal operation only.

(4) Assumes 16384x interpolation. Contact PI for the use of other factors.

(5) Improved accuracy can be obtained with controller-based error compensation. The stage must be ordered with a controller from PI to reach these values.

Accuracy values assume short-term duration and do not consider the long-term effects of thermal drift on the stage.

(6) To protect the stage against damage, it is recommended to connect an air pressure sensor to the Motion-Stop input of the controller.

All specifications apply per axis, if not otherwise described.

XY Stages

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160

XY Positioning System with 1 nm Resolution

A-322 PIglide HS Planar Scanner with Air Bearing

n Ideal for scanning applications or

high-precision positioning

n Cleanroom compatible

n Travel ranges to 500 mm × 1000 mm

n Load capacity to 245 N

n Resolution to 1 nm

n Velocity up to 2 m/s

>> Absolute Encoder

>> PIglide Air Bearing Technology

>> PIMag® Magnetic Linear Motors

Technology Glossary ...................... page 290

Applications

n Electronics Manufacturing

n Laser Cutting

n Scanning

n Scientific Instrumentation

n Semiconductor

A-322.xxx, dimensions in mm A B C D E F G H J

A-322.Axx

A-322.Bxx

A-322.Cxx

A-322.Dxx

960

1110

1610

960

1110

348

459

709

480

555

175

250

500

200

275

525

182

257

175

250

175

250

MOTION | POSITIONING

161

A-322

Drive properties

Drive type Linear motor, ironless, 3-phase, 1 × to bridge axis, 2 × to gantry axis

Intermediate circuit voltage,

effective

48, nominal

80, max.

VDC

Peak force # 298 N typ.

Nominal force # 87 N typ.

Force constant, effective # 19.9 N/A typ.

Resistance phase-phase # 3.6 Ω

Inductivity phase-phase # 1.2 mH

Back EMF phase-phase # 16 V·s/m max.

Cabling moved ribbon cable, cleanroom compatible

Motion and positioning

Operating pressure ## 80 psi (552 kPa)

Air consumption with

external vacuum supply

<2 SCFM (56 SLPM)

Air consumption with

internal vacuum supply

<3.2 SCFM (100 SLPM)

Vacuum 10.8 psi (74.7 kPa), <0.5 SCFM (14 SLPM)

Air quality Clean (ﬁltered to 1.0 µm or better) – ISO 8573-1

Class 1 Oil free – ISO 8573-1 Class 1

Dry (–15 °C dew point) – ISO 8573-1 Class 3

Materials Hardcoat aluminum and nickel-plated steel with stainless steel

mounting material, granite base

* Improved accuracy can be obtained with controller-based error compensation. Stage must be ordered with controller.

Accuracy values assume short-term time duration and do not consider the long-term effects of thermal drift on the stage.

** Unloaded. Can be limited by the insulating system payload, controller or drive.

*** Assumes payload CG is centered no more than 50 mm above the stage table.

# Specifications for the drive apply per motor. Two motors are located at the gantry axis.

## To protect the stage against damage, it is recommended to connect an air pressure sensor to the Motion-Stop input of the controller.

All specifications apply per axis, if not otherwise described.

A-322.Axx A-322.Bxx A-322.Cxx A-322.Dxx Unit Tolerance

Motion and positioning

Active axes X, Y X, Y X, Y X, Y

Travel range

(bridge axis × gantry axis)

350 × 350 350 × 500 500 × 500 500 × 1000 mm

Integrated sensors Absolute

Encoders

Absolute

Encoders

Absolute

Encoders

Absolute

Encoders

Sensor resolution 1 1 1 1 nm

Bidirectional repeatability ±0.08 ±0.08 ±0.08 ±0.08 µm max.

Accuracy* ±0.5 ±0.5 ±0.5 ±0.5 µm max.

Pitch 15 20 30 40 µrad max.

Yaw* 5 5 7 7 µrad max.

Straightness* ±0.5 ±0.5 ±1 ±1 µm max.

Straightness per

10 mm travel range*

±10 ±10 ±10 ±10 nm max.

Flatness ±0.5 ±1 ±1.5 ±2.5 µm max.

Flatness per 10 mm travel

range

±10 ±10 ±10 ±10 nm max.

XY orthogonality 25 25 25 25 µrad max.

Velocity** 2 2 2 2 m/s max.

Acceleration, bridge axis** 20 20 20 20 m/s² max.

Acceleration, gantry axis** 15 15 12 12 m/s² max.

Mechanical properties

Load capacity in Z*** 245 245 245 245 N max.

Moved mass, bridge axis 14 14 14 14 kg

Moved mass, gantry axis 40 40 43 43 kg

Overall mass 610 700 1075 1525 kg

Guide type Air bearings Air bearings Air bearings Air bearings

XY Stages

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162

Rotation Stages

MOTION | POSITIONING

163

Rotation Stages ....................................................................................................................................................................... 164

M-116 Precision Rotation Stage .................................................................................... 164

RS-40 Compact Rotation Stage ..................................................................................... 166

DT-34 Miniature Rotation Stage .................................................................................... 168

DT-80 Compact Rotation Stage ..................................................................................... 170

M-060 / M-061 / M-062 Precision Rotation Stage ........................................................... 172

L-611 Precision Rotation Stage ...................................................................................... 174

PRS-200 Precision Rotation Stage ................................................................................. 178

UPR-100 Ultraprecision Rotation Stage ......................................................................... 180

UPR-120 Ultraprecision Rotation Stage ......................................................................... 182

Rotation Stages with Torque Motor and Air Bearing ............................................................................................................. 184

UPR-120 Air Ultraprecision Rotation Stage with Air Bearing ......................................... 184

A-62x PIglide RM Rotation Stage with Air Bearings ...................................................... 186

A-63x PIglide RL Low-Profile Rotation Stage with Air Bearing ...................................... 190

Goniometer Stages .................................................................................................................................................................. 192

WT-85 Motorized Precision Goniometer ........................................................................ 192

WT-100 Motorized Precision Goniometer ...................................................................... 194

WT-90 Motorized Precision Goniometer ........................................................................ 196

WT-120 Motorized Precision Goniometer ...................................................................... 198

Rotation Stages

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164

Compact, for Multi-Axis Combinations with M-110

M-116 Precision Rotation Stage

n Compact Design

n Unlimited travel range

n Clear aperture for transmitted-light

applications

n Backlash-compensated worm drive

n Compact multi-axis combinations with M-110

n Noncontact reference point switch

>> Incremental Encoder

Technology Glossary ...................... page 290

Applications

n Automation

n Precision Micro Assembly

n Scientific Instrumentation

M-116, dimensions in mmDimensions of the M-116.AL1 lens adapter for 0.5” optic devices such as polarizers.

Dimensions in mm. Note that the decimal places are separated by a comma in the

drawings.

MOTION | POSITIONING

165

M-116.DG M-116.DGH Unit Tolerance

Active axes Rotation Rotation

Motion and positioning

Rotation range >360 >360 °

Integrated sensor Rotary encoder Rotary encoder

Sensor resolution 2048 2048 Cts./rev.

Design resolution 2.45 (0.00013) 3.16 (0.00018) µrad (°)

Minimum incremental motion 50 25 µrad

Backlash 1000 500 µrad

Unidirectional repeatability 12 10 µrad

Velocity 20 20 °/s max.

Mechanical properties

Worm gear ratio 44:1 44:1

Gear ratio 28.444:1 22.0335:1

Load capacity / axial force ±15 ±15 N

Max. torque (θX, θY) ±1.5 ±1.5 N·m max.

Max. torque clockwise (θZ) 0.4 0.4 N·m max.

Max. torque counterclockwise

(θZ)

0.8 0.8 N·m max.

Drive properties

Motor type DC gear motor DC gear motor

Operating voltage 0 to ±12 0 to ±12 V

Motor power 1.75 1.75 W

Reference point switch Optical Optical

Miscellaneous

Operating temperature range –20 to 65 –20 to 65 °C

Material Aluminum Aluminum

Mass 0.4 0.4 kg

Recommended controllers /

drivers

C-863

C-884

C-863

C-884

Ask about custom designs!

Rotation Stages

WWW.PI.WS

166

Precision Positioning

RS-40 Compact Rotation Stage

n Unlimited travel range

n Repeatability to 87 µrad

n 20 mm Ø aperture

n Reference point switch

>> Incremental Encoder

Technology Glossary ...................... page 290

Applications

n Automation

n Precision Micro Assembly

n Scientific Instrumentation

RS-40 rotation stage, DC motor,

dimensions in mm

RS-40 rotation stage, stepper motor,

dimensions in mm

RS-40 rotation stage, dimensions in mm

MOTION | POSITIONING

167

321691001-0000 321692001 Unit Tolerance

With DC motor With stepper motor

Active axes Rotation Rotation

Motion and positioning

Rotation range >360 >360 °

Design resolution 0.45 38 µrad

Sensor resolution rotary encoder 2048 – Cts./rev.

Minimum incremental motion 87 87 µrad typ.

Unidirectional repeatability 87 87 µrad typ.

Bidirectional repeatability ±700 ±700 µrad typ.

Angular velocity 7 5 °/s max.

Eccentricity ±5 ±5 µm typ.

Flatness ±5 ±5 µm typ.

Wobble ±35 ±35 µrad typ.

Mechanical properties

Bearing Ball bearings Ball bearings

Gear ratio 76:1 76:1

Worm gear ratio 90:1 90:1

Load capacity / axial force 20 20 N max.

Permissible lateral force 5 5 N max.

Holding torque in θZ, power off 0.20 0.20 N·m typ.

Permissible torque Mx in θX, θY2 2 N·m max.

Torque MZ in θZ, power on 0.2 0.2 N·m max.

Moment of inertia 0.0155 0.0155 kg·mm² ±20 %

Drive properties

Motor type DC motor 2-phase stepper motor

Operating voltage, nominal 12 24 V nom.

Operating voltage, max. 24 24 V max.

Nominal current, effective 0.04 – A typ.

Peak current, effective 0.16 – A typ.

Torque constant, effective 0.00826 – N·m/A typ.

Electrical time constant 35 – ms

Resistance phase-phase 60 12.5 Ω typ.

Inductance phase-phase 0.4 6.3 mH typ.

Back EMF phase-phase – 4.4 V/kRPM max.

Reference point switch Hall effect Hall effect

Miscellaneous

Operating temperature range 5 to 40 5 to 40 °C

Material Aluminum Aluminum

Mass 0.4 0.4 kg

Moved mass 0.088 0.088 kg

MTBF 10000 10000 h

Connection Sub-D 15 (m) HD Sub-D 15 (m)

Recommended controllers /

drivers

C-863 (single axis)

C-884 (up to 6 axes)

C-885 with C-863.20C885

(to 40 axes)

ACS modular controller

C-663.12 (single axis)

SMC Hydra (double axis)

C-885 with C-663.12C885

(up to 20 axes)

ACS modular controller

Connecting cables for motor and sensor are not in the scope of delivery and must be ordered separately.

Ask about custom designs!

Direction of the axes and

torques for rotation stages

Rotation Stages

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168

Compact Dimensions, with DC or Stepper Motor

DT-34 Miniature Rotation Stage

n Clear aperture, 10 mm Ø

n Compact design

n Unidirectional repeatability to 350 µrad

n Angular velocity to 675 °/s

n Integrated optical reference point switch

>> Incremental Encoder

Technology Glossary ...................... page 290

Applications

n Automation

n Precision Micro Assembly

n Scientific Instrumentation

DT-34 with DC motor,

dimensions in mm

DT-34 with stepper motor,

dimensions in mm

MOTION | POSITIONING

169

3215910030 3215920030-0000 Unit Tolerance

With DC motor With stepper motor

Active axes θZθZ

Motion and positioning

Rotation range 360 360 °

Design resolution 69.62 1724.8 µrad

Integrated sensor Rotary encoder –

Sensor resolution rotary encoder 2048 – Cts./rev.

Minimum incremental motion 700 350 µrad typ.

Unidirectional repeatability 700 350 µrad typ.

Bidirectional repeatability ±1400 ±1000 µrad typ.

Angular velocity 675 195 °/s max.

Eccentricity ±50 ±50 µm typ.

Flatness ±8 ±8 µm typ.

Wobble ±100 ±100 µrad typ.

Reference point switch Optical Optical

Mechanical properties

Bearing Ball bearings Ball bearings

Worm gear ratio 24986:567 774566:5103

Load capacity / axial force FZ15 15 N max.

Permissible lateral force FX, FY2.5 2.5 N max.

Permissible torque Mx in θX, θY2.5 2.5 N·m max.

Drive properties

Drive torque 0.9 0.3 N·m max.

Motor type DC motor 2-phase stepper motor

Operating voltage, nominal 12 12 V nom.

Operating voltage, max. 48 48 V max.

Step resolution – 24 Full steps/

rev.

Miscellaneous

Operating temperature range 5 to 40 5 to 40 °C

Material Aluminum, black anodized Aluminum, black anodized

Mass 0.15 0.15 kg ±5 %

Moved mass 0.1 0.1 kg ±5 %

Connection Sub-D 15 (m) Sub-D 15 (m)

Recommended controllers /

drivers

C-863 (single axis)

C-884 (up to 6 axes)

C-885 with C-863.20C885

(to 40 axes)

ACS modular controller

C-663.12 (single axis)

SMC Hydra (double axis)

C-885 with C-663.12C885

(up to 20 axes)

ACS modular controller

Connecting cables for motor and sensor are not in the scope of delivery and must be ordered separately.

Ask about custom designs!

Rotation Stages

WWW.PI.WS

170

Large clear aperture

DT-80 Compact Rotation Stage

n Unlimited travel range

n Repeatability to 175 µrad

n Maximum velocity 40°/s

n Reference point switch

DT-80 rotation stage, dimensions in mm

>> Incremental Encoder

Technology Glossary ...................... page 290

Applications

n Automation

n Precision Micro Assembly

n Scientific Instrumentation

DT-80 rotation stage, DC motor,

dimensions in mm

RS-80 rotation stage, stepper motor,

dimensions in mm

Direction of the

axes and torques for

rotation stages

MOTION | POSITIONING

171

64439100 64439200 Unit Tolerance

With DC motor With stepper motor*

Active axes θZθZ

Motion and positioning

Rotation range >360 >360 °

Design resolution 17.453 174.53 µrad

Integrated sensor Rotary encoder –

Sensor resolution rotary encoder 2000 – Cts./rev.

Minimum incremental motion 69.8 69.8 µrad typ.

Unidirectional repeatability 175 175 µrad typ.

Bidirectional repeatability ±3491 ±3491 µrad typ.

Angular velocity 40 30 °/s max.

Eccentricity ±30 ±30 µm typ.

Flatness ±30 ±30 µm typ.

Wobble ±100 ±100 µrad typ.

Mechanical properties

Worm gear ratio 180:1 180:1

Load capacity / axial force 20 20 N max.

Permissible lateral force 10 10 N max.

Permissible torque Mx in θX, θY5 5 N·m max.

Drive properties

Drive torque 0.1 0.1 N·m max.

Guide type Ball bearings Ball bearings

Motor type DC motor 2-phase stepper motor

Operating voltage, nominal 24 24 V nom.

Operating voltage, max. 48 48 V max.

Reference point switch mechanical mechanical

Miscellaneous

Operating temperature range 5 to 40 5 to 40 °C

Material Aluminum, black anodized,

red bronze

Aluminum, black anodized,

red bronze

Mass 0.8 0.8 kg ±5 %

Moved mass, unloaded 0.3 0.3 kg ±5 %

Connection HD Sub-D 15 (m) HD Sub-D 15 (m)

Recommended controllers /

drivers

C-863 (single axis)

C-884 (up to 6 axes)

C-885 with C-863.20C885

(to 40 axes)

ACS modular controller

C-663.12 (single axis)

SMC Hydra (double axis)

C-885 with C-663.12C885

(up to 20 axes)

ACS modular controller

* Max. 1.7 A/phase; 200 full step/rev.

Connecting cables for motor and sensor are not in the scope of delivery and must be ordered separately.

Ask about custom designs!

Rotation Stages

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172

Unlimited Travel Range

>> ActiveDrive

>> Incremental Encoder

Technology Glossary ...................... page 290

Applications

n Optical Alignment

n Precision Micro Assembly

n Scientific Instrumentation

M-060 / M-061 / M-062

Precision Rotation Stage

DIMENSIONS M-060.PD M-060.DG M-061.PD M-061.DG M-062.PD M-062.DG

12,5

80,8

59,3

12,5

83,8

130

110

100

80,8

59,3

4,5

130

110

100

83,8

4,5

150

21,5

130

120

110

80,8

59,3

–

150

21,5

130

120

110

83,8

–

n Unlimited travel range

n Very high resolution

n Max. velocity 90°/s

n Backlash-compensated worm drive

n ActiveDrive or DC motor

n Direction-sensing reference point switch

M-06x, dimensions in mm

MOTION | POSITIONING

173

M-060.PD /

M-061.PD /

M-062.PD

M-060.DG /

M-061.DG /

M-062.DG

Unit Tolerance

Active axes Rotation Rotation

Motion and positioning

Rotation range >360 >360 °

Integrated sensor Rotary encoder Rotary encoder

Sensor resolution 4000 2000 Cts./rev.

Design resolution 32 (0.0018) /

17.5 (0.001) /

15 (0.0008)

2.1 (0.00012) /

1.2 (6.9 × 10–5) /

0.96 (5.5 × 10–5)

µrad (°)

Minimum incremental motion 32 / 17.5 / 15 6.3 / 6 / 5 µrad

Backlash 200 / 200 / 240 200 / 200 / 240 µrad

Unidirectional repeatability 50 / 50 / 60 50 / 50 / 60 µrad

Velocity 90 16 / 9 / 7.5 °/s max.

Mechanical properties

Worm gear ratio 50:1 / 90:1 / 110:1 50:1 / 90:1 / 110:1

Gear ratio – (28/12)4:1

Load capacity / axial force ±500 / ±550 / ±650 ±500 / ±550 / ±650 N

Max. torque θX, θY±6 / ±6 / ±7 ±6 / ±6 / ±7 N·m max.

Max. torque θZ±4 / ±6 / ±8 ±4 / ±6 / ±8 N·m max.

Drive properties

Motor type DC motor, ActiveDrive DC gear motor

Operating voltage 24 0 to ±12 V

Motor power 30 3 W

Reference point switch Hall effect Hall effect

Miscellaneous

Operating temperature range –10 to 40 –10 to 40 °C

Material Aluminum Aluminum

Mass 0.94 / 1.88 / 2.76 0.94 / 1.88 / 2.76 kg

Recommended controllers /

drivers

C-863 (single axis)

C-884 (up to 6 axes)

C-863 (single axis)

C-884 (up to 6 axes)

Rotation Stages

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174

High Travel Accuracy

L-611 Precision Rotation Stage

n Unlimited travel range

n Very high resolution

n Maximum velocity 200°/s

n Optional angle measuring system for

direct position measurement

n ActiveDrive DC, DC, BLDC, and stepper motors

n Direction-sensing reference point switch

>> ActiveDrive

>> Incremental Encoder

>> Vacuum-Compatible Versions

Technology Glossary ...................... page 290

Applications

n Medical Industry

n Metrology / Testing

n Photonics

n Precision Micro Assembly

n Sample Inspection

Direction of the axes and

torques for rotation stages

MOTION | POSITIONING

175

L-611 Unit Tolerance

Motion

Active axes θZ

Rotation range >360 °

Wobble ±15 µrad

Flatness ±1 µm

Eccentricity ±2.5 µm

Angular velocity L-611.xxSD: 50

L-611.xxAD: 200

L-611.99xxxx: 200

°/s max.

L-611 Unit Tolerance

Mechanical properties

Bearing Ball bearings

Worm gear ratio 90:1

Load capacity / axial force 100 N max.

Permissible lateral force 50 N max.

Permissible torque Mx

in θX, θY

40 N·m max.

Permissible torque Mz

in θz

3 N·m max.

Moment of inertia 770 kg·mm² ±20 %

L-611.9ASD

L-611.993261

L-611.94AD L-611.90AD

L-611.xxx232

L-611.90SD Unit Tolerance

Positioning

Integrated sensor Incremental angle

measuring system

Incremental angle

measuring system

Rotary

encoder

–

Sensor signal Sin/cos,

1 V peak-peak

A/B quadrature,

TTL

A/B quadra-

ture, TTL

–

Sensor resolution

rotary encoder

––20000 – Cts./rev.

Sensor resolution angle

measuring system

9000 9000 – – Lines/

revolution

Design resolution 0.174 3.49 3.49 349 µrad

Minimum incremental

motion

L-611.9ASD: 0.87

L-611.993261: 3.5

17.45 35 8.72 µrad typ.

Unidirectional

repeatability

L-611.9ASD: 0.87

L-611.993261: 3.5

17.45 35 20 µrad typ.

Bidirectional repeatability ±3.5 ±17.45 ±175 ±175 µrad typ.

Reference point switch Hall effect Hall effect Hall effect Hall effect

Reference point switch

repeatability

<2 <2 <2 <2 µm typ.

Rotation Stages

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176

L-611.xxSD L-611.xxAD L-611.xx3xxx L-611.xx5xxx Unit Tolerance

Drive properties

Motor type 2-phase stepper

motor *

DC motor with

PWM control

DC motor BLDC motor

Operating voltage,

nominal

24 24 24 24 V nom.

Operating voltage, max. 48 24 48 48 V max.

Motor resolution 200 – – – Full steps/

rev.

L-611.9xSD L-611.xxAD L-611.993xxx L-611.995232 Unit Tolerance

Miscellaneous

Operating temperature

range

5 to 40 5 to 40 5 to 40 5 to 40 °C

Material Aluminum,

black anodized,

stainless steel,

red bronze

Aluminum,

black anodized,

stainless steel,

red bronze

Aluminum,

black anodized,

stainless steel,

red bronze

Aluminum,

black anodized,

stainless steel,

red bronze

Mass 2.6 2.6 2.6 2.6 kg ±5 %

Moved mass 1.1 1.1 1.1 1.1 kg ±5 %

Connection HD Sub-D 26 (m)

L-611.9ASD

additional

Sub-D 9 (m)

(sensor)

Sub-D 15 (m) HD Sub-D 26 (m)

L-611.993261

additional

Sub-D 9 (m)

(sensor)

HD Sub-D 26 (m)

Recommended

controllers / drivers

C-663.12

(single axis)

SMC Hydra

(double axis)

C-885 with

C-663.12C885

(up to 20 axes)

ACS modular

controller

C-863

(single axis)

C-884

(up to 6 axes)

C-885 with

C-863.20C885

(to 40 axes)

ACS modular

controller

C-863

(single axis)

C-884

(up to 6 axes)

C-885 with

C-863.20C885

(to 40 axes)

ACS modular

controller

C-891

(single axis)

C-885 with

C-891.10C885

(up to 20 axes)

ACS modular

controller

* Max. 1.2 A/phase

All cables required for operation with the recommended controller are included in the scope of delivery.

The cable length is 3 m. Cable for connecting to other controllers can be ordered as accessory.

Ask about custom designs!

MOTION | POSITIONING

177

L-611 with stepper motor, dimensions in mm

L-611 with ActiveDrive, DC, and BLDC motor,

dimensions in mm

Rotation Stages

WWW.PI.WS

178

Large Aperture, High Travel Accuracy

n Unlimited travel range

n Repeatability to 0.5 µrad

n Load capacity to 50 kg

n Option: Direct position measurement

with angle measuring system

PRS-200 precision rotation stage, dimensions in mm

PRS-200 Precision Rotation Stage

>> Incremental Encoder

>> Vacuum-Compatible Versions

Technology Glossary ...................... page 290

Applications

n Medical Industry

n Metrology / Testing

n Photonics

n Precision Micro Assembly

n Sample Inspection

PRS-200 precision rotation stage,

connection for angle measuring system

PRS-200 precision rotation stage,

DC motor, dimensions in mm

Direction of the

axes and torques

fo rotation stages

PRS-200 precision rotation stage,

stepper motor, dimensions in mm

MOTION | POSITIONING

179

6449911011 6449921011 6449921111 Unit Tolerance

With DC motor With stepper motor With stepper motor

and angle measuring

system

Active axes θZθZθZ

Motion and positioning

Rotation range >360 >360 >360 °

Integrated sensor Rotary encoder Incremental angle

measuring system

Sensor signal A/B quadrature,

RS-422

– Sin/cos,

1 V peak-peak

Sensor resolution rotary encoder 20000 – – Cts./rev.

Sensor resolution angle

measuring system

– – 23600 Lines/

revolution

Design resolution 1.75 175.00 0.017 µrad

Minimum incremental motion 8.72 8.72 0.50 µrad typ.

Unidirectional repeatability 17.44 17.44 0.5 µrad typ.

Bidirectional repeatability ±175 ±175 ±5 µrad typ.

Wobble ±17.5 ±17.5 ±17.5 µrad typ.

Flatness ±1 ±1 ±1 µm typ.

Eccentricity ±2.5 ±2.5 ±2.5 µm typ.

Angular velocity 75 35 35 °/s max.

Mechanical properties

Bearing Crossed roller

bearings

Crossed roller

bearings

Crossed roller

bearings

Torque, power on 4 4 4 N·m max.

Worm gear ratio 180:1 180:1 180:1

Load capacity / axial force 500 500 500 N max.

Permissible lateral force 200 200 200 N max.

Permissible torque in θX, θY60 60 60 N·m max.

Permissible torque in θZ4 4 4 N·m max.

Drive properties

Motor type DC motor 2-phase stepper

motor

2-phase stepper

motor

Operating voltage, nominal 24 48 48 V nom.

Operating voltage, max. 48 48 48 V max.

Limit switches 2 × Hall effect 2 × Hall effect 2 × Hall effect

Miscellaneous

Operating temperature range 5 to 40 5 to 40 5 to 40 °C

Material Aluminum, black

anodized, stainless

steel, red bronze

Aluminum, black

anodized, stainless

steel, red bronze

Aluminum, black

anodized, stainless

steel, red bronze

Mass 8 8 8.7 kg ±5 %

Moved mass, unloaded 4.3 4.3 4.7 kg ±5 %

Connection Sub-D 7W2 (m)

(motor)

M23 12-pin (m)

(sensor)

Sub-D 15 (m) Sub-D 15 (m)

(motor)

HD Sub-D 26 (m)

(sensor)

Recommended controllers /

drivers

C-863 (single axis)

with C-863.AD12

line driver

C-884 (to 6 axes)

with C-863.AD12

line driver

C-885 with

C-863.20C885

(to 40 axes)

and C-863.AD12

line driver

ACS modular

controller

C-663.12 (single axis)

SMC Hydra

(double axis)

C-885 with

C-663.12C885

(up to 20 axes)

ACS modular

controller

C-663.12 (single axis)

SMC Hydra

(double axis)

C-885 with

C-663.12C885

(up to 20 axes)

ACS modular

controller

Connecting cables for motor and sensor are not in the scope of delivery and must be ordered separately.

Ask about custom designs!

Rotation Stages

WWW.PI.WS

180

High Dynamics due to Magnetic Drive, High Stability

n Unlimited travel range

n Velocity to 360 °/s

n Repeatability to 1.4 µrad

n Clear aperture with 20 mm diameter

n Direct drive

UPR-100 ultraprecision rotation stage, dimensions in mm

UPR-100 Ultraprecision Rotation Stage

>> Incremental Encoder

>> Torque Motor

Technology Glossary ...................... page 290

Applications

n Automation

n Biotechnology

n Medical Industry

n Metrology / Testing

n Precision Micro Assembly

n Sample Inspection

n Scientific Instrumentation

n Semiconductor

Directions of the axes and torques

for rotation stages

MOTION | POSITIONING

181

680591111 Unit Tolerance

Motion and positioning

Active axes θZ

Travel range >360 °

Integrated sensor Incremental angle

measuring system

Sensor signal Sin/cos, 1 V peak-peak

Sensor resolution 15744 Lines/

revolution

Minimum incremental motion 1.4 µrad typ.

Unidirectional repeatability 1. 4 µrad typ.

Bidirectional repeatability ±1.75 µrad typ.

Flatness ±2.5 µm typ.

Eccentricity ±3.5 µm typ.

Wobble ±25 µrad typ.

Angular velocity 360 °/s max.

Reference point switch Encoder index

Mechanical properties

Bearing Crossed roller bearings

Torque, power on 0.25 N·m

Load capacity / axial force 20 N max.

Permissible lateral force 15 N max.

Permissible torque in θX, θY5 N·m max.

Drive properties

Drive type Ironless 3-phase torque motor

Intermediate circuit voltage 48 V DC max.

Nominal current, effective 1.2 A typ.

Peak current, effective 3.8 A typ.

Torque constant, effective 0.13 N·m/A typ.

Motor constant 0.04 N·m/√W typ.

Electrical time constant 0.1 ms

Resistance phase-phase 6.6 Ω typ.

Inductance phase-phase 0.7 mH typ.

Back EMF phase-phase 0.67 V/kRPM max.

Number of pole pairs 14

Miscellaneous

Operating temperature range 5 to 40 °C

MTBF 20000 h

Material Aluminum, black anodized

Mass 1.2 kg ±5 %

Moved mass 0.4 kg ±5 %

Connection Sub-D 17W2 (motor)

HD Sub-D 26 (m) (sensor)

Recommended controller SMC Hydra (double axis)

C-891 (single axis)

C-885 with C-891.10C885

(up to 20 axes)

ACS modular controller

Connecting cables for motor and sensor are not in the scope of delivery and must be ordered separately.

Ask about custom designs!

Rotation Stages

WWW.PI.WS

182

Excellent Stability and Travel Accuracy

n Unlimited travel range

n Velocity to 360 °/s

n Incremental angle measuring system

with 0.017 µrad resolution

n Clear aperture with 35 mm diameter

n Cleanroom compatible

n Direct drive

UPR-120, dimensions in mm

UPR-120 Ultraprecision Rotation Stage

Directions of the axes and torques

for rotation stages

>> Incremental Encoder

>> Torque Motor

Technology Glossary ...................... page 290

Applications

n Biotechnology

n Automation

n Medical Industry

n Metrology / Testing

n Precision Micro Assembly

n Sample Inspection

n Scientific Instrumentation

n Semiconductor

MOTION | POSITIONING

183

6808911130 Unit Tolerance

Motion and positioning

Active axes θZ

Travel range >360 °

Integrated sensor Incremental angle-measuring

system

Sensor signal Sin/cos, 1 V peak-peak

Sensor resolution 15744 Lines/

revolution

Minimum incremental motion 1.4 µrad typ.

Unidirectional repeatability 1. 4 µrad typ.

Bidirectional repeatability ±1.4 µrad typ.

Flatness ±1 µm typ.

Eccentricity ±3 µm typ.

Wobble ±25 µrad typ.

Angular velocity 360 °/s max.

Reference point switch Encoder index

Limit switches Optical

Mechanical properties

Bearing Crossed roller bearings

Torque, power on 0.5 N·m

Load capacity / axial force 200 N max.

Permissible lateral force 100 N max.

Drive properties

Drive type Iron-core 2-phase torque motor

Intermediate circuit voltage 48 V DC max.

Nominal current, effective 7. 7 A typ.

Torque constant, effective 0.26 N·m/A typ.

Resistance phase-phase 2.2 Ω typ.

Inductance phase-phase 1.17 mH typ.

Back EMF phase-phase 0.18 V·s/rad max.

Miscellaneous

Operating temperature range 5 to 40 °C

Material Aluminum, black anodized

MTBF 20000 h

Mass 6 kg ±5 %

Moved mass 0.8 kg ±5 %

Connection Sub-D 9W4 (m) (motor)

Sub-D 15 (m) (sensor)

Recommended controller SMC Hydra (double axis)

C-891 (single axis)

C-885 with C-891.10C885

(up to 20 axes)

ACS modular controller

Connecting cables for motor and sensor are not in the scope of delivery and must be ordered separately.

Ask about custom designs!

Rotation Stages

WWW.PI.WS

184

Excellent Stability and Travel Accuracy

n Unlimited travel range

n Velocity to 360 °/s

n Incremental angle measuring system

with 0.017 µrad resolution

n Clear aperture with 35 mm diameter

n Air bearings for optimized flatness

n Cleanroom compatible

n Direct drive

UPR-120, dimensions in mm

UPR-120 Air Ultraprecision

Rotation Stage with Air Bearing

Directions of the axes and torques

for rotation stages

>> Air Bearing

>> Incremental Encoder

>> Torque Motor

Technology Glossary ...................... page 290

Applications

n Biotechnology

n Automation

n Medical Industry

n Metrology / Testing

n Precision Micro Assembly

n Sample Inspection

n Scientific Instrumentation

n Semiconductor

MOTION | POSITIONING

185

6824911130 Unit Tolerance

Motion and positioning

Active axes θZ

Travel range >360 °

Integrated sensor Incremental angle-measuring

system

Sensor signal Sin/cos, 1 V peak-peak

Sensor resolution 15744 Lines/

revolution

Minimum incremental motion 0.35 µrad typ.

Unidirectional repeatability 0.7 µrad typ.

Bidirectional repeatability ±0.7 µrad typ.

Flatness ±0.05 µm typ.

Eccentricity ±0.1 µm typ.

Wobble ±1.25 µrad typ.

Angular velocity 360 °/s max.

Reference point switch Encoder index

Limit switches Optical

Mechanical properties

Bearing Air bearing

Torque, power on 0.7 N·m

Load capacity / axial force 200 N max.

Permissible lateral force 40 N max.

Drive properties

Drive type Iron-core 2-phase torque motor

Intermediate circuit voltage 48 V DC max.

Nominal current, effective 7. 7 A typ.

Torque constant, effective 0.26 N·m/A typ.

Resistance phase-phase 2.2 Ω typ.

Inductance phase-phase 1.17 mH typ.

Back EMF phase-phase 0.18 V·s/rad max.

Miscellaneous

Operating temperature range 5 to 40 °C

Material Aluminum, black anodized

MTBF 20000 h

Mass 6.5 kg ±5 %

Moved mass 1. 1 kg ±5 %

Connection Sub-D 9W4 (m) (motor)

Sub-D 15 (m) (sensor)

Recommended controller SMC Hydra (double axis)

C-891 (single axis)

C-885 with C-891.10C885

(up to 20 axes)

ACS modular controller

Connecting cables for motor and sensor are not in the scope of delivery and must be ordered separately.

Ask about custom designs!

Rotation Stages

WWW.PI.WS

186

Friction-Free, Ideal for Indexing, Positioning, Scanning, Measuring Technology

n Cleanroom compatible

n  Motion platform diameter from 50 mm to 300 mm

n Load capacity to 4170 N

n Eccentricity and flatness <200 nm

n Can be mounted vertically or horizontally

>> Absolute Encoder

>> Incremental Encoder

>> PIglide Air Bearing Technology

>> Torque Motor

Technology Glossary ...................... page 290

Applications

n Metrology / Testing

n Optical Alignment

n Sample Inspection

n Scanning

n Scientific Instrumentation

A-62x PIglide RM Rotation Stage

with Air Bearings

A-627.075xx, dimensions in mm

MOTION | POSITIONING

187

A-621.025 A-623.025 A-623.050 A-624.050 A-627.075 Unit Tolerance

Motion

Travel range unlimited,

>360°

unlimited,

>360°

unlimited,

>360°

unlimited,

>360°

unlimited,

>360°

Motion platform diameter 50 100 100 150 300 mm

Journal length 25 25 50 50 75 mm

Eccentricity (1) 300 175 175 100 75 nm max.

Flatness 100 75 75 50 40 nm max.

Wobble 5 3 3 2 1 µrad max.

Mechanical properties

Load capacity, axial 134 536 536 1206 4244 N max.

Load capacity, radial 57 11 5 229 344 1203 N max.

Load torque MX,Y 0.57 1.7 4.52 22.6 141.3 N·m max.

Axial stiffness 26 96 96 210 788 N/µm

Radial stiffness 8 18 35 64 204 N/µm

Moment of inertia 125 1485 1530 8790 210850 kg·mm²

Moved mass 0.4 1.2 1.4 3.2 21.5 kg

Overall mass 1. 2 3.1 4.5 8.6 50 kg

Guide type Air bearing Air bearing Air bearing Air bearing Air bearing

Drive properties

Drive type Torque

motor,

3-phase,

brushless,

ironless,

slotless

Torque

motor,

3-phase,

brushless,

ironless,

slotless

Torque

motor,

3-phase,

brushless,

ironless,

slotless

Torque

motor,

3-phase,

brushless,

ironless,

slotless

Torque

motor,

3-phase,

brushless,

ironless,

slotless

Intermediate circuit

voltage, effective

48, nominal

80, max.

48, nominal

80, max.

48, nominal

80, max.

48, nominal

80, max.

48, nominal

80, max.

V DC

Peak torque 0.21 2.1 2.1 4.71 8.46 N·m typ.

Nominal torque 0.07 0.7 0.7 1.57 2.82 N·m typ.

Force constant, effective 0.03 0.26 0.26 0.59 0.61 N·m/A typ.

Resistance phase-phase 2.7 4.2 4.2 6.7 4.5 Ω

Inductance phase-phase 0.1 0.4 0.4 0.9 0.6 mH

Back EMF phase-phase 4.1 31.8 31.8 71 74 V/kRPM max.

A-62x.xxxAx A-62x.xxxBx A-62x.xxxCx

Positioning

Integrated sensor Incremental angle measuring

system

Absolute-measuring angle

measuring system

Incremental angle measuring

system

Sensor signal Sin/cos, 1 V peak-peak BiSS-C A/B quadrature, TTL

Lines/revolution A-621: 8192

A-623: 15744

A-624: 23600

A-627: 47200

– A-621: 8192

A-623: 15744

A-624: 23600

A-627: 47200

Velocity (2) A-621: 2500 RPM max.

A-623: 1200 RPM max.

A-624: 600 RPM max.

A-627: 500 RPM max.

A-621: 2500 RPM max.

A-623: 1200 RPM max.

A-624: 600 RPM max.

A-627: 500 RPM max.

A-621: 550 RPM max. (3)

A-623: 300 RPM max. (3)

A-624: 175 RPM max. (3)

A-627: 75 RPM max. (3)

Sensor resolution A-621: 0.047 µrad (4)

A-623: 0.024 µrad (4)

A-624: 0.016 µrad (4)

A-627: 0.008 µrad (4)

A-621: 0.0015 µrad

A-623: 0.0015 µrad

A-624: 0.0015 µrad

A-627: 0.0015 µrad

A-621: 1.94 µrad (5)

A-623: 1.02 µrad (5)

A-624: 0.68 µrad (5)

A-627: 0.33 µrad (5)

Bidirectional repeatability ±4 µrad ±4 µrad ±4 µrad

Accuracy, with error

compensation (6)

±8 µrad ±8 µrad ±8 µrad

Reference point switch 1 / revolution, differential

pulse over one sensor signal

period, 1 V peak-peak

– 1 / revolution, one count

over one step of the encoder,

synchronized to output signal

Rotation Stages

WWW.PI.WS

188

A-62x

Miscellaneous

Operating pressure (7) 75 to 85 psi (515 to 585 kPa)

Air consumption <2 SCFM (56 SLPM)

Air quality Clean (ﬁltered to 1.0 µm or better) – ISO 8573-1 Class 1

Oil free – ISO 8573-1 Class 1

Dry (–15 °C dew point) – ISO 8573-1 Class 3

Materials (8) Hardcoat aluminum, stainless steel fasteners

(1) Dependent on the quality of the underlying surface, the payload, orientation, and forces that act on the stage from the outside. Please

contact PI for application-specific parameters. The specified values are static (no rotary motion during measuring) and without load.

(2) Can be limited by imbalance of the payload or the controller and the drive.

(3) Assumes a sampling rate of 50 MHz.

(4) Assumes 16384x interpolation. Contact PI for the use of other factors.

(5) Uses 400x interpolation. Alternative digital encoder resolutions on request. Please contact PI for a quote.

(6) The specified values are based on error compensation controlled by the controller. The stage must be ordered with a controller from PI to

reach these values. Accuracy values assume short-term duration and do not consider the long-term effects of thermal drift on the stage.

(7) To protect the stage against damage, it is recommended to connect an air pressure sensor to the Motion-Stop input of the controller.

(8) Customer-specific materials such as rust-free steel on request. Please contact PI for a quote.

A-621.025xx, dimensions in mm

MOTION | POSITIONING

189

A-623.xxxxx, dimensions in mm

A-623.025xx: A=75 mm; B=90 mm

A-623.050xx: A=100 mm; B=115 mm

A-624.050xx, dimensions in mm

Rotation Stages

WWW.PI.WS

190

Friction-Free, Motorized

n 200 mm or 300 mm motion platform diameter

n Low profile, 60 mm

n Eccentricity and flatness <100 nm

n Option for self-locking at rest by magnetic preload

n Direct Drive

>> Absolute Encoder

>> Incremental Encoder

>> PIglide Air Bearing Technology

>> Torque Motor

Technology Glossary ...................... page 290

Applications

n Metrology / Testing

n Optical Alignment

n Sample Inspection

n Scanning

n Scientific Instrumentation

n Semiconductor

A-63x PIglide RL Low-Proﬁle

Rotation Stage with Air Bearing

A-635.x100 , dimensions in mm

Drawing for A-637.x100

available on www.pi.ws

MOTION | POSITIONING

191

A-635 A-637 Unit Tolerance

Motion

Travel range unlimited,

>360°

unlimited,

>360°

Motion platform diameter 200 300 mm

Eccentricity (1) 100 100 nm max.

Flatness (1) 50 50 nm max.

Wobble (1) 2 1 µrad max.

Mechanical properties

Load capacity, axial (2) 200 500 N max.

Load capacity, radial (2) 50 200 N max.

Load torque, MX,Y (2) 510 N·m max.

Moment of inertia 25820 72000 kg·mm²

Moved mass 4.2 6.4 kg

Overall mass 7. 5 14 kg

Guide type Air bearing, magnetic preload Air bearing, magnetic preload

A-63x.A100 A-63x.B100

Positioning

Integrated sensor Incremental angle-measuring system Absolute angle-measuring system

Sensor signal Sin/cos, 1 V peak-peak BiSS-C

Lines/revolution A-635: 31488

A-637: 47200

–

Velocity (3) A-635: 500 rpm max.

A-637: 500 rpm max.

A-635: 500 rpm max.

A-637: 500 rpm max.

Sensor resolution A-635: 0.05 µrad (4)

A-637: 0.03 µrad (4)

A-635: 0.0015 µrad

A-637: 0.0015 µrad

Bidirectional repeatability ±2 µrad ±2 µrad

Accuracy, with error

compensation (5)

±6 µrad ±6 µrad

Reference point switch 1 / revolution, differential pulse over one

sensor signal period, 1 V peak-peak

–

A-63x Unit Tolerance

Drive properties

Drive type Torque motor, 3-phase, brushless, ironless, slotless

Intermediate circuit voltage,

effective

48, nominal

80, max.

V DC

Peak torque 9 N·m typ.

Nominal torque 3 N·m typ.

Torque constant, effective 0.66 N·m/A typ.

Resistance phase-phase 4.5 Ω

Inductance phase-phase 0.6 mH

Back EMF phase-phase 80 V/kRPM max.

A-63x

Miscellaneous

Operating pressure (6) 75 to 85 psi (515 to 585 kPa)

Air consumption <2 SCFM (56 SLPM)

Air quality Clean (ﬁltered to 1.0 µm or better) – ISO 8573-1 Class 1

Oil free – ISO 8573-1 Class 1

Dry (–15 °C dew point) – ISO 8573-1 Class 3

Materials Hardcoat aluminum, stainless steel fasteners

(1) Dependent on the quality of the underlying surface, the payload, orientation, and forces that act on the stage from the outside.

Please contact PI for application-specific parameters. The specified values are static (no rotary motion during measuring) and without load.

(2) The loads listed assume a supply pressure of 550 kPa (80 psi). Please contact PI if other pressures are required.

(3) May be limited by the payload, payload imbalance, controller or drive.

(4) Assumes 4096x interpolation. Contact PI for the use of other factors.

(5) The specified values are based on error compensation controlled by the controller. The stage must be ordered with an A-8xx series controller

from PI to reach these values. Accuracy values assume short-term duration and do not consider the long-term effects of thermal drift on the stage.

(6) To protect the stage against damage, it is recommended to connect an air pressure sensor to the Motion-Stop input of the controller.

Rotation Stages

WWW.PI.WS

192

Compact, Clear Aperture

WT-85 Motorized Precision Goniometer

n Rotation range 10°

n Repeatability to 8.7 µrad

n Load capacity to 2 kg

n Option: Direct position measurement

with angle measuring system

n Combination with WT-100 with

common pivot point

>> Direct Metrology

>> Vacuum-Compatible Version

Technology Glossary ...................... page 290

WT-85 goniometer stage, dimensions in mm

Applications

n Sample Inspection

n Precision Micro Assembly

n Metrology / Testing

n Photonics

n Optical Alignment

n Scientific Instrumentation

WT-85 goniometer stage, DC motor,

dimensions in mm

WT-85 goniometer stage, stepper motor,

dimensions in mm

Direction of the axes and

torques for goniometer stages

MOTION | POSITIONING

193

65409100 65409101 65409200-0000 65409201-0001 Unit Tolerance

DC motor with

rotary encoder DC motor

with angle

measuring

system and

rotary encoder

Stepper motor Stepper motor

and angle

measuring

system

Active axes θXθXθXθX

Motion and positioning

Rotation range 10 10 10 10 °

Integrated sensor Rotary encoder Incremental

angle measur-

ing system

Rotary encoder

– Incremental

angle measur-

ing system

Sensor signal rotary

encoder AB quadrature,

RS-422 AB quadrature,

RS-422 – –

Sensor signal angle

measuring system Sin/cos, 1 V

peak-peak –Sin/cos, 1 V

peak-peak

Sensor signal periods angle

measuring system –2 11 –2 11 µrad

Sensor resolution rotary

encoder 2000 2000 – – Counts/

rev.

Design resolution 4.65 2.11 46.5 (full step) 2.11 µrad

Minimum incremental motion 1 7. 5 21 7. 5 2 µrad typ.

Unidirectional repeatability 69.8 8.7 69.8 8.7 µrad typ.

Bidirectional repeatability ±69.8 ±8.7 ±69.8 ±8.7 µrad typ.

Wobble ±125 ±125 ±125 ±125 µrad typ.

Angular velocity 15 15 7 7 °/s max.

Limit switches 2 × mechanical 2 × mechanical 2 × mechanical 2 × mechanical

Mechanical properties

Drive screw type Ball screw Ball screw Ball screw Ball screw

Drive screw pitch 1 1 1 1 mm

Guide type Ball bearings Ball bearings Ball bearings Ball bearings

Gear ratio 675:1 675:1 675:1 675:1

Load capacity 20 20 20 20 N max.

Torque Mx, power on 0.75 0.75 0.75 0.75 N·m max.

Permissible lateral force 15 15 15 15 N max.

Permissible torque in θy, θz4 4 4 4 N·m max.

Drive properties

Motor type DC motor DC motor 2-phase

stepper motor 2-phase

stepper motor

Operating voltage, nominal 24 24 24 24 V nom.

Operating voltage, max. 48 48 48 48 V max.

Step resolution – – 200 200 Full

steps/rev.

Miscellaneous

Operating temperature range 5 to 40 5 to 40 5 to 40 5 to 40 °C

Material Aluminum,

black anodized Aluminum,

black anodized

Mass 0.9 0.9 0.9 1.1 kg ±5 %

Connection HD Sub-D 15

(m)

(motor/sensor)

HD Sub-D 15

(m) (motor)

Sub-D 9 (m)

(sensor)

HD Sub-D 15

(m) HD Sub-D 15

(m) (motor)

Sub-D 9 (m)

(sensor)

Recommended controllers /

drivers C-863

(single axis)

C-884

(up to 6 axes)

C-885 with

C-863.20C885

(to 40 axes)

ACS modular

controller

C-863

(single axis)

C-884

(up to 6 axes)

C-885 with

C-863.20C885

(to 40 axes)

ACS modular

controller

C-663.12

(single axis)

SMC Hydra

(double axis)

C-885 with

C-663.12C885

(up to 20 axes)

ACS modular

controller

C-663.12

(single axis)

SMC Hydra

(double axis)

C-885 with

C-663.12C885

(up to 20 axes)

ACS modular

controller

Connecting cables for motor and sensor are not in the scope of delivery and must be ordered separately.

Ask about custom designs!

Rotation Stages

WWW.PI.WS

194

Compact, with Large Aperture

WT-100 Motorized Precision Goniometer

n Rotation range 10°

n Repeatability to 8.7 µrad

n Load capacity to 2 kg

n Option: Direct position

measurement with angle

measuring system

n Combination with WT-85

with common pivot point

>> Direct Metrology

>> Vacuum-Compatible Version

Technology Glossary ...................... page 290

Applications

n Sample Inspection

n Precision Micro Assembly

n Metrology / Testing

n Photonics

n Optical Alignment

n Scientific Instrumentation

WT-100 goniometer stage, DC motor,

dimensions in mm

WT-100 goniometer stage,

stepper motor,dimensions in mm

WT-100 goniometer stage,

dimensions in mm

MOTION | POSITIONING

195

65419100 65419101 65419200-0000 65419201-0001 Unit Tolerance

DC motor with

rotary encoder

DC motor

with angle

measuring

system and

rotary encoder

With stepper

motor

Stepper motor

and angle

measuring

system

Active axes θXθXθXθX

Motion and positioning

Rotation range 10 10 10 10 °

Integrated sensor Rotary encoder Incremental

angle measur-

ing system

Rotary encoder

– Incremental

angle measur-

ing system

Sensor signal rotary encoder AB quadrature,

RS-422

AB quadrature,

RS-422

– –

Sensor signal angle measuring

system

–Sin/cos, 1 V

peak-peak

–Sin/cos, 1 V

peak-peak

Sensor signal periods angle

measuring system

–157 –157 µrad

Sensor resolution rotary

encoder

2000 2000 – Cts./rev.

Design resolution 3.49 1.57 34.9 1.57 µrad

Minimum incremental motion 1 7. 5 8.7 1 7. 5 8.7 µrad typ.

Unidirectional repeatability 70 8.7 70 8.7 µrad typ.

Bidirectional repeatability ±70 ±8.7 ±70 ±8.7 µrad typ.

Wobble ±125 ±125 ±125 ±125 µrad typ.

Angular velocity 15 15 7 7 °/s max.

Limit switches 2 × mechanical 2 × mechanical 2 × mechanical 2 × mechanical

Mechanical properties

Drive screw type Ball screw Ball screw Ball screw Ball screw

Drive screw pitch 1 1 1 1 mm

Guide type Ball bearings Ball bearings Ball bearings Ball bearings

Gear ratio 900:1 900:1 900:1 900:1

Load capacity 20 20 20 20 N max.

Permissible lateral force 15 15 15 15 N max.

Permissible torque in θY

, θZ4 4 4 4 N·m max.

Drive properties

Motor type DC motor DC motor 2-phase

stepper motor

2-phase

stepper motor

Operating voltage, nominal 24 24 24 24 V nom.

Operating voltage, max. 48 48 48 48 V max.

Step resolution – – 200 200 Full steps/

rev.

Miscellaneous

Operating temperature range 5 to 40 5 to 40 5 to 40 5 to 40 °C

Material Aluminum,

black anodized,

steel

Aluminum,

black anodized,

steel

Aluminum,

black anodized,

steel

Aluminum,

black anodized,

steel

Mass 0.9 0.9 0.9 0.9 kg ±5 %

Connection HD Sub-D 15

(m)

HD Sub-D 15

(m) (motor)

Sub-D 9 (m)

(sensor)

HD Sub-D 15

(m) (motor)

HD Sub-D 15

(m) (motor

Sub-D 9 (m)

(sensor)

Recommended controllers /

drivers

C-863

(single axis)

C-884

(up to 6 axes)

C-885 with

C-863.20C885

(to 40 axes)

ACS modular

controller

C-863

(single axis)

C-884

(up to 6 axes)

C-885 with

C-863.20C885

(to 40 axes)

ACS modular

controller

C-663.12

(single axis)

SMC Hydra

(double axis)

C-885 with

C-663.12C885

(up to 20 axes)

ACS modular

controller

C-663.12

(single axis)

SMC Hydra

(double axis)

C-885 with

C-663.12C885

(up to 20 axes)

ACS modular

controller

Connecting cables for motor and sensor are not in the scope of delivery and must be ordered separately.

Ask about custom designs!

Rotation Stages

WWW.PI.WS

196

Long Travel Range

WT-90 Motorized Precision Goniometer

n Rotation range 90°

n Repeatability to 2.7 µrad

n Load capacity to 8 kg

n Option: Direct position measurement

with angle measuring system

n Combination with WT-120 with

common pivot point

>> Direct Metrology

>> Vacuum-Compatible Version

Technology Glossary ...................... page 290

Applications

n Sample Inspection

n Precision Micro Assembly

n Metrology / Testing

n Photonics

n Optical Alignment

n Scientific Instrumentation

WT-90 goniometer stage, dimensions in mm

WT-90 goniometer stage, DC motor,

dimensions in mm

WT-90 goniometer stage, stepper motor,

dimensions in mm

Direction of the axes and torques

for goniometer stages

MOTION | POSITIONING

197

65509100 65509200 65509201 Unit Tolerance

With DC motor With stepper motor With stepper motor

and angle measuring

system

Active axes θXθXθX

Motion and positioning

Rotation range 90 90 90 °

Integrated sensor Rotary encoder – Incremental angle

measuring system

Sensor signal rotary encoder AB quadrature,

RS-422

– –

Sensor signal angle

measuring system

–Sin/cos, 1 V peak-peak

Sensor resolution rotary

encoder

20000 – –

Sensor signal periods angle

measuring system

– – 269.3 µrad

Design resolution 1.047 105 2.69 µrad

Minimum incremental motion 52.4 4.8 2.7 µrad typ.

Unidirectional repeatability 87 9.6 1 7. 5 µrad typ.

Bidirectional repeatability ±350 ±175 ±17.5 µrad typ.

Wobble ±125 ±125 ±125 µrad typ.

Angular velocity 15 10 10 °/s max.

Limit switches 2 × mechanical 2 × mechanical 2 × mechanical

Mechanical properties

Guide type Ball bearings Ball bearings Ball bearings

Drive screw type Worm gear Worm gear Worm gear

Drive screw pitch mm

Worm gear ratio 300:1 300:1 300:1

Torque, power on 2.5 2.5 2.5 N·m max.

Holding torque, power off 2.5 2.5 2.5 N·m max.

Load capacity 80 80 80 N max.

Permissible lateral force 50 50 50 N max.

Permissible torque in θY

, θZ12 12 12 N·m max.

Drive properties

Motor type DC motor 2-phase stepper

motor

2-phase stepper

motor

Step resolution – 200 200 Full steps/

rev.

Miscellaneous

Operating temperature range 5 to 40 5 to 40 5 to 40 °C

Material Aluminum, black

anodized, stainless

steel, red bronze

Aluminum, black

anodized, stainless

steel, red bronze

Aluminum, black

anodized, stainless

steel, red bronze

Mass 2.8 2.8 3 kg ±5 %

Connection Sub-D 15 (m) HD Sub-D 15 (m) HD Sub-D 15 (m)

(motor)

Sub-D 9 (m) (sensor)

Recommended controllers /

drivers

C-863 (single axis)

C-884 (up to 6 axes)

C-885 with

C-863.20C885

(to 40 axes)

ACS modular

controller

C-663.12 (single axis)

SMC Hydra

(double axis)

C-885 with

C-663.12C885

(up to 20 axes)

ACS modular

controller

C-663.12 (single axis)

SMC Hydra

(double axis)

C-885 with

C-663.12C885

(up to 20 axes)

ACS modular

controller

Connecting cables for motor and sensor are not in the scope of delivery and must be ordered separately.

Ask about custom designs!

Rotation Stages

WWW.PI.WS

198

Long Travel Range, High Loads

WT-120 Motorized Precision Goniometer

n Rotation range 90°

n Repeatability to 17.5 µrad

n Load capacity to 20 kg

n Option: Direct position measurement

with angle measuring system

n Combination with WT-90 with

common pivot point

>> Direct Metrology

>> Vacuum-Compatible Version

Technology Glossary ...................... page 290

Applications

n Sample Inspection

n Precision Micro Assembly

n Metrology / Testing

n Photonics

n Optical Alignment

n Scientific Instrumentation

WT-120 goniometer stage, dimensions in mm

WT-120 goniometer stage,

DC motor, dimensions in mm

WT-120 goniometer stage,

stepper motor, dimensions in mm

Direction of the axes and torques

for goniometer stages

MOTION | POSITIONING

199

65609110 65609200 65609211 Unit Tolerance

With DC motor With stepper motor With stepper motor

and angle measuring

system

Active axes θXθXθX

Motion and positioning

Rotation range 90 90 90 °

Integrated sensor Rotary encoder – Incremental angle

measuring system

Sensor signal rotary

encoder

AB quadrature,

RS-422

– –

Sensor signal angle

measuring system

– Sin/cos,

1 V peak-peak

Sensor resolution rotary

encoder

20000 – –

Sensor signal periods angle

measuring system

––150 µrad

Design resolution 1.745 174.5 1.5 µrad

Minimum incremental motion 69.8 69.8 1 7. 5 µrad typ.

Unidirectional repeatability 87 87 1 7. 5 µrad typ.

Bidirectional repeatability ±350 ±350 ±17.5 µrad typ.

Wobble ±125 ±125 ±125 µrad typ.

Angular velocity 30 25 25 °/s max.

Limit switches 2 × mechanical 2 × mechanical 2 × mechanical

Mechanical properties

Guide type Ball bearings Ball bearings Ball bearings

Drive screw type Worm gear Worm gear Worm gear

Drive screw pitch mm

Worm gear ratio 180:1 180:1 180:1

Torque, power on 8 8 8 N·m max.

Load capacity 200 200 200 N max.

Permissible lateral force 90 90 90 N max.

Permissible torque in θY

, θZ25 25 25 N·m max.

Drive properties

Motor type DC motor 2-phase stepper

motor

2-phase stepper

motor

Step resolution – 200 200 Full steps/

rev.

Miscellaneous

Operating temperature range 5 to 40 5 to 40 5 to 40 °C

Material Aluminum, black

anodized, stainless

steel, red bronze

Aluminum, black

anodized, stainless

steel, red bronze

Aluminum, black

anodized, stainless

steel, red bronze

Mass 11. 5 11. 5 11. 5 kg ±5 %

Connection Sub-D 15 (m) LEMO ERA.3S.316

16-pin

LEMO ERA.3S.316

16-pin (motor)

Sub-D 9 (m) (sensor)

Recommended controllers /

drivers

C-863 (single axis)

with C-863.AD12

line driver

C-884 (to 6 axes)

with C-863.AD12

line driver

C-885 with

C-863.20C885

(to 40 axes)

and C-863.AD12

line driver

ACS modular

controller

C-663.12 (single axis)

SMC Hydra

(double axis)

C-885 with

C-663.12C885

(up to 20 axes)

ACS modular

controller

C-663.12 (single axis)

SMC Hydra

(double axis)

C-885 with

C-663.12C885

(up to 20 axes)

ACS modular

controller

Connecting cables for motor and sensor are not in the scope of delivery and must be ordered separately.

Ask about custom designs!

Rotation Stages

WWW.PI.WS

200

Linear Actuators

MOTION | POSITIONING

201

Voice Coil Actuators ................................................................................................................................................................ 202

V-900KPIC PIMag® VC Vertical Linear Actuator .............................................................. 202

V-273 PIMag® Voice Coil Linear Actuator ....................................................................... 204

V-275 PIMag® Voice Coil Linear Actuator ....................................................................... 208

V-277 PIMag® High-Load Linear Actuator ...................................................................... 212

Screw-Drive Precision Actuators ............................................................................................................................................. 216

L-220 High-Resolution Linear Actuator .......................................................................... 216

M-227 High-Resolution Linear Actuator with DC Motor ................................................ 218

M-228 / M-229 High-Resolution Linear Actuator with Stepper Motor ............................ 220

M-230 High-Resolution Linear Actuator with DC Motor ................................................ 222

M-232 High-Resolution Linear Actuator with DC Motor ................................................ 224

High-Load Screw-Drive Actuators ........................................................................................................................................... 226

M-235 High-Resolution Linear Actuator with DC Motor ................................................ 226

L-239 High-Load Linear Actuator ................................................................................... 228

M-238 High-Load Linear Actuator with DC Motor .......................................................... 230

Linear Actuators

WWW.PI.WS

202

Compact with Integrated Position Sensor

V-900KPIC PIMag® VC Vertical Linear Actuator

n Travel range 1.5 mm

n High scanning frequencies, fast step-and-settle

n Integrated linear encoder with 0.1 µm resolution

n Wear-free flexure guide for long lifetime

n Compact dimensions

n OEM linear actuator

V-900KPIC, dimensions in mm

>> Flexure Guiding System

>> Incremental Encoder

>> PIMag® Voice Coil

Technology Glossary ...................... page 290

Applications

n Sample Inspection

n Precision Micro Assembly

n Electronics Manufacturing

n Metrology / Testing

n General Automation

MOTION | POSITIONING

203

V-900KPIC Unit Tolerance

Active axes Z

Motion and positioning

Travel range 1.5 mm

Integrated sensor Optical linear encoder

Servo update rate 10* kHz

Resolution, open loop 10* nm typ.

Resolution, closed loop 100 nm typ.

Linearity error, closed loop ±1 % typ.

Repeatability ±500 nm typ.

Motion straightness ±5 µm ±5

Velocity, open loop 250 mm/s max.

Velocity, closed loop 45 mm/s

Mechanical properties

Moved mass 10 g typ.

Average push/pull force 0.5 N nominal

Push/pull force 0.8 N max.

Force constant 4 N/A typ.

Drive properties

Motor type PIMag® Voice Coil Drive

Magnet material NdFeB (N38SH)

Coil resistance 8.8 Ω typ.

Coil inductance 0.8 mH typ.

Average continuous current 120** mA max.

Peak current (max. 3 s) 200 mA

Miscellaneous

Operating temperature range 10 to 45 °C

Material Aluminum

Mass 40 g ±5 %

Cable length 0.2 m

Motor / sensor connection Molex 12 pins

Lifetime >108cycles min.

Recommended controller C-413 (plug adapter required)

* With C-413 controller.

** Do not exceed for continuous operation.

The settling time for a 100 µm step is approx. 50 ms.

Linear Actuators

WWW.PI.WS

204

High Dynamics and Inexpensive

V-273 PIMag® Voice Coil Linear Actuator

n Travel ranges to 20 mm

n Velocity to 100 mm/s

n Integrated linear encoder, 0.01 µm resolution

n Optional force sensor with 1 mN resolution

>> Incremental Encoder

>> PIMag® Voice Coil

Technology Glossary ...................... page 290

Applications

n Sample Inspection

n Precision Micro Assembly

n Electronics Manufacturing

n Metrology / Testing

n General Automation

PIMag® Voice Coil

Voice coil drives consist of 2 essential components: A permanent magnet and

a coil, which is located in the air gap of the magnetic field. When current flows

through the coil, it moves in the magnetic field of the permanent magnet.

The direction of motion depends on the polarity. Thanks to their low weight

and friction-free drive principle, voice coil drives are particularly suitable for

applications, which require high dynamics and high velocities at limited travel

ranges. High scan frequencies and precision positioning are also possible with

these drives, because they are free of the effects of hysteresis.

Highly accurate position measuring with incremental linear encoder

Noncontact optical linear encoders measure the actual position directly at the

motion platform with the greatest accuracy so that nonlinearity, mechanical

play or elastic deformation have no influence on position measuring.

V-273.441 with force sensor

MOTION | POSITIONING

205

V-273.440

V-273.441 with force sensor

Unit Tolerance

Active axes Z

Motion and positioning

Travel range 20 mm

Integrated sensor Optical linear encoder

Sensor resolution 10 (1) nm max.

Minimum incremental motion 100 nm typ.

Linearity error, closed loop 1 % typ.

Repeatability ±0.5 µm typ.

Velocity 100 mm/s max.

Force sensor resolution (optional) 1 mN max.

Smallest force step (optional) 5 mN typ.

Mechanical properties

Bearing / guide Recirculating ball bearings

Motion straightness ±20 µm ±5 %

Moved mass without load 100 (230 with force sensor) g typ.

Drive properties

Motor type PIMag® Voice Coil Drive, moving coil

Coil resistance 16 Ω typ., at 20 °C

Coil inductance 6 mH typ., at 20 °C

Time constant 0.375 ms

Back EMF 8 V·s/m

Force constant 8 N/A typ.

Motor constant 2 N/(√W)

Current constant 0.125 A/N typ.

Average continuous current 375 (2) mA max.

Peak current (max. 3 s) 800 mA

Average push/pull force 3 N nominal

Power dissipation of the coil

with 100 % duty cycle

2.25 W

Maximum push/pull force 6 N max.

Miscellaneous

Operating temperature range 10 to 60 °C

Material Aluminum

Mass 660 (790 with force sensor) g ±5 %

Cable length 1 m

Motor / sensor connection Sub-D 15 (m) with force sensor: 2 × Sub-D 15 (m)

Lifetime >107cycles min.

Recommended controller C-413.2x

(1) With C-413 controller.

(2) Do not exceed for continuous operation.

Linear Actuators

WWW.PI.WS

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V-273.440, dimensions in mm

MOTION | POSITIONING

207

V-273.441, dimensions in mm

Linear Actuators

WWW.PI.WS

208

High Dynamics, with Optional Force Control

V-275 PIMag® Voice Coil Linear Actuator

n Push force up to 10 N

n Velocity to 600 mm/s

n Integrated linear encoder, 0.01 µm resolution

n Weight force compensation

n Optional force sensor with 1 mN resolution