Physik Instrumente A 123 Datasheet
A-123_Datasheet Product ation & Software
User Manual: Physik Instrumente Product ation & Software
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PIglide AT3 Linear Stage with Air Bearings High Performance Nanopositioning Stage A-123 Ideal for scanning applications or highprecision positioning Cleanroom compatible Size of the motion platform 210 mm × 210 mm Travel ranges 50 mm to 750 mm Resolution to 1 nm Product Overview The stages in the PIglide are equipped with a servo drive linear motor with preloaded air bearings and integrated linear encoder. The combination of these noncontact components results in a frictionless motion platform that offers the highest performance, quality, and lifetime. A high-force linear motor can drive the stage to top speed within a few milliseconds, and the high-capacity bearings can support payloads up to 60 kg. The laterally opposed, actively preloaded air bearing design in this model allows mounting in any orientation. Accessories and options Encoder PIglide filter and air preparation kits Single and multi-axis motion controller XY setups and individual configurations Cable track variations Options with counterweight for vertical (Z) orientation Customizations available Base plates made of granite and systems for reducing vibration Application fields PIglide positioning systems are ideally suited for many high-precision applications such as metrology, photonics, and precision scanning in semiconductor or flat panel display manufacturing. Thanks to the friction-free motion, no particles are formed, which makes PIglide stages ideal for cleanroom applications. 09.08.2017 Specifications Motion A-123.050 A-123.100 A-123.150 A-123.200 A-123.350 A-123.500 A-123.750 Active axes X X X X X X X 50 100 150 200 350 500 750 mm 5 10 15 15 20 25 35 µrad max. ±0.5 ±0.5 ±0.5 ±1 ±1.5 ±1.5 ±2.5 µm max. 0.1 0.1 0.1 0.1 0.1 0.1 0.1 µm max. 1 1 1 1 1 1 1 m/s max. 30 30 30 30 30 30 30 m/s² max. A-123.050 A-123.100 A-123.150 A-123.200 A-123.350 A-123.500 A-123.750 Unit Tolerance 590 590 590 590 590 590 590 N max. 295 295 295 295 295 295 295 N max. Moved mass 5 5 5 5 5 5 5 kg Overall mass 14 15.5 16.5 18 21.5 25 32 kg Guide type Air bearing Air bearing Air bearing Air bearing Air bearing Air bearing Air bearing Travel range Pitch / yaw (1) Straightness / (1) flatness Straightness / flatness per 25 mm travel range Unit Tolerance (1) Velocity, (2) unloaded Acceleration, (2) unloaded Mechanical properties Load capacity in (3) z Load capacity in (3) y Drive properties A-123 Unit Drive type Linear motor, ironless, 3-phase Intermediate circuit voltage, effective 48, nominal 80, max. V DC Peak force 298 N typ. Nominal force 87.5 N typ. Force constant, effective 19.9 N/A typ. Resistance phase-phase 3.6 Ω typ. Inductivity phase-phase 1.2 mH typ. Back EMF phase-phase 16 V·s/m max. Cabling External, moving cable Positioning A-123.xxxA A-123.xxxB A-123.xxxC Integrated Sensor Incremental linear encoder Absolute encoder Incremental linear encoder Sensor signal Sin/cos, 1 V peak-peak, 20 µm signal period BiSS-C A/B quadrature, TTL Sensor resolution 1.2 nm 1 nm 50 nm A-123.050: ± 0.25 µm A-123.100: ± 0.25 µm A-123.150: ± 0.25 µm A-123.200: ± 0.25 µm A-123.350: ± 0.5 µm A-123.500: ± 0.5 µm A-123.750: ± 0.75 µm A-123.050: ± 0.25 µm A-123.100: ± 0.25 µm A-123.150: ± 0.25 µm A-123.200: ± 0.25 µm A-123.350: ± 0.5 µm A-123.500: ± 0.5 µm A-123.750: ± 0.75 µm (4) A-123.050: ± 0.25 µm A-123.100: ± 0.25 µm Bidirectional repeatability A-123.150: ± 0.25 µm A-123.200: ± 0.25 µm A-123.350: ± 0.5 µm A-123.500: ± 0.5 µm (4) (4) (4) (4) (4) (4) Tolerance 09.08.2017 A-123.750: ± 0.75 µm Accuracy, uncompensated (5) Accuracy, with error compensation (5) Miscellaneous Operating pressure (4) A-123.050: ± 1 µm A-123.100: ± 1 µm A-123.150: ± 1.5 µm A-123.200: ± 2 µm A-123.350: ± 3 µm A-123.500: ± 3.5 µm A-123.750: ± 5 µm A-123.050: ± 0.5 µm A-123.100: ± 0.5 µm A-123.150: ± 0.5 µm A-123.200: ± 0.5 µm A-123.350: ± 1 µm A-123.500: ± 1 µm A-123.750: ± 1.5 µm A-123.050: ± 1.5 µm A-123.100: ± 1.5 µm A-123.150: ± 1.5 µm A-123.200: ± 1.5 µm A-123.350: ± 1.5 µm A-123.500: ± 1.5 µm A-123.750: ± 1.5 µm A-123.050: ± 1.5 µm A-123.100: ± 1.5 µm A-123.150: ± 1.5 µm A-123.200: ± 1.5 µm A-123.350: ± 1.5 µm A-123.500: ± 1.5 µm A-123.750: ± 1.5 µm A-123 (6) 75 to 85 psi (515 to 585 kPa) Air consumption < 1.0 SCFM (28 SLPM) Air quality Clean (filtered to 1.0 μm or better) - ISO 8573-1 Class 1 Oil free - ISO 8573-1 Class 1 Dry (-15 °C dew point) - ISO 8573-1 Class 3 Materials Hardcoat aluminum, stainless steel fasteners (1) (2) (3) (4) (5) A-123.050: ± 1 µm A-123.100: ± 1 µm A-123.150: ± 1.5 µm A-123.200: ± 2 µm A-123.350: ± 3 µm A-123.500: ± 3.5 µm A-123.750: ± 5 µm A-123.050: ± 0.5 µm A-123.100: ± 0.5 µm A-123.150: ± 0.5 µm A-123.200: ± 0.5 µm A-123.350: ± 1 µm A-123.500: ± 1 µm A-123.750: ± 1.5 µm Dependent on the flatness of the surface, on which the stage is mounted. Can be limited by the payload, controller or drive. Assumes payload CG is centered no more than 50 mm above the motion platform. Assumes 16384x interpolation. Contact PI for the use of other factors. Improved accuracy can be obtained with controller-based error compensation. The stage must be ordered with a controller from PI to reach these values. Accuracy values assume short-term duration and do not consider the long-term effects of thermal drift on the stage. (6) To protect the stage against damage, it is recommended to connect an air pressure sensor to the Motion-Stop input of the controller. 09.08.2017 Drawings and Images A-123, dimensions in mm. * The mounting holes are symmetric around the center line located at "J" Ordering Information Travel range 50 mm A-123.050A1 PIglide AT3 Linear Stage, Air Bearing, 50 mm Travel Range, Linear Encoder with Sin/Cos Signal Transmission, 20 µm Signal Period, 3-Phase Linear Motor, 48 V A-123.050B1 PIglide AT3 Linear Stage, Air Bearing, 50 mm Travel Range, Absolute Encoder, 1 nm Sensor Resolution, 3-Phase Linear Motor, 48 V A-123.050C1 PIglide AT3 Linear Stage, Air Bearing, 50 mm Travel Range, Linear Encoder with A/B Quadrature Signal Transmission, 50 nm Sensor Resolution, 3-Phase Linear Motor, 48 V 09.08.2017 Travel range 100 mm A-123.100A1 PIglide AT3 Linear Stage, Air Bearing, 100 mm Travel Range, Linear Encoder with Sin/Cos Signal Transmission, 20 µm Signal Period, 3-Phase Linear Motor, 48 V A-123.100B1 PIglide AT3 Linear Stage, Air Bearing, 100 mm Travel Range, Absolute Encoder, 1 nm Sensor Resolution, 3-Phase Linear Motor, 48 V A-123.100C1 PIglide AT3 Linear Stage, Air Bearing, 100 mm Travel Range, Linear Encoder with A/B Quadrature Signal Transmission, 50 nm Sensor Resolution, 3-Phase Linear Motor, 48 V Travel range 150 mm A-123.150A1 PIglide AT3 Linear Stage, Air Bearing, 150 mm Travel Range, Linear Encoder with Sin/Cos Signal Transmission, 20 µm Signal Period, 3-Phase Linear Motor, 48 V A-123.150B1 PIglide AT3 Linear Stage, Air Bearing, 150 mm Travel Range, Absolute Encoder, 1 nm Sensor Resolution, 3-Phase Linear Motor, 48 V A-123.150C1 PIglide AT3 Linear Stage, Air Bearing, 150 mm Travel Range, Linear Encoder with A/B Quadrature Signal Transmission, 50 nm Sensor Resolution, 3-Phase Linear Motor, 48 V Travel range 200 mm A-123.200A1 PIglide AT3 Linear Stage, Air Bearing, 200 mm Travel Range, Linear Encoder with Sin/Cos Signal Transmission, 20 µm Signal Period, 3-Phase Linear Motor, 48 V A-123.200B1 PIglide AT3 Linear Stage, Air Bearing, 200 mm Travel Range, Absolute Encoder, 1 nm Sensor Resolution, 3-Phase Linear Motor, 48 V A-123.200C1 PIglide AT3 Linear Stage, Air Bearing, 200 mm Travel Range, Linear Encoder with A/B Quadrature Signal Transmission, 50 nm Sensor Resolution, 3-Phase Linear Motor, 48 V Travel range 350 mm A-123.350A1 PIglide AT3 Linear Stage, Air Bearing, 350 mm Travel Range, Linear Encoder with Sin/Cos Signal Transmission, 20 µm Signal Period, 3-Phase Linear Motor, 48 V A-123.350B1 PIglide AT3 Linear Stage, Air Bearing, 350 mm Travel Range, Absolute Encoder, 1 nm Sensor Resolution, 3-Phase Linear Motor, 48 V A-123.350C1 PIglide AT3 Linear Stage, Air Bearing, 350 mm Travel Range, Linear Encoder with A/B Quadrature Signal Transmission, 50 nm Sensor Resolution, 3-Phase Linear Motor, 48 V Travel range 500 mm A-123.500A1 PIglide AT3 Linear Stage, Air Bearing, 500 mm Travel Range, Linear Encoder with Sin/Cos Signal Transmission, 20 µm Signal Period, 3-Phase Linear Motor, 48 V A-123.500B1 PIglide AT3 Linear Stage, Air Bearing, 500 mm Travel Range, Absolute Encoder, 1 nm Sensor Resolution, 3-Phase Linear Motor, 48 V 09.08.2017 A-123.500C1 PIglide AT3 Linear Stage, Air Bearing, 500 mm Travel Range, Linear Encoder with A/B Quadrature Signal Transmission, 50 nm Sensor Resolution, 3-Phase Linear Motor, 48 V Travel range 750 mm A-123.750A1 PIglide AT3 Linear Stage, Air Bearing, 750 mm Travel Range, Linear Encoder with Sin/Cos Signal Transmission, 20 µm Signal Period, 3-Phase Linear Motor, 48 V A-123.750B1 PIglide AT3 Linear Stage, Air Bearing, 750 mm Travel Range, Absolute Encoder, 1 nm Sensor Resolution, 3-Phase Linear Motor, 48 V A-123.750C1 PIglide AT3 Linear Stage, Air Bearing, 750 mm Travel Range, Linear Encoder with A/B Quadrature Signal Transmission, 50 nm Sensor Resolution, 3-Phase Linear Motor, 48 V 09.08.2017
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File Type : PDF File Type Extension : pdf MIME Type : application/pdf PDF Version : 1.4 Linearized : Yes Tagged PDF : Yes XMP Toolkit : Adobe XMP Core 5.6-c015 84.159810, 2016/09/10-02:41:30 Modify Date : 2017:08:09 12:08:58+02:00 Create Date : 2017:08:09 12:08:55+02:00 Metadata Date : 2017:08:09 12:08:58+02:00 Creator Tool : Acrobat PDFMaker 15 für Word Document ID : uuid:5f39287b-055d-42d4-ad66-5c8bf0cafce9 Instance ID : uuid:aa467266-e504-4926-81bc-9b72dd3d778d Subject : 2 Format : application/pdf Title : A-123 Datasheet Creator : Hoelzer, Christoph Producer : Adobe PDF Library 15.0 Source Modified : D:20170809100847 Company : PI Page Layout : OneColumn Page Count : 6 Author : Hoelzer, Christoph Keywords : R2EXIF Metadata provided by EXIF.tools