Physik Instrumente A 123 Datasheet

A-123_Datasheet Product ation & Software

User Manual: Physik Instrumente Product ation & Software

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09.08.2017
High Performance Nanopositioning Stage
Product Overview
The stages in the PIglide are equipped with a servo drive linear motor with preloaded air bearings and integrated linear
encoder. The combination of these noncontact components results in a frictionless motion platform that offers the highest
performance, quality, and lifetime.
A high-force linear motor can drive the stage to top speed within a few milliseconds, and the high-capacity bearings can
support payloads up to 60 kg. The laterally opposed, actively preloaded air bearing design in this model allows mounting in
any orientation.
Accessories and options
Encoder
PIglide filter and air preparation kits
Single and multi-axis motion controller
XY setups and individual configurations
Cable track variations
Options with counterweight for vertical (Z) orientation
Customizations available
Base plates made of granite and systems for reducing vibration
Application fields
PIglide positioning systems are ideally suited for many high-precision applications such as metrology, photonics, and
precision scanning in semiconductor or flat panel display manufacturing.
Thanks to the friction-free motion, no particles are formed, which makes PIglide stages ideal for cleanroom applications.
A-123
PIglide AT3 Linear Stage with Air Bearings
Ideal for scanning applications or high-
precision positioning
Cleanroom compatible
Size of the motion platform 210 mm ×
210 mm
Travel ranges 50 mm to 750 mm
Resolution to 1 nm
09.08.2017
Specifications
Motion A-123.050 A-123.100 A-123.150 A-123.200 A-123.350 A-123.500 A-123.750 Unit Tolerance
Active axes X X X X X X X
Travel range 50 100 150 200 350 500 750 mm
Pitch / yaw (1) 5 10 15 15 20 25 35 µrad max.
Straightness /
flatness
(1)
±0.5 ±0.5 ±0.5 ±1 ±1.5 ±1.5 ±2.5 µm max.
Straightness /
flatness per 25
mm travel range
(1)
0.1 0.1 0.1 0.1 0.1 0.1 0.1 µm max.
Velocity,
unloaded
(2)
1 1 1 1 1 1 1 m/s max.
Acceleration,
unloaded
(2)
30 30 30 30 30 30 30 m/s² max.
Mechanical
properties
A-123.050 A-123.100 A-123.150 A-123.200 A-123.350 A-123.500 A-123.750 Unit Tolerance
Load capacity in
z
(3)
590 590 590 590 590 590 590 N max.
Load capacity in
y
(3)
295 295 295 295 295 295 295 N max.
Moved mass 5 5 5 5 5 5 5 kg
Overall mass 14 15.5 16.5 18 21.5 25 32 kg
Guide type Air bearing Air bearing Air bearing Air bearing Air bearing Air bearing Air bearing
Drive properties A-123 Unit Tolerance
Drive type Linear motor, ironless, 3-phase
Intermediate circuit voltage, effective
48, nominal
80, max.
V DC
Peak force 298 N typ.
Nominal force 87.5 N typ.
Force constant, effective 19.9 N/A typ.
Resistance phase-phase 3.6 Ω typ.
Inductivity phase-phase 1.2 mH typ.
Back EMF phase-phase 16 V·s/m max.
Cabling External, moving cable
Positioning A-123.xxxA A-123.xxxB A-123.xxxC
Integrated Sensor Incremental linear encoder Absolute encoder Incremental linear encoder
Sensor signal
Sin/cos, 1 V peak-peak,
20 µm signal period
BiSS-C A/B quadrature, TTL
Sensor resolution 1.2 nm (4) 1 nm 50 nm
Bidirectional repeatability
A-123.050: ± 0.25 µm
(4)
A-123.100: ± 0.25 µm (4)
A-123.150: ± 0.25 µm (4)
A-123.200: ± 0.25 µm (4)
A-123.350: ± 0.5 µm (4)
A-123.500: ± 0.5 µm
(4)
A-123.050: ± 0.25 µm
A-123.100: ± 0.25 µm
A-123.150: ± 0.25 µm
A-123.200: ± 0.25 µm
A-123.350: ± 0.5 µm
A-123.500: ± 0.5 µm
A-123.750: ± 0.75 µm
A-123.050: ± 0.25 µm
A-123.100: ± 0.25 µm
A-123.150: ± 0.25 µm
A-123.200: ± 0.25 µm
A-123.350: ± 0.5 µm
A-123.500: ± 0.5 µm
A-123.750: ± 0.75 µm
09.08.2017
A-123.750: ± 0.75 µm
(4)
Accuracy, uncompensated (5)
A-123.050: ± 1 µm
A-123.100: ± 1 µm
A-123.150: ± 1.5 µm
A-123.200: ± 2 µm
A-123.350: ± 3 µm
A-123.500: ± 3.5 µm
A-123.750: ± 5 µm
A-123.050: ± 1.5 µm
A-123.100: ± 1.5 µm
A-123.150: ± 1.5 µm
A-123.200: ± 1.5 µm
A-123.350: ± 1.5 µm
A-123.500: ± 1.5 µm
A-123.750: ± 1.5 µm
A-123.050: ± 1 µm
A-123.100: ± 1 µm
A-123.150: ± 1.5 µm
A-123.200: ± 2 µm
A-123.350: ± 3 µm
A-123.500: ± 3.5 µm
A-123.750: ± 5 µm
Accuracy, with error compensation (5)
A-123.050: ± 0.5 µm
A-123.100: ± 0.5 µm
A-123.150: ± 0.5 µm
A-123.200: ± 0.5 µm
A-123.350: ± 1 µm
A-123.500: ± 1 µm
A-123.750: ± 1.5 µm
A-123.050: ± 1.5 µm
A-123.100: ± 1.5 µm
A-123.150: ± 1.5 µm
A-123.200: ± 1.5 µm
A-123.350: ± 1.5 µm
A-123.500: ± 1.5 µm
A-123.750: ± 1.5 µm
A-123.050: ± 0.5 µm
A-123.100: ± 0.5 µm
A-123.150: ± 0.5 µm
A-123.200: ± 0.5 µm
A-123.350: ± 1 µm
A-123.500: ± 1 µm
A-123.750: ± 1.5 µm
Miscellaneous A-123
Operating pressure (6) 75 to 85 psi (515 to 585 kPa)
Air consumption < 1.0 SCFM (28 SLPM)
Air quality
Oil free - ISO 8573-1 Class 1
Materials Hardcoat aluminum, stainless steel fasteners
(1) Dependent on the flatness of the surface, on which the stage is mounted.
(2) Can be limited by the payload, controller or drive.
(3) Assumes payload CG is centered no more than 50 mm above the motion platform.
(4) Assumes 16384x interpolation. Contact PI for the use of other factors.
(5) Improved accuracy can be obtained with controller-based error compensation. The stage must be ordered with a controller from PI to reach these values.
Accuracy values assume short-term duration and do not consider the long-term effects of thermal drift on the stage.
(6) To protect the stage against damage, it is recommended to connect an air pressure sensor to the Motion-Stop input of the controller.
09.08.2017
Drawings and Images
A-123, dimensions in mm.
* The mounting holes are symmetric around the center line located at "J"
Ordering Information
Travel range 50 mm
A-123.050A1
PIglide AT3 Linear Stage, Air Bearing, 50 mm Travel Range, Linear Encoder with Sin/Cos Signal Transmission, 20 µm Signal
Period, 3-Phase Linear Motor, 48 V
A-123.050B1
PIglide AT3 Linear Stage, Air Bearing, 50 mm Travel Range, Absolute Encoder, 1 nm Sensor Resolution, 3-Phase Linear Motor,
48 V
A-123.050C1
PIglide AT3 Linear Stage, Air Bearing, 50 mm Travel Range, Linear Encoder with A/B Quadrature Signal Transmission, 50 nm
Sensor Resolution, 3-Phase Linear Motor, 48 V
09.08.2017
Travel range 100 mm
A-123.100A1
PIglide AT3 Linear Stage, Air Bearing, 100 mm Travel Range, Linear Encoder with Sin/Cos Signal Transmission, 20 µm Signal
Period, 3-Phase Linear Motor, 48 V
A-123.100B1
PIglide AT3 Linear Stage, Air Bearing, 100 mm Travel Range, Absolute Encoder, 1 nm Sensor Resolution, 3-Phase Linear
Motor, 48 V
A-123.100C1
PIglide AT3 Linear Stage, Air Bearing, 100 mm Travel Range, Linear Encoder with A/B Quadrature Signal Transmission, 50 nm
Sensor Resolution, 3-Phase Linear Motor, 48 V
Travel range 150 mm
A-123.150A1
PIglide AT3 Linear Stage, Air Bearing, 150 mm Travel Range, Linear Encoder with Sin/Cos Signal Transmission, 20 µm Signal
Period, 3-Phase Linear Motor, 48 V
A-123.150B1
PIglide AT3 Linear Stage, Air Bearing, 150 mm Travel Range, Absolute Encoder, 1 nm Sensor Resolution, 3-Phase Linear
Motor, 48 V
A-123.150C1
PIglide AT3 Linear Stage, Air Bearing, 150 mm Travel Range, Linear Encoder with A/B Quadrature Signal Transmission, 50 nm
Sensor Resolution, 3-Phase Linear Motor, 48 V
Travel range 200 mm
A-123.200A1
PIglide AT3 Linear Stage, Air Bearing, 200 mm Travel Range, Linear Encoder with Sin/Cos Signal Transmission, 20 µm Signal
Period, 3-Phase Linear Motor, 48 V
A-123.200B1
PIglide AT3 Linear Stage, Air Bearing, 200 mm Travel Range, Absolute Encoder, 1 nm Sensor Resolution, 3-Phase Linear
Motor, 48 V
A-123.200C1
PIglide AT3 Linear Stage, Air Bearing, 200 mm Travel Range, Linear Encoder with A/B Quadrature Signal Transmission, 50 nm
Sensor Resolution, 3-Phase Linear Motor, 48 V
Travel range 350 mm
A-123.350A1
PIglide AT3 Linear Stage, Air Bearing, 350 mm Travel Range, Linear Encoder with Sin/Cos Signal Transmission, 20 µm Signal
Period, 3-Phase Linear Motor, 48 V
A-123.350B1
PIglide AT3 Linear Stage, Air Bearing, 350 mm Travel Range, Absolute Encoder, 1 nm Sensor Resolution, 3-Phase Linear
Motor, 48 V
A-123.350C1
PIglide AT3 Linear Stage, Air Bearing, 350 mm Travel Range, Linear Encoder with A/B Quadrature Signal Transmission, 50 nm
Sensor Resolution, 3-Phase Linear Motor, 48 V
Travel range 500 mm
A-123.500A1
PIglide AT3 Linear Stage, Air Bearing, 500 mm Travel Range, Linear Encoder with Sin/Cos Signal Transmission, 20 µm Signal
Period, 3-Phase Linear Motor, 48 V
A-123.500B1
PIglide AT3 Linear Stage, Air Bearing, 500 mm Travel Range, Absolute Encoder, 1 nm Sensor Resolution, 3-Phase Linear
Motor, 48 V
09.08.2017
A-123.500C1
PIglide AT3 Linear Stage, Air Bearing, 500 mm Travel Range, Linear Encoder with A/B Quadrature Signal Transmission, 50 nm
Sensor Resolution, 3-Phase Linear Motor, 48 V
Travel range 750 mm
A-123.750A1
PIglide AT3 Linear Stage, Air Bearing, 750 mm Travel Range, Linear Encoder with Sin/Cos Signal Transmission, 20 µm Signal
Period, 3-Phase Linear Motor, 48 V
A-123.750B1
PIglide AT3 Linear Stage, Air Bearing, 750 mm Travel Range, Absolute Encoder, 1 nm Sensor Resolution, 3-Phase Linear
Motor, 48 V
A-123.750C1
PIglide AT3 Linear Stage, Air Bearing, 750 mm Travel Range, Linear Encoder with A/B Quadrature Signal Transmission, 50 nm
Sensor Resolution, 3-Phase Linear Motor, 48 V

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