Physik Instrumente . H824T0005 TN H 824 D2 G2 D2V G2V
H824T0005_TN_H-824_D2_G2_D2V_G2V H-824 6-Axis Hexapod
User Manual: Physik Instrumente H-824 6-Axis Hexapod
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Technical Note BRo, 2016-01-22 H824T0005, valid for H-824.G2, H-824.G2V, H-824.D2, H-824.D2V H-824 Hexapod Microrobots Contents Introduction .......................................................................................................................................................... 1 Precision-Class 6-Axis Positioning System ..................................................................................................... 1 Model Overview ............................................................................................................................................... 1 Recommended Controller (to be ordered separately) ..................................................................................... 1 Other Applicable Documents ............................................................................................................................... 2 Scope of Delivery................................................................................................................................................. 2 Connecting the Hexapod to the C-887 Hexapod Controller ................................................................................ 4 Only H-824.G2V and H-824.D2V models: Installing vacuum feedthroughs ....................................................4 Connecting the Hexapod to the C-887 with the Cable Set .............................................................................. 5 Optional: Removing the Coordinate Cube ........................................................................................................... 6 Dimensions .......................................................................................................................................................... 7 Technical Data ..................................................................................................................................................... 8 Data Table ....................................................................................................................................................... 8 Specifications for Vacuum Versions ................................................................................................................ 9 Maximum Ratings ..........................................................................................................................................10 Ambient Conditions and Classifications ........................................................................................................10 Pin Assignment ..................................................................................................................................................10 Power Supply .................................................................................................................................................10 Data Transmission .........................................................................................................................................11 Introduction Precision-Class 6-Axis Positioning System Parallel-kinematic design for six degrees of freedom making it significantly more compact and stiff than serialkinematic systems, higher dynamic range, no moved cables: Higher reliability, reduced friction Model Overview H-824.G2 Compact Hexapod Microrobot, DC Motor Gearhead, 1 mm/s, 10 kg Load, Sub-D Connector, Cable Set 3 m H-824.D2 Compact Hexapod Microrobot, Direct Drive, 25 mm/s, 5 kg Load, Sub-D Connector, Cable Set 3 m H-824.G2V Compact Hexapod Microrobot, DC Motor Gearhead, -6 0.5 mm/s, 5 kg Load, Vacuum-Compatible to 10 hPa, Sub-D Connector, 2 m Vacuum-Side Cable, Feedthrough, 3 m Air-Side Cable H-824.D2V Compact Hexapod Microrobot, Direct Drive, 12.5 mm/s, -6 2.5 kg Load, Vacuum-Compatible to 10 hPa, Sub-D Connector, 2 m Vacuum-Side Cable, Feedthrough, 3 m Air-Side Cable Recommended Controller (to be ordered separately) C-887.5xx 6D Hexapod Controller, TCP/IP, RS-232, Bench-Top Device, Control of Two Additional Servo-Motor Axes Included; various models available Physik Instrumente (PI ) GmbH & Co. KG_Auf der Römerstraße 1_76228 Karlsruhe/Germany Telefon +49 721 4846-0, Telefax +49 721 4846-1019 E-Mail info@pi.ws, www.pi.ws Page 2 / 12 2016-01-22 H824T0005, valid for H-824.G2, H-824.G2V, H-824.D2, H-824.D2V Other Applicable Documents Description Document H-824 Hexapod Microrobot MS200E user manual for H-824.G1, .GV, .D1 and .DV Hexapod models. This manual is also valid for H-824.G2, .G2V, .D2 and .D2V Hexapod models, except for the information superseded by the H824T0005 Technical Note (this document). Refer to the MS200E user manual for the following information: − − − C-887.5xx Hexapod Controller Safety instructions and product description Instructions for unpacking, installation, start-up, and maintenance of the Hexapod Overview for troubleshooting Technical Notes for the individual controller models MS204E user manual Documentation for the PC software that comes with the Hexapod controller Scope of Delivery Order Number Items H-824 Hexapod according to your order Cable set With H-824.G2 and .D2 models: K040B0241 Data transmission cable, HD Sub-D 78 f/m, 1:1, 3 m K060B0111 Power supply cable, M12m 180° to M12f 90°, 3 m With H-824.G2V and .D2V models: 000015165 K040B0254 Data transmission cable for vacuum, HD Sub-D 78 m/f, 1:1, 2 m 4668 Vacuum feedthrough for data transmission, HD Sub-D 78 m/f K040B0241 Data transmission cable on the air side, HD Sub-D 78 f/m, 1:1, 3 m K060B0132 Power supply cable for vacuum, LEMO 2-pin (m) 180° to 2-pin (f) 90°, 2 m C887B0002 Vacuum feedthrough for power supply, LEMO 2-pin (f) to M12 (m) K060B0111 Power supply cable on the air side, M12 (m) 180° to M12 (f) 90°, 3 m Steward snap-on ferrite suppressor Packaging, consisting of: – Transport lock consisting of: 2 struts, length 291 mm 2 struts, length 225 mm 1 strut, length 130 mm 9 M6x20 screws 4 plastic flat washers 000012251 Internal cushion, bottom 000012252 Internal cushion, cover Physik Instrumente (PI ) GmbH & Co. KG_Auf der Römerstraße 1_76228 Karlsruhe/Germany Telefon +49 721 4846-0, Telefax +49 721 4846-1019 E-Mail info@pi.ws, www.pi.ws Page 3 / 12 2016-01-22 H824T0005, valid for H-824.G2, H-824.G2V, H-824.D2, H-824.D2V Order Number Items 000012899 Inner box with handle, 560 mm x 560 mm x 400 mm 000012323 Outer box with soft foam cushions 2026 Pallet Documentation, consisting of: H824T0005 Technical Note for H-824.G2, .G2V, .D2 and .D2V Hexapod models (this document) H824T0001 Technical Note in printed form on unpacking the Hexapod MS200E User manual for the Hexapod Screw sets: 000034605 000036450 Mounting accessories: 6 M6x30 hex-head cap screws ISO 4762 1 Allen wrench 5.0 DIN 911 Accessories for connection to the grounding system: 1 M4x8 flat-head screw with cross recess ISO 7045 2 washers, form A-4.3 DIN 7090 2 safety washers, Schnorr Ø 4 mm N0110 Physik Instrumente (PI ) GmbH & Co. KG_Auf der Römerstraße 1_76228 Karlsruhe/Germany Telefon +49 721 4846-0, Telefax +49 721 4846-1019 E-Mail info@pi.ws, www.pi.ws Page 4 / 12 2016-01-22 H824T0005, valid for H-824.G2, H-824.G2V, H-824.D2, H-824.D2V Connecting the Hexapod to the C-887 Hexapod Controller Only H-824.G2V and H-824.D2V models: Installing vacuum feedthroughs Figure 1: Dimensions of the vacuum feedthrough for data transmission (4668) (dimensions in mm) B 4 holes 45°xØ6 for M3 countersunk screw Figure 2: Dimensions of the vacuum feedthrough for Hexapod power supply (C887B0002) (dimensions in mm) Physik Instrumente (PI ) GmbH & Co. KG_Auf der Römerstraße 1_76228 Karlsruhe/Germany Telefon +49 721 4846-0, Telefax +49 721 4846-1019 E-Mail info@pi.ws, www.pi.ws Page 5 / 12 2016-01-22 H824T0005, valid for H-824.G2, H-824.G2V, H-824.D2, H-824.D2V 1. See the above figures for the dimensions of the vacuum feedthroughs. 2. Provide the vacuum chamber with suitable openings. 3. Install the vacuum feedthroughs: a) b) Install the vacuum feedthrough for data transmission (4668) so that the HD Sub-D socket 78 (f) is in the vacuum chamber. Install the vacuum feedthrough for Hexapod power supply (C887B0002) so that the 2-pin LEMO socket is in the vacuum chamber. Connecting the Hexapod to the C-887 with the Cable Set 1. Read and observe the following installation instructions: • Instructions in the user manual of the Hexapod, especially sections „General Notes on Installation“, „Determining the Permissible Load and Working Space“, „Attaching the Snap-On Ferrite Suppressor“, „Grounding the Hexapod“, „Mounting the Hexapod on a Surface“ and „Affixing the Load to the Hexapod“. • Instructions in the user manual of the Hexapod controller, especially sections „General Notes on Installation“ and „Determining the Working Space and Permissible Load of the Hexapod“. 2. Make sure that the Hexapod controller is switched off (see user manual of the Hexapod controller). 3. Connect the Hexapod to the Hexapod controller as shown in the figure that belongs to your Hexapod model, see below. Figure 3: Connection diagram for H-824.G2 and H-824.D2 Hexapod models Controller C-887.5x or C-887.5xx Hexapod controller Hexapod H-824.G2 or H-824.D2 Hexapod Power Supply C-887.5PS power supply, included with the Hexapod controller 1 K040B0241 Data transmission cable, HD Sub-D 78 (m) to HD Sub-D 78 (f), 3 m 2 K060B0111 Power supply cable, M12 (m) to M12 (f), 3 m Physik Instrumente (PI ) GmbH & Co. KG_Auf der Römerstraße 1_76228 Karlsruhe/Germany Telefon +49 721 4846-0, Telefax +49 721 4846-1019 E-Mail info@pi.ws, www.pi.ws Page 6 / 12 2016-01-22 H824T0005, valid for H-824.G2, H-824.G2V, H-824.D2, H-824.D2V Figure 4: Connection diagram for H-824.G2V and H-824.D2V Hexapod models Controller C-887.5x or C-887.5xx Hexapod controller Hexapod H-824.G2V or H-824.D2V Hexapod Power Supply C-887.5PS power supply, included with the Hexapod controller 1 Vacuum chamber 2 K040B0241 Data transmission cable on the air side, HD Sub-D 78 (m) to HD Sub-D 78 (f), 3 m 3 4668 Vacuum feedthrough for data transmission, HD Sub-D 78 m/f 4 K040B0254 Data transmission cable on the vacuum side, HD Sub-D 78 (m) to HD Sub-D 78 (f), 2 m 5 K060B0111 Power supply cable on the air side, M12 (m) to M12 (f), 3 m 6 C887B0002 Vacuum feedthrough for power supply, M12 (m) to LEMO 2-pin (f) 7 K060B0132 Power supply cable on the vacuum side, LEMO 2-pin (m) to LEMO 2-pin (f), 2 m Optional: Removing the Coordinate Cube You can remove the coordinate cube from the base plate of the H-824 Hexapod. 2) 1) Pull the coordinate cube upwards Loosen the M4x6 threaded pin Physik Instrumente (PI ) GmbH & Co. KG_Auf der Römerstraße 1_76228 Karlsruhe/Germany Telefon +49 721 4846-0, Telefax +49 721 4846-1019 E-Mail info@pi.ws, www.pi.ws Page 7 / 12 2016-01-22 H824T0005, valid for H-824.G2, H-824.G2V, H-824.D2, H-824.D2V Dimensions All figures show the Hexapod in the reference position. Dimensions in mm. Note that the decimal places are separated by a comma in the drawings. Figure 5: Dimensions of H-824.D2, .D2V, .G2, .G2V Hexapods The (0,0,0) coordinates refer to the origin of the XYZ coordinate system. When the default settings of the Hexapod controller are used and the Hexapod is in the reference position, the pivot point is located at the origin of the XYZ coordinate system. Physik Instrumente (PI ) GmbH & Co. KG_Auf der Römerstraße 1_76228 Karlsruhe/Germany Telefon +49 721 4846-0, Telefax +49 721 4846-1019 E-Mail info@pi.ws, www.pi.ws Page 8 / 12 2016-01-22 H824T0005, valid for H-824.G2, H-824.G2V, H-824.D2, H-824.D2V Technical Data Data Table H-824.G2 H-824.D2 ffor higher resolution and load for higher velocity X, Y, Z, θX, θY, θZ X, Y, Z, θX, θY, θZ Travel range* X, Y ±22.5 ±22.5 mm Travel range* Z ±12.5 ±12.5 mm Travel range* θX, θY ±7.5 ±7.5 ° Travel range* θZ ±12.5 ±12.5 ° Single-actuator design resolution 0.007 0.5 µm Min. incremental motion X, Y, Z 0.3 1 µm typ. Min. incremental motion θX, θY, θZ 3.5 12 µrad typ. Backlash X, Y 3 1 µm typ. Backlash Z 1 1 µm typ. Backlash θX, θY 20 15 µrad typ. Backlash θZ 25 25 µrad typ. Repeatability X, Y ±0.5 ±0.5 µm typ. Repeatability Z ±0.1 ±0.1 µm typ. Repeatability θX, θY ±2 ±2 µrad typ. Repeatability θZ ±2.5 ±2.5 µrad typ. Max. velocity X, Y, Z 1 25 mm/s Max. velocity θX, θY, θZ 11 270 mrad/s Typ. velocity X, Y, Z 0.5 10 mm/s Typ. velocity θX, θY, θZ 5.5 55 mrad/s Stiffness X, Y 1.7 1.7 N/µm Stiffness Z 7 7 N/µm Load (base plate horizontal / any orientation) 10 / 5 5 / 2.5 kg max. Holding force, de-energized (base plate horizontal / any orientation) 100 / 50 15 / 5 N max. Motor type DC gear motor DC motor Operating temperature range -10 to 50 -10 to 50 Material Aluminum Aluminum Mass 8 8 kg ±5 % Cable length 3 3 m ±10 mm Active axes Unit Tolerance Motion and positioning Mechanical properties Miscellaneous °C -6 Vacuum versions to 10 hPa are available under the following ordering numbers: H-824.G2V, H-824.D2V. Specifications for vacuum versions can differ, see p. 9. Technical data specified at 20±3°C. * The travel ranges of the individual coordinates (X, Y, Z, θX, θY, θZ) are interdependent. The data for each axis in this table shows its maximum travel, where all other axes are at their zero positions. If the other linear or rotational coordinates are not zero, the available travel may be less. Physik Instrumente (PI ) GmbH & Co. KG_Auf der Römerstraße 1_76228 Karlsruhe/Germany Telefon +49 721 4846-0, Telefax +49 721 4846-1019 E-Mail info@pi.ws, www.pi.ws Page 9 / 12 2016-01-22 H824T0005, valid for H-824.G2, H-824.G2V, H-824.D2, H-824.D2V Specifications for Vacuum Versions H-824.G2V H-824.D2V Unit Tolerance Velocity X, Y, Z 0.5 12.5 mm/s max. Velocity θX, θY, θZ 5.5 135 mrad/s max. Velocity X, Y, Z 0.2 5 mm/s typ. Velocity θX, θY, θZ 2.3 28 mrad/s typ. Load (base plate horizontal / any orientation) 5 / 2.5 2.5 / 1.25 kg max. Holding force (base plate horizontal / any orientation) 50 / 25 15 / 5 N max. Motion and positioning Mechanical properties Drive and sensor Motor Manufacturer: Faulhaber Motor type: DC, 2224R036SR Gearhead H-824.G2V only: 22/5 Reduction ratio 69:1 Encoder Manufacturer: Faulhaber Encoder type: magnetic encoder, IE2-512 Reference point switch Magnetic, vacuum-compatible Limit switches Magnetic, vacuum-compatible Materials used Machine-made parts 94% of the machine-made parts, i.e., base plate, struts, moving platform: AlMg4.5Mn0.7 (3.3547) chemically nickel-plated, stainless steel 1.4310, 1.4305 6% of the machine-made parts, e.g., coupling elements: Various vacuum-compatible materials Bearing Stainless steel Drivetrain elements Drive screw: Stainless steel Drive belt: Polyurethane and Kevlar Electrical components Cable insulation: Teflon (PTFE, FEP) Shrink tubing: Kynar, PTFE Solder: Sn95.5Ag3.8Cu0.7 Connector types: AMP HD20, Lemo PCB's: Adapter board, limit switch board, PWM board Grease Molykote HP-300, Klüber Barrierta L55/2 Sealing compound and Araldite 2014-1 (Huntsmann) adhesive Other Bakeout temperature 80 °C (176 °F) Physik Instrumente (PI ) GmbH & Co. KG_Auf der Römerstraße 1_76228 Karlsruhe/Germany Telefon +49 721 4846-0, Telefax +49 721 4846-1019 E-Mail info@pi.ws, www.pi.ws Page 10 / 12 2016-01-22 H824T0005, valid for H-824.G2, H-824.G2V, H-824.D2, H-824.D2V Maximum Ratings The Hexapod is designed for the following operating data: Maximum operating voltage Maximum operating frequency (unloaded) Maximum current consumption 24 V DC 5A Ambient Conditions and Classifications Degree of pollution: 2 Transport temperature: –25°C to +85°C Storage temperature: 0 °C to 70 °C Humidity: Maximum relative humidity of 80% at temperatures of up to 31°C, linearly decreasing until relative humidity of 50% at 40°C Degree of protection according to IEC 60529: IP20 Area of application: For indoor use only Maximum altitude: 2000 m Pin Assignment Power Supply H-824.D2, H-824.G2: 4-pin M12 panel plug Pin Function 1 GND 2 GND 3 24 V DC 4 24 V DC 4 1 3 2 H-824.D2V, H-824.G2V: 2-pin LEMO panel plug, male, type ECJ.1B.302.CLD Pin Function 1 GND 2 24 V DC Physik Instrumente (PI ) GmbH & Co. KG_Auf der Römerstraße 1_76228 Karlsruhe/Germany Telefon +49 721 4846-0, Telefax +49 721 4846-1019 E-Mail info@pi.ws, www.pi.ws Page 11 / 12 2016-01-22 H824T0005, valid for H-824.G2, H-824.G2V, H-824.D2, H-824.D2V Data Transmission HD Sub-D 78 (m) 1 21 40 60 Pin* 20 39 59 78 Pin* 1 21 2 Pin* CH1 Sign 40 CH1 Ref CH1 VDD 22 3 4 24 5 CH2 VDD 25 6 CH2 A26 7 8 CH3 VDD 28 9 10 CH4 Sign 30 11 31 CH4 A32 13 14 CH5 VDD 34 15 16 CH6 Sign 36 47 48 CH6 VDD CH3 B+ CH3 B- 68 49 GND CH4 MAGN 69 50 CH4 LimP CH4 LimN 70 51 CH4 B+ CH4 B- 71 52 GND CH5 MAGN 72 53 CH5 LimP CH5 LimN 73 54 CH5 B+ CH5 B- 74 55 CH6 Ref CH3 LimP CH3 LimN 67 GND GND CH3 MAGN 66 CH5 A+ CH5 A- 35 46 CH5 Ref CH2 B+ CH2 B- 65 GND CH5 Sign 33 45 CH4 A+ CH2 LimP CH2 LimN 64 CH4 Ref CH4 VDD 12 44 GND GND CH2 MAGN 63 CH3 A+ CH3 A- 29 43 CH3 Ref CH1 B+ CH1 B- 62 GND CH3 Sign 27 42 CH2 A+ CH1 LimP CH1 LimN 61 CH2 Ref Signal* CH1 MAGN 41 GND CH2 Sign Pin* 60 CH1 A+ CH1 A- 23 17 Signal* GND CH6 MAGN 75 56 Physik Instrumente (PI ) GmbH & Co. KG_Auf der Römerstraße 1_76228 Karlsruhe/Germany Telefon +49 721 4846-0, Telefax +49 721 4846-1019 E-Mail info@pi.ws, www.pi.ws CH6 LimP CH6 LimN Page 12 / 12 2016-01-22 H824T0005, valid for H-824.G2, H-824.G2V, H-824.D2, H-824.D2V Pin* Pin* Signal* 37 CH6 A+ 18 CH6 A38 19 20 Signal* 76 CH6 B+ CH6 B- 77 58 GND 24 V output Pin* 57 GND Reserved 39 Pin* GND Brake/Enable drive 78 59 GND Power good 24 V input * Pin assignment of the C-887.5xx Hexapod controller. Since not all signals are required for all Hexapod models, some pins may be not assigned with your Hexapod model. Physik Instrumente (PI ) GmbH & Co. KG_Auf der Römerstraße 1_76228 Karlsruhe/Germany Telefon +49 721 4846-0, Telefax +49 721 4846-1019 E-Mail info@pi.ws, www.pi.ws
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