Physik Instrumente M 414 Datasheet

M-414-Datasheet Product ation & Software

User Manual: Physik Instrumente Product ation & Software

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High-Load Precision Stage
Inexpensive and Flexible Thanks to Large Number of Drives and Travel Range Variants for High Loads

M-414
 Use of precision components
 Flexible modular system M-403, M-404,
M-413, M-414

 Travel ranges from 100 mm to 300 mm
 Resolution to 0.023 µm
 Ball screw for high velocities and number
of cycles

 Min. incremental motion 0.1 µm

Application fields
Measuring technology, alignment.

Specifications
M-414.1PD
M-414.2PD
M-414.3PD

M-414.1DG
M-414.2DG
M-414.3DG

with ActiveDrive

with DC gear motor

X

X

Travel range

100 / 200 / 300

100 / 200 / 300

Integrated sensor

Rotary encoder

Rotary encoder

Sensor resolution

4000

2000

Cts./rev.

Design resolution

0.5

0.023

µm

typ.

Minimum incremental motion

0.5

0.1

µm

typ.

Backlash

0.5

4

µm

typ.

Unidirectional repeatability

0.5

1

µm

typ.

100

100

µrad

typ. over 100
mm

Velocity

100

3

mm/s

max.

Reference point switch repeatability

1

1

µm

typ.

Active axes

Unit

Tolerance

Motion and positioning

Pitch / yaw

(1)

mm

21.12.2017

M-414.1PD
M-414.2PD
M-414.3PD

M-414.1DG
M-414.2DG
M-414.3DG

Unit

Drive screw pitch

2

2

mm

Gear ratio

–

42.9206

Stiffness in motion direction

8

8

N/µm

±20 %

Load capacity

500

500

N

max.

Push/pull force

100

50

N

max.

Lateral force

200

200

N

max.

Drive type

DC motor, ActiveDrive

DC gear motor

Operating voltage

24

0 to ±12

V

Motor power

70

3.6

W

Operating temperature range

-20 to 65

-20 to 65

°C

Material

Al (black anodized)

Al (black anodized)

Mass

4.4 / 5.4 / 6.6

4.2 / 5.2 / 6.4

Connector

Sub-D 15 (m), incl. 3 m cable

Sub-D 15 (m), incl. 3 m cable

Recommended controllers/drivers

C-863
C-884

C-863
C-884

Tolerance

Mechanical properties

Drive properties

nominal

Miscellaneous

kg

±5 %

(1) This value applies to each 100 mm respectively for travel ranges greater than 100 mm.

21.12.2017

Drawings and Images

M-413 and M-414, dimensions in mm

Ordering Information
M-414.1PD
Precision linear stage, ballscrew, 120 mm wide, 100 mm, ActiveDrive

M-414.2PD
Precision linear stage, ballscrew, 120 mm wide, 200 mm, ActiveDrive

M-414.3PD
Precision linear stage, ballscrew, 120 mm wide, 300 mm, ActiveDrive

M-414.1DG
Precision linear stage, ballscrew, 120 mm wide, 100 mm, DC gear motor

M-414.2DG
Precision linear stage, ballscrew, 120 mm wide, 200 mm, DC gear motor

M-414.3DG
Precision linear stage, ballscrew, 120 mm wide, 300 mm, DC gear motor

21.12.2017



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File Type                       : PDF
File Type Extension             : pdf
MIME Type                       : application/pdf
PDF Version                     : 1.5
Linearized                      : No
Page Count                      : 3
Language                        : de-DE
Tagged PDF                      : Yes
Title                           : M-414 Datasheet
Author                          : Gesell, Pascal
Keywords                        : R2
Creator                         : Microsoft® Word 2010
Create Date                     : 2017:12:21 14:19:39+01:00
Modify Date                     : 2017:12:21 14:19:39+01:00
Producer                        : Microsoft® Word 2010
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