Physik Instrumente M 414 Datasheet

M-414-Datasheet Product ation & Software

User Manual: Physik Instrumente Product ation & Software

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Page Count: 3

21.12.2017
Inexpensive and Flexible Thanks to Large Number of Drives and Travel Range Variants for High Loads
Application fields
Measuring technology, alignment.
Specifications
M-414.1PD
M-414.2PD
M-414.3PD
M-414.1DG
M-414.2DG
M-414.3DG
Unit
Tolerance
with ActiveDrive
with DC gear motor
Active axes
X
X
Motion and positioning
Travel range
100 / 200 / 300
100 / 200 / 300
mm
Integrated sensor
Rotary encoder
Rotary encoder
Sensor resolution
4000
2000
Cts./rev.
Design resolution
0.5
0.023
µm
typ.
Minimum incremental motion
0.5
0.1
µm
typ.
Backlash
0.5
4
µm
typ.
Unidirectional repeatability
0.5
1
µm
typ.
Pitch / yaw (1)
100
100
µrad
typ. over 100
mm
Velocity
100
3
mm/s
max.
Reference point switch repeatability
1
1
µm
typ.
M-414
High-Load Precision Stage
Use of precision components
Flexible modular system M-403, M-404,
M-413, M-414
Travel ranges from 100 mm to 300 mm
Resolution to 0.023 µm
Ball screw for high velocities and number
of cycles
Min. incremental motion 0.1 µm
21.12.2017
M-414.1PD
M-414.2PD
M-414.3PD
M-414.1DG
M-414.2DG
M-414.3DG
Unit
Tolerance
Mechanical properties
Drive screw pitch
2
2
mm
Gear ratio
–
42.9206
Stiffness in motion direction
8
8
N/µm
±20 %
Load capacity
500
500
N
max.
Push/pull force
100
50
N
max.
Lateral force
200
200
N
max.
Drive properties
Drive type
DC motor, ActiveDrive
DC gear motor
Operating voltage
24
0 to ±12
V
Motor power
70
3.6
W
nominal
Miscellaneous
Operating temperature range
-20 to 65
-20 to 65
°C
Material
Al (black anodized)
Al (black anodized)
Mass
4.4 / 5.4 / 6.6
4.2 / 5.2 / 6.4
kg
±5 %
Connector
Sub-D 15 (m), incl. 3 m cable
Sub-D 15 (m), incl. 3 m cable
Recommended controllers/drivers
C-863
C-884
C-863
C-884
(1) This value applies to each 100 mm respectively for travel ranges greater than 100 mm.
21.12.2017
Drawings and Images
M-413 and M-414, dimensions in mm
Ordering Information
M-414.1PD
Precision linear stage, ballscrew, 120 mm wide, 100 mm, ActiveDrive
M-414.2PD
Precision linear stage, ballscrew, 120 mm wide, 200 mm, ActiveDrive
M-414.3PD
Precision linear stage, ballscrew, 120 mm wide, 300 mm, ActiveDrive
M-414.1DG
Precision linear stage, ballscrew, 120 mm wide, 100 mm, DC gear motor
M-414.2DG
Precision linear stage, ballscrew, 120 mm wide, 200 mm, DC gear motor
M-414.3DG
Precision linear stage, ballscrew, 120 mm wide, 300 mm, DC gear motor

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