Physik Instrumente N 565 Datasheet
N-565-Datasheet N-565 Linear Positioner with the Highest Precision
User Manual: Physik Instrumente N-565 Linear Positioner with the Highest Precision
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Linear Positioner with the Highest Precision NEXACT® Piezo Stepping Drive with Subnanometer Encoder Resolution N-565 Ultraprecision: 2 nm minimum incremental motion and direct-measuring PIOne encoder with 0.5 nm resolution Long travel ranges: 13 mm, 26 mm or 52 mm Self-locking when switched off: Saves energy and reduces generation of heat Long lifetime and high reliability due to PiezoWalk® technology Compact design: 65 mm width, 20 mm height NEXACT® reference-class linear positioner Linear positioner with NEXACT® PiezoWalk® drives allow high-precision positioning in the nanometer range over long travel ranges. They are equipped with direct-measuring linear encoders and crossed roller bearings for the highest accuracy. PiezoWalk® technology: High resolution and low wear The PiezoWalk® technology combines the technological advantages of piezo actuators with those of piezomotors. PiezoWalk® walking drives offer not only subnanometer resolution, high forces, and high stiffness but allow theoretically unlimited travel ranges. In contrast to other piezo-motorized drive principles, PiezoWalk® walking drives are not subject to sliding friction effects. They are based on stiction contacts of several piezo actuators that step along a runner. At rest, PiezoWalk® walking drives are self-locking, consume no energy, and do not generate heat. Direct position measuring with PIOne linear encoder The high-resolution PIOne encoder was developed by PI and, with corresponding processing of the measured value, allows a position resolution of much less than one nanometer. In addition, due to the short signal period and the high quality of the signals, the linearity error of PIOne encoders is less than 1 %. PIOne encoders support direction sensing when evaluating a reference signal. Valid patents In the technological field of piezo stepping drives (NEXACT®, NEXLINE®), PI has the following patents and patent applications: DE10148267B4, EP1267478B1, EP2209202B1, EP2209203B1, US6800984B2 Fields of application Sample manipulation, sample positioning, optics or mechanical components with high precision and stability, precision mechanics in the semiconductor industry, micromanipulation, microscopy, automation, applications in confined spaces, applications in a vacuum or nonmagnetic environments. 01.09.2017 Specifications Motion N-565.160 N-565.260 N-565.360 Unit Tolerance Active axes X X X Travel range 13 26 52 mm Velocity, closed-loop 10 10 10 mm/s System resolution 0.5 0.5 0.5 nm Bidirectional repeatability 12 12 12 nm typ. Unidirectional repeatability ±5 ±5 ±5 nm typ. Straightness / flatness ±1 ±1 ±1.5 µm typ. Pitch ±30 ±40 ±80 µrad typ. Yaw ±30 ±30 ±30 µrad typ. Mechanical properties N-565.160 N-565.260 N-565.360 Unit Tolerance Load capacity in z 20 20 20 N max. Overall mass 0.3 0.4 0.6 kg ±5 % Drive properties N-565 Unit Tolerance Drive type NEXACT® piezo walking drive Push/pull force 10 N max. Holding force (passive) 10 N min. Positioning N-565.x60 Unit Tolerance Integrated sensor PIOne incremental linear encoder Measurement principle Optical Measuring method Direct measuring Sensor resolution 0.5 nm Minimum incremental motion 2 nm typ. Unidirectional repeatability ±5 nm typ. Bidirectional repeatability 12 nm typ. Reference point switch Optical Miscellaneous N-565.x60 Unit Tolerance Operating temperature range 10 to 50 °C Operating voltage -10 to 45 V Material Aluminum, black anodized Motor connector HD Sub-D 15 (m) Sensor connection Sub-D 15 (f) max. The N-565 stage series replaces the LPS-65 series. 01.09.2017 Drawings and Images N-565, dimensions in mm. N-565.160: a=75; b=70; c=80 N-565.260: a=100; b=100; c=110 N-565.360: a=150; b=150; c=160. N-565.160 Precision linear stage, 13 mm travel range, PIOne linear encoder, 0.5 nm resolution, 10 N drive force, dimensions 65 × 80 × 20 mm (W × L × H), NEXACT® piezoelectric walking drive N-565.260 Precision linear stage, 26 mm travel range, PIOne linear encoder, 0.5 nm resolution, 10 N drive force, dimensions 65 × 110 × 20 mm (W × L × H), NEXACT® piezoelectric walking drive N-565.360 Precision linear stage, 52 mm travel range, PIOne linear encoder, 0.5 nm resolution, 10 N drive force, dimensions 65 × 160 × 20 mm (W × L × H), NEXACT® piezoelectric walking drive Ask about custom designs! 01.09.2017
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