Physik Instrumente N 565 Datasheet

N-565-Datasheet N-565 Linear Positioner with the Highest Precision

User Manual: Physik Instrumente N-565 Linear Positioner with the Highest Precision

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01.09.2017
NEXACT® Piezo Stepping Drive with Subnanometer Encoder Resolution
NEXACT® reference-class linear positioner
Linear positioner with NEXACT® PiezoWalk® drives allow high-precision positioning in the nanometer range over long travel
ranges. They are equipped with direct-measuring linear encoders and crossed roller bearings for the highest accuracy.
PiezoWalk® technology: High resolution and low wear
The PiezoWalk® technology combines the technological advantages of piezo actuators with those of piezomotors.
PiezoWalk® walking drives offer not only subnanometer resolution, high forces, and high stiffness but allow theoretically
unlimited travel ranges. In contrast to other piezo-motorized drive principles, PiezoWalk® walking drives are not subject to
sliding friction effects. They are based on stiction contacts of several piezo actuators that step along a runner. At rest,
PiezoWalk® walking drives are self-locking, consume no energy, and do not generate heat.
Direct position measuring with PIOne linear encoder
The high-resolution PIOne encoder was developed by PI and, with corresponding processing of the measured value, allows a
position resolution of much less than one nanometer. In addition, due to the short signal period and the high quality of the
signals, the linearity error of PIOne encoders is less than 1 %. PIOne encoders support direction sensing when evaluating a
reference signal.
Valid patents
In the technological field of piezo stepping drives (NEXACT®, NEXLINE®), PI has the following patents and patent applications:
DE10148267B4, EP1267478B1, EP2209202B1, EP2209203B1, US6800984B2
Fields of application
Sample manipulation, sample positioning, optics or mechanical components with high precision and stability, precision
mechanics in the semiconductor industry, micromanipulation, microscopy, automation, applications in confined spaces,
applications in a vacuum or nonmagnetic environments.
N-565
Linear Positioner with the Highest Precision
Ultraprecision: 2 nm minimum
incremental motion and direct-measuring
PIOne encoder with 0.5 nm resolution
Long travel ranges: 13 mm, 26 mm or
52 mm
Self-locking when switched off: Saves
energy and reduces generation of heat
Long lifetime and high reliability due to
PiezoWalk® technology
Compact design: 65 mm width, 20 mm
height
01.09.2017
Specifications
Motion
N-565.160
N-565.260
N-565.360
Tolerance
Active axes
X
X
X
Travel range
13
26
52
Velocity, closed-loop
10
10
10
max.
System resolution
0.5
0.5
0.5
Bidirectional repeatability
12
12
12
typ.
Unidirectional repeatability
±5
±5
±5
typ.
Straightness / flatness
±1
±1
±1.5
typ.
Pitch
±30
±40
±80
typ.
Yaw
±30
±30
±30
typ.
Mechanical properties
N-565.160
N-565.260
N-565.360
Tolerance
Load capacity in z
20
20
20
max.
Overall mass
0.3
0.4
0.6
±5 %
Drive properties
N-565
Tolerance
Drive type
NEXACT® piezo walking drive
Push/pull force
10
max.
Holding force (passive)
10
min.
Positioning
N-565.x60
Tolerance
Integrated sensor
PIOne incremental linear encoder
Measurement principle
Optical
Measuring method
Direct measuring
Sensor resolution
0.5
Minimum incremental motion
2
typ.
Unidirectional repeatability
±5
typ.
Bidirectional repeatability
12
typ.
Reference point switch
Optical
Miscellaneous
N-565.x60
Tolerance
Operating temperature range
10 to 50
Operating voltage
-10 to 45
Material
Aluminum, black anodized
Motor connector
HD Sub-D 15 (m)
Sensor connection
Sub-D 15 (f)
The N-565 stage series replaces the LPS-65 series.
01.09.2017
Drawings and Images
N-565, dimensions in mm. N-565.160: a=75; b=70; c=80 N-565.260: a=100; b=100; c=110 N-565.360: a=150; b=150;
c=160.
N-565.160
Precision linear stage, 13 mm travel range, PIOne linear encoder, 0.5 nm resolution, 10 N drive force, dimensions 65 × 80 × 20
mm (W × L × H), NEXACT® piezoelectric walking drive
N-565.260
Precision linear stage, 26 mm travel range, PIOne linear encoder, 0.5 nm resolution, 10 N drive force, dimensions 65 × 110 ×
20 mm (W × L × H), NEXACT® piezoelectric walking drive
N-565.360
Precision linear stage, 52 mm travel range, PIOne linear encoder, 0.5 nm resolution, 10 N drive force, dimensions 65 × 160 ×
20 mm (W × L × H), NEXACT® piezoelectric walking drive
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