Physik Instrumente P­753 Positioning Systems P 753 User Manual PZ254E100

P-753_UserManual_PZ254E100 P-753 LISA Linear Actuator & Stage

User Manual: Physik Instrumente Product ation & Software

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Physik Instrumente (PI) GmbH & Co. KG, Auf der Roemerstr. 1, 76228 Karlsruhe, Germany
Phone: +49 721 4846-0, Fax: +49 721 4846-1019, E-mail: info@pi.ws
PZ254E
P-753 Positioning Systems
User Manual
Version: 1.0.0
Date: 13.10.2014
This document describes the following
products:
P-753.11C / P-753.1CD
LISA High-Dynamics Piezo Nanopositionin
g
System, 12 µm, Direct Metrology,
Capacitive Sensor
P-753.21C / P-753.2CD
LISA High-
Dynamics Piezo Nanopositioning
System, 25 µm, Direct Metrology,
Capacitive Sensor
P-753.31C / P-753.3CD
LISA High-
Dynamics Piezo Nanopositioning
System, 38 µm, Direct Metrology,
Capacitive Sensor
.11C/.21C/.31C = with LEMO connectors
.1CD/.2CD/.3CD = with Sub-D connector
Physik Instrumente (PI) GmbH & Co. KG is the owner of the following trademarks:
PI®, PIC®, PICMA®, PILine®, PIFOC®, PiezoWalk®, NEXACT®, NEXLINE®,
NanoCube®, NanoAutomation®, Picoactuator®, PInano®
The products described in this document are in part protected by the following patents:
German patent no. 10021919C2
German patent no. 10234787C1
German patent no. 10348836B3
German patent no. 102005015405B3
German patent no. 102007011652B4
US patent no. 7,449,077
Japanese patent no. 4667863
Chinese patent no. ZL03813218.4
© 2014 Physik Instrumente (PI) GmbH & Co. KG, Karlsruhe, Germany. The text,
photographs and drawings in this manual are protected by copyright. With regard
thereto, Physik Instrumente (PI) GmbH & Co. KG retains all the rights. Use of said
text, photographs and drawings is permitted only in part and only upon citation of the
source.
Original instructions
First printing: 13.10.2014
Document number: PZ254E, CBo, Version 1.0.0
Subject to change without notice. This manual is superseded by any new release. The
latest release is available for download (p. 3) on our website.
1 About this Document 1
1.1 Goal and Target Audience of this User Manual ................................................... 1
1.2 Symbols and Typographic Conventions ............................................................... 1
1.3 Figures .................................................................................................................. 2
1.4 Other Applicable Documents ................................................................................ 3
1.5 Downloading Manuals .......................................................................................... 3
2 Safety 5
2.1 Intended Use ........................................................................................................ 5
2.2 General Safety Instructions .................................................................................. 5
2.3 Organizational Measures ...................................................................................... 7
3 Product Description 9
3.1 Model Overview .................................................................................................... 9
3.2 Product View.......................................................................................................10
3.3 Product Labeling .................................................................................................10
3.4 Scope of Delivery ...............................................................................................12
3.5 Suitable Electronics ............................................................................................12
3.6 Technical Features .............................................................................................13
3.6.1 PICMA® Piezo Actuators .................................................................13
3.6.2 Flexure Guides .................................................................................13
3.6.3 Capacitive Sensors ...........................................................................13
3.6.4 ID Chip (Only Models With Sub-D Connector) .................................13
4 Unpacking 15
5 Installation 17
5.1 General Notes on Installation .............................................................................17
5.2 Connecting the P-753 to the Protective Earth Conductor ..................................19
5.3 Mounting the P-753 ............................................................................................21
5.4 Affixing the Load .................................................................................................24
6 Start-Up and Operation 27
6.1 General Notes on Start-Up and Operation .........................................................27
6.2 Operating the P-753 ...........................................................................................29
6.3 Discharging the P-753 ........................................................................................29
Contents
7 Maintenance 31
7.1 General Notes on Maintenance ..........................................................................31
7.2 Cleaning the P-753 .............................................................................................31
8 Troubleshooting 33
9 Customer Service 35
10 Technical Data 37
10.1 Specifications......................................................................................................37
10.1.1 Data Table ........................................................................................37
10.1.2 Maximum Ratings .............................................................................38
10.1.3 Ambient Conditions and Classifications ...........................................39
10.2 Dimensions .........................................................................................................40
10.3 Torque for Stainless Steel Screws (A2-70) ........................................................43
10.4 Pin Assignment ...................................................................................................43
11 Old Equipment Disposal 45
12 EC Declaration of Conformity 47
1 About this Document
P-753 Positioning Systems PZ254E Version: 1.0.0 1
In this Chapter
Goal and Target Audience of this User Manual ............................................................ 1
Symbols and Typographic Conventions ........................................................................ 1
Figures ........................................................................................................................... 2
Other Applicable Documents ......................................................................................... 3
Downloading Manuals ................................................................................................... 3
1.1 Goal and Target Audience of this User Manual
This user manual contains the necessary information for the intended use of the P-753
(x stands for the different models, p. 9).
Basic knowledge of control technology, drive technologies and suitable safety
measures is assumed.
The latest versions of the user manuals are available for download (p. 3) on our
website.
1.2 Symbols and Typographic Conventions
The following symbols and typographic conventions are used in this user manual:
CAUTION
Dangerous situation
If not avoided, the dangerous situation will result in minor injury.
Actions to take to avoid the situation.
NOTICE
Dangerous situation
If not avoided, the dangerous situation will result in damage to the equipment.
Actions to take to avoid the situation.
1 About this Document
1 About this Document
2 Version: 1.0.0 PZ254E P-753 Positioning Systems
INFORMATION
Information for easier handling, tricks, tips, etc.
Symbol/
Label
Meaning
1.
2.
Action consisting of several steps whose sequential
order must be observed
Action consisting of one or several steps whose
sequential order is irrelevant
List item
p. 5 Cross-reference to page 5
RS-232 Labeling of an operating element on the product
(example: socket of the RS-232 interface)
Warning signs affixed to the product that refer to
detailed information in this manual.
1.3 Figures
For better understandability, the colors, proportions and degree of detail in illustrations
can deviate from the actual circumstances. Photographic illustrations may also differ
and must not be seen as guaranteed properties.
1 About this Document
P-753 Positioning Systems PZ254E Version: 1.0.0 3
1.4 Other Applicable Documents
The devices and software tools which are mentioned in this documentation are
described in their own manuals.
The latest versions of the user manuals are available for download (p. 3) on our
website.
Device Document
E-501 modular piezo controller PZ62E User Manual
E-505 piezo amplifier module PZ62E User Manual
E-509 sensor / servo controller module PZ77E User Manual
E-515 display module PZ62E User Manual
E-517 interface and display module PZ214E User Manual
E-610.C0 piezo amplifier / servo controller PZ72E User Manual
E-625.CR piezo servo controller PZ166E User Manual
E-665.CR piezo servo controller PZ127E User Manual
E-753 digital piezo controller PZ193E User Manual
PIMikroMove SM148E Software Manual
P-5xx / P-6xx / P-7xx piezo positioning
systems
PZ240EK Short Instructions
1.5 Downloading Manuals
INFORMATION
If a manual is missing or problems occur with downloading:
Contact our customer service department (p. 35).
1 About this Document
4 Version: 1.0.0 PZ254E P-753 Positioning Systems
INFORMATION
For some products (e.g. Hexapod systems and electronics that are delivered with a
CD), access to the manuals is password-protected. The password is stored on the
CD. Availability of the manuals:
Password-protected manuals: FTP download directory
Freely available manuals: PI website
Follow the corresponding instructions for downloading.
Download freely accessible manuals
1. Open the website http://www.pi-portal.ws.
2. Click Downloads.
3. Click the corresponding product category.
4. Go to the corresponding product code.
The available manuals are displayed.
5. Click the desired manual and save it on the hard disk of your PC or on a data
storage medium.
Download password-protected manuals
1. Insert the product CD in the PC drive.
2. Switch to the Manuals directory on the CD.
3. In the Manuals directory, open the Release News (file including releasenews
in the file name).
4. Find the user name and the password in the section "User login for software
download" in the Release News.
5. Open the FTP download directory (ftp://pi-ftp.ws).
− Windows operating systems: Open the FTP download directory in
Windows Explorer.
6. Log in with the user name and the password from the Release News.
7. In the directory of the corresponding product, go to the Manuals sub-directory.
8. Copy the desired manual to the hard disk of your PC or to a data storage
medium.
2 Safety
P-753 Positioning Systems PZ254E Version: 1.0.0 5
In this Chapter
Intended Use ................................................................................................................. 5
General Safety Instructions ........................................................................................... 5
Organizational Measures ............................................................................................... 7
2.1 Intended Use
The P-753 is a laboratory device as defined by DIN EN 61010-1. It is intended to be
used in interior spaces and in an environment which is free of dirt, oil, and lubricants.
Based on its design and realization, the P-753 is intended for fine positioning as well
as the fast and precise motion of small objects. The motion takes place linearly in one
axis.
The P-753 can be mounted with a horizontally or vertically oriented motion axis.
Vertical mounting is only possible under certain conditions (p. 21).
The intended use of the P-753 is only possible in combination with suitable electronics
(p. 12) that is available from PI. The electronics is not included in the scope of delivery
of the P-753.
The electronics must provide the required operating voltages. To ensure proper
performance of the servo-control system, the electronics must be able to read out and
process the signals from the capacitive sensors.
2.2 General Safety Instructions
The P-753 is built according to state-of-the-art technology and recognized safety
standards. Improper use can result in personal injury and/or damage to the P-753.
Only use the P-753 for its intended purpose, and only use it if it is in a good
working order.
Read the user manual.
Immediately eliminate any faults and malfunctions that are likely to affect
safety.
The operator is responsible for the correct installation and operation of the P-753.
2 Safety
2 Safety
6 Version: 1.0.0 PZ254E P-753 Positioning Systems
The P-753 is driven by piezo actuators. Temperature changes and compressive
stresses can induce charges in piezo actuators. After being disconnected from the
electronics, piezo actuators can also stay charged for several hours. Touching or
short-circuiting the contacts in the connector of the P-753 can lead to minor injuries.
In addition, the piezo actuators can be destroyed by an abrupt contraction.
Do not open the P-753.
Discharge the piezo actuators of the stage before installation:
Connect the stage to the switched-off PI controller, which is equipped with an
internal discharge resistor.
Do not pull out the connector from the electronics during operation.
For stages with Sub-D connector:
Touching the contacts in the connector can lead to an electric shock (max. 130 V DC)
and minor injuries.
Do not touch the contacts in the connector.
Secure the connector of the stage with screws against being pulled out of the
controller.
If a protective earth conductor is not or not properly connected, dangerous touch
voltages can occur on the P-753 in the case of malfunction or failure of the system.
If touch voltages exist, touching the P-753 can result in minor injuries from electric
shock.
Connect the P-753 to a protective earth conductor (p. 19) before start-up.
Do not remove the protective earth conductor during operation.
If the protective earth conductor has to be removed temporarily (e. g. in the
case of modifications), reconnect the P-753 to the protective earth conductor
before starting it up again.
Mechanical forces can damage or misalign the P-753.
Avoid impacts that affect the P-753.
Do not drop the P-753.
Do not exceed the maximum permissible stress and load capacities according
to the specifications (p. 37).
Only hold the P-753 externally by the base body.
2 Safety
P-753 Positioning Systems PZ254E Version: 1.0.0 7
The P-753 is maintenance-free and achieves its positioning accuracy as a result of the
optimum alignment of mechanical components and piezo actuators. Loosened screws
cause a loss in positioning accuracy.
Only loosen screws according to the instructions in this manual.
Do not open the P-753.
2.3 Organizational Measures
User manual
Always keep this user manual available by the P-753.
The latest versions of the user manuals are available for download (p. 3) on
our website.
Add all information given by the manufacturer to the user manual, for example
supplements or Technical Notes.
If you pass the P-753 on to other users, also turn over this user manual as
well as other relevant information provided by the manufacturer.
Only use the device on the basis of the complete user manual. Missing
information due to an incomplete user manual can result in minor injury and
property damage.
Only install and operate the P-753 after having read and understood this user
manual.
Personnel qualification
The P-753 may only be installed, started up, operated, maintained and cleaned by
authorized and appropriately qualified personnel.
3 Product Description
P-753 Positioning Systems PZ254E Version: 1.0.0 9
In this Chapter
Model Overview ............................................................................................................. 9
Product View ............................................................................................................... 10
Product Labeling .......................................................................................................... 10
Scope of Delivery ........................................................................................................ 12
Suitable Electronics ..................................................................................................... 12
Technical Features ...................................................................................................... 13
3.1 Model Overview
The following standard versions of the P-753 are available:
Model Description
P-753.11C LISA high-dynamics piezo nanopositioning system, 12 µm, direct
metrology, capacitive sensor, LEMO connector(s)
P-753.1CD LISA high-dynamics piezo nanopositioning system, 12 µm, direct
metrology, capacitive sensor, Sub-D connector(s)
P-753.21C LISA high-dynamics piezo nanopositioning system, 25 µm, direct
metrology, capacitive sensor, LEMO connector(s)
P-753.2CD LISA high-dynamics piezo nanopositioning system, 25 µm, direct
metrology, capacitive sensor, Sub-D connector(s)
P-753.31C LISA high-dynamics piezo nanopositioning system, 38 µm, direct
metrology, capacitive sensor, LEMO connector(s)
P-753.3CD LISA high-dynamics piezo nanopositioning system, 38 µm, direct
metrology, capacitive sensor, Sub-D connector(s)
3 Product Description
3 Product Description
10 Version: 1.0.0 PZ254E P-753 Positioning Systems
3.2 Product View
The figure serves as an example and can differ from your stage model.
Figure 1: Example of product view
1 Moving platform
2 Protective earth connection
3 Cable exit
4 Base body
X Positive direction of motion of the stage
3.3 Product Labeling
Figure 2: P-753: Position of the product labeling (example of a view from above)
3 Product Description
P-753 Positioning Systems PZ254E Version: 1.0.0 11
Position Labeling Description
B P-753.1CD Product name (example), the places after the point
refer to the model
B 114039262 Serial number (example), individual for each P-753
Meaning of the places (counting from left):
1 = internal information
2 and 3 = manufacturing year
4 to 9 = consecutive numbers
B LISA Brand name
B Manufacturer's logo
B Warning sign "Observe manual!"
B Old equipment disposal (p. 45)
B Country of origin:
Germany
Country of origin
B WWW.PI.WS Manufacturer's address (website)
B CE conformity mark
A Symbol for the protective earth conductor, marks the
protective earth connection of the P-753
Figure 3: P-753: "Residual voltage" warning sign on connector
Warning sign "Residual voltage": Notice of risk of electric shock (p. 5)
3 Product Description
12 Version: 1.0.0 PZ254E P-753 Positioning Systems
3.4 Scope of Delivery
Item ID Components
P-753 Stage according to order (p. 9)
000036450 M4 screw set for protective earth, consisting of:
1 M4x8 flat-head screw with cross recess, ISO 7045
2 safety washers
2 flat washers
PZ240EK Short instructions for piezo positioning systems
3.5 Suitable Electronics
To operate a P-753, you need suitable electronics. Devices are selected depending on
the type of application. The following table lists suitable devices (x = suitable).
Electronics Chan-
nels
P-753 Model
.11C .21C .31C .1CD .2CD .3CD
E-610 piezo amplifier / servo
controller, OEM module
1 x x x
E-625 piezo servo controller
(bench-top)
1 x x x
E-665 servo controller (bench-top) 1 x x x
E-753 digital piezo controller 1 x x x
E-501 modular piezo controller,
consisting of:
E-505 piezo amplifier module
E-509 sensor / servo
controller module
Optional: E-517 interface and
display module or E-515 display
module
1 x x x
3 Product Description
P-753 Positioning Systems PZ254E Version: 1.0.0 13
3.6 Technical Features
3.6.1 PICMA® Piezo Actuators
P-753 stages are driven by PICMA® piezo actuators. PICMA® actuators have
all-ceramic insulation and are therefore far superior to conventional actuators in
respect to performance and lifetime. The monolithic piezoceramic block is protected
against humidity and failure due to increased leakage current by a ceramic insulation
layer. In this way, an especially high reliability is achieved even under extreme
ambient conditions. In contrast to motorized drives, there are no rotating parts or
friction. The piezo actuators are therefore backlash-, maintenance- and wear-free.
3.6.2 Flexure Guides
P-753 stages have flexure guides (flexures) for frictionless motion and high guiding
accuracies.
A flexure guide is an element which is free from static and sliding friction. It is based
on the elastic deformation (bending) of a solid (e.g. steel) and does not have any
rolling or sliding parts. Flexure elements have a high stiffness and load capacity.
Flexure guides are maintenance- and wear-free. They are 100 % vacuum compatible,
function in a wide temperature range and do not require any lubricants.
3.6.3 Capacitive Sensors
Capacitive sensors measure the position directly on the moving platform (direct
metrology) and work without contact. Neither friction nor hysteresis interferes with the
motion, which allows excellent linearity values to be achieved in combination with the
high position resolution. In connection with suitable electronics, capacitive sensors
achieve the best resolution, stability and bandwidth.
3.6.4 ID Chip (Only Models With Sub-D Connector)
An ID chip is located in the Sub-D connector of the stage. When the stage is
calibrated at the factory with digital electronics, the calibration data is saved together
with specific product information on the ID chip. When switched on, digital electronics
read the data from the ID chip of the connected stage. Stages whose ID chip contains
the calibration data can therefore be connected to any suitable digital electronics
without a new calibration.
For more information on the ID chip, see the manual of the controller used.
4 Unpacking
P-753 Positioning Systems PZ254E Version: 1.0.0 15
1. Unpack the P-753 with care.
2. Compare the contents against the items covered by the contract and against
the packing list.
3. Inspect the contents for signs of damage. If parts are missing or you notice
signs of damage, contact PI immediately.
4. Keep all packaging materials in case the product needs to be returned.
4 Unpacking
5 Installation
P-753 Positioning Systems PZ254E Version: 1.0.0 17
In this Chapter
General Notes on Installation ...................................................................................... 17
Connecting the P-753 to the Protective Earth Conductor ........................................... 19
Mounting the P-753 ..................................................................................................... 21
Affixing the Load .......................................................................................................... 24
5.1 General Notes on Installation
CAUTION
Dangerous voltage and residual charge on piezo actuators!
The P-753 is driven by piezo actuators. Temperature changes and compressive
stresses can induce charges in piezo actuators. After being disconnected from the
electronics, piezo actuators can also stay charged for several hours. Touching or
short-circuiting the contacts in the connector of the P-753 can lead to minor injuries.
In addition, the piezo actuators can be destroyed by an abrupt contraction.
Do not open the P-753.
Discharge the piezo actuators of the stage before installation:
Connect the stage to the switched-off PI controller, which is equipped with an
internal discharge resistor.
Do not pull out the connector from the electronics during operation.
For stages with Sub-D connector:
Touching the contacts in the connector can lead to an electric shock (max.
130 V DC) and minor injuries.
Do not touch the contacts in the connector.
Secure the connector of the stage with screws against being pulled out of the
controller.
5 Installation
5 Installation
18 Version: 1.0.0 PZ254E P-753 Positioning Systems
NOTICE
Mechanical overload from incorrect handling!
An impermissible mechanical overload of the moving platform of the P-753 can
cause damage to the piezo actuators, sensors and flexure joints of the P-753 as well
as losses of accuracy.
Only hold the P-753 externally by the base body.
NOTICE
Damage from unsuitable cables!
Unsuitable cables can damage the stage and the electronics.
Only use cables provided by PI for connecting the P-753 to the electronics.
NOTICE
Damage from incorrect mounting!
Incorrect mounting of the P-753 or incorrectly mounted parts can damage the P-753.
Only mount the P-753 and the loads on the mounting fixtures (holes) intended
for this purpose.
NOTICE
Damage due to incorrectly tightened screws!
Incorrectly tightened screws can cause damage.
Observe the torque range (p. 43) given for the screws used during installation.
INFORMATION
Extended cables can reduce the positioning accuracy of the P-753 or affect the
sensor processing by the electronics.
Do not use cable extensions. If you need longer cables, contact our customer
service department (p. 35).
5 Installation
P-753 Positioning Systems PZ254E Version: 1.0.0 19
5.2 Connecting the P-753 to the Protective Earth
Conductor
INFORMATION
In the case of P-753 stages with Sub-D connectors, ground loops can occur when
the stage is grounded via its protective earth connector as well as by the shield of the
connection cable for the electronics.
If a ground loop occurs, contact our customer service department (p. 35).
INFORMATION
Observe the applicable standards for mounting the protective earth conductor.
The P-753 is equipped with an M4 hole for fastening the protective earth conductor.
This hole is located next to the cable exit and is marked with the protective earth
conductor symbol (see "Dimensions", p. 40).
Prerequisite
You have read and understood the general notes on installation (p. 17).
The stage is not connected to the electronics.
Tools and accessories
Suitable protective earth conductor: Cross-sectional area of the cable
≥0.75 mm2
Supplied M4 protective earth screw set (p. 12) for connecting the protective
earth conductor
Suitable screwdriver
5 Installation
20 Version: 1.0.0 PZ254E P-753 Positioning Systems
Figure 4: Mounting of the protective earth conductor (profile view)
1 Base body of the P-753
2 Flat washer
3 Safety washer
4 Screw
5 Cable lug
6 Protective earth conductor
Connecting the P-753 to the protective earth conductor
1. If necessary, fasten a suitable cable lug to the protective earth conductor.
2. Fasten the cable lug of the protective earth conductor using the M4 screw on
the protective earth connection of the P-753 as shown in the profile view.
3. Tighten the M4 screw with a torque of 1.2 Nm to 1.5 Nm.
4. Make sure that the contact resistance at all connection points relevant for
mounting the protective earth conductor is <0.1 Ω at 25 A.
5 Installation
P-753 Positioning Systems PZ254E Version: 1.0.0 21
5.3 Mounting the P-753
NOTICE
Warping of the P-753 due to mounting on uneven surfaces!
Mounting the P-753 on an uneven surface can warp the P-753. Warping reduces the
accuracy.
Mount the P-753 on an even surface. The recommended evenness of the
surface is ≤10 µm.
For applications with great temperature changes:
Only mount the P-753 on surfaces that have the same or similar thermal
expansion properties as the P-753.
NOTICE
Tensile stress on piezo actuator with vertical mounting!
If the stage is mounted vertically and the direction of motion of the X axis is
downward, this will result in a tensile stress which reduces the internal preload of the
piezo actuator. Operation with reduced preload can destroy the piezo actuator.
Do not exceed the maximum permissible stress and load capacities according to
the specifications (p. 37).
NOTICE
Protruding screw heads!
Protruding screw heads can damage the P-753.
Ensure that the screw heads do not protrude from counter-sunk holes so that
they do not interfere with the stage motion.
5 Installation
22 Version: 1.0.0 PZ254E P-753 Positioning Systems
The figure below serves as an example and can differ from your stage model.
Figure 5: P-753: Four counter-sunk holes for mounting from above (white arrows) and two threaded holes
for mounting from below (hatched arrows)
Prerequisite
You have read and understood the general notes on installation (p. 17).
You have provided a suitable surface. For the required position of the holes,
see "Dimensions" (p. 40).
− For mounting from above with M3 screws: Four M3 holes with a depth of
at least 3 mm are present.
− For mounting from below with M3 screws: Two through holes for M3
screws are present. The thickness of the surface and the depth of the
counterbores at the through-holes in the surface are matched for
compliance with the maximum screw-in depth of 5 mm in the P-753.
− The evenness of the surface is ≤10 µm.
− For applications with great temperature changes: The surface should
have the same thermal expansion properties as the P-753 (e.g. surface
made of aluminum).
You have accounted for the space required for a cable routing free of kinks
and in accordance with regulations.
The P-753 is not connected to the controller.
5 Installation
P-753 Positioning Systems PZ254E Version: 1.0.0 23
Tools and accessories
For mounting from above: Four M3 screws of suitable length (p. 40)
For mounting from below: Two M3 screws of suitable length (p. 40)
Suitable screwdriver
Mounting the stage on a surface
1. Align the P-753 on the surface so that the corresponding holes in the P-753
and the surface overlap.
2. Mount the P-753 on the surface from above or from below:
Mounting from above with four M3 screws:
a) Introduce four screws into the counter-sunk holes in the base body of the
P-753 from above.
b) Tighten the four screws. Observe the specified torque range (p. 43) while
doing so.
Mounting from below with two M3 screws:
a) Introduce two screws through the holes in the surface into the base body of
the P-753 from below.
b) Tighten the two screws. Observe the specified torque range (p. 43) while
doing so.
3. Make sure that no screw heads protrude from the counter-sunk holes.
4. Check that the P-753 fits on the surface without backlash.
5. If necessary, secure the screws with a thread-locking adhesive.
5 Installation
24 Version: 1.0.0 PZ254E P-753 Positioning Systems
5.4 Affixing the Load
NOTICE
Mechanical overload due to high torques and high loads!
When affixing the load, high torques and high loads can overload the moving
platform of the P-753. Mechanical overload can cause damage to the piezo
actuators, sensors and flexure joints of the P-753 and lead to losses in accuracy.
Observe the torque range (p. 43) given for the screws used during installation.
Avoid torques >0.3 Nm on the moving platform.
Do not exceed the maximum permissible stress and load capacities according to
the specifications (p. 37).
NOTICE
Warping of the P-753 due to affixing of loads with uneven contact surface!
Affixing loads with an uneven contact surface can warp the P-753. Warping reduces
the accuracy.
Only affix loads on the P-753 whose contact surface with the moving platform of
the stage has an evenness of at least 10 μm.
For applications with great temperature changes:
Only affix loads on the P-753 that have the same or similar thermal expansion
properties as the P-753.
NOTICE
Center of load at unsuitable position!
If the center of load is located far outside of the moving platform (e. g. high set-ups
and long levers), the P-753 can be damaged from high strain on the flexure guides,
high torques and oscillations, especially when operated dynamically.
If the center of the load to be affixed is far above or to the side of the moving
platform, adjust the controller settings before start-up or contact our customer
service department (p. 35).
5 Installation
P-753 Positioning Systems PZ254E Version: 1.0.0 25
NOTICE
Screws that are too long!
The P-753 can be damaged by screws that are too long.
Note the depth of the mounting holes in the moving platform (p. 40).
Only use screws of the correct length for the respective mounting holes.
INFORMATION
The positive direction of motion of the axis is given in the product view (p. 10).
Figure 6: P-753: M2.5 holes in the moving platform for affixing loads
Center of load at the optimum position:
Figure 7: Example of an optimally placed load (1: center of load)
5 Installation
26 Version: 1.0.0 PZ254E P-753 Positioning Systems
Center of load at an unsuitable position:
Figure 8: High set-up and center of load (1) far above the moving platform
Figure 9: Long lever and center of load (1) on the side of the moving platform
Prerequisite
You have read and understood the general notes on installation (p. 17).
Tools and accessories
M2.5 screws of suitable length (p. 40)
Suitable tools
Affixing the Load
Only affix loads to the threaded holes (p. 40) intended for this purpose and
with suitable screws. While doing so, observe the torque range (p. 43)
specified for the screws, and avoid torques >0.3 Nm on the moving platform.
Affix the load so that it is centered and that the center of load is on the moving
platform.
6 Start-Up and Operation
P-753 Positioning Systems PZ254E Version: 1.0.0 27
In this Chapter
General Notes on Start-Up and Operation .................................................................. 27
Operating the P-753 .................................................................................................... 29
Discharging the P-753 ................................................................................................. 29
6.1 General Notes on Start-Up and Operation
CAUTION
Risk of electric shock if the protective earth conductor is not connected!
If a protective earth conductor is not or not properly connected, dangerous touch
voltages can occur on the P-753 in the case of malfunction or failure of the system.
If touch voltages exist, touching the P-753 can result in minor injuries from electric
shock.
Connect the P-753 to a protective earth conductor (p. 19) before start-up.
Do not remove the protective earth conductor during operation.
If the protective earth conductor has to be removed temporarily (e. g. in the case
of modifications), reconnect the P-753 to the protective earth conductor before
starting it up again.
NOTICE
Destruction of the piezo actuator by electric flashovers!
The use of the P-753 in environments that increase the electrical conductivity can
lead to the destruction of the piezo actuator by electric flashovers. Electric flashovers
can be caused by moisture, high humidity, liquids and conductive materials such as
metal dust. In addition, electric flashovers can also occur in certain air pressure
ranges due to the increased conductivity of the air.
Avoid operating the P-753 in environments that can increase the electric
conductivity.
Only operate the P-753 within the permissible ambient conditions and
classifications (p. 39).
6 Start-Up and Operation
6 Start-Up and Operation
28 Version: 1.0.0 PZ254E P-753 Positioning Systems
NOTICE
Reduced lifetime of the piezo actuator due to permanently high voltage!
The permanent application of a high static voltage to piezo actuators leads to a
considerable reduction in the lifetime of the piezo ceramic of the actuator.
When the P-753 is not used but the controller remains switched on to ensure
temperature stability, discharge the P-753 (p. 29).
NOTICE
Operating voltage too high or incorrectly connected!
Operating voltages that are too high or incorrectly connected can cause damage to
the P-753.
Only operate the P-753 with controllers/drivers and original accessories from PI.
Do not exceed the operating voltage range (p. 38) for which the P-753 is
specified.
Only operate the P-753 when the operating voltage is properly connected; see
"Pin Assignment" (p. 43).
NOTICE
Uncontrolled oscillation!
Oscillations can cause irreparable damage to the stage. Oscillations are indicated by
a humming and can result from the following causes:
A change in the load and/or dynamics requires the servo-control parameters to
be adjusted.
The stage is operated near its resonant frequency.
If you notice oscillations:
In closed-loop operation, immediately switch off the servo mode.
In open-loop operation, immediately stop the stage.
INFORMATION
The positive direction of motion of the axis is given in the product view (p. 10).
INFORMATION
Sound and vibration (e.g. footfall, impacts) can be transmitted to the stage and can
affect its performance with regard to position stability.
Avoid transmitting sound and vibration while the stage is being operated.
6 Start-Up and Operation
P-753 Positioning Systems PZ254E Version: 1.0.0 29
6.2 Operating the P-753
Follow the instructions in the manual of the controller used for start-up and
operation of the P-753.
6.3 Discharging the P-753
The P-753 must be discharged in the following cases:
Before installation
If the P-753 is not used but the controller remains switched on to ensure
temperature stability
Before demounting (e.g. before cleaning and transporting the P-753 and for
modifications)
The P-753 is discharged through the internal discharge resistor of the controller from
PI.
Discharging a P-753 that is connected to the controller
In closed-loop operation:
1. Switch off the servo mode on the controller.
2. Set the piezo voltage to 0 V on the controller.
In open-loop operation:
Set the piezo voltage to 0 V on the controller.
Discharging a P-753 that is not connected to the controller
Connect the stage to the switched-off controller from PI.
7 Maintenance
P-753 Positioning Systems PZ254E Version: 1.0.0 31
In this Chapter
General Notes on Maintenance ................................................................................... 31
Cleaning the P-753 ...................................................................................................... 31
7.1 General Notes on Maintenance
NOTICE
Misalignment from loosening screws on the base body!
The P-753 is maintenance-free and precisely aligned. Loosened screws on the base
body cause a loss in positioning accuracy.
Do not loosen any screws on the base body.
7.2 Cleaning the P-753
Prerequisites
You have discharged the piezo actuators of the P-753 (p. 29).
You have disconnected the P-753 from the controller.
Cleaning the P-753
Clean the surfaces of the P-753 with a cloth that is slightly dampened with a
mild cleanser or disinfectant (e.g. ethanol or isopropanol).
Do not do any ultrasonic cleaning.
7 Maintenance
8 Troubleshooting
P-753 Positioning Systems PZ254E Version: 1.0.0 33
Problem Possible Causes Solution
No or limited
motion
The cable is not
connected correctly
Check the cable connections.
Excessive load Do not exceed the maximum
permissible stress and load capacities
according to the specifications (p. 37).
Zero shift of the
sensor for the
following reasons:
Load applied in
direction of motion
Ambient/operating
temperature of the
stage far above or
below calibration
temperature
(21°C to 24°C)
Perform a zero-point adjustment of the
sensor (see controller manual).
Reduced
accuracy
Warping of the base
body or the moving
platform
Only mount the P-753 on surfaces with
the following characteristics:
− Evenness of at least 10 μm
− The thermal expansion properties
are similar to those of the P-753
(e. g. surfaces made of aluminum).
Only affix loads with the following
characteristics on the P-753:
− The contact surface of the load has
an evenness of at least 10 μm.
− The thermal expansion properties
are similar to those of the P-753
(e. g. loads made of aluminum).
8 Troubleshooting
8 Troubleshooting
34 Version: 1.0.0 PZ254E P-753 Positioning Systems
Problem Possible Causes Solution
P-753 or controller
has been replaced
When stages, whose ID chip (p. 13) does
not contain any calibration data, or LEMO
connectors are used, the axis
displacement has to be recalibrated after
the P-753 or the controller has been
replaced.
Perform a recalibration of the axis
displacement (see controller manual)
or contact our customer service
department (p. 35).
Axes were mixed up
during connection
(only with LEMO
connectors)
Observe the assignment of the axes
when connecting the stage to the
controller. This assignment is indicated
by labels on the devices.
The stage is not
connected to the
corresponding
controller (only with
several systems)
Observe the assignment of the devices
when several systems are connected.
The assignment is indicated on the
calibration label of the controller (see
rear panel or bottom side), which
contains the serial number of the stage
to be connected.
The stage starts
oscillating or
positions
inaccurately
Servo-control
parameters incorrectly
set because e. g. the
load was changed
1. Immediately switch off the servo mode
of the corresponding stage axes.
2. Check the settings of the servo-control
parameters on the controller.
3. Adjust the servo-control parameters on
the controller according to the load
change.
Open-loop operation
near the resonant
frequency
In open-loop operation, only operate
the stage with a frequency that is
below the resonant frequency.
If the problem that occurred with your system is not listed in the table above or cannot
be solved as described, contact our customer service department (p. 35).
9 Customer Service
P-753 Positioning Systems PZ254E Version: 1.0.0 35
For inquiries and orders, contact your PI sales engineer or send us an e-mail
(info@pi.ws).
If you have questions concerning your system, have the following information ready:
Product codes and serial numbers of all products in the system
Firmware version of the controller (if present)
Version of the driver or the software (if present)
Operating system on the PC (if present)
The latest versions of the user manuals are available for download (p. 3) on our
website.
9 Customer Service
10 Technical Data
P-753 Positioning Systems PZ254E Version: 1.0.0 37
In this Chapter
Specifications .............................................................................................................. 37
Dimensions .................................................................................................................. 40
Torque for Stainless Steel Screws (A2-70) ................................................................. 43
Pin Assignment ............................................................................................................ 43
10.1 Specifications
10.1.1 Data Table
P-753.1CD
P-753.2CD
P-753.3CD
Unit
Tolerance
Active axes
X
X
X
Motion and positioning
Integrated sensor Capacitive Capacitive Capacitive
Closed-loop travel
12
25
38
µm
Closed-loop / open-loop
resolution
0.05
0.1
0.2
nm
typ., full
travel
Linearity error, closed-loop
0.03
0.03
0.03
%
typ.
Repeatability ±1 ±2 ±3 nm typ.
Pitch / yaw
±5
±7
±10
µrad
typ.
Mechanical properties
Stiffness in motion direction
45
24
16
N/µm
±20 %
Unloaded resonant frequency
5.6
3.7
2.9
kHz
±20 %
Resonant frequency @ 200 g 2.5 1.7 1.4 kHz ±20 %
Push / pull force capacity in
motion direction
100 / 20
100 / 20
100 / 20
N
max.
Load capacity (vertical /
horizontal mounting)
10 / 2
10 / 2
10 / 2
kg
max.
Drive properties
Ceramic type
PICMA® P-885
PICMA® P-885
PICMA® P-885
Electrical capacitance
1.5
3.1
4.6
µF
±20 %
Dynamic operating current
coefficient
12
15
15
µA / (Hz
× µm)
±20 %
Miscellaneous
Operating temperature range
-20 to 80
-20 to 80
-20 to 80
°C
Material
Steel
Steel
Steel
Dimensions
44 mm ×
30 mm ×
15 mm
44 mm ×
30 mm ×
62 mm
44 mm ×
30 mm ×
80 mm
Mass
0.16
0.215
0.26
kg
±5 %
Cable length
1.5
1.5
1.5
m
±10 mm
Sensor / voltage connection
Sub-D Special
Sub-D Special
Sub-D Special
The resolution of PI piezo nanopositioning systems is not limited by friction or stiction. Value given is noise-
equivalent motion with the E-503 piezo amplifier module
Versions with LEMO connector available as P-753.x1C.
Vacuum-compatible versions to 10-9 hPa available as P-753.xUD.
Non-magnetic versions available as P-753.xND.
10 Technical Data
10 Technical Data
38 Version: 1.0.0 PZ254E P-753 Positioning Systems
10.1.2 Maximum Ratings
P-753 stages are designed for the following operating data in continuous operation:
Stage Maximum Operating
Voltage
Maximum Operating
Frequency (without
Load)*
Maximum Power
Consumption**
P-753.11C
P-753.1CD
-20 to +120 V 1.9 kHz 5.4 W
P-753.21C
P-753.2CD
-20 to +120 V 1.25 kHz 10.8 W
P-753.31C
P-753.3CD
-20 to +120 V 1 kHz 16.2 W
* To prevent damage, it is recommended to operate the stage with maximally one third
of the resonant frequency. If the stage is operated with a load, the values are lower.
** Corresponds to the power provided by the amplifier, which results in heating of the
piezo actuator to approximately 80 °C.
10 Technical Data
P-753 Positioning Systems PZ254E Version: 1.0.0 39
10.1.3 Ambient Conditions and Classifications
The following ambient conditions and classifications must be observed for the P-753:
Area of application For indoor use only
Maximum altitude 2000 m
Air pressure 1100 hPa to 0.1 hPa
(corresponds to roughly 825 Torr to 0.075 Torr)
Relative humidity Highest relative humidity 80 % for temperatures
up to 31 °C
Decreasing linearly to 50 % relative humidity at
40 °C
Operating temperature –20 °C to 80 °C
Storage temperature –20 °C to 80 °C
Transport temperature –25 °C to 85 °C
Overvoltage category II
Protection class I
Degree of pollution 1
Degree of protection according to
IEC 60529
IP20
10 Technical Data
40 Version: 1.0.0 PZ254E P-753 Positioning Systems
10.2 Dimensions
Dimensions in mm. Note that the decimal places are separated by a comma in the
drawings.
Figure 10: P-753.11C / P-753.1CD
10 Technical Data
P-753 Positioning Systems PZ254E Version: 1.0.0 41
Figure 11: P-753.21C / P-753.2CD
10 Technical Data
42 Version: 1.0.0 PZ254E P-753 Positioning Systems
Figure 12: P-753.31C / P-753.3CD
10 Technical Data
P-753 Positioning Systems PZ254E Version: 1.0.0 43
10.3 Torque for Stainless Steel Screws (A2-70)
Screw Size Minimum Torque Maximum Torque
M6 4 Nm 6 Nm
M5 2.5 Nm 3.5 Nm
M4 1.5 Nm 2.5 Nm
M3 0.8 Nm 1.1 Nm
M2.5 0.3 Nm 0.4 Nm
M2 0.15 Nm 0.2 Nm
M1.6 0.06 Nm 0.12 Nm
10.4 Pin Assignment
7W2 Sub-D mix connector
Figure 13: Sub-D Mix connector 7W2: Front side with connections
Figure 14: Sub-D mix connector: Exemplary top view
10 Technical Data
44 Version: 1.0.0 PZ254E P-753 Positioning Systems
Pin Signal Function
A1 PZT Piezo voltage
A2 Probe Probe sensor signal (moving part of the
capacitive sensor)
1 Data ID chip Data cable for ID chip
2 GND target and ID chip Ground of target and ID chip
3 GND PZT Ground of piezo voltage
4 Free -
5 Target Target sensor signal (non-moving part of the
capacitive sensor)
Case - Shield
LEMO coaxial connectors
Figure 15: LEMO connectors: PZT, P and T
Connector Signal Function Connector shell
P Probe Probe sensor signal (moving part
of the capacitive sensor)
Cable shield
T Target Target sensor signal (non-moving
part of the capacitive sensor)
Cable shield
PZT PZT Piezo voltage Ground of piezo voltage
on cable shield
11 Old Equipment Disposal
P-753 Positioning Systems PZ254E Version: 1.0.0 45
In accordance with the applicable EU law, electrical and electronic equipment may not
be disposed of with unsorted municipal wastes in the member states of the EU.
When disposing of your old equipment, observe the international, national and local
rules and regulations.
To meet the manufacturer’s product responsibility with regard to this product, Physik
Instrumente (PI) GmbH & Co. KG ensures environmentally correct disposal of old PI
equipment that was first put into circulation after 13 August 2005, free of charge.
If you have old PI equipment, you can send it postage-free to the following address:
Physik Instrumente (PI) GmbH & Co. KG
Auf der Römerstr. 1
D-76228 Karlsruhe, Germany
11 Old Equipment Disposal
12 EC Declaration of Conformity
P-753 Positioning Systems PZ254E Version: 1.0.0 47
For the P-753, an EC Declaration of Conformity has been issued in accordance with
the following European directives:
2006/95/EC, Low Voltage Directive
2004/108/EC, EMC Directive
2011/65/EU, RoHS Directive
The applied standards certifying the conformity are listed below.
Safety (Low Voltage Directive): EN 61010-1:2010
EMC: EN 61326-1:2013
RoHS: EN 50581:2012
12 EC Declaration of Conformity

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