Physik Instrumente P753 Positioning Systems P 753 User Manual PZ254E100
P-753_UserManual_PZ254E100 P-753 LISA Linear Actuator & Stage
User Manual: Physik Instrumente Product ation & Software
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PZ254E P-753 Positioning Systems User Manual Version: 1.0.0 Date: 13.10.2014 This document describes the following products: P-753.11C / P-753.1CD LISA High-Dynamics Piezo Nanopositioning System, 12 µm, Direct Metrology, Capacitive Sensor P-753.21C / P-753.2CD LISA High-Dynamics Piezo Nanopositioning System, 25 µm, Direct Metrology, Capacitive Sensor P-753.31C / P-753.3CD LISA High-Dynamics Piezo Nanopositioning System, 38 µm, Direct Metrology, Capacitive Sensor .11C/.21C/.31C = with LEMO connectors .1CD/.2CD/.3CD = with Sub-D connector Physik Instrumente (PI) GmbH & Co. KG, Auf der Roemerstr. 1, 76228 Karlsruhe, Germany Phone: +49 721 4846-0, Fax: +49 721 4846-1019, E-mail: info@pi.ws Physik Instrumente (PI) GmbH & Co. KG is the owner of the following trademarks: PI®, PIC®, PICMA®, PILine®, PIFOC®, PiezoWalk®, NEXACT®, NEXLINE®, NanoCube®, NanoAutomation®, Picoactuator®, PInano® The products described in this document are in part protected by the following patents: German patent no. 10021919C2 German patent no. 10234787C1 German patent no. 10348836B3 German patent no. 102005015405B3 German patent no. 102007011652B4 US patent no. 7,449,077 Japanese patent no. 4667863 Chinese patent no. ZL03813218.4 © 2014 Physik Instrumente (PI) GmbH & Co. KG, Karlsruhe, Germany. The text, photographs and drawings in this manual are protected by copyright. With regard thereto, Physik Instrumente (PI) GmbH & Co. KG retains all the rights. Use of said text, photographs and drawings is permitted only in part and only upon citation of the source. Original instructions First printing: 13.10.2014 Document number: PZ254E, CBo, Version 1.0.0 Subject to change without notice. This manual is superseded by any new release. The latest release is available for download (p. 3) on our website. Contents 1 About this Document 1.1 1.2 1.3 1.4 1.5 2 3 Goal and Target Audience of this User Manual ...................................................1 Symbols and Typographic Conventions ...............................................................1 Figures ..................................................................................................................2 Other Applicable Documents ................................................................................3 Downloading Manuals ..........................................................................................3 Safety 2.1 2.2 2.3 5 Intended Use ........................................................................................................5 General Safety Instructions ..................................................................................5 Organizational Measures ......................................................................................7 Product Description 3.1 3.2 3.3 3.4 3.5 3.6 1 9 Model Overview ....................................................................................................9 Product View.......................................................................................................10 Product Labeling .................................................................................................10 Scope of Delivery ...............................................................................................12 Suitable Electronics ............................................................................................12 Technical Features .............................................................................................13 3.6.1 PICMA® Piezo Actuators .................................................................13 3.6.2 Flexure Guides .................................................................................13 3.6.3 Capacitive Sensors ...........................................................................13 3.6.4 ID Chip (Only Models With Sub-D Connector) .................................13 4 Unpacking 15 5 Installation 17 5.1 5.2 5.3 5.4 6 General Notes on Installation .............................................................................17 Connecting the P753 to the Protective Earth Conductor ..................................19 Mounting the P753 ............................................................................................21 Affixing the Load .................................................................................................24 Start-Up and Operation 6.1 6.2 6.3 27 General Notes on Start-Up and Operation .........................................................27 Operating the P753 ...........................................................................................29 Discharging the P753 ........................................................................................29 7 Maintenance 7.1 7.2 31 General Notes on Maintenance ..........................................................................31 Cleaning the P753 .............................................................................................31 8 Troubleshooting 33 9 Customer Service 35 10 Technical Data 37 10.1 10.2 10.3 10.4 Specifications......................................................................................................37 10.1.1 Data Table ........................................................................................37 10.1.2 Maximum Ratings .............................................................................38 10.1.3 Ambient Conditions and Classifications ...........................................39 Dimensions .........................................................................................................40 Torque for Stainless Steel Screws (A2-70) ........................................................43 Pin Assignment ...................................................................................................43 11 Old Equipment Disposal 45 12 EC Declaration of Conformity 47 1 About this Document 1 About this Document In this Chapter Goal and Target Audience of this User Manual ............................................................ 1 Symbols and Typographic Conventions ........................................................................ 1 Figures ........................................................................................................................... 2 Other Applicable Documents ......................................................................................... 3 Downloading Manuals ................................................................................................... 3 1.1 Goal and Target Audience of this User Manual This user manual contains the necessary information for the intended use of the P753 (x stands for the different models, p. 9). Basic knowledge of control technology, drive technologies and suitable safety measures is assumed. The latest versions of the user manuals are available for download (p. 3) on our website. 1.2 Symbols and Typographic Conventions The following symbols and typographic conventions are used in this user manual: CAUTION Dangerous situation If not avoided, the dangerous situation will result in minor injury. Actions to take to avoid the situation. NOTICE Dangerous situation If not avoided, the dangerous situation will result in damage to the equipment. Actions to take to avoid the situation. P-753 Positioning Systems PZ254E Version: 1.0.0 1 1 About this Document INFORMATION Information for easier handling, tricks, tips, etc. Symbol/ Label Meaning 1. Action consisting of several steps whose sequential order must be observed 2. Action consisting of one or several steps whose sequential order is irrelevant List item p. 5 Cross-reference to page 5 RS-232 Labeling of an operating element on the product (example: socket of the RS-232 interface) Warning signs affixed to the product that refer to detailed information in this manual. 1.3 Figures For better understandability, the colors, proportions and degree of detail in illustrations can deviate from the actual circumstances. Photographic illustrations may also differ and must not be seen as guaranteed properties. 2 Version: 1.0.0 PZ254E P-753 Positioning Systems 1 About this Document 1.4 Other Applicable Documents The devices and software tools which are mentioned in this documentation are described in their own manuals. The latest versions of the user manuals are available for download (p. 3) on our website. Device Document E-501 modular piezo controller PZ62E User Manual E-505 piezo amplifier module PZ62E User Manual E-509 sensor / servo controller module PZ77E User Manual E-515 display module PZ62E User Manual E-517 interface and display module PZ214E User Manual E-610.C0 piezo amplifier / servo controller PZ72E User Manual E-625.CR piezo servo controller PZ166E User Manual E-665.CR piezo servo controller PZ127E User Manual E-753 digital piezo controller PZ193E User Manual PIMikroMove SM148E Software Manual P-5xx / P-6xx / P-7xx piezo positioning systems PZ240EK Short Instructions 1.5 Downloading Manuals INFORMATION If a manual is missing or problems occur with downloading: Contact our customer service department (p. 35). P-753 Positioning Systems PZ254E Version: 1.0.0 3 1 About this Document INFORMATION For some products (e.g. Hexapod systems and electronics that are delivered with a CD), access to the manuals is password-protected. The password is stored on the CD. Availability of the manuals: Password-protected manuals: FTP download directory Follow the corresponding instructions for downloading. Freely available manuals: PI website Download freely accessible manuals 1. Open the website http://www.pi-portal.ws. 2. Click Downloads. 3. Click the corresponding product category. 4. Go to the corresponding product code. The available manuals are displayed. 5. Click the desired manual and save it on the hard disk of your PC or on a data storage medium. Download password-protected manuals 1. Insert the product CD in the PC drive. 2. Switch to the Manuals directory on the CD. 3. In the Manuals directory, open the Release News (file including releasenews in the file name). 4. Find the user name and the password in the section "User login for software download" in the Release News. 5. Open the FTP download directory (ftp://pi-ftp.ws). − Windows operating systems: Open the FTP download directory in Windows Explorer. 6. Log in with the user name and the password from the Release News. 7. In the directory of the corresponding product, go to the Manuals sub-directory. 8. Copy the desired manual to the hard disk of your PC or to a data storage medium. 4 Version: 1.0.0 PZ254E P-753 Positioning Systems 2 Safety 2 Safety In this Chapter Intended Use ................................................................................................................. 5 General Safety Instructions ........................................................................................... 5 Organizational Measures............................................................................................... 7 2.1 Intended Use The P753 is a laboratory device as defined by DIN EN 61010-1. It is intended to be used in interior spaces and in an environment which is free of dirt, oil, and lubricants. Based on its design and realization, the P753 is intended for fine positioning as well as the fast and precise motion of small objects. The motion takes place linearly in one axis. The P753 can be mounted with a horizontally or vertically oriented motion axis. Vertical mounting is only possible under certain conditions (p. 21). The intended use of the P753 is only possible in combination with suitable electronics (p. 12) that is available from PI. The electronics is not included in the scope of delivery of the P753. The electronics must provide the required operating voltages. To ensure proper performance of the servo-control system, the electronics must be able to read out and process the signals from the capacitive sensors. 2.2 General Safety Instructions The P753 is built according to state-of-the-art technology and recognized safety standards. Improper use can result in personal injury and/or damage to the P753. Only use the P753 for its intended purpose, and only use it if it is in a good working order. Read the user manual. Immediately eliminate any faults and malfunctions that are likely to affect safety. The operator is responsible for the correct installation and operation of the P753. P-753 Positioning Systems PZ254E Version: 1.0.0 5 2 Safety The P753 is driven by piezo actuators. Temperature changes and compressive stresses can induce charges in piezo actuators. After being disconnected from the electronics, piezo actuators can also stay charged for several hours. Touching or short-circuiting the contacts in the connector of the P753 can lead to minor injuries. In addition, the piezo actuators can be destroyed by an abrupt contraction. Do not open the P753. Discharge the piezo actuators of the stage before installation: Connect the stage to the switched-off PI controller, which is equipped with an internal discharge resistor. Do not pull out the connector from the electronics during operation. For stages with Sub-D connector: Touching the contacts in the connector can lead to an electric shock (max. 130 V DC) and minor injuries. Do not touch the contacts in the connector. Secure the connector of the stage with screws against being pulled out of the controller. If a protective earth conductor is not or not properly connected, dangerous touch voltages can occur on the P753 in the case of malfunction or failure of the system. If touch voltages exist, touching the P753 can result in minor injuries from electric shock. Connect the P753 to a protective earth conductor (p. 19) before start-up. Do not remove the protective earth conductor during operation. If the protective earth conductor has to be removed temporarily (e. g. in the case of modifications), reconnect the P753 to the protective earth conductor before starting it up again. Mechanical forces can damage or misalign the P753. Avoid impacts that affect the P753. Do not drop the P753. Do not exceed the maximum permissible stress and load capacities according to the specifications (p. 37). Only hold the P753 externally by the base body. 6 Version: 1.0.0 PZ254E P-753 Positioning Systems 2 Safety The P753 is maintenance-free and achieves its positioning accuracy as a result of the optimum alignment of mechanical components and piezo actuators. Loosened screws cause a loss in positioning accuracy. Only loosen screws according to the instructions in this manual. Do not open the P753. 2.3 Organizational Measures User manual Always keep this user manual available by the P753. The latest versions of the user manuals are available for download (p. 3) on our website. Add all information given by the manufacturer to the user manual, for example supplements or Technical Notes. If you pass the P753 on to other users, also turn over this user manual as well as other relevant information provided by the manufacturer. Only use the device on the basis of the complete user manual. Missing information due to an incomplete user manual can result in minor injury and property damage. Only install and operate the P753 after having read and understood this user manual. Personnel qualification The P753 may only be installed, started up, operated, maintained and cleaned by authorized and appropriately qualified personnel. P-753 Positioning Systems PZ254E Version: 1.0.0 7 3 Product Description 3 Product Description In this Chapter Model Overview ............................................................................................................. 9 Product View ............................................................................................................... 10 Product Labeling .......................................................................................................... 10 Scope of Delivery ........................................................................................................ 12 Suitable Electronics ..................................................................................................... 12 Technical Features ...................................................................................................... 13 3.1 Model Overview The following standard versions of the P753 are available: Model Description P-753.11C LISA high-dynamics piezo nanopositioning system, 12 µm, direct metrology, capacitive sensor, LEMO connector(s) P-753.1CD LISA high-dynamics piezo nanopositioning system, 12 µm, direct metrology, capacitive sensor, Sub-D connector(s) P-753.21C LISA high-dynamics piezo nanopositioning system, 25 µm, direct metrology, capacitive sensor, LEMO connector(s) P-753.2CD LISA high-dynamics piezo nanopositioning system, 25 µm, direct metrology, capacitive sensor, Sub-D connector(s) P-753.31C LISA high-dynamics piezo nanopositioning system, 38 µm, direct metrology, capacitive sensor, LEMO connector(s) P-753.3CD LISA high-dynamics piezo nanopositioning system, 38 µm, direct metrology, capacitive sensor, Sub-D connector(s) P-753 Positioning Systems PZ254E Version: 1.0.0 9 3 Product Description 3.2 Product View The figure serves as an example and can differ from your stage model. Figure 1: Example of product view 1 Moving platform 2 Protective earth connection 3 Cable exit 4 Base body X Positive direction of motion of the stage 3.3 Product Labeling Figure 2: P-753: Position of the product labeling (example of a view from above) 10 Version: 1.0.0 PZ254E P-753 Positioning Systems 3 Product Description Position Labeling Description B P-753.1CD Product name (example), the places after the point refer to the model B 114039262 Serial number (example), individual for each P753 Meaning of the places (counting from left): 1 = internal information 2 and 3 = manufacturing year 4 to 9 = consecutive numbers B LISA Brand name B Manufacturer's logo B Warning sign "Observe manual!" B Old equipment disposal (p. 45) B Country of origin: Germany Country of origin B WWW.PI.WS Manufacturer's address (website) B CE conformity mark A Symbol for the protective earth conductor, marks the protective earth connection of the P753 Figure 3: P-753: "Residual voltage" warning sign on connector Warning sign "Residual voltage": Notice of risk of electric shock (p. 5) P-753 Positioning Systems PZ254E Version: 1.0.0 11 3 Product Description 3.4 Scope of Delivery Item ID Components P753 Stage according to order (p. 9) 000036450 M4 screw set for protective earth, consisting of: PZ240EK 1 M4x8 flat-head screw with cross recess, ISO 7045 2 safety washers 2 flat washers Short instructions for piezo positioning systems 3.5 Suitable Electronics To operate a P753, you need suitable electronics. Devices are selected depending on the type of application. The following table lists suitable devices (x = suitable). Channels Electronics P-753 Model .11C .21C .31C x x x .1CD .2CD .3CD E-610 piezo amplifier / servo controller, OEM module 1 E-625 piezo servo controller (bench-top) 1 x x x E-665 servo controller (bench-top) 1 x x x E-753 digital piezo controller 1 x x x E-501 modular piezo controller, consisting of: 1 x x x E-505 piezo amplifier module E-509 sensor / servo controller module Optional: E-517 interface and display module or E-515 display module 12 Version: 1.0.0 PZ254E P-753 Positioning Systems 3 Product Description 3.6 Technical Features 3.6.1 PICMA® Piezo Actuators P753 stages are driven by PICMA® piezo actuators. PICMA® actuators have all-ceramic insulation and are therefore far superior to conventional actuators in respect to performance and lifetime. The monolithic piezoceramic block is protected against humidity and failure due to increased leakage current by a ceramic insulation layer. In this way, an especially high reliability is achieved even under extreme ambient conditions. In contrast to motorized drives, there are no rotating parts or friction. The piezo actuators are therefore backlash-, maintenance- and wear-free. 3.6.2 Flexure Guides P753 stages have flexure guides (flexures) for frictionless motion and high guiding accuracies. A flexure guide is an element which is free from static and sliding friction. It is based on the elastic deformation (bending) of a solid (e.g. steel) and does not have any rolling or sliding parts. Flexure elements have a high stiffness and load capacity. Flexure guides are maintenance- and wear-free. They are 100 % vacuum compatible, function in a wide temperature range and do not require any lubricants. 3.6.3 Capacitive Sensors Capacitive sensors measure the position directly on the moving platform (direct metrology) and work without contact. Neither friction nor hysteresis interferes with the motion, which allows excellent linearity values to be achieved in combination with the high position resolution. In connection with suitable electronics, capacitive sensors achieve the best resolution, stability and bandwidth. 3.6.4 ID Chip (Only Models With Sub-D Connector) An ID chip is located in the Sub-D connector of the stage. When the stage is calibrated at the factory with digital electronics, the calibration data is saved together with specific product information on the ID chip. When switched on, digital electronics read the data from the ID chip of the connected stage. Stages whose ID chip contains the calibration data can therefore be connected to any suitable digital electronics without a new calibration. For more information on the ID chip, see the manual of the controller used. P-753 Positioning Systems PZ254E Version: 1.0.0 13 4 Unpacking 4 Unpacking 1. Unpack the P753 with care. 2. Compare the contents against the items covered by the contract and against the packing list. 3. Inspect the contents for signs of damage. If parts are missing or you notice signs of damage, contact PI immediately. 4. Keep all packaging materials in case the product needs to be returned. P-753 Positioning Systems PZ254E Version: 1.0.0 15 5 Installation 5 Installation In this Chapter General Notes on Installation ...................................................................................... 17 Connecting the P753 to the Protective Earth Conductor ........................................... 19 Mounting the P753 ..................................................................................................... 21 Affixing the Load .......................................................................................................... 24 5.1 General Notes on Installation CAUTION Dangerous voltage and residual charge on piezo actuators! The P753 is driven by piezo actuators. Temperature changes and compressive stresses can induce charges in piezo actuators. After being disconnected from the electronics, piezo actuators can also stay charged for several hours. Touching or short-circuiting the contacts in the connector of the P753 can lead to minor injuries. In addition, the piezo actuators can be destroyed by an abrupt contraction. Do not open the P753. Discharge the piezo actuators of the stage before installation: Connect the stage to the switched-off PI controller, which is equipped with an internal discharge resistor. Do not pull out the connector from the electronics during operation. For stages with Sub-D connector: Touching the contacts in the connector can lead to an electric shock (max. 130 V DC) and minor injuries. Do not touch the contacts in the connector. Secure the connector of the stage with screws against being pulled out of the controller. P-753 Positioning Systems PZ254E Version: 1.0.0 17 5 Installation NOTICE Mechanical overload from incorrect handling! An impermissible mechanical overload of the moving platform of the P753 can cause damage to the piezo actuators, sensors and flexure joints of the P753 as well as losses of accuracy. Only hold the P753 externally by the base body. NOTICE Damage from unsuitable cables! Unsuitable cables can damage the stage and the electronics. Only use cables provided by PI for connecting the P753 to the electronics. NOTICE Damage from incorrect mounting! Incorrect mounting of the P753 or incorrectly mounted parts can damage the P753. Only mount the P753 and the loads on the mounting fixtures (holes) intended for this purpose. NOTICE Damage due to incorrectly tightened screws! Incorrectly tightened screws can cause damage. Observe the torque range (p. 43) given for the screws used during installation. INFORMATION Extended cables can reduce the positioning accuracy of the P753 or affect the sensor processing by the electronics. 18 Do not use cable extensions. If you need longer cables, contact our customer service department (p. 35). Version: 1.0.0 PZ254E P-753 Positioning Systems 5 Installation 5.2 Connecting the P-753 to the Protective Earth Conductor INFORMATION In the case of P753 stages with Sub-D connectors, ground loops can occur when the stage is grounded via its protective earth connector as well as by the shield of the connection cable for the electronics. If a ground loop occurs, contact our customer service department (p. 35). INFORMATION Observe the applicable standards for mounting the protective earth conductor. The P753 is equipped with an M4 hole for fastening the protective earth conductor. This hole is located next to the cable exit and is marked with the protective earth conductor symbol (see "Dimensions", p. 40). Prerequisite You have read and understood the general notes on installation (p. 17). The stage is not connected to the electronics. Tools and accessories Suitable protective earth conductor: Cross-sectional area of the cable 2 ≥0.75 mm Supplied M4 protective earth screw set (p. 12) for connecting the protective earth conductor Suitable screwdriver P-753 Positioning Systems PZ254E Version: 1.0.0 19 5 Installation Figure 4: Mounting of the protective earth conductor (profile view) 1 Base body of the P-753 2 Flat washer 3 Safety washer 4 Screw 5 Cable lug 6 Protective earth conductor Connecting the P-753 to the protective earth conductor 1. If necessary, fasten a suitable cable lug to the protective earth conductor. 2. Fasten the cable lug of the protective earth conductor using the M4 screw on the protective earth connection of the P753 as shown in the profile view. 3. Tighten the M4 screw with a torque of 1.2 Nm to 1.5 Nm. 4. Make sure that the contact resistance at all connection points relevant for mounting the protective earth conductor is <0.1 Ω at 25 A. 20 Version: 1.0.0 PZ254E P-753 Positioning Systems 5 Installation 5.3 Mounting the P-753 NOTICE Warping of the P-753 due to mounting on uneven surfaces! Mounting the P753 on an uneven surface can warp the P753. Warping reduces the accuracy. Mount the P753 on an even surface. The recommended evenness of the surface is ≤10 µm. For applications with great temperature changes: Only mount the P753 on surfaces that have the same or similar thermal expansion properties as the P753. NOTICE Tensile stress on piezo actuator with vertical mounting! If the stage is mounted vertically and the direction of motion of the X axis is downward, this will result in a tensile stress which reduces the internal preload of the piezo actuator. Operation with reduced preload can destroy the piezo actuator. Do not exceed the maximum permissible stress and load capacities according to the specifications (p. 37). NOTICE Protruding screw heads! Protruding screw heads can damage the P753. Ensure that the screw heads do not protrude from counter-sunk holes so that they do not interfere with the stage motion. P-753 Positioning Systems PZ254E Version: 1.0.0 21 5 Installation The figure below serves as an example and can differ from your stage model. Figure 5: P-753: Four counter-sunk holes for mounting from above (white arrows) and two threaded holes for mounting from below (hatched arrows) Prerequisite 22 You have read and understood the general notes on installation (p. 17). You have provided a suitable surface. For the required position of the holes, see "Dimensions" (p. 40). − For mounting from above with M3 screws: Four M3 holes with a depth of at least 3 mm are present. − For mounting from below with M3 screws: Two through holes for M3 screws are present. The thickness of the surface and the depth of the counterbores at the through-holes in the surface are matched for compliance with the maximum screw-in depth of 5 mm in the P753. − The evenness of the surface is ≤10 µm. − For applications with great temperature changes: The surface should have the same thermal expansion properties as the P753 (e.g. surface made of aluminum). You have accounted for the space required for a cable routing free of kinks and in accordance with regulations. The P753 is not connected to the controller. Version: 1.0.0 PZ254E P-753 Positioning Systems 5 Installation Tools and accessories For mounting from above: Four M3 screws of suitable length (p. 40) For mounting from below: Two M3 screws of suitable length (p. 40) Suitable screwdriver Mounting the stage on a surface 1. Align the P753 on the surface so that the corresponding holes in the P753 and the surface overlap. 2. Mount the P753 on the surface from above or from below: Mounting from above with four M3 screws: a) Introduce four screws into the counter-sunk holes in the base body of the P753 from above. b) Tighten the four screws. Observe the specified torque range (p. 43) while doing so. Mounting from below with two M3 screws: a) Introduce two screws through the holes in the surface into the base body of the P753 from below. b) Tighten the two screws. Observe the specified torque range (p. 43) while doing so. 3. Make sure that no screw heads protrude from the counter-sunk holes. 4. Check that the P753 fits on the surface without backlash. 5. If necessary, secure the screws with a thread-locking adhesive. P-753 Positioning Systems PZ254E Version: 1.0.0 23 5 Installation 5.4 Affixing the Load NOTICE Mechanical overload due to high torques and high loads! When affixing the load, high torques and high loads can overload the moving platform of the P753. Mechanical overload can cause damage to the piezo actuators, sensors and flexure joints of the P753 and lead to losses in accuracy. Observe the torque range (p. 43) given for the screws used during installation. Avoid torques >0.3 Nm on the moving platform. Do not exceed the maximum permissible stress and load capacities according to the specifications (p. 37). NOTICE Warping of the P-753 due to affixing of loads with uneven contact surface! Affixing loads with an uneven contact surface can warp the P753. Warping reduces the accuracy. Only affix loads on the P753 whose contact surface with the moving platform of the stage has an evenness of at least 10 μm. For applications with great temperature changes: Only affix loads on the P753 that have the same or similar thermal expansion properties as the P753. NOTICE Center of load at unsuitable position! If the center of load is located far outside of the moving platform (e. g. high set-ups and long levers), the P753 can be damaged from high strain on the flexure guides, high torques and oscillations, especially when operated dynamically. 24 If the center of the load to be affixed is far above or to the side of the moving platform, adjust the controller settings before start-up or contact our customer service department (p. 35). Version: 1.0.0 PZ254E P-753 Positioning Systems 5 Installation NOTICE Screws that are too long! The P753 can be damaged by screws that are too long. Note the depth of the mounting holes in the moving platform (p. 40). Only use screws of the correct length for the respective mounting holes. INFORMATION The positive direction of motion of the axis is given in the product view (p. 10). Figure 6: P-753: M2.5 holes in the moving platform for affixing loads Center of load at the optimum position: Figure 7: Example of an optimally placed load (1: center of load) P-753 Positioning Systems PZ254E Version: 1.0.0 25 5 Installation Center of load at an unsuitable position: Figure 8: High set-up and center of load (1) far above the moving platform Figure 9: Long lever and center of load (1) on the side of the moving platform Prerequisite You have read and understood the general notes on installation (p. 17). Tools and accessories M2.5 screws of suitable length (p. 40) Suitable tools Affixing the Load Only affix loads to the threaded holes (p. 40) intended for this purpose and with suitable screws. While doing so, observe the torque range (p. 43) specified for the screws, and avoid torques >0.3 Nm on the moving platform. Affix the load so that it is centered and that the center of load is on the moving platform. 26 Version: 1.0.0 PZ254E P-753 Positioning Systems 6 Start-Up and Operation 6 Start-Up and Operation In this Chapter General Notes on Start-Up and Operation .................................................................. 27 Operating the P753 .................................................................................................... 29 Discharging the P753 ................................................................................................. 29 6.1 General Notes on Start-Up and Operation CAUTION Risk of electric shock if the protective earth conductor is not connected! If a protective earth conductor is not or not properly connected, dangerous touch voltages can occur on the P753 in the case of malfunction or failure of the system. If touch voltages exist, touching the P753 can result in minor injuries from electric shock. Connect the P753 to a protective earth conductor (p. 19) before start-up. Do not remove the protective earth conductor during operation. If the protective earth conductor has to be removed temporarily (e. g. in the case of modifications), reconnect the P753 to the protective earth conductor before starting it up again. NOTICE Destruction of the piezo actuator by electric flashovers! The use of the P753 in environments that increase the electrical conductivity can lead to the destruction of the piezo actuator by electric flashovers. Electric flashovers can be caused by moisture, high humidity, liquids and conductive materials such as metal dust. In addition, electric flashovers can also occur in certain air pressure ranges due to the increased conductivity of the air. Avoid operating the P753 in environments that can increase the electric conductivity. Only operate the P753 within the permissible ambient conditions and classifications (p. 39). P-753 Positioning Systems PZ254E Version: 1.0.0 27 6 Start-Up and Operation NOTICE Reduced lifetime of the piezo actuator due to permanently high voltage! The permanent application of a high static voltage to piezo actuators leads to a considerable reduction in the lifetime of the piezo ceramic of the actuator. When the P753 is not used but the controller remains switched on to ensure temperature stability, discharge the P753 (p. 29). NOTICE Operating voltage too high or incorrectly connected! Operating voltages that are too high or incorrectly connected can cause damage to the P753. Only operate the P753 with controllers/drivers and original accessories from PI. Do not exceed the operating voltage range (p. 38) for which the P753 is specified. Only operate the P753 when the operating voltage is properly connected; see "Pin Assignment" (p. 43). NOTICE Uncontrolled oscillation! Oscillations can cause irreparable damage to the stage. Oscillations are indicated by a humming and can result from the following causes: A change in the load and/or dynamics requires the servo-control parameters to be adjusted. The stage is operated near its resonant frequency. If you notice oscillations: In closed-loop operation, immediately switch off the servo mode. In open-loop operation, immediately stop the stage. INFORMATION The positive direction of motion of the axis is given in the product view (p. 10). INFORMATION Sound and vibration (e.g. footfall, impacts) can be transmitted to the stage and can affect its performance with regard to position stability. 28 Avoid transmitting sound and vibration while the stage is being operated. Version: 1.0.0 PZ254E P-753 Positioning Systems 6 Start-Up and Operation 6.2 Operating the P-753 Follow the instructions in the manual of the controller used for start-up and operation of the P753. 6.3 Discharging the P-753 The P753 must be discharged in the following cases: Before installation Before demounting (e.g. before cleaning and transporting the P753 and for modifications) If the P753 is not used but the controller remains switched on to ensure temperature stability The P753 is discharged through the internal discharge resistor of the controller from PI. Discharging a P-753 that is connected to the controller In closed-loop operation: 1. Switch off the servo mode on the controller. 2. Set the piezo voltage to 0 V on the controller. In open-loop operation: Set the piezo voltage to 0 V on the controller. Discharging a P-753 that is not connected to the controller Connect the stage to the switched-off controller from PI. P-753 Positioning Systems PZ254E Version: 1.0.0 29 7 Maintenance 7 Maintenance In this Chapter General Notes on Maintenance ................................................................................... 31 Cleaning the P753 ...................................................................................................... 31 7.1 General Notes on Maintenance NOTICE Misalignment from loosening screws on the base body! The P753 is maintenance-free and precisely aligned. Loosened screws on the base body cause a loss in positioning accuracy. Do not loosen any screws on the base body. 7.2 Cleaning the P-753 Prerequisites You have discharged the piezo actuators of the P753 (p. 29). You have disconnected the P753 from the controller. Cleaning the P-753 Clean the surfaces of the P753 with a cloth that is slightly dampened with a mild cleanser or disinfectant (e.g. ethanol or isopropanol). Do not do any ultrasonic cleaning. P-753 Positioning Systems PZ254E Version: 1.0.0 31 8 Troubleshooting 8 Troubleshooting Problem Possible Causes Solution No or limited motion The cable is not connected correctly Check the cable connections. Excessive load Do not exceed the maximum permissible stress and load capacities according to the specifications (p. 37). Zero shift of the sensor for the following reasons: Perform a zero-point adjustment of the sensor (see controller manual). Only mount the P753 on surfaces with the following characteristics: Reduced accuracy Load applied in direction of motion Ambient/operating temperature of the stage far above or below calibration temperature (21°C to 24°C) Warping of the base body or the moving platform Evenness of at least 10 μm The thermal expansion properties are similar to those of the P753 (e. g. surfaces made of aluminum). Only affix loads with the following characteristics on the P753: − − − − P-753 Positioning Systems PZ254E The contact surface of the load has an evenness of at least 10 μm. The thermal expansion properties are similar to those of the P753 (e. g. loads made of aluminum). Version: 1.0.0 33 8 Troubleshooting Problem The stage starts oscillating or positions inaccurately Possible Causes Solution P753 or controller has been replaced When stages, whose ID chip (p. 13) does not contain any calibration data, or LEMO connectors are used, the axis displacement has to be recalibrated after the P753 or the controller has been replaced. Perform a recalibration of the axis displacement (see controller manual) or contact our customer service department (p. 35). Axes were mixed up during connection (only with LEMO connectors) Observe the assignment of the axes when connecting the stage to the controller. This assignment is indicated by labels on the devices. The stage is not connected to the corresponding controller (only with several systems) Observe the assignment of the devices when several systems are connected. The assignment is indicated on the calibration label of the controller (see rear panel or bottom side), which contains the serial number of the stage to be connected. Servo-control 1. Immediately switch off the servo mode parameters incorrectly of the corresponding stage axes. set because e. g. the 2. Check the settings of the servo-control load was changed parameters on the controller. 3. Adjust the servo-control parameters on the controller according to the load change. Open-loop operation near the resonant frequency In open-loop operation, only operate the stage with a frequency that is below the resonant frequency. If the problem that occurred with your system is not listed in the table above or cannot be solved as described, contact our customer service department (p. 35). 34 Version: 1.0.0 PZ254E P-753 Positioning Systems 9 Customer Service 9 Customer Service For inquiries and orders, contact your PI sales engineer or send us an e-mail (info@pi.ws). If you have questions concerning your system, have the following information ready: Product codes and serial numbers of all products in the system Firmware version of the controller (if present) Version of the driver or the software (if present) Operating system on the PC (if present) The latest versions of the user manuals are available for download (p. 3) on our website. P-753 Positioning Systems PZ254E Version: 1.0.0 35 10 Technical Data 10 Technical Data In this Chapter Specifications .............................................................................................................. 37 Dimensions .................................................................................................................. 40 Torque for Stainless Steel Screws (A2-70) ................................................................. 43 Pin Assignment ............................................................................................................ 43 10.1 Specifications 10.1.1 Data Table Active axes Motion and positioning Integrated sensor Closed-loop travel Closed-loop / open-loop resolution Linearity error, closed-loop Repeatability Pitch / yaw Mechanical properties Stiffness in motion direction Unloaded resonant frequency Resonant frequency @ 200 g Push / pull force capacity in motion direction Load capacity (vertical / horizontal mounting) Drive properties Ceramic type Electrical capacitance Dynamic operating current coefficient Miscellaneous Operating temperature range Material Dimensions Mass Cable length Sensor / voltage connection P-753.1CD X P-753.2CD X P-753.3CD X Unit Tolerance Capacitive 12 0.05 Capacitive 25 0.1 Capacitive 38 0.2 µm nm 0.03 ±1 ±5 0.03 ±2 ±7 0.03 ±3 ±10 % nm µrad typ., full travel typ. typ. typ. 45 5.6 2.5 100 / 20 24 3.7 1.7 100 / 20 16 2.9 1.4 100 / 20 N/µm kHz kHz N ±20 % ±20 % ±20 % max. 10 / 2 10 / 2 10 / 2 kg max. PICMA® P-885 PICMA® P-885 PICMA® P-885 1.5 3.1 4.6 µF ±20 % 12 15 15 µA / (Hz ±20 % × µm) -20 to 80 Steel 44 mm × 30 mm × 15 mm 0.16 1.5 Sub-D Special -20 to 80 Steel 44 mm × 30 mm × 62 mm 0.215 1.5 Sub-D Special -20 to 80 Steel 44 mm × 30 mm × 80 mm 0.26 1.5 Sub-D Special °C kg m ±5 % ±10 mm The resolution of PI piezo nanopositioning systems is not limited by friction or stiction. Value given is noiseequivalent motion with the E-503 piezo amplifier module Versions with LEMO connector available as P-753.x1C. Vacuum-compatible versions to 10-9 hPa available as P-753.xUD. Non-magnetic versions available as P-753.xND. P-753 Positioning Systems PZ254E Version: 1.0.0 37 10 Technical Data 10.1.2 Maximum Ratings P753 stages are designed for the following operating data in continuous operation: Stage Maximum Operating Maximum Operating Maximum Power Voltage Frequency (without Consumption** Load)* P-753.11C -20 to +120 V 1.9 kHz 5.4 W -20 to +120 V 1.25 kHz 10.8 W -20 to +120 V 1 kHz 16.2 W P-753.1CD P-753.21C P-753.2CD P-753.31C P-753.3CD * To prevent damage, it is recommended to operate the stage with maximally one third of the resonant frequency. If the stage is operated with a load, the values are lower. ** Corresponds to the power provided by the amplifier, which results in heating of the piezo actuator to approximately 80 °C. 38 Version: 1.0.0 PZ254E P-753 Positioning Systems 10 Technical Data 10.1.3 Ambient Conditions and Classifications The following ambient conditions and classifications must be observed for the P753: Area of application For indoor use only Maximum altitude 2000 m Air pressure 1100 hPa to 0.1 hPa (corresponds to roughly 825 Torr to 0.075 Torr) Relative humidity Highest relative humidity 80 % for temperatures up to 31 °C Decreasing linearly to 50 % relative humidity at 40 °C Operating temperature –20 °C to 80 °C Storage temperature –20 °C to 80 °C Transport temperature –25 °C to 85 °C Overvoltage category II Protection class I Degree of pollution 1 Degree of protection according to IEC 60529 IP20 P-753 Positioning Systems PZ254E Version: 1.0.0 39 10 Technical Data 10.2 Dimensions Dimensions in mm. Note that the decimal places are separated by a comma in the drawings. Figure 10: P-753.11C / P-753.1CD 40 Version: 1.0.0 PZ254E P-753 Positioning Systems 10 Technical Data Figure 11: P-753.21C / P-753.2CD P-753 Positioning Systems PZ254E Version: 1.0.0 41 10 Technical Data Figure 12: P-753.31C / P-753.3CD 42 Version: 1.0.0 PZ254E P-753 Positioning Systems 10 Technical Data 10.3 Torque for Stainless Steel Screws (A2-70) Screw Size Minimum Torque Maximum Torque M6 4 Nm 6 Nm M5 2.5 Nm 3.5 Nm M4 1.5 Nm 2.5 Nm M3 0.8 Nm 1.1 Nm M2.5 0.3 Nm 0.4 Nm M2 0.15 Nm 0.2 Nm M1.6 0.06 Nm 0.12 Nm 10.4 Pin Assignment 7W2 Sub-D mix connector Figure 13: Sub-D Mix connector 7W2: Front side with connections Figure 14: Sub-D mix connector: Exemplary top view P-753 Positioning Systems PZ254E Version: 1.0.0 43 10 Technical Data Pin Signal Function A1 PZT Piezo voltage A2 Probe Probe sensor signal (moving part of the capacitive sensor) 1 Data ID chip Data cable for ID chip 2 GND target and ID chip Ground of target and ID chip 3 GND PZT Ground of piezo voltage 4 Free - 5 Target Target sensor signal (non-moving part of the capacitive sensor) Case - Shield LEMO coaxial connectors Figure 15: LEMO connectors: PZT, P and T 44 Connector Signal Function Connector shell P Probe Probe sensor signal (moving part of the capacitive sensor) Cable shield T Target Target sensor signal (non-moving Cable shield part of the capacitive sensor) PZT PZT Piezo voltage Version: 1.0.0 PZ254E Ground of piezo voltage on cable shield P-753 Positioning Systems 11 Old Equipment Disposal 11 Old Equipment Disposal In accordance with the applicable EU law, electrical and electronic equipment may not be disposed of with unsorted municipal wastes in the member states of the EU. When disposing of your old equipment, observe the international, national and local rules and regulations. To meet the manufacturer’s product responsibility with regard to this product, Physik Instrumente (PI) GmbH & Co. KG ensures environmentally correct disposal of old PI equipment that was first put into circulation after 13 August 2005, free of charge. If you have old PI equipment, you can send it postage-free to the following address: Physik Instrumente (PI) GmbH & Co. KG Auf der Römerstr. 1 D-76228 Karlsruhe, Germany P-753 Positioning Systems PZ254E Version: 1.0.0 45 12 EC Declaration of Conformity 12 EC Declaration of Conformity For the P753, an EC Declaration of Conformity has been issued in accordance with the following European directives: 2006/95/EC, Low Voltage Directive 2004/108/EC, EMC Directive 2011/65/EU, RoHS Directive The applied standards certifying the conformity are listed below. Safety (Low Voltage Directive): EN 61010-1:2010 EMC: EN 61326-1:2013 RoHS: EN 50581:2012 P-753 Positioning Systems PZ254E Version: 1.0.0 47
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