Physik Instrumente PI Data Sheet H 824
PI_DataSheet_H-824 H-824 6-Axis Hexapod
User Manual: Physik Instrumente H-824 6-Axis Hexapod
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6- Axis Hexapod LOW- PROFILE, PRECISION PARALLEL- KINEMATIC SYSTEM H-824 Load capacity to 10 kg, self- locking version Travel ranges to 45 mm / 25° Actuator resolution to 7 nm Min. incremental motion to 0.3 µm Repeatability to ±0.1 µm / ±2.5 µrad Velocity to 25 mm/ s Vacuum- compatible versions available Sophisticated controller using vector algorithms, virtual pivot point Comprehensive software package Precision- class 6- axis positioning system Parallel- kinematic design for six degrees of freedom making it significantly more compact and stiff than serialkinematic systems, higher dynamic range, no moved cables: Higher reliability, reduced friction. Vacuum-6 compatible versions to 10 hPa are available Compact due to folded drive design H-824.Gxx with DC gear motors H-824.Dxx with powerful DC motors for higher velocity Powerful digital controller, open software architecture User- defined, stable pivot point, software- selectable. Positions commanded in Cartesian coordinates. Macro programming. Open source LabVIEW driver set. Work space simulation software. Virtual Hexapod machine software. Optional: Collision avoidance software (external obstacles). Hexapods are by default configured and delivered as a system including a controller C-887.52 compact bench- top controller for a lower system price. Digital I/ O interfaces, e.g. for external triggering C-887.11 19" controller, comprises the control for two additional single axes with servo motors. Options: Control of piezo axes, photometer cards for visible light or infrared light range Upgrades for C-887.11 (order separately) Analog interface/ photometer cards for visible light (F-206.VVU) or the infrared light range (F-206.iiU) F-206.NCU fast piezo nano- alignment system for alignment with nanometer precision Accessories C-887.MC manual control unit for Hexapods, USB, 3 m cable C-887.VM1 PIVeriMove software for collision checking Fields of application Research and industry, standard and vacuum environments. For micromanipulation, biotechnology, semiconductor manufacturing © Physik Instrumente (PI) GmbH und Co. KG 2014. Subject to change without notice. Latest releases available at www.pi.ws WWW.PI.WS Page 1 of 4 01.03.2016 11:19 R1 Specifications H-824.Gxx H-824.Dxx for higher resolution and load for higher velocity X, Y, Z, θX, θY, θZ X, Y, Z, θX, θY, θZ Travel range* X, Y ±22.5 ±22.5 mm Travel range* Z ±12.5 ±12.5 mm Travel range* θX, θY ±7.5 ±7.5 ° Travel range* θZ ±12.5 ±12.5 ° Single- actuator design resolution 0.007 0.5 µm Min. incremental motion X, Y, Z 0.3 1 µm typ. Min. incremental motion θX, θY, θZ 3.5 12 µrad typ. Backlash X, Y 3 1 µm typ. Backlash Z 1 1 µm typ. Backlash θX, θY 20 15 µrad typ. Backlash θZ 25 25 µrad typ. Repeatability X, Y ±0.5 ±0.5 µm typ. Repeatability Z ±0.1 ±0.1 µm typ. Repeatability θX, θY ±2 ±2 µrad typ. Repeatability θZ ±2.5 ±2.5 µrad typ. Max. velocity X, Y, Z 1 25 mm/ s Max. velocity θX, θY, θZ 11 270 mrad/ s Typ. Velocity X, Y, Z 0.5 10 mm/ s Typ. Velocity θX, θY, θZ 5.5 55 mrad/ s Stiffness X, Y 1.7 1.7 N/ µm Stiffness Z 7 7 N/ µm Load (base plate horizontal / any orientation) 10 / 5 5 / 2.5 kg max. Holding force, de- energized (base plate horizontal / any orientation) 100 / 50 15 / 5 N max. Motor type DC gear motor DC motor Operating temperature range -10 to 50 -10 to 50 Material Aluminum Aluminum Mass 8 8 kg ±5 % Cable length 3 3 m ±10 mm Active axes Unit Tolerance Motion and positioning Mechanical properties Miscellaneous °C -6 Vacuum versions to 10 hPa are available under the following ordering number: H-824.xVx. Specifications for vacuum versions can differ. Technical data specified at 20 ±3 °C. Ask about custom designs! * The travel ranges of the individual coordinates (X, Y, Z, θX, θY, θZ) are interdependent. The data for each axis in this table shows its maximum travel, where all other axes are at their zero positions. If the other linear or rotational coordinates are not zero, the available travel may be less. Order Information © Physik Instrumente (PI) GmbH und Co. KG 2014. Subject to change without notice. Latest releases available at www.pi.ws WWW.PI.WS Page 2 of 4 01.03.2016 11:19 R1 H-824.G2 Compact Hexapod Microrobot, DC Motor Gearhead, 1 mm/ s, 10 kg Load, Sub- D Connector, Cable Set 3 m H-824.D2 Compact Hexapod Microrobot, Direct Drive, 25 mm/ s, 5 kg Load, Sub- D Connector, Cable Set 3 m Vacuum versions H-824.G2V Compact Hexapod Microrobot, DC Motor Gearhead, 0.5 mm/ s, 5 kg Load, Vacuum- Compatible to 10-6 hPa, Sub- D Connector, 2 m VacuumSide Cable, Feedthrough, 3 m Air- Side Cable H-824.D2V Compact Hexapod Microrobot, Direct Drive, 12.5 mm/ s, 2.5 kg Load, Vacuum- Compatible to 10-6 hPa, Sub- D Connector(s), 2 m Vacuum- Side Cable, Feedthrough, 3 m Air- Side Cable Recommended controller C-887.52 6D Hexapod Controller, TCP/ IP, RS-232, Bench- Top Device, Control of Two Additional Servo- Motor Axes Included Accessories C-887.MC Hexapod Control Unit, USB Connector, 3 m Cable C-887.VM1 PIVeriMove Software for the Collision Check Hexapod systems with fieldbus interface H-824.D31 Compact Hexapod Microrobot, Direct Drive, 25 mm/ s, 5 kg Load, Cable Set 3 m, with 6- D Hexapod Controller, EtherCAT® Interface Configuration options (to be ordered as a system) H-824.G11 Compact Hexapod Microrobot, DC Motor Gearhead, 1 mm/ s, 10 kg Load, Cable Set 3 m, with 6- D Hexapod Controller, Control of 2 Additional Servo- Motor Axes Included, TCP/ IP and RS-232 Interface, 19'' Chassis H-824.D11 Compact Hexapod Microrobot, Direct Drive, 25 mm/ s, 5 kg Load, Cable Set 3 m, with 6- D Hexapod Controller, Control of 2 Additional ServoMotor Axes Included, TCP/ IP and RS-232 Interface, 19'' Chassis Vacuum versions H-824.GV1 Compact Hexapod Microrobot, DC Motor Gearhead, 0.5 mm/ s, 5 kg Load, Vacuum- Compatible to 10-6 hPa, 2 m Vacuum- Side Cable, Feedthrough, 3 m Air- Side Cable, with 6- D Hexapod Controller, Control of 2 Additional Servo- Motor Axes Included, TCP/ IP and RS-232 Interface, 19'' Chassis H-824.DV1 Compact Hexapod Microrobot, Direct Drive, 12.5 mm/ s, 2.5 kg Load, Vacuum- Compatible to 10-6 hPa, 2 m Vacuum- Side Cable, Feedthrough, 3 m Air- Side Cable, with 6- D Hexapod Controller, Control of 2 Additional Servo- Motor Axes Included, TCP/ IP and RS-232 Interface, 19'' Chassis Upgrades (to be ordered separately) F-206.NCU Rapid 3- Axis Piezo Nanopositioning System for Use in Combination with Hexapod Systems. Consists of P-611.3SF NanoCube® XYZ Nanopositioning System, 100 µm × 100 µm × 100 µm, Strain Gauge Sensors with Integrated Fiber Adapter Interface and E-760.3S0 NanoCube® Piezo Controller Board, ISA Bus F-206.iiU Photometer Card, IR Range, 2 Channels F-206.VVU Photometer Card, Visible Range, 2 Channels Ask about custom designs! Controllers / Drivers / Amplifiers C-887 Controller for Hexapod Positioning Systems Related Products P-587 6- Axis Precision Piezo Stage H-206 6- Axis Precision Alignment System H-810 6- Axis Miniature Hexapod H-811 6- Axis Miniature Hexapod H-840 6- Axis Hexapod H-850 6- Axis Hexapod H-820 6- Axis Positioner with Controller Technology Hexapod- Specific Software from PI | Due to their parallel kinematic structure, Hexapods necessitate a particularly complex control system. Learn more ... Hexapods – Parallel- Kinematics Positioning Systems | Hexapod platforms are used for precision positioning and alignment of loads in all six degrees of freedom, three linear axes, and three rotational axes. Learn more ... © Physik Instrumente (PI) GmbH und Co. KG 2014. Subject to change without notice. Latest releases available at www.pi.ws WWW.PI.WS Page 3 of 4 01.03.2016 11:19 R1 Drawings / Images H-824, dimensions in mm © Physik Instrumente (PI) GmbH und Co. KG 2014. Subject to change without notice. Latest releases available at www.pi.ws WWW.PI.WS Page 4 of 4 01.03.2016 11:19 R1
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