Physik Instrumente PI Datasheet P 611 XZ 2 20150122
datasheet PI_Datasheet_P-611_XZ_-_P-611_2_20150122 P-611.XZ • P-611.2 XZ & XY Nanopositioner
User Manual: Physik Instrumente P-611.XZ • P-611.2 XZ & XY Nanopositioner
Open the PDF directly: View PDF 
.
Page Count: 4
| Download | |
| Open PDF In Browser | View PDF |
XZ & XY Nanopositioner COMPACT 2- AXIS PIEZO SYSTEM FOR NANOPOSITIONING TASKS P-611.XZ • P-611.2 Compact: Footprint 44 mm × 44 mm Travel range to 120 µm × 120 µm Resolution to 0.2 nm Cost- effective mechanics / electronics system configurations Frictionless, high- precision flexure guiding system ® Outstanding lifetime due to PICMA piezo actuators X, Z and XYZ version available Specifications P-611.2S P-611.20 P-611.XZS P-611.XZ0 X, Y X, Y X, Z X, Z Unit Tolerance Integrated sensor SGS – SGS – Open- loop travel, -20 to 120 V 120 120 120 120 µm min. (20 % / -0 %) Closed- loop travel 100 – Open- loop resolution 0.2 0.2 100 – µm 0.2 0.2 Closed- loop resolution 2 nm typ. – 2 – nm Linearity error typ. 0.1 – 0.1 – % typ. Repeatability <10 – <10 – nm typ. Pitch in X, Y ±5 ±5 ±5 ±5 µrad typ. Runout θX (motion in Z) – – ±10 ±10 µrad typ. Yaw in X ±20 ±20 ±20 ±20 µrad typ. Yaw in Y ±10 ±10 – – µrad typ. Runout θY (motion in Z) – – ±10 ±10 µrad typ. Stiffness 0.2 0.2 0.2Z: 0.35 0.2Z: 0.35 N/ µm ±20 % Resonant frequency, no load X: 345; Y: 270 X: 345; Y: 270 X: 365; Z: 340 X: 365; Z: 340 Hz ±20 % Resonant frequency, under load, at 30 g X: 270; Y: 225 X: 270; Y: 225 X: 280; Z: 295 X: 280; Z: 295 Hz ±20 % Resonant frequency, under load, at 100 g X: 180; Y: 165 X: 180; Y: 165 X: 185; Z: 230 X: 185; Z: 230 Hz ±20 % Push / pull force capacity in motion direction 15 / 10 15 / 10 15 / 10 15 / 10 N max. Load capacity 15 15 15 15 N max. PICMA® P-885 PICMA® P-885 PICMA® P-885 PICMA® P-885 Active axes Motion and positioning Mechanical properties Drive properties Ceramic type © Physik Instrumente (PI) GmbH und Co. KG 2014. Subject to change without notice. Latest releases available at www.pi.ws WWW.PI.WS Page 1 of 4 02.02.2015 09:01 Electrical capacitance Dynamic operating current coefficient 1.5 1.5 1.5 1.5 µF ±20 % ±20 % 1.9 1.9 1.9 1.9 µA / (Hz × µm) Operating temperature range -20 to 80 -20 to 80 -20 to 80 -20 to 80 °C Material Aluminum, steel Aluminum, steel Aluminum, steel Aluminum, steel Dimensions 44 mm × 44 mm × 25 mm 44 mm × 44 mm × 25 mm 44 mm × 44 mm × 34 mm 44 mm × 44 mm × 34 mm Mass 0.235 0.235 0.27 0.27 kg ±5 % Cable length 1.5 1.5 1.5 1.5 m ±10 mm Sensor connection LEMO – LEMO – Voltage connection LEMO LEMO LEMO LEMO Miscellaneous The resolution of PI piezo nanopositioners is not limited by friction or stiction. Value is given noise equivalent motion with E-503 amplifier. Dynamic Operating Current Coefficient in µA per Hz and µm. Example: Sinusoidal scan of 50 µm at 10 Hz requires approximately 0.9 mA drive current. Recommended controller / amplifier Single- channel (1 per axis): E-610 servo- controller / amplifier, E-625 servo- controller, bench- top, E-621 controller module Multi- channel: modular piezo controller system E-500 with amplifier module E-503 (three channels) or E-505 (1 per axis, high- power) and E-509 controller Order Information P-611.2S XY Nanopositioning System, 100 µm × 100 µm, SGS Sensor P-611.20 XY Nanopositioning System, 100 µm × 100 µm, Open- Loop P-611.XZS XZ Nanopositioning System, 100 µm ×100 µm, SGS Sensor P-611.XZ0 XZ Nanopositioning System, 100 µm ×100 µm, Open- Loop Controllers / Drivers / Amplifiers E-610 Piezo Amplifier / Controller E-625 Piezo Servo- Controller & Driver E-621 Piezo Servo- Controller & Driver E-500 • E-501 Modular Piezo Controller E-505 Piezo Amplifier Module E-509 Signal Conditioner / Piezo Servo Module © Physik Instrumente (PI) GmbH und Co. KG 2014. Subject to change without notice. Latest releases available at www.pi.ws WWW.PI.WS Page 2 of 4 02.02.2015 09:01 Drawings / Images © Physik Instrumente (PI) GmbH und Co. KG 2014. Subject to change without notice. Latest releases available at www.pi.ws WWW.PI.WS Page 3 of 4 02.02.2015 09:01 © Physik Instrumente (PI) GmbH und Co. KG 2014. Subject to change without notice. Latest releases available at www.pi.ws WWW.PI.WS Page 4 of 4 02.02.2015 09:01
Source Exif Data:
File Type : PDF File Type Extension : pdf MIME Type : application/pdf PDF Version : 1.3 Linearized : No Page Count : 4 Page Layout : OneColumn Producer : FPDF 1.53 Create Date : 2015:02:02 09:01:40EXIF Metadata provided by EXIF.tools