Physik Instrumente PI Datasheet P 611 XZ 2 20150122
datasheet PI_Datasheet_P-611_XZ_-_P-611_2_20150122 P-611.XZ • P-611.2 XZ & XY Nanopositioner
User Manual: Physik Instrumente P-611.XZ • P-611.2 XZ & XY Nanopositioner
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XZ & XY Nanopositioner
COMPACT 2- AXIS PIEZO SYSTEM FOR NANOPOSITIONING TASKS
Specifications
P-611.2S P-611.20 P-611.XZS P-611.XZ0 Unit Tolerance
Active axes X, Y X, Y X, Z X, Z
Motion and positioning
Integrated sensor SGS –SGS –
Open- loop travel, -20 to 120 V 120 120 120 120 µm min. (20 % /
-0 %)
Closed- loop travel 100 –100 –µm
Open- loop resolution 0.2 0.2 0.2 0.2 nm typ.
Closed- loop resolution 2 –2–nm typ.
Linearity error 0.1 –0.1 –% typ.
Repeatability <10 –<10 –nm typ.
Pitch in X, Y ±5 ±5 ±5 ±5 µrad typ.
Runout θX (motion in Z) – – ±10 ±10 µrad typ.
Yaw in X ±20 ±20 ±20 ±20 µrad typ.
Yaw in Y ±10 ±10 ––µrad typ.
Runout θY (motion in Z) – – ±10 ±10 µrad typ.
Mechanical properties
Stiffness 0.2 0.2 0.2Z: 0.35 0.2Z: 0.35 N/ µm ±20 %
Resonant frequency, no load X: 345;
Y: 270 X: 345;
Y: 270 X: 365;
Z: 340 X: 365;
Z: 340 Hz ±20 %
Resonant frequency, under load,
at 30 g X: 270;
Y: 225 X: 270;
Y: 225 X: 280;
Z: 295 X: 280;
Z: 295 Hz ±20 %
Resonant frequency, under load,
at 100 g X: 180;
Y: 165 X: 180;
Y: 165 X: 185;
Z: 230 X: 185;
Z: 230 Hz ±20 %
Push / pull force capacity in
motion direction 15 / 10 15 / 10 15 / 10 15 / 10 N max.
Load capacity 15 15 15 15 N max.
Drive properties
Ceramic type PICMA® P-885 PICMA® P-885 PICMA® P-885 PICMA® P-885
P-611.XZ • P-611.2
Compact: Footprint 44 mm × 44 mm
Travel range to 120 µm × 120 µm
Resolution to 0.2 nm
Cost- effective mechanics / electronics system
configurations
Frictionless, high- precision flexure guiding
system
Outstanding lifetime due to PICMA® piezo
actuators
X, Z and XYZ version available
© Physik Instrumente (PI) GmbH und Co. KG 2014. Subject to change without notice.
Latest releases available at www.pi.ws
WWW.PI.WS
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Electrical capacitance 1.5 1.5 1.5 1.5 µF ±20 %
Dynamic operating current
coefficient 1.9 1.9 1.9 1.9 µA / (Hz ×
µm) ±20 %
Miscellaneous
Operating temperature range -20 to 80 -20 to 80 -20 to 80 -20 to 80 °C
Material Aluminum, steel Aluminum, steel Aluminum, steel Aluminum, steel
Dimensions 44 mm × 44 mm ×
25 mm 44 mm × 44 mm ×
25 mm 44 mm × 44 mm ×
34 mm 44 mm × 44 mm ×
34 mm
Mass 0.235 0.235 0.27 0.27 kg ±5 %
Cable length 1.5 1.5 1.5 1.5 m ±10 mm
Sensor connection LEMO –LEMO –
Voltage connection LEMO LEMO LEMO LEMO
The resolution of PI piezo nanopositioners is not limited by friction or stiction. Value is given noise equivalent motion with E-503 amplifier.
Dynamic Operating Current Coefficient in µA per Hz and µm. Example: Sinusoidal scan of 50 µm at 10 Hz requires approximately 0.9 mA drive
current.
Recommended controller / amplifier
Single- channel (1 per axis): E-610 servo- controller / amplifier, E-625 servo- controller, bench- top, E-621 controller module
Multi- channel: modular piezo controller system E-500 with amplifier module E-503 (three channels) or E-505 (1 per axis, high- power) and E-509
controller
Order Information
P-611.2S
XY Nanopositioning System, 100 µm × 100 µm, SGS Sensor
P-611.20
XY Nanopositioning System, 100 µm × 100 µm, Open- Loop
P-611.XZS
XZ Nanopositioning System, 100 µm ×100 µm, SGS Sensor
P-611.XZ0
XZ Nanopositioning System, 100 µm ×100 µm, Open- Loop
Controllers / Drivers / Amplifiers
E-610 Piezo Amplifier / Controller
E-625 Piezo Servo- Controller & Driver
E-621 Piezo Servo- Controller & Driver
E-500 • E-501 Modular Piezo Controller
E-505 Piezo Amplifier Module
E-509 Signal Conditioner / Piezo Servo Module
© Physik Instrumente (PI) GmbH und Co. KG 2014. Subject to change without notice.
Latest releases available at www.pi.ws
WWW.PI.WS
