Physik Instrumente Datasheet UPR 120
User Manual: Physik Instrumente Product ation & Software
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UPR-120 Ultraprecision Rotation Stage Excellent Stability and Travel Accuracy Unlimited travel range Velocity to 360 °/s Incremental angle measuring system with 0.00002° resolution Clear aperture with 35 mm diameter Optional: Air bearings for optimized flatness Reference-class rotation stage High travel accuracy. High position resolution due to incremental encoder with analog signal transmission (sin/cos, 1 Vpp) Magnetic direct drive Ironless magnetic direct drive (torque motor) for high velocity and acceleration. High position resolution. Fields of application Industry and research. Metrology, semiconductor manufacturing and testing, synchrotron applications Specifications 6808911130 UPR-120 6824911130 UPR-120 AIR Active axes θZ θZ Travel range >360 >360 ° Integrated sensor Sensor resolution* Incremental angle measuring system 0.00002 Incremental angle measuring system 0.00002 ° Min. incremental motion 0.00008 0.00004 ° Motion and Positioning Unit Tolerance typ. 08.05.2017 Unidirectional repeatability 0.00008 0.00005 ° typ. Bidirectional repeatability ±0.0001 ±0.00008 ° typ. Flatness ±1 ±0.05 µm typ. Eccentricity ±3 ±0.1 µm typ. Wobble ±25 ±1.25 µrad typ. Velocity 360 360 °/s max. Max. load, axial 100 100 N max. Max. load, radial 50 50 N max. Moved mass 0.8 1.1 kg Overall mass 6 6.5 kg Drive type Torque motor, ironless Torque motor, ironless Intermediate circuit voltage 48 48 VDC max. Peak torque 2.08 2.08 Nm typ. Nominal torque 0.76 0.76 Nm typ. Nominal current, effective 7.7 7.7 A typ. Torque constant, effective 0.26 0.26 Nm/A typ. Resistance per phase 2.2 2.2 Ω typ. Inductivity per phase 1.17 1.17 mH typ. Back EMF phase-phase 0.18 0.18 Vs/rad max. Limit switches optical optical Operating temperature range 10 to 50 10 to 50 Humidity 20 – 90% rel., not condensing 20 – 90% rel., not condensing Material Aluminum, (black anodized) Aluminum, (black anodized) Recommended controller SMC Hydra, ACS SPii+EC and other industrial solutions SMC Hydra, ACS SPii+EC and other industrial solutions Mechanical Properties Drive Properties Miscellaneous °C * With SMC Hydra controller. 08.05.2017 Drawings and Images UPR-120, dimensions in mm 08.05.2017 Direction of the axes and torques for rotation stages Ordering Information 6808911130 UPR-120 Ultra Precision Rotation Stage, Torque Motor, High-Resolution Angle Measuring System with Sin/Cos Signal Transmission, Optical Limit Switch 6824911130 UPR-120 AIR Ultra Precision Rotation Stage, Torque Motor, Air Bearing, High-Resolution Angle Measuring System with Sin/Cos Signal Transmission, Optical Limit Switch 08.05.2017
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File Type : PDF File Type Extension : pdf MIME Type : application/pdf PDF Version : 1.4 Linearized : Yes Tagged PDF : Yes XMP Toolkit : Adobe XMP Core 5.6-c015 84.159810, 2016/09/10-02:41:30 Modify Date : 2017:05:08 16:10:51+02:00 Create Date : 2017:05:08 16:10:47+02:00 Metadata Date : 2017:05:08 16:10:51+02:00 Creator Tool : Acrobat PDFMaker 15 für Word Document ID : uuid:2cecf52e-b390-4321-b456-d71d58ce2131 Instance ID : uuid:00cb27c3-a6df-4b50-8f8a-af7375b03192 Subject : 2 Format : application/pdf Title : Datasheet Template Creator : Hoelzer, Christoph Producer : Adobe PDF Library 15.0 Source Modified : D:20170508141042 Company : PI Page Layout : OneColumn Page Count : 4 Author : Hoelzer, Christoph Keywords : R1EXIF Metadata provided by EXIF.tools