Polvac Technical Author IGX Dryp Pump B

User Manual: Polvac IGX Dryp Pump b

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A546-00-860 Issue A Original
http://www.bocedwards.com
Important Safety Information
Read the Safety Information in this section of the manual before installing, operating or maintaining the pump.
This section must be read in conjunction with A546-00-880 and A546-00-840.
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Jun 07 Issue A
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1 INTRODUCTION 1
2 INSTALLATION SAFETY 2
2.1 Locate the dry pumping system 3
2.3 Connect the dry pumping system to your vacuum/exhaust system and interstage connection (if fitted) 3
2.5 Connect the nitrogen supply (if provided) 4
2.5.1 Flammable/pyrophoric materials 4
2.5.2 Gas purges 4
2.6 Leak-test the system 5
2.7 Connect the electrical supply to the dry pumping system 5
2.10 Connect the cooling-water hoses 6
2.12 Commission the iGX system 6
2.13 Install additional safety equipment 6
3OPERATION 7
3.1 Start-up 7
3.3 Manual shut-down 7
4 MAINTENANCE 8
4.1 Safety and maintenance frequency 8
4.2 Relocate the system for maintenance 9
4.3 Draining the cooling water 10
5 TRANSPORTATION, STORAGE AND DISPOSAL 11
5.1 Transportation 11
5.3 Disposal 11
6 SERVICE, SPARES AND ACCESSORIES 11
6.1 Introduction 11
CONTENTS
Section Page
dcs/7601/0607
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Jun 07 Issue A
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INTRODUCTION
1 INTRODUCTION
This manual provides information for the safe installation, operation and maintenance of the Dry Pumping Systems.
The following symbols may appear on the dry pumping system:
Warning - refer to accompanying
documentation.
Warning - risk of electric shock.
Warning - hot surfaces.
Warning - moving parts present.
Warning - heavy object.
Warning - use protective equipment.
RF earth (ground).
Protective earth (ground).
Material Safety Data Sheets for BOC Edwards supplied chemicals can be obtained by contacting BOC Edwards.
Please refer to the appropriate section of this safety guide when a warning symbol appears in the installation guide (A546-00-880).
Issue A Jun 07
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INSTALLATION SAFETY
2 INSTALLATION SAFETY
Potential hazards on the dry pumping system include electricity, hot surfaces, process chemicals, Fomblin oil, nitrogen and water under pressure.
Detailed safety information is given in Section 3 and BOC Edwards Publication Number P300-20-000 'Vacuum Pump and Vacuum System Safety'.
• Only BOC Edwards engineers may install the dry pumping system. Users can be trained by BOC Edwards to conduct the tasks described in this manual,
contact your local service centre or BOC Edwards for more information.
• Do not remove the temporary cover or blanking plate from the dry pumping system inlet and exhaust until you are ready to connect the dry pumping
system to your vacuum or exhaust-extraction system. Do not operate the dry pumping system unless the inlet and exhaust are connected to your vacuum
and exhaust-extraction system.
• Vent and purge the process system (if the dry pumping system is to replace an existing pumping system) with nitrogen for 15 minutes before you start
installation work. Refer to Section 4.
• Disconnect the other components in the process system from the electrical supply so that they cannot be operated accidentally.
• Electrical, nitrogen and water supplies are all potentially hazardous energy sources. Before carrying out any maintenance the supply of these sources should
be locked and tagged out.
• Route and secure cables, hoses and pipework during installation to avoid possible trip hazards.
• The pump system includes provision for ventilation extraction and secondary containment of oil and water leaks. Any unintended overflows or spills must
be removed immediately to avoid risk of slips.
• Obey all national and local rules and safety regulations when you install the dry pumping system. Consult BOC Edwards Publication Number P300-20-000
(Vacuum Pump and Vacuum System Safety) before you pump hazardous materials. This publication is available on request: contact your supplier or BOC
Edwards.
WARNING
Obey the safety instructions given below and take the appropriate precautions. If you do not, you can cause injury to people and damage to
equipment.
WARNING
The system should not be operated with the BOC Edwards panels removed.
Jun 07 Issue A
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3
INSTALLATION SAFETY
2.1 Locate the dry pumping system
2.3 Connect the dry pumping system to your vacuum/exhaust system and interstage connection (if fitted)
WARNING
You must use suitable lifting equipment to move the system. It is too heavy to lift by hand.
WARNING
Do not exceed the topple angle of 10 ° when moving the pump. Wheel the system on its castors to move it into its operating position. The system
should only be wheeled short distances over flat surfaces. If the floor surface is uneven or has obstacles the system should be lifted with suitable
lifting equipment.
WARNING
Pipe the exhaust to a suitable treatment plant to prevent the discharge of dangerous gases or vapours to the surrounding atmosphere.
WARNING
Do not operate the system with the exhaust pipeline blocked. If the exhaust pipeline is blocked, the system can generate exhaust pipeline pressures
of up to 7 bar (7 x 105 Pa).
Issue A Jun 07
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INSTALLATION SAFETY
2.5 Connect the nitrogen supply (if provided)
2.5.1 Flammable/pyrophoric materials
When flammable or pyrophoric materials are present within the equipment you must:
•Not allow air to enter the equipment
• Ensure that the system is leak tight
• Ensure that pumped gases do not enter their flammable range. This can be achieved by diluting flammable gases/vapours or oxidisers in the pump by supplying
sufficient inert gas purge, for example dilution with nitrogen to below one quarter LEL (lower explosive limit) or, if that is not practical, to below 60% LOC
(limiting oxidant concentration).
•For further information please refer to Semiconductor Pumping Application Guide (Publication no. P411-00-090) or contact BOC Edwards: refer to the
address page at the rear of this manual for details of your nearest BOC Edwards company.
2.5.2 Gas purges
Switch on the inert gas purge to remove air from the pump and the exhaust pipeline before the process starts. Switch off the purge flow at the end of the process
only after the remaining flammable gases or vapours have been purged from the exhaust pipeline.
If liquids that produce flammable vapours could be present in the pump foreline, then the inert gas purge to the dry pumping system should be left on all the time
this liquid is present. Flammable liquids could be present in the foreline as a result of condensation or may be carried over from the process.
When calculating the flow rate of inert gas required for dilution, consider the maximum flow rate for the flammable gases/vapours that could occur. For example,
if a mass flow controller is being used to supply flammable gases to the process, you should assume a flow rate for flammable gases that could arise if the mass
flow controller is fully open.
Continually measure the inert gas flow rate: if the flow rate falls below that required, then the flow of flammable gases or vapours to the pump must be stopped.
WARNING
You must obey the instructions and take note of any precautions given below to ensure that pumped gases do not enter their flammable ranges.
WARNING
If you use inert gas purges to dilute dangerous gases to a safe level, ensure that the pump is shut down if an inert gas supply fails.
Jun 07 Issue A
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INSTALLATION SAFETY
2.6 Leak-test the system
2.7 Connect the electrical supply to the dry pumping system
WARNING
Leak test the system after installation and seal any leaks found to prevent leakage of dangerous substances out of the system and leakage of air
into the system.
WARNING
This equipment is suitable for Installation Category II as defined in IEC 60664-3. Connect the system to the electrical supply through a suitably
rated isolator/connector for your dry pumping system.
WARNING
Ensure that the system and your electrical supply cable are suitably protected against earth (ground) faults and that the earth (ground) conductor
of the electrical supply cable is longer than the phase conductors in the connector. You must fit a second protective earth (ground) conductor
(with a cross-sectional area at least equal to phase conductor size) to the protective earth (ground) stud.
WARNING
All connections to the interface control must be double insulated or have equivalent protection. Do not connect voltages greater than
30 V a.c. or 60 V d.c. to the control/interface connections. If you do, the interface control will not provide protection against electric shock.
WARNING
There is no overload protection provided on the Systemable (T variant) system.
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INSTALLATION SAFETY
2.10 Connect the cooling-water hoses
2.12 Commission the iGX system
2.13 Install additional safety equipment
WARNING
Do not leave the cooling-water supply turned on until after you complete the electrical installation of the pump. If you do, condensation may form
inside the enclosure and there may be a risk of electric shock.
WARNING
During some application cycles it is possible that the system may exceed OSHA 1910.95 Occupational Noise Exposure Limits, the EU noise
directive 2003/10/EC or other regional noise limits dependant upon the process, duty cycle, installation or environment in which being operated.
A sound pressure survey must be conducted after installation and, if necessary, controls implemented to ensure that the relevant limits are not
exceeded during operation and that adequate precautions are taken to prevent personnel from exposure to high noise levels during operation.
WARNING
If your Process Tool/control system needs to know the total flow rate of nitrogen to the system for safety reasons, install suitable measurement
equipment in the nitrogen supply pipeline.
WARNING
If you use the nitrogen purges to dilute dangerous gases to a safe level, ensure that the system shuts down if the nitrogen supply to the system fails.
Jun 07 Issue A
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7
OPERATION
3OPERATION
3.1 Start-up
3.3 Manual shut-down
WARNING
Do not operate the system with any enclosure panels removed or damaged and do not touch any parts of the pump(s) when the system is on.
Surfaces of the pump(s) are very hot and can cause injury to people.
WARNING
Do not operate the system with any enclosures removed or damaged. If you do there may be a risk of an electric shock.
WARNING
Ensure that it is safe to start the system. If you do not (and, for example, maintenance is being performed on components downstream of the
system), you could cause injury to people.
WARNING
After the power is applied, the contactors will pull in automatically and all mains circuits will be energised.
WARNING
If you shut the system down and don’t isolate it from the electrical supply, do not disconnect the Pump Display Terminal or release control from
the Pump Display Terminal or front panel. If you do the system could be started by another Module.
WARNING
Do not remove the inlet connections until the pump has been allowed to stop rotating and the power has been isolated. The pump can take up
to three minutes to completely stop.
Issue A Jun 07
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MAINTENANCE
4MAINTENANCE
4.1 Safety and maintenance frequency
• Ensure that the maintenance technician is familiar with the safety procedures which relate to the products pumped.
•Allow the pumps to cool to a safe temperature before you fit lifting bolts or start maintenance work.
• Vent and purge the dry pumping system with nitrogen before you start any maintenance work.
• Isolate the dry pumping system and other components in the process system from the electrical supply so that they cannot be operated accidentally. Note
that the emergency stop switch on the dry pumping system is not an electrical isolator, unless a disconnect box accessory is installed.
• Wait for at least four minutes after you have switched off the electrical supply before you touch any electrical component on the dry pumping system.
WARNING
Only personnel specially trained to perform electrical maintenance should attempt troubleshooting inside electrical enclosures. These enclosures
contain hazardous voltages and are not operator areas.
WARNING
Leak test the system after maintenance and seal any leaks found to prevent leakage of dangerous substances out of the system and leakage of air
into the system.
WARNING
Electrical, nitrogen and water supplies are all potentially hazardous energy sources. Before carrying out any maintenance the supply of these
sources should be locked and tagged out.
WARNING
Personal protection equipment should be checked and used as specified by its supplier. Hazardous chemicals that have been pumped are located
within the pumps and piping. Use of suitable protective gloves and clothing along with a respirator is recommended if contact with substances is
anticipated.
Particular caution should be exercised when working with Fomblin oil which may have been exposed to temperatures greater than 260 °C. Refer
to BOC Edwards Material Safety Data Sheets for detailed information.
Jun 07 Issue A
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MAINTENANCE
• Route and secure cables, hoses and pipelines during maintenance to avoid possible risk of trips or entrapment.
• Ensure that any oil or water collected in the secondary containment drip tray is removed before moving the system.
• The enclosure panels should only be removed with the use of a special tool, when the system has been switched off and allowed to cool sufficiently (as an
indication the system should be left for one hour with cooling water still connected at the flow rate specified in Table 1.
• Wear the appropriate safety-clothing when you come into contact with contaminated components. Dismantle and clean contaminated components inside
a fume-cupboard.
• Take care to protect the sealing-faces from damage.
• Do not touch or inhale the thermal breakdown products of fluorinated materials which may be present if the iGX system has been overheated to 260 °C
and above. These breakdown products are very dangerous. Fluorinated materials in the iGX system may include oils, greases and seals. The iGX system
may have overheated if it was misused, if it malfunctioned or if it was in a fire. BOC Edwards Material Safety Data Sheets for fluorinated materials used in
the pump are available on request: contact your supplier or BOC Edwards (refer to the address page at the rear of this manual for contact details).
4.2 Relocate the system for maintenance
WARNING
The substances that accumulate in the exhaust-pipe, elbow and check-valve (supplied separately) can be dangerous. Do not allow these substances
to come into contact with your skin or eyes. Do not inhale vapours from these substances. Fit blanking caps to the inlet and outlet flanges when
you move the exhaust-pipe, elbow or check-valve around your workplace.
The majority of synthetic oils/grease can cause inflammation of the skin (dermatitis). Safety precautions must be taken to prevent prolonged skin
contact with these substances. Use of suitable protective gloves and clothing along with a respirator is recommended if contact with the substance
is anticipated.
System process gases and residue can be highly toxic. Take all necessary precautions when handling components that have, or could have, come
into contact with them, including O-rings, lubricants and all exhaust accessories.
WARNING
You must use suitable lifting equipment to move the system. It is too heavy to lift by hand.
Issue A Jun 07
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10
MAINTENANCE
4.3 Draining the cooling water
WARNING
Do not exceed the topple angle of 10 ° when moving the pump. Wheel the system on its castors to move it into its operating position. The system
should only be wheeled short distances over flat surfaces. If the floor surface is uneven or has obstacles the system should be lifted with suitable
lifting equipment.
WARNING
Personal protection equipment should be checked and used as specified by its supplier. Use of suitable protective gloves and eye protection is
recommended when carrying out this procedure.
Jun 07 Issue A
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11
TRANSPORTATION, STORAGE AND DISPOSAL
5 TRANSPORTATION, STORAGE AND DISPOSAL
5.1 Transportation
5.3 Disposal
6 SERVICE, SPARES AND ACCESSORIES
6.1 Introduction
WARNING
Do not drain the oil from the pump(s) whether dangerous substances have been pumped or not. You must fit blanking plates to seal all vacuum
inlet and outlet ports (to prevent possible oil leakage). You must ensure that the system is correctly labelled, if in doubt contact BOC Edwards.
WARNING
Dispose of the system and any components safely and in accordance with all local and national safety and environmental requirements.
WARNING
Whenever you return the dry pumping system to a BOC Edwards Service Centre or other BOC Edwards company, you must comply with the
requirements of the Return of BOC Edwards Equipment Procedure (refer to forms HS1 and HS2 at the rear of this manual).
Issue A Jun 07
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A546-00-880 Issue A Original
http://www.bocedwards.com
Installation, Operation and Maintenance Guide
iGX Dry Pumping Systems
Read the Safety Guide before installing,
operating or maintaining this pump.
Description Item Number
iGX100L 200 V-230 V 50/60 Hz A546-10-958
iGX100L 380 V-460 V 50/60 Hz A546-10-959
iGX100L 200 V-230 V 50/60 Hz SS A548-10-958
iGX100L 380 V-460 V 50/60 Hz SS A548-10-959
iGX600L 200 V-230 V 50/60 Hz A546-30-958
iGX600L 380 V-460 V 50/60 Hz A546-30-959
iGX600L 200 V-230 V 50/60 Hz SS A548-30-958
iGX600L 380 V-460 V 50/60 Hz SS A548-30-959
iGX100N 200 V-230 V 50/60 Hz A546-11-958
iGX100N 380 V-460 V 50/60 Hz A546-11-959
iGX100N 200 V-230 V 50/60 Hz SS A548-11-958
iGX600N 200 V-230 V 50/60 Hz A546-31-958
iGX600N 380 V-460 V 50/60 Hz A546-31-959
iGX1000N 200 V-230 V 50 Hz A546-81-958
iGX1000N 380 V-460 V 50 Hz A546-81-959
iGX1000N 200 V-230 V 50/60 Hz SS A548-81-958
iGX100M 200 V- 230 V 50/60 Hz A546-12-958
iGX100M 380 V-460 V 50/60 Hz A546-12-959
iGX100M 200 V-230 V 50/60 Hz SS A548-12-958
iGX100 MTi 200 V-230 V 50/60 Hz A546-48-958
iGX100 MTi 380 V-460 V 50/60 Hz A546-48-959
iGX100MTi 200 V-230 V 50/60 Hz SS A548-48-958
iGX600M 200 V-230 V 50/60 Hz A546-32-958
iGX600M 380 V-460 V 50/60 Hz A546-32-959
iGX600M 200 V-230 V 50/60 Hz SS A548-32-958
Declaration of Conformity
We, Edwards,
Manor Royal,
Crawley,
West Sussex RH10 9LW, UK
declare under our sole responsibility that the product(s):
iGX100L 200-230V 50/60Hz A546-10-958 iGX100N 200-230V 50/60Hz A546-11-958 iGX100M 200-230V 50/60Hz A546-12-958
iGX100L 380-460V 50/60Hz A546-10-959 iGX100N 380-460V 50/60Hz A546-11-959 iGX100M 380-460V 50/60Hz A546-12-959
iGX100L 200-230V 50/60Hz SS A548-10-958 iGX100N 200-230V 50/60Hz SS A548-11-958 iGX100M 200-230V 50/60Hz SS A548-12-958
iGX100 380-460V 50/60Hz SS A548-10-959 iGX600N 200-230V 50/60Hz A546-31-958 iGX100MTi 200-230V 50/60Hz A546-48-958
iGX600L 200-230V 50/60Hz A546-30-958 iGX600N 380-460V 50/60Hz A546-31-959 iGX100MTi 380-460V 50/60Hz A546-48-959
iGX600L 380-460V 50/60Hz A546-30-959 iGX1000N 200-230V 50/60Hz A546-81-958 iGX100MTi 200-230V 50/60Hz SS A548-48-958
iGX600L 200-230V 50/60Hz SS A548-30-958 iGX1000N 380-460V 50/60Hz A546-81-959 iGX600M 200-230V 50/60Hz A546-32-958
iGX600L 200-230V 50/60Hz SS A548-30-959 iGX1000N 200-230V 50/60Hz SS A548-81-958 iGX600M 380-460V 50/60Hz A546-32-958
iGX600M 200-230V 50/60Hz SS A548-32-958
to which this declaration relates is in conformity with the following standard(s) or other normative document(s):
EN1012-2 (1997) Compressor and Vacuum Pumps Safety Requirements; Part 2 - Vacuum Pumps.
EN61010-1 (2001) Safety Requirements for Electrical Equipment for Measurement, Control and Laboratory Use; Part 1 – General Requirements.
EN61326 (1998 + A2:2001) Electrical Equipment for Measurement, Control and Laboratory Use – EMC Requirements (Industrial locations immunity – Class A
equipment emissions).
when installed in accordance with the instruction manual supplied with the pump,
following the provisions of:
73/023/EEC Low Voltage Directive.
89/336/EEC Electromagnetic Compatibility Directive.
98/37/EC Machinery Safety Directive.
28th July 2007, Shoreham
Dr S.E. Ormrod, Technical Director Date and Place
This product has been manufactured under a quality system registered to ISO9001
P200-01-960 Issue A
May 07 Issue A
iGX Dry Pumping System
PAGE
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1 INTRODUCTION 1
1.1 Applications 1
1.2 The iGXL system 1
1.3 Priority of control 4
1.4 Active utility control 4
2INSTALLATION 5
2.1 Locate the iGX system 5
2.2 Lubrication 6
2.3 Connect the iGX system to your vacuum/exhaust system
and interstage connection (if fitted) 6
2.4 Connect to your factory extraction system (optional) 7
2.5 Connect the nitrogen supply (if provided) 7
2.6 Leak-test the iGX system 7
2.7 Connect the electrical supply 8
2.8 Connect an additional RF earth (ground) (optional) 9
2.9 Connect to your emergency stop circuit 10
2.10 Connect the cooling-water hoses 11
2.11 Accessories 11
2.12 Commission the iGX system 11
2.13 Install additional safety equipment 14
3 OPERATION 15
3.1 Start-up 15
3.2 Status indicators 16
3.3 Manual shut-down 16
3.4 Automatic shut-down 17
3.5 Unplanned shutdown and alarms 18
3.6 Emergency stop 18
3.7 Restart the pump after an emergency stop or automatic
shut-down 18
CONTENTS
Section Page 3.8 Single equipment monitor (SEM) 19
4MAINTENANCE 20
4.1 Safety and maintenance frequency 20
4.2 Relocate the system for maintenance 20
4.3 Draining the cooling water 21
4.4 Cleaning the pump 21
5 TRANSPORTATION, STORAGE AND DISPOSAL 22
5.1 Transportation 22
5.2 Storage 22
5.3 Disposal 22
6 SERVICE, SPARES AND ACCESSORIES 23
6.1 Introduction 23
6.2 Service 23
6.3 Ordering accessories 24
CONTENTS (continued)
Section Page
Please refer to the appropriate Section in A546-00-860 for
important safety information when you see a warning symbol.
dcs/7662/0507
Issue A May 07
iGX Dry Pumping System
ii
PAGE
ii
Please refer to the appropriate Section in A546-00-860 for
important safety information when you see a warning symbol.
1 iGX applications chart 1
2 The controls/connectors 2
3 The rear status panel LED indicators 3
4 The front panel controls 3
5 Priority of control 4
6 System arrangement to reduce effective footprint (if required) 5
7 High and low Volt coding pin arrangement 9
8 Connections to emergency stop circuit (systemable) 10
9 Installing 3/8" quick connect fittings (provided) 12
10 Gas module access panel 13
11 Flow tube (14 slm) 13
12 Flow tube (4 slm) 13
ILLUSTRATIONS
Figure Page
TABLES
Table Page
1 Safety sensors 17
2 Accessories 24
May 07 Issue A
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iGX Dry Pumping System
PAGE
1
INTRODUCTION
Please refer to the appropriate Section in A546-00-860 for
important safety information when you see a warning symbol.
1 INTRODUCTION
1.1 Applications
If you use the iGX system on an application for which it is not suitable (refer to Figure 1), you may invalidate your warranties. If in doubt, contact BOC Edwards
who will advise you as to the suitability of the iGX system for any particular application.
Figure 1 - iGX applications chart
Note: This product is not ATEX compliant, a range of ATEX compliant pumping systems are available, contact BOC Edwards for details.
1.2 The iGXL system
Pumping a chemical that will attack the materials in contact with these process materials may, over time, result in the internal contents of the pump becoming
exposed to the external environment, which may constitute a safety hazard. If in doubt, contact BOC Edwards who will advise you as to the suitability of this pump
for any particular application.
It is also a feature of this pump design that process gases are contained within the gearbox. This pump is not suitable for use with flammable, hazardous, toxic or
corrosive gases or material.
Issue A May 07
iGX Dry Pumping System
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2
INTRODUCTION
Please refer to the appropriate Section in A546-00-860 for
important safety information when you see a warning symbol.
Figure 2 - The controls/connectors * Not on T variants
Item Control/connector identification
1 Protective earth (ground) M5
2 Electrical supply connection
3 Rear status panel
4 Comms 4 - MicroTIM connection
(if fitted)
5 Ethernet active LED
6 Ethernet installed LED
7 Comms 3 Ethernet connection
8 Comms 2 - LON module connection
9 Comms 1 - System control/PDT 2
connection
10 Gate valve interface (EMO on T variant)
11 EMS*
12 Accessory module interface*
13 GRC interface*
14 Extraction port
15 Lifting eyebolt
16 Pumped gas inlet connection
17 RF earth (ground) cable
18 Interstage connection (if fitted)
19 Seismic bracket (if fitted, 4 off)
20 Gas Module access panel
21 Nitrogen purge port
22 Cooling-water supply connection
23 Castors (3 off)
24 Levelling feet (4 off)
25 Cooling-water return connection
26 RF earth (ground) stud M6
27 Exhaust gas outlet connection
28 Leak-test port
May 07 Issue A
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iGX Dry Pumping System
PAGE
3
INTRODUCTION
Please refer to the appropriate Section in A546-00-860 for
important safety information when you see a warning symbol.
Figure 4 - The front panel controls * Not on T variants
Item Control/connector
identification
1 EMS button*
2 Start button
3Stop button
4AUC LED (green)
5 Local control button/LED (green)
6 Alarm LED (red)
7 Warning LED (amber)
8 Running LED (green)
9 Power OK LED (green)
10 Comms 5 pump display terminal
(PDT 1) connection
Figure 3 - The rear status panel LED indicators
Item Indication
1Power OK (green)
2Running (green)
3 Warning (Amber)
4Alarm (Red)
5 Tool control (Green)
Issue A May 07
iGX Dry Pumping System
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PAGE
4
INTRODUCTION
Please refer to the appropriate Section in A546-00-860 for
important safety information when you see a warning symbol.
1.3 Priority of control
The iGX system can be controlled by a number of modules: the Pump Display Terminal (PDT), from the tool through the MicroTIM, or from the front panel local
control membrane (refer to Figure 4). Only one of these can have control of the iGX system at any one time. That is, once one of these has control of the iGX
system, control requests from the other are denied.
The PDT indicates who is in control. LEDs are also provided on the rear panel, front panel or PDT, which illuminate to indicate 'in control'. Please refer to Figure 5.
1.4 Active utility control
Active Utility Control (AUC) is available on the iGX system. This function reduces the power of the iGX system while on stand-by. The power reduction is
achieved by reducing the rotational speed of the iGX pump. This function also reduces the nitrogen purge of M variant systems while in stand-by mode.
Advanced Active Utility Control (AAUC) is also available. This function, in addition to AUC, can reduce the water flow of the iGX system while on stand-by,
therefore allowing further reductions in power. Contact BOC Edwards for advice.
The AUC functionality is controlled by the on/off process signal from the Tool Interface Module.
Figure 5 - Priority of control
1. PDT1
2. PDT2
3. LON
4. Tool
5. Front panel
6. None in control
Take
Release
May 07 Issue A
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iGX Dry Pumping System
PAGE
5
INSTALLATION
Please refer to the appropriate Section in A546-00-860 for
important safety information when you see a warning symbol.
2 INSTALLATION
2.1 Locate the iGX system
Use the following procedure to locate the iGX system in its operating position. The iGX system must be located on a firm, level surface, to ensure that the system
is not damaged.
1. Use suitable lifting equipment (refer to Figure 2) attached to the lifting eyebolt (15) to move the iGX system close to its final operating position.
2. Adjust the levelling feet (24) to make sure that the iGX system is level and is not supported by the castors. The lifting eyebolt must be retained for future
use with this system.
3. If required, the iGX system can be secured to the floor by fitting suitable bolts or studs (not supplied) through the M10 docking points on the chassis.
If vibration transmission to the floor is a concern, suitable vibration isolators (not supplied) should be fitted between the docking points and the bolt or stud,
if doing this the levelling feet will need to be removed.
4. If preferred, the lifting eyebolt can be removed and replaced with the lifting eyebolt hole plug supplied with the systems.
5. Ensure that access is possible to the emergency stop button (refer to Figure 4, item 1), if not use an iGX Disconnect Box (refer to Section 6.3).
Figure 6 - System arrangement to reduce effective footprint (if required)
Issue A May 07
iGX Dry Pumping System
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PAGE
6
INSTALLATION
Please refer to the appropriate Section in A546-00-860 for
important safety information when you see a warning symbol.
If you want to secure the iGX in place to prevent inadvertent movement (for example, during an earthquake), take note of the following:
• The iGX system seismic brackets (Figure 2, item 19) are designed to withstand a level 4 earthquake in a ground floor installation.
• The iGX system can be secured to the floor by fitting suitable bolts or studs (not supplied) through the 17.5 mm hole in the seismic brackets.
• If vibration transmission to the floor is a concern, suitable vibration isolators (not supplied) should be fitted between the seismic brackets and the bolt or
stud.
• Although the iGX system is supplied with four seismic brackets, two brackets are capable of protecting the system during an earthquake. The system can
therefore be secured as shown in Figure 6 for example, to reduce the effective system footprint if required.
• If all four seismic brackets are to be used, ensure that the bolt spacing is adequate for the floor strength and loads anticipated.
2.2 Lubrication
The iGX system is given a charge of oil before it leaves the factory. There is no requirement to check and adjust the oil level.
2.3 Connect the iGX system to your vacuum/exhaust system and interstage connection (if fitted)
Do not reuse any O-ring or O-ring assembly and do not allow debris to get into the iGX system during installation.
When you connect your iGX system to your vacuum system, take note of the following:
• To get the best pumping speed, ensure that the pipeline which connects the vacuum system to the iGX system is the minimum length possible and has an
internal diameter not less than the iGX system inlet-port.
• Ensure that all components in the vacuum pipeline have a maximum pressure rating which is greater than the highest pressure that can be generated in your
system.
• Incorporate flexible pipelines in the vacuum pipeline to reduce the transmission of vibration and to prevent loading of coupling-joints. We recommend that
you use BOC Edwards braided flexible pipelines. The pipelines should be suitable for 110 °C.
•Adequately support vacuum/exhaust pipelines to prevent the transmission of stress to pipeline coupling-joints.
• Incorporate a pressure gauge in the inlet pipeline, so that you determine that the iGX system operates correctly.
• You must be able to isolate the iGX system inlet from the atmosphere and from your vacuum system if you have pumped or produced corrosive chemicals.
•The outlet of the exhaust pipe can have a check-valve (optional accessory) fitted which prevents the suck-back of exhaust vapours after the iGX system is
shutdown. The check-valve also provides additional attenuation of the pulses in exhaust pressure.
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INSTALLATION
Please refer to the appropriate Section in A546-00-860 for
important safety information when you see a warning symbol.
Refer to Figure 2, items 16, 18 and 27. Use the following procedure to connect the inlet and exhaust of the iGX system to your vacuum inlet and exhaust pipeline:
1. Remove the temporary cover or blanking plate from the inlet of the iGX system. Retain the nuts, bolts, washers and blanking plate for future use. Retain the
temporary cover for future use on non-contaminated pumps only.
2. Use the O-ring supplied and suitable nuts, bolts and washers (not supplied) to connect the inlet-flange (Figure 2, item 16) of the iGX system to your vacuum
system.
3. Use the NW25 trapped O-ring and clamp supplied to connect the exhaust outlet (Figure 2, item 27) on the exhaust pipe, to your exhaust extraction system.
4. Use the NW16 trapped O-ring and clamp supplied to connect the interstage connection (Figure 2, item 18) if fitted.
2.4 Connect to your factory extraction system (optional)
Refer to Figure 2, item 27.
2.5 Connect the nitrogen supply (if provided)
Refer to Figure 2, item 21.
Note: For optimum nitrogen, ensure that your nitrogen supply complies with the Technical Data Section (A536-00-840). Refer to Table 1.
2.6 Leak-test the iGX system
Note: If you need further information on leak-testing, look it up on the Web using the URL at the start of manual, or contact your supplier or BOC Edwards for advice.
Refer to Figure 2, item 28.
CAUTION
Ensure that your nitrogen supply conforms to the requirements given in the Technical Data Section. If it doesn’t flow, the sensors may not operate correctly,
the gas pipelines may become blocked or the iGX system may be damaged.
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INSTALLATION
Please refer to the appropriate Section in A546-00-860 for
important safety information when you see a warning symbol.
2.7 Connect the electrical supply
Note: BOC Edwards recommend that the electrical supply be connected to a suitable isolator, which is easily accessible for maintenance and clearly identified.
Note: If you need further information on connecting the electrical supply, look it up on the Web using the URL at the start of manual, or contact your supplier or BOC
Edwards for advice.
Refer to Figure 2, item 2.
Use the following procedure to connect the electrical supply to the iGX system. When you make the electrical supply cable, ensure that the earth (ground)
conductor is longer than the phase conductors. This will ensure that if the cable is accidentally dragged and the strain relief bush on the electrical supply connector
mating-half fails, the earth (ground) conductor will be the last conductor to be pulled from the connector.
You must fit a secondary protective earth (ground) conductor (with a cross-sectional area at least equal to phase conductor size) to the protective earth (ground)
stud.
Remote:
1. Attach the strain relief bush to the cover. Then pass a suitable cable through the strain relief bush and cover. Refer to the technical data section or the Web
for information on cable sizes.
• Cables must be bare ended without ferrules to ensure correct clamping in the connector block.
2. Connect the cable phase wires to connections a1, a2 and b1 on the connector block.
3. Connect the earth (ground) wire of the cable to one of the two earth (ground) connections on the connector block.
4. Refit the cover to the connector block, then tighten the strain relief bush.
5. Fit the coding pins according to voltage variant as shown in Figure 7.
6. Connect the mating half to the electrical supply connector (Figure 2, item 2) of the iGX system.
7. Connect the other end of the electrical supply cable to your electrical supply through a suitable isolator.
Systemable (T variants):
Connect the end of the supplied electrical supply cable to your electrical supply through a suitable isolator with overload protection in accordance with local
regulations - refer to the Technical Data section for pump system rating.
CAUTION
This is an industrial (Class A) product as defined by EN61326. To ensure compliance with European Electromagnetic Compatibility (EMC) requirements for
EMC emissions, please note that it is not intended for use in domestic buildings, or in properties directly connected to an electrical supply network which also
supplies domestic buildings.
CAUTION
Do not connect voltages greater than specified in Table 5 to the control/interface connections. If you do, the interface control may be damaged.
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INSTALLATION
Please refer to the appropriate Section in A546-00-860 for
important safety information when you see a warning symbol.
Figure 7 - High and low Volt coding pin arrangement
High Volt pin configuration Low Volt pin configuration
1. Keyed connector
2. PE
3. Coding pin
4. a1
5. b1
6. Coding pin
7. Mounting screw
8. b2
9. a2
10. Mounting screw
11. Mounting screw
12. b1
13. a1
14. Mounting screw
15. Coding pin
16. b2
17. a2
18. Coding pin
19. PE
2.8 Connect an additional RF earth (ground) (optional)
If you will operate the iGX system in an area subject to high RF (radio frequency) emissions, in accordance with good RF installation practice, we recommend that
you:
• Use a star washer to connect the end of the earth (ground) cable (Figure 2, item 17) connected to the iGX inlet to one of the bolts that you use to secure
the inlet-flange.
• Connect an additional earth (ground) cable to the RF earth (ground) stud (Figure 2, item 26). You must use a suitable low-impedance cable (for example,
use braided cable).
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INSTALLATION
Please refer to the appropriate Section in A546-00-860 for
important safety information when you see a warning symbol.
2.9 Connect to your emergency stop circuit
Systemable (T variants):
The pump electrical supply (Figure 2, Item 2) must be connected to an emergency stop facility. The operation of the emergency stop function must immediately
disconnect power from the pump when the emergency stop control is operated. Returning the emergency stop control to its normal position must not result in
power being re-applied to the pump; a separate start or reset control must be used for this.
The EMO connector (Figure 2, item 10) must also be connected to an emergency stop facility to stop the pump immediately, in the same way as the emergency
stop function. Refer to Figure 8 and Table 5 for connection details.
Figure 8 - Connections to emergency stop circuit (systemable)
A. Customer Emergency stop facility
B. iGX system
1. Reset/Start
2. Electrical supply to the iGX system (Figure 2, item 2)
3. EMO (Figure 2, item 10)
4. Emergency stop
5. Electrical supply
Remote (optional):
Note: If you do not connect to your own control equipment, you must fit the external EMS shorting plug supplied to the EMS connector (Figure 2, item 11) on the rear of
the iGX system. If you do not, you will not be able to operate the iGX system.
If required, you can connect your own control equipment to the iGX system to shut it down in an emergency using the EMS connection (Figure 2, item 11 and
Table 5). The emergency stop control must be compliant with IEC 60947-5-1 (This should be a red self latching mushroom push button on a yellow background.).
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INSTALLATION
Please refer to the appropriate Section in A546-00-860 for
important safety information when you see a warning symbol.
2.10 Connect the cooling-water hoses
Note: For optimum water-cooling, ensure that your cooling-water supply complies with the Technical Data Section (A536-00-840) and that they are connected in parallel.
Refer to Figure 9. BOC Edwards recommend that quick connectors (provided) be used to reduce the risk of water spillage during connection/disconnection.
Connect the cooling-water supply as follows:
1. Remove the dust-caps from the cooling-water inlet and outlet.
2. Apply Loctite 577 (not supplied) to all male threads prior to installation.
3. Connect the reducing bushing (3) to the threaded end of the coupler (2).
4. Connect this sub-assembly to the water return port on the pumping system (4).
5. Connect the threaded end of the nipple (1) to the customer water return line.
6. Connect the reducing bushing (3) to the threaded end of the nipple (1).
7. Connect this sub-assembly to the water supply port on the pumping system (5).
8. Connect the threaded end of the coupler (2) to the customer water supply line.
9. Connect the customer supply and return hoses to the pump.
10. Turn on the cooling-water supply.
11. Inspect the water hoses, pipelines and connections and check that there are no leaks.
Turn off the water supply while you complete the remainder of the installation procedures.
2.11 Accessories
Refer to the individual accessories manuals for installation, information, refer to Section 6.3.
The disconnect box when fitted, is used to energize and isolate the power supply to the system. It also allows the isolation of the electrical supply during an
emergency, and for maintenance and trouble shooting the system, thereby satisfying SEMI S2 requirements. The photohelic switch/gauge when fitted, allows
monitoring for loss of extraction from the enclosure, thereby satisfying SEMI S2 requirements.
2.12 Commission the iGX system
1. Switch on the external electrical supply and check that the power OK LED (Figure 4, item 9) goes on. If the LED does not go on, Contact BOC Edwards or
refer to the BOC Edwards website.
2. Switch on the cooling-water and nitrogen supplies.
3. Ensure that the exhaust-extraction system is not blocked (for example, that valves in the exhaust-extraction system are open).
4. Ensure that all openings to atmospheric pressure in the foreline vacuum system are closed.
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INSTALLATION
Please refer to the appropriate Section in A546-00-860 for
important safety information when you see a warning symbol.
5. Press local control button (Figure 4, item 5). The green LED will illuminate. Then press the Start button (Figure 4, item 2).
6. If the iGX system starts and continues to operate, continue at Step 7. If a warning or alarm condition is indicated:
• Shut-down the iGX system: refer to Section 3.3.
• Contact BOC Edwards or refer to the BOC Edwards website.
Figure 9 - Installing 3/8" quick connect fittings (provided)
AS/0688/A
2
1
3
1
2
3
5
4
1. Nipple 3/8 inch BSPP
2. Coupler 3/8 inch BSPP
3. Reducing bushing 1/4 inch BSPP to 3/8 inch BSPT
4. Cooling-water return connection
5. Cooling-water supply connection
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INSTALLATION
Please refer to the appropriate Section in A546-00-860 for
important safety information when you see a warning symbol.
7. If your iGX system is an L or M variant, continue at step 8.
For N variants, the nitrogen purge flow should be checked as follows;
i. Open the gas module access panel by removing the securing screw. Refer to Figure 10 for the iGX100, (same location for iGX600).
ii. Confirm the flow is 14 slm (factory default setting). The centre of the ball should be aligned to the 14 slm marking on the flow tube (refer to Figure 11).
If not, then proceed at step (iii);
iii. Close (clockwise) the 4/5 variable restrictor (marked 4/5) and confirm the flow rate is 4 slm. If not, then adjust the shaft seals variable restrictor
(marked SS) until the flow tube indicates a flow rate of 4 slm (refer to Figure 12).
iv. Open (anti-clockwise) the 4/5 variable restrictor until the flow tube indicates a total flow of 14 slm (refer to Figure 11).
v. Replace the gas module access panel.
Figure 10 - Gas module access panel
Figure 11 - Flow tube (14 slm) Figure 12 - Flow tube (4 slm)
1. Securing screw
2. Access panel
If a different nitrogen flow rate is required please contact BOC Edwards for further advice.
8. After you have commissioned the iGX system:
• If you want to continue to operate the iGX system, refer to Section 3.1, step 4.
• Otherwise, shut-down the system: refer to Section 3.3.
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INSTALLATION
Please refer to the appropriate Section in A546-00-860 for
important safety information when you see a warning symbol.
2.13 Install additional safety equipment
If the sensors or microprocessors fail, the total flow rate of nitrogen displayed or output by the iGX system may be incorrect. If you need to know the total flow
rate of nitrogen to the dry pump for safety reasons, you should therefore fit suitable measurement equipment in the nitrogen supply pipeline. If you fit a rotameter,
ensure that it is suitable for use with nitrogen and that it is correctly calibrated.
If the nitrogen supply to the iGX system fails, a warning message will be shown on the Pump Display Terminal (if fitted) and will be sent to the Interface Module(s)
connected to the iGX system. Ensure that your installation is configured so that it remains safe if there is a failure of the nitrogen supply to the iGX system.
If an alarm condition is detected (and the iGX system is not configured to ’run til crash’ refer to Section 3.4) the iGX system will shutdown automatically. You
must ensure that your installation remains safe if the iGX system shuts down automatically.
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OPERATION
Please refer to the appropriate Section in A546-00-860 for
important safety information when you see a warning symbol.
3OPERATION
3.1 Start-up
Refer to Section 1.1.
1. Switch on the cooling-water supply.
2. Switch on the electrical supply.
3. Check that the exhaust-extraction system is not restricted, and that any valves in the exhaust-extraction system are open.
The pump can be started using either the MicroTIM, the PDT or the front panel local control membrane.
Front panel local control membrane operation:
4. To operate the system using the front panel local control membrane (refer to Figure 4);
• Press and hold the 'Local Control' button (Figure 4, item 5). The Green LED will illuminate when control is taken. The message 'Keys in Control' will be
displayed on the PDT if connected.
• Press and hold the Start button (Figure 4, item 2) until pumps starts and the Running LED (Figure 4, item 8) is illuminated.
MicroTIM operation:
5. Use your control equipment to set the pump start/stop signal to the interface connector and check that the Running LED is illuminated.
• Control must be taken with the MicroTIM. The message 'MicroTIM IN CONTROL' will be displayed on the PDT if connected.
CAUTION
The system is designed to ride through short term power interruption and to automatically restart once the power is restored.
CAUTION
Do not operate the pump if the pipeline is restricted or blocked as the pump will not operate correctly and may be damaged.
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OPERATION
Please refer to the appropriate Section in A546-00-860 for
important safety information when you see a warning symbol.
PDT operation:
6. If the system is to be operated using the PDT;
• Connect the PDT to the required PDT connection, front (Figure 4, item 10) rear (Figure 2, item 9)
• Control must be taken with the PDT - press 'Control' button. The message 'PDT1 IN CONTROL' will be displayed if the front connection is used and the
message 'PDT2 IN CONTROL' will be displayed if the rear connection is used.
•Press Start button.
• Press ENTER.
• The system will start and the Running LEDs will be illuminated.
3.2 Status indicators
Refer to Figures 3 and 4.
3.3 Manual shut-down
The pump can be shutdown using either the MicroTIM, the PDT or the front panel local control membrane. Note that only the item in control can stop the pump
(refer to Section 1.3).
Front panel local control membrane operation:
Press and hold the stop button (Figure 4, item 3) until the running LED (Figure 4, item 8) flashes. The running LED will then turn off when the pump has shutdown.
MicroTIM operation:
Use your control equipment to reset the pump start/stop signal to the interface connector. The Running LED (Figure 4, item 8) will then go off, and the pump
running status output signal will open.
PDT operation:
Selecting either ’normal’ or ’fast’ shutdown will shut the pump down immediately.
If the pump is not going to be required for some time, switch off the electrical supply and the cooling-water supply.
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OPERATION
Please refer to the appropriate Section in A546-00-860 for
important safety information when you see a warning symbol.
3.4 Automatic shut-down
Normally, if an alarm condition exists, the iGX control system will shutdown the iGX system. If required you can request 'run 'til crash' operation. In this mode
of operation, most alarm conditions will be ignored and the pump(s) will continue to operate. For safety reasons the following alarms will shut-down the iGX
system even if you have selected 'run til crash':
Note: 'Run 'til crash' is automatically reset to 'off ' when the electrical supply is removed.
•POWERLOSS
• EMS
• DP ACTUAL SPEED
• DP THERMISTOR HIGH
• EXHAUST PRESSURE *
•DP STATUS
• MB ACTUAL SPEED
•MB STATUS
• MB THERMISTOR HIGH
Note: * M variants only
+ N and M variants only.
CAUTION
If you select ’Run 'til crash’, the pump(s) can be damaged and you may invalidate any warranties on the iGX system equipment.
Safety sensor Shut-down condition
Dry pump motor thermal snap switch (PTO) Power is shut-off to the motor if the motor winding temperature exceeds 150 °C.
Inverter thermistor Power is shut-off to the motor if the temperature exceeds 110 °C.
Dry pump body temperature sensor+Power is shut-off to the motor if the pump body temperature exceeds 160 °C
(Warning at 150 °C).
Water circuit temperature sensor Power is shut-off to the motor if the temperature exceeds 70 °C (Warning at 60 °C).
Table 1 - Safety sensors
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OPERATION
Please refer to the appropriate Section in A546-00-860 for
important safety information when you see a warning symbol.
3.5 Unplanned shutdown and alarms
The iGX system is fitted with a number of pump protection sensors (refer to Table 1) that will give warnings and alarms. The decision on whether or not to
shutdown the pump is left with the tool.
If the iGX system has an unplanned shutdown, ensure that the cause of the shutdown is identified and rectified before restarting. If you are in any doubt, please
call a BOC Edwards Service Engineer.
3.6 Emergency stop
Note: The emergency stop switch is not an electrical isolator.
To shut down the iGX system in an emergency, press the emergency stop switch (Figure 4, item 1). Alternatively, you can operate the emergency stop controls
in your own control system if you have connected your emergency stop circuit to the iGX system as described in Section 2.9.
When emergency stop is selected:
•The pump (and the booster pump) is switched off.
• The solenoid-valve(s) in the Gas Module close, to switch off the supply of nitrogen to the pump.
• The solenoid-valve(s) in the temperature control manifold(s) de-energise with loss of temperature control.
• The Pump Display Terminal will display 'STOP ACTIVATED'. (If connected)
• The Running LED will go off.
• The Alarm LED illuminates.
3.7 Restart the pump after an emergency stop or automatic shut-down
Note: If the iGX system has automatically shut down because of high pump power, check that the pump is free to rotate before you restart the iGX system: Contact BOC
Edwards or refer to the BOC Edwards website.
If you have used the emergency stop switch on the front panel to shut down the iGX system, you must reset the emergency stop switch before you can restart
the iGX system. Turn the emergency stop switch to reset it, then restart the iGX system as described in Section 3.1.
If the iGX system has been automatically shut down because of an alarm condition, the alarm condition must be rectified before you can restart the iGX system.
Restart the iGX system as described in Section 3.1.
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OPERATION
Please refer to the appropriate Section in A546-00-860 for
important safety information when you see a warning symbol.
3.8 Single equipment monitor (SEM)
If there is an SEM connected to your iGX system, you are able to download configuration sets, which contain preset configuration values, for example setpoints.
Contact BOC Edwards or go to the BOC Edwards website for more details.
CAUTION
Ensure that you use the correct configuration setpoints for your application. If you do not, the iGX system may be damaged during operation.
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MAINTENANCE
Please refer to the appropriate Section in A546-00-860 for
important safety information when you see a warning symbol.
4 MAINTENANCE
4.1 Safety and maintenance frequency
The iGX system requires little user maintenance. Safety sensors fitted to the iGX system do not require routine maintenance. The maintenance operations you
can carry out are described in the following sections, any other maintenance must be carried out by BOC Edwards service centres (refer to Section 6). The
frequency of maintenance operations depends on your process. Adjust the frequency of maintenance operations according to your experience.
When you maintain the iGX system, use BOC Edwards maintenance and service kits. These contain all of the necessary seals and other components necessary
to complete maintenance operations successfully. Ensure that your nitrogen and cooling-water supplies comply with the Technical Data Section (A536-00-840)
and that they are connected in parallel. Contact BOC Edwards or refer to the BOC Edwards website.
4.2 Relocate the system for maintenance
If you want to remove the iGX system from its operating location and move it to another location where you will do maintenance, use the following procedure:
1. Purge the iGX system and shut down the iGX system as described in Section 3 and allow the iGX system to cool down.
2. Isolate the power by disconnecting the mating-half from the electrical supply connector, then isolate the water and the gas purge supply.
3. Switch off your nitrogen and cooling water supplies. Disconnect the nitrogen supply, taking care as any trapped gas under pressure is released. Disconnect
the cooling-water supply followed by the cooling-water return.
4. Disconnect the inlet and outlet from the vacuum and exhaust systems and fit blanking caps.
5. If necessary, disconnect the iGX air-extraction port from your factory extraction system.
6. If necessary disconnect any accessories from the iGX system.
7. Adjust the levelling feet so that the iGX system rests on the castors.
8. Move the iGX system to the location where you will do maintenance.
After maintenance is complete, re-install the iGX system as described in Section 2.
CAUTION
Drain the cooling-water from the iGX system as stated in Section 4.3, if you will transport or store it in conditions where the cooling-water could freeze. If you
do not, cooling-water may freeze in the iGX system and damage the pump(s) and/or the cooling-water pipelines.
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MAINTENANCE
Please refer to the appropriate Section in A546-00-860 for
important safety information when you see a warning symbol.
4.3 Draining the cooling water
1. Relocate the system for maintenance as stated in Section 4.2.
2. Connect a regulated clean dry air supply (20 psig) to the cooling water supply connection (Figure 2, item 22). Do not turn on the air supply yet.
3. Connect a drain hose to the cooling water return connection (Figure 2, item 25). Position the open end of the drain hose in a suitable collection container.
4. Turn on the clean dry air supply.
5. Monitor the drain hose outlet until no further cooling water is purged. If the system is a load-lock (L) the procedure is complete. If the system is an N or M
variant continue at step 6.
6. Connect the iGX system to a suitable mains electrical supply. The iGX control system will now energise each temperature control valve in sequence for a
period of ten seconds, purging the cooling water from all flow paths. After a period of one minute from connection of the electrical supply, ensure no further
cooling water is being purged. If there is, repeat the entire procedure.
7. The cooling water drain procedure is now complete. Disconnect the air supply, electrical supply and the drain hoses. Dispose of the drained cooling water
accordingly.
4.4 Cleaning the pump
Inspect the pump monthly and, if necessary, wipe the outside clean with a soft lint free cloth and a proprietary cleaning material based on demineralised water or
isopropanol.
CAUTION
Do not use cleaning materials based on strong alkalis, aggressive or chlorinated solvents. Do not use cleaning materials containing abrasives.
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TRANSPORTATION, STORAGE AND DISPOSAL
Please refer to the appropriate Section in A546-00-860 for
important safety information when you see a warning symbol.
5 TRANSPORTATION, STORAGE AND DISPOSAL
5.1 Transportation
Follow the procedure laid out in Section 5.2 and then read form HS1 and fill out form HS2, which can be found at the back of A536-00-860.
5.2 Storage
Store the iGX system as follows:
1. Follow the procedure set out in Section 4.2.
2. Store the iGX system in clean dry conditions until required.
3. When required for use, prepare and install the iGX system as described in Section 2 of this manual.
5.3 Disposal
BOC Edwards products are supported by a world-wide network of BOC Edwards Service Centres. Each Service Centre offers a wide range of options including
disposal. Refer to Section 6.2 for more information.
Pump system materials suitable for recycling include cast iron, steel, SG iron, PTFE, stainless steel, brass, aluminium, zinc alloy, nickel, mild steel, ABS.
Take particular care with the following:
• Fluoroelastomers which may have decomposed as the result of being subjected to high temperatures
• Components which have been contaminated with dangerous process substances
• Lithium battery.
CAUTION
Drain the cooling-water from the iGX system, if you will transport or store it in conditions where the cooling-water could freeze. If you do not, the cooling-
water may freeze in the iGX system and damage the pump(s) and/or the cooling-water pipelines.
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SERVICE, SPARES AND ACCESSORIES
Please refer to the appropriate Section in A546-00-860 for
important safety information when you see a warning symbol.
6 SERVICE, SPARES AND ACCESSORIES
6.1 Introduction
Note: Whenever you return the iGX system to a BOC Edwards Service Centre or other BOC Edwards company, you must comply with the requirements of Section 6 and
with the requirements of the Return of BOC Edwards Equipment Procedure (refer to forms HS1 and HS2 at the end of Important Safety Information A536-00-860).
Note: You must not drain the oil from the iGX pump. You must clearly state the pump is full of oil when you complete form HS2.
BOC Edwards products, spares and accessories are available from BOC Edwards companies in Belgium, Brazil, Canada, China, France, Germany, Israel, Italy, Japan,
Korea, Singapore, Switzerland, United Kingdom, U.S.A and a world-wide network of distributors. The majority of these centres employ Service Engineers who
have undergone comprehensive BOC Edwards training courses.
Order spare parts and accessories from your nearest BOC Edwards company or distributor. When you order, please state for each part required:
• Model and Item Number of your equipment
• Serial number (if any)
• Item Number and description of the part.
6.2 Service
BOC Edwards products are supported by a world-wide network of BOC Edwards Service Centres. Each Service Centre offers a wide range of options including:
equipment decontamination; service exchange; repair; rebuild and testing to factory specifications.
Equipment that has been serviced, repaired or rebuilt is returned with a full warranty. Your local Service Centre can also provide BOC Edwards engineers to
support on-site maintenance, service or repair of your equipment.
For more information about service options, contact your nearest Service Centre or other BOC Edwards company.
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SERVICE, SPARES AND ACCESSORIES
Please refer to the appropriate Section in A546-00-860 for
important safety information when you see a warning symbol.
6.3 Ordering accessories
Accessory Item number
iGX photohelic switch/gauge kit A507-27-000
iGX disconnect box 200/230 V, 50/60 Hz a.c. A507-28-000
EMS module*
SPI D373-70-310
MCM D373-70-320
LAM Alliance D373-70-350
C3 D373-70-360
MicroTim
SPI D373-60-310
MCM D373-60-320
TEL D373-60-330
E73 D373-60-340
LAM Alliance D373-60-350
C3 D373-60-360
Hitachi D373-60-370
Gate valve connection lead* A532-08-403
Pump Display Terminal 5-way XLR plug(PDT) D372-80-700
Extension cables
5 way XLR, 3 m D373-70-591
5 way XLR, 5 m D373-70-592
5 way XLR, 10 m D373-70-595
5 way XLR, 15 m D373-70-596
5 way XLR, 25 m D373-70-597
Table 2 - Accessories
*Not on T variant
†ASM required
May 07 Issue A
25
iGX Dry Pumping System
PAGE
25
SERVICE, SPARES AND ACCESSORIES
Please refer to the appropriate Section in A546-00-860 for
important safety information when you see a warning symbol.
Stainless steel water quick disconnects
1/4" BSPP straight Snap-tite A507-17-000
1/4" BSPP straight Parker A507-18-000
1/4" BSPP 90° Snap-tite A507-19-000
1/4" BSPP 90° Parker A507-20-000
3/8" BSPP straight Snap-tite A507-21-000
3/8" BSPP straight Parker A507-22-000
3/8" BSPP 90° Snap-tite A507-23-000
3/8" BSPP 90° Parker A507-24-000
Brass water quick disconnects
3/8" BSPP 90° Snap-tite A507-48-000
Flow control valve
1 lpm (100 only) A507-38-000
2 lpm (3/100, 6/100 and 10/100 only) A507-39-000
PDT holster D372-09-800
PDT Adaptor, 5-way XLR plug/RJ12 socket D373-70-526
Exhaust enclosure kits
iGX check valve loadlock (L) A507-43-000
iGX check valve process (N and M) A507-44-000
iGX check valve with enclosure loadlock (L) A507-45-000
iGX check valve with enclosure process (N and M) A507-46-000
Accessory Support Module (ASM) D373-70-761
iGX Water flow switch kit (Pump)†A507-16-000
iGX Water flow switch kit (Combination)†A507-25-000
iGX Water flow monitor kit†A507-26-000
Accessory Item number
Table 2 - Accessories (continued)
*Not on T variant
†ASM required
Issue A May 07
26
iGX Dry Pumping System
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PAGE
26
A546-00-840 Issue A Original
http://www.bocedwards.com
Technical data
iGX Dry Pumping Systems
Description Item Number
iGX100L 200 V-230 V 50/60 Hz A546-10-958
iGX100L 380 V-460 V 50/60 Hz A546-10-959
iGX100L 200 V-230 V 50/60 Hz SS A548-10-958
iGX100L 380 V-460 V 50/60 Hz SS A548-10-959
iGX600L 200 V-230 V 50/60 Hz A546-30-958
iGX600L 380 V-460 V 50/60 Hz A546-30-959
iGX600L 200 V-230 V 50/60 Hz SS A548-30-958
iGX600L 380 V-460 V 50/60 Hz SS A548-30-959
iGX100N 200 V-230 V 50/60 Hz A546-11-958
iGX100N 380 V-460 V 50/60 Hz A546-11-959
iGX100N 200 V-230 V 50/60 Hz SS A548-11-958
iGX600N 200 V-230 V 50/60 Hz A546-31-958
iGX600N 380 V-460 V 50/60 Hz A546-31-959
iGX1000N 200 V-230 V 50 Hz A546-81-958
iGX1000N 380 V-460 V 50 Hz A546-81-959
iGX1000N 200 V-230 V 50/60 Hz SS A548-81-958
iGX100M 200 V- 230 V 50/60 Hz A546-12-958
iGX100M 380 V-460 V 50/60 Hz A546-12-959
iGX100M 200 V-230 V 50/60 Hz SS A548-12-958
iGX100 MTi 200 V-230 V 50/60 Hz A546-48-958
iGX100 MTi 380 V-460 V 50/60 Hz A546-48-959
iGX100MTi 200 V-230 V 50/60 Hz SS A548-48-958
iGX600M 200 V-230 V 50/60 Hz A546-32-958
iGX600M 380 V-460 V 50/60 Hz A546-32-959
iGX600M 200 V-230 V 50/60 Hz SS A548-32-958
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May 07 Issue A
1
Technical Data
PAGE
1
iGX DRY PUMPING SYSTEM
1iGX DRY PUMPING SYSTEM
1.1 Technical data
*Refer to Web for installation drawings.
†Check valve accessory fitted.
Type Characteristics 100 300 600 1000 Units
General Dimensions (L x W x H)* 695 x 280 x 395 695 x 280 x 695 695 x 280 x 695 695 x 280 x 695 mm
Mass (excluding packaging) 120 200 220 230 kg
Noise level (at ultimate)†< 60 < 55 < 55 < 55 dB(A)
Vibration level at inlet < 1.5 < 1.5 < 1.5 < 1.5 mm s-1
Vibration to the floor (when docked) < 0.05 < 0.05 < 0.05 < 0.05 mm s-1
Initial force to push the pump 0.06 0.09 0.10 0.11 kN
Sustained force to push the pump 0.04 0.06 0.07 0.07 kN
Warm up time to nominal pumping performance 15 15 15 15 minutes
Minimum warm up time to process gas pumping 2 2 2 2 hours
Performance Typical to peak pumping speed (no gas purge/cold pump) 100 300 600 800 m3h-1
Ultimate (shaft seal purge only) 0.005 0.0007 0.0007 0.0007 mbar
Water-cooling
system
Minimum flow rate required 1 2 2 2 l min-1
Typical heat removed from the system 1 1.6 1.6 1.7 kW
Connections Pump inlet flange (bolted) ISO63 ISO63 ISO100 ISO100
Exhaust gas outlet NW25 NW25 NW25 NW25
Extraction port 50 50 50 50 mm dia
Table 1 - Technical data
Issue A May 07
Technical Data
2
PAGE
2
IGX DRY PUMPING SYSTEM
Supply voltage and frequency 200/230 50/60 Hz 380/460 50/60Hz
100 300 600 1000 100 300 600 1000
Full load (A) 12 22 22 22 8 14 14 14
Booster motor rating (kW) 1.9 1.9 1.9 1.9 1.9 1.9
Pump motor rating (kW) 1.9 1.9 1.9 1.9 1.9 1.9 1.9 1.9
Table 3 - Electrical data
1.2 Electrical data
Type Characteristics L N M Units
Gas system Nitrogen supply pressure range 2.5 to 6.9 2.5 to 6.9 bar gauge
Stability of supply ± 1.4 ± 1.4 bar gauge
Nitrogen supply quality <0.01 <0.01 μm
Nitrogen flow rate 14 44 slm
Gas module pressure 2 2 bar gauge
Pressure transducer accuracy ± 0.04 @ 0.41 bar gauge
Mass flow transducer accuracy ± 4.3 slm
Interstage (I) Peak pumping speed, interstage 25 25 m3h-1
Ultimate, interstage 0.1 0.5 mbar
Pump interstage flange NW16 NW16
Table 2 - Technical data
May 07 Issue A
3
Technical Data
PAGE
3
iGX DRY PUMPING SYSTEM
Figure 1 - Centre of gravity and levelling foot loads
100 300 600 1000
A510 510 510 510
B246 266 243 243
Centre of gravity C 103 107 108 108
D216 216 216 216
E167 287 311 310
Levelling foot loads
126 45 56 56
235 58 55 55
328 43 61 61
431 54 48 48
Table 4 - Centre of gravity and levelling foot loads (Refer to Figure 1)
1.3 Loading
Issue A May 07
Technical Data
4
PAGE
4
IGX DRY PUMPING SYSTEM
1.4 Connections
* Not on T variant.
Description Mating connector description/
external supply rating
Internal supply rating
PDT1 XLR type 5-way plug 24 V d.c. 0.75 A
Mains connection Weidmuller HDC 16D free socket, PG21, 6 mm2
stranded wire, 13-18 mm cable OD
Ethernet connection Standard RJ45 type or Neutrik Ethercon RJ45 IEE802.3 10BaseT Ethernet
LON module connection XLR type 4-way plug 24 V d.c. 0.75 A
PDT2 XLR type 5-way plug 24 V d.c. 0.75 A
Gate valve interface* CPC 9-way plug, standard gender, socket contacts 24 V d.c. (48 V peak), 100 mA
EMO (on T variant only)
6 - common and 7 - normally closed
CPC 7-way plug, standard gender, socket contacts
30 V d.c. 0.5 A
EMS* XLR type 6-way plug
External emergency stop switch
1 - supply, 2 - return
24 V d.c. 100 mA
Internal emergency stop switch
3 - common, 4 - normally open
30 V a.c. 1 A
60 V d.c. 0.55 A
Comms supply
5 - supply, 6 - return
24 V d.c. 0.5 A
Accessory module interface* Preh locking DIN 8-way plug 24 V d.c. 1.3 A
GRC interface* DIN type 6-way plug
1 - Normally open and 3 - common 30 V a.c. 1 A
2 - Normally open and 4 - normally closed 30 V d.c. 1 A
5 - Normally open and 6 - common 60 V d.c. 0.5 A
Table 5 - iGX connector types
May 07 Issue A
5
Technical Data
PAGE
5
iGX DRY PUMPING SYSTEM
1.5 General data
Item Description Rating Units
Electrical Supply voltage 3-phase 200/230 V, 50/60 Hz a.c. 380/460 V, 50/60 Hz a.c. V
Recommended fuse/isolator rating Full load current rating, refer to Table 3.
Class CC fuse rated to 600 V.
Voltage tolerance range + 10% V
Installation category II (IEC 664)
Earth leakage ≤ 6 mA
Harmonic voltage distortion factor 5%
Water-cooling system Maximum supply pressure 100 psig
Minimum supply pressure 36 psig
Minimum flow rate required Refer to Table 1 l min-1
Cooling-water supply temperature range 10 - 30 °C
Maximum particle size 0.03 mm2
Acidity 6.5 to 8.0 pH
Hardness < 100 ppm
Resistivity > 1 k cm
Solids (turbidity) < 100 ppm
Materials in contact with cooling-water Stainless steel, PTFE, copper, brass and
fluoroelastomer.
Connections Cooling-water ¼” BSPT male
Nitrogen ¼” tube fitting
Materials in contact with process gas Pump, shafts and rotors Cast SG iron, steel, aluminium
Seals PTFE and fluoroelastomer
Table 6 - Technical data
Issue A May 07
Technical Data
6
PAGE
6
IGX DRY PUMPING SYSTEM
Operating conditions Intended Use: Indoor use
Ambient temperature range:
Operating +5 to +40 °C
Storage -45 to +55 °C
Relative humidity 10 to 90 %
Maximum operating altitude 2000 m
Pollution degree 2 (IEC 61010)
Item Description Rating Units
Table 6 - Technical data (continued)

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