Polvac 699904310G TS600tipseal
User Manual: Polvac TS600tipseal
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TriScrollTM 600 Series Dry Scroll Vacuum Pump Manual No. 699904310 Revision G December 2004 TIP SEAL REPLACEMENT MANUAL DRAFT 2/10/05 vacuum technologies DRAFT 2/10/05 TriScroll™ 600 Series Dry Scroll Vacuum Pump TriScroll is a trademark of Vacuum Technologies. Loctite and PST are registered trademarks of Loctite Corporation. Krytox, Teflon and Viton are registered trademarks of E. I. du Pont de Nemours and Company. Copyright 2004 Vacuum Technologies TriScroll 600 Dry Scroll Vacuum Pump Table of Contents Preface . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . vi Safety Considerations . . . . . . . . . . . . . . . . . . . . . vi Related TriScroll Manuals . . . . . . . . . . . . . . . . . viii Maintenance and Tool Kits . . . . . . . . . . . . . . . . viii Factory Service Options . . . . . . . . . . . . . . . . . . . ix Contacting Vacuum Technologies . . . . . . . . . . . . ix DRAFT 2/10/05 Tip Seal Replacement . . . . . . . . . . . . . . . . . . . . . . . 1 General Information . . . . . . . . . . . . . . . . . . . . . . 1 Required Equipment . . . . . . . . . . . . . . . . . . . . 1 TriScroll 600 Disassembly . . . . . . . . . . . . . . . . . . 4 Remove the Intake Fitting . . . . . . . . . . . . . . . . 4 Remove the Outboard Housing . . . . . . . . . . . . 5 Remove the Inboard Housing and Orbiting Plate Assembly . . . . . . . . . . . . . . . . . . . . . . . . 7 Disassemble the Inboard Housing and the Orbiting Plate Assembly . . . . . . . . . . . . . . . . . . . . . . . . 8 Scroll Cleaning . . . . . . . . . . . . . . . . . . . . . . . 10 TriScroll 600 Reassembly . . . . . . . . . . . . . . . . . . . 11 Put the Pump Back into Service . . . . . . . . . . . . 19 iii DRAFT 2/10/05 TriScroll 600 Dry Scroll Vacuum Pump This page intentionally left blank. Declaration of ConformityDeclaration of Declaration of Conformity Konformitätserklärung Déclaration de Conformité Declaración de Conformidad Verklaring de Overeenstemming Dichiarazione di Conformità We Wir Nous Nosotros Wij Noi Varian, Inc. Vacuum Technologies 121 Hartwell Avenue Lexington, MA, 02421-3133 USA declare under our sole responsibility that the product, erklären, in alleniniger Verantwortung, daß dieses Produkt, déclarons sous notre seule responsabilité que le produit, declaramos, bajo nuestra sola responsabilidad, que el producto, verklaren onder onze verantwoordelijkheid, dat het product, dichiariamo sotto nostra unica responsabilità, che il prodotto, TriScroll Series Vacuum Pump to which this declaration relates is in conformity with the following standard(s) or other normative documents. auf das sich diese Erklärung bezieht, mit der/den flogenden Norm(en) oder Richtlinie(n) übereinstimmt. auquel se réfère cette déclaration est conforme à la (auz) norme(s) ou au(x) document(s) normatif(s). al que se refiere esta declaración es conforme a la(s) norma(s) u otro(s) documento(s) normativo(s). waamaar deze verklaring verwijst, aan de volende norm(en) of richtlijn(en) beantwoodt. a cui se rifersce questa dichiarazione è conforme alla/e sequente/I norma/o documento/I normativo/i. 98/37/EEC, Machinery Directive EN 1012-2:1996 Compressors and Vacuum Pumps Safety Requirements; Part 2 Vacuum Pumps EN 1050:1996 Safety of machinery - principles for risk assessment EN 60204-1 Electrical equipment of industrial machines; general requirements 73/023/EEC, Low Voltage Directive EN 60034 part 1 Rotating electrical machines - Part 1: Rating and performance 89/336/EEC, Electromagnetic Compatibility Directive EN 61000-4-2 Testing and Measurement Techniques - Electrostatic Discharge Immunity Test Frederick C. Campbell Operations Manager Vacuum Technologies Varian, Inc. Lexington, Massachusetts, USA March 2003 TriScroll 600 Dry Scroll Vacuum Pump Preface This manual provides the information you need to successfully perform tip seal replacement on your Vacuum Technologies TriScrollTM Dry Vacuum Pump. Tip seal replacement is generally is recommended when the pump base pressure has risen to an unacceptably high level for your application. If you have questions that are not addressed in this manual, please contact the nearest Vacuum Technologies service facility listed on the rear cover of this manual. Safety Considerations READ THE FOLLOWING INSTRUCTIONS. TAKE ALL NECESSARY PRECAUTIONS. The following format is used in this manual to call attention to hazards: DRAFT 2/10/05 WARNING The warning messages are for attracting the attention of the operator to a particular procedure or practice which, if not followed correctly, could lead to serious injury. CAUTION NOTE The caution messages are displayed before procedures, which if not followed, could cause damage to the equipment. The notes contain important information taken from the text. Maintenance personnel must be aware of all hazards associated with this equipment. They must know how to recognize hazardous and potentially hazardous conditions, and know how to avoid them. The consequences of work performed by unskilled or improperly trained maintenance personnel, or careless operation of the equipment employed in the specified maintenance procedures can be serious. Every maintenance person must read and thoroughly understand the materials discussed and the instructions provided in this manual, as well as any additional information provided by Vacuum Technologies. vi TriScroll 600 Dry Scroll Vacuum Pump All warnings and cautions must be read carefully, fully understood, and strictly observed. Consult local, state/province, and national agencies regarding specific requirements and regulations. Address any safety, operation, and/or maintenance questions to the nearest Vacuum Technologies location. WARNING Disconnect power from the TriScroll 600 before performing any maintenance procedure. Allow the pump to cool before performing any maintenance procedure. Approximate cool-down time is one to two hours. Wipe all O-rings clean with a lint-free cloth before installation to ensure that no foreign matter is present to impair the seal. DRAFT 2/10/05 CAUTION Do not use alcohol, methanol or other solvents on O-rings. To do so causes deterioration and reduces their ability to hold a vacuum. If applicable, apply a small amount of Krytox® GPL 224 grease and wipe the O-rings “shiny” dry. NOTE Vacuum Technologies recommends replacing all O-rings during routine maintenance or during any maintenance procedure requiring that O-rings be removed. WARNING The TriScroll 600 weighs 32 kg (70 lbs). To avoid injury, use proper lifting techniques when moving the pump. vii TriScroll 600 Dry Scroll Vacuum Pump Related TriScroll Manuals Manuals related to the installation and operation, pump module replacement, and major maintenance for the TriScroll 600 series pumps are listed in the following table: Title Applicable TriScroll Model Part Number Major Maintenance Manual All TriScroll 600 Series Models 699904300 Pump Module Replacement All TriScroll 600 Series Models 699904305 Installation and Operation Manual All TriScroll 600 Series Models 699904290 Maintenance and Tool Kits DRAFT 2/10/05 Material and tooling required to perform maintenance on TriScroll pumps is provided in kit form. A description of each kit and ordering information is provided in the following table: Description Contents Applicable TriScroll Model Part Number Major Maintenance Tool Kit All bearings, bearing seals, bearing lubricant, O-rings, and tip seals required to rebuild TriScroll 600 Series pumps. All TriScroll 600 Series models PTSS0600MK Maintenance Tool Kit All fixtures and tools required to perform any maintenance on TriScroll 600 Series pumps. All TriScroll 600 Series models PTSS0600TK Tip Seal Tool Kit All tools required to change the tip seals on any TriScroll Series pump. All TriScroll Series pumps PTSTSTKIT Replacement Tip Seal Set Replacement tip seals and static O-rings for TriScroll 600 Series pumps. All TriScroll 600 Series models PTSS0600TS viii TriScroll 600 Dry Scroll Vacuum Pump Factory Service Options Vacuum Technologies offers factory-rebuild service or advance exchange of complete TriScroll Pumps or TriScroll Pump Modules. Contact your nearest Vacuum Technologies sales office for price and availability information. Select your preferred service option from the table below. Part Number Advance Exchange TriScroll 600 Single Phase EXPPTS06001 Advance Exchange TriScroll 600 Three Phase EXPPTS06003 Advance Exchange TriScroll 610 Single Phase EXPPTS06101 Advance Exchange TriScroll 610 Three Phase EXPPTS06103 Advance Exchange TriScroll 600 Pump Module Only EXPTS0600SC Advance Exchange TriScroll 610 Pump Module Only EXPTS0610SC Service/Rebuild TriScroll 600 Pump (Single or Three Phase) PTS0600KMA Service/Rebuild TriScroll 610 Pump (Single or Three Phase) PTS0610KMA Service/Rebuild TriScroll 600 Pump Module Only PTS0600SCRP Service/Rebuild TriScroll 610 Pump Module Only PTS0610SCRP DRAFT 2/10/05 Factory Service Options Contacting Vacuum Technologies In the United States, you can contact Vacuum Technologies Customer Service at 1-800-8VARIAN. See the back cover of this manual for a listing of our sales and service offices. Internet users: Send email to Customer Service & Technical Support at vpl.customer.support@varianinc.com Visit our web site at www.varianinc.com/vacuum ❑ Order on line at www.evarian.com ❑ ❑ ix DRAFT 2/10/05 TriScroll 600 Dry Scroll Vacuum Pump This page intentionally left blank. TriScroll 600 Dry Scroll Vacuum Pump Tip Seal Replacement General Information Vacuum Technologies TriScroll 600 series pumps will provide years of trouble-free service if maintenance procedures and intervals are observed. Bearing grease replenishment and tip seal replacement is recommended when the pump base pressure rises to an unacceptably high level for your application. Replace bearings, rotary seals and O-rings if the pump bearings exhibit humming or grinding noises. Main bearing life may be shortened if your application requires the pumping of high quantities of water vapor. Use bearing purge to keep this water from impacting bearing life. Required Equipment Tip Seal Replacement Kit: PTSS0600TS (“Tip Seal Replacement Kit” on page 2) Tip Seal Tool Kit: PTSTSTKIT (“Tip Seal Tool Kit” on page 3; customer can supply metric Allen wrench set and chisel). ❑ Vacuum Measuring Gauge: Capable of measuring pressures of 5 to 20 mTorr with an accuracy of ± 1 mTorr. A capacitance manometer or Pirani gauge is recommended. ❑ DRAFT 2/10/05 ❑ 1 TriScroll 600 Dry Scroll Vacuum Pump Tip Seal Replacement Kit 2-273 DRAFT 2/10/05 2-127 Tip Seal 2 Krytox GPL 224 Grease TriScroll 600 Dry Scroll Vacuum Pump Tip Seal Tool Kit Chisel DRAFT 2/10/05 Metric Hex Key Set 3 TriScroll 600 Dry Scroll Vacuum Pump TriScroll 600 Disassembly Remove the Intake Fitting 1. Remove the two M5x16 screws from the intake assembly. DRAFT 2/10/05 2. Remove the intake assembly from the top of the pump. 3. Remove and discard the O-ring from the groove on the underside of the intake fitting. 4 TriScroll 600 Dry Scroll Vacuum Pump TriScroll 600 Disassembly (Continued) Remove the Outboard Housing 1. Remove the three M5x16 screws that attach the cowling to the module. DRAFT 2/10/05 2. Remove the cowling. 3. Remove the six M6x55 screws that attach the outboard housing to inboard housing. 4. Remove the outboard housing. 5 TriScroll 600 Dry Scroll Vacuum Pump TriScroll 600 Disassembly (Continued) DRAFT 2/10/05 5. Remove and discard the O-ring. 6. Remove and discard the tip seals from the outboard housing. 6 TriScroll 600 Dry Scroll Vacuum Pump TriScroll 600 Disassembly (Continued) Remove the Inboard Housing and Orbiting Plate Assembly DRAFT 2/10/05 1. Remove the four M5x15 screws that attach the inboard housing to the frame. 2. Remove the inboard housing from the frame. Locate the rubber spider that mounts between the motor shaft coupling and the inboard housing assembly. CAUTION The inboard housing assembly weighs 22 lbs. 7 TriScroll 600 Dry Scroll Vacuum Pump TriScroll 600 Disassembly (Continued) Disassemble the Inboard Housing and the Orbiting Plate Assembly 1. Remove the M8x12 screw and washer that attaches the counterweight to the inboard housing. DRAFT 2/10/05 Counterweight 2. Lift the counterweight off of the inboard housing. The counterweight is keyed to the crankshaft. Locate the key after removal of the counterweight from the inboard housing Key 8 TriScroll 600 Dry Scroll Vacuum Pump TriScroll 600 Disassembly (Continued) DRAFT 2/10/05 3. Remove the inboard housing from the crankshaft and orbiting plate. 4. Remove and discard the tip seals from the inboard housing. 9 TriScroll 600 Dry Scroll Vacuum Pump TriScroll 600 Disassembly (Continued) DRAFT 2/10/05 5. Remove and discard the tip seals from both sides of the orbiting plate. 10 TriScroll 600 Dry Scroll Vacuum Pump TriScroll 600 Disassembly (Continued) Scroll Cleaning 1. Carefully scrape with a chisel to loosen the tip seal dust from the: Orbiting plate ❑ Inboard housing ❑ Outboard housing ❑ Do not scratch or gouge any surface. If seal debris is attached to the sides of the scroll walls, use a razor blade or Exacto knife to scrape this debris off. 2. Use dry compressed air to remove the tip seal debris from the scroll parts. CAUTION Do not blow compressed air or debris into exposed bearings. 3. Wipe the scroll parts with isopropyl alcohol and a clean lint free cloth to remove any remaining tip seal debris. 11 DRAFT 2/10/05 CAUTION TriScroll 600 Dry Scroll Vacuum Pump TriScroll 600 Reassembly 1. Insert the new tip seal into the scroll tip grooves on the inboard housing side of the orbiting plate. 1 DRAFT 2/10/05 2. Cut the seal to the correct length at the end of each groove. Leave a gap of 1/4" (6 mm) from the outer end to allow for thermal growth. 3. Insert the new tip seal into the scroll tip grooves on the inboard housing. 4. Cut the seal to the correct length at the end of each groove. Leave a gap of 1/4" (6 mm) from the outer end to allow for thermal growth. 2 7 3 4 6 12 5 TriScroll 600 Dry Scroll Vacuum Pump TriScroll 600 Reassembly (Continued) 5. Place the scroll in the vertical position and reinstall the inboard housing onto the crankshaft. Placing the scroll in the vertical position keeps the tip seals from falling out of the grooves during reassembly. 7. Reinstall the counterweight onto the crankshaft. 8. Align the keyways in the counterweight and crankshaft and install the key. 9. Secure the counterweight to the crankshaft using the M8x12 screw and washer. Screw and washer installed 13 DRAFT 2/10/05 6. Ensure that the scroll walls are properly aligned to allow full engagement of the two parts. TriScroll 600 Dry Scroll Vacuum Pump TriScroll 600 Reassembly (Continued) 10. Install the rubber spider into motor shaft coupling. DRAFT 2/10/05 Rubber spider installed 11. Align the motor coupling to properly mate with the fan hub coupling. 12. Install the inboard housing onto the frame. 14 TriScroll 600 Dry Scroll Vacuum Pump TriScroll 600 Reassembly (Continued) 14. Insert the tip seal into the scroll tip grooves on the orbiting plate. 15. Cut the seal to the correct length at the end of each groove. Leave a gap of 1/8" (3mm) from the outer end to allow for thermal growth. 15 DRAFT 2/10/05 13. Secure the inboard housing assembly to the frame using the four M5x15 screws. TriScroll 600 Dry Scroll Vacuum Pump TriScroll 600 Reassembly (Continued) 16. Squeeze a dot of Krytox GPL 224 grease into each of the three needle bearings. 17. Smear grease over the needles. DRAFT 2/10/05 18. Coat the lips of all three seals with grease. O-ring 16 19. Lightly grease the new 2-273 O-ring (large) and install it around the lip on the inboard housing. TriScroll 600 Dry Scroll Vacuum Pump TriScroll 600 Reassembly (Continued) 20. Insert the tip seals into the grooves on the outboard housing. DRAFT 2/10/05 21. Cut the seal to the correct length at the end of each groove. Leave a gap of 1/8" (3mm) from the outer end to allow for thermal growth. 22. Install the outboard housing over the orbiting plate and against the inboard housing, engaging the dowel pins and all the sync cranks. NOTE Orient the sync cranks and the orbiting plate in the downward position before installing the outboard housing. 23. Secure the outboard housing to the inboard housing with the six M6x55 screws. 17 TriScroll 600 Dry Scroll Vacuum Pump TriScroll 600 Reassembly (Continued) 24. Install the cowling over the pump module. DRAFT 2/10/05 25. Secure with the three M5x16 screws. 18 TriScroll 600 Dry Scroll Vacuum Pump TriScroll 600 Reassembly (Continued) 26. Lightly grease the new 2-127 O-ring and insert it into the groove on the intake fitting. DRAFT 2/10/05 27. Place the intake fitting assembly into the outboard housing. 28. Secure the fitting with the two M5x16 screws. 19 TriScroll 600 Dry Scroll Vacuum Pump TriScroll 600 Reassembly (Continued) DRAFT 2/10/05 This figure illustrates a fully reassembled TriScroll 600 Series Pump. Put the Pump Back into Service The TriScroll 600 pump can be placed into service immediately after maintenance is complete. However, 24 hours of run time is required before base pressure of 7 mTorr can be achieved. NOTE 20 The 24 hour run time does not have to be continuous. If your application requires a low base pressure, it is wise to run the pump for the 24-hour period for optimum performance. Declaration of ConformityRequest Request for Return Health and Safety Certification ISO 9001 R E G I S T E R E D 1. Return authorization numbers (RA#) will not be issued for any product until this Certificate is completed and returned to a Varian, Inc. Customer Service Representative. 2. Pack goods appropriately and drain all oil from rotary vane and diffusion pumps (for exchanges please use the packing material from the replacement unit), making sure shipment documentation and package label clearly shows assigned Return Authorization Number (RA#) VVT cannot accept any return without such reference. 3. Return product(s) to the nearest location: North and South America Europe and Middle East Asia and ROW Varian, Inc. Varian S.p.A. Varian Vacuum Technologies Vacuum Technologies Via F.lli Varian, 54 Local Office 121 Hartwell Ave. 10040 Leini (TO) – ITALY Lexington, MA 02421 Fax: (39) 011 997 9350 Fax: (781) 860-9252 For a complete list of phone/fax numbers see www.varianinc.com/vacuum 4. If a product is received at Varian, Inc. in a contaminated condition, the customer is held responsible for all costs incurred to ensure the safe handling of the product, and is liable for any harm or injury to Varian, Inc. employees occurring as a result of exposure to toxic or hazardous materials present in the product. CUSTOMER INFORMATION Company name: ...................................................................................................................................................................... Contact person: Name: ...................................................................................... Tel:............................................................ Fax: .......................................................................................... E-mail: ..................................................... Ship method: Shipping Collect #: .................................. P.O.#: ....................................................... Europe only: VAT Reg Number: ........... USA only: Customer ship to: .................................................................... Customer bill to: ❒Taxable ❒Non-taxable ................................................................. .................................................................... ................................................................. .................................................................... ................................................................. PRODUCT IDENTIFICATION Product Description Varian, Inc. Part Number Varian, Inc. Serial Number TYPE OF RETURN (check appropriate box) ❒ Paid Exchange ❒ Credit ❒ Paid Repair ❒ Shipping Error ❒ Warranty Exchange ❒ Evaluation Return ❒ Warranty Repair ❒ Calibration ❒ Loaner Return ❒ Other HEALTH and SAFETY CERTIFICATION VACUUM TECHNOLOGIES CANNOT ACCEPT ANY BIOLOGICAL HAZARDS, RADIOACTIVE MATERIAL, ORGANIC METALS, OR MERCURY AT ITS FACILITY. CHECK ONE OF THE FOLLOWING: ❒ I confirm that the above product(s) has (have) NOT pumped or been exposed to any toxic or dangerous materials in a quantity harmful for human contact. ❒ I declare that the above product(s) has (have) pumped or been exposed to the following toxic or dangerous materials in a quantity harmful for human contact (Must be filled in): Print Name................................................ Signature ................................................... Date ............................... PLEASE FILL IN THE FAILURE REPORT SECTION ON THE NEXT PAGE Do not write below this line Notification (RA) #: ................................... Customer ID #: ........................................ Equipment #: ............................................ August 2003 — Page 1 of 2 Request for Return Health and Safety Certification ISO 9001 R E G I S T E R E D FAILURE REPORT (Please describe in detail the nature of the malfunction to assist us in performing failure analysis): TURBO PUMPS AND TURBOCONTROLLERS Claimed Defect ❒ Does not start ❒ Does not spin freely ❒ Does not reach full speed ❒ Mechanical Contact ❒ Cooling defective Describe Failure: ❒ Noise ❒ Vibrations ❒ Leak ❒ Overtemperature ❒ Clogging Position ❒ Vertical ❒ Horizontal ❒ Upside-down ❒ Other ................................ Parameters Power: Current: Temp 1: Temp 2: Operation Time: Rotational Speed: Inlet Pressure: Foreline Pressure: Purge flow: Turbocontroller Error Message: ION PUMPS/CONTROLLERS ❒ Bad feedthrough ❒ Vacuum leak ❒ Error code on display Describe failure: VALVES/COMPONENTS ❒ Poor vacuum ❒ High voltage problem ❒ Other .............................. ❒ Main seal leak ❒ Solenoid failure ❒ Damaged sealing area Describe failure: Customer application: Customer application: LEAK DETECTORS INSTRUMENTS ❒ Cannot calibrate ❒ Vacuum system unstable ❒ Failed to start Describe failure: ❒ No zero/high background ❒ Cannot reach test mode ❒ Other ............................... ❒ Gauge tube not working ❒ Communication failure ❒ Error code on display Describe failure: Customer application: Customer application: ALL OTHER VARIAN, INC. DIFFUSION PUMPS ❒ Pump doesn’t start ❒ Doesn’t reach vacuum ❒ Pump seized Describe failure: ❒ Noisy pump (describe) ❒ Overtemperature ❒ Other ............................... ❒ Heater failure ❒ Doesn’t reach vacuum ❒ Vacuum leak Describe failure: Customer application: Customer application: August 2003 — Page 2 of 2 ❒ Bellows leak ❒ Damaged flange ❒ Other ............................... ❒ Display problem ❒ Degas not working ❒ Other ............................... ❒ Electrical problem ❒ Cooling coil damage ❒ Other ............................... Sales and Service Offices Sales and Service Offices Canada Central coordination through: Japan Varian, Inc. Other Countries Varian, Inc. Varian, Inc. 121 Hartwell Avenue Lexington, MA 02421 USA Tel: (781) 861 7200 Fax: (781) 860 5437 Toll Free: (800) 882 7426 Sumitomo Shibaura Building, 8th Floor 4-16-36 Shibaura Minato-ku, Tokyo 108 Japan Tel: (81) 3 5232 1253 Fax: (81) 3 5232 1263 Via F.lli Varian 54 10040 Leini, (Torino) Italy Tel: (39) 011 997 9 111 Fax: (39) 011 997 9 350 Korea Varian Technologies Korea, Ltd. Customer Support and Service: China Varian Technologies - Beijing Room 1201, Jinyu Mansion No. 129A, Xuanwumen Xidajie Xicheng District Beijing 1000031 P.R. China Tel: (86) 10 6608 1031 Fax: (86) 10 6608 1541 France and Benelux Varian s.a. 7 avenue des Tropiques Z.A. de Courtaboeuf – B.P. 12 Les Ulis cedex (Orsay) 91941 France Tel: (33) 1 69 86 38 13 Fax: (33) 1 69 28 23 08 Germany and Austria Varian Deutschland GmbH Alsfelder Strasse 6 Postfach 11 14 35 64289 Darmstadt Germany Tel: (49) 6151 703 353 Fax: (49) 6151 703 302 India Varian India PVT LTD 101-108, 1st Floor 1010 Competent House 7, Nangal Raya Business Centre New Delhi 110 046 India Tel: (91) 11 5548444 Fax: (91) 11 5548445 Italy Varian, Inc. Via F.lli Varian, 54 10040 Leini, (Torino) Italy Tel (39) 011 997 9 111 Fax (39) 011 997 9 350 12/04 Shinsa 2nd Building 2F 966-5 Daechi-dong Kangnam-gu, Seoul Korea 135-280 Tel: (82) 2 3452 2452 Fax: (82) 2 3452 2451 Mexico Varian S.A. Concepcion Beistegui No 109 Col Del Valle C.P. 03100 Mexico, D.F. Tel: (52) 5 523 9465 Fax: (52) 5 523 9472 Russia Central coordination through: Varian, Inc. via F.lli Varian 54 10040 Leini, (Torino) Italy Tel: (39) 011 997 9 252 Fax: (39) 011 997 9 316 Taiwan Varian Technologies Asia Ltd. 18F-13 No.79, Hsin Tai Wu Road Sec. 1, Hsi Chih, Taipei Hsien Taiwan, R.O.C. Tel: (886) 2 2698 9555 Fax: (886) 2 2698 9678 UK and Ireland Varian Ltd. 28 Manor Road Walton-On-Thames Surrey KT 12 2QF England Tel: (44) 1932 89 8000 Fax: (44) 1932 22 8769 United States Varian, Inc. 121 Hartwell Avenue Lexington, MA 02421 USA Tel: (781) 861 7200 Fax: (781) 860 5437 North America Tel: 1 (800) 882-7426 (toll-free) vtl.technical.support@varianinc.com Europe Tel: 00 (800) 234 234 00 (toll-free) vtl.technical.support@varianinc.com Japan Tel: (81) 3 5232 1253 (dedicated line) vtj.technical.support@varianinc.com Korea Tel (82) 2 3452 2452 (dedicated line) vtk.technical.support@varianinc.com Taiwan Tel: 0 (800) 051 342 (toll-free) vtw.technical.support@varianinc.com Worldwide Web Site, Catalog and On-line Orders: www.varianinc.com Representatives in most countries
Source Exif Data:
File Type : PDF File Type Extension : pdf MIME Type : application/pdf PDF Version : 1.3 Linearized : No XMP Toolkit : XMP Core 5.4.0 Modify Date : 2015:09:10 09:14:41-04:00 Creator Tool : FrameMaker 7.1 Create Date : 2005:02:10 11:39:06Z Metadata Date : 2015:09:10 09:14:41-04:00 Producer : Acrobat Distiller 6.0.1 (Windows) Creator : dgrefe Format : application/pdf Title : 699904310G.book Document ID : uuid:d5380341-8549-4010-9194-45cb81f377ef Instance ID : uuid:f139d25a-5456-4ccb-b6c7-35e92db3fcce Page Count : 34 Author : dgrefeEXIF Metadata provided by EXIF.tools