Polvac 699904310G TS600tipseal

User Manual: Polvac TS600tipseal

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DRAFT 2/10/05

vacuum technologies

TriScrollTM 600

Series

Dry Scroll

Vacuum Pump

Manual No. 699904310

Revision G

December 2004

TIP SEAL REPLACEMENT

MANUAL

DRAFT 2/10/05

Vacuum Technologies

TriScroll™ 600 Series

Dry Scroll Vacuum Pump

TriScroll is a trademark of Vacuum Technologies.

Loctite and PST are registered trademarks of Loctite Corporation.

Krytox, Teflon and Viton are registered trademarks of E. I. du Pont de Nemours and Company.

TriScroll 600 Dry Scroll Vacuum Pump

DRAFT 2/10/05

iii

Table of Contents

Preface . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . vi

Safety Considerations . . . . . . . . . . . . . . . . . . . . . vi

Related TriScroll Manuals . . . . . . . . . . . . . . . . . viii

Maintenance and Tool Kits . . . . . . . . . . . . . . . . viii

Factory Service Options . . . . . . . . . . . . . . . . . . . ix

Contacting Vacuum Technologies . . . . . . . . . . . . ix

Tip Seal Replacement . . . . . . . . . . . . . . . . . . . . . . . 1

General Information . . . . . . . . . . . . . . . . . . . . . . 1

Required Equipment . . . . . . . . . . . . . . . . . . . . 1

TriScroll 600 Disassembly . . . . . . . . . . . . . . . . . . 4

Remove the Intake Fitting . . . . . . . . . . . . . . . . 4

Remove the Outboard Housing . . . . . . . . . . . . 5

Remove the Inboard Housing and Orbiting

Plate Assembly . . . . . . . . . . . . . . . . . . . . . . . . 7

Disassemble the Inboard Housing and the Orbiting

Plate Assembly . . . . . . . . . . . . . . . . . . . . . . . . 8

Scroll Cleaning . . . . . . . . . . . . . . . . . . . . . . . 10

TriScroll 600 Reassembly . . . . . . . . . . . . . . . . . . . 11

Put the Pump Back into Service . . . . . . . . . . . . 19

TriScroll 600 Dry Scroll Vacuum Pump

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DRAFT 2/10/05

Varian, Inc.

declare under our sole responsibility that the product,

erklären, in alleniniger Verantwortung, daß dieses Produkt,

déclarons sous notre seule responsabilité que le produit,

declaramos, bajo nuestra sola responsabilidad, que el producto,

verklaren onder onze verantwoordelijkheid, dat het product,

dichiariamo sotto nostra unica responsabilità, che il prodotto,

Declaration of Conformity

Konformitätserklärung

Déclaration de Conformité

Declaración de Conformidad

Verklaring de Overeenstemming

Dichiarazione di Conformità

to which this declaration relates is in conformity with the following standard(s) or other normative documents.

auf das sich diese Erklärung bezieht, mit der/den flogenden Norm(en) oder Richtlinie(n) übereinstimmt.

auquel se réfère cette déclaration est conforme à la (auz) norme(s) ou au(x) document(s) normatif(s).

al que se refiere esta declaración es conforme a la(s) norma(s) u otro(s) documento(s) normativo(s).

waamaar deze verklaring verwijst, aan de volende norm(en) of richtlijn(en) beantwoodt.

a cui se rifersce questa dichiarazione è conforme alla/e sequente/I norma/o documento/I normativo/i.

Frederick C. Campbell

Operations Manager

Vacuum Technologies

Wir

Nous

Nosotros

Wij

Noi

Lexington, MA, 02421-3133 USA

121 Hartwell Avenue

Vacuum Technologies

Lexington, Massachusetts, USA

Varian, Inc.

TriScroll Series Vacuum Pump

98/37/EEC, Machinery Directive

EN 1012-2:1996 Compressors and Vacuum Pumps Safety Requirements; Part 2 Vacuum Pumps

EN 1050:1996 Safety of machinery - principles for risk assessment

EN 60204-1 Electrical equipment of industrial machines; general requirements

73/023/EEC, Low Voltage Directive

EN 60034 part 1 Rotating electrical machines - Part 1: Rating and performance

89/336/EEC, Electromagnetic Compatibility Directive

EN 61000-4-2 Testing and Measurement Techniques - Electrostatic Discharge Immunity Test

March 2003

Declaration

ConformityDeclaration

TriScroll 600 Dry Scroll Vacuum Pump

DRAFT 2/10/05

Preface

This manual provides the information you need to successfully perform tip seal replacement on your

Vacuum Technologies TriScrollTM Dry Vacuum Pump. Tip seal replacement is generally is

recommended when the pump base pressure has risen to an unacceptably high level for your

application. If you have questions that are not addressed in this manual, please contact the nearest

Vacuum Technologies service facility listed on the rear cover of this manual.

Safety Considerations

READ THE FOLLOWING INSTRUCTIONS. TAKE ALL NECESSARY PRECAUTIONS.

The following format is used in this manual to call attention to hazards:

Maintenance personnel must be aware of all hazards associated with this equipment. They must

know how to recognize hazardous and potentially hazardous conditions, and know how to avoid

them. The consequences of work performed by unskilled or improperly trained maintenance personnel,

or careless operation of the equipment employed in the specified maintenance procedures can be

serious. Every maintenance person must read and thoroughly understand the materials discussed and

the instructions provided in this manual, as well as any additional information provided by Vacuum

Tec hnol ogi e s.

WARNING The warning messages are for attracting

the attention of the operator to a partic-

ular procedure or practice which, if not

followed correctly, could lead to serious

injury.

CAUTION The caution messages are displayed

before procedures, which if not fol-

lowed, could cause damage to the

equipment.

NOTE The notes contain important informa-

tion taken from the text.

vii

TriScroll 600 Dry Scroll Vacuum Pump

DRAFT 2/10/05

All warnings and cautions must be read carefully, fully understood, and strictly observed. Consult local,

state/province, and national agencies regarding specific requirements and regulations. Address any

safety, operation, and/or maintenance questions to the nearest Vacuum Technologies location.

WARNING Disconnect power from the

TriScroll 600 before performing any

maintenance procedure.

Allow the pump to cool before perform-

ing any maintenance procedure.

Approximate cool-down time is one to

two hours.

CAUTION Wipe all O-rings clean with a lint-free

cloth before installation to ensure that

no foreign matter is present to impair

the seal.

Do not use alcohol, methanol or other

solvents on O-rings. To do so causes

deterioration and reduces their ability to

hold a vacuum.

If applicable, apply a small amount of

Krytox®GPL 224 grease and wipe the

O-rings “shiny” dry.

NOTE Vacuum Technologies recommends

replacing all O-rings during routine

maintenance or during any mainte-

nance procedure requiring that O-rings

be removed.

WARNING The TriScroll 600 weighs 32 kg (70 lbs).

To avoid injury, use proper lifting

techniques when moving the pump.

viii

TriScroll 600 Dry Scroll Vacuum Pump

DRAFT 2/10/05

Related TriScroll Manuals

Manuals related to the installation and operation, pump module replacement, and major maintenance

for the TriScroll 600 series pumps are listed in the following table:

Maintenance and Tool Kits

Material and tooling required to perform maintenance on TriScroll pumps is provided in kit form. A

description of each kit and ordering information is provided in the following table:

Title Applicable TriScroll Model Part Number

Major Maintenance Manual All TriScroll 600 Series Models 699904300

Pump Module Replacement All TriScroll 600 Series Models 699904305

Installation and Operation Manual All TriScroll 600 Series Models 699904290

Description Contents Applicable TriScroll

Model

Part Number

Major Maintenance Tool Kit All bearings, bearing seals,

bearing lubricant, O-rings, and

tip seals required to rebuild

TriS croll 6 00 S eries pumps .

All TriScroll 600 Series

models

PTSS0600MK

Maintenance Tool Kit All fixtures and tools required

to perform any maintenance on

TriS croll 600 S eries p um ps.

All TriScroll 600 Series

models

PTSS0600TK

Tip Seal Tool Kit All tools required to change the

tip seals on any TriScroll Series

pump.

All TriScroll Series

pumps

PTSTSTKIT

Replacement Tip Seal Set Replacement tip seals and

static O-rings for TriScroll 600

Series pumps.

All TriScroll 600 Series

models

PTSS0600TS

TriScroll 600 Dry Scroll Vacuum Pump

DRAFT 2/10/05

Factory Service Options

Vacuum Technologies offers factory-rebuild service or advance exchange of complete TriScroll Pumps

or TriScroll Pump Modules. Contact your nearest Vacuum Technologies sales office for price and

availability information. Select your preferred service option from the table below.

Contacting Vacuum Technologies

In the United States, you can contact Vacuum Technologies Customer Service at 1-800-8VARIAN.

See the back cover of this manual for a listing of our sales and service offices.

Internet users:

❑Send email to Customer Service & Technical Support at vpl.customer.support@varianinc.com

❑Visit our web site at www.varianinc.com/vacuum

❑Order on line at www.evarian.com

Factory Service Options Part Number

Advance Exchange TriScroll 600 Single Phase EXPPTS06001

Advance Exchange TriScroll 600 Three Phase EXPPTS06003

Advance Exchange TriScroll 610 Single Phase EXPPTS06101

Advance Exchange TriScroll 610 Three Phase EXPPTS06103

Advance Exchange TriScroll 600 Pump Module Only EXPTS0600SC

Advance Exchange TriScroll 610 Pump Module Only EXPTS0610SC

Service/Rebuild TriScroll 600 Pump (Single or Three Phase) PTS0600KMA

Service/Rebuild TriScroll 610 Pump (Single or Three Phase) PTS0610KMA

Service/Rebuild TriScroll 600 Pump Module Only PTS0600SCRP

Service/Rebuild TriScroll 610 Pump Module Only PTS0610SCRP

TriScroll 600 Dry Scroll Vacuum Pump

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DRAFT 2/10/05

TriScroll 600 Dry Scroll Vacuum Pump

DRAFT 2/10/05

Tip Seal Replacement

General Information

Vacuum Technologies TriScroll 600 series pumps will provide years of trouble-free service if

maintenance procedures and intervals are observed. Bearing grease replenishment and tip seal

replacement is recommended when the pump base pressure rises to an unacceptably high level for

your application. Replace bearings, rotary seals and O-rings if the pump bearings exhibit humming or

grinding noises. Main bearing life may be shortened if your application requires the pumping of high

quantities of water vapor. Use bearing purge to keep this water from impacting bearing life.

Required Equipment

❑Tip Seal Replacement Kit: PTSS0600TS (“Tip Seal Replacement Kit” on page 2)

❑Tip Seal Tool Kit: PTSTSTKIT (“Tip Seal Tool Kit” on page 3; customer can supply metric Allen

wrench set and chisel).

❑Vacuum Measuring Gauge: Capable of measuring pressures of 5 to 20 mTorr with an accuracy

of ± 1 mTorr. A capacitance manometer or Pirani gauge is recommended.

TriScroll 600 Dry Scroll Vacuum Pump

DRAFT 2/10/05

Tip Seal Replacement Kit

2-273

2-127

rytox

GPL

224

Grease

TriScroll 600 Dry Scroll Vacuum Pump

DRAFT 2/10/05

Tip Seal Tool Kit

Chisel

Metric Hex Key

Set

TriScroll 600 Dry Scroll Vacuum Pump

DRAFT 2/10/05

TriScroll 600 Disassembly

Remove the Intake Fitting

1. Remove the two M5x16 screws from the

intake assembly.

2. Remove the intake assembly from the top of

the pump.

3. Remove and discard the O-ring from the

groove on the underside of the intake fitting.

TriScroll 600 Dry Scroll Vacuum Pump

DRAFT 2/10/05

Remove the Outboard Housing

1. Remove the three M5x16 screws that attach

the cowling to the module.

2. Remove the cowling.

3. Remove the six M6x55 screws that attach

the outboard housing to inboard housing.

4. Remove the outboard housing.

TriScroll 600 Disassembly (Continued)

TriScroll 600 Dry Scroll Vacuum Pump

DRAFT 2/10/05

5. Remove and discard the O-ring.

6. Remove and discard the tip seals from the

outboard housing.

TriScroll 600 Disassembly (Continued)

TriScroll 600 Dry Scroll Vacuum Pump

DRAFT 2/10/05

Remove the Inboard Housing and

Orbiting Plate Assembly

1. Remove the four M5x15 screws that attach

the inboard housing to the frame.

2. Remove the inboard housing from the

frame.

Locate the rubber spider that mounts

between the motor shaft coupling and the

inboard housing assembly.

CAUTION The inboard housing assembly

weighs 22 lbs.

TriScroll 600 Disassembly (Continued)

TriScroll 600 Dry Scroll Vacuum Pump

DRAFT 2/10/05

Disassemble the Inboard Housing and

the Orbiting Plate Assembly

1. Remove the M8x12 screw and washer that

attaches the counterweight to the inboard

housing.

2. Lift the counterweight off of the inboard

housing.

The counterweight is keyed to the

crankshaft. Locate the key after removal of

the counterweight from the inboard housing

TriScroll 600 Disassembly (Continued)

Counterweight

Key

TriScroll 600 Dry Scroll Vacuum Pump

DRAFT 2/10/05

3. Remove the inboard housing from the

crankshaft and orbiting plate.

4. Remove and discard the tip seals from the

inboard housing.

TriScroll 600 Disassembly (Continued)

TriScroll 600 Dry Scroll Vacuum Pump

DRAFT 2/10/05

5. Remove and discard the tip seals from both

sides of the orbiting plate.

TriScroll 600 Disassembly (Continued)

TriScroll 600 Dry Scroll Vacuum Pump

DRAFT 2/10/05

Scroll Cleaning

1. Carefully scrape with a chisel to loosen the

tip seal dust from the:

❑Orbiting plate

❑Inboard housing

❑Outboard housing

If seal debris is attached to the sides of the

scroll walls, use a razor blade or Exacto

knife to scrape this debris off.

2. Use dry compressed air to remove the tip

seal debris from the scroll parts.

3. Wipe the scroll parts with isopropyl alcohol

and a clean lint free cloth to remove any

remaining tip seal debris.

TriScroll 600 Disassembly (Continued)

CAUTION Do not scratch or gouge any

surface.

CAUTION Do not blow compressed air

or debris into exposed

bearings.

TriScroll 600 Dry Scroll Vacuum Pump

DRAFT 2/10/05

TriScroll 600 Reassembly

1. Insert the new tip seal into the scroll tip

grooves on the inboard housing side of the

orbiting plate.

2. Cut the seal to the correct length at the end

of each groove. Leave a gap of 1/4" (6 mm)

from the outer end to allow for thermal

growth.

3. Insert the new tip seal into the scroll tip

grooves on the inboard housing.

4. Cut the seal to the correct length at the end

of each groove. Leave a gap of 1/4" (6 mm)

from the outer end to allow for thermal

growth.

TriScroll 600 Dry Scroll Vacuum Pump

DRAFT 2/10/05

5. Place the scroll in the vertical position and

reinstall the inboard housing onto the

crankshaft.

Placing the scroll in the vertical position

keeps the tip seals from falling out of the

grooves during reassembly.

6. Ensure that the scroll walls are properly

aligned to allow full engagement of the two

parts.

7. Reinstall the counterweight onto the

crankshaft.

8. Align the keyways in the counterweight and

crankshaft and install the key.

9. Secure the counterweight to the crankshaft

using the M8x12 screw and washer.

TriScroll 600 Reassembly (Continued)

Screw

and

washer

installed

TriScroll 600 Dry Scroll Vacuum Pump

DRAFT 2/10/05

10. Install the rubber spider into motor shaft

coupling.

11. Align the motor coupling to properly mate

with the fan hub coupling.

12. Install the inboard housing onto the frame.

TriScroll 600 Reassembly (Continued)

Rubber

spider

installed

TriScroll 600 Dry Scroll Vacuum Pump

DRAFT 2/10/05

13. Secure the inboard housing assembly to the

frame using the four M5x15 screws.

14. Insert the tip seal into the scroll tip grooves

on the orbiting plate.

15. Cut the seal to the correct length at the end

of each groove. Leave a gap of 1/8" (3mm)

from the outer end to allow for thermal

growth.

TriScroll 600 Reassembly (Continued)

TriScroll 600 Dry Scroll Vacuum Pump

DRAFT 2/10/05

16. Squeeze a dot of Krytox GPL 224 grease

into each of the three needle bearings.

17. Smear grease over the needles.

18. Coat the lips of all three seals with grease.

19. Lightly grease the new 2-273 O-ring (large)

and install it around the lip on the inboard

housing.

TriScroll 600 Reassembly (Continued)

O-ring

TriScroll 600 Dry Scroll Vacuum Pump

DRAFT 2/10/05

20. Insert the tip seals into the grooves on the

outboard housing.

21. Cut the seal to the correct length at the end

of each groove. Leave a gap of 1/8" (3mm)

from the outer end to allow for thermal

growth.

22. Install the outboard housing over the

orbiting plate and against the inboard

housing, engaging the dowel pins and all

the sync cranks.

23. Secure the outboard housing to the inboard

housing with the six M6x55 screws.

TriScroll 600 Reassembly (Continued)

NOTE Orient the sync cranks and

the orbiting plate in the

downward position before

installing the outboard

housing.

TriScroll 600 Dry Scroll Vacuum Pump

DRAFT 2/10/05

24. Install the cowling over the pump module.

25. Secure with the three M5x16 screws.

TriScroll 600 Reassembly (Continued)

TriScroll 600 Dry Scroll Vacuum Pump

DRAFT 2/10/05

26. Lightly grease the new 2-127 O-ring and

insert it into the groove on the intake fitting.

27. Place the intake fitting assembly into the

outboard housing.

28. Secure the fitting with the two M5x16

screws.

TriScroll 600 Reassembly (Continued)

TriScroll 600 Dry Scroll Vacuum Pump

DRAFT 2/10/05

Put the Pump Back into Service

The TriScroll 600 pump can be placed into service immediately after maintenance is complete.

However, 24 hours of run time is required before base pressure of 7 mTorr can be achieved.

This figure illustrates a fully reassembled

Tri Sc r o ll 6 00 S eries Pu mp .

NOTE The 24 hour run time does not have to

be continuous. If your application

requires a low base pressure, it is wise

to run the pump for the 24-hour period

for optimum performance.

TriScroll 600 Reassembly (Continued)

Request for Return

Health and Safety Certification

1. Return authorization numbers (RA#) will not be issued for any product until this Certificate is completed and returned to a

Varian, Inc. Customer Service Representative.

2. Pack goods appropriately and drain all oil from rotary vane and diffusion pumps (for exchanges please use the packing

material from the replacement unit), making sure shipment documentation and package label clearly shows assigned

Return Authorization Number (RA#) VVT cannot accept any return without such reference.

3. Return product(s) to the nearest location:

4. If a product is received at Varian, Inc. in a contaminated condition, the customer is held responsible for all costs incurred to

ensure the safe handling of the product, and is liable for any harm or injury to Varian, Inc. employees occurring as a result of

exposure to toxic or hazardous materials present in the product.

PLEASE FILL IN THE FAILURE REPORT SECTION ON THE NEXT PAGE

North and South America Europe and Middle East Asia and ROW

Varian, Inc.

Vacuum Technologies

121 Hartwell Ave.

Lexington, MA 02421

Fax: (781) 860-9252

Varian S.p.A.

Via F.lli Varian, 54

10040 Leini (TO) – ITALY

Fax: (39) 011 997 9350

Varian Vacuum Technologies

Local Office

For a complete list of phone/fax numbers see www.varianinc.com/vacuum

Do not write below this line

Notification (RA) #: ................................... Customer ID #: ........................................ Equipment #:............................................

CUSTOMER INFORMATION

Company name: ......................................................................................................................................................................

Contact person: Name: ...................................................................................... Tel:............................................................

Fax: .......................................................................................... E-mail: .....................................................

Ship method: Shipping Collect #: .................................. P.O.#: .......................................................

Europe only: VAT Reg Number: ........... USA only: ❒Taxable ❒Non-taxable

Customer ship to: .................................................................... Customer bill to: .................................................................

.................................................................... .................................................................

PRODUCT IDENTIFICATION

Product Description Varian, Inc. Part Number Varian, Inc. Serial Number

TYPE OF RETURN (check appropriate box)

❒ Paid Exchange ❒ Paid Repair ❒ Warranty Exchange ❒ Warranty Repair ❒ Loaner Return

❒ Credit ❒ Shipping Error ❒ Evaluation Return ❒ Calibration ❒ Other

HEALTH and SAFETY CERTIFICATION

VACUUM TECHNOLOGIES CANNOT ACCEPT ANY BIOLOGICAL HAZARDS, RADIOACTIVE MATERIAL, ORGANIC METALS, OR

MERCURY AT ITS FACILITY. CHECK ONE OF THE FOLLOWING:

❒I confirm that the above product(s) has (have) NOT pumped or been exposed to any toxic or dangerous materials in a

quantity harmful for human contact.

❒I declare that the above product(s) has (have) pumped or been exposed to the following toxic or dangerous materials in a

quantity harmful for human contact (Must be filled in):

Print Name................................................ Signature ................................................... Date ...............................

August 2003 — Page 1 of 2

ISO

REGISTERED

9001

Declaration of ConformityRequest

Request for Return

Health and Safety Certification

FAILURE REPORT

(Please describe in detail the nature of the malfunction to assist us in performing failure analysis):

TURBO PUMPS AND TURBOCONTROLLERS

ION PUMPS/CONTROLLERS VALVES/COMPONENTS

LEAK DETECTORS INSTRUMENTS

ALL OTHER VARIAN, INC. DIFFUSION PUMPS

Claimed Defect Position Parameters

❒ Does not start ❒ Noise ❒ Vertical Power: Rotational Speed:

❒ Does not spin freely ❒ Vibrations ❒ Horizontal Current: Inlet Pressure:

❒ Does not reach full speed ❒ Leak ❒ Upside-down Temp 1: Foreline Pressure:

❒ Mechanical Contact ❒ Overtemperature ❒ Other

................................ Temp 2: Purge flow:

❒ Cooling defective ❒ Clogging Operation Time:

Describe Failure:

Turbocontroller Error Message:

❒ Bad feedthrough ❒ Poor vacuum ❒ Main seal leak ❒ Bellows leak

❒ Vacuum leak ❒ High voltage problem ❒ Solenoid failure ❒ Damaged flange

❒ Error code on display ❒ Other .............................. ❒ Damaged sealing area ❒ Other ...............................

Describe failure: Describe failure:

Customer application: Customer application:

❒ Cannot calibrate ❒ No zero/high background ❒ Gauge tube not working ❒ Display problem

❒ Vacuum system unstable ❒ Cannot reach test mode ❒ Communication failure ❒ Degas not working

❒ Failed to start ❒ Other ............................... ❒ Error code on display ❒ Other ...............................

Describe failure: Describe failure:

Customer application: Customer application:

❒ Pump doesn’t start ❒ Noisy pump (describe) ❒ Heater failure ❒ Electrical problem

❒ Doesn’t reach vacuum ❒ Overtemperature ❒ Doesn’t reach vacuum ❒ Cooling coil damage

❒ Pump seized ❒ Other ............................... ❒ Vacuum leak ❒ Other ...............................

Describe failure: Describe failure:

Customer application: Customer application:

August 2003 — Page 2 of 2

ISO

REGISTERED

9001

Sales and Service Offices

12/04

Canada

Central coordination through:

Varian, Inc.

121 Hartwell Avenue

Lexington, MA 02421

USA

Te l: (7 8 1 ) 8 6 1 7 20 0

Fax:(781) 860 5437

To ll F r e e: ( 80 0 ) 8 8 2 7 4 2 6

China

Varian Techn ologies - Beijing

Room 1201, Jinyu Mansion

No. 129A, Xuanwumen Xidajie

Xicheng District

Beijing 1000031

P. R . C h i n a

Te l: (8 6 ) 1 0 6 6 0 8 1 0 3 1

Fax:(86) 10 6608 1541

France and Benelux

Varian s.a.

7 avenue des Tropiques

Z.A. de Courtaboeuf – B.P. 12

Les Ulis cedex (Orsay) 91941

France

Te l: (3 3 ) 1 6 9 8 6 3 8 1 3

Fax:(33) 1 69 28 23 08

Germany and Austria

Varian Deu tschland GmbH

Alsfelder Strasse 6

Postfach 11 14 35

64289 Darmstadt

Germany

Te l: (4 9 ) 6 1 5 1 7 03 3 5 3

Fax:(49) 6151 703 302

India

Varian India PVT LTD

101-108, 1st Floor

1010 Competent House

7, Nangal Raya Business Centre

New Delhi 110 046

India

Te l: (9 1 ) 11 55 48 4 44

Fax:(91) 11 5548445

Italy

Varian, Inc.

Via F.lli Varian, 54

10040 Leini, (Torino)

Italy

Te l (3 9 ) 0 11 9 9 7 9 111

Fax (39) 011 997 9 350

Japan

Varian, Inc.

Sumitomo Shibaura Building, 8th Floor

4-16-36 Shibaura

Minato-ku, Tokyo 108

Japan

Tel : (81 ) 3 52 32 1 253

Fax:(81) 3 5232 1263

Korea

Varian Technologies Korea, Ltd.

Shinsa 2nd Building 2F

966-5 Daechi-dong

Kangnam-gu, Seoul

Korea 135-280

Tel : (82 ) 2 34 52 2 452

Fax:(82) 2 3452 2451

Mexico

Varian S.A.

Concepcion Beistegui No 109

Col Del Valle

C.P. 03100

Mexico, D.F.

Tel : (52 ) 5 52 3 9 4 65

Fax:(52) 5 523 9472

Russia

Central coordination through:

Varian, Inc.

via F.lli Varian 54

10040 Leini, (Torino)

Italy

Tel : (3 9) 0 11 9 97 9 252

Fax: (39) 011 997 9 316

Ta i w a n

Varian Technologies Asia Ltd.

18F-13 No.79, Hsin Tai Wu Road

Sec. 1, Hsi Chih, Taipei Hsien

Tai w an, R. O .C.

Tel : (88 6) 2 2 698 955 5

Fax:(886) 2 2698 9678

UK and Ireland

Varian Ltd.

28 Manor Road

Walton-On-Thames

Surrey KT 12 2QF

England

Tel : (44 ) 19 32 89 800 0

Fax:(44) 1932 22 8769

United States

Varian, Inc.

121 Hartwell Avenue

Lexington, MA 02421

USA

Tel : (78 1) 8 61 72 00

Fax:(781) 860 5437

Other Countries

Varian, Inc.

Via F.lli Varian 54

10040 Leini, (Torino)

Italy

Tel: (39 ) 011 99 7 9 111

Fax:(39) 011 997 9 350

Customer Support and Service:

North America

Tel: 1 (8 0 0) 8 82- 742 6 ( toll-free )

vtl.technical.support@varianinc.com

Europe

Tel: 0 0 (8 00) 234 234 00 (to ll -f r ee)

vtl.technical.support@varianinc.com

Japan

Tel: ( 81) 3 52 32 1 253 (de d icat ed l in e )

vtj.technical.support@varianinc.com

Korea

Tel ( 82) 2 3 45 2 2 452 ( ded i ca te d l ine )

vtk.technical.support@varianinc.com

Ta i w a n

Tel: 0 (8 0 0) 0 51 3 42 ( toll -free )

vtw.technical.support@varianinc.com

Worldwide Web Site,

Catalog and On-line Orders:

www.varianinc.com

Representatives in most countries

Sales and Service Offices

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