Watlow Electric Ultramic 600 Users Manual Advanced Ceramic Heater

ULTRAMIC 600 to the manual a2afef1f-0973-4914-a747-19c857746434

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W

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ULTRAMIC 600
ADVANCED CERAMIC HEATER
ULTRA-FAST RAMP RATES
HIGH WATT DENSITIES
NON-CONTAMINATING

The Revolutionary ULTRAMIC™ 600
Watlow’s ULTRAMIC™ 600 heaters are
designed for thermal applications where
the high performance of an advanced
ceramic heater is required to ensure
optimal effectiveness of the equipment
and process.
ULTRAMIC 600 heaters are constructed
of aluminum nitride (AIN) and incorporate
a thermally matched proprietary heating
element that provides maximum
performance in challenging applications.
AIN is especially suitable for applications
requiring a clean,
non-contaminating heat source.
Additionally, the excellent geometric
stability ensures consistent part-to-part
thermal contact during heating cycles.
Watlow AIN heaters can operate up to 600°C with an ultrafast ramp rate of up to 150°C per second depending on the
application, heater design and process parameters. In
addition to excellent thermal characteristics, the ULTRAMIC
600 has high electrical isolation and typically provides
superior chemical resistance as compared to traditional
metal heaters.

Robust AlN ceramic
• Creates a homogeneous assembly for atmospheric and
vacuum applications
• Provides durable heater construction and thermal transfer
necessary for high temperature and long heater life
• Permits the design of a high watt density, fast responding,
heater in a very small package
• Geometrically stable due to low coefficient of thermal
expansion (CTE)
• Process temperatures up to 600°C (1112°F) depending on
application parameters

Thermocouple integrated into
assembly (patent pending)
• Bonded assembly process ensures
reliability of heater/sensor interface
• Optimized temperature sensing improves
accuracy
• High response rate in ramping applications

UL® agency compliance (pending)
• Designed to meet global safety standards

Rapid prototyping
• Finite Element Analysis (FEA) provides rapid ‘virtual’
prototyping of heater performance prior to the
manufacturing process
• Custom prototypes can be delivered in weeks rather than
months with innovative design and manufacturing practices

Superior electrical performance
• Low leakage current; <10 µA at 100°C
• Breakdown voltage; >2000VÎ(dc)

High thermal conductivity
• Makes for a fast temperature ramp rate of up to 150°C
(270°F) per second (depending on application parameters)
• Allows for quick cool-down
• Provides extremely uniform temperatures over the
heater surface
UL® is a registered trademark of Underwriter’s Laboratories, Inc.

Ramp rates to
150°C per second

ULTRAMIC™ 600 Temperature Ramping Capabilities

ULTRAMIC 600
temperature ramp
rate as a function of
watt density. Test
completed using
Watlow’s SERIES F4
temperature controller.

Application Examples
Semiconductor Equipment
Eutectic die bonding equipment is used in the
attachment of lead wires to the die before packaging
of the IC. Optimum bonding is achieved by ramping
the solder and lead temperature through the eutectic
state. Watlow’s ULTRAMIC 600 heater is ideal for this
application because a temperature ramp of up to
150°C/second can be achieved while also achieving a
fast cool down in preparation for processing the next
device.
•
•
•
•

Analytical Instrumentation
Mass spectrometers are used to determine the
presence of trace chemicals in industrial,
environmental and clinical applications. With detection
capabilities into the part-per-trillion levels, cleanliness
is of paramount concern. For use with ion sources,
the chemical compatibility, low porosity and fine
surface finish make the ULTRAMIC 600 an excellent
choice where contamination of the sample is of
concern.
•
•
•
•

Temperature ramp rate to 150°C (270°F)/sec
Vacuum holes and grooves
Surface flatness 0.05 mm (0.002 in.)
Surface finish <0.8 µm (32 µ-in.)

Process temperatures to 600°C (1112˚F)
Chemical compatibility
High dielectric strength
Small size and light weight

Why ULTRAMIC 600?
•
•
•
•
•
•
•

Ultra-fast temperature response
Operating temperatures up to 600°C
Thermal uniformity
Excellent chemical compatibility
Geometrically stable
High dielectric strength
Customized design

Configurations and Dimensions
Maximum Dimensions 4032 mm2 (6.25 in2)
Length
Flat Square
Rectangular

Ring

Width

Min: 8 mm (0.314 in.)
Max: 63.5 mm (2.5 in.)

Thickness

Aspect Ratio

Min: 2 mm (0.078 in.)
Max: 5 mm (0.196 in.)

1

Max: 100 mm (3.94 in.)

Min: 8 mm (0.157 in.)

Min: 2 mm (0.078 in.)
Max: 5 mm (0.196 in.)

<10

Inside Diameter
(I.D.)

Outside Diameter
(O.D.)

Thickness

Ring Wall Thickness

Min: 3 mm (0.118 in.)

Max: O.D. 75 mm (2.95 in.)

Min: 2 mm (0.078 in.)
Max: 5 mm (0.196 in.)

Minimum wall thickness:
3 mm (0.118 in.)

Surface Finish
Flatness

Parallelism

Surface Roughness
(Ra)

Straight Groove
Custom Feature

Hole Size
Round Diameter

<0.05 mm (0.002 in.)

<0.05 mm (0.002 in.)

<0.8 µm (32 µ-in.)

Depth: 0.20 - 0.5 mm (0.019 in.)
Width: 0.75 - 2 mm (0.078 in.)

Min: 1 mm (0.039 in.)
Max: Outer edge 3 mm
(0.118 in.)

Electrical Properties
Voltage

Leakage Current

Dielectric Constant

Dielectric Strength

24 to 480V

<0.1mA

8.9

15KV/mm

Ramp Rate vs. Wattage
Power density
Maximum and minimum power densities can vary with voltage, surface area and application
parameters. The following graph is meant as a guideline. Contact factory to determine optimum voltage
and power for your application.

Watt densities to
1000W/in2

Sintered Ceramic Heater Construction
ULTRAMIC™ 600 heaters are
manufactured using a proprietary sintering
process. Sintering is a method where
aluminum nitride (AlN) ceramic powder is
heated at a high temperature, which
allows contacting particles to diffuse
together. This process creates a
monolithic, geometrically stable structure
with very low porosity.

The AlN matrix is constructed of two parts. The
heating element is printed on one of the AlN
parts. Then, the parts are sintered together,
making them one homogeneous assembly.

399.9

399.5
399.7

°C
400.8
400.4
401.3
400.1
401.1
400.6
401.5

The high thermal conductivity of AlN
and an optimized circuit layout
combine to produce superb
temperature uniformity across the
heater surface.

Non-contaminating
AlN composition
Custom designs can be rapidly accommodated
including those with complex topographies such as
holes, notches and vacuum grooves. Using a Finite
Element Analysis (FEA) technique, the heater circuit is
optimized and the thermal performance simulated
prior to manufacture.

ULTRAMIC 600 Thermal and Physical Properties
AIN
Thermal Properties

Physical Properties

Thermal Conductivity (W/mK)

140

Density (g/cm )

3.26

CTE (ppm/˚C)

4.5

Hardness (Hv@500g)

1050

Flexural Strength (MPa)

>250

Surface Temperature

600˚C (1112˚F)

Terminal Temperature

400˚C (752˚F)

3

Mounting Guidelines

How to Order

• Temperature <200°C (392°F): bond with high-temperature
epoxy adhesive
• Temperature >200°C (392°F): screw hole can be provided
(recommend insulation buffer such as mica spacer)
• Clamp using single or multiple-point fasteners

To order your standard ULTRAMIC 600 heater, please specify
Watlow code number.

Optional Thermocouple
• Bonded bare wire Type K thermocouple with ceramic
insulation for <400°C (752°F)
• Drilled hole can be provided for installing a sheathed
thermocouple for <600°C (1112°F)

Lead Wire and Terminations
• Power terminals exit locations - extended from side on
square and rectangular shapes and from the top on the
ring shapes
• Flexible lead extension
• Teflon® insulated silver-plated copper lead extension
• Lead extension length - standard length 305 mm (12 in.)

If our standard units do not meet your application needs,
Watlow can rapidly manufacture the ULTRAMIC 600 to your
special requirements. For made-to-order units, please consult
the factory.

Availability
Standard heaters are available for shipment in seven business
days or less. While normally customized for the application,
these products enable a development engineer to quickly and
easily acquire a test sample to determine its suitability in the
application.
Custom configurations involving grooves, holes, product
size or surface finishes are routinely manufactured to meet
the exact requirements of the design engineer. Delivery is
dependent on complexity of order. Please consult factory.

Standard Product Ordering Information
Code
Number

Square ❶
CER-1-01-00002
CER-1-01-00006
CER-1-01-00093
CER-1-01-00097
Rectangular ❶
CER-1-01-00001
CER-1-01-00003
CER-1-01-00004
CER-1-01-00005
CER-1-01-00007
CER-1-01-00098
CER-1-01-00105
Ring ❷
CER-1-02-00001
CER-1-02-00002
❶ Leads exit short side
❷ Leads exit top

Size

Watts

W/in2

(W/cm2)

Voltage
VÅ(ac)

25 mm x 25 mm x 2.5 mm
(0.98 in. x 0.98 in. x 0.1 in.)
50 mm x 50 mm x 2.5 mm
(1.97 in. x 1.97 in. x 0.1 in.)
25 mm x 25 mm x 2.5 mm
(0.98 in. x 0.98 in. x 0.1 in.)
19 mm x 19 mm x 2.5 mm
(0.75 in. x 0.75 in. x 0.1 in.)

967

1000

(155.04)

240

1938

500

(77.52)

240

150

150

(24)

120

200

357

(55.56)

120

580

1000

(155.04)

120

582

750

(116.28)

120

770

1000

(155.04)

240

1453

750

(116.28)

240

1455

500

(77.52)

240

180

305

(48.0)

120

100

50

(8)

120

733

1000

(155.04)

120

770

250

(38.76)

240

25 mm x 15 mm x 2.5 mm
(0.98 in. x 0.6 in. x 0.1 in.)
50 mm x 10 mm x 2.5 mm
(1.97 in. x 0.39 in. x 0.1 in.)
50 mm x 10 mm x 2.5 mm
(1.97 in. x 0.39 in. x 0.1 in.)
50 mm x 25 mm x 2.5 mm
(1.97 in. x 0.98 in. x 0.1 in.)
75 mm x 25 mm x 2.5 mm
(2.95 in. x 0.98 in. x 0.1 in.)
25 mm x 15 mm x 2.5 mm
(0.98 in. x 0.6 in. x 0.1 in.)
50 mm x 25 mm x 2.5 mm
(1.97 in. x 0.98 in. x 0.1 in.)
38 mm O.D./29 mm I.D.
(1.50 in. O.D./1.14 in. I.D.)
77.5 mm O.D./59 mm I.D.
(3.05 in. O.D./2.32 in. I.D.)

Standard configurations include:
• Power lead wires with Teflon® insulation 305 mm (12 in.)
• Bonded Type K thermocouple with 305 mm (12 in.) Teflon® insulated lead extension
• Surface finish (Ra) <0.8 µm (32 µ-in.)

Teflon® is a registered trademark of E.I. du Pont Nemours & Company.

FEN-ULT-1007

To be automatically connected to the nearest North American Technical and Sales Office call:

1-800-WATLOW2
International Technical and Sales Offices: Australia, +61-3-9335-6449 • China, +86-21-3950-9510 • France, +33 (0) 3073-2425 •
Germany, +49 (0) 7253-9400-0 • Italy, +39 (0) 2 458-8841 • Japan, +81-3-3518-6630 • Korea, +82-2-575-9804 • Malaysia, +60-3-7980-7741 •
Mexico, +52 (442) 217-6235 • Shanghai, +86-21-3950-9504 • Singapore, +65-6773-9469 • Spain, +34 91 675 1292 • Sweden, +46 35-27-11-66 •
Taiwan, +886-7-288-5168 • United Kingdom, +44 (0) 115-964-0777



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Source Exif Data:

File Type                       : PDF
File Type Extension             : pdf
MIME Type                       : application/pdf
PDF Version                     : 1.6
Linearized                      : Yes
Encryption                      : Standard V2.3 (128-bit)
User Access                     : Print, Extract, Print high-res
Page Mode                       : UseOutlines
XMP Toolkit                     : 3.1-701
Create Date                     : 2007:10:17 07:50:53Z
Creator Tool                    : QuarkXPress(tm) 6.52
Modify Date                     : 2007:10:17 08:10:42-05:00
Metadata Date                   : 2007:10:17 08:10:42-05:00
Producer                        : QuarkXPress(tm) 6.52
X Press Private                 : %%DocumentProcessColors: Cyan Magenta Yellow Black.%%DocumentCustomColors: (PANTONE 485 C).%%+ (TF R(FF)G(0)B(0)
Format                          : application/pdf
Title                           : ULTRAMIC 600 Advanced Ceramic Heater
Creator                         : MarComm
Document ID                     : uuid:2cd5d4cf-7d30-bd47-85e2-c0ad032aa92c
Instance ID                     : uuid:169b61b4-3fcc-4366-9adf-ad435fdf6908
Has XFA                         : No
Page Count                      : 6
Page Layout                     : OneColumn
Author                          : MarComm

EXIF Metadata provided by EXIF.tools