Watlow Electric Ultramic 600 Users Manual Advanced Ceramic Heater

ULTRAMIC 600 to the manual a2afef1f-0973-4914-a747-19c857746434

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WATLOW

ULTRAMIC™600

ADVANCED CERAMIC HEATER

ULTRA-FAST RAMP RATES

HIGH WATT DENSITIES

NON-CONTAMINATING

Watlow’s ULTRAMIC™ 600 heaters are

designed for thermal applications where

the high performance of an advanced

ceramic heater is required to ensure

optimal effectiveness of the equipment

and process.

ULTRAMIC 600 heaters are constructed

of aluminum nitride (AIN) and incorporate

athermally matched proprietary heating

element that provides maximum

performance in challenging applications.

AIN is especially suitable for applications

requiring a clean,

non-contaminating heat source.

Additionally, the excellent geometric

stability ensures consistent part-to-part

thermal contact during heating cycles.

Watlow AIN heaters can operate up to 600°C with an ultra-

fast ramp rate of up to 150°C per second depending on the

application, heater design and process parameters. In

addition to excellent thermal characteristics, the ULTRAMIC

600 has high electrical isolation and typically provides

superior chemical resistance as compared to traditional

metal heaters.

Robust AlN ceramic

•Creates a homogeneous assembly for atmospheric and

vacuum applications

•Provides durable heater construction and thermal transfer

necessary for high temperature and long heater life

•Permits the design of a high watt density, fast responding,

heater in a very small package

•Geometrically stable due to low coefficient of thermal

expansion (CTE)

•Process temperatures up to 600°C (1112°F) depending on

application parameters

Rapid prototyping

•Finite Element Analysis (FEA) provides rapid ‘virtual’

prototyping of heater performance prior to the

manufacturing process

•Custom prototypes can be delivered in weeks rather than

months with innovative design and manufacturing practices

Superior electrical performance

•Low leakage current; <10 µA at 100°C

•Breakdown voltage; >2000VÎ(dc)

High thermal conductivity

•Makes for a fast temperature ramp rate of up to 150°C

(270°F) per second (depending on application parameters)

•Allows for quick cool-down

•Provides extremely uniform temperatures over the

heater surface

The Revolutionary ULTRAMIC™ 600

Thermocouple integrated into

assembly(patent pending)

•Bonded assembly process ensures

reliability of heater/sensor interface

•Optimized temperature sensing improves

accuracy

•High response rate in ramping applications

UL®agency compliance (pending)

•Designed to meet global safety standards

Ramp rates to

150°Cper second

UL®is a registered trademark of Underwriter’s Laboratories, Inc.

ULTRAMIC™ 600 Temperature Ramping Capabilities

ULTRAMIC 600

temperature ramp

rate as a function of

watt density. Test

completed using

Watlow’s SERIES F4

temperature controller.

•Ultra-fast temperature response

• Operating temperatures up to 600°C

• Thermal uniformity

•Excellent chemical compatibility

• Geometrically stable

• High dielectric strength

• Customized design

Why ULTRAMIC 600?

Application Examples

Semiconductor Equipment

Eutectic die bonding equipment is used in the

attachment of lead wires to the die before packaging

of the IC. Optimum bonding is achieved by ramping

the solder and lead temperature through the eutectic

state. Watlow’s ULTRAMIC 600 heater is ideal for this

application because a temperature ramp of up to

150°C/second can be achieved while also achieving a

fast cool down in preparation for processing the next

device.

•Temperature ramp rate to 150°C(270°F)/sec

•Vacuum holes and grooves

•Surface flatness 0.05 mm (0.002 in.)

•Surface finish <0.8 µm (32 µ-in.)

Analytical Instrumentation

Mass spectrometers are used to determine the

presence of trace chemicals in industrial,

environmental and clinical applications. With detection

capabilities into the part-per-trillion levels, cleanliness

is of paramount concern. For use with ion sources,

the chemical compatibility, low porosity and fine

surface finish make the ULTRAMIC 600 an excellent

choice where contamination of the sample is of

concern.

•Process temperatures to 600°C (1112˚F)

•Chemical compatibility

•High dielectric strength

•Small size and light weight

Electrical Properties

Voltage Leakage Current Dielectric Constant Dielectric Strength

24 to 480V <0.1mA 8.9 15KV/mm

Power density

Maximum and minimum power densities can vary with voltage, surface area and application

parameters. The following graph is meant as a guideline. Contact factory to determine optimum voltage

and power for your application.

Configurations and Dimensions

Maximum Dimensions 4032 mm2(6.25 in2)

Length Width Thickness Aspect Ratio

Flat Square Min: 8 mm (0.314 in.)

Max: 63.5 mm (2.5 in.)

Min: 2 mm (0.078 in.)

Max: 5 mm (0.196 in.) 1

Rectangular Max: 100 mm (3.94 in.) Min: 8 mm (0.157 in.) Min: 2 mm (0.078 in.)

Max: 5 mm (0.196 in.) <10

Inside Diameter

(I.D.)

Outside Diameter

(O.D.) Thickness Ring Wall Thickness

Ring Min: 3 mm (0.118 in.) Max: O.D. 75 mm (2.95 in.) Min: 2 mm (0.078 in.)

Max: 5 mm (0.196 in.)

Minimum wall thickness:

3mm (0.118 in.)

Surface Finish

Flatness Parallelism Surface Roughness

(Ra)

Straight Groove

Custom Feature

Hole Size

Round Diameter

<0.05 mm (0.002 in.) <0.05 mm (0.002 in.) <0.8 µm (32 µ-in.) Depth: 0.20 - 0.5 mm (0.019 in.)

Width: 0.75 - 2 mm (0.078 in.)

Min: 1 mm (0.039 in.)

Max: Outer edge 3 mm

(0.118 in.)

Ramp Rate vs. Wattage

Watt densities to

1000W/in2

Sintered Ceramic Heater Construction

ULTRAMIC™ 600 heaters are

manufactured using a proprietary sintering

process. Sintering is a method where

aluminum nitride (AlN) ceramic powder is

heated at a high temperature, which

allows contacting particles to diffuse

together. This process creates a

monolithic, geometrically stable structure

with very low porosity.

Custom designs can be rapidly accommodated

including those with complex topographies such as

holes, notches and vacuum grooves. Using a Finite

Element Analysis (FEA) technique, the heater circuit is

optimized and the thermal performance simulated

prior to manufacture.

The high thermal conductivity of AlN

and an optimized circuit layout

combine to produce superb

temperature uniformity across the

heater surface.

Non-contaminating

AlN composition

The AlN matrix is constructed of two parts. The

heating element is printed on one of the AlN

parts. Then, the parts are sintered together,

making them one homogeneous assembly.

ULTRAMIC 600 Thermal and Physical Properties

AIN

Thermal Properties Physical Properties

Thermal Conductivity (W/mK) 140 Density (g/cm3) 3.26

CTE (ppm/˚C) 4.5 Hardness (Hv@500g) 1050

Surface Temperature 600˚C (1112˚F) Flexural Strength (MPa) >250

Terminal Temperature 400˚C (752˚F)

399.5

399.7

399.9

400.1

400.4

400.6

400.8

401.1

401.3

°C

401.5

Mounting Guidelines

• Temperature <200°C (392°F): bond with high-temperature

epoxy adhesive

• Temperature >200°C (392°F): screw hole can be provided

(recommend insulation buffer such as mica spacer)

• Clamp using single or multiple-point fasteners

Optional Thermocouple

• Bonded bare wire Type K thermocouple with ceramic

insulation for <400°C (752°F)

• Drilled hole can be provided for installing a sheathed

thermocouple for <600°C (1112°F)

Lead Wire and Terminations

•Power terminals exit locations - extended from side on

square and rectangular shapes and from the top on the

ring shapes

•Flexible lead extension

•Teflon®insulated silver-plated copper lead extension

• Lead extension length - standard length 305 mm (12 in.)

How to Order

To order your standard ULTRAMIC 600 heater, please specify

Watlow code number.

If our standard units do not meet your application needs,

Watlow can rapidly manufacture the ULTRAMIC 600 to your

special requirements. For made-to-order units, please consult

the factory.

Availability

Standard heaters are available for shipment in seven business

days or less. While normally customized for the application,

these products enable a development engineer to quickly and

easily acquire a test sample to determine its suitability in the

application.

Custom configurations involving grooves, holes, product

size or surface finishes are routinely manufactured to meet

the exact requirements of the design engineer. Delivery is

dependent on complexity of order. Please consult factory.

Standard Product Ordering Information

FEN-ULT-1007

Square ❶

CER-1-01-00002 25 mm x 25 mm x 2.5 mm 967 1000 (155.04) 240

(0.98 in. x 0.98 in. x 0.1 in.)

CER-1-01-00006 50 mm x 50 mm x 2.5 mm 1938 500 (77.52) 240

(1.97 in. x 1.97 in. x 0.1 in.)

CER-1-01-00093 25 mm x 25 mm x 2.5 mm 150 150 (24) 120

(0.98 in. x 0.98 in. x 0.1 in.)

CER-1-01-00097 19 mm x 19 mm x 2.5 mm 200 357 (55.56) 120

(0.75 in. x 0.75 in. x 0.1 in.)

Rectangular ❶

CER-1-01-00001 25 mm x 15 mm x 2.5 mm 580 1000 (155.04) 120

(0.98 in. x 0.6 in. x 0.1 in.)

CER-1-01-00003 50 mm x 10 mm x 2.5 mm 582 750 (116.28) 120

(1.97 in. x 0.39 in. x 0.1 in.)

CER-1-01-00004 50 mm x 10 mm x 2.5 mm 770 1000 (155.04) 240

(1.97 in. x 0.39 in. x 0.1 in.)

CER-1-01-00005 50 mm x 25 mm x 2.5 mm 1453 750 (116.28) 240

(1.97 in. x 0.98 in. x 0.1 in.)

CER-1-01-00007 75 mm x 25 mm x 2.5 mm 1455 500 (77.52) 240

(2.95 in. x 0.98 in. x 0.1 in.)

CER-1-01-00098 25 mm x 15 mm x 2.5 mm 180 305 (48.0) 120

(0.98 in. x 0.6 in. x 0.1 in.)

CER-1-01-00105 50 mm x 25 mm x 2.5 mm 100 50 (8) 120

(1.97 in. x 0.98 in. x 0.1 in.)

Ring ❷

CER-1-02-00001 38 mm O.D./29 mm I.D. 733 1000 (155.04) 120

(1.50 in. O.D./1.14 in. I.D.)

CER-1-02-00002 77.5 mm O.D./59 mm I.D. 770 250 (38.76) 240

(3.05 in. O.D./2.32 in. I.D.)

Code Voltage

Number Size Watts W/in2(W/cm2)VÅ(ac)

❶Leads exit short side

❷Leads exit top

Standard configurations include:

•Power lead wires with Teflon®insulation 305 mm (12 in.)

•Bonded Type K thermocouple with 305 mm (12 in.) Teflon®insulated lead extension

•Surface finish (Ra) <0.8 µm (32 µ-in.)

Teflon®is a registered trademark of E.I. du Pont Nemours & Company.

To be automatically connected to the nearest North American Technical and Sales Office call:

1-800-WATLOW2

International Technical and Sales Offices: Australia, +61-3-9335-6449 • China, +86-21-3950-9510 • France, +33 (0) 3073-2425 •

Germany, +49 (0) 7253-9400-0 • Italy, +39 (0) 2 458-8841 • Japan, +81-3-3518-6630 • Korea, +82-2-575-9804 • Malaysia, +60-3-7980-7741 •

Mexico, +52 (442) 217-6235 • Shanghai, +86-21-3950-9504 • Singapore, +65-6773-9469 • Spain, +34 91 675 1292 • Sweden, +46 35-27-11-66 •

Taiwan, +886-7-288-5168 • United Kingdom, +44 (0) 115-964-0777